CN115014713A - Ultraviolet parallel light detection device and detection method for micro-channel plate collimator - Google Patents

Abstract

The invention discloses an ultraviolet parallel light detection device and a detection method for a microchannel plate collimator. According to the invention, the ultraviolet light is used for replacing X rays, so that the problem that the X rays are difficult to generate parallel light is avoided, and the size of equipment is further reduced; ultraviolet rays are not radiated, so that the defect of long detection period caused by X-ray radiation is avoided, and the danger of personnel exposure is reduced; the invention has the advantages of simple structure, convenient operation, high detection result precision, high safety and low cost, and can effectively improve the operation efficiency.

Description

A microchannel plate collimator ultraviolet parallel light detection device and detection method

technical field

The invention relates to the technical field of ultraviolet light imaging devices, in particular to a microchannel plate collimator ultraviolet parallel light detection device and a detection method.

Background technique

Capillary lead glass microchannel plate refers to a lead glass panel full of tiny through-hole arrays, generally used as X-ray optical components, also known as capillary collimators. Before the application of the microchannel plate, it is necessary to test each microchannel plate to ensure that its parameters meet the requirements of use.

The existing detection method for the microchannel plate is to use a beamline detection device, which uses X-ray parallel light incident at different angles for detection, but the above detection method has many technical problems. The first is the large size of the beamline detection device. In order to ensure the parallelism of X-rays, the size of the beamline detection device is more than 100 meters, which is large in size and high in cost, and cannot be constructed in large quantities. The second is the strong radiation of X-rays. When X-rays are used for detection, the detection device needs to be shielded, and the radiation characteristics of X-rays and the shielding device will prevent the operator from achieving efficient operation, and the operator is more susceptible to X-ray radiation due to long-term operation.

The present invention provides a microchannel plate collimator ultraviolet parallel light detection device and detection method to solve the above problems.

SUMMARY OF THE INVENTION

The invention provides an ultraviolet parallel light detection device and a detection method for a microchannel plate collimator, and solves the technical problem of using X-rays for detection in the prior art.

The technical scheme adopted by the present invention to solve the above-mentioned technical problems is:

A microchannel plate collimator ultraviolet parallel light detection device, comprising an ultraviolet light source, a stage, a collimator and an ultraviolet light power meter, the collimator is arranged on the stage, the ultraviolet light source and the ultraviolet light The power meters are respectively arranged on the front and rear sides of the collimator, and the ultraviolet light source, the collimator and the ultraviolet light power meter are located on the same axis;

The ultraviolet light source includes a light source, a single-mode optical fiber and an optical fiber collimator, the light source is connected to the optical fiber collimator through the single-mode optical fiber, and the optical fiber collimator emits parallel ultraviolet light.

Further, the wavelength range of ultraviolet light emitted by the light source is 288-338 nm.

Further, the detection index of the collimator includes pointing accuracy, opening area ratio and field of view, and the pointing accuracy includes hole-hole parallelism and hole-surface perpendicularity.

Further, the stage has movements in two-dimensional directions of horizontal rotation and vertical pitch.

Further, the distance between the optical fiber collimator and the ultraviolet light power meter is not less than 150mm.

Further, the divergence angle of the ultraviolet light emitted by the fiber collimator is not greater than 9.7".

Preferably, the light source is an ultraviolet LED light source.

A detection method of a microchannel plate collimator ultraviolet parallel light detection device, comprising the following steps:

S1, system preparation: according to the requirements of measurement accuracy, adjust the relative position of the ultraviolet light source and the ultraviolet light power meter, and ensure that they are on the same axis;

S2, calibration measurement: when the collimator is not placed, the ultraviolet light power meter receives the light intensity of the ultraviolet light source as the calibration data;

S3, place the collimator: place the collimator on the stage, and adjust the ultraviolet light source, the collimator and the ultraviolet light power meter to be on the same axis;

S4, X-direction measurement: control the stage to rotate along the X-direction, the rotation step is 1', receive ultraviolet light through the ultraviolet light power meter at each division, and obtain the relationship between the ultraviolet light intensity and the angle in the X-direction ;

S5, X-direction reset: rotate the stage to the angle with the maximum ultraviolet light intensity in the X-direction;

S6, Y-direction measurement: keep the X-direction angle unchanged, drive the two-dimensional turntable to rotate along the Y-direction, the rotation step is 1', receive ultraviolet light through the ultraviolet light power meter at each division, and obtain the Y-direction The relationship between UV light intensity and angle;

S7, processing data: fitting a rocking curve to the UV light intensity-angle relationship in the Y direction.

Further, the peak height of the rocking curve in step S7 represents the aperture area ratio parameter of the collimator; the angle corresponding to the peak represents the pointing accuracy parameter; the full width at half maximum of the spectral line represents the field angle parameter.

The beneficial effects of the present invention are as follows:

The use of ultraviolet light to replace X-rays avoids the problem that X-rays are difficult to generate parallel light, thereby reducing the size of the equipment; secondly, there is no ultraviolet radiation, which also avoids the defects of long detection cycles caused by X-ray radiation, and reduces personnel exposure. danger;

The invention has the advantages of simple structure, convenient operation, high detection result accuracy, high safety and low cost, and can effectively improve the operation efficiency.

Description of drawings

Fig. 1 is the device structure schematic diagram of the present invention;

Figure 2 is a schematic diagram of the UV rocking curve of the present invention.

Reference numerals: 1-UV light source, 11-Light source, 12-Single-mode fiber, 13-Fiber collimator, 2-Object stage, 3-Collimator, 4-UV light power meter.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

In the description of this patent, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientation or positional relationship indicated by "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present patent and simplifying the description, rather than indicating or implying The device or element referred to must have, be constructed, and operate in a particular orientation and is not to be construed as a limitation of this patent.

The X-ray detection micro-channel plate collimator is currently used because it is applied to a detection satellite that detects X-rays. In order to ensure accurate and reliable results, the existing technologies all use X-rays to perform the detection operation of the micro-channel plate collimator. The existing method for detecting the X-ray performance of the microchannel plate collimator is that the X-ray parallel light is incident at different angles, but the X-ray parallel light is difficult to obtain. Due to the short wavelength of the X-ray, it can only be obtained when the grazing incidence conditions are met. However, the method of generating X-ray parallel light by reflection, the cost and technical difficulty of realizing the optical components of the above method are very high. For example, the method adopted in the prior art is to extend the optical path L, and the beamline lengths of the currently used beamline detection devices are respectively 500m, 120m and 103m.

When analyzing the optical characteristics of the detection microchannel plate collimator, it was found that the detection microchannel plate collimator has a high absorption rate of ultraviolet light, and the light absorption rate is greater than 97% within the sensitive wavelength range of the microchannel plate collimator to ultraviolet light. Therefore, ultraviolet light is used for the detection of the microchannel plate collimator, which improves the detection efficiency and ensures the accuracy of the detection results to meet the requirements of use. In addition, ultraviolet parallel light is easier to obtain. Generally, the ultraviolet light source is incident on the surface of the reflector at a specific position through a single-mode fiber, and the reflected parallel light can be obtained.

As shown in Figure 1, a microchannel plate collimator ultraviolet parallel light detection device includes an ultraviolet light source 1, a stage 2, a collimator 3 and an ultraviolet light power meter 4, and the collimator 3 is arranged on the carrier On the stage 2, the ultraviolet light source 1 and the ultraviolet light power meter 4 are respectively arranged on the front and rear sides of the collimator 3, and the ultraviolet light source 1, the collimator 3 and the ultraviolet light power meter 4 are located on the same axis.

After the ultraviolet rays are irradiated, the ultraviolet rays irradiated on the body of the collimator 3 are absorbed, and the ultraviolet rays injected into the through holes of the collimator 3 will pass through the through holes and be received by the ultraviolet light power meter 4 to obtain the luminous flux. Irradiation angle, the incident angle of the ultraviolet light entering the through hole is different, resulting in different reflection times of the ultraviolet light in the through hole. , and finally the UV rocking curve is obtained.

The ultraviolet light source 1 includes a light source 11, a single-mode optical fiber 12, and a fiber collimator 13. The light source 11 is connected to the optical fiber collimator 13 through the single-mode optical fiber 12, and the optical fiber collimator 13 emits parallel ultraviolet light.

Further, the wavelength range of ultraviolet light emitted by the light source 11 is 288-338 nm, and the transmittance of the collimator 3 for this wavelength range of ultraviolet light is lower than 2%, which can meet the measurement requirements.

Further, the detection indexes of the collimator 3 include pointing accuracy, opening area ratio and field of view, and the pointing accuracy includes hole-hole parallelism and hole-surface perpendicularity. The hole-hole parallelism is the degree of parallelism between the micro-holes, and the expected value is 0”; the hole-surface perpendicularity is the vertical degree between the micro-hole and the mounting surface, and the expected value is 90°; the opening area ratio is the micro-hole area The proportion of the total area; the field of view is the area that can be effectively observed, which is the field of view angle θ.

Further, the stage 2 is provided with a through hole, the collimator 3 is provided at the through hole of the stage 2, and the stage 2 has horizontal rotation and vertical pitch two-dimensional directions. Action, horizontal rotation is used to achieve X-direction rotation, and vertical pitch is used to achieve Y-direction rotation.

Further, the distance between the optical fiber collimator 13 and the ultraviolet light power meter 4 is not less than 150 mm.

Further, the divergence angle of the ultraviolet light emitted by the fiber collimator 13 is not greater than 9.7″, and the calculation formula of the reflection divergence angle of the fiber collimator 13 is:

In the formula, the RFL is 50.8mm, the MFD of the single-mode fiber 12 is 2.0-2.4um, and the divergence angle is not greater than 9.7″, which meets the detection accuracy requirements.

Preferably, the parallelism of the ultraviolet light emitted by the fiber collimator 13 is not greater than 20 arcsec.

Preferably, the light source 11 is an ultraviolet LED light source, and the ultraviolet light power meter 4 is a photomultiplier tube.

As shown in Figure 2, a detection method of a microchannel plate collimator ultraviolet parallel light detection device includes the following steps:

S1, system preparation: according to the requirements of measurement accuracy, adjust the relative positions of the ultraviolet light source 1 and the ultraviolet light power meter 4, and ensure that they are on the same axis;

S2, calibration measurement: when the collimator 3 is not placed, the ultraviolet light power meter 4 receives the light intensity of the ultraviolet light source 1 as the calibration data;

S3, place the collimator: place the collimator 3 on the stage 2, and adjust the ultraviolet light source 1, the collimator 3 and the ultraviolet light power meter 4 to be located on the same axis;

S4, X-direction measurement: control the stage 2 to rotate along the X-direction, the rotation step is 1', receive ultraviolet light through the ultraviolet light power meter 4 at each division, and obtain the ultraviolet light intensity-angle to the X-direction Relationship;

S5, X-direction reset: rotate the stage 2 to the angle with the maximum ultraviolet light intensity in the X-direction;

S6, Y-direction measurement: keep the X-direction angle unchanged, drive the two-dimensional turntable to rotate along the Y-direction, the rotation step is 1', receive ultraviolet light through the ultraviolet light power meter 4 at each division, and obtain the Y The relationship between the ultraviolet light intensity in the direction and the angle;

S7, processing data: fitting a rocking curve to the UV light intensity-angle relationship in the Y direction.

The X-direction measurement is performed first to find the angle with the largest X-direction light intensity, and then the Y-direction measurement is performed at the angle with the largest X-direction light intensity to ensure the accuracy of the results.

Further, the peak height of the UV rocking curve in step S7 represents the aperture area ratio parameter of the collimator; the angle corresponding to the peak represents the pointing accuracy parameter; and the full width at half maximum of the spectral line represents the field angle parameter.

It will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, but that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments are to be regarded in all respects as illustrative and not restrictive, and the scope of the invention is to be defined by the appended claims rather than the foregoing description, which are therefore intended to fall within the scope of the claims. All changes that come within the meaning and range of equivalents of , are intended to be embraced within the invention, and any reference signs in the claims shall not be construed as limiting the involved claim.

Claims (9)

1. a micro-channel plate collimator ultraviolet parallel light detection device, is characterized in that, comprises ultraviolet light source (1), stage (2), collimator (3) and ultraviolet light power meter (4), The collimator (3) is arranged on the stage (2), and the ultraviolet light source (1) and the ultraviolet light power meter (4) are respectively arranged on the front and rear sides of the collimator (3). (1), the collimator (3) and the ultraviolet light power meter (4) are located on the same axis; The ultraviolet light source (1) comprises a light source (11), a single-mode optical fiber (12) and a fiber collimator (13), and the light source (11) is connected to the optical fiber collimator (13) through a single-mode optical fiber (12) , the fiber collimator (13) emits parallel ultraviolet light. 2 . The ultraviolet parallel light detection device of a microchannel plate collimator according to claim 1 , wherein the wavelength range of ultraviolet light emitted by the light source ( 11 ) is 288-338 nm. 3 . 3. A microchannel plate collimator ultraviolet parallel light detection device according to claim 1, characterized in that: the detection index of the collimator (3) comprises pointing accuracy, opening area ratio and field of view, so The pointing accuracy includes hole-hole parallelism and hole-surface perpendicularity. 4 . The ultraviolet parallel light detection device of a microchannel plate collimator according to claim 1 , wherein the object stage ( 2 ) has actions in two-dimensional directions of horizontal rotation and vertical pitch. 5 . 5. A microchannel plate collimator ultraviolet parallel light detection device according to claim 1, wherein the distance between the optical fiber collimator (13) and the ultraviolet light power meter (4) is not less than 150 mm. 6. A microchannel plate collimator ultraviolet parallel light detection device according to claim 1, wherein the divergence angle of the ultraviolet light emitted by the optical fiber collimator (13) is not greater than 9.7". 7. A microchannel plate collimator ultraviolet parallel light detection device according to claim 1, wherein the light source (11) is an ultraviolet LED light source. 8. the detection method of a kind of microchannel plate collimator ultraviolet parallel light detection device according to any one of claim 1-7, is characterized in that, comprises the following steps: S1, system preparation: according to the requirements of measurement accuracy, adjust the relative positions of the ultraviolet light source (1) and the ultraviolet light power meter (4), and ensure that they are on the same axis; S2, calibration measurement: when the collimator (3) is not placed, the ultraviolet light power meter (4) receives the light intensity of the ultraviolet light source (1) as the calibration data; S3, place the collimator: place the collimator (3) on the stage (2), and adjust the ultraviolet light source (1), the collimator (3) and the ultraviolet light power meter (4) to be on the same axis; S4, X-direction measurement: control the stage (2) to rotate along the X-direction, the rotation step is 1', receive ultraviolet light through the ultraviolet light power meter (4) at each division, and obtain the ultraviolet light to the X-direction The relationship between light intensity and angle; S5, X-direction reset: turn the stage (2) to the angle with the maximum ultraviolet light intensity in the X-direction; S6, Y-direction measurement: keep the X-direction angle unchanged, drive the two-dimensional turntable to rotate along the Y-direction, the rotation step is 1', receive ultraviolet light through the ultraviolet light power meter (4) at each division, and obtain The relationship between the ultraviolet light intensity and the angle in the Y direction; S7, processing data: fitting a rocking curve to the UV light intensity-angle relationship in the Y direction. 9. The detection method of a microchannel plate collimator ultraviolet parallel light detection device according to claim 8, wherein the peak height of the rocking curve in step S7 represents the open area ratio parameter of the collimator; The angle corresponding to the peak represents the pointing accuracy parameter; the full width at half maximum of the spectral line represents the field angle parameter.

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