CN114976835A - Optically controlled broad-spectrum switchable single-mode laser, preparation method and application thereof - Google Patents
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Abstract
Description
技术领域technical field
本发明属于有机微纳激光技术领域,具体涉及一种光控宽谱双色可切换单模激光器及其制备方法和应用。The invention belongs to the technical field of organic micro-nano lasers, and in particular relates to an optically controlled broad-spectrum two-color switchable single-mode laser and a preparation method and application thereof.
背景技术Background technique
有机微纳激光器由于其具有在微纳尺度下提供强相干光的特点,在生物化学传感、激光显示和集成光子学回路等领域中具有广阔的应用前景。随着小型化集成光子学回路的发展,人们要求微纳激光器具有更高的信息密度和带宽,因此希望这些激光器同时具备输出波长可切换及高的光谱纯度的特点,即波长可切换单模激光器。有机光功能材料具有丰富的能级结构和激发态过程,为构筑多波长可切换的激光器提供了理想的材料平台。然而,由于单种增益介质的带隙宽度相对有限,基于单增益介质构筑的波长可切换激光器的调谐范围十分受限。共振能量转移过程(FRET)可以实现从给体分子到受体分子的能量转移,有效地扩展了激光输出波长的调谐区间,因此有望实现宽谱可切换的激光。然而,通常FRET效率受给体和受体化学计量比控制,一旦体系中激光染料的浓度固定,其输出激光的波长往往恒定,难以基于这种机制实现输出激光波长的动态调控,从而限制了其在可切换激光中的应用。因此,发展一种给受体化学计量比动态可调控的FRET激光系统将十分有利于构筑宽谱可切换的单模微纳激光器。Organic micro-nano lasers have broad application prospects in the fields of biochemical sensing, laser display and integrated photonic circuits due to their characteristics of providing strong coherent light at the micro-nano scale. With the development of miniaturized integrated photonics circuits, micro-nano lasers are required to have higher information density and bandwidth. Therefore, it is hoped that these lasers have the characteristics of switchable output wavelength and high spectral purity at the same time, that is, wavelength-switchable single-mode lasers . Organic photofunctional materials have rich energy level structures and excited state processes, which provide an ideal material platform for the construction of multi-wavelength switchable lasers. However, due to the relatively limited band gap width of a single gain medium, the tuning range of a wavelength-switchable laser based on a single gain medium is very limited. The resonance energy transfer process (FRET) can realize the energy transfer from the donor molecule to the acceptor molecule, which effectively expands the tuning range of the laser output wavelength, so it is expected to realize a broad-spectrum switchable laser. However, the efficiency of FRET is usually controlled by the stoichiometric ratio of the donor and the acceptor. Once the concentration of the laser dye in the system is fixed, the wavelength of the output laser is often constant. Applications in switchable lasers. Therefore, the development of a FRET laser system with dynamically tunable stoichiometry of the acceptor will be very beneficial to the construction of a broad-spectrum switchable single-mode micro-nano laser.
发明内容SUMMARY OF THE INVENTION
为了改善现有技术的不足,本发明采用如下技术方案:In order to improve the deficiencies of the prior art, the present invention adopts the following technical solutions:
一种光控宽谱可切换单模激光器,所述光控过程由可控光异构化的光致变色分子实现,光致变色增益材料中的异构化过程可实现对能量转移受体的浓度调节,用于动态控制微腔增益区间的变化;所述单模激光器由可控加工制备的耦合双盘结构实现。A light-controlled broad-spectrum switchable single-mode laser, the light-controlled process is realized by photochromic molecules with controllable light isomerization, and the isomerization process in the photochromic gain material can realize the energy transfer acceptor. The concentration adjustment is used to dynamically control the change of the gain interval of the microcavity; the single-mode laser is realized by a coupled double-disk structure prepared by controllable processing.
本发明还提供上述光控宽谱可切换单模激光器的制备方法,所述方法包括如下步骤:The present invention also provides a method for preparing the above-mentioned optically controlled broad-spectrum switchable single-mode laser, the method comprising the following steps:
1)聚合物LOR胶作为微腔结构的支柱部分,在导电基底上旋涂成膜,加热烘干,除去溶剂,得到LOR胶薄膜样品;1) The polymer LOR glue is used as the pillar part of the micro-cavity structure, and is spin-coated on the conductive substrate to form a film, heated and dried, and the solvent is removed to obtain the LOR glue film sample;
2)将给受体增益介质均匀分散在聚合物光刻胶的氯苯溶液中,在步骤1) 所得的LOR胶薄膜样品上旋涂成膜,加热烘干,除去溶剂,得到涂覆染料掺杂的聚合物光刻胶基底;2) Uniformly disperse the acceptor gain medium in the chlorobenzene solution of the polymer photoresist, spin-coat the LOR film sample obtained in step 1) to form a film, heat and dry it, remove the solvent, and obtain a coating dye blend. Heteropolymer photoresist substrates;
3)按照预先设计好的图案,采用电子束刻蚀(EBL)法,在步骤2)制备的聚合物薄膜样品上制备得到耦合微腔的结构;3) According to the pre-designed pattern, the structure of the coupled microcavity is prepared on the polymer film sample prepared in step 2) by using the electron beam etching (EBL) method;
4)将步骤3)得到的样品用显影液进行显影和定影,得到聚合物耦合微腔结构;4) developing and fixing the sample obtained in step 3) with a developer to obtain a polymer-coupled microcavity structure;
5)将步骤4)得到的样品用LOR显影液进行显影和定影,在聚合物微盘下部形成底切结构,得到带有支撑结构的有机微纳激光器,即为所述光控宽谱可切换单模激光器。5) The sample obtained in step 4) is developed and fixed with LOR developing solution, and an undercut structure is formed at the lower part of the polymer microdisk to obtain an organic micro-nano laser with a supporting structure, which is the optically controlled broad-spectrum switchable monolith. mode laser.
本发明还提供上述光控宽谱可切换单模激光器的调节方法,利用上述有机微纳器件的制备方法,制得有支撑结构的单个圆形有机微纳激光器,通过紫外照射可控制光致变色分子的光异构化过程,可以有效地调节微腔内受体的浓度,从而调节给受体之间的能量转移过程,进而实现宽谱可切换的微纳激光。The present invention also provides a method for adjusting the above-mentioned optically controlled broad-spectrum switchable single-mode laser. Using the above-mentioned preparation method of an organic micro-nano device, a single circular organic micro-nano laser with a supporting structure is prepared, and photochromic can be controlled by ultraviolet irradiation. The photoisomerization process of molecules can effectively adjust the concentration of the receptors in the microcavity, thereby regulating the energy transfer process between the receptors, and then realizing a broad-spectrum switchable micro-nano laser.
优选地,上述光控宽谱可切换激光器的调节方法包括如下步骤:Preferably, the above-mentioned adjustment method of the optically controlled broad-spectrum switchable laser includes the following steps:
1)将耦合微盘同时作为光学增益单元和激光滤波单元,未对微盘实施紫外照射,两个微腔同时实现给体单模激光的出射;1) The coupled microdisk is used as an optical gain unit and a laser filter unit at the same time, no ultraviolet irradiation is performed on the microdisk, and the two microcavities simultaneously realize the output of the donor single-mode laser;
2)在步骤1)的基础上,对耦合结构其中一个微盘实施紫外照射,两个不同发光颜色的微盘分别作为增益单元和滤波单元,可同时实现给体和受体的单模激光出射;2) On the basis of step 1), ultraviolet irradiation is performed on one of the microdisks of the coupling structure, and the two microdisks with different luminescence colors are respectively used as a gain unit and a filter unit, which can simultaneously realize the single-mode laser output of the donor and the acceptor;
3)在步骤2)的基础上,对耦合结构的两个微盘均实施紫外照射,两个微腔同时实现受体单模激光的出射。3) On the basis of step 2), ultraviolet irradiation is performed on the two microdisks of the coupling structure, and the two microcavities simultaneously realize the output of the acceptor single-mode laser light.
本发明还提供上述光控宽谱可切换单模激光器在生物化学传感、激光显示或集成光子学回路领域中的应用,优选用于高密度地光子学集成。The invention also provides the application of the above-mentioned optically controlled broad-spectrum switchable single-mode laser in the fields of biochemical sensing, laser display or integrated photonics circuit, preferably for high-density photonics integration.
本发明的有益效果:Beneficial effects of the present invention:
发明人惊讶地发现,有机材料具有优异的掺杂灵活性,可以与激光染料等功能分子相掺杂,实现可见光谱范围内的主动发光的光学功能器件的制备,所述光学功能器件包括但不局限于微纳激光。有机材料还具有良好的机械柔性和可加工性,可制备成高质量的微纳光学微腔;所述微纳光学结构可以对光子进行良好的限域和调制。The inventors have surprisingly found that organic materials have excellent doping flexibility and can be doped with functional molecules such as laser dyes to realize the preparation of active luminescent optical functional devices in the visible spectrum range, including but not Limited to micro-nano lasers. Organic materials also have good mechanical flexibility and processability, and can be fabricated into high-quality micro-nano optical microcavities; the micro-nano optical structures can perform good confinement and modulation of photons.
1.本发明提供了一种光控宽谱可切换单模激光器及其制备方法,所述制备方式是采用电子束加工的方法将给受体染料掺杂的聚合物薄膜加工成带有支撑结构的有机微纳耦合谐振腔,所述受体染料为光致变色分子,光致变色增益材料中的异构化过程可实现对能量转移受体的浓度调节,用于动态控制微腔发光波长的变化。所述耦合谐振腔可为增益介质的受激辐射提供光学反馈和模式选择,实现单模激光的出射。1. The present invention provides a light-controlled broad-spectrum switchable single-mode laser and a preparation method thereof. The preparation method is to process a polymer film doped with an acceptor dye into a support structure by using an electron beam processing method. The organic micro-nano coupled resonant cavity, the acceptor dye is a photochromic molecule, and the isomerization process in the photochromic gain material can realize the concentration adjustment of the energy transfer acceptor, which is used to dynamically control the emission wavelength of the microcavity. Variety. The coupled resonator can provide optical feedback and mode selection for the stimulated radiation of the gain medium, so as to realize the output of single-mode laser light.
2.本发明提供了一种光控宽谱可切换单模激光器的调节方法,所述光控过程可实现耦合结构中单个微腔增益区间的调节。分别对耦合结构中两个微盘内能量转移过程进行调控,可实现宽谱可切换单模激光的可控调节。2. The present invention provides an adjustment method for an optically controlled broad-spectrum switchable single-mode laser, and the optically controlled process can realize the adjustment of the gain interval of a single microcavity in the coupling structure. The energy transfer process in the two microdisks in the coupled structure can be regulated respectively, and the controllable regulation of the broad-spectrum switchable single-mode laser can be realized.
动态能量转移过程是由具有的光异构化过程的光致变色分子作为受体实现的;所述光异构化过程是由光致变色分子的光诱导结构转变引起的,其中一种异构体作为能量受体,光控受体浓度改变可有效调节给受体之间的能量转移过程,实现宽谱可调的微纳激光。单模激光由耦合谐振腔实现,耦合谐振腔可为增益介质的受激辐射提供光学反馈和模式选择,实现单模激光的出射;所述宽谱可调的单模激光器是通过对耦合结构内的两个谐振腔内能量转移过程分别调控实现的,不仅拓宽了激光波长的调节范围,同时实现了在同一体系内双波长的可控切换;所述宽谱可调的单模激光器可用于高密度地光子学集成。The dynamic energy transfer process is achieved by a photochromic molecule with a photoisomerization process as an acceptor; the photoisomerization process is caused by the light-induced structural transformation of the photochromic molecule, one of which is isomerized. The body acts as an energy receptor, and the change of the concentration of the photo-controlled receptor can effectively regulate the energy transfer process between the receptors and realize a wide-spectrum tunable micro-nano laser. The single-mode laser is realized by a coupled resonator, which can provide optical feedback and mode selection for the stimulated radiation of the gain medium, so as to realize the output of the single-mode laser; The energy transfer process in the two resonators is controlled separately, which not only broadens the adjustment range of the laser wavelength, but also realizes the controllable switching of dual wavelengths in the same system; the broad-spectrum tunable single-mode laser can be used for high Density Geophotonics Integration.
附图说明Description of drawings
图1为实施例1的带有支撑结构的有机微纳谐振腔的制备过程示意图。FIG. 1 is a schematic diagram of the preparation process of the organic micro-nano resonant cavity with a support structure of Example 1. FIG.
图2为实施例1的带有支撑结构的有机微纳谐振腔的正面和侧面SEM图。FIG. 2 is the front and side SEM images of the organic micro-nano resonator with the support structure of Example 1. FIG.
图3为实施例1的可控光异构化受体和OPV给体实现动态能量转移的示意图。FIG. 3 is a schematic diagram of dynamic energy transfer achieved by the controllable photoisomerization acceptor and OPV donor in Example 1. FIG.
图4为实施例1的给受体掺杂的有机微纳谐振腔的随着飞秒泵浦光功率变化的光致发光光谱。4 is the photoluminescence spectrum of the organic micro-nano resonator doped with the acceptor of Example 1 as a function of femtosecond pump light power.
图5为实施例1的给受体掺杂的有机微纳谐振腔的紫外曝光后随着飞秒泵浦光功率变化的光致发光光谱。FIG. 5 is the photoluminescence spectrum of the organic micro-nano resonator doped with the acceptor of Example 1 after the ultraviolet exposure with the change of the power of the femtosecond pump light.
图6为实施例1的给受体掺杂的有机微纳谐振腔中双色激光的调控。FIG. 6 is the regulation of the two-color laser in the organic micro-nano resonator doped with the acceptor of Example 1. FIG.
图7为实施例4的两个不同尺寸的带有支撑结构的有机微纳激光相互耦合得到的双盘耦合微腔在不同紫外曝光时间下的荧光显微照片。FIG. 7 is a fluorescence micrograph of a double-disk coupled microcavity obtained by coupling two organic micro-nano lasers with supporting structures of different sizes to each other under different ultraviolet exposure times in Example 4. FIG.
图8为实施例4制备的掺杂有给受体染料的双盘耦合结构的激光性能测试图。FIG. 8 is a graph of the laser performance test of the double-disk coupling structure doped with the acceptor dye prepared in Example 4. FIG.
具体实施方式Detailed ways
如前所述,本发明提供一种光控宽谱可切换单模激光器。As mentioned above, the present invention provides an optically controlled broad-spectrum switchable single-mode laser.
在本发明的一个优选实施方式中,所述激光器具有微纳结构且掺杂激光染料,其可以作为激光光源。In a preferred embodiment of the present invention, the laser has a micro-nano structure and is doped with laser dye, which can be used as a laser light source.
在本发明的一个优选实施方式中,有机微纳单模激光器是带有支撑结构的有机微纳谐振腔,靠近基底一端的支撑结构可以很好地将有机微纳谐振腔与基底分隔开来,有效地减少了基底所带来的光场损耗,这将大大提高光学有机微纳激光的品质因子,有利于实现低阈值微纳激光器的制备。In a preferred embodiment of the present invention, the organic micro-nano single-mode laser is an organic micro-nano resonator with a support structure, and the support structure near one end of the substrate can well separate the organic micro-nano resonator from the substrate , effectively reducing the optical field loss caused by the substrate, which will greatly improve the quality factor of the optical organic micro-nano laser, which is beneficial to the realization of the low-threshold micro-nano laser.
在本发明的一个优选实施方式中,所述带有支撑结构的有机微纳单模激光器的材质为可在EBL条件下发生分子链断裂的聚合物,示例性地,所述有机微纳激光器的材质为聚甲基丙烯酸甲酯(PMMA)光刻胶等。In a preferred embodiment of the present invention, the material of the organic micro-nano single-mode laser with a supporting structure is a polymer that can undergo molecular chain scission under EBL conditions. The material is polymethyl methacrylate (PMMA) photoresist and the like.
在本发明的一个优选实施方式中,所述带有支撑结构的有机微纳单模激光器中包括给受体增益介质,所述给受体的增益介质的浓度比为10-100wt%,例如为50wt%;所述受体增益介质选自具有光异构化的光致变色分子,所述光致变色分子选自具备四能级结构的激光染料,例如可以是螺吡喃类光致变色分子;例如式(1)所示的1’,3’-二氢-1’,3’,3’-三甲基-6-硝基螺[2H-1-苯并吡喃-2,2’-(2H)- 吲哚](BIPS),式(1)经光照开环得到式(2),式(2)是具有四能级结构的增益分子(BIPS-MC);所述给体增益介质选自和受体增益分子吸收发射相匹配的绿光激光染料,例如式(3)所示的 1,4-bis(R-cyano-4-diphenylaminostyryl)-2,5-diphenylbenzene(OPV)。In a preferred embodiment of the present invention, the organic micro-nano single-mode laser with a supporting structure includes a gain medium for the acceptor, and the concentration ratio of the gain medium for the acceptor is 10-100 wt %, for example, 50wt%; the acceptor gain medium is selected from photochromic molecules with photoisomerization, and the photochromic molecules are selected from laser dyes with four-level structure, such as spiropyran photochromic molecules ; For example, 1',3'-dihydro-1',3',3'-trimethyl-6-nitrospiro[2H-1-benzopyran-2,2' shown in formula (1) -(2H)-indole] (BIPS), formula (1) is ring-opened by light to obtain formula (2), formula (2) is a gain molecule (BIPS-MC) with a four-level structure; the donor gain The medium is selected from a green laser dye that matches the absorption and emission of the acceptor gain molecule, such as 1,4-bis(R-cyano-4-diphenylaminostyryl)-2,5-diphenylbenzene(OPV) shown in formula (3).
示例性地,所述有机微纳激光的直径为6-20μm(例如为6μm、7μm、8μm、 9μm、10μm、11μm、12μm、13μm、14μm、15μm、20μm),厚度(或定义为高度)为1-2μm(例如为1μm、1.2μm、1.5μm、1.8μm、2μm),优选地,所述有机微纳激光的直径为15μm,厚度为1.5μm。Exemplarily, the diameter of the organic micro-nano laser is 6-20 μm (for example, 6 μm, 7 μm, 8 μm, 9 μm, 10 μm, 11 μm, 12 μm, 13 μm, 14 μm, 15 μm, 20 μm), and the thickness (or defined as height) is 1-2 μm (for example, 1 μm, 1.2 μm, 1.5 μm, 1.8 μm, 2 μm), preferably, the organic micro-nano laser has a diameter of 15 μm and a thickness of 1.5 μm.
在本发明的一个优选实施方式中,所述支撑结构的形状为各向同性的圆柱结构。若有机微纳激光与基底接触,会导致光场泄露,激光阈值升高。所述支撑结构的高度为1-5μm(例如为1μm、1.5μm、2μm、2.5μm、3μm、3.5μm、4μm、 5μm),优选地,所述支撑结构的高度为2μm。In a preferred embodiment of the present invention, the shape of the support structure is an isotropic cylindrical structure. If the organic micro-nano laser is in contact with the substrate, the light field will leak and the laser threshold will increase. The height of the support structure is 1-5 μm (for example, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm, 5 μm), preferably, the height of the supporting structure is 2 μm.
在本发明的一个优选实施方式中,有机微纳单模激光器是两个不同尺寸的带有支撑结构的有机微纳激光相互耦合得到的双盘耦合微纳单模激光。示例性地,所述双盘耦合微纳单模激光器的直径为6-20μm(例如d1/d2为8/10μm、 8/12μm、10/12μm、12/14μm、12/16μm),优选地,所述有机微纳激光的直径为12/14μm。In a preferred embodiment of the present invention, the organic micro-nano single-mode laser is a double-disk coupled micro-nano single-mode laser obtained by coupling two organic micro-nano lasers with supporting structures of different sizes to each other. Exemplarily, the diameter of the double-disk coupled micro-nano single-mode laser is 6-20 μm (for example, d 1 /d 2 is 8/10 μm, 8/12 μm, 10/12 μm, 12/14 μm, 12/16 μm), preferably The diameter of the organic micro-nano laser is 12/14 μm.
在本发明的一个优选实施方式中,所述有机微纳激光表面光滑,能够有效的对光子进行限域,传输损耗小,光与物质的相互作用较强。In a preferred embodiment of the present invention, the organic micro-nano laser has a smooth surface, which can effectively confine photons, with small transmission loss and strong interaction between light and matter.
在本发明的一个优选实施方式中,所述用于构筑光控宽谱可切换激光器的介质材料具有良好的光响应性,在紫外光和可见光的照射下,有助于实现光调控的微纳激光器件的制备。In a preferred embodiment of the present invention, the dielectric material for constructing a light-controlled broad-spectrum switchable laser has good photoresponsivity, and under the irradiation of ultraviolet light and visible light, it is helpful to realize light-controlled micro-nano Fabrication of laser devices.
如前所述,本发明还提供上述光控宽谱可切换单模激光器的制备方法,所述方法包括如下步骤:As mentioned above, the present invention also provides a method for preparing the above-mentioned optically controlled broad-spectrum switchable single-mode laser, the method comprising the following steps:
1)聚合物LOR胶作为微腔结构的支柱部分,在导电基底上旋涂成膜,加热烘干,除去溶剂,得到LOR胶薄膜样品;1) The polymer LOR glue is used as the pillar part of the micro-cavity structure, and is spin-coated on the conductive substrate to form a film, heated and dried, and the solvent is removed to obtain the LOR glue film sample;
2)将给受体增益介质均匀分散在聚合物PMMA的有机溶剂中,在步骤1) 所得的基底上旋涂成膜,加热烘干,除去溶剂,得到涂覆染料掺杂的PMMA基底;2) uniformly dispersing the acceptor gain medium in the organic solvent of the polymer PMMA, spin-coating to form a film on the substrate obtained in step 1), heating and drying, and removing the solvent to obtain a dye-doped PMMA substrate;
3)按照预先设计好的图案,采用电子束加工法,在步骤2)制备的PMMA 薄膜样品上制备得到耦合微腔的结构;3) According to the pre-designed pattern, using the electron beam processing method, prepare the structure of the coupled microcavity on the PMMA film sample prepared in step 2);
4)将步骤3)得到的样品用PMMA显影液进行显影和定影,得到PMMA耦合微腔结构;4) developing and fixing the sample obtained in step 3) with a PMMA developer to obtain a PMMA coupled microcavity structure;
5)将步骤4)得到的样品用LOR显影液进行显影和定影,在PMMA微盘下部形成底切结构,得到带有支撑结构的有机微纳单模激光器,即所述光控宽谱可切换单模激光器。5) The sample obtained in step 4) is developed and fixed with LOR developing solution, and an undercut structure is formed at the lower part of the PMMA microdisk to obtain an organic micro-nano single-mode laser with a supporting structure, that is, the light-controlled broad-spectrum switchable single-mode laser is obtained. mode laser.
在本发明的一个优选实施方式中,在步骤(1)中,所述聚合物LOR层优选为LOR5A,该聚合物易于成膜,在刻蚀条件下(如电子束轰击下)不会发生变化,不会溶于PMMA的显影液,从而可实现各向同性的底切结构。In a preferred embodiment of the present invention, in step (1), the polymer LOR layer is preferably LOR5A, which is easy to form a film and will not change under etching conditions (such as electron beam bombardment). , a developer that will not dissolve in PMMA, so that an isotropic undercut structure can be achieved.
在本发明的一个优选实施方式中,在步骤(1)中,所述聚合物LOR层的厚度为1-5μm。优选地,所述LOR层的高度为2μm。In a preferred embodiment of the present invention, in step (1), the thickness of the polymer LOR layer is 1-5 μm. Preferably, the height of the LOR layer is 2 μm.
在本发明的一个优选实施方式中,在步骤(1)中,所述导电基底可以是ITO、硅片、银基底等。优选的,所述导电基底是硅片。In a preferred embodiment of the present invention, in step (1), the conductive substrate may be ITO, silicon wafer, silver substrate, or the like. Preferably, the conductive substrate is a silicon wafer.
在本发明的一个优选实施方式中,在步骤(1)中,所述加热温度为170-190 ℃,优选180℃,所述加热时间为5-20分钟内,优选10分钟。In a preferred embodiment of the present invention, in step (1), the heating temperature is 170-190° C., preferably 180° C., and the heating time is within 5-20 minutes, preferably 10 minutes.
在本发明的一个优选实施方式中,在步骤(2)中,所述给受体增益介质在聚合物PMMA(聚甲基丙烯酸甲酯)中的掺杂质量比为10-100wt%,例如为 50wt%,所述给受体增益介质的掺杂既能够提供足够的光学增益,同时还能提供光学调制的变化单元。In a preferred embodiment of the present invention, in step (2), the doping mass ratio of the acceptor gain medium in the polymer PMMA (polymethyl methacrylate) is 10-100 wt %, for example, 50wt%, the doping of the acceptor gain medium can not only provide sufficient optical gain, but also provide a variable unit of optical modulation.
在本发明的一个优选实施方式中,在步骤(2)中,所述聚合物优选为聚甲基丙烯酸甲酯(PMMA),该聚合物易于成膜,可在刻蚀条件下(如电子束轰击下)发生共价键断裂,在同种溶剂中的溶解性发生变化,从而实现图案化。In a preferred embodiment of the present invention, in step (2), the polymer is preferably polymethyl methacrylate (PMMA), which is easy to form a film and can be easily etched under etching conditions (such as electron beam Under bombardment), the covalent bond is broken, and the solubility in the same solvent changes, thereby realizing patterning.
在本发明的一个优选实施方式中,在步骤(2)中,所述有机溶剂可以是二甲基甲酰胺(DMF)、甲苯、氯苯、氯仿、二氯甲烷、三氯甲烷等中的一种或多种。优选的,所述有机溶剂是氯苯。In a preferred embodiment of the present invention, in step (2), the organic solvent may be one of dimethylformamide (DMF), toluene, chlorobenzene, chloroform, dichloromethane, chloroform, etc. one or more. Preferably, the organic solvent is chlorobenzene.
在本发明的一个优选实施方式中,在步骤(2)中,所述聚合物在有机溶剂中的质量百分比为8%-16%,例如为10%。In a preferred embodiment of the present invention, in step (2), the mass percentage of the polymer in the organic solvent is 8%-16%, for example, 10%.
在本发明的一个优选实施方式中,在步骤(2)中,所述聚合物PMMA层的厚度为1-2微米。In a preferred embodiment of the present invention, in step (2), the thickness of the polymer PMMA layer is 1-2 microns.
在本发明的一个优选实施方式中,在步骤(2)中,所述加热温度为170-190 ℃,优选180℃,所述加热时间为1-5分钟内,优选2分钟。In a preferred embodiment of the present invention, in step (2), the heating temperature is 170-190° C., preferably 180° C., and the heating time is within 1-5 minutes, preferably 2 minutes.
在本发明的一个优选实施方式中,在步骤(3)中,所述电子束的电压为25-30 kV,优选30.0kV,所述电子束的电子束斑为3.3-3.5,优选3.50。In a preferred embodiment of the present invention, in step (3), the voltage of the electron beam is 25-30 kV, preferably 30.0 kV, and the electron beam spot of the electron beam is 3.3-3.5, preferably 3.50.
在本发明的一个优选实施方式中,在步骤(4)中,所述聚合物PMMA的显影液是MIBK:IPA=1:3的混合溶剂,定影液是IPA溶剂。In a preferred embodiment of the present invention, in step (4), the developer of the polymer PMMA is a mixed solvent of MIBK:IPA=1:3, and the fixer is an IPA solvent.
在本发明的一个优选实施方式中,在步骤(4)中,所述显影时间为20-50 秒,优选30秒,定影时间是20-50秒,优选30秒。In a preferred embodiment of the present invention, in step (4), the developing time is 20-50 seconds, preferably 30 seconds, and the fixing time is 20-50 seconds, preferably 30 seconds.
在本发明的一个优选实施方式中,在步骤(5)中,所述聚合物LOR的显影液是101developer。In a preferred embodiment of the present invention, in step (5), the developer of the polymer LOR is 101 developer.
在本发明的一个优选实施方式中,在步骤(5)中,所述显影时间为3-7分钟,优选5分钟,定影时间是20-50秒,优选30秒。In a preferred embodiment of the present invention, in step (5), the developing time is 3-7 minutes, preferably 5 minutes, and the fixing time is 20-50 seconds, preferably 30 seconds.
本发明提供上述光控宽谱可切换单模激光器的调节方法,利用上述微纳器件的制备方法,制得有支撑结构的耦合微盘结构。通过分别控制两个聚合物微盘内光致变色分子的光异构化过程,可以有效地调节受体的浓度,从而控制给受体之间的能量转移,可实现宽谱可切换的单模激光器。The present invention provides a method for adjusting the above-mentioned optically controlled broad-spectrum switchable single-mode laser. Using the above-mentioned preparation method for a micro-nano device, a coupled micro-disk structure with a support structure is prepared. By separately controlling the photoisomerization process of photochromic molecules in the two polymer microdisks, the concentration of the receptors can be effectively adjusted, thereby controlling the energy transfer between the receptors, and a broad-spectrum switchable single-mode laser can be realized .
下面结合具体实施例,进一步阐述本发明。应理解,这些实施例仅用于说明本发明而不用于限制本发明的范围。此外,应理解,在阅读了本发明所记载的内容之后,本领域技术人员可以对本发明作各种改动或修改,这些等价形式同样落于本发明所限定的范围。The present invention will be further described below in conjunction with specific embodiments. It should be understood that these examples are only used to illustrate the present invention and not to limit the scope of the present invention. In addition, it should be understood that after reading the contents described in the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the limited scope of the present invention.
除非另有说明,以下实施例中使用的原料和试剂均为市售商品,或者可以通过已知方法制备。Unless otherwise stated, the starting materials and reagents used in the following examples are commercially available or can be prepared by known methods.
实施例1Example 1
将LOR5A作为结构的支柱部分,采用匀胶机在硅基底上匀胶得到LOR聚合物薄膜,180℃烘烤10分钟去除残余溶剂。之后配置质量浓度百分比为10%的 PMMA聚合物氯苯溶液,掺杂质量浓度比为50%的BIPS和OPV染料,采用匀胶机在LOR聚合物薄膜上匀胶得到PMMA聚合物薄膜,180℃烘烤两分钟去除残余稀释溶剂。随后按照设计好的微盘图案对聚合物薄膜进行电子束曝光,电压为 30.0kV,电子束斑为3.50。曝光后对PMMA和LOR分别显影,得到带有支撑结构的有机微纳激光器。The LOR5A was used as the pillar part of the structure, and the LOR polymer film was obtained by homogenizing on the silicon substrate with a homogenizer, and the residual solvent was removed by baking at 180 °C for 10 minutes. After that, a PMMA polymer chlorobenzene solution with a mass concentration percentage of 10% was prepared, and BIPS and OPV dyes with a mass concentration ratio of 50% were doped. The PMMA polymer film was obtained by homogenizing the LOR polymer film with a glue dispenser, and the temperature was 180°C. Bake for two minutes to remove residual dilution solvent. Then, the polymer film was exposed to electron beam according to the designed microdisk pattern, the voltage was 30.0kV, and the electron beam spot was 3.50. After exposure, the PMMA and LOR were developed respectively to obtain an organic micro-nano laser with a supporting structure.
图1为实施例1的支撑结构的有机微盘的制备过程流程图。从图1中可以看出,通过EBL制备得到了多个独立的带有支撑结构的有机微纳激光器,所述有机微纳激光的形貌为微盘结构。FIG. 1 is a flow chart of the preparation process of the organic microdisk of the support structure of Example 1. FIG. It can be seen from FIG. 1 that a plurality of independent organic micro-nano lasers with supporting structures are prepared by EBL, and the morphology of the organic micro-nano lasers is a micro-disk structure.
图2中的A和B为为单一有机微纳激光的正面及侧面扫描电镜图。其中扫描电镜照片A和B对应的是直径d=12μm微纳激光器,表面光滑无缺陷。从图2可以看出,所述有机微纳激光中起到光学反馈的腔体与基底分离,且盘腔的直径厚度高度可控,与设计的尺寸基本相符。其中图2中的A和B标尺为5μm。A and B in FIG. 2 are the front and side SEM images of a single organic micro-nano laser. The scanning electron microscope photos A and B correspond to a micro-nano laser with a diameter of d=12 μm, and the surface is smooth and defect-free. It can be seen from FIG. 2 that the cavity for optical feedback in the organic micro-nano laser is separated from the substrate, and the diameter and thickness of the disk cavity are highly controllable, which is basically consistent with the designed size. The A and B scales in Figure 2 are 5 μm.
实施例2Example 2
动态能量转移过程的分析和表征Analysis and Characterization of Dynamic Energy Transfer Processes
具体如图3和图4所示,图3为给受体之间的能量转移过程,在紫外光和可见光照射下,BIPS分子中C-O键发生断裂和恢复,使得光致变色分子可以在无色的螺吡喃(BIPS)和红色的部花青(BIPS-MC)之间发生可逆地转换。BIPS-MC的吸收光谱和OPV的发射光谱有很大的光谱重叠,有利于两个分子之间发生共振能量转移。图4为随紫外曝光时间的变化,给受体掺杂的PMMA薄膜的荧光光谱的变化。随着紫外曝光时间增长,BIPS逐渐异构化为BIPS-MC,PMMA薄膜中 BIPS-MC的浓度增加,OPV和BIPS-MC之间的能量转移效率增加,薄膜发光由550nm处的给发光逐渐转变为690nm处的受体发光。上述光控能量转移过程提供一个动态调节双波长增益的方式,为实现宽谱可调激光提供了材料基础。Specifically, as shown in Figure 3 and Figure 4, Figure 3 shows the energy transfer process between the donor and the acceptor. Under the irradiation of ultraviolet light and visible light, the C-O bond in the BIPS molecule is broken and restored, so that the photochromic molecule can be colorless. A reversible transition occurs between the spiropyran (BIPS) and the red merocyanine (BIPS-MC). The absorption spectrum of BIPS-MC and the emission spectrum of OPV have a large spectral overlap, which is favorable for resonance energy transfer between the two molecules. FIG. 4 shows the change of the fluorescence spectrum of the PMMA film doped with the acceptor with the change of the UV exposure time. With the increase of UV exposure time, BIPS gradually isomerized into BIPS-MC, the concentration of BIPS-MC in the PMMA film increased, the energy transfer efficiency between OPV and BIPS-MC increased, and the film luminescence gradually changed from the given luminescence at 550 nm. It emits light for the acceptor at 690 nm. The above-mentioned optically controlled energy transfer process provides a way to dynamically adjust the dual-wavelength gain, and provides a material basis for the realization of a wide-spectrum tunable laser.
实施例3Example 3
宽谱可调激光的分析和表征Analysis and Characterization of Broad Spectrum Tunable Lasers
图5和图6为制备例1制备的掺杂有BIPS的直径为16μm,厚度为1.5μm,支撑高度为2μm的有机微纳激光的响应性能测试图。图5中A为在紫外光照射后上述有机微盘随着泵浦功率变化的光致发光光谱;图5中B为上述有机微盘的激光峰强度相对于泵浦功率的变化关系,说明在我们制备的有机微盘内实现了低阈值的激光。图6中的A为上述有机微盘的激光随紫外光照变化的共振能量转移过程,在紫外照射之前,无能量受体,实现OPV给体的受激发射;在紫外光照射时,能量转移受体浓度逐渐增多,能量转移过程增强,实现受体增益介质的受激发射。图6中的B为上述有机微盘在不同紫外光照时间下550nm处的荧光衰减曲线;图6中的C为对其衰减曲线进行拟合得到不同紫外光照时间下的荧光寿命及计算所得给受体之间的能量转移效率,图中寿命及能量转移效率变化图也说明了上述OPV和BIPS-MC之间发生了共振能量转移。图6中的D为上述有机微盘的可调双色激光谱,从中可以看出,560nm处的激光谱随紫外光照时间的增加而逐渐变弱;相反,700nm处的激光逐渐增强。上述结果证明光致变色分子BIPS具有一个很好的光响应性,由BIPS-MC做能量受体可以通过光照控制能量转移效率,可实现多波长激光的动态调节。FIG. 5 and FIG. 6 are the response performance test diagrams of the organic micro-nano laser with a diameter of 16 μm, a thickness of 1.5 μm and a support height of 2 μm doped with BIPS prepared in Preparation Example 1. In Fig. 5, A is the photoluminescence spectrum of the above-mentioned organic microdisc with the pump power after irradiation with ultraviolet light; in Fig. 5, B is the relationship between the laser peak intensity of the above-mentioned organic microdisc and the pump power, indicating that in our preparation Low-threshold lasing is achieved within the organic microdisks. A in Figure 6 is the resonant energy transfer process of the above-mentioned organic microdisc's laser light changing with ultraviolet light. Before ultraviolet light irradiation, there is no energy acceptor, and the stimulated emission of the OPV donor is realized; during ultraviolet light irradiation, the energy transfer acceptor The concentration gradually increases, the energy transfer process is enhanced, and the stimulated emission of the acceptor gain medium is realized. B in Fig. 6 is the fluorescence decay curve of the above-mentioned organic microdisk at 550 nm under different UV illumination times; C in Fig. 6 is the fluorescence lifetime obtained by fitting the decay curve under different UV illumination times and calculated for the acceptor The energy transfer efficiency between OPV and BIPS-MC, the lifetime and the change of energy transfer efficiency in the figure also illustrate the resonance energy transfer between OPV and BIPS-MC. D in Figure 6 is the tunable two-color laser spectrum of the above organic microdisk. It can be seen that the laser spectrum at 560 nm gradually weakens with the increase of UV irradiation time; on the contrary, the laser at 700 nm gradually increases. The above results prove that the photochromic molecule BIPS has a good photoresponsivity. Using BIPS-MC as the energy acceptor can control the energy transfer efficiency through illumination, and can realize the dynamic adjustment of multi-wavelength lasers.
实施例4Example 4
其他步骤同实施例1,区别仅在于对所述薄膜样品进行电子束曝光时,根据已设计的有机微纳激光模型对薄膜进行可控曝光,即曝光过程中所导入的数据图案为两个不同尺寸的微盘相互耦合得到的带有支撑结构的双盘耦合激光器。Other steps are the same as in Example 1, the difference is only that when the film sample is exposed to electron beam, the film is controllably exposed according to the designed organic micro-nano laser model, that is, the data patterns imported during the exposure process are two different. A double-disk-coupled laser with a supporting structure is obtained by coupling the microdisks of different sizes to each other.
实施例4制备得到两个不同尺寸的带有支撑结构的有机微纳激光相互耦合得到的双盘耦合结构。具体如图7所示,图7为实施例4的两个不同尺寸的带有支撑结构的有机微纳激光相互耦合得到的双盘耦合微腔在不同紫外光照时间下的荧光显微照片(A、B、C)。其中图标尺为20μm。从图7中可以看出,上述两个不同尺寸的带有支撑结构的有机双盘耦合微腔的尺寸不同,直径分别为12μm 和14μm,双盘之间的耦合间距为0.5μm,并且具有很好地光响应性。In Example 4, a double-disk coupling structure obtained by coupling two organic micro-nano lasers with supporting structures of different sizes to each other was prepared. Specifically, as shown in FIG. 7 , FIG. 7 is the fluorescence micrographs of the double-disk coupled microcavity obtained by coupling two organic micro-nano lasers with supporting structures of different sizes to each other under different ultraviolet irradiation times (A , B, C). The scale of the graph is 20 μm. It can be seen from Fig. 7 that the above-mentioned two organic double-disk coupling microcavities with different sizes with supporting structures have different sizes, with diameters of 12 μm and 14 μm, respectively, and the coupling spacing between the double disks is 0.5 μm, and has a very large size. Good light responsiveness.
图8为实施例4制备的掺杂有给受体染料的双盘耦合结构的激光性能测试图。其中图8中的A为双盘耦合微盘结构得到稳定的单模激光,从中可以看出,由实施例1的得到的两个直径分别为12μm和14μm的单盘激光,在增益区间内有一个模式被选择性放大,得到耦合微盘单模激光出射。图8中的B为上述双盘耦合微纳激光的激光峰强度相对于泵浦功率的变化关系,可以在较大泵浦功率范围内实现单模激光。图8中的C为上述双盘耦合结构基于动态能量转移过程在不同紫外光照射条件下得到的单模激光的变化。将耦合微盘同时作为光学增益单元和激光滤波单元,未对微盘实施紫外照射,两个微腔同时实现给体单模激光的出射(550nm);对耦合结构其中一个微盘实施紫外照射,两个不同发光颜色的微盘分别作为增益单元和滤波单元,可同时实现给体和受体的单模激光出射 (550nm和700nm);对耦合结构的两个微盘均实施紫外照射,两个微腔同时实现受体单模激光的出射(700nm)。其中双盘耦合微纳激光中的两个微盘的直径分别为12μm和14μm,支撑高度2μm,厚度1.5μm的微盘。图8中标尺为10μm。FIG. 8 is a graph of the laser performance test of the double-disk coupling structure doped with the acceptor dye prepared in Example 4. FIG. Among them, A in Figure 8 is a stable single-mode laser obtained by the double-disk coupled microdisk structure. It can be seen from the two single-disk lasers with diameters of 12 μm and 14 μm obtained in Example 1 that there is a single-mode laser in the gain interval. The modes are selectively amplified to obtain coupled microdisk single-mode laser output. B in Figure 8 is the relationship between the laser peak intensity of the above-mentioned dual-disk coupled micro-nano laser with respect to the pump power, and single-mode laser can be realized within a larger pump power range. C in FIG. 8 is the variation of the single-mode laser light obtained by the above-mentioned double-disk coupling structure based on the dynamic energy transfer process under different ultraviolet light irradiation conditions. The coupled microdisk is used as both the optical gain unit and the laser filter unit, and the microdisk is not irradiated with ultraviolet light, and the two microcavities simultaneously realize the output of the donor single-mode laser (550nm); the UV irradiation is performed on one of the microdisks in the coupling structure, and the two are different. The microdisks with luminescent colors are used as gain unit and filter unit respectively, which can realize single-mode laser output (550nm and 700nm) of the donor and acceptor at the same time; UV irradiation is applied to the two microdisks of the coupling structure, and the two microcavities simultaneously realize the receiving The exit of bulk single-mode laser light (700 nm). The diameters of the two microdisks in the dual-disk coupling micro-nano laser are 12 μm and 14 μm, respectively, and the supporting height is 2 μm and the thickness is 1.5 μm. The scale bar in Figure 8 is 10 μm.
以上,对本发明的实施方式进行了说明。但是,本发明不限定于上述实施方式。凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1301420A (en) * | 1998-03-20 | 2001-06-27 | 雷维奥公司 | Solid state dye laser |
US20020080842A1 (en) * | 2000-10-10 | 2002-06-27 | Korea Advanced Institute Of Science And Technology | Evanescent-wave coupled microcavity laser |
CN104253372A (en) * | 2013-06-27 | 2014-12-31 | 中国科学院化学研究所 | Whispering gallery mode photonic device and preparation method thereof |
US20150234211A1 (en) * | 2014-02-14 | 2015-08-20 | Wisconsin Alumni Research Foundation | Free-space laser tuning of optical microcavities |
CN108808433A (en) * | 2017-04-26 | 2018-11-13 | 中国科学院化学研究所 | A kind of Whispering-gallery-mode photonic device and its preparation method and application with pillar support |
-
2021
- 2021-02-25 CN CN202011263158.XA patent/CN114976835A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1301420A (en) * | 1998-03-20 | 2001-06-27 | 雷维奥公司 | Solid state dye laser |
US20020080842A1 (en) * | 2000-10-10 | 2002-06-27 | Korea Advanced Institute Of Science And Technology | Evanescent-wave coupled microcavity laser |
CN104253372A (en) * | 2013-06-27 | 2014-12-31 | 中国科学院化学研究所 | Whispering gallery mode photonic device and preparation method thereof |
US20150234211A1 (en) * | 2014-02-14 | 2015-08-20 | Wisconsin Alumni Research Foundation | Free-space laser tuning of optical microcavities |
CN108808433A (en) * | 2017-04-26 | 2018-11-13 | 中国科学院化学研究所 | A kind of Whispering-gallery-mode photonic device and its preparation method and application with pillar support |
Non-Patent Citations (2)
Title |
---|
CHAN QIAO, ET AL.: "an optically reconfigurable förster resonance energy transfer process for broadband switchable organic single-mode microlasers", CCS CHEM., vol. 3, 11 February 2021 (2021-02-11), pages 624 - 632 * |
赵金阳;闫永丽;赵永生;姚建年;: "有机微纳激光研究进展", 中国科学:化学, no. 02, 20 February 2018 (2018-02-20) * |
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