CN114966965B - Longitudinal scanning antenna based on track type sub-wavelength grating waveguide array - Google Patents
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Abstract
Description
技术领域Technical field
本发明涉及一种基于轨道型亚波长光栅波导阵列的纵向扫描天线。The invention relates to a longitudinal scanning antenna based on an orbital sub-wavelength grating waveguide array.
背景技术Background technique
目前，随着大规模集成光子学技术的高速发展，基于光波导的光学相控阵(OPA)是实现高集成度，高稳定性和低成本波束控制系统的一种有效途径。光探测、测距和自由空间光通信都依赖于自由空间光束的实时精确整形和扫描。其中，集成光学天线是基于光波导OPAs的关键组件之一，可以提供紧凑，小型轻量化的扫描系统，而无需复杂的机械运动部件。Currently, with the rapid development of large-scale integrated photonics technology, optical phased array (OPA) based on optical waveguides is an effective way to achieve high integration, high stability and low-cost beam control systems. Light detection, ranging, and free-space optical communications all rely on the precise shaping and scanning of free-space beams in real time. Among them, the integrated optical antenna is one of the key components of optical waveguide-based OPAs, which can provide a compact, small and lightweight scanning system without complex mechanical moving parts.
亚波长光栅(SWG)结构的光子器件特征尺寸小于入射光波长，其反射率、透射率、偏振特性以及光谱特性都显示出与常规衍射光学器件截然不同的特性，因此具有更大的实际应用价值。The characteristic size of the photonic device with the subwavelength grating (SWG) structure is smaller than the wavelength of the incident light. Its reflectivity, transmittance, polarization characteristics and spectral characteristics all show completely different characteristics from conventional diffractive optical devices, so it has greater practical application value. .
与绝缘体上硅(SOI)相比，氮化硅波导的低折射率对比度允许更精确地控制光栅调制强度，这反过来有利于更长的天线的制造。也有研究利用SWG来控制波导的模态限制，能够有效的控制光栅强度，从而实现较长天线的设计。但上述方法均存在光学天线的波长灵敏度较低的问题，即远场光束的倾斜角随入射光波长变化的幅度较小，不能实现较大的纵向扫描范围和宽视场。The low refractive index contrast of silicon nitride waveguides allows more precise control of grating modulation intensity compared to silicon-on-insulator (SOI), which in turn facilitates the fabrication of longer antennas. There are also studies using SWG to control the modal restrictions of waveguides, which can effectively control the intensity of the grating, thereby enabling the design of longer antennas. However, the above methods all have the problem of low wavelength sensitivity of the optical antenna, that is, the tilt angle of the far-field beam changes slightly with the wavelength of the incident light, and cannot achieve a large longitudinal scanning range and wide field of view.
发明内容Contents of the invention
技术问题：针对现有技术存在的上述问题，提出一种基于轨道型亚波长光栅波导阵列的纵向扫描天线，具有SWG结构特性，并通过轨道型波导结构来增强天线的纵向扫描能力和自由空间的辐射能力。Technical problem: In view of the above-mentioned problems existing in the existing technology, a longitudinal scanning antenna based on an orbital sub-wavelength grating waveguide array is proposed. It has SWG structural characteristics and uses the orbital waveguide structure to enhance the longitudinal scanning capability and free space of the antenna. Radiation ability.
技术方案：本发明的一种基于轨道型亚波长光栅波导阵列的纵向扫描天线包括硅基底、介质埋氧层、光源输入端口、中心轨道型波导、轨道型亚波长光栅阵列；其中，硅基底的上面设置介质埋氧层，在介质埋氧层的上面沿介质埋氧层的长度方向设有中心轨道型波导，所述轨道型亚波长光栅阵列分别对称设置在所述中心轨道型波导两侧呈周期性排列，光源输入端口位于中心轨道型波导的一端。Technical solution: A longitudinal scanning antenna based on a track-type sub-wavelength grating waveguide array of the present invention includes a silicon substrate, a dielectric buried oxide layer, a light source input port, a center track-type waveguide, and a track-type sub-wavelength grating array; wherein, the silicon base A dielectric buried oxide layer is provided above, and a central track-type waveguide is provided above the dielectric buried oxide layer along the length direction of the dielectric buried oxide layer. The track-type sub-wavelength grating arrays are symmetrically arranged on both sides of the center track-type waveguide. Arranged periodically, the light source input port is located at one end of the central orbital waveguide.
所述介质埋氧层的材质为二氧化硅。The dielectric buried oxide layer is made of silicon dioxide.
所述中心轨道型波导的材质为硅。The center track waveguide is made of silicon.
所述轨道型亚波长光栅阵列的材质为硅。The track-type sub-wavelength grating array is made of silicon.
所述光源输入端口的材质为硅。The light source input port is made of silicon.
所述中心轨道型波导的横截面为一个矩形，在该矩形的上面设有与中心轨道型波导同长度的凸条。The cross-section of the central rail-type waveguide is a rectangle, and a convex strip with the same length as the central rail-type waveguide is provided on the top of the rectangle.
所述轨道型亚波长光栅阵列的横截面为一个矩形，在该矩形的上面设有与轨道型亚波长光栅阵列同长度的凸条。The cross-section of the track-type sub-wavelength grating array is a rectangle, and convex strips with the same length as the track-type sub-wavelength grating array are provided on the top of the rectangle.
所述中心轨道型波导的宽度为0.4μm-0.55um。The width of the central track waveguide is 0.4μm-0.55um.
所述轨道型亚波长光栅阵列的宽度为0.19μm-0.23um。The width of the track-type sub-wavelength grating array is 0.19 μm-0.23 μm.
所述凸条的宽度为40nm-120nm，高度为50nm-100nm。The width of the convex strips is 40nm-120nm, and the height is 50nm-100nm.
工作原理为：该基于亚波长光栅的纵向宽扫描轨道型天线的主体部分采用绝缘体上硅(SOI)结构，能够实现较好的器件隔离作用。硅基底上方设有介质埋氧层，并通过位于介质埋氧层上方的中心轨道型波导进行模式限制。采用轨道型结构能够进一步提升入射光在光栅中传播时的纵向衍射能力和灵敏度，从而实现更大的纵向扫描范围和更强的自由空间辐射能力。左右两侧的轨道型亚波长光栅阵列与中心轨道型波导的倏逝场相互作用，利用连续域中束缚态(BIC)来抑制侧向发射，从而实现天线的辐射远场在整个工作波长范围内仅有一个光斑。The working principle is as follows: The main part of the longitudinally wide scanning track-type antenna based on sub-wavelength grating adopts a silicon-on-insulator (SOI) structure, which can achieve better device isolation. There is a dielectric buried oxide layer above the silicon substrate, and mode confinement is performed through a central track-type waveguide located above the dielectric buried oxide layer. The use of an orbital structure can further improve the longitudinal diffraction capability and sensitivity of incident light when propagating in the grating, thereby achieving a larger longitudinal scanning range and stronger free space radiation capability. The orbital subwavelength grating arrays on the left and right sides interact with the evanescent field of the central orbital waveguide, using bound states in the continuum domain (BIC) to suppress lateral emission, thereby achieving the radiation far field of the antenna within the entire operating wavelength range. There is only one spot of light.
在仅考虑波导基模的情况下进行光源输入，在该亚波长光栅天线中，传输效率、远场光束分布、波长灵敏度等指标都具有优良的性能。入射光波长在1500nm-1600nm时，天线的辐射远场仅出现一个光斑且能量聚集在光斑的正中心，实现了较好的侧向发射抑制，且天线的波长灵敏度得到显著提升。By considering only the fundamental mode of the waveguide for light source input, the sub-wavelength grating antenna has excellent performance in transmission efficiency, far-field beam distribution, wavelength sensitivity and other indicators. When the incident light wavelength is between 1500nm and 1600nm, only one light spot appears in the far field of the antenna's radiation and the energy is concentrated in the center of the light spot, achieving better lateral emission suppression, and the wavelength sensitivity of the antenna is significantly improved.
有益效果：相比于现有技术，本发明在传统亚波长光栅的基础上进行拓展。光学天线采用与CMOS工艺兼容的绝缘体上硅(SOI)结构，通过中心轨道型波导进行模式限制，再通过分布于中心轨道型波导两侧的轨道型亚波长光栅阵列进行调控，从而抑制天线的侧向发射。经仿真发现，该结构能够进一步提升入射光在光栅中传播时的纵向衍射能力和灵敏度，即通过发射波长调谐在纵向上实现更大的扫描范围。同时得益于亚波长结构对光栅强度的有效降低，可以实现毫米级的天线长度。Beneficial effects: Compared with the existing technology, the present invention expands on the basis of traditional sub-wavelength gratings. The optical antenna adopts a silicon-on-insulator (SOI) structure compatible with the CMOS process. The mode is limited by a central orbital waveguide, and then regulated by an orbital sub-wavelength grating array distributed on both sides of the central orbital waveguide, thereby suppressing the side effects of the antenna. To launch. Through simulation, it was found that this structure can further improve the longitudinal diffraction capability and sensitivity when incident light propagates in the grating, that is, a larger scanning range can be achieved in the longitudinal direction through emission wavelength tuning. At the same time, thanks to the effective reduction of grating intensity by the sub-wavelength structure, millimeter-level antenna lengths can be achieved.
附图说明Description of drawings
图1为本发明纵向扫描天线的俯视结构示意图。Figure 1 is a schematic top view of the longitudinal scanning antenna of the present invention.
图2为本发明纵向扫描天线的横截面结构示意图。Figure 2 is a schematic cross-sectional structural diagram of the longitudinal scanning antenna of the present invention.
图3为本发明纵向扫描天线的横截面模式分布。Figure 3 shows the cross-sectional mode distribution of the longitudinal scanning antenna of the present invention.
图4为本发明纵向扫描天线的表面电场分布。Figure 4 shows the surface electric field distribution of the longitudinal scanning antenna of the present invention.
图5为本发明纵向扫描天线的传输效率曲线。Figure 5 is the transmission efficiency curve of the longitudinal scanning antenna of the present invention.
图6为本发明纵向扫描天线的远场光束分布。Figure 6 shows the far-field beam distribution of the longitudinal scanning antenna of the present invention.
图7为本发明纵向扫描天线的纵向发射角随波长变化的能量分布。Figure 7 shows the energy distribution of the longitudinal emission angle as a function of wavelength of the longitudinal scanning antenna of the present invention.
图8为本发明纵向扫描天线的纵向发射角与波长的关系。Figure 8 shows the relationship between the longitudinal emission angle and wavelength of the longitudinal scanning antenna of the present invention.
图9为本发明纵向扫描天线的3D远场辐射图。Figure 9 is a 3D far-field radiation pattern of the longitudinal scanning antenna of the present invention.
图10为本发明纵向扫描天线的远场波束图。Figure 10 is a far-field beam diagram of the longitudinal scanning antenna of the present invention.
图中有：硅基底1、介质埋氧层2、光源输入端口3、中心轨道型波导4、轨道型亚波长光栅阵列5。The figure includes: silicon substrate 1, dielectric buried oxide layer 2, light source input port 3, center track waveguide 4, track sub-wavelength grating array 5.
具体实施方式Detailed ways
下面结合附图对本发明做更进一步的解释。The present invention will be further explained below in conjunction with the accompanying drawings.
如图1、图2所示的一种基于轨道型亚波长光栅波导阵列的纵向扫描天线，包括硅基底1、介质埋氧层2、光源输入端口3、中心轨道型波导4、轨道型亚波长光栅阵列5。As shown in Figures 1 and 2, a longitudinal scanning antenna based on a track-type sub-wavelength grating waveguide array includes a silicon substrate 1, a dielectric buried oxide layer 2, a light source input port 3, a central track-type waveguide 4, and a track-type sub-wavelength Grating array 5.
轨道型亚波长光栅阵列5分别对称设置在中心轨道型波导4两侧；轨道型亚波长光栅阵列5呈周期性排列。The track-type sub-wavelength grating arrays 5 are symmetrically arranged on both sides of the central track-type waveguide 4; the track-type sub-wavelength grating arrays 5 are arranged periodically.
作为仿真示例，取典型入射波长1550nm，设置中心轨道型波导宽度为0.42μm；凸条宽度为50nm，高度为70nm；轨道型亚波长光栅阵列宽度为0.2μm，阵列周期为0.63μm，阵列占空比为0.3；中心轨道型波导与轨道型亚波长光栅阵列间距为0.21μm；为提高仿真效率和节省仿真资源，天线长度设置为50μm，得到以下图示结果。As a simulation example, take a typical incident wavelength of 1550nm, set the width of the central orbital waveguide to 0.42μm; the width of the convex strip to 50nm and the height to 70nm; the width of the orbital subwavelength grating array to be 0.2μm, the array period to 0.63μm, and the array duty The ratio is 0.3; the distance between the center track waveguide and the track subwavelength grating array is 0.21 μm; in order to improve simulation efficiency and save simulation resources, the antenna length is set to 50 μm, and the following graphic results are obtained.
如图3所示，纵向扫描天线的横截面模式分布，可以看出，波导的模式被很好地限制在了中心轨道型波导中；且由于左右对称轨道型亚波长光栅阵列的存在，侧面电场被抑制在亚波长周期性阵列附近，降低了波导横向电场的衰减。As shown in Figure 3, the cross-sectional mode distribution of the longitudinal scanning antenna, it can be seen that the waveguide mode is well restricted in the center orbit type waveguide; and due to the existence of the left and right symmetrical orbit type sub-wavelength grating array, the side electric field Being suppressed near the subwavelength periodic array, the attenuation of the transverse electric field of the waveguide is reduced.
如图4所示，纵向扫描天线的部分表面电场分布，可以看出，入射光沿轨道型天线传输时仍能保持较高的电场强度，体现了其优良的传输特性。如图5所示，天线的传输效率曲线，在整个波长范围内，天线的传输效率保持在76％及以上。As shown in Figure 4, the partial surface electric field distribution of the longitudinal scanning antenna can be seen that the incident light can still maintain a high electric field intensity when transmitted along the track-type antenna, reflecting its excellent transmission characteristics. As shown in Figure 5, the transmission efficiency curve of the antenna, the transmission efficiency of the antenna remains at 76% and above in the entire wavelength range.
如图6所示，纵向扫描天线的远场光束分布，天线的远场光束分布均匀且仅有一个光斑，表明辐射能量的侧向发射抑制良好，没有出现远场分裂，能量较为集中。As shown in Figure 6, the far-field beam distribution of the longitudinal scanning antenna is uniform and has only one spot, indicating that the lateral emission of radiated energy is well suppressed, there is no far-field splitting, and the energy is relatively concentrated.
如图7所示，纵向扫描天线的纵向发射角随波长变化的能量分布，在整个波长范围内，天线的远场辐射强度均能保持一致。如图8所示，天线的纵向发射角与波长的关系，即该天线的波长可调谐能力，经过计算得到其发射波长可调谐能力比传统的光栅天线提升了65％以上。As shown in Figure 7, the energy distribution of the longitudinal emission angle of the longitudinal scanning antenna changes with the wavelength. The far-field radiation intensity of the antenna can remain consistent throughout the entire wavelength range. As shown in Figure 8, the relationship between the longitudinal emission angle of the antenna and the wavelength, that is, the wavelength tunability of the antenna, is calculated. Its emission wavelength tunability is more than 65% higher than that of traditional grating antennas.
如图9所示，纵向扫描天线的3D远场辐射图，天线的波束面形状良好，无畸形现象，且辐射能量聚集在波束面的顶端，可以实现良好的远场发射效果。如图10所示，天线的远场波束图，通过对远场数据进行归一化处理，显示了波束的空间方位。与3D远场辐射图相互对照，证明了仿真结果的准确性和纵向扫描天线设计的合理性。As shown in Figure 9, the 3D far-field radiation pattern of the longitudinally scanning antenna shows that the antenna's beam surface has a good shape and no deformity, and the radiation energy is concentrated at the top of the beam surface, which can achieve good far-field emission effects. As shown in Figure 10, the far-field beam diagram of the antenna shows the spatial orientation of the beam by normalizing the far-field data. Comparison with the 3D far-field radiation pattern proves the accuracy of the simulation results and the rationality of the longitudinal scanning antenna design.
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above are only the preferred embodiments of the present invention. It should be pointed out that those of ordinary skill in the art can also make several improvements and modifications without departing from the principles of the present invention. These improvements and modifications can also be made. should be regarded as the protection scope of the present invention.
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| CN1979241A (en) * | 2005-12-09 | 2007-06-13 | 富士通株式会社 | Optical device coupling light propagating in optical waveguide with diffraction grating |
| CN111679529A (en) * | 2020-07-28 | 2020-09-18 | 哈尔滨工业大学（深圳） | Long-range subwavelength grating structures for optical phased array transmit units |
| WO2022013779A1 (en) * | 2020-07-14 | 2022-01-20 | National Research Council Of Canada | Waveguide antenna |
| CN114153029A (en) * | 2021-12-21 | 2022-03-08 | 哈尔滨工业大学（深圳） | A Grating Structure Based on Continuum Domain Bound States |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1979241A (en) * | 2005-12-09 | 2007-06-13 | 富士通株式会社 | Optical device coupling light propagating in optical waveguide with diffraction grating |
| WO2022013779A1 (en) * | 2020-07-14 | 2022-01-20 | National Research Council Of Canada | Waveguide antenna |
| CN111679529A (en) * | 2020-07-28 | 2020-09-18 | 哈尔滨工业大学（深圳） | Long-range subwavelength grating structures for optical phased array transmit units |
| CN114153029A (en) * | 2021-12-21 | 2022-03-08 | 哈尔滨工业大学（深圳） | A Grating Structure Based on Continuum Domain Bound States |
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