CN114955515A

CN114955515A - Processing system

Info

Publication number: CN114955515A
Application number: CN202210166404.2A
Authority: CN
Inventors: 仓田茂; 佐藤史朗; 吉田昇悟
Original assignee: Nidec Sankyo Corp
Current assignee: Nidec Instruments Corp
Priority date: 2021-02-26
Filing date: 2022-02-23
Publication date: 2022-08-30
Anticipated expiration: 2042-02-23
Also published as: JP2022131673A; CN114955515B

Abstract

The invention provides a processing system, which can be provided with a plurality of processing units even under the condition of using a slide block type carrying-in mechanism and can make the processing time in each processing unit constant. A processing system (1) comprises: a carrying-in part (2) which is provided with a movable carrying-in platform (25) for carrying the display panel (100), and enables the carrying-in platform (25) to reciprocate between a first position (2A) for receiving the display panel (100) and a second position (2B) for transferring the display panel; a robot arm (5) that rotates about a rotation axis (L) extending in the vertical direction and that receives the display panel from a carry-in table (25) that has reached the second position (2B); an inspection unit (3) which is disposed in six around a rotation axis (L) of a robot arm (5) and which drops a display panel through the robot arm (5); and a placement unit (4) for placing the display panel inspected by the inspection unit (3) on the robot arm (5).

Description

Processing system

Technical Field

The present invention relates to a processing system for performing a predetermined process on a workpiece.

Background

Patent document 1 discloses a processing system which is assembled in a production line of a small-sized liquid crystal display and performs processing of a liquid crystal panel. The processing system of this document performs a lighting inspection as a process for the liquid crystal panel. The processing system is provided with: a plurality of processing devices for processing the liquid crystal panel; a conveying mechanism for conveying the liquid crystal panel before the inspection and the liquid crystal panel after the inspection which are carried into the processing device; and a plurality of robots for conveying the liquid crystal panels between the plurality of processing devices and the conveying mechanism. Three processing devices are arranged along the conveying direction of the conveying mechanism on one side or the other side relative to the conveying direction. The robots are disposed one for each processing device along the conveying direction of the conveying mechanism. The conveying mechanism is provided with: a carrying-in conveyor for carrying in the liquid crystal panel; and a carrying-out conveyor for carrying out the liquid crystal panel.

In the processing system of patent document 1, in order to shorten the tact time of the processing system, a slide-type carry-in mechanism is sometimes used instead of the carry-in conveyor. The slider type carry-in mechanism includes a movable table on which a liquid crystal panel is placed, and reciprocates the table at a high speed. Since the slider type carrying-in mechanism can carry the liquid crystal panel placed on the stage at high speed, the tact time of the processing system can be shortened.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2017-198499

Disclosure of Invention

In the case of using the slider type carry-in mechanism, since the distance between the stage and the upstream processing unit in the carrying direction and the distance between the stage and the downstream processing unit in the carrying direction are different, the time required until the liquid crystal panel is supplied to the upstream processing unit and the time required until the liquid crystal panel is supplied to the downstream processing unit are different. Therefore, the processing time of the liquid crystal panel including the supply time is different between the upstream processing section and the downstream processing section. As a result, the number of processing units arranged along the conveying direction increases, and the difference in processing time between the processing units increases, which makes it difficult to shorten the tact time of the processing system.

Therefore, an object of the present invention is to provide a processing system that can include a plurality of processing units even when a slider type loading mechanism is used, and can make processing time in each processing unit constant.

In order to solve the above problem, a processing system according to the present invention includes: a carry-in section including a movable carry-in table on which a workpiece is placed, the carry-in table being configured to reciprocate between a first position at which the workpiece is received and a second position at which the workpiece is transferred; a robot arm that rotates about a rotation axis extending in a vertical direction and receives the workpiece from the carry-in table that has reached the second position; a processing unit that is disposed at least three times around the rotation axis of the robot arm and that inputs the workpiece by the robot arm; and a placement unit for placing the processed workpiece processed by the processing unit by the robot arm.

In the present invention, three or more processing units are disposed around the rotation axis of the robot arm, and the workpieces are input by the robot arm. Therefore, even when a loading unit for conveying a workpiece by a movable loading table is used, the robot arm can keep the time until the workpiece conveyed by the loading table is loaded into each processing unit substantially constant because each processing unit is disposed around the rotation axis of the robot arm. Thus, in each processing unit, the processing time of the workpiece including the input time of the workpiece can be made substantially constant, and therefore, the tact time of the processing system can be shortened. In addition, as compared with the case where the processing units are arranged in the conveying direction of the workpiece, the space between the adjacent processing units can be enlarged by arranging the processing units around the rotation axis of the robot arm. This facilitates maintenance of the processing unit. Further, compared to the case where the processing units are arranged along the conveying direction of the workpiece, the workpiece can be loaded into the processing units by one robot arm, and therefore, it is not necessary to provide a plurality of robot arms.

In the present invention, it is preferable that the carry-in section is provided as a first carry-in section and a second carry-in section in which a reciprocating path of the carry-in table is parallel, the processing section is provided as a first processing section for processing the workpiece carried in by the first carrying-in section and a second processing section for processing the workpiece carried in by the second carrying-in section, the robot arm is provided with a first robot arm for transferring the workpiece carried in by the first carry-in part to the first processing part and a second robot arm for transferring the workpiece carried in by the second carry-in part to the second processing part, the first robot arm and the second robot arm respectively place the processed workpiece received from the first processing unit and the processed workpiece received from the second processing unit on the placement unit. With this configuration, the tact time of the processing system can be shortened.

In the present invention, it is preferable to have: a discharge unit for conveying the processed workpiece; and a moving mechanism that moves the processed workpiece placed on the placing section from the placing section to the discharging section, wherein if a direction in which the carry-in section reciprocates the carry-in table is set as a carrying direction, a direction in which the first position is located is set as a first direction, and a direction in which the second position is located is set as a second direction, the discharging section is disposed between the first carry-in section and the second carry-in section, and the processed workpiece is carried in the first direction. That is, the discharge portion is disposed between the first carry-in portion and the second carry-in portion, and a side of the carry-in portion that receives the workpiece is the same as a side of the discharge portion that discharges the workpiece in the conveying direction. With this configuration, the setting area of the processing system can be made compact.

In the present invention, it is preferable that the processing unit is provided as a first processing unit that processes the workpiece carried in by the carry-in unit and a second processing unit that processes the workpiece carried in by the carry-in unit, the robot arm is provided as a first robot arm that transfers the workpiece carried in by the carry-in unit to the first processing unit and as a second robot arm that transfers the workpiece carried in by the carry-in unit to the second processing unit, and the first robot arm and the second robot arm respectively mount the processed workpiece received from the first processing unit and the processed workpiece received from the second processing unit on the mounting unit. With this configuration, the tact time of the processing system can be shortened.

In this case, in the present invention, it is preferable to have: a discharge unit for conveying the processed workpiece; and a moving mechanism that moves the processed workpiece placed on the placing section from the placing section to the discharging section, wherein if a direction in which the carry-in section reciprocates the carry-in table is set as a carrying direction, a direction in which the first position is located is set as a first direction, and a direction in which the second position is located is set as a second direction, the discharging section is disposed on a side of the carry-in section in the second direction, and the processed workpiece is carried in the second direction. That is, the conveying direction of the carry-in part and the conveying direction of the discharge part are the same direction, and the carry-in part and the discharge part are arranged in the conveying direction. With this configuration, the carry-in section and the discharge section can be easily maintained from the direction orthogonal to the conveying direction, compared to a case where the conveying path of the discharge section and the conveying path of the carry-in section are parallel to each other.

In the present invention, it is preferable that the robot arm includes an alignment camera that detects a position of the workpiece held by the robot arm when the robot arm moves the workpiece from the carry-in table to the processing unit, and the robot arm performs alignment of the workpiece with respect to the processing unit based on an inspection result of the alignment camera. The robot arm can accurately place the workpiece on the processing unit based on the inspection result of the alignment camera.

In the present invention, it is preferable that a temporary placement section for temporarily placing the workpiece is provided, and the robot arm moves the workpiece from the carry-in section to the temporary placement section when the workpiece cannot be moved from the carry-in section to the processing section. With this configuration, even when the workpiece cannot be moved from the loading portion to the processing portion, the workpiece can be moved to the temporary placement portion, and therefore, the stop of conveyance of the workpiece in the processing system can be suppressed.

In the present invention, it is preferable that the robot arm moves the workpiece from the processing section to the temporary placement section when it is impossible to move the processed workpiece from the processing section to the placement section. With this configuration, even when the workpiece cannot be moved from the processing unit to the placing unit, the workpiece can be moved to the temporary placing unit, and therefore, conveyance stoppage of the workpiece in the processing system can be suppressed.

(effect of the invention)

According to the present invention, even when a carry-in section for conveying a workpiece by a carry-in table is used, since each processing section is disposed around the rotation axis of the robot arm, the robot arm can keep the time until the workpiece conveyed by the carry-in table is loaded into each processing section substantially constant. Thus, in each processing unit, the processing time of the workpiece including the input time of the workpiece can be made substantially constant, and therefore, the tact time of the processing system can be shortened.

Drawings

Fig. 1 is a plan view of a processing system according to a first embodiment of the present invention.

Fig. 2 is a schematic front view of the processing system as viewed from the direction a-a of fig. 1.

Fig. 3 is a side view of the robot arm of fig. 1.

Fig. 4 is a plan view of the treatment system 1 of the second embodiment.

Fig. 5 is a plan view of a robot arm and a treatment section according to another embodiment.

Detailed Description

(first embodiment)

Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. In the following description, a case where a workpiece is used as the display panel 100 will be mainly described. In the following description, the processing of a workpiece will be mainly described in the case of performing an inspection corresponding to the workpiece. Therefore, the processing portion for the workpiece is an inspection portion for the workpiece. Fig. 1 is a plan view of a processing system according to a first embodiment of the present invention. Fig. 2 is a schematic front view of the processing system as viewed from the direction a-a of fig. 1.

(construction of the carrying System 1)

In fig. 1 and 2, the processing system 1 according to the present embodiment is incorporated in a production line of a small liquid crystal display used in a portable device or the like. The processing system 1 performs a predetermined inspection of the display panel 100 as a workpiece received from the previous step by the inspection unit 3, and conveys the inspected display panel 100 to the next step.

The display panel 100 is a liquid crystal panel, an organic EL panel, or the like. The display panel 100 is formed in a rectangular shape and has flexible wiring in the present embodiment. The display panel 100 includes a recording unit in which data such as inspection data of the display panel 100 is recorded at a position other than the display area of the display panel 100. Specifically, data such as inspection data is recorded as a two-dimensional code or a one-dimensional code in a portion other than the display area of the display panel 100. As shown in fig. 1, in the present embodiment, two display panels 100 including a first display panel 100A and a second display panel 100B are simultaneously transported as the display panels 100.

As shown in fig. 1, a processing system 1 includes: a loading unit 2 for transporting the display panel 100; a robot arm 5 receiving the display panel 100 from the loading unit 2; an inspection unit 3 for inputting the display panel 100 through the robot arm 5; and a placing part 4 for placing the inspected display panel 100 inspected by the inspection part 3 by the robot arm 5.

The loading unit 2 includes a movable loading table 25 on which the display panel 100 is placed. The carry-in section 2 reciprocates the carry-in table 25 between a first position 2A as one end and a second position 2B as the other end. The carry-in section 2 is provided as a first carry-in section 21 and a second carry-in section 22 in parallel with the reciprocating path of the carry-in table 25.

The inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22.

In the following description, three directions orthogonal to each other are referred to as an X-axis direction, a Y-axis direction, and a Z-axis direction. The X-axis direction is a direction in which the carry-in section 2 reciprocates the carry-in table 25, and is a conveying direction. One side in the X axis direction is an X1 direction, and the other side is an X2 direction. The X1 direction is the side where the carry-in table 25 is located at the first position 2A, and the X2 direction is the side where the carry-in table 25 is located at the second position 2B. One side in the Y axis direction is a Y1 direction, and the opposite side is a Y2 direction. The Y1 direction is the side where the first inspection part 31 is located, and the Y2 direction is the side where the second inspection part 32 is located. The upper side is a Z1 direction, and the lower side is a Z2 direction.

The robot arm 5 receives the display panel 100 from the carry-in table 25 which reaches the second position 2B. The robot arm 5 is provided as a first robot arm 51 that transfers the display panel 100 carried in by the first carrying-in unit 21 to the first inspection unit 31 and a second robot arm 52 that transfers the display panel 100 carried in by the second carrying-in unit 22 to the second inspection unit 32. The first and second robot arms 51 and 52 respectively place the inspected display panel 100 received from the first inspection unit 31 and the inspected display panel 100 received from the second inspection unit 32 on the placement unit 4. The first inspection unit 31 is disposed around the first robot arm 51, and the second inspection unit 32 is disposed around the second robot arm 52.

Further, the processing system 1 includes: an upstream conveying part 6 for conveying the display panel 100 in the Y2 direction; and a midstream conveying unit 7 located closer to the Y2 direction than the upstream conveying unit 6. The processing system 1 includes: a first movement mechanism 9 for moving the display panel 100 from the previous process conveying unit 8 to the upstream conveying unit 6; a second moving mechanism 10 for moving the display panel 100 conveyed by the upstream conveyor 6 from the upstream conveyor 6 to the first carry-in section 21 and the midstream conveyor 7; and a third moving mechanism 11 for moving the display panel 100 conveyed by the midstream conveyor 7 from the upstream conveyor 6 to the second loading unit 22.

The processing system 1 includes: an alignment camera 12 that detects the position of the display panel 100 held by the first moving mechanism 9; and an ID reader 13 that reads data recorded at a location outside the display area of the display panel 100.

The processing system 1 includes, between the first loading unit 21 and the second loading unit 22: a discharge unit 14 for conveying the inspected display panel 100 in the X1 direction; and a fourth movement mechanism 15 for moving the processed display panel 100 placed on the placement unit 4 from the placement unit 4 to the discharge unit 14.

The processing system 1 includes: a downstream conveying unit 16 for conveying the inspected display panel 100 to a next step; and a fifth moving mechanism 17 for moving the inspected display panel 100 conveyed by the discharge unit 14 from the discharge unit 14 to the downstream conveying unit 16.

(previous step transporting part)

As shown in fig. 1, the previous-step transport unit 8 transports the display panel 100 placed on the previous-step transport unit 8 to the processing system 1 by a robot or the like in the previous step. The previous-step conveyance unit 8 extends in the Y-axis direction and conveys the display panel 100 in the Y2 direction. The previous-step conveying section 8 is constituted by a belt conveyor.

(first moving mechanism)

As shown in fig. 1 and 2, the first moving mechanism 9 is a pick-and-place type moving mechanism. The first moving mechanism 9 includes: a suction unit 91 that holds the display panel 100; a position adjustment unit 92 that moves the suction unit 91 in the vertical direction and rotates the suction unit 91 about the Z-axis direction as a rotation axis; a first driving unit 93 that reciprocates the position adjustment unit 92 in the X-axis direction; and a second driving section 94 that reciprocates the first driving section 93 in the Y direction. The first driving unit 93 and the second driving unit 94 are constituted by electric cylinders or the like. The first driving unit 93 reciprocates the suction unit 91 in the X-axis direction via the position adjusting unit 92. The second driving unit 94 is located in the X1 direction of the previous process conveying unit 8. The second driving section 94 reciprocates the suction section 91 in the Y-axis direction via the first driving section 93 and the position adjusting section 92.

(alignment Camera)

As shown in fig. 2, the alignment camera 12 is located above the first moving mechanism 9. When the first moving mechanism 9 holds the display panel 100 conveyed by the previous process conveying unit 8, the alignment camera 12 photographs the display panel 100 from above and detects the position of the display panel 100.

(upstream conveying section)

As shown in fig. 1 and 2, the upstream conveying unit 6 conveys the display panel 100 to the midstream conveying unit 7. The upstream conveying unit 6 includes: a table 61 on which the display panel 100 is placed; and a driving section 62 that reciprocates the stage 61 in the Y-axis direction. The stage 61 is a rectangle elongated in the X direction. The stage 61 has a size capable of placing two display panels 100 in the Y direction. The driving unit 62 is constituted by an electric cylinder or the like. The driving unit 62 is located on the X1 direction side of the previous-step conveying unit 8 and the midstream conveying unit 7. When viewed from the Z-axis direction, the driving unit 62 reciprocates the stage 61 from a position adjacent to the previous-step conveying unit 8 in the Y2 direction to a position overlapping the midstream conveying unit 7.

(ID reader)

The ID reader 13 optically reads data recorded in the recording portion of the display panel 100. The ID reader 13 is, for example, an image pickup device. The display panel 100 is inspected by the inspection unit 3 based on the data of the display panel 100 read by the ID reader 13. As shown in fig. 1 and 2, the ID reader 13 includes a first ID reader 13A and a second ID reader 13B. The first ID reader 13A is located between the previous-process conveying unit 8 and the midstream conveying unit 7 and above the upstream conveying unit 6. The first ID reader 13A is moved in the X-axis direction by the upper driving portion 131. The first ID reader 13A reads data recorded in the recording portion of the display panel 100 from above. The second ID reader 13B is located between the previous-process conveying unit 8 and the midstream conveying unit 7 and below the upstream conveying unit 6. The second ID reader 13B is moved in the X-axis direction by the lower driving portion 132. The second ID reader 13B reads data recorded in the recording portion of the display panel 100 from below.

(Zhongyou transporting part)

As shown in fig. 1 and 2, the midstream transport unit 7 transports the display panel 100 to the loading unit 2. The midstream transport unit 7 is located between the carry-in unit 2 and the upstream transport unit 6 in the X-axis direction, and extends to a position overlapping the first carry-in unit 21 and the second carry-in unit 22 in the Y-axis direction.

The midstream transport unit 7 is located below the upstream transport unit 6 by Z2.

The midstream transport unit 7 includes: a stage 71 on which the display panel 100 is mounted; and a driving unit 72 for reciprocating the stage 71 in the Y-axis direction. The stage 71 is a rectangle long in the X direction. The stage 71 has a size capable of placing the two display panels 100 in the Y direction. The driving unit 72 is constituted by an electric cylinder or the like. The driving unit 72 conveys the display panel 100 placed on the stage 71 at the end in the Y1 direction in the Y2 direction. When the table 71 is located at the end of Y1, the table 71 is located below the table 61 of the upstream transport unit 6 located at the end of Y2 by Z2 and overlaps the table 61 of the upstream transport unit 6 in the Z-axis direction. That is, the table 71 overlaps the table 61 of the upstream conveying section 6 at the end of Y1.

(second moving mechanism)

The second moving mechanism 10 moves the display panel 100 conveyed by the table 61 of the upstream conveyor 6 to the first loading unit 21 and the midstream conveyor 7. The second moving mechanism 10 is a pick-and-place type moving mechanism. As shown in fig. 1 and 2, the second moving mechanism 10 includes: an adsorption part 101 for holding the display panel 100; a position adjustment unit 102 for moving the suction unit 101 in the vertical direction; and a driving unit 103 for reciprocating the position adjusting unit 102 in the X-axis direction. The suction portion 101 can hold two display panels 100 at the same time. The driving unit 103 is constituted by an electric cylinder or the like. The driving portion 103 extends in the X-axis direction. The driving unit 103 reciprocates the suction unit 101 in the X-axis direction by the position adjusting unit 102.

(third moving mechanism)

The third movement mechanism 11 moves the display panel 100 conveyed by the stage 71 of the midstream conveyor unit 7 from the stage 71 of the midstream conveyor unit 7 to the carry-in stage 25 of the second carry-in unit 22. The third moving mechanism 11 is a pick-and-place type moving mechanism. As shown in fig. 1 and 2, the third movement mechanism 11 includes: an adsorption portion 111 for holding the display panel 100; a position adjustment unit 112 for moving the suction unit 111 in the vertical direction; and a driving section 113 for reciprocating the position adjusting section 112 in the X-axis direction. The suction portion 111 can hold two display panels 100 at the same time. The driving unit 113 is constituted by an electric cylinder or the like. The driving portion 113 extends in the X-axis direction. The driving unit 113 reciprocates the suction unit 111 in the X-axis direction by the position adjusting unit 112.

(carry-in part)

As shown in fig. 1, the carry-in section 2 is provided as a first carry-in section 21 and a second carry-in section 22 in which the reciprocating path of the carry-in table 25 is parallel, and the first carry-in section 21 and the second carry-in section 22 have the same configuration. The first carry-in section 21 is located on the Y1 direction side of the second carry-in section 22. The first loading section 21 and the second loading section 22 include: a movable loading table 25 on which the display panel 100 is placed; and a driving unit 26 for reciprocating the carrying-in table 25 in the X-axis direction. The carry-in table 25 is sized to place two display panels 100 in the Y direction. The driving unit 26 is constituted by an electric cylinder or the like. The driving unit 26 extends in the X-axis direction and reciprocates the carry-in table 25 between the first position 2A and the second position 2B. At the first position 2A, the carry-in section 2 receives the display panel 100. At the second position 2B, the carry-in section 2 hands over the display panel 100. That is, the carrying-in unit 2 carries the display panel 100 in the X2 direction.

(robot arm)

Fig. 3 is a side view of the robot arm 5. As shown in fig. 1, the robot arm 5 is provided as a first robot arm 51 that transfers the display panel 100 carried in by the first carry-in unit 21 to the first inspection unit 31 and a second robot arm 52 that transfers the display panel 100 carried in by the second carry-in unit 22 to the second inspection unit 32, and the first robot arm 51 and the second robot arm 52 have the same configuration. The first robot arm 51 is disposed on the Y1 direction side of the second robot arm 52 in the Y axis direction. The first robot arm 51 is positioned closer to the X1 direction than the second position 2B of the first loading unit 21 and closer to the Y1 direction than the first loading unit 21. The second robot arm 52 is positioned in the X2 direction from the second position 2B of the second loading unit 22 and in the Y2 direction from the second loading unit 22.

The first robot arm 51 and the second robot arm 52 are SCARA robots. As shown in fig. 1 and 3, the first robot arm 51 and the second robot arm 52 include: a holding portion 53 for holding the display panel 100; and an arm body 54 for moving the holding portion 53. The holding portion 53 holds two display panels 100 at the same time.

The arm main body portion 54 has a first arm portion 55, a second arm portion 56, a driving portion 57, and an alignment shaft portion 58. The first arm portion 55 and the second arm portion 56 are connected via a motor M1 built in the first arm portion 55. The first arm portion 55 is relatively rotated with respect to the second arm portion 56 by the motor M1. The second arm portion 56 is connected to a driving portion 57, and the driving portion 57 rotates about a rotation axis L of the second arm portion 56. That is, the first robot arm 51 and the second robot arm 52 rotate the holding portion 53 in the XY plane via the first arm portion 55 and the second arm portion 56 around the rotation axis L extending in the vertical direction.

The first arm portion 55 is connected to the alignment shaft portion 58 on the Z1 direction side, and the holding portion 53 is connected to the alignment shaft portion 58 on the Z2 direction side. The alignment shaft portion 58 is rotated with respect to the first arm portion 55 by a motor M2 built in the first arm portion 55, and is moved in the Z direction by an actuator not shown. That is, the holding portion 53 is rotated with respect to the first arm portion 55 by the motor M2, and is moved in the Z direction by the actuator.

(inspection section)

As shown in fig. 1, the inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22.

The first inspection unit 31 is disposed around the rotation axis L of the first robot arm 51 at six different angles around the rotation axis L of the first robot arm 51 at equal distances from the rotation axis L. That is, the first inspection units 31 are arranged at equal distances from the center of the first robot arm 51 and radially around the first robot arm 51.

Similarly, six second inspection units 32 are arranged around the rotation axis L of the second robot arm 52 at different angles around the rotation axis L of the second robot arm 52 and at equal distances from the rotation axis L. That is, the second inspection units 32 are arranged at equal distances from the center of the second robot arm 52 and radially about the second robot arm 52.

Since the first inspection units 31 are arranged around the rotation axis L of the first robot arm 51 at equal distances from the rotation axis L, the first robot arm 51 can keep the time taken for the display panel 100 to be loaded from the first loading unit 21 to the first inspection units 31 and the time taken for the display panel 100 to move from the first inspection units 31 to the placement unit 4 substantially constant. Similarly, since the second inspection units 32 are disposed around the rotation axis L of the second robot arm 52 and at equal distances from the rotation axis L, the second robot arm 52 can keep the time taken for the display panel 100 to be loaded from the second loading unit 22 to the second inspection units 32 and the time taken for the display panel 100 to move from the second inspection units 32 to the mounting unit 4 substantially constant.

(mounting part)

As shown in fig. 1, the mounting portion 4 includes: a mounting table 41 on which the display panel 100 is mounted; and a driving unit 42 for reciprocating the mounting table 41 in the Y-axis direction. The mounting table 41 has a size in which two display panels 100 are mounted in the Y direction. The driving unit 42 is constituted by an electric cylinder or the like. The driving portion 42 is located at a position overlapping the rotational axis L of the first robot arm 51 and the rotational axis L of the second robot arm 52 in the Y-axis direction when viewed from the Z-axis direction, and extends in the Y-axis direction. The driving unit 42 reciprocates the stage 41 between a first position 4A at the end in the Y1 direction and a second position 4B at the end in the Y2 direction. When the mounting table 41 is located at the first position 4A, the first robot arm 51 moves the display panel 100 inspected by the first inspection unit 31 to the mounting table 41. When the mounting table 41 is located at the second position 4B, the second robot arm 52 moves the display panel 100 inspected by the second inspection unit 32 to the mounting table 41. When the fourth movement mechanism 15 moves the display panel 100 from the placement unit 4 to the discharge unit 14, the drive unit 42 moves the placement table 41 to the third position 4C at the center of the drive unit 42.

(fourth moving mechanism)

As shown in fig. 1, the fourth moving mechanism 15 moves the display panel 100 carried by the mounting table 41 of the mounting unit 4 from the mounting table 41 of the mounting unit 4 to the discharge unit 14. The fourth moving mechanism 15 is a pick-and-place type moving mechanism. The fourth movement mechanism 15 includes: a suction portion 151 for holding the display panel 100; a position adjustment unit 152 for moving the suction unit 101 in the vertical direction; and a driving section 153 for reciprocating the position adjusting section 152 in the X-axis direction.

The adsorption part 151 can simultaneously hold two display panels 100. The driving unit 153 is constituted by an electric cylinder or the like. The driving portion 153 extends in the X-axis direction. The driving unit 153 reciprocates the suction unit 151 in the X-axis direction by the position adjusting unit 152. When the mounting table 41 is located at the third position 4C, the fourth moving mechanism 15 moves the inspected display panel 100 mounted on the mounting table 41 to the discharge unit 14.

(discharge part)

As shown in fig. 1, the discharge unit 14 is located closer to the X1 direction than the placement unit 4 when viewed from the Z-axis direction, and is disposed between the first carrying-in unit 21 and the second carrying-in unit 22. The discharge unit 14 extends in the X-axis direction, and an end portion in the X1 direction overlaps the downstream conveying unit 16 in the Y-axis direction when viewed from the Z-axis direction. The discharge unit 14 includes: a movable table 141 on which the inspected display panel 100 is placed; and a driving unit 142 for reciprocating the stage 141 in the X-axis direction.

The stage 141 has a size for placing the two display panels 100 in the Y direction. The driving unit 142 is constituted by an electric cylinder or the like. When viewed from the Z-axis direction, the end of the driving unit 142 in the X2 direction is positioned closer to the placement unit 4 in the X1 direction, and the end of the driving unit 142 in the X1 direction is positioned to overlap the downstream conveying unit 16 in the Y-axis direction. The driving unit 142 reciprocates the stage 141 between the end in the X1 direction and the end in the X2 direction. When the stage 141 is positioned at the end in the X2 direction, the fourth moving mechanism 15 moves the inspected display panel 100 from the mounting table 41 of the mounting unit 4 to the stage 141. When the inspected display panel 100 is placed on the stage 141, the discharge unit 14 conveys the inspected display panel 100 in the X1 direction. That is, the discharge unit 14 conveys the inspected display panel 100 in the direction opposite to the direction X2 in which the carrying-in unit 2 conveys the display panel 100.

(fifth moving mechanism)

As shown in fig. 1, the fifth moving mechanism 17 moves the inspected display panel 100 conveyed by the table 141 of the ejection unit 14 from the table 141 of the ejection unit 14 to the downstream conveying unit 16. The fifth moving mechanism 17 is a moving mechanism of a pick-and-place type. The fifth movement mechanism 17 includes: an adsorption portion 171 for holding the display panel 100; a position adjustment unit 172 for moving the suction unit 171 in the vertical direction; a first driving unit 173 for reciprocating the position adjustment unit 172 in the X-axis direction; and a second driving part 174 for reciprocating the first driving part 173 in the Y direction. The suction part 171 can hold two display panels 100 at the same time. The first drive unit 173 and the second drive unit 174 are formed of electric cylinders or the like. The first driving unit 173 reciprocates the suction unit 171 in the X-axis direction by the position adjusting unit 152. The second driving unit 154 is positioned in the X2 direction of the downstream conveying unit 16 and extends in the Y-axis direction. The second driving unit 174 reciprocates the suction unit 171 in the Y-axis direction by the first driving unit 173 and the position adjusting unit 172. When the stage 141 is positioned at the end in the X1 direction, the fifth moving mechanism 17 moves the inspected display panel 100 from the stage 141 of the discharge unit 14 to the downstream conveying unit 16.

(downstream conveying section)

The downstream conveying unit 16 conveys the inspected display panel 100 to the next step. The downstream conveying section 16 is constituted by a belt conveyor. As shown in fig. 1, the downstream conveying unit 16 includes: a first conveying unit 161 extending in the Y-axis direction; and a second conveying unit 162 located closer to the X1 direction side than the first conveying unit 161 and extending in the Y axis direction. The first conveying unit 161 conveys the display panel 100 whose inspection result in the inspection unit 3 is "good product". The second conveying unit 162 conveys the display panel 100 whose inspection result in the inspection unit 3 is "defective".

(operation of the treatment System)

Next, the operation of the processing system 1 will be described.

(operation of first moving mechanism)

After the previous process conveying unit 8 conveys the first display panel 100A and the second display panel 100B to the end of the previous process conveying unit 8 in the Y2 direction, the first moving mechanism 9 moves the suction unit 91 to the end of the previous process conveying unit 8 in the Y2 direction, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 91, the previous process transport unit 8 moves the next display panel 100 to the end of the previous process transport unit 8 in the Y2 direction.

After the first display panel 100A and the second display panel 100B are held by the suction portion 91, the alignment camera 12 detects the positions of the first display panel 100A and the second display panel 100B. When the first display panel 100A and the second display panel 100B are detected by the alignment camera 12, the first moving mechanism 9 recognizes the positions of the first display panel 100A and the second display panel 100B with respect to the suction portion 91.

The first moving mechanism 9 moves the suction unit 91 above the stage 61 of the upstream conveying unit 6, and then performs alignment of the first display panel 100A with respect to the stage 61 of the upstream conveying unit 6 in the X-axis direction and the Z-axis direction based on the position of the first display panel 100A detected by the alignment camera 12. The upstream conveying unit 6 performs positioning of the stage 61 in the Y-axis direction with respect to the first display panel 100A based on the position of the first display panel 100A detected by the alignment camera 12. After the position of the first display panel 100A is aligned, the first movement mechanism 9 places only the first display panel 100A on the stage 61.

After the first display panel 100A is placed on the stage 61, the first moving mechanism 9 moves the suction portion 91 in the Z1 direction. Next, the second display panel 100B is aligned in the X-axis direction and the Z-axis direction with respect to the stage 61 based on the position of the second display panel 100B detected by the alignment camera 12. The upstream conveying unit 6 performs positioning of the stage 61 in the Y-axis direction with respect to the second display panel 100B based on the position of the second display panel 100B detected by the alignment camera 12. After the position of the second display panel 100B is aligned, the first moving mechanism 9 places the second display panel 100B on the stage 61.

The first moving mechanism 9 moves the suction unit 91 to the previous process transfer unit 8 after the first display panel 100A and the second display panel 100B are placed on the stage 61. After the suction unit 91 moves to the previous process conveying unit 8, the upstream conveying unit 6 moves the first display panel 100A and the second display panel 100B placed on the stage 61 to the position of the ID reader 13. Either one of the first ID reader 13A and the second ID reader 13B reads the first display panel 100A and the second display panel 100B to acquire inspection data and the like.

The first moving mechanism 9 holds the first display panel 100A and the second display panel 100B again from the previous process conveying unit 8, and repeats the above operation.

(operation of second moving mechanism and third moving mechanism)

When the display panel 100 is placed on the table 61 of the upstream carrying unit 6 by the first moving mechanism 9, first, the upstream carrying unit 6 moves the table 61 in the X-axis direction to the first position 6A overlapping the first carrying-in unit 21 when viewed from the Z-axis direction. When the stage 61 moves to the first position 6A, the second moving mechanism 10 moves the suction unit 101 above the stage 61 of the upstream conveying unit 6, and holds the first display panel 100A and the second display panel 100B. The second moving mechanism 10 moves the suction unit 91 to a position above the loading table 25 of the first loading unit 21, and then places the display panel 100 on the loading table 25 of the first loading unit 21.

Next, after the first display panel 100A and the second display panel 100B are held by the suction unit 91, the upstream conveying unit 6 moves the stage 61 to the end in the Y1 direction. After the table 61 has moved to the end of the upstream conveying unit 6 in the Y1 direction, the next display panel 100 is placed on the table 61 by the first moving mechanism 9. After that, the upstream conveying unit 6 moves the table 61 to the first position 6A. When the stage 61 moves to the first position 6A, the second moving mechanism 10 moves the suction unit 101 above the stage 61 of the upstream conveying unit 6, and holds the first display panel 100A and the second display panel 100B.

After the first display panel 100A and the second display panel 100B are held by the suction unit 91, the upstream conveying unit 6 moves the stage 61 to the end in the Y1 direction. Thereafter, when viewed from the Z-axis direction, the midstream transport unit 7 moves the stage 71 in the X-axis direction to the first position 7A where it overlaps the first carry-in unit 21. When the table 71 moves to the first position 7A, the second moving mechanism 10 places the display panel 100 on the table 71.

When the display panel 100 is placed on the table 71, the midstream transport unit 7 moves the table 71 in the X-axis direction to the second position 7B where it overlaps the second carry-in unit 22 when viewed from the Z-axis direction. When the stage 71 moves to the second position 7B, the third moving mechanism 11 moves the suction unit 111 above the stage 71 of the midstream conveyance unit 7, and holds the first display panel 100A and the second display panel 100B. The third moving mechanism 11 moves the suction unit 111 to above the loading table 25 of the second loading unit 22, and then places the display panel 100 on the loading table 25 of the second loading unit 22.

After the first display panel 100A and the second display panel 100B are held by the suction unit 111, the midstream conveyance unit 7 moves the table 71 to the first position 7A. The second movement mechanism 10 and the third movement mechanism 11 repeat the above operations.

(action of the first robot arm 51)

The first carry-in section 21 moves the first display panel 100A and the second display panel 100B placed on the carry-in table 25 to the second position 2B. When the carry-in table 25 of the first carry-in section 21 moves to the second position 2B, the first robot arm 51 moves the holding section 53 above the carry-in table 25 of the first carry-in section 21, and holds the first display panel 100A and the second display panel 100B. Thereafter, the first carry-in unit 21 moves the carry-in table 25 to the first position 2A, and the second moving mechanism 10 places the first display panel 100A and the second display panel 100B on the carry-in table 25.

The first robot arm 51 holds the first display panel 100A and the second display panel 100B, then moves the first display panel 100A and the second display panel 100B to the first inspection unit 31 (for example, the first inspection unit 31A), and then loads the first display panel 100A and the second display panel 100B into the first inspection unit 31. After that, the first inspection unit 31 (for example, the first inspection unit 31A) takes a predetermined time to perform the lighting inspection of the display panel 100.

When the carry-in table 25 of the first carry-in section 21 moves to the second position 2B again, the first robot arm 51 moves the holding section 53 above the carry-in table 25 of the first carry-in section 21, and holds the first display panel 100A and the second display panel 100B. After that, the first robot arm 51 holds the first display panel 100A and the second display panel 100B, moves the first display panel 100A and the second display panel 100B to the first inspection unit 31 (for example, the first inspection unit 31B), and puts the first display panel 100A and the second display panel 100B into the first inspection unit 31.

The first robot arm 51 repeats the above operation, and sequentially moves the display panel 100 from the first inspection section 31A to the first inspection section 31F.

When the first robot arm 51 sequentially moves the display panels 100 from the first inspection section 31A to the first inspection section 31F, the lighting inspection is sequentially ended in each first inspection section 31. At this time, for example, when the lighting inspection is completed in the first inspection unit 31A, the first robot arm 51 moves the inspected display panel 100 from the first inspection unit 31A to the mounting table 41 of the mounting unit 4. That is, the first robot arm 51 repeats the following operations: the display panel 100 is moved to the first inspection unit 31 capable of performing lighting inspection, and the inspected display panel 100 is moved from the first inspection unit 31 after the lighting inspection is completed to the mounting table 41 of the mounting unit 4.

(action of the second robot arm 52)

The second carry-in unit 22 moves the first display panel 100A and the second display panel 100B placed on the carry-in table 25 to the second position 2B. When the carry-in table 25 of the second carry-in section 22 moves to the second position 2B, the second robot arm 52 moves the holding section 53 above the carry-in table 25 of the second carry-in section 22, and holds the first display panel 100A and the second display panel 100B. Thereafter, the second carry-in unit 22 moves the carry-in table 25 to the first position 2A, and the third movement mechanism 11 places the first display panel 100A and the second display panel 100B on the carry-in table 25.

The second robot arm 52 holds the first display panel 100A and the second display panel 100B, then moves the first display panel 100A and the second display panel 100B to the second inspection unit 32 (for example, the second inspection unit 32A), and drops the first display panel 100A and the second display panel 100B into the second inspection unit 32. Thereafter, the second inspection unit 32 (for example, the second inspection unit 32A) takes a predetermined time to perform the lighting inspection of the display panel 100.

When the carry-in table 25 of the second carry-in portion 22 moves to the second position 2B again, the second robot arm 52 moves the holding portion 53 above the carry-in table 25 of the second carry-in portion 22, and holds the first display panel 100A and the second display panel 100B. Then, the second robot arm 52 holds the first display panel 100A and the second display panel 100B, moves the first display panel 100A and the second display panel 100B to the second inspection unit 32 (for example, the second inspection unit 32B), and puts the first display panel 100A and the second display panel 100B into the second inspection unit 32.

The second robot arm 52 repeats the above operation, and sequentially moves the display panels 100 from the second inspection unit 32A to the second inspection unit 32F.

When the second robot arm 52 sequentially moves the display panels 100 from the second inspection unit 32A to the second inspection unit 32F, the lighting inspection is sequentially ended in each of the second inspection units 32. At this time, for example, when the lighting inspection is completed in the second inspection unit 32A, the second robot arm 52 moves the inspected display panel 100 from the second inspection unit 32A to the mounting table 41 of the mounting unit 4. That is, the second robot arm 52 repeats the following operations: the display panel 100 is moved to the second inspection unit 32 capable of performing the lighting inspection, and the inspected display panel 100 is moved from the second inspection unit 32 after the lighting inspection is completed to the mounting table 41 of the mounting unit 4.

(operation of the mounting part and the fourth moving mechanism)

When the first robot arm 51 moves the inspected display panel 100 to the placing section 4, the placing section 4 moves the placing table 41 to the first position 4A. When the checked display panel 100 is placed on the mounting table 41, the mounting unit 4 moves the mounting table 41 to the third position 4C. The fourth moving mechanism 15 moves the suction unit 151 above the mounting table 41 to hold the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 151, the mounting unit 4 moves the mounting table 41 to the second position 4B.

The fourth moving mechanism 15 moves the suction unit 151 above the stage 141 of the discharge unit 14, and then places the display panel 100 on the stage 141. When the display panel 100 is placed on the stage 141, the discharge unit 14 moves the stage 141 to the end in the X1 direction.

On the other hand, when the second robot arm 52 moves the inspected display panel 100 to the mounting unit 4, the mounting unit 4 moves the mounting table 41 to the second position 4B. When the inspected display panel 100 is placed on the mounting table 41, the mounting unit 4 moves the mounting table 41 to the third position 4C. The fourth moving mechanism 15 moves the suction unit 151 above the mounting table 41 to hold the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 151, the mounting unit 4 moves the mounting table 41 to the first position 4A.

The mounting portion 4 and the fourth movement mechanism 15 repeat the above operations. That is, the placing section 4 alternately receives the inspected display panels 100 from the first robot arm 51 and the second robot arm 52, and the fourth moving mechanism 15 moves the inspected display panels 100 to the discharging section 14.

(operation of fifth moving mechanism)

When the discharge unit 14 moves the stage 141 to the end in the X1 direction, the fifth movement mechanism 17 moves the suction unit 171 above the stage 141 of the discharge unit 14, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 171, the discharge unit 14 moves the stage 141 to the end in the X2 direction. When the stage 141 moves to the end in the X2 direction, the first and second robot arms 51 and 52 move the inspected display panel 100 from the mounting table 41 of the mounting portion 4 to the stage 141 of the discharge portion 14.

The fifth moving mechanism 17 moves the inspected display panel 100 to the first conveying unit 161 or the second conveying unit 162 based on the result of the inspection unit 3. More specifically, if the inspection result of the inspection unit 3 is "non-defective" display panel 100, the fifth moving mechanism 17 moves the non-defective display panel 100 to the first conveying unit 161. On the other hand, if the inspection result of the inspection unit 3 is a "defective" display panel 100, the fifth moving mechanism 17 moves the defective display panel 100 to the second conveying unit 162. The first conveying unit 161 and the second conveying unit 162 convey the display panel 100 in the Y2 direction when the display panel 100 is placed thereon.

(Effect of the present embodiment)

In the processing system 1 of the present embodiment, six inspection units 3 are disposed around the rotation axis L of the robot arm 5, and the display panel 100 is loaded through the robot arm 5. Therefore, even when the loading unit 2 that transports the display panel 100 by the loading table 25 is used, the robot arm 5 can keep the time until the display panel 100 transported by the loading table 25 is loaded into each inspection unit 3 substantially constant because each inspection unit 3 is disposed around the rotation axis L of the robot arm 5. Thus, in each inspection unit 3, the processing time of the display panel 100 including the input time of the display panel 100 can be made substantially constant, and therefore, the tact time of the processing system 1 can be shortened. In addition, when the processing units 3 are arranged around the rotation axis L of the robot arm 5, the inspection units 3 are arranged radially about the robot arm 5, and the space between the adjacent inspection units 3 can be enlarged, as compared with the case where the processing units 3 are arranged along the conveying direction of the display panel 100. This facilitates maintenance of the inspection unit 3. In addition, compared to the case where the inspection units 3 are arranged along the conveying direction of the display panel 100, the display panel 100 can be loaded into the inspection units 3 by one robot arm, and therefore, it is not necessary to provide a plurality of robot arms 5.

In the present embodiment, since the first inspection unit 31 and the second inspection unit 32 are disposed in the Y-axis direction orthogonal to the conveying direction of the loading unit 2, the first inspection unit 31 and the second inspection unit 32 are easily disposed. Further, the first robot arm 51 and the first carry-in section 21 are arranged to supply the display panel 100 to the first inspection section 31. Similarly, the second robot arm 52 and the second loading unit 22 are disposed to supply the display panel 100 to the second inspection unit 32. Therefore, since the two loading units 2 and the robot arm 5 are provided to supply the display panel 100 to the first inspection unit 31 and the second inspection unit 32, the tact time of the processing system 1 can be shortened.

In the present embodiment, the discharge unit 14 is disposed between the first carry-in unit 21 and the second carry-in unit 22 in the Y-axis direction, and the side of the carry-in unit 2 that receives the display panel 100 is the same as the side of the discharge unit 14 that discharges the display panel 100 in the X-axis direction. Then, the discharge unit 14 conveys the display panel 100 in the X1 direction. With this configuration, the installation area of the processing system 1 can be made compact when viewed from the Z-axis direction.

(second embodiment)

Next, a second embodiment will be explained. Fig. 4 is a plan view of the treatment system 1 of the second embodiment. The same components as those of the first embodiment are denoted by the same reference numerals, and description thereof may be omitted.

As shown in fig. 4, the processing system 1 includes: a loading unit 2 for transporting the display panel 100; an inspection unit 3 for inspecting the display panel 100; a mounting part 4 for mounting the display panel 100 inspected by the inspection part 3; and a robot arm 5 for moving the display panel 100 carried into the carrying-in part 2 to the inspection part 3 and for moving the inspected display panel 100 inspected by the inspection part 3 to the mounting part 4.

The loading unit 2 includes a movable loading table 25 on which the display panel 100 is placed. The carry-in section 2 reciprocates the carry-in table 25 between a first position 2A as one end and a second position 2B as the other end. In the present embodiment, the carry-in unit 2 is constituted by only one.

The robot arm 5 is provided as a first robot arm 51 that transfers the display panel 100 carried in by the first carrying-in unit 21 to the first inspection unit 31 and a second robot arm 52 that transfers the display panel 100 carried in by the second carrying-in unit 22 to the second inspection unit 32. The first and second robot arms 51 and 52 respectively place the inspected display panel 100 received from the first inspection unit 31 and the inspected display panel 100 received from the second inspection unit 32 on the placement unit 4. The first inspection unit 31 is disposed around the first robot arm 51, and the second inspection unit 32 is disposed around the second robot arm 52.

Further, the processing system 1 includes: a first moving mechanism 18 that moves the display panel 100 from the previous-step carrying unit 8 to the carrying-in unit 2; an alignment camera 12 that detects the position of the display panel 100 held by the first moving mechanism 18; and an ID reader 13 that reads data recorded at a portion other than the display area of the display panel 100.

The processing system 1 includes: a discharge unit 14 for conveying the inspected display panel 100 to a next step; and a fifth moving mechanism 17 for moving the inspected display panel 100 placed on the placing unit 4 from the placing unit 4 to the discharging unit 14. In the present embodiment, the discharge unit 14 is disposed on the X2 direction side of the carry-in unit 2.

(first moving mechanism)

The first moving mechanism 18 is a pick-and-place type moving mechanism. The first moving mechanism 18 includes: a suction unit 181 that holds the display panel 100; a position adjustment unit 182 that moves the suction unit 181 in the vertical direction and rotates about a Z-axis direction as a rotation axis; a first driving unit 183 that reciprocates the position adjustment unit 182 in the Y-axis direction; and a second driving unit 184 that reciprocates the first driving unit 183 in the X direction. The first driving unit 183 and the second driving unit 184 are configured by electric cylinders or the like. The first driving unit 183 reciprocates the suction unit 181 in the X-axis direction by the position adjusting unit 182. The second driving unit 184 is positioned in the Y2 direction of the conveying unit 8. The second driving unit 184 reciprocates the suction unit 181 in the X-axis direction by the first driving unit 183 and the position adjusting unit 182.

(carry-in part)

As shown in fig. 4, the carrying-in section 2 includes: a carry-in table 25 on which the display panel 100 is mounted; and a driving unit 26 for reciprocating the carrying-in table 25 in the X-axis direction. The carry-in table 25 is sized to place two display panels 100 in the X direction. The driving unit 26 is constituted by an electric cylinder or the like. The driving unit 26 extends in the X-axis direction and reciprocates the carry-in table 25 between the first position 2A and the second position 2B. At the first position 2A, the carry-in section 2 receives the display panel 100. At the second position 2B, the carry-in section 2 hands over the display panel 100. That is, the carrying-in unit 2 carries the display panel 100 in the X2 direction. When the carry-in table 25 is located at the first position 2A, the carry-in table 25 is located adjacent to the previous process conveying unit 8 in the X2 direction. The conveying direction of the carry-in table 25 is the same as the conveying direction of the conveying unit 8 in the previous step.

(ID reader)

As shown in fig. 4, the ID reader 13 includes a first ID reader 13A and a second ID reader 13B. The first ID reader 13A is located at a position overlapping the upstream carrying section 6 in the Y-axis direction and above the carrying-in section 2 when viewed from the Z-axis direction. The first ID reader 13A is moved in the Y-axis direction by the upper driving portion 131. The first ID reader 13A reads data recorded in the recording portion of the display panel 100 from above. The second ID reader 13B is located at a position overlapping the carry-in unit 2 in the Y axis direction and below the carry-in unit 2 when viewed from the Z axis direction. The second ID reader 13B is moved in the Y-axis direction by the lower driving section 132. The second ID reader 13B reads data recorded in the recording portion of the display panel 100 from below.

(robot arm)

As shown in fig. 4, the robot arm 5 is provided as a first robot arm 51 that transfers the display panel 100 carried in by the first carry-in unit 21 to the first inspection unit 31 and a second robot arm 52 that transfers the display panel 100 carried in by the second carry-in unit 22 to the second inspection unit 32, and the first robot arm 51 and the second robot arm 52 have the same configuration. The first robot arm 51 is disposed on the Y1 direction side of the second robot arm 52 in the Y axis direction. The first robot arm 51 is positioned in the Y1 direction with respect to the carry-in unit 2 at a position in the X1 direction with respect to the second position 2B of the carry-in unit 2. The second robot arm 52 is positioned in the X2 direction from the second position 2B of the loading unit 2 and in the Y2 direction from the loading unit 2.

The first robot arm 51 and the second robot arm 52 are SCARA type robots, and are the same structure as the first embodiment. As shown in fig. 3 and 4, the first robot arm 51 and the second robot arm 52 include: a holding portion 53 for holding the display panel 100; and an arm body 54 for moving the holding portion 53. The holding portion 53 holds two display panels 100 at the same time.

(inspection section)

As shown in fig. 4, the inspection unit 3 is provided as a first inspection unit 31 for inspecting the display panel 100 carried in by the first carrying-in unit 21 and a second inspection unit 32 for inspecting the display panel 100 carried in by the second carrying-in unit 22. The first inspection unit 31 is disposed on the Y1 direction side of the second inspection unit 32. Six first inspection units 31 and six second inspection units 32 are arranged. In the present embodiment, the inspection unit 3 performs a lighting inspection of the display panel 100.

(mounting part)

As shown in fig. 4, the mounting unit 4 includes two mounting tables 41 on which the display panel 100 is mounted. More specifically, the mounting unit 4 includes a first mounting table 41A on which the inspected display panel 100 inspected by the first inspecting unit 31 is mounted, and a second mounting table 41B on which the inspected display panel 100 inspected by the second inspecting unit 32 is mounted. Each of the mounting tables 41A and 41B has a size of mounting two display panels 100 in the X direction. The mounting tables 41A and 41B are arranged in the Y-axis direction.

(second moving mechanism)

As shown in fig. 4, the second moving mechanism 19 moves the inspected display panel 100 mounted on the mounting unit 4 to the discharge unit 14. The second moving mechanism 19 is a pick-and-place type moving mechanism. The second moving mechanism 19 includes: an adsorption portion 191 that holds the display panel 100; a position adjustment unit 192 that moves the suction unit 191 in the vertical direction and rotates the suction unit 120 about the Z-axis direction as a rotation axis; a first driving unit 193 that reciprocates the position adjustment unit 192 in the Y-axis direction; and a second driving part 194 that reciprocates the first driving part 193 in the X direction. The adsorption part 191 can hold two display panels 100 at the same time. The first drive unit 193 and the second drive unit 194 are constituted by electric cylinders or the like. The first driving unit 193 reciprocates the suction unit 191 in the Y-axis direction by the position adjustment unit 192. More specifically, when viewed from the Z-axis direction, the first driving unit 193 moves the suction unit 191 so as to overlap the first stage 41A and the second stage 41B in the Y-axis direction. The second driving portion 194 extends in the X-axis direction. The second driving unit 194 reciprocates the adsorption unit 151 in the X-axis direction by the first driving unit 193 and the position adjusting unit 192.

(discharge part)

As shown in fig. 4, the discharge unit 14 conveys the inspected display panel 100 to the next step.

The discharge section 14 is constituted by a belt conveyor. The discharge unit 14 conveys the inspected display panel 100 in the X2 direction. That is, the discharge unit 14 conveys the inspected display panel 100 in the same direction as the direction X1 in which the loading unit 2 conveys the display panel 100.

The discharge unit 14 includes: a first discharge portion 14A extending in the Y-axis direction; and a second discharge portion 14B located on the X1 direction side of the first discharge portion 14A and extending in the Y axis direction. The first discharge unit 14A conveys the display panel 100 whose inspection result in the inspection unit 3 is "good product". The second discharge unit 14B conveys the display panel 100 whose inspection result in the inspection unit 3 is "defective".

The first discharge portion 14A is located on the X2 direction side of the first mounting table 41A. The second discharge portion 14B is located on the X2 direction side of the second stage 41B.

(operation of the processing System)

Next, the operation of the processing system 1 will be described.

(operation of first moving mechanism)

After the previous process conveying unit 8 conveys the first display panel 100A and the second display panel 100B to the ends of the previous process conveying unit 8 in the X2 direction, the first moving mechanism 18 moves the suction unit 181 to the ends of the previous process conveying unit 8 in the X1 direction, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 181, the previous process conveying unit 8 moves the next display panel 100 to the end of the previous process conveying unit 8 in the X2 direction.

After the first display panel 100A and the second display panel 100B are held by the suction unit 181, the alignment camera 12 detects the positions of the first display panel 100A and the second display panel 100B. When the first display panel 100A and the second display panel 100B are detected by the alignment camera 12, the first moving mechanism 18 recognizes the positions of the first display panel 100A and the second display panel 100B with respect to the suction portion 181.

The first moving mechanism 18 moves the suction unit 181 above the carry-in table 25 of the carry-in unit 2, and then performs alignment of the first display panel 100A with respect to the carry-in table 25 of the carry-in unit 2 in the Y axis direction and the Z axis direction based on the position of the first display panel 100A detected by the alignment camera 12. The loading unit 2 performs the positioning of the loading table 25 with respect to the first display panel 100A in the X-axis direction based on the position of the first display panel 100A detected by the alignment camera 12. After the position of the first display panel 100A is aligned, the carry-in unit 2 places only the first display panel 100A on the carry-in table 25.

After the first display panel 100A is placed on the loading table 25, the first moving mechanism 18 moves the suction portion 181 in the Z1 direction. Next, the second display panel 100B is aligned in the Y-axis direction and the Z-axis direction with respect to the carry-in table 25 based on the position of the second display panel 100B detected by the alignment camera 12. The loading unit 2 performs the positioning of the loading table 25 with respect to the second display panel 100B in the X-axis direction based on the position of the second display panel 100B detected by the alignment camera 12. After the position of the second display panel 100B is aligned, the first moving mechanism 18 places the second display panel 100B on the carry-in table 25.

The first moving mechanism 18 moves the suction unit 181 to the previous-step transfer unit 8 after the first display panel 100A and the second display panel 100B are placed on the loading table 25. After the suction unit 181 has moved to the previous process transfer unit 8, the carry-in unit 2 moves the first display panel 100A and the second display panel 100B placed on the carry-in table 25 to the position of the ID reader 13. Either one of the first ID reader 13A and the second ID reader 13B reads the first display panel 100A and the second display panel 100B to acquire inspection data and the like.

The first moving mechanism 18 holds the first display panel 100A and the second display panel 100B again from the previous process conveying unit 8, and repeats the above operation.

(actions of the first robot arm 51 and the second robot arm 52)

The first and second robot arms 51 and 52 alternately move the first and

second display panels

100A and 100B conveyed by the carry-in table 25 of the carry-in section 2.

The loading unit 2 moves the first display panel 100A and the second display panel 100B placed on the loading table 25 to the second position 2B. When the carry-in table 25 of the carry-in section 2 moves to the second position 2B, the first robot arm 51 moves the holding section 53 above the carry-in table 25 of the carry-in section 2, and holds the first display panel 100A and the second display panel 100B.

Thereafter, the carry-in section 2 moves the carry-in table 25 to the first position 2A, and the first moving mechanism 18 places the first display panel 100A and the second display panel 100B on the carry-in table 25.

The first robot arm 51 holds the first display panel 100A and the second display panel 100B, then moves the first display panel 100A and the second display panel 100B to the first inspection unit 31 (for example, the first inspection unit 31A), and then loads the first display panel 100A and the second display panel 100B into the first inspection unit 31. Thereafter, the first inspection unit 31 (for example, the first inspection unit 31A) takes a predetermined time to perform the lighting inspection of the display panel 100.

When the carry-in table 25 of the carry-in section 2 moves to the second position 2B, the second robot arm 52 moves the holding section 53 above the carry-in table 25 of the first carry-in section 21, and holds the first display panel 100A and the second display panel 100B. After that, the second robot arm 52 holds the first display panel 100A and the second display panel 100B, moves the first display panel 100A and the second display panel 100B to the second inspection unit 32 (for example, the second inspection unit 32A), and drops the first display panel 100A and the second display panel 100B into the second inspection unit 32.

The first robot arm 51 and the second robot arm 52 alternately repeat the above operations, and the first robot arm 51 sequentially moves the display panels 100 from the first inspection section 31A to the first inspection section 31F, and the second robot arm 52 sequentially moves the display panels 100 from the second inspection section 32A to the second inspection section 32F.

When the first and second robot arms 51 and 52 sequentially move the display panel 100 to the first and second inspection units 31 and 32, the lighting inspection is sequentially ended in each inspection unit 3. At this time, when the lighting inspection is completed in the first inspection unit 31 and the second inspection unit 32, the first robot arm 51 and the second robot arm 52 move the inspected display panel 100 from the first inspection unit 31 and the second inspection unit 32 to the mounting tables 41 of the mounting unit 4, as in the first embodiment. That is, the first robot arm 51 and the second robot arm 52 repeat the following operations: the display panel 100 is moved to the first inspection unit 31 and the second inspection unit 32 that can perform lighting inspection, and the inspected display panel 100 is moved from the first inspection unit 31 and the second inspection unit 32 after the lighting inspection is completed to each mounting table 41 of the mounting unit 4.

(operation of second moving mechanism)

The second moving mechanism 19 alternately moves the display panels placed on the first table 41A and the second table 42B from the first table 41A and the second table 42B to the discharge unit 14.

When the first and

second display panels

100A and 100B are mounted on the first mounting table 41A by the first robot arm 51, the second moving mechanism 19 moves the suction unit 191 above the first mounting table 41A to hold the first and

second display panels

100A and 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 191, the second moving mechanism 19 moves the inspected display panel 100 to the first discharging unit 14A or the second discharging unit 14B based on the result of the inspection unit 3. More specifically, if the inspection result of the inspection unit 3 is the display panel 100 of "good product", the second moving mechanism 19 moves the display panel 100 of good product to the first discharging unit 14A. On the other hand, if the inspection result of the inspection unit 3 is a "defective" display panel 100, the second moving mechanism 19 moves the defective display panel 100 to the second discharging unit 14B.

Next, when the first display panel 100A and the second display panel 100B are mounted on the second mounting table 41B by the second robot arm 52, the second moving mechanism 19 moves the suction unit 191 above the second mounting table 41B, and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 191, the second moving mechanism 19 moves the inspected display panel 100 to the first discharging unit 14A or the second discharging unit 14B based on the result of the inspection unit 3. More specifically, if the inspection result of the inspection unit 3 is the display panel 100 of "good product", the second moving mechanism 19 moves the display panel 100 of good product to the first discharging unit 14A. On the other hand, if the inspection result of the inspection unit 3 is a "defective" display panel 100, the second moving mechanism 19 moves the defective display panel 100 to the second discharging unit 14B.

The first ejection unit 14A and the second ejection unit 14B each transport the display panel 100 in the Y2 direction when the display panel 100 is placed thereon.

(Effect of the present embodiment)

In the processing system 1 of the present embodiment, six inspection units 3 are disposed around the rotation axis L of the robot arm 5, and the display panel 100 is loaded through the robot arm 5. Therefore, in the present embodiment, the same effects as those of embodiment 1 can be obtained. In the present embodiment, since the first inspection unit 31 and the second inspection unit 32 are disposed in the Y-axis direction orthogonal to the conveying direction of the carry-in unit 2, the first inspection unit 31 and the second inspection unit 32 are easily disposed.

The conveying direction of the carry-in part 2 and the conveying direction of the discharge part 14 are the same X-axis direction, and the carry-in part 2 and the discharge part 14 are arranged in the X-axis direction. With this configuration, the carry-in unit 2 and the discharge unit 14 are easier to perform maintenance in the Y-axis direction, respectively, than when the carry-in unit 2 and the discharge unit 14 are arranged in the Y-axis direction.

(other embodiments)

Fig. 5 is a plan view of a robot arm and a treatment section according to another embodiment. In fig. 5, only the first robot arm 51 and the first inspection section 31 are illustrated. The present embodiment has the same configuration as the above-described embodiment except that the alignment camera 200 that detects the position of the display panel 100 held by the holding portion 53 of the robot arm 5 when the robot arm 5 moves the display panel 100 carried into the carrying-in portion 2 to the inspection portion 3 and the temporary placement portion 300 for temporarily placing the display panel 100 are provided.

As shown in fig. 5, the alignment camera 200 is located above the first robot arm 51. When the first robot arm 51 moves the display panel 100 carried into the first carrying-in part 21 to the first inspection part 31, the alignment camera 200 images the display panel 100 from above and detects the position of the display panel 100. When the display panel 100 is detected by the alignment camera 200, the first robot arm 51 recognizes the position of the display panel 100 with respect to the holding portion 53 according to the inspection result of the alignment camera 200. Accordingly, when the display panel 100 is placed on the first inspection unit 31, the first robot arm 51 can perform positioning of the display panel 100 at a predetermined position with respect to the first inspection unit 31.

As a result, the first robot arm 51 can accurately place the display panel 100 on the first inspection unit 31.

As shown in fig. 5, the temporary placement section 300 is disposed between the first inspection section 31 and the first robot arm 51. When the display panel 100 cannot be moved from the first loading unit 21 to the first inspection unit 31 due to the process of the first inspection unit 31 being stopped, the first robot arm 51 moves the display panel 100 from the first loading unit 21 to the temporary placement unit 300. In addition, when the display panel 100 cannot be moved to the placement unit 4, the first robot arm 51 moves the display panel 100 from the first inspection unit 31 to the temporary placement unit 300. As described above, in the present embodiment, since the temporary placement unit 300 for temporarily placing the display panel 100 is provided, even when the first robot arm 51 cannot move the display panel 100, the display panel 100 can be moved to the temporary placement unit 300. This can suppress the stop of conveyance of the display panel 100 in the processing system 1.

In the above embodiment, the inspection unit 3 is disposed in six around the rotational axis L of the robot arm 5, but is not limited to six, and three or more inspection units may be disposed.

Reference numerals

1 … processing system; 2 … carry-in part; 2a … first position; 2B … second position; a 3 … inspection unit (processing unit); 4 … placing part; 4a … first position; 4B … second position; a third position of 4C …; 5 … robot arm; 6 … upstream conveying part; 6A … first position; 7 … midstream conveying part; 7a … first position; 7B … second position; 8 … former process conveying part; 9 … a first moving mechanism; 10 … a second moving mechanism; 11 … a third moving mechanism; 12 … aiming at the camera; 13 … ID reader; 13a … first ID reader; 13B … second ID reader; 14 … discharge; 14a … first discharge; 14B … second discharge portion; 15 … fourth moving mechanism; 16 … downstream conveying part; 17 … fifth moving mechanism; 18 … a first moving mechanism; 19 … a second moving mechanism; 21 … a first loading part; 22 … a second loading part; 25 … carry-in table; 26 … driving part; 31 … a first inspection unit (first processing unit); 32 … second inspection unit (second processing unit); 41 … a loading table; 41a … first stage; 41B … second mounting table; 42 … driving part; 51 … first robot arm; 52 … second robotic arm; 53 … holding part; 54 … arm body portion; 55 … a first arm; 56 … second arm; 57 … driving part; 58 … aligned with the shaft portion; 61 … pieces; 62 … a drive section; 71 … stations; 72 … drive section; 91 … adsorption part; 92 … position adjustment part; 93 … a first drive part; 94 … second drive part; 100 … display panel; 101 … adsorption part; 102 … position adjustment part; 103 … driving part; 111 … adsorption part; 112 … position adjustment part; 113 … a drive section; 131 … upper drive part; 132 … lower drive; 141 … pieces; 142 … driving part; 151 … adsorption part; 152 … position adjusting part; 153 … driving part; 161 … first conveying part; 162 … a second conveying part; 171 … adsorption part; 172 … position adjustment part; 173 … a first drive part; 174 … a second driving part; 181 … adsorption part; 182 … position adjusting part; 183 … first drive section; 184 … second driving part; 191 … adsorption part; 192 … position adjustment part; 193 … a first drive part; 194 … second drive section; 200 … aiming at the camera; 300 … temporary placement section; l … rotates the shaft.

Claims

1. A processing system, comprising:

a carry-in section including a movable carry-in table on which a workpiece is placed, the carry-in table being configured to reciprocate between a first position at which the workpiece is received and a second position at which the workpiece is transferred;

a robot arm that rotates about a rotation shaft extending in a vertical direction and receives the workpiece from the carry-in table that reaches the second position;

a processing unit in which three or more pieces are arranged around the rotation axis of the robot arm and the workpiece is input by the robot arm; and

and a placement unit for placing the processed workpiece processed by the processing unit by the robot arm.

2. The processing system of claim 1,

the carry-in part is provided as a first carry-in part and a second carry-in part, reciprocating paths of the carry-in tables of the first carry-in part and the second carry-in part are parallel,

the processing section is provided as a first processing section that processes the workpiece carried in by the first carry-in section and a second processing section that processes the workpiece carried in by the second carry-in section,

the robot arms are provided as a first robot arm that delivers the workpiece carried in by the first carry-in section to and from the first processing section, and a second robot arm that delivers the workpiece carried in by the second carry-in section to and from the second processing section,

the first robot arm and the second robot arm respectively place the processed workpiece received from the first processing unit and the processed workpiece received from the second processing unit on the placement unit.

3. The processing system according to claim 2, having:

a discharge unit that conveys the processed workpiece; and

a moving mechanism that moves the processed workpiece placed on the placing section from the placing section to the discharging section,

setting the direction in which the carry-in section reciprocates the carry-in table as a carrying direction, setting the direction in which the first position is located as a first direction, and setting the direction in which the second position is located as a second direction,

the discharge unit is disposed between the first carry-in unit and the second carry-in unit, and conveys the processed workpiece in the first direction.

4. The processing system of claim 1,

the processing section is provided as a first processing section that processes the workpiece carried in by the carry-in section, and a second processing section that processes the workpiece carried in by the carry-in section,

the robot arms are provided as a first robot arm that delivers the workpiece carried in by the carry-in section to and from the first processing section, and a second robot arm that delivers the workpiece carried in by the carry-in section to and from the second processing section,

5. The processing system according to claim 4, having:

a discharge unit that conveys the processed workpiece; and

a moving mechanism that moves the processed workpiece placed on the placing unit from the placing unit to the discharging unit,

when the direction in which the carry-in section reciprocates the carry-in table is set as a carrying direction, the direction in which the first position is located is set as a first direction, and the direction in which the second position is located is set as a second direction,

the discharge unit is disposed on the second direction side of the carry-in unit, and conveys the processed workpiece in the second direction.

6. The processing system according to any one of claims 1 to 5,

having an alignment camera that detects a position of the workpiece held by the robot arm when the robot arm moves the workpiece from the carry-in table to the processing section,

the robot arm performs alignment of the workpiece with respect to the processing unit based on the inspection result of the alignment camera.

7. The processing system according to any one of claims 1 to 5,

having a temporary placing section for temporarily placing the workpiece,

when the workpiece cannot be moved from the carry-in section to the processing section, the robot arm moves the workpiece from the carry-in section to the temporary placement section.

8. The processing system of claim 7,

when the processed workpiece cannot be moved from the processing section to the placing section, the robot arm moves the processed workpiece from the processing section to the temporary placing section.