CN114952843B - Micro-assembly operating system based on master-slave cooperation of double robots - Google Patents

Abstract

The application discloses a master-slave cooperation micro-assembly operating system based on double robots, which relates to the technical field of micro electro mechanical systems, and comprises two micro-operation robots, wherein position feedback information of the two robots can be determined through real-time working images, a main robot can move according to a set target track through closed-loop control, the motion of the main robot refers to the state of the main robot, and the two robots achieve cooperative control; because the system utilizes the two micro-operation robots to cooperatively operate the micro device based on the master-slave control strategy, compared with the conventional system of a single micro-operation robot, the system adopts the method of cooperative operation of the two robots to greatly improve the aspects of information acquisition, processing, control capability and the like, and therefore, the control capability and the operation precision of the micro device are higher.

Description

A micro-assembly operating system based on dual-robot master-slave collaboration

technical field

The present application relates to the field of micro-electromechanical technology, in particular to a micro-assembly operating system based on dual-robot master-slave cooperation.

Background technique

Micro-electro-mechanical technology is an advanced technology related to national economic development and technological progress, and micro-assembly technology is the basic core of today's micro-electro-mechanical technology research. The micro-assembly system can realize the combined assembly of micro-devices, for example, the combination of micro-electromechanical devices can be combined into a micro-electro-mechanical system with specific functions, and even the stacking of cells or tissues in organisms can be realized to build and combine into human biological organs. Therefore, the micro-assembly system is widely used in the fields of aerospace, military defense, bioengineering and so on.

For micro-assembly systems, the gripping and releasing of micro-devices is a very important part. At present, the traditional method is to use micro-manipulation robots to grip and release micro-devices. However, unlike large-scale devices, micro-devices require high precision when gripping and releasing due to their small size, but the gripper of a micro-manipulation robot will be affected by the gap and eccentricity. At the same time, in the microscopic field, electrostatic attraction , Van der Waals force is often dominant, which makes the micro-devices will be adsorbed on the gripper of the micro-manipulation robot when the gripper is released. These reasons will make it more difficult for the micro-manipulation robot to grip the micro-device or release the micro-device to the set position, and the operation accuracy is difficult to guarantee.

Contents of the invention

In response to the above problems and technical requirements, the applicant proposed a micro-assembly operating system based on dual-robot master-slave collaboration. The technical solution of this application is as follows:

A micro-assembly operating system based on dual-robot master-slave collaboration. The micro-assembly operating system includes a controller, a master robot, a slave robot, a vision module, and a loading platform. Both the master robot and the slave robot are micro-operations with three degrees of freedom. The robot has a gripper at the end, the micro-device is placed on the loading platform, the vision module faces the loading platform and the field of view covers the micro-device and the ends of the two robots; the controller connects the vision module, the master robot and the slave robot ;

The controller collects real-time working images through the visual module at each sampling moment, and performs image recognition on the real-time working images to determine the position feedback information p _m of the master robot in the image coordinate system and the position feedback information p _s of the slave robot in the image coordinate system ;

In the state where both the master robot and the slave robot are clamping the micro-device, the controller controls the movement of the master robot in a closed loop according to the target position information p _i of the micro-device in the image coordinate system and the position feedback information p _m of the master robot to track the micro-device Target position information, target position information _pi is the position information of the center point of the micro- _device indicated by the target trajectory of the micro-device in the image coordinate system at the current sampling moment; The closed-loop control of the position feedback information p _s of the slave robot is to track the position feedback information of the master robot, and the master robot and the slave robot are used to cooperate to operate the micro-device to move along the target trajectory.

Its further technical solution is that when the controller controls the main robot, the tracking error p _i +δ _pa -p _m of the main robot in the image coordinate system is used as the input of the main PID controller, and based on the output of the main PID controller Determine the motion increment u _m of the main robot in the robot coordinate system, and control the main robot according to the motion increment u _m ; where, δ _pa is the center point of the micro-device and the first target clamping position of the main robot on the micro-device The relative position information between them in the robot coordinate system.

Its further technical solution is that when the controller controls the slave robot, the tracking error p _m +δ _{pb -ps} of the slave robot in the image coordinate system is used as the input of the slave PID controller, and based on the output of the slave PID controller Determine the motion increment u _s of the slave robot in the robot coordinate system, and control the slave robot according to the motion increment u _s ; where, δ _pb is the first target clamping position of the master robot on the micro-device and the slave robot on the micro-device The relative position information in the robot coordinate system between the second target clamping positions on

Its further technical solution is that, in the initial state, neither the master robot nor the slave robot is in contact with the micro-device, and the controller performs image recognition on the real-time working image to determine the initial position information p of the center point of the micro-device in the image coordinate system; The controller controls the movement of the main robot in a closed loop based on the initial position information p of the micro-device and the position feedback information p _m of the main robot to move to the first target clamping position to contact and clamp the micro-device, and the controller bases on the first target clamping position The holding position and the position feedback information _ps of the slave robot are used to control the movement of the slave robot to contact and hold the micro-device at the second target holding position; the first target holding position, the second target holding position and the micro-device The initial position information has a predetermined position relationship.

Its further technical solution is that the controller takes the tracking error p+δ _pa -p _m of the main robot in the image coordinate system as the input of the main PID controller, and determines the main robot in the robot coordinate system based on the output of the main PID controller. Under the movement increment u _m , and control the movement of the main robot according to the movement increment u _m ;

Moreover, the controller takes the tracking error h _m +δ _{pb -ps} of the slave robot in the image coordinate system as the input of the slave PID controller, and determines the motion gain of the slave robot in the robot coordinate system based on the output of the slave PID controller measure u _s , and control the movement of the slave robot according to the movement increment u _s ;

where h _m is the position of the first target gripping position of the main robot on the micro-device in the image coordinate system, δ _pa is the distance between the center point of the micro-device and the first target gripping position of the main robot on the micro-device Relative position information in the robot coordinate system; δ _pb is the relative position in the robot coordinate system between the first target clamping position of the master robot on the micro-device and the second target clamping position of the slave robot on the micro-device information.

Its further technical solution is that before the controller controls the master robot and the slave robot to cooperate to operate the micro-device, the controller detects whether the first height is equal to the second height, and the first height is the distance between the end of the master robot and the initial position of the master robot. The height of the plane where the loading platform is located, the second height is the height from the end of the robot to the plane where the loading platform is located from the initial position of the robot;

When the first height is equal to the second height, the height calibration of the two robots is completed, with the master robot at the initial position of the master robot and the slave robot at the initial position of the slave robot as the initial state; when the first height and the second height If they are not equal, adjust the initial position of the main robot and/or from the initial position of the robot until the first height is equal to the second height.

Its further technical solution is that the controller controls the master robot to move at a constant speed along the z-axis direction from the master robot's initial position, and controls the slave robot to move at a constant speed along the z-axis direction from the slave robot's initial position, and according to the position of the gripper at the end of the robot, The image coordinates in the image coordinate system detect whether the first height is equal to the second height, and the z-axis direction is perpendicular to the plane where the loading platform is located.

Its further technical solution is, for any one of the master robot and the slave robot, the controller controls the robot to move from the corresponding initial position along the z-axis direction toward the loading platform and contact with the loading platform; during the movement of the robot , the image coordinates of the gripper at the end of the robot under the image coordinates first become smaller and then larger, that is, when the robot image coordinates are the smallest (the distance between the corresponding initial position of the robot and the minimum point of the image coordinates is taken as the corresponding initial position of the robot The height from the plane where the loading platform is located), at this time, the robot has just come into contact with the loading platform, and it is determined that the z-axis directions of the two robots are consistent.

Its further technical solution is that the loading platform is a two-degree-of-freedom mobile platform, the controller is connected to and controls the loading platform, and the controller controls the movement of the loading platform so that the initial position of the micro-device is within the field of view of the vision module.

Its further technical solution is that before the controller controls the master robot and the slave robot to cooperatively operate the micro device, the master robot and/or the slave robot are used to adjust the attitude of the micro device to achieve the target attitude.

The beneficial technical effect of the application is:

This application discloses a micro-assembly operating system based on dual-robot master-slave cooperation, using two micro-manipulation robots to operate micro-devices based on a master-slave control strategy. Compared with the conventional single micro-manipulation robot system, two The method of collaborative operation of two robots has relatively large improvements in information acquisition, processing, and control capabilities, so the control ability and operation accuracy of micro-devices are high.

In this system, the controller uses the PID controller to control the two robots, so that the master robot moves according to the set target trajectory, and the movement of the slave robot refers to the state of the master robot. The two achieve cooperative control, and the master-slave control The following effect is good, the error is small, and the structure of the PID controller is simple, and the operation effect is good.

Description of drawings

Fig. 1 is a schematic diagram of the system structure of the micro-assembly operating system in an embodiment.

Fig. 2 is a schematic flow diagram of a dual-robot master-slave cooperative operation micro-device moving according to a target trajectory in one embodiment.

Fig. 3 is a logic block diagram of the controller's closed-loop control of two robots in the embodiment shown in Fig. 2 .

Fig. 4 is a schematic flow diagram of the master-slave cooperative operation of the dual robots to complete the clamping operation on the micro-device in another embodiment.

Fig. 5 is a logic block diagram of the controller's closed-loop control of two robots in the embodiment shown in Fig. 4 .

Fig. 6 is a schematic flowchart of initial adjustment and calibration of the system before the dual robots perform master-slave cooperative operation on the micro-devices in one embodiment.

Detailed ways

The specific implementation manners of the present application will be further described below in conjunction with the accompanying drawings.

This application discloses a micro-assembly operating system based on dual-robot master-slave collaboration. Please refer to FIG. 1 . . Both the master robot 2 and the slave robot 3 are three-degree-of-freedom micro-manipulation robots with grippers at the ends. In one embodiment, both the master robot 2 and the slave robot 3 are realized by Sensapex micro-manipulation robots, and the ends of the Sensapex micro-manipulation robots are installed There is a holder, which is a tungsten probe with a tip of tens of microns.

The micro-device 6 is placed on the loading platform 5, and the entire operation process of the micro-device 6 is within the operating range of the two robots. Generally, as shown in FIG. 1 , the master robot 2 and the slave robot 3 can be respectively arranged on both sides of the loading platform 5 along the x-direction of the horizontal plane.

The vision module 4 faces the loading platform 5 and the field of view covers the micro device 6 and the ends of the two robots. In one embodiment, the visual module 4 includes a CCD camera 41 for capturing images and uploading them to the controller for processing for visual servoing. In another embodiment, the vision module 4 also includes a microscope 42. For example, an Olympus stereo microscope is used. The microscope 42 is calibrated for micro-device 6 and the grippers at the ends of the two robots during micro-assembly operations. The whole process is monitored by the holder, and the objects in the field of view will be magnified by the microscope 42 and imaged on the CCD camera 41, so that the image captured by the vision module 4 is clearer.

The controller 1 is connected to the vision module 4 , the master robot 2 and the slave robot 3 . In one embodiment, the controller 1 includes a host computer 11 and a controller 12 of a connected Sensapex micro-manipulation robot, the host computer 11 is connected to the vision module 4, and the controller 12 of the Sensapex micro-manipulation robot is connected and controls the main robot 2 and From robot 3.

When the system is applied, the micro-device 6 is placed on the loading platform 5, and both the master robot 2 and the slave robot 3 hold the micro-device 6 through the gripper at the end, and the master robot 2 grips the micro-device 6 At the first target clamping position, the slave robot 3 clamps on the micro device 6 at the second target clamping position. And in the image coordinate system, the positions of the two target clamping positions in the image coordinate system and the position c of the center point of the micro-device 6 in the image coordinate system have the following inherent relationship:

Among them, h _m is the position of the first target clamping position of the master robot 2 on the micro-device 6 in the image coordinate system, h _s is the second target clamping position of the slave robot 3 on the micro-device 6 in the image coordinate system position in . δ _pa is the relative position information in the robot coordinate system between the center point of the micro-device 6 and the first target clamping position of the main robot 2 on the micro-device. δ _pb is the relative position information in the robot coordinate system between the first target clamping position of the master robot 2 on the micro device 6 and the second target clamping position of the slave robot 3 on the micro device 6 . The relative position information reflects distance and direction, that is, the first target clamping position can be determined through the center point c of the micro-device 6 , and the second target clamping position can be determined through the first target clamping position. Commonly used, the two target clamping positions are the midpoints of the two sides of the micro-device 6 respectively, so the first target clamping position, the second target clamping position and the center point of the micro-device 6 are in the x direction parallel to the robot coordinate system , so the relative position information indicates the distance between two points. The clamping of the micro-device 6 uses the Harris corner detection algorithm to detect the four vertices of the micro-device 6 to measure the midpoints of the two sides of the micro-device 6 , thereby determining two target clamping positions.

In the state where both the master robot 2 and the slave robot 3 are clamping the micro-device, the process of the controller 1 using the dual-robot master-slave cooperation to micro-assemble the micro-device 6 includes the following steps, please refer to the flow chart shown in Figure 2:

In step 110, the controller 1 uses the improved artificial potential field method to generate the target trajectory of the micro-device 6 from the initial position to the end position, and the target trajectory indicates the position information of the center point of the micro-device 6 in the image coordinate system at different times. The image coordinate system refers to the coordinate system perpendicular to the image plane of the vision module 4 (specifically, the CCD camera 41 ) installed on the loading platform 5 , and the xy plane of the image coordinate system is parallel to the loading platform 5 .

Step 120, at each sampling moment, the controller 1 collects real-time working images through the visual module 4, and performs image recognition on the real-time working images to determine the position feedback information p _m of the master robot 2 under the image coordinates and the position feedback information p m of the slave robot 3 in the image coordinates. The position feedback information p _s in the coordinate system. It should be noted that the position feedback information of the robot in this application indicates the position of the end of the gripper on the robot, while the position feedback information of the micro-device 6 indicates the position of the center point of the micro-device 6 .

Step 130, the controller 1 controls the movement of the main robot 2 in a closed loop according to the target position information p _i of the micro-device 6 in the image coordinate system and the position feedback information p _m of the main robot 2 to track the target position information of the micro-device 6, the target position information _pi is the position information of the center point of the micro-device indicated by the target trajectory of the micro-device 6 in the image coordinate system at the current sampling moment. Moreover, the controller 1 close-loop controls the movement of the _slave robot 3 according to the position feedback information p _m of the master robot 3 and the position feedback information p s of the slave robot 3 to track the position feedback information of the master robot 2 .

If the micro-device 6 has not yet reached the end position, then at the next sampling moment, continue to repeat the above steps 120 and 130 until the micro-device 6 reaches the end position, thereby utilizing the master robot 2 and the slave robot 3 to cooperatively operate the micro-device 6 along the target trajectory sports. When the micro-device 6 reaches the end position, the master-slave robot completes the cooperative operation on the micro-device 6 and can loosen the clamping of the micro-device 6, thereby placing the micro-device 6 at the desired end position.

The controller 1 uses a PID controller to realize the above-mentioned closed-loop control for the two human robots, please refer to the control schematic diagram shown in FIG. 3 . When the controller 1 controls the main robot 2, the tracking error p _i +δ _pa -p _m of the main robot 2 in the image coordinate system is used as the input of the main PID controller, and based on the output of the main PID controller, the main robot 2 is determined The motion increment u _m in the robot coordinate system, and control the main robot according to the motion increment u _m . In actual application, the output of the main PID controller is the movement increment u _c1 of the main robot 2 in the image coordinate system, and then the movement increment of the main robot 2 in the robot coordinate system can be obtained through the transformation matrix T1 for u _c1 u _m =u _c1 ×T1. The transformation matrix T1 is a transformation matrix obtained by pre-calibrating the robot coordinate system where the main robot 2 is located and the image coordinate system.

Similarly, when the controller 1 controls the slave robot 3, the tracking error p _m +δ _{pb -ps} of the slave robot 3 in the image coordinate system is used as the input of the slave PID controller, and based on the output of the slave PID controller to determine The movement increment u _s of the slave robot in the robot coordinate system, and control the slave robot 3 according to the movement increment u _s . The output from the PID controller is also the motion increment u _c2 of the robot 3 in the image coordinate system, and then the motion increment u _s =u of the robot 3 in the robot coordinate system can be obtained through the transformation matrix T2 for u _{c2 c2} × T2. The transformation matrix T2 is obtained by pre-calibrating the robot coordinate system where the slave robot 3 is located and the image coordinate system.

The embodiment shown in FIG. 2 describes the process in which the master robot 2 and the slave robot 3 cooperate to clamp the micro-device and move according to the target trajectory, but in the initial state of the system, the micro-device 6 is usually placed statically on the loading platform 5 is located at the initial position, while the master robot 2 is located at the initial position of the master robot, and the slave robot 3 is located at the initial position of the slave robot. Neither of the two robots is in contact with the micro device 6. Therefore, the controller 1 first needs to accurately control the two robots. A robot moves from the initial position to the target clamping position to clamp the micro device 6. Please refer to the flow chart shown in Figure 4, the method includes the following steps:

Step 410, the controller 1 collects real-time working images through the vision module 4, and performs image recognition on the real-time working images to determine the initial position information p of the center point of the micro-device in the image coordinate system.

Step 420 , the controller 1 controls the movement of the main robot 2 in a closed loop based on the initial position information p of the micro-device and the position feedback information p _m of the main robot 2 . Moreover, the controller 1 close-loop controls the movement of the slave robot 3 based on the first target clamping position h _m and the position feedback information p _s of the slave robot 3 . There is a predetermined positional relationship among the first target clamping position h _m , the second target clamping position h _s and the initial position information of the micro device, and the positional relationship is as described above.

Step 430, if it is determined based on the position feedback information p _m of the master robot 2 that the master robot 2 moves to the first target clamping position h _m to contact and clamp the micro device, and based on the position feedback information p _s of the slave robot it is determined that the slave robot 3 After moving to the second target clamping position h _s to contact and clamp the micro device 6, the process is completed. Otherwise, steps 410 and 420 are performed again until both robots grip the micro-device 6 .

In the embodiment shown in FIG. 4 , in the above step 420 , the controller 1 also uses the PID controller to control the master-slave robot, please refer to the control block diagram shown in FIG. 5 . Controller 1 takes the tracking error p+δ _pa -p _m of the main robot 2 in the image coordinate system as the input of the main PID controller, and determines the movement increment of the main robot in the robot coordinate system based on the output of the main PID controller u _m , and to control the movement of the main robot according to the motion increment u _m , it is also necessary to use the transformation matrix T1 for conversion, which will not be repeated in this embodiment. The controller 1 takes the tracking error h _m +δ _{pb -ps} of the slave robot 3 in the image coordinate system as the input of the slave PID controller, and determines the motion gain of the slave robot in the robot coordinate system based on the output of the slave PID controller amount u _s , and control the movement of the slave robot according to the motion increment u _s , it also needs to use the transformation matrix T2 for transformation, which will not be repeated in this embodiment.

In actual application, it is first necessary to initialize the adjustment and calibration of the micro-assembly operating system before executing the method shown in Figure 2 or Figure 4 to improve accuracy. The initialization adjustment and calibration mainly includes the following three aspects, please refer to Figure 6 flow chart:

1. Adjustment of field of view.

The control of the two robots by the controller 1 needs to rely on the real-time working images collected by the vision module 4. The robot can guarantee to enter the field of view of the vision module 4 through its own movement, but if the initial position of the micro-device 6 is not in the field of view Within the range, it cannot be adjusted automatically, and because the size of the micro-device 6 is very small, it is also difficult to realize it by manual adjustment. Therefore in this embodiment, the loading platform 5 is a two-degree-of-freedom mobile platform, and the controller 1 is connected to and controls the loading platform 5. Fig. 1 does not show the connection relationship between the two, and the controller 1 controls the loading platform 5 to move so that The initial position of the micro-device 6 is within the field of view of the vision module 4 . If the initial position of the micro-device 6 is within the field of view of the vision module 4 , this step of adjustment can be skipped. In practical application, PriorH117 can be selected as the loading platform 5 .

2. The adjustment of the initial positions of the two robots.

Since two robots need to be used for cooperative control, it is necessary to ensure that the vertical distances between the two robots and the micro-device 6 are equal in their respective initial positions. Since the micro-device 6 is placed on the loading platform 5, it is necessary to ensure that two The vertical distances between the robot's respective initial positions and the plane where the loading platform 5 is located are equal.

Therefore, before the controller 1 controls the master robot 2 and the slave robot 3 to cooperate to operate the micro-devices, the controller 1 first detects whether the first height is equal to the second height, and the first height is that the end of the master robot 2 is at the initial position of the master robot The height from the plane where the loading platform 5 is located, the second height is the height from the end of the robot 4 to the plane where the loading platform 5 is located from the initial position of the robot, and the z-axis direction is perpendicular to the plane where the loading platform is located.

When the first height is equal to the second height, the height calibration of the two robots is completed, with the master robot at the initial position of the master robot and the slave robot at the initial position of the slave robot as the initial state, the steps in Figure 4 and Figure 2 can be executed method to achieve collaborative control. When the first height is not equal to the second height, adjust the initial position of the main robot and/or the initial position of the slave robot until the first height is equal to the second height.

In one embodiment, the method for the controller 1 to detect whether the first height is equal to the second height is: the controller 1 controls the master robot 2 to move at a constant speed along the z-axis direction from the master robot's initial position, and controls the slave robot 3 to move from the corresponding slave robot The initial position of the robot moves at a constant speed along the z-axis direction, and detects whether the first height and the second height are equal according to the image coordinates of the gripper at the end of the robot in the image coordinate system, and the z-axis direction is perpendicular to the plane where the loading platform is located .

Specifically: for any one of the master robot 2 and the slave robot 3 , the controller 1 controls the robot to move from the corresponding initial position along the z-axis direction toward the loading platform and contact the loading platform. During the movement, the real-time working image is also obtained through the vision module 4. During the movement of the robot, before the robot moves to the loading platform 5 and is in contact with the loading platform 5, the gripper at the end of the robot is in the image coordinate system The image coordinates of are getting smaller gradually. When the robot moves further after being in contact with the loading platform 5, the gripper at the end of the robot will deform and slide along the horizontal direction of the loading platform 5, causing the image coordinates of the gripper at the end of the robot to gradually change in the image coordinate system. get bigger.

Therefore, during the movement of the robot, the image coordinates of the gripper at the end of the robot in the image coordinate system first become smaller and then larger, and the position where the image coordinates are the smallest is taken as the position where the robot has just touched the loading platform 5 . The distance between the initial position corresponding to the robot and the minimum point of the image coordinates is taken as the height from the initial position corresponding to the robot to the plane where the loading platform is located, that is, the first height and the second height can be determined, and then whether they are equal can be detected.

3. The adjustment of the initial posture of the micro-device.

In order to facilitate the two robots to clamp and operate the micro-device 6, the initial attitude of the micro-device 6 can also be adjusted. Attitude adjustments are made to achieve the target attitude. If the initial posture of the micro-device 6 is the target posture, this adjustment step can be skipped.

The target posture is a preset posture that facilitates the clamping operation of the two robots, for example, the direction of the micro device 6 in the target posture is the y-axis direction of the robot coordinate system. The method for adjusting the posture of the micro-device 6 by two robots is determined according to the posture of the micro-device 6 and the layout positions of the two robots, and the adjustment can be completed according to the actual situation.

For example, in one example, if the micro-device 6 deviates to the right, the robot on the left side of the micro-device 6 is fixed, and the robot on the right side of the micro-device 6 is moved in the x-axis direction to adjust the micro-device 6 to the y-axis direction of the robot coordinate system. Similarly, when the micro-device 6 deviates to the left, fix the robot on the right side of the micro-device 6, and use the robot on the left side of the micro-device 6 to move in the x-axis direction to adjust the micro-device 6 to the y-axis direction of the robot coordinate system.

What is described above is only a preferred embodiment of the application, and the application is not limited to the above examples. It can be understood that other improvements and changes directly derived or conceived by those skilled in the art without departing from the spirit and concept of the present application should be considered to be included in the protection scope of the present application.

Claims (10)

1. A micro-assembly operating system based on master-slave cooperation of double robots is characterized by comprising a controller, a master robot, a slave robot, a vision module and an object carrying platform, wherein the master robot and the slave robot are both three-freedom-degree micro-operation robots, the tail ends of the master robot and the slave robot are provided with a clamp holder, a micro device is placed on the object carrying platform, the vision module faces the object carrying platform, and the vision module covers the micro device and the tail ends of the two robots; the controller is connected with the vision module, the master robot and the slave robot;

the controller collects real-time working images through the vision module at each sampling moment, and identifies and determines the real-time working imagesPosition feedback information p of the main robot under image coordinates _m And position feedback information p of the slave robot in an image coordinate system _s ；

Under the state that the micro device is clamped by the master robot and the slave robot, the controller is used for controlling the micro device to move according to the target position information p of the micro device in the image coordinate system _i And position feedback information p of the main robot _m Closed-loop controlling the main robot to move to track the target position information of the micro device, wherein the target position information p _i The position information of the central point of the micro device indicated by the target track of the micro device in the image coordinate system at the current sampling moment; the controller feeds back information p according to the position of the main robot _m And position feedback information p of the slave robot _s And performing closed-loop control on the motion of the slave robot to track the position feedback information of the master robot, and operating the micro device to move along the target track by using the master robot and the slave robot in a cooperative mode.

2. A microfabrication operating system according to claim 1 wherein the controller, when controlling the main robot, uses the tracking error p of the main robot in an image coordinate system _i +δ _pa -p _m As input of a main PID controller, and determining motion increment u of the main robot in a robot coordinate system based on output of the main PID controller _m And according to motion increment u _m Controlling the main robot; wherein, delta _pa Is the relative position information in the robot coordinate system between the center point of the micro device and the first target gripping position of the main robot on the micro device.

3. A microfabrication operating system according to claim 1, wherein the controller controls the slave robot with a tracking error p of the slave robot in an image coordinate system _m +δ _pb -p _s As input from the PID controller and based thereonDetermining the motion increment u of the slave robot under the coordinate system of the slave robot according to the output of the slave PID controller _s And according to motion increment u _s Controlling the slave robot; wherein, delta _pb Is the relative position information in the robot coordinate system between a first target gripping position of the master robot on the micro device and a second target gripping position of the slave robot on the micro device.

4. A microfabricated operating system according to claim 1,

in an initial state, the master robot and the slave robot are not in contact with the micro device, and the controller performs image recognition on a real-time working image to determine initial position information p of a central point of the micro device in an image coordinate system; the controller is based on the initial position information p of the micro device and the position feedback information p of the main robot _m The master robot is controlled in a closed loop to move to a first target clamping position to contact and clamp the micro device, and the controller feeds back information p based on the first target clamping position and the position of the slave robot _s Closed loop controlling the slave robot to move to a second target gripping location to contact and grip the micro device; the first target clamping position, the second target clamping position and the initial position information of the micro device have a preset position relation.

5. A microfabricated operating system according to claim 4,

the controller uses the tracking error p + delta of the main robot in the image coordinate system _pa -p _m As input of a main PID controller, and determining motion increment u of the main robot in a robot coordinate system based on output of the main PID controller _m And according to motion increment u _m Controlling the main robot to move;

and the controller uses the tracking error h of the slave robot in the image coordinate system _m +δ _pb -p _s As input from the PID controller, and based on the output from the PID controller, determining the motion increment u of the slave robot in the robot coordinate system _s And according to motion increment u _s Controlling the slave robot to move;

wherein h is _m Is the position of the first target clamping position of the main robot on the micro device in the image coordinate system, delta _pa Is relative position information in a robot coordinate system between a center point of the micro device and a first target gripping position of the main robot on the micro device; delta _pb Is the relative position information in the robot coordinate system between a first target gripping position of the master robot on the micro device and a second target gripping position of the slave robot on the micro device.

6. The microassembly manipulation system of claim 1, wherein the controller detects whether a first height and a second height are equal before controlling the master robot and the slave robot to cooperatively manipulate the micro device, the first height being a height of the end of the master robot from a plane of the carrier platform at a master robot initial position, the second height being a height of the end of the slave robot from the plane of the carrier platform at a slave robot initial position;

when the first height is equal to the second height, completing height calibration of the two robots, and setting the master robot at the initial position of the master robot and the slave robot at the initial position of the slave robot as initial states; and when the first height is not equal to the second height, adjusting the initial position of the master robot and/or the initial position of the slave robot until the first height is equal to the second height.

7. The microfabrication operation system of claim 6, wherein the controller controls the master robot to move from the master robot initial position at a constant speed along the z-axis direction, controls the slave robot to move from the slave robot initial position at a constant speed along the z-axis direction, and detects whether the first height is equal to the second height according to image coordinates of a gripper at the end of the robot in an image coordinate system, wherein the z-axis direction is perpendicular to a plane of the carrier platform.

8. A microfabrication operation system according to claim 7, wherein for either one of the master robot and the slave robot, the controller controls the robot to move from the respective initial positions toward and into contact with the carrier platform in a z-axis direction; in the moving process of the robot, the image coordinate of the gripper at the tail end of the robot under the image coordinate is firstly reduced and then increased, and the distance between the initial position corresponding to the robot and the minimum point of the image coordinate is used as the height from the initial position corresponding to the robot to the plane where the object carrying platform is located.

9. The microassembly manipulation system of claim 1, wherein the stage is a two-degree-of-freedom motion stage, and wherein the controller is coupled to and controls the stage such that the stage moves such that the initial position of the micro device is within the field of view of the vision module.

10. A microfabricated operating system according to claim 1, wherein the controller performs pose adjustment of the microdevice with the master robot and/or the slave robot to achieve a target pose before controlling the master robot and the slave robot to cooperatively operate the microdevice.

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