CN114952641B - Modularized distributed plane millstone - Google Patents

Abstract

The application discloses a modularized distributed plane millstone, which is characterized in that a big tooth module distribution area and a small tooth module distribution area are arranged on the end surface of a millstone body, the big tooth module distribution area and the small tooth module distribution area are arranged along involute grooves, and the width between the involute grooves on two sides of the big tooth module distribution area is larger than the width between the involute grooves on two sides of the small tooth module distribution area; the large tooth module distribution areas are arranged in an array along the circumferential direction of the millstone body, a plurality of small tooth module distribution areas are arranged between two adjacent large tooth module distribution areas, and tooth modules are arranged in the large tooth module distribution areas and the small tooth module distribution areas; by adopting the groove structure and combining the tooth-shaped module on the grinding disc, the grinding surface structure is optimized, the secondary scratch of the cutting chip on the surface of the workpiece is effectively avoided, the problems of flow and discharge blockage of grinding fluid and grinding chip are reduced, and higher surface quality is further obtained.

Description

A Modular Distributed Flat Grinder

technical field

The invention belongs to the field of flat grinding discs, in particular to a modular distributed flat grinding disc.

Background technique

Grinding and polishing processes are widely used in the processing of semiconductor materials. With the further development of integrated circuit technology and the increase in the integration of components, it is required that the surface flatness of the wafer in the components reaches the nanometer level. As the wafer size continues to increase, higher requirements are put forward for the grinding disc, which is an important factor affecting the grinding and polishing process quality, surface accuracy, material removal rate and material removal stability.

Due to the random and disordered arrangement of diamonds in the existing conventional diamond grinding discs, the grinding fluid flow is easily blocked during the grinding process, the utilization rate is not high, and chip removal is difficult, resulting in low material removal rate and material removal. The stability is poor, causing secondary damage to the surface of the workpiece, and the surface quality is lower than expected.

Today's research mainly focuses on grinding surfaces with different designs to obtain higher workpiece surface quality, but these designs are often based on engineering experience of tribological lag. Quality-wise performance improvements are limited.

Contents of the invention

The purpose of the present invention is to provide a modular distributed flat grinding disc to solve the problem of low material removal rate, poor material removal stability, low cooling fluid utilization rate and cooling The problem of poor fluid flow.

A modular distributed flat grinding disc, comprising a grinding disc body and an involute groove opened on the end face of the grinding disc body, a large tooth module distribution area and a small tooth module distribution area are set on the end face of the grinding disc body, the large tooth module distribution area and the small tooth module distribution area The tooth module distribution area is set along the involute groove, and the width between the involute grooves on both sides of the large tooth module distribution area is greater than the width between the small tooth module distribution area; The tooth module distribution area is arranged in multiple arrays along the circumferential direction of the grinding disc body, and a plurality of small tooth module distribution areas are set between two adjacent large tooth module distribution areas. module; the curve parameter equation of the involute groove is:

The value range of t is 0～2Π.

Preferably, the involute groove has a depth of 3mm and a width of 2mm.

Preferably, the tooth profile module comprises a tooth star and a tooth groove having the same width.

Preferably, the depths of the tooth star and the tooth groove are both 2mm.

Preferably, the large-tooth module distribution area and the small-tooth module distribution area are divided into inner ring, middle ring, and outer ring along the radial direction of the grinding disc body, and the structural size of the tooth-type modules in the large-tooth module distribution area in the same ring is small tooth Twice the size of the toothed module structure in the module distribution area.

Preferably, a plurality of circular grooves are arranged at intervals along the radial direction on the grinding disc body, and the tooth-shaped module is arranged between the two circular grooves along the radial direction of the grinding disc body.

Preferably, the circular groove has a depth of 3mm and a width of 2mm.

Preferably, in the distribution area of the large tooth modules, the width of the tooth-type modules in each ring increases sequentially from the inner to the outer along the radial direction of the grinding disc body.

Preferably, the cross section of the tooth star is U-shaped, the cross section of the tooth groove is an isosceles triangle, and the depth of the tooth star and the depth of the tooth groove are both 2 mm.

Preferably, the distribution area of the same tooth module is arranged oppositely to two adjacent tooth modules in the radial direction.

Compared with the prior art, the present invention has the following beneficial technical effects:

The present invention is a modular distributed flat grinding disc. By setting the large tooth module distribution area and the small tooth module distribution area on the end surface of the grinding disc body, the large tooth module distribution area and the small tooth module distribution area are arranged along the involute groove , the width between the involute grooves on both sides of the distribution area of the large tooth module is greater than the width between the involute grooves on both sides of the distribution area of the small tooth module; Multiple small tooth module distribution areas are set between two adjacent large tooth module distribution areas, and tooth type modules are set in both the large tooth module distribution area and the small tooth module distribution area; Combined with the tooth profile module, the grinding surface structure is optimized to effectively avoid secondary scratches on the workpiece surface by chips, reduce the flow and discharge of grinding fluid and grinding chips, and obtain higher surface quality.

Further, the depth of the involute groove and the circular groove are both 3mm and the width is 2mm, so as to improve the discharge efficiency of grinding debris, the utilization rate and fluidity of grinding fluid, and reduce the uneven distribution of grinding fluid. Or secondary damage caused by residual wear debris.

Further, the distribution area of the same tooth module is arranged oppositely to two adjacent tooth modules in the radial direction, so as to further increase the material removal rate in the grinding process.

The present invention improves the utilization rate of coolant and the discharge efficiency of grinding debris through the design of involute grooves and concentric grooves, and reduces the secondary damage problem in the grinding process; through the design of the distribution area of the large and small tooth modules, The stability of material removal during the grinding process is optimized, effectively improving the grinding quality.

Description of drawings

Fig. 1 is a front view of the main body of the grinding disc in the embodiment of the present invention.

Fig. 2 is a schematic structural diagram of the distribution area of the large-tooth module and the distribution area of the small-tooth module in the embodiment of the present invention.

Fig. 3 is a schematic diagram of the arrangement of the distribution area of the large tooth module and the distribution area of the small tooth module at intervals in the embodiment of the present invention.

Fig. 4 is a schematic diagram of the interval distribution structure of the large tooth module distribution area in the embodiment of the present invention.

Fig. 5 is a schematic diagram of the structure of the tooth star and the tooth groove in the embodiment of the present invention.

Fig. 6 is a schematic structural diagram of a toothed module in an embodiment of the present invention.

Explanation of marks in the figure: large tooth module distribution area 1, small tooth module distribution area 2, tooth star 3, tooth groove 4, involute groove 5, inner ring 6, middle ring 7, outer ring 8, concentric circular grooves 9, tooth profile module 10, area rotation angle 11.

Detailed ways

In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

As shown in Figure 1, a modular distributed flat grinding disc includes a grinding disc body, the end face of the grinding disc body is provided with a large tooth module distribution area 1 and a small tooth module distribution area 2, and a large tooth module distribution area 1 and a small tooth module distribution area Areas 2 are all arranged along the involute grooves 5, and the width between the involute grooves on both sides of the large tooth module distribution area 1 is greater than the width between the involute grooves on both sides of the small tooth module distribution area 2; The large tooth module distribution area 1 is arranged in multiple arrays along the circumferential direction of the grinding disc body, and a plurality of small tooth module distribution areas 2 are arranged between two adjacent large tooth module distribution areas 1, and the large tooth module distribution area 1 and the small tooth module distribution area 2 are equipped with a tooth profile module 10; the curve parameter equation of the involute groove 5 is:

The value range of t is 0～2Π,

The body of the grinding disc is stacked by a base layer and a working layer along its axial direction, and the large tooth module distribution area 1 and the small tooth module distribution area 2 are arranged on the working layer; the large tooth module distribution area 1 and the small tooth module distribution area 2 The tooth-shaped modules have different sizes, and the tooth-shaped modules are arranged in modular units in the distribution area 1 of the large-tooth module and the distribution area 2 of the small-tooth module.

Each large-tooth module distribution area 1 and each small-tooth module distribution area 2 are centered on the axis of the grinding disc body, and the rotation angle is 60 degrees, forming a complete module distribution area.

The involute groove 5 has a depth of 3 mm and a width of 2 mm; six large-tooth module distribution areas 1 are distributed rotationally symmetrically around the axis of the grinding disc body, and multiple large-tooth module distribution areas 1 are arranged between two adjacent large-tooth module distribution areas 1 Small teeth module distribution area 2.

The tooth-shaped modules arranged in the large-tooth module distribution area 1 and the small-tooth module distribution area 2 include tooth stars 3 and tooth grooves 4 with the same width, and the depths of the tooth stars 3 and tooth grooves 4 in each tooth-shaped module are both 2mm.

The arc angle occupied by the distribution area 1 of each large tooth module is 10°, and it is arranged along the direction of the involute groove 5 from the inner boundary of the working layer to the outer boundary. The tooth star 3 and the tooth groove 4 of each large tooth module unit The concentric circular grooves 9 are connected; the small tooth module distribution area 2 occupies an overall arc angle of 50°, and is arranged at intervals with the large tooth module distribution area 1 to improve the uniformity of material removal during the grinding process.

Large-tooth module distribution area 1 and small-tooth module distribution area 2 are divided into inner ring 6, middle ring 7, and outer ring 8 along the radial direction of the grinding plate body. It is twice the structural size of the tooth module in the distribution area 2 of the small tooth module; there are a plurality of circular grooves 9 distributed along the radial interval on the grinding disc body, and the tooth module is arranged in two circular grooves along the radial direction of the grinding disc body 9, the depth of the circular groove 9 is 3mm, and the width is 2mm.

Specifically, in the distribution area of the large-tooth modules, the width of the tooth-shaped modules in each ring increases sequentially from the inside to the outside along the radial direction of the grinding disc body. Specifically, the width of the tooth-shaped modules in the inner ring 6 in the distribution area of the large-tooth modules is 4mm, the width of the tooth module in the middle ring 7 in the distribution area of the large tooth module is 6mm, and the width of the tooth module in the outer ring 8 in the distribution area of the large tooth module is 8mm.

The width of the tooth-shaped module in the distribution area 2 of the small-tooth module in the same ring is 0.5 times the width of the tooth-shaped module in the distribution area 1 of the large-tooth module; specifically, the width of the tooth-shaped module in the inner ring 6 of the small-tooth module distribution area 2 The tooth module width in the middle ring 7 of the tooth module distribution area 2 is 3 mm, and the tooth module width in the outer ring 8 of the tooth module distribution area 2 is 4 mm.

As shown in Figure 5 and Figure 6, the cross section of tooth star 3 is U-shaped, the cross section of tooth alveolar 4 is an isosceles triangle, the depth of tooth star 3 and the depth of alveolar 4 are both 2mm; tooth star 3 and alveolar 4 The front end is provided with an inclination angle, and the specific inclination angle of the tooth shape is 13°; the inclination angle of the tooth star 3 and the inclination angle of the tooth groove 4 are located at the same end, forming the tip of the tooth-shaped module 10, which is tangential to the circumference of the grinding disc body.

The depth of the involute groove 5 and the circular groove 9 of the present invention are both 3 mm and the width is 2 mm, so as to improve the discharge efficiency of grinding debris and the utilization rate and fluidity of grinding fluid, and reduce the grinding fluid caused by uneven distribution of grinding fluid. Or secondary damage caused by residual wear debris.

As shown in FIG. 2 , two adjacent tooth modules 10 in the same tooth module distribution area are arranged oppositely in the radial direction, so as to further increase the material removal rate during the grinding process.

As shown in Figure 3 and Figure 4, the distribution areas 1 of the large tooth modules in the inner ring 6, the middle ring 7 and the outer ring 8 are alternately arranged at intervals along the circumferential direction of the grinding disc body, and the specific area rotation angles shown in Figure 3 and Figure 4 11 and the positional relationship of the tooth module 10 to further increase the material removal rate in the grinding process.

The modular distributed flat grinding disc of the present invention is equipped with a toothed module 10 on its upper end, further improving the material removal rate in the processing process; the utilization rate of the cooling liquid and the The discharge efficiency of grinding debris reduces the secondary damage during the grinding process; through the design of the distribution area of the large and small tooth modules, the stability of material removal during the grinding process is optimized, and the grinding quality is effectively improved.

The present invention is described through some embodiments, those skilled in the art know that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, the features and embodiments may be modified to adapt a particular situation and material to the teachings of the invention without departing from the spirit and scope of the invention. Therefore, the present invention is not limited by the specific embodiments disclosed here, and all embodiments falling within the scope of the claims of the present application belong to the protection scope of the present invention.

Claims (7)

1. A modular distributed flat grinding disc is characterized in that it comprises a grinding disc body and an involute groove (5) provided on the end face of the grinding disc body, and the end face of the grinding disc body is provided with a large tooth module distribution area (1) and a small The tooth module distribution area (2), the large tooth module distribution area (1) and the small tooth module distribution area (2) are all set along the involute groove (5), and the involute grooves on both sides of the large tooth module distribution area (1) The width between the line grooves is greater than the width between the involute grooves on both sides of the small tooth module distribution area (2); the large tooth module distribution area (1) is arranged in multiple arrays along the circumferential direction of the grinding disc body, and two adjacent A plurality of small-tooth module distribution areas (2) are arranged between two large-tooth module distribution areas (1), and tooth-shaped modules (10) are arranged in both the large-tooth module distribution area (1) and the small-tooth module distribution area (2); The curve parameter equation of the involute groove (5) is: The value of t ranges from 0 to 2Π; the tooth-shaped module includes a tooth star (3) and a tooth slot (4) with the same width, the cross-section of the tooth star (3) is U-shaped, and the cross-section of the tooth slot (4) is isosceles Triangular, the depth of the tooth star (3) and the depth of the tooth groove (4) are 2mm. 2. A modular distributed flat grinding disc according to claim 1, characterized in that the depth of the involute groove (5) is 3mm, and the width is 2mm. 3. A modular distributed flat grinding disc according to claim 1, characterized in that the large tooth module distribution area (1) and the small tooth module distribution area (2) are divided into inner rings ( 6), the middle ring (7), the outer ring (8), the structural size of the tooth module in the distribution area (1) of the large tooth module in the same ring is the structural size of the tooth module in the distribution area (2) of the small tooth module twice as much. 4. A modular distributed flat grinding disc according to claim 1, characterized in that, the grinding disc body is radially spaced with a plurality of circular grooves (9), and the toothed modules are arranged along the radial direction of the grinding disc body Between two circular grooves (9). 5. A modular distributed flat grinding disc according to claim 1, characterized in that the circular groove (9) has a depth of 3mm and a width of 2mm. 6. A modular distributed flat grinding disc according to claim 3, characterized in that, in the distribution area of the large tooth modules along the radial direction of the grinding disc body, the width of the tooth-shaped modules in each circle increases sequentially from the inner to the outer. 7. A modular distributed flat grinding disc according to claim 1, characterized in that two adjacent tooth-type modules (10) are oppositely arranged in the distribution area of the same tooth module along the radial direction.