CN114942486A - Liquid crystal holographic film and preparation method thereof, detection light path and detection method - Google Patents
Liquid crystal holographic film and preparation method thereof, detection light path and detection method Download PDFInfo
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- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 108
- 238000001514 detection method Methods 0.000 title claims abstract description 53
- 238000002360 preparation method Methods 0.000 title abstract description 7
- 230000003287 optical effect Effects 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000000987 azo dye Substances 0.000 claims description 19
- 238000009826 distribution Methods 0.000 claims description 15
- 238000004132 cross linking Methods 0.000 claims description 8
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 6
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 6
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- 238000013461 design Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
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- 238000005530 etching Methods 0.000 description 6
- 238000001723 curing Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000001093 holography Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3016—Polarising elements involving passive liquid crystal elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
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- G—PHYSICS
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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Abstract
本发明属于光学技术领域,公开了一种液晶全息片及制备方法与检测光路及检测方法;液晶全息片包括基底、配向层、液晶层;配向层中的偶氮染料分子通过光控取向技术被操控为与检测待测光学元件对应的计算全息图相同的取向;采用光控取向方法,控制配向层中相邻条纹的不同朝向,PB相位原理诱导的液晶分子不同朝向条纹则会对同一入射方向和偏振方向的入射光会产生不同的折射率,入射光通过固定厚度不同折射率的液晶材料后,就会形成固定的相位差;从而基底、配向层、液晶层构成具有补偿入射光固定相位差功能的液晶全息片;调节液晶材料厚度或更换液晶材料可改变液晶材料折射率,进而实现相位差的可控设计。
The invention belongs to the technical field of optics, and discloses a liquid crystal hologram, a preparation method, a detection optical path and a detection method; the liquid crystal hologram comprises a substrate, an alignment layer and a liquid crystal layer; The control is the same orientation as the computational hologram corresponding to the optical element to be detected; the photo-controlled orientation method is used to control the different orientations of adjacent stripes in the alignment layer, and the stripes with different orientations of liquid crystal molecules induced by the PB phase principle will respond to the same incident direction. The incident light in the polarization direction will have different refractive indices. After the incident light passes through the liquid crystal material with a fixed thickness and different refractive index, a fixed phase difference will be formed; thus the substrate, the alignment layer and the liquid crystal layer form a fixed phase difference that compensates for the incident light. Functional liquid crystal hologram; adjusting the thickness of the liquid crystal material or changing the liquid crystal material can change the refractive index of the liquid crystal material, thereby realizing the controllable design of the retardation.
Description
技术领域technical field
本发明属于光学技术领域,涉及一种液晶全息片、制备方法及非球面检测光路。The invention belongs to the technical field of optics, and relates to a liquid crystal holographic sheet, a preparation method and an aspherical surface detection optical path.
背景技术Background technique
当前,对非球面的检测方法有很多,可以分为接触测量法和非接触式测量法两大类,而在众多非接触式非球面面形测量方法中,计算全息法具有很大的优势,它可以测量非常复杂的面形,不需要使用价格昂贵的参考实体和零位透镜,是一种高精度的干涉检测法,它可以产生任意待测非球面所需的理想波前并对其进行相位补偿,因此,计算全息法被广泛应用于非球面检测中。 At present, there are many detection methods for aspheric surface, which can be divided into two categories: contact measurement method and non-contact measurement method. Among many non-contact aspheric surface measurement methods, computational holography method has great advantages. It can measure very complex surface shapes without the use of expensive reference entities and zero-position lenses. It is a high-precision interferometric detection method. It can generate the ideal wavefront required for any aspheric surface to be measured and analyze it. Phase compensation and, therefore, computational holography are widely used in aspheric detection.
1)基于计算全息的检测原理1) Detection principle based on computational holography
从干涉仪中发出的光波为标准球面波,经过设计好的与待测非球面对应的计算全息图后,标准球面波被全息片相位补偿,所有光线均沿非球面法线方向垂直入射待测非球面,再经待测非球面反射后的光波就携带了其面形信息,反射光波再一次经过全息片补偿后,变为球面波进入干涉仪,与干涉仪中的参考波形成干涉,产生干涉条纹图样,分析条纹的图样就可以得到非球面的面形偏差。The light wave emitted from the interferometer is a standard spherical wave. After the calculated hologram corresponding to the aspheric surface to be measured is designed, the standard spherical wave is phase-compensated by the hologram, and all the light rays are incident vertically along the normal direction of the aspheric surface to be measured. The aspheric surface, and the light wave reflected by the aspheric surface to be measured carries its surface shape information. After the reflected light wave is compensated by the hologram again, it becomes a spherical wave and enters the interferometer, forming interference with the reference wave in the interferometer, resulting in The interference fringe pattern can be obtained by analyzing the fringe pattern to obtain the surface deviation of the aspheric surface.
2)现有计算全息片检测存在的问题2) Problems existing in the detection of existing computational holograms
计算全息片的图案与圆光栅类似,通常加工在玻璃或者熔石英的光学基板上。计算全息片因记录信息方式的不同可以分为两类:一类是振幅型全息片,另一类是位相型全息片。振幅型全息片通过传统的光刻工艺就可以获得,流程简单,加工精度虽高,但其衍射效率相比相位型全息片的衍射效率较低。相位型全息片,通过多台阶光刻来实现,理论上2台阶的衍射效率为42%,4台阶衍射效率为78%。但是多台阶光刻及蚀刻转移存在加工难度大,转移误差大的问题。Computational holograms are similar in pattern to circular gratings and are usually fabricated on glass or fused silica optical substrates. Computational holograms can be divided into two categories due to different ways of recording information: one is amplitude-type holograms, and the other is phase-type holograms. The amplitude-type hologram can be obtained by the traditional photolithography process, the process is simple, and the processing accuracy is high, but its diffraction efficiency is lower than that of the phase-type hologram. The phase hologram is realized by multi-step lithography. Theoretically, the diffraction efficiency of 2 steps is 42%, and the diffraction efficiency of 4 steps is 78%. However, multi-step lithography and etching transfer have the problems of difficult processing and large transfer error.
传统计算全息片在基板上进行图案蚀刻转移的过程中,若刻蚀深度过大,会导致刻蚀时间长,沟槽易受发热或者掩膜变形影响而发生变形,就会使刻蚀条纹的位置发生偏移,造成精度下降,影响光波通过全息片后的相位分布,进而影响非球面系统的检测精度。In the process of pattern etching and transfer of traditional computational holograms on the substrate, if the etching depth is too large, the etching time will be long, and the grooves will be easily deformed by heat or mask deformation, which will cause the etching stripes. The position is shifted, resulting in a decrease in accuracy, affecting the phase distribution of the light wave after passing through the hologram, and thus affecting the detection accuracy of the aspheric system.
发明内容SUMMARY OF THE INVENTION
为解决背景技术中指出的问题,提出的技术方案如下。In order to solve the problems pointed out in the background art, the proposed technical solutions are as follows.
一种液晶全息片,用于光学元件检测,包括基底、基底上设置的配向层、配向层上设置的液晶层;所述的配向层中包含偶氮染料分子,偶氮染料分子通过光控取向技术被操控为与检测待测光学元件对应的计算全息图相同的取向;液晶层选用液晶聚合材料通过紫外交联固化而成。A liquid crystal hologram, used for optical element detection, comprising a substrate, an alignment layer provided on the substrate, and a liquid crystal layer provided on the alignment layer; the alignment layer contains azo dye molecules, and the azo dye molecules are oriented by light control The technology is manipulated to be in the same orientation as the computational hologram corresponding to the optical element to be tested; the liquid crystal layer is made of liquid crystal polymer material and cured by UV cross-linking.
液晶全息片中配向层中偶氮染料分子排布为检测待测光学元件对应的计算全息图相同的取向,液晶层中的液晶分子利用PB相位原理被取向层中的偶氮染料分子诱导成计算全息图排布取向,通过紫外交联固化将液晶分子的计算全息图排布取向固化下来。The azo dye molecules in the alignment layer in the liquid crystal hologram are arranged to detect the same orientation of the computational hologram corresponding to the optical element to be tested. The liquid crystal molecules in the liquid crystal layer are induced by the azo dye molecules in the alignment layer to calculate The hologram is arranged and oriented, and the calculated hologram arrangement and orientation of the liquid crystal molecules are cured by ultraviolet cross-linking curing.
采用光控取向方法,控制配向层中相邻条纹的不同朝向,PB相位原理诱导的液晶分子不同朝向条纹则会对同一入射方向和偏振方向的入射光会产生不同的折射率,入射光通过固定厚度不同折射率的液晶材料后,就会形成固定的相位差;从而基底、配向层、液晶层构成具有补偿入射光固定相位差功能的液晶全息片;调节液晶材料厚度或更换液晶材料可改变液晶材料折射率,进而实现相位差的可控设计。液晶能利用液晶分子的光学各向异性产生偏振态及相位调制,形成“液晶位相型光栅”,实现计算全息片的功能。即通过对液晶分子的取向分布精确地调控,进而调制出射光波的相位分布。The light-controlled alignment method is used to control the different orientations of adjacent stripes in the alignment layer. The stripes with different orientations of liquid crystal molecules induced by the PB phase principle will produce different refractive indices for incident light in the same incident direction and polarization direction. After the liquid crystal material with different thicknesses of refractive index, a fixed phase difference will be formed; thus the substrate, the alignment layer and the liquid crystal layer constitute a liquid crystal hologram with the function of compensating the fixed phase difference of the incident light; adjusting the thickness of the liquid crystal material or changing the liquid crystal material can change the liquid crystal The refractive index of the material, and then the controllable design of the retardation is realized. Liquid crystal can use the optical anisotropy of liquid crystal molecules to generate polarization state and phase modulation to form a "liquid crystal phase grating" to realize the function of a computational hologram. That is, by precisely adjusting the orientation distribution of the liquid crystal molecules, the phase distribution of the outgoing light wave is modulated.
为实现相邻条纹具有最大的折射率差,相邻液晶分子区域的取向互为垂直;根据补偿的相位分布,计算全息图分布包括:光栅式分布和环带分布。In order to achieve the maximum refractive index difference between adjacent stripes, the orientations of adjacent liquid crystal molecular regions are perpendicular to each other; according to the compensated phase distribution, the calculated hologram distribution includes: grating distribution and annular band distribution.
优选地,基于上述液晶全息片,本发明还公开一种液晶全息片,用于检测非球面,包括镜筒,以及在镜筒中沿着镜筒中心轴线依次装配的偏振器、四分之一波片、液晶全息片。使用时激光光源发出的入射检测光首先经过偏振器的调制作用,将入射检测光调制为线偏光,再经过四分之一波片的偏振调制而变成圆偏光,圆偏光入射液晶全息片就会使得入射光波得到相位补偿及偏振态反转,进而成为理想检测光波对非球面面形进行检测。Preferably, based on the above-mentioned liquid crystal holographic sheet, the present invention also discloses a liquid crystal holographic sheet for detecting aspherical surfaces, comprising a lens barrel, and a polarizer, a quarter wave and a film, liquid crystal hologram. When in use, the incident detection light emitted by the laser light source is firstly modulated by the polarizer to modulate the incident detection light into linearly polarized light, and then undergo polarization modulation by a quarter-wave plate to become circularly polarized light. It will make the incident light wave get phase compensation and polarization state inversion, and then become an ideal detection light wave to detect aspheric surface shape.
一种液晶全息片的制备方法,将偶氮染料作为配向层的材料,涂布在基底上;采用光控取向方法,使得偶氮染料分子被操控为与检测待测光学元件对应的计算全息图相同的取向形成配向层;在配向层表面涂覆液晶层,液晶层中的液晶分子利用PB相位原理被取向层中的偶氮染料分子诱导成计算全息图排布取向,使用UV灯照射,通过紫外交联固化将液晶分子的计算全息图排布取向固化下来。A method for preparing a liquid crystal hologram, which uses an azo dye as a material for an alignment layer and coats a substrate; a photo-controlled alignment method is adopted, so that the azo dye molecule is manipulated into a computational hologram corresponding to an optical element to be detected. The same orientation forms an alignment layer; the surface of the alignment layer is coated with a liquid crystal layer, and the liquid crystal molecules in the liquid crystal layer are induced by the azo dye molecules in the alignment layer to form a computational hologram arrangement orientation using the PB phase principle. The UV cross-linking curing cures the CGH alignment of the liquid crystal molecules.
液晶全息片相比传统全息片有诸多优势,工艺制作上,液晶全息片自平滑比传统全息片多台阶,因此,基于液晶的位相型光栅衍射效率值理论上要高于传统全息片衍射效率,也易达到检测精度要求。其次,液晶全息片不需要蚀刻转移,不会有精度或者条纹变形问题。制备流程上,传统全息片的制备需要光刻及蚀刻转移,而液晶全息片通过对取向剂的偏振曝光、液晶聚合物的旋涂及紫外固化来制备会相对容易。Compared with traditional holograms, liquid crystal holograms have many advantages. In terms of process production, liquid crystal holograms have more steps in self-smoothing than traditional holograms. Therefore, the diffraction efficiency value of liquid crystal-based phase gratings is theoretically higher than that of traditional holograms. It is also easy to meet the detection accuracy requirements. Secondly, the liquid crystal hologram does not need to be etched and transferred, and there will be no problems with precision or stripe deformation. In the preparation process, the preparation of traditional holograms requires photolithography and etching transfer, while liquid crystal holograms are relatively easy to prepare by polarized exposure to alignment agents, spin coating of liquid crystal polymers and UV curing.
使用液晶聚合物来做非球面检测全息片,液晶聚合物通过紫外交联形成稳定的光学层,具有可靠性高、透过率高、柔性等优点。The liquid crystal polymer is used as the aspheric detection hologram. The liquid crystal polymer forms a stable optical layer through UV cross-linking, which has the advantages of high reliability, high transmittance and flexibility.
一种检测光路,用于检测光学元件面形误差,包括激光器、分束镜、液晶全息片;激光器发出的入射光经分束镜被分为两束,其中一束作为参考光,另一束光通过液晶全息片被调制为与待测光学元件表面吻合的标准检测光波,标准检测光波经待测光学元件反射后形成携带待测光学元件表面面形误差的检测光,检测光与参考光干涉形成干涉条纹。通过对干涉条纹的判读可以得知待测光学元件的表面面形误差。A detection optical path is used to detect the surface shape error of optical components, including a laser, a beam splitter, and a liquid crystal hologram; the incident light emitted by the laser is divided into two beams by the beam splitter, one of which is used as a reference beam, and the other beam is used as a reference beam. The light is modulated by the liquid crystal hologram into a standard detection light wave that matches the surface of the optical element to be tested. The standard detection light wave is reflected by the optical element to be tested to form a detection light that carries the surface shape error of the optical element to be tested. The detection light interferes with the reference light. form interference fringes. By interpreting the interference fringes, the surface shape error of the optical element to be tested can be known.
优选地在检测光路中还设置有CCD,控制器;CCD用于接收干涉条纹图像,并将图像传输至控制器,控制器用于对干涉条纹进行解读并输出待测光学元件的表面面形误差分布图。Preferably, a CCD is also arranged in the detection optical path, and the controller is used for receiving the interference fringe image and transmitting the image to the controller, and the controller is used for interpreting the interference fringe and outputting the surface shape error distribution of the optical element to be tested. picture.
附图说明Description of drawings
图1为一种液晶全息片示意图;1 is a schematic diagram of a liquid crystal hologram;
图2为用于检测光学元件的液晶全息片补偿器示意图;2 is a schematic diagram of a liquid crystal hologram compensator for detecting optical elements;
图3为液晶全息片补偿器的光波检测调制示意图;3 is a schematic diagram of light wave detection and modulation of a liquid crystal hologram compensator;
图4为液晶全息片的制备方法流程图;4 is a flow chart of a method for preparing a liquid crystal hologram;
图5为光栅型液晶分子分布示意图;5 is a schematic diagram of the distribution of grating-type liquid crystal molecules;
图6为旋转对称圆环型液晶分子分布示意图;6 is a schematic diagram of the distribution of rotationally symmetric annular liquid crystal molecules;
图7为一种检测光路示意图。FIG. 7 is a schematic diagram of a detection optical path.
具体实施方式Detailed ways
为了使本申请的目的、技术方案和优点更加清楚,下面将合附图对本申请做进一步地详细描述。In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be described in further detail below with reference to the accompanying drawings.
实施例一Example 1
一种液晶全息片,用于光学元件检测,如图1所示包括基底1、基底上设置的配向层2、配向层上设置的液晶层3;所述的配向层中包含偶氮染料分子,偶氮染料分子通过光控取向技术被操控为与检测待测光学元件对应的计算全息图相同的取向;液晶层选用液晶聚合材料通过紫外交联固化而成。A liquid crystal hologram, used for optical element detection, comprises a substrate 1, an
液晶全息片偏振调制的作用会带来入射光偏振态的改变,对检测光路会产生影响,因此在液晶全息片前设置偏振器、四分之一波片;偏振器、四分之一波片、液晶全息片共同组成用于检测光学元件的补偿器液晶全息片补偿器。The effect of polarization modulation of the liquid crystal hologram will change the polarization state of the incident light, which will affect the detection light path. Therefore, a polarizer and a quarter-wave plate are installed in front of the liquid crystal hologram; polarizer and quarter-wave plate , liquid crystal holographic sheet together to form a compensator for detecting optical components liquid crystal holographic sheet compensator.
至少在一个应用实例中,如图2所示,将偏振器5、四分之一波片6、液晶全息片7装配在镜筒4中,形成用于检测光学元件的液晶全息片补偿器。如图3所示,在全息片前加入偏振器及四分之一波片,将入射光波先调制成圆偏光,再经液晶全息片的位相补偿作用,使得出射的光波是带有理想非球面面形信息的光波。In at least one application example, as shown in FIG. 2 , the
实施例二
一种液晶全息片的制备方法,包括如下步骤:A preparation method of a liquid crystal hologram, comprising the following steps:
(a).将偶氮染料作为配向层的材料,在基底涂布0.5% 偶氮染料,涂布转速3000RPM,持续30 s,100度加热5分钟;(a). The azo dye is used as the material of the alignment layer, and the substrate is coated with 0.5% azo dye, and the coating speed is 3000 RPM for 30 s and heated at 100 degrees for 5 minutes;
(b).采用光控取向方法,使得偶氮染料分子被操控为与检测待测光学元件对应的计算全息图相同的取向,(b). Using a photo-controlled orientation method, the azo dye molecules are manipulated into the same orientation as the computational hologram corresponding to the optical element to be detected,
(c).涂覆液晶层,80度下UV灯照射5分钟,液晶层中的液晶分子利用PB相位原理被取向层中的偶氮染料分子诱导成计算全息图排布取向,通过紫外交联固化将液晶分子的计算全息图排布取向固化下来。(c) Coating the liquid crystal layer, irradiating the UV lamp at 80 degrees for 5 minutes, the liquid crystal molecules in the liquid crystal layer are induced by the azo dye molecules in the alignment layer to form a computational hologram arrangement orientation by using the PB phase principle, and cross-linking by UV The curing solidifies the computational hologram arrangement orientation of the liquid crystal molecules.
在一个具体实例中,一种液晶全息片的制备方法,如图4所示,全息图补偿相位为光栅式分布,步骤(b).中第一次线偏振光预照射取向,405nm光45 s;然后加入掩膜版,改变入射光偏振方向与第一次垂直,形成第二次取向;经过制作后,光栅型全息片的液晶分子分布如图5所示。在液晶分子朝向垂直的相邻区域,若用相同偏振态的激光入射,由于液晶分子的各向异性,在相邻区域对应的折射率不同,产生位相光栅的效果。In a specific example, a method for preparing a liquid crystal hologram, as shown in Figure 4, the compensation phase of the hologram is a grating distribution, the first linearly polarized light in step (b). ; Then a mask is added to change the polarization direction of the incident light to be perpendicular to the first time to form the second orientation; In the adjacent areas where the liquid crystal molecules are oriented vertically, if the laser with the same polarization state is incident, due to the anisotropy of the liquid crystal molecules, the corresponding refractive indices in the adjacent areas are different, resulting in a phase grating effect.
在另一个具体实例中,一种液晶全息片,若全息图为补偿相位为旋转对称式分布,则液晶偏振全息片就为旋转对称的中心圆环。全息片的液晶分子排布如图6所示,其中每个圆环表示液晶分子取向相同的区域,相邻的圆环液晶分子取向相互垂直。In another specific example, for a liquid crystal hologram, if the compensation phase of the hologram is a rotationally symmetrical distribution, the liquid crystal polarization hologram is a rotationally symmetrical central ring. The arrangement of liquid crystal molecules of the holographic sheet is shown in FIG. 6 , in which each ring represents a region with the same orientation of liquid crystal molecules, and the orientations of liquid crystal molecules of adjacent rings are perpendicular to each other.
实施例三
一种检测光路,用于检测光学元件面形误差,所述的检测光路为菲索型检测光路,如图7所示包括:激光器8、分束镜9、偏振器5、半透半反镜10、第一会聚透镜11、四分之一波片6、液晶全息片7、第二会聚透镜13、CCD14;A detection optical path is used to detect the surface shape error of an optical element. The detection optical path is a Fizeau-type detection optical path. As shown in Figure 7, it includes: a laser 8, a beam splitter 9, a
激光器出射的光波经分束镜,先通过偏振器,再经半透半反镜,半透半反镜的前表面返回的光为参考光,参考光被分束镜后表面反射透过第二会聚透镜进入CCD中;透过半透半反镜透射光依次通过第一透镜、四分之一波片、液晶全息片后被调制成使其沿待测光学元件12法线方向入射的标准检测光波,然后再经过待测光学元件反射;携带着待测光学元件的面形偏差信息的检测光按原路返回,并经分束镜后表面反射透过第二会聚透镜进入CCD中,检测光与参考光发生干涉,CCD接收干涉条纹。The light wave emitted by the laser passes through the beam splitter, first passes through the polarizer, and then passes through the half mirror. The light returned from the front surface of the half mirror is the reference light, and the reference light is reflected by the back surface of the beam splitter and passes through the second half mirror. The condensing lens enters the CCD; the transmitted light through the half mirror passes through the first lens, quarter-wave plate, and liquid crystal hologram in sequence, and is modulated into a standard detection light wave that is incident along the normal direction of the
菲索型检测光路检测光与参考光共光路,减少了误差源,解决了受环境中温度和振动影响不同所造成的干涉条纹不稳定的问题;检测光路中的偏振器,在光路中放置于分束镜与半透半反镜之间,使激光器出射光束调制为线偏振光,再经半透半反镜的分束作用后,参考光与检测光均成为线偏光;Fizeau type detection optical path The detection light and the reference light share the same optical path, which reduces the source of error and solves the problem of unstable interference fringes caused by different effects of temperature and vibration in the environment; the polarizer in the detection optical path is placed in the optical path. Between the beam splitter and the half mirror, the output beam of the laser is modulated into linearly polarized light, and after the beam splitting effect of the half mirror, both the reference light and the detection light become linearly polarized light;
所述的偏振器及四分之一波片,偏振器及四分之一波片对激光器出射的光波进行偏振态调制,使入射到液晶全息片的光波为圆偏振光,进而使全息片工作在检测光路中,来检测非球面面形的偏差;所述的参考光与检测光的干涉为偏振光干涉,在普通的检测光路中,由于没有偏振器及波片的调制,激光器出射的光波在光路中不会有偏振态的改变及检测影响,检测光与参考光均不是偏振光。而在液晶全息片的检测光路中,检测光与参考光均受到偏振器的调制,两束光波的干涉则为偏振光干涉;The polarizer and the quarter-wave plate, the polarizer and the quarter-wave plate modulate the polarization state of the light wave emitted by the laser, so that the light wave incident on the liquid crystal hologram is circularly polarized light, and then the hologram works. In the detection optical path, the deviation of the aspheric surface shape is detected; the interference between the reference light and the detection light is polarized light interference. In the optical path, there will be no change of polarization state and influence of detection, and neither the detection light nor the reference light is polarized light. In the detection light path of the liquid crystal hologram, both the detection light and the reference light are modulated by the polarizer, and the interference of the two light waves is polarized light interference;
偏振器:改变入射光的偏振态,得到线偏光;Polarizer: change the polarization state of incident light to obtain linearly polarized light;
四分之一波片:让四分之一波片的光轴和偏振光的振动方向成45度角,使入射线偏振光转为圆偏光;Quarter-wave plate: Make the optical axis of the quarter-wave plate and the vibration direction of the polarized light at a 45-degree angle, so that the incident ray polarized light is converted into circularly polarized light;
液晶全息片:与偏振光栅对入射光偏振态的调制作用相同,以圆偏振光入射时,出射为相反旋性的圆偏振光,作为检测光波再作用于待测非球面以检测面形;Liquid crystal hologram: The modulation effect of the polarization grating on the polarization state of the incident light is the same as that of the polarization grating. When the circularly polarized light is incident, the outgoing circularly polarized light with opposite rotation is used as the detection light wave and then acts on the aspheric surface to be measured to detect the surface shape;
第二会聚透镜:将两束线偏振光经干涉后的条纹图样成像到CCD上。The second condensing lens: The fringe pattern after the interference of the two linearly polarized lights is imaged on the CCD.
在本实施例基础上,一种检测方法,用于检测非球面光学元件面形误差,按液晶全息片的制备方法制作二维光栅式的液晶全息片;选用口径为52*52*8mm石英基底,石英基底透射波前要求小于0.2倍波长;On the basis of this embodiment, a detection method is used to detect the surface shape error of aspheric optical elements, and a two-dimensional grating type liquid crystal hologram is produced according to the preparation method of liquid crystal hologram; the diameter of the quartz substrate is 52*52*8mm , the transmitted wavefront of the quartz substrate is required to be less than 0.2 times the wavelength;
之后按照偶氮染料涂覆、一次曝光、覆盖掩模、二次曝光、涂覆液晶材料和UV灯固化的顺序加工液晶全息片,光栅周期为2微米至20微米。这里以光栅周期为2微米的全息片为例,将制作的实际全息片用于非球面检测光路。Then, the liquid crystal hologram is processed in the order of azo dye coating, primary exposure, cover mask, secondary exposure, coating liquid crystal material, and UV lamp curing, and the grating period is 2 μm to 20 μm. Here, a hologram with a grating period of 2 microns is taken as an example, and the actual hologram produced is used for the aspheric detection optical path.
满足全息片使用条件,实验使用激光波长为632.8nm。可以模拟旋转对称的非球面,产生旋转对称的剩余波前。The conditions for using the hologram are met, and the wavelength of the laser used in the experiment is 632.8 nm. A rotationally symmetric aspheric surface can be modeled, resulting in rotationally symmetric residual wavefronts.
被测非球面面形的参数为:通光口径50.8mm,曲率半径为155.04mm。真值面形误差为0.16倍波长,波面误差值为0.084倍波长。The parameters of the measured aspherical surface are: the clear aperture is 50.8mm, and the curvature radius is 155.04mm. The true surface shape error is 0.16 times the wavelength, and the wavefront error value is 0.084 times the wavelength.
基于液晶偏振的计算全息图利用激光干涉法光路对非球面光学元件检测面形误差数据值为0.17倍波长,波面误差值为0.080倍波长。通过与实际非球面真值面形误差及波面误差值比较,液晶全息片对非球面面形检测精度较高,说明基于液晶偏振的计算全息图对非球面面形检测可行有效。The calculated hologram based on liquid crystal polarization uses the optical path of laser interferometry to detect the surface shape error data value of aspheric optical elements to 0.17 times the wavelength, and the wavefront error value is 0.080 times the wavelength. Compared with the actual aspheric surface shape error and wave surface error value, the liquid crystal hologram has a higher detection accuracy for aspheric surface shape, indicating that the liquid crystal polarization-based computational hologram is feasible and effective for aspheric surface shape detection.
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Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10132531A (en) * | 1996-11-05 | 1998-05-22 | Canon Inc | Measuring method for aspherical form and its device |
JPH10260024A (en) * | 1997-03-17 | 1998-09-29 | Nikon Corp | Aspherical shape measuring device and method |
JPH11325816A (en) * | 1998-05-07 | 1999-11-26 | Nikon Corp | Interferometer for measuring aspherical shape |
JP2000097651A (en) * | 1998-09-22 | 2000-04-07 | Nikon Corp | Method and device for measuring shape of aspheric surface |
US20020080366A1 (en) * | 2000-12-27 | 2002-06-27 | Nikon Corporation | Apparatus for measuring surface shape, lateral coordinate calibration method therefor, and optical member having been measured with said apparatus or method |
WO2003064966A1 (en) * | 2002-01-25 | 2003-08-07 | Nikon Corporation | Interference measuring method, interference measuring device, production method for projection optical system, projection optical system, and projection aligner |
CN1942736A (en) * | 2004-02-11 | 2007-04-04 | 秦内蒂克有限公司 | Surface shape measurement apparatus and method |
US20110090510A1 (en) * | 2009-10-20 | 2011-04-21 | Canon Kabushiki Kaisha | Interferometer |
CN106895784A (en) * | 2017-01-05 | 2017-06-27 | 北京理工大学 | A kind of computed hologram based on liquid crystal material and preparation method thereof |
CN106949853A (en) * | 2017-04-12 | 2017-07-14 | 北京理工大学 | Simultaneous phase-shifting interferometer measuration system and method based on liquid crystal computed hologram |
CN110017767A (en) * | 2019-04-30 | 2019-07-16 | 长春理工大学 | Spatial Phase-shifting Method dynamic interferometer and its application based on LCD space light modulator |
CN110850685A (en) * | 2019-11-22 | 2020-02-28 | 北京理工大学 | Exposure method and device for liquid crystal computer generated hologram |
-
2022
- 2022-06-06 CN CN202210630259.9A patent/CN114942486A/en active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10132531A (en) * | 1996-11-05 | 1998-05-22 | Canon Inc | Measuring method for aspherical form and its device |
JPH10260024A (en) * | 1997-03-17 | 1998-09-29 | Nikon Corp | Aspherical shape measuring device and method |
JPH11325816A (en) * | 1998-05-07 | 1999-11-26 | Nikon Corp | Interferometer for measuring aspherical shape |
JP2000097651A (en) * | 1998-09-22 | 2000-04-07 | Nikon Corp | Method and device for measuring shape of aspheric surface |
US20020080366A1 (en) * | 2000-12-27 | 2002-06-27 | Nikon Corporation | Apparatus for measuring surface shape, lateral coordinate calibration method therefor, and optical member having been measured with said apparatus or method |
WO2003064966A1 (en) * | 2002-01-25 | 2003-08-07 | Nikon Corporation | Interference measuring method, interference measuring device, production method for projection optical system, projection optical system, and projection aligner |
CN1942736A (en) * | 2004-02-11 | 2007-04-04 | 秦内蒂克有限公司 | Surface shape measurement apparatus and method |
US20110090510A1 (en) * | 2009-10-20 | 2011-04-21 | Canon Kabushiki Kaisha | Interferometer |
CN106895784A (en) * | 2017-01-05 | 2017-06-27 | 北京理工大学 | A kind of computed hologram based on liquid crystal material and preparation method thereof |
CN106949853A (en) * | 2017-04-12 | 2017-07-14 | 北京理工大学 | Simultaneous phase-shifting interferometer measuration system and method based on liquid crystal computed hologram |
CN110017767A (en) * | 2019-04-30 | 2019-07-16 | 长春理工大学 | Spatial Phase-shifting Method dynamic interferometer and its application based on LCD space light modulator |
CN110850685A (en) * | 2019-11-22 | 2020-02-28 | 北京理工大学 | Exposure method and device for liquid crystal computer generated hologram |
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