CN114923928A - A dual optical path confluence chip detection device - Google Patents

Abstract

A dual-optical path confluence chip detection device is disclosed, comprising a base, a dual-optical path confluence module and a detection mirror group module, the dual-optical path confluence module and the detection mirror group module are fixed on the base, and a chip to be detected is picked up by an external chip pickup structure. Press into the dual-optical path confluence module, and the light source fixed on the outside of the dual-optical path confluence module illuminates the two surfaces of the chip. The horizontal light path enters the detection mirror group module, and a picture to be processed is formed on the camera; the detection mirror group module includes a mirror group, a guide rail and a motor module. The mirror group is fixed on the guide rail. Driven by the motor, the mirror group can move forward and backward. Compared with the traditional manual inspection or inspection system, the adjustment of the focal length can be realized by moving, which can simplify the structure and steps of inspection, save space, facilitate embedding in automatic production equipment, and is suitable for the inspection requirements of chips of different sizes.

Description

A dual optical path confluence chip detection device

technical field

The invention relates to the field of optical detection, in particular to a dual-optical path confluence chip detection device.

Background technique

After the wafer is cut into a single die (semi-finished chip), it is usually necessary to perform physical inspection on all sides of the chip, such as defects and dirt, in order to carry out the bonding and curing process. Traditionally, manual inspection or automatic equipment inspection is used. Manual inspection faces poor positioning accuracy. , it is easy to cause errors, low efficiency, low detection accuracy, and the increase of pollution sources may damage or contaminate the chip and other problems; the automatic detection of equipment is mostly single-sided detection, the detection time is long, and the cost is high. The existing multi-sided detection is performed by setting A set of detection system, which is implemented by detecting each surface in stages, also has problems such as long detection time, significantly reduced production capacity, and high cost. The existing detection equipment usually realizes optical path detection and mirror imaging on one plane, occupying space. It is large, and the existing automatic detection equipment has a complicated structure, which is not conducive to embedding automatic production equipment.

SUMMARY OF THE INVENTION

The present invention proposes a dual-optical path confluence chip detection device to solve the problems raised in the above-mentioned background technology. In order to achieve the above-mentioned purpose, the present invention provides the following solutions:

According to an embodiment of the present invention, a dual-optical path confluence chip detection device includes a dual-optical path confluence module and a detection mirror group module. The chip to be detected is placed in the dual-optical path confluence module in the vertical direction, and the two surfaces of the illuminated to-be-detected chip are respectively A first optical path and a second optical path are formed, and the first optical path and the second optical path form a dual optical path whose direction is vertical and the light boundary seamlessly merges in the dual optical path confluence module. After being reflected by the prism, it enters the detection lens group module along the direction of the horizontal optical path, and the detection lens group module is displaceably arranged in the direction of the horizontal optical path.

The chip to be inspected is pressed into the dual-optical path confluence module through the external chip pickup mechanism, and the first optical path and the second optical path formed by the two surfaces of the illuminated chip to be inspected are merged in the dual-optical path confluence module into a vertical downward direction. Double optical paths, so that the two surfaces of the chip to be tested can be detected by a set of vision systems, which improves the efficiency of chip surface detection and effectively reduces the detection time;

The combined dual optical paths are reflected after passing through the image relay prism, so that the combined dual optical paths are converted from vertical to horizontal, and enter the detection lens module along the horizontal optical path. Traditional chip detection devices usually complete the optical output and output in one direction. The detection imaging makes the size of the same plane of the chip surface detection device too large. The setting of the relay prism makes the convergence of the light path and the output and the detection of the mirror group to be carried out on two planes, which can save the space of the chip detection device and is more convenient. Embedded in automated production equipment;

The detection lens group module is displaceably arranged in the direction of the horizontal optical path, so that the detection lens group module can realize the adjustment of the focal length and adapt to the detection of chips of different sizes.

In some specific embodiments, the dual-optical path confluence module further includes an image relay optical element and an image combination optical element arranged in the vertical direction in sequence, and the image relay optical element is arranged on both sides of the chip to be detected and the image combination optical element.

The chip to be detected, the imaging optical element and the relay prism are arranged in the vertical direction from top to bottom, and the relay optical element is arranged on the two sides of the chip to be detected and the imaging optical element, and the two sides of the illuminated chip to be detected are arranged in the vertical direction. The first optical path and the second optical path outward in the horizontal direction are formed by each surface respectively. After the first optical path and the second optical path pass through the relay optical element, the optical path direction is reflected by 180°, and the first optical path and the second optical path in the horizontal direction are inward. After 90° rotation of the image-combining optical element, it converges under the image-combining optical element in the form of dual optical paths, and the combined dual optical paths propagate downward in the vertical direction.

In some specific embodiments, the image relay optical element includes two flat beam splitters, two isosceles right angle prisms and a fixed plate, the two flat beam splitters correspond to the two surfaces of the chip to be detected, respectively, and the two flat plate beam splitters The angle between the mirror and the horizontal plane is 45°;

Two isosceles right-angle prisms are correspondingly arranged below the beam splitter, the angle between the inclined planes of the two isosceles right-angle prisms and the horizontal plane is 45°, the inclined planes of the isosceles right-angle prisms are total reflection surfaces, two flat beam splitters and two The isosceles right angle prism is fixed by the fixing plate.

When the first optical path and the second optical path reflected by the two surfaces of the chip to be detected pass through the flat-panel beam splitter correspondingly arranged on the outside of the two surfaces, the reflection paths of the first optical path and the second optical path are in a vertical relationship with the original direction. The directions of the first optical path and the second optical path are vertically downward.

The two isosceles right-angle prisms are correspondingly arranged below the two flat beam splitters, and the angle between the inclined plane and the horizontal plane is 45°. The first optical path and the second optical path are reflected by the flat beam splitter and then reach the isosceles right angle prism in the vertical direction. After being reflected by the inclined plane of the isosceles right angle prism at 90°, the directions of the first optical path and the second optical path are turned inward in the horizontal direction.

In some specific embodiments, the combined imaging optical element includes two isosceles right angle prisms placed in a back-to-back manner, the angle between the inclined surface of the isosceles right angle prism and the vertical plane is 45°, and the inclined surface of the isosceles right angle prism is a total reflection surface .

The slopes of the two isosceles right-angle prisms in the combining optical element correspond to the slopes of the isosceles right-angle prisms in the relay optical element, so that the first optical path and the second optical path along the horizontal inward direction after passing through the relay optical element are combined. It realizes the reflection and convergence of the optical paths when it is like an optical element, and finally propagates in the vertical downward direction in the form of a combined double optical path.

In some specific embodiments, the relay prism is arranged below the image combining optical element, the angle between the inclined plane of the relay prism and the horizontal plane is 45°, and the inclined plane of the relay prism is a total reflection surface.

The inclined plane of the relay prism corresponds to the detection mirror group module, and is used to reflect the combined double light paths. The inclined plane of the relay prism is a total reflection surface inclined at 45°. Enter the detection mirror group in the horizontal direction.

In some specific embodiments, the dual-optical path confluence module includes two strip-shaped light sources, the two strip-shaped light sources are respectively disposed outside the relay optical element, and the light from the strip-shaped light sources illuminates two surfaces of the chip to be detected.

The light of the strip light source passes through the beam splitter in the relay optical element and hits the two surfaces of the chip to be detected, so that the two surfaces have uniform brightness and illuminance, so that the detection effect of the optical path formed on the two surfaces is improved. Better and more conducive to improving the accuracy of chip surface detection.

In some specific embodiments, the dual-optical path confluence chip detection device includes a base, and the dual-optical path confluence module and the detection mirror group module are sequentially arranged on the base along a horizontal direction.

The dual optical path confluence module and the detection mirror group module are fixed on the base, which makes the chip detection device more stable in structure, convenient for daily detection and easier to be embedded in automatic production equipment.

In some specific embodiments, the detection lens group module includes a motor module, a lens fixing unit, a guide rail and a lens group, the lens group includes a telecentric lens and a camera, the guide rail and the motor module are fixed on the base, and the lens group is fixed on the guide rail On the top, the detection lens group module is displaceably arranged in the direction of the horizontal optical path.

The detection mirror group module can move back and forth in the direction of the horizontal optical path through the setting of the motor module and the guide rail. The motor module can drive the mirror group to move in the horizontal direction according to the size of the chip to realize the automatic adjustment of the focal length of the mirror group. Therefore, chips of different sizes can share a set of chip detection devices, so that the detection of chips is more intelligent and fast, and the cost is saved.

In some specific embodiments, the guide rails are cross-roller guide rails. Since the cross-roller guide rails have the characteristics of low friction, high speed, high bearing capacity, and good stability, the mirror group can achieve high-precision and stable linear motion. The detection chip device can quickly adjust the focus to meet the requirements of the chip size, and improve the detection speed and efficiency.

In some specific embodiments, the motor module is a linear stepping motor module, and the linear stepping motor module includes a linear stepping motor, a motor fixing plate, a nut seat and a shield. The linear stepping motor has a small volume. , Light weight, long life and high efficiency.

The dual optical path confluence chip detection device of the present application can make the optical paths of the two surfaces of the chip to be detected merge into a dual optical path, which facilitates the simultaneous detection of the two surfaces of the chip and improves the detection efficiency of the chip; the dual optical path confluence module is in the direction of the vertical optical path. Compared with the traditional detection device, it saves space and is easy to be embedded in automated production equipment; the detection mirror group module can be based on the size of the device to be detected. Moving in the horizontal direction, the focal length of the lens group is automatically adjusted, which is suitable for the use of different size chips. The dual-optical path confluence chip detection device of the present application has a stable structure, can quickly and effectively perform the merging and detection of optical paths, occupies a small space, and is suitable for the needs of production equipment. A set of detection systems can be used for multiple surfaces and multiple sizes of chips. , improve the detection efficiency and save the cost.

Description of drawings

The accompanying drawings are included to provide a further understanding of the embodiments and are incorporated into and constitute a part of this specification. The drawings illustrate embodiments and together with the description serve to explain the principles of the invention. Other embodiments and many of the intended advantages of the embodiments will be readily recognized as they become better understood by reference to the following detailed description. The elements of the drawings are not necessarily to scale to each other. Like reference numerals designate corresponding similar parts.

1 is a perspective view of a dual-optical path confluence chip detection device according to the technical solution of the present invention,

2 is a structural diagram of a dual-optical-path merging module of a dual-optical-path merging chip detection device according to the technical solution of the present invention,

3 is a cross-sectional view of a dual-optical-path merging module of a dual-optical-path merging chip detection device according to the technical solution of the present invention,

4a-4b are schematic diagrams of optical paths of a dual-optical path confluence chip detection device according to the technical solution of the present invention

picture

5 is a bottom view of a detection mirror group module of a dual-optical path confluence chip detection device according to the technical solution of the present invention,

FIG. 6 is a front view of a dual-optical path confluence chip detection device according to the technical solution of the present invention.

Detailed ways

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof and are shown by way of illustrative specific embodiments in which the invention may be practiced. In this regard, directional terms such as "top," "bottom," "left," "right," "top," "bottom," etc. are used with reference to the orientation of the figures being described. Because components of an embodiment may be positioned in several different orientations, directional terminology is used for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized or logical changes may be made without departing from the scope of the present invention. Therefore, the following detailed description should not be taken in a limiting sense, and the scope of the invention is defined by the appended claims.

As shown in FIG. 1 , a dual-optical-path confluence chip detection device according to the technical solution of the present invention includes a dual-optical-path confluence module 1, a detection mirror group module 2 and a base 3, and the dual-optical-path confluence module 1 is used for converging two chips 5 to be detected. The optical path formed on the surface changes the direction of the optical path. The detection mirror group module is used for detection and imaging of the two surfaces of the chip to be detected. The dual optical path confluence module 1 and the detection mirror group module 2 are sequentially arranged on the base 3 along the horizontal direction.

In a specific embodiment, the external chip pickup mechanism 4 presses the chip 5 to be inspected into the dual-optical path confluence module 1 in the vertical direction, and the two surfaces of the chip to be inspected 5 are illuminated to form a first optical path and a second optical path respectively. The optical path, the first optical path and the second optical path enter the detection mirror group module 2 along the direction of the horizontal optical path in the manner of dual optical path combining after being reflected by the optical elements provided in the dual optical path combining module 1 .

FIG. 2 shows the structure diagram of the dual-optical path confluence module according to the technical solution of the present invention. The dual-optical-path confluence module 1 includes an image relay optical element 11, an image combination optical element 12, a light source assembly 13, an image relay prism 14, a prism fixing plate 15, a fixed image The seat 16 and the housing 17, the image relay prism 14 is arranged on the fixed seat 16 through the prism fixing plate 15, the image relay prism 14 is vertically provided with an image combination optical element 12, the image combination optical element 12 and the two sides of the chip 4 to be detected A relay optical element 11 is arranged on the part, and a light source assembly 13 is arranged on the outer side of the relay optical element.

In a specific embodiment, the casing 17 is fixed around the fixing base 16 by nuts and bolts, and the light source assembly 13 , the relay optical element 11 , and the image-combining optical element 12 are fixed in the vertical optical path direction through the casing 17 .

In a specific embodiment, the housing 17 , the fixing base 16 and the light source assembly 13 make the dual-optical path combining module 1 (the dual-optical-path combining module 1 shown in FIG. 1 ) have a stable external structure, the relay optical element 11 , the combined image The optical element 12 , the relay prism 14 and the prism fixing plate 15 are arranged inside the dual-optical path merging module 1 . The dual-optical path merging module 1 performs image relaying and merging of the optical paths. The dual-optical path merging module 1 has a stable structure and is suitable for industrial production. requirements for chip surface inspection.

3 shows a cross-sectional view of the dual-optical path confluence module according to the technical solution of the present invention, and the relay optical element 11 (the relay optical element 11 is shown in FIG. 2 ) includes a flat beam splitter 111 , a flat plate beam splitter 112 , and an isosceles right angle prism 113, an isosceles right angle prism 114, a fixed plate 115 and a fixed plate 116; the combined image optical element 12 (the combined image optical element 12 is shown in FIG. 2 ) includes an isosceles right angle prism 121, an isosceles right angle prism 122 and a fixed plate 123 ; The light source assembly 13 (the light source assembly 13 is shown in FIG. 2 ) includes a bar light source 131 and a bar light source 132 .

In a specific embodiment, the plate beam splitter 111 and the plate beam splitter 112 are correspondingly disposed on the outside of the two surfaces of the chip to be detected, the angle between the plate beam splitter 111 and the plate beam splitter 112 and the horizontal plane is 45°, and the plate beam splitter is 45°. 111 is fixed by the beam splitter and the prism fixing plate 116 , and the flat beam splitter 112 is fixed by the beam splitter and the prism fixing plate 115 .

In a specific embodiment, the isosceles right angle prism 113 and the isosceles right angle prism 114 are fixed below the flat plate beam splitter 111 and the plate beam splitter 112, and are used to reflect through the plate beam splitter 111 and the plate beam splitter 112 and then turn into a vertical direction. Below the first optical path and the second optical path, the angle between the inclined plane of the isosceles right angle prism 113 and the isosceles right angle prism 114 and the horizontal plane is 45°, and the inclined plane of the isosceles right angle prism 113 and the isosceles right angle prism 114 is a total reflection surface, The first light path and the second light path downward in the vertical direction are reflected by the isosceles right angle prism 113 and the isosceles right angle prism 114, the reflection direction is perpendicular to the incident direction, and the propagation directions of the first light path and the second light path are downward from the vertical direction. Turn horizontally inward.

In a specific embodiment, the isosceles right-angle prism 121 and the isosceles right-angle prism 122 are arranged between the isosceles right-angle prism 113 and the isosceles right-angle prism 114 in a back-to-back manner through the fixing plate 123, and the isosceles right-angle prism 121 and the isosceles right-angle prism 121 The angle between the inclined plane of the right angle prism 122 and the vertical plane is 45°, and the first light path and the second light path inward in the horizontal direction pass through the isosceles right angle prism 121 and the isosceles right angle prism 122 respectively, and the light path exits along the vertical direction, so that the The directions of the first optical path and the second optical path are turned vertically downward.

In a specific embodiment, the plate beam splitter 111 , the plate beam splitter 112 , the isosceles right angle prism 113 and the isosceles right angle prism 114 are fixed on the housing 17 through the fixing plate 115 and the fixing plate 116 .

Fig. 4a shows the optical path of the first optical path and the second optical path of the surface of the chip to be inspected through the relay optical element and the combined image optical element. The strip light source 131 and the strip light source 132 are used to illuminate the two surfaces of the chip to be inspected The first optical path and the second optical path are formed, and the directions of the first optical path and the second optical path are horizontally outward. After the first optical path and the second optical path pass through the relay optical element 11, the first optical path and the second optical path occur twice 90 The reflection of 180 degrees makes the first optical path and the second optical path change in direction by 180 degrees and enter the imaging optical element inward in the horizontal direction. After the first optical path and the second optical path in the horizontal direction pass through the imaging optical element 12, The direction of the optical path is deflected by 90°, and the first optical path and the second optical path merge into a double optical path with the same direction.

Figure 4b shows the optical path of the combined double optical paths formed by the two surfaces of the chip to be detected and passed through the relay prism. The first optical path and the second optical path formed by the two surfaces of the chip to be detected pass through the relay optical element and the combined image optical element. After the combined double light paths pass through the relay prism 14, the propagation direction of the double light paths is changed from vertical downward to horizontal direction rightward.

In a specific embodiment, the relay prism 14 is an isosceles right-angle structure, and the relay prism 14 is fixed by the fixing plate 15 .

In a specific embodiment, the inclined plane of the relay prism 14 is a total reflection surface, and the configuration of the relay prism is as follows: the inclined plane corresponds to the detection lens group module, and the angle between the inclined plane and the horizontal plane is 45°.

The setting of the image relay prism makes the direction of the dual optical paths change from vertical to horizontal, so that the confluence of the optical paths, the image relay and the detection of the mirror group can be arranged on different planes, which reduces the space occupied by the chip detection device.

5 shows a bottom view of the detection mirror group component 2 in the dual-optical path confluence chip detection device. The detection mirror group module 2 includes a mirror group 21, a motor module 22, a guide rail 23 and a mirror group fixing unit 24. The mirror group 21 passes through the mirror The group fixing unit 24 is fixed on the guide rail 23, and the motor module 22 is fixedly connected with the mirror group fixing unit 24. When the motor module 22 is working, it can drive the mirror group 21 fixed by the mirror group fixing unit 24 on the guide rail 23 in the horizontal optical path. Moving back and forth in the direction, the lens group 21 moves in the direction of the horizontal optical path to change the focal length, so as to adapt to the detection requirements of chips of different sizes.

In a specific embodiment, the lens group 21 includes a telecentric lens 211 and a camera 212 . The telecentric lens 211 and the camera 212 are fixedly connected in the direction of the horizontal optical path. A picture to be processed is formed on the chip, and the mirror group 21 is used for detection and imaging of the two surfaces of the chip to be detected.

In a specific embodiment, the motor module 22 includes a mounting plate 221, a nut seat 222, a shield 223 and a motor 224, the mounting plate 221 includes a bottom mounting plate 2211 and a motor mounting plate 2212, and the bottom mounting plate 221 and the base 3 (the base 3 is shown in FIG. 1) is fixedly connected, the side of the motor mounting plate 2212 is fixedly connected with the base 3, the motor mounting plate 2212 is fixedly connected with the motor 224, the shield 223 is fixedly connected with the motor mounting plate 2212, and the nut seat 222 is provided in the mounting Inside the area formed by the plate 221 and the shield 223 , the nut seat 222 is fixedly connected with the lens group fixing unit 24 . The mounting plate 221 and the nut seat 222 fix the motor 224. The setting of the shield 223 enables the motor module 22 to have a relatively stable external structure, which avoids scattered exposure of components and is inconvenient for embedding into automated production equipment. The connection between the mounting plate 221 and the base 3 The motor module 22 can be fixedly arranged on the base 3, and the nut seat 222 is connected with the mirror group fixing unit 24 so that the mirror group 21 fixed on the guide rail 23 by the lens fixing unit 24 can be driven by the motor 224 in the direction of the horizontal optical path. move.

In a further embodiment, the motor 224 is a linear stepping motor. The linear stepping motor has the advantages of small size, light weight, long life and high efficiency. The selected linear stepping motor occupies a small space and can be adapted to the detection of the dual-optical path confluence detection device. high efficiency requirements.

In a specific embodiment, the guide rail 23 is a cross-roller guide rail. The cross-roller guide rail has the characteristics of low friction, high speed, large bearing capacity, and good stability, which can realize the high-precision and stable linear motion of the mirror group, so that the The detection chip device can quickly adjust the focus to meet the requirements of the chip size, and improve the detection speed and efficiency.

In a specific embodiment, the detection mirror group 21 is fixed on the cross roller guide rail 23 by the mirror group fixing unit 24 .

In a further embodiment, the motor module 22 is fixedly connected to the mirror group fixing unit 24 , the guide rail 23 , the motor module 22 , the mirror group fixing unit 24 and the mirror group 21 have a connection relationship, and the motor 224 drives the cross roller guide rail. The detection mirror group 21 on 23 moves in the horizontal direction, so that the focal length of the detection mirror group 21 can adapt to the detection requirements of chips of different sizes.

The overall work flow of the dual-optical path confluence chip detection device is as follows: the first optical path and the second optical path formed on the two surfaces of the chip to be detected are deflected twice by 90° in the direction of the optical path of the switching optical element, and are inward along the horizontal direction. Entering the image combination optical element, the first optical path and the second optical path are combined into a vertical downward double optical path through the combined imaging optical element. Module, the motor module drives the mirror group on the guide rail to move back and forth in the direction of the horizontal optical path, adjust the focal length to obtain a clear imaging effect. So far, the two surfaces of the chip to be inspected can be inspected and imaged at one time by a set of inspection devices.

6 shows a front view of a dual-optical path confluence chip detection device according to the present invention. The light source module 13, the housing 17, and the fixing seat 16 are arranged in the vertical direction in sequence to form a dual-optical path confluence module 1 (the dual-optical path confluence module is shown in FIG. 1 ). The external structure shown in ) enables the optical elements arranged inside to realize the transfer and convergence of the optical paths in a steady and orderly manner. The relay prism 14 is arranged at the inner bottom end of the dual optical path combining module. The detection mirror group module 2 (detection mirror group module 2 is shown in FIG. 1 ) corresponds to each other, so that the combined dual optical paths enter the detection mirror group module 2 along the direction of the horizontal optical path, completing the structural folding of the chip detection device and reducing the occupation. Space. The detection mirror group module 2 includes a mirror group 21, a mirror group fixing unit 24 and a motor module 22, and the detection mirror group module 2 and the dual optical path confluence module 1 are fixed on the base 3.

In a specific embodiment, the above-mentioned components of the dual-optical path confluence module 1 are fixedly connected by bolts and nuts, which facilitates installation and disassembly of each component and facilitates maintenance operations.

In a specific embodiment, an opening is provided on the surface of the housing 17, and the size and position of the opening provided on the housing 17 correspond to the relay prism 14, and the combined double optical paths of the relay prism 14 enter through the opening along the direction of the horizontal optical path. Detect the mirror group module 2.

The dual optical path confluence chip detection device of the present invention has a stable structure, so that the optical path confluence and the detection and imaging of the chip can be carried out quickly and orderly, and the detection efficiency is improved.

The invention is a dual-optical path confluence chip detection device, which follows the optical principle, and through the arrangement of optical elements, detection mirror groups and other components, the optical paths on the two surfaces of the chip can realize the change of direction and the convergence of the optical paths, so as to meet the requirements for production. The requirements for multi-faceted detection of chips; the confluence and transfer of optical paths are realized in the direction of the vertical optical path, and the detection and imaging of the optical paths are realized in the horizontal direction, which reduces the space occupied by the optical path detection and imaging device on the surface of the chip; the detection mirror group can be in the detection direction. Move back and forth to adjust the focus according to the size of the chip. Compared with the traditional manual detection or detection system, the dual-optical path confluence chip detection device of the present invention can simplify the detection structure and steps, save space, be convenient to be embedded in automatic production equipment, and be suitable for the detection requirements of chips of different sizes.

It will be apparent to those skilled in the art that various modifications and changes can be made to the embodiments of the present invention without departing from the spirit and scope of the invention. In this manner, the present invention is also intended to cover such modifications and changes if they come within the scope of the claims of the present invention and their equivalents. The word "comprising" does not exclude the presence of other elements or steps not listed in a claim. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.

Claims (10)

1. a dual-optical path confluence chip detection device, is characterized in that, comprises a double-optical path confluence module and a detection mirror group module, the chip to be detected is put into the dual-optical path confluence module in a vertical direction, and the illuminated described chip to be detected The two surfaces of the two optical paths respectively form a first optical path and a second optical path. The first optical path and the second optical path form a dual optical path in the dual optical path combining module with a vertical direction and a seamless merging of light boundaries. The dual optical path The confluence module includes a relay prism, and the dual optical paths are reflected by the relay prism and then enter the detection lens group module along the horizontal optical path direction, and the detection mirror group module is displaceably arranged in the horizontal optical path direction. 2 . The detection device for a dual-optical path confluence chip according to claim 1 , wherein the dual-optical path confluence module further comprises a relay optical element and an imaging optical element arranged in a vertical direction in sequence, and the relay Image optical elements are arranged on both sides of the chip to be detected and the imaging optical element. 3. A dual-optical path confluence chip detection device according to claim 2, wherein the image-transforming optical element comprises two flat plate beam splitters, two isosceles right angle prisms and a fixed plate, and the two flat plates The spectroscopes respectively correspond to the two surfaces of the chip to be detected, and the included angle between the two flat spectroscopes and the horizontal plane is 45°; The two isosceles right angle prisms are correspondingly arranged below the beam splitter, the angle between the inclined planes of the two isosceles right angle prisms and the horizontal plane is 45°, and the inclined planes of the isosceles right angle prisms are total reflection surfaces, The two flat beam splitters and the two isosceles right angle prisms are fixed by the fixing plate. 4. a kind of dual-optical path confluence chip detection device according to claim 2, is characterized in that, described image combination optical element comprises two isosceles right angle prisms placed with back-to-back mode, and described isosceles right angle prism slopes and vertical The included angle of the plane is 45°, and the inclined plane of the isosceles right-angle prism is a total reflection plane. 5 . The detection device for a dual-optical path confluence chip according to claim 2 , wherein the image relay prism is arranged below the image combination optical element, and the inclined plane of the image relay prism is at an angle with a horizontal plane. 6 . is 45°, and the inclined surface of the relay prism is a total reflection surface. 6 . The dual-optical-path confluence chip detection device according to claim 1 , wherein the dual-optical-path confluence module comprises two strip light sources, and the two strip light sources are respectively arranged on the relay optics. 7 . On the outside of the element, the light from the bar-shaped light source illuminates the two surfaces of the chip to be detected. 7 . The detection device for a dual-optical path confluence chip according to claim 1 , further comprising a base, and the dual-optical path confluence module and the detection mirror group module are sequentially arranged on the base along a horizontal direction. 8 . . 8 . A dual-optical path confluence chip detection device according to claim 7 , wherein the detection mirror group module comprises a motor module, a lens fixing unit, a guide rail and a mirror group, and the mirror group comprises a telecentric lens. 9 . and the camera, the guide rail and the motor module are fixed on the base, the mirror group is fixed on the guide rail, and the motor module drives the mirror group on the guide rail to move back and forth. 9 . The dual-optical path confluence chip detection device according to claim 8 , wherein the guide rail is a cross roller guide rail. 10 . 10. A dual-optical path confluence chip detection device according to claim 9, wherein the motor module is a linear stepping motor module, and the linear stepping motor module comprises a linear stepping motor, an installation plate, nut seat and shroud.

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