CN114866055A - Lamb wave resonator and filter - Google Patents
Lamb wave resonator and filter Download PDFInfo
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- CN114866055A CN114866055A CN202210387099.XA CN202210387099A CN114866055A CN 114866055 A CN114866055 A CN 114866055A CN 202210387099 A CN202210387099 A CN 202210387099A CN 114866055 A CN114866055 A CN 114866055A
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- 235000019687 Lamb Nutrition 0.000 title claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 229910012463 LiTaO3 Inorganic materials 0.000 claims description 3
- 238000001914 filtration Methods 0.000 abstract description 14
- 238000003780 insertion Methods 0.000 abstract description 11
- 230000037431 insertion Effects 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
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Abstract
The invention provides a lamb wave resonator and a filter, wherein the lamb wave resonator comprises a piezoelectric substrate, a first interdigital transducer and a second interdigital transducer, and the first interdigital transducer and the second interdigital transducer are in the same strip shape; an axis which is along the length direction of the first interdigital transducer and is positioned between the first interdigital transducer and the second interdigital transducer is defined as a central axis, and the first interdigital transducer and the second interdigital transducer are arranged in mirror symmetry relative to the central axis; the duty ratio of the first interdigital transducer along the length direction and the duty ratio of the second interdigital transducer along the length direction both comprise a plurality of duty ratios and are changed synchronously, and each duty ratio of the first interdigital transducer is the same as the duty ratio of the second interdigital transducer which is adjacent to the first interdigital transducer and is vertical to the length direction. By adopting the technical scheme of the invention, the in-band insertion loss can be improved, the ripple can be reduced, and the in-band smoothness is high and the filtering performance is good.
Description
Technical Field
The invention relates to the technical field of circuits, in particular to a lamb wave resonator and a lamb wave filter.
Background
Currently, wireless communication technology is developed. The frequency band of the wireless communication technology is higher and higher from a 1G frequency band to a 5G frequency band, and meanwhile, the bandwidth is larger and larger. For example, the bandwidth of the N77 frequency band and the N79 frequency band in the 5G frequency band, the bandwidth of the N77 frequency band and the bandwidth of the N79 frequency band reach 900MHz and 600MHz, respectively. The bulk acoustic wave filter can meet the bandwidth requirement of a 5G frequency band. The XBAR filter in the bulk acoustic wave filter can reach 20% or more of electromechanical coupling coefficient, thereby achieving larger bandwidth. Among them, lamb wave resonators are important components in XBAR filters.
A lamb wave resonator of the related art generally includes a high acoustic velocity material substrate and a piezoelectric layer located above the high acoustic velocity material substrate, and a first interdigital transducer and a second interdigital transducer are respectively disposed on an upper surface and a lower surface of the piezoelectric layer. An Interdigital Transducer (IDT) is used. Wherein interdigital electrodes of the first interdigital transducer and the second interdigital transducer are opposed to each other in the stacking direction across the piezoelectric layer, and have the same electrode width, electrode thickness, electrode pitch, and excited acoustic wave wavelength λ.
However, since the lamb wave resonators in the related art have the same electrode width, the structure causes the main mode to exist, and at the same time, other modes exist, that is, special vibration modes in the first interdigital transducer and the second interdigital transducer, are easily affected by the transverse mode or other modes, generate unnecessary ripples, and the like, and thus, the practical use is limited. To solve this problem, some other lamb wave resonators use different duty ratios to solve the influence of the vibration form, and use a configuration in which the duty ratio of the comb-shaped electrode in the central region of the overlap region is different from the duty ratio of the comb-shaped electrode in the edge region of the overlap region in the arrangement direction of the comb-shaped electrodes, the comb-shaped electrode of each of the comb-shaped electrodes overlaps with the comb-shaped electrode of the other comb-shaped electrode in the overlap region, and the width of the comb-shaped electrode of the first comb-shaped electrode of the comb-shaped electrodes in the central region is different from the width of the comb-shaped electrode of the second comb-shaped electrode of the comb-shaped electrodes in the central region. But this structure has more unnecessary vibration modes in the pass band. These modes can have a detrimental effect on the in-band passband. How to improve the in-band insertion loss, reduce the ripple, improve the in-band smoothness, and further improve the filtering performance is a technical problem to be solved.
Therefore, there is a need to provide a new lamb wave resonator and related filter that solves the above problems.
Disclosure of Invention
In view of the above deficiencies of the prior art, the present invention provides a lamb wave resonator and filter with improved in-band insertion loss, reduced ripple, high in-band smoothness, and good filtering performance.
In order to solve the technical problem, in a first aspect, an embodiment of the present invention provides a lamb wave resonator, where the lamb wave resonator includes a piezoelectric substrate, and a first interdigital transducer and a second interdigital transducer that are located on the same side of the piezoelectric substrate and are arranged at intervals, and both the first interdigital transducer and the second interdigital transducer are in the same long shape; an axis which is located in the length direction of the first interdigital transducer and is located between the first interdigital transducer and the second interdigital transducer is defined as a central axis, and the first interdigital transducer and the second interdigital transducer are arranged in mirror symmetry with respect to the central axis; the first interdigital transducer is followed length direction's duty cycle with the second interdigital transducer is followed length direction's duty cycle all includes a plurality ofly and is synchronous change, each duty cycle of first interdigital transducer with this first interdigital transducer is adjacent and perpendicular to length direction's the duty cycle of second interdigital transducer is the same.
Preferably, the duty cycle of the first interdigital transducer along the length direction and the duty cycle of the second interdigital transducer along the length direction both comprise two; the first interdigital transducer comprises a first segment and a second segment extended by the first segment, and the second interdigital transducer comprises a third segment and a fourth segment extended by the third segment; the duty cycle of the first segment is the same as the duty cycle of the third segment, and the duty cycle of the second segment is the same as the duty cycle of the fourth segment.
Preferably, the width of the first section is greater than that of the second section, and the width of the third section is greater than that of the fourth section.
Preferably, the duty cycle of the first segment and the duty cycle of the third segment are both 0.3, and the duty cycle of the second segment and the duty cycle of the fourth segment are both 0.2.
Preferably, the duty ratio ranges from 0.1 to 0.9.
Preferably, along the length direction, the duty ratio of the first interdigital transducer gradually and synchronously decreases from one end to the other end; and one end of the duty ratio of the second interdigital transducer is gradually and synchronously decreased or increased towards the other end of the duty ratio of the second interdigital transducer.
Preferably, the piezoelectric substrate is made of an AlN material or a ZnO material or a LiTaO3 material with a fixed cutting angle.
Preferably, the thickness of the piezoelectric substrate is 0.1 λ to 4 λ, λ being a lamb wave wavelength.
Preferably, the sum of the width of the first interdigital transducer or the width of the second interdigital transducer and the distance between the first interdigital transducer and the second interdigital transducer is a period P, and the following formula is satisfied: λ ═ 2P.
In a second aspect, embodiments of the present invention provide a filter including the lamb wave resonator as described above.
Compared with the prior art, the lamb wave resonator and the filter of the invention form two-dimensional electrodes on a two-dimensional plane by respectively arranging the first interdigital transducer and the second interdigital transducer at intervals on the same side of the piezoelectric substrate, the first interdigital transducer and the second interdigital transducer are arranged in mirror symmetry relative to the central axis, and the duty ratios of the first interdigital transducer and the second interdigital transducer along the length direction are both multiple and synchronously changed. The structure can press other redundant modes while the lamb wave resonator keeps the main mode, and the advantage of the synchronously-changed duty ratio is that the lamb wave resonator has simple process manufacturing, can improve the in-band insertion loss and reduce the ripple, and can further improve the smoothness in the pass band, thereby improving the filtering performance of the lamb wave resonator. Therefore, the circuit structure enables the lamb wave resonator and the filter to improve in-band insertion loss and reduce ripples, and the lamb wave resonator and the filter are high in-band smoothness and good in filtering performance.
Drawings
The present invention will be described in detail below with reference to the accompanying drawings. The foregoing and other aspects of the invention will become more apparent and more readily appreciated from the following detailed description, taken in conjunction with the accompanying drawings. In the attached figures, the drawing is shown,
FIG. 1 is a schematic diagram of a lamb wave resonator according to the present invention;
FIG. 2 is a schematic diagram of a first interdigital transducer and a second interdigital transducer of a lamb wave resonator in accordance with the present invention;
fig. 3 is a schematic diagram of the abs parameter frequency curve of the lamb wave resonator of the present invention.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings.
The embodiments/examples described herein are specific embodiments of the present invention, are intended to be illustrative of the concepts of the present invention, are intended to be illustrative and exemplary, and should not be construed as limiting the embodiments and scope of the invention. In addition to the embodiments described herein, those skilled in the art will be able to employ other technical solutions which are obvious based on the disclosure of the claims and the specification of the present application, and these technical solutions include those which make any obvious replacement or modification of the embodiments described herein, and all of which are within the scope of the present invention.
An embodiment of the present invention provides a lamb wave resonator 100.
Please refer to fig. 1-2, wherein fig. 1 is a schematic structural diagram of a lamb wave resonator according to the present invention.
The lamb wave resonator 100 of the present invention includes a piezoelectric substrate 1, a first interdigital transducer 2, and a second interdigital transducer 3.
In the present embodiment, the piezoelectric substrate 1 is made of AlN material, ZnO material, or LiTaO3 material having a constant chamfer.
The thickness h1 of the piezoelectric substrate 1 is 0.1 λ to 4 λ, λ being the lamb wave wavelength. The piezoelectric substrate 1 having a thickness h1 of 0.1 λ to 4 λ may be fitted with the first interdigital transducer 2 and the second interdigital transducer 3 of the present invention, and this structure may make the lamb wave resonator 100 have different impedances due to mechanical vibrations in the vicinity of the resonance frequency of the first interdigital transducer 2 and the second interdigital transducer 3, and suppress the transverse mode, so that the lamb wave resonator 100 suppresses other unwanted modes while retaining the main mode.
The first interdigital transducer 2 and the second interdigital transducer 3 are positioned on the same side of the piezoelectric substrate 1 and are arranged at intervals. The first interdigital transducer 2 and the second interdigital transducer 3 form a two-dimensional electrode on a two-dimensional plane. Specifically, the first interdigital transducer 2 is used for connecting to an external signal source. The second interdigital transducer 3 is intended to be connected to ground. And the first interdigital transducer 2 generates resonance with the second interdigital transducer 3 after receiving the signal sent by the signal source, and the impedance caused by mechanical vibration is different near the resonance frequency so as to realize filtering of the signal.
In this embodiment, the material of the first interdigital transducer 2 and the second interdigital transducer 3 may be a single material such as Al, Cu, Pt, Au, and Ti, or an alloy, or a stack of single materials such as Al, Cu, Pt, Au, and Ti.
The first interdigital transducer 2 and the second interdigital transducer 3 are both in the same long shape. That is to say, the first interdigital transducer 2 and the second interdigital transducer 3 are made of the same material, and the shapes of the two interdigital transducers are identical, so that the first interdigital transducer 2 and the second interdigital transducer 3 are beneficial to layout design and process manufacturing of the lamb wave resonator 100, and design and application of the lamb wave resonator 100.
Specifically, an axis line along the length direction of the first interdigital transducer 2 and located between the first interdigital transducer 2 and the second interdigital transducer 3 is defined as a central axis line X. Wherein the length direction is consistent with the direction of the central axis X. The first interdigital transducer 2 and the second interdigital transducer 3 are arranged in mirror symmetry with respect to the central axis X. I.e. the first interdigital transducer 2 and the second interdigital transducer 3 have the same external shape.
Referring to fig. 1, the sum of the width W1 of the first interdigital transducer 2 or the width W2 of the second interdigital transducer 3 and the separation distance W3 between the first interdigital transducer 2 and the second interdigital transducer 3 is a period P. Specifically, the period of the first interdigital transducer 2 is P1, and the period of the second interdigital transducer 3 is P2. Since the width W1 is the same as the width W2, P1 ═ P2 ═ P. The lamb wave wavelength lambda satisfies the following formula: λ ═ 2P.
The duty cycle is defined as the ratio of the width of the two-dimensional electrode to the period P. The duty ratio of the first interdigital transducer 2 is W1/P1. The duty cycle of the second interdigital transducer 3 is W2/P2. In the present embodiment, the duty ratio ranges from 0.1 to 0.9. Of course, the duty ratio may be adjusted according to design requirements without being limited to the specific range.
In order to improve the in-band insertion loss and reduce the ripple, and improve the in-band smoothness and thus improve the filtering performance, the first interdigital transducer 2 and the second interdigital transducer 3 are not simple strip structures, but have a certain variation in a two-dimensional plane. The duty ratio of the first interdigital transducer 2 along the length direction and the duty ratio of the second interdigital transducer 3 along the length direction both comprise a plurality of duty ratios and are changed synchronously. Each duty cycle of the first interdigital transducer 2 is the same as the duty cycle of the second interdigital transducer 3 which is adjacent to the first interdigital transducer 2 and perpendicular to the length direction. That is, the duty cycle of the first interdigital transducer 2 and the duty cycle of the second interdigital transducer 3, which are perpendicular to the length direction, are the same.
Along the length direction, one end of the duty ratio of the first interdigital transducer 2 gradually and synchronously decreases towards the other end of the duty ratio; and one end of the duty ratio of the second interdigital transducer 3 is gradually and synchronously decreased or increased towards the other end of the duty ratio. The first interdigital transducer 2 and the second interdigital transducer 3 which are synchronously reduced or enlarged on the two-dimensional plane can enable the lamb wave resonator 100 to keep the main mode, and simultaneously restrain other modes, so that the in-band insertion loss is improved, and the ripple is reduced.
In this embodiment, the two width strips of the same two-dimensional electrode form a single structure that changes in synchronization. Wherein the width refers to a length of the two-dimensional electrode perpendicular to the length direction. Specifically, the duty ratio of the first interdigital transducer 2 in the length direction and the duty ratio of the second interdigital transducer 3 in the length direction both include two. The first interdigital transducer 2 includes a first section 21 and a second section 22 extending from the first section 21. The width W11 of the first segment 21 is greater than the width W12 of the second segment 22.
The second interdigital transducer 3 comprises a third segment 31 and a fourth segment 32 extended by the third segment 31. The width W21 of the third segment 31 is greater than the width W22 of the fourth segment 32.
Therefore, the first interdigital transducer 2 and the second interdigital transducer 3 are synchronously small in the direction of the central axis X.
The duty cycle of the first segment 21 is W11/P11; the duty cycle of the third segment 31 is W31/P21. Wherein the first segment 21 is spaced from the third segment 31 by a distance W31, wherein W31 is the same as W11, and thus P21 is the same as P11. The duty cycle of the first segment 21 is the same as the duty cycle of the third segment 31. The duty cycle of the first segment 21 and the duty cycle of the third segment 31 are both 0.3. I.e. the duty cycle of the first interdigital transducer 2 perpendicular to the length direction is the same as the duty cycle of the second interdigital transducer 3.
The duty cycle of the second segment 22 is W12/P12; the duty cycle of the fourth segment 32 is W32/P22. Wherein the second section 22 is spaced from the fourth section 32 by a distance W32, wherein W32 is the same as W12, and thus P22 is the same as P12. The duty cycle of the second segment 22 is the same as the duty cycle of the fourth segment 32. The duty cycle of the second segment 22 and the duty cycle of the fourth segment 32 are both 0.2.
The first interdigital transducer 2 is provided with the first segment 21 and the second segment 22 as described above, and the second interdigital transducer 3 is provided with the third segment 31 and the fourth segment 32. The two-dimensional electrode adopts two width strips to form a synchronous change structure, and the structure is simple and easy to design and apply. The first interdigital transducer 2 and the second interdigital transducer 3 are synchronously changed, so that the impedance caused by mechanical vibration is different near the resonance frequency, the filtering of signals can be realized, the smoothness in a pass band is further improved, and the transverse mode is further inhibited. In order to verify the technical effect of the synchronous change of the first interdigital transducer 2 and the second interdigital transducer 3, the parameters of the lamb wave resonator 100 are subjected to model simulation for evaluation, and the simulation verification is as follows:
in particular, the first interdigital transducer 2 and the second interdigital transducer 3 have the advantage of a duty ratio that changes synchronously, compared with the related art: the smoothness in the pass band can be further improved, thereby improving the filtering performance of the lamb wave resonator 100. Referring to fig. 3, fig. 3 is a schematic diagram of abs parameter frequency curves of lamb wave resonator 100 according to the present invention. The smoothness in the pass band of the 5G frequency band is high and the filtering performance is good. Wherein the thickness h1 of the piezoelectric substrate 1 is 0.1 λ to 4 λ, and the duty ratio of the first interdigital transducer 2 and the second interdigital transducer 3 is changed synchronously, which can be obtained from the simulation result of fig. 3: the lamb wave resonator 100 can improve the in-band insertion loss and reduce the ripple, can further improve the smoothness in a pass band, further inhibits a transverse mode, and has good filtering performance.
The invention also provides a filter. The filter includes the lamb wave resonator 100. The lamb wave resonator 100 of the invention is applied to the filter, so that the filter can improve in-band insertion loss and reduce ripples, and has high in-band smoothness and good filtering performance.
Compared with the prior art, the lamb wave resonator and the filter of the invention form two-dimensional electrodes on a two-dimensional plane by respectively arranging the first interdigital transducer and the second interdigital transducer at intervals on the same side of the piezoelectric substrate, the first interdigital transducer and the second interdigital transducer are arranged in mirror symmetry relative to the central axis, and the duty ratios of the first interdigital transducer and the second interdigital transducer along the length direction are both multiple and synchronously changed. The structure can press other redundant modes while the lamb wave resonator keeps the main mode, and the advantage of the synchronously-changed duty ratio is that the lamb wave resonator has simple process manufacturing, can improve the in-band insertion loss and reduce the ripple, and can further improve the smoothness in the pass band, thereby improving the filtering performance of the lamb wave resonator. Therefore, the circuit structure enables the lamb wave resonator and the filter to improve in-band insertion loss and reduce ripples, and the lamb wave resonator and the filter are high in-band smoothness and good in filtering performance.
It should be noted that the above-mentioned embodiments described with reference to the drawings are only intended to illustrate the present invention and not to limit the scope of the present invention, and it should be understood by those skilled in the art that modifications and equivalent substitutions can be made without departing from the spirit and scope of the present invention. Furthermore, unless the context indicates otherwise, words that appear in the singular include the plural and vice versa. Additionally, all or a portion of any embodiment may be utilized with all or a portion of any other embodiment, unless stated otherwise.
Claims (10)
1. The lamb wave resonator is characterized by comprising a piezoelectric substrate, a first interdigital transducer and a second interdigital transducer, wherein the first interdigital transducer and the second interdigital transducer are positioned on the same side of the piezoelectric substrate and are arranged at intervals; an axis which is located in the length direction of the first interdigital transducer and is located between the first interdigital transducer and the second interdigital transducer is defined as a central axis, and the first interdigital transducer and the second interdigital transducer are arranged in mirror symmetry with respect to the central axis; the first interdigital transducer is followed length direction's duty cycle with the second interdigital transducer is followed length direction's duty cycle all includes a plurality ofly and is synchronous change, each duty cycle of first interdigital transducer with this first interdigital transducer is adjacent and perpendicular to length direction's the duty cycle of second interdigital transducer is the same.
2. The lamb wave resonator of claim 1, wherein the duty cycle of the first interdigital transducer along the length direction and the duty cycle of the second interdigital transducer along the length direction both comprise two; the first interdigital transducer comprises a first segment and a second segment extended by the first segment, and the second interdigital transducer comprises a third segment and a fourth segment extended by the third segment; the duty cycle of the first segment is the same as the duty cycle of the third segment, and the duty cycle of the second segment is the same as the duty cycle of the fourth segment.
3. The lamb wave resonator of claim 2, wherein the width of the first section is greater than the width of the second section, and the width of the third section is greater than the width of the fourth section.
4. The lamb wave resonator of claim 3, wherein the duty cycle of the first segment and the duty cycle of the third segment are both 0.3, and the duty cycle of the second segment and the duty cycle of the fourth segment are both 0.2.
5. The lamb wave resonator according to claim 1, wherein the duty cycle is in the range of 0.1-0.9.
6. The lamb wave resonator according to claim 1, wherein the duty cycle of said first interdigital transducer is gradually and synchronously decreased from one end to the other end thereof along the length direction; and one end of the duty ratio of the second interdigital transducer is gradually and synchronously decreased or increased towards the other end of the duty ratio of the second interdigital transducer.
7. The lamb wave resonator according to claim 1, wherein the piezoelectric substrate is an AlN material or a ZnO material or a LiTaO3 material having a fixed corner cut.
8. The lamb wave resonator according to claim 1, wherein the thickness of the piezoelectric substrate is 0.1 λ to 4 λ, λ being the lamb wave wavelength.
9. The lamb wave resonator according to claim 7, wherein the sum of the width of the first interdigital transducer or the width of the second interdigital transducer and the distance separating the first interdigital transducer and the second interdigital transducer is a period P, and the following formula is satisfied: λ ═ 2P.
10. A filter, characterized in that it comprises a lamb wave resonator according to any of claims 1-9.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210387099.XA CN114866055A (en) | 2022-04-12 | 2022-04-12 | Lamb wave resonator and filter |
| PCT/CN2022/090593 WO2023197382A1 (en) | 2022-04-12 | 2022-04-29 | Lamb wave resonator and filter |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210387099.XA CN114866055A (en) | 2022-04-12 | 2022-04-12 | Lamb wave resonator and filter |
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| CN114866055A true CN114866055A (en) | 2022-08-05 |
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| CN202210387099.XA Pending CN114866055A (en) | 2022-04-12 | 2022-04-12 | Lamb wave resonator and filter |
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| WO (1) | WO2023197382A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010220164A (en) * | 2009-03-19 | 2010-09-30 | Seiko Epson Corp | Lamb-wave resonator and oscillator |
| JP6170349B2 (en) * | 2013-06-18 | 2017-07-26 | 太陽誘電株式会社 | Elastic wave device |
| DE102018132695A1 (en) * | 2018-12-18 | 2020-06-18 | RF360 Europe GmbH | Electronic component |
| CN112702036A (en) * | 2020-12-18 | 2021-04-23 | 广东广纳芯科技有限公司 | Lamb wave resonator with POI structure |
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