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CN114859280A - A kind of calibration method of magnetic sensor array - Google Patents

A kind of calibration method of magnetic sensor array Download PDF

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Publication number
CN114859280A
CN114859280A CN202210374959.6A CN202210374959A CN114859280A CN 114859280 A CN114859280 A CN 114859280A CN 202210374959 A CN202210374959 A CN 202210374959A CN 114859280 A CN114859280 A CN 114859280A
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magnetic sensor
sensor array
magnetic
axis
helmholtz coil
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查旻罡
邓孝逸
闫国普
陈奕
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Memsic Semiconductor Wuxi Co Ltd
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Memsic Semiconductor Wuxi Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/0023Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration

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Abstract

本发明提供一种磁传感器阵列的校准方法,其包括:提供三轴亥姆霍兹线圈;校准三轴亥姆霍兹线圈,以得到每个轴线圈电流产生磁场的灵敏度参数;将磁传感器阵列放入三轴亥姆霍兹线圈中,并保证磁传感器阵列的三个轴与三轴亥姆霍兹线圈的三个轴互相平行;开启磁传感器阵列开始采集数据,设定三轴亥姆霍兹线圈产生的三个轴的磁场都为第一设定磁场值,记录此时各个磁传感器的第一输出数据;再设定三轴亥姆霍兹线圈产生的三个轴的磁场都为第二设定磁场值,记录此时各个磁传感器的第二输出数据;根据采集到的每个磁传感器的第一输出数据和第二输出数据计算该磁传感器的补偿参数。与现有技术相比,本发明能够完整地对磁传感器阵列进行校准。

Figure 202210374959

The invention provides a method for calibrating a magnetic sensor array. Put it into the three-axis Helmholtz coil, and ensure that the three axes of the magnetic sensor array and the three axes of the three-axis Helmholtz coil are parallel to each other; turn on the magnetic sensor array to start collecting data, and set the three-axis Helmholtz The magnetic fields of the three axes generated by the three-axis Helmholtz coil are all the first set magnetic field values, and the first output data of each magnetic sensor at this time are recorded; then the magnetic fields of the three axes generated by the three-axis Helmholtz coil are set to be the first value. 2. Set the magnetic field value, record the second output data of each magnetic sensor at this time; calculate the compensation parameter of the magnetic sensor according to the collected first output data and second output data of each magnetic sensor. Compared with the prior art, the present invention can completely calibrate the magnetic sensor array.

Figure 202210374959

Description

一种磁传感器阵列的校准方法A kind of calibration method of magnetic sensor array

【技术领域】【Technical field】

本发明涉及磁传感器技术领域,尤其涉及一种磁传感器阵列的校准方法。The invention relates to the technical field of magnetic sensors, in particular to a calibration method of a magnetic sensor array.

【背景技术】【Background technique】

磁传感器可以用于测试空间中某个位置的磁场环境,但由于一般磁传感器尺寸较小,每次可以测量的磁场环境也相对较小,如果需要测试一个较大范围的磁场,单个的磁传感器完全无法覆盖到,因此有了将较多磁传感器放置于一个PCB板上用来测试一块地区的磁场环境的工具即为磁传感器阵列。对于磁传感器阵列,由于磁传感器之间本身存在一定的不一致性,且实际制作过程中也会带来一定的不一致性,因此在将其作为工具来测试实际的磁场环境之前,需要先对其进行校准。Magnetic sensors can be used to test the magnetic field environment at a certain position in the space, but due to the small size of general magnetic sensors, the magnetic field environment that can be measured each time is relatively small. If you need to test a large range of magnetic fields, a single magnetic sensor It is completely impossible to cover, so there is a magnetic sensor array that puts more magnetic sensors on a PCB board to test the magnetic field environment of an area. For the magnetic sensor array, due to the inconsistency between the magnetic sensors and the inconsistency in the actual production process, it needs to be tested before using it as a tool to test the actual magnetic field environment. calibration.

【发明内容】[Content of the invention]

本发明的目的之一在于提供一种磁传感器阵列的校准方法,其能够完整地对磁传感器阵列进行校准。One of the objectives of the present invention is to provide a method for calibrating a magnetic sensor array, which can completely calibrate the magnetic sensor array.

根据本发明的一个方面,本发明提供一种磁传感器阵列的校准方法,其包括:提供三轴亥姆霍兹线圈;校准所述三轴亥姆霍兹线圈,以得到所述三轴亥姆霍兹线圈的每个轴线圈电流产生磁场的灵敏度参数;将所述磁传感器阵列放入所述三轴亥姆霍兹线圈中,并保证所述磁传感器阵列中的磁传感器的三个轴与所述三轴亥姆霍兹线圈的三个轴互相平行;开启所述磁传感器阵列开始采集数据,设定所述三轴亥姆霍兹线圈产生的三个轴的磁场都为第一设定磁场值,记录此时所述磁传感器阵列中各个磁传感器的输出数据,此时,每个磁传感器的输出数据称为该磁传感器的第一输出数据;再设定所述三轴亥姆霍兹线圈产生的三个轴的磁场都为第二设定磁场值,记录此时所述磁传感器阵列中各个磁传感器的输出数据,此时,每个磁传感器的输出数据称为该磁传感器的第二输出数据,其中,所述第一设定磁场值和第二设定磁场值互为相反数;根据采集到的所述磁传感器阵列中的每个磁传感器的第一输出数据和第二输出数据计算该磁传感器的补偿参数,并将该补偿参数写入文件保存,以在后续使用所述磁传感器阵列时调用该补偿参数。According to one aspect of the present invention, the present invention provides a method for calibrating a magnetic sensor array, comprising: providing a triaxial Helmholtz coil; calibrating the triaxial Helmholtz coil to obtain the triaxial Helmholtz coil The sensitivity parameters of the magnetic field generated by the coil current of each axis of the Holtz coil; put the magnetic sensor array into the three-axis Helmholtz coil, and ensure that the three axes of the magnetic sensor in the magnetic sensor array are consistent with The three axes of the three-axis Helmholtz coil are parallel to each other; the magnetic sensor array is turned on to start collecting data, and the magnetic fields of the three axes generated by the three-axis Helmholtz coil are set as the first setting Magnetic field value, record the output data of each magnetic sensor in the magnetic sensor array at this time, at this time, the output data of each magnetic sensor is called the first output data of the magnetic sensor; then set the three-axis Helmhol The magnetic fields of the three axes generated by the coil are all the second set magnetic field values, and the output data of each magnetic sensor in the magnetic sensor array at this time are recorded. At this time, the output data of each magnetic sensor is called the magnetic sensor's output data. the second output data, wherein the first set magnetic field value and the second set magnetic field value are opposite numbers to each other; according to the collected first output data and second output data of each magnetic sensor in the magnetic sensor array Compensation parameters of the magnetic sensor are calculated from the output data, and the compensation parameters are written into a file for saving, so as to call the compensation parameters when the magnetic sensor array is used subsequently.

与现有技术相比,本发明通过将磁传感器阵列放入三轴亥姆霍兹线圈内,采集所述磁传感器阵列中的每个磁传感器的输出数据,计算该磁传感器的补偿参数,并将该补偿参数写入文件保存,以在后续使用所述磁传感器阵列时调用该补偿参数。Compared with the prior art, the present invention puts the magnetic sensor array into the three-axis Helmholtz coil, collects the output data of each magnetic sensor in the magnetic sensor array, calculates the compensation parameter of the magnetic sensor, and calculates the compensation parameters of the magnetic sensor. The compensation parameter is written into a file and saved, so that the compensation parameter can be called when the magnetic sensor array is used subsequently.

【附图说明】【Description of drawings】

为了更清楚地说明本发明实施例的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其它的附图。其中:In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort. in:

图1为本发明在一个实施例中的磁传感器阵列的结构示意图;FIG. 1 is a schematic structural diagram of a magnetic sensor array in one embodiment of the present invention;

图2为本发明在一个实施例中的三轴亥姆霍兹线圈的结构示意图;2 is a schematic structural diagram of a three-axis Helmholtz coil in an embodiment of the present invention;

图3为本发明在一个实施例中的磁传感器阵列的校准方法的流程图。FIG. 3 is a flowchart of a method for calibrating a magnetic sensor array in one embodiment of the present invention.

【具体实施方式】【Detailed ways】

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.

此处所称的“一个实施例”或“实施例”是指可包含于本发明至少一个实现方式中的特定特征、结构或特性。在本说明书中不同地方出现的“在一个实施例中”并非均指同一个实施例,也不是单独的或选择性的与其他实施例互相排斥的实施例。除非特别说明,本文中的连接、相连、相接的表示电性连接的词均表示直接或间接电性相连。Reference herein to "one embodiment" or "an embodiment" refers to a particular feature, structure, or characteristic that may be included in at least one implementation of the present invention. The appearances of "in one embodiment" in various places in this specification are not all referring to the same embodiment, nor are they separate or selectively mutually exclusive from other embodiments. Unless otherwise specified, the terms connected, connected, and connected herein mean electrically connected, all mean direct or indirect electrical connection.

请参考图1所示,其为本发明在一个实施例中的磁传感器阵列的结构示意图。图1所示的磁传感器阵列包括PCB(Printed Circuit Board,即印制电路板)板110和若干磁传感器120,其中,若干磁传感器120在PCB板110上以M*N的阵列排布,其中,N表示列数,M表示行数。Please refer to FIG. 1 , which is a schematic structural diagram of a magnetic sensor array in one embodiment of the present invention. The magnetic sensor array shown in FIG. 1 includes a Printed Circuit Board (PCB) board 110 and several magnetic sensors 120 , wherein the several magnetic sensors 120 are arranged in an M*N array on the PCB board 110 , wherein , N represents the number of columns, and M represents the number of rows.

请参考图2所示,其为本发明在一个实施例中的三轴亥姆霍兹(Helmholtz)线圈的结构示意图。图2所示的三轴亥姆霍兹线圈用于产生三轴方向磁场,其包括三对导体线圈,其中,第一对导体线圈沿X轴平行排布,第二对导体线圈沿Y轴平行排布,第三对导体线圈沿Z轴平行排布。在图2所示的实施例中,导体线圈为方框型导体线圈,在另一个实施例中,导体线圈也可以为圆环型导体线圈。Please refer to FIG. 2 , which is a schematic structural diagram of a three-axis Helmholtz coil in one embodiment of the present invention. The three-axis Helmholtz coil shown in FIG. 2 is used to generate a three-axis magnetic field, and includes three pairs of conductor coils, wherein the first pair of conductor coils are arranged in parallel along the X axis, and the second pair of conductor coils are parallel along the Y axis Arrangement, the third pair of conductor coils are arranged in parallel along the Z axis. In the embodiment shown in FIG. 2 , the conductor coil is a square-shaped conductor coil, and in another embodiment, the conductor coil can also be a circular-shaped conductor coil.

为了能够完整地对图1所示的磁传感器阵列进行校准,需要选择合适大小的如图2所示的三轴亥姆霍兹线圈,其内部的均匀区域要求能够完整包含如图1所示的磁传感器阵列,并在图2所示的三轴亥姆霍兹线圈中制作与图1所示的磁传感器阵列相对应的夹具(未图示),该夹具将图1所示的磁传感器阵列固定于图2所示的三轴亥姆霍兹线圈内部,以保证图1所示的磁传感器阵列放置入图2所示的三轴亥姆霍兹线圈后,图1所示的磁传感器阵列中的磁传感器120的三个轴与图2所示的三轴亥姆霍兹线圈的三个轴互相平行。In order to completely calibrate the magnetic sensor array shown in Figure 1, it is necessary to select a suitable size of the three-axis Helmholtz coil shown in Figure 2, and its internal uniform area is required to be able to completely contain the coil shown in Figure 1. magnetic sensor array, and make a fixture (not shown) corresponding to the magnetic sensor array shown in FIG. 1 in the three-axis Helmholtz coil shown in FIG. It is fixed inside the three-axis Helmholtz coil shown in Figure 2 to ensure that after the magnetic sensor array shown in Figure 1 is placed in the three-axis Helmholtz coil shown in Figure 2, the magnetic sensor array shown in Figure 1 The three axes of the magnetic sensor 120 in FIG. 2 are parallel to the three axes of the three-axis Helmholtz coil shown in FIG. 2 .

请参考图3所示,其为本发明在一个实施例中的磁传感器阵列的校准方法的流程图。Please refer to FIG. 3 , which is a flowchart of a method for calibrating a magnetic sensor array in one embodiment of the present invention.

图3所示的磁传感器阵列的校准方法包括如下步骤。The calibration method of the magnetic sensor array shown in FIG. 3 includes the following steps.

步骤310、提供如图2所示的三轴亥姆霍兹线圈。Step 310 , providing a three-axis Helmholtz coil as shown in FIG. 2 .

步骤320、校准如图2所示的三轴亥姆霍兹线圈,以得到如图2所示的三轴亥姆霍兹线圈的每个轴线圈电流产生磁场的灵敏度参数。具体的,首先开启如图2所示的三轴亥姆霍兹线圈,在如图2所示的三轴亥姆霍兹线圈内部放置一个精准的磁力计,尽量保证该磁力计的三个轴与如图2所示的三轴亥姆霍兹线圈的三个轴平行;通过调整如图2所示的三轴亥姆霍兹线圈的电流,将所述磁力计的三个轴的输出调整为0,将此时的如图2所示的三轴亥姆霍兹线圈的电流作为如图2所示的三轴亥姆霍兹线圈的磁场的偏移量offset,从而屏蔽掉外界地磁场干扰;再次调整如图2所示的三轴亥姆霍兹线圈的电流,通过公式1得到每个轴线圈电流产生磁场的灵敏度参数sensitivity。Step 320 , calibrating the three-axis Helmholtz coil shown in FIG. 2 to obtain the sensitivity parameters of the magnetic field generated by the current of each axis of the three-axis Helmholtz coil as shown in FIG. 2 . Specifically, first turn on the three-axis Helmholtz coil shown in Figure 2, and place a precise magnetometer inside the three-axis Helmholtz coil shown in Figure 2 to ensure that the three axes of the magnetometer are as far as possible. Parallel to the three axes of the three-axis Helmholtz coil as shown in Figure 2; by adjusting the current of the three-axis Helmholtz coil as shown in Figure 2, the outputs of the three axes of the magnetometer are adjusted is 0, the current of the three-axis Helmholtz coil shown in Figure 2 at this time is used as the offset offset of the magnetic field of the three-axis Helmholtz coil shown in Figure 2, thereby shielding the external geomagnetic field interference; adjust the current of the three-axis Helmholtz coil shown in Figure 2 again, and obtain the sensitivity parameter sensitivity of the magnetic field generated by the current of each axis coil through formula 1.

M=S*(C-offset) 公式1M=S*(C-offset) Equation 1

其中,M为精准的磁力计的输出;C为线圈上加的电流;S为线圈电流产生磁场的灵敏度;offset为线圈电流偏移量。Among them, M is the output of the precise magnetometer; C is the current applied to the coil; S is the sensitivity of the magnetic field generated by the coil current; offset is the coil current offset.

步骤330、将如图1所示的磁传感器阵列放入如图2所示的三轴亥姆霍兹线圈中,并保证如图1所示的磁传感器阵列中的磁传感器120的三个轴与如图2所示的三轴亥姆霍兹线圈的三个轴互相平行。在一个实施例中,图2所示的三轴亥姆霍兹线圈中制作与图1所示的磁传感器阵列相对应的夹具(未图示),该夹具将图1所示的磁传感器阵列固定于图2所示的三轴亥姆霍兹线圈内部,以保证图1所示的磁传感器阵列放置入图2所示的三轴亥姆霍兹线圈后,图1所示的磁传感器阵列中的磁传感器120的三个轴与图2所示的三轴亥姆霍兹线圈的三个轴互相平行。Step 330: Put the magnetic sensor array shown in FIG. 1 into the three-axis Helmholtz coil shown in FIG. 2, and ensure the three axes of the magnetic sensor 120 in the magnetic sensor array shown in FIG. 1 The three axes of the three-axis Helmholtz coil shown in FIG. 2 are parallel to each other. In one embodiment, a fixture (not shown) corresponding to the magnetic sensor array shown in FIG. 1 is fabricated in the three-axis Helmholtz coil shown in FIG. It is fixed inside the three-axis Helmholtz coil shown in Figure 2 to ensure that after the magnetic sensor array shown in Figure 1 is placed in the three-axis Helmholtz coil shown in Figure 2, the magnetic sensor array shown in Figure 1 The three axes of the magnetic sensor 120 in FIG. 2 are parallel to the three axes of the three-axis Helmholtz coil shown in FIG. 2 .

步骤340、开启如图1所示的磁传感器阵列开始采集数据,设定图2所示的三轴亥姆霍兹线圈产生的三个轴的磁场都为第一设定磁场值,记录此时如图1所示的磁传感器阵列中各个(或所有)磁传感器120的输出数据M11(X0,Y0,Z0),M12(X0,Y0,Z0)…Mmn(X0,Y0,Z0),此时,每个磁传感器120的输出数据称为该磁传感器的第一输出数据;再设定图2所示的三轴亥姆霍兹线圈产生的三个轴的磁场都为第二设定磁场值,记录此时如图1所示的磁传感器阵列中各个(或所有)磁传感器120的输出数据M11(X1,Y1,Z1),M12(X1,Y1,Z1)…Mmn(X1,Y1,Z1),此时,此时,每个磁传感器120的输出数据称为该磁传感器的第二输出数据,其中,第一设定磁场值和第二设定磁场值互为相反数。也就是说,在如图1所示的磁传感器阵列中,每个磁传感器120的第一输出数据为Mmn(X0,Y0,Z0),每个磁传感器120的第二输出数据为Mmn(X0,Y0,Z0),其中,Mmn为如图1所示的磁传感器阵列中位于第m列第n行的磁传感器120输出数据,其中,(X0,Y0,Z0)为如图2所示的三轴亥姆霍兹线圈产生的三个轴的磁场都为第一设定磁场值时的三轴磁场;(X1,Y1,Z1)为如图2所示的三轴亥姆霍兹线圈产生的三个轴的磁场都为第二设定磁场值时的三轴磁场。在一个优选的实施例中,所述第一设定磁场值为-1高斯,所述第二设定磁场值为1高斯;在其他实施例中,所述第一设定磁场值和第二设定磁场至也可以为其他值,只要第一设定磁场值和第二设定磁场值互为相反数即可。Step 340: Turn on the magnetic sensor array shown in FIG. 1 to start collecting data, set the magnetic fields of the three axes generated by the three-axis Helmholtz coil shown in FIG. 2 as the first set magnetic field value, and record the current value at this time. The output data M11(X0, Y0, Z0), M12(X0, Y0, Z0)...Mmn(X0, Y0, Z0) of each (or all) magnetic sensor 120 in the magnetic sensor array as shown in FIG. 1 , at this time , the output data of each magnetic sensor 120 is referred to as the first output data of the magnetic sensor; and then the magnetic fields of the three axes generated by the three-axis Helmholtz coil shown in FIG. 2 are all set to the second set magnetic field value , record the output data M11 (X1, Y1, Z1), M12 (X1, Y1, Z1)... Mmn (X1, Y1, Z1) of each (or all) magnetic sensor 120 in the magnetic sensor array shown in FIG. 1 at this time ), at this time, the output data of each magnetic sensor 120 is called the second output data of the magnetic sensor, wherein the first set magnetic field value and the second set magnetic field value are opposite numbers to each other. That is, in the magnetic sensor array shown in FIG. 1 , the first output data of each magnetic sensor 120 is Mmn(X0, Y0, Z0), and the second output data of each magnetic sensor 120 is Mmn(X0 , Y0, Z0), where Mmn is the output data of the magnetic sensor 120 located at the mth column and the nth row in the magnetic sensor array as shown in FIG. 1 , where (X0, Y0, Z0) is as shown in FIG. 2 The three-axis magnetic fields generated by the three-axis Helmholtz coil are all three-axis magnetic fields at the first set magnetic field value; (X1, Y1, Z1) are generated by the three-axis Helmholtz coil as shown in Figure 2 The magnetic fields of the three axes are all the three-axis magnetic fields at the second set magnetic field value. In a preferred embodiment, the first preset magnetic field value is -1 Gauss, and the second preset magnetic field value is 1 Gauss; in other embodiments, the first preset magnetic field value and the second preset magnetic field value are The set magnetic field value can also be other values, as long as the first set magnetic field value and the second set magnetic field value are opposite numbers to each other.

步骤350、根据采集到的图1所示的磁传感器阵列中的每个磁传感器120的第一输出数据Mmn(X0,Y0,Z0)和第二输出数据Mmn(X0,Y0,Z0)计算该磁传感器120的补偿参数,并将该补偿参数写入文件保存,以在后续使用所述磁传感器阵列时调用该补偿参数。Step 350: Calculate the collected first output data Mmn(X0, Y0, Z0) and second output data Mmn(X0, Y0, Z0) of each magnetic sensor 120 in the magnetic sensor array shown in FIG. 1 . The compensation parameters of the magnetic sensor 120 are written and saved in a file, so that the compensation parameters can be called when the magnetic sensor array is used subsequently.

磁传感器120的补偿参数包括偏移量offset和灵敏度sensitivity。在一个实施例中,若所述第一设定磁场值为-1高斯,所述第二设定磁场值为1高斯,则The compensation parameters of the magnetic sensor 120 include offset offset and sensitivity sensitivity. In one embodiment, if the first preset magnetic field value is -1 Gauss, and the second preset magnetic field value is 1 Gauss, then

M11_offset(X,Y,Z)=(M11(X1,Y1,Z1)+M11(X0,Y0,Z0))/2M11_offset(X,Y,Z)=(M11(X1,Y1,Z1)+M11(X0,Y0,Z0))/2

M11_sensitivity(X,Y,Z)=(M11(X1,Y1,Z1)-M11(X0,Y0,Z0))/2M11_sensitivity(X,Y,Z)=(M11(X1,Y1,Z1)-M11(X0,Y0,Z0))/2

Mmn_offset(X,Y,Z)=(Mmn(X1,Y1,Z1)+Mmn(X0,Y0,Z0))/2Mmn_offset(X,Y,Z)=(Mmn(X1,Y1,Z1)+Mmn(X0,Y0,Z0))/2

Mmn_sensitivity(X,Y,Z)=(Mmn(X1,Y1,Z1)-Mmn(X0,Y0,Z0))/2。Mmn_sensitivity(X, Y, Z)=(Mmn(X1, Y1, Z1)-Mmn(X0, Y0, Z0))/2.

也就是说,若所述第一设定磁场值为-1高斯,所述第二设定磁场值为1高斯,则每个磁传感器120的偏移量Mmn_offset的计算公式为:That is to say, if the first preset magnetic field value is -1 Gauss, and the second preset magnetic field value is 1 Gauss, the calculation formula of the offset Mmn_offset of each magnetic sensor 120 is:

Mmn_offset(X,Y,Z)=(Mmn(X1,Y1,Z1)+Mmn(X0,Y0,Z0))/2;Mmn_offset(X,Y,Z)=(Mmn(X1,Y1,Z1)+Mmn(X0,Y0,Z0))/2;

每个磁传感器120的灵敏度Mmn_sensitivity的计算公式为:The formula for calculating the sensitivity Mmn_sensitivity of each magnetic sensor 120 is:

Mmn_sensitivity(X,Y,Z)=(Mmn(X1,Y1,Z1)-Mmn(X0,Y0,Z0))/2。Mmn_sensitivity(X, Y, Z)=(Mmn(X1, Y1, Z1)-Mmn(X0, Y0, Z0))/2.

综上所述,本发明提供的磁传感器阵列的校准方法能够完整地对磁传感器阵列进行校准。To sum up, the method for calibrating the magnetic sensor array provided by the present invention can completely calibrate the magnetic sensor array.

在本发明中,“连接”、“相连”、“连”、“接”等表示电性连接的词语,如无特别说明,则表示直接或间接的电性连接。In the present invention, "connected", "connected", "connected", "connected" and other words refer to electrical connection, and unless otherwise specified, refer to direct or indirect electrical connection.

以上所述仅为本发明的较佳实施方式,本发明的保护范围并不以上述实施方式为限,但凡本领域普通技术人员根据本发明揭示内容所作的等效修饰或变化,皆应纳入权利要求书中记载的保护范围内。The above descriptions are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, but any equivalent modifications or changes made by those of ordinary skill in the art according to the disclosure of the present invention shall be included in the rights. within the scope of protection stated in the request.

Claims (9)

1. A method of calibrating a magnetic sensor array, comprising:
providing a three-axis Helmholtz coil;
calibrating the triaxial Helmholtz coils to obtain sensitivity parameters of a magnetic field generated by each axial coil current of the triaxial Helmholtz coils;
putting the magnetic sensor array into the three-axis Helmholtz coil, and ensuring that three axes of the magnetic sensors in the magnetic sensor array are parallel to three axes of the three-axis Helmholtz coil;
starting the magnetic sensor array to start data acquisition, setting magnetic fields of three axes generated by the three-axis Helmholtz coil to be first set magnetic field values, and recording output data of each magnetic sensor in the magnetic sensor array at the moment, wherein the output data of each magnetic sensor is called as first output data of the magnetic sensor at the moment; setting the magnetic fields of the three axes generated by the three-axis Helmholtz coil to be second set magnetic field values, and recording output data of each magnetic sensor in the magnetic sensor array at the moment, wherein the output data of each magnetic sensor is called as second output data of the magnetic sensor, and the first set magnetic field value and the second set magnetic field value are opposite numbers;
and calculating a compensation parameter of each magnetic sensor according to the acquired first output data and second output data of the magnetic sensor in the magnetic sensor array, and writing the compensation parameter into a file for storage so as to call the compensation parameter when the magnetic sensor array is used subsequently.
2. The method of calibrating a magnetic sensor array of claim 1,
the step of calibrating the three-axis Helmholtz coil comprises:
starting the triaxial Helmholtz coil, and placing a magnetometer in the triaxial Helmholtz coil to ensure that three axes of the magnetometer are parallel to three axes of the triaxial Helmholtz coil;
adjusting the outputs of the three axes of the magnetometer to 0 by adjusting the currents of the three-axis Helmholtz coils, and taking the current of the three-axis Helmholtz coil at this time as the offset of the magnetic field of the three-axis Helmholtz coil;
adjusting the current of the three-axis Helmholtz coil again, obtaining the sensitivity parameter of the magnetic field generated by the current of each axis coil through a formula 1,
m ═ S (C-offset) formula 1
Wherein M is the output of the magnetometer; c is the current applied to the coil; s is the sensitivity of the magnetic field generated by the coil current; offset is the coil current offset.
3. The method of calibrating a magnetic sensor array of claim 1,
in the magnetic sensor array, the first output data of each magnetic sensor is Mmn (X0, Y0, Z0), the second output data of each magnetic sensor is Mmn (X1, Y1, Z1),
where Mmn is output data of the magnetic sensor located in the mth column and nth row in the magnetic sensor array, where (X0, Y0, Z0) is a three-axis magnetic field when all three-axis magnetic fields generated by the three-axis helmholtz coil are the first set magnetic field value; (X1, Y1, Z1) is the three-axis magnetic field for the second set magnetic field value for all three axes of the three-axis Helmholtz coil.
4. The method of calibrating a magnetic sensor array of claim 3,
the compensation parameters for each magnetic sensor include offset and sensitivity,
the offset value Mmn _ offset of each magnetic sensor is calculated by the formula
Mmn_offset(X,Y,Z)=(Mmn(X1,Y1,Z1)+Mmn(X0,Y0,Z0))/2;
The sensitivity of each magnetic sensor is calculated by
Mmn_sensitivity(X,Y,Z)=(Mmn(X1,Y1,Z1)-Mmn(X0,Y0,Z0))/2。
5. The method of calibrating a magnetic sensor array of claim 1,
the magnetic sensor array comprises a PCB board and a plurality of magnetic sensors,
the plurality of magnetic sensors are arranged on the PCB in an array form.
6. The method of calibrating a magnetic sensor array of claim 1,
the magnetic sensor array is placed in a uniform region inside the triaxial Helmholtz coil.
7. The method of calibrating a magnetic sensor array of claim 6,
a clamp corresponding to the magnetic sensor array is arranged in the triaxial Helmholtz coil,
the magnetic sensor array is fixed inside the triaxial Helmholtz coil by the clamp.
8. The method of calibrating a magnetic sensor array of claim 1,
the triaxial Helmholtz coil is used for generating a triaxial directional magnetic field,
the triaxial Helmholtz coil includes three pairs of conductor coils, wherein a first pair of conductor coils is arranged in parallel along an X axis, a second pair of conductor coils is arranged in parallel along a Y axis, and a third pair of conductor coils is arranged in parallel along a Z axis.
9. The method of calibrating a magnetic sensor array of claim 4,
the first set magnetic field value is-1 gauss, and the second set magnetic field value is 1 gauss.
CN202210374959.6A 2022-04-11 2022-04-11 A kind of calibration method of magnetic sensor array Pending CN114859280A (en)

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