CN114812874B - Micro-nano force source device, control method, micro-nano force measuring device and storage medium - Google Patents

Abstract

The invention discloses a micro-nano force source device, a control method, a micro-nano force measuring device, and a storage medium. The micro-nano force source device includes an inner electrode and an outer electrode, and the outer electrode is sleeved on the inner electrode. outside and the outer electrode and the inner electrode have a partial or full length intersection, the outer contour function of the inner electrode is a fixed value, and the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode The reciprocal of is a linear function. The micro-nano force source device of the present invention can make the output force value of the micro-nano force source have a linear relationship with the intersecting length of the inner and outer electrodes. The micro-nano force has high accuracy, and eliminates the need for precise adjustment and control of the loading voltage, and does not need to be equipped with a high-accuracy DC regulated power supply adjustment control device, which greatly saves the cost of the device and reduces the size of the device.

Description

Micro-nano force source device, control method, micro-nano force measuring device and storage medium

technical field

The invention relates to the technical field of micro-nano force measurement, in particular to a micro-nano force source device, a control method, a micro-nano force measurement device and a storage medium.

Background technique

With the continuous miniaturization and integrated development of sensor devices in high-end equipment, the application of Micro-Electro-Mechanical System (MEMS) devices and micro-nano processing technology in high-end equipment manufacturing is becoming more and more extensive. In nanofabrication, the measurement of micro-nano force is becoming more and more common. The accuracy and reliability of micro-nano force measurement will directly affect the level of micro-nano-fabrication technology and the performance of a large number of MEMS devices. At the same time, micro-nano-fabrication technology and equipment such as Lithography technology and equipment itself have become an important direction in the manufacture of high-end equipment, so the accurate measurement of micro-nano force is of great significance to improve the performance, technical content and technological innovation of high-end equipment. For example, the X-ray deep precision electroforming molding (Lithographie GaVanoformung Abformung, LIGA) technology used in the manufacturing process of MEMS sensors widely used in high-end equipment involves the manufacture and assembly of a large number of micro-nano components, a large number of which involve micro-nanoformung. The nano-scale force feedback control process and the accuracy and reliability of micro-nano force measurement results are the premise and guarantee for the realization of micro-nano processing technology and automation of MEMS components.

由该公式可知，可通过改变微纳力测量装置中力源的电容梯度或者改变加载电压来改变力源输出的微纳牛量级静电力大小。In the micro-nano force measuring device, the core component is the force source device that generates the force value of the micro-nano Newton level. According to the different force source forms used by different measuring devices, it can be divided into capacitive measuring devices, inductive measuring devices, and resistance measuring devices. measuring devices, etc. At present, capacitive measurement devices are mainly used for the measurement and value traceability devices of micro-nano Newton level force, such as NIST in the United States, NPL in the United Kingdom, PTB in Germany, and NIM in China. Capacitive force sources are used in force measuring devices to measure micro-nano forces. The basic principle is to use the balance between the electrostatic force generated by the capacitive force source in the micro-nano force measuring device and the micro-nano force to be measured to realize the force measurement. By controlling the loading voltage between the two plates of the capacitive force source, the electrostatic force of the micro-nano Newton level output by the force source in the micro-nano force measuring device can be changed to achieve balance with the micro-nano force to be measured. According to the force balance principle , the micro-nano force to be measured and the micro-nano force output by the force source in the measuring device are equal in magnitude, opposite in direction, and act on the same straight line. At this time, the magnitude of the balanced electrostatic force output by the force source in the micro-nano force measuring device is The force value to be measured can be obtained. The calculation formula of the micro-nano electrostatic force generated by the force source in the capacitive micro-nano force measuring device is:

It can be seen from the formula that the magnitude of the electrostatic force output by the force source can be changed by changing the capacitance gradient of the force source in the micro-nano force measuring device or by changing the loading voltage.

In the existing micro-nano force source device, the output micro-nano force value of the force source is proportional to the square of the applied voltage, so the output force value of the micro-nano force source is very sensitive to the change of the applied voltage. The force value is proportional to the square of the loading voltage, so if you want to accurately change the output micro-nano force value of the force source, you need to achieve precise adjustment and control of the loading voltage (while maintaining the stability of the loading voltage, it is also necessary to maintain the loading voltage Accuracy during adjustment), the entire micro-nano-force measuring device needs to be equipped with a high-accuracy DC regulated power supply adjustment control device, which greatly increases the cost and volume of the micro-nano-force measuring device, limits the applicability of the device, and is very unfavorable Integration and miniaturization of micro-nano force measuring devices.

Contents of the invention

In view of this, the embodiment of the present invention provides a micro-nano force source device, a control method, a micro-nano force measuring device, and a storage medium, which can simplify the structure of the device, reduce the cost of the device, solve the problem of miniaturization and integration of the device, and effectively ensure The output micro-nano force has high accuracy.

The technical scheme that the present invention proposes is as follows:

The first aspect of the embodiment of the present invention provides a micro-nano force source device, including an internal electrode and an external electrode, the external electrode is sleeved outside the internal electrode, and the external electrode and the internal electrode have part or all The lengths intersect, the outer contour function of the inner electrode is a fixed value, and the inverse of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode is a linear function.

已知的，内外电极所组成的力源产生的力值公式为：

结合上述公式(2)和公式(3)可得内外电极之间的微纳力为：

其中h(z)＝g(z)-f(z)，因此，当内电极的外轮廓为直线，且外电极的内轮廓函数和所述内电极的外轮廓函数的差的倒数为一次函数，即h(z_l)的倒数为一次函数时，微纳力源输出为相交长度z_l的一次函数，因此，在内外电极间的加载电压大小固定时，微纳力的大小即微纳力源的输出力值与内外电极的相交长度成线性关系。由此，只需对其内外电极的相交长度进行控制，就能够改变微纳力的输出，由于微纳力源的输出力值与内外电极的相交长度成线性关系，内外电极位置控制所产生的误差也只是呈线性的传递到力源的输出，避免了电压调节方式所造成的不确定度放大，有效保证输出微纳力具有高准确度。采用本发明的微纳力源装置后，输出力值调节方便，且省去了对于加载电压的精确调节与控制，无需配备高准确度的直流稳压电源调节控制装置，极大地节省了装置成本、减小了装置的体积。In the micro-nano force source device of the present invention, the outer contour function of the inner electrode is a fixed value, that is, the outer contour of the inner electrode is a straight line, and the reciprocal of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode It is a linear function, assuming that the outer contour of the inner electrode satisfies the function f(z+Lz _l ), and the inner contour of the outer electrode satisfies the function g(z), then the capacitance between the inner and outer electrodes is:

It is known that the force value formula generated by the force source composed of internal and external electrodes is:

Combining the above formula (2) and formula (3), the micro-nano force between the inner and outer electrodes can be obtained as:

Wherein h(z)=g(z)-f(z), therefore, when the outer contour of the inner electrode is a straight line, and the inverse of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode is a linear function , that is, when the reciprocal of h(z _l ) is a linear function, the output of the micro-nano force source is a linear function of the intersection length z _l . Therefore, when the applied voltage between the inner and outer electrodes is fixed, the magnitude of the micro-nano force is the micro-nano force The output force value of the source is linear with the intersecting length of the inner and outer electrodes. Therefore, the output of micro-nano force can be changed only by controlling the intersecting length of the inner and outer electrodes. The error is only linearly transmitted to the output of the force source, avoiding the uncertainty amplification caused by the voltage adjustment method, and effectively ensuring the high accuracy of the output micro-nano force. After adopting the micro-nano force source device of the present invention, the output force value can be easily adjusted, and the precise adjustment and control of the loading voltage is omitted, and there is no need to be equipped with a high-accuracy DC regulated power supply adjustment control device, which greatly saves the cost of the device , Reduced the volume of the device.

According to the micro-nano force source device provided in the first aspect of the embodiment of the present invention, the inner contour function of the outer electrode is a first order fractional function.

The inner contour function of the outer electrode is a fractional function, which is convenient for calculating the output force value of the micro-nano force source device.

所述内电极的外轮廓函数为f(z)＝A，其中A、B、C和D均为常数。According to the micro-nano force source device provided in the first aspect of the embodiment of the present invention, the first-order fractional function is

The outer contour function of the inner electrode is f(z)=A, where A, B, C and D are all constants.

After the difference between the two functions, the reciprocal is a linear function. According to the calculation, it can be known that the output force value of the micro-nano force source device and the intersecting length of the inner and outer electrodes are in a linear relationship, which is convenient for adjusting the output force value of the micro-nano force source device. .

The second aspect of the embodiment of the present invention provides a control method for a micro-nano force source device, which is suitable for the micro-nano force source device described in any one of the first aspects of the embodiment of the present invention, the method includes: by controlling the The intersection length of the outer electrode and the inner electrode adjusts the output force value of the micro-nano force source device.

In the above-mentioned micro-nano force source device, the output force value of the micro-nano force source is in a linear relationship with the intersecting length of the inner and outer electrodes, so the output of the micro-nano force can be changed only by controlling the intersecting length of the inner and outer electrodes. The error generated by the intersecting length control of the inner and outer electrodes is only linearly transmitted to the output of the force source, which avoids the uncertainty amplification caused by the voltage adjustment method. Adopting the method of the present invention saves the precise adjustment and control of the loading voltage, and does not need to be equipped with a high-accuracy DC stabilized power supply adjustment control device, which greatly saves the cost of the device and reduces the volume of the device.

According to the second aspect of the embodiment of the present invention, the control method of the micro-nano force source device further includes: judging whether the loading voltage between the external electrode and the internal electrode is lower than the set voltage, when the loading voltage is lower than the set voltage When the voltage is high, the output force value is adjusted by controlling the applied voltage, and when the applied voltage is not lower than the set voltage, the output force value of the micro-nano force source device is adjusted by controlling the intersecting length of the outer electrode and the inner electrode.

Two methods of adjusting the output force value of the micro-nano force source are used to work together. In the case of low voltage, the output of the force source is controlled by voltage regulation, and the output force value of the micro-nano force source device is adjusted by controlling the intersection length at high voltage. The adjustment method is flexible.

According to the control method of the micro-nano force source device provided in the second aspect of the embodiment of the present invention, before adjusting the output force value of the micro-nano force source device by controlling the intersecting length of the outer electrode and the inner electrode, it also includes, establishing The corresponding relationship between the range segment of the output force value and the loading voltage between the outer electrode and the inner electrode, the loading voltage is selected according to the range segment of the output force value.

Through the adjustment of the intersection length and the adjustment and superposition of the loading voltage, a micro-nano force source with a large output range can be formed, and the loading voltage gear can be selected, which is convenient to use.

The third aspect of the embodiment of the present invention provides a micro-nano force measuring device, including the micro-nano force source device and the length control adjustment device according to any one of the first aspect of the embodiment of the present invention, and the length control adjustment device is used for for controlling the intersecting length of the outer electrodes and the inner electrodes.

The third aspect of the embodiment of the present invention provides a micro-nano force measuring device which has the same technical effect as the control method of the second aspect of the embodiment of the present invention, and will not be repeated here.

According to the third aspect of the embodiment of the present invention, the micro-nano force measurement device further includes a voltage judging module and a voltage regulating module, and the voltage judging module is used to judge whether the loading voltage between the outer electrode and the inner electrode is lower than The voltage is set, and the voltage adjustment module is used to adjust the output force value by controlling the magnitude of the loaded voltage when the loaded voltage is lower than the set voltage.

The micro-nano force measuring device provided according to the third aspect of the embodiment of the present invention further includes a voltage gear adjustment module, and the voltage gear adjustment module is used to establish the range segment of the output force value and the outer electrode and the inner electrode The corresponding relationship between the loading voltage, and select the loading voltage according to the range of the output force value.

The fourth aspect of the embodiments of the present invention provides a computer-readable storage medium, the computer-readable storage medium stores computer instructions, and the computer instructions are used to make the computer execute any one of the second aspect of the embodiments of the present invention. the control method described.

The fourth aspect of the embodiments of the present invention provides a computer-readable storage medium that has the same technical effect as that of the control method in the second aspect of the embodiments of the present invention, which will not be repeated here.

Description of drawings

In order to express the technical solutions of the embodiments of the present invention more clearly, the following will briefly introduce the accompanying drawings required for the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings without making creative efforts.

Fig. 1 is the front sectional view of the micro-nano force source in the traditional micro-nano force measuring device;

Fig. 2 is the top view of the micro-nano force source in the traditional micro-nano force measuring device;

3 is a schematic diagram of the design structure of the micro-nano force source device in the embodiment of the present invention;

Fig. 4 is a schematic structural diagram of a micro-nano force source device in an embodiment of the present invention;

Fig. 5 is a schematic diagram of the relationship between an output force source and the intersection length in an embodiment of the present invention

Fig. 6 is a schematic structural diagram of another micro-nano force source device in an embodiment of the present invention;

Fig. 7 is a schematic diagram of the relationship between another output force source and the intersection length in the embodiment of the present invention;

Fig. 8 is a flow chart of the control method of the micro-nano force source device in the embodiment of the present invention;

Fig. 9 is a block diagram of a micro-nano force measuring device in an embodiment of the present invention.

Detailed ways

In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Example 1

The embodiment of the present invention provides a micro-nano force source device, which can solve the problem of inconvenient adjustment of the output force value of the micro-nano force source.

其中U为内电极和外电极间的加载电压，Di为外电极内径，d₀为内电极外径，ε为空气中的介电常数，z_l为内电极和外电极相交长度。该式可知，此形状的微纳力源的输出值仅取决于内电极外径d₀、外电极内径Di以及加载电压U，一旦内电极和外电极尺寸确定后，其内电极外径d₀、外电极内径Di均为常数不可改变，在使用过程中，只能通过调节加载电压U的大小来控制力源的输出力值。Referring to Figure 1 and Figure 2, the micro-nano force source in the traditional micro-nano force measuring device is composed of internal electrodes and external electrodes, both of which are columnar capacitors, and the output micro-nano force value is:

Where U is the applied voltage between the inner electrode and the outer electrode, Di is the inner diameter of the outer electrode, d ₀ is the outer diameter of the inner electrode, ε is the dielectric constant in air, z _l is the intersection length of the inner electrode and the outer electrode. It can be seen from the formula that the output value of the micro-nano force source of this shape only depends on the outer diameter of the inner electrode d ₀ , the inner diameter of the outer electrode Di and the applied voltage U. Once the size of the inner electrode and the outer electrode is determined, the outer diameter of the inner electrode d ₀ The inner diameter Di of the outer electrode and the outer electrode are constant and cannot be changed. During use, the output force value of the force source can only be controlled by adjusting the magnitude of the applied voltage U.

Existing micro-nano force source devices have the following disadvantages:

1. It can be seen from the formula (1) that the output force value of the force source is proportional to the square of the loading voltage, so the output force value of the micro-nano force source is very sensitive to the change of the loading voltage. The nano-force value is proportional to the square of the loading voltage, so if you want to accurately change the output micro-nano-force value of the force source, you need to achieve precise adjustment and control of the loading voltage, and you need to be equipped with a high-precision DC stabilized power supply adjustment control device, which greatly increases the volume and cost of the micro-nano force source device.

2. During the calibration process of the micro-nano force source, since the output micro-nano force value changes with the square of the voltage, its output curve is a quadratic function curve, and multiple points need to be calibrated to obtain the output characteristic curve of the micro-nano force source device. The time for micro-nano force source calibration is improved, and the accuracy of force source calibration is affected.

3. Although it is easier to change the loading voltage of the micro-nano force source device, in order to obtain a wider range of output micro-nano force values to increase the output range (range) of the micro-nano force source device, a higher loading voltage (many In order to expand the output range of the power source, the loading voltage needs to reach more than 2000V), and when the loading voltage is too high, electrostatic discharge breakdown is likely to occur between the capacitive plates of the power source in the device, resulting in damage to the micro-nano power source device.

4. Obtaining a stable high voltage requires a huge auxiliary device. At the same time, the stability of the DC high voltage input itself is difficult to guarantee. If the stability of the DC high voltage cannot be guaranteed, the accuracy and stability of the micro-nano force value output by the micro-nano force source device It is difficult to guarantee the reliability, which directly affects the accuracy and stability of the micro-nano force source device.

Therefore, an embodiment of the present invention provides a micro-nano force source device, including an inner electrode and an outer electrode, the outer electrode is sleeved outside the inner electrode, and the outer electrode and the inner electrode have a partial or full length intersection, and the outer contour of the inner electrode The function is a fixed value, and the inverse of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode is a linear function.

The design principle of the micro-nano force source device of the embodiment of the present invention will be described below with reference to FIG. 3 .

通常的，内外电极所组成的力源产生的力值公式为：

结合公式(2)和公式(3)，且内电极外径为直线时(即f(z+L-z_l)为固定值时)，可得内外电极之间的微纳力为：

其中h(z)＝g(z)-f(z)，其中U是内电极和外电极间的加载电压，即内外电极的电势差，k是一个比例系数，b为常数。由此可见，对于柱状电容式微纳力源装置而言，其输出力值与内电极外轮廓形状和外电极内轮廓形状具有重要关系。若能使内外电极形状满足一定关系，则可以控制力源输出特性。In the cylindrical coordinate system, that is, the z-axis and the r-axis in the figure, it is assumed that the outer contour of the inner electrode satisfies the function f(z+Lz _l ), and the inner contour of the outer electrode satisfies the function g(z). The length of the outer electrode is L, the intersecting length of the inner and outer electrodes is z _l , and the capacitance differential formed by the inner electrode and the outer electrode dC=εdedz/[g(z)-f(z+Lz _l ), then the capacitance between the inner and outer electrodes is:

Usually, the force value formula generated by the force source composed of internal and external electrodes is:

Combining formula (2) and formula (3), and when the outer diameter of the inner electrode is a straight line (that is, when f(z+Lz _l ) is a fixed value), the micro-nano force between the inner and outer electrodes can be obtained as:

Where h(z)=g(z)-f(z), where U is the loading voltage between the inner electrode and the outer electrode, that is, the potential difference between the inner and outer electrodes, k is a proportional coefficient, and b is a constant. It can be seen that for the columnar capacitive micro-nano force source device, the output force value has an important relationship with the outer contour shape of the inner electrode and the inner contour shape of the outer electrode. If the shape of the inner and outer electrodes can satisfy a certain relationship, the output characteristics of the force source can be controlled.

Specifically, as long as the function obtained by substituting h(z _l ) into the micro-nano force formula is a linear function of the intersection length z _l , the output micro-nano force of the force source can be linearly related to the intersection length of the inner and outer electrodes. In the micro-nano force source device of the embodiment of the present invention, when the outer contour function of the inner electrode is a fixed value, and the inverse of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode is a linear function with respect to the height z, That is, when the reciprocal of h(z _l ) is a linear function, after being brought into formula (4), the micro-nano force is a linear function of the intersecting length z _l . Therefore, when the applied voltage between the inner and outer electrodes is fixed, the micro-nano force The size, that is, the output force value of the micro-nano force source is linearly related to the intersecting length of the inner and outer electrodes.

In the micro-nano force source device of the present invention, since the output force value of the micro-nano force source is in a linear relationship with the intersecting length of the inner and outer electrodes, the output of the micro-nano force can be changed only by controlling the intersecting length of the inner and outer electrodes. The error generated by the electrode position control is only linearly transmitted to the output of the force source, avoiding the uncertainty amplification caused by the voltage adjustment method, and effectively ensuring the high accuracy of the output micro-nano force. After adopting the micro-nano force source device of the present invention, the precise adjustment and control of the loading voltage is omitted, and there is no need to be equipped with a high-accuracy DC regulated power supply adjustment control device, which greatly saves the cost of the device and reduces the volume of the device .

Therefore, the output of the force source can be changed only by controlling the intersecting length of the inner and outer electrodes. At present, even a simple and cheap linear screw can control the intersecting length control accuracy at the order of 0.01 mm. The output force value of Naliyuan has a linear relationship with the intersecting length of the inner and outer electrodes, and the error generated by the control of the intersecting length of the inner and outer electrodes is only linearly transmitted to the output of the Liyuan, avoiding the uncertainty amplification caused by the voltage adjustment method . Embodiments of the present invention have the following effects:

First, after adopting the micro-nano power source device of the present invention, the precise adjustment and control of the loading voltage is omitted, and there is no need to be equipped with a high-accuracy DC regulated power supply adjustment control device, which greatly saves the cost of the device and reduces the The volume of the device.

Second, the micro-nano force source device of the present invention has a linear relationship between the output micro-nano force value and the intersection length, so in the micro-nano force source calibration process, it is not as complicated as calibrating the quadratic curve, only a small number of points need to be calibrated The output characteristic curve of the device can be accurately obtained, the time for calibration of the micro-nano force source is greatly shortened, and the calibration accuracy of the device is also improved.

Third, the micro-nano force source device of the present invention expands the output range of the force source by controlling the intersecting length of the internal and external capacitors, avoids the electrode breakdown phenomenon caused by increasing the voltage of the traditional device to expand the output range of the force source, and greatly improves the micro-nano force source. Device safety and stability.

Fourth, the micro-nano force source device of the present invention only needs to control the intersecting length of the inner and outer electrodes to control the output. Compared with the traditional device, the acquisition and precise control of steady-state DC high voltage are eliminated, and it has better anti-electromagnetic interference ability Adaptability to the environment.

In one embodiment, the inner contour function of the outer electrode is a first-order fractional function, and the outer contour function of the inner electrode is a fixed value. The inner contour function of the outer electrode is a fractional function, which is convenient for calculating the output force value of the micro-nano force source device.

内电极的外轮廓函数为f(z)＝A，其中A、B、C和D均为常数。两个函数作差后，其倒数为一次函数，根据公式(4)计算可以得知此时微纳力源装置的输出力值和内外电极的相交长度成线性关系，便于调节微纳力源装置的输出力值。Further, the primary fraction function is

The outer contour function of the inner electrode is f(z)=A, where A, B, C and D are all constants. After the difference between the two functions, the reciprocal is a linear function. According to the calculation of formula (4), it can be known that the output force value of the micro-nano force source device and the intersecting length of the inner and outer electrodes are in a linear relationship, which is convenient for adjusting the micro-nano force source device. output force value.

其中F为作用于内电极的力值，dz为内外电极相对位置的变化，根据公式(5)可以得到，作用于内电极的力值为：

在本实施例中f(z)＝A，

代入公式(2)可以得到

将式(7)代入式(6)可得：

由此可见，输出力值与相交长度z_l成线性关系。Specifically, according to the principle of virtual work, if the voltage between the inner and outer electrodes is kept constant, the work required to make the inner electrode move to generate a displacement dz is:

Among them, F is the force value acting on the inner electrode, and dz is the change of the relative position of the inner and outer electrodes. According to formula (5), it can be obtained that the force value acting on the inner electrode is:

In this embodiment f(z)=A,

Substitute into formula (2) to get

Substituting formula (7) into formula (6) can get:

It can be seen that the output force value has a linear relationship with the intersection length z _l .

计算得到的力值会有所差别，因此在实际应用中，可以在确定内外电极的轮廓形状后，再通过校准(即任意取两个电极相交长度z₁的值，并标定此时的输出力值)从而获得线性关系式。(实际上不管是传统的柱状微纳力源还是本发明的微纳力源装置，在实际应用中均需要标定输出特性，不能以理想的公式计算值作为实际的输出特性来使用)It should be noted that the derivation of this formula is based on a simplified model, which requires the length (L) of the inner and outer electrodes>>the diameter of the electrode, so in some cases, the linear output of the actual device The micro-nano force value is the same as that according to theoretical formula

The calculated force value will be different, so in practical applications, after determining the contour shape of the inner and outer electrodes, it can be calibrated (that is, the value of the intersection length z ₁ of the two electrodes is taken arbitrarily, and the output force at this time is calibrated value) to obtain a linear relationship. (Actually, whether it is the traditional columnar micro-nano force source or the micro-nano force source device of the present invention, the output characteristics need to be calibrated in practical applications, and the calculated value of the ideal formula cannot be used as the actual output characteristics)

内电极的外轮廓函数为f(z)＝2。内外电极形状如图4所示，内电极的外轮廓为直线，外电极的内轮廓为满足

的曲线。此时力源的输出力值为：F＝kU²ε(1.5+z_l)。Specifically, in one embodiment, A, B, and C are 2, 6.5, and 1.5, respectively. That is, the inner contour function of the outer electrode is

The outer contour function of the inner electrode is f(z)=2. The shape of the inner and outer electrodes is shown in Figure 4, the outer contour of the inner electrode is a straight line, and the inner contour of the outer electrode satisfies

curve. At this time, the output force value of the force source is: F=kU ² ε(1.5+z _l ).

It can be seen that, under the condition of other parameters being constant, the output force source has a linear relationship with the intersecting length z _l of the inner and outer electrodes, as shown in Fig. Can change the output of the force source. Referring to Fig. 5, several gears (such as 100V, 200V, 500V) can be set for the embodiment of the present invention, and a certain value loading voltage (100V, 200V, 500V) needs to be loaded according to the output range of the force source, and then the intersection length can be controlled to accurately Control the output of the micro-nano force source device. When a larger range is required, a larger loading voltage such as 500V can be selected. When a smaller range is required to improve accuracy, a 100V loading voltage can be selected. After selecting the range, the loading voltage can be determined according to the intersection length. The output of the Naliyuan device. The acquisition and stability of the fixed-value loading voltage of the micro-nano force source device is much easier than that of the adjustable voltage, and the stability is better, so the stability and accuracy of the device voltage can be guaranteed (specifically, if only It is much simpler to obtain the high stability and high accuracy of the fixed-value loading voltage at the three points of 100V, 200V, and 500V than to obtain the high accuracy and high stability of a certain value of the adjustable voltage from 0V to 500V. Yes, the device is also much simpler). After adopting this method, the present invention can not only obtain high-accuracy output micro-nano force, but also greatly increase the output range of the micro-nano force source device of the present invention, and improve the applicability of the device.

内电极的外轮廓函数为f(z)＝4，其形状参见图6。根据公式(4)可知此时力源的输出微纳力值为：F＝kU²εz_l+b，由此可见，在其他参数不变的条件下，输出力值与电容的相交长度z_l成线性关系。其相交长度z_l和输出力值的关系如图7所示。图7纵坐标F是力源输出微纳力值，横坐标z_l是内外电容的相交长度。由图7可明显看出，在本实施例中，力源输出微纳力值与相交长度具有线性关系，其相关系数R2达到0.9973，表明线性关系极好。In another exemplary embodiment of the present invention, let the inner contour function of the outer electrode be

The outer contour function of the inner electrode is f(z)=4, and its shape is shown in FIG. 6 . According to the formula (4), it can be known that the output micro-nano force value of the force source at this time is: F＝kU ² εz _l +b. It can be seen that under the condition of other parameters unchanged, the intersection length z _l of the output force value and the capacitance into a linear relationship. The relationship between the intersection length z _l and the output force value is shown in Figure 7. In Fig. 7, the ordinate F is the micro-nano force value output by the force source, and the abscissa z _l is the intersecting length of the internal and external capacitors. It can be clearly seen from Fig. 7 that in this embodiment, the output micro-nano force value of the force source has a linear relationship with the intersection length, and its correlation coefficient R2 reaches 0.9973, indicating that the linear relationship is excellent.

同样也可以使输出力值与电容的相交长度z_l成线性关系。In another exemplary embodiment of the present invention, the outer contour function of the inner electrode is set as f(z)=4, and the outer contour function of the inner electrode is set as

Similarly, the output force value and the intersecting length z _l of the capacitor can also be linearly related.

The shape of the inner and outer electrodes of the micro-nano force source in the above-mentioned embodiments of the present invention is only one of them. It only needs to satisfy the inverse of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode to be a linear function, and the outer contour of the inner electrode If the function is a fixed value (that is, the internal electrode is a cylindrical capacitor), the output micro-nano force of the force source can be linearly related to the intersection length.

Example 2

The embodiment of the present invention also provides a control method for a micro-nano force source device, which is suitable for the above-mentioned micro-nano force source device, see Figure 8, the method includes: step S100, adjusting the micro-nano force source device by controlling the intersection length The output force value of the Naliyuan device.

In the above-mentioned micro-nano force source device, when the applied voltage between the outer electrode and the inner electrode is constant, the output force value has a linear relationship with the intersection length. Therefore, the control method of the micro-nano force source device in the embodiment of the present invention can change the output of the force source only by controlling the intersecting length of the inner and outer electrodes. At present, even a simple and cheap linear screw can change the position The control accuracy is controlled at the level of 0.01mm. At the same time, since the output force value of the micro-nano force source is linearly related to the intersecting length of the inner and outer electrodes, the error generated by the control of the intersecting length of the inner and outer electrodes is only linearly transmitted to the output of the force source. The uncertainty amplification caused by the voltage regulation method is avoided. Adopting the method of the present invention saves the precise adjustment and control of the loading voltage, and does not need to be equipped with a high-accuracy DC stabilized power supply adjustment control device, which greatly saves the cost of the device and reduces the volume of the device.

In an embodiment, the control method further includes: judging whether the applied voltage between the outer electrode and the inner electrode is lower than the set voltage, and when the applied voltage is lower than the set voltage, adjusting the output force value by controlling the applied voltage, when When the loading voltage is not lower than the set voltage, the output force value of the micro-nano force source device is adjusted by controlling the intersecting length of the outer electrode and the inner electrode.

For example, when the loading voltage is lower than 100V, the existing voltage control method is used to regulate the output force value. When the loading voltage is higher than 100V, it is inconvenient to adjust the loading voltage at this time, and the length is used to adjust the output force value. Two methods of adjusting the output force value of the micro-nano force source are used to work together. In the case of low voltage, the output of the force source is controlled by voltage regulation, and the output force value of the micro-nano force source device is adjusted by controlling the intersection length at high voltage. The adjustment method is flexible.

In one embodiment, the control method further includes, before adjusting the output force value of the micro-nano force source device by controlling the intersecting length of the external electrode and the internal electrode, further comprising, establishing the range of the output force value and the range of the external electrode and the internal electrode. The corresponding relationship between the loading voltage between the electrodes, the loading voltage is selected according to the range segment of the output force value.

Specifically, we can set several gears for the loading voltage (such as 100V, 200V, 500V), load a certain value of loading voltage (100V, 200V, 500V) according to the output range of the force source, and then control the intersection length to precisely control The output of the micro-nano force source device. When a larger range is required, a larger loading voltage such as 500V can be selected. When a smaller range is required to improve accuracy, a 100V loading voltage can be selected. After selecting the range, the loading voltage can be determined according to the intersection length. The output of the Naliyuan device. Since the acquisition and stability of the fixed-value loading voltage is much easier than that of the adjustable voltage, and the stability is better, the stability and accuracy of the device voltage can be guaranteed. After adopting this method, the present invention can not only obtain high-accuracy output micro-nano force, but also greatly increase the output range of the micro-nano force source device of the present invention, and improve the applicability of the micro-nano force source device. Through the adjustment of the intersection length and the adjustment and superposition of the loading voltage, a micro-nano force source with a large output range can be formed, and the output range of the force source can be selected by selecting the loading voltage gear, which is convenient to use.

On the one hand, the embodiment of the present invention controls the output of the force source through voltage regulation under low voltage conditions; on the other hand, it can form a micro-nano force source with a super large output range through the superimposition of the adjustment of the intersection length and the adjustment of the loading voltage.

Example 3

According to an embodiment of the present invention, there is also provided a micro-nano force measuring device, see FIG. 9, including the micro-nano force source device and the length control and adjustment device as in the above embodiment of the present invention. The length control and adjustment device is used to control the outer electrode and the inner electrode. The intersection length of the electrodes. For specific content, refer to the corresponding part of the foregoing method embodiment, and details are not repeated here.

The length control adjustment device can use a linear screw, and the position control accuracy is controlled at the level of 0.01mm, which can save the precise adjustment and control of the loading voltage, and does not need to be equipped with a high-accuracy DC regulated power supply adjustment control device, which greatly saves The cost of the device is reduced, and the volume of the device is reduced. The micro-nano force source of the present invention has a linear relationship between the output micro-nano force value and the intersection length, so in the calibration process of the micro-nano force source, it does not need to be as complicated as calibrating the quadratic curve, and only a small number of points can be accurately obtained. The output characteristic curve of the device greatly shortens the calibration time of the micro-nano force source, and at the same time improves the calibration accuracy of the device. In addition, the micro-nano force source device of the present invention expands the output range of the force source by controlling the intersecting length of the internal and external capacitors, avoids the electrode breakdown phenomenon caused by increasing the voltage of the traditional device to expand the output range of the force source, and greatly improves the safety and reliability of the device. stability. Since it is only necessary to control the crossing length of the inner and outer electrodes to control the output, compared with traditional devices, the acquisition and precise control of steady-state DC high voltage are eliminated, and it has better anti-electromagnetic interference ability and environmental adaptability.

A micro-nano-force measuring device provided by the implementation of the present invention has the same technical effect as the above-mentioned control method, and will not be repeated here.

In an embodiment, the micro-nano force measuring device provided according to the embodiment of the present invention further includes a voltage judging module and a voltage regulating module.

The voltage judging module is used to judge whether the loading voltage between the outer electrode and the inner electrode is lower than the set voltage. For specific content, refer to the corresponding part of the foregoing method embodiment, and details are not repeated here.

The voltage regulation module is used to adjust the output force value by controlling the loading voltage when the loading voltage is lower than the set voltage. For specific content, refer to the corresponding part of the foregoing method embodiment, and details are not repeated here.

In one embodiment, the micro-nano force measuring device further includes a voltage range adjustment module.

The voltage gear adjustment module is used to establish the corresponding relationship between the output force range and the loading voltage, and select the loading voltage according to the output force range. For specific content, refer to the corresponding part of the foregoing method embodiment, and details are not repeated here.

The micro-nano-force measuring device provided by the embodiment of the present invention has the same technical effect as the control method of the embodiment of the present invention, and will not be repeated here.

Example 4

An embodiment of the present invention also provides a computer-readable storage medium, on which a computer program is stored, and when the instruction is executed by a processor, the steps of the method for controlling the micro-nanoforce source device in the above-mentioned embodiments are implemented. The storage medium also stores audio and video stream data, feature frame data, interaction request signaling, encrypted data, and preset data sizes. Wherein, the storage medium may be a magnetic disk, an optical disk, a read-only memory (Read-Only Memory, ROM), a random access memory (Random Access Memory, RAM), a flash memory (FlashMemory), a hard disk (HardDiskDrive, abbreviation: HDD) or A solid-state drive (Solid-State Drive, SSD), etc.; the storage medium may also include a combination of the above-mentioned types of memories. Those skilled in the art can understand that all or part of the processes in the methods of the above-mentioned embodiments can be completed by instructing related hardware through a computer program, and the program can be stored in a computer-readable storage medium. During execution, it may include the processes of the embodiments of the above-mentioned methods. Wherein, the storage medium may be a magnetic disk, an optical disk, a read-only memory (Read-Only Memory, ROM), a random access memory (Random Access Memory, RAM), a flash memory (FlashMemory), a hard disk (HardDiskDrive, abbreviation: HDD) ) or a solid-state hard disk (Solid-State Drive, SSD), etc.; the storage medium may also include a combination of the above-mentioned types of memories.

Above, the above embodiments are only used to illustrate the technical solutions of the present invention, not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still be applied to the foregoing embodiments The technical solutions described in the examples are modified, or some of the technical features are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims (10)

1. A micro-nano force source device, characterized in that it includes an internal electrode and an external electrode, the external electrode is sleeved outside the internal electrode and the external electrode and the internal electrode have a partial or full length intersecting , the outer contour function of the inner electrode is a fixed value, and the inverse of the difference between the inner contour function of the outer electrode and the outer contour function of the inner electrode is a linear function. 2. The micro-nano force source device according to claim 1, wherein the inner contour function of the outer electrode is a first-order fractional function. 3. The micro-nano force source device according to claim 2, wherein the first-order fractional function is

The outer contour function of the inner electrode is f(z)=A, where A, B, C and D are all constants. 4. A control method for a micro-nano force source device, characterized in that it is suitable for the micro-nano force source device described in any one of claims 1 to 3, the method comprising: controlling the external electrode and the The intersecting length of the internal electrodes adjusts the output force value of the micro-nano force source device. 5. The control method according to claim 4, further comprising: Judging whether the loading voltage between the outer electrode and the inner electrode is lower than the set voltage, when the loading voltage is lower than the set voltage, adjusting the output force value by controlling the loading voltage, when the loading voltage is not lower than the set voltage , the output force value of the micro-nano force source device is adjusted by controlling the intersecting length of the outer electrode and the inner electrode. 6. The control method according to claim 4, characterized in that, Before adjusting the output force value of the micro-nano force source device by controlling the intersecting length of the external electrode and the internal electrode, it also includes establishing the range of the output force value and the loading between the external electrode and the internal electrode According to the corresponding relationship of the voltage, the loading voltage is selected according to the range of the output force value. 7. A micro-nano force measuring device, characterized in that, comprising the micro-nano force source device and a length control adjustment device as claimed in any one of claims 1 to 3, the length control adjustment device is used to control the The intersection length of the outer electrode and the inner electrode. 8. The micro-nano force measuring device according to claim 7, further comprising a voltage judging module and a voltage regulating module, the voltage judging module being used to judge the loading voltage between the outer electrode and the inner electrode Whether it is lower than the set voltage, the voltage regulation module is used to adjust the output force value by controlling the applied voltage when the loaded voltage is lower than the set voltage. 9. The micro-nano force measuring device according to claim 7, further comprising a voltage gear adjustment module, the voltage gear adjustment module is used to establish the range section of the output force value and the external electrode and the Describe the corresponding relationship of loading voltage between the internal electrodes, and select the loading voltage according to the range segment of the output force value. 10. A computer-readable storage medium, wherein the computer-readable storage medium stores computer instructions, and the computer instructions are used to make the computer perform the control according to any one of claims 4-6. method.

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