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CN114811991B - Super-current helium refrigerator with independent load test cold box - Google Patents

Super-current helium refrigerator with independent load test cold box Download PDF

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CN114811991B
CN114811991B CN202210490166.0A CN202210490166A CN114811991B CN 114811991 B CN114811991 B CN 114811991B CN 202210490166 A CN202210490166 A CN 202210490166A CN 114811991 B CN114811991 B CN 114811991B
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helium
pipeline
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temperature
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CN114811991A (en
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李静
李正宇
龚领会
周刚
伍继浩
刘立强
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Technical Institute of Physics and Chemistry of CAS
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B1/00Compression machines, plants or systems with non-reversible cycle
    • F25B1/10Compression machines, plants or systems with non-reversible cycle with multi-stage compression
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/02Gas cycle refrigeration machines using the Joule-Thompson effect
    • F25B2309/023Gas cycle refrigeration machines using the Joule-Thompson effect with two stage expansion

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Abstract

The invention relates to an overflow helium refrigerator with an independent load test cold box, which comprises a compressor unit, a refrigerator cold box, a load test cold box, a helium precooling module, a multistage turboexpander unit, a heat exchanger group, a subcooler, a cold compressor unit, a gas-liquid separator, a temperature zone load of 50-75K, a temperature zone load of 4.5-75K and a load of 2K, wherein the helium precooling module, the multistage turboexpander unit, the heat exchanger group, the subcooler, the cold compressor unit, the gas-liquid separator, the temperature zone load of 50-75K, the temperature zone load of 4.5-75K and the load of 2K are all arranged in the load test cold box.

Description

一种具有独立负载测试冷箱的超流氦制冷机A superfluid helium refrigerator with an independent load test cold box

技术领域technical field

本发明涉及超低温制冷技术领域,特别是涉及一种具有独立负载测试冷箱的超流氦制冷机。The invention relates to the technical field of ultra-low temperature refrigeration, in particular to a superfluid helium refrigerator with an independent load test cold box.

背景技术Background technique

超流氦具有非常高的热导率,远高于金属的导热性能,是铜的几千倍。由于超流氦具有优良的流动和传热性能,因此在很多应用场合,常用其冷却超导磁体。超流氦几乎无黏性,很容易渗透到磁体内部,迅速消除热扰动。使用超流氦冷却加速器和超导磁体能够提高稳定性,且能减少能量消耗和运行成本。由于超流氦更低的温度、极小的粘度和高导热率等优点,目前利用超流氦建立了多种低温制冷系统和制冷机。超流氦制冷机一般包括一套4.5K氦低温系统和一套1.8/2K超流氦低温子系统,在制取液氦的同时制取超流氦。Superfluid helium has a very high thermal conductivity, which is much higher than that of metals and thousands of times that of copper. Due to its excellent flow and heat transfer properties, superfluid helium is commonly used to cool superconducting magnets in many applications. Superfluid helium is nearly inviscid and easily penetrates the interior of the magnet, quickly dissipating thermal disturbances. Using superfluid helium to cool the accelerator and superconducting magnets increases stability and reduces energy consumption and operating costs. Due to the lower temperature, extremely small viscosity and high thermal conductivity of superfluid helium, a variety of cryogenic refrigeration systems and refrigerators have been established using superfluid helium. A superfluid helium refrigerator generally includes a set of 4.5K helium cryogenic system and a set of 1.8/2K superfluid helium cryogenic subsystem, which produce superfluid helium while producing liquid helium.

超流氦制冷机对外部负载提供多温区冷量,比如50~75K温区冷量,4.5~75K温区冷量,2K冷量等。为了测试各温区冷量,超流氦制冷机需要挂接各温区测试负载进行制冷量测试。负载测试一般有两种方法,即测试负载放置在制冷机外部,通过bayonet(真空接口)与制冷机连接;或者测试负载放置在制冷机冷箱内部。两种方法各有优缺点。超流氦制冷机涉及多温区外部冷量测试负载时,需要在制冷机外部搭建负载测试平台,占地面积较大,而且连接线路比较复杂。内置冷量测试负载放置在制冷机冷箱内部,布置简便,无需外接功率模块,但是冷量测试完成后,测试负载不再使用,放置在冷箱内部成为闲置热容,占用制冷机冷箱内宝贵空间。The superfluid helium refrigerator provides multi-temperature zone cooling capacity for external loads, such as 50-75K temperature zone cooling capacity, 4.5-75K temperature zone cooling capacity, 2K cooling capacity, etc. In order to test the cooling capacity of each temperature zone, the superfluid helium refrigerator needs to be connected to the test load of each temperature zone to test the cooling capacity. There are generally two methods for load testing, that is, the test load is placed outside the refrigerator and connected to the refrigerator through a bayonet (vacuum interface); or the test load is placed inside the refrigerator cold box. Both methods have advantages and disadvantages. When the superfluid helium refrigerator involves external cooling test loads in multiple temperature zones, it is necessary to build a load test platform outside the refrigerator, which occupies a large area and the connection lines are relatively complicated. The built-in cooling capacity test load is placed inside the cold box of the refrigerator, which is easy to arrange and does not require an external power module. However, after the cooling capacity test is completed, the test load is no longer used, and it is placed inside the cold box to become an idle heat capacity, occupying the cold box of the refrigerator. precious space.

发明内容Contents of the invention

本发明的一目的是,提供一种具有独立负载测试冷箱的超流氦制冷机,所述超流氦制冷机采用制冷机冷箱和负载测试冷箱将制冷部分和负载测试部分分开,负载测试冷箱仅用于负载冷量测试阶段使用,并可在所述超流氦制冷机交付用户后去除,此种设计使得制冷机冷箱结构紧凑,避免各温区测试负载在负载测试阶段后成为闲置热容,占用制冷机冷箱空间。An object of the present invention is to provide a superfluid helium refrigerator with an independent load test cold box, the superfluid helium refrigerator adopts the refrigerator cold box and the load test cold box to separate the refrigeration part and the load test part, and the load The test cold box is only used in the load cooling test stage and can be removed after the superfluid helium refrigerator is delivered to the user. This design makes the cold box of the refrigerator compact in structure and avoids the test load in each temperature zone after the load test stage. It becomes an idle heat capacity and occupies the space of the cold box of the refrigerator.

本发明提供了一种具有独立负载测试冷箱的超流氦制冷机,包括压缩机组、制冷机冷箱、负载测试冷箱、均设置于所述制冷机冷箱内的氦气预冷模块、多级透平膨胀机组、换热器组、过冷器和冷压缩机组、以及均设置于所述负载测试冷箱内的气液分离器、50~75K温区负载、4.5~75K温区负载和2K负载,所述负载测试冷箱用于在负载冷量测试阶段使用;The invention provides a superfluid helium refrigerator with an independent load test cold box, including a compressor unit, a refrigerator cold box, a load test cold box, a helium precooling module all arranged in the refrigerator cold box, Multi-stage turboexpander unit, heat exchanger unit, subcooler and cold compressor unit, and the gas-liquid separator all set in the load test cold box, 50 ~ 75K temperature zone load, 4.5 ~ 75K temperature zone load and 2K load, the load test cold box is used in the load cold capacity test stage;

所述压缩机组包括正压压缩机和负压压缩机,所述正压压缩机包括中压压缩机和高压压缩机,所述负压压缩机的出口和所述中压压缩机的出口均连接于所述高压压缩机的吸气口,所述高压压缩机的出口连接于所述制冷机冷箱的进口,所述高压压缩机排出的常温高压氦气经由所述制冷机冷箱的进口进入所述制冷机冷箱内;The compressor assembly includes a positive pressure compressor and a negative pressure compressor, the positive pressure compressor includes a medium pressure compressor and a high pressure compressor, the outlet of the negative pressure compressor and the outlet of the medium pressure compressor are connected At the suction port of the high-pressure compressor, the outlet of the high-pressure compressor is connected to the inlet of the cold box of the refrigerator, and the normal temperature and high-pressure helium gas discharged from the high-pressure compressor enters through the inlet of the cold box of the refrigerator. In the cold box of the refrigerator;

所述氦气预冷模块设置在所述制冷机冷箱的进口侧,并位于所述多级透平膨胀机组之前,用于对进入所述制冷机冷箱的一部分常温高压氦气进行预冷;The helium pre-cooling module is arranged on the inlet side of the cold box of the refrigerator and before the multi-stage turbo-expansion unit, and is used for precooling a part of normal-temperature and high-pressure helium entering the cold box of the refrigerator ;

所述多级透平膨胀机组包括依次设置的第一透平膨胀机组、第二透平膨胀机组、第三透平膨胀机组以及第四透平膨胀机组,用于对进入所述制冷机冷箱的常温高压氦气进行多级冷却过程;The multi-stage turbo-expansion unit includes a first turbo-expansion unit, a second turbo-expansion unit, a third turbo-expansion unit and a fourth turbo-expansion unit arranged in sequence, for controlling the The normal temperature and high pressure helium is used for multi-stage cooling process;

所述换热器组用于对进入所述制冷机冷箱的常温高压氦气进行多级换热过程;The heat exchanger group is used to perform a multi-stage heat exchange process for the normal temperature and high pressure helium entering the cold box of the refrigerator;

所述超流氦制冷机包括高压主气路、中压回气路、低压回气路、负压回气路,所述高压主气路的进口连接于所述制冷机冷箱的进口,出口连接于所述过冷器的进口;所述中压回气路的进口连接于所述第二透平膨胀机组的出口,出口连接于所述高压压缩机的吸气口;所述低压回气路的进口连接于所述过冷器的气相出口,出口连接于所述中压压缩机的吸气口;所述负压回气路的进口连接于所述冷压缩机组的出口,出口连接于所述负压压缩机的吸气口;The superfluid helium refrigerator includes a high-pressure main gas circuit, a medium-pressure return gas circuit, a low-pressure return gas circuit, and a negative pressure return gas circuit. The inlet of the high-pressure main gas circuit is connected to the inlet and outlet of the cold box of the refrigerator. connected to the inlet of the subcooler; the inlet of the medium-pressure return gas circuit is connected to the outlet of the second turboexpander unit, and the outlet is connected to the suction port of the high-pressure compressor; the low-pressure return gas The inlet of the path is connected to the gas phase outlet of the subcooler, and the outlet is connected to the suction port of the medium pressure compressor; the inlet of the negative pressure return path is connected to the outlet of the cold compressor unit, and the outlet is connected to The suction port of the negative pressure compressor;

所述过冷器的液相出口连接于所述4.5~75K温区负载的进口和所述气液分离器的进口,所述4.5~75K温区负载的出口连接于所述低压回气路,所述气液分离器的液相出口连接于所述2K负载,所述2K负载的出口和所述气液分离器的气相出口均连接于所述冷压缩机组的进口;The liquid phase outlet of the subcooler is connected to the inlet of the load in the 4.5-75K temperature zone and the inlet of the gas-liquid separator, and the outlet of the load in the 4.5-75K temperature zone is connected to the low-pressure return gas path, The liquid phase outlet of the gas-liquid separator is connected to the 2K load, and the outlet of the 2K load and the gas phase outlet of the gas-liquid separator are connected to the inlet of the cold compressor unit;

其中所述高压压缩机经由所述制冷机冷箱的进口向所述制冷机冷箱排入常温高压氦气,所述常温高压氦气的一部分进入所述氦气预冷模块中预冷,预冷后的氦气与所述高压主气路的常温高压氦气汇合后,经由所述多级透平膨胀机组进行多级冷却过程和经由所述换热器组进行多级换热过程后,形成超临界氦;Wherein the high-pressure compressor discharges normal temperature and high pressure helium into the refrigerator cold box through the inlet of the refrigerator cold box, and a part of the normal temperature and high pressure helium enters the helium precooling module for precooling. After the cooled helium is merged with the normal temperature and high pressure helium in the high-pressure main gas circuit, the multi-stage cooling process and the multi-stage heat exchange process are performed through the multi-stage turbo expander unit, Formation of supercritical helium;

所述超临界氦经由所述高压主气路进入所述过冷器中,气相进入所述低压回气路,一部分液相进入所述4.5~75K温区负载后回气到所述低压回气路,另一部分液相节流为气液两相,液相进入所述气液分离器中积液,当所述气液分离器中液氦液位达到预设值时,所述冷压缩机组启动,将所述气液分离器中的氦气进行减压,从而形成2K饱和超流氦,2K饱和超流氦自所述气液分离器的液相出口流出至所述2K负载处;气相自所述气液分离器的气相出口排出,与所述2K负载的回气汇合后进入所述冷压缩机组,经由所述冷压缩机组提压后进入所述负压回气路,经多级压降后形成负压氦气,负压氦气进入所述负压压缩机中压缩到中压,与来自所述中压压缩机排出的中压气体以及所述中压回气路的回气混合后,进入所述高压压缩机,至此完成一个氦气循环。The supercritical helium enters the subcooler through the high-pressure main gas path, the gas phase enters the low-pressure return gas path, and a part of the liquid phase enters the 4.5-75K temperature zone and returns to the low-pressure return gas after being loaded. The other part of the liquid phase is throttling into a gas-liquid two-phase, and the liquid phase enters the gas-liquid separator to collect liquid. When the liquid helium level in the gas-liquid separator reaches a preset value, the cold compressor unit Start, the helium in the gas-liquid separator is decompressed to form 2K saturated superfluid helium, and the 2K saturated superfluid helium flows out from the liquid phase outlet of the gas-liquid separator to the 2K load; the gas phase It is discharged from the gas phase outlet of the gas-liquid separator, merged with the return gas of the 2K load, enters the cold compressor unit, and enters the negative pressure return gas circuit after being boosted by the cold compressor unit. After the pressure drop, the negative pressure helium gas is formed, and the negative pressure helium gas enters the negative pressure compressor and is compressed to a medium pressure, and is combined with the medium pressure gas discharged from the medium pressure compressor and the return gas of the medium pressure return gas circuit After mixing, it enters the high-pressure compressor, and a helium cycle is completed so far.

在本发明的一实施例中,所述超流氦制冷机还包括用于连接所述制冷机冷箱和所述负载测试冷箱的多通道传输管线,所述负载测试冷箱通过所述多通道传输管线与所述制冷机冷箱形成可拆除式连接。In an embodiment of the present invention, the superfluid helium refrigerator further includes a multi-channel transfer pipeline for connecting the refrigerator cold box and the load test cold box, and the load test cold box passes through the multi-channel transfer pipeline. The channel transmission line forms a detachable connection with the cold box of the refrigerator.

在本发明的一实施例中,所述超流氦制冷机还包括均设置于所述制冷机冷箱内的50~75K温区负载兑温管路和冷压缩机组入口兑温管路,其中所述50~75K温区负载兑温管路连接于所述第一透平膨胀机组,用于对进入所述第一透平膨胀机组前的氦气进行兑温;其中所述冷压缩机组入口兑温管路设置在所述冷压缩机组的进口侧,用于调节进入所述冷压缩机组的氦气的温度。In an embodiment of the present invention, the superfluid helium refrigerator also includes a load temperature conversion pipeline in a temperature range of 50-75K and a temperature conversion pipeline at the inlet of the cold compressor unit, both of which are arranged in the cold box of the refrigerator, wherein The 50-75K temperature zone load temperature conversion pipeline is connected to the first turbo expander unit, and is used to convert the temperature of the helium before entering the first turbo expander unit; wherein the inlet of the cold compressor unit The temperature exchange pipeline is arranged at the inlet side of the cold compressor unit, and is used for adjusting the temperature of the helium gas entering the cold compressor unit.

在本发明的一实施例中,所述50~75K温区负载兑温管路包括连接于所述高压主气路的50K氦气管路、连接于所述50K氦气管路和所述50~75K温区负载的进口的负载去流管路、连接于所述50K氦气管路的兑温管路、连接于50~75K温区负载的出口的回流管路、以及连接于所述回流管路、所述兑温管路以及所述第一透平膨胀机组的氦气通过管路,所述50K氦气管路设置有50K氦气管路调节阀,所述兑温管路设置有兑温管路调节阀和兑温管路加热器,所述回流管路设置有回流管路调节阀,其中所述兑温管路用于经由所述兑温管路调节阀和所述兑温管路加热器来调节所述回流管路中氦气的温度,使得经由所述氦气通过管路进入所述第一透平膨胀机组的氦气能够满足所述第一透平膨胀机组的进口温度和压力的要求。In an embodiment of the present invention, the 50-75K temperature zone load temperature conversion pipeline includes a 50K helium pipeline connected to the high-pressure main gas pipeline, a 50K helium pipeline connected to the 50-75K The load outflow pipeline of the inlet of the load in the temperature zone, the temperature conversion pipeline connected to the 50K helium pipeline, the return pipeline connected to the outlet of the load in the 50-75K temperature zone, and the return pipeline connected to the The temperature conversion pipeline and the helium gas of the first turboexpander unit pass through the pipeline, the 50K helium pipeline is provided with a 50K helium pipeline regulating valve, and the temperature conversion pipeline is provided with a temperature conversion pipeline adjustment valve. A valve and a temperature exchange pipeline heater, the return pipeline is provided with a return pipeline regulating valve, wherein the temperature exchange pipeline is used to pass through the temperature exchange pipeline regulating valve and the temperature exchange pipeline heater adjusting the temperature of the helium in the return pipeline, so that the helium entering the first turboexpander through the pipeline can meet the requirements of the inlet temperature and pressure of the first turboexpander .

在本发明的一实施例中,所述换热器组包括连接于所述高压主气路、所述中压回气路、所述低压回气路以及所述负压回气路的并依次设置的第一级换热器、第二级换热器、第三级换热器、第四级换热器以及第五级换热器,还包括连接于所述高压主气路、所述中压回气路、所述低压回气路的第六级换热器,连接于所述高压主气路和所述低压回气路的第七级换热器和第八级换热器,以及连接于所述过冷器的液相出口、所述气液分离器的进口与气相出口和所述2K负载的出口的第九级换热器,其中所述气液分离器排出的氦气和所述2K负载的回气汇合后进入所述第九级换热器中进行换热,换热后的氦气经由所述冷压缩机组入口兑温管路兑温后进入所述冷压缩机组。In an embodiment of the present invention, the heat exchanger group includes a circuit connected to the high-pressure main gas circuit, the medium-pressure return gas circuit, the low-pressure return gas circuit, and the negative-pressure return gas circuit in sequence. The first-stage heat exchanger, the second-stage heat exchanger, the third-stage heat exchanger, the fourth-stage heat exchanger, and the fifth-stage heat exchanger are provided, which also include connecting to the high-pressure main gas circuit, the The medium-pressure return air circuit, the sixth-stage heat exchanger of the low-pressure return air circuit, the seventh-stage heat exchanger and the eighth-stage heat exchanger connected to the high-pressure main air circuit and the low-pressure return air circuit, And the ninth-stage heat exchanger connected to the liquid phase outlet of the subcooler, the inlet and gas phase outlet of the gas-liquid separator and the outlet of the 2K load, wherein the helium discharged from the gas-liquid separator Combined with the return gas of the 2K load, it enters the ninth-stage heat exchanger for heat exchange, and the helium after heat exchange enters the cold compressor unit after being warmed through the temperature exchange pipeline at the inlet of the cold compressor unit .

在本发明的一实施例中,所述多通道传输管线包括第一管路、第二管路、第三管路、第四管路、第五管路以及第六管路,所述50~75K温区负载通过所述第一管路连接所述负载去流管路,和通过所述第二管路连接所述回流管路;所述4.5~75K温区负载通过所述第三管路连接所述过冷器的液相出口,和通过所述第四管路连接所述低压回气路;所述第九级换热器通过所述第五管路连接于所述过冷器的液相出口,并通过所述第六管路连接于所述冷压缩机组入口兑温管路的进口。In an embodiment of the present invention, the multi-channel transmission pipeline includes a first pipeline, a second pipeline, a third pipeline, a fourth pipeline, a fifth pipeline and a sixth pipeline, and the 50- The load in the 75K temperature zone is connected to the load outflow pipeline through the first pipeline, and the return pipeline is connected through the second pipeline; the load in the 4.5-75K temperature zone passes through the third pipeline Connect the liquid phase outlet of the subcooler, and connect the low-pressure return gas path through the fourth pipeline; the ninth stage heat exchanger is connected to the subcooler through the fifth pipeline The liquid phase outlet is connected to the inlet of the cold compressor unit inlet temperature conversion pipeline through the sixth pipeline.

在本发明的一实施例中,所述冷压缩机组入口兑温管路包括管道兑温模块,所述管道兑温模块包括连接于所述低压回气路和所述冷压缩机组的进口的第一兑温管路和设置在所述第一兑温管路上的第一兑温调节阀。In an embodiment of the present invention, the temperature exchange pipeline at the inlet of the cold compressor unit includes a pipeline temperature exchange module, and the pipeline temperature exchange module includes a first A temperature conversion pipeline and a first temperature conversion regulating valve arranged on the first temperature conversion pipeline.

在本发明的一实施例中,所述冷压缩机组入口兑温管路包括换热器兑温模块,所述换热器兑温模块包括连接于所述第九级换热器的出口以及所述冷压缩机组的进口的兑温换热器、连接于所述高压主气路和所述兑温换热器的进口的第二兑温管路、设置在所述第二兑温管路上的第二兑温调节阀、连接于所述兑温换热器的出口和所述高压主气路的第三兑温管路、以及设置在所述高压主气路上,并位于所述第二兑温管路和所述第三兑温管路之间的第三兑温调节阀。In an embodiment of the present invention, the inlet temperature conversion pipeline of the cold compressor unit includes a heat exchanger temperature conversion module, and the heat exchanger temperature conversion module includes an outlet connected to the ninth stage heat exchanger and the The temperature conversion heat exchanger at the inlet of the cold compressor unit, the second temperature conversion pipeline connected to the high-pressure main gas circuit and the inlet of the temperature conversion heat exchanger, and the second temperature conversion pipeline arranged on the second temperature conversion pipeline The second temperature conversion regulating valve, the third temperature conversion pipeline connected to the outlet of the temperature conversion heat exchanger and the high-pressure main gas circuit, and the high-pressure main gas circuit, and located in the second temperature conversion The third temperature-converting regulating valve between the temperature-converting pipeline and the third temperature-converting pipeline.

在本发明的一实施例中,所述高压主气路和所述过冷器之间还设置有节流阀组,所述节流阀组包括并联设置的第一节流阀和第二节流阀,所述过冷器的气相出口和所述低压回气路之间还设置有回气阀,所述第九级换热器和所述气液分离器的进口之间还设置有第三节流阀,所述第九级换热器和所述第三节流阀均设置于所述负载测试冷箱内;In an embodiment of the present invention, a throttling valve group is further provided between the high-pressure main gas circuit and the subcooler, and the throttle valve group includes a first throttle valve and a second throttle valve arranged in parallel. A gas return valve is provided between the gas phase outlet of the subcooler and the low-pressure return gas circuit, and a second stage is provided between the ninth-stage heat exchanger and the inlet of the gas-liquid separator. Three throttling valves, the ninth-stage heat exchanger and the third throttling valve are both arranged in the load test cold box;

其中所述高压主气路输出的一部分超临界氦经过所述第一节流阀节流为气液两相,液相在所述过冷器中积液,气相通过所述回气阀进入所述低压回气路;另一部分超临界氦经所述第二节流阀节流后进入所述过冷器中,被所述过冷器中积液的液氦过冷形成过冷超临界氦,过冷超临界氦自所述过冷器底部流出,一部分供给所述4.5~75K温区负载,另一部分进入所述第九级换热器,经过所述第三节流阀节流为气液两相,液相在所述气液分离器中积液,气相自所述气液分离器的气相出口排出,与所述2K负载的回气汇合进入所述第九级换热器中换热,换热后的氦气经所述冷压缩机组入口兑温管路兑温后进入所述冷压缩机组。Wherein, a part of the supercritical helium output from the high-pressure main gas circuit is throttled by the first throttle valve into gas-liquid two-phase, the liquid phase accumulates liquid in the subcooler, and the gas phase enters the gas-liquid two-phase through the gas return valve. The low-pressure return gas circuit; the other part of supercritical helium enters the subcooler after being throttled by the second throttle valve, and is supercooled by the liquid helium accumulated in the subcooler to form supercooled supercritical helium , supercooled supercritical helium flows out from the bottom of the subcooler, part of which is supplied to the load in the 4.5-75K temperature zone, and the other part enters the ninth-stage heat exchanger, and is throttled into gas through the third throttle valve. Two-phase liquid, the liquid phase accumulates liquid in the gas-liquid separator, the gas phase is discharged from the gas phase outlet of the gas-liquid separator, and merges with the return gas of the 2K load into the ninth stage heat exchanger for exchange Heat, the helium gas after heat exchange enters the cold compressor unit after being warmed through the temperature exchange pipeline at the inlet of the cold compressor unit.

在本发明的一实施例中,所述冷压缩机组包括串联设置的第六入口调节阀、第一冷压缩机、第二冷压缩机、第三冷压缩机、第四冷压缩机以及第一出口调节阀,所述超流氦制冷机还包括并联于所述冷压缩机组的冷压缩机组旁通管路和设置于所述冷压缩机组旁通管路上的旁路调节阀。In an embodiment of the present invention, the cold compressor unit includes a sixth inlet regulating valve, a first cold compressor, a second cold compressor, a third cold compressor, a fourth cold compressor and a first cold compressor arranged in series. An outlet regulating valve, the superfluid helium refrigerator also includes a bypass pipeline of the cold compressor unit connected in parallel to the cold compressor unit and a bypass regulating valve arranged on the bypass pipeline of the cold compressor unit.

在本发明的一实施例中,所述超流氦制冷机还包括连接于所述第四透平膨胀机组的出口和所述低压回气路的冷箱旁通管路和设置在所述冷箱旁通管路上的冷箱旁通阀。In an embodiment of the present invention, the superfluid helium refrigerator further includes a cold box bypass line connected to the outlet of the fourth turboexpander unit and the low-pressure return gas line, and a cold box bypass line arranged in the cold box Cold box bypass valve on the box bypass line.

在本发明的一实施例中,所述超流氦制冷机还包括低温吸附器组,所述低温吸附器组包括用于吸附氦气中的杂质气体的80K低温吸附器和20K低温吸附器,所述80K低温吸附器和所述20K低温吸附器均设置在所述高压主气路上,且所述80K低温吸附器位于所述第二级换热器和所述第三级换热器之间,所述20K低温吸附器位于所述第六级换热器和所述第七级换热器之间。In an embodiment of the present invention, the superfluid helium refrigerator further includes a low-temperature adsorber group, and the low-temperature adsorber group includes an 80K low-temperature adsorber and a 20K low-temperature adsorber for adsorbing impurity gases in helium, The 80K low-temperature adsorber and the 20K low-temperature adsorber are both arranged on the high-pressure main gas path, and the 80K low-temperature adsorber is located between the second-stage heat exchanger and the third-stage heat exchanger , the 20K cryogenic adsorber is located between the sixth-stage heat exchanger and the seventh-stage heat exchanger.

在本发明的一实施例中,所述80K低温吸附器为两个,两个所述80K低温吸附器并联,并切换使用。In an embodiment of the present invention, there are two 80K cryogenic adsorbers, and the two 80K cryogenic adsorbers are connected in parallel and switched for use.

在本发明的一实施例中,所述氦气预冷模块包括连接于所述高压主气路的氦气通路调节阀、连接于所述氦气通路调节阀的液氮预冷换热器、连接于所述液氮预冷换热器的液氮进口管路、以及设置于所述液氮进口管路的液氮进口调节阀,所述液氮预冷换热器的出口连接于所述高压主气路,并位于所述第二级换热器的出口和所述80K低温吸附器的入口之间,所述氦气预冷模块通过所述液氮进口管路通入的液氮对所述常温高压氦气进行预冷,并通过所述氦气通路调节阀调节进入所述液氮预冷换热器的氦气量,和通过所述液氮进口调节阀调节进入所述液氮预冷换热器的液氮量。In an embodiment of the present invention, the helium precooling module includes a helium passage regulating valve connected to the high-pressure main gas circuit, a liquid nitrogen precooling heat exchanger connected to the helium passage regulating valve, The liquid nitrogen inlet pipeline connected to the liquid nitrogen precooling heat exchanger and the liquid nitrogen inlet regulating valve arranged on the liquid nitrogen inlet pipeline, the outlet of the liquid nitrogen precooling heat exchanger is connected to the The high-pressure main gas circuit is located between the outlet of the second-stage heat exchanger and the inlet of the 80K cryogenic adsorber, and the liquid nitrogen fed into the helium precooling module through the liquid nitrogen inlet pipeline is The normal temperature and high pressure helium is precooled, and the amount of helium entering the liquid nitrogen precooling heat exchanger is adjusted through the helium passage regulating valve, and the amount of helium entering the liquid nitrogen precooling heat exchanger is adjusted through the liquid nitrogen inlet regulating valve. The amount of liquid nitrogen in the cold heat exchanger.

在本发明的一实施例中,所述氦气预冷模块包括由第一透平、第二透平、第三透平串联组成的预冷透平膨胀机组和设置在所述第一级换热器的出口和所述第一透平的进口之间的第一入口调节阀,所述预冷透平膨胀机组的出口连接于所述中压回气路。In an embodiment of the present invention, the helium pre-cooling module includes a pre-cooling turbo-expander unit composed of a first turbine, a second turbine, and a third turbine connected in series, and a A first inlet regulating valve between the outlet of the heater and the inlet of the first turbine, and the outlet of the pre-cooling turboexpander unit is connected to the medium pressure return gas circuit.

在本发明的一实施例中,所述第一透平膨胀机组包括串联设置的第四透平和第五透平,以及设置在所述第三级换热器的出口和所述第四透平的进口之间的第二入口调节阀,所述第四透平的进口连接于所述50~75K温区负载兑温管路的所述氦气通过管路,所述第五透平的出口连接于所述中压回气路。In an embodiment of the present invention, the first turboexpander unit includes a fourth turbine and a fifth turbine arranged in series, and the outlet of the third-stage heat exchanger and the fourth turbine The second inlet regulating valve between the inlets of the fourth turbine, the inlet of the fourth turbine is connected to the helium passage line of the load temperature conversion pipeline in the 50-75K temperature zone, and the outlet of the fifth turbine Connected to the medium pressure return air circuit.

在本发明的一实施例中,所述第二透平膨胀机组包括串联设置的第六透平和第七透平,以及设置在所述第五级换热器的出口和所述第六透平的进口之间的第三入口调节阀,所述第七透平的出口连接所述中压回气路。In an embodiment of the present invention, the second turboexpander unit includes a sixth turbine and a seventh turbine arranged in series, and the outlet of the fifth-stage heat exchanger and the sixth turbine The third inlet regulating valve between the inlets of the turbine, the outlet of the seventh turbine is connected to the medium pressure return gas path.

在本发明的一实施例中,所述第三透平膨胀机组包括串联设置的第八透平和第九透平,以及设置在所述20K低温吸附器的出口和所述第八透平的进口之间的第四入口调节阀,所述第九透平的出口连接于所述低压回气路。In an embodiment of the present invention, the third turboexpander unit includes an eighth turbine and a ninth turbine arranged in series, and the outlet of the 20K cryogenic adsorber and the inlet of the eighth turbine The fourth inlet regulating valve between them, the outlet of the ninth turbine is connected to the low-pressure return gas path.

在本发明的一实施例中,所述第四透平膨胀机组包括第十透平、设置在所述第七级换热器的出口和所述第十透平的进口之间的第五入口调节阀以及设置在所述高压主气路上,并位于所述第七级换热器和所述第八级换热器之间的末级透平旁通阀,所述第十透平的出口连接于所述高压主气路。In an embodiment of the present invention, the fourth turboexpander unit includes a tenth turbine, a fifth inlet arranged between the outlet of the seventh-stage heat exchanger and the inlet of the tenth turbine A regulating valve and a last-stage turbine bypass valve arranged on the high-pressure main gas path and between the seventh-stage heat exchanger and the eighth-stage heat exchanger, the outlet of the tenth turbine Connected to the high-pressure main air circuit.

在本发明的一实施例中,所述超流氦制冷机还包括气体管理面板,所述气体管理面板包括连接于所述高压主气路和所述中压回气路的中压旁通阀、连接所述高压主气路和所述低压回气路的低压旁通阀、连接于所述低压回气路和所述高压主气路的加载阀与缓冲罐卸载阀、以及连接于所述加载阀和所述缓冲罐卸载阀之间的缓冲罐。In an embodiment of the present invention, the superfluid helium refrigerator further includes a gas management panel, and the gas management panel includes a medium-pressure bypass valve connected to the high-pressure main gas circuit and the medium-pressure return gas circuit , the low-pressure bypass valve connecting the high-pressure main air circuit and the low-pressure return air circuit, the loading valve and buffer tank unloading valve connected to the low-pressure return air circuit and the high-pressure main air circuit, and the Load the surge tank between the valve and the surge tank unload valve.

在本发明的一实施例中,所述超流氦制冷机还包括设置在所述负压压缩机和所述高压压缩机之间的单向阀,所述单向阀用于防止所述负压压缩机的出口氦气逆流。In an embodiment of the present invention, the superfluid helium refrigerator further includes a one-way valve arranged between the negative pressure compressor and the high-pressure compressor, and the one-way valve is used to prevent the negative pressure Compressor outlet helium reverse flow.

本发明的所述超流氦制冷机由制冷机冷箱和负载测试冷箱组成,两个冷箱之间采用多通道传输管线连接,通过制冷机冷箱和负载测试冷箱将制冷部分和负载测试部分分开,并将50~75K温区负载、4.5~75K温区负载、2K负载、负压换热器以及2K氦气液分离器放置于负载测试冷箱内部,负载测试冷箱仅用于负载冷量测试阶段使用,与制冷机冷箱功能分开。在所述超流氦制冷机交付用户后,负载测试冷箱和多通道传输管线即可去除,用户负载直接连接到制冷机冷箱上。此种设计使得制冷机冷箱结构紧凑,避免各温区测试负载在负载测试阶段后成为闲置热容,占用制冷机冷箱宝贵空间。The superfluid helium refrigerator of the present invention is composed of a refrigerator cold box and a load test cold box. The two cold boxes are connected by a multi-channel transmission pipeline, and the refrigeration part and the load are connected by the refrigerator cold box and the load test cold box. The test part is separated, and the 50-75K temperature zone load, 4.5-75K temperature zone load, 2K load, negative pressure heat exchanger and 2K helium gas-liquid separator are placed inside the load test cold box, and the load test cold box is only used for It is used in the load cooling test stage, which is separate from the refrigerator cold box function. After the superfluid helium refrigerator is delivered to the user, the load test cold box and the multi-channel transfer pipeline can be removed, and the user load is directly connected to the refrigerator cold box. This design makes the cold box of the refrigerator compact in structure, and prevents the test loads in each temperature zone from becoming idle heat capacity after the load test stage, occupying precious space in the cold box of the refrigerator.

本发明的所述超流氦制冷机还在所述第一透平膨胀机组处设置有所述50~75K温区负载兑温管路,和在所述冷压缩机组的进口侧设置有所述冷压缩机组入口兑温管路,以此分别通过所述50~75K温区负载兑温管路对进入所述第一透平膨胀机组前的氦气进行兑温和所述冷压缩机组入口兑温管路对进入所述冷压缩机组前的氦气进行兑温的方式,能够使得进入所述第一透平膨胀机组和所述冷压缩机组的流体参数达到叶轮机械入口设计参数,从而使得透平膨胀机组和冷压缩机组等叶轮机械能运行在最佳工况,有利于提高超流氦制冷机的整机性能。The superfluid helium refrigerator of the present invention is also provided with the 50-75K temperature zone load temperature conversion pipeline at the first turboexpander unit, and the inlet side of the cold compressor unit is provided with the The temperature conversion pipeline at the inlet of the cold compressor unit is used to control the temperature of the helium before entering the first turboexpander unit and the temperature conversion at the inlet of the cold compressor unit through the load temperature conversion pipeline in the 50-75K temperature zone, respectively. The method of exchanging the temperature of the helium gas before entering the cold compressor unit by the pipeline can make the fluid parameters entering the first turboexpander unit and the cold compressor unit reach the turbomachinery inlet design parameters, so that the turbine The impeller machinery such as the expansion unit and the cold compressor unit can operate in the best working condition, which is conducive to improving the overall performance of the superfluid helium refrigerator.

通过对随后的描述和附图的理解,本发明进一步的目的和优势将得以充分体现。Further objects and advantages of the invention will fully appear from an understanding of the ensuing description and accompanying drawings.

附图说明Description of drawings

图1为本发明的一优选实施例的所述具有独立负载测试冷箱的超流氦制冷机的结构示意图,其中箭头方向代表流体流动方向。Fig. 1 is a schematic structural view of the superfluid helium refrigerator with an independent load test cold box according to a preferred embodiment of the present invention, wherein the direction of the arrow represents the direction of fluid flow.

附图标号说明:中压压缩机1;高压压缩机2;负压压缩机3;单向阀4;中压旁通阀5;低压旁通阀6;缓冲罐卸载阀7;缓冲罐8;加载阀9;制冷机冷箱10;冷箱旁通管路11;冷箱旁通阀12;第一节流阀13;第二节流阀14;回气阀15;第三节流阀16;Description of reference numerals: medium pressure compressor 1; high pressure compressor 2; negative pressure compressor 3; one-way valve 4; medium pressure bypass valve 5; low pressure bypass valve 6; buffer tank unloading valve 7; buffer tank 8; Loading valve 9; refrigerator cold box 10; cold box bypass line 11; cold box bypass valve 12; first throttle valve 13; second throttle valve 14; air return valve 15; third throttle valve 16 ;

高压主气路17;中压回气路18;低压回气路19;负压回气路20;High pressure main air circuit 17; medium pressure return air circuit 18; low pressure return air circuit 19; negative pressure return air circuit 20;

第一管路21;第二管路22;第三管路23;第四管路24;第五管路25;第六管路26,负载测试冷箱27;The first pipeline 21; the second pipeline 22; the third pipeline 23; the fourth pipeline 24; the fifth pipeline 25; the sixth pipeline 26, load test cold box 27;

氦气通路调节阀30;液氮预冷换热器31;液氮进口管路32;液氮进口调节阀33;第一透平34;第二透平35;第三透平36;第一入口调节阀37;Helium passage regulating valve 30; liquid nitrogen precooling heat exchanger 31; liquid nitrogen inlet pipeline 32; liquid nitrogen inlet regulating valve 33; first turbine 34; second turbine 35; third turbine 36; first Inlet regulating valve 37;

80K低温吸附器38;20K低温吸附器39;80K cryogenic adsorber 38; 20K cryogenic adsorber 39;

第四透平40;第五透平41;第二入口调节阀42;第六透平43;第七透平44;第三入口调节阀45;第八透平46;第九透平47;第四入口调节阀48;第十透平49;第五入口调节阀50;末级透平旁通阀51;The fourth turbine 40; the fifth turbine 41; the second inlet regulating valve 42; the sixth turbine 43; the seventh turbine 44; the third inlet regulating valve 45; the eighth turbine 46; the ninth turbine 47; The fourth inlet regulating valve 48; the tenth turbine 49; the fifth inlet regulating valve 50; the last stage turbine bypass valve 51;

50K氦气管路60;50K氦气管路调节阀61;负载去流管路62;兑温管路63;兑温管路调节阀64;兑温管路加热器65;回流管路66;氦气通过管路67;第一透平膨胀机组的进口管路68;回流管路调节阀69;50K helium pipeline 60; 50K helium pipeline regulating valve 61; load outflow pipeline 62; temperature conversion pipeline 63; temperature conversion pipeline regulating valve 64; temperature conversion pipeline heater 65; Through pipeline 67; inlet pipeline 68 of the first turboexpander unit; return pipeline regulating valve 69;

第六入口调节阀70;第一冷压缩机71;第二冷压缩机72;第三冷压缩机73;第四冷压缩机74;第一出口调节阀75;冷压缩机组旁通管路76;旁路调节阀77;第一兑温管路81;第一兑温调节阀82;兑温换热器83;第二兑温管路84;第二兑温调节阀85;第三兑温管路86;第三兑温调节阀87;The sixth inlet regulating valve 70; the first cold compressor 71; the second cold compressor 72; the third cold compressor 73; the fourth cold compressor 74; the first outlet regulating valve 75; ; Bypass regulating valve 77; the first exchange temperature pipeline 81; the first exchange temperature control valve 82; exchange temperature heat exchanger 83; the second exchange temperature pipeline 84; the second exchange temperature control valve 85; Pipeline 86; the third temperature control valve 87;

第一级换热器91、第二级换热器92、第三级换热器93、第四级换热器94;第五级换热器95;第六级换热器96;第七级换热器97;第八级换热器98;第九级换热器99;The first stage heat exchanger 91, the second stage heat exchanger 92, the third stage heat exchanger 93, the fourth stage heat exchanger 94; the fifth stage heat exchanger 95; the sixth stage heat exchanger 96; the seventh stage Stage heat exchanger 97; Eighth stage heat exchanger 98; Ninth stage heat exchanger 99;

50~75K温区负载101;4.5~75K温区负载102;2K负载103;过冷器104;气液分离器105。50 ~ 75K temperature zone load 101; 4.5 ~ 75K temperature zone load 102; 2K load 103; subcooler 104; gas-liquid separator 105.

具体实施方式Detailed ways

以下描述用于揭露本发明以使本领域技术人员能够实现本发明。以下描述中的优选实施例只作为举例,本领域技术人员可以想到其他显而易见的变型。在以下描述中界定的本发明的基本原理可以应用于其他实施方案、形变方案、改进方案、等同方案以及没有背离本发明的精神和范围的其他技术方案。The following description serves to disclose the present invention to enable those skilled in the art to carry out the present invention. The preferred embodiments described below are only examples, and those skilled in the art can devise other obvious variations. The basic principles of the present invention defined in the following description can be applied to other embodiments, variations, improvements, equivalents and other technical solutions without departing from the spirit and scope of the present invention.

本领域技术人员应理解的是,在本发明的揭露中,术语“竖向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系是基于附图所示的方位或位置关系,其仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此上述术语不能理解为对本发明的限制。Those skilled in the art should understand that, in the disclosure of the present invention, the terms "vertical", "transverse", "upper", "lower", "front", "rear", "left", "right", The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention and simplified description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, so the above terms should not be construed as limiting the present invention.

可以理解的是,术语“一”应理解为“至少一”或“一个或多个”,即在一个实施例中,一个元件的数量可以为一个,而在另外的实施例中,该元件的数量可以为多个,术语“一”不能理解为对数量的限制。It can be understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element The quantity can be multiple, and the term "a" cannot be understood as a limitation on the quantity.

在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接或可以相互通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected, or electrically connected, or can communicate with each other; it can be directly connected, or indirectly connected through an intermediary, and it can be the internal communication of two components or the interaction of two components relation. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

如图1所示,根据本发明的一优选实施例的一种具有独立负载测试冷箱的超流氦制冷机的具体结构及其工作流程被具体阐明。As shown in FIG. 1 , the specific structure and working process of a superfluid helium refrigerator with an independent load test cold box according to a preferred embodiment of the present invention are specifically illustrated.

如图1所示,所述超流氦制冷机包括压缩机组、制冷机冷箱10、负载测试冷箱27、均设置于所述制冷机冷箱10内的氦气预冷模块、多级透平膨胀机组、换热器组、过冷器104和冷压缩机组、以及均设置于所述负载测试冷箱27内的气液分离器105、50~75K温区负载101、4.5~75K温区负载102和2K负载103。As shown in Figure 1, the superfluid helium refrigerator includes a compressor unit, a refrigerator cold box 10, a load test cold box 27, a helium precooling module all arranged in the refrigerator cold box 10, a multi-stage transparent Flat expansion unit, heat exchanger group, subcooler 104 and cold compressor unit, and gas-liquid separator 105, 50-75K temperature zone load 101, 4.5-75K temperature zone all arranged in the load test cold box 27 Load 102 and 2K load 103 .

进一步地,所述超流氦制冷机还包括用于连接所述制冷机冷箱10和所述负载测试冷箱27的多通道传输管线,所述负载测试冷箱27通过所述多通道传输管线与所述制冷机冷箱10形成可拆除式连接。Further, the superfluid helium refrigerator also includes a multi-channel transfer line for connecting the refrigerator cold box 10 and the load test cold box 27, and the load test cold box 27 passes through the multi-channel transfer line It forms a detachable connection with the cold box 10 of the refrigerator.

特别地,本发明的所述超流氦制冷机采用所述制冷机冷箱10和所述负载测试冷箱27将制冷部分和负载测试部分分开,所述负载测试冷箱27仅用于负载冷量测试阶段使用,且所述负载测试冷箱27通过所述多通道传输管线与所述制冷机冷箱10之间形成可拆除式连接,因此所述负载测试冷箱27和所述多通道传输管线可在所述超流氦制冷机交付用户后去除,此种设计使得所述制冷机冷箱10结构紧凑,避免各温区测试负载在负载测试阶段后成为闲置热容,占用制冷机冷箱空间。In particular, the superfluid helium refrigerator of the present invention uses the refrigerator cold box 10 and the load test cold box 27 to separate the refrigeration part from the load test part, and the load test cold box 27 is only used for load cooling. The load test cold box 27 forms a detachable connection with the refrigerator cold box 10 through the multi-channel transmission line, so the load test cold box 27 and the multi-channel transmission The pipeline can be removed after the superfluid helium refrigerator is delivered to the user. This design makes the cold box 10 of the refrigerator compact in structure, and prevents the test loads in each temperature zone from becoming idle heat capacity after the load test stage and occupying the cold box of the refrigerator. space.

具体地,所述压缩机组包括正压压缩机和负压压缩机3,所述正压压缩机包括中压压缩机1和高压压缩机2,所述负压压缩机3的出口和所述中压压缩机1的出口均连接于所述高压压缩机2的吸气口,所述高压压缩机2的出口连接于所述制冷机冷箱10的进口,所述高压压缩机2排出的常温高压氦气经由所述制冷机冷箱10的进口进入所述制冷机冷箱10内,所述冷压缩机组的出口连接于所述负压压缩机3的吸气口,所述负压压缩机3用于将所述冷压缩机组送来的超流氦负压回气压缩到中压。Specifically, the compressor unit includes a positive pressure compressor and a negative pressure compressor 3, the positive pressure compressor includes a medium pressure compressor 1 and a high pressure compressor 2, the outlet of the negative pressure compressor 3 and the medium The outlet of the compressor 1 is connected to the suction port of the high-pressure compressor 2, the outlet of the high-pressure compressor 2 is connected to the inlet of the cold box 10 of the refrigerator, and the normal temperature and high pressure discharged by the high-pressure compressor 2 is Helium enters the refrigerator cold box 10 through the inlet of the refrigerator cold box 10, and the outlet of the cold compressor unit is connected to the suction port of the negative pressure compressor 3, and the negative pressure compressor 3 It is used to compress the superfluid helium negative pressure return gas sent by the cold compressor unit to medium pressure.

具体地,所述氦气预冷模块设置在所述制冷机冷箱10的进口侧,并位于所述多级透平膨胀机组之前,用于对进入所述制冷机冷箱10的一部分常温高压氦气进行预冷。Specifically, the helium pre-cooling module is arranged on the inlet side of the refrigerator cold box 10 and before the multi-stage turboexpansion unit, and is used to cool a part of the normal temperature and high pressure gas entering the refrigerator cold box 10. Helium for precooling.

具体地,所述多级透平膨胀机组包括第一透平膨胀机组、第二透平膨胀机组、第三透平膨胀机组以及第四透平膨胀机组,用于对进入所述制冷机冷箱10的常温高压氦气进行多级冷却过程。Specifically, the multi-stage turbo-expansion unit includes a first turbo-expansion unit, a second turbo-expansion unit, a third turbo-expansion unit and a fourth turbo-expansion unit, for 10 normal temperature and high pressure helium for multi-stage cooling process.

具体地,所述超流氦制冷机包括高压主气路17、中压回气路18、低压回气路19、负压回气路20,所述高压主气路17的进口连接于所述制冷机冷箱10的进口,出口连接于所述过冷器104的进口;所述中压回气路18的进口连接于所述第二透平膨胀机组的出口,出口连接于所述高压压缩机2的吸气口;所述低压回气路19的进口连接于所述过冷器104的气相出口,出口连接于所述中压压缩机1的吸气口;所述负压回气路20的进口连接于所述冷压缩机组的出口,出口连接于所述负压压缩机3的吸气口。Specifically, the superfluid helium refrigerator includes a high-pressure main gas circuit 17, a medium-pressure return gas circuit 18, a low-pressure return gas circuit 19, and a negative pressure return gas circuit 20, and the inlet of the high-pressure main gas circuit 17 is connected to the The inlet and outlet of the refrigerator cold box 10 are connected to the inlet of the supercooler 104; the inlet of the medium-pressure return air circuit 18 is connected to the outlet of the second turboexpander unit, and the outlet is connected to the high-pressure compressor The suction port of the machine 2; the inlet of the low pressure return air circuit 19 is connected to the gas phase outlet of the subcooler 104, and the outlet is connected to the suction port of the medium pressure compressor 1; the negative pressure return air circuit The inlet of 20 is connected to the outlet of the cold compressor unit, and the outlet is connected to the suction port of the negative pressure compressor 3 .

具体地,所述换热器组包括依次设置的第一级换热器91、第二级换热器92、第三级换热器93、第四级换热器94以及第五级换热器95、第六级换热器96、第七级换热器97、第八级换热器98以及第九级换热器99,用于对进入所述制冷机冷箱10的常温高压氦气进行多级换热过程。Specifically, the heat exchanger group includes a first-stage heat exchanger 91, a second-stage heat exchanger 92, a third-stage heat exchanger 93, a fourth-stage heat exchanger 94, and a fifth-stage heat exchanger arranged in sequence. 95, the sixth stage heat exchanger 96, the seventh stage heat exchanger 97, the eighth stage heat exchanger 98 and the ninth stage heat exchanger 99 are used to treat the normal temperature and high pressure helium entering the cold box 10 of the refrigerator The gas undergoes a multi-stage heat exchange process.

更具体地,所述第一级换热器91、所述第二级换热器92、所述第三级换热器93、所述第四级换热器94以及所述第五级换热器95连接于所述高压主气路17、所述中压回气路18、所述低压回气路19以及所述负压回气路20;所述第六级换热器96连接于所述高压主气路17、所述中压回气路18、所述低压回气路19;所述第七级换热器97和所述第八级换热器98连接于所述高压主气路17和所述低压回气路19;所述第九级换热器99连接于所述过冷器104的液相出口、所述气液分离器105的进口与气相出口和所述2K负载103的出口。可以理解的是,所述换热器组的所述第九级换热器99放置在所述负载测试冷箱27内,其余换热器均放置在所述制冷机冷箱10内部。More specifically, the first stage heat exchanger 91, the second stage heat exchanger 92, the third stage heat exchanger 93, the fourth stage heat exchanger 94 and the fifth stage heat exchanger The heater 95 is connected to the high-pressure main gas circuit 17, the medium-pressure return gas circuit 18, the low-pressure return gas circuit 19, and the negative-pressure return gas circuit 20; the sixth-stage heat exchanger 96 is connected to The high-pressure main gas circuit 17, the medium-pressure return gas circuit 18, and the low-pressure return gas circuit 19; the seventh-stage heat exchanger 97 and the eighth-stage heat exchanger 98 are connected to the high-pressure main Gas path 17 and the low-pressure return gas path 19; the ninth stage heat exchanger 99 is connected to the liquid phase outlet of the subcooler 104, the inlet and gas phase outlet of the gas-liquid separator 105 and the 2K The outlet of the load 103 . It can be understood that the ninth stage heat exchanger 99 of the heat exchanger group is placed in the load test cold box 27 , and the rest of the heat exchangers are placed in the refrigerator cold box 10 .

具体地,所述过冷器104的液相出口连接于所述4.5~75K温区负载102的进口和所述气液分离器105的进口,所述4.5~75K温区负载102的出口连接于所述低压回气路19,所述气液分离器105的液相出口连接于所述2K负载103,所述2K负载103的出口和所述气液分离器105的气相出口均连接于所述冷压缩机组。Specifically, the liquid phase outlet of the subcooler 104 is connected to the inlet of the load 102 in the 4.5-75K temperature range and the inlet of the gas-liquid separator 105, and the outlet of the load 102 in the 4.5-75K temperature range is connected to The low-pressure gas return circuit 19, the liquid phase outlet of the gas-liquid separator 105 is connected to the 2K load 103, and the outlet of the 2K load 103 and the gas phase outlet of the gas-liquid separator 105 are connected to the Cold compressor unit.

可以理解的是,超流氦制冷机对外部负载提供多温区冷量,比如50~75K温区负载,4.5~75K温区负载,2K负载等。50~75K温区负载回流管路流体与制冷机75K的氦气混合,进入第一透平膨胀机组,进行再次膨胀。50~75K温区负载回流的流体是否能达到第一透平膨胀机组的入口设计参数影响到第一透平膨胀机组能否运行在设计工况,达到最佳工况。It can be understood that the superfluid helium refrigerator provides multi-temperature zone cooling capacity for external loads, such as 50-75K temperature zone load, 4.5-75K temperature zone load, 2K load, etc. The fluid in the load return pipeline in the 50-75K temperature zone is mixed with the 75K helium of the refrigerator, and enters the first turboexpander unit for re-expansion. Whether the load return fluid in the 50-75K temperature zone can reach the inlet design parameters of the first turboexpander unit affects whether the first turboexpander unit can operate in the design working condition and reach the optimal working condition.

因此,特别地,为了提高所述超流氦制冷机的整机性能,所述超流氦制冷机还包括设置在所述制冷机冷箱10内的50~75K温区负载兑温管路,所述50~75K温区负载兑温管路连接于所述第一透平膨胀机组,通过所述50~75K温区负载兑温管路对进入所述第一透平膨胀机组前的氦气进行兑温,确保进入所述第一透平膨胀机组的流体参数能够达到叶轮机械入口设计参数,从而使得所述多级透平膨胀机组能够运行在最佳工况,有利于提高超流氦制冷机的整机性能。Therefore, in particular, in order to improve the overall performance of the superfluid helium refrigerator, the superfluid helium refrigerator further includes a 50-75K temperature range load temperature conversion pipeline arranged in the cold box 10 of the refrigerator, The load temperature conversion pipeline in the 50-75K temperature zone is connected to the first turbo expander unit, and the helium gas before entering the first turbo expander unit is passed through the load temperature conversion pipeline in the 50-75K temperature zone. Perform temperature exchange to ensure that the fluid parameters entering the first turbo-expander unit can reach the design parameters of the turbomachinery inlet, so that the multi-stage turbo-expander unit can operate in the best working condition, which is conducive to improving superfluid helium refrigeration The overall performance of the machine.

具体地,所述50~75K温区负载兑温管路包括连接于所述高压主气路17的50K氦气管路60、连接于所述50K氦气管路60和所述50~75K温区负载101的进口的负载去流管路62、连接于所述50K氦气管路60的兑温管路63、连接于50~75K温区负载101的出口的回流管路66、以及连接于所述回流管路66、所述兑温管路63以及所述第一透平膨胀机组的氦气通过管路67,所述50K氦气管路60设置有50K氦气管路调节阀61,所述兑温管路63设置有兑温管路调节阀64和兑温管路加热器65,所述回流管路66设置有回流管路调节阀69,其中所述兑温管路63用于经由所述兑温管路调节阀64和所述兑温管路加热器65来调节所述回流管路66中氦气的温度,使得经由所述氦气通过管路67进入所述第一透平膨胀机组的氦气能够满足所述第一透平膨胀机组的进口温度和压力的要求。Specifically, the 50-75K temperature zone load temperature conversion pipeline includes a 50K helium pipeline 60 connected to the high-pressure main gas circuit 17, a 50K helium pipeline 60 connected to the 50-75K temperature zone load The load outflow pipeline 62 at the inlet of 101, the temperature conversion pipeline 63 connected to the 50K helium pipeline 60, the return pipeline 66 connected to the outlet of the load 101 in the 50-75K temperature zone, and the return pipeline 66 connected to the return The pipeline 66, the temperature conversion pipeline 63 and the helium of the first turboexpander unit pass through the pipeline 67, the 50K helium pipeline 60 is provided with a 50K helium pipeline regulating valve 61, and the temperature conversion pipeline Road 63 is provided with temperature exchange pipeline regulating valve 64 and temperature exchange pipeline heater 65, and said return pipeline 66 is provided with return pipeline adjustment valve 69, wherein said temperature exchange pipeline 63 is used to pass through said temperature exchange pipeline The pipeline regulating valve 64 and the temperature-exchanging pipeline heater 65 are used to adjust the temperature of the helium in the return pipeline 66, so that the helium entering the first turboexpander unit via the helium through the pipeline 67 The gas can meet the requirements of the inlet temperature and pressure of the first turboexpander unit.

值得一提的是,所述50K氦气管路60与所述高压主气路17的连接处位于所述第四级换热器94和所述第五级换热器95之间。It is worth mentioning that the connection between the 50K helium pipeline 60 and the high-pressure main gas pipeline 17 is located between the fourth-stage heat exchanger 94 and the fifth-stage heat exchanger 95 .

所述50~75K温区负载兑温管路的工作原理为:当所述回流管路66中的氦气温度过高时,所述兑温管路63中的50K冷流体直接与所述回流管路66中的热流体兑温,目标参数是所述第一透平膨胀机组的第四透平40的入口设计温度和设计压力。兑温完成后的氦气通过所述氦气通过管路67和连接于所述高压主气路17的所述第一透平膨胀机组的进口管路68的75K氦气混合,进入所述第一透平膨胀机组进行再次膨胀。当所述回流管路66中的氦气温度过低时,所述兑温管路63中的所述兑温管路加热器65启动,加热所述兑温管路63中的氦气,被加热后的热氦气和所述回流管路66中的回流冷氦气兑温,兑温完成后的氦气通过所述氦气通过管路67和来自所述第一透平膨胀机组的进口管路68的75K氦气混合,进入所述第一透平膨胀机组进行再次膨胀。The working principle of the load temperature conversion pipeline in the 50-75K temperature zone is: when the helium temperature in the return pipeline 66 is too high, the 50K cold fluid in the temperature conversion pipeline 63 directly contacts with the return flow pipeline. The temperature of the thermal fluid in the pipeline 66, the target parameters are the inlet design temperature and design pressure of the fourth turbine 40 of the first turboexpander unit. After the temperature exchange is completed, the helium gas is mixed with the 75K helium gas in the inlet pipeline 68 of the first turboexpander unit connected to the high-pressure main gas pipeline 17 through the helium gas passage pipeline 67 and enters the first turboexpander unit. A turboexpander unit performs reexpansion. When the helium gas in the return line 66 is too low, the temperature exchange line heater 65 in the temperature exchange line 63 is activated to heat the helium in the temperature exchange line 63 to be heated. The heated hot helium is exchanged with the return cold helium in the return line 66, and the helium after the temperature exchange is passed through the helium passage line 67 and the inlet from the first turbo expander unit The 75K helium in line 68 is mixed and enters the first turboexpander unit for re-expansion.

可以理解的是,50~75K温区负载兑温管路设计使得50~75K温区负载101回流管路66中的氦气参数能够达到所述第四透平40入口设计参数(设计温度,设计压力)的要求,从而使得所述第一透平膨胀机组能够运行在设计工况,达到最佳工况点,有助于提高所述超流氦制冷机的整机性能。It can be understood that the design of the load-temperature conversion pipeline in the 50-75K temperature zone enables the helium parameters in the return pipeline 66 of the load 101 in the 50-75K temperature zone to reach the design parameters of the inlet of the fourth turbine 40 (design temperature, design Pressure), so that the first turboexpander unit can operate at the design working condition and reach the optimum working condition point, which helps to improve the overall performance of the superfluid helium refrigerator.

特别地,为了提高所述超流氦制冷机的整机性能,所述超流氦制冷机还包括设置于所述制冷机冷箱10内的冷压缩机组入口兑温管路,所述冷压缩机组入口兑温管路设置在所述冷压缩机组的进口侧,用于调节进入所述冷压缩机组的氦气的温度,使得进入所述冷压缩机组的流体参数能够达到叶轮机械入口设计参数,从而使得所述冷压缩机组能够运行在最佳工况,有利于提高超流氦制冷机的整机性能。In particular, in order to improve the overall performance of the superfluid helium refrigerator, the superfluid helium refrigerator also includes a cold compressor unit inlet temperature exchange pipeline arranged in the cold box 10 of the refrigerator, and the cold compressor The unit inlet temperature exchange pipeline is arranged on the inlet side of the cold compressor unit, and is used to adjust the temperature of the helium gas entering the cold compressor unit, so that the fluid parameters entering the cold compressor unit can reach the turbomachinery inlet design parameters, Therefore, the cold compressor unit can be operated in an optimal working condition, which is beneficial to improving the overall performance of the superfluid helium refrigerator.

具体地,所述冷压缩机组包括串联设置的第六入口调节阀70、第一冷压缩机71、第二冷压缩机72、第三冷压缩机73、第四冷压缩机74以及第一出口调节阀75,所述超流氦制冷机还包括并联于所述冷压缩机组的冷压缩机组旁通管路76和设置于所述冷压缩机组旁通管路76上的旁路调节阀77。Specifically, the cold compressor unit includes a sixth inlet regulating valve 70, a first cold compressor 71, a second cold compressor 72, a third cold compressor 73, a fourth cold compressor 74 and a first outlet Regulating valve 75, said superfluid helium refrigerator also includes a cold compressor unit bypass pipeline 76 parallel to said cold compressor unit and a bypass regulating valve 77 arranged on said cold compressor unit bypass pipeline 76 .

值得一提的是,所述冷压缩机组旁通管路76和所述旁路调节阀77用于在所述气液分离器105内液氦液位未到一定值时,供回气氦气回到所述第五级换热器95的负压回气端。It is worth mentioning that the bypass pipeline 76 of the cold compressor unit and the bypass regulating valve 77 are used to supply and return gas helium when the liquid helium level in the gas-liquid separator 105 does not reach a certain value. Return to the negative pressure return gas end of the fifth-stage heat exchanger 95 .

在本发明的一实施例中,所述冷压缩机组入口兑温管路包括管道兑温模块,所述管道兑温模块包括连接于所述低压回气路19和所述冷压缩机组的进口的第一兑温管路81和设置在所述第一兑温管路81上的第一兑温调节阀82。In an embodiment of the present invention, the temperature exchange pipeline at the inlet of the cold compressor unit includes a pipeline temperature exchange module, and the pipeline temperature exchange module includes a pipe connected to the low-pressure return air circuit 19 and the inlet of the cold compressor unit. The first temperature conversion pipeline 81 and the first temperature conversion regulating valve 82 arranged on the first temperature conversion pipeline 81 .

可以理解的是,管道兑温是所述冷压缩机组进口兑温的一种方式,采用所述第一兑温管路81直接兑温,能够快速实现兑温效果,同时为了避免影响所述冷压缩机组的入口流量和避免增加所述冷压缩机组的调控复杂程度,本发明将所述第一兑温管路81引自所述超流氦制冷机的低压侧,即将所述第一兑温管路81的进口连接于所述低压回气路19,出口连接于所述冷压缩机组的进口,以此使得所述冷压缩机组的入口流量变化较为舒缓,而且所述管道兑温模块的整体结构简单,能够避免增加所述冷压缩机组的调控复杂程度。It can be understood that the temperature change of the pipeline is a way of temperature change at the inlet of the cold compressor unit. Using the first temperature change pipeline 81 to directly change the temperature can quickly achieve the temperature change effect, and at the same time, in order to avoid affecting the cold compressor unit The inlet flow rate of the compressor unit and to avoid increasing the complexity of the control of the cold compressor unit, the present invention leads the first exchange temperature pipeline 81 from the low-pressure side of the superfluid helium refrigerator, that is, the first exchange temperature The inlet of the pipeline 81 is connected to the low-pressure return air circuit 19, and the outlet is connected to the inlet of the cold compressor unit, so that the inlet flow rate of the cold compressor unit changes relatively slowly, and the overall temperature of the pipeline exchange module The structure is simple, which can avoid increasing the complexity of regulation of the cold compressor unit.

在本发明的另一实施例中,所述冷压缩机组入口兑温管路包括换热器兑温模块,所述换热器兑温模块包括连接于所述第九级换热器99的出口以及所述冷压缩机组的进口的兑温换热器83、连接于所述高压主气路17和所述兑温换热器83的进口的第二兑温管路84、设置在所述第二兑温管路84上的第二兑温调节阀85、连接于所述兑温换热器83的出口和所述高压主气路17的第三兑温管路86、以及设置在所述高压主气路17上,并位于所述第二兑温管路84和所述第三兑温管路86之间的第三兑温调节阀87。In another embodiment of the present invention, the inlet temperature exchange pipeline of the cold compressor unit includes a heat exchanger temperature exchange module, and the heat exchanger temperature exchange module includes an outlet connected to the ninth stage heat exchanger 99 And the temperature conversion heat exchanger 83 of the inlet of the cold compressor unit, the second temperature conversion pipeline 84 connected to the high-pressure main gas circuit 17 and the inlet of the temperature conversion heat exchanger 83, arranged on the first The second temperature conversion regulating valve 85 on the two temperature conversion pipelines 84, the third temperature conversion pipeline 86 connected to the outlet of the temperature conversion heat exchanger 83 and the high-pressure main gas circuit 17, and the temperature conversion pipeline 86 arranged on the On the high-pressure main gas line 17 and between the second temperature conversion pipeline 84 and the third temperature conversion pipeline 86 is a third temperature conversion regulating valve 87 .

可以理解的是,换热器兑温是所述冷压缩机组进口兑温的另一种方式,采用换热器兑温方式,由于所述兑温换热器83的热容较大,与采用管道兑温的方式相比,换热器兑温较缓慢,但换热器兑温只会影响所述冷压缩机组的入口温度,不会影响所述冷压缩机组的入口流量。It can be understood that the temperature exchange of the heat exchanger is another way to exchange the temperature at the inlet of the cold compressor unit. The heat exchange method is adopted. Since the heat capacity of the temperature exchange heat exchanger 83 is relatively large, it is different from that of the cold compressor unit. Compared with the way of pipe temperature exchange, the temperature exchange of the heat exchanger is slower, but the temperature exchange of the heat exchanger will only affect the inlet temperature of the cold compressor unit, and will not affect the inlet flow of the cold compressor unit.

应该理解的是,所述超流氦制冷机可以单独设置所述管道兑温模块或所述换热器兑温模块,也可以同时设置有两种兑温模块,优选地,在本发明的这一优选实施例中,所述冷压缩机组入口兑温管路包括所述管道兑温模块和所述换热器兑温模块,即所述超流氦制冷机设置有两种兑温模块。在所述超流氦制冷机运行时,这两种兑温方式可以选择使用,也可以结合使用。比如先使用管道兑温,同时控制所述换热器兑温模块的所述第二兑温调节阀85小开度地慢慢开启,等到所述兑温换热器83的出口温度达到目标温度时,关闭所述管道兑温模块,切换至采用换热器兑温方式,本发明对此不作限制。It should be understood that the superfluid helium refrigerator can be provided with either the pipeline temperature exchange module or the heat exchanger temperature exchange module, or two temperature exchange modules at the same time. Preferably, in this aspect of the present invention In a preferred embodiment, the inlet temperature conversion pipeline of the cold compressor unit includes the pipeline temperature conversion module and the heat exchanger temperature conversion module, that is, the superfluid helium refrigerator is provided with two temperature conversion modules. When the superfluid helium refrigerator is in operation, these two temperature changing methods can be used selectively or in combination. For example, use the pipeline to exchange temperature first, and at the same time control the second temperature exchange regulating valve 85 of the heat exchanger temperature exchange module to slowly open at a small opening, and wait until the outlet temperature of the temperature exchange heat exchanger 83 reaches the target temperature , close the pipeline temperature conversion module and switch to the heat exchanger temperature conversion mode, which is not limited in the present invention.

值得一提的是,所述多通道传输管线包括第一管路21、第二管路22、第三管路23、第四管路24、第五管路25以及第六管路26,所述50~75K温区负载101通过所述第一管路21连接所述负载去流管路62,和通过所述第二管路22连接所述回流管路66;所述4.5~75K温区负载102通过所述第三管路23连接所述过冷器104的液相出口,和通过所述第四管路24连接所述低压回气路19;所述第九级换热器99通过所述第五管路25连接于所述过冷器104的液相出口,并通过所述第六管路26连接于所述冷压缩机组入口兑温管路的进口。It is worth mentioning that the multi-channel transmission pipeline includes a first pipeline 21, a second pipeline 22, a third pipeline 23, a fourth pipeline 24, a fifth pipeline 25 and a sixth pipeline 26, so The load 101 in the 50-75K temperature zone is connected to the load outflow pipeline 62 through the first pipeline 21, and connected to the return pipeline 66 through the second pipeline 22; the 4.5-75K temperature zone The load 102 is connected to the liquid phase outlet of the subcooler 104 through the third pipeline 23, and connected to the low-pressure return gas circuit 19 through the fourth pipeline 24; the ninth stage heat exchanger 99 is connected to the The fifth pipeline 25 is connected to the liquid phase outlet of the subcooler 104 , and is connected to the inlet of the cold compressor unit inlet temperature conversion pipeline through the sixth pipeline 26 .

此外,还值得一提的是,所述50~75K温区负载101、所述4.5~75K温区负载102、所述2K负载103、所述第九级换热器99的进出口均设置有对应的进出口调节阀,前述进出口调节阀均设置在所述负载测试冷箱27内,分别用于调节所述50~75K温区负载101、所述4.5~75K温区负载102、所述2K负载103以及所述第九级换热器99的进出气量。In addition, it is also worth mentioning that the load 101 in the 50-75K temperature range, the load 102 in the 4.5-75K temperature range, the 2K load 103, and the inlet and outlet of the ninth-stage heat exchanger 99 are all provided with Corresponding import and export regulating valves, the aforementioned import and export regulating valves are all set in the load test cold box 27, and are respectively used to adjust the load 101 in the 50-75K temperature zone, the load 102 in the 4.5-75K temperature zone, and the load in the 4.5-75K temperature zone. 2K load 103 and the gas in and out of the ninth stage heat exchanger 99 .

进一步地,所述超流氦制冷机还包括低温吸附器组,所述低温吸附器组包括用于吸附氦气中的氧气,氮气,烃类等杂质气体的80K低温吸附器38和吸附氦气中的氢气、氖气等杂质气体的20K低温吸附器39,所述80K低温吸附器38和所述20K低温吸附器39均设置在所述高压主气路17上,且所述80K低温吸附器38位于所述第二级换热器92和所述第三级换热器93之间,所述20K低温吸附器39位于所述第六级换热器96和所述第七级换热器97之间。Further, the superfluid helium refrigerator also includes a low-temperature adsorber group, and the low-temperature adsorber group includes an 80K low-temperature adsorber 38 for adsorbing oxygen in helium, nitrogen, hydrocarbons and other impurity gases and an adsorption helium The 20K low-temperature adsorber 39 for impurity gases such as hydrogen and neon in the gas, the 80K low-temperature adsorber 38 and the 20K low-temperature adsorber 39 are all arranged on the high-pressure main gas circuit 17, and the 80K low-temperature adsorber 38 is located between the second-stage heat exchanger 92 and the third-stage heat exchanger 93, and the 20K low-temperature adsorber 39 is located between the sixth-stage heat exchanger 96 and the seventh-stage heat exchanger Between 97.

在本发明的这一具体实施例中,所述80K低温吸附器38为两个,两个所述80K低温吸附器38并联,并切换使用,也就是说,其中一个所述80K低温吸附器38工作时,另一个所述80K低温吸附器38可同时再生。所述80K低温吸附器38用于吸附氦气中的杂质气体,如氧气,氮气,烃类等。In this specific embodiment of the present invention, there are two 80K cryogenic adsorbers 38, and the two 80K cryogenic adsorbers 38 are connected in parallel and switched for use, that is to say, one of the 80K cryogenic adsorbers 38 During operation, another 80K low temperature adsorber 38 can be regenerated at the same time. The 80K cryogenic adsorber 38 is used to adsorb impurity gases in helium, such as oxygen, nitrogen, hydrocarbons and the like.

所述20K低温吸附器39用于吸附氦气中的杂质气体,比如氢气、氖气等杂质气体。The 20K cryogenic adsorber 39 is used to adsorb impurity gases in helium, such as hydrogen, neon and other impurity gases.

可以理解的是,本发明的所述超流氦制冷机也可以在所述高压主气路17上的其他位置设置对应温度的低温吸附器,并不局限于80K低温吸附器38和20K低温吸附器39,而且所述20K低温吸附器39也可以采用两个并联的结构,本发明对此不作限制。It can be understood that the superfluid helium refrigerator of the present invention can also be equipped with cryogenic adsorbers corresponding to the temperature at other positions on the high-pressure main gas circuit 17, and is not limited to the 80K cryogenic adsorber 38 and the 20K cryogenic adsorption device 39, and the 20K cryogenic adsorber 39 can also adopt two parallel structures, which is not limited in the present invention.

进一步地,本发明的所述超流氦制冷机可以采用液氮预冷或透平膨胀冷却的方式对所述高压压缩机2排入所述制冷机冷箱10中的常温高压氦气进行预冷。Further, the superfluid helium refrigerator of the present invention can pre-cool the normal-temperature and high-pressure helium gas discharged into the refrigerator cold box 10 by the high-pressure compressor 2 by means of liquid nitrogen precooling or turbo expansion cooling. cold.

具体地,在本发明的一实施例中,所述氦气预冷模块为液氮预冷装置,所述液氮预冷装置包括连接于所述高压主气路17的氦气通路调节阀30、连接于所述氦气通路调节阀30的液氮预冷换热器31、连接于所述液氮预冷换热器31的液氮进口管路32、以及设置于所述液氮进口管路32的液氮进口调节阀33,所述液氮预冷换热器31的出口连接于所述高压主气路17,并位于所述第二级换热器92的出口和所述80K低温吸附器38的入口之间,所述氦气预冷模块通过所述液氮进口管路32通入的液氮对所述常温高压氦气进行预冷,并通过所述氦气通路调节阀30调节进入所述液氮预冷换热器31的氦气量,和通过所述液氮进口调节阀33调节进入所述液氮预冷换热器31的液氮量。Specifically, in an embodiment of the present invention, the helium precooling module is a liquid nitrogen precooling device, and the liquid nitrogen precooling device includes a helium passage regulating valve 30 connected to the high-pressure main gas circuit 17 , the liquid nitrogen precooling heat exchanger 31 connected to the helium passage regulating valve 30, the liquid nitrogen inlet pipeline 32 connected to the liquid nitrogen precooling heat exchanger 31, and the liquid nitrogen inlet pipe arranged on the The liquid nitrogen inlet regulating valve 33 of the road 32, the outlet of the liquid nitrogen precooling heat exchanger 31 is connected to the high-pressure main gas circuit 17, and is located at the outlet of the second-stage heat exchanger 92 and the 80K low temperature Between the inlets of the adsorber 38, the helium precooling module precools the normal temperature and high pressure helium with the liquid nitrogen fed through the liquid nitrogen inlet pipeline 32, and passes through the helium passage regulating valve 30 Adjust the amount of helium entering the liquid nitrogen pre-cooling heat exchanger 31 , and adjust the amount of liquid nitrogen entering the liquid nitrogen pre-cooling heat exchanger 31 through the liquid nitrogen inlet regulating valve 33 .

在本发明的一实施例中,所述氦气预冷模块为透平膨胀预冷装置,所述透平膨胀预冷装置包括由第一透平34、第二透平35、第三透平36串联组成的预冷透平膨胀机组和设置在所述第一级换热器91的出口和所述第一透平34的进口之间的第一入口调节阀37,所述预冷透平膨胀机组的出口连接于所述中压回气路18。In an embodiment of the present invention, the helium pre-cooling module is a turbo-expansion pre-cooling device, and the turbo-expansion pre-cooling device includes a first turbine 34, a second turbine 35, a third turbine 36 pre-cooling turbo-expander units in series and the first inlet regulating valve 37 arranged between the outlet of the first-stage heat exchanger 91 and the inlet of the first turbine 34, the pre-cooling turbine The outlet of the expansion unit is connected to the medium pressure return gas path 18 .

可以理解的是,所述超流氦制冷机采用由三个透平膨胀机串联组成的所述预冷透平膨胀机组将常温高压氦气预冷到80K。采用所述预冷透平膨胀机组进行预冷,可以使得所述超流氦制冷机能够适用于没有液氮或者是不适合采用液氮预冷的场合,例如在所述超流氦制冷机用于冷却隧道中的超导磁体和加速器时,因为隧道是封闭空间,采用液氮预冷时,如果氮气泄漏,因为氮气密度和空气密度相差不大,容易使得隧道中的工作人员窒息。It can be understood that the superfluid helium refrigerator uses the precooling turboexpander unit composed of three turboexpanders in series to precool the normal temperature and high pressure helium to 80K. Precooling by using the precooling turboexpander unit can make the superfluid helium refrigerator suitable for occasions where there is no liquid nitrogen or liquid nitrogen is not suitable for precooling, for example, in the superfluid helium refrigerator When cooling superconducting magnets and accelerators in the tunnel, because the tunnel is a closed space, when liquid nitrogen is used for precooling, if nitrogen leaks, because the density of nitrogen is not much different from that of air, it is easy to suffocate the staff in the tunnel.

应该理解的是,本发明的所述超流氦制冷机优选设置有所述液氮预冷装置和所述预冷透平膨胀机组,在使用时可以选择使用任一种预冷模块,即在采用所述预冷透平膨胀机组进行预冷时,所述超流氦制冷机还可以给液氮预冷预留接口,本发明对此不作限制。通过设置两种预冷模块的方式,能够使得所述超流氦制冷机适用于多种应用场合,有利于扩大所述超流氦制冷机的适用范围。It should be understood that the superfluid helium refrigerator of the present invention is preferably provided with the liquid nitrogen precooling device and the precooling turboexpander unit, and any precooling module can be selected during use, that is, in When the precooling turboexpander unit is used for precooling, the superfluid helium refrigerator can also reserve a port for liquid nitrogen precooling, which is not limited in the present invention. By arranging two kinds of pre-cooling modules, the superfluid helium refrigerator can be applied to various application occasions, which is beneficial to expand the application range of the superfluid helium refrigerator.

值得一提的是,在本发明的这一具体实施例中,所述预冷透平膨胀机组将氦气自300K预冷到80K。It is worth mentioning that, in this specific embodiment of the present invention, the precooling turboexpander unit precools helium from 300K to 80K.

进一步地,所述多级透平膨胀机组的具体结构如下:Further, the specific structure of the multi-stage turboexpander unit is as follows:

所述第一透平膨胀机组包括串联设置的第四透平40和第五透平41,以及设置在所述第三级换热器93的出口和所述第四透平40的进口之间的第二入口调节阀42,所述第四透平40的进口连接于所述50~75K温区负载兑温管路的所述氦气通过管路67,所述第五透平41的出口连接于所述中压回气路18,所述第一透平膨胀机组将氦气自75K冷却到50K。所述50~75K温区负载101的回流气体和所述第一透平膨胀机组的进口管路68的75K氦气混合后进入所述第一透平膨胀机组进行再次膨胀。The first turboexpander unit includes a fourth turbine 40 and a fifth turbine 41 arranged in series, and is arranged between the outlet of the third-stage heat exchanger 93 and the inlet of the fourth turbine 40 The second inlet regulating valve 42 of the fourth turbine 40, the inlet of the fourth turbine 40 is connected to the helium passing through the pipeline 67 of the load temperature conversion pipeline in the 50-75K temperature zone, and the outlet of the fifth turbine 41 Connected to the medium pressure return gas circuit 18, the first turboexpander unit cools the helium gas from 75K to 50K. The reflux gas of the load 101 in the 50-75K temperature zone is mixed with the 75K helium gas in the inlet pipeline 68 of the first turboexpander unit, and then enters the first turboexpander unit for re-expansion.

所述第二透平膨胀机组包括串联设置的第六透平43和第七透平44,以及设置在所述第五级换热器95的出口和所述第六透平43的进口之间的第三入口调节阀45,所述第七透平44的出口连接所述中压回气路18,所述第二透平膨胀机组将氦气自23K冷却到15K。The second turboexpander unit includes a sixth turbine 43 and a seventh turbine 44 arranged in series, and is arranged between the outlet of the fifth-stage heat exchanger 95 and the inlet of the sixth turbine 43 The third inlet regulating valve 45, the outlet of the seventh turbine 44 is connected to the medium pressure return gas path 18, and the second turboexpander unit cools the helium gas from 23K to 15K.

所述第三透平膨胀机组包括串联设置的第八透平46和第九透平47,以及设置在所述20K低温吸附器39的出口和所述第八透平46的进口之间的第四入口调节阀48,所述第九透平47的出口连接于所述低压回气路19,所述第三透平膨胀机组将氦气自14K冷却到6K。The third turboexpander unit includes an eighth turbine 46 and a ninth turbine 47 arranged in series, and a second turbine arranged between the outlet of the 20K cryogenic adsorber 39 and the inlet of the eighth turbine 46 Four inlet regulating valves 48, the outlet of the ninth turbine 47 is connected to the low-pressure return gas circuit 19, and the third turboexpander unit cools helium from 14K to 6K.

所述第四透平膨胀机组包括第十透平49、设置在所述第七级换热器97的出口和所述第十透平49的进口之间的第五入口调节阀50以及设置在所述高压主气路17上,并位于所述第七级换热器97和所述第八级换热器98之间的末级透平旁通阀51,所述第十透平49的出口连接于所述高压主气路17。在这一具体实施例中,所述第四透平膨胀机组为末级透平膨胀机组,经第四透平膨胀机组冷却后的氦气进入所述第八级换热器98中换热后,形成5.3K的超临界氦。The fourth turbo-expansion unit includes a tenth turbine 49, a fifth inlet regulating valve 50 arranged between the outlet of the seventh-stage heat exchanger 97 and the inlet of the tenth turbine 49, and a fifth inlet regulating valve 50 arranged at On the high-pressure main gas circuit 17 and between the seventh-stage heat exchanger 97 and the eighth-stage heat exchanger 98, the last-stage turbine bypass valve 51, the tenth turbine 49 The outlet is connected to the high-pressure main gas path 17 . In this specific embodiment, the fourth turboexpander unit is the final turboexpander unit, and the helium gas cooled by the fourth turboexpander unit enters the eighth stage heat exchanger 98 for heat exchange , forming supercritical helium at 5.3K.

值得一提的是,所述超流氦制冷机还包括连接于所述第四透平膨胀机组的出口和所述低压回气路19的冷箱旁通管路11和设置在所述冷箱旁通管路11上的冷箱旁通阀12,所述冷箱旁通阀12用于实现所述超流氦制冷机4K部分降温时的调控作用。It is worth mentioning that the superfluid helium refrigerator also includes a cold box bypass line 11 connected to the outlet of the fourth turboexpansion unit and the low-pressure return gas line 19 and is arranged on the cold box The cold box bypass valve 12 on the bypass line 11 is used to realize the regulation function when the superfluid helium refrigerator 4K is partially cooled.

此外,还值得一提的是,所述高压主气路17和所述过冷器104之间还设置有节流阀组,所述节流阀组包括并联设置的第一节流阀13和第二节流阀14,所述过冷器104的气相出口和所述低压回气路19之间还设置有回气阀15,所述第九级换热器99和所述气液分离器105的进口之间还设置有第三节流阀16,所述第九级换热器99和所述第三节流阀16均设置于所述负载测试冷箱27内;In addition, it is also worth mentioning that a throttling valve group is also provided between the high-pressure main air circuit 17 and the subcooler 104, and the throttle valve group includes a first throttle valve 13 and a The second throttle valve 14, a gas return valve 15 is also arranged between the gas phase outlet of the subcooler 104 and the low pressure return gas circuit 19, the ninth stage heat exchanger 99 and the gas-liquid separator A third throttling valve 16 is also arranged between the inlets of 105, and the ninth stage heat exchanger 99 and the third throttling valve 16 are both arranged in the load test cold box 27;

其中所述高压主气路17输出的一部分超临界氦经过所述第一节流阀13节流为气液两相,液相在所述过冷器104中积液,气相通过所述回气阀15进入所述低压回气路19;另一部分超临界氦经所述第二节流阀14节流后进入所述过冷器104中,被所述过冷器104积液的液氦过冷形成过冷超临界氦,过冷超临界氦自所述过冷器104流出,一部分供给所述4.5~75K温区负载102,另一部分进入所述第九级换热器99,经过所述第三节流阀16节流为气液两相,液相在所述气液分离器105中积液,气相自所述气液分离器105的气相出口排出,与所述2K负载103的回气汇合进入所述第九级换热器99中换热,换热后的氦气经所述冷压缩机组入口兑温管路兑温后进入所述冷压缩机组。A part of the supercritical helium output from the high-pressure main gas circuit 17 is throttled by the first throttle valve 13 into a gas-liquid two-phase, the liquid phase accumulates liquid in the subcooler 104, and the gas phase passes through the return gas The valve 15 enters the low-pressure gas return circuit 19; another part of the supercritical helium enters the subcooler 104 after being throttled by the second throttle valve 14, and is filtered by the liquid helium accumulated in the subcooler 104. The supercooled supercritical helium is formed by cooling, and the supercooled supercritical helium flows out from the subcooler 104, a part of which is supplied to the load 102 in the 4.5-75K temperature zone, and the other part enters the ninth-stage heat exchanger 99 and passes through the The third throttling valve 16 throttling is a gas-liquid two-phase, the liquid phase accumulates liquid in the gas-liquid separator 105, the gas phase is discharged from the gas phase outlet of the gas-liquid separator 105, and the return with the 2K load 103 The gas merges into the ninth-stage heat exchanger 99 for heat exchange, and the helium gas after heat exchange enters the cold compressor unit after being warmed through the temperature exchange pipeline at the inlet of the cold compressor unit.

可以理解的是,在这一具体实施例中,所述过冷器104为氦过冷器,所述气液分离器105为2K气液分离器。It can be understood that, in this specific embodiment, the subcooler 104 is a helium subcooler, and the gas-liquid separator 105 is a 2K gas-liquid separator.

进一步地,所述超流氦制冷机还包括气体管理面板,所述气体管理面板用于调节控制所述中压压缩机1和所述高压压缩机2的进出口压力,包括连接于所述高压主气路17和所述中压回气路18的中压旁通阀5、连接所述高压主气路17和所述低压回气路19的低压旁通阀6、连接于所述低压回气路19和所述高压主气路17的加载阀9与缓冲罐卸载阀7、以及连接于所述加载阀9和所述缓冲罐卸载阀7之间的缓冲罐8。Further, the superfluid helium refrigerator also includes a gas management panel, which is used to adjust and control the inlet and outlet pressures of the medium-pressure compressor 1 and the high-pressure compressor 2, including connecting to the high-pressure The medium pressure bypass valve 5 of the main air circuit 17 and the medium pressure return air circuit 18, the low pressure bypass valve 6 connecting the high pressure main air circuit 17 and the low pressure return air circuit 19, and the low pressure return air circuit 19 are connected to the low pressure return air circuit. The gas circuit 19 and the loading valve 9 and buffer tank unloading valve 7 of the high-pressure main gas circuit 17 , and the buffer tank 8 connected between the loading valve 9 and the buffer tank unloading valve 7 .

值得一提的是,所述超流氦制冷机还包括设置在所述负压压缩机3和所述高压压缩机2之间的单向阀4,所述单向阀4用于防止所述负压压缩机3的出口氦气逆流。It is worth mentioning that the superfluid helium refrigerator also includes a one-way valve 4 arranged between the negative pressure compressor 3 and the high-pressure compressor 2, and the one-way valve 4 is used to prevent the The outlet helium of the negative pressure compressor 3 countercurrently flows.

所述超流氦制冷机的工作流程如下:The working process of the superfluid helium refrigerator is as follows:

(1)所述高压压缩机2排出的常温高压氦气进入所述制冷机冷箱10;(1) The normal temperature and high pressure helium discharged by the high pressure compressor 2 enters the refrigerator cold box 10;

(2)进入所述制冷机冷箱10的所述常温高压氦气分出一小部分进入所述液氮预冷换热器31被液氮预冷到80K(液氮预冷)。或者进入所述制冷机冷箱10的所述常温高压氦气经过所述第一级换热器91被返流冷氦气冷却到一定温度后,分出一股流体进入所述预冷透平膨胀机组,被所述预冷透平膨胀机组预冷到80K(透平膨胀机组预冷)。所述预冷透平膨胀机组出口回气到中压,逆流经过所述第二级换热器92和所述第一级换热器91,进入所述高压压缩机2的吸气口。值得一提的是,液氮预冷和预冷透平膨胀机组预冷二选一,不能同时进行;(2) A small part of the normal temperature and high pressure helium gas entering the refrigerator cold box 10 enters the liquid nitrogen precooling heat exchanger 31 and is precooled to 80K by liquid nitrogen (liquid nitrogen precooling). Or the normal-temperature high-pressure helium gas that enters the refrigerator cold box 10 is cooled to a certain temperature by the backflow cold helium gas through the first-stage heat exchanger 91, and then a stream of fluid is separated and enters the pre-cooling turbine. The expansion unit is pre-cooled to 80K by the pre-cooling turbo-expander unit (pre-cooling of the turbo-expander unit). The return gas at the outlet of the pre-cooling turboexpander unit is at medium pressure, passes through the second-stage heat exchanger 92 and the first-stage heat exchanger 91 countercurrently, and enters the suction port of the high-pressure compressor 2 . It is worth mentioning that liquid nitrogen pre-cooling and pre-cooling turbo-expansion unit pre-cooling can be selected, and cannot be carried out at the same time;

(3)其余高压主气路17的氦气被预冷后进入所述80K低温吸附器38去除氦气中的杂质气体如氧气,氮气和烃类等杂质气体后,经过所述第三级换热器93被返流冷氦气冷却,一部分氦气经过所述第一透平膨胀机组的进口管路68进入所述第一透平膨胀机组,自75K冷却到50K。所述第一透平膨胀机组的出口气体回气到中压,逆流经过所述第四级换热器94、所述第三级换热器93、所述第二级换热器92以及所述第一级换热器91后,进入所述高压压缩机2的吸气口;另一部分氦气经过所述第四级换热器94换热后,形成50K氦气,一部分50K氦气经过所述50K氦气管路60后分为两股,一股进入所述负载去流管路62被送往所述50~75K温区负载101处,一股进入所述兑温管路63与所述回流管路66中的氦气进行兑温。兑温完成后的氦气进入所述氦气通过管路67,与所述第一透平膨胀机组的进口管路68处来的75K氦气混合后重新进入所述第一透平膨胀机组进行再次膨胀;(3) After the helium in the remaining high-pressure main gas circuit 17 is pre-cooled, it enters the 80K low-temperature adsorber 38 to remove impurity gases such as oxygen, nitrogen and hydrocarbons in the helium, and then passes through the third stage of replacement. Heater 93 is cooled by the return flow of cold helium, and a part of helium enters the first turboexpander through the inlet pipeline 68 of the first turboexpander, and is cooled from 75K to 50K. The outlet gas of the first turboexpander unit returns to the medium pressure, and passes through the fourth-stage heat exchanger 94, the third-stage heat exchanger 93, the second-stage heat exchanger 92 and all After the first-stage heat exchanger 91, it enters the suction port of the high-pressure compressor 2; another part of the helium passes through the fourth-stage heat exchanger 94 to form 50K helium, and a part of the 50K helium passes through The 50K helium pipeline 60 is divided into two strands, one strand enters the load outflow pipeline 62 and is sent to the load 101 in the 50-75K temperature zone, and the other strand enters the temperature exchange pipeline 63 and the The helium in the return line 66 is exchanged for temperature. The helium gas after the temperature exchange is completed enters the helium gas through the pipeline 67, mixes with the 75K helium gas from the inlet pipeline 68 of the first turboexpander unit, and then re-enters the first turboexpander unit for further processing. expand again;

(4)高压主气路17的气体经过所述第五级换热器95后,一部分进入所述第二透平膨胀机组,自23K被冷却到15K,所述第二透平膨胀机组的出口氦气回气到中压,逆流经过所述第六级换热器96、所述第五级换热器95、所述第四级换热器94、所述第三级换热器93、所述第二级换热器92以及所述第一级换热器91后,进入所述高压压缩机2的吸气口;(4) After the gas in the high-pressure main gas circuit 17 passes through the fifth-stage heat exchanger 95, part of it enters the second turboexpander unit and is cooled from 23K to 15K, and the outlet of the second turboexpander unit The helium gas is returned to medium pressure, and countercurrently passes through the sixth-stage heat exchanger 96, the fifth-stage heat exchanger 95, the fourth-stage heat exchanger 94, the third-stage heat exchanger 93, After the second-stage heat exchanger 92 and the first-stage heat exchanger 91, enter the suction port of the high-pressure compressor 2;

(5)剩余高压主气路17的气体经过所述第六级换热器96后,进入20K低温吸附器39去除氦气中的杂质气体比如氢气,氖气等,除杂后的一部分氦气进入所述第三透平膨胀机组,自14K冷却到6K,所述第三透平膨胀机组的出口气体回气到低压,逆流经过所述第七级换热器97、所述第六级换热器96、所述第五级换热器95、所述第四级换热器94、所述第三级换热器93、所述第二级换热器92以及所述第一级换热器91后,进入所述中压压缩机1的吸气口;(5) After the gas in the remaining high-pressure main gas circuit 17 passes through the sixth-stage heat exchanger 96, it enters the 20K cryogenic adsorber 39 to remove impurity gases such as hydrogen, neon, etc. in the helium, and a part of the helium after the removal of impurities Enter the third turbo-expander unit, cool from 14K to 6K, the outlet gas of the third turbo-expander unit returns to low pressure, and passes through the seventh-stage heat exchanger 97 and the sixth-stage heat exchanger 97 countercurrently. The heat exchanger 96, the fifth stage heat exchanger 95, the fourth stage heat exchanger 94, the third stage heat exchanger 93, the second stage heat exchanger 92 and the first stage heat exchanger After the heater 91, enter the suction port of the medium pressure compressor 1;

(6)除杂后的另一部分氦气经过所述第七级换热器97后,经过所述第四透平膨胀机组后进入所述第八级换热器98与回流冷氦气换热,之后的高压主气路17氦气到达超临界状态。5.3K的超临界氦气分成两部分,一部分超临界氦气经过所述第一节流阀13节流为气液两相,液相在所述过冷器104中积液,气相通过所述回气阀15回气到所述低压回气路19。另一部分5.3K的超临界氦气经过所述第二节流阀14节流后进入所述过冷器104,被所述过冷器104中积液的液氦过冷成为4.5K@3bara过冷超临界氦。过冷超临界氦自所述过冷器104的液相出口流出,分出一小部分通过所述多通道传输管线的所述第三管路23进入所述负载测试冷箱27中,供给所述4.5~75K温区负载102,所述4.5~75K温区负载102的回气通过所述多通道传输管线的所述第四管路24进入所述制冷机冷箱10,回到所述第二级换热器92的低压吸气侧。其余大部分过冷超临界氦通过所述多通道传输管线的所述第五管路25进入所述负载测试冷箱27中,经过所述第九级换热器99换热后,通过所述第三节流阀16节流为气液两相,液相在所述气液分离器105中积液,气相自所述气液分离器105的气相出口回气,逆流经过所述第九级换热器99后,通过所述多通道传输管线的所述第六管路26进入所述制冷机冷箱10后,进入所述冷压缩机组。所述气液分离器105内液氦液位未到一定值时,回气氦气自所述冷压缩机组旁通管路76和所述旁路调节阀77回到所述第五级换热器95的负压回气端;(6) Another part of helium after the removal of impurities passes through the seventh-stage heat exchanger 97, and then enters the eighth-stage heat exchanger 98 to exchange heat with the reflux cold helium after passing through the fourth turbo-expander unit , and then the helium in the high-pressure main gas path 17 reaches a supercritical state. The 5.3K supercritical helium is divided into two parts, and a part of the supercritical helium is throttled by the first throttle valve 13 to form a gas-liquid two-phase, the liquid phase accumulates liquid in the subcooler 104, and the gas phase passes through the The air return valve 15 returns air to the low-pressure air return circuit 19 . Another part of 5.3K supercritical helium enters the subcooler 104 after being throttled by the second throttle valve 14, and is supercooled by the liquid helium accumulated in the subcooler 104 to become 4.5K@3bara supercooled. Cold supercritical helium. Supercooled supercritical helium flows out from the liquid phase outlet of the subcooler 104, and a small part is separated through the third pipeline 23 of the multi-channel transfer pipeline and enters the load test cold box 27 for supply to the The 4.5-75K temperature zone load 102, the return air of the 4.5-75K temperature zone load 102 enters the refrigerator cold box 10 through the fourth pipeline 24 of the multi-channel transmission pipeline, and returns to the first The low pressure suction side of the secondary heat exchanger 92 . Most of the rest of the subcooled supercritical helium enters the load test cold box 27 through the fifth pipeline 25 of the multi-channel transfer pipeline, passes through the ninth stage heat exchanger 99 after heat exchange, and passes through the The third throttling valve 16 throttling is a gas-liquid two-phase, the liquid phase accumulates liquid in the gas-liquid separator 105, and the gas phase returns to gas from the gas phase outlet of the gas-liquid separator 105, and passes through the ninth stage countercurrently. After the heat exchanger 99, after entering the refrigerator cold box 10 through the sixth pipeline 26 of the multi-channel transmission pipeline, it enters the cold compressor unit. When the liquid helium level in the gas-liquid separator 105 does not reach a certain value, the return gas helium returns to the fifth heat exchange stage from the cold compressor unit bypass line 76 and the bypass regulating valve 77 The negative pressure return gas end of device 95;

(7)当所述气液分离器105内液氦液位达到一定值时,所述冷压缩机组启动,将所述气液分离器105中的氦气减压至超流氦饱和压力0.03bar,从而在所述气液分离器105中形成2K饱和超流氦。2K饱和超流氦自所述气液分离器105的液相出口流出,送往所述2K负载103处。所述2K负载103的回气和所述气液分离器105的气相出口的回气混合,返流经过所述第九级换热器99后,通过所述多通道传输管线的所述第六管路26进入所述制冷机冷箱10,经过所述冷压缩机组入口兑温管路兑温后进入所述冷压缩机组;(7) When the liquid helium level in the gas-liquid separator 105 reaches a certain value, the cold compressor unit is started, and the helium in the gas-liquid separator 105 is decompressed to a superfluid helium saturation pressure of 0.03 bar , so that 2K saturated superfluid helium is formed in the gas-liquid separator 105 . The 2K saturated superfluid helium flows out from the liquid phase outlet of the gas-liquid separator 105 and is sent to the 2K load 103 . The return air from the 2K load 103 is mixed with the return air from the gas phase outlet of the gas-liquid separator 105, and flows back through the ninth-stage heat exchanger 99, and then passes through the sixth stage of the multi-channel transmission pipeline. The pipeline 26 enters the cold box 10 of the refrigerator, and enters the cold compressor unit after being warmed through the inlet temperature conversion pipeline of the cold compressor unit;

(8)所述冷压缩机组将下游管道氦气压力自0.03bar提高到0.5bar。0.5bar的负压氦气依次进入所述第五级换热器95、所述第四级换热器94、所述第三级换热器93、所述第二级换热器92以及所述第一级换热器91的负压通道,层层压降后成为0.4bar的负压氦气,进入所述负压压缩机3的吸气口。所述负压压缩机3将0.4bar负压氦气压缩到中压4.05bar,与来自所述中压压缩机1出口的中压气体以及所述中压回气路18来的回气混合,一起送入所述高压压缩机2的吸气口处,完成一个氦气循环。(8) The cold compressor unit increases the helium pressure in the downstream pipeline from 0.03 bar to 0.5 bar. The negative pressure helium gas of 0.5 bar enters the fifth stage heat exchanger 95, the fourth stage heat exchanger 94, the third stage heat exchanger 93, the second stage heat exchanger 92 and the The negative pressure channel of the first-stage heat exchanger 91 becomes 0.4 bar negative pressure helium gas after layer-by-layer pressure drop, and enters the suction port of the negative pressure compressor 3 . The negative pressure compressor 3 compresses 0.4bar negative pressure helium gas to a medium pressure of 4.05bar, and mixes it with the medium pressure gas from the outlet of the medium pressure compressor 1 and the return gas from the medium pressure return gas circuit 18, Send them into the suction port of the high-pressure compressor 2 together to complete a helium cycle.

可以理解的是,本发明的所述超流氦制冷机通过所述制冷机冷箱10和所述负载测试冷箱27将制冷部分和负载测试部分分开,并将所述50~75K温区负载101、所述4.5~75K温区负载102、所述2K负载103、所述第九级换热器99以及所述气液分离器105放置于所述负载测试冷箱27内部,所述负载测试冷箱27仅用于负载冷量测试阶段使用,与所述制冷机冷箱10功能分开。在所述超流氦制冷机交付用户后,所述负载测试冷箱27和所述多通道传输管线即可去除,用户负载直接连接到所述制冷机冷箱10上。此种设计使得所述制冷机冷箱结构紧凑,避免各温区测试负载在负载测试阶段后成为闲置热容,占用所述制冷机冷箱宝贵空间。It can be understood that the superfluid helium refrigerator of the present invention separates the refrigeration part from the load test part through the refrigerator cold box 10 and the load test cold box 27, and loads the 50-75K temperature zone 101. The 4.5-75K temperature zone load 102, the 2K load 103, the ninth stage heat exchanger 99 and the gas-liquid separator 105 are placed inside the load test cold box 27, and the load test The cold box 27 is only used in the load cooling capacity test stage and is separated from the function of the refrigerator cold box 10 . After the superfluid helium refrigerator is delivered to the user, the load test cold box 27 and the multi-channel transfer pipeline can be removed, and the user load is directly connected to the refrigerator cold box 10 . This design makes the cold box of the refrigerator compact in structure, and prevents the test loads in each temperature zone from becoming idle heat capacity after the load test stage, occupying precious space in the cold box of the refrigerator.

另外,本发明的所述超流氦制冷机在所述第一透平膨胀机组处设置了50~75K温区负载兑温管路,并在所述冷压缩机组的进口侧设置冷压缩机组入口兑温管路,使得进入所述第一透平膨胀机组和所述冷压缩机组的流体参数能够达到叶轮机械入口设计参数,从而使得透平膨胀机组和冷压缩机组等叶轮机械能运行在最佳工况,有利于提高超流氦制冷机的整机性能,进而确保所述超流氦制冷机能够在2K工作模式、2K待机模式、4.5K待机模式,升降温模式等不同运行模式下都能够长期、稳定、可靠运行,且能够满足各种不同运行模式下的制冷量要求。In addition, the superfluid helium refrigerator of the present invention is provided with a 50-75K temperature range load temperature conversion pipeline at the first turboexpander unit, and an inlet of the cold compressor unit is provided at the inlet side of the cold compressor unit The temperature conversion pipeline enables the fluid parameters entering the first turboexpander unit and the cold compressor unit to reach the design parameters of the inlet of the turbomachinery, so that the turbomachinery such as the turboexpander unit and the cold compressor unit can operate at the optimum working condition. It is beneficial to improve the overall performance of the superfluid helium refrigerator, thereby ensuring that the superfluid helium refrigerator can be used for a long time under different operating modes such as 2K working mode, 2K standby mode, 4.5K standby mode, and heating and cooling mode. , stable and reliable operation, and can meet the cooling capacity requirements under various operating modes.

以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, they should be It is considered to be within the range described in this specification.

以上实施例仅表达了本发明的优选的实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。The above examples only express the preferred implementation of the present invention, and the descriptions thereof are relatively specific and detailed, but should not be construed as limiting the scope of the patent for the invention. It should be pointed out that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention should be based on the appended claims.

Claims (20)

1.一种具有独立负载测试冷箱的超流氦制冷机,其特征在于,包括压缩机组、制冷机冷箱、负载测试冷箱、均设置于所述制冷机冷箱内的氦气预冷模块、多级透平膨胀机组、换热器组、过冷器和冷压缩机组、以及均设置于所述负载测试冷箱内的气液分离器、50~75K温区负载、4.5~75K温区负载和2K负载,所述负载测试冷箱用于在负载冷量测试阶段使用;1. A superfluid helium refrigerator with independent load test cold box, is characterized in that, comprises compressor unit, refrigerator cold box, load test cold box, the helium pre-cooling that is all arranged in described refrigerator cold box module, multi-stage turboexpander unit, heat exchanger unit, subcooler and cold compressor unit, and the gas-liquid separator all set in the load test cold box, 50~75K temperature zone load, 4.5~75K temperature zone load, 4.5~75K temperature Zone load and 2K load, the load test cold box is used for use in the load cold capacity test stage; 所述超流氦制冷机还包括用于连接所述制冷机冷箱和所述负载测试冷箱的多通道传输管线,所述负载测试冷箱通过所述多通道传输管线与所述制冷机冷箱形成可拆除式连接;The superfluid helium refrigerator also includes a multi-channel transfer line for connecting the refrigerator cold box and the load test cold box, and the load test cold box is connected to the refrigerator cold box through the multi-channel transfer line. The box forms a detachable connection; 所述压缩机组包括正压压缩机和负压压缩机,所述正压压缩机包括中压压缩机和高压压缩机,所述负压压缩机的出口和所述中压压缩机的出口均连接于所述高压压缩机的吸气口,所述高压压缩机的出口连接于所述制冷机冷箱的进口,所述高压压缩机排出的常温高压氦气经由所述制冷机冷箱的进口进入所述制冷机冷箱内;The compressor assembly includes a positive pressure compressor and a negative pressure compressor, the positive pressure compressor includes a medium pressure compressor and a high pressure compressor, the outlet of the negative pressure compressor and the outlet of the medium pressure compressor are connected At the suction port of the high-pressure compressor, the outlet of the high-pressure compressor is connected to the inlet of the cold box of the refrigerator, and the normal temperature and high-pressure helium gas discharged from the high-pressure compressor enters through the inlet of the cold box of the refrigerator. In the cold box of the refrigerator; 所述氦气预冷模块设置在所述制冷机冷箱的进口侧,并位于所述多级透平膨胀机组之前,用于对进入所述制冷机冷箱的一部分常温高压氦气进行预冷;The helium pre-cooling module is arranged on the inlet side of the cold box of the refrigerator and before the multi-stage turbo-expansion unit, and is used for precooling a part of normal-temperature and high-pressure helium entering the cold box of the refrigerator ; 所述多级透平膨胀机组包括依次设置的第一透平膨胀机组、第二透平膨胀机组、第三透平膨胀机组以及第四透平膨胀机组,用于对进入所述制冷机冷箱的常温高压氦气进行多级冷却过程;The multi-stage turbo-expansion unit includes a first turbo-expansion unit, a second turbo-expansion unit, a third turbo-expansion unit and a fourth turbo-expansion unit arranged in sequence, for controlling the The normal temperature and high pressure helium is used for multi-stage cooling process; 所述换热器组用于对进入所述制冷机冷箱的常温高压氦气进行多级换热过程;The heat exchanger group is used to perform a multi-stage heat exchange process for the normal temperature and high pressure helium entering the cold box of the refrigerator; 所述超流氦制冷机包括高压主气路、中压回气路、低压回气路、负压回气路,所述高压主气路的进口连接于所述制冷机冷箱的进口,出口连接于所述过冷器的进口;所述中压回气路的进口连接于所述第二透平膨胀机组的出口,出口连接于所述高压压缩机的吸气口;所述低压回气路的进口连接于所述过冷器的气相出口,出口连接于所述中压压缩机的吸气口;所述负压回气路的进口连接于所述冷压缩机组的出口,出口连接于所述负压压缩机的吸气口;The superfluid helium refrigerator includes a high-pressure main gas circuit, a medium-pressure return gas circuit, a low-pressure return gas circuit, and a negative pressure return gas circuit. The inlet of the high-pressure main gas circuit is connected to the inlet and outlet of the cold box of the refrigerator. connected to the inlet of the subcooler; the inlet of the medium-pressure return gas circuit is connected to the outlet of the second turboexpander unit, and the outlet is connected to the suction port of the high-pressure compressor; the low-pressure return gas The inlet of the path is connected to the gas phase outlet of the subcooler, and the outlet is connected to the suction port of the medium pressure compressor; the inlet of the negative pressure return path is connected to the outlet of the cold compressor unit, and the outlet is connected to The suction port of the negative pressure compressor; 所述过冷器的液相出口连接于所述4.5~75K温区负载的进口和所述气液分离器的进口,所述4.5~75K温区负载的出口连接于所述低压回气路,所述气液分离器的液相出口连接于所述2K负载,所述2K负载的出口和所述气液分离器的气相出口均连接于所述冷压缩机组的进口;The liquid phase outlet of the subcooler is connected to the inlet of the load in the 4.5~75K temperature zone and the inlet of the gas-liquid separator, and the outlet of the load in the 4.5~75K temperature zone is connected to the low pressure return gas path, The liquid phase outlet of the gas-liquid separator is connected to the 2K load, and the outlet of the 2K load and the gas phase outlet of the gas-liquid separator are connected to the inlet of the cold compressor unit; 其中所述高压压缩机经由所述制冷机冷箱的进口向所述制冷机冷箱排入常温高压氦气,所述常温高压氦气的一部分进入所述氦气预冷模块中预冷,预冷后的氦气与所述高压主气路的常温高压氦气汇合后,经由所述多级透平膨胀机组进行多级冷却过程和经由所述换热器组进行多级换热过程后,形成超临界氦;Wherein the high-pressure compressor discharges normal temperature and high pressure helium into the refrigerator cold box through the inlet of the refrigerator cold box, and a part of the normal temperature and high pressure helium enters the helium precooling module for precooling. After the cooled helium is merged with the normal temperature and high pressure helium in the high-pressure main gas circuit, the multi-stage cooling process and the multi-stage heat exchange process are performed through the multi-stage turbo expander unit, Formation of supercritical helium; 所述超临界氦经由所述高压主气路进入所述过冷器中,气相进入所述低压回气路,一部分液相进入所述4.5~75K温区负载后回气到所述低压回气路,另一部分液相节流为气液两相,液相进入所述气液分离器中积液,当所述气液分离器中液氦液位达到预设值时,所述冷压缩机组启动,将所述气液分离器中的氦气进行减压,从而形成2K饱和超流氦,2K饱和超流氦自所述气液分离器的液相出口流出至所述2K负载处;气相自所述气液分离器的气相出口排出,与所述2K负载的回气汇合后进入所述冷压缩机组,经由所述冷压缩机组提压后进入所述负压回气路,经多级压降后形成负压氦气,负压氦气进入所述负压压缩机中压缩到中压,与来自所述中压压缩机排出的中压气体以及所述中压回气路的回气混合后,进入所述高压压缩机,至此完成一个氦气循环。The supercritical helium enters the subcooler through the high-pressure main gas circuit, the gas phase enters the low-pressure return gas circuit, and a part of the liquid phase enters the 4.5-75K temperature zone and returns to the low-pressure return gas The other part of the liquid phase is throttling into a gas-liquid two-phase, and the liquid phase enters the gas-liquid separator to collect liquid. When the liquid helium level in the gas-liquid separator reaches a preset value, the cold compressor unit Start, the helium in the gas-liquid separator is decompressed to form 2K saturated superfluid helium, and the 2K saturated superfluid helium flows out from the liquid phase outlet of the gas-liquid separator to the 2K load; the gas phase It is discharged from the gas phase outlet of the gas-liquid separator, merged with the return gas of the 2K load, enters the cold compressor unit, and enters the negative pressure return gas circuit after being boosted by the cold compressor unit. After the pressure drop, the negative pressure helium gas is formed, and the negative pressure helium gas enters the negative pressure compressor and is compressed to a medium pressure, and is combined with the medium pressure gas discharged from the medium pressure compressor and the return gas of the medium pressure return gas circuit After mixing, it enters the high-pressure compressor, and a helium cycle is completed so far. 2.根据权利要求1所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述超流氦制冷机还包括均设置于所述制冷机冷箱内的50~75K温区负载兑温管路和冷压缩机组入口兑温管路,其中所述50~75K温区负载兑温管路连接于所述第一透平膨胀机组,用于对进入所述第一透平膨胀机组前的氦气进行兑温;其中所述冷压缩机组入口兑温管路设置在所述冷压缩机组的进口侧,用于调节进入所述冷压缩机组的氦气的温度。2. The superfluid helium refrigerator with independent load test cold box according to claim 1, characterized in that, the superfluid helium refrigerator also includes 50 ~ 75K temperature thermostats all arranged in the cold box of the refrigerator. Zone load temperature conversion pipeline and cold compressor unit inlet temperature conversion pipeline, wherein the load temperature conversion pipeline in the 50~75K temperature zone is connected to the first turboexpander unit for The helium gas before the expansion unit is exchanged for temperature; wherein the temperature exchange pipeline at the inlet of the cold compressor unit is arranged on the inlet side of the cold compressor unit, and is used to adjust the temperature of the helium gas entering the cold compressor unit. 3.根据权利要求2所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述50~75K温区负载兑温管路包括连接于所述高压主气路的50K氦气管路、连接于所述50K氦气管路和所述50~75K温区负载的进口的负载去流管路、连接于所述50K氦气管路的兑温管路、连接于50~75K温区负载的出口的回流管路、以及连接于所述回流管路、所述兑温管路以及所述第一透平膨胀机组的氦气通过管路,所述50K氦气管路设置有50K氦气管路调节阀,所述兑温管路设置有兑温管路调节阀和兑温管路加热器,所述回流管路设置有回流管路调节阀,其中所述兑温管路用于经由所述兑温管路调节阀和所述兑温管路加热器来调节所述回流管路中氦气的温度,使得经由所述氦气通过管路进入所述第一透平膨胀机组的氦气能够满足所述第一透平膨胀机组的进口温度和压力的要求。3. The superfluid helium refrigerator with independent load test cold box according to claim 2, characterized in that, said 50-75K temperature zone load temperature conversion pipeline comprises 50K helium connected to said high-pressure main gas circuit Gas pipeline, load discharge pipeline connected to the 50K helium pipeline and the inlet of the load in the 50~75K temperature zone, temperature exchange pipeline connected to the 50K helium pipeline, connected to the 50~75K temperature zone The return line of the outlet of the load, and the helium passage line connected to the return line, the temperature exchange line and the first turboexpander unit, the 50K helium line is provided with a 50K helium pipe The temperature conversion pipeline is provided with a temperature conversion pipeline regulating valve and a temperature conversion pipeline heater, and the return pipeline is provided with a return pipeline regulation valve, wherein the temperature conversion pipeline is used for passing through the temperature conversion pipeline. The temperature exchange pipeline regulating valve and the temperature exchange pipeline heater are used to adjust the temperature of the helium in the return pipeline, so that the helium gas that enters the first turboexpander unit via the helium gas pipeline It can meet the requirements of the inlet temperature and pressure of the first turboexpander unit. 4.根据权利要求3所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述换热器组包括连接于所述高压主气路、所述中压回气路、所述低压回气路以及所述负压回气路的并依次设置的第一级换热器、第二级换热器、第三级换热器、第四级换热器以及第五级换热器,还包括连接于所述高压主气路、所述中压回气路、所述低压回气路的第六级换热器,连接于所述高压主气路和所述低压回气路的第七级换热器和第八级换热器,以及连接于所述过冷器的液相出口、所述气液分离器的进口与气相出口和所述2K负载的出口的第九级换热器,其中所述气液分离器排出的氦气和所述2K负载的回气汇合后进入所述第九级换热器中进行换热,换热后的氦气经由所述冷压缩机组入口兑温管路兑温后进入所述冷压缩机组。4. the superfluid helium refrigerator with independent load test cold box according to claim 3, is characterized in that, described heat exchanger group comprises and is connected with described high-pressure main gas circuit, described medium pressure return gas circuit, The first-stage heat exchanger, the second-stage heat exchanger, the third-stage heat exchanger, the fourth-stage heat exchanger, and the fifth-stage heat exchanger of the low-pressure return air circuit and the negative-pressure return air circuit are arranged in sequence. The heat exchanger also includes a sixth-stage heat exchanger connected to the high-pressure main gas circuit, the medium-pressure return gas circuit, and the low-pressure return gas circuit, connected to the high-pressure main gas circuit and the low-pressure return gas circuit The seventh-stage heat exchanger and the eighth-stage heat exchanger of the gas circuit, and the first stage connected to the liquid phase outlet of the subcooler, the inlet and gas phase outlet of the gas-liquid separator, and the outlet of the 2K load Nine-stage heat exchanger, wherein the helium gas discharged from the gas-liquid separator and the return gas of the 2K load are combined and then enter the ninth-stage heat exchanger for heat exchange, and the helium gas after heat exchange passes through the The inlet temperature conversion pipeline of the cold compressor unit enters the cold compressor unit after being warmed. 5.根据权利要求4所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述多通道传输管线包括第一管路、第二管路、第三管路、第四管路、第五管路以及第六管路,所述50~75K温区负载通过所述第一管路连接所述负载去流管路,和通过所述第二管路连接所述回流管路;所述4.5~75K温区负载通过所述第三管路连接所述过冷器的液相出口,和通过所述第四管路连接所述低压回气路;所述第九级换热器通过所述第五管路连接于所述过冷器的液相出口,并通过所述第六管路连接于所述冷压缩机组入口兑温管路的进口。5. The superfluid helium refrigerator with independent load test cold box according to claim 4, characterized in that, the multi-channel transfer pipeline comprises a first pipeline, a second pipeline, a third pipeline, a fourth pipeline Pipeline, fifth pipeline and sixth pipeline, the load in the 50~75K temperature zone is connected to the load outflow pipeline through the first pipeline, and the return pipe is connected through the second pipeline road; the 4.5~75K temperature zone load is connected to the liquid phase outlet of the subcooler through the third pipeline, and connected to the low-pressure return gas circuit through the fourth pipeline; the ninth-stage replacement The heater is connected to the liquid phase outlet of the subcooler through the fifth pipeline, and connected to the inlet of the cold compressor unit inlet temperature conversion pipeline through the sixth pipeline. 6.根据权利要求4所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述冷压缩机组入口兑温管路包括管道兑温模块,所述管道兑温模块包括连接于所述低压回气路和所述冷压缩机组的进口的第一兑温管路和设置在所述第一兑温管路上的第一兑温调节阀。6. The superfluid helium refrigerator with independent load test cold box according to claim 4, characterized in that, the inlet temperature exchange pipeline of the cold compressor unit includes a pipeline temperature exchange module, and the pipeline temperature exchange module includes a connecting The first temperature conversion pipeline between the low-pressure return air circuit and the inlet of the cold compressor unit, and the first temperature conversion regulating valve arranged on the first temperature conversion pipeline. 7.根据权利要求4或6所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述冷压缩机组入口兑温管路包括换热器兑温模块,所述换热器兑温模块包括连接于所述第九级换热器的出口以及所述冷压缩机组的进口的兑温换热器、连接于所述高压主气路和所述兑温换热器的进口的第二兑温管路、设置在所述第二兑温管路上的第二兑温调节阀、连接于所述兑温换热器的出口和所述高压主气路的第三兑温管路、以及设置在所述高压主气路上,并位于所述第二兑温管路和所述第三兑温管路之间的第三兑温调节阀。7. The superfluid helium refrigerator with an independent load test cold box according to claim 4 or 6, wherein the inlet temperature exchange pipeline of the cold compressor unit includes a heat exchanger temperature exchange module, and the heat exchange The temperature exchange module includes a temperature exchange heat exchanger connected to the outlet of the ninth stage heat exchanger and the inlet of the cold compressor unit, and connected to the high-pressure main gas circuit and the inlet of the temperature exchange heat exchanger The second temperature conversion pipeline, the second temperature conversion regulating valve arranged on the second temperature conversion pipeline, the third temperature conversion tube connected to the outlet of the temperature conversion heat exchanger and the high-pressure main gas circuit road, and a third temperature-converting regulating valve arranged on the high-pressure main gas circuit and between the second temperature-converting pipeline and the third temperature-converting pipeline. 8.根据权利要求4至6中任一项所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述高压主气路和所述过冷器之间还设置有节流阀组,所述节流阀组包括并联设置的第一节流阀和第二节流阀,所述过冷器的气相出口和所述低压回气路之间还设置有回气阀,所述第九级换热器和所述气液分离器的进口之间还设置有第三节流阀,所述第九级换热器和所述第三节流阀均设置于所述负载测试冷箱内;8. The superfluid helium refrigerator with an independent load test cold box according to any one of claims 4 to 6, characterized in that, a joint is also arranged between the high-pressure main gas circuit and the subcooler A throttling valve group, the throttling valve group includes a first throttle valve and a second throttle valve arranged in parallel, and a gas return valve is also arranged between the gas phase outlet of the subcooler and the low pressure return gas circuit, A third throttling valve is also set between the ninth stage heat exchanger and the inlet of the gas-liquid separator, and both the ninth stage heat exchanger and the third throttling valve are set at the load Test in the cold box; 其中所述高压主气路输出的一部分超临界氦经过所述第一节流阀节流为气液两相,液相在所述过冷器中积液,气相通过所述回气阀进入所述低压回气路;另一部分超临界氦经所述第二节流阀节流后进入所述过冷器中,被所述过冷器积液的液氦过冷形成过冷超临界氦,过冷超临界氦自所述过冷器流出,一部分供给所述4.5~75K温区负载,另一部分进入所述第九级换热器,经过所述第三节流阀节流为气液两相,液相在所述气液分离器中积液,气相自所述气液分离器的气相出口排出,与所述2K负载的回气汇合进入所述第九级换热器中换热,换热后的氦气经所述冷压缩机组入口兑温管路兑温后进入所述冷压缩机组。Wherein, a part of the supercritical helium output from the high-pressure main gas circuit is throttled by the first throttle valve into gas-liquid two-phase, the liquid phase accumulates liquid in the subcooler, and the gas phase enters the gas-liquid two-phase through the gas return valve. The low-pressure return gas circuit; another part of supercritical helium enters the subcooler after being throttled by the second throttle valve, and is supercooled by the liquid helium accumulated in the subcooler to form supercooled supercritical helium, Supercooled supercritical helium flows out from the subcooler, part of which is supplied to the load in the 4.5-75K temperature zone, and the other part enters the ninth-stage heat exchanger, and is throttled by the third throttle valve into gas-liquid phase, the liquid phase accumulates liquid in the gas-liquid separator, the gas phase is discharged from the gas phase outlet of the gas-liquid separator, merges with the return gas of the 2K load and enters the ninth stage heat exchanger for heat exchange, The heat-exchanged helium enters the cold compressor unit after being warmed through the temperature exchange pipeline at the inlet of the cold compressor unit. 9.根据权利要求8所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述冷压缩机组包括串联设置的第六入口调节阀、第一冷压缩机、第二冷压缩机、第三冷压缩机、第四冷压缩机以及第一出口调节阀,所述超流氦制冷机还包括并联于所述冷压缩机组的冷压缩机组旁通管路和设置于所述冷压缩机组旁通管路上的旁路调节阀。9. The superfluid helium refrigerator with independent load test cold box according to claim 8, characterized in that, the cold compressor unit comprises the sixth inlet regulating valve, the first cold compressor, the second cold compressor arranged in series compressor, the third cold compressor, the fourth cold compressor, and the first outlet regulating valve, and the superfluid helium refrigerator also includes a cold compressor unit bypass line connected in parallel with the cold compressor unit and arranged on the The bypass regulating valve on the bypass line of the cold compressor unit. 10.根据权利要求9所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述超流氦制冷机还包括连接于所述第四透平膨胀机组的出口和所述低压回气路的冷箱旁通管路和设置在所述冷箱旁通管路上的冷箱旁通阀。10. The superfluid helium refrigerator with independent load test cold box according to claim 9, characterized in that, the superfluid helium refrigerator also includes an outlet connected to the fourth turboexpander unit and the The cold box bypass line of the low-pressure return air circuit and the cold box bypass valve arranged on the cold box bypass line. 11.根据权利要求4至6中任一项所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述超流氦制冷机还包括低温吸附器组,所述低温吸附器组包括用于吸附氦气中的杂质气体的80K低温吸附器和20K低温吸附器,所述80K低温吸附器和所述20K低温吸附器均设置在所述高压主气路上,且所述80K低温吸附器位于所述第二级换热器和所述第三级换热器之间,所述20K低温吸附器位于所述第六级换热器和所述第七级换热器之间。11. The superfluid helium refrigerator with an independent load test cold box according to any one of claims 4 to 6, characterized in that, the superfluid helium refrigerator also includes a low-temperature adsorber group, and the low-temperature adsorption The device group includes an 80K cryogenic adsorber and a 20K cryogenic adsorber for adsorbing impurity gases in helium, the 80K cryogenic adsorber and the 20K cryogenic adsorber are both arranged on the high-pressure main gas path, and the 80K The low-temperature adsorber is located between the second-stage heat exchanger and the third-stage heat exchanger, and the 20K low-temperature adsorber is located between the sixth-stage heat exchanger and the seventh-stage heat exchanger . 12.根据权利要求11所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述80K低温吸附器为两个,两个所述80K低温吸附器并联,并切换使用。12. The superfluid helium refrigerator with an independent load test cold box according to claim 11, wherein there are two 80K cryogenic adsorbers, and the two 80K cryogenic adsorbers are connected in parallel and switched for use. 13.根据权利要求11所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述氦气预冷模块包括连接于所述高压主气路的氦气通路调节阀、连接于所述氦气通路调节阀的液氮预冷换热器、连接于所述液氮预冷换热器的液氮进口管路、以及设置于所述液氮进口管路的液氮进口调节阀,所述液氮预冷换热器的出口连接于所述高压主气路,并位于所述第二级换热器的出口和所述80K低温吸附器的入口之间,所述氦气预冷模块通过所述液氮进口管路通入的液氮对所述常温高压氦气进行预冷,并通过所述氦气通路调节阀调节进入所述液氮预冷换热器的氦气量,和通过所述液氮进口调节阀调节进入所述液氮预冷换热器的液氮量。13. The superfluid helium refrigerator with independent load test cold box according to claim 11, characterized in that, the helium precooling module comprises a helium passage regulating valve connected to the high-pressure main gas circuit, a connection The liquid nitrogen pre-cooling heat exchanger connected to the liquid nitrogen pre-cooling heat exchanger of the helium passage regulating valve, the liquid nitrogen inlet pipeline connected to the liquid nitrogen pre-cooling heat exchanger, and the liquid nitrogen inlet adjustment set on the liquid nitrogen inlet pipeline Valve, the outlet of the liquid nitrogen pre-cooling heat exchanger is connected to the high-pressure main gas circuit, and is located between the outlet of the second-stage heat exchanger and the inlet of the 80K cryogenic adsorber, and the helium The precooling module precools the normal temperature and high pressure helium by the liquid nitrogen fed through the liquid nitrogen inlet pipeline, and adjusts the amount of helium entering the liquid nitrogen precooling heat exchanger through the helium passage regulating valve , and adjust the amount of liquid nitrogen entering the liquid nitrogen precooling heat exchanger through the liquid nitrogen inlet regulating valve. 14.根据权利要求13所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述氦气预冷模块包括由第一透平、第二透平、第三透平串联组成的预冷透平膨胀机组和设置在所述第一级换热器的出口和所述第一透平的进口之间的第一入口调节阀,所述预冷透平膨胀机组的出口连接于所述中压回气路。14. The superfluid helium refrigerator with independent load test cold box according to claim 13, characterized in that, the helium precooling module comprises a first turbine, a second turbine, and a third turbine connected in series A pre-cooling turbo-expansion unit composed of a first inlet regulating valve arranged between the outlet of the first-stage heat exchanger and the inlet of the first turbine, the outlet of the pre-cooling turbo-expander unit is connected to In the medium pressure return air circuit. 15.根据权利要求11所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述第一透平膨胀机组包括串联设置的第四透平和第五透平,以及设置在所述第三级换热器的出口和所述第四透平的进口之间的第二入口调节阀,所述第四透平的进口连接于所述50~75K温区负载兑温管路的所述氦气通过管路,所述第五透平的出口连接于所述中压回气路。15. The superfluid helium refrigerator with independent load test cold box according to claim 11, characterized in that, the first turboexpander unit comprises a fourth turbine and a fifth turbine arranged in series, and is arranged at A second inlet regulating valve between the outlet of the third-stage heat exchanger and the inlet of the fourth turbine, the inlet of the fourth turbine is connected to the load temperature conversion pipeline in the 50~75K temperature zone The helium gas passes through the pipeline, and the outlet of the fifth turbine is connected to the medium pressure return gas circuit. 16.根据权利要求15所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述第二透平膨胀机组包括串联设置的第六透平和第七透平,以及设置在所述第五级换热器的出口和所述第六透平的进口之间的第三入口调节阀,所述第七透平的出口连接所述中压回气路。16. The superfluid helium refrigerator with independent load test cold box according to claim 15, characterized in that, the second turboexpander unit includes the sixth turbine and the seventh turbine arranged in series, and is arranged at A third inlet regulating valve between the outlet of the fifth-stage heat exchanger and the inlet of the sixth turbine, and the outlet of the seventh turbine is connected to the medium-pressure return gas path. 17.根据权利要求16所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述第三透平膨胀机组包括串联设置的第八透平和第九透平,以及设置在所述20K低温吸附器的出口和所述第八透平的进口之间的第四入口调节阀,所述第九透平的出口连接于所述低压回气路。17. The superfluid helium refrigerator with independent load test cold box according to claim 16, characterized in that, the third turboexpander unit includes the eighth turbine and the ninth turbine arranged in series, and is arranged at The fourth inlet regulating valve is between the outlet of the 20K cryogenic adsorber and the inlet of the eighth turbine, and the outlet of the ninth turbine is connected to the low-pressure return gas path. 18.根据权利要求17所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述第四透平膨胀机组包括第十透平、设置在所述第七级换热器的出口和所述第十透平的进口之间的第五入口调节阀以及设置在所述高压主气路上,并位于所述第七级换热器和所述第八级换热器之间的末级透平旁通阀,所述第十透平的出口连接于所述高压主气路。18. The superfluid helium refrigerator with an independent load test cold box according to claim 17, characterized in that, the fourth turboexpansion unit includes a tenth turbine arranged in the seventh stage heat exchanger The fifth inlet regulating valve between the outlet of the tenth turbine and the inlet of the tenth turbine is set on the high-pressure main gas path, and is located between the seventh-stage heat exchanger and the eighth-stage heat exchanger The last-stage turbine bypass valve, the outlet of the tenth turbine is connected to the high-pressure main gas path. 19.根据权利要求4至6中任一项所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述超流氦制冷机还包括气体管理面板,所述气体管理面板包括连接于所述高压主气路和所述中压回气路的中压旁通阀、连接所述高压主气路和所述低压回气路的低压旁通阀、连接于所述低压回气路和所述高压主气路的加载阀与缓冲罐卸载阀、以及连接于所述加载阀和所述缓冲罐卸载阀之间的缓冲罐。19. The superfluid helium refrigerator with an independent load test cold box according to any one of claims 4 to 6, wherein the superfluid helium refrigerator further comprises a gas management panel, the gas management panel It includes a medium-pressure bypass valve connected to the high-pressure main air circuit and the medium-pressure return air circuit, a low-pressure bypass valve connected to the high-pressure main air circuit and the low-pressure return air circuit, and a low-pressure bypass valve connected to the low-pressure return air circuit. A loading valve and a buffer tank unloading valve of the gas circuit and the high-pressure main gas circuit, and a buffer tank connected between the loading valve and the buffer tank unloading valve. 20.根据权利要求4至6中任一项所述的具有独立负载测试冷箱的超流氦制冷机,其特征在于,所述超流氦制冷机还包括设置在所述负压压缩机和所述高压压缩机之间的单向阀,所述单向阀用于防止所述负压压缩机的出口氦气逆流。20. The superfluid helium refrigerator with independent load test cold box according to any one of claims 4 to 6, characterized in that, the superfluid helium refrigerator also includes A one-way valve between the high-pressure compressors, the one-way valve is used to prevent backflow of helium at the outlet of the negative-pressure compressor.
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