CN114785328B - Electrostatic excitation circuit and control system of metal shell resonant gyroscope - Google Patents
Electrostatic excitation circuit and control system of metal shell resonant gyroscope Download PDFInfo
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Abstract
本发明公开了一种静电激励电路及金属壳谐振陀螺的控制系统。其中，该静电激励电路包括：激励电路，被配置为生成静电力作为金属谐振子中质量块的驱动力；电容极板，被配置为基于所述驱动力，对所述质量块施加交变的静电力，激励所述质量块进行简谐运动，以驱动所述金属谐振子工作，其中，所述交变电压大于阈值电压。本发明解决了由于传统的静电激励电路采用接触式激励而导致的误差大、稳定性差的技术问题。
The present invention discloses an electrostatic excitation circuit and a control system of a metal shell resonant gyroscope. The electrostatic excitation circuit comprises: an excitation circuit configured to generate an electrostatic force as a driving force for a mass block in a metal resonator; a capacitor plate configured to apply an alternating electrostatic force to the mass block based on the driving force, to excite the mass block to perform simple harmonic motion, so as to drive the metal resonator to work, wherein the alternating voltage is greater than a threshold voltage. The present invention solves the technical problems of large errors and poor stability caused by contact excitation in traditional electrostatic excitation circuits.
Description
Technical Field
The invention relates to the field of circuits, in particular to an electrostatic excitation circuit and a control system of a metal shell resonance gyro.
Background
In recent years, as an important branch of a vibrating gyroscope, a metal shell resonant gyroscope has the characteristics of high structural strength, strong environment adaptability, wide dynamic range and the like, and not only has the inertia quality of a traditional vibrating gyroscope. The metal resonance gyro is called as a metal shell resonance gyro because the sensitive structure harmonic oscillator is made of metal. The basic difference between this resonant sensor and the other sensors is that resonance is typically achieved using a closed loop drive. The driving of the harmonic oscillator is divided into an excitation part and a detection part, and the metal harmonic oscillator needs enough excitation due to the metal material, so the design of an excitation circuit becomes an important research direction.
Compared with a common mechanical gyro, the resonant gyro has no rotating structure, and the driving mode is greatly different from that of the mechanical gyro. Common driving modes of the resonant gyroscope include electrostatic force, electromagnetic force, piezoelectric driving and the like. The traditional excitation method of the metal shell resonance gyroscope uses piezoelectric excitation, piezoelectric electrodes are closely attached to the free ends of the resonators, the contact excitation can influence the rigidity distribution of the resonators, so that the modal interference error is increased, and the stability and the range of the gyroscope are limited.
In view of the above problems, no effective solution has been proposed at present.
Disclosure of Invention
The embodiment of the invention provides an electrostatic excitation circuit and a control system of a metal shell resonant gyroscope, which are used for at least solving the technical problems of large error and poor stability caused by the adoption of contact excitation in the traditional electrostatic excitation circuit.
According to an aspect of an embodiment of the present invention, there is provided an electrostatic excitation circuit including:
An excitation circuit configured to generate an electrostatic force as a driving force for a mass in the metal resonator;
And the capacitor polar plate is configured to apply alternating electrostatic force to the mass block based on the driving force and excite the mass block to perform simple harmonic motion so as to drive the metal harmonic oscillator to work, wherein the alternating voltage is larger than a threshold voltage.
According to another aspect of the embodiment of the invention, a control system of the metal shell resonant gyro is also provided, and the control system comprises the metal shell resonant gyro and the electrostatic excitation circuit, wherein the metal shell resonant gyro is used for acquiring inertial navigation data, and the electrostatic excitation circuit is used for exciting the metal shell resonant gyro.
According to the embodiment of the invention, the electrostatic excitation method further comprises the steps of generating an electrostatic force to serve as a driving force of a mass block in the metal harmonic oscillator, and applying alternating electrostatic force to the mass block by a capacitor plate based on the driving force to excite the mass block to perform simple harmonic motion so as to drive the metal harmonic oscillator to work, wherein the alternating voltage is larger than a threshold voltage.
According to still another aspect of the embodiment of the present invention, there is also provided an inertial navigation system including the metal-shell resonator gyroscope as described above, for acquiring inertial navigation data.
In the embodiment of the invention, the electrostatic force is used as the driving force of the mass block in the harmonic oscillator, the high-voltage alternating voltage is applied to the two capacitance polar plates, the alternating electrostatic force is applied to the mass block, the simple harmonic motion of the mass block is excited, and the metal harmonic oscillator is driven to work, so that the technical problems of large error and poor stability caused by the adoption of contact excitation in the traditional electrostatic excitation circuit are solved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:
FIG. 1 is a schematic diagram of parallel plate capacitance according to an embodiment of the invention;
FIG. 2 is a schematic illustration of a double sided comb electrode according to an embodiment of the present invention;
FIG. 3 is a circuit diagram of an excitation circuit according to an embodiment of the present invention;
fig. 4 is a circuit diagram of a high voltage circuit according to an embodiment of the invention;
fig. 5 is a circuit diagram of a dc-to-dc conversion module according to an embodiment of the present invention;
Fig. 6 is a schematic diagram of a reverse PWM wave according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of the output voltage of the half-bridge inverter module prior to filtering according to an embodiment of the invention;
FIG. 8 is a schematic diagram of a half-bridge inverter module filtered output voltage according to an embodiment of the invention;
FIG. 9 is a circuit diagram of another electrostatic actuation circuit according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of a control system for a metal shell resonator gyroscope according to an embodiment of the invention;
Fig. 11 is a flowchart of an electrostatic excitation method according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Interpretation of the terms
Electrostatic excitation, which is based on the principle that electrostatic forces simulate the action of sound waves, applies known electrostatic forces to the condenser microphone diaphragm (metallic or metallized) via auxiliary electrodes to effect a frequency response of the condenser microphone.
SUMMARY
The application provides an excitation circuit based on an electrostatic excitation method, which belongs to non-contact excitation and is widely applied to various silicon micro-vibration gyroscopes. The method uses electrostatic force as driving force for the mass block in the resonator. And high-voltage alternating voltage is applied to the two capacitor plates, alternating electrostatic force is applied to the mass block, the simple harmonic motion of the mass block is stimulated, and the metal harmonic oscillator is driven to work.
Example 1
According to the embodiment of the application, an electrostatic excitation circuit is provided for a microminiature metal shell resonant gyroscope, positive and negative high voltages input are converted into sinusoidal high voltages through a direct current inverter circuit, the sinusoidal high voltages are output and are applied to a pair of capacitor plates, the upper capacitor plate area and the lower capacitor plate area are S, the capacitor value is C, the distance is X, and capacitor plate voltages V 1 and V 2 are respectively applied, so that a mass block between plates is excited by an electrostatic force F d to carry out simple harmonic motion, the linear speed required by the Coriolis force is provided, and a metal resonator is driven to acquire a sensitive modal signal so as to calculate the angular speed. The embodiment of the application can be divided into two parts, namely an electrode design part and an excitation circuit part.
1) Electrode design
The capacitor plate is designed as a variable area double-sided comb electrode as shown in fig. 2. The upper and lower charged comb-shaped electrodes excite the comb-shaped mass block, the comb teeth of the mass block are positioned in the middle of the comb teeth of the electrodes, and the alternating current parts of the capacitor plate voltages V 1 and V 2 are in opposite phases respectively:
V1＝Vd+Vasinωt (1)
V2＝Vd-Vasinωt (2)
wherein V d represents a dc voltage amplitude, V a represents an ac voltage amplitude, ω represents an ac voltage frequency, and t represents time.
The electric field is formed by applying a sinusoidal high voltage to the capacitive plates, and the resulting electrostatic force and resultant force are:
Wherein F d1 represents the electrostatic force generated by the upper polar plate, n represents the number of movable comb teeth, x 0 represents the thickness of the comb teeth, d represents the distance between the fixed comb teeth and the movable comb teeth, F d represents the electrostatic resultant force of the upper polar plate and the lower polar plate, F d2 represents the electrostatic force generated by the lower polar plate, epsilon represents the vacuum dielectric constant, a represents the distance between the fixed comb teeth and the movable comb teeth in the initial state, and b represents the width of the comb teeth. The embodiment of the application introduces the distance a between the fixed comb teeth and the movable comb teeth in the initial state and the width b of the comb teeth to calculate the electrostatic force and the resultant force, so that the calculated electrostatic force and resultant force have higher precision.
The electrostatic resultant force of the upper electrode and the lower electrode enables the mass block to move, and the equation (5) shows that the electrostatic resultant force is not influenced by the overlapping area of the mass block and the electrode, and only when the voltage of the capacitor plate changes, the electrostatic resultant force changes, so that stable resonance movement is formed. In the embodiment of the application, the electrode material is selected from aluminum, the thickness of the electrode is 0.2 mu m, the pressing length of the bonding area is 20 mu m, the tooth width is 10 mu m, and the number of teeth is 10, which are suitable electrode design parameters.
2) Excitation circuit
The electrostatic exciting circuit adopts a switch type driving, and as shown in fig. 3, mainly comprises a high-voltage circuit 32 and a direct-current inverter circuit 34. The high-voltage circuit is responsible for generating positive and negative direct-current high voltage and inputting the positive and negative direct-current high voltage into the direct-current inverter circuit, the direct-current inverter circuit firstly uses 4 paths of PWM waves generated by the singlechip to carry out optical coupling isolation, the driving circuit is controlled to output driving signals, then the signals drive the half-bridge inverter template to work, the input positive and negative high voltage is inverted into high-voltage alternating square waves, and finally the high-voltage sine waves are output through the filter circuit, so that DC-AC conversion is completed.
The details of the individual circuits will be described below.
The high-voltage circuit generates +/-400V high voltage for the excitation circuit, DC-AC conversion is realized through the inverter circuit, and the AC high voltage can provide enough electrostatic force F d, so that the mass block m is fully excited, and the sensitivity S y of the metal harmonic oscillator is ensured. The following formulas (6) and (7)
Wherein, C represents the capacitance value between polar plates, V represents the polar plate voltage value, x represents the polar plate distance, s represents the polar plate area, omega d represents the driving angular frequency, and omega represents the driving mode natural angular frequency.
The circuit formed by the two LT3580 synchronous boost chips generates positive and negative high voltages respectively, taking the principle of generating positive voltage as an example, as shown in fig. 4. The 5V voltage is input to the chip power pin VIN and the start-up/shut-down pin SHDN through the input filter capacitor C2. An external compensation circuit formed by connecting a negative input end pin VC of an internal comparator with R3 and C5 in parallel with C3 is connected, a soft start pin SS is connected with a start capacitor C4, a synchronous input pin SYNC is grounded, an oscillator charging pin RT is connected with a large resistor R2, an output pin SW is connected with a transformer T1 and a Schottky diode D2 grounding protection circuit, and the transformer passes through a voltage-resistant diode D1 and an output filter capacitor C1 after transformation. The output voltage V OUT can be set by the feedback resistor R1And calculating an adaptive resistance value according to a formula so as to output +/-400V voltage.
The direct current inverter circuit can be further divided into an optical coupling isolation module, a driving module, a half-bridge inverter module and an RC filter module, as shown in FIG. 5.
The optical coupling isolation module uses PS2801-4 four-channel optical coupling isolators, each channel is not affected, and 10k shunt resistors R1R3R10R18 are respectively connected in parallel to realize conversion between electricity, light and electricity, so that signals at an output end can not affect signals at an input end, and the optical coupling isolation module has strong anti-interference capability and stable work. The four input signals PWM1 and PMW2 are a pair of mutually inverted PWM waves, and PWM3 and PMW4 are a pair of mutually inverted PWM waves, as shown in fig. 6. And the PWM1 and the PWM2 which pass through the isolator generate alternating signals by controlling the on-off of the triode and output the alternating signals to the HI pin of the rear gate driver, and the PWM3 and the PMW4 are similarly output to the LI pin of the rear gate driver.
The driving module uses UCC27714D with 600V high-end and low-end grid driver as main chip. The chip enable pin EN and the power supply pin VDD are connected to 12V, and the logic ground pin VSS is connected to-400V. The 12V power supply is connected into the chip HB through the fast recovery diode D1 and the current limiting resistor R2, and then is connected with the pin HS through the charging capacitor C2 to complete the bootstrap boost circuit. Capacitance C2 is selected according toC 2≥10×Cg. Gtoreq.76 nf, so 0.1nf is selected. The two paths of signals output by the optical coupling isolation template are respectively connected with a high-end input pin HI and a low-end input pin LI, and the outputs of pins HO and LO can be controlled according to the logic levels of pins HL and LI, see FIG. 5, and the outputs drive the on-off of the rear MOS tube to realize inversion. HS is the high-side output return pin and COM is the low-side output return pin. Wherein, C g represents the MOS transistor gate capacitance value, Q g represents the MOS transistor gate charge value, and V Q1g represents the MOS transistor gate voltage value.
TABLE 1
The half-bridge inversion module comprises a driver pin HO and a driver pin LO, wherein the output of the driver pin HO and the driver pin LO are respectively connected with the grid electrodes of two NMOS tubes Q3 and Q4, the HS pin and the COM pin are respectively connected with source electrodes, and the on-off of the NMOS is controlled so as to control the high-voltage conduction of +/-400V. Because the outputs of pins HO and LO are always high level and low level, the driving NMOS is alternately switched on and off, so that the alternating positive and negative high voltage outputs form square wave alternating voltage, as shown in figure 7. Because of the junction capacitance between the NMOS transistors DG and GS, the resistor-capacitor circuit formed by the parallel connection of R3, R4 and C3 releases the charges stored by the junction capacitance, the NMOS transistors are prevented from being damaged, and the fast recovery diode D2 can accelerate the turn-off speed of the MOS transistors.
And the RC filter module is a low-pass passive filter circuit formed by R1 and C1, and is used for filtering the square wave voltage of the rectified output, filtering out higher harmonic waves and leaving fundamental waves as sine wave output, as shown in figure 8.
The electrostatic excitation circuit provided by the embodiment of the application solves the problems of large excitation error, poor stability, stability and measuring range of a gyroscope and the like of the traditional contact type excitation circuit. In addition, the applied high-voltage alternating voltage can solve the problems that a metal harmonic oscillator cannot be sufficiently excited and the sensitivity is low.
Example 2
According to an embodiment of the present invention, there is provided an electrostatic excitation circuit, as shown in fig. 9, including an excitation circuit 92 configured to generate an electrostatic force as a driving force for a mass in a metal resonator, and a capacitor plate 94 configured to apply an alternating electrostatic force to the mass based on the driving force to excite the mass to perform a simple harmonic motion to drive the metal resonator to operate, wherein the alternating voltage is greater than a threshold voltage.
In an exemplary embodiment, the excitation circuit 92 includes a high voltage circuit configured to generate positive and negative dc high voltages, the dc high voltages being voltages equal to or greater than a voltage threshold, and a dc inversion circuit configured to invert the input positive and negative dc high voltages into a high voltage alternating square wave and to filter the high voltage alternating square wave into a high voltage sine wave.
In one exemplary embodiment, the direct current inversion circuit comprises an optical coupling isolation module, a driving module, a half-bridge inversion module and an RC filtering module, wherein the optical coupling isolation module is configured to perform electro-optical-electrical conversion on an input end signal, so that the input end signal cannot be influenced by an output end signal, the input end signal is a multi-channel PWM wave generated by a single chip microcomputer, the driving module is configured to output a driving signal based on the multi-channel PWM wave, the half-bridge inversion module is configured to invert positive and negative direct current into the high-voltage alternating square wave based on driving of the driving signal, and the RC filtering module is configured to filter the high-voltage alternating square wave and convert the high-voltage alternating square wave into the high-voltage sine wave.
In an exemplary embodiment, the optocoupler isolation module uses a four-channel optocoupler isolator, each of the four channels does not affect each other, and is respectively connected in parallel with a shunt resistor to realize the electro-optical-electrical conversion.
In one exemplary embodiment, the coupling isolator of each of the four-channel optocoupling isolators generates an alternating output signal by controlling the switching of a transistor based on the input PWM wave.
In an exemplary embodiment, the capacitive plate 94 is a variable area double-sided comb electrode plate electrode, and the capacitive plate 94 includes an upper and a lower charged comb electrode pair configured to apply a sinusoidal high voltage to form an electric field, generating the electrostatic force, and moving the mass.
In an exemplary embodiment, the material of each electrode of the electrode pair is aluminum, the thickness is 0.2 μm, each electrode of the electrode pair includes a plurality of electrode combs of 20 μm in length and 10 μm in width, and the plurality of electrode combs are pressed into a bonding area between the electrode pair and the mass, wherein the mass is located intermediate the electrode combs of the electrode pair.
Example 3
According to an embodiment of the present invention, there is provided a control system for a metal-shell resonator gyro, as shown in fig. 10, including a metal-shell resonator gyro 12, an electrostatic exciting circuit 14, a detecting circuit 16, and a data resolving assembly 18.
In this embodiment, the detection of the metal shell resonator gyro 12 is performed by a piezoelectric electrode attached to the vibrator wall, and the resonator mode is detected by using the piezoelectric effect of the piezoelectric electrode.
The detection circuit 16 is used to detect disturbances of the metal-shell resonator gyroscope 12. The data resolving component 18 is configured to calculate, based on the disturbance detected by the detection circuit 16, a control voltage for inputting the electrostatic exciting circuit 14, and the electrostatic exciting circuit 14 is configured to generate an electrostatic force based on the control voltage, where the electrostatic force is used as a driving force to control the mass of the metal shell resonator gyro 12 to perform simple harmonic motion so as to drive the metal resonator to operate.
The system of the metal shell resonance gyro can be regarded as a dual-input dual-output tracking system, and the tracking error of the detection circuit can be defined as
e(t)=X(t)-Xd(t) (8)
Can obtain the differential of the tracking error
According to the dynamics equation, determining the state equation of the metal shell resonance gyro as
Wherein,
In this state equation, F d is the input electrostatic force, and the linear term of F d is defined as the perturbation part of the model parameters.
And (3) designing an electrostatic excitation circuit according to the state equation of the analyzed metal shell resonant gyroscope and a given tracking error. Firstly, selecting a proportional-integral sliding mode surface, the following are provided:
Wherein s= [ s p sq]T, c is a constant coefficient matrix, satisfying cB is a full order matrix, and K e satisfying (A d+BKe) is a Hurwitz matrix. It can then be determined that the derivative of the slip form surface is
And a sliding mode control based on an approach law is selected, so that the sliding mode control has good robustness for the disturbance system. In this embodiment, the choice of approach law is made by selecting an exponential approach law, including
Where ε=diag { ε 1 ε2},k＝diag{k1 k2 }, then the slip-form control law is obtained
Wherein K *＝-(cB)-1c(a-ad),a-ad is the perturbation of the parameter and c is a constant. Obviously, since the parameter perturbation conditions A-A d and the disturbance r are unknown, the control law cannot be realized, and firstly, for the parameter perturbation conditions A-A d, the control law is designed by adopting an adaptive method
Wherein, Is an estimate of K *.
Defining the estimation error as
The final control law is obtained
Wherein K e is Hu Erwei-z matrix,The estimation of K *, K * is a measurement error, X (t) is a state quantity at the time t, e (t) is a tracking error, s (t) is a proportional integral sliding mode surface, cB is a full order matrix, K is a constant coefficient, r 1 and r 2 are disturbances of an X axis and a Y axis respectively, and u (t) represents a control voltage at the time t.
In this embodiment, the control system of the metal shell resonator gyro includes not only the electrostatic exciting circuit but also the detecting circuit and the data resolving component, thereby forming a control loop. Based on the disturbance detected by the detection circuit, the calculation is performed, so that the input voltage of the electrostatic excitation circuit can be changed in real time, the input voltage can be changed in a self-adaptive mode by the electrostatic excitation circuit, errors caused by the disturbance are reduced, and the mass block of the metal shell resonance gyro is driven to move more accurately.
Example 4
The embodiment of the invention also provides an electrostatic excitation method, as shown in fig. 11, comprising the following steps:
In step S1102, the excitation circuit generates an electrostatic force as a driving force for the mass in the metal resonator.
In one exemplary embodiment, a high-voltage circuit of the excitation circuit generates positive and negative direct current high voltages, the direct current high voltages are voltages greater than or equal to a voltage threshold, and a direct current inverter circuit of the excitation circuit inverts the input positive and negative direct current high voltages into high-voltage alternating square waves and converts the high-voltage alternating square waves into high-voltage sine waves through filtering.
In one exemplary embodiment, the direct current inverter circuit includes an optocoupler isolation module, a drive module, a half-bridge inverter module, and an RC filter module. The optical coupling isolation module performs electric-optical-electric conversion on an input end signal so that an output end signal cannot influence the input end signal, the input end signal is a multipath PWM wave generated by a singlechip, the driving module outputs a driving signal based on the multipath PWM wave, the half-bridge inversion module inverts positive and negative direct current high voltage into the high voltage alternating square wave based on driving of the driving signal, and the RC filter module filters the high voltage alternating square wave and converts the high voltage alternating square wave into the high voltage sine wave.
The optical coupling isolation module uses four-channel optical coupling isolators, each of the four channels is not affected by each other, and a shunt resistor is respectively connected in parallel to realize the electro-optical-electrical conversion. Based on the input PWM wave, the coupling isolator of each channel in the four-channel optical coupling isolator generates alternating output end signals by controlling the on-off of the triode
And step S1104, applying alternating electrostatic force to the mass block by the capacitor polar plate based on the driving force, and exciting the mass block to perform simple harmonic motion so as to drive the metal harmonic oscillator to work, wherein the alternating voltage is larger than a threshold voltage.
In one exemplary embodiment, the capacitive plate is a variable area double-sided comb electrode plate electrode, and the capacitive plate includes an upper and a lower charged comb electrode pair configured to apply a sinusoidal high voltage to form an electric field, generating the electrostatic force, and moving the mass.
In an exemplary embodiment, the material of each electrode of the electrode pair is aluminum with a thickness of 0.2 μm, and each electrode of the electrode pair includes a plurality of electrode combs of 20 μm in length and 10 μm in tooth width, the plurality of electrode combs being pressed into a bonding area between the electrode pair and the mass. Wherein the mass block is positioned in the middle of the electrode comb teeth of the electrode pair.
Example 5
The embodiment of the invention also provides a storage medium. Alternatively, in this embodiment, the above-described storage medium may implement the method in embodiment 4.
Alternatively, in the present embodiment, the storage medium may include, but is not limited to, a U disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a removable hard disk, a magnetic disk, or an optical disk, etc. various media that can store program codes.
The embodiment of the invention can also be configured as follows:
An electrostatic excitation circuit comprises an excitation circuit and a capacitor plate, wherein the excitation circuit is used for generating electrostatic force to serve as driving force of a mass block in a metal harmonic oscillator, the capacitor plate is used for applying alternating electrostatic force to the mass block based on the driving force to excite the mass block to perform simple harmonic motion so as to drive the metal harmonic oscillator to work, and the alternating voltage is larger than a threshold voltage.
The exciting circuit comprises a high-voltage circuit and a direct-current inversion circuit, wherein the high-voltage circuit is configured to generate positive and negative direct-current high voltages, the direct-current high voltages are voltages larger than or equal to a voltage threshold, and the direct-current inversion circuit is configured to invert the input positive and negative direct-current high voltages into high-voltage alternating square waves and convert the high-voltage alternating square waves into high-voltage sine waves through filtering.
The direct current inversion circuit comprises an optical coupling isolation module, a driving module, a half-bridge inversion module and an RC filtering module, wherein the optical coupling isolation module is configured to perform electric-optical-electric conversion on an input end signal, so that the input end signal cannot be influenced by an output end signal, the input end signal is a multipath PWM wave generated by a singlechip, the driving module is configured to output a driving signal based on the multipath PWM wave, the half-bridge inversion module is configured to invert positive and negative direct current high voltage into the high voltage alternating square wave based on driving of the driving signal, and the RC filtering module is configured to filter and convert the high voltage alternating square wave into the high voltage sine wave.
The optical coupling isolation module uses four-channel optical coupling isolators, each of the four channels is not affected by each other, and a shunt resistor is respectively connected in parallel to realize the electro-optical-electrical conversion.
Based on the input PWM wave, the coupling isolator of each channel in the four-channel optical coupling isolator generates alternating output end signals by controlling the on-off of the triode.
The capacitive polar plate is a variable-area double-sided comb-tooth electrode type plate electrode, and comprises an upper charged comb-tooth electrode pair and a lower charged comb-tooth electrode pair, wherein the electrode pair is configured to apply sine high voltage to form an electric field, and generate the electrostatic force to enable the mass block to move.
Wherein the material of each electrode in the electrode pair is aluminum and the thickness is 0.2 mu m, each electrode in the electrode pair comprises a plurality of electrode comb teeth with the length of 20 mu m and the tooth width of 10 mu m, and the plurality of electrode comb teeth are pressed into a bonding area between the electrode pair and the mass block.
Wherein the mass block is positioned in the middle of the electrode comb teeth of the electrode pair.
The control system of the metal shell resonance gyro comprises the metal shell resonance gyro and the electrostatic excitation circuit, wherein the metal shell resonance gyro is used for acquiring inertial navigation data, and the electrostatic excitation circuit is used for exciting the metal shell resonance gyro.
The control system further comprises a detection circuit and a data resolving component, wherein the detection circuit is configured to detect disturbance of the metal shell resonance gyroscope, and the data resolving component is configured to generate a control voltage based on the disturbance and input the control voltage to the electrostatic exciting circuit as the direct-current high voltage.
Wherein the control voltage is generated based on the following formula:
wherein K e is Hu Erwei-z matrix, The estimation of K *, K * is a measurement error, X (t) is a state quantity at the time t, e (t) is a tracking error, s (t) is a proportional integral sliding mode surface, cB is a full order matrix, K is a constant coefficient, r 1 and r 2 are disturbances of an X axis and a Y axis respectively, and u (t) represents a control voltage at the time t.
An electrostatic excitation method comprises the steps of generating an electrostatic force to serve as driving force of a mass block in a metal harmonic oscillator, and applying alternating electrostatic force to the mass block by a capacitor polar plate based on the driving force to excite the mass block to perform simple harmonic motion so as to drive the metal harmonic oscillator to work, wherein the alternating voltage is larger than a threshold voltage.
A control method of the metal shell resonance gyro comprises the steps of collecting inertial navigation data by the metal shell resonance gyro and exciting the metal shell resonance gyro by the electrostatic exciting circuit.
The detection circuit detects disturbance of the metal shell resonance gyroscope, the data resolving component generates control voltage based on the disturbance, and the control voltage is input to the electrostatic excitation circuit to serve as the direct-current high voltage.
Wherein the control voltage is generated based on the following formula:
wherein K e is Hu Erwei-z matrix, The estimation of K *, K * is a measurement error, X (t) is a state quantity at the time t, e (t) is a tracking error, s (t) is a proportional integral sliding mode surface, cB is a full order matrix, K is a constant coefficient, r 1 and r 2 are disturbances of an X axis and a Y axis respectively, and u (t) represents a control voltage at the time t.
It should be noted that, for simplicity of description, the foregoing method embodiments are all described as a series of acts, but it should be understood by those skilled in the art that the present invention is not limited by the order of acts described, as some steps may be performed in other orders or concurrently in accordance with the present invention. Further, those skilled in the art will also appreciate that the embodiments described in the specification are all preferred embodiments, and that the acts and modules referred to are not necessarily required for the present invention.
From the description of the above embodiments, it will be clear to a person skilled in the art that the method according to the above embodiments may be implemented by means of software plus the necessary general hardware platform, but of course also by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solution of the present invention may be embodied essentially or in a part contributing to the prior art in the form of a software product stored in a storage medium (e.g. ROM/RAM, magnetic disk, optical disk) comprising instructions for causing a terminal device (which may be a mobile phone, a computer, a server, or a network device, etc.) to perform the method according to the embodiments of the present invention.
The foregoing embodiment numbers of the present invention are merely for the purpose of description, and do not represent the advantages or disadvantages of the embodiments.
The integrated units in the above embodiments may be stored in the above-described computer-readable storage medium if implemented in the form of software functional units and sold or used as separate products. Based on such understanding, the technical solution of the present invention may be embodied in essence or a part contributing to the prior art or all or part of the technical solution in the form of a software product stored in a storage medium, comprising several instructions for causing one or more computer devices (which may be personal computers, servers or network devices, etc.) to perform all or part of the steps of the method described in the embodiments of the present invention.
In the foregoing embodiments of the present invention, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
In several embodiments provided by the present application, it should be understood that the disclosed client may be implemented in other manners. The above-described embodiments of the apparatus are merely exemplary, and the division of the units, such as the division of the units, is merely a logical function division, and may be implemented in another manner, for example, multiple units or components may be combined or may be integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some interfaces, units or modules, or may be in electrical or other forms.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (8)
1. A control system for a metal shell resonator gyroscope, comprising:
the metal shell resonance gyroscope is used for acquiring inertial navigation data;
The electrostatic excitation circuit is used for exciting the metal shell resonant gyroscope;
The electrostatic excitation circuit comprises an excitation circuit, a capacitance polar plate, a first electrode and a second electrode, wherein the excitation circuit is used for generating electrostatic force as driving force of a mass block in a metal harmonic oscillator;
The control system further comprises a detection circuit and a data resolving component, wherein the detection circuit is configured to detect disturbance of the metal shell resonance gyroscope, and the data resolving component is configured to generate a control voltage based on the disturbance and input the control voltage to the electrostatic exciting circuit as the direct-current high voltage;
wherein the control voltage is generated based on the following formula:
wherein K e is Hu Erwei-z matrix, The estimation of K *, K * is a measurement error, X (t) is a state quantity at the time t, e (t) is a tracking error, s (t) is a proportional integral sliding mode surface, cB is a full order matrix, K is a constant coefficient, r 1 and r 2 are disturbances of an X axis and a Y axis respectively, and u (t) represents a control voltage at the time t.
2. The system of claim 1, wherein the excitation circuit comprises:
A high voltage circuit configured to generate positive and negative direct current high voltages, the direct current high voltages being voltages equal to or greater than a voltage threshold, wherein the direct current high voltages are direct current voltages having voltages greater than the threshold voltage;
And the direct current inversion circuit is configured to invert the input positive and negative direct current into a high-voltage alternating square wave, and convert the high-voltage alternating square wave into a high-voltage sine wave through filtering.
3. The system of claim 2, wherein the dc-to-dc inverter circuit comprises:
The optical coupling isolation module is configured to perform electro-optical-electrical conversion on an input end signal, so that an output end signal does not affect the input end signal, and the input end signal is a multipath PWM wave generated by a singlechip;
a driving module configured to output a driving signal based on the plurality of PWM waves;
The half-bridge inversion module is configured to invert the positive and negative direct current high voltage into the high-voltage alternating square wave based on the driving of the driving signal;
and the RC filter module is configured to convert the high-voltage alternating square wave into the high-voltage sine wave through filter processing.
4. The system of claim 3, wherein the optocoupler isolation module uses four-channel optocoupler isolators, each of the four channels being independent of each other and each being connected in parallel with a shunt resistor to effect the electro-optic-to-electrical conversion.
5. The system of claim 4, wherein the coupling isolator of each of the four-channel optocoupling isolators generates an alternating output signal by controlling transistor switching based on the input PWM wave.
6. The system of claim 1, wherein the capacitive plate is a variable area double-sided comb electrode plate electrode comprising upper and lower charged comb electrode pairs configured to apply a sinusoidal high voltage to form an electric field, generating the electrostatic force, causing the mass to move.
7. The system of claim 6, wherein the material of each electrode in the pair of electrodes is aluminum and has a thickness of 0.2 μm, each electrode in the pair of electrodes comprising a plurality of electrode combs having a length of 20 μm and a tooth width of 10 μm, the plurality of electrode combs being pressed into a bonding area between the pair of electrodes and the mass.
8. The system of claim 7, wherein the mass is positioned intermediate electrode combs of the electrode pair.
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