CN114760747B - Microwave plasma torch generator - Google Patents
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- CN114760747B CN114760747B CN202210585716.7A CN202210585716A CN114760747B CN 114760747 B CN114760747 B CN 114760747B CN 202210585716 A CN202210585716 A CN 202210585716A CN 114760747 B CN114760747 B CN 114760747B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
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Abstract
本公开提供一种微波等离子体火炬产生装置，包括：输入波导，用于输入微波；渐变波导，包括第一渐变波导段和第二渐变波导段，第一渐变波导段和第二渐变波导段用于对微波的功率进行分配得到第一微波和第二微波，其中，第一微波的功率高于第二微波的功率；同轴谐振腔，用于根据第二微波产生高强度电场；石英玻璃管为微波等离子体火焰的反应腔，用于在高强度电场的作用下，根据气体分子产生微波等离子体火焰，圆柱谐振腔用于根据第一微波产生一定强度的电场以维持等离子体火焰。该微波等离子体火炬产生装置产生的等离子体火炬等离子体体积更大，气体处理距离更长，无需机械点火装置进行触发且消耗能量更低。
The present disclosure provides a microwave plasma torch generating device, comprising: an input waveguide for inputting microwaves; a gradient waveguide, comprising a first gradient waveguide section and a second gradient waveguide section, the first gradient waveguide section and the second gradient waveguide section are used to distribute the power of microwaves to obtain a first microwave and a second microwave, wherein the power of the first microwave is higher than the power of the second microwave; a coaxial resonant cavity, used to generate a high-intensity electric field according to the second microwave; a quartz glass tube as a reaction cavity of a microwave plasma flame, used to generate a microwave plasma flame according to gas molecules under the action of a high-intensity electric field, and a cylindrical resonant cavity used to generate an electric field of a certain intensity according to the first microwave to maintain the plasma flame. The plasma torch generated by the microwave plasma torch generating device has a larger plasma volume, a longer gas processing distance, does not require a mechanical ignition device for triggering, and consumes less energy.
Description
Technical Field
The disclosure relates to the technical field of microwave plasma, in particular to a microwave plasma torch generating device.
Background
The plasma is a fourth state of matter other than solids, liquids, and gases. The plasma belongs to ionized gas, and mainly consists of neutral atoms or molecules, atoms or molecules in an excited state, free radicals, electrons or positive and negative ions and radiation photons, wherein the negative charge number is the same as the positive charge number, so that the plasma is macroscopically electrically neutral. The microwave plasma generating principle is to utilize a waveguide device to inject microwave energy into gas molecules to induce the gas molecules to generate a series of reactions such as excitation, ionization and the like, so as to generate high-reactivity plasma, and the characteristic of a microwave electromagnetic field cavity structure can limit the plasma generated by excitation ionization in a specific space and realize the transmission of the plasma [1]. Compared with other methods for generating plasmas, the microwave plasmas have a plurality of advantages, such as high ionization degree, wide adaptive pressure range, high electron density, easy regulation and control of microwave and plasma characteristics and the like, so that the research of the microwave plasma technology has greater practical application value.
At one atmosphere, the breakdown field strength of air is 3X 10 6 V/m. The most common solutions in microwave cavities include increasing the microwave input power or decreasing the size of the microwave cavity in order to generate the high electric field strength required for the plasma. Increasing the input power of microwaves can increase the microwave field strength per unit volume, which is advantageous for increasing the electric field strength, but the increase in microwave power is limited. The size of the microwave resonant cavity is reduced, so that an electric field is more concentrated, the field intensity is greatly enhanced, and the implementation and personalized design are facilitated. Therefore, the conventional microwave plasma torch most commonly adopts a compressed waveguide structure, which can reduce the volume of a resonant cavity to concentrate an electric field to increase the electric field strength, or a resonant cavity structure with a plurality of input ends to provide larger microwave power. However, the volume of the plasma generated by the resonant cavity structure is small, the gas treatment distance is short, the isolation difficulty between the multiple ports is high, higher power input is required, and a mechanical ignition device is usually required to be additionally arranged for triggering.
Disclosure of Invention
In view of the above technical problems, an embodiment of the disclosure provides a microwave plasma torch generating device, which comprises an input waveguide for inputting microwaves, a graded waveguide including a first graded waveguide section and a second graded waveguide section, wherein the first graded waveguide section and the second graded waveguide section are used for distributing power of the microwaves to obtain first microwaves and second microwaves, the power of the first microwaves is higher than that of the second microwaves, a coaxial resonant cavity for generating a high-intensity electric field according to the second microwaves, and a cylindrical resonant cavity, wherein a quartz glass tube is arranged at the center of the cylindrical resonant cavity and is a reaction cavity of microwave plasma flame and used for generating the microwave plasma flame according to gas molecules under the action of the high-intensity electric field, and the cylindrical resonant cavity is used for generating an electric field with certain intensity according to the first microwaves so as to maintain the plasma flame.
According to the embodiment of the disclosure, the distribution ratio of the power of the first graded waveguide section to the power of the second graded waveguide section to the power of the microwaves is 3:1.
According to the embodiment of the disclosure, the microwave plasma torch generating device further comprises a connecting waveguide and a coupling port, wherein one end of the connecting waveguide is connected with the first gradual change waveguide section, and the other end of the connecting waveguide is connected to the cylindrical resonant cavity through the coupling port so as to feed first microwaves into the cylindrical resonant cavity.
According to the embodiment of the disclosure, the microwave plasma torch generating device further comprises a short circuit waveguide connected with the second gradual change waveguide section, a coupling probe connected with the short circuit waveguide and used for concentrating second microwaves, a coaxial inner conductor and a coaxial outer conductor, wherein the coaxial outer conductor is sleeved outside the coaxial inner conductor and coaxial with the coaxial inner conductor, one ends of the coaxial inner conductor and the coaxial outer conductor are connected to the coupling probe, and the other ends of the coaxial inner conductor and the coaxial outer conductor are connected to the coaxial resonant cavity and used for transmitting the second microwaves to the coaxial resonant cavity.
According to the embodiment of the disclosure, the coaxial resonant cavity comprises a coaxial resonant cavity inner conductor used for generating a high-strength electric field according to second microwaves, one end of the coaxial resonant cavity inner conductor is open, the other end of the coaxial resonant cavity inner conductor is short-circuited, one end of the open end is inserted into a quartz glass tube, and a coaxial resonant cavity shell is used for supporting to fix the coaxial resonant cavity inner conductor.
According to an embodiment of the present disclosure, the diameter of the conductor in the coaxial resonator gradually decreases in a direction in which the open end points to the short end.
According to the embodiment of the disclosure, one end of the quartz glass tube, which is close to the coaxial resonant cavity, is further provided with an air inlet tube, and the air inlet tube forms a preset angle with the central axis of the quartz glass tube.
According to an embodiment of the disclosure, the air inlet pipe is symmetrically distributed on both sides of the central axis of the quartz glass tube.
According to an embodiment of the present disclosure, wherein the surface of the quartz glass tube not covered by the cylindrical resonator is covered with a metallic cylinder.
According to an embodiment of the present disclosure, the input waveguide and the connection waveguide are rectangular waveguides.
Drawings
The above and other objects, features and advantages of the present disclosure will become more apparent from the following description of embodiments thereof with reference to the accompanying drawings in which:
Fig. 1 schematically illustrates a front view of a structure of a microwave plasma torch generating apparatus according to an embodiment of the present disclosure.
Fig. 2 schematically illustrates a top view of the structure of a microwave plasma torch generating apparatus according to an embodiment of the disclosure.
[ Reference numerals description ]
1-Input waveguide, 2-graded waveguide, 201-first graded waveguide section, 202-second graded waveguide section, 3-coaxial resonant cavity, 301-coaxial resonant cavity inner conductor, 302-coaxial resonant cavity shell, 4-cylindrical resonant cavity, 5-quartz glass tube, 501-air inlet tube, 6-connecting waveguide, 7-coupling port, 8-short circuit waveguide, 9-coupling probe, 10-coaxial inner conductor, 11-coaxial outer conductor and 12-metal cylinder.
Detailed Description
For the purposes of promoting an understanding of the principles and advantages of the disclosure, reference will now be made to the embodiments illustrated in the drawings and specific language will be used to describe the same. It will be apparent that the described embodiments are some, but not all, of the embodiments of the present disclosure. Based on the embodiments in this disclosure, all other embodiments that a person of ordinary skill in the art would obtain without making any inventive effort are within the scope of protection of this disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
In the present disclosure, unless explicitly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, as being detachably connected, as being integral, as being mechanically connected, as being electrically connected, as being communicable with each other, as being directly connected, as being indirectly connected through an intervening medium, as being in communication between two elements or as being an interaction relationship between two elements. The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.
In the description of the present disclosure, it should be understood that the terms "longitudinal," "length," "circumferential," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like indicate an orientation or a positional relationship based on that shown in the drawings, merely to facilitate description of the present disclosure and to simplify the description, and do not indicate or imply that the subsystem or element being referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present disclosure.
Like elements are denoted by like or similar reference numerals throughout the drawings. Conventional structures or constructions will be omitted when they may obscure the understanding of this disclosure. And the shape, size and position relation of each component in the figure do not reflect the actual size, proportion and actual position relation. In addition, in the present disclosure, any reference signs placed between parentheses shall not be construed as limiting the disclosure.
Similarly, in the foregoing description of exemplary embodiments of the disclosure, various features of the disclosure are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of one or more of the various disclosed aspects. The description of the reference to the terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present disclosure, the meaning of "a plurality" is at least two, such as two, three, etc., unless explicitly specified otherwise.
In order to solve the defects of the prior art, the embodiment of the disclosure provides a microwave plasma torch generating device, which is realized based on a combined microwave resonant cavity and mainly comprises a waveguide assembly, a Y-shaped branch waveguide power distributor, a probe waveguide-coaxial transition section, a cylindrical resonant cavity, a 1/4 wavelength coaxial resonant cavity, a quartz tube, an air inlet and the like. Similar descriptions are provided below in connection with specific embodiments.
Fig. 1 schematically illustrates a front view of a structure of a microwave plasma torch generating apparatus according to an embodiment of the present disclosure. Fig. 2 schematically illustrates a top view of the structure of a microwave plasma torch generating apparatus according to an embodiment of the disclosure.
As shown in fig. 1 and 2, in an embodiment of the present disclosure, a microwave plasma torch generating apparatus may include, for example, an input waveguide 1, a graded waveguide 2, a coaxial resonant cavity 3, a cylindrical resonant cavity 4, and a quartz glass tube 5.
Specifically, the input waveguide 1 is used for inputting the microwave M, and preferably, the input waveguide 1 may be, for example, a rectangular waveguide. The metal spacer of the graded waveguide 2 is divided into an upper part and a lower part and comprises a first graded waveguide section 201 and a second graded waveguide section 202, the first graded waveguide section 201 and the second graded waveguide section 202 are both connected to the output end of the input waveguide 1 and are used for distributing the power of the microwave M to obtain first microwaves and second microwaves, and the power of the first microwaves is higher than that of the second microwaves. The first graded waveguide section 201 transmits the first microwave, and the second graded waveguide section 202 transmits the second microwave, that is, the first graded waveguide section 201 and the second graded waveguide section 202 are equivalent to a power divider. Preferably, the ratio of the power distribution of the first graded waveguide section 21 to the second graded waveguide section to the microwave M is preferably 3:1.
The coaxial resonant cavity 3 receives the second microwave and generates a high-intensity electric field according to the second microwave, which plays a role in ignition triggering generated by the microwave plasma flame. The quartz glass tube 5 is arranged in the center of the cylindrical resonant cavity 4 and is used as a reaction cavity of microwave plasma flame, and is used for generating microwave plasma flame according to gas molecules under the ionization action of a high-intensity electric field, and the cylindrical resonant cavity 4 receives first microwaves and generates an electric field with certain intensity according to the first microwaves so as to maintain the plasma flame.
According to the microwave plasma torch generating device provided by the embodiment, based on a single microwave source, the gradual change waveguide is arranged to be of a Y-shaped structure formed by the first gradual change waveguide section and the second gradual change waveguide section with different power distribution ratios, a small part of microwave energy input by the input waveguide is fed into the coaxial resonant cavity through the second gradual change waveguide section, the coaxial resonant cavity generates a high-strength electric field based on the small part of microwave energy to ignite gas molecules in the quartz glass tube so as to generate microwave plasma flame, and a large part of microwave energy input by the input waveguide is fed into the cylindrical resonant cavity through the first gradual change waveguide section to generate an electric field with a certain strength so as to maintain the plasma flame, so that the advantages of the combined resonant cavity can be fully utilized, and microwave plasma can be continuously generated without triggering by an additional ignition device. In addition, although the intensity of the electric field in the center of the cylindrical resonant cavity is small, a plasma flame with a larger volume can be formed and the gas treatment distance is longer while maintaining the plasma flame.
With continued reference to fig. 1 and 2, in another embodiment of the present disclosure, the microwave plasma torch generating apparatus may further include, for example, a connection waveguide 6 and a coupling port 7, one end of the connection waveguide 6 is connected to the first graded waveguide section 201, and the other end is connected to the cylindrical resonant cavity 4 through the coupling port 7, so as to feed the first microwave into the cylindrical resonant cavity 4. The cylindrical resonator 4, the quartz glass tube 5 and the coupling orifice 7 constitute an assembly for maintaining a torch. Preferably, the connection waveguide 6 may be, for example, a rectangular waveguide.
According to the microwave plasma torch generating device provided by the embodiment, most of energy can be better ensured to be fed into the cylindrical resonant cavity by arranging the connecting waveguide and the coupling port.
In yet another embodiment of the present disclosure, the microwave plasma torch generating apparatus may further include, for example, a short circuit waveguide 8, a coupling probe 9, a coaxial inner conductor 10, and a coaxial outer conductor 11. The short-circuit waveguide 8 is connected with the second gradual change waveguide segment 202, and is used for short-circuiting the microblog transmitted by the second gradual change waveguide segment 202, the coupling probe 9 is connected with the short-circuit waveguide 8, and is used for concentrating the second microwave, the coaxial line outer conductor 11 is sleeved outside the coaxial line inner conductor 10 and is coaxial with the coaxial line inner conductor 10, one end of the coaxial line inner conductor 10 and one end of the coaxial line outer conductor 11 are connected to the coupling probe 9, and the other end of the coaxial line inner conductor 11 is connected to the coaxial resonant cavity 3, and is used for transmitting the second microwave to the coaxial resonant cavity 3. Specifically, the second graded waveguide section 202 converts a small portion of microwave energy into a coaxial interface through a waveguide, then connects the inner and outer conductors of the coaxial line to the right input port of the coaxial resonant cavity 3, and finally feeds the energy into the coaxial resonant cavity 3 through ring coupling.
According to the microwave plasma torch generating device provided by the embodiment, by arranging the short-circuit waveguide, the coupling probe, the coaxial inner conductor and the coaxial outer conductor, a small part of microwave energy can be better concentrated, so that the coaxial resonant cavity can generate a high-strength electric field.
In yet another embodiment of the present disclosure, the coaxial resonant cavity 3 may include, for example, a coaxial resonant cavity inner conductor 301 and a coaxial resonant cavity outer shell 302, the coaxial resonant cavity inner conductor 301 for generating a high-intensity electric field according to the second microwave, wherein one end of the coaxial resonant cavity inner conductor 301 is opened and the other end is short-circuited, one end of the opened end is inserted into the quartz glass tube 5, and the coaxial resonant cavity outer shell 302 is used for supporting to fix the coaxial resonant cavity inner conductor 301. Preferably, the coaxial resonant cavity 3 may be, for example, a 1/4 wavelength coaxial resonant cavity.
Further, the diameter of the conductor 301 in the coaxial resonant cavity gradually decreases along the direction from the open end to the short-circuited end, that is, the coaxial resonant cavity 3 adopts a gradual change structure, the diameter of the open end is smaller, and the electric field is concentrated.
According to the microwave plasma torch generating device provided by the embodiment, one end of the inner conductor of the coaxial resonant cavity is opened, the other end of the inner conductor of the coaxial resonant cavity is short-circuited, and the diameter of the opened end is smaller than that of the short-circuited end, so that the opened end of the coaxial resonant cavity can generate a high-strength electric field, and the ignition requirement of the plasma torch is fully met. And a small part of the open end is inserted into the quartz glass tube, so that the field intensity is concentrated to generate tip ignition, and the generation and maintenance of a plasma torch are excited.
In yet another embodiment of the present disclosure, an air inlet pipe 501 is further provided at an end of the quartz glass tube 5 near the coaxial resonator 3, and the air inlet pipe 501 may form a preset angle with the central axis of the quartz glass tube 5, typically an acute angle. Preferably, the air inlet pipes 501 are symmetrically distributed on both sides of the central axis of the quartz glass tube 5. The gas enters the quartz glass tube 5 from the gas inlet pipe 501 on both sides of the coaxial resonator.
According to the microwave plasma torch generating device provided by the embodiment, the air inlet pipe at the bottom of the quartz tube forms a certain angle with the central axis to generate spiral air flow, so that the quartz tube wall is prevented from being fused by the high-temperature torch.
In a further embodiment of the present disclosure, the surface of the quartz glass tube 5 not covered by the cylindrical resonator 4 may be covered with a metallic cylinder 12, for example. As shown in fig. 1, the metal cylinder 12 is covered on both the upper and lower outer sides of the quartz glass tube 5.
According to the microwave plasma torch generating device provided by the embodiment, the surface of the quartz glass tube, which is not covered by the cylindrical resonant cavity, is covered by the metal cylinder, so that microwave leakage can be prevented.
In order to verify the advantages of the microwave plasma torch generating device, simulation experiments are also performed in the embodiment of the disclosure.
Specifically, the working mode of the cylindrical resonant cavity is TM 010 mode, the electric field direction is unchanged along the axial direction, and the field value is the largest at the central axis of the cylinder. When the input power is 1W, the simulation results show that the peak value of the electric field intensity at the open end of the coaxial resonant cavity is larger than 1X 10 5 V/m, and the electric field at the central axis of the cylindrical resonant cavity is about 1X 10 4 V/m.
Based on the above, it can be seen that the microwave plasma torch generating device provided by the embodiment of the disclosure completes the air breakdown under the atmospheric pressure and forms a large-volume plasma torch under the condition of smaller microwave power input, and can meet the design requirement when the input power is 1.5kW through simulation and calculation.
In summary, compared with the conventional compressed waveguide plasma torch, the microwave plasma torch generating device provided by the embodiment of the disclosure has the advantages of larger plasma volume, longer gas treatment distance, no need of a mechanical ignition device for triggering, and lower energy consumption.
It should be noted that, the microwave plasma torch generating device provided by the embodiment of the disclosure can be practically applied to the application aspects of garbage tail gas treatment, material surface treatment, biomedicine and the like.
While the foregoing embodiments have been described in some detail for purposes of clarity of understanding, it will be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and that any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (8)
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| CN116437554B (en) * | 2023-04-18 | 2025-11-25 | 中国科学院空天信息创新研究院 | Compressed waveguide plasma torch |
| CN117185643A (en) * | 2023-09-18 | 2023-12-08 | 武汉市飞瓴光电科技有限公司 | Atmospheric pressure microwave plasma equipment and technology for surface treatment of optical fiber preforms |
| TWI893492B (en) * | 2023-10-24 | 2025-08-11 | 新加坡商益科斯有限公司 | A reactor for treating gaseous pollutants and its head assembly |
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| CN101852444A (en) * | 2010-05-26 | 2010-10-06 | 白野 | Microwave plasma ignition device |
| CN103269561A (en) * | 2013-05-15 | 2013-08-28 | 浙江大学 | Waveguide direct-feed-type microwave plasma torch device |
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| JP4127660B2 (en) * | 2003-03-28 | 2008-07-30 | 三菱電機株式会社 | Microwave plasma torch device |
| CN107087339B (en) * | 2017-07-03 | 2024-11-26 | 李容毅 | A dual-cavity excited enhanced microwave plasma torch generator |
| CN111465161B (en) * | 2020-03-18 | 2023-06-02 | 苏州迈微能等离子科技有限公司 | Normal pressure self-ignition type microwave plasma torch and microwave plasma generation system |
| CN111763926A (en) * | 2020-07-02 | 2020-10-13 | 成都蓝玛尚科技有限公司 | Material synthesis system based on high-temperature normal-pressure microwave plasma |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101852444A (en) * | 2010-05-26 | 2010-10-06 | 白野 | Microwave plasma ignition device |
| CN103269561A (en) * | 2013-05-15 | 2013-08-28 | 浙江大学 | Waveguide direct-feed-type microwave plasma torch device |
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