CN114752897A - Photoelectric alignment device inside the evaporation machine - Google Patents

Abstract

A photoelectric alignment device inside an evaporation machine relates to the technical field of vacuum coating. The photoelectric alignment device inside the evaporation machine of the present invention is characterized in that the alignment device comprises a casing, an illumination system, a transflective optical path, a collimating laser and a power supply, and the illumination system is arranged on the upper part of the casing; The optical path is arranged inside the casing, the collimating laser is horizontally arranged at one end of the casing, and the other end of the casing is provided with an exit aperture. The internal photoelectric alignment device of the evaporation machine of the invention has scientific design, convenient use and reasonable structure. The operator adjusts the position of the transflective and translucent optical path, and the light emitted by the LED light source enters the shielding mechanism, and irradiates it on the crystal oscillator plate. It can be directly observed through the observation port or externally connected to a CCD to show the lighting effect and position, and use a collimated laser to emit infrared light to generate a red spot, which is convenient for observation and adjustment and improves the accuracy of positioning.

Description

Photoelectric alignment device inside the evaporation machine

technical field

The invention relates to the technical field of vacuum coating, in particular to a method that is used in a limited and narrow space of a coating machine, helps users overcome the limitation of human vision, determines the relative positions of the evaporation source crucible and the crystal oscillator plate, and finds and avoids component interference. Photoelectric alignment device inside the evaporation machine.

Background technique

On the evaporation equipment, the evaporation source crucible and the crystal probe (crystal oscillator) are in the same vacuum environment, and the central position of the crucible and the crystal oscillator should be relatively fixed. If the position changes or there is spatial interference, it will affect the film performance. , a parameter offset occurs. Multiple evaporation sources (such as main material source and impurity source) are usually set in the vacuum chamber of large-scale coating machines for production, that is, multiple crucible positions (main crucible and impurity crucible). Corresponding to a crystal probe, in order to avoid mutual interference when each source works at the same time, some shielding mechanisms will be installed near the heating source and each crystal probe. If these mechanisms are not adjusted properly, the space interference mentioned above will be caused.

In coating production, necessary maintenance is often required, such as refueling of crucibles, replacement of crystal oscillators, calibration of control parameters, cleaning of vacuum chamber structural parts, etc. It is very important to ensure the accuracy of the position of each component before and after maintenance, especially in occasions that require high batch consistency of the coating process, such as OLED white light structure coating.

Generally speaking, the cavity space of the coating machine is limited, the crucible and the crystal head are embedded in the cavity wall, and it is generally impossible to take effective lighting at the same time. In addition, there may be many shielding mechanisms, and it is difficult for the operator to perform accurate multi-component maintenance during maintenance. Positioning can only be determined by experience.

SUMMARY OF THE INVENTION

The present invention solves the problems of limited space in the inner cavity of the current coating machine, difficult and inaccurate positioning for operators during maintenance, and provides a coating machine that can be used in a limited and narrow space to help users overcome the limitations of human vision and determine The relative position of the evaporation source crucible and the crystal oscillator plate of the crystal oscillator, and the internal photoelectric alignment device of the vapor deposition machine to find and avoid component interference.

The photoelectric alignment device inside the evaporation machine of the present invention is characterized in that the alignment device comprises a casing, an illumination system, a transflective optical path, a collimating laser and a power supply, the illumination system is arranged on the upper part of the casing, and the transflective type The optical path is arranged inside the casing, the collimating laser is horizontally arranged at one end of the casing, and the other end of the casing is provided with an exit aperture; wherein:

The lighting system includes an LED light source, a convex lens and a glass window arranged in sequence from top to bottom, the LED light source emits light downward, the convex lens is a single-sided frosted convex lens, and the convex surface is upward; the glass window is a double-sided frosted glass;

The transflective light is composed of three triangular prisms, in which the hypotenuse of the first triangular prism faces upwards, one right-angled side faces the collimating laser, the other right-angled side faces downwards, and the second triangular prism is parallel to the first triangular prism Placed, the hypotenuse of the third prism covers the hypotenuse of the second prism, and the light emitted by the collimating laser sequentially passes through the transflective light path and then exits the exit aperture;

The power supply is connected with the LED light source and the collimating laser through a wire, and provides power for the LED light source and the collimating laser.

An observation port is also provided on the side wall of the casing, and the position of the observation port is located above the contact position of the inclined surfaces of the second triangular prism and the third triangular prism.

The photoelectric alignment device inside the evaporation machine of the invention is scientific in design, convenient in use and reasonable in structure. The operator adjusts the position of the transflective and translucent optical path, so that the light emitted by the LED light source enters the shielding mechanism, and irradiates it on the crystal oscillator plate. It can be directly observed through the observation port or externally connected to a CCD to show the lighting effect and position, and use a collimated laser to emit infrared light to generate a red spot, which is convenient for observation and adjustment and improves the accuracy of positioning.

Description of drawings

Figure 1 is a schematic structural diagram of the present invention.

Among them, LED light source 1, convex lens 2, glass window 3, triangular prism 4, collimated laser 5, exit aperture 6, observation port 7, crystal oscillator 8.

Detailed ways

Embodiment 1: An internal photoelectric alignment device of an evaporation machine, comprising a casing, an illumination system, a transflective optical path, a collimating laser 5 and a power supply, the illumination system is arranged on the upper part of the casing, and the transflective optical path is arranged on the upper part of the casing. Inside the casing, the collimating laser 5 is horizontally arranged at one end of the casing, and the other end of the casing is provided with an exit aperture 6; wherein:

The lighting system includes an LED light source 1, a convex lens 2 and a glass window 3 arranged in sequence from top to bottom. The LED light source 1 emits light downward, the convex lens 2 is a single-sided frosted convex lens 2, and the convex surface faces upward; the glass window 3 is frosted on both sides. Glass;

The transflective light path is composed of three triangular prisms 4, in which the hypotenuse of the first triangular prism 4 faces upwards, one right-angled side faces the collimating laser 5, and the other right-angled side faces downwards. A triangular prism 4 is placed in parallel, the hypotenuse of the third triangular prism 4 covers the hypotenuse of the second triangular prism 4, and the light emitted by the collimating laser 5 sequentially passes through the transflective light path and then emerges from the exit aperture 6 ;

The power supply is connected to the LED light source 1 and the collimating laser 5 through wires, and provides power for the LED light source 1 and the collimating laser 5 .

An observation port 7 is also provided on the side wall of the housing, and the position of the observation port 7 is located above the contact position of the inclined surfaces of the second triangular prism 4 and the third triangular prism 4 .

The point-like light emitted by the LED light source 1 of the lighting system is converted into parallel outgoing light through a single-sided frosted convex lens 2 and a double-sided frosted glass window 3, which is a plane light. After the plane light is reflected by the inclined surface of the first triangular prism 4, the optical path changes by 90°. At this time, the central optical path coincides with the axis of the system. The light enters the incident surface of the second triangular prism 4, passes through the second triangular prism 4, and then passes through the second The inclined surface where the triangular prism 4 is in contact with the third triangular prism 4 is emitted from the third triangular prism 4 in the form of parallel light, and the effective illumination area is controlled by the exit aperture 6 .

The operator adjusts the position of the transflective and translucent optical path in the housing, so that the outgoing illumination parallel light enters the shielding mechanism and then irradiates on the crystal oscillator plate 8, and the image of the crystal oscillator plate 8 passes through the second prism 4 and the third prism 4. The contact surface of the belt is presented at the viewing port 7 . At the same time, the operator observes the landing point of the red spot of the collimating laser 5, whether it is in the area of interest, such as the crucible mouth; At this point, adjustments need to be made to avoid interference.

Claims (2)

1. A photoelectric alignment device in a coating machine is characterized by comprising a shell, an illumination system, a semi-reflecting and semi-transmitting type light path, a collimating laser (5) and a power supply, wherein the illumination system is arranged at the upper part of the shell, the semi-reflecting and semi-transmitting type light path is arranged in the shell, the collimating laser (5) is horizontally arranged at one end of the shell, and an outlet diaphragm (7) is arranged at the other end of the shell; wherein:

the lighting system comprises an LED light source (1), a convex lens (2) and a glass window (3) which are sequentially arranged from top to bottom, wherein the LED light source (1) emits light downwards, the convex lens (2) is a single-side frosted convex lens (2), and the convex surface of the convex lens faces upwards; the glass window (3) is glass with two frosted surfaces;

The semi-reflective and semi-transparent light path is formed by combining three triangular prisms (4), wherein the bevel edge of the first triangular prism (4) faces upwards, one right-angle edge faces towards the collimating laser (5), the other right-angle edge faces downwards, the second triangular prism (4) is arranged in parallel with the first triangular prism (4), the bevel edge of the third triangular prism (4) covers the bevel edge of the second triangular prism (4), and light rays emitted by the collimating laser (5) sequentially penetrate through the semi-reflective and semi-transparent light path and then are emitted from an outlet diaphragm (7);

the power supply is connected with the LED light source (1) and the collimating laser (5) through wires to provide electric energy for the LED light source (1) and the collimating laser (5).

2. The photoelectric aligning device in the evaporation machine according to claim 1, wherein a viewing port (7) is further formed on the side wall of the housing, and the viewing port (7) is located above the contact position of the inclined surfaces of the second triangular prism (4) and the third triangular prism (4).

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