CN114727491B - Blind hole bubble elimination equipment and elimination method - Google Patents
Blind hole bubble elimination equipment and elimination method Download PDFInfo
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- CN114727491B CN114727491B CN202210302744.3A CN202210302744A CN114727491B CN 114727491 B CN114727491 B CN 114727491B CN 202210302744 A CN202210302744 A CN 202210302744A CN 114727491 B CN114727491 B CN 114727491B
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 230000008030 elimination Effects 0.000 title claims abstract description 22
- 238000003379 elimination reaction Methods 0.000 title claims abstract description 22
- 239000007788 liquid Substances 0.000 claims abstract description 243
- 239000003814 drug Substances 0.000 claims abstract description 108
- 238000003860 storage Methods 0.000 claims abstract description 81
- 238000007654 immersion Methods 0.000 claims abstract description 43
- 238000005507 spraying Methods 0.000 claims description 37
- 238000002347 injection Methods 0.000 claims description 17
- 239000007924 injection Substances 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 238000009713 electroplating Methods 0.000 abstract description 7
- 238000009736 wetting Methods 0.000 abstract description 7
- 239000007921 spray Substances 0.000 description 26
- 238000001914 filtration Methods 0.000 description 17
- 239000012530 fluid Substances 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012669 liquid formulation Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Coating Apparatus (AREA)
- External Artificial Organs (AREA)
- Degasification And Air Bubble Elimination (AREA)
Abstract
The invention discloses blind hole bubble elimination equipment and an elimination method, wherein the blind hole bubble elimination equipment comprises a first liquid storage container and a negative pressure defoaming device, the first liquid storage container is used for storing liquid medicine, the negative pressure defoaming device comprises a negative pressure generator and a plurality of sucking pieces, the sucking pieces are arranged in the first liquid storage container and are positioned on one side or two opposite sides of a plate immersion path, the sucking pieces are connected with the negative pressure generator, and a liquid suction port is arranged on one side, facing the plate immersion path, of the sucking pieces. The blind hole bubble eliminating method includes the steps of immersing the plate into the liquid medicine and sucking the liquid medicine on the surface of the plate below the liquid level of the liquid medicine to generate negative pressure on the surface of the plate. The blind hole bubble elimination equipment and the blind hole bubble elimination method can be used for defoaming blind holes and improving the wetting effect of the blind holes, so that the electroplating quality is improved.
Description
Technical Field
The invention relates to the technical field of PCB processing, in particular to blind hole bubble eliminating equipment and a blind hole bubble eliminating method.
Background
Along with the development of communication technology, the density of PCB design is higher and higher, the line width and the distance are smaller and smaller, the diameter of a through hole is reduced from 0.3mm to 0.1mm, and the back drilling technology is adopted on high-speed products in a large quantity to solve the problem of crosstalk caused by the through hole in order to ensure the integrity of high-speed signal transmission, but the back drilling technology occupies a certain space due to the existence of a back drilling STUB, so that the deep blind holes are increasingly applied. In particular, high-end routing, servers, etc. are increasingly being used. However, the deep micro blind holes are difficult to wet, and the electroplating coating at the bottoms of the blind holes is abnormal due to the problem of bubbles, so that the reliability and the electrical performance of the product are seriously affected.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the invention provides the blind hole bubble eliminating equipment and the blind hole bubble eliminating method, which can realize defoaming of the blind holes and improve the wetting effect of the blind holes, thereby improving the electroplating quality.
According to the embodiment of the first aspect of the invention, the blind hole bubble elimination equipment comprises a first liquid storage container and a negative pressure defoaming device, wherein the first liquid storage container is used for storing liquid medicine, the negative pressure defoaming device comprises a negative pressure generator and a plurality of sucking pieces, the sucking pieces are arranged in the first liquid storage container and are positioned on one side or two opposite sides of a plate immersion path, the sucking pieces are connected with the negative pressure generator, and a liquid suction port is formed in one side, facing the plate immersion path, of each sucking piece.
The blind hole bubble elimination equipment at least has the advantages that the suction piece is arranged in the first liquid storage container, so that enough liquid medicine is injected into the first liquid storage container to enable the liquid medicine to overflow the suction piece, the plate can be immersed into the liquid medicine in the first liquid storage container along the plate immersion path, the suction piece is arranged on one side of the plate immersion path, and the liquid suction port of the suction piece is arranged towards the plate immersion path, so that in the process that the surface of the plate provided with the blind hole faces the suction piece and is immersed into the liquid medicine along the plate immersion path gradually, the suction piece can suck the liquid medicine around the surface of the plate, so that negative pressure is generated around the position of the surface of the plate corresponding to the suction piece, and further, when the blind hole on the plate passes through the position corresponding to the suction piece, the pressure in the blind hole is larger than the pressure outside the blind hole, so that bubbles in the blind hole can run out of the blind hole, and along with the sucked liquid medicine into the suction piece and the negative pressure generator, when the blind hole leaves the position corresponding to the suction piece, the blind hole is smaller than the pressure in the blind hole, the pressure in the process that the blind hole can reach the negative pressure generator, thereby realizing that the negative pressure elimination of the liquid medicine can reach the inside of the plate through the plate, and the negative pressure elimination equipment.
According to some embodiments of the invention, blind hole bubble elimination apparatus
Still including face spray set, face spray set is including spraying piece and second pump body, and the piece that sprays sets up in first stock solution container and is located one side or the relative both sides of plate immersion fluid route, and the liquid outlet of second pump body is connected to the piece that sprays, and the one side that sprays the piece towards plate immersion fluid route is provided with the jet orifice, and the piece that sprays sets up in the below of absorbing the piece.
According to some embodiments of the invention, the blind hole bubble eliminating apparatus further comprises a vibration device, wherein the vibration device is arranged in the first liquid storage container, the vibration device is positioned below the spraying piece, and the vibration device is used for vibrating the plate entering the first liquid storage container.
According to some embodiments of the invention, the suction and ejection members are each provided with two sets, each set being spaced apart between the suction members and the ejection members, to form a sheet immersion path between the suction members and the ejection members.
According to some embodiments of the invention, the blind hole bubble eliminating device further comprises a third liquid storage container, the liquid inlet of the second pump body is connected with the third liquid storage container, and the third liquid storage container is communicated with the first liquid storage container.
According to some embodiments of the invention, the injection member is a nozzle, the nozzle includes a second pipe body and a nozzle portion, the nozzle portion is disposed on a peripheral side surface of the second pipe body, and the injection port is disposed at the nozzle portion, and the second pipe body is connected to the second pump body through a second pipeline.
According to some embodiments of the invention, the blind hole bubble eliminating device further comprises a second liquid storage container, the negative pressure generator comprises a first pump body and a filtering device, the suction piece is connected with a liquid suction port of the first pump body, a liquid inlet of the filtering device is connected with a liquid outlet of the first pump body, a liquid outlet of the filtering device is connected with the second liquid storage container, the filtering device is used for filtering liquid medicine to separate air in the liquid medicine, and the second liquid storage container is communicated with the first liquid storage container.
According to some embodiments of the invention, the suction member is a suction blade, the suction blade includes a first pipe body portion and a suction nozzle portion, the suction nozzle portion is disposed on a peripheral side surface of the first pipe body portion, the suction nozzle portion is disposed on the suction nozzle portion, and the first pipe body portion is connected to the first pump body through a first pipeline.
According to a second aspect of the present invention, a method for eliminating bubbles in blind holes includes the steps of:
Immersing the plate into the liquid medicine and sucking the liquid medicine on the surface of the plate below the liquid level of the liquid medicine so as to generate negative pressure on the surface of the plate.
The blind hole bubble elimination method according to the embodiment of the second aspect of the invention has at least the following beneficial effects:
Through immersing the plate into the liquid medicine and absorbing the liquid medicine on the surface of the plate below the liquid level of the liquid medicine, the surface of the plate can generate negative pressure, and the pressure in the blind hole is higher than the pressure outside the blind hole, so that bubbles in the blind hole can run out of the blind hole, and after absorbing the liquid medicine, the pressure in the blind hole is lower than the pressure outside the blind hole because the bubbles have run out of the blind hole, so that the liquid medicine can quickly reach the inside of the blind hole to realize infiltration, thereby achieving the effects of eliminating the bubbles in the blind hole and improving the wetting effect of the blind hole, and further being beneficial to improving the electroplating quality of the plate.
According to some embodiments of the invention, immersing the plate in the liquid medicine and sucking the liquid medicine on the surface of the plate below the liquid medicine level comprises the steps of immersing the plate gradually in the liquid medicine, and enabling the surface of the plate provided with the blind holes to gradually pass through the area below the liquid medicine level where the liquid medicine is sucked in the immersion process.
According to some embodiments of the invention, the method for eliminating bubbles in the blind holes further comprises the step of spraying the liquid medicine to the surface of the plate member provided with the blind holes below the area where the liquid medicine is sucked.
According to some embodiments of the invention, the method of blind hole bubble removal further comprises the step of vibrating the plate immersed in the medical fluid.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a schematic view showing the overall structure of a blind hole bubble removal apparatus according to an embodiment of the first aspect of the present invention;
FIG. 2 is a side view of the suction member shown in FIG. 1;
FIG. 3 is a front view of the suction member shown in FIG. 1;
FIG. 4 is a side view of the spray member shown in FIG. 1;
FIG. 5 is a front view of the spray member shown in FIG. 1;
Fig. 6 is a flowchart of a blind hole bubble removal method according to a second embodiment of the present invention.
Description of the drawings:
Plate 100, first liquid storage container 210, second liquid storage container 220, third liquid storage container 230, first pump body 310, first main tube 320, first sub tube 330, suction member 340, first tube body 341, suction port 342, suction port 343, filter 350, second pump body 410, second main tube 420, second sub tube 430, injector 450, second tube body 451, nozzle 452, injection port 453, and vibration device 500.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
In the description of the present invention, it should be understood that the direction or positional relationship indicated with respect to the description of the orientation, such as up, down, left, right, front, rear, etc., is based on the direction or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, and does not indicate or imply that the apparatus or element to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, the description of the first and second is only for the purpose of distinguishing technical features, and should not be construed as indicating or implying relative importance or implying the number of technical features indicated or the precedence of the technical features indicated.
In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
A blind hole bubble removal apparatus according to a first aspect of the present invention will be described below with reference to fig. 1 to 5.
Referring to fig. 1 to 5, the blind hole bubble eliminating apparatus of the present embodiment includes a first liquid storage container 210 and a negative pressure defoaming device.
The first liquid storage container 210 is used for storing liquid medicine, the negative pressure defoaming device comprises a negative pressure generator and a plurality of sucking pieces 340, and the sucking pieces 340 are arranged in the first liquid storage container 210, so that when enough liquid medicine is injected into the first liquid storage container 210, the liquid medicine can be enabled to permeate through the sucking pieces 340.
Also, the suction member 340 may be selectively disposed at one side or opposite sides of the panel immersion path according to actual situations, for example, when only one side surface of the panel 100 is provided with blind holes, the suction member 340 may be disposed at one side of the panel immersion path, and when both opposite side surfaces of the panel 100 are provided with blind holes, the suction member 340 may be correspondingly disposed at opposite sides of the panel immersion path.
The suction member 340 is connected to the negative pressure generator, and a suction port 343 is provided at a side of the suction member 340 facing the plate immersion path, so that the suction port 343 can generate negative pressure to suck the liquid in the plate immersion path when the negative pressure generator is operated.
When defoaming operation is performed, the plate 100 can be immersed into the liquid medicine along the immersion path of the plate in such a way that the surface provided with the blind hole faces the suction piece 340, the suction piece 340 will suck the liquid medicine around the surface of the plate 100, so that negative pressure is generated around the position of the surface of the plate 100 corresponding to the suction piece 340, and then the pressure in the blind hole is higher than the pressure outside the blind hole when the blind hole on the plate 100 passes through the position corresponding to the suction piece 340, so that bubbles in the blind hole can escape from the blind hole, enter the suction piece 340 and the negative pressure generator along with the sucked liquid medicine, and when the blind hole leaves the position corresponding to the suction piece 340, the pressure in the blind hole is lower than the pressure outside the blind hole due to the fact that the bubbles have escaped from the blind hole, so that the liquid medicine can quickly reach the inside of the blind hole, and thus the embodiment can perform negative pressure defoaming treatment on the plate 100 through the suction piece 340, thereby being beneficial to improving the electroplating quality of the plate.
It will be appreciated that the plate 100 needs to be pre-treated before the plate 100 is electroplated, for example, the plate 100 is treated by degreasing and pickling, and the problems of insufficient wetting and bubbles of the deep blind holes in the plate 100 mainly occur in the pre-treatment processes of degreasing and pickling, so that the chemical solution can be selectively configured according to the required pre-treatment process.
It will be appreciated that the plate dip path is the path of the plate 100 into the liquid formulation, and in this embodiment the plate dip path is provided as a vertical path from top to bottom, although in other embodiments the plate dip path may be provided as an inclined path from top to bottom.
In order to enable the plate 100 to enter the liquid medicine along the set plate immersion path, in some embodiments, a specific limiting structure may be selectively provided in the first liquid storage container 210 to limit the plate 100, for example, a slot parallel to the plate immersion path may be provided in the first liquid storage container 210, and then an edge of the plate 100 may be slidably engaged in the slot, so that the plate 100 slides along the slot, or in other embodiments, the plate 100 may be limited by an existing structure provided in the first liquid storage container 210, for example, the plate 100 may be limited by a suction member 340 and the like provided in the first liquid storage container 210, and the plate immersion path may be formed between the structures such as the suction member 340, or in other embodiments, the plate 100 may be connected to a driving end of a driving element such as a cylinder through a clamp, and then the plate 100 is driven by the driving element such as the cylinder to accurately enter the liquid medicine along the set plate immersion path. It should be appreciated that the second embodiment described above is selected in this example to define the movement of the plate member 100 along the plate member immersion path for simplicity of construction and will be described in detail below.
Referring to fig. 1, it can be understood that the blind hole bubble elimination apparatus further includes a panel spray device including a spray member 450 and a second pump body 410, the spray member 450 is connected to a liquid outlet of the second pump body 410, and the spray member 450 is provided with an injection port, so that the spray member 450 can spray the liquid medicine pumped from the second pump body 410 through the injection port; the spraying part 450 is arranged in the first liquid storage container 210 and is positioned below the suction part 340, the spraying part 450 can be arranged on one side or two opposite sides of the plate immersion path similarly to the suction part 340 according to the arrangement condition of the blind holes on the plate 100, and the spraying opening is arranged on one side of the spraying part 450 facing the plate immersion path, so that the liquid medicine sprayed from the spraying opening can be sprayed onto the plate 100 immersed in the liquid medicine along the plate immersion path, and the liquid medicine can also have bubbles, so that after the negative pressure defoaming treatment of the suction part 340, the bubbles possibly flow into the blind holes together with the liquid medicine or the bubbles which are not completely eliminated after the negative pressure defoaming treatment exist in some blind holes, the wettability in the blind holes is increased after the negative pressure defoaming treatment, the volume and the tension of the bubbles are reduced, the liquid medicine is sprayed to the surface of the plate 100 through the spraying part 450, the liquid medicine can be quickly exchanged inside and outside the blind holes, the bubbles can be easily removed, the inside and especially the bottom of the blind holes can be easily moved, and the bottom of the blind holes can be easily electroplated when the next step-by the electroplating liquid can be easily moved into the bottom of the blind holes.
Referring to fig. 1, it can be understood that the blind hole bubble removal apparatus further includes a vibration device 500, the vibration device 500 being disposed in the first liquid container 210, the vibration device 500 being located below the spraying member 450 and being disposed at the end of the plate immersion path so that the plate 100 immersed in the liquid medicine will eventually come to the vibration device 500, the vibration device 500 being used to vibrate the plate 100 entered into the first liquid container 210 so that bubbles overflow the blind holes by the vibration. Therefore, in the present embodiment, by the suction member 340, the spraying member 450 and the vibration device 500 sequentially disposed along the plate immersion path, the plate 100 immersed in the liquid medicine along the plate immersion path can sequentially achieve triple defoaming of negative pressure, high pressure spraying and vibration, thereby greatly improving defoaming and wetting effects of the deep micro blind holes.
Referring to fig. 1, it can be understood that in the present embodiment, the suction members 340 and the injection members 450 are provided with two groups, each group of suction members 340 includes a plurality of suction members 340 vertically arranged in the up-down direction, each group of injection members 450 includes a plurality of injection members 450 vertically arranged in the up-down direction, and the two groups of suction members 340 and the two groups of injection members 450 are spaced apart from each other to form a plate immersion path between the two groups of suction members 340 and the two groups of injection members 450, so that when the plate 100 is immersed in the liquid medicine along the plate immersion path, the position of the plate 100 can be limited by the suction members 340 or the injection members 450 located at both sides of the plate 100, and the plate 100 can be gradually immersed in the liquid medicine along the plate immersion path.
Referring to fig. 1, it can be understood that the blind hole bubble elimination apparatus further includes a second liquid storage container 220, the negative pressure generator includes a first pump body 310 and a filtering device 350, the suction member 340 is connected to a liquid suction port 343 of the first pump body 310, a liquid inlet of the filtering device 350 is connected to a liquid outlet of the first pump body 310, a liquid outlet of the filtering device 350 is connected to the second liquid storage container 220, the filtering device 350 is used for filtering the liquid medicine to separate air in the liquid medicine, the second liquid storage container 220 is communicated with the first liquid storage container 210, and the second liquid storage container 220 is also used for storing the liquid medicine, the liquid medicine and bubbles sucked through the suction member 340 enter the filtering device 350, the filtering device 350 filters bubbles in the liquid medicine, and discharges the filtered liquid medicine into the second liquid storage container 220 through the liquid outlet, and the second liquid storage container 220 is communicated with the first liquid storage container 210, so that the liquid medicine in the second liquid storage container 220 can flow back to the first liquid storage container 210 to realize circulating flow of the liquid medicine.
Referring to fig. 2 and 3, it can be understood that, in order to better suck the liquid medicine on the surface of the plate 100, the suction member 340 is a suction cutter, the suction cutter includes a first tube portion 341 and a suction nozzle portion 342, the suction nozzle portion 342 is disposed on a peripheral side surface of the first tube portion 341, and the suction port 343 is disposed on the suction nozzle portion 342, the first tube portion 341 is connected to the first pump body 310 through a first pipeline, so that an adsorption force generated during operation of the first pump body 310 will generate a negative pressure in the first tube portion 341, and the liquid medicine can be sucked into the suction member 340 from the suction port 343.
Referring to fig. 2 and 3, it can be understood that the suction nozzle portion 342 is disposed along the axial extension of the first tube portion 341, and the cross-sectional profile of the suction nozzle portion 342 is trapezoidal, and the width of the suction nozzle portion 342 is smaller at one side closer to the plate immersion path, so that the negative pressure suction force generated by the suction nozzle 343 can be more concentrated, thereby enhancing the negative pressure defoaming effect. It will be appreciated that the width of the liquid suction port 343 should not be excessively large, the width of the liquid suction port 343 is set to be between 0.5mm and 5mm, and the width of the opening of the suction port 342 communicating with one end of the first tube body 341 is larger than the width of the liquid suction port 343, and the width of the opening of the suction port 342 communicating with one end of the first tube body 341 may be set to be 5 to 20 times the width of the liquid suction port 343, specifically, in this embodiment, the width of the liquid suction port 343 is set to be 2mm, and the width of the opening of the suction port 342 communicating with one end of the first tube body 341 is set to be 20mm, and the inner diameter of the first tube body is set to be 100mm.
Referring to fig. 1, it can be understood that the first pipeline includes a first main pipe 320 and a plurality of first branch pipes 330, wherein the first main pipe 320 is connected to a liquid outlet of the first pump body 310, one end of each first branch pipe 330 is connected to the first main pipe 320, and the other end is connected to the first pipe body 341 in a one-to-one correspondence manner. In addition, in the present embodiment, specifically, the blind hole bubble removing apparatus may be provided with two sets of the first pipeline, the first pump body 310, the filtering device 350 and the set of the second liquid storage container 220, and each set of the suction members 340 is configured with one set of the first pipeline, the first pump body 310, the filtering device 350 and the second liquid storage container 220, that is, each set of the suction members 340 may work independently, so that the plate 100 with blind holes on the opposite side surfaces may work simultaneously through the two sets of the suction members 340 to achieve the negative pressure defoaming, and for the plate 100 with blind holes on only one side surface, only one set of the suction members 340 may be started to perform the negative pressure defoaming operation.
It should be understood, of course, that in other embodiments, the blind hole bubble removal apparatus may also be configured with a set of first tubing, first pump body 310, filter device 350, and second reservoir 220 to connect two sets of suction members 340 simultaneously.
Alternatively, in other embodiments, two sets of the first pipeline, the first pump body 310, the filtering device 350 and one set of the second liquid storage container 220 may be provided for the blind hole bubble eliminating apparatus, so that each set of the suction members 340 is configured with one set of the first pipeline, the first pump body 310 and the filtering device 350, and the liquid outlets of the two filtering devices 350 are communicated with the same second liquid storage container 220, and in the case that a plurality of blind hole bubble eliminating apparatuses are provided in the production line, the blind hole bubble eliminating apparatuses may also share the same second liquid storage container 220.
Referring to fig. 1, it can be understood that the blind hole bubble removal apparatus further includes a third liquid storage container 230, the liquid inlet of the second pump body 410 is connected to the third liquid storage container 230, the third liquid storage container 230 is in communication with the first liquid storage container 210, and the third liquid storage container 230 is also used for storing the liquid medicine, so that the second pump body 410 can suck the liquid medicine from the third liquid storage container 230 and spray the liquid medicine onto the plate 100 immersed in the liquid medicine through the spraying member 450, and the third liquid storage container 230 is in communication with the first liquid storage container 210, so that the liquid medicine in the first liquid storage container 210 can flow back into the third liquid storage container 230, so that the liquid medicine can flow circularly between the first liquid storage container 210 and the third liquid storage container 230.
Referring to fig. 4 and 5, it can be understood that, in order to better spray the liquid medicine on the plate 100, the spray member 450 is a spray tube, the spray tube includes a second tube body 451 and a nozzle portion 452, the nozzle portion 452 is disposed on a circumferential side surface of the second tube body 451, and the spray opening is disposed on the nozzle portion 452, the second tube body 451 is connected to the second pump body 410 through a second pipe, so that the liquid medicine pumped by the second pump body 410 can be pumped to the second tube body 451 through the second pipe and sprayed out through the spray opening of the nozzle portion 452, and in particular, the spray opening is a plurality of tiny spray openings 453 distributed in a rectangular array, so that the water flow sprayed out from the spray opening can more easily enter into the blind hole to expel bubbles. It is understood that the aperture of the spraying holes 453 may be selectively set between 0.1-1mm and the interval between the spraying holes 453 may be selectively set between 1-10mm, in this embodiment, specifically, the inner diameter of the second pipe body 451 is set to 100mm, the width of the nozzle portion 452 is set to 20mm, the diameter of the spraying holes 453 is set to 0.5mm and the interval between the spraying holes 453 is set to 5mm, and the length of the nozzle portion 452 may be set to be adapted to the width of the plate member 100, thereby ensuring that the spraying of the chemical liquid can be obtained on the entire surface of the plate member 100, thereby improving the overall effect of defoaming by high-pressure spraying.
Referring to fig. 1, it can be understood that the second pipeline includes a second main pipe 420 and a plurality of second branch pipes 430, wherein the second main pipe 420 is connected to the liquid outlet of the second pump body 410, one end of each second branch pipe 430 is connected to the second main pipe 420, and the other end is connected to the second pipe body 451 in a one-to-one correspondence manner. In addition, in this embodiment, specifically, the blind hole bubble removing apparatus may be provided with two sets of the second pipeline, the second pump body 410 and the third liquid storage container 230, and each set of the spraying members 450 is configured with one set of the second pipeline, the second pump body 410 and the third liquid storage container 230, that is, each set of the spraying members 450 may work independently, so that the plate 100 with blind holes formed on the opposite side surfaces may work simultaneously through the two sets of the spraying members 450 to achieve high pressure spraying defoaming, and for the plate 100 with blind holes formed on only one side surface, only one set of the spraying members 450 may be started to perform high pressure spraying defoaming.
Of course, it should be understood that in other embodiments, the blind hole bubble removal apparatus may also be configured with a set of second tubing, second pump body 410, and third reservoir 230 to connect two sets of ejectors 450 simultaneously.
Alternatively, in other embodiments, the blind hole bubble removing apparatus may also be provided with two sets of the second pipeline and the second pump body 410, and one set of the third liquid storage container 230, so that each set of the spraying members 450 is respectively provided with one set of the second pipeline and the second pump body 410, and the liquid inlets of the two second pump bodies 410 are communicated with the same third liquid storage container 230. In addition, when a plurality of blind hole bubble removal apparatuses are provided in the production line, the plurality of blind hole bubble removal apparatuses may share the same third liquid storage container 230.
It is understood that the first liquid storage container 210, the second liquid storage container 220, and the third liquid storage container 230 may be selected from a tank, a cylinder, or the like. Also, it should be understood that when the volume is sufficiently large, the second and third liquid storage containers 220 and 230 may be provided as the same container, and even the first, second and third liquid storage containers 210, 220 and 230 may be provided as the same container.
A blind hole bubble removal method according to a second aspect of the present invention will be described with reference to fig. 6.
Referring to fig. 6, the method for eliminating bubbles in blind holes of the present embodiment includes the following steps:
s100, immersing the plate 100 into the liquid medicine and sucking the liquid medicine on the surface of the plate 100 below the liquid level of the liquid medicine so as to generate negative pressure on the surface of the plate 100.
It should be noted that, through immersing the plate 100 into the liquid medicine and absorbing the liquid medicine on the surface of the plate 100 below the liquid level of the liquid medicine, the surface of the plate 100 can generate negative pressure, and the pressure in the blind hole is greater than the pressure outside the blind hole, so that the bubbles in the blind hole can escape from the blind hole, and after absorbing the liquid medicine, the pressure in the blind hole is less than the pressure outside the blind hole because the bubbles have escaped from the blind hole, so that the liquid medicine can quickly reach the inside of the blind hole to realize infiltration, thereby achieving the functions of eliminating the bubbles in the blind hole and improving the wetting effect of the blind hole, and further being beneficial to improving the electroplating quality of the plate 100.
It will be appreciated that, in order to be able to suck the liquid medicine on the surface of the plate member 100 below the liquid level of the liquid medicine, the negative pressure defoaming device mentioned in the above-mentioned embodiment of the first aspect may be alternatively employed, and the suction of the liquid medicine on the surface of the plate member 100 may be completed by the suction member 340. It should be appreciated that in other embodiments, other means may alternatively be used to accomplish aspiration of the medical fluid from the surface of the plate 100 below the level of the medical fluid, so long as the surface of the plate 100 is capable of creating a negative pressure.
It should be understood that the step S100 may include the following steps:
the plate 100 is gradually immersed in the liquid medicine, and the surface of the plate 100 provided with the blind holes gradually passes through the area under the liquid level of the liquid medicine to be sucked during the immersion process.
It should be noted that, the plate 100 may be made to dip the plate 100 into the liquid medicine along a preset plate dip path, and the plate dip path is set to pass through a region where the liquid medicine is sucked below the liquid level of the liquid medicine, so that in the process of dipping the plate 100 into the liquid medicine, the surface of the plate 100 provided with the blind hole gradually passes through the region where the liquid medicine is sucked, and in the process of dipping the plate 100 into the liquid medicine, negative pressure defoaming of the plate 100 from bottom to top is realized.
It will be appreciated that when the negative pressure defoaming device mentioned in the embodiment of the first aspect is adopted, the area of the liquid medicine below the liquid level that is sucked is the area opposite to the suction member 340 in the immersion path of the plate, so that the whole negative pressure defoaming of the plate 100 from bottom to top can be realized when the bottom of the plate 100 to the top of the plate 100 sequentially passes through the position where the suction member 340 is located.
Referring to fig. 6, it can be understood that the blind hole bubble removal method of the present embodiment may further include the following steps:
s200, spraying the liquid medicine to the surface of the plate 100 provided with the blind hole below the area where the liquid medicine is sucked.
It should be noted that, below the area where the liquid medicine is sucked, the liquid medicine is sprayed to the surface of the plate 100 where the blind hole is provided, so that the part of the plate 100 after the negative pressure defoaming is sprayed again to defoam the part, thereby further eliminating the bubbles in the blind hole and improving the wetting effect of the blind hole.
It will be appreciated that the plate surface spraying device mentioned in the embodiment of the first aspect may be selectively used to implement the step S200 and spray the chemical solution to the plate 100 through the spraying member 450, and of course, it should be understood that in other embodiments, other devices may be selectively used to spray the chemical solution on the surface of the plate 100, so long as the sprayed water flow can enter the deep blind holes below the liquid surface to drive away the bubbles.
Referring to fig. 6, it can be understood that the blind hole bubble removal method of the present embodiment may further include the following steps:
S300, vibrating the plate 100 immersed in the liquid medicine.
It should be noted that, after the plate 100 sequentially passes through the negative pressure defoaming in the step S100 and the high pressure spraying defoaming in the step S200, the plate 100 immersed in the liquid medicine is vibrated, so that the bubbles still remained in the blind holes of the plate 100 can be again promoted to exit the blind holes.
It will be appreciated that the vibration device 500 mentioned in the above embodiment of the first aspect may alternatively be employed to implement the above step S300. In particular, the vibration device 500 may be a mechanical vibration device driven by an eccentric motor or the like, or an ultrasonic wave generating device that can generate ultrasonic waves to vibrate the board 100 may be selected.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (10)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210302744.3A CN114727491B (en) | 2022-03-25 | 2022-03-25 | Blind hole bubble elimination equipment and elimination method |
| PCT/CN2022/099874 WO2023178853A1 (en) | 2022-03-25 | 2022-06-20 | Blind hole bubble elimination apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210302744.3A CN114727491B (en) | 2022-03-25 | 2022-03-25 | Blind hole bubble elimination equipment and elimination method |
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| Publication Number | Publication Date |
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| CN114727491A CN114727491A (en) | 2022-07-08 |
| CN114727491B true CN114727491B (en) | 2025-03-18 |
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| WO (1) | WO2023178853A1 (en) |
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| CN114727491B (en) * | 2022-03-25 | 2025-03-18 | 生益电子股份有限公司 | Blind hole bubble elimination equipment and elimination method |
| CN118843262B (en) * | 2024-09-23 | 2024-11-29 | 江苏弗林特机电科技有限公司 | Blind hole soaking device for circuit board processing |
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| JPH05293306A (en) * | 1992-04-22 | 1993-11-09 | Purantetsukusu:Kk | Defoaming device |
| JP2001316882A (en) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | Equipment and method for liquid treatment |
| JP3164982U (en) * | 2010-10-13 | 2010-12-24 | 揚博科技股▲ふん▼有限公司 | Defoaming device for wet process substrate |
| CN207150978U (en) * | 2017-09-26 | 2018-03-27 | 苏州创峰光电科技有限公司 | Blind hole chemical deposition device |
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| JP2000328288A (en) * | 1999-05-17 | 2000-11-28 | Hitachi Cable Ltd | Method and apparatus for forming plating film of fine holes or grooves |
| US6626196B2 (en) * | 2001-06-15 | 2003-09-30 | International Busines Machines Corporation | Arrangement and method for degassing small-high aspect ratio drilled holes prior to wet chemical processing |
| CN101845622B (en) * | 2010-06-01 | 2012-11-14 | 深南电路有限公司 | Immersion Ni/Au method of blind hole plate |
| CN202482460U (en) * | 2011-12-31 | 2012-10-10 | 上海新阳半导体材料股份有限公司 | Wafer electroplating pretreatment device |
| KR20150055254A (en) * | 2013-11-13 | 2015-05-21 | 대덕전자 주식회사 | Method and apparatus for electroplating |
| CN206759826U (en) * | 2017-04-18 | 2017-12-15 | 汕头超声印制板公司 | A kind of cell body structure-improved of vertical continuous plating lines |
| KR102528900B1 (en) * | 2020-11-30 | 2023-05-04 | 주식회사 호진플라텍 | Plating apparatus including hybrid paddle that simultaneously circulates and stirs plating solution and removes air bubbles |
| CN113151871A (en) * | 2021-03-03 | 2021-07-23 | 广州明毅电子机械有限公司 | Vertical continuous electroplating bath capable of realizing uniform electroplating of high aspect ratio holes of electroplated plate |
| CN114727491B (en) * | 2022-03-25 | 2025-03-18 | 生益电子股份有限公司 | Blind hole bubble elimination equipment and elimination method |
-
2022
- 2022-03-25 CN CN202210302744.3A patent/CN114727491B/en active Active
- 2022-06-20 WO PCT/CN2022/099874 patent/WO2023178853A1/en active Application Filing
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|---|---|---|---|---|
| JPH05293306A (en) * | 1992-04-22 | 1993-11-09 | Purantetsukusu:Kk | Defoaming device |
| JP2001316882A (en) * | 2000-05-08 | 2001-11-16 | Tokyo Electron Ltd | Equipment and method for liquid treatment |
| JP3164982U (en) * | 2010-10-13 | 2010-12-24 | 揚博科技股▲ふん▼有限公司 | Defoaming device for wet process substrate |
| CN207150978U (en) * | 2017-09-26 | 2018-03-27 | 苏州创峰光电科技有限公司 | Blind hole chemical deposition device |
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| CN114727491A (en) | 2022-07-08 |
| WO2023178853A1 (en) | 2023-09-28 |
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