CN114720502A - Array type positioning method and device for microscopic morphology observation - Google Patents

Abstract

The invention discloses an array-type positioning method and device for microscopic topography observation. A detection device contacts a sample to obtain pre-positioning information, a computer-aided system is used to build a coordinate system, and a scanning electron microscope is used to perform pre-observation and record the pre-positioning information. The observed coordinate area; the data difference of the positioning information is compared by the computer-aided system, and the sample is moved by the detection device, so that the moved position corresponds to the position of the pre-positioning information; the device includes a base, and a placement cavity is arranged on the upper end of the base, There are guide rails around the placement cavity, and guide blocks are arranged in the guide rails. The detection equipment is installed on the guide blocks. The detection equipment is distributed in symmetrical quadrants on the base, in order to improve the scanning electron microscope. The imaging range is wide, and the imaging positioning has a certain delay. and hysteresis, the observation area cannot be effectively determined during the observation process, especially in the problem that the identification and treatment of the cause of the corrosion reaction is not efficient.

Description

Array positioning method and device for microscopic topography observation

technical field

The invention relates to a scanning electron microscope system, in particular to an array positioning method and device for microscopic topography observation.

Background technique

Scanning electron microscope is a kind of imaging equipment through the interaction of electrons and matter. Its working principle is mainly that when high-energy incident electrons bombard the surface of matter, the excited area will generate secondary electrons, backscattered electrons, characteristic x-rays and other signals. , based on these signals, information about various physical and chemical properties of the sample itself can be obtained, so as to obtain images such as morphology, composition, crystal structure, and electronic structure. When observing metal products, the backscattered electron and secondary electron signal imaging are mainly used to observe the surface morphology of the sample, that is, a very narrow electron beam is used to scan the sample, and the sample surface is generated by the interaction between the electron beam and the sample. Enlarged topographical image.

It is worth noting that the imaging resolution of the scanning electron microscope is high. Therefore, in general, the sample is fixed on the working table of the scanning electron microscope. The scanning electron microscope has a large depth of field and a large field of view, so that positioning and repeated observation of local areas can be performed. , can meet the general metal morphology observation, but for the metal corrosion performance micro-morphology observation, due to the harsh metal corrosion conditions, and the corrosion reaction is a continuous physical and chemical reaction, so the observation of the sample is generally periodic, and the sample is in the During the observation process, corrosion tests in various environments will also be carried out. The observation performance test needs to observe the microscopic topography of a certain area at regular intervals, so as to record the relevant morphological changes; the number of observations of the entire microscopic topography exceeds more than 100 times. Second-rate.

At present, in the actual operation process, due to the wide imaging range of the scanning electron microscope, the positioning is generally performed directly after the scanning electron microscope is used for imaging, and then the image feedback and specific pixel points are compared to determine the relevant observation area. However, the imaging positioning has a certain delay and hysteresis, and the observation area cannot be effectively determined during the observation process, especially the identification of the cause of the corrosion reaction is not efficient. Therefore, it is worth studying how to more intuitively and efficiently assist the scanning electron microscope for precise positioning.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide an array positioning method and device for microscopic topography observation, in order to improve the imaging range of scanning electron microscope, and the imaging positioning has certain delay and hysteresis, which cannot be effectively used in the observation process. The determination of its observation area, especially in the identification of the cause of the corrosion reaction, is not efficient.

In order to solve the above-mentioned technical problems, the present invention adopts the following technical solutions:

An array positioning method for microscopic topography observation, the method is used for the positioning of scanning electron microscope in continuous observation, and it is characterized in that: the detection equipment is distributed in quadrants around the sample, and the detection equipment contacts the sample to obtain pre-positioning Then, the coordinate system is built through the computer-aided system, and the pre-observation is carried out through the scanning electron microscope and the coordinate area of the pre-observation is recorded; when the sample is removed and re-installed, the post-positioning information is collected by contacting the sample again through the detection device, and the computer The auxiliary system compares the data difference between the post-positioning information and the pre-positioning information, and pushes the sample to move through the detection device, so that the moved position corresponds to the position of the pre-positioning information, and then the scanning electron microscope performs post-observation on the sample, so that The post-observation is the same as the pre-observation coordinate area.

Preferably, the pre-positioning information includes the positioning information of the X-axis and the Y-axis; and the X-axis and the Y-axis have at least one set of mutually symmetrical detection devices, and the movement of the sample is performed synchronously by two opposite detection devices.

Preferably, the following steps are included:

In step A, a sample is obtained, and the above-mentioned sample is a metal corrosion sample.

In step B, the metal corrosion sample is fixed in the sampling area of the scanning electron microscope and the detection device, and the current measurement inclination angle of the sample is determined.

Step C, contacting the sample through the detection device to obtain pre-positioning information; initial observation of the sample through a scanning electron microscope to obtain an initial image of the sample.

In step D, the sample is taken out from the sampling area for experiment, and after the experiment, the sample is put into the sampling area again, and the current measurement inclination angle of the sample is determined.

In step E, the sample is contacted by the detection device to obtain the post-positioning information, and the coordinate difference between the post-positioning information and the pre-positioning information is compared, and then the sample is moved by the detection device according to the coordinate difference, so that the sample is moved to the position with the pre-positioning information. The corresponding position is then observed by a scanning electron microscope to obtain a change image, and the initial image is compared to complete a topography comparison.

In step F, the operations of step D and step E are repeated until the sample morphology comparison for a set number of times is completed.

The invention also discloses an array positioning device for microscopic topography observation. The positioning device is used to match the scanning electron microscope, and the above method is used. The positioning device includes a base, and the base is used for fixing on the scanning electron microscope. On the worktable of the electron microscope; the upper end of the base is provided with a placement cavity, and the placement cavity is used for placing samples; the placement cavity is provided with guide rails around, and a guide block is arranged in the guide rail, and the guide block is used to move back and forth in the guide rail. , a detection device is installed on the guide block, the detection device is distributed on the base in a symmetrical quadrant, and the detection device is used to contact the sample in the placement cavity.

Preferably, the detection device includes a carrier, the lower end of the carrier is connected to a guide block, the carrier is provided with a position sensor, and the position sensor is used to collect the contact signal between the detection device and the sample and transmit the signal to the computer aided system.

A further technical solution is that the guide block is provided with a mounting hole, the lower end of the carrier is provided with a mounting block corresponding to the mounting hole, the bottom of the mounting hole is provided with a first magnetic body, and the lower end of the mounting block is provided with a second magnetic body, The second magnetic body and the first magnetic body attract each other.

A further technical solution is that the guide rail is provided with a scale, the guide block is provided with a stopper, the upper end of the stopper protrudes from the upper end of the guide rail, and the stopper is used to lock the guide block in the guide rail.

A further technical solution is that the lower end of the base is provided with a positioning plate, the positioning plate is provided with a positioning block at the lower end of the positioning plate, the center of the positioning block overlaps with the center of the placement cavity, the positioning plate is provided with an auxiliary positioning hole, and the above-mentioned positioning plate is provided with an auxiliary positioning hole. The positioning block is used as the center point to rotate the base, and the above-mentioned auxiliary positioning holes are used to lock the base on the working table of the scanning electron microscope.

Preferably, the above-mentioned computer-aided system includes a microprocessor, the above-mentioned microprocessor is connected to the detection device signal, the above-mentioned microprocessor is used to compare the post-positioning information and the pre-positioning information, the above-mentioned microprocessor is used to output data to the host computer, and the The upper computer records the data and transmits the data to the display for display.

Preferably, the rear end of the guide block is provided with a drive unit; the drive unit is used to drive the guide block to move, the drive unit is signal-connected to the microprocessor, and the microprocessor outputs a signal to the drive unit and drives the guide block to move through the drive unit .

Compared with the prior art, the beneficial effects of the present invention are at least one of the following:

The method of the invention mainly builds a coordinate system on the base between the sample and the scanning electron microscope (SEM), and contacts the sample with the detection device to obtain position information. The position information is obtained by the detection device, and the sample is moved by the detection device through the deviation of the position information, so that the scanning electron microscope (SEM) acquisition area corresponds. The method can cooperate with the positioning of the existing scanning electron microscope, so as to form mutual confirmation during and after the observation.

In the present invention, by means of quadrant distribution, the distribution of detection devices can form X-axis and Y-axis data, and at the same time, when X-axis and Y-axis are moving, at least two detection devices are used to clamp and move synchronously. In this way, the stability of the sample movement is ensured. Even if there is an offset on a certain path during the movement of the sample, the detection device whose offset is lowered can be corrected later. In addition, the method of the present invention can record the real-time data through the computer-aided system to stabilize the coordinate system and correspond to the observation, so as to determine the original sample posture and achieve the effect of precise positioning. The method does not conflict with the existing accurate image positioning method, and has the effect of observation positioning and image reinforcement for the positioning method of scanning electron microscope observation and characterization.

In the present invention, the detection device is restrained by the guide rail on the base, and the size feature of the sample is sampled in real time on the guide rail through the detection device. During the measurement process, it is convenient for observers to quickly locate.

At the same time, the moving path of the detection device is controllable, and the detection device can be moved through the guide block, and the sample can be moved to the set size position through the detection device. Compared with the pixel point matching of the image and the feature vector matching after the sample is corroded, the method and device of the present invention can greatly reduce the amount of data required for parameter matching, so that the efficiency of preliminary positioning is higher.

Description of drawings

Fig. 1 is the structure distribution diagram of the present invention.

Figure 2 is a schematic diagram of the installation of the present invention.

Figure 3 is a schematic diagram of the distribution of guide rails.

Figure 4 is a schematic diagram of the distribution of detection equipment.

FIG. 5 is a schematic diagram of the structure of the detection device.

FIG. 6 is a schematic diagram of the installation of the second magnetic body of the present invention.

Figure 7 is a schematic diagram of the installation of the detection equipment.

FIG. 8 is a schematic diagram of the adsorption between the first magnetic body and the second magnetic body.

Figure 9 is a schematic diagram of the bottom of the positioning plate.

Description of reference numbers:

1-base, 2-placement cavity, 3-guide rail, 4-guide block, 5-detection device, 6-stopper, 101-positioning plate, 102-positioning block, 103-auxiliary positioning hole, 301-scale , 401-installation hole, 402-first magnetic body, 501-carrier, 502-position sensor, 503-installation block, 504-second magnetic body, Q-sample, M-table.

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

Referring to FIG. 1 to FIG. 3 , one embodiment of the present invention is an array positioning method for microscopic topography observation, and the above method is used for the positioning of scanning electron microscope in continuous observation, wherein the scanning electron microscope Continuity observation is common in metal corrosion research, mainly used for corrosion experiments on metal samples Q; because metal corrosion is generally caused by a combination of reasons, its corrosion is divided into five categories according to categories, namely uniform corrosion, localized corrosion , corrosion caused by metallurgical quality, cracking caused by environment, corrosion caused by microorganisms; corrosion morphology can be observed by scanning electron microscope, so as to analyze corrosion mechanism and evaluate material properties.

The detection device 5 is distributed in quadrants around the sample Q, and the detection device 5 contacts the sample Q to obtain pre-positioning information, and then builds a coordinate system through a computer-aided system, conducts pre-observation through a scanning electron microscope, and records the coordinate area of the pre-observation. Among them, the distribution of the detection devices 5 takes the sample Q placement area as the midpoint, and is evenly distributed in the four quadrants around the placement area, and there are four detection devices 5, and the detection devices 5 form a point-to-point relationship with the sample Q, thus After the four detection devices 5 contact the sample Q, the two detection devices 5 can be moved relative to each other in the front and rear, so that the detection devices 5 can move the sample Q, while the non-moved detection device 5 has a position-limiting function.

When the sample Q is removed and re-installed, the detection device 5 is used to contact the sample again to collect post-positioning information, and the computer-aided system is used to compare the data difference between the post-positioning information and the pre-positioning information, and push the sample to move through the detection device. The rear position corresponds to the position of the pre-positioning information, and then the scanning electron microscope is used for post-observation of the sample, so that the post-observation is the same as the pre-observation coordinate area.

Among them, after the detection device 5 contacts the sample Q for the first time, the positions of the four detection devices 5 are recorded respectively. When the sample Q is installed again, the observation angle of the sample Q needs to be guaranteed. The sample Q is generally a regular-shaped object. Angles can be positioned with reference planes. By contacting the sample Q again with the detection device 5, the data difference between the post-positioning information and the pre-positioning information can be directly obtained.

Among them, the scanning electron microscope itself can perform high-efficiency measurement and visualization of the surface of the sample. By performing three-dimensional reconstruction of the images collected by the scanning electron microscope, the observation results of the sample can be accurately positioned. Since the reconstruction of electron microscope image structure requires feature matching of the images, the purpose of the feature is to correlate the overlapping parts between the images. If the sample Q is taken and placed frequently, the number of observations is frequent, and the corrosiveness of the sample changes, which may have a certain impact on the reconstructed parameters and increase the amount of data processing.

Among them, the structure reconstruction of scanning electron microscope images mainly adopts the shadow recovery structure technology SFS and the motion recovery structure technology SFM. The existing SFS technology and SFM technology both need to use images for positioning and composition. A single image restoration structure requires more constraints. If the image data is small, the positioning accuracy cannot be fully guaranteed. In the actual application process of SFS technology, it is necessary to reconstruct through multiple images of different illumination directions. The SFM technology mainly uses images from two or more perspectives for reconstruction.

Therefore, the quadrant positioning method using the detection device 5 is mainly used to quickly assist the positioning through the external contour of the sample Q. This positioning method can be used as a reinforcement for the processing of the SEM image, which is used to match the parameters of the graphic positioning. , and reduce the amount of graphic comparison data, which has a good improvement, and can ensure that the sampling area of the sample Q is the same after multiple sampling, which is beneficial to the acquisition of the topographic feature generated by the scanning electron microscope. Moreover, the method is easy to operate and has high positioning accuracy, and can be applied to the rapid positioning of various regular-shaped samples.

Based on the above-mentioned embodiment, another embodiment of the present invention is that the above-mentioned pre-positioning information includes the positioning information of the X-axis and the Y-axis; It is performed synchronously by two opposite detection devices; the positioning information of the X axis is generally collected by two mutually symmetrical detection devices 5 at the same time. Similarly, the positioning information of the Y axis is also collected by at least two detection devices 5 at the same time. arrived. Therefore, the positioning information is jointly obtained by the parameter characteristics of each detection device 5, and the positioning information includes at least four characteristic parameters, namely at least two characteristic parameters of the X axis and the Y axis.

Based on the above embodiment, another embodiment of the present invention includes the following operation steps: Step A, obtaining a sample, and the above sample is a metal corrosion sample. In step B, the metal corrosion sample is fixed in the sampling area of the scanning electron microscope and the detection device, and the current measurement inclination angle of the sample is determined. Step C, contacting the sample through the detection device to obtain pre-positioning information; initial observation of the sample through a scanning electron microscope to obtain an initial image of the sample. In step D, the sample is taken out from the sampling area for experiment, and after the experiment, the sample is put into the sampling area again, and the current measurement inclination angle of the sample is determined. In step E, the sample is contacted by the detection device to obtain the post-positioning information, and the coordinate difference between the post-positioning information and the pre-positioning information is compared, and then the sample is moved by the detection device according to the coordinate difference, so that the sample is moved to the position with the pre-positioning information. The corresponding position is then observed by a scanning electron microscope to obtain a change image, and the initial image is compared to complete a topography comparison. In step F, the operations of step D and step E are repeated until the sample morphology comparison for a set number of times is completed.

Referring to FIG. 1 to FIG. 3 , one embodiment of the present invention is an array positioning device for microscopic topography observation. The positioning device is used to match a scanning electron microscope, and the method of the above embodiment is used. The positioning device includes a base 1, and the base 1 is used to be fixed on the worktable W of the scanning electron microscope; wherein the worktable W is provided with a plurality of positioning holes, and the base 1 is fixed on the worktable W through the positioning holes.

The upper end of the above-mentioned base 1 is provided with a placement cavity 2, and the above-mentioned placement cavity 2 is used to place the sample; wherein, the base 1 can be circular, and the placement cavity 2 is provided with a groove, so as to facilitate the placement of the sample Q; the above-mentioned placement cavity 2 There are guide rails 3 all around, and guide blocks 4 are provided in the above-mentioned guide rails 3. The above-mentioned guide blocks 4 are used to move back and forth in the guide rails 3, wherein the inner contour of the section of the guide rail 3 is consistent with the outer contour of the section of the guide block 4, and its guide rail The cross section of 3 can be a trapezoidal structure, so that the guide block 4 moves in the guide rail 3 with high stability.

A detection device 5 is installed on the guide block 4 , and the detection device 5 is distributed in a symmetrical quadrant on the base 1 , and the detection device 5 is used to contact the sample in the placement cavity 2 . Among them, the detection device 5 is mainly used for contacting the device and obtaining the position signal. In short, the detection device 5 contacts the sample Q for the first time, and transmits a contact signal. At this time, the position of the detection device 5 in the guide rail 3 is the front position, and the X-axis and Y-axis positions of the four detection devices 5 form the front position. location information.

Based on the above embodiments, referring to FIGS. 4 to 6 , another embodiment of the present invention is that, in order to ensure the performance of the detection device 5 , the detection device 5 includes a carrier 501 , wherein the carrier 501 is a rigid structure, so that the carrier can Push the sample Q, the lower end of the carrier 501 is connected to the guide block 4, and the carrier 501 can be fixed on the guide block 4 by bonding or welding, so that the position of the guide block 4 and the carrier 501 is constant. The above-mentioned carrier 501 is provided with a position sensor 502, and the above-mentioned position sensor 502 is used to collect the contact signal between the detection device 5 and the sample Q and transmit the signal to the computer-aided system. Since the position of the guide block 4 and the carrier 501 is constant, the contact head of the existing position sensor 502 protrudes from the end face of the carrier 501 and contacts the sample Q. The carrier 501 makes the position sensor 502 contact the sample Q during the moving process, thereby triggering the position sensor 502 to contact the signal, and at the same time, the position sensor 502 transmits the signal of the contact sample Q to the computer aided system. Then, the movement of the carrier 501 corresponding to the position sensor 502 is stopped.

Further, as shown in FIGS. 4 to 8 , in order to ensure the stability of the installation of the carrier 501 on the guide block 4, the guide block 4 is provided with a mounting hole 401, and the lower end of the carrier 501 is provided with a mounting block corresponding to the mounting hole. 503 , the bottom of the mounting hole 401 is provided with a first magnetic body 402 , the lower end of the mounting block 503 has a second magnetic body 504 , and the second magnetic body 504 and the first magnetic body 402 are attracted to each other.

Wherein, the side wall of the mounting block 503 is provided with a non-slip layer. Under the action of the anti-skid layer, the mounting hole 401 and the mounting block 503 can be installed by means of interference fit. The anti-skid layer can be made of existing rubber material.

The second magnetic body 504 is an existing permanent magnet, and the second magnetic body 504 is fixed at the bottom of the mounting block 503. The second magnetic body 504 and the first magnetic body 402 are attracted to each other to improve the rigidity of the structure. and reliability. It is worth noting that:

If the guide block 4 is a non-magnetic metal, the first magnetic body 402 is fixed to the magnetic metal in the mounting hole 401 .

If the guide block 4 is made of a magnetic metal material, the first magnetic body 402 may be the body part of the guide block 4 .

Based on the above embodiment, referring to FIGS. 3 , 4 and 6 , another embodiment of the present invention is that the guide rail 3 is provided with a scale 301 , the guide block 4 is provided with a limiter 6 , and the limit The upper end of the stopper 6 protrudes from the upper end of the guide rail 3 , and the above-mentioned stopper 6 is used to lock the guide block 4 in the guide rail 3 . The stopper 6 is a bolt structure, the guide block 4 is provided with a screw hole for the stopper 6 to be inserted, the upper end of the stopper 6 is in contact with the piece, and the stopper 6 rotates in the screw hole of the guide block 4 , and drive the contact piece on the limiter 6 to contact the upper end of the guide rail 3 , so that the limiter 6 abuts the guide rail 3 , thereby restricting the movement of the guide block 4 on the guide rail 3 . It is worth noting that this method is suitable for manual operation and its structure is simple.

Based on the above embodiment, referring to FIGS. 1 , 2 , 3 and 9 , another embodiment of the present invention is that the lower end of the base 1 is provided with a positioning plate 101 , the positioning plate 101 , and the lower end of the positioning plate 101 There is a positioning block 102, the center of the positioning block 102 overlaps with the center of the placement cavity 2, the positioning plate 101 is provided with an auxiliary positioning hole 103, the positioning block 102 is used as the center point to rotate the base 1, and the auxiliary positioning hole 103 is used for Lock the base 1 on the working table of the scanning electron microscope.

The positioning plate 101 is fixed on the lower end of the base 1, the positioning plate 101 and the base 1 can be integrally arranged, the positioning block 102 is the midpoint of the base 1 and the positioning plate 101, and the sample Q is also located directly above the positioning block 102 , the positioning block 102 on the positioning plate 101 is used for the initial positioning of the base 1, and there are multiple auxiliary positioning holes 103, which are evenly distributed around the positioning block 102, and the auxiliary positioning holes 103 cooperate with the positioning pins. It is used for precise positioning of the base 1, so as to limit the detection posture of the sample on the base 1 to a certain extent.

Based on the above-mentioned embodiment, another embodiment of the present invention is that the above-mentioned computer-aided system includes a microprocessor, and the above-mentioned microprocessor is connected to the detection device 5 by a signal, and the above-mentioned microprocessor is used to compare the post-positioning information and the pre-positioning information, The above-mentioned microprocessor is used for outputting data to the upper computer, and the upper computer records the data data and transmits the data to the display for display.

Among them, the microprocessor is an existing MCU processor, and the signal collected by the detection device 5 is transmitted to the microprocessor through the detection device 5, and the microprocessor performs basic data calculation and transmits the data to the upper computer synchronously. , the host computer records the data data and transmits the data to the display for display, so as to facilitate the operation of the staff.

Further, the rear end of the above-mentioned guide block 4 is provided with a drive unit; the above-mentioned drive unit is used to drive the guide block 4 to move, the above-mentioned drive unit is signal-connected with the microprocessor, and the microprocessor outputs a signal to the drive unit and drives the guide block through the drive unit. Block 4 moves. Wherein, the driving unit may be a stroke cylinder matched with an existing servo motor, and the telescopic part of the stroke cylinder is connected to the guide block 4, so that the movement stroke of the guide block 4 can be precisely controlled, and the movement accuracy of the guide block 4 is determined by its driving force. The selection of the unit is matched according to the precision requirements of the guide block 4.

The microprocessor can be the MCU processor of STM32F103. In addition to the main integrated memory and central processing unit, the STM32F103 microprocessor can also be equipped with conventional PWM modules, quadrature timing units and ADC modules to ensure that the drive unit starts and stops. Stablize.

The actuator of the stroke cylinder is driven by the microprocessor controlled by the servo motor, so that the guide block 4 moves radially in the guide rail 3, and the detection device 5 transmits the position to the guide rail 3 in real time during the radial movement of the detection device 5. The microprocessor controls the start and stop of the drive unit.

References in this specification to "one embodiment", "another embodiment", "embodiment", "preferred embodiment", etc., mean that specific features, structures or characteristics described in conjunction with the embodiment are included in the In at least one embodiment generally described herein. The appearances of the same expression in various places in the specification are not necessarily all referring to the same embodiment. Further, when a particular feature, structure or characteristic is described in conjunction with any one embodiment, it is claimed that implementation of that feature, structure or characteristic in conjunction with other embodiments is also within the scope of the present invention.

Although the present invention has been described herein with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the scope of this disclosure. within the scope and spirit of the principles. More particularly, various variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the present disclosure, drawings and claims. In addition to variations and modifications to the component parts and/or arrangements, other uses will also be apparent to those skilled in the art.

Claims (10)

1. an array positioning method for microscopic topography observation, the method is used for the positioning of scanning electron microscope in continuous observation, it is characterized in that: by detecting equipment in quadrant distribution around the sample, by detecting equipment contact sample acquisition Pre-positioning information, and then build a coordinate system through a computer-aided system, conduct pre-observation through a scanning electron microscope, and record the coordinate area of the pre-observation; When the sample is removed and installed again, the post-positioning information is collected by contacting the sample again with the detection device, the data difference between the post-positioning information and the pre-positioning information is compared by the computer-aided system, and the sample is moved by the detection device, so that the moved The position corresponds to the position of the pre-positioning information, and then the sample is post-observed with a scanning electron microscope, so that the post-observation is the same as the pre-observation coordinate area. 2. The array positioning method for microscopic topography observation according to claim 1, wherein the pre-positioning information includes the positioning information of the X-axis and the Y-axis; and the X-axis and the Y-axis have at least one A set of mutually symmetrical detection devices, the movement of the sample is synchronized by two opposite detection devices. 3. The array positioning method for microscopic topography observation according to claim 1, characterized in that, comprising the following operation steps: Step A, obtaining a sample, the sample is a metal corrosion sample; Step B, fixing the metal corrosion sample in the sampling area of the scanning electron microscope and the detection device, and determining the current measurement inclination angle of the sample; Step C, contact the sample through the detection device to obtain pre-positioning information; conduct initial observation of the sample through a scanning electron microscope to obtain an initial image of the sample; In step D, the sample is taken out from the sampling area for the experiment, and after the experiment, the sample is put into the sampling area again, and the current measurement inclination angle of the sample is determined; In step E, the sample is contacted by the detection device to obtain the post-positioning information, and the coordinate difference between the post-positioning information and the pre-positioning information is compared, and then the sample is moved by the detection device according to the coordinate difference, so that the sample is moved to the position with the pre-positioning information. Corresponding position, then observe the sample through scanning electron microscope to obtain the change image, and compare the initial image to complete a topography comparison; In step F, the operations of step D and step E are repeated until the sample morphology comparison for a set number of times is completed. 4. An array positioning device for microscopic topography observation, the positioning device is used to match a scanning electron microscope, and the method according to any one of claims 1 to 3 is used, characterized in that: the positioning device A base (1) is included, and the base (1) is used to be fixed on the working table of the scanning electron microscope; the upper end of the base (1) is provided with a placement cavity (2), and the placement cavity (2) is used for For placing samples; the placement cavity (2) is provided with guide rails (3) around, and guide blocks (4) are arranged in the guide rails (3), and the guide blocks (4) are used to move forward and backward in the guide rails (3). Moving, a detection device (5) is installed on the guide block (4), the detection device (5) is distributed in a symmetrical quadrant on the base (1), and the detection device (5) is used to contact the placement cavity (2) ) in the sample. 5 . The array positioning device for microscopic topography observation according to claim 4 , wherein the detection device ( 5 ) comprises a carrier ( 501 ), and the lower end of the carrier ( 501 ) is connected to the guide block ( 4 ). 6 . ), a position sensor ( 502 ) is arranged in the carrier ( 501 ), and the position sensor ( 502 ) is used to collect the contact signal between the detection device ( 5 ) and the sample and transmit the signal to the computer-aided system. 6. The array positioning device for microscopic topography observation according to claim 5, characterized in that: the guide block (4) is provided with a mounting hole (401), and the lower end of the carrier (501) is provided with a mounting hole (401). The mounting block (503) corresponding to the mounting hole, the bottom of the mounting hole (401) is provided with a first magnetic body (402), the lower end of the mounting block (503) has a second magnetic body (504), the The second magnetic body (504) and the first magnetic body (402) are attracted to each other. 7. The array positioning device for microscopic topography observation according to claim 4, characterized in that: the guide rail (3) is provided with a scale (301), and the guide block (4) is provided with a limit A stopper (6), the upper end of the stopper (6) protrudes from the upper end of the guide rail (3), and the stopper (6) is used for locking the guide block (4) in the guide rail (3). 8. The array positioning device for microscopic topography observation according to claim 4, characterized in that: a positioning plate (101) is provided at the lower end of the base (1), and the positioning plate (101) is The lower end of the positioning plate (101) is provided with a positioning block (102), the center of the positioning block (102) overlaps with the center of the placement cavity (2), and the positioning plate (101) is provided with an auxiliary positioning hole (103), The positioning block (102) is used as the center point to rotate the base (1), and the auxiliary positioning hole (103) is used for locking the base (1) on the working table of the scanning electron microscope. 9 . The array positioning device for microscopic topography observation according to claim 5 , wherein the computer-aided system comprises a microprocessor, and the microprocessor is signal-connected to the detection device ( 5 ), so that the The microprocessor is used for comparing the post positioning information with the front positioning information, the microprocessor is used for outputting data to the upper computer, the upper computer records the data data and transmits the data to the display for display. 10. The array positioning device for microscopic topography observation according to claim 9, characterized in that: the rear end of the guide block (4) is provided with a drive unit; the drive unit is used to drive the guide block (4). ) to move, the drive unit is signal-connected with the microprocessor, and the microprocessor outputs a signal to the drive unit and drives the guide block (4) to move through the drive unit.

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