[go: up one dir, main page]

CN114695828A - Preparation device and preparation method of pixel definition layer - Google Patents

Preparation device and preparation method of pixel definition layer Download PDF

Info

Publication number
CN114695828A
CN114695828A CN202210272097.6A CN202210272097A CN114695828A CN 114695828 A CN114695828 A CN 114695828A CN 202210272097 A CN202210272097 A CN 202210272097A CN 114695828 A CN114695828 A CN 114695828A
Authority
CN
China
Prior art keywords
definition layer
substrate
pixel
pixel definition
conveyor belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210272097.6A
Other languages
Chinese (zh)
Inventor
李楚
曾宪甫
刘礼瑜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangzhou China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Guangzhou China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangzhou China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Guangzhou China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to CN202210272097.6A priority Critical patent/CN114695828A/en
Publication of CN114695828A publication Critical patent/CN114695828A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

本发明提供了一种像素定义层的制备装置及制备方法,所述制备装置包括:传送单元,用于传送基板,所述基板包括位于所述基板背离所述传送单元一侧的像素定义层光阻;压印模具,设于所述基板背离所述传送单元的一侧,用于压印所述像素定义层光阻以得到像素开口对应的凹槽。通过采用本发明实施例提供的所述制备装置,实施本发明实施例提供的所述制备方法,仅通过涂布、压印、固化、刻蚀四步工艺制程即可在基板上制备得到所需的像素定义层,相比与现有技术需要经过涂布、固化、曝光、显影、蚀刻多道制造工艺流程,需要用到精密的曝光设备及精密的掩模版,本发明节省了像素定义层制备过程中的设备和材料成本,提高了像素定义层的生产效率。

Figure 202210272097

The present invention provides a preparation device and a preparation method for a pixel definition layer. The preparation device includes: a transfer unit for transferring a substrate, the substrate including a pixel definition layer light located on the side of the substrate away from the transfer unit. Resistor; an imprinting mold is arranged on the side of the substrate away from the conveying unit, and is used for imprinting the photoresist of the pixel definition layer to obtain grooves corresponding to the pixel openings. By using the preparation device provided in the embodiment of the present invention, and implementing the preparation method provided in the embodiment of the present invention, the desired product can be prepared on the substrate only through the four-step process of coating, imprinting, curing, and etching. Compared with the prior art, which requires multiple manufacturing processes of coating, curing, exposure, developing and etching, and requires the use of precise exposure equipment and precise reticle, the present invention saves the preparation of the pixel definition layer. The equipment and material costs in the process improve the production efficiency of the pixel definition layer.

Figure 202210272097

Description

像素定义层的制备装置及制备方法Preparation device and preparation method of pixel definition layer

技术领域technical field

本申请涉及显示领域,尤其涉及一种像素定义层的制备装置及制备方法。The present application relates to the field of display, and in particular, to a preparation device and preparation method of a pixel definition layer.

背景技术Background technique

溶液法印刷技术加工制作有机发光半导体(Organic ElectroluminescenceDisplay,OLED)以及量子点发光二极管(Quantum Dot Light Emitting Diodes,QLED)显示器,具有低成本、高产能、易于实现大尺寸等优点,是未来显示技术发展的重要方向。在印刷过程中,像素界定层对于显示材料的打印良率以及后期成膜均匀性非常重要。Organic Electroluminescence Display (OLED) and Quantum Dot Light Emitting Diodes (QLED) displays are fabricated by solution printing technology, which have the advantages of low cost, high productivity, and easy realization of large size, which is the future development of display technology. important direction. In the printing process, the pixel-defining layer is very important for the printing yield of the display material and the uniformity of the later film formation.

目前像素定义层的制作工艺都是先进行像素定义层材料涂布,然后通过掩模版进行曝光显影,最后再进行蚀刻得到所需要的像素定义层结构,该制作工艺需要精密的曝光设备及精密的掩模版制作,增加制造成本,同时需要经过涂布、固化、曝光、显影、蚀刻多道制造工艺流程,降低生产效率。At present, the manufacturing process of the pixel definition layer is to first coat the pixel definition layer material, then expose and develop through a mask, and finally etch to obtain the required pixel definition layer structure. This manufacturing process requires sophisticated exposure equipment and precise Mask production increases the manufacturing cost, and at the same time requires multiple manufacturing processes of coating, curing, exposure, development, and etching, reducing production efficiency.

发明内容SUMMARY OF THE INVENTION

本发明提供一种像素定义层的制备装置及制备方法,以节省像素定义层制备过程中的设备和材料成本,提高像素定义层的生产效率。The invention provides a preparation device and a preparation method of a pixel definition layer, so as to save equipment and material costs in the preparation process of the pixel definition layer, and improve the production efficiency of the pixel definition layer.

为解决以上问题,本发明提供的技术方案如下:For solving the above problems, the technical solutions provided by the present invention are as follows:

本发明提供一种像素定义层的制备装置,所述像素定义层包括像素开口,所述制备装置包括:The present invention provides a preparation device for a pixel definition layer, the pixel definition layer includes a pixel opening, and the preparation device includes:

传送单元,用于传送基板,所述基板包括位于所述基板背离所述传送单元一侧的像素定义层光阻;a transfer unit for transferring a substrate, the substrate comprising a pixel definition layer photoresist on a side of the substrate away from the transfer unit;

压印模具,设于所述基板背离所述传送单元的一侧,用于压印所述像素定义层光阻以得到所述像素开口对应的凹槽。The imprinting mold is disposed on the side of the substrate away from the conveying unit, and is used for imprinting the photoresist of the pixel definition layer to obtain the grooves corresponding to the pixel openings.

可选的,在本发明的一些实施例中,所述压印模具包括外模和内模,所述外模套设于所述内模外。Optionally, in some embodiments of the present invention, the imprinting mold includes an outer mold and an inner mold, and the outer mold is sleeved outside the inner mold.

可选的,在本发明的一些实施例中,所述外模包括刚性滚筒和至少两个模齿,所述模齿设于所述刚性滚筒背离所述内模的一侧,所述模齿用于压印所述像素定义层光阻以得到所述像素开口对应的凹槽。Optionally, in some embodiments of the present invention, the outer mold includes a rigid drum and at least two mold teeth, the mold teeth are provided on a side of the rigid drum away from the inner mold, and the mold teeth used for imprinting the pixel definition layer photoresist to obtain grooves corresponding to the pixel openings.

可选的,在本发明的一些实施例中,所述内模为中空的弹性滚筒,所述弹性滚筒的中空空间可以进行充气。Optionally, in some embodiments of the present invention, the inner mold is a hollow elastic drum, and the hollow space of the elastic drum can be inflated.

可选的,在本发明的一些实施例中,所述传送单元包括传送轮和传送带,所述传送带套设于所述传送轮的外周,所述传送轮用于驱动所述传送带对所述基板进行传送。Optionally, in some embodiments of the present invention, the conveying unit includes a conveying wheel and a conveying belt, the conveying belt is sleeved on the outer periphery of the conveying wheel, and the conveying wheel is used to drive the conveying belt to the substrate to transmit.

可选的,在本发明的一些实施例中,所述传送单元还包括压力调节滚轴,所述传送带套设于所述压力调节滚轴之外,所述压印模具的圆心和所述压力调节滚轴的圆心之间的连线与所述传送带垂直,所述压力调节滚轴可以朝向或背离所述压印模具进行移动。Optionally, in some embodiments of the present invention, the conveying unit further includes a pressure adjusting roller, the conveying belt is sleeved outside the pressure adjusting roller, the center of the embossing die and the pressure The connecting line between the centers of the adjustment rollers is perpendicular to the conveyor belt, and the pressure adjustment roller can move toward or away from the imprinting die.

可选的,在本发明的一些实施例中,所述传送轮包括传动滚轮和传送带张紧轮,所述传动滚轮用于传送所述传送带,所述传送带张紧轮可以沿所述传送带的传送平面进行移动以调节所述传送带的张紧度。Optionally, in some embodiments of the present invention, the transmission wheel includes a transmission roller and a transmission belt tensioner, the transmission roller is used for conveying the transmission belt, and the transmission belt tensioner can be used for conveying along the transmission belt. The plane moves to adjust the tension of the conveyor belt.

可选的,在本发明的一些实施例中,传动滚轮包括一个主动传动滚轮和两个从动传动滚轮,所述主动传动滚轮设于所述传送带的传送起始端,所述传送带张紧轮设于所述传送带的传送结束端,所述从动传动滚轮设于所述主动传动滚轮和所述传送带张紧轮之间。Optionally, in some embodiments of the present invention, the transmission roller includes one active transmission roller and two driven transmission rollers, the active transmission roller is provided at the transmission starting end of the conveyor belt, and the conveyor belt tensioner is provided. At the end of the transmission of the conveyor belt, the driven transmission roller is arranged between the driving transmission roller and the conveyor belt tensioner.

相应的,本发明还提供一种像素定义层的制备方法,所述制备方法包括:Correspondingly, the present invention also provides a method for preparing a pixel definition layer, the preparation method comprising:

提供基板,所述基板包括位于所述基板表面的电极;providing a substrate including electrodes on a surface of the substrate;

在所述基板上涂覆一层像素定义层光阻,所述像素定义层光阻覆盖所述电极;Coating a layer of pixel definition layer photoresist on the substrate, the pixel definition layer photoresist covering the electrode;

将所述基板通过本发明任意一项实施例所述的制备装置,压印得到像素开口对应的凹槽;Passing the substrate through the preparation device described in any one of the embodiments of the present invention, and imprinting the grooves corresponding to the pixel openings;

对所述像素定义层光阻进行固化;curing the pixel definition layer photoresist;

对所述像素定义层光阻进行刻蚀减薄处理,得到所述像素开口,所述像素开口露出所述电极。The pixel definition layer photoresist is etched and thinned to obtain the pixel opening, and the pixel opening exposes the electrode.

可选的,在本发明的一些实施例中,所述对所述像素定义层光阻进行固化的操作在所述凹槽压印完成之后10分钟之内完成。Optionally, in some embodiments of the present invention, the operation of curing the pixel definition layer photoresist is completed within 10 minutes after the groove imprinting is completed.

本发明提供了一种像素定义层的制备装置及制备方法,通过采用本发明实施例提供的所述制备装置,实施本发明实施例提供的所述制备方法,仅通过涂布、压印、固化、刻蚀四步工艺制程即可在基板上制备得到所需的像素定义层,相比与现有技术需要经过涂布、固化、曝光、显影、蚀刻多道制造工艺流程,需要用到精密的曝光设备及精密的掩模版,本发明节省了像素定义层制备过程中的设备和材料成本,提高了像素定义层的生产效率。The present invention provides a preparation device and a preparation method for a pixel definition layer. By using the preparation device provided by the embodiment of the present invention, the preparation method provided by the embodiment of the present invention is implemented, and only by coating, imprinting, curing , The four-step etching process can prepare the required pixel definition layer on the substrate. Compared with the prior art, which requires multiple manufacturing processes of coating, curing, exposure, development, and etching, it requires the use of precise With exposure equipment and a precise mask, the invention saves equipment and material costs in the process of preparing the pixel definition layer, and improves the production efficiency of the pixel definition layer.

附图说明Description of drawings

下面结合附图,通过对本申请的具体实施方式详细描述,将使本申请的技术方案及其它有益效果显而易见。The technical solutions and other beneficial effects of the present application will be apparent through the detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings.

图1为本发明实施例提供的像素定义层的制备装置的结构示意图;FIG. 1 is a schematic structural diagram of a device for preparing a pixel definition layer according to an embodiment of the present invention;

图2为本发明实施例提供的像素定义层的制备方法的流程图;2 is a flowchart of a method for preparing a pixel definition layer according to an embodiment of the present invention;

图3为本发明实施例提供的像素定义层的制备方法的结构示意图。FIG. 3 is a schematic structural diagram of a method for preparing a pixel definition layer according to an embodiment of the present invention.

具体实施方式Detailed ways

下面将结合本发明的具体实施方案,对本发明实施方案和/或实施例中的技术方案进行清楚、完整的描述,显而易见的,下面所描述的实施方案和/或实施例仅仅是本发明一部分实施方案和/或实施例,而不是全部的实施方案和/或实施例。基于本发明中的实施方案和/或实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施方案和/或实施例,都属于本发明保护范围。The following will clearly and completely describe the technical solutions in the embodiments and/or examples of the present invention in conjunction with the specific embodiments of the present invention. Obviously, the embodiments and/or examples described below are only part of the implementation of the present invention. Protocols and/or Examples, but not all embodiments and/or Examples. Based on the embodiments and/or examples in the present invention, all other embodiments and/or examples obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

本发明所提到的方向用语,例如[上]、[下]、[左]、[右]、[前]、[后]、[内]、[外]、[侧]等,仅是参考附加图式的方向。因此,使用的方向用语是用以说明和理解本发明,而非用以限制本发明。术语“第一”、“第二”等仅用于描述目的,而不能理解为指示或是暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”等的特征可以明示或者隐含地包括一个或者更多个该特征。The directional terms mentioned in the present invention, such as [up], [down], [left], [right], [front], [rear], [inner], [outer], [side], etc., are only for reference Additional schema orientation. Therefore, the directional terms used are for describing and understanding the present invention, not for limiting the present invention. The terms "first", "second", etc. are only used for descriptive purposes, and should not be construed as indicating or implying their relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second", etc., may expressly or implicitly include one or more of that feature.

本发明提供一种像素定义层的制备装置及采用该制备装置制备像素定义层的制备方法,以同时解决现有像素定义层制程中存在成本高、工艺流程复杂、生产效率低的问题。The invention provides a preparation device for a pixel definition layer and a preparation method for preparing a pixel definition layer by using the preparation device, so as to simultaneously solve the problems of high cost, complicated process flow and low production efficiency in the existing pixel definition layer manufacturing process.

请参照图1,图1示出了本发明实施例提供的像素定义层的制备装置的结构示意图。本发明提供一种像素定义层的制备装置,用于制备显示面板的像素定义层,所述像素定义层包括像素开口,所述像素开口贯穿所述像素定义层且露出所述像素定义层覆盖下的电极,所述制备装置包括:Referring to FIG. 1 , FIG. 1 shows a schematic structural diagram of an apparatus for preparing a pixel definition layer provided by an embodiment of the present invention. The present invention provides a device for preparing a pixel definition layer, which is used for preparing a pixel definition layer of a display panel. The pixel definition layer includes a pixel opening, and the pixel opening penetrates the pixel definition layer and exposes the underside of the pixel definition layer. The electrode, the preparation device includes:

传送单元,用于传送基板,所述基板包括位于所述基板背离所述传送单元一侧的像素定义层光阻;a transfer unit for transferring a substrate, the substrate comprising a pixel definition layer photoresist on a side of the substrate away from the transfer unit;

Bank压印模具,设于所述基板背离所述传送单元的一侧,用于压印所述像素定义层光阻以得到所述像素开口对应的凹槽。A bank imprinting mold is disposed on the side of the substrate away from the transfer unit, and is used for imprinting the photoresist of the pixel definition layer to obtain grooves corresponding to the pixel openings.

具体的,所述Bank压印模具包括外模和内模,所述外模套设于所述内模外,所述外模的圆心与所述内模的圆心重合。Specifically, the Bank imprinting mold includes an outer mold and an inner mold, the outer mold is sleeved outside the inner mold, and the center of the outer mold coincides with the center of the inner mold.

所述外模包括刚性滚筒和至少两个模齿,所述模齿均匀间隔设置于所述刚性滚筒上,且设于所述刚性滚筒背离所述内模的一侧。相邻的所述模齿之间的间隙由待压印的基板的相邻像素之间的距离决定,即相邻的所述模齿的展开距离与相邻的所述凹槽之间的距离相同;所述模齿的形状和大小分别与所述像素的大小和形状相对应,即所述模齿的形状和大小分别与所述凹槽的形状和大小对应相同;所述模齿的高度为30-80微米,即所述模齿背离所述刚性滚筒的表面到所述刚性滚筒的距离为30-80微米。所述刚性滚筒为无缝拼接的镍合金滚筒,所述刚性滚筒的内径为20-100厘米,所述刚性滚筒的厚度为300-800微米。所述刚性滚筒和所述模齿一体设置,所述模齿的材料也为镍合金。The outer mold includes a rigid drum and at least two mold teeth, the mold teeth are arranged on the rigid drum at an even interval, and are arranged on the side of the rigid drum away from the inner mold. The gap between the adjacent die teeth is determined by the distance between adjacent pixels of the substrate to be imprinted, that is, the distance between the expansion distance of the adjacent die teeth and the adjacent grooves The shape and size of the die teeth correspond to the size and shape of the pixels respectively, that is, the shape and size of the die teeth correspond to the shape and size of the grooves respectively; the height of the die teeth It is 30-80 microns, that is, the distance from the surface of the die teeth facing away from the rigid cylinder to the rigid cylinder is 30-80 microns. The rigid drum is a seamless spliced nickel alloy drum, the inner diameter of the rigid drum is 20-100 cm, and the thickness of the rigid drum is 300-800 microns. The rigid roller and the die teeth are integrally arranged, and the die teeth are also made of nickel alloy.

所述内模为中空的弹性滚筒,优选为中空的橡胶滚筒,所述弹性滚筒的外径为20-100厘米。所述弹性滚筒的中空空间可以进行充气,以使所述内模进行膨胀扩张,从而对所述外模进行支撑和固定。The inner mold is a hollow elastic drum, preferably a hollow rubber drum, and the outer diameter of the elastic drum is 20-100 cm. The hollow space of the elastic roller can be inflated to make the inner mold expand and expand, so as to support and fix the outer mold.

所述传送单元包括传送轮和传送带,所述传送带套设于所述传送轮的外周,所述传送带用于对所述基板进行传送,所述传送轮用于驱动所述传送带。所述传送轮包括传动滚轮和传送带张紧轮,所述传动滚轮用于传送所述传送带,所述传送带张紧轮用于调节所述传送带的张紧度。在一种实施例中,所述传动滚轮仅为一个,所述传动滚轮与所述传送带张紧轮分别位于所述传送带的两端,所述传动滚轮设于所述传送带的传送起始端,所述传送带张紧轮设于所述传送带的传送结束端。所述传动滚轮的传动轴为固定传动轴,所述传送带张紧轮的传动轴为活动传动轴,所述传送带张紧轮可以沿所述传送带的传送平面进行移动。在另一种实施例中,所述传动滚轮包括一个主动传动滚轮和两个从动传动滚轮,所述主动传动滚轮设于所述传送带的传送起始端,所述传送带张紧轮设于所述传送带的传送结束端,所述从动传动滚轮设于所述主动传动滚轮和所述传送带张紧轮之间,所述主动传动滚轮、两个所述从动传动滚轮、所述传送带张紧轮的外径大小相等,且所述主动传动滚轮、两个所述从动传动滚轮、所述传送带张紧轮的圆心位于同一直线上。所述主动传动滚轮的传动轴为固定传动轴,所述传送带张紧轮的传动轴为活动传动轴,所述传送带张紧轮可以沿所述传送带的传送平面进行移动,所述从动传动滚轮的传动轴可以是固定传动轴,也可以是活动传动轴。The conveying unit includes a conveying wheel and a conveying belt, the conveying belt is sleeved on the outer periphery of the conveying wheel, the conveying belt is used for conveying the substrate, and the conveying wheel is used for driving the conveying belt. The transmission wheel includes a transmission roller and a transmission belt tensioner, the transmission roller is used for conveying the transmission belt, and the transmission belt tensioner is used for adjusting the tension of the transmission belt. In one embodiment, there is only one transmission roller, the transmission roller and the conveyor belt tensioner are respectively located at two ends of the conveyor belt, and the transmission roller is arranged at the transmission starting end of the conveyor belt, so The conveyor belt tensioning pulley is arranged at the end of the transmission of the conveyor belt. The transmission shaft of the transmission roller is a fixed transmission shaft, the transmission shaft of the conveyor belt tensioner is a movable transmission shaft, and the conveyor belt tensioner can move along the transmission plane of the conveyor belt. In another embodiment, the transmission roller includes one active transmission roller and two driven transmission rollers, the active transmission roller is provided at the transmission starting end of the conveyor belt, and the conveyor belt tensioner is provided at the At the end of the transmission of the conveyor belt, the driven transmission roller is arranged between the active transmission roller and the conveyor belt tensioner, the active transmission roller, the two driven transmission rollers, and the conveyor belt tensioner The outer diameters are equal in size, and the centers of the driving roller, the two driven rollers, and the belt tensioner are located on the same straight line. The drive shaft of the active drive roller is a fixed drive shaft, the drive shaft of the conveyor belt tensioner is a movable drive shaft, the conveyor belt tensioner can move along the conveying plane of the conveyor belt, and the driven drive roller The drive shaft can be a fixed drive shaft or a movable drive shaft.

进一步,所述传送单元还包括压力调节滚轴,所述压力调节滚轴位于所述传送带内,所述传送带套设于所述压力调节滚轴之外。所述Bank压印模具的圆心和所述压力调节滚轴的圆心之间的连线与所述传送带垂直,所述压力调节滚轴可以朝向或背离所述Bank压印模具进行移动,以调节所述Bank压印模具和所述传送带之间的距离,进而调节所述模齿对所述带压印基板的作用力。进一步,所述压力调节滚轴位于所述传送单元的中间位置,即所述Bank压印模具位于所述传送单元的正上方。Further, the conveying unit further includes a pressure adjusting roller, the pressure adjusting roller is located in the conveying belt, and the conveying belt is sleeved outside the pressure adjusting roller. The line between the center of the Bank imprinting die and the center of the pressure regulating roller is perpendicular to the conveyor belt, and the pressure regulating roller can move toward or away from the Bank imprinting die to adjust the The distance between the Bank imprinting die and the conveyor belt is adjusted, thereby adjusting the force of the die teeth on the belt imprinting substrate. Further, the pressure adjusting roller is located in the middle position of the conveying unit, that is, the Bank imprinting die is located just above the conveying unit.

相应的,本发明提供一种像素定义层的制备方法,所述像素定义层采用本发明任意一种实施例提供的制备装置制备得到,请参照图2和图3,所述制备方法包括:Correspondingly, the present invention provides a method for preparing a pixel definition layer. The pixel definition layer is prepared by using the preparation device provided by any one of the embodiments of the present invention. Please refer to FIG. 2 and FIG. 3 . The preparation method includes:

步骤S1、提供基板,所述基板包括位于所述基板表面的电极;请参照图3中(a)。In step S1, a substrate is provided, and the substrate includes electrodes located on the surface of the substrate; please refer to (a) in FIG. 3 .

步骤S2、在所述基板上涂覆一层像素定义层光阻,所述像素定义层光阻覆盖所述电极;请参照图3中(b)。优选所述像素定义层光阻的材料为流动性较差的UV固化胶。Step S2, coating a layer of pixel definition layer photoresist on the substrate, and the pixel definition layer photoresist covers the electrodes; please refer to FIG. 3(b). Preferably, the material of the pixel definition layer photoresist is UV curable adhesive with poor fluidity.

步骤S3、将所述基板通过所述制备装置,压印得到像素开口对应的凹槽;请参照图3中(c)。Step S3 , passing the substrate through the preparation device, and imprinting the grooves corresponding to the pixel openings; please refer to (c) in FIG. 3 .

具体的,在完成步骤S2后,首先,将带有所述像素定义层光阻的基板放置与所述传送带上,所述像素定义层光阻位于所述基板背离所述传送带的一侧,所述传送带在所述主动传动滚轮的驱动下,带动所述基板向前传输,在该过程中,所述从动传动滚轮辅助传送所述基板,所述传送带张紧轮根据需要调节所述传送带的张紧度。然后,随着所述基板传送至所述Bank压印模具的正下方,通过调节所述压力调节滚轴,调整所述Bank压印模具对所述基板的压力,使所述基板与所述Bank压印模具接触,所述Bank压印模具随着所述基板的传送进行转动,从而带动所述模齿对所述像素定义层光阻进行压印处理,使所述基板脱离所述Bank压印模具之后形成像素开口对应的凹槽。最后,所述传送带带动所述基板继续进行传输,离开所述制备装置。Specifically, after step S2 is completed, first, the substrate with the pixel definition layer photoresist is placed on the conveyor belt, and the pixel definition layer photoresist is located on the side of the substrate away from the conveyor belt, so Driven by the driving roller, the conveyor belt drives the substrate to transmit forward. During this process, the driven roller assists in conveying the substrate, and the tensioning wheel of the conveyor belt adjusts the speed of the conveyor belt as required. tension. Then, as the substrate is conveyed to just below the Bank imprinting die, the pressure of the Bank imprinting die on the substrate is adjusted by adjusting the pressure adjusting roller, so that the substrate and the Bank The imprinting die is in contact, and the Bank imprinting die rotates with the conveyance of the substrate, thereby driving the die teeth to imprint the photoresist of the pixel definition layer, so that the substrate is separated from the Bank imprinting The mold then forms grooves corresponding to the pixel openings. Finally, the conveyor belt drives the substrate to continue to transmit and leave the preparation device.

步骤S4、对所述像素定义层光阻进行固化。Step S4, curing the pixel definition layer photoresist.

具体的,为了保证所述像素开口的精度,避免由于长时间放置,所述像素定义层光阻流动总成所述凹槽的形状发生变化,在完成步骤S3之后,所述步骤S4对所述像素定义层光阻进行固化的操作需要在所述凹槽压印完成之后10分钟之内完成。所述对所述像素定义层光阻进行固化具体为对所述像素定义层光阻进行UV光照射,以使所述像素定义层光阻固化。Specifically, in order to ensure the accuracy of the pixel opening and prevent the shape of the groove of the pixel definition layer photoresist flow assembly from changing due to long-term placement, after step S3 is completed, the step S4 The operation of curing the photoresist of the pixel definition layer needs to be completed within 10 minutes after the groove imprinting is completed. The curing of the pixel-defining layer photoresist is specifically irradiating the pixel-defining layer photoresist with UV light, so as to cure the pixel-defining layer photoresist.

步骤S5、对所述像素定义层光阻进行刻蚀减薄处理,得到所述像素开口,所述像素开口露出所述电极;请参照图3中(d)。Step S5, etching and thinning the photoresist of the pixel definition layer to obtain the pixel opening, and the pixel opening exposes the electrode; please refer to (d) in FIG. 3 .

具体的,对所述像素定义层进行刻蚀减薄处理为对整个所述像素定义层光阻进行刻蚀,由于所述凹槽位置的所述像素定义层光阻的厚度较小,所述凹槽外的所述像素定义层光阻的厚度较大,通过控制刻蚀工艺参数,使得所述凹槽底部的所述像素定义层光阻被刻蚀掉,形成所述像素开口,所述凹槽外的所述像素定义层光阻得以保留,得到最终所需的像素定义层。Specifically, the etching and thinning process on the pixel definition layer is to etch the entire photoresist of the pixel definition layer. Since the thickness of the photoresist of the pixel definition layer at the groove position is small, the The thickness of the photoresist of the pixel definition layer outside the groove is relatively large. By controlling the etching process parameters, the photoresist of the pixel definition layer at the bottom of the groove is etched away to form the pixel opening. The pixel-defining layer photoresist outside the groove is retained to obtain the final desired pixel-defining layer.

综上所述,本发明实施例提供了一种像素定义层的制备装置及制备方法,通过采用本发明实施例提供的所述制备装置,实施本发明实施例提供的所述制备方法,仅通过涂布、压印、固化、刻蚀四步工艺制程即可在基板上制备得到所需的像素定义层,相比与现有技术需要经过涂布、固化、曝光、显影、蚀刻多道制造工艺流程,需要用到精密的曝光设备及精密的掩模版,本发明节省了像素定义层制备过程中的设备和材料成本,提高了像素定义层的生产效率。To sum up, the embodiments of the present invention provide a preparation device and a preparation method for a pixel definition layer. By using the preparation device provided by the embodiments of the present invention to implement the preparation method provided by the embodiments of the present invention, only by The four-step process of coating, imprinting, curing, and etching can prepare the desired pixel definition layer on the substrate. Compared with the prior art, it requires multiple manufacturing processes of coating, curing, exposure, development, and etching. The process requires the use of precise exposure equipment and a precise mask, the invention saves the cost of equipment and materials in the process of preparing the pixel definition layer, and improves the production efficiency of the pixel definition layer.

以上对本发明实施例所提供的像素定义层的制备装置及制备方法进行了详细介绍,本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本发明的限制。The preparation device and preparation method of the pixel definition layer provided by the embodiments of the present invention have been described in detail above. The principles and implementations of the present invention are described with specific examples in this paper. The descriptions of the above embodiments are only used to help understanding. The method of the present invention and its core idea; at the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation and application scope. In summary, the content of this description should not be understood to limit the present invention.

Claims (10)

1. An apparatus for preparing a pixel defining layer, the pixel defining layer including a pixel opening, comprising:
the transmission unit is used for transmitting a substrate, and the substrate comprises a pixel definition layer photoresistor which is positioned on one side of the substrate, which is far away from the transmission unit;
and the imprinting mold is arranged on one side of the substrate, which is far away from the transmission unit, and is used for imprinting the pixel definition layer photoresist to obtain a groove corresponding to the pixel opening.
2. The manufacturing apparatus of claim 1, wherein the imprinting mold comprises an outer mold and an inner mold, and the outer mold is sleeved outside the inner mold.
3. A manufacturing apparatus as set forth in claim 2 wherein said outer mold comprises a rigid roller and at least two mold teeth, said mold teeth being disposed on a side of said rigid roller facing away from said inner mold, said mold teeth being for imprinting said pixel defining layer photoresist to obtain grooves corresponding to said pixel openings.
4. The manufacturing apparatus as set forth in claim 2, wherein said inner mold is a hollow elastic roller, and a hollow space of said elastic roller is inflatable.
5. The manufacturing apparatus according to claim 1, wherein the conveying unit includes a conveying wheel and a conveyor belt, the conveyor belt is sleeved on an outer circumference of the conveying wheel, and the conveying wheel is configured to drive the conveyor belt to convey the substrate.
6. The manufacturing apparatus as set forth in claim 5, wherein the conveying unit further includes a pressure-adjusting roller, the conveyor belt is sleeved outside the pressure-adjusting roller, a connecting line between a center of the imprint mold and a center of the pressure-adjusting roller is perpendicular to the conveyor belt, and the pressure-adjusting roller is movable toward or away from the imprint mold.
7. The manufacturing apparatus of claim 5, wherein said conveyor wheel includes a drive roller for conveying said conveyor belt and a belt tensioner movable along a conveying plane of said conveyor belt to adjust a tension of said conveyor belt.
8. The manufacturing apparatus as set forth in claim 7 wherein said drive rollers include a drive roller disposed at a conveyance start end of said conveyor belt and two driven rollers disposed between said drive roller and said belt tensioner, said belt tensioner being disposed at a conveyance end of said conveyor belt.
9. A method for preparing a pixel definition layer, comprising:
providing a substrate comprising an electrode on a surface of the substrate;
coating a layer of pixel definition layer photoresist on the substrate, wherein the pixel definition layer photoresist covers the electrode;
the substrate is pressed through the preparation device according to any one of claims 1 to 8 to obtain a groove corresponding to a pixel opening;
curing the pixel definition layer photoresist;
and etching and thinning the pixel definition layer light resistance to obtain the pixel opening, wherein the pixel opening exposes the electrode.
10. The manufacturing method according to claim 9, wherein the curing of the pixel defining layer photoresist is completed within 10 minutes after the groove imprinting is completed.
CN202210272097.6A 2022-03-18 2022-03-18 Preparation device and preparation method of pixel definition layer Pending CN114695828A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210272097.6A CN114695828A (en) 2022-03-18 2022-03-18 Preparation device and preparation method of pixel definition layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210272097.6A CN114695828A (en) 2022-03-18 2022-03-18 Preparation device and preparation method of pixel definition layer

Publications (1)

Publication Number Publication Date
CN114695828A true CN114695828A (en) 2022-07-01

Family

ID=82138152

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210272097.6A Pending CN114695828A (en) 2022-03-18 2022-03-18 Preparation device and preparation method of pixel definition layer

Country Status (1)

Country Link
CN (1) CN114695828A (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060210707A1 (en) * 2005-03-18 2006-09-21 Ga-Lane Chen Method for manufacturing color filters
CN201566183U (en) * 2009-12-09 2010-09-01 上海泓阳机械有限公司 Vacuum printing unit of wallpaper
CN101909859A (en) * 2008-02-27 2010-12-08 夏普株式会社 Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method
CN105058872A (en) * 2015-08-03 2015-11-18 桂林威迈壁纸有限公司 Vacuum wallpaper printing device capable of displaying wallpaper tension
CN206051542U (en) * 2016-09-06 2017-03-29 南京鹏派新材料科技有限公司 A kind of ultraviolet roller type nano-imprinting device
CN106696443A (en) * 2017-02-28 2017-05-24 湖北劲佳包装有限公司 Pressure adjusting structure for paperboard printing machine
CN206383652U (en) * 2016-12-30 2017-08-08 无锡光群雷射科技有限公司 Pre-heated seamless molding mechanism
CN107068861A (en) * 2016-07-15 2017-08-18 广东聚华印刷显示技术有限公司 Electroluminescent device and its preparation method and application
CN113060939A (en) * 2021-03-15 2021-07-02 蓝思科技股份有限公司 Method for forming frosting by dry etching substrate, frosting substrate and application
CN215792481U (en) * 2021-05-27 2022-02-11 广州市龙珠化工有限公司 UV curing transfer machine

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060210707A1 (en) * 2005-03-18 2006-09-21 Ga-Lane Chen Method for manufacturing color filters
CN101909859A (en) * 2008-02-27 2010-12-08 夏普株式会社 Roller type nano-imprint device, mold roll for the roller type nano-imprint device, fixed roll for the roller type nano-imprint device, and nano-imprint sheet manufacturing method
CN201566183U (en) * 2009-12-09 2010-09-01 上海泓阳机械有限公司 Vacuum printing unit of wallpaper
CN105058872A (en) * 2015-08-03 2015-11-18 桂林威迈壁纸有限公司 Vacuum wallpaper printing device capable of displaying wallpaper tension
CN107068861A (en) * 2016-07-15 2017-08-18 广东聚华印刷显示技术有限公司 Electroluminescent device and its preparation method and application
CN206051542U (en) * 2016-09-06 2017-03-29 南京鹏派新材料科技有限公司 A kind of ultraviolet roller type nano-imprinting device
CN206383652U (en) * 2016-12-30 2017-08-08 无锡光群雷射科技有限公司 Pre-heated seamless molding mechanism
CN106696443A (en) * 2017-02-28 2017-05-24 湖北劲佳包装有限公司 Pressure adjusting structure for paperboard printing machine
CN113060939A (en) * 2021-03-15 2021-07-02 蓝思科技股份有限公司 Method for forming frosting by dry etching substrate, frosting substrate and application
CN215792481U (en) * 2021-05-27 2022-02-11 广州市龙珠化工有限公司 UV curing transfer machine

Similar Documents

Publication Publication Date Title
US9172063B2 (en) Method and apparatus for manufacturing display devices
TWI723198B (en) Apparatus for imprinting discrete substrates with a flexible stamp
JP5761031B2 (en) Method for continuously forming laminated optical functional element sheet and laminated optical functional element sheet forming apparatus
US9616461B2 (en) Roll mold, method for fabricating the same and method for fabricating thin film pattern using the same
JP5867764B2 (en) UV forming apparatus and method for roll-to-roll alignment
WO2021243948A1 (en) System and method for thin film processing
US8529714B2 (en) Roll mold, method for fabricating the same and method for fabricating thin film pattern using the same
CN114695828A (en) Preparation device and preparation method of pixel definition layer
KR101479940B1 (en) Imprinter
TW201334948A (en) Imprinting apparatus and imprinting method
KR101545500B1 (en) Imprinter
KR101479939B1 (en) Imprinter
JP5891861B2 (en) Reverse printing method and reverse printing apparatus
KR100812313B1 (en) Roll coating equipment
JP2008285281A (en) Device and method for conveying flexible substrate
KR101089601B1 (en) LGP Coating Equipment
KR101808522B1 (en) Roll mold and method of fabricating the same
JP2014162111A (en) Mold for pattern transfer and pattern transfer device using the same
CN208873001U (en) A kind of imprinting apparatus
KR101873048B1 (en) Polarized Film Attaching Apparatus for Display Panel
KR101706230B1 (en) Roll mold, method of fabricating the same, and method of fabricating thin film pattern using roll mold
CN213368229U (en) Thin film processing system
KR20060135574A (en) Roll coating equipment
WO2021243950A1 (en) Thin film processing system and method
CN118584744A (en) Imprinting equipment and imprinting method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination