CN114690582A - Anti-collision device and photoetching equipment - Google Patents

Abstract

When external force impacts a buffer assembly in the anti-collision assembly, the buffer assembly pushes a piston assembly in the anti-collision assembly to move towards a pressure cavity in a shell of the anti-collision assembly so as to compress the pressure cavity, and the pressure cavity generates reaction force so as to buffer the external force. Meanwhile, when the buffer assembly pushes the piston to move towards the pressure cavity, the control assembly sends out an instruction when the sensor arranged on the buffer assembly and the sensor arranged on the shell are separated from each other or approach to each other to a preset distance. Therefore, when the anti-collision device is used for preventing collision of the motion platform, the force generated in the process of external force collision can be buffered, and meanwhile, the motion of the motion platform can be controlled by sending an instruction through the control assembly, so that the problem that the motion platform is damaged due to secondary or multiple collisions caused by continuous motion of the motion platform is solved.

Description

Anti-collision device and lithography equipment

technical field

The present invention relates to the technical field of lithography, in particular to an anti-collision device and a lithography apparatus.

Background technique

Photolithography is a very important process in the semiconductor manufacturing process. It is a process in which a series of patterns on a mask are sequentially transferred to the corresponding layers of the substrate through exposure. It is considered to be the core step in the manufacture of large-scale integrated circuits. A series of complex and time-consuming photolithography processes in semiconductor manufacturing are mainly completed by corresponding photolithography equipment.

A lithography apparatus includes multiple moving stages, such as a workpiece stage, a mask stage, etc., and the positions of each moving stage need to be adjusted during specific lithography. Inevitably, the motion stage of the lithography equipment may encounter accidental collisions in various situations during operation. A crash device is essential. At present, an anti-collision device is usually installed on the working table to prevent the impact, but when the impact occurs or after the impact, the impact cannot be known by the technicians, and the sports table continues to move, so it usually occurs twice or even multiple times. The damage of the motor and the resulting accidents caused by the impact, such as the impact of motor burning on the environmental cleanliness of the lithography machine, etc.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide an anti-collision device and a lithography apparatus, so as to solve the problem that in the prior art lithography equipment, after the impact of the workpiece table movement is buffered by the anti-collision device, two or even multiple impacts will still occur, causing the workpiece The problem of damage to the table.

In order to solve the above-mentioned technical problems, the present invention provides an anti-collision device, comprising:

The anti-collision assembly includes a hydraulic buffer and a buffer assembly, the hydraulic buffer includes a casing and a piston assembly, the casing has a first cavity, and one end of the piston assembly extends into the first cavity. A cavity is used to divide the first cavity into a pressure cavity and a hydraulic cavity with liquid, and the other end of the piston assembly is connected with the buffer assembly, so that when an external force hits the buffer assembly, the buffer The assembly pushes the piston toward the direction of the pressure chamber to squeeze the pressure chamber;

a control assembly, the control assembly includes a sensor mounted on the buffer assembly and a sensor mounted on the housing, the sensor and the sensor are used to push the piston toward the buffer assembly When the pressure chambers move, they are separated from each other to a predetermined distance to issue commands.

Optionally, the control assembly further includes a first fixing rod and a transverse rod, the first fixing rod is fixed on the buffer assembly, one end of the transverse rod is fixed on the first fixing rod, and the other end faces the first fixing rod. The housing direction extends and is fixed with the sensor.

Optionally, the control assembly further includes a second fixing rod, one end of the second fixing rod is fixed on the housing, and the other end of the second fixing rod is fixed with the sensor.

Optionally, the buffer assembly includes a bracket and a buffer head, the bracket is fixed on one end of the piston assembly away from the housing, the bracket is mounted with the sensor, and the buffer head is installed on the The bracket is on a side away from the housing.

Optionally, the bracket has an installation groove, the buffer head is installed in the installation groove and protrudes from the bracket, and the part of the buffer head protruding from the bracket is used for being hit by an external force.

Optionally, the buffer assembly further includes a connecting pin, and the connecting pin penetrates the installation groove and the buffer head to install the buffer head in the installation groove.

Optionally, the buffer assembly further includes a retaining ring, the retaining ring is sleeved on the part of the connecting pin protruding from the bracket, and abuts with the bracket.

Optionally, the buffer head has a second cavity, the inner wall of the buffer head is provided with at least one reinforcement ring surrounding the second cavity, and the reinforcement ring is used to enhance the resistance of the buffer head .

Optionally, the enhancement ring is set intermittently.

Optionally, there are multiple reinforcement rings, the multiple reinforcement rings are arranged at intervals, and the spacing distances between adjacent reinforcement rings are equal.

Optionally, the bracket includes a first bracket and a second bracket that are connected to each other, the first bracket is mounted with the sensor, and the second bracket is fixed on an end of the piston assembly away from the housing The buffer head is mounted on the second bracket.

Optionally, there is a gap between the first bracket and the second bracket, and the bracket further includes an adjustment member, and the adjustment member is connected to the first bracket and the second bracket across the gap, Used to adjust the width of the gap.

Optionally, the piston assembly includes a piston and a piston rod, and the hydraulic buffer further includes a limit block located in the first cavity, and the limit block is disposed at least around the piston rod to The piston assembly is limited; and the piston assembly and the limiting block divide the first cavity into a hydraulic chamber and a pressure chamber.

Optionally, the limiting block is arranged around the inner wall of the housing, and a liquid outlet hole is provided on the limiting block located between the hydraulic chamber and the pressure chamber.

Optionally, the hydraulic buffer further includes an elastic member, the elastic member is disposed on the piston assembly between the housing and the buffer assembly; and/or, the hydraulic buffer further includes a A buffer cavity in the housing, the buffer cavity is arranged on the side of the pressure cavity away from the piston assembly, and the elastic member is arranged in the buffer cavity.

Optionally, the elastic member includes a spring.

Optionally, the hydraulic shock absorber further includes at least one seal, which is disposed at least at the interface of the piston assembly and the housing to seal the first cavity.

In order to solve the above problems, the present invention also provides a lithography apparatus, the lithography apparatus includes a rack having a chamber, a motion table located in the chamber, and the anti-collision device according to any one of the above, the The anti-installation device is installed on the sports table or on the inner wall of the frame, and is used for buffering the sports table from being hit by an external force.

Optionally, the number of the anti-collision devices is four, and the four anti-collision devices are installed at the four corners of the workpiece table, or the four anti-collision devices are set in two groups, and there are two groups of the anti-collision devices. Installed on two opposite inner walls of the rack.

The present invention provides an anti-collision device. The anti-collision device includes an anti-collision component and a control component. When an external force hits a buffer component in the anti-collision component, the buffer component pushes the piston component in the anti-collision component toward a shell located in the anti-collision component. The pressure chamber in the body moves to compress the pressure chamber, and the pressure chamber generates a reaction force, thereby buffering the external force. At the same time, when the buffer assembly pushes the piston to move toward the pressure chamber, the control assembly sends an instruction when the sensor mounted on the buffer assembly and the sensor mounted on the housing are separated from each other or approach each other to a predetermined distance. In this way, when the anti-collision device is used for anti-collision of the sports platform, it can not only buffer the force generated by the impact of external force, but also avoid the movement caused by the second or multiple impacts caused by the continuous movement of the sports platform. The problem of damage to the table.

Description of drawings

FIG. 1 is a schematic structural diagram of an anti-collision device according to an embodiment of the present invention.

2 is a schematic structural diagram of a hydraulic shock absorber in an anti-collision device according to an embodiment of the present invention.

FIG. 3 is a schematic structural diagram of a buffer head in a buffer assembly in an anti-collision device according to an embodiment of the present invention.

FIG. 4 is another schematic structural diagram of a buffer assembly in an anti-collision device according to an embodiment of the present invention.

FIG. 5 is a schematic structural diagram of a side view of a lithography apparatus according to an embodiment of the present invention.

FIG. 6 is a schematic top-view structural diagram of a lithography apparatus according to an embodiment of the present invention.

FIG. 7 is a schematic structural diagram of another side view of the lithography apparatus according to an embodiment of the present invention.

FIG. 8 is another top-view structural schematic diagram of a lithography apparatus according to an embodiment of the present invention.

reference number

1- Anti-collision components;

11- hydraulic buffer;

111-housing; 112-piston assembly;

1121-piston; 1122-piston rod;

113-limit stop; 114-seal;

115-elastic part; 116-check valve;

117 - lock nut;

11A-first cavity; 11B-buffer cavity;

11A1-pressure chamber; 11A2-hydraulic chamber;

11A3- liquid outlet;

12-buffer assembly;

121 - bracket;

122-buffer head; 1221-enhancing ring;

123-connecting pin; 124-retaining ring;

125-second bracket; 126-first bracket;

12A-gap; 122A-second cavity;

125A-Second screw hole; 125B-Second adjustment hole;

126A-first screw hole; 126B-first adjustment hole;

13- coupling;

2- control components;

21- touch sensor; 22- second fixing rod;

23-sensor; 24-crossbar;

25 - the first fixed rod;

10-anti-collision device;

20 - sports table;

30-rack; 30A-chamber.

Detailed ways

The anti-collision device and the lithography apparatus proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that, the accompanying drawings are all in a very simplified form and in inaccurate scales, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present invention. Furthermore, the structures shown in the drawings are often part of the actual structure. In particular, each drawing needs to show different emphases, and sometimes different scales are used.

FIG. 1 is a schematic structural diagram of an anti-collision device according to an embodiment of the present invention. 2 is a schematic structural diagram of a hydraulic shock absorber in an anti-collision device according to an embodiment of the present invention. As shown in FIG. 1 and FIG. 2 , the anti-collision device 10 disclosed in this embodiment includes:

Anti-collision assembly 1, the anti-collision assembly 1 includes a hydraulic buffer 11 and a buffer assembly 12, the hydraulic buffer 11 includes a housing 111 and a piston assembly 112, the housing 111 has a first cavity 11A, so One end of the piston assembly 112 extends into the first cavity 11A to divide the first cavity 11A into a pressure chamber 11A1 and a hydraulic chamber 11A2 with liquid, and the other end of the piston assembly 112 is connected to the buffer assembly. 12 is connected, for when an external force hits the buffer assembly 12 , the buffer assembly 12 pushes the piston 1121 to move toward the pressure chamber 11A1 to squeeze the pressure chamber 11A1 . as well as,

A control assembly 2, the control assembly 2 includes a sensor 21 mounted on the buffer assembly 12 and a sensor 23 mounted on the housing 111, the sensor 23 and the sensor 21 are used in the When the buffer assembly 12 pushes the piston 1121 to move toward the pressure chamber 11A1 , the piston 1121 separates from each other or approaches each other to a predetermined distance, so as to issue an instruction.

An anti-collision device 10 in this embodiment includes the anti-collision component 1 and the control component 2. When an external force hits the buffer component 12 in the anti-collision component 1, the The buffer assembly 12 pushes the piston assembly 112 in the anti-collision assembly 1 toward the pressure chamber 11A1 located in the housing 111 of the anti-collision assembly 1 to move to compress the pressure chamber 11A1, so The pressure chamber 11A1 generates a reaction force, thereby buffering the external force. At the same time, when the buffer assembly 12 pushes the piston 1121 to move toward the pressure chamber 11A1, the sensor 21 installed on the buffer assembly 12 and the sensor 23 installed on the housing 111 are separated from each other or approach each other When the predetermined distance is reached, the control assembly 2 issues an instruction. In this way, when the anti-collision device 10 is used for anti-collision of the sports table, it can not only buffer the force generated when the external force is impacted, but also can control the movement of the sports table by issuing commands through the control component 2, and then the movement of the sports table can be controlled. Avoid the problem of damage to the sports table caused by secondary or multiple impacts caused by the continuous motion of the sports table.

Specifically, continuing to refer to FIGS. 1 and 2 , in this embodiment, the hydraulic buffer 11 further includes a limit block 113 located in the first cavity 11A, and the piston assembly 112 includes a piston 1121 and a piston rod 1122, one end of the piston rod 1122 is fixedly connected to the piston 1121, and the other end of the piston rod 1122 is connected to the buffer assembly 12. Wherein, the buffer assembly 12 and the piston rod are connected to each other through a coupling 13 .

Further, as shown in FIG. 2 , the limiting block 113 is disposed around at least the piston rod 1122 to limit the piston assembly 112 . And, the piston assembly 112 and the limiting block 113 divide the first cavity 11A into a hydraulic chamber 11A2 and a pressure chamber 11A1.

Specifically, continuing to refer to FIG. 1 , in this embodiment, the limiting block 113 is irregular, and is disposed around at least part of the inner wall of the housing 111 , and the limiting block 113 is connected to the housing 111 . A hydraulic chamber 11A2 is formed between the inner walls of the body 111, and the hydraulic chamber 11A2 has a liquid therein. In addition, when the limiting block 113 is completely disposed around the inner wall of the housing 111 , the space between the limiting block 113 and the piston 1121 forms the pressure chamber 11A1 . When the limiting block 113 partially surrounds the inner wall of the housing 111 , the space between the inner wall of the housing 111 , the limiting block 113 and the piston 1121 forms the pressure chamber 11A1 . In addition, in this embodiment, a liquid outlet hole 11A3 is formed on the limit block 113 between the pressure chamber 11A1 and the hydraulic chamber 11A2, and the liquid outlet hole 11A3 is used to locate the hydraulic chamber. The liquid in 11A2 flows into the pressure chamber 11A2 from the hydraulic chamber 11A2, or flows into the hydraulic chamber 11A2 from the pressure chamber 11A1. And, the pressure chamber 11A1 has air therein.

Specifically, continuing to refer to FIG. 1 in conjunction with FIG. 2 , in this embodiment, when an external force hits the buffer assembly 12 , the buffer assembly 12 moves toward the pressure chamber 11A1 , so as to drive the piston rod 1122 moves toward the pressure chamber 11A1, and the piston rod 1122 drives the piston 1121 to move to squeeze the pressure chamber 11A1. In this way, the volume of the pressure chamber 11A1 is reduced, and the pressure of the pressure chamber 11A1 is increased. When the pressure of the pressure chamber 11A1 is greater than the pressure of the hydraulic chamber 11A2, the liquid in the pressure chamber 11A1 flows to the hydraulic chamber 11A2 through the liquid outlet hole 11A3. When the external force is withdrawn and the buffer assembly 12 is not hit, the larger pressure of the pressure chamber 11A1 pushes the piston assembly 112 to move away from the pressure chamber 11A1 , the volume of the pressure chamber 11A1 increases and the pressure decreases . When the pressure of the pressure chamber 11A1 is lower than the pressure of the hydraulic chamber 11A2, the liquid in the hydraulic chamber 11A2 flows to the hydraulic chamber 11A2 through the liquid outlet hole 11A3, and the volume of the pressure chamber 11A1 increases The piston assembly 112 is further pushed to move away from the pressure chamber 11A1. Until the piston 1121 is clamped on the limiting portion of the limiting block 113 , the piston assembly 112 stops moving, and the collision device 10 is reset. Continuing to refer to FIG. 2 , the piston 1121 is now clamped on the limiting portion of the limiting block 113 , and the limiting portion can be surrounded by the limiting block 113 around the piston rod 1122 The part facing the pressure chamber 11A1 is concave.

Further, as shown in FIG. 2 , in this embodiment, the hydraulic buffer 11 further includes an elastic member 115 , and the elastic member 115 is disposed at all points between the housing 111 and the buffer assembly 12 . on the piston assembly 112. Specifically, in this embodiment, the elastic member 115 is a spring, the elastic member 115 is sleeved on the piston rod 1122 between the housing 111 and the buffer assembly 12 , and one end is fixed on the piston rod 1122 . On the housing 111 , the other end is fixed on the coupling 13 . In this way, when the buffer assembly 12 is impacted by an external force to move toward the pressure chamber 11A1 and squeeze the pressure chamber 11A1, the elastic member 115 is compressed to generate a compressive force opposite to the direction of the external force to offset at least part of the impact of the external force. When the external force is removed, the piston assembly 112 and the buffer assembly 12 move away from the pressure chamber 11A1; at this time, the elastic member 115 is reset to prevent the piston assembly 112 and the buffer assembly 12 from moving Too fast will cause the piston 1121 to have an excessive impact on the limiting block 113 . In addition, optionally, the elastic member 115 may also be an elastic block, such as an elastic block formed of materials such as rubber.

Further, as shown in FIG. 2 , in this embodiment, the hydraulic buffer 11 further has a buffer chamber 11B, and the buffer chamber 11B is located in the housing 111 and is disposed away from the pressure chamber 11A1 On one side of the piston assembly 112, the elastic member 115 is disposed in the buffer cavity 11B. In this embodiment, one end of the elastic member 115 abuts or is fixedly connected to the inner wall of the housing 111 away from the piston assembly 112 , and the other end is connected to the partition between the buffer chamber 11B and the pressure chamber 11A1 The partitions are abutted or fixedly connected. Wherein, the partition plate is movably arranged along the movement direction of the piston assembly 112 . The partition plate may be composed of a plate-like structure provided separately, or may be composed of a part of the structure of the limiting block 113 . The specific structure and forming manner of the separator are not specifically limited herein. In this way, when the buffer assembly 12 is impacted by an external force to move toward the pressure chamber 11A1 and squeeze the pressure chamber 11A1, the elastic member 115 is compressed to generate a compressive force opposite to the direction of the external force to offset at least part of the impact of the external force. When the external force is removed, the piston assembly 112 and the buffer assembly 12 move in a direction away from the pressure chamber 11A1. At this time, the elastic member 115 is stretched to generate a tensile force opposite to the movement direction of the piston assembly 112 and the buffer assembly 12, so as to prevent the piston assembly 112 and the buffer assembly 12 from moving too fast As a result, the piston 1121 has an excessive impact on the limiting block 113 . In addition, in this embodiment, the elastic member 115 is disposed on the piston assembly 112 between the housing 111 and the buffer assembly 12, and may also be disposed in the buffer chamber 11B, or the There are two elastic members 115 , and the two elastic members 115 are respectively disposed on the piston assembly 112 between the housing 111 and the buffer assembly 12 and in the buffer chamber 11B.

Further, continuing to refer to FIG. 2 , the hydraulic buffer 11 of this embodiment further includes a locking nut 117 , and the locking nut 117 is fixed on the inner wall of the housing 111 or the piston rod 1122 , And extend into the elastic member 115 to adjust the length of the part where the elastic member 115 can work, so that the elastic member 115 can be suitable for impacts with different pressures. Specifically, the elastic member 115 located in the buffer cavity 11B can be compressed close to the part of the inner wall of the housing 111 away from the piston assembly 112 , or the elastic member 115 located on the piston assembly 112 can be compressed The part close to the casing 111 is compressed; the lock nut 117 is extended into the position between the compressed part and the non-compressed part of the elastic piece 115, and then the lock nut 117 is tightened, the elastic The compressed part of the piece 115 will not work, and the uncompressed part will work. In this way, the length of the working part of the elastic member 115 can be adjusted, so that the elastic member 115 can be suitable for impacts with different pressures.

Further, continuing to refer to FIG. 2 , in this embodiment, the hydraulic buffer 11 further includes at least one sealing member 114 , and the sealing member 114 is disposed at least at the interface between the piston assembly 112 and the housing 111 . to seal the first cavity 11A to prevent the liquid in the hydraulic chamber 11A2 from flowing out of the hydraulic buffer 11 . At the same time, the sealing member 114 may also be disposed at the junction of the buffer chamber 11B and the pressure chamber 11A1 to seal the pressure chamber 11A1 . In addition, the sealing member 114 may be a sealing ring or a sealing film.

In addition, in this embodiment, continuing to refer to FIG. 2 , the hydraulic buffer 11 of this embodiment further includes a check valve 116 , and the check valve 116 is provided in the buffer chamber 11B and the pressure chamber At the junction of 11A1, the check valve 116 is used to prevent the hydraulic buffer 11 from being damaged due to excessive pressure in the pressure chamber 11A1. The structure and working principle of the check valve 116 are known in the art, and will not be repeated here.

Further, as shown in FIG. 2 and in conjunction with FIG. 1 , in this embodiment, the buffer assembly 12 includes a bracket 121 and a buffer head 122 , and the bracket 121 is fixed on the piston assembly 112 away from the casing. On one end of 111 , the buffer head 122 is installed on the side of the bracket 121 away from the housing 111 , and the sensor 21 is also installed on the bracket 121 . In this embodiment, the buffer head 122 is used to generate a force opposite to the external force when it is hit by an external force, so as to first absorb a part of the impact force generated by the external force. In this embodiment, the buffer head 122 is made of high-strength, high-toughness, high-cleanliness metal material or non-metallic material or composite material, such as precipitation hardening stainless steel, high-quality maraging steel, beryllium bronze, spring steel or 2Cr13, etc., or metal matrix composite materials based on this, or POM (polyoxymethylene plastic), part of silicone rubber, or non-metal based materials based on this.

The control assembly 2 further includes a first fixing rod 25 and a transverse rod 24, the first fixing rod 25 is fixed on the bracket 121 of the buffer assembly 12, and one end of the transverse rod 24 is fixed on the first fixing rod 24. The other end of the fixing rod 25 extends toward the casing 111 and is fixed with the sensor 21 . In this embodiment, the sensor 21 is fixed on the end of the cross bar 24 , and the sensor 21 protrudes from the cross bar 24 and extends away from the housing 111 .

In addition, the control assembly 2 further includes a second fixing rod 22 , one end of the second fixing rod 22 is fixed on the housing 111 , and the other end of the second fixing rod 22 is fixed with the sensor 23 . Continuing to refer to FIG. 1 , in this embodiment, the sensor 21 is located between the sensor 23 and the buffer assembly 12 , and when the anti-collision device 10 is not hit by an external force, the sensor 21 21 and the sensor 23 are attached. Wherein, the sensor 21 can be, for example, a metal sheet or the like. The sensor 23 may be a distance sensor capable of measuring the distance between the sensor 21 and itself. When the buffer assembly 12 is hit, the buffer assembly 12 moves toward the pressure chamber 11A1 to drive the sensor 21 fixed at the end of the crossbar 24 to move toward the pressure chamber 11A1 , In this way, the sensor 21 and the sensor 23 are separated from each other, and an instruction is issued when the sensor 21 and the sensor 23 are separated from each other by a predetermined distance. In addition, in an optional embodiment, the sensor 23 is located between the sensor 21 and the buffer assembly 12, and when the anti-collision device 10 is not impacted by an external force, the sensor 23 and the touch There is a certain distance between the devices 21. When the buffer assembly 12 is hit, the buffer assembly 12 moves toward the pressure chamber 11A1 to drive the sensor 21 fixed at the end of the crossbar 24 to move toward the pressure chamber 11A1 , In this way, the sensor 21 and the sensor 23 are brought close to each other, and an instruction is issued when the sensor 21 and the sensor 23 are close to each other to a predetermined distance.

In this embodiment, the instruction is, for example, an alarm instruction, that is, an alarm to warn the staff that the anti-collision device 10 is hit during use. Alternatively, the instruction may also be a stop instruction, that is, when the collision avoidance device 10 is used for collision avoidance, the stop instruction is used to control the carrier used by the collision avoidance device 10 to stop moving. And, the instruction can also be a recording instruction, so as to upload the fault information to a fault management library, so that the staff can analyze the fault to obtain the cause of the fault and improve the fault.

FIG. 3 is a schematic structural diagram of a buffer head in a buffer assembly in an anti-collision device according to an embodiment of the present invention. Continuing to refer to FIG. 3 in conjunction with FIG. 1 and FIG. 2 , in this embodiment, the bracket 121 has an installation slot (not shown), and the opening of the installation slot (not shown) is provided on the bracket 121 On the side away from the piston assembly 112, the buffer head 122 is installed in the installation groove (not shown) and protrudes from the bracket 121. The part of the buffer head 122 protruding from the bracket 121 is used for Impacted by an external force to absorb the impact force generated by the impact of an external force. In this embodiment, the bracket is a cylinder.

The buffer head 122 has a second cavity 122A, and the second cavity 122A penetrates the buffer head 122 . The buffer assembly 12 further includes a connecting pin 123, the connecting pin 123 penetrates the bracket 121 and the second cavity 122A of the buffer head 122 to install the buffer head 122 in the installation groove (Fig. not shown). The buffer assembly 12 further includes a retaining ring 124 . The retaining ring 124 is sleeved on the portion of the connecting pin 123 protruding from the bracket 121 and abuts with the bracket 121 . Specifically, as shown in FIG. 3 , the buffer head 122 may be a circular ring. When the buffer head 122 is struck, the kinetic energy of the impact is converted into the rotational kinetic energy of the buffer head 122 . In addition, the material forming the buffer head 122 may be a flexible material, such as rubber or the like. When the buffer head 122 is flexibly arranged, its own reliability is enhanced, and it can further absorb part of the energy, which is more suitable for the photolithography environment.

Further, as shown in FIG. 3, in this embodiment, at least one reinforcing ring 1221 surrounding the second cavity 122A is provided on the inner wall of the buffer head 122, and the reinforcing ring 1221 is used to strengthen the The resistance of the buffer head 122 is described. The material used for the reinforcing ring 1221 is the same as that of the buffer head 122 , and details are not described here.

Further, continuing to refer to FIG. 3 , in this embodiment, the reinforcing rings 1221 are arranged intermittently, so as to increase the resistance of the reinforcing rings 1221 to improve the resistance of the buffer head 122 .

Further, in this embodiment, there are a plurality of the reinforcing rings 1221 , the plurality of the reinforcing rings 1221 are arranged at intervals, and the spacing distances between the adjacent reinforcing rings 1221 are equal. In this way, not only the force resistance of the buffer head 122 can be enhanced, but also the force resistance of each part of the buffer head 122 can be made uniform.

FIG. 4 is another schematic structural diagram of a buffer assembly in an anti-collision device according to an embodiment of the present invention. Referring to FIG. 4 in combination with FIGS. 1 to 3 , in this embodiment, the bracket 121 includes a first bracket 126 and a second bracket 125 that are connected to each other, and the sensor is mounted on the first bracket 126 21. The second bracket 125 is fixed on the end of the piston assembly 112 away from the housing 111 , and the buffer head 122 is mounted on the second bracket 125 . Specifically, one end of the first fixing rod 25 is fixed to the first bracket 126 , and the other end extends away from the first bracket 126 . The first bracket 126 is provided with a first screw hole 126A, and a screw passes through the first screw hole 126A so that the first fixing rod 25 and the first bracket 126 are fixedly connected to each other. One end of the transverse rod 24 is fixed on the first fixing rod 25 , the other end extends toward the housing 111 , and the other end of the transverse rod 24 is fixed with the sensor 21 .

The second bracket 125 is provided with a second screw hole 125A. The extension direction of the second screw hole 125A is the same as the extension direction of the piston assembly 112 . The second cavity 122A of the buffer head 122 is connected to the The second screw holes 125A are aligned, so that the screws are inserted into the second cavity 122A and passed through the second screw holes 125A and then screwed on the piston rod 1122 or the coupling 13, so The coupling 13 is sleeved on the piston rod 1122 .

And, the first bracket 126 and the second bracket 125 are disposed opposite to each other and partially connected, so that there is a gap 12A between the first bracket 126 and the second bracket 125 . Optionally, the connected part of the first bracket 126 and the second bracket 125 is fixedly connected, for example, integrally formed, or fixedly connected by welding. Optionally, the first bracket 126 and the second bracket 125 may also be detachably connected by bolts. When the first bracket 126 and the second bracket 125 are detachably connected, if the first bracket 126 or the second bracket 125 is damaged, replace the damaged first bracket 126 or the second bracket 125 The second bracket 125 is sufficient.

Further, as shown in FIG. 4 , the first bracket 126 has a first adjustment hole 126B, the second bracket 125 has a second adjustment hole 125B, and the bracket 121 further includes an adjustment member (not shown in the figure). ), the adjusting member (not shown) spans the gap 12A, is connected to the first bracket 126 through the first adjustment hole 126B, and is connected to the second bracket 126 through the second adjustment hole 125B A bracket 125 is connected to adjust the width of the gap 12A.

Specifically, when the adjustment member (not shown) is connected to the first bracket 126 and the second bracket 125, and the adjustment member (not shown) is connected to the first bracket 126 and the second bracket 125 The distance between the connection points of the two brackets 125 is greater than the distance between the first adjustment hole 126B and the second adjustment hole 125B when the bracket 121 is not provided with the adjustment member (not shown), the distance between the first adjustment hole 126B and the second adjustment hole 125B An adjusting member (not shown) can increase the width of the gap 12A. When the adjusting member (not shown) is connected with the first bracket 126 and the second bracket 125, and the adjusting member (not shown) is connected with the first bracket 126 and the second bracket 125 The distance between the connection points is smaller than the distance between the first adjustment hole 126B and the second adjustment hole 125B when the bracket 121 is not provided with the adjustment member (not shown), the adjustment member ( Not shown) to reduce the width of the gap 12A.

FIG. 5 is a schematic structural diagram of a side view of a lithography apparatus according to an embodiment of the present invention. FIG. 6 is a schematic top-view structural diagram of a lithography apparatus according to an embodiment of the present invention. This embodiment also discloses a lithography apparatus. Referring to FIG. 5 and FIG. 6 , in conjunction with FIG. 1 and FIG. 2 , in this embodiment, the lithography apparatus includes a rack 30 having a chamber 30A, The motion table 20 located in the chamber 30A and the anti-collision device 10 as described above are installed on the motion table 20 to buffer the motion table 20 from being hit by the external force.

Specifically, in this embodiment, when the moving table 20 moves in the chamber 30A, if the moving table 20 is close to the inner wall of the rack 30 and collides with the inner wall of the rack 30, The buffer head 122 in the buffer assembly 20 in the anti-collision device 10 fixed on the motion table 30 is hit by the external force generated by the frame 30 . At this time, the buffer head 122 first generates a force in the opposite direction to the external force to buffer the impact of the external force, and at the same time, the buffer head 122 deforms and rotates to absorb part of the energy, and is repeatedly affected by the structure itself. After impact, it can still return to its original shape to maintain the shape of the original design. Afterwards, the buffer assembly 20 moves toward the pressure chamber 11A1 in the hydraulic buffer 11 under the impact of the external force, so as to drive the piston assembly 112 to move toward the pressure chamber 11A1, so that all the The piston 1121 compresses the pressure chamber 11A1, and the pressure chamber 11A1 generates a force opposite to the direction of the external force to buffer the external force. During this process, the elastic member 115 also generates a force opposite to the direction of the external force to buffer the external force. In addition, when the buffer component 12 is impacted by an external force and moves toward the pressure chamber 11A1, the buffer component 12 drives the sensor 21 fixed thereon to move, so that the sensor 21 and the The sensors 23 are separated from each other. And when the sensor 21 and the sensor 23 are separated from each other to a predetermined distance, the sensor 23 sends an instruction.

Wherein, the instruction is an alarm instruction, for example, an alarm device can be set on the lithography apparatus, and an alarm is issued according to the alarm instruction 1 to notify the staff that the motion table 20 collides with the rack 30, so that the Staff perform repairs. Alternatively, the instruction can also be a stop instruction issued to the motion table 20, and the sensor 23 can be communicated with the control system of the motion table 20, so that the sensor 21 and the sensor can be connected When the sensors 23 are separated from each other or approach each other to a predetermined distance, the sensor 23 sends a stop command to the control system of the moving table 20 to control the moving table 20 to stop moving. In this embodiment, the predetermined distance is 0, that is, when the sensor 21 and the sensor 23 are separated from each other or approach each other, a stop instruction is issued to stop the movement of the motion table 20 . Optionally, the instruction may also be a backward instruction, that is, when the motion table 20 collides with the inner wall of the rack 30, the motion table 20 moves in a direction away from the inner wall of the rack 30, so as to move away from the inner wall of the rack 30. the inner wall of the frame 30. Optionally, the instruction can also be a recording instruction, that is, the fault information can be uploaded to a fault management library, so that the staff can analyze the fault to obtain the cause of the fault and improve the fault.

Wherein, in this embodiment, the number of the anti-collision devices 10 is four, the motion table 20 is rectangular, and the four anti-collision devices 10 are installed at the four corners of the motion table 20, so that when the motion table is When moving in the chamber 30A, the movement table 20 can be used to buffer the movement table from being impacted by an external force in all directions.

Further, in this embodiment, a mounting hole (not shown in the figure) may be provided on the housing 111 , and the bracket 121 may pass through the mounting hole (not shown in the figure), so as to install the anti-collision device 10 installed on the motion table 20 . In addition, in this embodiment, the moving stage 20 is, for example, a mask stage, and the mask stage is used to carry a substrate, and the substrate can be, for example, a silicon substrate, a wafer, or a glass substrate. In addition, the chamber 30A is a vacuum chamber.

FIG. 7 is a schematic structural diagram of another side view of the lithography apparatus according to an embodiment of the present invention. FIG. 8 is another top-view structural schematic diagram of a lithography apparatus according to an embodiment of the present invention. Referring to FIGS. 7 and 8 , and as shown in FIGS. 1 and 2 , in this embodiment, the anti-collision device 10 may also be installed on the inner wall of the rack 30 , when the anti-collision device 10 is installed When on the inner wall of the frame 30, the weight of the motion table 20 can be reduced. Specifically, as shown in FIG. 7 and FIG. 8 , in this embodiment, the number of the anti-collision devices 10 is four, four of the anti-collision devices 10 are in two groups, and two groups of the anti-collision devices 10 is mounted on two opposite inner walls of the frame 30 . And the distance between each group of the anti-collision devices 10 is smaller than the width of one side of the sports table 20 corresponding to the group of the anti-collision devices 10 . Optionally, there are a plurality of the anti-collision devices 10, and the plurality of the anti-collision devices 10 are installed on all the inner walls of the rack 30 at intervals, so that the sports table 20 can be protected from all directions in an all-round way. The inner wall of the frame 30 collides.

The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes and modifications made by those of ordinary skill in the field of the present invention based on the above disclosure all belong to the protection scope of the claims.

Claims (19)

1. A bump guard, comprising:

the anti-collision assembly comprises a hydraulic buffer and a buffer assembly, the hydraulic buffer comprises a shell and a piston assembly, a first cavity is formed in the shell, one end of the piston assembly extends into the first cavity to divide the first cavity into a pressure cavity and a hydraulic cavity with liquid, and the other end of the piston assembly is connected with the buffer assembly and is used for pushing the piston to move towards the pressure cavity to extrude the pressure cavity when external force impacts the buffer assembly;

a control assembly including a sensor mounted on the damping assembly and a sensor mounted on the housing, the sensor and the sensor being adapted to move away from or toward each other to a predetermined distance to issue a command when the damping assembly urges the piston toward the pressure chamber.

2. The bump guard of claim 1, wherein the control assembly further comprises a first fixing rod fixed to the bumper assembly and a cross rod having one end fixed to the first fixing rod and the other end extending toward the housing and fixed to the sensor.

3. The bump guard of claim 1, wherein the control assembly further comprises a second fixed rod, one end of the second fixed rod being fixed to the housing, the other end of the second fixed rod being fixed to the sensor.

4. The bump guard of claim 1, wherein the bumper assembly includes a bracket secured to an end of the piston assembly remote from the housing, the sensor being mounted on the bracket, and a bumper head mounted on a side of the bracket remote from the housing.

5. The crash barrier of claim 4 wherein said bracket has a mounting slot, said bumper head being mounted in said mounting slot and projecting from said bracket, the portion of said bumper head projecting from said bracket for impact by an external force.

6. The bump guard of claim 5, wherein the bumper assembly further comprises a connecting pin extending through the bracket and the bumper head to mount the bumper head within the mounting slot.

7. The bump guard of claim 6, wherein the bumper assembly further comprises a grommet that fits over the portion of the connecting pin that projects beyond the bracket and abuts the bracket.

8. The crash barrier of claim 4 wherein said bumper head has a second cavity, and wherein said bumper head has at least one reinforcing ring disposed on an inner wall of said bumper head surrounding said second cavity, said reinforcing ring configured to enhance the resistive force of said bumper head.

9. A bump guard as claimed in claim 8, characterised in that the reinforcing ring is provided intermittently.

10. The crash barrier of claim 8 wherein said reinforcement ring is a plurality of said reinforcement rings, said plurality of said reinforcement rings being spaced apart and spaced apart an equal distance between adjacent ones of said reinforcement rings.

11. The bump guard of claim 4, wherein the bracket includes a first bracket and a second bracket connected to each other, the sensor is mounted on the first bracket, the second bracket is fixed to an end of the piston assembly remote from the housing, and the bumper head is mounted on the second bracket.

12. The bump guard of claim 11, wherein the first bracket and the second bracket have a gap therebetween, the bracket further comprising an adjustment member coupled to the first bracket and the second bracket across the gap for adjusting a width of the gap.

13. The crash barrier of claim 1 wherein said piston assembly includes a piston and a piston rod, said hydraulic damper further comprising a limit stop positioned within said first cavity, said limit stop being disposed at least about said piston rod to limit said piston assembly; and the piston assembly and the limit stop divide the first cavity into a hydraulic cavity and a pressure cavity.

14. A crash barrier as set forth in claim 13 wherein said limit stop is disposed about said interior shell wall and a drain hole is provided in said limit stop between said hydraulic chamber and said pressure chamber.

15. The crash barrier of claim 1 wherein said hydraulic damper further comprises a resilient member disposed on said piston assembly between said housing and said damping assembly; and/or the hydraulic buffer also comprises a buffer cavity positioned in the shell, the buffer cavity is arranged on one side of the pressure cavity far away from the piston assembly, and the elastic part is arranged in the buffer cavity.

16. The bump guard of claim 15, wherein the resilient member comprises a spring.

17. The crash barrier of claim 1 wherein said hydraulic damper further comprises at least one seal disposed at least at an interface of said piston assembly and said housing to seal said first cavity.

18. A lithographic apparatus comprising a frame having a chamber, a motion stage located in the chamber, and a collision prevention device according to any one of claims 1 to 17, wherein the collision prevention device is mounted on the motion stage or on an inner wall of the frame for buffering the motion stage from external impacts.

19. The apparatus of claim 18, wherein the number of the collision avoidance devices is four, four collision avoidance devices are mounted at four corners of the workpiece table, or four collision avoidance devices are grouped in pairs, two of the collision avoidance devices being mounted on two opposing interior walls of the frame.

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