CN114658785A - Combined vibration damper and scanning electron microscope - Google Patents

Abstract

The invention discloses a combined vibration damper and a scanning electron microscope, wherein the vibration damper comprises: the middle part of the bracket is limited with an installation space; a part of the corrugated pipe is arranged in the installation space, two ends of the corrugated pipe are matched with the support, and two ends of the corrugated pipe are respectively provided with an installation seat; wherein, the support is scalable in the axial of bellows, and the outer wall of bellows is formed with the clearance of indent, is equipped with the elasticity filling member in the clearance. According to the combined vibration damping device provided by the embodiment of the invention, the bellows and the elastic filling piece are arranged, the vibration transmitted to the sample chamber in the operation process of the vacuum pump is absorbed through the expansion and contraction of the bellows, the vibration damping effect is realized, the compression of the bellows can be buffered through the elastic filling piece, the vibration damping effect of the whole structure can be further improved, the influence of the vibration on the performance of the scanning electron microscope in the operation process of the vacuum pump can be reduced by the support which is axially expanded and contracted with the bellows, the whole structure is simple, the assembly is convenient, and the assembly and disassembly on the scanning electron microscope are convenient.

Description

Combined vibration reduction device and SEM

technical field

The invention relates to the technical field of scanning electron microscopes, in particular to a combined vibration reduction device and a scanning electron microscope.

Background technique

Scanning electron microscope uses high-energy electron beam to scan and image the sample. In order to ensure the imaging resolution, the electron beam needs to be collimated and focused like a light beam, and the high-energy electron beam will be absorbed or scattered when it hits air molecules, and the collimation will be destroyed. Therefore, the SEM sample chamber needs to be evacuated by a molecular pump or other vacuum pump, and the vacuum pump will generate vibration during operation, and the vibration will be transmitted to the sample chamber, which will affect the imaging and resolution of the SEM, and there is room for improvement. .

SUMMARY OF THE INVENTION

The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present invention is to provide a combined vibration damping device, which has a simple structure and a good vibration damping effect.

The invention also provides a scanning electron microscope.

The combined vibration damping device according to the embodiment of the first aspect of the present invention includes: a bracket, a middle part of the bracket defines an installation space; a corrugated pipe, a part of the corrugated pipe is provided in the installation space, and two parts of the corrugated pipe are arranged in the installation space. The end is matched with the bracket, and the two ends of the corrugated pipe are respectively provided with mounting seats; wherein, the bracket is retractable in the axial direction of the corrugated pipe, and the outer wall surface of the corrugated pipe is formed with a concave gap , an elastic filler is arranged in the gap.

According to the combined vibration damping device of the embodiment of the present invention, by arranging a bellows and an elastic filler, the vibration transmitted to the sample chamber during the operation of the vacuum pump is absorbed by the expansion and contraction of the bellows, so as to realize the vibration reduction effect, and the elastic filler can buffer the vibration. The compression of the bellows can further improve the vibration reduction effect of the overall structure, and the support that can be extended in the axial direction of the bellows can also reduce the impact of vibration on the performance of the SEM during the operation of the vacuum pump. The overall structure is simple, the assembly is convenient, and it is easy to scan Mounting and dismounting on the electron microscope.

According to the combined vibration damping device of the embodiment of the present invention, the elastic filling member is an elastic ring.

According to the combined vibration damping device of the embodiment of the present invention, the elastic filler is a rubber material piece or a silicone material piece.

According to the combined vibration damping device of the embodiment of the present invention, the bracket includes a plurality of annular support plates, the plurality of annular support plates are arranged at intervals along the axial direction of the bellows, and two adjacent annular support plates pass through the vibration damping member The two ends of the bellows are respectively connected with the corresponding annular support plate through a vibration damping member.

In some examples, the damping member includes a plurality of damping members, and between two adjacent annular support plates, a plurality of the damping members are arranged at intervals along the circumferential direction of the annular supporting plate; In the arrangement direction of the support plate, the plurality of vibration damping members are arranged in a dislocation.

In some examples, the vibration damping member is a rubber pad, two ends of the rubber pad are respectively provided with fixing posts with external threads, the annular support plate has fixing holes, and the fixing posts are matched with the fixing holes And fasten the connection with the nut.

In some examples, the annular strut includes a first half-ring segment and a second half-ring segment, an end of the first half-ring segment having a first insert extending toward the second half-ring segment, so The end of the second half ring segment has a second insert plate extending toward the first half ring segment, the second insert plate corresponds to the shape of the first insert plate, and the second insert plate is inserted into the The top or bottom of the first plug board is fixedly connected by fasteners.

In some examples, the annular support plate has a fixing groove open toward one side of the bellows, a part of the fixing groove forms a fixing hole, and the fixing hole is used for installing a fixing column or fastening of the rubber pad pieces.

According to the combined vibration damping device of the embodiment of the present invention, the corrugated pipe includes: a corrugated section, the corrugated section is provided in the installation space, and the outer wall surface of the corrugated section has the gap; a connecting section, the connecting section The two connecting sections are connected to the bracket through a vibration damping member, and the mounting seat is arranged on the connecting sections.

In some examples, the bellows is a one-piece molded piece.

According to the combined vibration damping device of the embodiment of the present invention, the mounting seat is an LF caliper.

The combined vibration damping device according to the embodiment of the present invention further comprises: a counterweight block, the counterweight block is provided at at least one end of the bellows, and the counterweight block is matched and connected to the bellows pipe.

In some examples, the weight block forms an annular piece sleeved on the outer side of the bellows, and the weight block and the bellows are connected by a hexagon socket head bolt.

The scanning electron microscope according to the embodiment of the second aspect of the present invention includes the combined vibration reduction device according to the embodiment of the present invention. By using the above combined vibration reduction device, the influence of vibration during the operation of the vacuum pump on the performance of the scanning electron microscope can be reduced, and the performance of the scanning electron microscope can be improved. Imaging effects and accuracy of analysis results.

Additional aspects and advantages of the present invention will be set forth, in part, from the following description, and in part will be apparent from the following description, or may be learned by practice of the invention.

Description of drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of embodiments taken in conjunction with the accompanying drawings, wherein:

1 is a schematic structural diagram of a combined vibration damping device according to an embodiment of the present invention from a viewing angle;

FIG. 2 is a schematic structural diagram of a combined vibration damping device according to an embodiment of the present invention from another perspective;

3 is a schematic diagram of a partial structure of a combined vibration damping device according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of an annular support plate according to an embodiment of the present invention.

Reference number:

Vibration damping device 100,

The annular support plate 10, the first half ring segment 11, the first insert plate 111, the second half ring segment 12, the second insert plate 121, the fastener 13, the fixing groove 14, the fixing hole 15,

Corrugated pipe 20, corrugated section 21, connecting section 22, gap 23, first mounting seat 25, second mounting seat 26,

The elastic filler 30 , the vibration damping member 40 , and the counterweight 50 .

Detailed ways

The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, only used to explain the present invention, and should not be construed as a limitation of the present invention.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " Rear, Left, Right, Vertical, Horizontal, Top, Bottom, Inner, Outer, Clockwise, Counterclockwise, Axial, The orientations or positional relationships indicated by "radial direction", "circumferential direction", etc. are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the indicated devices or elements. It must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, features delimited with "first", "second" may expressly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

In the description of the present invention, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, unless otherwise expressly specified and limited, for example, it may be a fixed connection or a detachable connection Connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

The combined vibration damping device 100 according to the embodiment of the present invention will be described below with reference to FIGS. 1-4 .

As shown in FIGS. 1-4 , a combined vibration damping device 100 according to an embodiment of the present invention includes a bracket and a corrugated tube 20 , an installation space is defined in the middle of the bracket, a part of the corrugated tube 20 is arranged in the installation space, and the corrugated tube 20 is arranged in the installation space. Both ends of the bellows 20 are matched with the brackets, along the length direction of the bellows 20, the bellows 20 has two ends, the bellows 20 can expand and contract along its length direction, and the two ends of the bellows 20 in the length direction are provided with mounting seats, specifically One end of the bellows 20 is provided with a first mounting seat 25, the first mounting seat 25 is used to install the sample chamber of the scanning electron microscope, the other end of the bellows 20 is provided with a second mounting seat 26, and the second mounting seat 26 is used to install the scanning electron microscope. The vacuum pump of the electron microscope can absorb the vibration transmitted to the sample chamber during the operation of the vacuum pump through the expansion and contraction of the bellows 20, so as to realize the vibration reduction effect. The support can expand and contract in the axial direction of the bellows 20 so that both ends of the bellows 20 can cooperate with it, and the expansion and contraction of the support can also reduce vibration.

In addition, an inwardly recessed gap 23 is formed on the outer wall of the bellows 20, and an elastic filler 30 is arranged in the gap 23. On the one hand, the elastic filler 30 can be directly filled on the outer wall of the bellows 20 to realize the elastic filler 30 is installed and fixed. On the other hand, the elastic filler 30 can buffer the compression of the bellows 20, which can further improve the vibration reduction effect of the overall structure and reduce the impact of vibration on the performance of the SEM during the operation of the vacuum pump. In its own structure, an elastic filler 30 is provided, and at the same time, multiple vibration damping is realized through the elastic filler 30 and the bellows 20, and the vibration damping effect is improved.

According to the combined vibration reduction device 100 of the embodiment of the present invention, by arranging the bellows 20 and the elastic filler 30, the vibration transmitted to the sample chamber during the operation of the vacuum pump is absorbed by the expansion and contraction of the bellows 20, so as to realize the vibration reduction effect, and the elastic The filler 30 buffers the compression of the bellows 20, which can further improve the vibration reduction effect of the overall structure, and the support that can expand and contract in the axial direction of the bellows 20 can also reduce the impact of vibration on the performance of the SEM during the operation of the vacuum pump, and the overall structure is simple, Easy to assemble, easy to install and remove on the SEM.

As shown in FIG. 3 , in some examples, the gap 23 extends along the circumferential direction of the bellows 20 , and in the length direction of the bellows 20 , there are a plurality of gaps 23 , wherein each gap 23 may be provided with an elastic The filling member 30 may also be provided with an elastic filling member 30 in a part of the gap 23 . The elastic filler 30 can form an elastic ring, that is, a ring shape, and the elastic ring is directly sleeved on the gap 23 of the bellows 20, and the installation is convenient and reliable. Of course, the elastic filling member 30 can also be in other forms, directly filling the gap 23 .

According to an embodiment of the present invention, the elastic filler 30 is a rubber material, and is set in the gap 23 outside the bellows 20 through a rubber ring to buffer the compression of the bellows 20 and absorb the deformation of the bellows 20 through the deformation of the elastic filler 30 Part of the vibration deformation can also reduce vibration noise, and the material is easy to obtain and the cost is low. Of course, the elastic filling member 20 may also be a silicone material member, and the elastic filling member 20 may also be other structural members having elastic materials.

As shown in FIG. 1-FIG. 3, according to some embodiments of the present invention, the corrugated pipe 20 includes: a corrugated section 21 and a connecting section 22, the corrugated section 21 is arranged in the installation space, and the outer wall surface of the corrugated section 21 has an inwardly recessed In the gap 23, the elastic filler 30 is installed on the outer side of the corrugated section 21, and the connecting section 22 includes two. Each connecting segment 22 is connected to the bracket through the vibration damping member 40 , a first mounting seat 25 is provided on the side of one connecting segment 22 facing away from the corrugated segment 21 , and a second mounting seat 25 is provided on the side facing away from the corrugated segment 21 of the other connecting segment 22 . In the mounting seat 26, the outer diameter of the connecting section 22 is larger than the outer diameter of the corrugated section 21, which facilitates the connection between the connecting section 21 and the bracket. The damping member 40 can be arranged outside the corrugated section 21. 40. In addition to the vibration damping effect of the bellows 20, the vibration transmitted to the sample chamber during the operation of the vacuum pump can also be absorbed by the deformation of the vibration damping member 40, so as to achieve a further vibration damping effect.

In some specific examples, the first mounting seat 25 and the second mounting seat 26 can be LF calipers respectively, the connecting section 22 is provided with a caliper flange, the caliper is arranged on the caliper flange, and the bellows 20 here can be made of metal The bellows, the connecting section 22 is provided with a flange interface, and the flange of the caliper can be welded with the bellows 20 into one piece to improve the stability of the overall structure. By using LF calipers for installation, it is easy to disassemble and maintain, and it is convenient to connect with the vacuum pump and Assembly of the sample chamber.

As shown in FIG. 2 , in some examples, the vibration damping member 40 is a rubber pad, two ends of the rubber pad are respectively provided with fixing posts, the fixing posts have external threads, and the mounting seat has fixing holes, and the fixing holes may be non-through holes Structure, the fixing post can be screwed with the fixing hole on the mounting seat until the fixing post is in contact with the bottom wall of the fixing hole; the bracket has a fixing hole, the fixing hole can be a through-hole structure, and the fixing post is matched with the fixing hole , and are fastened and connected by nuts, thereby realizing the fixed installation of the rubber pad, the structure is simple, the acquisition and installation are convenient, and the vibration reduction effect of the rubber pad is good.

As shown in FIG. 1 and FIG. 2 , in some examples, the bracket includes a plurality of annular support plates 10 , and the plurality of annular support plates 10 are arranged at intervals along the extension direction of the corrugated section 21 (the up-down direction as shown in FIG. 1 ), and many An installation space is formed in the middle of each annular support plate 10, and two adjacent annular support plates 10 are connected by a vibration damping member 40, for example, a plurality of vibration damping members 40 arranged at intervals along the circumferential direction of the annular support plate 10 are connected, Moreover, the annular support plate 10 and the connecting section 22 are also connected by the vibration damping member 40 , so that a plurality of vibration damping members 40 are provided on the outer side of the corrugated section 21 . The longitudinal direction is staggered to improve the vibration reduction effect of the vibration damping device 100 in all directions.

The vibration damping member 40 here can be a rubber pad, the two ends of the rubber pad are respectively provided with fixing columns, the fixing columns have external threads, and the annular support plate 10 has a fixing hole 15, the fixing hole can be a through-hole structure, and the rubber pad has two The fixing columns at the ends are respectively matched with the corresponding fixing holes, and are fastened and connected by nuts, so as to realize the fixed installation of the rubber pad and the annular support plate 10 .

In some examples, the annular support plate 10 has a fixing groove 14, the side of the fixing groove 14 facing the bellows 20 is open, and a part of the fixing groove 14 forms a fixing hole 15, and the fixing hole 15 can be installed with a fixing column of a rubber pad. The fixing groove 14 open on one side can facilitate the installation of the fixing column of the rubber pad and improve the convenience of assembly.

In some specific examples, the damping members 40 include a plurality of damping members, and between two adjacent annular support plates 10, the plurality of vibration damping members are arranged at intervals along the circumferential direction of the annular supporting plates 10; along the plurality of annular supporting plates 10 The arrangement direction of the damping members 40 is staggered, that is, the damping members 40 are not collinear in the arrangement direction of the annular supporting plate 10, and the damping members 40 are arranged in the form of an overall alternate interval, so that the annular supporting plate 10 can be arranged alternately. The force point of 10 is deformed to increase the vibration reduction effect.

As shown in FIG. 4 , in some examples, the annular support plate 10 includes a first half ring segment 11 and a second half ring segment 12 , the first half ring segment 11 substantially forms a half ring structure, and the second half ring segment 12 also Roughly form a half ring structure, the first half ring segment 11 and the second half ring segment 12 are fixedly connected by fasteners 13, and the ring support plate 10 is formed by assembling the first half ring segment 11 and the second half ring segment 12, The assembly of the annular support plate 10 on the outside of the corrugated tube 20 is realized, which facilitates the manufacture and molding of the overall structure. Of course, the first half ring segment 11 and the second half ring segment 12 can also be snap-fitted or bonded together.

In some examples, the annular support plate 10 has a fixing groove 14, a side of the fixing groove 14 facing the bellows 20 is open, and a part of the fixing groove 14 forms a fixing hole 15, and the fixing hole 15 can be installed with a fastener. The open fixing groove 14 can facilitate the installation of the fastener and improve the convenience of assembly.

In some examples, both ends of the first half ring segment 11 respectively have a first insert plate 111 , the first insert plate 111 extends toward the second half ring segment 12 , and both ends of the second half ring segment 12 respectively have a second insert plate 111 . board 121, the second plug board 121 extends toward the first half ring segment 11, the second plug board 121 corresponds to the shape of the first plug board 111, the second plug board 121 is inserted above or below the first plug board 111, the first plug board 121 The second board 121 and the first board 111 are fixedly connected by the fastener 13 . As shown in 4, for example, the positions of the two first boards 111 in the up-down direction are different, the positions of the two second boards 121 in the up-down direction are different, and one second board 121 is plugged into the first board Above 111, the two half ring segments have the same structure, and can be formed by one mold, which simplifies the manufacturing process and facilitates assembly.

In some specific examples, the corrugated tube 20 is an integrally formed part, that is, the corrugated section 21 and the connecting section 22 may be an integrally formed part, thereby facilitating the assembly of the vibration damping device 100 and improving the stability of the overall structure. The amount of expansion and contraction absorbs the vibration during the operation of the vacuum pump to ensure the vibration reduction effect. The corrugated pipe 20 here can be a metal corrugated pipe, such as a stainless steel corrugated pipe, which is widely available and low in cost.

According to some embodiments of the present invention, the vibration damping device 100 further includes: a counterweight 50 . The counterweight 50 is disposed on either end of the bellows 20 , or a counterweight 50 is respectively provided at both ends of the bellows 20 . The weights of the weights 50 may be the same or different.

In some examples, the counterweight 50 may be disposed on one side adjacent to the second mounting seat 26 , that is, the counterweight 50 is arranged close to the mounting vacuum pump, and the counterweight 50 forms an annular member sleeved on the outside of the bellows 20 . The block 50 can be connected with the bellows 20 through the inner hexagon bolt to realize the fixation of the counterweight block 50, thereby reducing the vibration frequency and amplitude of the vacuum pump, thereby effectively improving the resolution and imaging effect of the scanning electron microscope.

According to the combined vibration damping device 100 according to the embodiment of the present invention, by arranging the bellows 20, the elastic filling member 30 and the vibration damping member 40, triple vibration damping is realized, the vibration damping effect of the vibration damping device 100 is greatly improved, and the vibration damping performance is good. At the same time, the counterweight 50 is used to reduce the vibration frequency and amplitude of the vacuum pump, improve the resolution and imaging effect of the scanning electron microscope, and directly use the LF caliper to install the vacuum pump and the sample holder, which is convenient for disassembly and maintenance, and the overall structure is compact and easy to process. .

The scanning electron microscope according to the embodiment of the present invention includes the vibration damping device 100 according to the embodiment of the present invention. By using the above vibration damping device 100, the influence of vibration on the performance of the scanning electron microscope during the operation of the vacuum pump can be reduced, and the imaging effect of the scanning electron microscope can be improved. The accuracy of the analysis results.

Other structures and operations of the scanning electron microscope according to the embodiments of the present invention are known to those of ordinary skill in the art, and will not be described in detail here. The up-down direction, left-right direction, and front-rear direction are based on the up-down direction, left-right direction, and front-rear direction shown in the figure.

In the description of the present invention, unless otherwise expressly stated and defined, a first feature "above" or "under" a second feature may include the first and second features in direct contact, or may include the first and second features The two features are not in direct contact but through another feature between them. Also, the first feature being "above", "over" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature.

In the description of this specification, reference to the terms "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples", etc., is meant to incorporate the embodiments A particular feature, structure, material, or characteristic described by an example or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, The scope of the invention is defined by the claims and their equivalents.

Claims (14)

1. A combined vibration damping device is characterized in that, comprising: a bracket, the middle of the bracket defines an installation space; a corrugated pipe, a part of the corrugated pipe is arranged in the installation space and two ends of the corrugated pipe are matched with the bracket, and the two ends of the corrugated pipe are respectively provided with mounting seats; Wherein, the support is retractable in the axial direction of the bellows, the outer wall of the bellows is formed with a concave gap, and an elastic filler is arranged in the gap. 2 . The combined vibration damping device according to claim 1 , wherein the elastic filler is an elastic ring. 3 . 3 . The combined vibration damping device according to claim 1 or 2 , wherein the elastic filler is a rubber material piece or a silicone material piece. 4 . 4 . The combined vibration damping device according to claim 1 , wherein the bracket comprises a plurality of annular support plates, and the plurality of annular support plates are arranged at intervals along the axial direction of the bellows, and two adjacent ones of the The annular support plates are matched and connected by vibration damping parts, and two ends of the bellows are respectively connected with the corresponding annular support plates by vibration damping parts. 5 . The combined vibration damping device according to claim 4 , wherein the vibration damping member comprises a plurality of vibration damping members, and between two adjacent annular support plates, a plurality of the vibration damping members are arranged along the The annular support plates are arranged at intervals in the circumferential direction; along the arrangement direction of the annular support plates, a plurality of the vibration damping members are arranged in a staggered position. 6 . The combined vibration damping device according to claim 4 , wherein the vibration damping member is a rubber pad, two ends of the rubber pad are respectively provided with fixing columns with external threads, and the annular support plate has 6 . A fixing hole, the fixing column is matched with the fixing hole and is fastened and connected by a nut. 7 . The combined vibration damping device according to claim 4 , wherein the annular support plate comprises a first half-ring segment and a second half-ring segment, and the end of the first half-ring segment has a direction toward the A first insert plate extending from the second half ring segment, the end of the second half ring segment has a second insert plate extending toward the first half ring segment, the second insert plate is connected to the first insert plate The shapes of the boards correspond to each other, and the second plug-in board is inserted above or below the first plug-in board and fixedly connected by fasteners. 8 . The combined vibration damping device according to claim 6 or 7 , wherein the annular support plate has a fixing groove open toward one side of the bellows, a part of the fixing groove forms a fixing hole, and the The fixing holes are used to install the fixing posts or fasteners of the rubber pad. 9. The combined vibration damping device according to claim 1, wherein the bellows comprises: a corrugated section, the corrugated section is arranged in the installation space, and the outer wall surface of the corrugated section has the gap; The connecting section includes two connecting sections arranged at both ends of the corrugated section, the two connecting sections are connected to the bracket through a vibration damping member, and the mounting seat is arranged on the connecting section. 10 . The combined vibration damping device according to claim 9 , wherein the bellows is an integral molded part. 11 . 11 . The combined vibration damping device according to claim 1 , wherein the mounting seat is an LF caliper. 12 . 12 . The combined vibration damping device according to claim 1 , further comprising: a counterweight block, the counterweight block is provided at at least one end of the bellows, and the counterweight block is connected to the Corrugated pipe mating connection. 13 . The combined vibration damping device according to claim 12 , wherein the counterweight is formed as an annular piece sleeved on the outer side of the bellows, and the counterweight and the bellows pass through socket head bolts. 14 . connect. 14. A scanning electron microscope, characterized by comprising the combined vibration reduction device according to claim 1.

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