CN114633210A

CN114633210A - Telescopic double-sleeve electric spindle

Info

Publication number: CN114633210A
Application number: CN202210143163.XA
Authority: CN
Inventors: 文康; 王加初; 曹丽萍; 张万财
Original assignee: Pingliang Laobing Science & Technology Research And Development Co ltd
Current assignee: Pingliang Laobing Science & Technology Research And Development Co ltd
Priority date: 2022-02-17
Filing date: 2022-02-17
Publication date: 2022-06-17

Abstract

The invention relates to the technical field of semiconductor processing equipment, in particular to a telescopic double-sleeve electric main shaft, wherein the lower end of a central shaft extends out of the lower end of a pipe shell, the lower end of the central shaft is connected with a spindle nose I, the lower end of the spindle nose I is connected with an inner grinding wheel, the front end of a telescopic rod of an air cylinder is connected to a connecting ring, the top surface of a sliding bearing shell is connected to the bottom surface of the connecting ring, the inner wall of the connecting sleeve is provided with an inner spline III, the outer wall of the central shaft is provided with an outer spline I, the inner spline III is connected to the outer spline I in a sliding way, the top end of the spindle nose II is connected to the bottom end of a linkage bearing shell, the outer grinding wheel is connected to the bottom end of the spindle nose II, and the outer grinding wheel is arranged outside the inner grinding wheel. The jumping cannot occur, the use stability is high, the abrasion of each part in the use process is small, and the service life is long.

Description

Telescopic double-sleeve electric spindle

Technical Field

The invention relates to the technical field of semiconductor processing equipment, in particular to a telescopic double-sleeve electric spindle.

Background

The thinning machine is an important appliance for processing semiconductor materials, the electric spindle is an inseparable part of the thinning machine, the air shaft is used for replacing the electric spindle of the thinning machine in the existing equipment in the industry, compared with the electric spindle, the stability and the processing precision are higher, but the use condition of the air shaft is too harsh, in some processing needing large-cutter-consumption cutter consumption, the stability of the air shaft can be damaged, the processing precision can be limited, the electric spindle of the mechanical bearing still cannot have too large problem in the environment of large-cutter-consumption cutter consumption, and the electric spindle of the mechanical bearing still has certain use advantages.

In the prior art, after a wafer is arranged on a thinning machine, two processes of coarse grinding and fine grinding are required, but in the thinning machine equipment in the prior art, only one electric spindle is used for machining, the wafer needs to be replaced on another thinning machine for fine grinding or the coarse grinding head needs to be replaced for the fine grinding head for fine grinding again after the coarse grinding is carried out for one time, the process is long in consumed time, if the wafer is not finely ground in time before stress is released, the wafer is directly taken down and replaced by another fine grinding equipment or another fine grinding head, excessive warping of the wafer can be caused, and then the wafer can still have large warping after the fine grinding.

The patent with the patent number of CN201910873923.0 and the patent name of grinding main shaft for a crystal silicon coarse grinding and accurate grinding all-in-one machine and a use method thereof in the prior art discloses a grinding main shaft for a crystal silicon coarse grinding and accurate grinding all-in-one machine and a use method thereof, which are used for performing coarse grinding and accurate grinding on crystal silicon, performing coarse grinding and accurate grinding processing on the crystal silicon at the same position, reducing the accurate grinding processing allowance, greatly improving the efficiency and having wide market prospect; however, in this prior art patent, in order to realize the fine grinding, the extension of the fine grinding main shaft depends on the motor to drive the eccentric shaft to eject the fine grinding main shaft, the return of the fine grinding main shaft after the extension depends on the main shaft compression spring to be completed, the mode of ejecting the fine grinding main shaft by the eccentric shaft has the risk of jumping, the instability exists in the use, the use stability is further influenced along with the contact abrasion between the eccentric shaft and the fine grinding main shaft, in addition, the main shaft compression spring needs to be completely compressed or even over-compressed in the process of ejecting the fine grinding main shaft by the eccentric shaft, if the main shaft compression spring can not be completely compressed, the main shaft compression spring can be compressed if the fine grinding main shaft generates an upward force during the crystalline silicon processing, the processing quality of the crystalline silicon is certainly influenced, even if the main shaft compression spring can be completely compressed every time, but along with the increase of the use times, because the main shaft compression spring is completely compressed or even over compressed every time, can accelerate main shaft compression spring's inefficacy, difficult quilt is in time discover behind the main shaft compression spring inefficacy, can continuously influence the processingquality of crystal silicon, because the spare part that main shaft compression spring's change needs to be dismantled is more in addition, changes main shaft compression spring and can delay the time limit for a project, personnel intensity of labour more.

Disclosure of Invention

The invention aims to provide a telescopic double-sleeve electric main shaft, which can realize the coarse grinding and the fine grinding of a single-shaft thinning machine under the condition of not replacing a grinding wheel, and solve the problems that the grinding main shaft of the coarse grinding and fine grinding integrated machine in the prior art is easy to jump when in use, so that the processing quality of a wafer is influenced, the service life of parts is short, and the replacement is complex, time and labor are wasted.

In order to solve the technical problem, the invention provides a telescopic double-sleeve electric main shaft which comprises a central shaft, a shell, an outer sleeve telescopic component and an outer sleeve rotating component, wherein the central shaft is rotatably connected in the shell, the shell comprises a top plate and a tube shell, the top plate is connected at the top end of the tube shell, the top end of the central shaft is rotatably connected at the center of the top plate, the lower end of the central shaft extends out of the lower end of the tube shell, the lower end of the central shaft is connected with a shaft head I, the lower end of the shaft head I is connected with an inner grinding wheel, the outer sleeve telescopic component comprises a cylinder, a connecting ring and a sliding bearing shell, the bottom end of the cylinder is connected on the bottom surface of the top plate, the connecting ring is connected below the cylinder, the front end of a telescopic rod of the cylinder is connected on the connecting ring, the top surface of the sliding bearing shell is connected on the bottom surface of the connecting ring, the outer sleeve rotating component comprises a linkage bearing shell, a shaft head II and an outer grinding wheel, the linkage bearing shell is connected on the outer side of the sliding bearing shell, the linkage bearing shell is connected with a bearing group II, linkage bearing shell inner wall is connected with the adapter sleeve, is equipped with internal spline III on the adapter sleeve inner wall, is equipped with external splines I on the center pin outer wall, and III sliding connection of internal spline are on external splines I, and II tops of spindle nose are connected in linkage bearing shell bottom, and the connection of outer emery wheel is in II bottoms of spindle nose, and I rotation of spindle nose is connected in spindle nose II, and outer emery wheel is established in the internal grinding wheel outside.

The central shaft is used as a rotating center of the invention, the inner grinding wheel is connected to the central shaft through a shaft head I, the inner grinding wheel always rotates along with the central shaft to grind the wafer, in the embodiment, the inner grinding wheel is a fine grinding wheel, when coarse grinding is required, an air cylinder telescopic rod extends out, the air cylinder telescopic rod drives a connecting ring to move downwards, the connecting ring drives a sliding bearing shell to move downwards, the sliding bearing shell drives a linkage bearing shell to move downwards through a bearing group II, the linkage bearing shell moves downwards to drive a connecting sleeve to move downwards, the connecting sleeve moves downwards to drive the shaft head II and an outer grinding wheel to move downwards, the bottom surface of the outer grinding wheel extends out of the bottom surface of the inner grinding wheel, simultaneously, when the connecting sleeve moves downwards, an inner spline III is connected to an outer spline I to drive the connecting sleeve to rotate by using the central shaft, the connecting sleeve rotates to drive the linkage bearing shell to rotate, and the linkage bearing shell rotates to drive the shaft head II and the outer grinding wheel to rotate, thereby realize outer emery wheel and to polishing of wafer, bearing group II has still satisfied slide bearing shell and linkage bearing shell can the relative pivoted function of shape, and slide bearing shell, go-between and cylinder can not take place to rotate when the linkage bearing shell rotates, and in this embodiment, outer emery wheel is the wheel of refining.

When the outer grinding wheel is required to be lifted and retracted, the cylinder telescopic rod is retracted to enable the inner spline III to be separated from the outer spline I, and the central shaft and the connecting sleeve are separated in a rotating mode.

In order to match with the assembly relation and the transmission requirement of other parts, the central shaft 1 is composed of nine-stage stepped cylindrical surfaces, and a through hole is formed in the axis of the central shaft 1, so that the central shaft can be used as a water cooling shaft in a matching mode, and the central shaft can be flexibly changed according to the actual use condition in actual use.

In the embodiment, in order to meet the assembly relation and the transmission requirement of other parts, the linkage bearing shell is provided with eight stepped cylindrical surfaces at the inner ring and six stepped cylindrical surfaces at the outer ring, and can be flexibly changed according to the actual use condition in actual use.

It should be noted that in the process of extending and retracting the cylinder, the cylinder is extended and retracted after the rotation of the central shaft is stopped, in addition, in order to ensure that the internal spline III can flexibly enter and exit from the external spline I, chamfers can be arranged on all top edges of the external spline I to play a certain guiding role, and if the internal spline III is difficult to enter the external spline I or a linkage bearing shell, a spindle head II or an external grinding wheel is difficult to descend in use, the central shaft can be manually slightly rotated so that all parts can descend smoothly.

Through the telescopic operation, the wafer can be conveniently finely and coarsely ground without replacing the grinding wheel and replacing the thinning machine, the central shaft is only required to stop rotating in the replacement process, the use is convenient, the time is saved, the processing quality of the wafer is ensured, meanwhile, all the transmission parts are rigidly connected, the transmission is stable in the telescopic process, the jumping of the grinding wheel caused by the elastic connection mode of a spring, an eccentric shaft and the like in the prior art is avoided, and the problem of difficulty in replacing an elastic part is also solved.

Further, still including drive assembly, drive assembly is including the fixing bearing shell, the fixing bearing shell is connected on the roof bottom surface, the cylinder is connected in the fixing bearing shell outside, center pin upper portion is rotated and is connected in the fixing bearing shell, be connected with electric motor rotor and motor stator between center pin and the fixing bearing shell, electric motor rotor connects on the center pin outer wall, motor stator connects on the fixing bearing shell inner wall, be connected with bearing group I between center pin and the fixing bearing shell, be connected with the retaining ring on I top surface of bearing group.

The drive assembly mainly provides rotation power for the center pin, and the setting of fixed bearing shell mainly used supports each spare part of drive assembly, and the setting of bearing group I and retaining ring has satisfied the function of realizing relative rotation between center pin and the fixed bearing shell.

Further, fixed bearing shell outer wall lower part be equipped with external splines II, be equipped with internal splines I on the go-between inner wall, I sliding connection of internal splines is on external splines II, slide bearing shell inner wall upper portion is equipped with internal splines II, II sliding connection of internal splines are at external splines II.

The setting of external splines II and internal splines I mainly is in order to guarantee the stability of go-between, makes the stationary bearing shell form the support to the go-between on the one hand, and on the other hand avoids making the go-between take place pivoted risk because factors such as inertia, and the setting of internal splines II is in order to satisfy the in-process slide bearing shell that slide bearing shell goes up and down can not take place to interfere with between the stationary bearing shell with the stationary bearing shell, has also improved the stability in use of slide bearing shell simultaneously.

Furthermore, the go-between on the circumference equipartition have a plurality of through-holes, the slide bearing shell top surface on the circumference equipartition have a plurality of screw hole II, a plurality of through-holes and a plurality of screw hole II one-to-one, a plurality of through-holes pass through bolted connection with a plurality of screw hole II.

A plurality of through-holes pass through bolted connection with a plurality of screw holes II and mainly satisfied the fixed connection between go-between and the slide bearing shell, belong to the technical means that field often used, no longer give unnecessary details again.

Furthermore, the bottom end of the outer wall of the sliding bearing shell is provided with a lower boss which is connected to the bottom surface of the bearing group II, the top surface of the bearing group II is connected with an outer bearing retainer ring and an inner bearing retainer ring, the outer bearing retainer ring is in threaded connection with the inner wall of the linkage bearing shell, the corresponding position of the inner wall of the linkage bearing shell is provided with threads, the inner bearing retainer ring is in threaded connection with the outer wall of the sliding bearing shell, and the corresponding position of the outer wall of the sliding bearing shell is provided with threads; the inner wall of the linkage bearing shell is provided with a step at the bottom surface of the bearing group II.

The steps arranged on the bottom surfaces of the lower lug boss and the inner wall of the linkage bearing shell on the bearing group II form a limit and a support for the bearing group II, the arrangement of the bearing outer retainer ring and the bearing inner retainer ring form a limit for the top surface of the bearing group II, and when the bearing group II meets the requirement that the sliding bearing shell and the linkage bearing shell relatively rotate enough, the bearing group II and the linkage bearing shell can more sufficiently follow the sliding bearing shell to rotate together in the lifting process of the sliding bearing shell due to the arrangement of the lower lug boss, the steps, the outer retainer ring and the bearing inner retainer ring; the use stability is improved, and the stability and flexibility of the telescopic process are ensured.

Furthermore, the inner wall of the linkage bearing shell is provided with a connecting step, the connecting sleeve is connected to the connecting step, a plurality of threaded holes I are uniformly distributed on the bottom surface of the connecting step in the circumferential direction, a plurality of step holes are uniformly distributed on the connecting sleeve in the circumferential direction, the step holes and the threaded holes I correspond to one, the step holes are connected with the threaded holes I through bolts, and the head of the bolt is connected to the inside of the step hole.

The connecting step is arranged to meet the requirement of connection of the connecting sleeve and the linkage bearing shell, the plurality of step holes and the plurality of threaded holes I are connected through bolts to achieve fixed connection of the connecting sleeve and the linkage bearing shell, the structure that the bolt head is connected in the step holes is marked as the structure of a countersunk head bolt in the prior art, and the bolt head is prevented from interfering with other parts.

Further, slide bearing shell inner wall and center pin outer wall between be connected with bearing group III, be connected with retaining ring I on the III top surfaces of bearing group, I threaded connection of retaining ring is on the center pin, the center pin relevant position is equipped with the screw thread, the center pin is equipped with the step in the III bottom surface positions of bearing group.

Bearing group III set up on the one hand and satisfied more enough formation relative rotation between slide bearing shell and the center pin, guarantee that bearing group III does not rotate when the center pin rotates, on the other hand bearing group III provides the support for the slide bearing shell, bearing retainer ring I and the step that the center pin was equipped with in the III bottom surface positions of bearing group have realized that bearing group III and center pin are spacing, bearing group III can not take place the displacement when having guaranteed that the slide bearing shell is flexible again, improved stability in use and flexible flexibility.

Further, linkage bearing shell and center pin between be connected with bearing group IV, bearing group IV establishes in I below the external splines, is connected with bearing retainer ring II on the IV bottom surface of bearing group, II threaded connection of bearing retainer ring are on linkage bearing shell inner wall, linkage bearing shell inner wall relevant position is equipped with the screw thread, linkage bearing shell inner wall is equipped with the step at II top surface positions of bearing retainer ring.

Bearing group IV sets up to provide the support for the lift of linkage bearing shell, and bearing retainer ring II and the step that linkage bearing shell inner wall was equipped with in II top surface positions of bearing retainer ring provide spacingly for bearing group IV, avoid bearing group IV to take place the displacement when linkage bearing shell is flexible, improved stability in use and flexible flexibility.

Further, the lower end of the inner wall of the tube shell is connected with an inner bearing shell, a bearing group V is connected between the inner bearing shell and the linkage bearing shell, a bearing retainer ring III is connected to the bottom surface of the bearing group V, the bearing retainer ring III is in threaded connection with the lower portion of the outer wall of the linkage bearing shell, threads are arranged at the corresponding position of the outer wall of the linkage bearing shell, and a step is arranged on the outer wall of the linkage bearing shell at the position of the top surface of the bearing group V.

The setting up of interior bearing shell makes the tube provide the support through the lift of interior bearing shell to linkage bearing shell, and bearing group V's setting has realized can rotating relatively between interior bearing shell and the linkage bearing shell, and bearing group V is provided spacingly at the step that bearing group V top surface position was equipped with to bearing group III linkage bearing shell outer wall, avoids bearing group V to take place the displacement when linkage bearing shell is flexible, has improved stability in use and flexible flexibility. In actual use, the inner bearing shell can be made of red copper or brass, so that the flexibility is improved.

Furthermore, the bearing group I, the bearing group II, the bearing group III, the bearing group IV and the bearing group V respectively comprise two bearings, and the two bearings are connected up and down along the axis direction of the central shaft; the cylinder be equipped with a plurality ofly, a plurality of cylinders use the center pin axis to be the circumference equipartition of center.

Bearing group I, bearing group II, bearing group III, bearing group IV and bearing group V all include two bearings and have effectively improved each bearing group and have rotated the area of contact between the spare part, have further improved stability in use. The arrangement of the cylinders enables the telescopic process of each telescopic assembly to be stable, the deflection of each assembly in the telescopic process is avoided, and the use stability is improved.

The beneficial effects of the invention are:

1. the inner grinding wheel is connected to the central shaft through a shaft head I, and the inner grinding wheel always rotates along with the central shaft to grind the wafer by the inner grinding wheel;

2. the air cylinder telescopic rod drives the connecting ring to move downwards, the connecting ring drives the sliding bearing shell to move downwards, the sliding bearing shell drives the linkage bearing shell to move downwards through the bearing group II, the linkage bearing shell moves downwards to drive the connecting sleeve to move downwards, the connecting sleeve moves downwards to drive the spindle head II and the outer grinding wheel to move downwards, the bottom surface of the outer grinding wheel extends out of the bottom surface of the inner grinding wheel, the inner spline III is connected to the outer spline I when the connecting sleeve moves downwards, the central shaft drives the connecting sleeve to rotate, the connecting sleeve rotates to drive the linkage bearing shell to rotate, and the linkage bearing shell rotates to drive the spindle head II and the outer grinding wheel to rotate, so that the outer grinding wheel polishes the wafer;

3. the wafer fine grinding and coarse grinding can be conveniently realized under the conditions that the grinding wheel is not replaced and the thinning machine is not replaced, the central shaft only needs to stop rotating in the replacement process, the use is convenient, the time is saved, and the processing quality of the wafer is ensured;

4. all transmission parts are in rigid connection, so that the transmission is stable in the telescopic process, the jumping cannot occur, and the problem of the jumping of the grinding wheel caused by the elastic connection mode of a spring, an eccentric shaft and the like in the prior art is solved;

5. the wear of each part in the using process is small, the service life is long, and the problem that the elastic part is difficult to replace is solved;

6. the invention is provided with the bearing sets at the relative rotation and relative extension positions, and has high use stability and flexible and convenient transmission.

Drawings

FIG. 1 is a cross-sectional view of the outer grinding wheel of the present invention in a lowered configuration;

FIG. 2 is an enlarged partial view I of FIG. 1 in accordance with the present invention;

FIG. 3 is an enlarged partial view II of FIG. 1 in accordance with the present invention;

FIG. 4 is a cross-sectional view A-A of FIG. 1 in accordance with the present invention;

FIG. 5 is a cross-sectional view B-B of FIG. 1 in accordance with the present invention;

FIG. 6 is a structural cross-sectional view of a plain bearing shell of the present invention;

FIG. 7 is a top plan view of the plain bearing shell of the present invention;

FIG. 8 is a structural cross-sectional view of a linkage bearing shell of the present invention;

FIG. 9 is a sectional view of the outer grinding wheel of the present invention in a raised configuration.

In the figure: 1. a central shaft; 101. an external spline I; 2. a housing; 201. a top plate; 202. a pipe shell; 3. fixing the bearing shell; 301. an external spline II; 4. a bearing group I; 5. a cylinder; 6. a connecting ring; 601. an inner spline I; 602. a through hole; 7. a linkage bearing housing; 701. connecting steps; 702. a threaded hole I; 8. a plain bearing housing; 801. a lower boss; 802. an inner spline II; 803. a threaded hole II; 9. connecting sleeves; 901. an internal spline III; 902. a through hole II; 10. an inner bearing shell; 11. a shaft head I; 12. an inner grinding wheel; 13. a shaft head II; 14. an outer grinding wheel; 15. a bearing group II; 16. an outer bearing retainer ring; 17. an inner bearing retainer ring; 18. a bearing group III; 19. a bearing retainer ring I; 20. a motor rotor; 21. a motor stator; 22. a bearing group IV; 23. a bearing retainer ring II; 24. a bearing group V; 25. and a bearing retainer ring III.

Detailed Description

As shown in fig. 1-9, the telescopic double-sleeve electric spindle of the present invention comprises a central shaft 1, a housing 2, a telescopic sleeve assembly, and a rotary sleeve assembly, wherein the central shaft 1 is rotatably connected in the housing 2, the housing 2 comprises a top plate 201 and a tube housing 202, the top plate 201 is connected to the top end of the tube housing 202, the top end of the central shaft 1 is rotatably connected to the center of the top plate 201, the lower end of the central shaft 1 extends out of the lower end of the tube housing 202, the lower end of the central shaft 1 is connected with a shaft head i 11, the lower end of the shaft head i 11 is connected with an inner grinding wheel 12, the telescopic sleeve assembly comprises a cylinder 5, a connecting ring 6 and a sliding bearing shell 8, the bottom end of the cylinder 5 is connected to the bottom surface of the top plate 201, the connecting ring 6 is connected below the cylinder 5, the front end of a telescopic rod of the cylinder 5 is connected to the connecting ring 6, the top surface of the sliding bearing shell 8 is connected to the bottom surface of the connecting ring 6, the rotary sleeve assembly comprises a linkage bearing shell 7, a shaft head ii 13 and an outer grinding wheel 14, linkage bearing shell 7 is connected in the slide bearing shell 8 outside, be connected with bearing group II 15 between linkage bearing shell 7 and the slide bearing shell 8, 7 inner wall connection of linkage bearing shell has adapter sleeve 9, be equipped with III 901 of internal spline on the adapter sleeve 9 inner wall, be equipped with I101 of external spline on the 1 outer wall of center pin, III 901 sliding connection of internal spline is on I101 of external spline, II 13 tops of spindle nose are connected in 7 bottoms of linkage bearing shell, 14 connections in II 13 bottoms of spindle nose are ground outward, I11 rotations of spindle nose are connected in II 13 of spindle nose, outer emery wheel 14 is established in the interior emery wheel 12 outside.

Further, still including drive assembly, drive assembly is including fixing bearing shell 3, fixing bearing shell 3 connects on roof 201 bottom surface, cylinder 5 is connected in the 3 outsides of fixing bearing shell, 1 upper portion of center pin is rotated and is connected in fixing bearing shell 3, be connected with motor rotor 20 and motor stator 21 between 1 and the fixing bearing shell 3 of center pin, motor rotor 20 connects on 1 outer wall of center pin, motor stator 21 connects on 3 inner walls of fixing bearing shell, be connected with bearing group I4 between 1 and the fixing bearing shell 3 of center pin, be connected with the retaining ring on the I4 top surface of bearing group.

Further, 3 outer wall lower parts of fixed bearing shell be equipped with external splines II 301, be equipped with internal splines I601 on the go-between 6 inner walls, internal splines I601 sliding connection is on external splines II 301, 8 inner wall upper portions of slide bearing shell are equipped with internal splines II 802, internal splines II 802 sliding connection is at external splines II 301.

Furthermore, a plurality of through holes 602 are uniformly distributed on the circumference of the connecting ring 6, a plurality of threaded holes ii 803 are uniformly distributed on the circumference of the top surface of the sliding bearing shell 8, the plurality of through holes 602 correspond to the plurality of threaded holes ii 803 one to one, and the plurality of through holes 602 are connected with the plurality of threaded holes ii 803 through bolts.

Further, the bottom end of the outer wall of the sliding bearing shell 8 is provided with a lower boss 801, the lower boss 801 is connected to the bottom surface of the bearing group II 15, the top surface of the bearing group II 15 is connected with an outer bearing retainer ring 16 and an inner bearing retainer ring 17, the outer bearing retainer ring 16 is in threaded connection with the inner wall of the linkage bearing shell 7, the corresponding position of the inner wall of the linkage bearing shell 7 is provided with threads, the inner bearing retainer ring 17 is in threaded connection with the outer wall of the sliding bearing shell 8, and the corresponding position of the outer wall of the sliding bearing shell 8 is provided with threads; the inner wall of the linkage bearing shell 7 is provided with a step at the bottom of the bearing group II 15.

Furthermore, a connecting step 701 is arranged on the inner wall of the linkage bearing shell 7, the connecting sleeve 9 is connected to the connecting step 701, a plurality of threaded holes I702 are uniformly distributed on the bottom surface of the connecting step 701 at the periphery, a plurality of step holes 901 are uniformly distributed on the connecting sleeve 9 at the periphery, the plurality of step holes 901 are in one-to-one correspondence with the plurality of threaded holes I702, the plurality of step holes 901 are connected with the plurality of threaded holes I702 through bolts, and the head of the bolt is connected into the step holes 901.

Further, 8 inner walls of slide bearing shell and 1 outer wall of center pin between be connected with bearing group III 18, be connected with bearing retainer ring I19 on the III 18 top surfaces of bearing group, bearing retainer ring I19 threaded connection is on

center pin

1, and 1 relevant position of center pin is equipped with the screw thread, and center pin 1 is equipped with the step in the III 18 bottom surface positions of bearing group.

Furthermore, a bearing group IV 22 is connected between the linkage bearing shell 7 and the central shaft 1, the bearing group IV 22 is arranged below the external spline I101, a bearing retainer ring II 23 is connected to the bottom surface of the bearing group IV 22, the bearing retainer ring II 23 is in threaded connection with the inner wall of the linkage bearing shell 7, threads are arranged at the corresponding position of the inner wall of the linkage bearing shell 7, and a step is arranged on the position of the top surface of the bearing retainer ring II 23 on the inner wall of the linkage bearing shell 7.

Further, the lower end of the inner wall of the tube shell 202 is connected with an inner bearing shell 10, a bearing group V24 is connected between the inner bearing shell 10 and the linkage bearing shell 7, the bottom surface of the bearing group V24 is connected with a bearing retainer ring III 25, the bearing retainer ring III 25 is in threaded connection with the lower portion of the outer wall of the linkage bearing shell 7, threads are arranged at the corresponding position of the outer wall of the linkage bearing shell 7, and a step is arranged on the position of the top surface of the bearing group V24 on the outer wall of the linkage bearing shell 7.

Furthermore, the bearing group I4, the bearing group II 15, the bearing group III 18, the bearing group IV 22 and the bearing group V24 respectively comprise two bearings which are connected up and down along the axis direction of the central shaft 1; the air cylinders 5 are provided with a plurality of air cylinders 5 which are uniformly distributed by taking the axis of the central shaft 1 as the center circumference.

The central shaft 1 is used as a rotation center of the invention, the inner grinding wheel 12 is connected to the central shaft 1 through a shaft head I11, the inner grinding wheel 12 always rotates along with the central shaft 1 to grind the wafer by the inner grinding wheel 12, in the embodiment, the inner grinding wheel 12 is a fine grinding wheel, when coarse grinding is required, an expansion rod of the air cylinder 5 extends out, the expansion rod of the air cylinder 5 drives the connecting ring 6 to move downwards, the connecting ring 6 drives the sliding bearing shell 8 to move downwards, the sliding bearing shell 8 drives the linkage bearing shell 7 to move downwards through a bearing group II 15, the linkage bearing shell 7 moves downwards to drive the connecting sleeve 9 to move downwards, the connecting sleeve 9 moves downwards to drive the shaft head II 13 and the outer grinding wheel 14 to move downwards, the bottom surface of the outer grinding wheel 14 extends out of the bottom surface of the inner grinding wheel 12, and when the connecting sleeve 9 moves downwards, the inner spline III 901 is connected to the outer spline I101 to drive the connecting sleeve 9 to rotate by the central shaft 1, the connecting sleeve 9 rotates to drive the linkage bearing shell 7 to rotate, the linkage bearing shell 7 rotates to drive the shaft head II 13 and the outer grinding wheel 14 to rotate, therefore, the outer grinding wheel 14 is used for grinding the wafer, the bearing group II 15 also meets the function that the sliding bearing shell 8 and the linkage bearing shell 7 can rotate in the shape relative to each other, the sliding bearing shell 8, the connecting ring 6 and the air cylinder 5 cannot rotate when the linkage bearing shell 7 rotates, and in the embodiment, the outer grinding wheel 14 is a fine grinding wheel.

When the outer grinding wheel 14 needs to be lifted and retracted, the telescopic rod of the air cylinder 5 is retracted, and the telescopic rod of the air cylinder 5 is retracted to separate the inner spline III 901 from the outer spline I101, so that the central shaft 1 and the connecting sleeve 9 are separated in rotation.

In the embodiment, in order to meet the assembly relation and the transmission requirement of other parts, the linkage bearing shell 7 is provided with eight stepped cylindrical surfaces at the inner ring and six stepped cylindrical surfaces at the outer ring, and can be flexibly changed according to the actual use condition in actual use.

It should be noted that, in the process of extending and retracting the cylinder 5, the cylinder 5 is extended and retracted after the rotation of the central shaft 1 is stopped, and in addition, in order to ensure that the internal spline iii 901 can flexibly enter and exit the external spline i 101, it is considered that chamfers are arranged on all top edges of the external spline i 101 to play a certain guiding role, if it is found that the internal spline iii 901 is difficult to enter the external spline i 101 or the linkage bearing shell 7, the spindle head ii 13 or the external grinding wheel 14 is difficult to descend in use, the central shaft 1 can be slightly rotated manually so that each component can descend smoothly.

Through the telescopic operation, the wafer is conveniently accurately and coarsely ground without replacing the grinding wheel and replacing the thinning machine, the central shaft 1 is only required to stop rotating in the replacement process, the use is convenient, the time is saved, the processing quality of the wafer is ensured, meanwhile, all transmission parts are in rigid connection, the transmission is stable in the telescopic process, the jumping of the grinding wheel caused by the elastic connection modes of a spring, an eccentric shaft and the like in the prior art is avoided, and the problem of difficulty in replacing an elastic part is also solved.

Drive assembly mainly provides rotation power for center pin 1, and the setting of fixed bearing shell 3 mainly used supports each spare part of drive assembly, and the setting of bearing group I4 and retaining ring has satisfied the function of realizing relative rotation between center pin 1 and the fixed bearing shell 3.

The setting of II 301 of external splines and I601 is mainly in order to guarantee the stability of go-between 6, on the one hand makes fixed bearing shell 3 form the support to go-between 6, and on the other hand avoids making go-between 6 take place the pivoted risk because factors such as inertia, and the setting of II 802 of internal splines is in order to satisfy in-process slide bearing shell 8 lift can not take place to interfere with between the fixed bearing shell 3, has also improved the stability in use of slide bearing shell 8 simultaneously.

The plurality of through holes 602 and the plurality of threaded holes ii 803 are connected by bolts, which mainly satisfy the fixed connection between the connecting ring 6 and the sliding bearing shell 8, and belong to the technical means frequently used in the field, and are not described again.

The steps arranged on the bottom surfaces of the lower lug boss 801 and the linkage bearing shell 7 on the inner walls of the bearing group II 15 limit and support the bearing group II 15, the arrangement of the bearing outer retainer ring 16 and the bearing inner retainer ring 17 limit the top surface of the bearing group II 15, and when the bearing group II 15 meets the requirement that the sliding bearing shell 8 and the linkage bearing shell 7 relatively rotate enough, the bearing group II 15 and the linkage bearing shell 7 can more rotate along with the sliding bearing shell 8 in the lifting process of the sliding bearing shell 8 due to the arrangement of the lower lug boss 801, the steps, the outer retainer ring 16 and the bearing inner retainer ring 17; the use stability is improved, and the stability and flexibility of the telescopic process are ensured.

The connecting step 701 is arranged to meet the requirement of connection of the connecting sleeve 9 and the linkage bearing shell 7, the plurality of step holes 901 and the plurality of threaded holes I702 are connected through bolts to achieve fixed connection of the connecting sleeve 9 and the linkage bearing shell 7, and the structure that the bolt heads are connected in the step holes 901 is marked as the structure of a countersunk head bolt in the prior art, so that the bolt heads are prevented from interfering with other parts.

Bearing group III 18 set up on the one hand and satisfied more enough formation relative rotation between slide bearing shell 8 and the center pin 1, guarantee that bearing group III 18 does not rotate when center pin 1 rotates, on the other hand bearing group III 18 provides the support for slide bearing shell 8, bearing retainer ring I19 and center pin 1 have realized bearing group III 18 and center pin 1's spacing at the step that bearing group III 18 bottom surface position was equipped with, bearing group III 18 can not take place the displacement when having guaranteed that slide bearing shell 8 is flexible again, stability in use and flexible flexibility have been improved.

Bearing group IV 22 sets up to the lift of linkage bearing shell 7 and provides the support, and bearing retainer II 23 and the step that linkage bearing shell 7 inner wall was equipped with in bearing retainer II 23 top surface position provide spacing for bearing group IV 22, avoid bearing group IV 22 to take place the displacement when linkage bearing shell 7 is flexible, have improved stability in use and flexible flexibility.

The setting up of inner bearing shell 10 makes tube 202 provide the support through inner bearing shell 10 to linkage bearing shell 7's lift, bearing group V24's setting has realized that inner bearing shell 10 and linkage bearing shell 7 can rotate relatively between, bearing retainer ring III 25 linkage bearing shell 7 outer wall provides spacingly at bearing group V24 top surface position the step that is equipped with, bearing group V24 takes place the displacement when linkage bearing shell 7 is flexible, improved stability in use and flexible flexibility. In actual use, the inner bearing shell 10 can be made of red copper or brass, so that the flexibility is improved.

Bearing group I4, bearing group II 15, bearing group III 18, bearing group IV 22 and bearing group V24 all include two bearings and have effectively improved the area of contact between each bearing group and the rotating parts, have further improved stability in use. The arrangement of the cylinders 5 enables the telescopic process of each telescopic assembly to be stable, the deflection of each assembly in the telescopic process is avoided, and the use stability is improved.

Claims

1. A flexible double jacket electricity main shaft which characterized in that: comprises a central shaft (1), a shell (2), a coat telescopic component, a coat rotating component, wherein the central shaft (1) is rotatably connected in the shell (2), the shell (2) comprises a top plate (201) and a tube shell (202), the top plate (201) is connected at the top end of the tube shell (202), the top end of the central shaft (1) is rotatably connected at the center of the top plate (201), the lower end of the central shaft (1) extends out of the lower end of the tube shell (202), the lower end of the central shaft (1) is connected with a shaft head I (11), the lower end of the shaft head I (11) is connected with an inner grinding wheel (12), the coat telescopic component comprises a cylinder (5), a connecting ring (6) and a sliding bearing shell (8), the bottom end of the cylinder (5) is connected with the bottom surface of the top plate (201), the connecting ring (6) is connected below the cylinder (5), the front end of a telescopic rod of the cylinder (5) is connected with the connecting ring (6), the top surface of the sliding bearing shell (8) is connected with the connecting ring (6), the outer sleeve rotating assembly comprises a linkage bearing shell (7), a shaft head II (13) and an outer grinding wheel (14), the linkage bearing shell (7) is connected to the outer side of a sliding bearing shell (8), a bearing group II (15) is connected between the linkage bearing shell (7) and the sliding bearing shell (8), the inner wall of the linkage bearing shell (7) is connected with a connecting sleeve (9), an inner spline III (901) is arranged on the inner wall of the connecting sleeve (9), an outer spline I (101) is arranged on the outer wall of a central shaft (1), the inner spline III (901) is connected to the outer spline I (101) in a sliding mode, the top end of the shaft head II (13) is connected to the bottom end of the linkage bearing shell (7), the outer grinding wheel (14) is connected to the bottom end of the shaft head II (13), the shaft head I (11) is rotatably connected to the shaft head II (13), and the outer grinding wheel (14) is arranged on the outer side of the inner grinding wheel (12).

2. A telescopic double-sleeve electric spindle according to claim 1, characterized in that: still including drive assembly, drive assembly is including fixing bearing shell (3), fixing bearing shell (3) are connected on roof (201) bottom surface, cylinder (5) are connected in fixing bearing shell (3) outside, center pin (1) upper portion is rotated and is connected in fixing bearing shell (3), be connected with motor rotor (20) and motor stator (21) between center pin (1) and fixing bearing shell (3), motor rotor (20) are connected on center pin (1) outer wall, motor stator (21) are connected on fixing bearing shell (3) inner wall, be connected with bearing group I (4) between center pin (1) and fixing bearing shell (3), be connected with the retaining ring on bearing group I (4) top surface.

3. A telescopic double-sleeve electric spindle according to claim 2, characterized in that: fixed bearing shell (3) outer wall lower part be equipped with external splines II (301), be equipped with internal splines I (601) on go-between (6) inner wall, internal splines I (601) sliding connection is on external splines II (301), slide bearing shell (8) inner wall upper portion is equipped with internal splines II (802), internal splines II (802) sliding connection is at external splines II (301).

4. A telescopic double-sleeve electric spindle according to claim 3, characterized in that: the connecting ring (6) on the circumference equipartition have a plurality of through-holes (602), slide bearing shell (8) top surface on the circumference equipartition have a plurality of screw hole II (803), a plurality of through-holes (602) and a plurality of screw hole II (803) one-to-one, a plurality of through-holes (602) pass through bolted connection with a plurality of screw hole II (803).

5. A telescopic double-sleeve electric spindle according to claim 4, characterized in that: the bottom end of the outer wall of the sliding bearing shell (8) is provided with a lower boss (801), the lower boss (801) is connected to the bottom surface of the bearing group II (15), the top surface of the bearing group II (15) is connected with an outer bearing retainer ring (16) and an inner bearing retainer ring (17), the outer bearing retainer ring (16) is in threaded connection with the inner wall of the linkage bearing shell (7), threads are arranged at corresponding positions of the inner wall of the linkage bearing shell (7), the inner bearing retainer ring (17) is in threaded connection with the outer wall of the sliding bearing shell (8), and threads are arranged at corresponding positions of the outer wall of the sliding bearing shell (8); the inner wall of the linkage bearing shell (7) is provided with a step at the bottom of the bearing group II (15).

6. A telescopic double-sleeve electric spindle according to claim 5, characterized in that: the linkage bearing shell (7) is provided with a connecting step (701) on the inner wall, a connecting sleeve (9) is connected to the connecting step (701), a plurality of threaded holes I (702) are evenly distributed on the bottom surface of the connecting step (701) in the circumferential direction, a plurality of step holes (901) are evenly distributed on the connecting sleeve (9) in the circumferential direction, the plurality of step holes (901) correspond to the plurality of threaded holes I (702) in a one-to-one mode, the plurality of step holes (901) are connected with the plurality of threaded holes I (702) through bolts, and the head of the bolt is connected to the inside of the step hole (901).

7. A telescopic double-sleeve electric spindle according to claim 6, characterized in that: slide bearing shell (8) inner wall and center pin (1) outer wall between be connected with bearing group III (18), be connected with bearing retainer ring I (19) on bearing group III (18) top surface, bearing retainer ring I (19) threaded connection is on center pin (1), center pin (1) relevant position is equipped with the screw thread, center pin (1) is equipped with the step in bearing group III (18) bottom surface position.

8. A telescopic double-sleeve electric spindle according to claim 7, characterized in that: linkage bearing shell (7) and center pin (1) between be connected with bearing group IV (22), bearing group IV (22) are established in external splines I (101) below, be connected with bearing retainer ring II (23) on bearing group IV (22) bottom surface, bearing retainer ring II (23) threaded connection is on linkage bearing shell (7) inner wall, linkage bearing shell (7) inner wall relevant position is equipped with the screw thread, linkage bearing shell (7) inner wall is equipped with the step in bearing retainer ring II (23) top surface position.

9. A telescopic double-sleeve electric spindle according to claim 7, characterized in that: the linkage type bearing shell is characterized in that the lower end of the inner wall of the tube shell (202) is connected with an inner bearing shell (10), a bearing group V (24) is connected between the inner bearing shell (10) and the linkage bearing shell (7), a bearing retainer ring III (25) is connected to the bottom surface of the bearing group V (24), the bearing retainer ring III (25) is in threaded connection with the lower portion of the outer wall of the linkage bearing shell (7), threads are arranged at the corresponding position of the outer wall of the linkage bearing shell (7), and steps are arranged on the outer wall of the linkage bearing shell (7) at the top surface of the bearing group V (24).

10. A telescopic double-sleeve electric spindle according to any one of claims 5, 7, 8 and 9, characterized in that: the bearing group I (4), the bearing group II (15), the bearing group III (18), the bearing group IV (22) and the bearing group V (24) comprise two bearings which are connected up and down along the axis direction of the central shaft (1); the air cylinders (5) are arranged in a plurality of numbers, and the air cylinders (5) are uniformly distributed by taking the axis of the central shaft (1) as the center circumference.