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CN114630496A - Electroless nickel-gold process capable of reducing chemical treatment steps and system thereof - Google Patents

Electroless nickel-gold process capable of reducing chemical treatment steps and system thereof Download PDF

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CN114630496A
CN114630496A CN202111159767.5A CN202111159767A CN114630496A CN 114630496 A CN114630496 A CN 114630496A CN 202111159767 A CN202111159767 A CN 202111159767A CN 114630496 A CN114630496 A CN 114630496A
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gold
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黄信翔
黄信航
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Huang Xinxiang
Suzhou Xunzhan Technology Co ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1619Apparatus for electroless plating
    • C23C18/1632Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/1803Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/227Drying of printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/26Cleaning or polishing of the conductive pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0756Uses of liquids, e.g. rinsing, coating, dissolving
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1333Deposition techniques, e.g. coating
    • H05K2203/1344Spraying small metal particles or droplets of molten metal

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Chemically Coating (AREA)

Abstract

本发明提供了一种可减少化学处理步骤的化学镍金制程方法,包括:将电路板逐片采水平输送方式进行:喷砂、水洗、超音波清洗、水洗、酸性清洁、水洗、多段式微蚀、水洗、预浸、活化、水洗、后酸浸、超音波清洗、水洗,之后翻转电路板成垂直状且采逐片连续移动方式进行,其中多段微蚀流程是先经喷洒微蚀液、之后再浸泡于喷涌的微蚀液中:化学沉积镍、水洗、化学沉积金、回收水洗,之后再翻转电路板逐片采水平输送方式进行:水洗、吹干、烘干等作业,借此本发明方法及系统能仅经由单一系统完成电路板的表面处理。

Figure 202111159767

The invention provides an chemical nickel-gold process method that can reduce chemical treatment steps, including: horizontal conveying of circuit boards one by one: sandblasting, water washing, ultrasonic cleaning, water washing, acid cleaning, water washing, multi-stage micro-etching , water washing, pre-soaking, activation, water washing, post-acid leaching, ultrasonic cleaning, water washing, and then turn the circuit board into a vertical shape and move it continuously one by one. Then soak in the gushing micro-etching liquid: chemical deposition of nickel, water washing, chemical deposition of gold, recycling water washing, and then flip the circuit board piece by piece and adopt the horizontal conveying method to carry out: washing, drying, drying and other operations, whereby the present invention The method and system can complete the surface treatment of the circuit board through only a single system.

Figure 202111159767

Description

可减少化学处理步骤的化学镍金制程方法及系统Electroless nickel-gold process method and system with reduced chemical processing steps

技术领域technical field

本发明为一种电路板制造的技术领域,尤其指一种可减少化学处理步骤的化学镍金制程方法及系统。The present invention relates to the technical field of circuit board manufacturing, and particularly relates to an electroless nickel-gold process method and system which can reduce chemical treatment steps.

背景技术Background technique

化学镍金(Electroless Nickel/Immersion Gold,简写为ENIG,又称化镍金、沉镍金或者无电镍金)是通过化学反应在铜的表面置换钯,再在钯核的基础上化学沉积一层镍磷合金层,然后再通过置换反应在镍的表面置换上一层金。化学镍金主要用于电路板后续组装制程的表面处理。Electroless Nickel/Immersion Gold (abbreviated as ENIG, also known as electroless nickel gold, immersion nickel gold or electroless nickel gold) replaces palladium on the surface of copper through chemical reaction, and then chemically deposits a palladium core on the basis of chemical reaction. A layer of nickel-phosphorus alloy is formed, and then a layer of gold is replaced on the surface of nickel through a substitution reaction. Electroless nickel gold is mainly used for the surface treatment of the subsequent assembly process of the circuit board.

化学镍金制程在电路板加工中的处理流程包括:前处理、化学沉积和后处理。前处理的步骤包括:刷磨→水洗→喷砂→水洗→超音波清洗→微蚀→水洗→酸洗→水洗→吹干→烘干。化学沉积的步骤包括:清洁→水洗→微蚀→水洗→前酸浸→水洗→预浸→活化→水洗→后酸浸→水洗→化学沉积镍→水洗→化学沉积金→水洗→干燥。后处理的步骤包括:酸洗→水洗→超音波清洗→水洗→吹干→烘干。The processing flow of electroless nickel gold process in circuit board processing includes: pre-treatment, chemical deposition and post-treatment. The pretreatment steps include: brushing→water washing→sandblasting→water washing→ultrasonic cleaning→micro-etching→water washing→pickling→water washing→air drying→drying. The steps of chemical deposition include: cleaning→water washing→micro-etching→water washing→pre-acid leaching→water washing→pre-soaking→activation→water washing→post-acid leaching→water washing→electroless nickel deposition→water washing→chemical gold deposition→water washing→drying. The post-processing steps include: pickling → water washing → ultrasonic cleaning → water washing → drying → drying.

因此现有化学镍金制程所采用的系统就必须包括三组设备,分别为前处理设备(如图1A所示)、化学沉积设备(如图1B所示)及后处理设备(如图1C所示)。前处理设备包括:刷磨槽101、水洗槽102、喷砂槽103、水洗槽104、超音波清洗槽105、微蚀槽106、水洗槽107、酸洗槽108、水洗槽109、吹干槽110、烘干槽111。当电路板净化后,须由人工将电路板逐片放置于吊篮200内。Therefore, the system used in the existing chemical nickel gold process must include three sets of equipment, namely pre-processing equipment (as shown in Figure 1A), chemical deposition equipment (as shown in Figure 1B) and post-processing equipment (as shown in Figure 1C) Show). The pretreatment equipment includes: brushing tank 101, washing tank 102, sandblasting tank 103, washing tank 104, ultrasonic cleaning tank 105, micro-etching tank 106, washing tank 107, pickling tank 108, washing tank 109, drying tank 110. Drying tank 111. After the circuit boards are cleaned, the circuit boards must be manually placed in the basket 200 one by one.

化学沉积设备包括:清洁槽121、水洗槽122、微蚀槽123、水洗槽124、前酸浸槽125、水洗槽126、预浸槽127、活化槽128、水洗槽129、交换槽130、后酸浸槽131、水洗槽132、化学沉积镍槽133、数水洗槽134、化学沉积金槽135、数水洗槽136、干燥槽137。生产作业方式是将已放置多片(例如20至40片)电路板的吊篮200,利用两台移行吊车,第一移行吊车201、第二移行吊车202依序移动至前述反应槽室之间,带动吊篮200垂直上升或下降。当吊篮200由第一移行吊车201依序移动至交换槽130后,将由第二移行吊车202接手移动至后续反应槽室内作业。The chemical deposition equipment includes: cleaning tank 121, washing tank 122, micro-etching tank 123, washing tank 124, pre-acid dip tank 125, washing tank 126, pre-soaking tank 127, activation tank 128, washing tank 129, exchange tank 130, after Acid leaching tank 131 , water washing tank 132 , chemical deposition nickel tank 133 , water washing tank 134 , chemical deposition gold tank 135 , water washing tank 136 , drying tank 137 . The production operation method is to move the gondola 200 on which multiple (eg, 20 to 40) circuit boards have been placed, and use two traveling cranes, the first traveling crane 201 and the second traveling crane 202 to sequentially move between the aforementioned reaction chambers , to drive the gondola 200 to rise or fall vertically. After the gondola 200 is sequentially moved to the exchange tank 130 by the first traveling crane 201 , the second traveling crane 202 will take over and move it to the subsequent reaction tank for operation.

后处理设备包括:酸洗槽141、水洗槽142、超音波清洗槽143、水洗槽144、吹干槽145、烘干槽146。在后处理过程中,仍必须由人工自吊篮200内逐片取出电路板,放置设备中依序进行相关作业。The post-processing equipment includes: pickling tank 141 , water washing tank 142 , ultrasonic cleaning tank 143 , water washing tank 144 , drying tank 145 , and drying tank 146 . In the post-processing process, it is still necessary to manually take out the circuit boards one by one from the hanging basket 200, and place them in the equipment to perform related operations in sequence.

综合以上所述,在上述三道加工流程中,如前处理、化学沉积和后处理皆必须使用大量清洗水及化学药水,不仅费用高,且使用后废水的收回再处理,又是一笔费用。另外过程中皆必须利用人力进行于吊篮中移出或移入电路板的作业,费时又费工。Based on the above, in the above three processing processes, such as pre-treatment, chemical deposition and post-treatment, a large amount of cleaning water and chemical solution must be used, which is not only expensive, but also the recovery and reprocessing of waste water after use is another expense. . In addition, manpower must be used to move out or move the circuit board in the basket, which is time-consuming and labor-intensive.

另外在化学镍金制程的前一道制程为绿漆(Solder Mask)制程。电路板在绿漆制程最后会有一道烘烤处理程序,温度为摄氏180度,烘烤时间为50分钟,烘烤处理完后电路板表面已严重氧化,且因生产时程安排的因素,电路板会暂时放置在一旁,时间可能长达数小时至一天,电路板表面因此加重氧化及被环境污染,故电路板在进行化学镍金制程时,会有刷磨、喷砂、微蚀、酸洗等程序以去除电路板表面的氧化层。再者,现有化学镍金制程分为三道加工流程:前处理、化学镍金沉积、后处理,在每道加工流程之间都会等待放置一段时间及人工搬运接触的问题造成电路板表面氧化和污染,故在化学镍金沉积和后处理的加工流程,都会在加工流程前段加入微蚀或酸洗或超音波清洗等程序,目的都是在去除电路板表面的氧化层和污染物。In addition, the previous process of the chemical nickel gold process is the green paint (Solder Mask) process. The circuit board will have a baking process at the end of the green paint process. The temperature is 180 degrees Celsius and the baking time is 50 minutes. After the baking process, the surface of the circuit board has been seriously oxidized. The board will be temporarily placed aside for several hours to a day, and the surface of the circuit board will be oxidized and polluted by the environment. Procedures such as washing to remove the oxide layer on the surface of the circuit board. Furthermore, the existing electroless nickel-gold manufacturing process is divided into three processing processes: pre-treatment, electroless nickel-gold deposition, and post-processing. Between each processing process, there will be a waiting period of time and the problem of manual handling and contact will cause the surface of the circuit board to oxidize. Therefore, in the process of electroless nickel-gold deposition and post-treatment, micro-etching or pickling or ultrasonic cleaning will be added in the front part of the process, the purpose is to remove the oxide layer and pollutants on the surface of the circuit board.

为此本发明人思考改良的方法,将整组化学镍金制程系统加以整合为单一系统,除了减少多道去除氧化层及污染物的工序,且能进一步减少部份工序,借此产生更大的效益。For this reason, the inventors have considered an improved method to integrate the entire electroless nickel-gold process system into a single system, which not only reduces the multiple processes for removing oxide layers and contaminants, but also further reduces some of the processes, thereby producing larger benefit.

发明内容SUMMARY OF THE INVENTION

本发明的主要目的是提供一种可以减少化学处理和清洗烘干步骤的化学镍金制程方法及系统,借由将不同的工序及制程重新组合,减少制程的步骤,进而减少清洗水及各类化学药剂的使用量,节省使用量相对减少支出成本,而且减少多道工序,对电力、人工、化学废液及废水处理的成本也产生了显著地减少。The main purpose of the present invention is to provide an electroless nickel-gold process method and system that can reduce chemical treatment and cleaning and drying steps. The use of chemical agents, saving the amount of use and reducing the cost of expenditure, and reducing the number of processes, the cost of electricity, labor, chemical waste liquid and wastewater treatment has also been significantly reduced.

为实现前述目的,本发明采用了如下技术方案:To achieve the foregoing purpose, the present invention has adopted the following technical solutions:

本发明提供一种可减少化学处理步骤的化学镍金制程方法,其步骤包括将电路板板逐片采用水平输送方式进行:喷砂、水洗、超音波清洗、水洗、酸性清洁、水洗、多段式微蚀、水洗、预浸、活化、水洗、后酸浸、超音波清洗、水洗,其中多段式微蚀包括先经喷洒微蚀液、之后浸泡于喷涌的微蚀液中;之后翻转电路板成垂直状且采用逐片连续移动方式进行:化学沉积镍、水洗、化学沉积金、回收水洗,之后再翻转电路板逐片采用水平输送方式进行:水洗、吹干、烘干等作业。The invention provides an electroless nickel-gold process method which can reduce chemical treatment steps. Etching, water washing, pre-soaking, activation, water washing, post-acid leaching, ultrasonic cleaning, water washing, among which multi-stage micro-etching includes spraying micro-etching liquid first, then soaking in the gushing micro-etching liquid; then flip the circuit board into a vertical shape And it is carried out in a continuous moving method one by one: chemical deposition of nickel, water washing, chemical deposition of gold, recycling water washing, and then flipping the circuit board one by one using horizontal conveying method: washing, drying, drying and other operations.

作为较佳优选实施方案之一,其中喷洒方式是以高压方式喷洒微蚀液于电路板,之后电路板再浸泡于喷涌的微蚀液中,此方式是利用另一槽内喷出的微蚀液于槽内产生喷涌水流,让水流均匀流至电路板表面或孔内,以进行微蚀刻。As one of the preferred embodiments, the spraying method is to spray the micro-etching liquid on the circuit board in a high-pressure manner, and then the circuit board is immersed in the gushing micro-etching liquid. This method is to use the micro-etching liquid sprayed from another tank. The liquid produces a gushing water flow in the tank, so that the water flow evenly flows to the surface or hole of the circuit board for micro-etching.

作为较佳优选实施方案之一,可于多段式微蚀、水洗步骤之后,可再增加一组前酸浸、水洗步骤。As one of the preferred embodiments, a set of pre-acid leaching and water washing steps can be added after the multi-stage micro-etching and water washing steps.

再者,本发明提供一种可减少化学处理步骤的化学镍金制程系统,包括依序串联并排的喷砂槽、第一水洗槽、超音波清洗槽、第二水洗槽、酸性清洁槽、第三水洗槽、多段微蚀槽、第四水洗槽、预浸槽、活化槽、第五水洗槽、后酸浸槽、超音波清洗槽、第六水洗槽、化学沉积镍槽、第七水洗槽、化学沉积金槽、回收水洗槽、第八水洗槽、吹干槽、烘干槽。Furthermore, the present invention provides an electroless nickel-gold process system that can reduce chemical treatment steps, including a sandblasting tank, a first water washing tank, an ultrasonic cleaning tank, a second water washing tank, an acid cleaning tank, a second Three washing tank, multi-stage micro-etching tank, fourth washing tank, pre-soak tank, activation tank, fifth washing tank, post-acid leaching tank, ultrasonic cleaning tank, sixth washing tank, chemical deposition nickel tank, seventh washing tank , chemical deposition gold tank, recovery washing tank, eighth washing tank, drying tank, drying tank.

作为较佳优选实施方案之一,化学沉积镍槽与化学沉积金槽是使用一种逐片连续生产的化学沉积设备。As one of the preferred embodiments, the electroless nickel deposition tank and the electroless gold deposition tank use an electroless deposition equipment that is continuously produced one by one.

作为较佳优选实施方案之一,于第三水洗槽之后,再增加一组前酸浸槽、前酸浸用的水洗槽。As one of the preferred embodiments, after the third water washing tank, a group of pre-acid leaching tanks and water washing tanks for pre-acid leaching are added.

与现有技术相比,本发明具有下列具体的功效:Compared with the prior art, the present invention has the following specific effects:

1.本发明的设计能省去现有前处理中的刷磨、水洗、微蚀、水洗、酸洗、水洗、吹干、烘干及人工收集电路板等作业及工序,相对地省节包括化学药水、清洗水、电力、人工、化学废液及废水处理等成本。1. The design of the present invention can save the operations and processes such as brushing, washing, micro-etching, washing, pickling, washing, drying, drying and manual collection of circuit boards in the existing pretreatment, and the relative savings include: Costs of chemical solution, cleaning water, electricity, labor, chemical waste liquid and waste water treatment.

2.本发明的设计也能节省现有后处理中的酸洗、超音波清洗等工序,相对地节省包括化学药水、清洗水、电力、人工、化学废液及废水处理等成本。2. The design of the present invention can also save processes such as pickling and ultrasonic cleaning in the existing post-treatment, and relatively save costs including chemical liquid, cleaning water, electricity, labor, chemical waste liquid and waste water treatment.

3.本发明将原本前处理设备、化学沉积设备及后处理设备三个设备整合为单一系统所取代,减少了多项设备的成本支出,也由于整合为单一系统,设备长度因而缩短,使所需厂房面积减少,也让厂房的空间能更有效的运用。3. The present invention integrates the original pre-processing equipment, chemical deposition equipment and post-processing equipment into a single system and replaces it, which reduces the cost of a number of equipment, and the length of the equipment is shortened due to the integration into a single system. The required plant area is reduced, and the space of the plant can be used more effectively.

4.本发明采用多段式微蚀,是利用喷洒、浸泡(含喷涌)的混合微蚀方式,达到所需去除铜表面及线路间氧化层的目的,且在化学沉积的镍金制程中,也则能减少一次微蚀、水洗、前酸浸及水洗程序,大幅减少了化学药水、清洗水、电力、人工、化学废液及废水处理等成本。4. The present invention adopts multi-stage micro-etching, which uses the mixed micro-etching method of spraying and soaking (including gushing) to achieve the purpose of removing the oxide layer on the copper surface and between the lines, and in the nickel-gold process of chemical deposition, also It can reduce one micro-etching, water washing, pre-acid leaching and water washing procedures, and greatly reduce the cost of chemical solution, cleaning water, electricity, labor, chemical waste liquid and waste water treatment.

5.现有龙门吊笼式制程因须两道微蚀制程,每道微蚀都会将铜线路咬蚀(减薄),所以在前面的“电镀铜”制程时,会刻意增加电镀铜的厚度,以防微蚀之后的铜厚不足。本发明因仅须进行一道多段微蚀制程,咬蚀量约0.4至0.6微米(μm),因此在前段的“电镀铜”制程时,可以减少电镀铜厚度,即减少铜的消耗和省电。5. The existing gantry cage process requires two micro-etching processes. Each micro-etching will bite (thin) the copper circuit. Therefore, in the previous "copper electroplating" process, the thickness of the electroplated copper will be deliberately increased. In order to prevent insufficient copper thickness after micro-etching. In the present invention, only one multi-stage micro-etching process is required, and the amount of bite-etching is about 0.4 to 0.6 micrometers (μm). Therefore, in the previous "electroplating copper" process, the thickness of electroplating copper can be reduced, that is, copper consumption can be reduced and power saving.

6.本发明于后酸浸之后采用一道超音波清洗步骤,能彻底洗净50微米以下细线路间残留的钯离子,避免后续化学沉镍、化学金沉积时,出现“跳镀”造成短路的质量问题,尤其是35微米以下的微细线路,本发明的方法能解决此传统制程上质量不良率非常高的问题,提升产品生产的良率。6. The present invention adopts an ultrasonic cleaning step after the post-acid leaching, which can thoroughly clean the residual palladium ions between the thin lines below 50 microns, and avoid the occurrence of "jump plating" during subsequent electroless nickel deposition and electroless gold deposition, causing short circuits. For quality problems, especially for fine lines below 35 microns, the method of the present invention can solve the problem of very high quality defect rate in the traditional manufacturing process, and improve the yield rate of product production.

附图说明Description of drawings

图1A为现有化学镍金制程所采用的前处理设备的侧视图。FIG. 1A is a side view of a pretreatment equipment used in a conventional electroless nickel-gold process.

图1B为现有化学镍金制程所采用的化学沉积设备的侧视图。FIG. 1B is a side view of an electroless deposition apparatus used in a conventional electroless nickel-gold process.

图1C为现有化学镍金制程所采用的后处理设备的侧视图。FIG. 1C is a side view of the post-processing equipment used in the conventional electroless nickel-gold process.

图2为本发明可减少化学处理步骤的化学镍金制程的流程图之一。FIG. 2 is one of the flow charts of the electroless nickel-gold process which can reduce the chemical treatment steps of the present invention.

图3为本发明可减少化学处理步骤的化学镍金制程系统的侧视图之一。FIG. 3 is one of the side views of the electroless nickel-gold process system with reduced chemical processing steps of the present invention.

图4为本发明可减少化学处理步骤的化学镍金制程系统的俯视图之一。FIG. 4 is one of the top views of the electroless nickel-gold process system capable of reducing chemical processing steps according to the present invention.

图5为本发明可减少化学处理步骤的化学镍金制程的流程图之二。FIG. 5 is the second flow chart of the electroless nickel-gold process which can reduce the chemical treatment steps of the present invention.

图6为本发明可减少化学处理步骤的化学镍金制程系统的侧视图之二。FIG. 6 is a second side view of the electroless nickel-gold process system capable of reducing chemical processing steps according to the present invention.

图7为本发明可减少化学处理步骤的化学镍金制程系统的俯视图之二。FIG. 7 is the second top view of the electroless nickel-gold process system capable of reducing chemical treatment steps according to the present invention.

附图标记说明:Description of reference numbers:

101-刷磨槽;102-水洗槽;103-喷砂槽;104-水洗槽;105-超音波清洗槽;106-微蚀槽;107-水洗槽;108-酸洗槽;109-水洗槽;110-吹干槽;111-烘干槽;121-清洁槽;122-水洗槽;123-微蚀槽;124-水洗槽;125-前酸浸槽;126-水洗槽;127-预浸槽;128-活化槽;129-水洗槽;130-交换槽;131-后酸浸槽;132-水洗槽;133-化学沉积镍槽;134-水洗槽;135-化学沉积金槽;136-水洗槽;137-干燥槽;141-酸洗槽;142-水洗槽;143-超音波清洗槽;144-水洗槽;145-吹干槽;146-烘干槽;200-吊篮;201-第一移行吊车;202-第二移行吊车;301-喷砂;302-水洗;303-超音波清洗;304-水洗;305-酸性清洁;306-水洗;307-多段式微蚀;308-水洗;309-预浸;310-活化;311-水洗;312-后酸浸;313-超音波清洗;314-水洗;315-化学沉积镍;316-水洗;317-化学沉积金;318-回收水洗;319-水洗;320-吹干;321-烘干;322-前酸浸;323-水洗;401-喷砂槽;402-第一水洗槽;403-超音波清洗槽;404-第二水洗槽;405-酸性清洁槽;406-第三水洗槽;407-微蚀槽;408-第四水洗槽;409-预浸槽;410-活化槽;411-第五水洗槽;412-后酸浸槽;413-超音波清洗槽;414-第六水洗槽;415-化学沉积镍槽;416-第七水洗槽;417-化学沉积金槽;418-回收水洗槽;419-第八水洗槽;420-吹干槽;421-烘干槽;422-前酸浸槽;423-前酸浸用的水洗槽。101-brushing tank; 102-washing tank; 103-sandblasting tank; 104-washing tank; 105-ultrasonic cleaning tank; 106-micro-etching tank; ; 110 - drying tank; 111 - drying tank; 121 - cleaning tank; 122 - washing tank; 123 - micro-etching tank; 124 - washing tank; tank; 128-activation tank; 129-water washing tank; 130-exchange tank; 131-post-acid leaching tank; 132-water washing tank; 133-chemical deposition nickel tank; 134-water washing tank; 135-chemical deposition gold tank; 136- Washing tank; 137-drying tank; 141-pickling tank; 142-water washing tank; 143-ultrasonic cleaning tank; 144-water washing tank; 145-drying tank; 146-drying tank; The first moving crane; 202 - the second moving crane; 301 - sandblasting; 302 - water washing; 303 - ultrasonic cleaning; 304 - water washing; 305 - acid cleaning; 306 - water washing; 309-pre-soak; 310-activation; 311-water washing; 312-post-acid leaching; 313-ultrasonic cleaning; 314-water washing; 315-chemically deposited nickel; 319-washing; 320-drying; 321-drying; 322-pre-pickling; 323-washing; 401-sandblasting tank; 402-first washing tank; 403-ultrasonic washing tank; 404-second washing tank 405-acid cleaning tank; 406-third washing tank; 407-micro-etching tank; 408-fourth washing tank; 409-presoak tank; 410-activation tank; 411-fifth washing tank; tank; 413-ultrasonic cleaning tank; 414-sixth washing tank; 415-chemical deposition nickel tank; 416-seventh washing tank; 417-chemical deposition gold tank; 418-recycling washing tank; 419-eighth washing tank; 420- drying tank; 421- drying tank; 422- pre-acid dip tank; 423- water washing tank for pre-acid dip.

具体实施方式Detailed ways

下面将结合具体实施例和附图,对本发明的技术方案进行清楚、完整地描述。本文所使用的所有技术和科学术语与属于本发明技术领域的技术人员通常理解的含义相同。本文中所使用的术语只是为了描述具体实施例的目的,不是旨在限制本发明。本文所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。The technical solutions of the present invention will be clearly and completely described below with reference to specific embodiments and accompanying drawings. All technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein is for the purpose of describing specific embodiments only and is not intended to limit the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

首先对制程中所使用的名词作一简单说明:酸性清洁是利用有机酸或无机酸稍微清洁及彻底浸润电路板的孔内。微蚀(Micor-etching):是由微蚀液去除电路板上或孔内铜面的氧化层。酸洗(Acid dip):浸泡于稀硫酸液中以去除微蚀后所产生的水解结晶物。预浸(Pre-dip):浸泡于反应液中,使铜面无氧化物存在。活化:在铜面置换一层钯,以作为化学镍反应的触媒。化学沉积镍:在铜面镀上一层含镍的合金,作为阻绝金与铜之间迁移(Migration)或扩散(Diffusion)的障蔽层。化学沉积金:于在铜面上的镍面置换沉积出金层。First of all, a brief description of the terms used in the process: acid cleaning is to use organic or inorganic acids to slightly clean and thoroughly wet the holes of the circuit board. Micro-etching: Micro-etching is used to remove the oxide layer on the copper surface on the circuit board or in the hole. Acid dip: soaking in dilute sulfuric acid to remove hydrolyzed crystals generated after micro-etching. Pre-dip: Immerse in the reaction solution so that there is no oxide on the copper surface. Activation: Substitute a layer of palladium on the copper surface to act as a catalyst for electroless nickel reaction. Electroless nickel deposition: A layer of nickel-containing alloy is plated on the copper surface as a barrier layer to prevent migration or diffusion between gold and copper. Electroless gold deposition: A gold layer is deposited by displacement on the nickel surface on the copper surface.

如图2所示,为本发明可减少化学处理步骤的化学镍金制程的流程图之一。其步骤包括将电路板依序进行喷砂301、水洗302、超音波清洗303、水洗304、酸性清洁305、水洗306、多段式微蚀307、水洗308、预浸309、活化310、水洗311、后酸浸312、超音波清洗313、水洗314、化学沉积镍315、水洗316、化学沉积金317、回收水洗318、水洗319、吹干320、烘干321等作业。其中多段微蚀307流程包括先经喷洒微蚀液、之后浸泡于喷涌的微蚀液中。As shown in FIG. 2 , it is one of the flow charts of the electroless nickel-gold process which can reduce the chemical treatment steps of the present invention. The steps include sandblasting 301 , water washing 302 , ultrasonic cleaning 303 , water washing 304 , acid cleaning 305 , water washing 306 , multi-stage micro-etching 307 , water washing 308 , pre-soaking 309 , activation 310 , water washing 311 , and after Acid leaching 312, ultrasonic cleaning 313, water washing 314, chemical deposition of nickel 315, water washing 316, chemical deposition of gold 317, recycling water washing 318, water washing 319, drying 320, drying 321 and other operations. The multi-stage micro-etching process 307 includes spraying the micro-etching liquid first, and then soaking in the gushing micro-etching liquid.

本发明的设计是经由上述流程,让最初电路板经由一系列连贯的化学镍金制程步骤,完成电路板的表面处理作业。为此,电路板须采逐片水平输送方式进行喷砂301、水洗302、超音波清洗303、水洗304、酸性清洁305、水洗306、多道微蚀307、水洗308、预浸309、活化310、水洗311、后酸浸312、超音波清洗313、水洗314等步骤。其中喷砂301,是对电路板表面初步去除氧化层或杂质。超音波清洗303,是利用超音波震荡清洗残留在线路间的残砂。The design of the present invention is to make the initial circuit board go through a series of continuous electroless nickel-gold process steps to complete the surface treatment of the circuit board through the above process. To this end, the circuit board must be sandblasted 301, washed with water 302, ultrasonically cleaned 303, washed with water 304, acid cleaned 305, washed with water 306, multi-channel micro-etching 307, washed with water 308, pre-soaked 309, activated 310 , washing 311, post-pickling 312, ultrasonic cleaning 313, washing 314 and other steps. Sandblasting 301 is to preliminarily remove the oxide layer or impurities on the surface of the circuit board. The ultrasonic cleaning 303 uses ultrasonic vibration to clean the residual sand remaining between the lines.

另外本发明所采用的多段式微蚀307是指在2/3的区段先经喷洒微蚀液,之后1/3区段再浸泡于喷涌的微蚀液中。喷洒方式是以高压方式喷洒微蚀液于电路板,以期有效去除线路间及铜表面的氧化物,此氧化物主要是因绿漆制程中最后一道烘烤处理程序,因温度达摄氏180度,烘烤时间约50分钟,会使烘烤处理完后电路板线路表面严重氧化,此喷洒微蚀液方式能有效去除严重的氧化物。之后电路板再浸泡于喷涌的微蚀液中,此方式是利用另一槽内喷出的微蚀液于槽内产生喷涌水流,水流能均匀流至电路板表面或孔内,对孔内或线路间的死角位置有效去除氧化物,整体多段式微蚀的咬蚀量约0.4至0.6微米(μm)。In addition, the multi-stage micro-etching 307 used in the present invention means that 2/3 of the section is sprayed with micro-etching liquid first, and then 1/3 of the section is immersed in the gushing micro-etching liquid. The spraying method is to spray micro-etching liquid on the circuit board in a high-pressure manner, in order to effectively remove the oxides between the lines and the copper surface. This oxide is mainly due to the last baking process in the green paint process. The baking time is about 50 minutes, which will seriously oxidize the surface of the circuit board after the baking treatment. This spraying micro-etching method can effectively remove the serious oxides. After that, the circuit board is immersed in the gushing micro-etching liquid. This method is to use the micro-etching liquid sprayed from another tank to generate a gushing water flow in the tank. The dead space between the lines can effectively remove oxides, and the overall multi-stage micro-etching has a bite-etching amount of about 0.4 to 0.6 micrometers (μm).

多段式微蚀307也是本发明针对此次制程所改良的创新设计,现有制程皆无此种方式,一般皆采用两道分开的微蚀制程,前处理有一道、化学沉积镍金有一道,每道微蚀都会将铜线路咬蚀(减薄),两道微蚀量合计达0.8至1.2微米,如此就必须在前段的“电镀铜”制程中,刻意增加电镀铜的厚度,以防微蚀之后的铜厚不足。反观本发明因采用连续式制程,仅须进行一道多段微蚀制程,咬蚀总量仅约0.4至0.6微米(μm),因此在前段的“电镀铜”制程时,可以减少电镀铜厚度,即减少铜的消耗和省电。另外仅使用一道多段式微蚀307,能省去习用化学沉积镍金的前一段微蚀制程,以及后续的酸洗及水洗步骤,又能减少化学药水、清洗水、电力、人工、化学废液及废水处理等成本。The multi-stage micro-etching 307 is also an innovative design improved by the present invention for this process. There is no such method in the existing process. Generally, two separate micro-etching processes are used, one for pretreatment and one for chemical deposition of nickel and gold. The micro-etching will bite (thin) the copper circuit, and the total amount of the two micro-etchings reaches 0.8 to 1.2 microns. Therefore, in the previous "copper electroplating" process, the thickness of the electroplated copper must be deliberately increased to prevent micro-etching. The copper thickness after that is insufficient. On the other hand, because the present invention adopts a continuous process, only one multi-stage micro-etching process needs to be performed, and the total amount of bite-etching is only about 0.4 to 0.6 micrometers (μm). Reduce copper consumption and save electricity. In addition, only one multi-stage micro-etching 307 is used, which can save the previous micro-etching process of conventional chemical deposition of nickel and gold, as well as the subsequent pickling and water washing steps, and can also reduce chemical liquid, cleaning water, electricity, labor, chemical waste liquid and Wastewater treatment costs, etc.

本发明于后酸浸312增加一道超音波清洗313步骤,此目的是在彻底洗净50微米以下细线路间残留的钯离子,避免化学镍、化学金沉积时,出现“跳镀”造成短路的质量问题,尤其是针对35微米以下的微细线路,在传统制程上的质量不良率是非常高的,本发明于后酸浸312后接着采用水平方式增加一道超音波清洗313,能有效去除残留的钯离子,进而解决传统制程细线路容易出现跳镀的质量问题。In the present invention, an ultrasonic cleaning step 313 is added to the post-acid leaching 312, and the purpose is to thoroughly clean the residual palladium ions between the thin lines below 50 microns, and avoid the occurrence of "jump plating" during the deposition of chemical nickel and chemical gold. For quality problems, especially for fine lines below 35 microns, the quality defect rate in the traditional process is very high. The present invention adds an ultrasonic cleaning 313 in a horizontal manner after the post-acid leaching 312, which can effectively remove the residual Palladium ions, and then solve the quality problem that the thin lines of the traditional process are prone to jump plating.

接着,电路板将被翻转为垂直状且采用逐片连续移动方式进行:化学沉积镍315、水洗316、化学沉积金317、回收水洗318等步骤。Next, the circuit board will be turned upside down and continuously moved one by one: chemical deposition of nickel 315 , water washing 316 , chemical deposition of gold 317 , recovery of water washing 318 and other steps.

之后再将电路板再翻转为水平状并采用水平输送方式进行:水洗319、吹干320、烘干321等步骤。Afterwards, the circuit board is turned into a horizontal state and carried out in a horizontal conveying mode: washing 319, drying 320, drying 321 and other steps.

如图3、图4所示,为本发明可减少化学处理步骤的化学镍金制程系统的侧视图及俯视图之一。该系统包括依序串联并排的喷砂槽401、第一水洗槽402、超音波清洗槽403、第二水洗槽404、酸性清洁槽405、第三水洗槽406、多段微蚀槽407、第四水洗槽408、预浸槽409、活化槽409、第五水洗槽411、后酸浸槽412、超音波清洗槽413、第六水洗槽414、化学沉积镍槽415、第七水洗槽416、化学沉积金槽417、回收水洗槽418、第八水洗槽419、吹干槽420、烘干槽421。各槽皆设有相关输送机构以将电路板呈水平或垂直状送至各槽内进行处理。另外上述所列的水洗槽并非仅限单一槽体,可视清洗需要串联1至5个,达到所需的洁净度。As shown in FIG. 3 and FIG. 4 , it is one of a side view and a top view of an electroless nickel-gold process system capable of reducing chemical treatment steps according to the present invention. The system includes a sandblasting tank 401, a first washing tank 402, an ultrasonic washing tank 403, a second washing tank 404, an acid cleaning tank 405, a third washing tank 406, a multi-stage micro-etching tank 407, a fourth Water washing tank 408, pre-soaking tank 409, activation tank 409, fifth washing tank 411, post-acid leaching tank 412, ultrasonic cleaning tank 413, sixth washing tank 414, chemical deposition nickel tank 415, seventh washing tank 416, chemical A gold deposition tank 417 , a recovery water washing tank 418 , an eighth water washing tank 419 , a drying tank 420 , and a drying tank 421 . Each slot is provided with a relevant conveying mechanism to deliver the circuit board horizontally or vertically into each slot for processing. In addition, the washing tanks listed above are not limited to a single tank body, and 1 to 5 tanks may be connected in series depending on the cleaning to achieve the required cleanliness.

再者,喷砂槽401、第一水洗槽402、超音波清洗槽403、第二水洗槽404、酸性清洁槽405、第三水洗槽406、多段微蚀槽407、第四水洗槽408、预浸槽409、活化槽410、第五水洗槽411、后酸浸槽412、超音波清洗槽413、第六水洗槽414是本身于槽内设有水平输送机构,以利电路板呈水平状依序逐片进入各槽中进行相关的清洗、活化电路板表面等程序。之后电路板由水平翻转为垂直状且采逐片移动方式于各槽至进行沉积、清洗等作业。其中化学沉积镍槽415、第七水洗槽416、化学沉积金槽417及回收水洗槽418可采用本发明人先前设计的逐片连续生产的化学沉积设备。之后再将电路板翻转成水平状,经第八水洗槽419、吹干槽420、烘干槽421内本身设置的水平输送机构,呈水平状依序进行水洗、吹干、烘干等作业。Furthermore, the sandblasting tank 401, the first washing tank 402, the ultrasonic washing tank 403, the second washing tank 404, the acid cleaning tank 405, the third washing tank 406, the multi-stage micro-etching tank 407, the fourth washing tank 408, the The immersion tank 409, the activation tank 410, the fifth washing tank 411, the post-acid soaking tank 412, the ultrasonic cleaning tank 413, and the sixth washing tank 414 are themselves provided with a horizontal conveying mechanism in the tank, so that the circuit board is horizontally aligned. Sequentially enter into each tank one by one to carry out relevant procedures such as cleaning and activating the surface of the circuit board. Afterwards, the circuit board is turned from horizontal to vertical, and is moved one by one in each slot to perform deposition, cleaning and other operations. Among them, the electroless nickel deposition tank 415 , the seventh water washing tank 416 , the electroless gold deposition tank 417 and the recovery water washing tank 418 may adopt the electroless deposition equipment previously designed by the inventors for continuous production one by one. After that, the circuit board is turned into a horizontal shape, and the horizontal conveying mechanism provided in the eighth washing tank 419, the drying tank 420, and the drying tank 421 is used for washing, drying, drying and other operations in a horizontal order.

在传统PCB业界的化学镍金沉积制程,因为设备能力及化学药水特性而导致无法整合而独立分开的三个制程,三个制程之间无法连结自动化。本发明利用连续性的加工流程,在上述每道化学处理后紧接的水洗,清洗电路板板面上的化学药水,防止其药水被带入到后面的药水槽内而污染药水,因此每当新制程节省了某一道化学处理工序时,其紧接在后的水洗也一并可以节省。为此本发明已大幅减少了化学药水、清洗水、电力、人工、化学废液及废水处理等成本,进而让生产更具市场竞争力的产品。In the traditional electroless nickel-gold deposition process in the PCB industry, due to equipment capabilities and chemical properties, three separate processes cannot be integrated and separated, and automation cannot be connected between the three processes. The present invention utilizes the continuous processing flow to clean the chemical potion on the surface of the circuit board by washing with water immediately after each chemical treatment, so as to prevent the potion from being brought into the back potion tank and contaminating the potion. Therefore, whenever When the new process saves a certain chemical treatment process, the subsequent water washing can also be saved. Therefore, the present invention has greatly reduced the costs of chemical solution, cleaning water, electricity, labor, chemical waste liquid and waste water treatment, and thus enables the production of more market-competitive products.

如图5所示,为本发明可减少化学处理步骤的化学镍金制程的流程图之二。主要步骤仍与上述制程相同,例如其步骤包括将电路板依序进行喷砂301、水洗302、超音波清洗303、水洗304、酸性清洁305、水洗306、多段式微蚀307、水洗308、预浸309、活化310、水洗311、后酸浸312、超音波清洗313、水洗314、化学沉积镍315、水洗316、化学沉积金317、回收水洗318、水洗319、吹干320、烘干321等作业。但在本实施例中,可于多段微蚀307、水洗308步骤之后,再增加一组前酸浸322、水洗323步骤。配合之后的预浸309、活化310、水洗311、后酸浸312、超音波清洗313、水洗314,更有效去除微蚀后经过浸泡水洗时,于孔壁或线路间死角位置产生微蚀的化学药水的水解结晶物。As shown in FIG. 5 , it is the second flow chart of the electroless nickel-gold process in which the chemical treatment steps can be reduced according to the present invention. The main steps are still the same as the above process, for example, the steps include sandblasting 301, water washing 302, ultrasonic cleaning 303, water washing 304, acid cleaning 305, water washing 306, multi-stage micro-etching 307, water washing 308, pre-soaking 309, activation 310, water washing 311, post-pickling 312, ultrasonic cleaning 313, water washing 314, chemical deposition of nickel 315, water washing 316, chemical deposition of gold 317, recycling water washing 318, water washing 319, drying 320, drying 321 and other operations . However, in this embodiment, after the multi-stage micro-etching 307 and water washing 308 steps, a set of pre-acid leaching 322 and water washing 323 steps may be added. Combined with pre-dip 309, activation 310, water washing 311, post-acid leaching 312, ultrasonic cleaning 313, and water washing 314, it is more effective to remove the chemical micro-etching on the hole wall or dead angle between lines when soaking and washing after micro-etching. The hydrolyzed crystals of the medicine.

如图6、图7所示,为本发明可减少化学处理步骤的化学镍金制程系统的侧视图及俯视图之二。该系统包括依序串联并排的喷砂槽401、第一水洗槽402、超音波清洗槽403、第二水洗槽404、酸性清洁槽405、第三水洗槽406、多段微蚀槽407、第四水洗槽408、预浸槽409、活化槽409、第五水洗槽411、后酸浸槽412、超音波清洗槽413、第六水洗槽414、化学沉积镍槽415、第七水洗槽416、化学沉积金槽417、回收水洗槽418、第八水洗槽419、吹干槽420、烘干槽421。各槽皆设有相关输送机构以将电路板呈水平或垂直状送至各槽内进行处理。在本实施例中,是于多段微蚀407、第三水洗槽408之后,再增加一组前酸浸槽422、前酸浸用的水洗槽423。As shown in FIG. 6 and FIG. 7 , it is the second side view and the top view of the electroless nickel-gold process system which can reduce the chemical treatment steps of the present invention. The system includes a sandblasting tank 401, a first washing tank 402, an ultrasonic washing tank 403, a second washing tank 404, an acid cleaning tank 405, a third washing tank 406, a multi-stage micro-etching tank 407, a fourth Water washing tank 408, pre-soaking tank 409, activation tank 409, fifth washing tank 411, post-acid leaching tank 412, ultrasonic cleaning tank 413, sixth washing tank 414, chemical deposition nickel tank 415, seventh washing tank 416, chemical A gold deposition tank 417 , a recovery water washing tank 418 , an eighth water washing tank 419 , a drying tank 420 , and a drying tank 421 . Each slot is provided with a relevant conveying mechanism to deliver the circuit board horizontally or vertically into each slot for processing. In this embodiment, after the multi-stage micro-etching 407 and the third water washing tank 408, a group of pre-acid leaching tanks 422 and a water washing tank 423 for pre-acid leaching are added.

由上述的说明可知,使用本发明化学镍金制程,并不需分拆几道不同的工序且于不同的设备中进行。单一电路板送入本发明的系统,依照本发明的制程步骤,即可利用化学镍金制程完成电路板的表面处理,与现有技术相较,大幅减少多道流程及设备,如现有前处理中的刷磨、水洗、微蚀、水洗、酸洗、水洗、吹干、烘干,现有后处理中的酸洗、超音波清洗等,大量减少化学药水及清洗水的使用量,让厂商降低生产的成本,该成本包括化学药水、清洗水、电力、人工、化学废液及废水处理等成本,进而让生产更具市场竞争力的产品,而且本发明仅采用一道多段式蚀刻,就能节省酸洗、水洗的成本,又能减少前段镀铜制程的厚度,减少铜的消耗和省电。It can be seen from the above description that using the chemical nickel-gold process of the present invention does not need to separate several different processes and perform them in different equipment. A single circuit board is fed into the system of the present invention. According to the process steps of the present invention, the surface treatment of the circuit board can be completed by the electroless nickel-gold process. Compared with the prior art, multiple processes and equipment are greatly reduced. Brush grinding, water washing, micro-etching, water washing, pickling, water washing, drying, drying in the treatment, pickling, ultrasonic cleaning in the existing post-treatment, etc. Manufacturers reduce the cost of production, which includes the cost of chemical solution, cleaning water, electricity, labor, chemical waste liquid and waste water treatment, so as to produce more market-competitive products. It can save the cost of pickling and water washing, and can reduce the thickness of the front-end copper plating process, reduce the consumption of copper and save electricity.

以上所述的是本发明的优选实施方式,应当指出对于本技术领域的普通人员来说,在不脱离本发明所述的原理前提下还可以作出若干改进和润饰,这些改进和润饰也在本发明的保护范围内。The above are the preferred embodiments of the present invention, and it should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principles described in the present invention, and these improvements and modifications are also included in the present invention. within the scope of protection of the invention.

Claims (6)

1.一种可减少化学处理步骤的化学镍金制程方法,其特征在于,步骤包括:将电路板逐片采用水平输送方式依序进行:喷砂、水洗、超音波清洗、水洗、酸性清洁、水洗、多段式微蚀、水洗、预浸、活化、水洗、后酸浸、超音波清洗、水洗,其中多段微蚀包括先经喷洒微蚀液、之后再浸泡于喷涌的微蚀液中;之后翻转所述电路板成垂直状且采用逐片连续移动方式进行:化学沉积镍、水洗、化学沉积金、回收水洗,之后再翻转所述电路板逐片采用水平输送方式进行:水洗、吹干、烘干等作业。1. a chemical nickel-gold process method that can reduce chemical treatment steps, is characterized in that, step comprises: adopt the horizontal conveying mode to carry out one by one circuit board in sequence: sandblasting, washing, ultrasonic cleaning, washing, acid cleaning, Water washing, multi-stage micro-etching, water washing, pre-soaking, activation, water washing, post-acid leaching, ultrasonic cleaning, water washing, among which multi-stage micro-etching includes spraying micro-etching liquid first, then soaking in the gushing micro-etching liquid; then flipping The circuit board is vertical and is continuously moved piece by piece: chemical deposition of nickel, water washing, chemical deposition of gold, recycling water washing, and then flipping the circuit board piece by piece and using horizontal conveying method: washing, drying, drying Do the work. 2.根据权利要求1所述的可减少化学处理步骤的化学镍金制程方法,其特征在于,所述喷洒方式是以高压方式喷洒微蚀液于所述电路板,之后电路板再浸泡于喷涌的微蚀液中,此方式是利用另一槽内喷出的微蚀液于槽内产生喷涌水流,让水流均匀流至所述电路板表面或孔内,以进行微蚀刻。2. The chemical nickel-gold process method according to claim 1, wherein the spray method is to spray micro-etching liquid on the circuit board in a high-pressure manner, and then the circuit board is immersed in the surge In the micro-etching liquid, this method is to use the micro-etching liquid sprayed from another tank to generate a gushing water flow in the tank, so that the water flow evenly flows to the surface or the hole of the circuit board for micro-etching. 3.根据权利要求1所述的可减少化学处理步骤的化学镍金制程方法,其特征在于,于所述多段式微蚀、所述水洗步骤之后,再增加一组前酸浸、水洗步骤。3 . The electroless nickel-gold manufacturing method according to claim 1 , wherein after the multi-stage micro-etching and the water washing steps, a set of pre-acid leaching and water washing steps are added. 4 . 4.一种可减少化学处理步骤的化学镍金制程系统,其特征在于,包括:依序串联并排的喷砂槽、第一水洗槽、超音波清洗槽、第二水洗槽、酸性清洁槽、第三水洗槽、多段式微蚀槽、第四水洗槽、预浸槽、活化槽、第五水洗槽、后酸浸槽、超音波清洗槽、第六水洗槽、化学沉积镍槽、第七水洗槽、化学沉积金槽、回收水洗槽、第八水洗槽、吹干槽、烘干槽。4. An electroless nickel-gold process system capable of reducing chemical treatment steps, characterized in that it comprises: a sandblasting tank, a first washing tank, an ultrasonic cleaning tank, a second washing tank, an acid cleaning tank, The third washing tank, the multi-stage micro-etching tank, the fourth washing tank, the pre-soak tank, the activation tank, the fifth washing tank, the post-pickling tank, the ultrasonic cleaning tank, the sixth washing tank, the chemical deposition nickel tank, the seventh washing tank tank, chemical deposition gold tank, recovery washing tank, eighth washing tank, drying tank, drying tank. 5.根据权利要求4所述的可减少化学处理步骤的化学镍金制程系统,其特征在于,所述化学沉积镍槽与所述化学沉积金槽是使用一种逐片连续生产的化学沉积设备。5 . The electroless nickel-gold process system according to claim 4 , wherein the electroless nickel-gold deposition tank and the electroless-gold deposition tank are made of a continuous production of chemical deposition equipment one by one. 6 . . 6.根据权利要求4所述的可减少化学处理步骤的化学镍金制程系统,其特征在于,于所述第三水洗槽之后,再增加一组前酸浸槽、前酸浸用的水洗槽。6 . The chemical nickel-gold process system according to claim 4 , wherein after the third water washing tank, a group of pre-acid leaching tanks and pre-acid leaching water washing tanks are added. 7 . .
CN202111159767.5A 2020-12-02 2021-09-30 Electroless nickel-gold process capable of reducing chemical treatment steps and system thereof Pending CN114630496A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118280888A (en) * 2024-05-29 2024-07-02 广东芯华镁半导体技术有限公司 Semiconductor integrated manufacturing system and method for wafer-level metal deposition

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040022934A1 (en) * 2002-04-09 2004-02-05 Shipley Company, L.L.C. PWB manufacture
TW200627538A (en) * 2005-01-19 2006-08-01 Promos Technologies Inc Method for preparing structure with high aspect ratio
CN101730391A (en) * 2008-10-13 2010-06-09 欣兴电子股份有限公司 Circuit board micro-etching method for avoiding galvanic corrosion effect
CN203446110U (en) * 2013-08-14 2014-02-19 深圳市化讯应用材料有限公司 Printed circuit board surface treatment apparatus
CN106835088A (en) * 2017-03-13 2017-06-13 深圳市化讯应用材料有限公司 A kind of chemical nickel and gold production line and production technology
CN107231753A (en) * 2017-06-23 2017-10-03 深圳崇达多层线路板有限公司 A kind of golden method of the heavy nickel for improving plating leakage
CN109930141A (en) * 2019-04-10 2019-06-25 昆山东威电镀设备技术有限公司 A kind ofization nickel gold thread
CN110267455A (en) * 2019-06-26 2019-09-20 深圳市新宇腾跃电子有限公司 A kind of PCB surface treatment process
CN110318042A (en) * 2019-06-18 2019-10-11 深圳市松柏实业发展有限公司 Complanation nickel gold assembly line and change nickel gold method
CN110808251A (en) * 2019-11-12 2020-02-18 中国科学院微电子研究所 A kind of channel preparation method of three-dimensional memory
CN210736883U (en) * 2019-04-10 2020-06-12 昆山东威科技股份有限公司 Nickel-plated gold wire
CN211743188U (en) * 2020-04-02 2020-10-23 珠海市一芯半导体科技有限公司 Automatic production line for chemical nickel and gold of flip LED wafer

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040022934A1 (en) * 2002-04-09 2004-02-05 Shipley Company, L.L.C. PWB manufacture
TW200627538A (en) * 2005-01-19 2006-08-01 Promos Technologies Inc Method for preparing structure with high aspect ratio
CN101730391A (en) * 2008-10-13 2010-06-09 欣兴电子股份有限公司 Circuit board micro-etching method for avoiding galvanic corrosion effect
CN203446110U (en) * 2013-08-14 2014-02-19 深圳市化讯应用材料有限公司 Printed circuit board surface treatment apparatus
CN106835088A (en) * 2017-03-13 2017-06-13 深圳市化讯应用材料有限公司 A kind of chemical nickel and gold production line and production technology
CN107231753A (en) * 2017-06-23 2017-10-03 深圳崇达多层线路板有限公司 A kind of golden method of the heavy nickel for improving plating leakage
CN109930141A (en) * 2019-04-10 2019-06-25 昆山东威电镀设备技术有限公司 A kind ofization nickel gold thread
CN210736883U (en) * 2019-04-10 2020-06-12 昆山东威科技股份有限公司 Nickel-plated gold wire
CN110318042A (en) * 2019-06-18 2019-10-11 深圳市松柏实业发展有限公司 Complanation nickel gold assembly line and change nickel gold method
CN110267455A (en) * 2019-06-26 2019-09-20 深圳市新宇腾跃电子有限公司 A kind of PCB surface treatment process
CN110808251A (en) * 2019-11-12 2020-02-18 中国科学院微电子研究所 A kind of channel preparation method of three-dimensional memory
CN211743188U (en) * 2020-04-02 2020-10-23 珠海市一芯半导体科技有限公司 Automatic production line for chemical nickel and gold of flip LED wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118280888A (en) * 2024-05-29 2024-07-02 广东芯华镁半导体技术有限公司 Semiconductor integrated manufacturing system and method for wafer-level metal deposition

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