CN114623858B

CN114623858B - Detection system, detection method and detection equipment

Info

Publication number: CN114623858B
Application number: CN202011463593.7A
Authority: CN
Inventors: 陈鲁; 方一; 黄有为; 魏林鹏; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2020-12-11
Filing date: 2020-12-11
Publication date: 2025-03-11
Anticipated expiration: 2040-12-11
Also published as: CN114623858A

Abstract

The application discloses a detection system, a detection method and detection equipment, wherein the detection system comprises a detection element and a processing element, wherein the detection element is used for acquiring a performance value of an optical signal which is arranged in an optical path of the detection equipment and is used for processing and outputting light rays in the optical path, the processing element is in communication connection with the detection element and is configured to generate a corresponding processing instruction based on the performance value of the optical element which is acquired by the detection element and is used for processing the light rays and outputting the light signals, so that the use ratio of the optical element is improved on the premise of ensuring the detection precision of the detection equipment, and the service life of the optical element is further prolonged.

Description

Detection system, detection method and detection equipment

Technical Field

The present application relates to the field of semiconductor technologies, and in particular, to a detection system, a detection method, and a detection apparatus.

Background

Along with the progress of society, the communication technology is receiving more and more attention, and in order to be convenient for daily life, people require that semiconductor communication products become smaller and lighter, and simultaneously have more and more powerful functions, and the semiconductor chip is required to have a small body and a large function, which is required to have higher detection precision in the semiconductor industry, in particular in the semiconductor detection industry.

However, during the use of the semiconductor inspection apparatus, the optical element is inevitably damaged by the illumination of high power for a long time, thereby affecting the inspection accuracy of the semiconductor inspection apparatus. The key point is that the cost of the optical element in the semiconductor industry is generally higher, and the replacement is difficult, and sometimes, special technicians are required to spend a great deal of time and effort to repeatedly debug, so that how to improve the utilization rate of the optical element and further improve the service life of the optical element under the condition of ensuring the detection precision of the detection equipment becomes a technical problem to be solved urgently in the industry.

Content of the application

In order to solve the technical problems, the application provides a detection system, a detection method and detection equipment, so that the use ratio of an optical element in the detection equipment is improved under the condition that the detection precision of the detection equipment is ensured, and the service life of the optical element is further prolonged.

In order to achieve the above purpose, the technical scheme provided by the application is as follows:

a detection system, comprising:

a detection element for acquiring a performance value of an optical signal, which is outputted by an optical element disposed in an optical path of a detection device for processing light in the optical path, and

And a processing element communicatively coupled to the detection element and configured to generate corresponding processing instructions based on the performance value of the optical element acquired by the detection element to process the optical signal output by the light ray.

Optionally, the process of generating, by the processing element, a corresponding processing instruction based on the performance value of the optical element for processing the optical signal output by the light acquired by the detecting element includes:

forming corresponding preset conditions based on the optical parameters of the optical element;

Comparing the preset condition with a performance value of the optical element in the detection device for processing the light output by the light ray, and generating feedback information;

and generating corresponding processing instructions based on the feedback information.

Optionally, the performance value of the optical element in the detection device obtained by the detection element for processing the optical signal output by the light ray is the spot size of the optical element for processing the optical signal output by the light ray.

Optionally, the preset condition includes that the length of a target area in a light spot of the optical signal output by the optical element processing the light is not smaller than a first preset value,

The target area is an area where the optical element processes light spots of the optical signals output by the light rays and the preset uniformity is met.

Optionally, the preset condition further includes that the width of the light spot area of the optical element for processing the light signal output by the light is not greater than a second preset value.

Optionally, the detection element includes an image acquisition element, and the image acquisition element is used for acquiring a light spot image of the optical signal output by the optical element in processing the light.

Optionally, the detection system further includes:

and an adjustment element, the processing element being further communicatively coupled to the adjustment element and configured to generate adjustment instructions based on the processing instructions, the adjustment instructions controlling the adjustment element to adjust a position of the optical element illuminated by the light in the optical path.

Optionally, the adjusting element is a two-dimensional adjusting element, and the adjusting element controls the optical element to move in a two-dimensional plane according to the adjusting instruction.

Optionally, the adjusting element drives the optical element to move in a first direction and/or a second direction in a preset plane under the control of the processing element,

The preset plane is parallel to the incident surface of the optical element, and the first direction and the second direction are perpendicular.

Optionally, the adjusting element is a rotation adjusting element, and the optical element is driven to rotate under the control of the processing element.

Optionally, the optical element is a beam splitter, a mirror, a polarizer lens, a prism, a reticle, or a filter.

The application also provides a detection method, which is applied to a detection system and comprises the following steps:

acquiring a performance value of an optical signal output by an optical element in detection equipment through a detection element in the detection system, wherein the optical signal output by the optical element is an optical signal formed by processing light rays in an optical path of the detection equipment by the optical element;

And generating corresponding processing instructions based on the performance values of the optical elements for processing the optical signals output by the light rays, wherein the performance values are acquired by the detection elements.

Optionally, acquiring, by a detection element in the detection system, a performance value of the optical element in the detection device to process the optical signal output by the light ray includes:

acquiring a facula image of the optical element for processing the optical signal output by the light through the detection element;

Acquiring the optical signal intensity of the light spot at each position in the third direction based on the light spot image;

Determining a region meeting preset uniformity in the light spot as a target region based on the light signal intensity of the light spot at each position in a third direction;

Determining a size of the target area based on the target area;

The third direction is the long side direction of the light spot.

Optionally, based on the light spot image, acquiring the optical signal intensity of the light spot at each position in the third direction includes:

acquiring a light spot cross-section diagram of the light spot at each position in a third direction based on the light spot image;

acquiring the optical signal intensity of the light spot at each position in the fourth direction on the basis of the light spot cross-sectional view of the light spot at each position in the third direction;

obtaining the optical signal intensity of the light spot at each position in the third direction based on the optical signal intensity of the light spot at each position in the fourth direction at each position in the third direction;

Wherein the fourth direction is the short side direction of the light spot.

Optionally, based on the optical signal intensity of the light spot at each position in the third direction, determining, as the target area, an area in the light spot that meets the preset uniformity includes:

Obtaining the maximum optical signal intensity of the light spot based on the optical signal intensity of the light spot at each position in the third direction;

Based on the maximum optical signal intensity of the light spot and preset uniformity, obtaining the minimum optical signal intensity meeting the preset uniformity in the light spot;

and determining the target area based on the minimum optical signal intensity meeting the preset uniformity in the light spot.

Optionally, generating the corresponding processing instruction based on the performance value of the optical element acquired by the detection element to process the optical signal output by the light ray includes:

Optionally, the detection method further includes:

based on the processing instruction, a control adjusting element is controlled to adjust the position of the optical element irradiated by the light in the light path.

A detection apparatus comprising a light source and an optical element, and further comprising a detection system as claimed in any preceding claim, the optical element being disposed in the light path of the light source.

A detection apparatus comprising a light source, an optical element and a detection system employing the detection method of any one of the above, the optical element being disposed in the light path of the light source.

Compared with the prior art, the technical scheme has the following advantages:

The detection system comprises a detection element and a processing element, wherein the detection element is used for acquiring a performance value of an optical signal which is processed and output by an optical element arranged in an optical path of detection equipment for light in the optical path, the processing element is in communication connection with the detection element and is configured to generate a corresponding processing instruction based on the performance value of the optical element which is acquired by the detection element and is used for processing the light signal which is output by the light, so that the use rate of the optical element is improved on the premise of ensuring the detection precision of the detection equipment, and the service life of the optical element is further prolonged.

Drawings

In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a detection system according to an embodiment of the present application;

FIG. 2 is a schematic diagram of a spot image obtained by a detecting element in a detecting system according to another embodiment of the present application;

FIG. 3 is a schematic diagram showing a structure of an image capturing element for capturing a light spot of an optical signal output by a reflective optical element in a detection system according to another embodiment of the present application;

FIG. 4 is a schematic diagram of a structure of an image capturing element for capturing light spots of an optical signal output by a transmission optical element in a detection system according to still another embodiment of the present application;

FIG. 5 is a schematic diagram of a detection system according to another embodiment of the present application;

FIG. 6 is a schematic diagram showing a two-dimensional adjusting element adjusting a position of an optical element irradiated by light in a detection system according to still another embodiment of the present application;

FIG. 7 is a schematic diagram showing a rotation adjusting element adjusting a position of an optical element irradiated by light in a detection system according to another embodiment of the present application;

FIG. 8 is a flowchart of a detection method according to an embodiment of the present application;

FIG. 9 is a flowchart of a detection method according to another embodiment of the present application;

FIG. 10 is a light spot diagram of an optical signal output by an optical element processing light acquired by a detection element in a detection method according to an embodiment of the present application;

FIG. 11 is an enlarged view of a portion of the spot of FIG. 10;

Fig. 12 is a graph showing the intensity distribution of the optical signal of the spot shown in fig. 10 along the fourth direction at the position x=a in the third direction;

FIG. 13 is a graph showing the intensity distribution of the optical signal of the light spot shown in FIG. 10 along a third direction;

Fig. 14 is a flowchart of step S2 in the detection method according to another embodiment of the present application.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, but the present application may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present application is not limited to the specific embodiments disclosed below.

In the following detailed description of the embodiments of the present application, reference is made to the accompanying drawings, which form a part hereof, and in which are shown by way of illustration only, and in which is shown by way of illustration only, and in which the scope of the application is not limited for ease of illustration. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.

As described in the background art, how to improve the utilization rate of the optical element and further improve the service life of the optical element under the condition of ensuring the detection accuracy of the detection device is a technical problem to be solved in the industry

The present inventors have studied and found that, in the existing optical inspection apparatus, although it is possible to inspect whether or not an optical element is damaged by a manual inspection method and to perform manual maintenance when the damage occurs, since in the existing optical inspection apparatus, an optical system portion including the optical element is covered by both inner and outer metal plates, and in particular applications, when the optical inspection apparatus is problematic at a customer site, a maintenance time required by the customer is generally 1 to 2 hours, and in such a short time, it is impossible to disassemble the entire optical inspection apparatus and perform manual inspection and maintenance of the optical element inside thereof, resulting in inconvenient maintenance of the optical inspection apparatus and time consuming.

In view of the above, an embodiment of the present application provides a detection system, as shown in fig. 1, fig. 1 is a schematic structural diagram of the detection system provided in the embodiment of the present application, where the detection system includes:

a detection element 10 for acquiring a performance value of an optical signal outputted from an optical element disposed in an optical path of a detection device for processing light in the optical path, and

A processing element 11 communicatively coupled to the detection element and configured to generate corresponding processing instructions based on the performance value of the optical element acquired by the detection element to process the optical signal output by the light ray.

The optical element is arranged in a light path of the detection device and is used for processing light rays in the light path and outputting optical signals, the detection element is in communication connection with the processing element, the detection element acquires performance values of the optical element in the detection device for processing the optical signals output by the light rays and then transmits the performance values to the processing element, and the processing element generates corresponding processing instructions based on the received performance values of the optical element in the detection device for processing the optical signals output by the light rays, so that the use rate of the optical element is improved on the premise of ensuring the detection precision of the detection device, and the service life of the optical element is further prolonged.

Alternatively, in one embodiment of the present application, the optical element may include a beam splitter, a mirror, a polarizer lens, a prism, a reticle, or a filter, which is not limited in this regard, as the case may be.

The optical parameters of the optical element are different, and the conditions for determining whether the optical element is damaged are also different. Thus, on the basis of the above embodiments, in one embodiment of the present application, the process of generating, by the processing element, a corresponding processing instruction based on the performance value of the optical element for processing the optical signal output by the light ray acquired by the detecting element includes:

In the embodiment of the application, the processing element generates feedback information by comparing the preset condition with the performance value of the optical element in the detection device, obtained by the detection element, for processing the optical signal output by the light, wherein the feedback information is used for prompting the use state of the optical element. Specifically, in one embodiment of the present application, when the performance value of the optical element for processing the optical signal output by the light ray does not meet the preset condition, that is, the performance value of the optical element for processing the optical signal output by the light ray cannot ensure that the detection device meets the detection precision requirement, the processing element generates feedback information, where the feedback information is used to prompt the optical element to have optical damage. Further, the processing element generates a corresponding processing instruction based on the feedback information, so that the use ratio of the optical element is improved on the premise of ensuring the detection precision of the detection equipment, and the service life of the optical element is further prolonged.

On the basis of the above embodiments, in one embodiment of the present application, the performance value of the optical element in the detection device obtained by the detection element to process the optical signal output by the light is the spot size of the optical element to process the optical signal output by the light.

In the embodiment of the present application, the detection element acquires a light spot image of the optical signal output by the optical element for processing the light, and determines the size of the light spot based on the light spot image. The light spot image obtained by the detection element is formed by the optical element processing the light signal output by the light ray and irradiating the light spot image on the target object. Specifically, in one embodiment of the present application, the detection element acquires a flare image formed on the target object by the optical signal output by the optical element based on a scattered signal formed by the optical signal output by the optical element being irradiated onto the target object. Optionally, in an embodiment of the present application, the target object is a wafer, and the light spot is a light spot formed on the wafer when the optical element processes the optical signal output by the light ray to irradiate the wafer.

In practical detection applications, in order to ensure the detection precision of the detection device, the optical element needs to process the light spot of the optical signal output by the light ray, wherein the area of the light spot needs to have enough area to meet the preset uniformity, and the area meeting the preset uniformity in the light spot is set as a target area, so that the size of the light spot comprises the size of the target area, and the preset condition comprises that the size of the target area meets the preset size, wherein the preset uniformity and the preset size can be set according to the specific detection precision of the detection device.

Optionally, in one embodiment of the present application, the preset condition includes that a length of a target area in a light spot of the optical element processing the optical signal output by the light is not less than a first preset value, where the target area is an area meeting preset uniformity in the light spot of the optical element processing the optical signal output by the light, so that a length of an area greater than preset uniformity in the light spot of the optical element processing the optical signal output by the light is greater than the first preset value, and thus, in a long-side direction of the light spot, a light spot area of a larger area in the light spot of the optical element processing the optical signal output by the light can ensure that the detection device meets a detection precision requirement.

In practical detection applications, the detection device may have a requirement for the length of the preset uniformity region in the light spot of the optical element for processing the optical signal output by the light, and a requirement for the width of the light spot region of the optical element for processing the optical signal output by the light. Therefore, on the basis of the embodiment, in one embodiment of the application, the preset condition further comprises that the width of a light spot area of the optical element for processing the light signal output by the light is not larger than a second preset value, so that the length of a light spot larger than a preset uniformity area in the light spot of the optical element for processing the light signal output by the light is larger than a first preset value, and the width of the light spot area is smaller than a second preset value, thereby enabling the light spot area of the light spot of the optical element for processing the light signal output by the light to have a larger area in the long side direction of the light spot, and the light spot area of a comparison gathering area in the short side direction of the light spot can ensure the detection precision of the detection device. However, the present application is not limited thereto, and in other embodiments of the present application, the preset condition may include only that the width of the spot area is not greater than the second preset value, and not that the length of the target area is not less than the first preset value, which is not limited thereto, and the present application is specific to the situation.

When the width of the light spot area of the optical element for processing the light signal output by the light ray is different at different positions in the long side direction of the light spot, the width of the light spot area of the optical element for processing the light signal output by the light ray is not larger than a second preset value, wherein the width of the light spot area of the optical element for processing the light signal output by the light ray is not larger than the second preset value, and at least the light spot width of the area where the target area is located.

It should be further noted that, the specific numerical values of the first preset value and the second preset value are not limited, and are specifically determined according to the detection precision of the detection device.

The preset conditions are described below with reference to specific embodiments, taking an example that the preset conditions include that the target area length is not less than a first preset value and the spot area width is not greater than a second preset value.

As shown in fig. 2, fig. 2 shows a schematic view of a light spot acquired by the detection element in the detection system provided by the embodiment of the present application, where a light spot area included in a dashed box area 20 is a target area, that is, an area meeting a preset uniformity requirement in light spots acquired by the detection element, where a length L of the target area is not less than the first preset value, and a width W of a light spot area corresponding to the target area is not greater than the second preset value.

Specifically, in one embodiment of the present application, the preset uniformity is 80%, the first preset value is 10mm, and the second preset value is 60 μm, that is, the preset condition includes that a length of a region satisfying uniformity greater than 80% in a light spot of the optical signal output by the optical element processing the light ray is not less than 10mm, and a width of a light spot region where the target region is located is not greater than 60 μm, which is not limited by the present application, and is specific according to circumstances.

On the basis of any one of the above embodiments, in one embodiment of the present application, the detecting element 10 includes an image capturing element to obtain, by the image capturing element, a flare image of the optical signal of the optical element processing the light output. Specifically, in one embodiment of the application, the image acquisition element comprises a photosensitive element and an imaging element, wherein the photosensitive element is used for acquiring a scattered signal formed by the optical element for processing the light signal output by the light ray and irradiating the light signal onto a target object and converting the scattered signal into an electric signal, and the imaging element is used for forming an image with a light spot formed by the optical element for processing the light signal output by the light ray and irradiating the light signal onto the target object based on the electric signal. Optionally, in an embodiment of the present application, the photosensitive element is a Charge-coupled Device (CCD), but the present application is not limited thereto, and the specific situation is defined.

Alternatively, in one embodiment of the application, the optical element is a reflective optical element, such as a planar mirror. As shown in fig. 3, fig. 3 is a schematic structural diagram of an image capturing element according to an embodiment of the present application to obtain a light spot of an optical signal output by a reflective optical element to process the light. Specifically, the laser 30 emits a laser light signal to the reflective optical element 31, and the reflective optical element 31 forms a reflected light signal under irradiation of the laser light emitted from the laser 30, and the reflected light signal is transmitted to the target object 32, such as a wafer, located on the transmission optical path thereof, forms a spot on the target object 32, and is scattered by the target object 32. The image acquisition element 33 acquires a scattering signal formed by the target object under the irradiation of the reflected light signal, and acquires a light spot image on the target object based on the scattering signal, so that a subsequent processing element generates feedback information based on the comparison of the light spot size and a preset condition, and further generates a processing instruction.

In another embodiment of the application, the optical element is a transmissive optical element, such as a transmissive mirror. As shown in fig. 4, fig. 4 is a schematic structural diagram of an image capturing element according to an embodiment of the present application to obtain a light spot of an optical signal output by a transmissive optical element to process the light. Specifically, the laser 30 emits a laser light signal to the transmissive optical element 41, and the transmissive optical element 41 forms a transmitted light signal under irradiation of the laser light emitted from the laser 30, and the transmitted light signal is transmitted to the target object 32, such as a wafer, located on the transmission optical path thereof, forms a spot on the target object 32, and is scattered by the target object 32. The image acquisition element 33 acquires a scattering signal formed by the target object under the irradiation of the transmitted light signal, and acquires a light spot on the target object based on the scattering signal, so that a subsequent processing element generates feedback information based on the comparison of the light spot size and a preset condition, and further generates a processing instruction.

From the foregoing, it can be seen that, when the light spot size of the optical element for processing the light signal output by the light ray does not meet the preset condition, that is, the light spot of the optical element for processing the light signal output by the light ray cannot ensure that the detection device meets the detection precision requirement, the processing element generates feedback information for prompting the optical element to generate optical damage. However, the semiconductor industry optical components are generally costly and difficult to replace, sometimes requiring specialized technicians to spend a great deal of time and effort on repeated debugging.

Therefore, on the basis of any of the foregoing embodiments, in one embodiment of the present application, the detection system provided by the embodiment of the present application further includes an adjusting element, as shown in fig. 5, where the processing element is further communicatively connected to the adjusting element, and is configured to generate an adjusting instruction based on the processing instruction, where the adjusting instruction controls the adjusting element to adjust a position of the optical element that is irradiated by the light in the optical path, so as to find an irradiation point in the optical element that causes a light spot size of an optical signal that is processed by the light output to satisfy a preset condition through an automatic point changing operation. Therefore, in the detection system provided by the embodiment of the application, after the optical damage of the current position of the optical element irradiated by the light is detected, the position of the optical element irradiated by the light can be regulated by the regulating element, so that the optical element can process the light spot size of the light signal output by the light under the new irradiation position to continuously meet the preset condition, thereby improving the utilization rate of the optical element and further prolonging the service life of the optical element on the premise of ensuring the detection precision of the detection equipment.

Specifically, in one embodiment of the present application, the processing element controls the adjusting element to adjust the position of the optical element irradiated by the light from the original irradiation point to a new irradiation point, and then sends a detection instruction to the detecting element, where the detection instruction is used to control the detecting element to detect a light spot of the optical signal output by the new irradiation point of the optical element based on the light, if the light spot size of the optical signal output by the new irradiation point of the optical element based on the light meets a preset condition, the adjusting is stopped, and if the light spot size of the optical signal output by the new irradiation point of the optical element based on the light still does not meet the preset condition, the adjusting is continued until the light spot size of the optical signal output by the optical element for processing the light meets the preset condition.

It should be noted that, in the above embodiment, in one embodiment of the present application, when the adjusting element searches each irradiation point in the optical element by adjusting the optical element, the processing element may further send a prompt message prompting to replace the optical element when the spot size of the optical element processing the optical signal output by the light ray cannot meet a preset condition.

In other embodiments of the present application, the adjusting element adjusts the position of the optical element irradiated by the light in the optical path under the control of an operator, and the present application is not limited thereto, and the present application is specifically limited as the case may be. It should be noted that, in the embodiment of the present application, the adjusting element may improve the degree of automation of the detection system when the adjusting element adjusts the position of the optical element irradiated by the light in the optical path under the control of the processing element.

On the basis of any one of the above embodiments, in one embodiment of the present application, the adjusting element is a two-dimensional adjusting element, and the adjusting element controls the optical element to move in a two-dimensional plane according to the adjusting instruction.

Optionally, on the basis of the foregoing embodiment, in one embodiment of the present application, the adjusting element drives the optical element to move in a first direction and/or a second direction in a preset plane under the control of the processing element, where the preset plane is parallel to an incident surface of the optical element, and the first direction and the second direction are perpendicular.

Specifically, in one embodiment of the present application, as shown in fig. 6, fig. 6 shows a schematic diagram of adjusting a position of the optical element irradiated by the light by using the two-dimensional adjusting element according to the embodiment of the present application. In the preset plane, the first direction is set as the A direction, the second direction is set as the K direction, and the first direction A and the second direction K are mutually perpendicular. At this time, the optical element may be divided into different numbers of illuminable points along the first direction a and the second direction K, and the coordinates of the different illuminable points are different, for example, as shown in fig. 6, the optical element is divided into 1-9 illuminable points, which is not limited in the present application, and the present application is specifically defined as the case may be. When the current irradiation point of the optical element irradiated by the light is damaged, the two-dimensional adjusting element drives the optical element to move along the first direction A and/or the second direction K in a preset plane under the control of the processing element so as to find a new irradiation point, so that the optical element processes the light spot size of the light signal output by the light under the new irradiation point to meet the preset condition, and the point changing operation is completed.

Optionally, in one embodiment of the present application, the two-dimensional adjusting element drives the optical element to translate upwards along the first direction a to complete the point changing operation, for example, as shown in fig. 6, when the current irradiation point 1 in the optical element is damaged, the two-dimensional adjusting element drives the optical element to translate upwards along the first direction a in a preset plane under the control of the processing element, at this time, the position irradiated by the light in the optical element is moved from the point 1 to the point 4, whether the light spot size of the optical element for processing the light signal output by the light under the new irradiation point 4 meets the preset condition is detected, if the light spot size of the optical element for processing the light signal output by the light under the new irradiation point 4 meets the preset condition, the adjustment is completed, otherwise, the optical element is continuously moved, and the position irradiated by the light in the optical element is changed until the light spot size of the optical element for processing the light signal output by the light under the new irradiation point meets the preset condition or all irradiation points in the optical element are searched.

Optionally, in another embodiment of the present application, the two-dimensional adjusting element drives the optical element to translate leftwards along the second direction K, so as to complete the point changing operation. However, the present application is not limited thereto, and in other embodiments of the present application, the two-dimensional adjusting element may further drive the optical element to translate downwards along the first direction a, translate rightwards along the second direction K, or translate along both the first direction a and the second direction K to complete the point changing operation, which is not limited thereto, and the present application is specifically defined as the case may be.

On the basis of any one of the above embodiments, in one embodiment of the present application, the adjusting element is a rotation adjusting element, and the optical element is driven to rotate under the control of the processing element.

Specifically, in one embodiment of the present application, as shown in fig. 7, fig. 7 shows a schematic diagram of adjusting a position of the optical element irradiated by the light by using the rotation adjusting element according to the embodiment of the present application. At this time, the optical element may be divided into different numbers of illuminable points according to the angle of the rotation direction (R direction), for example, as shown in fig. 7, the optical element is divided into 1-8 illuminable points, which is not limited in the present application, as the case may be. When the current irradiation point of the optical element irradiated by the light is damaged, the rotation adjusting element drives the optical element to rotate along the rotation direction R under the control of the processing element so as to find a new irradiation point, so that the optical element processes the light spot size of the light signal output by the light under the new irradiation point to meet the preset condition, and the point changing operation is completed.

Optionally, in an embodiment of the present application, the rotation adjusting element drives the optical element to rotate clockwise by a certain angle to complete the point changing operation. For example, as shown in fig. 7, when the current irradiation point 1 in the optical element is damaged, the rotation adjusting element drives the optical element to rotate clockwise by a certain angle, at this time, the position of the optical element irradiated by the light is moved from the point 1 to the point 8, whether the light spot size of the optical element for processing the light signal output by the light under the new irradiation point 8 meets the preset condition is detected, if the light spot size of the optical element for processing the light signal output by the light under the new irradiation point 8 meets the preset condition, the adjustment is finished, and if the light spot of the optical element for processing the light signal output by the light under the new irradiation point 8 does not meet the preset condition, the rotation adjusting element continues to drive the optical element to rotate clockwise by a certain angle until the light spot size of the optical element for processing the light signal output by the light under the new irradiation point meets the preset condition or the light spot size of the optical element is scanned all irradiation points in the optical element. Optionally, in another embodiment of the present application, the rotation adjusting element drives the optical element to rotate counterclockwise by a certain angle, so as to complete the point changing operation. The application is not limited thereto, as the case may be.

It should be noted that, in the process that the rotation adjusting element drives the optical element to rotate under the control of the processing element, the angle that the rotation adjusting element drives the optical element to rotate each time is not limited, and is specifically determined according to circumstances.

In particular, in one embodiment of the application, the adjustment element may comprise an electro-optical adjustment mechanism in which the optical element is fixed on a high precision two-dimensional translation stage or a rotational translation stage. When a certain irradiation point of an optical element in the detection equipment is damaged, the distance that the damaged optical element needs to translate or the angle that the optical element needs to rotate is preset through an electric optical adjusting mechanism, and the whole adjusting process can be completed by pressing a button. Compared with the manual detection of the change point in the prior art, the time and the cost are saved, and the accuracy of electric adjustment is far higher than that of manual knob adjustment.

In summary, in the detection system provided by the embodiment of the application, a detection element acquires a performance value of an optical signal, which is output by processing light rays in a light path of detection equipment, of an optical element arranged in the light path, a processing element generates a corresponding processing instruction based on the performance value of the optical signal, which is output by the optical element and is acquired by the detection element, of the optical element, and an adjusting element adjusts the position, which is irradiated by the light rays in the light path, in the optical element based on the processing instruction, so that the use ratio of the optical element is improved on the premise that the detection precision of the detection equipment is ensured, and the service life of the optical element is further prolonged.

The embodiment of the application further provides a detection device, as shown in fig. 3 or fig. 4, where the detection device includes a light source, an optical element, and a detection system, where the optical element is located in a light path of the light source, processes light in the light path, and outputs an optical signal, and the detection system is the detection system provided in any embodiment, and is configured to obtain a performance value of the optical element for processing the light in the light path and outputting the optical signal, and generate a corresponding processing instruction based on the performance value of the optical element obtained by the detection element for processing the optical signal output by the light, so as to improve a use rate of the optical element and further improve a service life of the optical element under the condition that detection accuracy of the detection device is ensured. Since the specific implementation process of the detection system has been described in the above embodiments, details are not repeated here. Optionally, the light source is a laser, but the present application is not limited thereto, and the present application is specifically limited thereto as the case may be.

In addition, the embodiment of the application also provides a detection method which is applied to the detection system provided by any embodiment. As shown in fig. 8, fig. 8 shows a flowchart of a detection method provided by an embodiment of the present application, and referring to fig. 8, the method includes:

And S1, acquiring a performance value of an optical signal output by an optical element in detection equipment through a detection element in the detection system, wherein the optical signal output by the optical element is an optical signal formed by processing light rays in an optical path of the detection equipment by the optical element.

Specifically, in one embodiment of the present application, as shown in fig. 9, acquiring, by a detection element in the detection system, a performance value of the optical element in the detection device to process an optical signal output by the light ray includes:

And S11, acquiring a facula image of the optical element processing the optical signal output by the light through the detection element.

Specifically, in one embodiment of the present application, as shown in fig. 10, fig. 10 shows a light spot image of the optical signal output by the light beam processed by the optical element acquired by the detecting element provided in the embodiment of the present application, where a long side direction (third direction) of the light spot is defined as an X direction, and a short side direction (fourth direction) of the light spot is defined as a Y direction.

The light spot image obtained by the detection element is a light spot image formed by the optical element processing the light signal output by the light ray and irradiating the target object. Specifically, in one embodiment of the present application, the detection element acquires a flare image formed on the target object by the optical signal output by the optical element based on a scattered signal formed by the optical signal output by the optical element being irradiated onto the target object. Optionally, in an embodiment of the present application, the target object is a wafer, and the light spot is a light spot formed on the wafer when the optical element processes the optical signal output by the light ray to irradiate the wafer.

And step S12, acquiring the optical signal intensity of each position of the light spot in the third direction based on the light spot image. The third direction is the long side direction of the light spot.

Specifically, in one embodiment of the present application, continuing to refer to fig. 9, acquiring the optical signal intensity of the spot at each position in the third direction based on the spot image includes:

step S121, acquiring a light spot cross-section diagram of the light spot at each position in a third direction based on the light spot image;

Specifically, in one embodiment of the present application, the spot is intercepted at each position in the long side direction along the short side direction of the spot, and a spot cross-sectional view of the spot at each position in the third direction is obtained. As shown in fig. 11, fig. 11 is a partially enlarged view of fig. 10, in the spot diagram shown in fig. 11, the spot cross-sectional view at the position X in the third direction is a spot cross-sectional view obtained by cutting the spot along the white line shown in fig. 11, and so on, to obtain the spot cross-sectional view at each position in the third direction in the spot of the optical signal output by the optical element processing the light in the detection device.

Step S122, obtaining the optical signal intensity of the light spot at each position in the fourth direction based on the light spot cross-section diagrams of the light spot at each position in the third direction, wherein the fourth direction is the short side direction of the light spot.

In addition, the intensities of the optical signals of the light spots at the different positions in the fourth direction are different at the positions in the third direction, so that after the cross-sectional view of the light spot at the each position in the third direction is obtained, the intensity of the optical signal of the light spot at the each position in the fourth direction needs to be obtained based on the cross-sectional view of the light spot at the each position in the third direction. As shown in fig. 12, fig. 12 shows the optical signal intensity of the spot at each position in the fourth direction Y at the position x=a in the third direction, wherein the horizontal axis is the Y direction and the vertical axis is the optical signal intensity of the spot at each position in the fourth direction Y at the position x=a in the third direction.

Step S123, based on the optical signal intensity of the light spot at each position in the fourth direction, obtaining the optical signal intensity of the light spot at each position in the third direction;

As can be seen from fig. 12, in the same spot, at the same position in the third direction X, the corresponding optical signal intensities are different at different positions in the fourth direction Y, and therefore, based on the above-described embodiment, in one embodiment of the present application, based on the optical signal intensities of the spot at the positions in the fourth direction, obtaining the optical signal intensities of the spot at the positions in the third direction includes:

Obtaining a distribution graph of the optical signal intensity of the light spot at each position in the third direction along the fourth direction thereof based on the optical signal intensity of the light spot at each position in the fourth direction, as further shown in fig. 12;

And integrating the optical signal intensity of the light spot at each position in the fourth direction at each position in the third direction based on the distribution curve graph of the optical signal intensity of the light spot along the fourth direction at each position in the third direction, and taking the integration result as the optical signal intensity of the light spot at the position in the third direction. As shown in fig. 13, fig. 13 shows the optical signal intensities of the spots at different positions in the third direction X.

In the above embodiment, the integrated result of the optical signal intensity of the light spot at each position in the fourth direction is taken as the optical signal intensity of the light spot at the position in the third direction, but the present application is not limited thereto, and in other embodiments of the present application, a weighted average of the optical signal intensity of the light spot at each position in the fourth direction may be taken as the optical signal intensity of the light spot at the position in the third direction, where appropriate.

As can be seen from fig. 13, the optical signal intensity distribution curve obtained based on the optical signal intensity of each position of the optical spot in the third direction has many burrs, so as to facilitate the subsequent obtaining of the minimum optical signal intensity satisfying the preset uniformity in the optical spot based on the optical signal intensity distribution curve.

Specifically, in one embodiment of the present application, the filtering of the optical signal intensity distribution curve may include performing a low-pass filtering of the optical signal intensity distribution curve, or may include performing a high-pass filtering of the optical signal intensity distribution curve, or may include performing a low-pass filtering and a high-pass filtering of the optical signal intensity distribution curve at the same time, which is not limited in this aspect of the present application, so long as the optical signal intensity distribution curve is smoother.

Step S13, determining an area meeting preset uniformity in the light spot as a target area based on the light signal intensity of the light spot at each position in the third direction;

specifically, in one embodiment of the present application, continuing to refer to fig. 9, determining, based on the optical signal intensities of the light spot at the positions in the third direction, an area in the light spot that satisfies the preset uniformity as the target area includes:

Step S131, obtaining the maximum optical signal intensity of the light spot based on the optical signal intensity of the light spot at each position in the third direction;

step S132, obtaining the minimum optical signal intensity meeting the preset uniformity in the light spot based on the maximum optical signal intensity and the preset uniformity of the light spot;

And step S133, determining the target area based on the minimum optical signal intensity meeting the preset uniformity in the light spot.

Specifically, in one embodiment of the present application, as further shown in fig. 13, based on the optical signal intensities of the light spots at the respective positions in the third direction X, the maximum optical signal intensity of the light spots in the third direction X may be obtained.

The formula for spot uniformity (uniformity) is defined as:

Wherein, I _max is the maximum optical signal intensity of the light spot, and I _min is the minimum optical signal intensity of the light spot.

From the formula, based on the obtained maximum optical signal intensity I _max of the light spot in the third direction X and the preset light spot uniformity, the minimum optical signal intensity I _min of the light spot meeting the preset uniformity in the third direction X can be obtained according to the light spot uniformity formula.

As can be seen from fig. 13, the minimum optical signal intensity I _min of the light spot satisfying the preset uniformity in the third direction X may correspond to two different positions, and is set to be two positions of x=x ₁ and x=x ₂, so that a light spot area between x=x ₁ and x=x ₂ in the third direction is a target area of the light spot satisfying the preset uniformity in the long side direction.

And step S14, determining the size of the target area based on the target area.

Based on the foregoing embodiments, in one embodiment of the present application, as shown in fig. 13, based on a target area in the light spot that satisfies the preset uniformity in the long-side direction, the length of the target area may be determined to be a distance between x=x ₁ and x=x ₂ in the third direction X, so that feedback information is generated by comparing the length of the target area with the preset condition, and a corresponding processing instruction is generated.

And S2, generating a corresponding processing instruction based on the performance value of the optical element acquired by the detection element for processing the optical signal output by the light ray.

The optical parameters of the optical element are different, and the conditions for determining whether the optical element is damaged are also different. Thus, in one embodiment of the present application, as shown in fig. 14, generating the corresponding processing instruction based on the performance value of the optical element acquired by the detection element to process the optical signal output by the light ray includes:

Step S21, forming corresponding preset conditions based on the optical parameters of the optical element;

In practical detection application, in order to ensure that the detection device meets the detection precision requirement, the optical element needs to process the light spot of the optical signal output by the light ray, wherein the light spot area needs to have enough light spot area to meet the preset uniformity, the area meeting the preset uniformity in the light spot is set as a target area, the size of the light spot comprises the size of the target area, the preset condition comprises the size of the target area to meet the preset size, and the preset uniformity and the preset size can be set according to the specific detection precision of the detection device.

Optionally, in one embodiment of the present application, the preset condition includes that a length of a target area in a light spot of the optical element processing the optical signal output by the light is not less than a first preset value, where the target area is an area satisfying preset uniformity in the light spot of the optical element processing the optical signal output by the light, so that a length of an area greater than preset uniformity in the light spot of the optical element processing the optical signal output by the light is greater than the first preset value, and thus, in a long-side direction of the light spot, a light spot area of a larger area in the light spot of the optical element processing the optical signal output by the light can ensure detection accuracy of a detection device.

In practical detection applications, the detection device may have a requirement for the length of the preset uniformity region in the light spot of the optical element for processing the optical signal output by the light, and a requirement for the width of the light spot region of the optical element for processing the optical signal output by the light. Therefore, on the basis of the embodiment, in one embodiment of the present application, the preset condition further includes that the width of the spot area of the optical element processing the optical signal output by the light is not greater than a second preset value, so that the length of the spot area larger than the preset uniformity area in the spot of the optical element processing the optical signal output by the light is greater than a first preset value, and the width of the spot area is smaller than a second preset value, so that the spot area of the optical element processing the spot of the optical signal output by the light has a larger area in the long side direction of the spot, and the spot area of the comparison gathering area in the short side direction of the spot, so as to ensure the detection precision of the detection device. However, the present application is not limited thereto, and in other embodiments of the present application, the preset condition may include only that the width of the spot area is not greater than the second preset value, and not that the length of the target area is not less than the first preset value, which is not limited thereto, and the present application is specific to the situation.

Step S22, comparing the preset condition with a performance value of the optical element in the detection device obtained by the detection element for processing the optical signal output by the light ray, and generating feedback information;

the preset condition includes at least one of that the length of a target area in a light spot of the optical element processing the light signal output by the light is not smaller than a first preset value and that the width of the light spot area of the optical element processing the light signal output by the light is not larger than a second preset value. The width of the light spot area is determined by the light spot size of the optical element processing the light signal output by the light ray and the bandpass when filtering the light signal intensity distribution curve obtained based on the light signal intensity of each position of the light spot in the third direction.

The following describes an example in which the preset condition includes that the length of the target area in the light spot of the optical element processing the optical signal output by the light is not less than a first preset value. As shown in fig. 13, the length of the target area of the light spot, which satisfies the preset uniformity in the long side direction thereof, is a distance between x=x ₁ and x=x ₂ in the third direction X, and based on the length of the target area (i.e., the distance between x=x ₁ and x=x ₂ in the third direction) and the first preset value, it may be determined whether the light spot size of the optical element processing the optical signal output by the light ray satisfies the preset condition.

Optionally, in an embodiment of the present application, when a length of a target area in a light spot of the optical element processing the optical signal output by the light is smaller than a first preset value, it is indicated that the light spot of the optical element processing the optical signal output by the light cannot guarantee a detection precision requirement of the detection device, and feedback information is generated at this time, where the feedback information is used to prompt the optical element to generate optical damage.

Step S23, generating a corresponding processing instruction based on the feedback information, so as to adjust the position of the optical element irradiated by the light in the optical path based on the processing instruction, thereby improving the utilization rate of the optical element and further improving the service life of the optical element on the premise of ensuring the detection precision of the detection device.

On the basis of any of the foregoing embodiments, in one embodiment of the present application, as further shown in fig. 8, the detection method may further include:

And step S3, based on the processing instruction, controlling an adjusting element to adjust the position of the optical element irradiated by the light in the light path so as to find an irradiation point of the optical element, which enables the light spot size of the optical element for processing the light signal output by the light to meet a preset condition, through automatic point changing operation.

In other embodiments of the present application, the optical element may be adjusted by an operator to control the adjusting element to adjust the position of the optical element irradiated by the light in the optical path, so that the point changing operation is performed.

It should be noted that, in the above embodiment, in one embodiment of the present application, when the adjusting element searches each irradiation point in the optical element by adjusting the optical element, the detection method may further send a prompt message for prompting to replace the optical element when the spot size of the optical element processing the optical signal output by the light ray cannot meet a preset condition.

Correspondingly, the embodiment of the application also provides a detection device, which comprises a light source, an optical element and a detection system, wherein the optical element is arranged in a light path of the light source, processes light rays in the light path and outputs light signals, and the detection system acquires performance values of the light signals output by the optical element by adopting the detection method provided by any embodiment and generates corresponding processing instructions based on the performance values of the light signals. Since the detection method has been described in detail in the above embodiments, a detailed description is not repeated here.

In summary, according to the detection method provided by the embodiment of the application, the performance value of the optical signal, which is obtained by comparing the preset condition and the detection element and is obtained by the detection element and is arranged in the optical path of the detection device, of the optical signal, wherein the optical signal is processed and output by the optical element in the optical path, feedback information is generated, a corresponding processing instruction is generated based on the feedback information, and then, based on the processing instruction, the adjusting element is controlled to adjust the position of the optical element, which is irradiated by the light in the optical path, so that the use ratio of the optical element is improved on the premise of ensuring the detection precision of the detection device, and the service life of the optical element is further prolonged.

In the description, each part is described in a parallel and progressive mode, and each part is mainly described as a difference with other parts, and all parts are identical and similar to each other.

The features described in the various embodiments of the present disclosure may be interchanged or combined with one another in the description to enable those skilled in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A detection system, comprising:

A detection element for acquiring a performance value of an optical signal output by an optical element disposed in an optical path of a detection device for processing light in the optical path, the performance value of the optical element in the detection device acquired by the detection element for processing the light output by the light being a spot size of the optical element for processing the light output by the light, and

A processing element communicatively coupled to the detection element and configured to generate corresponding processing instructions based on the performance value of the optical element acquired by the detection element to process the optical signal output by the light ray;

the process of generating the corresponding processing instruction by the processing element based on the performance value of the optical element for processing the optical signal output by the light acquired by the detection element includes:

Forming corresponding preset conditions based on optical parameters of the optical element, wherein the preset conditions comprise that the length of a target area in a light spot of an optical signal output by the optical element for processing the light is not smaller than a first preset value, and the target area is an area meeting preset uniformity in the light spot of the optical signal output by the optical element for processing the light;

2. The detection system of claim 1, wherein the predetermined condition further comprises the optical element processing the light signal output by the light ray having a spot area width not greater than a second predetermined value.

3. The detection system of claim 1, wherein the detection element comprises an image acquisition element for acquiring a speckle image of the optical element processing the light signal output by the light ray.

4. A detection system according to any one of claims 1-3, further comprising:

5. The detection system of claim 4, wherein the adjustment element is a two-dimensional adjustment element that controls movement of the optical element in a two-dimensional plane in accordance with the adjustment instructions.

6. The detection system according to claim 5, wherein the adjusting element, under the control of the processing element, moves the optical element in a first direction and/or a second direction within a predetermined plane,

7. The detection system of claim 4, wherein the adjustment element is a rotary adjustment element that rotates the optical element under control of the processing element.

8. A detection system according to any one of claims 1 to 3, wherein the optical element is a beam splitter, a mirror, a polarizer lens, a prism, a reticle or a filter.

9. A method of detection, for use in a detection system, the method comprising:

Acquiring a performance value of an optical signal output by an optical element in detection equipment through a detection element in the detection system, wherein the optical signal output by the optical element is an optical signal formed by processing light rays in an optical path of the detection equipment by the optical element, and the performance value of the optical signal output by the optical element is a spot size of the optical signal;

generating corresponding processing instructions based on the performance values of the optical elements for processing the optical signals output by the light rays, wherein the performance values are acquired by the detection elements;

the process of generating the corresponding processing instruction based on the performance value of the optical element for processing the optical signal output by the light acquired by the detection element comprises the following steps:

10. The method of claim 9, wherein obtaining, by a detection element in the detection system, a performance value of the optical element in the detection device to process the optical signal output by the light ray comprises:

Determining a size of the target area based on the target area;

The third direction is the long side direction of the light spot.

11. The method of detecting according to claim 10, wherein acquiring the optical signal intensities of the spot at the respective positions in the third direction based on the spot image comprises:

Wherein the fourth direction is the short side direction of the light spot.

12. The detection method according to claim 10, wherein determining, as the target area, an area of the light spot that satisfies a preset uniformity based on the optical signal intensity at each position of the light spot in the third direction includes:

13. The method of detecting according to claim 9, further comprising:

14. A detection apparatus comprising a light source and an optical element, further comprising a detection system according to any one of claims 1-8, the optical element being arranged in the light path of the light source.

15. The detection device comprises a light source, an optical element and a detection system, and is characterized in that the detection system adopts the detection method according to any one of 9-13 to acquire the performance value of the optical signal output by the optical element, and generates a corresponding processing instruction based on the performance value of the optical signal, and the optical element is arranged in a light path of the light source.