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CN114615812B - A monitoring method for PCB etching pattern accuracy and PCB manufacturing method - Google Patents

A monitoring method for PCB etching pattern accuracy and PCB manufacturing method Download PDF

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Publication number
CN114615812B
CN114615812B CN202210142971.4A CN202210142971A CN114615812B CN 114615812 B CN114615812 B CN 114615812B CN 202210142971 A CN202210142971 A CN 202210142971A CN 114615812 B CN114615812 B CN 114615812B
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monitoring
line
pcb
line width
width
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CN114615812A (en
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赵康
王洪府
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Shengyi Electronics Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/068Apparatus for etching printed circuits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0269Marks, test patterns or identification means for visual or optical inspection

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The invention discloses a monitoring method for the accuracy of a PCB etched pattern and a PCB manufacturing method, wherein the monitoring method for the accuracy of the PCB etched pattern comprises the following steps: etching a target circuit and a monitoring graphic module on the surface metal layer of the plate; the target circuit is used for participating in forming a circuit structure in a PCB finished product, the monitoring pattern module comprises a plurality of monitoring lines, wherein the design distance between two monitoring lines is one time of the maximum allowable deviation of the line width, and the design superposition width between two monitoring lines is one time of the maximum allowable lower deviation of the line width; and determining whether the line width of the target line meets the precision requirement according to the interval or the superposition state between the etched monitoring lines. The monitoring method for the etching pattern precision of the PCB and the PCB manufacturing method can improve the detection efficiency of the etching pattern manufacturing precision in the PCB manufacturing process.

Description

一种PCB蚀刻图形精度的监控方法及PCB制造方法A monitoring method for PCB etching pattern accuracy and PCB manufacturing method

技术领域Technical Field

本发明涉及PCB制造技术领域,特别是涉及一种PCB蚀刻图形精度的监控方法及PCB制造方法。The invention relates to the technical field of PCB manufacturing, and in particular to a monitoring method for PCB etching pattern accuracy and a PCB manufacturing method.

背景技术Background Art

目前,部分PCB对线路图形的制作要求很高,例如高频天线PCB对图形的制作要求通常均高于1mil,因此在这些PCB的制作过程中需要对蚀刻形成的图形尺寸进行监测;相关技术中,通过抽取样品板件,再采用光学检测等方式逐条检测样品板件中图形的线宽,并将检测所获取的每一线宽与标准图形线宽逐一对比计算,从而确认图形尺寸是否超出公差,因而检测过程繁琐,效率低下,严重影响生产效率。At present, some PCBs have very high requirements for the production of circuit graphics. For example, the production requirements of high-frequency antenna PCBs are usually higher than 1 mil. Therefore, during the production process of these PCBs, it is necessary to monitor the size of the graphics formed by etching. In the related technology, sample boards are extracted, and then optical detection and other methods are used to detect the line width of the graphics in the sample boards one by one, and each line width obtained by the detection is compared and calculated with the standard graphic line width one by one to confirm whether the graphic size exceeds the tolerance. Therefore, the detection process is cumbersome and inefficient, which seriously affects production efficiency.

发明内容Summary of the invention

本发明旨在至少解决现有技术中存在的技术问题之一。为此,本发明提出一种PCB蚀刻图形精度的监控方法及PCB制造方法,以提高PCB的制作过程中对蚀刻图形制作精度的检测效率。The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a monitoring method for PCB etching pattern accuracy and a PCB manufacturing method to improve the detection efficiency of etching pattern manufacturing accuracy during the PCB manufacturing process.

为达此目的,本发明采用以下技术方案:To achieve this object, the present invention adopts the following technical solutions:

一种PCB蚀刻图形精度的监控方法,包括有以下步骤:A method for monitoring the accuracy of PCB etching patterns comprises the following steps:

在板件的表面金属层上蚀刻出目标线路和监控图形模块;其中,目标线路用于参与形成PCB成品中的电路结构,监控图形模块包括有多条监控线条,其中有两条监控线条之间的设计间距为线宽所允许最大上偏差的一倍,且有两条监控线条之间的设计重合宽度为线宽所允许最大下偏差的一倍;Etching a target circuit and a monitoring graphic module on the surface metal layer of the board; wherein the target circuit is used to participate in forming a circuit structure in a finished PCB product, and the monitoring graphic module includes a plurality of monitoring lines, wherein a design spacing between two monitoring lines is one times the maximum upper deviation allowed by the line width, and a design overlap width between two monitoring lines is one times the maximum lower deviation allowed by the line width;

根据蚀刻后监控线条之间的间隔或重合状态,确定目标线路的线宽是否符合精度要求。Based on the spacing or overlap between the monitored lines after etching, determine whether the line width of the target line meets the accuracy requirements.

可选的,监控图形模块包括有第一监控线条、第二监控线条和第三监控线条,第一监控线条和第二监控线条之间的设计间距为线宽所允许最大上偏差的一倍,第一监控线条和第三监控线条之间的设计重合宽度为线宽所允许最大下偏差的一倍。Optionally, the monitoring graphic module includes a first monitoring line, a second monitoring line and a third monitoring line, the design spacing between the first monitoring line and the second monitoring line is twice the maximum upper deviation allowed by the line width, and the design overlap width between the first monitoring line and the third monitoring line is twice the maximum lower deviation allowed by the line width.

可选的,第二监控线条和第三监控线条均位于第一监控线条的同一侧。Optionally, the second monitoring line and the third monitoring line are both located on the same side of the first monitoring line.

可选的,第一监控线条、第二监控线条和第三监控线条的设计线宽均大于8mil,且设计长度均大于10mm。Optionally, the design line widths of the first monitoring line, the second monitoring line, and the third monitoring line are all greater than 8 mil, and the design lengths are all greater than 10 mm.

可选的,在第一监控线条的长度方向上,第一监控线条和第二监控线条之间的相对区域的尺寸及第一监控线条和第三监控线条之间重合区域的尺寸均大于1mil。Optionally, in the length direction of the first monitoring line, the size of the relative area between the first monitoring line and the second monitoring line and the size of the overlapping area between the first monitoring line and the third monitoring line are both greater than 1 mil.

具体地,根据蚀刻后监控线条之间的间隔或重合状态,确定目标线路的线宽是否符合精度要求,包括有以下步骤:Specifically, determining whether the line width of the target line meets the accuracy requirement based on the interval or overlap state between the monitored lines after etching includes the following steps:

判断监控线条之间的间隔或重合状态,若设计间距为线宽所允许最大上偏差的一倍的两条监控线条之间出现重合,则判定目标线路的线宽大于所允许的最大值。Determine the spacing or overlap between monitoring lines. If two monitoring lines with a design spacing of one times the maximum upper deviation allowed by the line width overlap, it is determined that the line width of the target line is greater than the maximum allowed value.

具体地,根据蚀刻后监控线条之间的间隔或重合状态,确定目标线路的线宽是否符合精度要求,包括有以下步骤:Specifically, determining whether the line width of the target line meets the accuracy requirement based on the interval or overlap state between the monitored lines after etching includes the following steps:

若设计重合宽度为线宽所允许最大下偏差的一倍的两条监控线条之间出现间隔,则判定目标线路的线宽小于所允许的最小值。If a gap appears between two monitoring lines whose designed overlap width is one times the maximum lower deviation allowed by the line width, it is determined that the line width of the target line is less than the minimum allowed value.

可选的,在板件的表面金属层上蚀刻出目标线路和监控图形模块,包括有以下步骤:Optionally, etching a target circuit and a monitoring graphic module on the surface metal layer of the board includes the following steps:

在板件的表面金属层上蚀刻出目标线路和多个监控图形模块,且使得多个监控图形模块分布于板件的不同位置上。A target circuit and a plurality of monitoring graphic modules are etched on the surface metal layer of the board, and the plurality of monitoring graphic modules are distributed at different positions of the board.

可选的,根据蚀刻后监控线条之间的间隔或重合状态,确定目标线路的线宽是否符合精度要求,包括有以下步骤:Optionally, determining whether the line width of the target line meets the accuracy requirement based on the interval or overlap state between the monitored lines after etching includes the following steps:

根据每一监控图形模块中监控线条之间的间隔或重合情况,判断每一监控图形模块周边区域的目标线路的线宽是否符合精度要求。According to the interval or overlap between the monitoring lines in each monitoring graphic module, it is determined whether the line width of the target line in the peripheral area of each monitoring graphic module meets the accuracy requirement.

一种PCB制造方法,采用如上任一项的PCB蚀刻图形精度的监控方法来监控目标线路的线宽;A PCB manufacturing method, using any of the above methods for monitoring PCB etching pattern accuracy to monitor the line width of a target line;

若目标线路的线宽不符合精度要求,则对蚀刻工艺参数进行调整,以使目标线路的线宽满足精度要求。If the line width of the target line does not meet the precision requirement, the etching process parameters are adjusted so that the line width of the target line meets the precision requirement.

与现有技术相比,本发明的有益效果为:Compared with the prior art, the present invention has the following beneficial effects:

通过在对目标线路进行蚀刻的同时,在板件上一起蚀刻出监控图形模块,由于监控图形模块和目标线路的蚀刻工艺参数条件等一致,从而可以使得监控图形模块中各个监控线条蚀刻后的实际线宽与设计线宽的差异度,与目标线路蚀刻后的实际线宽和设计线宽的差异度基本相同,而在监控线条的实际线宽偏宽时,将会缩小两监控线条之间的间距,并且当实际线宽与设计线宽的差值超过所允许的最大上偏差时,将使得原本具有设计间距的两条监控线条出现重合,而在监控线条的实际线宽偏窄,并且当实际线宽与设计线宽的差值超过所允许的最大下偏差时,将使得原本设计时应该出现重合的两条监控线条之间存在间隔,因此本发明只需要通过观察蚀刻后监控线条之间的间隔或重合状态的改变,即可了解目标线路的线宽是否超出所要求的精度之外,而无需对线宽的具体宽度进行逐一测量并对比,所以能够极大地提高对蚀刻图形制作精度的检测效率。By etching a monitoring graphic module on a plate at the same time as etching a target circuit, since the etching process parameter conditions of the monitoring graphic module and the target circuit are consistent, the difference between the actual line width of each monitoring line in the monitoring graphic module after etching and the designed line width can be made substantially the same as the difference between the actual line width of the target circuit after etching and the designed line width. When the actual line width of the monitoring line is wider, the spacing between the two monitoring lines will be reduced, and when the difference between the actual line width and the designed line width exceeds the maximum upper deviation allowed, the two monitoring lines that originally had the designed spacing will overlap. When the actual line width of the monitoring line is narrower, and when the difference between the actual line width and the designed line width exceeds the maximum lower deviation allowed, there will be a gap between the two monitoring lines that were originally designed to overlap. Therefore, the present invention only needs to observe the change in the spacing or overlapping state between the monitoring lines after etching to understand whether the line width of the target circuit exceeds the required accuracy, without measuring and comparing the specific widths of the line widths one by one, so it can greatly improve the detection efficiency of the etching pattern production accuracy.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

本发明的上述和/或附加的方面和优点从结合下面附图对实施例的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

图1为本发明实施例一的PCB蚀刻图形精度的监控方法的流程图;FIG1 is a flow chart of a method for monitoring PCB etching pattern accuracy according to a first embodiment of the present invention;

图2为本发明实施例一中蚀刻效果达到最佳理想化时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;2 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the etching effect reaches the optimal idealization in the first embodiment of the present invention;

图3为本发明实施例一中线宽的变宽程度未达到上偏差范围时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;3 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the widening degree of the line width does not reach the upper deviation range in the first embodiment of the present invention;

图4为本发明实施例一中线宽的变宽程度达到上偏差范围时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;4 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the widening degree of the line width reaches the upper deviation range in the first embodiment of the present invention;

图5为本发明实施例一中线宽的变宽程度超出上偏差范围时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;5 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the widening degree of the line width exceeds the upper deviation range in the first embodiment of the present invention;

图6为本发明实施例一中线宽的变窄程度未达到下偏差范围时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;6 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the narrowing degree of the line width does not reach the lower deviation range in the first embodiment of the present invention;

图7为本发明实施例一中线宽的变窄程度达到下偏差范围时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;7 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the narrowing degree of the line width reaches the lower deviation range in the first embodiment of the present invention;

图8为本发明实施例一中线宽的变窄程度超出下偏差范围时,第一监控线条、第二监控线条和第三监控线条之间的位置关系示意图;8 is a schematic diagram of the positional relationship between the first monitoring line, the second monitoring line and the third monitoring line when the narrowing degree of the line width exceeds the lower deviation range in the first embodiment of the present invention;

图9为本发明实施例二的PCB的制造方法的流程图。FIG. 9 is a flow chart of a method for manufacturing a PCB according to a second embodiment of the present invention.

附图标记:Reference numerals:

第一监控线条10、第二监控线条20、第三监控线条30、设计间距D1、设计重合宽度D2。The first monitoring line 10, the second monitoring line 20, the third monitoring line 30, the designed spacing D1, and the designed overlap width D2.

具体实施方式DETAILED DESCRIPTION

下面详细描述本发明的实施例,实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能理解为对本发明的限制。Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

在本发明的描述中,需要理解的是,涉及到方位描述,例如上、下、左、右、前、后等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, left, right, front, back, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

在本发明的描述中,如果有描述到第一、第二只是用于区分技术特征为目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量或者隐含指明所指示的技术特征的先后关系。In the description of the present invention, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

本发明的描述中,除非另有明确的限定,设置、安装、连接等词语应做广义理解,所属技术领域技术人员可以结合技术方案的具体内容合理确定上述词语在本发明中的具体含义。In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

以下参照附图1至附图8,描述本发明实施例一的PCB蚀刻图形精度的监控方法。The following describes a method for monitoring PCB etching pattern accuracy according to a first embodiment of the present invention with reference to FIGS. 1 to 8 .

参照图1,本实施例的PCB蚀刻图形精度的监控方法,应用于PCB制造过程的蚀刻工序,并且具体包括有以下步骤:1, the monitoring method of PCB etching pattern accuracy of the present embodiment is applied to the etching process of the PCB manufacturing process, and specifically includes the following steps:

S110、在板件的表面金属层上蚀刻出目标线路和监控图形模块;S110, etching a target circuit and a monitoring graphic module on the surface metal layer of the board;

需要说明的是,板件可以是应用于单层PCB成品中的基板及由附着于基板表面的铜箔一起构成的复合板件,板件还可以是应用于多层PCB成品中的多层压合板及由附着于压合板表面的铜镀层一起构成的复合板件,或者还可以是PCB生产过程中需要涉及到进行蚀刻处理的其他半成品板件。It should be noted that the board can be a substrate used in a single-layer PCB finished product and a composite board composed of copper foil attached to the surface of the substrate. The board can also be a multi-layer laminated board used in a multi-layer PCB finished product and a composite board composed of a copper plating attached to the surface of the laminated board, or it can be other semi-finished boards that require etching processing during the PCB production process.

还要进行说明的是,其中,目标线路用于后续参与形成PCB成品中的电路结构,也即在PCB成品中实际需要产生导通等作用的线路;监控图形模块中包括有多条监控线条,而这些监控线条则主要用于在蚀刻工序中起到辅助监控蚀刻图形精度的作用,也即监控线条为工艺辅助类线条,其基本不参与形成PCB成品的导通线路。It should also be explained that the target circuit is used to participate in the subsequent formation of the circuit structure in the finished PCB product, that is, the circuit that actually needs to produce conduction and other functions in the finished PCB product; the monitoring graphic module includes a plurality of monitoring lines, and these monitoring lines are mainly used to assist in monitoring the accuracy of the etching graphics in the etching process, that is, the monitoring lines are process-assisted lines, which basically do not participate in the formation of the conduction circuit of the finished PCB product.

并且,在需要蚀刻形成的多条监控线条中,参照图2,其中有两条监控线条(例如下文中将要提及的第一监控线条和第二监控线条)之间的设计间距D1为线宽所允许最大上偏差的一倍,且有两条监控线条(例如下文中将要提及的第一监控线条和第三监控线条)之间的设计重合宽度D2为线宽所允许最大下偏差的一倍。Furthermore, among the multiple monitoring lines that need to be etched, referring to Figure 2, the design spacing D1 between two monitoring lines (for example, the first monitoring line and the second monitoring line to be mentioned below) is twice the maximum upper deviation allowed by the line width, and the design overlap width D2 between two monitoring lines (for example, the first monitoring line and the third monitoring line to be mentioned below) is twice the maximum lower deviation allowed by the line width.

应当说明的是,其中,线宽所允许的最大上偏差和最大下偏差,可以依据设计时线宽的公差范围进行确定,例如,当线宽的公差范围为±20μm时,则最大上偏差为20μm,最大下偏差同样为20μm,此时D1=D2=20μm。It should be noted that the maximum upper deviation and the maximum lower deviation allowed for the line width can be determined based on the tolerance range of the line width during design. For example, when the tolerance range of the line width is ±20μm, the maximum upper deviation is 20μm, and the maximum lower deviation is also 20μm. At this time, D1=D2=20μm.

应当理解的是,其中,两条监控线条之间的设计间距D1是指,按照设计要求或者设计图纸等,在蚀刻效果达到最佳理想化时,两条监控线条之间的间距。类似地,两条监控线条之间的设计重合宽度D2是指,按照设计要求或者设计图纸等,在蚀刻效果达到最佳理想化时,两条监控线条之间重合部分的宽度。It should be understood that the design spacing D1 between the two monitoring lines refers to the spacing between the two monitoring lines when the etching effect reaches the best idealization according to the design requirements or design drawings, etc. Similarly, the design overlap width D2 between the two monitoring lines refers to the width of the overlapped portion between the two monitoring lines when the etching effect reaches the best idealization according to the design requirements or design drawings, etc.

应当理解的是,在板件上蚀刻形成目标线路和各个监控线条的工艺步骤按照常规的蚀刻工艺过程即可,在本实施例中不做具体限制。It should be understood that the process steps of etching the target circuit and each monitoring line on the board can be carried out according to a conventional etching process, and no specific limitation is made in this embodiment.

S120、根据蚀刻后监控线条之间的间隔或重合状态,确定目标线路的线宽是否符合精度要求。S120, determining whether the line width of the target circuit meets the accuracy requirement based on the interval or overlap status between the monitored lines after etching.

应当理解的是,由于目标线路和监控图形模块中的各个监控线条是通过蚀刻工艺一起在板件的金属层上成型的,因而各个监控线条蚀刻后的实际线宽与设计理论线宽的差异度、目标线路蚀刻后的实际线宽和设计线宽的差异度,两者将基本相同,也即蚀刻后监控线条的实际宽度相对于设计线宽而言变宽或者变窄的尺寸,与蚀刻后目标线路的实际宽度相对于设计线宽而言变宽或者变窄的尺寸基本相同。It should be understood that since the target circuit and the various monitoring lines in the monitoring graphic module are formed together on the metal layer of the board through an etching process, the difference between the actual line width of each monitoring line after etching and the designed theoretical line width, and the difference between the actual line width of the target circuit after etching and the designed line width will be basically the same, that is, the actual width of the monitoring line after etching becomes wider or narrower relative to the designed line width, which is basically the same as the actual width of the target circuit after etching becomes wider or narrower relative to the designed line width.

而在蚀刻后线宽变宽时,原本两者之间设计间距D1为线宽所允许最大上偏差的一倍的两条监控线条之间的距离将缩小,且参照图3,当线宽变宽的程度尚未达到最大上偏差时,这两条监控线条之间仍然具有间隔;参照图4,而当线宽变宽的程度达到最大上偏差时,由于两条监控线条同时变宽,因而这两条监控线条变宽的部分将刚好把原本存在的间隔填满,从而使得这两条监控线条之间的边缘互相贴合;参照图5,而当线宽变宽的程度超过最大上偏差时,由于两条监控线条同时变宽,因而这两条监控线条变宽的部分不仅会把原本存在的间隔填满,并且这两条监控线条之间还将出现重合。When the line width becomes wider after etching, the distance between the two monitoring lines whose original design spacing D1 is one times the maximum upper deviation allowed by the line width will be reduced. Referring to FIG3 , when the degree of line width widening has not yet reached the maximum upper deviation, there is still a gap between the two monitoring lines; referring to FIG4 , when the degree of line width widening reaches the maximum upper deviation, since the two monitoring lines are widened at the same time, the widened parts of the two monitoring lines will just fill the original gap, so that the edges of the two monitoring lines fit each other; referring to FIG5 , when the degree of line width widening exceeds the maximum upper deviation, since the two monitoring lines are widened at the same time, the widened parts of the two monitoring lines will not only fill the original gap, but also the two monitoring lines will overlap.

而在蚀刻后线宽变窄时,原本两者之间存在重合,且设计重合宽度D2为线宽所允许最大下偏差的一倍的两条监控线条之间,重合部位的宽度将缩小,参照图6,当线宽变窄的程度尚未达到最大下偏差时,这两条监控线条之间仍然存在重合的区域;参照图7,而当线宽变窄的程度达到最大下偏差时,由于两条监控线条同时变窄,且这两条监控线条变窄消失的部分将刚好是原本设计重合的部分,从而使得这两条监控线条之间的边缘互相贴合;而当线宽变窄的程度超过最大下偏差时,这两条监控线条之间将出现间隔。When the line width becomes narrower after etching, the width of the overlapping part between the two monitoring lines, which originally overlapped and the designed overlapping width D2 is twice the maximum lower deviation allowed by the line width, will be reduced. Referring to Figure 6, when the degree of line width narrowing has not reached the maximum lower deviation, there is still an overlapping area between the two monitoring lines; referring to Figure 7, when the degree of line width narrowing reaches the maximum lower deviation, since the two monitoring lines are narrowed at the same time, the narrowed and disappeared parts of the two monitoring lines will just be the originally designed overlapping parts, so that the edges of the two monitoring lines fit together; and when the degree of line width narrowing exceeds the maximum lower deviation, a gap will appear between the two monitoring lines.

综上可知,本发明通过判断监控线条之间的间隔或重合状态,即可获知目标线路的线宽是否符合精度要求,也即是否在线宽的设计公差范围以内,而无需对线宽的具体宽度进行逐一测量并对比,所以能够极大地提高对蚀刻图形制作精度的检测效率。In summary, the present invention can determine whether the line width of the target line meets the accuracy requirements, that is, whether it is within the design tolerance range of the line width, by judging the interval or overlap between the monitoring lines, without measuring and comparing the specific width of the line width one by one, so it can greatly improve the detection efficiency of the etching pattern production accuracy.

并且,具体地,通过上述分析可知,步骤S120中,主要可以通过以下两点判定目标线路的线宽达不到图形精度要求:Furthermore, specifically, through the above analysis, it can be known that in step S120, it can be determined that the line width of the target line does not meet the graphic accuracy requirement mainly through the following two points:

若设计间距D1为线宽所允许最大上偏差的一倍的两条监控线条之间出现重合,则判定目标线路的线宽大于所允许的最大值;If two monitoring lines with a design spacing D1 equal to one times the maximum upper deviation allowed by the line width overlap, it is determined that the line width of the target line is greater than the maximum allowed value;

若设计重合宽度D2为线宽所允许最大下偏差的一倍的两条监控线条之间出现间隔,则判定目标线路的线宽小于所允许的最小值。If a gap appears between two monitoring lines whose designed overlap width D2 is one times the maximum lower deviation allowed by the line width, it is determined that the line width of the target line is less than the minimum allowed value.

除上述两点之外的情形,则可判定目标线路的线宽处于图形精度要求以内。In cases other than the above two points, it can be determined that the line width of the target line is within the graphic accuracy requirements.

可以理解的是,为使得两条监控线条之间具有设计间距D1,且使得两条监控线条之间存在设计重合宽度D2,则监控图形模块至少需要包括有三条以上的监控线条;并且,在本实施例中,为减少不必要的一些监控线条而避免影响到板件的整体尺寸大小,监控图形模块包括有三条监控线条,且分别是第一监控线条10、第二监控线条20和第三监控线条30,其中第一监控线条10和第二监控线条20之间的设计间距D1为线宽所允许最大上偏差的一倍,第一监控线条10和第三监控线条30之间的设计重合宽度D2为线宽所允许最大下偏差的一倍。It can be understood that in order to ensure that there is a designed spacing D1 between two monitoring lines and a designed overlap width D2 between the two monitoring lines, the monitoring graphic module needs to include at least three monitoring lines; and, in this embodiment, in order to reduce some unnecessary monitoring lines and avoid affecting the overall size of the panel, the monitoring graphic module includes three monitoring lines, namely the first monitoring line 10, the second monitoring line 20 and the third monitoring line 30, wherein the designed spacing D1 between the first monitoring line 10 and the second monitoring line 20 is one times the maximum upper deviation allowed by the line width, and the designed overlap width D2 between the first monitoring line 10 and the third monitoring line 30 is one times the maximum lower deviation allowed by the line width.

应当理解的是,根据实际应用,在其他一些实施例中,监控图形模块也可以采用四条或四条以上的监控线条;例如,监控图形模块也可以包括有第一监控线条10、第二监控线条20、第三监控线条30和第四监控线条,其中第一监控线条10和第二监控线条20之间的设计间距D1为线宽所允许最大上偏差的一倍,第四监控线条和第三监控线条30之间的设计重合宽度D2为线宽所允许最大下偏差的一倍。It should be understood that, depending on the actual application, in some other embodiments, the monitoring graphic module may also use four or more monitoring lines; for example, the monitoring graphic module may also include a first monitoring line 10, a second monitoring line 20, a third monitoring line 30 and a fourth monitoring line, wherein the design spacing D1 between the first monitoring line 10 and the second monitoring line 20 is one times the maximum upper deviation allowed by the line width, and the design overlap width D2 between the fourth monitoring line and the third monitoring line 30 is one times the maximum lower deviation allowed by the line width.

在本实施例中,为进一步减少在宽度方向上对板件整体尺寸的影响,在本实施例中,第二监控线条20和第三监控线条30均位于第一监控线条10的同一侧。In this embodiment, in order to further reduce the impact on the overall size of the plate in the width direction, in this embodiment, the second monitoring line 20 and the third monitoring line 30 are both located on the same side of the first monitoring line 10 .

应当理解的是,根据实际应用,在其他一些实施例中,也可选择将第二监控线条20和第三监控线条30分别设置于第一监控线条10的宽度方向的相对两侧,在此不做具体限制。It should be understood that, according to actual applications, in some other embodiments, the second monitoring line 20 and the third monitoring line 30 may be respectively arranged on opposite sides of the first monitoring line 10 in the width direction, and no specific limitation is made here.

可以理解的是,当线宽过小时,通过蚀刻工艺不易成形,因此第一监控线条10、第二监控线条20和第三监控线条30的设计线宽均应大于8mil,例如在本实施例中可均为10mil;并且,当监控线条的长度过短时,也不容易对监控图形模块中的监控线条进行观测,从而为避免在蚀刻后因难以观察到而影响后续的检测效率,第一监控线条10、第二监控线条20和第三监控线条30的设计长度应均大于10mm,例如在本实施例中,具体地,均为15mm。It is understandable that when the line width is too small, it is not easy to form through the etching process. Therefore, the design line width of the first monitoring line 10, the second monitoring line 20 and the third monitoring line 30 should all be greater than 8 mils, for example, in this embodiment, they can all be 10 mils; and when the length of the monitoring line is too short, it is not easy to observe the monitoring lines in the monitoring graphic module. In order to avoid affecting the subsequent detection efficiency due to difficulty in observation after etching, the design lengths of the first monitoring line 10, the second monitoring line 20 and the third monitoring line 30 should all be greater than 10 mm, for example, in this embodiment, specifically, they are all 15 mm.

而且,类似地,为便于观测监控线条之间是否存在间隔或者重合,在第一监控线条10等监控线条的长度方向上,监控线条之间相对区域的尺寸也不易太小;因此在本实施例中,在第一监控线条10等监控线条的长度方向上,第一监控线条10和第二监控线条20之间的相对区域的尺寸及第一监控线条10和第三监控线条30之间重合区域的尺寸均大于1mil,例如在本实施例中,可均为3mil。Moreover, similarly, in order to facilitate the observation of whether there are gaps or overlaps between the monitoring lines, the size of the relative area between the monitoring lines in the length direction of the first monitoring line 10 and other monitoring lines should not be too small; therefore, in the present embodiment, in the length direction of the first monitoring line 10 and other monitoring lines, the size of the relative area between the first monitoring line 10 and the second monitoring line 20 and the size of the overlapping area between the first monitoring line 10 and the third monitoring line 30 are both greater than 1 mil, for example, in the present embodiment, they can both be 3 mils.

可以理解的是,在PCB的生产过程中,常常一板件可对应制作形成多个PCB成品,也即板件在蚀刻时可对应形成多个PCB成品所需的多组目标线路,这类板件的尺寸通常较大,并且会远大于成品PCB的尺寸;另外,在PCB的生产过程中,对于一些体积较大的电子产品,其对应的成品PCB虽然可能仅蚀刻有一组目标线路,但尺寸也可能相对较大。应当理解是,其中,每一组目标线路均包括有多条目标线路。It is understandable that in the production process of PCB, one board can often be used to form multiple PCB products, that is, the board can form multiple target circuits required for multiple PCB products when etching. The size of such boards is usually large and much larger than the size of the finished PCB. In addition, in the production process of PCB, for some electronic products with larger volumes, the corresponding finished PCB may only have one set of target circuits etched, but the size may also be relatively large. It should be understood that each set of target circuits includes multiple target circuits.

因而考虑到板件较大时,板件不同位置的蚀刻速度等可能会存在一些差异,在此情况下有必要对板件不同位置或区域的目标线路分别进行监控;为此,在其中一些实施例中,步骤S110,具体包括有以下步骤:Therefore, considering that when the board is large, the etching speeds at different positions of the board may be different, in this case it is necessary to monitor the target lines at different positions or areas of the board respectively; for this reason, in some embodiments, step S110 specifically includes the following steps:

在板件的表面金属层上蚀刻出目标线路和多个监控图形模块,且使得多个监控图形模块分布于板件的不同位置上。A target circuit and a plurality of monitoring graphic modules are etched on the surface metal layer of the board, and the plurality of monitoring graphic modules are distributed at different positions of the board.

应当理解是,在此步骤S110中,对于一板件对应制作形成多个PCB成品的,板件上蚀刻出的目标线路同样具有多组;而对于一板件仅用于制成一个较大面积的PCB成品的,板件上蚀刻出的目标线路可仅有一组,因而在此不对板件上目标线路的组数进行限制。It should be understood that in this step S110, for a board that corresponds to the production of multiple PCB products, the target circuits etched on the board also have multiple groups; and for a board that is only used to produce a PCB product with a larger area, there may be only one group of target circuits etched on the board, and therefore the number of groups of target circuits on the board is not limited here.

对应地,在步骤S120中,具体包括有以下步骤:Correspondingly, in step S120, the following steps are specifically included:

根据每一监控图形模块中监控线条之间的间隔或重合情况,判断每一监控图形模块周边区域的目标线路的线宽是否符合精度要求。According to the interval or overlap between the monitoring lines in each monitoring graphic module, it is determined whether the line width of the target line in the peripheral area of each monitoring graphic module meets the accuracy requirement.

应当理解是,在此步骤中,对于一板件对应制作形成多个PCB成品的,且PCB成品较小的,每一监控图形模块可以用于对其周边的至少一组目标线路内的所有的目标线路进行监测。而对于一板件仅用于制成一个较大面积的PCB成品,且板件上蚀刻出的目标线路也仅有一组的,每一监控图形模块可以用于对其周边的至少一条目标线路进行监测。It should be understood that in this step, if a board is used to produce multiple PCB products, and the PCB products are relatively small, each monitoring graphic module can be used to monitor all target lines in at least one group of target lines around it. If a board is only used to produce a PCB product with a larger area, and there is only one group of target lines etched on the board, each monitoring graphic module can be used to monitor at least one target line around it.

参照图9,以下描述本发明实施例二的PCB制造方法。9 , a PCB manufacturing method according to a second embodiment of the present invention is described below.

本实施例的PCB制造方法包括有以下步骤:The PCB manufacturing method of this embodiment includes the following steps:

S100、采用实施例一描述的PCB蚀刻图形精度的监控方法来监控目标线路的线宽;由于步骤S100的具体实施方式均已经在上述实施例一中说明,故这里不再进行重复描述。S100, using the PCB etching pattern accuracy monitoring method described in Example 1 to monitor the line width of the target line; since the specific implementation methods of step S100 have been described in the above Example 1, they will not be repeated here.

S200、若目标线路的线宽不符合精度要求,则对蚀刻工艺参数进行调整,以使目标线路的线宽满足精度要求。S200: If the line width of the target line does not meet the precision requirement, the etching process parameters are adjusted to make the line width of the target line meet the precision requirement.

可以理解的是,蚀刻工艺参数,可以是蚀刻反应温度和/或蚀刻时间等在蚀刻工艺中可进行调整的常规技术参数,在此不做具体限制。并且,具体地,当检测到线路的线宽超出最大上偏差时,可通过减少蚀刻时间和/或降低蚀刻反应温度等方式来进行调整;反之,则可增加蚀刻时间和/或提高蚀刻反应温度等方式来进行调整。It is understood that the etching process parameters may be conventional technical parameters that can be adjusted in the etching process, such as etching reaction temperature and/or etching time, and are not specifically limited here. In addition, when it is detected that the line width of the circuit exceeds the maximum upper deviation, it can be adjusted by reducing the etching time and/or lowering the etching reaction temperature; otherwise, it can be adjusted by increasing the etching time and/or increasing the etching reaction temperature.

尽管已经示出和描述了本发明的实施例,本领域的普通技术人员可以理解:在不脱离本发明的原理和宗旨的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims (8)

1.一种PCB蚀刻图形精度的监控方法,其特征在于,包括:1. A method for monitoring the accuracy of PCB etching patterns, comprising: 在板件的表面金属层上蚀刻出目标线路和监控图形模块;其中,所述目标线路用于参与形成PCB成品中的电路结构,所述监控图形模块包括有多条监控线条,其中有两条所述监控线条之间的设计间距为线宽所允许最大上偏差的一倍,且有两条所述监控线条之间的设计重合宽度为线宽所允许最大下偏差的一倍;Etching a target circuit and a monitoring graphic module on the surface metal layer of the board; wherein the target circuit is used to participate in forming a circuit structure in a finished PCB product, and the monitoring graphic module includes a plurality of monitoring lines, wherein a design spacing between two of the monitoring lines is one times the maximum upper deviation allowed by the line width, and a design overlap width between two of the monitoring lines is one times the maximum lower deviation allowed by the line width; 根据蚀刻后所述监控线条之间的间隔或重合状态,确定所述目标线路的线宽是否符合精度要求;若设计间距为线宽所允许最大上偏差的一倍的两条所述监控线条之间出现重合,则判定所述目标线路的线宽大于所允许的最大值;若设计重合宽度为线宽所允许最大下偏差的一倍的两条所述监控线条之间出现间隔,则判定所述目标线路的线宽小于所允许的最小值。According to the spacing or overlap between the monitoring lines after etching, determine whether the line width of the target line meets the accuracy requirements; if overlap occurs between two monitoring lines whose design spacing is twice the maximum upper deviation allowed by the line width, it is determined that the line width of the target line is greater than the maximum allowed value; if a spacing occurs between two monitoring lines whose design overlap width is twice the maximum lower deviation allowed by the line width, it is determined that the line width of the target line is less than the minimum allowed value. 2.根据权利要求1所述的一种PCB蚀刻图形精度的监控方法,其特征在于,所述监控图形模块包括有第一监控线条、第二监控线条和第三监控线条,所述第一监控线条和第二监控线条之间的设计间距为线宽所允许最大上偏差的一倍,所述第一监控线条和所述第三监控线条之间的设计重合宽度为线宽所允许最大下偏差的一倍。2. A method for monitoring the accuracy of PCB etching patterns according to claim 1, characterized in that the monitoring pattern module includes a first monitoring line, a second monitoring line and a third monitoring line, the design spacing between the first monitoring line and the second monitoring line is twice the maximum upper deviation allowed by the line width, and the design overlap width between the first monitoring line and the third monitoring line is twice the maximum lower deviation allowed by the line width. 3.根据权利要求2所述的一种PCB蚀刻图形精度的监控方法,其特征在于,所述第二监控线条和所述第三监控线条均位于所述第一监控线条的同一侧。3. A method for monitoring PCB etching pattern accuracy according to claim 2, characterized in that the second monitoring line and the third monitoring line are both located on the same side of the first monitoring line. 4.根据权利要求2所述的一种PCB蚀刻图形精度的监控方法,其特征在于,所述第一监控线条、所述第二监控线条和所述第三监控线条的设计线宽均大于8mil,且设计长度均大于10mm。4. A method for monitoring the accuracy of PCB etching patterns according to claim 2, characterized in that the design line widths of the first monitoring line, the second monitoring line and the third monitoring line are all greater than 8 mils, and the design lengths are all greater than 10 mm. 5.根据权利要求2所述的一种PCB蚀刻图形精度的监控方法,其特征在于,在所述第一监控线条的长度方向上,所述第一监控线条和所述第二监控线条之间的相对区域的尺寸及所述第一监控线条和第三监控线条之间重合区域的尺寸均大于1mil。5. A method for monitoring the accuracy of PCB etching patterns according to claim 2, characterized in that, in the length direction of the first monitoring line, the size of the relative area between the first monitoring line and the second monitoring line and the size of the overlapping area between the first monitoring line and the third monitoring line are both greater than 1 mil. 6.根据权利要求1至5任一项所述的一种PCB蚀刻图形精度的监控方法,其特征在于,所述在板件的表面金属层上蚀刻出目标线路和监控图形模块,包括有以下步骤:6. A method for monitoring the PCB etching pattern accuracy according to any one of claims 1 to 5, characterized in that etching a target circuit and a monitoring pattern module on the surface metal layer of the plate comprises the following steps: 在所述板件的表面金属层上蚀刻出目标线路和多个监控图形模块,且使得多个所述监控图形模块分布于所述板件的不同位置上。A target circuit and a plurality of monitoring graphic modules are etched on the surface metal layer of the board, and the plurality of monitoring graphic modules are distributed at different positions of the board. 7.根据权利要求6所述的一种PCB蚀刻图形精度的监控方法,其特征在于,所述根据蚀刻后所述监控线条之间的间隔或重合状态,确定所述目标线路的线宽是否符合精度要求,包括有以下步骤:7. A method for monitoring the accuracy of PCB etching patterns according to claim 6, characterized in that the step of determining whether the line width of the target line meets the accuracy requirement based on the interval or overlap between the monitoring lines after etching comprises the following steps: 根据每一所述监控图形模块中所述监控线条之间的间隔或重合情况,判断每一所述监控图形模块周边区域的所述目标线路的线宽是否符合精度要求。According to the interval or overlap between the monitoring lines in each monitoring graphic module, it is determined whether the line width of the target line in the peripheral area of each monitoring graphic module meets the accuracy requirement. 8.一种PCB制造方法,其特征在于,包括有以下步骤:8. A PCB manufacturing method, characterized in that it includes the following steps: 采用如权利要求1至7任一项所述的一种PCB蚀刻图形精度的监控方法来监控所述目标线路的线宽;The line width of the target line is monitored by using a PCB etching pattern accuracy monitoring method as described in any one of claims 1 to 7; 若所述目标线路的线宽不符合精度要求,则对蚀刻工艺参数进行调整,以使所述目标线路的线宽满足精度要求。If the line width of the target line does not meet the precision requirement, the etching process parameters are adjusted so that the line width of the target line meets the precision requirement.
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