CN114613714A - But leveling pressure device and paster equipment thereof - Google Patents

Abstract

The present invention relates to the technical field of patch equipment, in particular to a leveling and pressing device and a patching device thereof. The leveling and pressing device comprises: a guide rail, a first pressing component, a second pressing component, a first The sliding block, the driving unit and the leveling assembly, the present invention adopts the design that the leveling assembly cooperates with the first sliding block, so that in the floating connection state, the first pressing assembly can take the second working surface as the reference, and press down the method. The first working surface is forced to fit with the second working surface to establish the position of the first pressing component. After the position is established, the leveling component is switched to a fixed connection state to complete the leveling operation, thereby ensuring the first working surface. It is parallel to the second working surface, which has the advantages of convenient operation and good effect, especially suitable for small desktop-level equipment, and it can continue to work with only one leveling, and it does not need to be leveled every time, saving time and effort.

Description

Adjustable leveling pressing device and its patch equipment

technical field

The present invention relates to the technical field of patch equipment, in particular to a leveling and pressing device. In addition, the present invention also relates to a patching device comprising the above-mentioned leveling and pressing device.

Background technique

With the development of electronic products, the electronic parts are becoming more and more refined, and the importance of packaging technology is also increasing. At present, the placement machine used in the field of chip bonding and packaging is mainly composed of a driving unit and two pressure components. , When working, the chip and the substrate are placed between the two pressure components, and then the drive unit drives the pressure component to press the chip to achieve sintering bonding between the chip and the substrate;

In order to prevent the common pressure bias problem during chip bonding, the placement machine in the prior art is usually equipped with a leveling device. However, the existing leveling device mainly uses a spherical leveling structure for leveling, but it only Passive leveling can be performed, but active leveling cannot be performed, so that the problem of voltage bias is still prone to occur during chip bonding.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is: in order to solve the problem that the chip bonding machine in the prior art is prone to biasing, a leveling and pressing device is now provided. In addition, the present invention also provides a A patch device comprising the above-mentioned leveling and pressing device.

The technical solution adopted by the present invention to solve the technical problem is: an adjustable leveling and pressurizing device, comprising:

Rails, mounted on the rack;

a first pressurizing component, having a first working surface;

a second pressing component, having a second working surface disposed opposite to the first working surface, the first pressing component is mounted on the frame or/and the guide rail;

The first sliding block is matched with the guide rail and is slidably installed on the guide rail;

a driving unit, used to drive the first pressing component to move closer to or away from the second pressing component;

and a first leveling assembly for connecting the first pressing assembly on the first sliding block, and having a floating connection state and a fixed connection state;

When the first leveling component is in a floating connection state and the first pressing component moves closer to the second pressing component, the first pressing component drives the first slider to move through the first leveling component, and the first leveling component moves. Allowing the first pressing component to adjust the position adaptively with the contact between the first working surface and the second working surface, so as to realize the fit of the first working surface and the second working surface;

When the first leveling assembly is in a fixed connection state, the position of the first pressing assembly is fixed on the first sliding block.

In this solution, during leveling, the first leveling component is in a floating connection state, the position of the first pressing component is not fixed, the position of the second pressing component is fixed, and there is a certain degree of parallelism between the first working surface and the second working surface Deviation, and then apply a certain pressure to the first pressing component, the first pressing component adjusts its position adaptively with the contact with the second working surface, until the first working surface and the second working surface are in close contact, and then use The first leveling component fixes the position of the first pressing component, thereby ensuring that the first working surface and the second working surface are parallel to each other, which has the advantages of convenient operation and good effect, especially suitable for small desktop equipment, and only needs One-time leveling can continue to work, no need to level each time, saving time and effort.

Further, the first leveling assembly includes a first connector and a first fastener;

the first connecting piece is fixedly connected with the first pressing component, and is provided with a first mounting hole;

The first fastener passes through the first installation hole and is used to detachably fix the first connecting piece on the first sliding block; the outer peripheral wall of the part of the first fastener located in the first installation hole and the first A first gap is left between the inner peripheral walls of the mounting hole;

Due to the existence of the first gap, when the first fastener is not fixed, the first connecting piece and the first pressing component on it can move within the range restricted by the first gap, so that the first pressing component can be fine-tuned After the position of the first pressing component is established, then tighten the first fastener to fix the position of the first pressing component on the first slider to ensure that the first working surface and the second working surface are parallel to each other .

In order to prevent the first pressing component from being skewed again after leveling, further, both sides of the first pressing component are provided with first leveling components, and the frame is located on both sides of the first pressing component All have guide rails on which the first sliding block is slidably installed, and the first leveling component is connected with the first sliding block on the side where it is located; through the first leveling component on both sides and the first sliding block The design promotes the balance of forces on both sides of the first pressing component, thereby ensuring that the first pressing component will not be skewed during the working process.

In order to improve the detection accuracy of the pressure sensor, further, one end of the second pressurizing assembly away from the second working surface has a mounting surface, a pressure sensor is arranged between the mounting surface and the frame, and the pressure sensor is fixedly installed on the machine On the rack, the guide rail is slidably installed with a second slider that matches it;

Also includes a second leveling assembly for connecting the second pressing assembly on the second sliding block, and has a floating connection state and a fixed connection state;

When the second leveling component is in a floating connection state and the second pressing component is close to the pressure sensor, the second pressing component drives the second sliding block to move through the second leveling component, and the second leveling component allows the second leveling component to move. The pressure component adjusts its position adaptively according to the contact between the mounting surface and the force-bearing surface of the pressure sensor, so as to realize the fitting between the mounting surface and the force-bearing surface;

When the second leveling assembly is in a fixed connection state, the position of the second pressing assembly is fixed on the second sliding block;

During leveling, the second leveling component is in a floating connection state, the position of the second pressing component is not fixed, the position of the pressure sensor is fixed, and there is a certain parallelism deviation between the installation surface and the force-bearing surface of the pressure sensor, and then the second pressure sensor is in a fixed position. The pressure component exerts a certain pressure, and the second pressure component adjusts its position adaptively with the contact with the force-bearing surface until the mounting surface and the force-bearing surface are in close contact, and then the second leveling component is used to pressurize the second pressure component. The position of the components is fixed, thereby ensuring that the installation surface and the force-bearing surface are parallel to each other, thereby improving the detection accuracy of the pressure sensor.

Further, the second leveling assembly includes a second connector and a first fastener;

the second connecting piece is fixedly connected with the second pressing component, and is provided with a second mounting hole;

The second fastener passes through the second installation hole and is used to detachably fix the second connecting piece on the second slider; the outer peripheral wall of the part of the second fastener located in the second installation hole is connected to the first A second gap is left between the inner peripheral walls of the two mounting holes;

Due to the existence of the second gap, when the second fastener is not fixed, the second connecting piece and the first pressing component on it can move within the range restricted by the second gap, so that the second pressing component can be fine-tuned After the position of the second pressing component is established, the second fastener is tightened to fix the position of the second pressing component on the second sliding block to ensure that the installation surface and the force-bearing surface are parallel to each other.

In order to prevent the second pressing assembly from being skewed again after being leveled, further, both sides of the second pressing assembly are provided with second leveling assemblies, and the frame is located on both sides of the second pressing assembly Both have guide rails, and the second sliding blocks are slidably installed on the guide rails, and the second leveling components are connected with the second sliding blocks on the side thereof; the second leveling components and the second sliding blocks on both sides are connected by The design promotes the balance of the forces on both sides of the second pressing component, so as to ensure that the second pressing component will not be skewed during the working process.

In order to improve the uniformity of applying force to the first pressing component, further, the driving unit includes a driving mechanism and a balanced force applying mechanism;

The balance force-applying mechanism includes a ball pair assembly and an elastic elastic buffer assembly, the output end of the driving mechanism is drive-connected with the ball pair assembly through the elastic buffer assembly, and the ball pair assembly is drive-connected with the first pressurizing assembly;

The elastic buffer component can play a buffering role by using its own elasticity, so as to control the pressure applied to the chip more precisely; after the pressure of the driving mechanism is transmitted to the elastic buffer component, the elastic buffer component transmits the pressure to the ball sub-assembly, the ball The sub-assembly can concentrate the dispersed pressure of the elastic buffer assembly to a point in the center, which ensures the balance of the pressure applied to the first pressurizing assembly and prevents the pressure eccentric load problem caused by the manufacturing and assembly errors of the elastic buffer assembly.

In order to facilitate manufacture and assembly, further, the elastic buffer assembly includes a fixed plate, a movable plate, a guide rod and an elastic element;

The output end of the driving mechanism is fixedly connected to the fixed plate, the movable plate is fixedly connected to the ball subassembly, one of the fixed plate and the movable plate is fixedly connected to the guide rod, and the other is along the first slider. The moving direction is slidably connected with the guide rod, and the elastic element is located between the movable plate and the fixed plate.

In order to realize the transmission connection of the ball sub-assembly between the elastic buffer assembly and the first pressurizing assembly, further, the ball sub-assembly includes a ball sub-board, a center ball, a second ball sub-board and a limit plate, the center ball It is located between the first ball sub-board and the second ball sub-board, one end of the limiting plate is provided with a reset hole, and the other end is fixedly connected with the second ball sub-board;

The first ball sub-plate or the movable plate is provided with a reset rod, the reset rod is inserted into the reset hole, and a third gap is left between the outer peripheral wall of the position where the reset rod is located in the reset hole and the inner peripheral wall of the reset hole;

One of the first ball sub-board and the second ball sub-board is fixedly connected to the movable plate, and the other is fixedly connected to the first pressing component;

The setting of the third gap, on the one hand, when the first pressurizing assembly is pressurized, can realize the pressure exerted by the elastic buffer assembly on the ball sub-plate 1, and all the pressure is transferred from the center ball to the ball sub-plate 2, and then by the ball sub-assembly 2 On the other hand, when the first pressing assembly is reset, the first ball sub-plate pulls the limit plate through the reset rod, so that the second ball sub-plate and the center ball follow the first pressing assembly in the reset direction At the same time, the setting of the limit plate and the reset rod also limits the relative positions of the ball sub-board 1 and the ball sub-board 2, so that the center ball can be restrained between the ball sub-board 1 and the ball sub-board 2.

The present invention also provides a patch device, comprising the above-mentioned leveling and pressing device.

The beneficial effects of the present invention are: the leveling and pressing device of the present invention adopts the design of the leveling component to cooperate with the first sliding block, so that in the floating connection state, the first pressing component can be based on the second working surface, and The way of pressing down forces the first working surface and the second working surface to fit together, so as to establish the position of the first pressing component. The first working surface and the second working surface are parallel to each other, which has the advantages of convenient operation and good effect, especially suitable for small desktop-level equipment, and it can continue to work with only one leveling, and it does not need to be leveled every time, saving time Effortless.

Description of drawings

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

Fig. 1 is the schematic diagram of the adjustable leveling pressing device of the present invention;

Fig. 2 is A-A sectional schematic diagram in Fig. 1;

Fig. 3 is the partial enlarged schematic diagram of B in Fig. 2;

Fig. 4 is the C-C cross-sectional schematic diagram in Fig. 2;

Figure 5 is an exploded schematic diagram of the present invention when the first pressurizing assembly is connected to the first sliding block through the leveling assembly;

6 is a three-dimensional schematic diagram of the present invention when the first pressing component is connected to the first sliding block through the leveling component;

7 is a three-dimensional schematic diagram of the elastic buffer assembly and the ball subassembly in the present invention when assembled;

8 is a two-dimensional schematic diagram of the elastic buffer assembly and the ball subassembly in the present invention when assembled;

Fig. 9 is the D-D sectional schematic diagram in Fig. 8;

Fig. 10 is a schematic cross-sectional view along E-E direction in Fig. 9;

Fig. 11 is a partial enlarged schematic view of F in Fig. 10;

Fig. 12 is the installation schematic diagram of the second pressurizing assembly;

Fig. 13 is the G-G sectional schematic diagram in Fig. 12;

Fig. 14 is a partial enlarged schematic view of H in Fig. 13;

Fig. 15 is a K-K sectional schematic diagram in Fig. 13;

In the figure: 1. The first pressing component, 1-1, the first working surface;

2. The second pressure component, 2-1, the second working surface, 2-2, the installation surface;

3. The first leveling assembly, 3-1, the first connecting piece, 3-11, the first mounting hole, 3-2, the first fastener, 3-3, the first gap;

4. Elastic buffer assembly, 4-1, fixed plate, 4-2, movable plate, 4-21, third threaded hole, 4-3, guide rod, 4-4, elastic element, 4-5, limit nut ;

5. Ball sub-assembly, 5-1, ball sub-plate one, 5-2, center ball, 5-3, ball sub-board two, 5-4, limit plate, 5-41, reset hole, 5-5, Reset lever, 5-6, the third gap;

6. Drive mechanism, 6-1, motor, 6-2, lead screw, 6-3, drive nut, 6-4, nut base plate, 6-5, third connector, 6-6, third slider;

7. The second leveling assembly, 7-1, the second connecting piece, 7-11, the second mounting hole, 7-2, the second fastener, 7-3, the second gap;

8. The second slider, 8-1, the second threaded hole;

9. Pressure sensor, 9-1. Forced surface;

10. Guide rail, 11. Rack;

12. The first slider, 12-1, the first threaded hole.

Detailed ways

The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are all simplified schematic diagrams, and only illustrate the basic structure of the present invention in a schematic way, so they only show the structures related to the present invention, and the directions and references (eg, up, down, left, right, etc.) may only be Used to aid in the description of features in the drawings. Therefore, the following detailed description is not to be taken in a limiting sense, and only by the appended claims and their equivalents to define the scope of the claimed subject matter.

As shown in Figure 1-11, an adjustable leveling compression device includes:

The guide rail 10 is fixedly installed on the rack 11;

The first pressing assembly 1 has a first working surface 1-1;

The second pressing component 2 has a second working surface 2-1 opposite to the first working surface 1-1, and the first pressing component 1 is installed on the frame 11 or/and the guide rail 10;

The first sliding block 12 is matched with the guide rail 10 and is slidably installed on the guide rail 10;

a driving unit for driving the first pressing component 1 to move closer to or away from the second pressing component 2 in a linear direction;

and the first leveling assembly 3, which is used to connect the first pressing assembly 1 to the first sliding block 12, and has a floating connection state and a fixed connection state; the first leveling assembly 3 is in a floating connection state and a first plus When the pressing assembly 1 moves closer to the second pressing assembly 2, the first pressing assembly 1 drives the first sliding block 12 to move through the first leveling assembly 3, and the first leveling assembly 3 allows the first pressing assembly 1 to follow the A working surface 1-1 is in contact with the second working surface 2-1 to adjust the position adaptively, so as to realize the bonding between the first working surface 1-1 and the second working surface 2-1; the first leveling component 3 is in In the fixed connection state, the position of the first pressing component 1 is fixed on the first sliding block 12 .

As shown in FIGS. 5 and 6 , in this embodiment, the first leveling assembly 3 includes a first connecting member 3-1 and a first fastener 3-2; a first connecting member 3-1 and a first pressing assembly 1 fixed connection, and a first installation hole 3-11 is opened; the first fastener 3-2 passes through the first installation hole 3-11, and is used to detachably fix the first connector 3-1 on the first sliding block 12; as shown in FIG. 3, a first gap is left between the outer peripheral wall of the part of the first fastener 3-2 located in the first installation hole 3-11 and the inner peripheral wall of the first installation hole 3-11 3-3; the cross-section of the first installation hole 3-11 can be oval, circular, oval or square, etc. In this implementation, the first installation hole 3-11 with a circular cross-section is specifically adopted;

In this embodiment, the first connecting piece 3-1 can be integrally formed with the first sliding block 12, or, the first connecting piece 3-1 can be fixedly connected with the first sliding block 12 by means of mechanical connection;

The specific implementation of the detachable fixing of the first connecting piece 3-1 by the first fastener 3-2 includes but is not limited to the following forms:

One is that the first fastener 3-2 uses screws, the first slider 12 is provided with a first threaded hole 12-1 that matches the first fastener 3-2, and the first fastener 3- 2. After passing through the first installation hole 3-11, it is threaded in the first threaded hole 12-1, and the diameter of the first installation hole 3-11 is larger than that of the first threaded hole 12-1; in the first fastener 3 -2 When it is not tightened, the first pressing component 1 can move within the range restricted by the first gap 3-3, so as to facilitate fine adjustment of the position. After the position of the first pressing component 1 is established, tighten the first tightening component 3-2, so that the nut of the first fastener 3-2 is pressed against the first connecting component 3-1, thereby fixing the position of the first pressing component 1 on the first sliding block 12;

The second is that the first fastener 3-2 includes a stud and a nut, and the stud is fixed on the first slider 12 by welding, clamping, screw connection and integral molding, and passes through the first mounting hole 3. After -11, it is threadedly connected with the nut; when the nut is not tightened, the first pressing component 1 can move within the range constrained by the first gap 3-3, so as to facilitate position fine-tuning; when the nut is tightened against the first connector 3-1, so that the position of the first pressing assembly 1 is fixed on the first sliding block 12 .

Both sides of the first pressing assembly 1 are provided with a first leveling assembly 3 , the rack 11 is provided with guide rails 10 on both sides of the first pressing assembly 1 , and a first slider 12 is slidably installed on the guide rails 10 . , the first leveling component 3 is connected with the first sliding block 12 on the side where it is located; through the design of the first leveling component 3 and the first sliding block 12 on both sides, the forces on both sides of the first pressing component 1 are balanced, Therefore, it is ensured that the first pressing assembly 1 will not be skewed due to side loads during the working process;

As shown in Figures 7-11, the drive unit in this embodiment includes a drive mechanism 6 and a balance force application mechanism;

The balance force-applying mechanism includes a ball assembly 5 and an elastic elastic buffer assembly 4. The output end of the driving mechanism 6 is connected to the ball assembly 5 through the elastic buffer assembly 4, and the ball assembly 5 is connected to the first pressing assembly 1. .

The elastic buffer assembly 4 includes a fixed plate 4-1, a movable plate 4-2, a guide rod 4-3 and an elastic element 4-4; the output end of the driving mechanism 6 is fixedly connected to the fixed plate 4-1, and the movable plate 4-2 is connected to the fixed plate 4-1. The ball sub-assembly 5 is fixedly connected, one end of the elastic element 4-4 is pressed against the movable plate 4-2, and the other end is pressed against the fixed plate 4-1. In this embodiment, the fixed plate 4-1 is fixedly connected with the guide rod 4-3. The guide rod 4-3 passes through the movable plate 4-2, and is slidably connected with the movable plate 4-2 along the moving direction of the first slider 12. The guide rod 4-3 is threadedly connected with a limit nut 4-5, and the limit nut 4-5 Press the end face of the movable plate 4-2 away from the fixed plate 4-1, so that the fixed plate 4-1, the guide rod 4-3 and the movable plate 4-2 form a whole, preventing the movable plate 4-2 The distance between the fixed plate 4-1 and the movable plate 4-2 can also be changed by turning the limit nut 4-5, so as to adjust the elastic force of the elastic element 4-4; or In this embodiment, the movable plate 4-2 is fixedly connected with the guide rod 4-3, and the guide rod 4-3 passes through the fixed plate 4-1 and is slidably connected with the fixed plate 4-1 along the moving direction of the first slider 12 , the guide rod 4-3 is threadedly connected with a limit nut 4-5, and the limit nut 4-5 is pressed against the end face of the fixed plate 4-1 away from the movable plate 4-2.

In order to improve the cushioning performance, the elastic element 4-4 adopts a spring, and there are multiple springs and guide rods 4-3, which are in one-to-one correspondence. The spring is sleeved outside the corresponding guide rod 4-3, which can prevent the spring from skewing. The springs between the fixed plate 4-1 and the movable plate 4-2 are distributed at circumferential intervals around the center of the ball sub-assembly 5 to improve the uniformity of the pressure distribution; in this embodiment, four springs are used, and the four springs are distributed At the four corners of the square, the center of the circumscribed circle where the square is located and the center of the center ball 5-2 coincide with the center line of the first compression assembly 1;

In this embodiment, after the pressure of the driving mechanism 6 is transmitted to the spring, the spring can play a buffering role, and then the spring transmits the pressure to the ball subassembly 5, and the ball subassembly 5 can concentrate the pressure dispersed by each spring to the center point , to ensure the balance of the pressure applied to the first pressing component 1, and prevent the pressure bias load problem caused by spring manufacturing and assembly errors; thus, the first leveling component 3 and the balance force application mechanism jointly ensure that the chip is stressed during bonding The uniformity of the applied pressure without eccentric load can also prevent the leveled first pressure component 1 from being skewed.

In this embodiment, the ball sub-assembly 5 includes a ball sub-board 1 5-1, a center ball 5-2, a ball sub-board 2 5-3 and a limit plate 5-4, and the center ball 5-2 is located on the ball sub-board 1 5- Between 1 and the second ball sub-board 5-3, in order to prevent the center ball 5-2 from falling off, the ball sub-board 1 5-1 and the second ball sub-board 5-3 are provided with depressions, and the center ball 5-2 is provided with a depression. The two ends are respectively located in the depressions of the first ball sub-board 5-1 and the second ball sub-board 5-3;

One of the ball sub-board 5-1 and the second ball sub-board 5-3 is fixedly connected with the movable plate 4-2, and the other is fixedly connected with the first pressing component 1; the ball sub-board 1 5-1 is fixedly connected with Or the movable plate 4-2 is fixedly connected as an example, the second ball sub-board 5-3 is fixedly connected with the first pressing component 1, in order to improve the uniformity of the force applied by the first pressing component 1, the ball sub-board 1 is preferably fixed at the middle position of the movable plate 4-2;

One end of the limit plate 5-4 is provided with a reset hole 5-41, and the other end is fixedly connected with the second ball sub-board 5-3; the ball sub-board 1 5-1 or the movable plate 4-2 is fixed with a reset rod 5-5, The reset rod 5-5 is inserted into the reset hole 5-41. As shown in FIG. 11, a space is left between the outer peripheral wall of the position where the reset rod 5-5 is located in the reset hole 5-41 and the inner peripheral wall of the reset hole 5-41. The third gap 5-6;

The reset rod 5-5 is fixed on the ball sub-plate 1 5-1 or the movable board 4-2 by means of screw connection, clamping, welding or integral molding; the reset rod 5-5 can also be replaced by a fastener to Taking screws as an example, a third threaded hole 4-21 matching the reset rod 5-5 is provided on the ball sub-plate 5-1 or the movable plate 4-2, and the reset rod 5-5 passes through the reset hole 5-41 The rear screw is connected in the third threaded hole 4-21.

The setting of the third gap 5-6, on the one hand, when the first pressing component 1 is pressurized, can realize the pressure applied by the elastic buffer component 4 to the ball sub-plate 1 5-1, and all the pressures are transferred from the center ball 5-2 to the ball sub-plate 5-1. The second ball sub-board 5-3 is then transmitted to the first pressurizing assembly 1 by the second ball sub-board 5-3; on the other hand, when the first pressurizing assembly 1 is reset, the ball sub-board 1 5-1 passes through the reset lever 5-5 Pull the limit plate 5-4, so that the second ball sub-board 5-3 and the center ball 5-2 move along the reset direction with the first pressing component 1; at the same time, the limit plate 5-4 and the reset rod 5-5 The setting of the ball sub-plate also limits the relative positions of the ball sub-plate 1 5-1 and the ball sub-plate 2 5-3, and plays a role in constraining the center ball 5-2; in addition, the setting of the third gap 5-6 also makes the balance The force-applying mechanism and the first pressing component 1 are non-rigidly connected, which will not affect the leveling of the first pressing component 1 .

In this embodiment, the driving mechanism 6 includes a motor 6-1, a screw rod 6-2, a transmission nut 6-3 and a nut base plate 6-4. A third connecting piece 6-5 is fixed on the nut base plate 6-4. A third sliding block 6-6 is slidably mounted thereon, and the third connecting piece 6-5 is fixedly connected with the third sliding block 6-6 by screws. Specifically, in this embodiment, the third sliding block 6-6 is connected to The connection structure between the third connecting piece 6-5 is the same as the connecting structure between the first sliding block 12 and the first connecting piece 3-1; the output end of the motor 6-1 is connected to the screw rod 6-2 in a driving manner, and the screw The rod 6-2 is threadedly connected with the transmission nut 6-3, the axis direction of the screw 6-2 is parallel to the sliding direction of the first slider 12, the transmission nut 6-3 is fixedly connected with the nut base plate 6-4, and the nut base plate 6 -4 is fixedly connected with the fixed plate 4-1; the motor 6-1 drives the screw 6-2 to rotate, the transmission nut 6-3 feeds, and the transmission nut 6-3 drives the nut base plate 6-4 and the fixed plate 4-1 to displace , and then transmitted from the fixed plate 4-1 to the movable plate 4-2 through the elastic element 4-4, and finally the movable plate 4-2 drives the first pressing component 1 to reciprocate through the ball subassembly 5; it is worth noting that this implementation In the example, the driving mechanism 6 can also use an air cylinder and an electric push rod.

The working principle of the leveling and pressing device in this embodiment is:

The first working surface 1-1 of the first pressing component 1 and the second working surface 2-1 of the second pressing component 2 have been machined to ensure that the first working surface 1-1 and the second working surface 2-1 are machined before leveling. The flatness of the second working face 2-1;

When leveling, the first fastener 3-2 is released, the first leveling component 3 is in a floating connection state, the position of the first pressing component 1 is not fixed, the pressure sensor 9 supports the second pressing component 2, and the second pressing component 2 is supported. The position of the pressing component 2 is fixed, and there is a certain parallelism deviation between the first working surface 1-1 and the second working surface 2-1, and then the motor 6-1 drives the screw 6-2, so that the transmission nut 6-3 goes down Feed, apply a certain pressure to the first pressing component 1, and the first pressing component 1 adjusts its position adaptively with the contact with the second working surface 2-1 until the first working surface 1-1 and the second working surface 1-1 The working surface 2-1 is tightly fitted, and then the first pressing component 1 is fixed in position by tightening the first fastener 3-2, thereby ensuring the first working surface 1-1 and the second working surface 2-1 Parallel to each other, it has the advantages of convenient operation and good effect, especially suitable for small desktop-level equipment, and it can continue to work with only one leveling, and it does not need to be leveled every time, saving time and effort.

When working, the motor 6-1 drives the screw 6-2 to feed the drive nut 6-3 downward. After the pressure is transmitted to the spring, the spring can play a buffering role, and then the spring transmits the pressure to the ball assembly 5. , the ball sub-assembly 5 can concentrate the distributed pressure of each spring to a point in the center, which ensures the balance of the pressure applied to the first pressurizing assembly 1, so that the first leveling assembly 3 and the balance force application mechanism jointly guarantee the bonding time. Uniformity of chip force;

Therefore, the first leveling component 3 ensures that the first working surface 1-1 and the second working surface 2-1 are always kept in a parallel state, and the balance force applying mechanism ensures the balance of the pressure applied to the first pressing component 1, and the two The cooperative work realizes the uniformity of the force during chip bonding, and prevents the occurrence of the common voltage bias problem during chip bonding.

Example 2

As shown in Figures 12-15, the difference between Embodiment 2 and Embodiment 1 is that in order to improve the detection accuracy of the pressure sensor 9, the end of the second pressing component 2 away from the second working surface 2-1 has a mounting surface 2- 2. A pressure sensor 9 is arranged between the installation surface 2-2 and the frame 11, the pressure sensor 9 is fixedly installed on the frame 11, and the guide rail 10 is slidably installed with a second slider 8 that matches it; The leveling assembly 7 is used to connect the second pressing assembly 2 to the second sliding block 8, and has a floating connection state and a fixed connection state;

When the second leveling component 7 is in the floating connection state and the second pressing component 2 is close to the pressure sensor 9, the second pressing component 2 drives the second sliding block 8 to move through the second leveling component 7, and the second leveling component 7 moves. The component 7 allows the second pressure component 2 to adjust the position adaptively with the contact between the mounting surface 2-2 and the force-bearing surface 9-1 of the pressure sensor 9, so as to realize the sticking of the mounting surface 2-2 and the force-bearing surface 9-1. combine;

When the second leveling assembly 7 is in a fixed connection state, the position of the second pressing assembly 2 is fixed on the second sliding block 8;

In this embodiment, the second leveling assembly 7 includes a second connecting member 7-1 and a first fastener 3-2; the second connecting member 7-1 is fixedly connected with the second pressing assembly 2, and a second connecting member 7-1 is provided. Mounting hole 7-11; the second fastener 7-2 passes through the second mounting hole 7-11, and is used to detachably fix the second connecting piece 7-1 on the second sliding block 8; as shown in FIG. 14 As shown, a second gap 7-3 is left between the outer peripheral wall of the part of the second fastener 7-2 located in the second installation hole 7-11 and the inner peripheral wall of the second installation hole 7-11; the second installation hole The cross-section of 7-11 can be oval, circular, oval or square, etc. In this implementation, the second mounting hole 7-11 with a circular cross-section is specifically adopted;

In this embodiment, the second connecting piece 7-1 can be integrally formed with the second sliding block 8, or, the second connecting piece 7-1 can be fixedly connected with the second sliding block 8 by means of mechanical connection;

The specific implementation of the detachable fixing of the second connector 7-1 by the second fastener 7-2 includes but is not limited to the following forms:

One is that the second fastener 7-2 is a screw, the second slider 8 is provided with a second threaded hole 8-1 that matches the screw, and the second fastener 7-2 passes through the second mounting hole. 7-11 is threadedly connected in the second threaded hole 8-1, and the diameter of the second installation hole 7-11 is larger than that of the second threaded hole 8-1; when the second fastener 7-2 is not tightened, the first The second pressing component 2 can move within the range constrained by the first gap 3-3, so as to facilitate the fine adjustment of the position. The nuts of the two fasteners 7-2 abut against the second connecting piece 7-1, thereby fixing the position of the second pressing component 2 on the second sliding block 8;

The second is that the second fastener 7-2 includes a stud and a nut, and the stud is fixed on the second slider 8 by welding, clamping, screw connection and integral molding, and passes through the second mounting hole 7. After -11, it is threadedly connected with the nut; when the nut is not tightened, the second pressing component 2 can move within the range constrained by the second gap 7-3 to facilitate position fine-tuning; when the nut is tightened against the second connecting piece 7-1, so as to fix the position of the second pressing assembly 2 on the second sliding block 8;

In order to prevent the second pressing component 2 from being skewed again after leveling, in this embodiment, both sides of the second pressing component 2 are provided with a second leveling component 7 and a second sliding block 8. The second sliding block 8 and The guide rail 10 on its side is slidably connected, and the second leveling assembly 7 is connected with the second sliding block 8 on its side; through the design of the double-sided second leveling assembly 7 and the second sliding block 8, the second pressure is promoted The force on both sides of the assembly 2 is balanced, so as to ensure that the second pressing assembly 2 will not be skewed during the working process.

In this embodiment, the first sliding block 12 , the second sliding block 8 and the third sliding block 6 - 6 on the same side are all arranged on the same guide rail 10 , which can reduce the complexity of the structure, and can avoid installation errors that may cause Caton problem.

In this embodiment, the first pressing assembly 1 and the second pressing assembly 2 are arranged up and down, that is, the first pressing assembly 1 is located above the second pressing assembly 2 , and the second pressing assembly 2 is located above the pressure sensor 9 , after the second pressing component 2 is leveled, the mounting surface 2 - 2 of the second pressing component 2 can directly abut against the force bearing surface 9 - 1 of the pressure sensor 9 .

The leveling principle of the second pressurizing assembly 2 in this embodiment is:

The flatness of the mounting surface 2-2 of the second pressing component 2 has been ensured by machining before leveling;

During leveling, the second fastener 7-2 is loosened, the second leveling assembly 7 is in a floating connection state, the position of the second pressing assembly 2 is not fixed, the position of the pressure sensor 9 is fixed, the installation surface 2-2 is connected to the pressure sensor There is a certain degree of parallelism deviation between the force-bearing surfaces 9-1 of 9, and then the driving mechanism 6 applies a certain downward pressure to the second pressure component 2 either manually or in other ways, and the second pressure component 2 follows with the receiving force. The contact of the force surface 9-1 adjusts the position adaptively until the installation surface 2-2 and the force bearing surface 9-1 are in close contact. The position of the pressure sensor 9 is fixed, thereby ensuring that the installation surface 2-2 and the force bearing surface 9-1 are parallel to each other, thereby improving the detection accuracy of the pressure sensor 9.

When the chip is bonded, the chip is placed between the first pressing component 1 and the second pressing component 2, and the driving unit drives the first pressing component 1 to press the chip downward, so as to realize the bonding between the chip and the substrate. Sinter bonding, and the pressure sensor 9 performs pressure detection during this process.

Example 3

A patch device includes the leveling and pressing device in the above-mentioned Embodiment 1 or Embodiment 2.

The above ideal embodiment according to the present invention is enlightenment, and through the above description, relevant personnel can make various changes and modifications without departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the contents in the specification, and the technical scope must be determined according to the scope of the claims.

Claims (10)

1. The flattening pressurizing device is characterized in that: the method comprises the following steps:

the guide rail (10) is arranged on the frame (11);

a first pressing assembly (1) having a first working surface (1-1);

a second pressing assembly (2) which is provided with a second working surface (2-1) opposite to the first working surface (1-1), wherein the first pressing assembly (1) is arranged on the frame (11) or/and the guide rail (10);

the first sliding block (12) is matched with the guide rail (10) and is arranged on the guide rail (10) in a sliding mode;

the driving unit is used for driving the first pressurizing assembly (1) to move close to or away from the second pressurizing assembly (2);

and a first leveling assembly (3) for connecting the first pressing assembly (1) to the first slider (12) and having a floating connection state and a fixed connection state;

when the first leveling component (3) is in a floating connection state and the first pressurizing component (1) is close to the second pressurizing component (2), the first pressurizing component (1) drives the first sliding block (12) to move through the first leveling component (3), and the first leveling component (3) allows the first pressurizing component (1) to be self-adaptively adjusted along with the contact of the first working surface (1-1) and the second working surface (2-1), so that the first working surface (1-1) and the second working surface (2-1) are attached;

when the first leveling component (3) is in a fixed connection state, the position of the first pressing component (1) is fixed on the first sliding block (12).

2. The levelable pressure device of claim 1, wherein: the first leveling component (3) comprises a first connecting piece (3-1) and a first fastening piece (3-2);

the first connecting piece (3-1) is fixedly connected with the first pressurizing assembly (1) and is provided with a first mounting hole (3-11);

the first fastening piece (3-2) penetrates through the first mounting hole (3-11) and is used for detachably fixing the first connecting piece (3-1) on the first sliding block (12); a first gap (3-3) is reserved between the outer peripheral wall of the part of the first fastening piece (3-2) located in the first mounting hole (3-11) and the inner peripheral wall of the first mounting hole (3-11).

3. The levelable pressure device of claim 2, wherein: the both sides of first pressurization subassembly (1) all dispose first leveling subassembly (3), the both sides that lie in first pressurization subassembly (1) on frame (11) all have guide rail (10), equal slidable mounting has on guide rail (10) first slider (12), first leveling subassembly (3) are connected with first slider (12) of its place side.

4. The levelable pressure device of claim 1, wherein: one end, far away from the second working surface (2-1), of the second pressurizing assembly (2) is provided with a mounting surface (2-2), a pressure sensor (9) is arranged between the mounting surface (2-2) and the rack (11), the pressure sensor (9) is fixedly mounted on the rack (11), and a second sliding block (8) matched with the guide rail (10) is slidably mounted on the guide rail (10);

the second leveling component (7) is used for connecting the second pressurizing component (2) to the second sliding block (8) and has a floating connection state and a fixed connection state;

when the second leveling component (7) is in a floating connection state and the second pressurizing component (2) is close to the pressure sensor (9), the second pressurizing component (2) drives the second slider (8) to move through the second leveling component (7), and the second leveling component (7) allows the second pressurizing component (2) to be self-adaptively adjusted along with the contact of the mounting surface (2-2) and the stress surface (9-1) of the pressure sensor (9), so that the mounting surface (2-2) is attached to the stress surface (9-1);

when the second leveling component (7) is in a fixed connection state, the position of the second pressing component (2) is fixed on the second sliding block (8).

5. The levelable pressure device of claim 4, wherein: the second leveling component (7) comprises a second connecting piece (7-1) and a first fastening piece (3-2);

the second connecting piece (7-1) is fixedly connected with the second pressurizing assembly (2) and is provided with a second mounting hole (7-11);

the second fastening piece (7-2) penetrates through the second mounting hole (7-11) and is used for detachably fixing the second connecting piece (7-1) on the second sliding block (8); a second gap (7-3) is reserved between the outer peripheral wall of the part, located in the second mounting hole (7-11), of the second fastening piece (7-2) and the inner peripheral wall of the second mounting hole (7-11).

6. The levelable pressure device of claim 4, wherein: the both sides of second pressurization subassembly (2) all are configured with second leveling subassembly (7), the both sides that lie in second pressurization subassembly (2) on frame (11) all have guide rail (10), equal slidable mounting is on guide rail (10) second slider (8), second leveling subassembly (7) are connected with second slider (8) of its place side.

7. The levelable pressure device of claim 1, wherein: the driving unit comprises a driving mechanism (6) and a balance force application mechanism;

the balance force application mechanism comprises a ball pair assembly (5) and an elastic buffering assembly (4), the output end of the driving mechanism (6) is in transmission connection with the ball pair assembly (5) through the elastic buffering assembly (4), and the ball pair assembly (5) is in transmission connection with the first pressurizing assembly (1).

8. The levelable pressure device of claim 7, wherein: the elastic buffer assembly (4) comprises a fixed plate (4-1), a movable plate (4-2), a guide rod (4-3) and an elastic element (4-4);

the output end of the driving mechanism (6) is fixedly connected with the fixed plate (4-1), the movable plate (4-2) is fixedly connected with the ball pair assembly (5), one of the fixed plate (4-1) and the movable plate (4-2) is fixedly connected with the guide rod (4-3), the other one of the fixed plate (4-1) and the movable plate (4-2) is in sliding connection with the guide rod (4-3) along the moving direction of the first sliding block (12), and the elastic element (4-4) is located between the movable plate (4-2) and the fixed plate (4-1).

9. The levelable pressure device of claim 7, wherein: the ball pair assembly (5) comprises a first ball pair plate (5-1), a central ball (5-2), a second ball pair plate (5-3) and a limiting plate (5-4), wherein the central ball (5-2) is positioned between the first ball pair plate (5-1) and the second ball pair plate (5-3), one end of the limiting plate (5-4) is provided with a reset hole (5-41), and the other end of the limiting plate is fixedly connected with the second ball pair plate (5-3);

a first ball auxiliary plate (5-1) or a movable plate (4-2) is provided with a reset rod (5-5), the reset rod (5-5) is inserted into the reset hole (5-41), and a third gap (5-6) is reserved between the outer peripheral wall of the reset rod (5-5) positioned in the reset hole (5-41) and the inner peripheral wall of the reset hole (5-41);

one of the first ball auxiliary plate (5-1) and the second ball auxiliary plate (5-3) is fixedly connected with the movable plate (4-2), and the other one is fixedly connected with the first pressurizing assembly (1).

10. A patch device, characterized by: comprising a trimmable pressing device as claimed in any of claims 1 to 9.

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