CN114582583A - A magnetron pulling single crystal superconducting magnet device - Google Patents

Abstract

The invention discloses a magnetron pulling single crystal superconducting magnet device, which comprises a coil bobbin, a coil and an inner iron yoke. The bobbin is a saddle-shaped annular structure, the coil is wound on the bobbin, and one end of the inner iron yoke is arranged in the inner ring of the bobbin. On the basis of retaining the advantages of high utilization rate of the magnetic field of the saddle coil and less use of the coil under the same magnetic field strength requirement, the invention optimizes the design of the embedded iron yoke according to the coil structure, and is embedded in the inner diameter space of the coil, so that the inner The iron yoke attracts the coil, so as to alleviate the influence of the electromagnetic repulsive force on the coil due to the opposite currents in the upper and lower horizontal sections after the coil is energized and excited, which greatly reduces the superconducting coil upper and lower horizontal sections. The strength of the electromagnet makes the force on the coil more reasonable and alleviates the risk of quenching caused by excessive force during the operation of the coil.

Description

A magnetron pulling single crystal superconducting magnet device

technical field

The invention relates to the technical field of semiconductor production equipment, in particular to a magnetron pulling single crystal superconducting magnet device.

Background technique

High-purity monocrystalline silicon is widely used in solar cells, integrated circuits, semiconductors and other industries. It is one of the key materials for high-tech industries such as photovoltaic power generation and electronic information. It has an important strategic position in ensuring energy, information and national security.

Up to now, in the field of superconducting magnets for magnetron pulling single crystals, there have also been related patents applied for protection in recent years, such as CN103106994A, CN110136915A and so on. However, most of the previous magnets have the following problems. For example, the magnet coil usually adopts a structure of four or more circular coils, and this kind of coil has the problem of complex structure. Especially for the structure with 4 coils and above, due to the mutual cancellation of the magnetic fields between the coils, the utilization rate of the magnetic field is low. Therefore, the amount of superconducting wire is large under the same magnetic field demand, resulting in high production costs. At the same time, both CN210535437U and CN210429450U adopt the saddle-shaped coil structure with left and right symmetrical distribution, which can well avoid the above problems, and the utilization rate of the magnetic field is significantly improved. Under the condition of the same central magnetic field, the amount of superconducting wire is less than 1/1 of that of the traditional 4 coils. 2. Therefore, the production cost of single crystal superconducting magnets is greatly reduced compared to the traditional magnetron pulling.

However, the saddle-shaped coil also has certain disadvantages. Since the diameter of the magnetron pulling the single crystal is about 2m, the length of the upper and lower straight sides of the coil reaches nearly 2.5m. Compared with traditional circular coils, the problem of coil structure deformation caused by electromagnetic force during operation is more prominent, thus increasing the risk of quenching of superconducting coils during operation. To sum up, how to further optimize the force of the coil on the basis of retaining the high utilization rate of the magnetic field of the saddle coil has become a key issue to improve the operation reliability of the superconducting magnetic pulling single crystal device.

SUMMARY OF THE INVENTION

The embodiment of the present invention provides a magnetron pulling single crystal superconducting magnet device, which is used to solve the problem of quenching caused by force deformation of the saddle coil in the prior art during operation, and at the same time further reduces the magnetron pulling single crystal. The manufacturing cost of the crystalline superconducting magnet device is reduced, and the embedded iron yoke is used as a low-temperature vacuum Dewar structure, eliminating the traditional separate low-temperature vacuum Dewar components.

In one aspect, an embodiment of the present invention provides a magnetron pulling single crystal superconducting magnet device, comprising:

Coil bobbin, the bobbin is a saddle-shaped annular structure;

Coil, the coil is wound on the coil bobbin;

The inner iron yoke is embedded, and one end of the inner iron yoke is arranged in the inner ring of the coil bobbin.

A magnetron pulling single crystal superconducting magnet device in the present invention has the following advantages:

1. On the basis of retaining the advantages of high magnetic field utilization rate of the saddle coil and less coil usage under the same magnetic field strength requirement, the inner iron yoke is optimized according to the coil structure and embedded in the inner diameter space of the coil, so that the inner The iron yoke attracts the coil, so as to alleviate the influence of the electromagnetic repulsive force on the coil due to the opposite currents in the upper and lower horizontal sections after the coil is energized and excited, which greatly reduces the superconducting coil upper and lower horizontal sections. The strength of the electromagnet makes the force on the coil more reasonable, which alleviates the risk of quenching caused by excessive force during the operation of the coil.

2. Since the built-in iron yoke is placed in the inner diameter space of the coil, the built-in iron yoke acts as a magnetic pole head inside the coil, which can make the magnetic field obtained in the space area of the magnet device of the present invention more uniform, which is convenient for Improve the efficiency of magnetron pulling single crystal production and preparation. At the same time, the built-in iron yoke can be used as a low-temperature vacuum dewar structure, which eliminates the need for additional design of the vacuum dewar structure and is of great help in reducing the cost of the device.

Description of drawings

In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings without creative efforts.

1 is a schematic diagram of an external structure of a magnetron pulling single crystal superconducting magnet device provided in an embodiment of the present invention;

2 is a schematic diagram of a partial internal structure of a magnetron pulling single crystal superconducting magnet device according to an embodiment of the present invention;

3 is a schematic three-dimensional structure diagram of a coil and an inner iron yoke provided by an embodiment of the present invention;

4 is a schematic diagram of the positions of the coil, the built-in iron yoke, the upper top plate of the magnetically shielded iron yoke, and the lower bottom plate of the magnetically shielded iron yoke according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of the deformation of a traditional saddle coil under the action of electromagnetic repulsion force.

Description of reference numerals: 1- Magnetic shielding iron yoke upper top plate, 2-Dewar inner cylinder, 3-Inner iron yoke, 4- Magnetic shielding iron yoke lower bottom plate, 5- Magnetic shielding iron yoke outer cylinder, 6-Dewar Protruding parts, 7-G-M refrigerator, 8-cooling shield cooling structure, 9-coil cooling structure, 10-cooling shield, 11-coil frame, 12-coil, 13-cooling connection structure, 14-vacuum interface .

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

1-2 are schematic structural diagrams of a magnetron pulling single crystal superconducting magnet device according to an embodiment of the present invention. The embodiment of the present invention provides a magnetron pulling single crystal superconducting magnet device, including:

The bobbin 11, the bobbin 11 is a saddle-shaped annular structure;

The coil 12, the coil 12 is wound on the bobbin 11;

The inner iron yoke 3 is embedded, and one end of the inner iron yoke 3 is arranged in the inner ring of the coil bobbin 11 .

Exemplarily, the above-mentioned saddle-shaped annular structure refers to bending the annular structure to form a saddle shape, the annular structure has two horizontal segments of equal length and arranged in parallel, and the ends of the two horizontal segments pass through semicircular arcs respectively. segment connection. The projection of the coil bobbin 11 on the horizontal plane is an arc shape, and a wire slot is arranged on the outer side thereof, and the coil 12 is wound in the wire slot. Since the bobbin 11 has a saddle-shaped annular structure, the coil 12 wound thereon also has the same shape. The saddle-shaped coil can effectively improve the utilization rate of the magnetic field, and also has the advantages of less wires and low leakage magnetic field for the same magnetic field strength.

In the embodiment of the present invention, the inner iron yoke 3 is also an annular structure, and the shape of one end thereof is the same as that of the inner ring of the coil bobbin 11, but the size is slightly smaller than that of the inner ring of the coil bobbin 11, so when the inner iron is embedded After one end of the yoke 3 is embedded in the inner ring of the bobbin 11, there is a certain distance between them.

As shown in FIG. 3 , the built-in iron yoke 3 is embedded in the inner ring of the coil bobbin 11, and the coil 12 generates a magnetic field B after being energized. The magnetic field obtained in the space region of the magnetron pulling single crystal superconducting magnet device has higher uniformity, which is convenient to improve the efficiency of single crystal silicon production and preparation.

At the same time, as shown in FIG. 4 , after the coil 12 is energized, the current directions of the upper and lower horizontal sections are opposite, so a mutual repulsive force F will be generated. Under the action of the repulsive force F, the coil 12 has the risk of deformation, such as Figure 5. Under the action of the magnetic field, the built-in iron yoke 3 will also generate vertically downward and vertical upward attractive forces f to the upper and lower horizontal segments of the coil 12 , and the attractive force f can offset the repulsive force F to a certain extent. By optimizing the design of the embedded iron yoke 3 according to the structure of the coil 12, and adjusting the distance L1 between the coil 12 and the top plate 1 of the magnetic shielding iron yoke, and the distance L2 between the coil 12 and the embedded iron yoke 3, the embedded iron yoke 3 is The iron yoke 3 produces an appropriate attractive force f to the coil 12, so as to relieve the electromagnetic repulsion force F due to the opposite currents in the upper and lower horizontal sections after the coil 12 is energized and excited, which greatly reduces the upper and lower horizontal sections of the coil 12. The electromagnetic repulsive force makes the force on the coil 12 more reasonable, and relieves the risk of quenching caused by the excessive force on the coil 12 during operation. Moreover, the use of the built-in iron yoke 3 relieves the stress on the coil 12 , which can ultimately simplify the supporting structures related to the coil 12 , making processing and production more convenient, and ultimately lowering the cost.

In a possible embodiment, it further includes: the upper top plate 1 of the magnetic shielding iron yoke, the upper top plate 1 of the magnetic shielding iron yoke is located above the coil bobbin 11; the lower bottom plate 4 of the magnetic shielding iron yoke, the lower plate 4 of the magnetic shielding iron yoke is located on the coil Below the skeleton 11; the Dewar inner cylinder 2, the Dewar inner cylinder 2 is located inside the coil bobbin 11, and the upper and lower ends of the Dewar inner cylinder 2 are respectively connected to the inner side of the magnetic shielding iron yoke upper top plate 1 and the magnetic shielding iron yoke lower bottom plate 4 The magnetic shielding iron yoke outer cylinder 5, the magnetic shielding iron yoke outer cylinder 5 is located outside the coil bobbin 11, and the upper and lower ends of the magnetic shielding iron yoke outer cylinder 5 are respectively connected with the magnetic shielding iron yoke upper top plate 1 and the magnetic shielding iron yoke The outer end of the lower bottom plate 4 is connected.

Exemplarily, the upper top plate 1 of the magnetic shielding iron yoke and the lower bottom plate 4 of the magnetic shielding iron yoke are circular rings with the same size and shape, and the two are arranged vertically facing each other. The Dewar inner cylinder 2 is a cylindrical structure, its outer diameter is the same as the inner diameter of the upper top plate 1 of the magnetic shielding iron yoke, and the height is the same as the distance between the upper top plate 1 of the magnetic shielding iron yoke and the lower bottom plate 4 of the magnetic shielding iron yoke. The outer cylinder 5 of the magnetic shielding iron yoke is also a cylindrical structure, its inner diameter is the same as the outer diameter of the upper top plate 1 of the magnetic shielding iron yoke, and the height is the distance between the upper top plate 1 of the magnetic shielding iron yoke and the lower bottom plate 4 of the magnetic shielding iron yoke same. Therefore, the upper top plate 1 of the magnetic shielding iron yoke, the lower bottom plate 4 of the magnetic shielding iron yoke, the inner Dewar cylinder 2 and the outer cylinder 5 of the magnetic shielding iron yoke are surrounded to form a cylindrical annular structure, the coil bobbin 11, the coil 12 and the inner iron The yokes 3 are all inside the cylindrical annular structure.

In the embodiment of the present invention, the side surface of the magnetic shielding iron yoke outer cylinder 5 is provided with an opening of the same size and shape as the end of the inner iron yoke 3 , and one end of the inner iron yoke 3 is embedded in the inner ring of the coil bobbin 11 Among them, the other end is connected to the opening, and the inner side of the inner iron yoke 3 embedded in the coil bobbin 11 is filled with metal material to shield the magnetic field inside the cylindrical annular structure. Meanwhile, the upper top plate 1 of the magnetic shielding iron yoke, the lower bottom plate 4 of the magnetic shielding iron yoke and the outer cylinder 5 of the magnetic shielding iron yoke are all made of metal materials to shield the magnetic field from leakage. The Dewar inner cylinder 2 is made of magnetically permeable material, so that the magnetic field inside the cylindrical annular structure can penetrate to the axial position. Moreover, the built-in iron yoke 3 is made of ferromagnetic metal, such as iron, cobalt, nickel and its alloys, so that it can generate an attractive force f to the coil 12 .

The present invention adopts the built-in iron yoke 3 as the low-temperature vacuum dewar, and saves the low-temperature dewar components that need to be set separately in the prior art, thereby further reducing the production cost by reducing the production cost. The tile parts make the internal space larger, which facilitates the production operation and avoids the risk of the parts being too close to contact.

In a possible embodiment, it further includes: a cold shield 10, which is sleeved on the outside of the coil 12 and the coil bobbin 11; a G-M refrigerator 7; a cold shield cooling structure 8, the cold shield cooling structure 8 and the G-M The cooling output end of the refrigerator 7 is connected, and the cooling shield cooling structure 8 is also in contact with the cooling shield 10, so that the interior of the cooling shield 10 maintains a low temperature environment.

Exemplarily, after the G-M refrigerator 7 is energized, it can generate a low temperature, which transmits the low temperature to the cold shield 10 through the cold shield cooling structure 8, so that the coil 12 inside the cold shield 10 is always in a low temperature environment, thereby making the coil 12 work. in a superconducting state.

In the embodiment of the present invention, the cold shield cooling structure 8 includes a primary cold head and a cold shield cooling plate, the primary cold head is connected to the cooling output end of the G-M refrigerator 7, and the cold shield cold conducting plate is arranged on the first level Outside the cold head, and the cold shield and the cold shield are in contact with the cold shield 10 . The low temperature output by the G-M refrigerator 7 is transmitted to the cold shield cold plate through the first cold head, and then transmitted to the cold shield 10 by the cold shield cold plate.

In a possible embodiment, it also includes: a coil cooling structure 9, the coil cooling structure 9 is connected to the output end of the cooling shield cooling structure 8, and the coil cooling structure 9 is also in contact with the coil bobbin 11, so that the The bobbin 11 and the coil 12 are kept at a low temperature.

Exemplarily, the low temperature of the cold shield cooling structure 8 is transmitted to the cold shield 10 on the one hand, and is also transmitted to the coil cooling structure 9 on the other hand, and the coil cooling structure 9 further transmits the low temperature to the coil bobbin 11, so that the coil 12 can be completely cooled. The ambient temperature is further reduced, so that the coil 12 can work stably in a superconducting state.

In the embodiment of the present invention, the number of the bobbins 11 is two, and the two bobbins 11 are arranged opposite to each other. The device also includes a cooling-conducting connection structure 13, the cooling-conducting connection structure 13 is connected between the two coil bobbins 11, and the coil cooling-conducting structure 9 is in contact with the cooling-conducting connection structure 13, so that the two coil bobbins 11 and the coil 12 are in a low temperature state .

The coil cooling structure 9 includes: a secondary cold head, which is connected to the output end of the primary cold head; a coil cold conducting plate, which is arranged outside the secondary cold head, and the coil cold conducting plate is connected to the coil. The skeleton 11 is in contact. The low temperature output by the primary cold head is transmitted to the coil cold-conducting plate through the secondary cold-head, and then transmitted to the coil bobbin 11 by the coil cold-conducting plate.

In a possible embodiment, it further includes: a Dewar protruding part 6, the Dewar protruding part 6 is arranged on the outer side of the magnetic shielding iron yoke outer cylinder 5, and the G-M refrigerator 7 is arranged on the Dewar protruding part On the outer side of 6 , the cooling shield cooling structure 8 and the coil cooling structure 9 are both arranged inside the Dewar raised part 6 .

Exemplarily, the Dewar protruding part 6 is a cube-shaped hollow structure, and it communicates with the inside of the magnetic shielding iron yoke outer cylinder 5 . The G-M refrigerator 7 is arranged on the outer top surface of the Dewar protruding part 6 , and its refrigeration output end passes through the top surface of the Dewar protruding part 6 and is connected to the primary cold head inside the Dewar protruding part 6 .

In a possible embodiment, it further includes: a vacuum port 14, the vacuum port 14 is arranged on the outer side of the Dewar protruding part 6, and the vacuum port 14 is used for cooperating with a vacuuming device to connect the Dewar protruding part 6 and the magnetic The space enclosed by the upper top plate 1 of the shielding iron yoke, the lower bottom plate 4 of the magnetic shielding iron yoke, the inner Dewar cylinder 2 and the outer cylinder 5 of the magnetic shielding iron yoke is evacuated.

Exemplarily, after the inside of the space is evacuated, the heat exchange between the inside and outside of the space can be reduced, thereby reducing the low temperature dissipation of the G-M refrigerator 7 .

Although preferred embodiments of the present invention have been described, additional changes and modifications to these embodiments may occur to those skilled in the art once the basic inventive concepts are known. Therefore, the appended claims are intended to be construed to include the preferred embodiment and all changes and modifications that fall within the scope of the present invention.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Thus, provided that these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims (10)

1. a magnetron pull single crystal superconducting magnet device, is characterized in that, comprises: A coil bobbin (11), the coil bobbin (11) is a saddle-shaped annular structure; a coil (12), the coil (12) is wound on the bobbin (11); An iron yoke (3) is built in, and one end of the iron yoke (3) is arranged in the inner ring of the coil bobbin (11). 2 . The magnetron pulling single crystal superconducting magnet device according to claim 1 , wherein the built-in iron yoke ( 3 ) is also a ring-shaped structure. 3 . 3. A kind of magnetron pulling single crystal superconducting magnet device according to claim 1, is characterized in that, also comprises: an upper top plate (1) of a magnetic shielding iron yoke, wherein the upper top plate (1) of the magnetic shielding iron yoke is located above the coil bobbin (11); a magnetic shielding iron yoke lower bottom plate (4), the magnetic shielding iron yoke lower bottom plate (4) being located below the coil bobbin (11); A Dewar inner cylinder (2), the Dewar inner cylinder (2) is located inside the coil bobbin (11), and the upper and lower ends of the Dewar inner cylinder (2) are respectively connected to the magnetic shielding iron yoke The top plate (1) is connected with the inner end of the lower bottom plate (4) of the magnetic shielding iron yoke; Magnetic shielding iron yoke outer cylinder (5), the magnetic shielding iron yoke outer cylinder (5) is located outside the coil bobbin (11), and the upper and lower ends of the magnetic shielding iron yoke outer cylinder (5) are respectively connected to the The upper top plate (1) of the magnetic shielding iron yoke is connected to the outer end of the lower bottom plate (4) of the magnetic shielding iron yoke. 4. A magnetron pulling single crystal superconducting magnet device according to claim 3, characterized in that, further comprising: a cold shield (10), the cold shield (10) is sleeved on the outside of the coil (12) and the coil bobbin (11); G-M refrigerator (7); A cold shield cooling structure (8), the cold shield cooling structure (8) is connected to the cooling output end of the G-M refrigerator (7), and the cold shield cooling structure (8) is also connected to the cooling The screen (10) is in contact, so that the inside of the cold screen (10) maintains a low temperature environment. 5. A magnetron pulling single crystal superconducting magnet device according to claim 4, characterized in that, further comprising: A coil cooling structure (9), the coil cooling structure (9) is connected to the output end of the cold shield cooling structure (8), and the coil cooling structure (9) is also connected to the coil bobbin ( 11) Contact to keep the bobbin (11) and coil (12) cold. 6 . The magnetron pulling single crystal superconducting magnet device according to claim 5 , wherein the number of the coil bobbins ( 11 ) is two, and the two bobbins ( 11 ) are arranged opposite to each other; 7 . Also includes: A cooling conductor connection structure (13), the cooling conductor connection structure (13) is connected between the two coil bobbins (11), and the coil cooling conductor structure (9) is connected with the cooling conductor connection structure (13) contact, so that the two coil bobbins (11) and the coil (12) are in a low temperature state. 7. A magnetron pulling single crystal superconducting magnet device according to claim 5, characterized in that, the cold shield conductive cooling structure (8) comprises: a primary cold head, the primary cold head is connected to the refrigeration output end of the G-M refrigerator (7); A cold shield and cold-conducting plate, the cold-shield and cold-conducting plate is arranged outside the first-stage cold head, and the cold-shield and cold-conducting plate is in contact with the cold-shield (10). 8. A magnetron pulling single crystal superconducting magnet device according to claim 7, wherein the coil cooling structure (9) comprises: a secondary cold head, the secondary cold head is connected to the output end of the primary cold head; A coil cold-conducting plate is provided outside the secondary cold head, and the coil cold-conducting plate is in contact with the coil bobbin (11). 9. A magnetron pulling single crystal superconducting magnet device according to claim 5, characterized in that, further comprising: A Dewar protruding part (6), the Dewar protruding part (6) is arranged on the outer side surface of the magnetic shielding iron yoke outer cylinder (5), and the G-M refrigerator (7) is arranged on the Dewar On the outer side of the dewar raised part (6), the cold shield cooling structure (8) and the coil cooling structure (9) are both arranged inside the dewar raised part (6). 10. A magnetron pulling single crystal superconducting magnet device according to claim 9, characterized in that, further comprising: A vacuum port (14), the vacuum port (14) is arranged on the outer side of the Dewar protruding part (6), and the vacuum port (14) is used for cooperating with a vacuum pumping device to make the Dewar protrude Part (6) and the space enclosed by the magnetic shielding iron yoke upper top plate (1), the magnetic shielding iron yoke lower bottom plate (4), the inner Dewar cylinder (2) and the magnetic shielding iron yoke outer cylinder (5) are drawn from the inside. vacuum.

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