CN114578506B - Target mirror adjusting device and method and straightness measuring device - Google Patents

Abstract

The invention discloses a target mirror adjusting device, an adjusting method and a straightness measuring device, wherein the target mirror adjusting device comprises two target mirrors and an adjusting module, the adjusting module comprises an installation part arranged on a base, a movable part rotationally connected with the base and an adjusting mechanism, the adjusting mechanism comprises a base and an adjusting screw rod, and a first thread section and a second thread section which have different thread pitches are arranged on the adjusting screw rod at intervals; the two target mirrors are respectively arranged on the mounting part and the movable part, one side of the movable part is provided with a connecting rod, one end of the connecting rod is connected with the second thread section, the second end of the connecting rod is movably and rotatably connected with the movable part, and the first thread section is in threaded connection with the base. The adjusting screw rod is rotated, and the movable part rotates a fine adjusting angle relative to the mounting part. The invention can enlarge the adjusting range, is beneficial to improving the adjusting precision, is convenient for debugging personnel to operate, and improves the measuring precision of the straightness measuring device.

Description

Target mirror adjusting device and adjusting method and straightness measuring device

technical field

The invention relates to the technical field of straightness measurement, in particular to a target mirror adjustment device, an adjustment method and a straightness measurement device.

Background technique

With the development of manufacturing technology and precision motion technology, people have higher and higher requirements for the straightness of motion machines and machine tools. Generally, a Wollaston prism is used to test the straightness of the machine by optical measurement. A Wollaston prism is an optical device that produces two linearly polarized light beams separated by a certain angle and vibrating perpendicular to each other.

In the prior art, a straightness measuring device using a Wollaston prism is shown in Figures 1 and 2 of the description, including a laser module 1 , a Wollaston prism 2 , and two target mirrors 3 . After the laser light emitted by the laser module 1 enters the Wollaston prism 2, it is divided into two linearly polarized lights 21 that are separated from each other and whose vibration directions are perpendicular to each other. The two linearly polarized lights enter the first target mirror and the second target respectively. The target mirror, wherein the separation angle between the two linearly polarized beams of the Wollaston prism is B, and the included angle between the reflective surfaces of the two target mirrors is A (the acute angle part).

In order to accurately measure the straightness of the moving machine or machine tool, the angle A between the first target mirror and the second target mirror needs to be adjusted so that it is substantially equal to the separation angle B of the Wollaston prism. , so as to ensure that the light rays entering the two target mirrors can return to the Wollaston prism in the original optical path. We call the current real angle between the two target mirrors the actual angle between the two target mirrors.

Due to the fact that the actual included angle A and the separation angle B often have a certain error during the installation process of the first target mirror and the second target mirror, at this time, people usually install the first target mirror or the second target target. Add a precision feeler gauge or a trim washer under the mirror to adjust the actual angle between the first target mirror and the second target mirror until the actual angle A between the two target mirrors and the separation angle B are basically equal and meet the design requirements. However, this adjustment method has the following technical defects: due to its limited adjustment range, it is only suitable for use when the error is not large, and it takes a lot of debugging time, and the experience of the debugging personnel is relatively high. However, once the error is large, or it is necessary to replace different models of Wollaston prisms with different separation angles, the use of the above method will be limited, and even the first target mirror and the second target mirror need to be reinstalled and added. Debugging is time-consuming and labor-intensive.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a target mirror adjustment device and an adjustment method in order to solve the problems of limited adjustment range, inconvenient debugging, and high requirements for debugging personnel in the existing straightness measuring device using Wollaston prism and straightness measuring device, which can significantly increase the adjustment range, and at the same time help to improve the adjustment accuracy, facilitate the operation of debugging personnel, and improve the measuring accuracy of the straightness measuring device.

In order to achieve the above object, the present invention adopts the following technical solutions:

A target target mirror adjustment device, comprising two target target mirrors, an adjustment module for adjusting the included angle of the two target target mirrors, the adjustment module includes an installation part, and a movable part spaced from the installation part. and an adjustment mechanism, the adjustment mechanism includes a base and an adjustment screw, and the adjustment screw is provided with a first thread segment and a second thread segment at intervals; wherein, the two target mirrors are respectively arranged on the mounting portion and on the movable part, the installation part is arranged on the base, the movable part is rotatably connected with the base, and the side of the movable part away from the installation part is provided with a connecting rod, The first end of the connecting rod is threadedly connected with the second threaded section, the second end of the connecting rod and the movable part form a movable rotational connection through a connecting shaft, and the first threaded section is connected with the The base is threadedly connected; the pitches of the first thread segment and the second thread segment are not equal.

It can be understood that there should be an included angle substantially matching the separation angle of the Wollaston prism between the two target mirrors, and the function of the present invention is to finely adjust the included angle between the two target mirrors so that The included angle completely matches the separation angle of the Wollaston prism, and is suitable for debugging after replacing the new Wollaston prism.

Specifically, when the angle between the two target mirrors needs to be adjusted, we can rotate the adjustment screw n turns. Since the first thread segment of the adjustment screw is threadedly connected to the base, the adjustment screw can move axially relative to the fixed base. n _* p1 (p1 is the pitch of the first thread segment). At the same time, the “non-rotating” connecting rod rotates in the opposite direction relative to the second thread segment of the adjusting screw, and then moves in the opposite direction relative to the adjusting screw—n _* p2 (p2 is the pitch of the second thread segment) . That is, the end of the connecting rod away from the movable part forms a moving distance of n _* p1-n _* p2 relative to the base, and then the connecting rod drives the movable part to rotate an adjustment angle through the connecting shaft.

We know that the specifications of the thread and the corresponding thread pitch and other parameters have national standards, and we cannot set them arbitrarily as needed. In the present invention, the first thread segment and the second thread segment with different pitches are arranged on the adjusting screw, so that the end of the connecting rod away from the movable portion can be raised and lowered by a "difference", which is not only convenient for adjustment, but also beneficial to improve the adjustment accuracy.

Of course, we should make p1 and p2 as close as possible to minimize the axial adjustment distance corresponding to the unit rotation of the adjustment screw, thereby improving the adjustment accuracy.

Preferably, the first end of the connecting rod is a screw sleeve threadedly connected with the second thread segment, the second end of the connecting rod is provided with a sliding hole; one side of the movable part is provided with a connecting protrusion; The connecting protrusion is rotatably connected with the connecting shaft; the connecting shaft is partially arranged in the sliding hole so as to form a movable rotating connection between the second end of the connecting rod and the connecting protrusion.

In the present invention, a movable rotational connection is formed between the other end of the connecting rod and the movable part through the connecting shaft. Specifically, we can set a sliding hole in the connecting rod, and the connecting shaft is set on the connecting rod and the movable part. The shaft part is movably arranged in the sliding hole. The "movement is provided in the sliding hole" here means that the connecting shaft can slide (move) in the sliding hole along the length direction of the sliding hole. Since the connecting shaft can slide (move) along the length direction of the sliding hole in the sliding hole, and can follow the connecting rod to move vertically, and because the movable part and the connecting shaft are connected in rotation, when the connecting shaft moves, it will cause the movement of the connecting shaft to move. Therefore, a movable rotational connection is formed between the other end of the connecting rod and the movable part at this time. The design of the sliding hole can facilitate the free movement of the connecting shaft in the sliding hole along the direction of the sliding hole, so as to avoid being hindered when the movable part rotates.

Since the first end of the connecting rod is threadedly connected with the second threaded segment through a screw sleeve, it is beneficial to form a good threaded fit between the two.

In addition, since the connecting shaft is arranged on the connecting protrusion on one side of the movable part, and the connecting shaft passes through the sliding hole at the second end of the connecting rod, that is to say, the connecting shaft can move in the sliding hole as well as in the sliding hole. Rotate, so that a movable rotational connection is formed between the second end of the connecting rod and the connecting protrusion.

Preferably, a separation groove is arranged in the middle of the connecting protrusion, and the separation groove separates the connecting protrusion into a first connecting protrusion and a second connecting protrusion, and the second end of the connecting rod is located in the separation In the groove, the connecting shaft includes two first cylindrical sections and a polygonal assembly section located in the separation groove; the two first cylindrical sections are arranged on both sides of the assembly section, and are respectively rotatably connected to the The first connecting protrusion and the second connecting protrusion; the assembling section is movably located in the sliding hole, so that the second end of the connecting rod and the movable part can form a movable part through the connecting shaft. Mobile rotary connection.

Since there is a separation groove in the middle of the connecting protrusion, the connecting protrusion can be evenly divided into the first connecting protrusion and the second connecting protrusion. At this time, the second end of the connecting rod is located in the middle separation groove, and the connecting shaft It includes two first cylindrical sections rotatably connected with the first connecting protrusion and the second connecting protrusion, so that the adjusting screw can drive the movable part to rotate evenly through the connecting rod, so as to avoid jamming.

In particular, the connecting shaft also includes a polygonal assembly section in the middle, so that the connecting shaft can only move in the sliding hole but cannot rotate relative to it, which is beneficial to ensure its precise positioning.

Preferably, the assembling segment includes two sliding surfaces parallel to each other, and the height dimension between the two sliding surfaces of the assembling segment forms a clearance fit with the height dimension of the sliding hole.

Since the assembling section includes two sliding surfaces parallel to each other, and the height dimension between the two sliding surfaces forms a clearance fit with the height dimension of the sliding hole, the convenient assembly of the assembling section and the sliding hole can be ensured, and the The assembly segment slides smoothly in the sliding hole, thereby avoiding relative rotation.

Preferably, the mounting part and the upper side of the movable part are respectively provided with V-shaped grooves, the two target mirrors are respectively arranged in the corresponding V-shaped grooves, and the bottoms of the two V-shaped grooves are provided with leakage glue groove.

The V-groove enables automatic centering of the mounting and movable parts. Since the mounting part and the movable part are bonded in the V-shaped groove by glue, the excess and extruded glue can flow down into the leaking groove to ensure that the mounting part and the movable part are in the V-shaped groove. Precise and reliable bonding positioning.

Preferably, the lower part of the movable part is rotatably connected with the base through a rotating shaft.

Since the lower part of the movable part is rotatably connected to the base through the rotating shaft, it is beneficial to maximize the turning radius of the target mirror on the upper part of the movable part, and thus to adjust the angle between the two target mirrors.

Preferably, the movable part is provided with a clamping slot; the rotating shaft includes a clamping part and a second cylindrical section, and the second cylindrical section and the clamping part are fixedly connected; the clamping part is arranged on the clamping part. In the clamping slot, the rotating shaft is rotatably connected to the base through the second cylindrical section, and the rotating shaft is fixedly connected to the movable part through the clamping part.

Or, the movable part is provided with a clamping slot; the rotating shaft includes a clamping part and two second cylindrical segments, and the two second cylindrical segments are arranged on both sides of the clamping part and are respectively connected in rotation In the base, the clamping part is arranged in the clamping slot and is fixedly connected with the movable part.

In the present invention, the movable part is provided with a clamping groove, and the rotating shaft includes a clamping part arranged in the clamping groove, and the clamping part and the rotating shaft are fixedly connected; The movable part forms a fixed connection and cannot rotate relative to it. At this time, the movable part forms a rotating connection with the base through the second cylindrical sections at both ends of the rotating shaft. On the basis of ensuring the smooth rotation of the movable part, the movable part is prevented from moving along the axial direction of the rotating shaft. displacement.

Preferably, the base is provided with an accommodating groove at the lower part of the side of the movable part, the connecting rod is located in the accommodating groove, and the adjusting screw is vertically threaded on the base above the accommodating groove. In the seat, the upper end of the adjusting screw protrudes from the base; the first thread segment and the second thread segment are spaced from top to bottom along the vertical direction.

Since the upper end of the adjusting screw sticks out of the base, it is convenient to rotate the adjusting screw. Of course, we can set a corresponding handle on the upper end of the adjustment screw to facilitate the rotation of the adjustment screw. The accommodating groove arranged at the lower part of the base facilitates the assembly and connection of the connecting rod and the adjusting screw rod, and at the same time facilitates the axial movement of the connecting rod on the adjusting screw rod.

Preferably, the pitch of the first thread segment is p1, the pitch of the second thread segment is p2, the linear distance between the connecting shaft and the center of the rotating shaft of the rotating shaft is L, and the adjusting screw rotates n times to set The rotation angle ΔA of the target mirror on the movable part is: ΔA =n(p1-p2)/(360*L).

We know that the purpose and function of the present invention is to fine-tune the installed target mirrors so that the included angle between the two target mirrors meets the requirements. That is to say, during installation, an initial angle has been formed between the two target mirrors.

When the adjusting screw rotates n times (the absolute value of n here can be less than 1), the axial displacement of the first thread segment is n*p1, the axial displacement of the second thread segment is n*p2, the difference between the two The value n (p1-p2) is the axial movement distance of the connecting rod connected with the second threaded segment. When the linear distance between the connecting shaft and the center of the rotating shaft of the rotating shaft of the movable part is L, the movable part is relatively opposite to the mounting part, and The rotation angle ΔA of the target mirror installed on the movable part relative to the target mirror installed on the installation part is n(p1-p2)/(360*L), where p1, p2 and L are known data , we can easily control the rotation angle of the target mirror on the movable part by controlling the rotation number n of the adjusting screw. Specifically, we can set an axial scale on the adjusting screw to conveniently control the number of turns.

之间。Preferably, a is the length of the sliding hole, and the adjustment range of the angle between the two target mirrors is 0 to

between.

It can be understood that when the adjusting screw drives the connecting shaft in the sliding hole to move up and down, and moves in the sliding hole, the length of the sliding hole defines the sliding distance of the connecting shaft, which in turn limits the moving distance of the connecting shaft up and down. The rotation angle of the movable part and the adjustment range of the included angle between the two target mirrors are determined.

，因此，两个目标靶镜的夹角的调节范围在0至

之间，也就是说，我们可根据调节需求，合理地设置滑动孔的长度，以使两个目标靶镜的夹角的调节范围满足实际需求。When the connecting shaft forms the maximum sliding distance a in the sliding hole, the rotation angle of the movable part is

, therefore, the adjustment range of the included angle between the two target mirrors is from 0 to

In between, that is to say, we can reasonably set the length of the sliding hole according to the adjustment requirements, so that the adjustment range of the included angle between the two target mirrors can meet the actual requirements.

A method for adjusting a target mirror adjusting device, comprising the following steps:

a. Assemble the two target mirrors on the mounting part and the movable part side by side, the initial included angle of the two target mirrors is W0, and the separation angle of the Wollaston prism corresponding to the two target mirrors is B, the allowable deviation between the actual angle between the two target mirrors and the separation angle B is ±δW;

，直至B –δW≤W0+α≤B +δW，即可停止目标靶镜调节，其中，L为所述连接轴与所述转动轴转轴中心之间的直线距离为。b. Rotate the adjustment screw, the adjustment screw has a vertical displacement h2 relative to the base, and the connecting rod has a vertical displacement h1 relative to the adjustment screw. At this time, the connecting rod is relative to the base and the base. The movable part has a vertical displacement h1-h2, and then drives the movable part to rotate an adjustment angle α relative to the installation part, and α=

, until B −δW≤W0+α≤B+δW, the adjustment of the target mirror can be stopped, where L is the linear distance between the connecting shaft and the center of the rotating shaft of the rotating shaft.

We know that for the straightness measuring device using Wollaston prism, the angle A between the two target mirrors needs to be equal to the separation angle B of the Wollaston prism, that is to say, the best solution is A =B, in actual assembly, there is usually a certain error between the initial angle W0 between the two assembled target mirrors and the separation angle B of the corresponding Wollaston prism. For this reason, there is an allowable deviation ±δW between the included angle of the two target mirrors and the separation angle B, that is, as long as the deviation between the included angle of the two target mirrors and the separation angle B is between –δW and + Within the range between δW, all meet the design requirements and can be used normally.

To this end, we use the above-mentioned target mirror adjustment device to adjust one of the target mirrors, so that the error between the actual angle between the two target mirrors and the separation angle of the Wollaston prism meets the design requirements .

It should be noted that the so-called initial included angle W0 of the two target mirrors refers to the initial included angle formed after the two target mirrors are assembled on the mounting portion and the movable portion respectively. When the adjustment angle of one of the target mirrors through the target mirror adjustment device is α, the sum of the two is W0+α is the actual angle formed between the two target mirrors. It can be understood that the deviation between the actual included angle and the separation angle B should be in the range between -δW to +δW.

It should be noted that, in actual work, we do not need to accurately measure the initial angle W0 of the two target mirrors, because when we adjust the adjustment angle of one of the target mirrors, the angle between the two target mirrors and When the error between the separation angles of the Wollaston prism meets the design requirements, it can be ensured that the light entering the two target mirrors can return to the Wollaston prism in the original optical path. If the original optical path returns to the Wollaston prism, it means that the error between the included angle of the two target mirrors and the separation angle of the Wollaston prism meets the design requirements.

A straightness measuring device includes a laser module, a Wollaston prism, and any of the above-mentioned adjusting devices for a target mirror.

The straightness measurement device of the present invention includes a laser module, a Wollaston prism, and the above-mentioned target lens adjustment device, which can not only increase the adjustment range, but also improve the adjustment accuracy, facilitate the operation of the debugging personnel, and further Improve the measurement accuracy of the straightness measurement device.

Therefore, the present invention has the following beneficial effects: the adjustment range can be significantly increased, and at the same time, the adjustment accuracy is improved, the operation of the debugging personnel is convenient, and the measurement accuracy of the straightness measuring device is improved.

Description of drawings

Fig. 1 is a kind of structural representation of the straightness measuring device using Wollaston prism in the prior art;

2 is a schematic diagram showing the light transmission mode between the Wollaston prism and two target mirrors;

Fig. 3 is a kind of plane sectional view of a kind of target mirror adjustment device of the specific embodiment of the present invention;

Fig. 4 is a kind of three-dimensional cross-sectional view of a kind of target target mirror adjustment device of the specific embodiment of the present invention;

5 is a schematic structural diagram of a connecting shaft according to a specific embodiment of the present invention;

Fig. 6 is a kind of structural schematic diagram of the movable part of the specific embodiment of the present invention;

7 is a schematic diagram of a connection structure of a movable part and a rotating shaft according to a specific embodiment of the present invention;

8 is a schematic structural diagram of a rotating shaft according to a specific embodiment of the present invention;

9 is another structural schematic diagram of a connecting shaft according to a specific embodiment of the present invention;

10 is a schematic structural diagram of a base according to a specific embodiment of the present invention;

FIG. 11 is a schematic structural diagram of a connecting rod according to a specific embodiment of the present invention.

In the figure: 1. Laser module 2, Wollaston prism 21, linearly polarized light 3, target mirror 31, first target mirror 32, second target mirror 4, mounting portion 41, V-shaped groove 42, Leakage groove 43, rotating shaft

431, clamping part 432, second cylindrical segment 5, movable part 51, connecting shaft 511, first cylindrical segment 512, assembly segment 52, connecting protrusion 5201, first connecting protrusion 5202, second connecting protrusion 521, Separation groove 53, clamping groove 6, base 61, accommodating groove 7, adjusting screw 71, screw sleeve 72, sliding hole 73, adjusting handle 74, first thread segment 75, second thread segment 8, connecting rod 4310, body 4311 , key 531, keyway.

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, each embodiment of the present invention will be described in detail below with reference to the accompanying drawings. However, those of ordinary skill in the art can appreciate that, in the various embodiments of the present invention, many technical details are set forth in order for the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the claims of the present application can be realized.

Unless the context requires otherwise, throughout the specification and claims, the word "comprising" and variations thereof, such as "comprising" and "having", should be construed in an open, inclusive sense, i.e., should be interpreted as "including, but not limited to".

Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of "in one embodiment" or "in an embodiment" in various places throughout the specification are not necessarily all referring to the same embodiment. Additionally, the particular features, structures or characteristics may be combined in any manner in one or more embodiments.

As used in this specification and the appended claims, the singular forms "a" and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the content clearly dictates otherwise.

Meanwhile, in the following description, in order to clearly show the structure and working mode of the present invention, many directional words will be used for description, but "front", "rear", "left", "right", "outer", Words such as "inward", "outward", "inward", "up" and "down" should be understood as convenient terms and should not be understood as limiting words.

As shown in FIG. 3-FIG. 11, the present embodiment discloses a target target mirror adjustment device, including two target target mirrors: a first target target mirror 31 and a second target target mirror 32, which are used to adjust the two target mirrors. The adjustment module for the included angle of the target mirror, the adjustment module includes an installation part 4, a movable part 5 and an adjustment mechanism arranged at intervals from the installation part 4, and the adjustment mechanism includes a base 6 and an adjustment screw 7, so the The adjusting screw is provided with a first thread segment 74 and a second thread segment 75 at intervals, wherein the pitch of the first thread segment is p1, and the pitch of the second thread segment is p2; the first target mirror 31, the second target mirror 32 are respectively arranged on the installation part 4 and the movable part 5, the installation part 4 is arranged on the base 6, the movable part 5 is rotatably connected with the base 6, and is connected with the installation part 4. A connecting rod 8 is provided on the side of the movable portion 5 away from The part 5 forms a movable rotational connection through the connecting shaft 51 , the first thread segment 74 is threadedly connected with the base 6 ; the pitches of the first thread segment 74 and the second thread segment 75 are not equal.

It can be understood that there should be an included angle substantially matching the separation angle of the Wollaston prism between the two target mirrors. The function of the target mirror adjustment device in this embodiment is to finely adjust the distance between the two target mirrors. The included angle between the two target mirrors is completely matched with the separation angle of the Wollaston prism, and it can be applied to the debugging after replacing the new Wollaston prism, so that the two targets can be adjusted. The angle between the mirrors matches the separation angle of the new Wollaston prism again.

Specifically, when it is necessary to adjust the included angle of the two target mirrors, we can rotate the adjustment screw n turns. Since the first thread segment of the adjustment screw is threadedly connected to the base, the adjustment screw can move axially relative to the fixed base. n _* p1. At the same time, the "non-rotating" connecting rod rotates in the opposite direction relative to the second thread segment of the adjusting screw, thereby causing the connecting rod to move in the opposite axial direction relative to the adjusting screw -n _* p2. That is to say, the connecting rod 8 will eventually move away from the movable part 5 to form a moving distance of n _* p1-n _* p2 relative to the base 6, so that the connecting rod 8 drives the movable part 5 to rotate by an adjustment angle through the connecting shaft 51.

We know that the specifications of the thread and the corresponding thread pitch and other parameters have national standards, and we cannot set them arbitrarily as needed. In this embodiment, the adjusting screw 7 is provided with a first thread segment 74 and a second thread segment 75 with different pitches, so that the end of the connecting rod 8 away from the movable portion 5 can be raised and lowered by a "difference", which is not only convenient for adjustment, but also beneficial to Improve adjustment accuracy.

Of course, we should make p1 and p2 as close as possible to minimize the axial adjustment distance corresponding to the unit rotation of the adjustment screw, thereby improving the adjustment accuracy. For example, when the nominal diameter of the adjusting screw is M10, the first thread segment may use a fine thread with a pitch of 1.25, and the second thread segment may use a fine thread with a thread pitch of 1.0.

The first end of the connecting rod 8 is a screw sleeve 71 that is threadedly connected with the second threaded section 75, so as to facilitate the formation of a good threaded fit between the two; the second end of the connecting rod 8 is provided with a sliding hole; the A connecting protrusion 52 is provided on one side of the movable part 5 ; the connecting protrusion 52 is rotatably connected with the connecting shaft 51 ; the connecting shaft 51 is partially movably arranged in the sliding hole. In this embodiment, the length of the second thread segment 75 is greater than the length of the thread segment on the screw sleeve 71 to ensure the axial (vertical) stroke range of the screw sleeve 71 . The length of the thread segment corresponding to the first thread segment 74 in the base 6 is greater than the length of the first thread segment to ensure the axial (vertical) stroke range of the adjusting screw 7 .

When the second threaded segment 75 rotates, the connecting rod 8 is driven to move vertically relative to the base 6, and the connecting shaft 51 is driven by the connecting rod 8 to also move vertically relative to the base 6; At the same time of displacement, the connecting rod 51 drives the movable part 5 to rotate relative to the base 6 , and a movable rotational connection is formed between the second end of the connecting rod 8 and the connecting protrusion 52 .

In this embodiment, the second end of the connecting rod 8 is provided with a sliding hole 72; The vertical movement can also move in the sliding hole 72. At the same time, the connecting shaft 51 drives the connecting protrusion 52 to rotate relative to the base 6, so that a movable connection is formed between the second end of the connecting rod 8 and the connecting protrusion 52. rotation connection.

Further, a separating groove 521 is provided in the middle of the connecting protrusion 52 , and the separating groove 521 separates the connecting protrusion 52 into a first connecting protrusion 5201 and a second connecting protrusion 5202 , and the second end of the connecting rod 8 is located in the separating groove 521 . As shown in FIG. 5 , the connecting shaft 51 includes two first cylindrical sections 511 and a polygonal assembly section 512 located in the separation groove; the two first cylindrical sections 511 are respectively disposed on both sides of the assembly section 512 and rotate respectively Connect the first connecting protrusion 5201 and the second connecting protrusion 5202; the assembling section 512 is movably arranged in the sliding hole 72, so that the second end of the connecting rod 8 and the movable part 5 can form a movable rotation through the connecting shaft 51 connect. The width of the assembly section 512 along the length direction of the sliding hole 72 is smaller than the length of the sliding hole.

Since the connecting protrusion 52 is provided with a separation groove 521 in the middle, the connecting protrusion 52 can be evenly divided into the first connecting protrusion 5201 and the second connecting protrusion 5202. At this time, the second end of the connecting rod 8 is located in the middle separation The connecting shaft 51 includes two first cylindrical sections rotatably connected with the first connecting protrusion 5201 and the second connecting protrusion 5202, so that the adjusting screw 7 can evenly drive the movable part 5 to rotate through the connecting rod 8 , to avoid stuck phenomenon.

In particular, the connecting shaft 51 also includes a polygonal assembly section 512 in the middle, so that the connecting shaft 51 can only move in the sliding hole 72 but cannot rotate relative to it, which is beneficial to ensure its accurate positioning. That is to say, at this time, the movable portion 5 is rotated relative to the base 6 through the two first cylindrical segments 511 .

In this embodiment, the assembling segment 512 is a regular quadrangular prism, thus including two upper and lower sliding surfaces parallel to each other, and the height dimension between the two sliding surfaces of the assembling segment and the height dimension of the sliding hole form a clearance fit to ensure The assembly section and the sliding hole are conveniently assembled, and the assembly section can slide smoothly in the sliding hole, thereby avoiding relative rotation. It should be noted that the assembly section 512 is a regular quadrangular prism, which is only for illustration, and the present invention is not limited thereto. In specific use, it is only necessary to ensure that the assembly section 512 is a multi-deformation assembly section and includes at least two sliding surfaces parallel to each other.

As shown in FIG. 9 , in an optional embodiment, a plurality of circumferential grooves may be provided on the polygonal assembly section 512, and corresponding to the circumferential grooves, a plurality of silicone rings are provided, which are clamped between the polygonal assembly section 512 and the sliding hole 72; thus It can ensure that the connecting shaft 51 does not move up and down and is easy to move in parallel.

In another optional embodiment, several small grooves can be opened in the polygonal assembly section 512, and a number of silicone pads can be correspondingly arranged; the silicone pads are clamped between the polygonal assembly section 512 and the sliding hole 72; in this way, the connecting shaft 51 can be ensured. No up-and-down movement and easy parallel movement. As shown in FIG. 3 and FIG. 6 , in this embodiment, V-shaped grooves 41 are respectively provided on the upper sides of the mounting portion 4 and the movable portion 5 , and the first target mirror 31 and the second target mirror 32 are respectively arranged in the corresponding V into the groove and fixed by glue. In addition, we can also set leaking grooves 42 at the bottom of the two V-shaped grooves respectively.

The V-shaped groove can realize automatic centering of the mounting part 4 and the movable part 5 . Since the installation part 4 and the movable part 5 are bonded in the V-shaped groove by glue, the excess and extruded glue can flow down into the glue leakage groove 42 to ensure that the installation part 4 and the movable part 5 are in the V-shaped groove. Precise and reliable bonding positioning in the V-groove.

Further, the lower part of the movable part 5 is rotatably connected with the base 6 through the rotating shaft 43 .

Since the lower part of the movable part 5 is rotatably connected to the base 6 through the rotating shaft 43, it is beneficial to increase the turning radius of the second target mirror 32 on the upper part of the movable part 5 as much as possible, which is beneficial to adjust the included angle between the two target mirrors .

Further, as shown in FIGS. 7 and 8 , the movable part 5 is provided with a clamping slot 53; the rotating shaft 43 includes a clamping part 431 and a second cylindrical section 432, and the second cylindrical section 432 and the clamping part 431 are fixedly connected; The clamping portion 431 is disposed in the clamping slot 53 , the rotating shaft 43 is connected to the base 6 by rotating through the second cylindrical section 432 , and the rotating shaft 43 is fixedly connected to the movable portion 5 through the clamping portion 431 .

In this embodiment, the rotating shaft 43 includes a securing portion 431 and two second cylindrical segments 432 ; the two second cylindrical segments 432 are respectively disposed on both sides of the securing portion 431 and respectively rotate the connection base 6 . Wherein, the securing portion 431 includes: a main body 4310 and a key 4311 arranged on the main body. Corresponding to the key 4311, the card slot 53 includes a body accommodating groove for accommodating the body 4310, and a key groove 531 provided on the body accommodating groove. The securing portion 431 is disposed in the securing slot 53 , and is fixedly connected to the movable portion 5 through a key 4311 (which is snapped into the key slot 531 ). That is, in this solution, the securing portion 431 is fixedly connected with the movable portion 5 , the two second cylindrical segments 432 are rotatably connected with the base 6 , and then the movable portion 5 is rotatably connected with the base 6 . It should be noted that the body 4310 and the key 4311 may be integrally formed, or may be connected in an assembled form.

In the present invention, through the cooperation of the clamping slot 53 and the clamping part 431 , it is convenient for the rotating shaft 43 to form a fixed connection with the movable part 5 and cannot rotate relative to each other. 6. A rotational connection is formed, and on the basis of ensuring the smooth rotation of the movable portion 5, the axial displacement of the movable portion 5 along the rotating shaft 43 is avoided.

As shown in FIG. 3 , the base 6 is provided with an accommodating groove 61 at the lower part of the side of the movable part 5 , the connecting rod 8 is located in the accommodating groove 61 , and the adjusting screw 7 is vertically threaded in the base 6 above the accommodating groove 61 , The upper end of the adjusting screw 7 protrudes from the base 6; the first thread segment 74 and the second thread segment 75 are spaced from top to bottom along the vertical direction.

In another optional embodiment, one end of the non-connecting protrusion 52 of the movable portion 5 is provided with a first connecting portion and a second connecting portion, and both the first connecting portion and the second connecting portion are provided with card slots, and the two The positions of the clamping slots correspond to each other; the rotating shaft 43 includes: two clamping parts and a second cylindrical segment; the two clamping parts are respectively arranged on both sides of the second cylindrical segment, and are respectively arranged at the first connecting part and the second connecting part inside the two card slots in the upper part. The second cylindrical segment is rotatably connected to the base 6 . The base 6 is partially located between the first connection part and the second connection part. Wherein, each clamping part includes: a main body and a key arranged on the main body. Corresponding to the key, the card slot includes a body accommodating groove for accommodating the body, and a key groove arranged on the body accommodating groove. Each clamping part is arranged in a corresponding clamping slot, and is fixedly connected with the movable part 5 through a key.

Since the upper end of the adjusting screw 7 protrudes from the base, it is convenient to rotate the adjusting screw. Of course, we can set a corresponding adjustment handle 73 on the upper end of the adjustment screw to facilitate the rotation of the adjustment screw. The accommodating groove 61 provided at the lower part of the base facilitates the assembly and connection of the screw sleeve 71 of the connecting rod 8 and the adjusting screw 7 , and also facilitates the axial movement of the connecting rod 8 on the adjusting screw 7 .

The base 6 and the mounting portion 4 may be integrally formed, or may be connected in a detachable manner.

Further, the pitch of the first thread segment is p1, the pitch of the second thread segment is p2, the linear distance between the center of the rotating shaft of the connecting shaft 51 and the rotating shaft 43 is L, the adjusting screw 7 rotates n times, and is arranged on the movable part. The rotation angle ΔA of the second target mirror 32 on 5 is: ΔA =n(p1-p2)/(360*L), where n is a rational number. It should be noted that the absolute value of n here may be less than 1. It can be specified that clockwise or counterclockwise rotation is positive, when it rotates positively, n is positive; when it rotates negatively, n is negative.

The purpose and function of this embodiment is to fine-tune the installed target mirrors so that the included angle between the two target mirrors meets the requirements. That is to say, at the time of installation and before adjustment, an initial included angle has been formed between the two target mirrors.

When the adjusting screw rotates n times (the n here can also be less than 1), the axial displacement of the first thread segment 74 is n*p1, the axial displacement of the second thread segment 75 is n*p2, and the difference between the two is n*p2. The value n (p1-p2) is the axial movement distance (ie the vertical movement distance) of the connecting rod 8 connected to the second threaded segment 75 and the connecting shaft 51. When the distance is L, the rotation angle of the movable part 5 relative to the installation part 4 (that is, the rotation angle of the second target mirror 32 installed on the movable part 5 relative to the first target mirror 31 installed on the installation part 4) Δ A is n(p1-p2)/(360*L), where p1, p2, and L are known data. We can easily control the second target on the movable part 5 by controlling the number of turns n of the adjusting screw 7 The rotation angle of the target mirror 32 .

Specifically, we can set an axial scale on the adjusting screw to conveniently control the number of turns. Alternatively, obtain in advance the rotation angle of the second target mirror 32 in one rotation, and set it on the adjustment handle accordingly, and the rotation angle corresponding to each moment in the process of one rotation can be obtained through the scale on the handle (that is, one rotation During the process, the rotation angle of the second target mirror 32 at each moment).

之间。Further, a is the length of the sliding hole—that is, the movable distance of the connecting shaft in the sliding hole, then: the adjustment range of the included angle of the two target mirrors is 0 to

between.

It can be understood that the length of the sliding hole 72 defines the sliding distance of the connecting shaft 51 and thus determines the rotation angle of the movable portion 5 and the adjustment range of the angle between the two target mirrors.

，因此，两个目标靶镜的夹角的调节范围在0至

之间，也就是说，我们可根据调节需求，合理地设置滑动孔的长度，以使两个目标靶镜的夹角的调节范围满足实际需求。When the connecting shaft forms a maximum sliding distance a in the sliding hole, the rotation angle of the movable part is

, therefore, the adjustment range of the angle between the two target mirrors is from 0 to

In between, that is to say, we can reasonably set the length of the sliding hole according to the adjustment requirements, so that the adjustment range of the angle between the two target mirrors can meet the actual requirements.

In another optional embodiment, the angle obtained in advance by one rotation of the adjusting screw 7 is (p1-p2)/(360*L), and the number of rotations is multiplied by the angle of one rotation to obtain the movable part 5 Angle of rotation.

This embodiment also discloses a method for adjusting a target mirror adjusting device, wherein the target target mirror adjusting device is as described above, and the separation angle of the Wollaston prisms corresponding to the two target target mirrors is B, and the connecting shaft The straight-line distance between 51 and the center of the rotating shaft of the rotating shaft 43 is L, including the following steps:

a. The two target mirrors are assembled side by side on the mounting part 4 and the movable part 5, the initial angle of the two target mirrors is W0, the actual angle of the two target mirrors and the separation angle B The allowable deviation between is ±δW;

，直至B –δW≤W0+α≤B +δW，即可停止目标靶镜调节。b. Rotate the adjustment screw, the adjustment screw 7 has a vertical displacement h2 relative to the base 6, the connecting rod 8 has a vertical displacement h1 relative to the adjustment screw 7, and the connecting rod 8 is vertical relative to the base 6 and the movable part 5. Displacement h1-h2, and then drives the movable part 5 to rotate an adjustment angle α (that is, the rotation angle of the second target mirror 32) relative to the installation part 4, and α=

, until B – δW≤W0+α≤B +δW, the target mirror adjustment can be stopped.

It should be noted that, in this embodiment, when p1 is greater than p2, when the adjusting screw 7 is vertically displaced relative to the base 6, the connecting rod 8 undergoes a reverse vertical displacement relative to the adjusting screw 7; when p1 is greater than p2, Then, when the adjusting screw 7 is vertically displaced relative to the base 6 , the connecting rod 8 is vertically displaced relative to the adjusting screw 7 in the same direction.

We know that for the straightness measuring device using Wollaston prism, the angle A between the two target mirrors needs to be equal to the separation angle B of the Wollaston prism, that is to say, the best solution is A =B, in actual assembly, there is usually a certain error between the actual angle W0 between the two assembled target mirrors and the separation angle B of the corresponding Wollaston prism. For this reason, there is an allowable deviation ±δW between the actual angle between the two target mirrors and the separation angle B, that is, as long as the deviation between the actual angle between the two target mirrors and the separation angle B is –δW Within the range between +δW, all meet the design requirements and can be used normally.

To this end, we use the above-mentioned target mirror adjustment device to adjust the second target mirror 32 arranged in the movable part 5, so that the actual included angle between the two target mirrors and the separation angle of the Wollaston prism are adjusted. The error between them meets the design requirements.

It should be noted that the so-called initial included angle W0 of the two target target mirrors refers to the initial included angle formed before adjustment after the two target target mirrors are assembled on the installation part and the movable part respectively. The separation angle B of the Ruston prism is determined. During installation, the goal is to make the initial included angle equal to B. In actual installation, there is often a certain gap, and the device for adjusting the target mirror of this embodiment needs to be used for fine adjustment. The adjustment angle of the second target mirror 32 by the target mirror adjustment device is α, and the sum W0+α of the two is the actual angle finally formed between the two target mirrors. It can be understood that the deviation between the actual included angle and the separation angle B should be in the range between -δW to +δW.

It should be noted that in actual work, we do not need to accurately measure the initial angle W0 of the two target mirrors. In fact, when we adjust the adjustment angle of one of the target mirrors to make the angle between the two target mirrors When the error between the separation angle and the Wollaston prism meets the design requirements, it can ensure that the light entering the two target mirrors can return to the Wollaston prism in the original optical path. If the light entering the two target mirrors If the original optical path can return to the Wollaston prism, it means that the error between the angle between the two target mirrors and the separation angle of the Wollaston prism meets the design requirements, and the adjustment of the target mirror can be stopped at this time.

This embodiment also discloses a straightness measurement device, which specifically includes a laser module, a Wollaston prism, and also includes a target mirror adjustment device as described above.

The straightness measurement device of the present invention includes a laser module, a Wollaston prism, and the above-mentioned target lens adjustment device, which can not only increase the adjustment range, but also improve the adjustment accuracy, facilitate the operation of the debugging personnel, and further Improve the measurement accuracy of the straightness measurement device.

Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention. The scope is determined by the scope of the appended claims.

Claims (12)

1. A target scope adjusting device is characterized by comprising two target scopes (3) and an adjusting module for adjusting the included angle of the two target scopes, wherein the adjusting module comprises an installation part (4), a movable part (5) and an adjusting mechanism, the movable part and the adjusting mechanism are arranged at intervals on the installation part (4), the adjusting mechanism comprises a base (6) and an adjusting screw rod (7), and a first thread section (74) and a second thread section (75) are arranged on the adjusting screw rod (7) at intervals; the two target speculums are respectively arranged on the installation part (4) and the movable part (5), the installation part (4) is arranged on the base (6), the movable part (5) is rotatably connected with the base (6), one side of the movable part (5) departing from the installation part (4) is provided with a connecting rod (8), the first end of the connecting rod (8) is in threaded connection with the second threaded section (75), the second end of the connecting rod (8) is in movable rotary connection with the movable part (5) through a connecting shaft (51), and the first threaded section (74) is in threaded connection with the base (6); the thread pitch of the first thread segments (74) and the second thread segments (75) are not equal.

2. The target scope adjusting device according to claim 1, wherein the first end of the connecting rod (8) is a threaded sleeve (71) in threaded connection with the second threaded section (75), and the second end of the connecting rod (8) is provided with a sliding hole (72); one side of the movable part (5) is provided with a connecting bulge (52); the connecting bulge (52) is rotationally connected with the connecting shaft (51); the connecting shaft (51) is partially arranged in the sliding hole in a moving mode.

3. The target scope adjusting device according to claim 2, characterized in that the second end of the connecting rod (8) is provided with a sliding hole (72), the connecting protrusion (52) is provided with a separating groove (521) in the middle, the separating groove (521) separates the connecting protrusion (52) into a first connecting protrusion (5201) and a second connecting protrusion (5202), the second end of the connecting rod (8) is located in the separating groove (521), and the connecting shaft (51) comprises two first cylindrical sections (511) and a polygonal assembling section (512) located in the separating groove (521); the two first cylindrical sections (511) are respectively arranged at two sides of the assembling section (512) and are respectively connected with the first connecting bulge (5201) and the second connecting bulge (5202) in a rotating way; the fitting section (512) is movably disposed in the sliding hole (72) on the second end of the connecting rod (8).

4. The target scope adjustment device according to claim 3, characterized in that the assembly section (512) comprises two mutually parallel sliding surfaces, the height dimension between the two sliding surfaces of the assembly section (512) forming a clearance fit with the height dimension of the sliding hole (72).

5. The target adjusting device of claim 1, wherein the upper sides of the mounting part (4) and the movable part (5) are respectively provided with a V-shaped groove, the two target mirrors (3) are respectively arranged in the corresponding V-shaped grooves, and the bottoms of the two V-shaped grooves are respectively provided with a glue leakage groove.

6. The adjustment device according to claim 2, characterized in that the lower part of the movable part (5) is rotatably connected to the base (6) by means of a rotation shaft (43).

7. The adjustment device for an objective lens according to claim 6, characterized in that the movable part (5) is provided with a slot (53); the rotating shaft (43) comprises a clamping part (431) and a second cylindrical section (432), and the second cylindrical section (432) is fixedly connected with the clamping part (431); the clamping portion (431) is arranged in the clamping groove (53), the rotating shaft (43) is rotatably connected with the base (6) through the second cylindrical section, and the rotating shaft (43) is fixedly connected with the movable portion (5) through the clamping portion (431).

8. The target scope adjusting device according to claim 1, wherein the base (6) is provided with a receiving groove (61) at the lower part of the side of the movable part (5), the connecting rod (8) is positioned in the receiving groove (61), the adjusting screw rod (7) is vertically screwed in the base (6) above the receiving groove (61), and the upper end of the adjusting screw rod (7) extends out of the base (6); the first thread sections (74) and the second thread sections (75) are arranged at intervals from top to bottom along the vertical direction.

9. The device for adjusting a target scope according to claim 6, wherein the first thread section (74) has a pitch p1, the second thread section (75) has a pitch p2, the linear distance between the connecting shaft (51) and the center of the rotating shaft (43) is L, the adjusting screw (7) rotates n turns, and the rotating angle A of the target scope disposed on the movable portion (5) is: Δ A = n (p1-p2)/(360 × L).

10. According toThe device for adjusting target scope of claim 9, wherein a is the length of the sliding hole (72), and the angle between the two target scopes is adjusted within the range of 0 to 0

In the meantime.

11. A method of adjusting an adjustment device for an object target as claimed in claim 6 or 7 or 9 or 10, characterized by the steps of:

a. assembling the two target mirrors on the installation part (4) and the movable part (5) side by side, wherein the initial included angle of the two target mirrors is W0, the separation angle of the Wollaston prism corresponding to the two target mirrors is B, and the allowable deviation between the actual included angle of the two target mirrors and B is +/-delta W;

b. rotating the adjusting screw rod (7), wherein the adjusting screw rod (7) vertically displaces h2 relative to the base (6), the connecting rod (8) vertically displaces h1 relative to the adjusting screw rod (7), at the moment, the connecting rod (8) vertically displaces h 1-h 2 relative to the base (6) and the movable part (5), then the movable part (5) is driven to rotate relative to the installation part (4) by an adjustment angle alpha, and alpha =

And stopping the adjustment of the target scope until W0-delta W is not less than W0+ alpha is not less than W0+ delta W, wherein L is the linear distance between the connecting shaft (51) and the rotating shaft center of the rotating shaft (43) and is L.

12. A straightness measuring apparatus comprising a laser module, a wollaston prism and further comprising an adjustment device for a target as claimed in any one of claims 1 to 10.

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