CN114577104B - Absolute Linear Displacement Sensor Based on Eddy Current Effect - Google Patents
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Abstract
Description
技术领域Technical Field
本发明属于精密测量传感器技术领域，具体涉及基于电涡流效应的绝对式直线位移传感器。The invention belongs to the technical field of precision measurement sensors, and in particular relates to an absolute linear displacement sensor based on eddy current effect.
背景技术Background Art
绝对式直线位移传感器具有无需寻找参考点，开机即可获取当前绝对位置，断电后绝对位置不丢失，测量误差不累积等优势，广泛应用于生产生活中。现阶段的绝对式直线位移传感器主要有光栅、磁栅和感应同步器等。光栅大多采用单轨绝对位置编码技术实现绝对式测量，即采用一条码道来排布绝对位置信息，在测量方向上依次布置所有码元以减少需要处理的信号源，但其依赖栅线超精密刻线来满足微小位移的分辨力要求且成本高昂。磁栅通过磁编码的形式获取绝对位置，但需进行多次比较，编码和解码方式都比较复杂。感应同步器常采用“粗机+精机”双通道结合的方式获取绝对位移值，粗通道用于粗略读数确定绝对位置，精通道用于精确读数确定测量精度，但增加级数、增加精度时会压缩各极间的距离，使制造工艺难以满足，造成尺寸偏差加大。Absolute linear displacement sensors have the advantages of not needing to find reference points, being able to obtain the current absolute position when powered on, not losing the absolute position after power failure, and not accumulating measurement errors, and are widely used in production and life. At present, the main absolute linear displacement sensors include gratings, magnetic gratings, and inductive synchronizers. Gratings mostly use single-track absolute position encoding technology to achieve absolute measurement, that is, a code channel is used to arrange the absolute position information, and all code elements are arranged in sequence in the measurement direction to reduce the signal source that needs to be processed, but it relies on ultra-precision grid lines to meet the resolution requirements of small displacements and is costly. Magnetic gratings obtain absolute position in the form of magnetic encoding, but multiple comparisons are required, and the encoding and decoding methods are relatively complicated. Inductive synchronizers often use a combination of "rough machine + fine machine" dual channels to obtain absolute displacement values. The coarse channel is used for rough readings to determine the absolute position, and the fine channel is used for precise readings to determine the measurement accuracy. However, when the number of levels and accuracy are increased, the distance between the poles will be compressed, making it difficult to meet the manufacturing process, resulting in increased dimensional deviations.
发明内容Summary of the invention
本发明的目的是提供一种基于电涡流效应的绝对式直线位移传感器，以实现高精度、高分辨力的绝对直线位移测量。The purpose of the present invention is to provide an absolute linear displacement sensor based on eddy current effect to achieve high-precision and high-resolution absolute linear displacement measurement.
本发明所述的第一种基于电涡流效应的绝对式直线位移传感器，包括定尺和动尺，动尺与定尺正对平行，且留有间隙；设定X方向为测量方向，平行于定尺且垂直于X方向为Y方向，垂直于定尺的方向为Z方向。The first absolute linear displacement sensor based on eddy current effect described in the present invention comprises a fixed scale and a movable scale, wherein the movable scale is parallel to the fixed scale with a gap therebetween; the X direction is set as the measuring direction, the direction parallel to the fixed scale and perpendicular to the X direction is the Y direction, and the direction perpendicular to the fixed scale is the Z direction.
所述定尺包括定尺基体以及嵌在该定尺基体上的相互绝缘的m个第一金属导体和n个第二金属导体，第一金属导体的形状和第二金属导体的形状均为中心对称图形。m个第一金属导体沿X方向等间隔排成第一行，形成第一涡流反射单元；n个第二金属导体沿X方向等间隔排成第二行，形成第二涡流反射单元；其中，m×W1＝n×W2，W1表示第一涡流反射单元的节距(也是相邻两个第一金属导体在X方向的中心距)，W2表示第二涡流反射单元的节距(也是相邻两个第二金属导体在X方向的中心距)，m、n互为质数。The fixed length includes a fixed length base and m first metal conductors and n second metal conductors insulated from each other embedded on the fixed length base, and the shapes of the first metal conductors and the second metal conductors are both centrally symmetrical figures. The m first metal conductors are arranged in a first row at equal intervals along the X direction to form a first eddy current reflection unit; the n second metal conductors are arranged in a second row at equal intervals along the X direction to form a second eddy current reflection unit; wherein, m×W 1 =n×W 2 , W 1 represents the pitch of the first eddy current reflection unit (also the center distance between two adjacent first metal conductors in the X direction), W 2 represents the pitch of the second eddy current reflection unit (also the center distance between two adjacent second metal conductors in the X direction), and m and n are prime numbers to each other.
所述动尺包括动尺基体以及布置在动尺基体上的两个第一传感单元和两个第二传感单元。第一传感单元包括第一平面矩形螺旋激励线圈和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第一感应线圈组，第一感应线圈组位于第一平面矩形螺旋激励线圈内，两个第一传感单元沿X方向间隔排列且在Z方向与第一导磁单元正对，两个第一传感单元在X方向的中心距为
两个第一平面矩形螺旋激励线圈首尾相接串联构成第一励磁单元，两个第二平面矩形螺旋激励线圈首尾相接串联构成第二励磁单元，第一励磁单元与第二励磁单元串联并通入交流激励电信号。当动尺相对定尺平行移动时，两个第一感应线圈组输出两路感应信号e1、e2，两个第二感应线圈组输出两路感应信号e3、e4，感应信号e1、e2、e3、e4经信号处理系统处理后得到动尺相对定尺的绝对直线位移值。Two first planar rectangular spiral excitation coils are connected end to end in series to form a first excitation unit, and two second planar rectangular spiral excitation coils are connected end to end in series to form a second excitation unit. The first excitation unit and the second excitation unit are connected in series and an AC excitation electric signal is passed. When the movable ruler moves parallel to the fixed ruler, the two first induction coil groups output two induction signals e 1 and e 2 , and the two second induction coil groups output two induction signals e 3 and e 4. After the induction signals e 1 , e 2 , e 3 , and e 4 are processed by the signal processing system, the absolute linear displacement value of the movable ruler relative to the fixed ruler is obtained.
优选的，所述第一金属导体的形状为平行四边形或者椭圆形；所述第二金属导体的形状为平行四边形或者椭圆形。Preferably, the shape of the first metal conductor is a parallelogram or an ellipse; the shape of the second metal conductor is a parallelogram or an ellipse.
优选的，所述第一平面矩形螺旋激励线圈中的相邻两匝线圈在X方向的间距相等(即第一平面矩形螺旋激励线圈在X方向等间距均匀绕制)，第一平面矩形螺旋激励线圈在X方向的长度L1满足：L1＞W1；所述第一感应线圈组的两个绕向相反的平面矩形螺旋感应线圈中的相邻两匝线圈在X方向的间距相等(即两个绕向相反的平面矩形螺旋感应线圈在X方向等间距均匀绕制)。所述第二平面矩形螺旋激励线圈中的相邻两匝线圈在X方向的间距相等(即第二平面矩形螺旋激励线圈在X方向等间距均匀绕制)，第二平面矩形螺旋激励线圈在X方向的长度L2满足：L2＞W2；所述第二感应线圈组的两个绕向相反的平面矩形螺旋感应线圈中的相邻两匝线圈在X方向的间距相等(即两个绕向相反的平面矩形螺旋感应线圈在X方向等间距均匀绕制)。Preferably, the spacing between two adjacent turns of the first planar rectangular spiral excitation coil in the X direction is equal (that is, the first planar rectangular spiral excitation coil is evenly wound with equal spacing in the X direction), and the length L 1 of the first planar rectangular spiral excitation coil in the X direction satisfies: L 1 >W 1 ; the spacing between two adjacent turns of the two planar rectangular spiral induction coils with opposite winding directions of the first induction coil group in the X direction is equal (that is, the two planar rectangular spiral induction coils with opposite winding directions are evenly wound with equal spacing in the X direction). The spacing between two adjacent turns of the second planar rectangular spiral excitation coil in the X direction is equal (that is, the second planar rectangular spiral excitation coil is evenly wound with equal spacing in the X direction), and the length L 2 of the second planar rectangular spiral excitation coil in the X direction satisfies: L 2 >W 2 ; the spacing between two adjacent turns of the two planar rectangular spiral induction coils with opposite winding directions of the second induction coil group in the X direction is equal (that is, the two planar rectangular spiral induction coils with opposite winding directions are evenly wound with equal spacing in the X direction).
本发明所述的第二种基于电涡流效应的绝对式直线位移传感器，包括定尺和动尺，动尺与定尺正对平行，且留有间隙；设定X方向为测量方向，平行于定尺且垂直于X方向为Y方向，垂直于定尺的方向为Z方向。The second absolute linear displacement sensor based on eddy current effect described in the present invention comprises a fixed scale and a movable scale, wherein the movable scale is parallel to the fixed scale with a gap therebetween; the X direction is set as the measuring direction, the direction parallel to the fixed scale and perpendicular to the X direction is the Y direction, and the direction perpendicular to the fixed scale is the Z direction.
所述定尺包括定尺基体以及嵌在该定尺基体上的第一涡流反射单元和第二涡流反射单元，第一涡流反射单元由相同的两个正弦形第一金属导体沿Y方向间隔排列构成，正弦形第一金属导体的周期为W1、周期个数为m，两个正弦形第一金属导体在Y方向的中心距为Wy，第二涡流反射单元由相互绝缘的n个第二金属导体沿X方向等间隔排成一行构成，第二金属导体的形状为中心对称图形；其中，m×W1＝n×W2，W2表示第二涡流反射单元的节距(也是相邻两个第二金属导体在X方向的中心距)，m、n互为质数。The fixed-length substrate includes a fixed-length substrate and a first eddy current reflection unit and a second eddy current reflection unit embedded in the fixed-length substrate. The first eddy current reflection unit is composed of two identical sinusoidal first metal conductors arranged at intervals along the Y direction. The period of the sinusoidal first metal conductor is W 1 , the number of periods is m, and the center distance between the two sinusoidal first metal conductors in the Y direction is W y . The second eddy current reflection unit is composed of n mutually insulated second metal conductors arranged in a row at equal intervals along the X direction, and the shape of the second metal conductor is a centrally symmetrical figure. Among them, m×W 1 =n×W 2 , W 2 represents the pitch of the second eddy current reflection unit (also the center distance between two adjacent second metal conductors in the X direction), and m and n are prime numbers to each other.
所述动尺包括动尺基体以及布置在动尺基体上的两个第一传感单元和两个第二传感单元。第一传感单元包括第一平面矩形螺旋激励线圈和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第一感应线圈组，第一感应线圈组位于第一平面矩形螺旋激励线圈内，两个第一传感单元沿X方向间隔排列，且在Y方向错开
两个第一平面矩形螺旋激励线圈首尾相接串联构成第一励磁单元，两个第二平面矩形螺旋激励线圈首尾相接串联构成第二励磁单元，第一励磁单元与第二励磁单元串联并通入交流激励电信号。当动尺相对定尺平行移动时，两个第一感应线圈组输出两路感应信号e1、e2，两个第二感应线圈组输出两路感应信号e3、e4，感应信号e1、e2、e3、e4经信号处理系统处理后得到动尺相对定尺的绝对直线位移值。Two first planar rectangular spiral excitation coils are connected end to end in series to form a first excitation unit, and two second planar rectangular spiral excitation coils are connected end to end in series to form a second excitation unit. The first excitation unit and the second excitation unit are connected in series and an AC excitation electric signal is passed. When the movable ruler moves parallel to the fixed ruler, the two first induction coil groups output two induction signals e 1 and e 2 , and the two second induction coil groups output two induction signals e 3 and e 4. After the induction signals e 1 , e 2 , e 3 , and e 4 are processed by the signal processing system, the absolute linear displacement value of the movable ruler relative to the fixed ruler is obtained.
优选的，所述第二金属导体的形状为平行四边形或者椭圆形。Preferably, the second metal conductor is in the shape of a parallelogram or an ellipse.
优选的，所述第一平面矩形螺旋激励线圈中的相邻两匝线圈在X方向的间距相等、在Y方向的间距相等(即第一平面矩形螺旋激励线圈在X方向、Y方向都等间距均匀绕制)，第一平面矩形螺旋激励线圈在Y方向的宽度L1满足：L1＞Wy；所述第一感应线圈组的两个绕向相反的平面矩形螺旋感应线圈中的相邻两匝线圈在X方向的间距相等、在Y方向的间距相等(即两个绕向相反的平面矩形螺旋感应线圈在X方向、Y方向都等间距均匀绕制)。所述第二平面矩形螺旋激励线圈中的相邻两匝线圈沿X方向的间距相等，第二平面矩形螺旋激励线圈在X方向的长度L2满足：L2＞W2；所述第二感应线圈组的两个绕向相反的平面矩形螺旋感应线圈中的相邻两匝线圈在X方向的间距相等(即两个绕向相反的平面矩形螺旋感应线圈在X方向等间距均匀绕制)。Preferably, the spacing between two adjacent turns of the first planar rectangular spiral excitation coil in the X direction is equal, and the spacing in the Y direction is equal (that is, the first planar rectangular spiral excitation coil is evenly wound with equal spacing in the X direction and the Y direction), and the width L 1 of the first planar rectangular spiral excitation coil in the Y direction satisfies: L 1 >W y ; the spacing between two adjacent turns of the two planar rectangular spiral induction coils with opposite winding directions of the first induction coil group is equal in the X direction and the Y direction (that is, the two planar rectangular spiral induction coils with opposite winding directions are evenly wound with equal spacing in the X direction and the Y direction). The spacing between two adjacent turns of the second planar rectangular spiral excitation coil along the X direction is equal, and the length L 2 of the second planar rectangular spiral excitation coil in the X direction satisfies: L 2 >W 2 ; the spacing between two adjacent turns of the two planar rectangular spiral induction coils with opposite winding directions of the second induction coil group in the X direction is equal (that is, the two planar rectangular spiral induction coils with opposite winding directions are evenly wound with equal spacing in the X direction).
本发明所述的第三种基于电涡流效应的绝对式直线位移传感器，包括定尺和动尺，动尺与定尺正对平行，且留有间隙；设定X方向为测量方向，平行于定尺且垂直于X方向为Y方向，垂直于定尺的方向为Z方向。The third absolute linear displacement sensor based on eddy current effect described in the present invention comprises a fixed scale and a movable scale, wherein the movable scale is parallel to the fixed scale with a gap therebetween; the X direction is set as the measuring direction, the direction parallel to the fixed scale and perpendicular to the X direction is the Y direction, and the direction perpendicular to the fixed scale is the Z direction.
所述定尺包括定尺基体以及嵌在该定尺基体上的相互绝缘的m个第一金属导体和2n个第二金属导体，第一金属导体的形状和第二金属导体的形状均为中心对称图形。m个第一金属导体沿X方向等间隔排成第一行，形成第一涡流反射单元。其中n个第二金属导体沿X方向等间隔排成第二行，形成第二涡流反射单元；剩余n个第二金属导体沿X方向等间隔排成第三行，形成第三涡流反射单元，第三涡流反射单元的起始位置与第二涡流反射单元的起始位置在X方向错开
所述动尺包括动尺基体以及布置在动尺基体上的两个第一传感单元和四个第二传感单元；第一传感单元包括第一平面矩形螺旋激励线圈和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第一感应线圈组，第一感应线圈组位于第一平面矩形螺旋激励线圈内，两个第一传感单元沿X方向间隔排列且在Z方向与第一涡流反射单元正对，两个第一传感单元在X方向的中心距为
两个第一平面矩形螺旋激励线圈首尾相接串联构成第一励磁单元，两个第二平面矩形螺旋激励线圈首尾相接串联构成第二励磁单元，第一励磁单元与第二励磁单元串联并通入交流激励电信号。当动尺相对定尺平行移动时，两个第一感应线圈组输出两路感应信号e1、e2，感应单元Ⅰ输出感应信号e3，感应单元Ⅱ输出感应信号e4，感应信号e1、e2、e3、e4经信号处理系统处理后得到动尺相对定尺的绝对直线位移值。Two first planar rectangular spiral excitation coils are connected end to end in series to form a first excitation unit, and two second planar rectangular spiral excitation coils are connected end to end in series to form a second excitation unit. The first excitation unit and the second excitation unit are connected in series and an AC excitation signal is input. When the movable ruler moves parallel to the fixed ruler, the two first induction coil groups output two induction signals e1 and e2 , the induction unit I outputs an induction signal e3 , and the induction unit II outputs an induction signal e4 . After the induction signals e1 , e2 , e3 , and e4 are processed by the signal processing system, the absolute linear displacement value of the movable ruler relative to the fixed ruler is obtained.
优选的，所述第一金属导体的形状为平行四边形或者椭圆形；所述第二金属导体的形状为平行四边形或者椭圆形。Preferably, the shape of the first metal conductor is a parallelogram or an ellipse; the shape of the second metal conductor is a parallelogram or an ellipse.
优选的，所述第一平面矩形螺旋激励线圈中的相邻两匝线圈在X方向的间距相等(即第一平面矩形螺旋激励线圈在X方向等间距均匀绕制)，第一平面矩形螺旋激励线圈在X方向的长度L1满足：L1＞W1；所述第一感应线圈组的两个绕向相反的平面矩形螺旋感应线圈中的相邻两匝线圈在X方向的间距相等(即两个绕向相反的平面矩形螺旋感应线圈在X方向等间距均匀绕制)。所述第二平面矩形螺旋激励线圈中的相邻两匝线圈在X方向的间距相等(即第二平面矩形螺旋激励线圈在X方向等间距均匀绕制)，第二平面矩形螺旋激励线圈在X方向的长度L2满足：L2＞W2；所述感应单元Ⅰ、感应单元Ⅱ的各个平面矩形螺旋感应线圈中的相邻两匝线圈在X方向的间距相等(即平面矩形螺旋感应线圈在X方向等间距均匀绕制)。Preferably, the spacing between two adjacent turns of the first planar rectangular spiral excitation coil in the X direction is equal (that is, the first planar rectangular spiral excitation coil is evenly wound with equal spacing in the X direction), and the length L 1 of the first planar rectangular spiral excitation coil in the X direction satisfies: L 1 > W 1 ; the spacing between two adjacent turns of the two planar rectangular spiral induction coils with opposite winding directions of the first induction coil group in the X direction is equal (that is, the two planar rectangular spiral induction coils with opposite winding directions are evenly wound with equal spacing in the X direction). The spacing between two adjacent turns of the second planar rectangular spiral excitation coil in the X direction is equal (that is, the second planar rectangular spiral excitation coil is evenly wound with equal spacing in the X direction), and the length L 2 of the second planar rectangular spiral excitation coil in the X direction satisfies: L 2 > W 2 ; the spacing between two adjacent turns of the planar rectangular spiral induction coils of the induction unit I and the induction unit II in the X direction is equal (that is, the planar rectangular spiral induction coils are evenly wound with equal spacing in the X direction).
优选的，信号处理系统对感应信号e1、e2、e3、e4进行处理得到动尺相对定尺的绝对直线位移值的具体方式包括：Preferably, the specific manner in which the signal processing system processes the sensing signals e 1 , e 2 , e 3 , and e 4 to obtain the absolute linear displacement value of the movable ruler relative to the fixed ruler includes:
对感应信号e3与感应信号e4相除的结果进行反正切运算，得到精测直线位移值；Perform an inverse tangent operation on the result of dividing the sensing signal e3 by the sensing signal e4 to obtain the precise linear displacement value;
对感应信号e1与感应信号e2相除的结果进行鉴相，得到第一相位；对感应信号e3与感应信号e4相除的结果进行鉴相，得到第二相位；将第一相位与第二相位相减，得到相位差
利用传感器的量程Lmax、第二涡流反射单元的节距W2以及相位差
将精测直线位移值与粗测对极位置值相加，得到动尺相对定尺的绝对直线位移值。The absolute linear displacement value of the movable ruler relative to the fixed ruler is obtained by adding the precisely measured linear displacement value and the roughly measured antipodal position value.
本发明与现有技术相比，具有如下效果：Compared with the prior art, the present invention has the following effects:
(1)采用单边引线，只从动尺的激励线圈和感应线圈引线，简化了传感器结构，采用高频励磁条件下的涡流栅阵列，磁场的产生和消逝仅在局部范围内，减小了传感器加工带来的误差影响，能耗低，抗干扰能力大幅提高，实现了高精度、高分辨力的直线位移测量。(1) The sensor structure is simplified by using single-sided leads and only the excitation coil and induction coil of the moving ruler. The eddy current grid array under high-frequency excitation conditions is used, and the generation and disappearance of the magnetic field is only within a local range, which reduces the error caused by sensor processing, has low energy consumption, and greatly improves the anti-interference ability, thus achieving high-precision and high-resolution linear displacement measurement.
(2)利用两个第一传感单元与第一涡流反射单元构成第一测量通道，两个第二传感单元与第二涡流反射单元构成第二测量通道，两路测量通道实现了绝对直线位移测量，进而实现了高精度、高分辨力的绝对直线位移测量。(2) Two first sensing units and a first eddy current reflection unit constitute a first measurement channel, and two second sensing units and a second eddy current reflection unit constitute a second measurement channel. The two measurement channels realize absolute linear displacement measurement, thereby realizing high-precision and high-resolution absolute linear displacement measurement.
(3)测量需要节距较大的涡流反射单元时，采用两个正弦形金属导体构成第一涡流反射单元，并且两个第一传感单元通过在Y方向错开
(4)利用四个第二传感单元与第二涡流反射单元、第三涡流反射单元构成第二测量通道，第二涡流反射单元与第三涡流反射单元沿X方向错开
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为实施例1中动尺与定尺的相对位置关系示意图。FIG. 1 is a schematic diagram showing the relative position relationship between the movable scale and the fixed scale in Embodiment 1. FIG.
图2为实施例1中定尺的结构示意图。FIG. 2 is a schematic diagram of the structure of the sizing in Example 1.
图3为实施例1中动尺的结构示意图。FIG. 3 is a schematic structural diagram of the movable ruler in Example 1.
图4为实施例1中动尺与定尺的耦合示意图。FIG. 4 is a schematic diagram of the coupling between the movable scale and the fixed scale in Example 1.
图5为实施例2中定尺的结构示意图FIG. 5 is a schematic diagram of the structure of the fixed length in Example 2
图6为实施例2中动尺的结构示意图。FIG. 6 is a schematic structural diagram of the movable ruler in
图7为实施例2中动尺与定尺的耦合示意图。FIG. 7 is a schematic diagram of the coupling between the movable scale and the fixed scale in Example 2.
图8为实施例3中定尺的结构示意图。FIG8 is a schematic diagram of the structure of the sizing in Example 3.
图9为实施例3中动尺的结构示意图。FIG. 9 is a schematic diagram of the structure of the movable ruler in Example 3.
图10为实施例3中动尺与定尺的耦合示意图。FIG. 10 is a schematic diagram of the coupling between the movable scale and the fixed scale in Example 3.
具体实施方式DETAILED DESCRIPTION
实施例1：如图1至图4所示的基于电涡流效应的绝对式直线位移传感器，包括定尺1和动尺2。设定X方向为测量方向，平行于定尺1且垂直于X方向为Y方向，垂直于定尺1的方向为Z方向。定尺1与动尺2在Z方向正对平行，且留有0.5mm间隙。Embodiment 1: The absolute linear displacement sensor based on the eddy current effect as shown in FIGS. 1 to 4 includes a fixed ruler 1 and a
如图2、图4所示，定尺1包括定尺基体10以及嵌在该定尺基体10上的相互绝缘的31(即m＝31)个第一金属导体11和55(即n＝55)个第二金属导体12。第一金属导体11的形状为矩形，第二金属导体12的形状为矩形。31个第一金属导体11沿X方向等间隔排成第一行，形成第一涡流反射单元；55个第二金属导体12沿X方向等间隔排成第二行，形成第二涡流反射单元，第二涡流反射单元的起始位置与第一涡流反射单元的起始位置在X方向对齐。第一涡流反射单元的节距(也是相邻两个第一金属导体11在X方向的中心距)W1＝7.096mm，第二涡流反射单元的节距(也是相邻两个第二金属导体12在X方向的中心距)W2＝4mm，传感器的量程Lmax＝55×W2＝220mm。As shown in FIG. 2 and FIG. 4 , the fixed length 1 includes a fixed
如图3、图4所示，动尺2包括动尺基体20以及布置在动尺基体20上的两个第一传感单元和两个第二传感单元。As shown in FIG. 3 and FIG. 4 , the moving
第一传感单元包括第一平面矩形螺旋激励线圈21和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第一感应线圈组22，第一感应线圈组22位于第一平面矩形螺旋激励线圈21内。第一平面矩形螺旋激励线圈21在X方向和Y方向都等间距均匀绕制，第一平面矩形螺旋激励线圈21在X方向的长度L1大于第一涡流反射单元的节距W1＞，第一传感单元在X方向的长度也是L1，第一平面矩形螺旋激励线圈21在Y方向的宽度(也等于第一传感单元在Y方向的宽度)稍小于第一金属导体11在Y方向的宽度，第一感应线圈组22在X方向的长度为
第二传感单元包括第二平面矩形螺旋激励线圈23和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第二感应线圈组24，第二感应线圈组24位于第二平面矩形螺旋激励线圈23内。第二平面矩形螺旋激励线圈23在X方向和Y方向都等间距均匀绕制，第二平面矩形螺旋激励线圈23在X方向的长度L2大于第二涡流反射单元的节距W2，第二传感单元在X方向的长度也是L2，第二平面矩形螺旋激励线圈23在Y方向的宽度(也等于第二传感单元在Y方向的宽度)稍小于第二金属导体12在Y方向的宽度，第二感应线圈组24在X方向的长度为
两个第一平面矩形螺旋激励线圈21首尾相接串联构成第一励磁单元，两个第二平面矩形螺旋激励线圈23首尾相接串联构成第二励磁单元，第一励磁单元与第二励磁单元串联并通入交流激励电信号，在空间中形成交变磁场，第一涡流反射单元和第二涡流反射单元中均将产生电涡流，在空间中形成新的交变磁场。当动尺2相对定尺1平行移动时，两个第一感应线圈组22输出两路感应信号e1、e2，两个第二感应线圈组24输出两路感应信号e3、e4。其中，Two first planar rectangular spiral excitation coils 21 are connected end to end in series to form a first excitation unit, and two second planar rectangular spiral excitation coils 23 are connected end to end in series to form a second excitation unit. The first excitation unit and the second excitation unit are connected in series and an AC excitation electric signal is introduced to form an alternating magnetic field in space. Eddy currents will be generated in the first eddy current reflection unit and the second eddy current reflection unit to form a new alternating magnetic field in space. When the
信号处理系统对感应信号e1、e2、e3、e4进行处理，得到动尺2相对定尺1的绝对直线位移值。具体方式包括：The signal processing system processes the sensing signals e 1 , e 2 , e 3 , and e 4 to obtain the absolute linear displacement value of the
对感应信号e3与感应信号e4相除的结果进行反正切运算，得到精测直线位移值x′：Perform an inverse tangent operation on the result of dividing the induction signal e3 by the induction signal e4 to obtain the precise linear displacement value x′:
将感应信号e1与感应信号e2相除的结果(即
将感应信号e3与感应信号e4相除的结果(即
将第一相位与第二相位相减，得到相位差
利用公式：
计算上电后第二测量通道的当前绝对位移所包含的最大周期数n2。其中，Lmax表示传感器的量程，Lmax为已知参数，
利用公式：x"＝n2*W2(7)Using the formula: x"＝n 2 *W 2 (7)
计算粗测对极位置值x"。Calculate the rough measured pole position value x".
利用公式：Using the formula:
x＝x′+x"(8)x＝x′+x"(8)
计算得到动尺2相对定尺1的绝对直线位移值x。The absolute linear displacement value x of the
实施例2：如图5至图7所示的基于电涡流效应的绝对式直线位移传感器，其部分结构以及信号处理方式与实施例1相同，不同之处在于：Embodiment 2: The absolute linear displacement sensor based on eddy current effect as shown in FIGS. 5 to 7 has the same structure and signal processing method as that of Embodiment 1, except that:
如图5、图7所示，定尺1包括定尺基体10以及嵌在该定尺基体10上的第一涡流反射单元和第二涡流反射单元。第一涡流反射单元由相同的两个正弦形第一金属导体11沿Y方向间隔排列构成，正弦形第一金属导体11的周期为W1＝73.3mm、周期个数为3(即m＝3)，两个正弦形第一金属导体11在Y方向的中心距为Wy＝4mm。第二涡流反射单元由相互绝缘的55(即n＝55)个第二金属导体12沿X方向等间隔排成一行构成，第二金属导体12的形状为矩形。第二涡流反射单元的起始位置与第一涡流反射单元的起始位置在X方向对齐。第二涡流反射单元的节距(也是相邻两个第二金属导体12在X方向的中心距)W2＝4mm。As shown in Fig. 5 and Fig. 7, the fixed length 1 includes a fixed
如图6、图7所示，动尺2包括动尺基体20以及布置在动尺基体20上的两个第一传感单元和两个第二传感单元。As shown in FIG. 6 and FIG. 7 , the moving
第一传感单元包括第一平面矩形螺旋激励线圈21和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第一感应线圈组22，第一感应线圈组22位于第一平面矩形螺旋激励线圈21内。第一平面矩形螺旋激励线圈21在X方向和Y方向都等间距均匀绕制，第一平面矩形螺旋激励线圈21在Y方向的宽度L1大于两个正弦形第一金属导体11在Y方向的中心距Wy，第一传感单元在Y方向的宽度也是L1，第一平面矩形螺旋激励线圈21在X方向的长度(也等于第一传感单元在X方向的长度)小于
第二传感单元包括第二平面矩形螺旋激励线圈23和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第二感应线圈组24，第二感应线圈组24位于第二平面矩形螺旋激励线圈23内。第二平面矩形螺旋激励线圈23在X方向和Y方向都等间距均匀绕制，第二平面矩形螺旋激励线圈23在X方向的长度L2大于第二涡流反射单元的节距W2，第二传感单元在X方向的长度也是L2，第二平面矩形螺旋激励线圈23在Y方向的宽度(也等于第二传感单元在Y方向的宽度)稍小于第二金属导体12在Y方向的宽度，第二感应线圈组24在X方向的长度为
实施例3：如图8至图10所示的基于电涡流效应的绝对式直线位移传感器，其部分结构以及信号处理方式与实施例1相同，不同之处在于：Embodiment 3: As shown in FIGS. 8 to 10 , the absolute linear displacement sensor based on the eddy current effect has the same structure and signal processing method as that of Embodiment 1, except that:
如图8、图10所示，定尺1包括定尺基体10以及嵌在该定尺基体10上的相互绝缘的31(即m＝31)个第一金属导体11和110(即n＝55)个第二金属导体12。第一金属导体11的形状为矩形，第二金属导体12的形状为矩形。31个第一金属导体11沿X方向等间隔排成第一行，形成第一涡流反射单元。其中55个第二金属导体12沿X方向等间隔排成第二行，形成第二涡流反射单元；剩余55个第二金属导体12沿X方向等间隔排成第三行，形成第三涡流反射单元。第三涡流反射单元的起始位置与第一涡流反射单元的起始位置在X方向对齐，第三涡流反射单元的起始位置与第二涡流反射单元的起始位置在X方向错开
如图9、图10所示，动尺2包括动尺基体20以及布置在动尺基体20上的两个第一传感单元和四个第二传感单元。As shown in FIG. 9 and FIG. 10 , the moving
第一传感单元包括第一平面矩形螺旋激励线圈21和由两个绕向相反的平面矩形螺旋感应线圈首尾相接串联构成的第一感应线圈组22，第一感应线圈组22位于第一平面矩形螺旋激励线圈21内。第一平面矩形螺旋激励线圈21在X方向和Y方向都等间距均匀绕制，第一平面矩形螺旋激励线圈21在X方向的长度L1大于第一涡流反射单元的节距W1，第一传感单元在X方向的长度也是L1，第一平面矩形螺旋激励线圈21在Y方向的宽度(也等于第一传感单元在Y方向的宽度)稍小于第一金属导体11在Y方向的宽度，第一感应线圈组22在X方向的长度为
第二传感单元包括第二平面矩形螺旋激励线圈23和位于第二平面矩形螺旋激励线圈23内的两个平面矩形螺旋感应线圈。第二平面矩形螺旋激励线圈23在X方向和Y方向都等间距均匀绕制，第二平面矩形螺旋激励线圈23在X方向的长度L2大于第二涡流反射单元的节距W2，第二传感单元在X方向的长度也是L2，第二平面矩形螺旋激励线圈23在Y方向的宽度(也等于第二传感单元在Y方向的宽度)稍小于第二金属导体12在Y方向的宽度，两个平面矩形螺旋感应线圈在X方向的长度为
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