CN114562954B - CGH compensation absolute checking method for cylindrical mirror - Google Patents
CGH compensation absolute checking method for cylindrical mirror Download PDFInfo
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- CN114562954B CN114562954B CN202210060815.3A CN202210060815A CN114562954B CN 114562954 B CN114562954 B CN 114562954B CN 202210060815 A CN202210060815 A CN 202210060815A CN 114562954 B CN114562954 B CN 114562954B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/021—Interferometers using holographic techniques
- G01B9/023—Interferometers using holographic techniques for contour producing
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Abstract
The invention discloses a CGH compensation absolute inspection method of a cylindrical mirror, which comprises the steps of carrying out zero detection on the confocal position of the cylindrical mirror through a plane wave interferometer with a standard plane lens and a CGH compensator to obtain a detection result W1, turning the CGH compensator back and forth around the axis direction parallel to the cylindrical mirror to carry out zero detection on the confocal position of the cylindrical mirror to obtain a detection result W2, finally removing the cylindrical mirror, turning the CGH compensator back and forth to restore the initial position, placing the standard plane mirror at the focal line position of a cylindrical test wave to carry out detection to obtain a detection result W3, and calculating to obtain the CGH compensation surface shape error absolute inspection result of the cylindrical mirror. The method of the invention completely separates the surface shape error introduced by the CGH compensator through three inspection positions to obtain the CGH compensation absolute inspection result of the cylindrical mirror, and has the advantages of simple operation and high precision.
Description
Technical Field
The invention belongs to the technical field of optical detection, and particularly relates to a CGH compensation absolute inspection method of a cylindrical mirror.
Background
A cylindrical surface is a curved surface with a finite radius of curvature in one direction and an infinite radius of curvature in the other direction, and can be considered to be generated by a straight generatrix moving along an in-plane curve perpendicular to the generatrix. Due to the dual curvature nature of the cylinder, cylindrical optical elements are commonly used to correct astigmatism or line focus/imaging, and are widely used in laser systems, synchrotron radiation systems and X-ray telescope systems. The surface shape error measurement of the cylindrical mirror usually adopts a wave surface interferometer provided with a standard plane lens, a computer generated hologram (Computer Generated Hologram, CGH) compensator generates cylindrical test waves, and zero position inspection can be carried out on the cylindrical mirror, namely, if the measured surface shape has no error, an interference pattern with zero stripes can be obtained. However, the method is relative measurement, and the measured surface shape error is based on the cylindrical wavefront generated by diffraction of the CGH compensator, i.e. the measurement accuracy is always limited by the accuracy of the CGH compensator.
The CGH compensator is to manufacture a diffraction structure on a parallel flat plate, is a curve type binary step with a variable period, and generates cylindrical test waves through diffraction. The CGH size is typically 100-150 mm, while the diffraction structure feature size is in the order of microns, and the diffraction pattern or structure errors are sub-microns or even smaller. The manufacturing errors of the diffraction structure of the CGH compensator comprise etching depth, pattern distortion, duty ratio errors and the like which all affect the diffraction wavefront, and the direct measurement of the manufacturing errors of the full caliber of the CGH compensator is obviously extremely low in efficiency by adopting three-dimensional morphology microscopic measuring equipment such as an atomic force microscope or a scanning white light interferometer and the like. Furthermore, calculating the diffraction wavefront error it generates by measuring the CGH compensator manufacturing error also involves a complex and time-consuming physical optical calculation process.
The absolute test result of the measured surface shape can be obtained by separating systematic errors through translation, rotation or translation rotation method, provided that the zero position test condition of the measured surface shape is not changed. The cylindrical mirror can translate along the axial direction of the cylindrical mirror and rotate around the axial line of the cylindrical mirror by a translation rotation method, differential wave fronts separated by systematic errors are obtained by subtracting after multiple times of measurement data are obtained, and then the surface errors of the cylindrical mirror are reconstructed by integration, but the differential reconstruction algorithm essentially loses some information, and the method is only applicable to cylindrical surfaces and is not applicable to non-cylindrical surfaces, and the non-cylindrical surfaces do not meet zero check conditions after rotating.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art, and provide the CGH compensation absolute checking method of the cylindrical mirror, which is simple to operate and high in precision.
In order to solve the technical problems, the invention adopts the following technical scheme:
a CGH compensated absolute test method for a cylindrical mirror comprising the steps of:
s1, carrying out confocal position zero position inspection and focal line position inspection on a cylindrical mirror by using a plane wave interferometer with a standard plane lens and a CGH compensator:
s11, a plane wave interferometer sends out a plane test wave through a standard plane lens, the plane test wave is converted into a cylindrical test wave by a CGH compensator, the focal line of the cylindrical test wave coincides with the axis of a cylindrical mirror, confocal position zero position check is carried out, a first group of data is measured, and a stock disc is W1;
s12, remaining inspection conditions are kept unchanged, the CGH compensator turns back and forth around the axial direction parallel to the cylindrical mirror, the axial distance from the cylindrical mirror to the CGH compensator is adjusted, so that the focal line of the cylindrical test wave is still coincident with the axial line of the cylindrical mirror, confocal position zero position inspection is conducted, a second group of data is measured, and the inventory is W2;
s13, removing the cylindrical mirror, turning the CGH compensator back and forth to restore the initial position, placing the standard plane mirror at the focal line position of the cylindrical test wave, overlapping the focal line of the cylindrical test wave with the X-axis direction cross line of the standard plane mirror, detecting and measuring a third group of data, wherein the storage disc is W3;
s2, calculating a CGH compensation surface shape error absolute test result T of the cylindrical mirror;
s21, calculating the surface shape error H (x, y) introduced by the CGH compensator:
H(x,y)＝1/2[W1(x,y)-W2(x,y)+W3(x,y)+W3(x,-y)-R(-x,y)-R(-x,-y)-2P(x)+Δ(x,y)]
wherein R is the reference plane error of the standard plane lens, P is the profile error of the X-axis direction section line of the standard plane reflector, delta is the profile error introduced by forward and backward overturning of the CGH compensator, (X, Y), (X, -Y), (-X, Y), and (-X, -Y) are the transverse coordinates on the mirror surface, wherein X is the X-axis coordinate parallel to the axis direction of the cylindrical mirror (1), and Y is the Y-axis coordinate orthogonal to the X-axis in the plane perpendicular to the optical axis of the interferometer;
s22, calculating the surface shape error T (x, y) of the cylindrical mirror:
T(x,y)＝W1(x,y)-H(x,y)-R(-x,y)。
as a further improvement of the above technical solution, in steps S11 and S12, the cylindrical mirror satisfies the confocal position null inspection condition, and the plane wave interferometer normally enters the cylindrical mirror through the standard plane lens and the cylindrical test beam emitted by the CGH compensator, and returns to the plane wave interferometer along the original path after being reflected by the cylindrical mirror.
As a further improvement of the above technical solution, in step S13, the standard plane mirror is located at the focal line position of the cylindrical test wave, and the cylindrical test beam emitted by the plane wave interferometer through the standard plane lens and the CGH compensator is incident on the standard plane mirror, and after being reflected, returns to the plane wave interferometer along the position symmetrical about the X axis.
As a further improvement of the above technical solution, the cylindrical mirror is provided with the following degrees of freedom of adjustment by means of a clamp: a degree of freedom of movement in a Z (Z axis) direction and a Y (Y axis) direction, a degree of freedom of rotation about an X (X axis), Y and Z directions, the Z direction being an optical axis direction; the CGH compensator is provided with the following adjustment degrees of freedom through a clamp: rotational freedom about X, Y; the standard plane mirror is provided with the following adjustment degrees of freedom through a clamp: a degree of freedom of movement in the Z direction, a degree of freedom of rotation about the Y direction.
As a further improvement of the above technical solution, in steps S21 and S22, the surface shape error Δ introduced by the forward and backward turning of the CGH compensator is obtained by a ray tracing method, and the reference surface error R of the standard plane lens and the profile error P of the X-axis directional intercept of the standard plane mirror are obtained by pre-calibration (tracing to the plane standard substance).
Compared with the prior art, the invention has the advantages that:
the CGH compensation absolute inspection method of the cylindrical mirror is suitable for cylindrical surfaces and non-cylindrical surfaces, confocal and focal line positions are measured sequentially through three inspection positions, the surface shape errors introduced by the CGH compensator can be separated through addition and subtraction operation of three times of measurement data, and the absolute inspection result of the cylindrical mirror is obtained.
Drawings
Fig. 1 is a schematic diagram (front view) of confocal position null inspection of the first group of data W1 of embodiment 1 of the present invention.
Fig. 2 is a schematic diagram (top view) of confocal position null-check of the first group of data W1 of embodiment 1 of the present invention.
Fig. 3 is a schematic diagram (front view) of confocal position null inspection of the second group of data W2 of embodiment 1 of the present invention.
Fig. 4 is a schematic diagram (top view) of confocal position null inspection of the second set of data W2 of example 1 of the present invention.
Fig. 5 is a schematic diagram (front view) of focal line position verification of the third set of data W3 of embodiment 1 of the present invention.
Fig. 6 is a schematic diagram (top view) of focal line position verification of the third set of data W3 in embodiment 1 of the present invention.
FIG. 7 is a schematic view of the optical path and fixture degree of freedom adjustment for the null inspection of the confocal position of a cylindrical lens of example 1 of the present invention.
Fig. 8 is a hologram pattern area diagram of the CGH compensator in example 1 of the present invention.
The reference numerals in the drawings denote:
1. a cylindrical mirror; 2. a plane wave interferometer; 3. a standard planar lens; 4. a CGH compensator; 5. a standard planar mirror; 6. focal line of cylindrical test wave; 7. a clamp for the cylindrical mirror; 8. a clamp of the CGH compensator; 21. an alignment beam for CGH alignment; 22. a marker beam for cylindrical mirror positioning; 41. a test holographic region of the CGH compensator; 42. alignment holographic region of the CGH compensator; 43. the marked holographic area of the CGH compensator.
Detailed Description
The invention is further described below in connection with the drawings and the specific preferred embodiments, but the scope of protection of the invention is not limited thereby.
Example 1:
fig. 1 to 6 show an embodiment of the CGH-compensated absolute checking method of the cylindrical mirror of the present invention, which comprises the steps of:
s1, measuring: carrying out confocal position zero position check and focal line position check on the cylindrical mirror 1 by using a plane wave interferometer 2 with a standard plane lens 3 and a CGH compensator 4, wherein the method is specifically carried out according to the following substeps;
s11, plane wave interferometer 2 sends out plane test wave through standard plane lens 3 and is converted into cylindrical test wave by CGH compensator 4, focal line 6 of cylindrical test wave coincides with axis of cylindrical mirror 1, confocal position zero check is carried out and first group of data is measured, and stock is W1, as shown in figures 1 and 2;
s12, remaining inspection conditions are kept unchanged, the CGH compensator 4 turns back and forth around the axis direction parallel to the cylindrical mirror (the light facing surface is changed into the light backing surface), the axial distance from the cylindrical mirror 1 to the CGH compensator 4 is adjusted, so that the focal line 6 of the cylindrical test wave still coincides with the axis of the cylindrical mirror 1, confocal position zero position inspection is carried out, a second group of data is measured, and the storage disc is W2, as shown in figures 3 and 4;
s13, removing the cylindrical mirror 1, turning the CGH compensator 4 back and forth to restore the initial position, placing the standard plane mirror 5 at the focal line position of the cylindrical test wave, overlapping the focal line 6 with the X-axis direction section line of the standard plane mirror 5, detecting and measuring a third group of data, and storing the third group of data as W3, as shown in figures 5 and 6.
S2, calculating: the absolute surface shape error test result T of the cylindrical mirror 1 can be obtained through calculation by simple addition and subtraction operation, and the method is specifically implemented according to the following steps;
s21, calculating the surface shape error H (x, y) introduced by the CGH compensator 4:
H(x,y)＝1/2[W1(x,y)-W2(x,y)+W3(x,y)+W3(x,-y)-R(-x,y)-R(-x,-y)-2P(x)+Δ(x,y)]
wherein R is a reference plane error of a standard plane lens (3), P is a contour error of a section line in the X-axis direction of a standard plane reflector (5), delta is a surface error introduced by forward and backward overturning of a CGH compensator (4), and (X, Y), (X, -Y), (-X, Y) and (-X, -Y) are transverse coordinates on a mirror surface, wherein X is an X-axis coordinate parallel to the axis direction of a cylindrical mirror (1), and Y is a Y-axis coordinate orthogonal to the X-axis in a plane perpendicular to the optical axis of an interferometer;
s22, calculating the surface shape error T (x, y) of the cylindrical mirror 1:
T(x,y)＝W1(x,y)-H(x,y)-R(-x,y)
in this embodiment, the radius of curvature of the vertex of the cylindrical mirror 1 to be measured is r=1959 mm, and the aperture of light transmission is 100mm. The substrate of the CGH compensator was a 6 inch square, 6.4mm thick quartz plate.
In steps S11 and S12, the cylindrical mirror 1 satisfies the confocal position null inspection condition, and the plane wave interferometer 2 normally enters the cylindrical mirror 1 through the cylindrical test beam emitted by the standard plane lens 3 and the CGH compensator 4, and returns to the plane wave interferometer 2 along the original path after being reflected by the cylindrical mirror. The CGH compensator 4 forms an angle with the standard plane lens 3 to isolate ghost images caused by interference orders diffraction of the CGH compensator 4, the angle being determined by the carrier frequency of the CGH compensator 4.
In step S11, the etched surface of the CGH compensator 4 is a light-facing surface, the non-etched surface is a backlight surface, and the axial distance from the backlight surface to the cylindrical mirror 1 is 100mm.
In step S12, after the CGH compensator 4 is turned back and forth, the non-etched surface is a light-facing surface, the etched surface is a backlight surface, and the axial distance from the backlight surface to the cylindrical mirror is 104.392mm.
In step S13, the standard plane mirror 5 is located at the focal line 6 of the cylindrical test wave, and the cylindrical test beam emitted from the plane wave interferometer 2 through the standard plane lens 3 and the CGH compensator 4 is incident on the standard plane mirror 5, and returns to the plane wave interferometer 2 along the position symmetrical about the X axis after being reflected.
As shown in fig. 7, the clamp 7 of the cylindrical mirror is provided with the following degrees of adjustment freedom: a degree of freedom of movement in the Z (optical axis) direction and the Y direction, a degree of freedom of rotation about X, Y and the Z direction; the clamp 8 of the CGH compensator is provided with the following adjustment degrees of freedom: rotational degrees of freedom about the X and Y directions. The clamp of the standard plane mirror 5 is provided with the following degrees of adjustment freedom: a degree of freedom of movement in the Z direction, a degree of freedom of rotation about the Y direction.
In steps S21 and S22, the surface shape error Δ introduced by the forward/backward flip of the CGH compensator 4 may be obtained by a ray tracing method, and in this embodiment, Δ <0.0002λ (λ=632.8 nm is the operating wavelength of the plane wave interferometer 2) may be ignored. The reference plane error R of the standard plane lens 3 and the profile error P of the X-axis direction section line of the standard plane mirror 5 can be obtained by pre-calibration (trace to the plane standard substance), in this embodiment, R and P are both smaller than 0.05λ and can be ignored, so H (X, y) =1/2 [ W1 (X, y) -W2 (X, y) +w3 (X, -y) ], and T (X, y) =w1 (X, y) -H (X, y).
As shown in fig. 7 and 8, in the present embodiment, the hologram pattern of the CGH compensator 4 includes three areas, the center portion is a test hologram area 41 of the CGH compensator, for converting the plane test wave emitted from the plane wave interferometer 2 through the standard plane lens 3 into a cylindrical test wave; the edge zone is an alignment holographic zone 42 of the CGH compensator, which is used for aligning the CGH compensator 4 with the plane wave interferometer 2, in this embodiment, the alignment hologram is a grating pattern parallel to the axis direction of the cylindrical mirror 1, the grating period is 6 μm, the alignment beam 21 for CGH alignment in the plane test wave is reflected back to the plane wave interferometer 2, and a zero fringe interference pattern is formed, which indicates that the CGH compensator 4 and the standard plane lens 3 have a set 3 ° angle rotated around the axis of the cylindrical mirror 1; the small circular area on the edge ring band is a marking holographic area 43 of the CGH compensator, which is used for positioning the cylindrical mirror 1, and converting the marking light beam 22 used for positioning the cylindrical mirror in the plane test wave into a focusing light spot or a cross hair at a designated position of the cylindrical mirror 1.
According to the CGH compensation absolute inspection method of the cylindrical mirror, the surface shape error introduced by the CGH compensator 4 can be separated by utilizing the measurement data of the confocal position and the focal line position through simple mathematical operation, and the absolute inspection result of the cylindrical mirror 1 is obtained, so that the method has the advantages of simplicity in operation and high precision.
The above description is only of the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. While the invention has been described in terms of preferred embodiments, it is not intended to be limiting. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present invention or equivalent embodiments using the method and technical solution disclosed above without departing from the spirit and technical solution of the present invention. Therefore, any simple modification, equivalent substitution, equivalent variation and modification of the above embodiments according to the technical substance of the present invention, which do not depart from the technical solution of the present invention, still fall within the scope of the technical solution of the present invention.
Claims (5)
1. The CGH compensation absolute inspection method of the cylindrical mirror is characterized by comprising the following steps of:
s1, carrying out confocal position zero position detection and focal line position detection on a cylindrical mirror (1) by using a plane wave interferometer (2) with a standard plane lens (3) and a CGH compensator (4):
s11, a plane wave interferometer (2) sends out a plane test wave through a standard plane lens (3) and is converted into a cylindrical test wave by a CGH compensator (4), a focal line (6) of the cylindrical test wave coincides with the axis of a cylindrical mirror (1), confocal position zero position check is carried out, a first group of data is measured, and a stock is W1;
s12, remaining inspection conditions are kept unchanged, the CGH compensator (4) turns back and forth around the direction parallel to the axis of the cylindrical mirror (1), the axial distance between the cylindrical mirror (1) and the CGH compensator (4) is adjusted, so that a focal line (6) of the cylindrical test wave still coincides with the axis of the cylindrical mirror (1), confocal position zero position inspection is carried out, a second group of data is measured, and a storage disc is W2;
s13, removing the cylindrical mirror (1), turning the CGH compensator (4) back and forth to restore the initial position, placing the standard plane mirror (5) at the focal line position of the cylindrical test wave, and detecting and measuring a third group of data, wherein the focal line (6) of the cylindrical test wave coincides with the X-axis direction section line of the standard plane mirror (5), and the storage disc is W3;
s2, calculating a CGH compensation surface shape error absolute test result T of the cylindrical mirror;
s21, calculating the surface shape error H (x, y) introduced by the CGH compensator (4):
H(x,y)＝1/2[W1(x,y)-W2(x,y)+W3(x,y)+W3(x,-y)-R(-x,y)-R(-x,-y)-2P(x)+Δ(x,y)]
wherein R is a reference plane error of a standard plane lens (3), P is a contour error of a section line in the X-axis direction of a standard plane reflector (5), delta is a surface error introduced by forward and backward overturning of a CGH compensator (4), and (X, Y), (X, -Y), (-X, Y) and (-X, -Y) are transverse coordinates on a mirror surface, wherein X is an X-axis coordinate parallel to the axis direction of a cylindrical mirror (1), and Y is a Y-axis coordinate orthogonal to the X-axis in a plane perpendicular to the optical axis of an interferometer;
s22, calculating the surface shape error T (x, y) of the cylindrical mirror (1):
T(x,y)＝W1(x,y)-H(x,y)-R(-x,y)。
2. the absolute inspection method for CGH compensation of a cylindrical mirror according to claim 1, wherein in steps S11 and S12, the cylindrical mirror (1) satisfies a confocal position null inspection condition, and a cylindrical test beam emitted from the plane wave interferometer (2) through the standard plane lens (3) and the CGH compensator (4) is normally incident on the cylindrical mirror (1), reflected by the cylindrical mirror (1), and returned to the plane wave interferometer (2) along the original path.
3. The absolute inspection method of CGH compensation of a cylindrical mirror according to claim 1, wherein in step S13, the standard plane mirror (5) is located at a focal line (6) of the cylindrical test wave, and the cylindrical test beam emitted from the plane wave interferometer (2) through the standard plane lens (3) and the CGH compensator (4) is incident on the standard plane mirror (5) and reflected back to the plane wave interferometer (2) along a position symmetrical about the X axis.
4. -CGH-compensated absolute checking method of a cylindrical mirror according to any one of claims 1 to 3, characterized in that the cylindrical mirror (1) is provided with the following degrees of adjustment freedom by means of a clamp: a degree of freedom of movement in a Z direction and a Y direction, a degree of freedom of rotation around X, Y and the Z direction, the Z direction being an optical axis direction; the CGH compensator (4) is provided with the following adjustment degrees of freedom by means of a clamp: rotational freedom about X, Y; the standard plane mirror (5) is provided with the following adjustment degrees of freedom by a clamp: a degree of freedom of movement in the Z direction, a degree of freedom of rotation about the Y direction.
5. A CGH-compensated absolute test method according to any one of claims 1 to 3, wherein in steps S21 and S22, the surface shape error Δ introduced by the forward and backward tilting of the CGH compensator (4) is obtained by a ray tracing method, and the reference surface error R of the standard plane lens (3) and the profile error P of the X-axis directional intercept of the standard plane mirror (5) are obtained by a pre-calibration.
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