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CN114551724B - Broadband and narrowband integrated multiplication type perovskite photoelectric detector - Google Patents

Broadband and narrowband integrated multiplication type perovskite photoelectric detector Download PDF

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CN114551724B
CN114551724B CN202210012715.3A CN202210012715A CN114551724B CN 114551724 B CN114551724 B CN 114551724B CN 202210012715 A CN202210012715 A CN 202210012715A CN 114551724 B CN114551724 B CN 114551724B
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CN114551724A (en
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刘琳琳
苏小钧
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South China University of Technology SCUT
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Abstract

The invention belongs to the technical field of narrow-band and wide-band perovskite photoelectric detection, and particularly provides a broadband and narrow-band integrated multiplication type perovskite photoelectric detector. The perovskite monocrystal is used as an active layer, and the polymer is covered on the surface of the perovskite monocrystal to be used as an isolation layer and a hole transport layer. Light is incident from the direction of ITO, under reverse bias, the short wavelength generates photon-generated carriers in the perovskite single crystal with the thickness of about 16 mu m and is subjected to recombination quenching in the perovskite single crystal, and meanwhile, holes are injected by the induction of a silver electrode, so that narrow-band response is shown near the absorption band edge of the perovskite. Meanwhile, under forward bias, photon-generated carriers excited by short-wavelength light in the perovskite are gathered at the interface of the hole transport layer and the perovskite, and holes are injected from ITO under the direction of an external electric field under the forward bias, so that the broadband multiplication photodetector with the halide perovskite in the absorption wavelength range is formed.

Description

一种宽带和窄带一体化的倍增型钙钛矿光电探测器A multiplied perovskite photodetector integrating broadband and narrowband

技术领域technical field

本发明属于窄带和宽带钙钛矿光电探测技术领域,涉及一种反偏压下窄带和正偏压下宽带钙钛矿倍增型光电探测器的制作方法及一体化的集成应用。The invention belongs to the technical field of narrow-band and broadband perovskite photoelectric detection, and relates to a manufacturing method of a narrow-band perovskite multiplication type photodetector under a reverse bias voltage and a wide-band perovskite multiplication type photodetector under a forward bias voltage and its integrated application.

背景技术Background technique

近年来,有机-无机钙钛矿因其具有高光吸收、长载流子寿命和长扩散长度等优异特性而备受关注。这些特性表明有机-无机钙钛矿是光电探测器应用的优良材料,且成本低、易于制备。钙钛矿光电探测器是由钙钛矿作为有源层将光信号转化为电信号的光电器件。根据不同波长响应带宽,光探测器大致可分为宽带和窄带光电探测器。宽带探测器主要应用于摄像头、工业相机、自主驾驶等相关方向;窄带探测器主要应用于生物医学传感、安全系统、光通信等单色光探测应用方向。在同一器件中,通过光电条件的变化同时集成宽带和窄带的探测性能,开发新型、多功能、一体化光电探测系统,具有重要的应用价值,是新一代传感器的重要发展方向。In recent years, organic-inorganic perovskites have attracted much attention due to their excellent properties such as high light absorption, long carrier lifetime, and long diffusion length. These properties suggest that organic-inorganic perovskites are excellent materials for photodetector applications with low cost and ease of preparation. Perovskite photodetectors are optoelectronic devices that convert optical signals into electrical signals by using perovskite as the active layer. According to different wavelength response bandwidths, photodetectors can be roughly divided into broadband and narrowband photodetectors. Broadband detectors are mainly used in related fields such as cameras, industrial cameras, and autonomous driving; narrowband detectors are mainly used in monochromatic light detection applications such as biomedical sensing, security systems, and optical communications. In the same device, through the change of photoelectric conditions, the detection performance of broadband and narrowband can be integrated at the same time, and the development of a new, multi-functional, integrated photoelectric detection system has important application value and is an important development direction of a new generation of sensors.

常见实现窄带探测器的方法有以下几种:(1)通过宽带光电探测器与带通滤波器相结合(2)使用窄带吸收材料作为有源层(3)通过等离子体效应有意增强特定波长吸收。(4)通过淬灭短波长光生载流子的电荷收集窄带机制。值得注意的是前三种实现窄带检测的方法,均不能在同一器件结构中,实现窄带响应同时实现宽带检测。现有在同一器件兼具宽带和窄带响应大多是通过淬灭短波长光生载流子的电荷收集来达到窄带响应,由改变光射入方向,由此获得宽带响应,从而实现宽带和窄带并存的光电探测器。然而,在实际应用中我们需要更为简便的方法来控制在同一器件实现宽带和窄带响应,这使得通过改变外部施加偏压方向实现的倍增型光电探测器有着巨大的应用前景。Common approaches to realize narrow-band detectors are as follows: (1) Combining broadband photodetectors with band-pass filters (2) Using narrow-band absorbing materials as active layers (3) Intentionally enhancing specific wavelength absorption through plasmonic effects . (4) A narrow-band mechanism for charge collection via quenching of short-wavelength photogenerated carriers. It is worth noting that the first three methods for realizing narrowband detection cannot realize narrowband response and wideband detection at the same time in the same device structure. Existing devices that have both broadband and narrowband responses in the same device mostly achieve narrowband response by quenching the charge collection of short-wavelength photogenerated carriers, and obtain broadband response by changing the light incident direction, thereby realizing the coexistence of broadband and narrowband Photodetector. However, in practical applications, we need a simpler method to control the broadband and narrowband responses in the same device, which makes the multiplied photodetector realized by changing the direction of the externally applied bias voltage have great application prospects.

发明内容Contents of the invention

本发明的首要目的在于提供一种宽带和窄带一体化的倍增型钙钛矿光电探测器。The primary purpose of the present invention is to provide a multiplied perovskite photodetector integrating broadband and narrowband.

本发明另一目的在于提供上述宽带和窄带一体化的倍增型钙钛矿光电探测器的制备方法。本发明采用钙钛矿单晶作为活性层,聚合物覆盖于钙钛矿单晶表面作为隔离层和空穴传输层。光由ITO方向入射,在反偏压下,短波长在厚度约16μm钙钛矿单晶中产生光生载流子并在其内部复合淬灭,同时空穴由银电极诱导注入,因此在钙钛矿吸收带边附近表现为窄带响应。同时,在正向偏压下,在钙钛矿中受短波长光激发出的光生载流子在空穴传输层与钙钛矿界面聚集,且正偏压下的外加电场方向诱导空穴由ITO注入,从而形成卤化物钙钛矿吸收波长范围的宽带倍增光电探测器。Another object of the present invention is to provide a method for preparing the multiplied perovskite photodetector integrated with broadband and narrowband. The invention adopts the perovskite single crystal as the active layer, and the polymer is covered on the surface of the perovskite single crystal as the isolation layer and the hole transport layer. Light is incident from the direction of ITO. Under reverse bias, short wavelengths generate photogenerated carriers in the perovskite single crystal with a thickness of about 16 μm and recombine and quench them inside. At the same time, holes are induced and injected by the silver electrode, so the perovskite Near the edge of the ore absorption band is a narrow band response. At the same time, under forward bias, the photogenerated carriers excited by short-wavelength light in the perovskite gather at the interface between the hole transport layer and the perovskite, and the direction of the applied electric field under forward bias induces the holes from ITO implantation to form broadband multiplied photodetectors in the halide perovskite absorption wavelength range.

针对整流二极管正向导通、反向截止的特性,为了在正向偏压和反向偏压下都获得较好的导电性能,设计了两个空穴传输层夹心光活性层的双向导通结构,选择合适的传输层前线轨道能级,可以在双向偏压下得到高性能的光电探测器。In view of the characteristics of forward conduction and reverse cutoff of rectifier diodes, in order to obtain better conductivity under both forward bias and reverse bias, a bidirectional conduction structure with two hole transport layers sandwiching the photoactive layer was designed. , choose the appropriate frontier orbital energy level of the transport layer, and a high-performance photodetector can be obtained under bidirectional bias.

本发明的目的通过以下方案实现:一种宽带和窄带一体化的倍增型钙钛矿光电探测器,包括:阳极电极,空穴传输层Ⅰ,钙钛矿层,空穴传输层Ⅱ,阴极界面层和阴极电极;器件结构按上述顺序由阳极电极从左自右依次向阴极电极方向排列。The purpose of the present invention is achieved by the following scheme: a multiplication type perovskite photodetector integrated with broadband and narrowband, including: anode electrode, hole transport layer I, perovskite layer, hole transport layer II, cathode interface layer and the cathode electrode; the device structure is arranged in the above sequence from the anode electrode to the cathode electrode from left to right.

本发明与常见的纵向7层状结构有所不同,其中钙钛矿层是由小块卤素钙钛矿单晶构成,由电子传输层Ⅰ厚涂覆盖包裹钙钛矿单晶,再依次旋涂电子传输层Ⅱ以及蒸镀电极。The present invention is different from the common vertical 7-layer structure, in which the perovskite layer is composed of a small halogen perovskite single crystal, and the perovskite single crystal is covered and wrapped by the electron transport layer I, and then spin-coated with electrons in turn. Transport layer II and evaporation electrodes.

作为优选,所述阴极的材料采用银、金、铂或钛。Preferably, the material of the cathode is silver, gold, platinum or titanium.

作为优选,所述阴极电极的厚度约为0.08~0.2μm,优选为0.1μm。Preferably, the thickness of the cathode electrode is about 0.08-0.2 μm, preferably 0.1 μm.

作为优选,所述空穴传输层Ⅰ的材料采用聚[双(4-苯基)(2,4,6-三甲基苯基)胺](即PTAA)。所述空穴传输层Ⅰ的厚度为0.003~0.008μm。Preferably, the hole transport layer I is made of poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] (ie PTAA). The thickness of the hole transport layer I is 0.003-0.008 μm.

作为优选,所述钙钛矿层为CH3NH3PbBr3Preferably, the perovskite layer is CH 3 NH 3 PbBr 3 .

作为优选,所述钙钛矿层的厚度约为10~17μm。Preferably, the thickness of the perovskite layer is about 10-17 μm.

作为优选,所述空穴传输层Ⅱ的材料采用聚[(4,7-双(4-(2-乙基己基)噻吩-2-基)-5,6-二氟苯并[C][1,2,5]噻二唑-5,5-二基)([2,2']联噻吩-5,5'-二基)](即PffBT4T-2OD)。As a preference, the material of the hole transport layer II is poly[(4,7-bis(4-(2-ethylhexyl)thiophen-2-yl)-5,6-difluorobenzo[C][ 1,2,5] Thiadiazole-5,5-diyl) ([2,2'] bithiophene-5,5'-diyl)] (ie PffBT4T-2OD).

作为优选,所述空穴传输层Ⅱ的厚度约为0.5~0.7μm。Preferably, the hole transport layer II has a thickness of about 0.5-0.7 μm.

作为优选,所述阴极界面层采用聚[(9,9-二(3'-(N,N-二甲氨基)丙基)芴基-2,7-二基)-ALT-(9,9-二正辛基芴基2,7-二基)]-溴(即PFN-Br),厚度约为0.005~0.008μm。Preferably, the cathode interface layer adopts poly[(9,9-di(3'-(N,N-dimethylamino)propyl)fluorenyl-2,7-diyl)-ALT-(9,9 -Di-n-octylfluorenyl 2,7-diyl)]-bromine (ie PFN-Br), with a thickness of about 0.005-0.008 μm.

作为优选,所述阳极的材料采用透明导电基底,包括ITO,厚度约为0.13~0.14μm。Preferably, the material of the anode is a transparent conductive substrate, including ITO, with a thickness of about 0.13-0.14 μm.

本发明提供一种宽带和窄带一体化的倍增型钙钛矿光电探测器的制备方法,具体如下:The present invention provides a kind of preparation method of multiplication type perovskite photodetector integrated with broadband and narrowband, specifically as follows:

步骤一、在透明电极上制备空穴传输层Ⅰ;Step 1, preparing a hole transport layer I on the transparent electrode;

步骤二、在空穴传输层Ⅰ上生长钙钛矿作为有源层;Step 2, growing perovskite on the hole transport layer I as the active layer;

步骤三、在该有源层上制备空穴传输层Ⅱ;Step 3, preparing a hole transport layer II on the active layer;

步骤四、在空穴传输层Ⅱ上制备阴极界面层;Step 4, preparing a cathode interface layer on the hole transport layer II;

步骤五、在阴极界面层上制备金属电极。Step 5, preparing a metal electrode on the cathode interface layer.

上述宽带和窄带一体化的倍增型钙钛矿光电探测器的制备方法,更具体为如下所示:The preparation method of the multiplied perovskite photodetector integrated with the above-mentioned broadband and narrowband is more specifically as follows:

步骤一、透明阳极上旋涂PTAA,并用70~90℃退火15-20分钟,以形成致密的PTAA薄膜,得到空穴传输层I;Step 1. Spin-coat PTAA on the transparent anode, and anneal at 70-90°C for 15-20 minutes to form a dense PTAA film to obtain the hole transport layer I;

步骤二、在空穴传输层I上,滴钙钛矿前驱体溶液,将两片旋涂有PTAA的透明ITO合在一起,形成一个半密闭的空间,采用逆温结晶的方法由40℃至80℃缓慢升温生长钙钛矿单晶,进而形成钙钛矿不连续单晶薄膜,得到钙钛矿层;Step 2. On the hole transport layer I, drop the perovskite precursor solution, put two pieces of transparent ITO spin-coated with PTAA together to form a semi-closed space, and use the method of temperature inversion crystallization from 40 ° C to Slowly increase the temperature at 80°C to grow a perovskite single crystal, and then form a discontinuous perovskite single crystal film to obtain a perovskite layer;

步骤三、采用厚涂PffBT4T-2OD的方式在钙钛矿不连续单晶薄膜上滴涂PffBT4T-2OD并均匀铺开等待滴涂聚合物的溶剂挥发干,然后用70~90℃退火15-20分钟,制备得到空穴传输层Ⅱ;Step 3. Apply PffBT4T-2OD thickly to the perovskite discontinuous single crystal film and spread it evenly to wait for the solvent of the drip-coated polymer to evaporate and dry, then anneal at 70-90°C for 15-20 Minutes, the hole transport layer II was prepared;

步骤四、在空穴传输层Ⅱ上旋涂PFN-Br制备阴极界面层,然后蒸镀银作为阴极。Step 4: Spin-coat PFN-Br on the hole transport layer II to prepare a cathode interface layer, and then vapor-deposit silver as a cathode.

一种获得宽带响应或窄带响应的方法,具体为对上述探测器施加负偏压获得窄带响应或施加正偏压获得宽带响应。A method for obtaining a broadband response or a narrowband response, specifically, applying a negative bias voltage to the above-mentioned detector to obtain a narrowband response or applying a positive bias voltage to obtain a broadband response.

优选的,所述负偏压为-1~-4V,所述正偏压为1~4V。Preferably, the negative bias voltage is -1-4V, and the positive bias voltage is 1-4V.

本发明具有的有益效果如下:The beneficial effects that the present invention has are as follows:

本发明采用有两种不同的空穴传输层分别置于钙钛矿层两边,其中PffBT4T-2OD作为靠近金属电极的空穴传输层Ⅱ材料有着与MAPbBr3极度相符的能级结构(其HOMO和LOMO能级分别为-3.7和-5.4),且有着优越的载流子传输特性,使其在负偏压下,由短波长光子激发出的载流子在钙钛矿层中耗尽,剩余波长在钙钛矿吸收带边附近的光子能顺利激发电子和空穴,且未在钙钛矿内部的界面复合。其中PffBT4T-2OD作为空穴传输层,使得电子在PffBT4T-2OD与钙钛矿单晶之间的界面累积,诱导空穴由Ag电极隧穿注入,从而得到一个倍增型的窄带响应。在正偏压下,由于施加的外部电场方向影响,入射的短波长光子激发出的电子和空穴并未在钙钛矿晶体中复合淬灭,且由于PTAA即空穴传输层Ⅰ使得电子在钙钛矿与PTAA之间的界面聚集,诱导空穴从ITO方向注入,得到良好的高EQE倍增宽带响应。The present invention adopts two kinds of different hole transport layers to be placed on both sides of the perovskite layer respectively, wherein PffBT4T-2OD has an energy level structure (its HOMO and LOMO) which is extremely consistent with MAPbBr as the hole transport layer II material close to the metal electrode. The energy levels are -3.7 and -5.4), and has excellent carrier transport characteristics, so that under negative bias, the carriers excited by short-wavelength photons are depleted in the perovskite layer, and the remaining wavelengths are in the Photons near the perovskite absorption band edge can successfully excite electrons and holes without recombination at the interface inside the perovskite. Among them, PffBT4T-2OD is used as a hole transport layer, so that electrons accumulate at the interface between PffBT4T-2OD and the perovskite single crystal, and holes are induced to tunnel and inject from the Ag electrode, thereby obtaining a multiplied narrow-band response. Under positive bias, due to the direction of the applied external electric field, the electrons and holes excited by the incident short-wavelength photons are not recombined and quenched in the perovskite crystal. The interfacial aggregation between perovskite and PTAA induces hole injection from the ITO direction, resulting in a good broadband response with high EQE multiplication.

本发明采用小块钙钛矿单晶薄膜,并用PffBT4T-2OD厚涂覆盖形成一个厚膜包裹不连续钙钛矿单晶薄膜,起到传输空穴并隔离后续旋涂的电子传输层以及金属电极的作用,以确保透明电极与金属电极分离,并且由于金属电极的蒸镀区域大于钙钛矿单晶面积,这给器件的倍增提供了很好的空穴注入位点,从而得到倍增型光电探测器件。The present invention adopts a small piece of perovskite single crystal thin film and covers it with PffBT4T-2OD thick coating to form a thick film wrapped discontinuous perovskite single crystal thin film, which plays a role in transporting holes and isolating the electron transport layer and metal electrode of subsequent spin coating To ensure that the transparent electrode is separated from the metal electrode, and since the evaporation area of the metal electrode is larger than the area of the perovskite single crystal, this provides a good hole injection site for the multiplication of the device, thereby obtaining a multiplication photodetection device.

本发明通过改变外加电压方向控制光电探测器的宽窄带响应,在不同方向的外部施加偏压下,随着施加偏压增加,外量子效率(EQE)也相应增加。在-4V时,其外量子效率在550nm的绿光处为344%,响应度为1.53A/W,且具有1.35×1011较高的探测率,在4V偏压下,在320nm到550nm紫外到可见光宽范围中有较高的外量子效率,响应的半高全宽大于220nm,其中在370nm处到达峰值EQE为949%,响应度为2.98A/W,且探测率为9.81×1010Jones。The invention controls the wide and narrow band response of the photodetector by changing the direction of the applied voltage, and under the external applied bias voltage in different directions, the external quantum efficiency (EQE) also increases correspondingly with the increase of the applied bias voltage. At -4V, its external quantum efficiency is 344% at 550nm green light, its responsivity is 1.53A/W, and it has a high detection rate of 1.35× 1011 . It has a high external quantum efficiency in the wide range of visible light, the full width at half maximum of the response is greater than 220nm, and the peak EQE at 370nm is 949%, the responsivity is 2.98A/W, and the detection rate is 9.81×10 10 Jones .

本发明无需滤光层或改变光照方向,仅需通过改变外部电路施加电压方向即可获得控制选择宽带或窄带响应。The present invention does not require a filter layer or change the direction of illumination, and can obtain control and select wideband or narrowband response only by changing the direction of voltage applied by an external circuit.

附图说明Description of drawings

图1为本发明钙钛矿倍增光电探测器器件结构。Fig. 1 is the structure of the perovskite multiplied photodetector device of the present invention.

图2为本发明所述光电探测器的制备流程示意图。Fig. 2 is a schematic diagram of the preparation process of the photodetector of the present invention.

图3为本发明所述光电探测器的能级图;其中(a)为施加反偏压,(b)为施加正偏压。Fig. 3 is an energy level diagram of the photodetector of the present invention; wherein (a) is applied with a reverse bias voltage, and (b) is applied with a forward bias voltage.

图4为实施例1同一器件由透明电极方向入射在不同方向偏压从-4伏到4伏下的外量子效率曲线;其中(a)为施加反偏压,(b)为施加正偏压。Fig. 4 is the external quantum efficiency curve of the same device in embodiment 1 from -4 volts to 4 volts under the incident bias from the direction of the transparent electrode to 4 volts; where (a) is for applying a reverse bias, (b) is for applying a forward bias .

图5为基于实施例1所得宽带和窄带一体化的倍增型钙钛矿光电探测器制备的多功能探测阵列原型器件。FIG. 5 is a multifunctional detection array prototype device prepared based on the broadband and narrowband integrated multiplied perovskite photodetector obtained in Example 1.

具体实施方式Detailed ways

以下结合附图对本发明做出进一步的解释说明。The present invention will be further explained below in conjunction with the accompanying drawings.

实施例1Example 1

如图1所示,一种宽带和窄带并存的倍增型钙钛矿光电探测器,包括透明阳极电极(ITO,即氧化铟锡)1,空穴传输层Ⅰ(PTAA,即[双(4-苯基)(2,4,6-三甲基苯基)胺])2,钙钛矿层3,空穴传输层Ⅱ(PffBT4T-2OD,即聚[(4,7-双(4-(2-乙基己基)噻吩-2-基)-5,6-二氟苯并[C][1,2,5]噻二唑-5,5-二基)([2,2']联噻吩-5,5'-二基)])4,阴极界面层(PFN-Br,即聚[(9,9-二(3'-(N,N-二甲氨基)丙基)芴基-2,7-二基)-ALT-(9,9-二正辛基芴基2,7-二基)]-溴)5和阴极电极(Ag)6。As shown in Figure 1, a multiplication perovskite photodetector with both broadband and narrowband coexistence includes a transparent anode electrode (ITO, ie indium tin oxide) 1, a hole transport layer I (PTAA, ie [double (4- Phenyl) (2,4,6-trimethylphenyl) amine]) 2, perovskite layer 3, hole transport layer Ⅱ (PffBT4T-2OD, poly[(4,7-bis(4-(2 -Ethylhexyl)thiophen-2-yl)-5,6-difluorobenzo[C][1,2,5]thiadiazole-5,5-diyl)([2,2']bithiophene -5,5'-diyl)])4, cathode interface layer (PFN-Br, poly[(9,9-bis(3'-(N,N-dimethylamino)propyl)fluorenyl-2 ,7-diyl)-ALT-(9,9-di-n-octylfluorenyl2,7-diyl)]-bromo)5 and cathode electrode (Ag)6.

在本发明中,采用两个不同材料的空穴传输层置于钙钛矿有源层的两侧,分别为空穴传输层Ⅰ2和空穴传输层Ⅱ3。如图3所示,其中PffBT4T-2OD作为靠近金属电极的空穴传输层Ⅱ材料有着与MAPbBr3极度相符的能级结构,当光从ITO透明电极射入时,在负偏压下,由短波长光子激发出的载流子在钙钛矿层中耗尽,剩余波长在钙钛矿吸收带边附近的光子能顺利激发电子和空穴,且未在钙钛矿内部的界面复合。其中PffBT4T-2OD作为空穴传输层,使得电子在PffBT4T-2OD与钙钛矿单晶之间的界面累积,诱导空穴由Ag电极隧穿注入,被电极收集,从而得到一个倍增型的窄带响应。在正偏压下,由于施加的外部电场方向影响,入射的短波长光子激发出的电子和空穴并未在钙钛矿晶体中复合淬灭,且由于PTAA即空穴传输层Ⅰ使得电子在钙钛矿与PTAA之间的界面聚集,诱导空穴从ITO方向注入,得到良好的高EQE倍增宽带响应。In the present invention, two hole transport layers of different materials are placed on both sides of the perovskite active layer, namely the hole transport layer I2 and the hole transport layer II3. As shown in Figure 3, PffBT4T-2OD, as the hole transport layer II material close to the metal electrode, has an energy level structure that is extremely consistent with MAPbBr3. When light is incident from the ITO transparent electrode, under negative bias, the short wavelength The carriers excited by photons are depleted in the perovskite layer, and the photons with remaining wavelengths near the perovskite absorption band edge can successfully excite electrons and holes without recombination at the interface inside the perovskite. Among them, PffBT4T-2OD is used as a hole transport layer, so that electrons accumulate at the interface between PffBT4T-2OD and the perovskite single crystal, and induce holes to be tunneled and injected from the Ag electrode and collected by the electrode, thereby obtaining a multiplied narrow-band response. . Under positive bias, due to the direction of the applied external electric field, the electrons and holes excited by the incident short-wavelength photons are not recombined and quenched in the perovskite crystal. The interfacial aggregation between perovskite and PTAA induces hole injection from the ITO direction, resulting in a good broadband response with high EQE multiplication.

如图2所示,通过改变偏压方向实现窄带和宽带并存的倍增型光电探测器的制备方法,具体步骤如下:As shown in Figure 2, by changing the direction of the bias voltage to realize the preparation method of the multiplied photodetector with coexistence of narrow band and broadband, the specific steps are as follows:

步骤一、透明阳极ITO用去离子水,丙酮和异丙醇超声清洗然后烘干,在ITO上旋涂PTAA作为空穴传输层I,以旋涂速率为2000转/分,旋转40秒,并用80度退火15-20分钟,以形成致密的厚度约为3-8nm的PTAA薄膜,其疏水性可以有助于钙钛矿前驱体溶液均匀铺散在ITO上。Step 1. The transparent anode ITO is ultrasonically cleaned with deionized water, acetone and isopropanol and then dried. Spin-coat PTAA on the ITO as the hole transport layer I at a spin-coating rate of 2000 rpm for 40 seconds, and use Anneal at 80 degrees for 15-20 minutes to form a dense PTAA film with a thickness of about 3-8nm. Its hydrophobicity can help the perovskite precursor solution spread evenly on the ITO.

步骤二、在空穴传输层I上,滴钙钛矿前驱体溶液,两片旋涂有PTAA的透明ITO合在一起,形成一个半密闭的空间,采用逆温结晶的方法由40度至80度缓慢升温生长钙钛矿单晶,进而形成钙钛矿不连续单晶薄膜。Step 2. On the hole transport layer I, drop the perovskite precursor solution, and put two pieces of transparent ITO spin-coated with PTAA together to form a semi-closed space. Use the method of temperature inversion crystallization from 40 degrees to 80 degrees. Slowly increase the temperature to grow perovskite single crystals, and then form perovskite discontinuous single crystal films.

步骤三、采用厚涂PffBT4T-2OD的方式在不连续钙钛矿薄膜单晶上制备空穴传输层Ⅱ,滴涂PffBT4T-2OD并均匀铺开等待滴涂聚合物的溶剂挥发干,形成厚度约为300nm的厚膜,然后用80度退火15-20分钟。Step 3. Prepare the hole transport layer II on the discontinuous perovskite thin film single crystal by thick coating PffBT4T-2OD, drop-coat PffBT4T-2OD and spread it evenly until the solvent of the drip-coated polymer evaporates to form a thickness of about 300nm thick film, then annealed at 80 degrees for 15-20 minutes.

步骤四、在空穴传输层Ⅱ上以2000转/分,旋涂40秒PFN-Br,厚度为5-8nm,然后蒸镀100nm银作为阴极。Step 4: Spin-coat PFN-Br with a thickness of 5-8 nm on the hole transport layer II at 2000 rpm for 40 seconds, and then vapor-deposit 100 nm of silver as a cathode.

如图4所示,按照上述制备方法,基于15微米厚CH3NH3PbBr3作为有源层,光由ITO侧射入在反偏压-1,-2,-3,-4,正偏压1V,2V,3V,4V以及0V下探测器的外量子效率光谱曲线,其中图4(a)曲线从上至下依次对应-4V、-3V、-2V、-1V和0V。图4(b)曲线从上至下依次对应4V、3V、2V、1V和0V。在外加偏置电压为-4V时,在550nm的绿光处EQE为344%,半峰宽小于20nm,响应度为1.53A/W,且具有1.35×1011较高探测率的窄带光谱响应。当外加偏置电压为4v时,在320nm-550nm紫外到可见光宽范围中有较高的外量子效率,响应的半高全宽大于220nm其中在370nm处到达峰值EQE为949%,响应度为2.98A/W,且探测率为9.81×1010Jones的宽带响应。As shown in Figure 4, according to the above preparation method, based on the 15 micron thick CH 3 NH 3 PbBr 3 as the active layer, the light is incident from the ITO side at reverse bias -1, -2, -3, -4, forward bias External quantum efficiency spectral curves of the detector at voltages 1V, 2V, 3V, 4V and 0V, where the curves in Figure 4(a) correspond to -4V, -3V, -2V, -1V and 0V from top to bottom. Figure 4(b) curves correspond to 4V, 3V, 2V, 1V and 0V from top to bottom. When the applied bias voltage is -4V, the EQE at 550nm green light is 344%, the half-peak width is less than 20nm, the responsivity is 1.53A/W, and it has a narrow-band spectral response with a high detection rate of 1.35×10 11 . When the applied bias voltage is 4v, it has a high external quantum efficiency in the wide range of 320nm-550nm ultraviolet to visible light, and the full width at half maximum of the response is greater than 220nm, and the peak EQE at 370nm is 949%, and the responsivity is 2.98 A/W, and a broadband response with a detection rate of 9.81×10 10 Jones.

应用实施例1Application Example 1

基于宽带和窄带一体化的倍增型钙钛矿光电探测器的多功能探测阵列原型器件,以实施例1所述倍增型钙钛矿光探测器件作为CCD的像素基元,包括:镜头1、分色滤色片2、本发明所述宽带和窄带一体化倍增型的光电探测器阵列3,如图5所示。The multifunctional detection array prototype device based on the multiplication type perovskite photodetector integrated with broadband and narrowband, uses the multiplication type perovskite photodetector device described in Embodiment 1 as the pixel element of CCD, including: lens 1, The color filter 2 and the wideband and narrowband integrated multiplication type photodetector array 3 of the present invention are shown in FIG. 5 .

所述宽带和窄带一体化倍增型的光电探测器,由透明电极,空穴传输层Ⅰ,钙钛矿阵列层,空穴传输层Ⅱ,阴极界面层和金属电极组成。The broadband and narrowband integrated multiplication type photodetector is composed of a transparent electrode, a hole transport layer I, a perovskite array layer, a hole transport layer II, a cathode interface layer and a metal electrode.

具体的,当光由镜头方向射入,光通过分色滤色片(红(R)、绿(G)、蓝(B))作为滤色层使得多波段光分为三种不同波段光,然后由透明阳极射入钙钛矿光电探测器。在外部施加正偏压时,本发明所述钙钛矿光电探测器展现出宽带响应,可以探测不同波段的光,并快速把光信号转换为电信号并将信号传输给图像处理芯片,实现彩色成像的应用。在外部施加反向偏压下,本发明所述光电探测器为窄带响应,可以对固定单色光信号快速探测,省去对于复杂图片的算法分析,大大加快系统的响应速度。这在指示灯、旗语、光纤信号通信、自动驾驶等方面有着巨大的应用前景。在连续成像的过程中,使用正向偏压和反向偏压交替成像,可以有效解决常见的电荷存储从而出现由于电信号存储造成的历史影像留存的“鬼影”问题。Specifically, when the light enters from the lens direction, the light passes through the color separation filter (red (R), green (G), blue (B)) as a filter layer to make the multi-band light into three different bands of light, Then the perovskite photodetector is fired from the transparent anode. When a positive bias is applied externally, the perovskite photodetector of the present invention exhibits a broadband response, can detect light in different bands, and quickly converts the optical signal into an electrical signal and transmits the signal to the image processing chip to achieve color imaging applications. Under the externally applied reverse bias voltage, the photodetector of the present invention has narrow-band response, can quickly detect fixed monochromatic light signals, saves the algorithm analysis for complex pictures, and greatly speeds up the response speed of the system. This has great application prospects in indicator lights, semaphores, optical fiber signal communication, and automatic driving. In the process of continuous imaging, the use of forward bias and reverse bias alternate imaging can effectively solve the common problem of charge storage and the "ghost" problem of historical image retention caused by electrical signal storage.

上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。The above-mentioned embodiment is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above-mentioned embodiment, and any other changes, modifications, substitutions, combinations, Simplifications should be equivalent replacement methods, and all are included in the protection scope of the present invention.

Claims (10)

1.一种宽带和窄带一体化的倍增型钙钛矿光电探测器,其特征在于包括:阳极电极,空穴传输层Ⅰ,钙钛矿层,空穴传输层Ⅱ,阴极界面层和阴极电极;器件结构按上述顺序由阳极电极从左自右依次向阴极电极方向排列。1. A multiplying perovskite photodetector integrated with broadband and narrowband, characterized in that it comprises: an anode electrode, a hole transport layer I, a perovskite layer, a hole transport layer II, a cathode interface layer and a cathode electrode; The device structure is arranged in the above sequence from the anode electrode to the cathode electrode from left to right. 2.根据权利要求1所述的光电探测器,其特征在于:所述空穴传输层Ⅰ的材料为聚[双(4-苯基)(2,4,6-三甲基苯基)胺];所述空穴传输层Ⅰ的厚度为0.003~0.008μm。2. The photodetector according to claim 1, characterized in that: the material of the hole transport layer I is poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine ]; The thickness of the hole transport layer I is 0.003-0.008 μm. 3.根据权利要求1所述的光电探测器,其特征在于:所述钙钛矿层采用的材料为CH3NH3PbBr3;所述钙钛矿层的厚度为10-17μm。3 . The photodetector according to claim 1 , wherein the material used for the perovskite layer is CH 3 NH 3 PbBr 3 ; and the thickness of the perovskite layer is 10-17 μm. 4.根据权利要求1所述的光电探测器,其特征在于:所述空穴传输层Ⅱ采用的材料为聚[(4,7-双(4-(2-乙基己基)噻吩-2-基)-5,6-二氟苯并[C][1,2,5]噻二唑-5,5-二基)([2,2']联噻吩-5,5'-二基)];所述空穴传输层Ⅱ的厚度为0.5~0.7μm。4. The photodetector according to claim 1, characterized in that: the material used in the hole transport layer II is poly[(4,7-bis(4-(2-ethylhexyl)thiophene-2- base)-5,6-difluorobenzo[C][1,2,5]thiadiazole-5,5-diyl)([2,2']bithiophene-5,5'-diyl) ]; the thickness of the hole transport layer II is 0.5-0.7 μm. 5.根据权利要求1所述的光电探测器,其特征在于:所述阴极界面层采用的采用为聚[(9,9-二(3'-(N,N-二甲氨基)丙基)芴基-2,7-二基)-ALT-(9,9-二正辛基芴基2,7-二基)]-溴;所述阴极界面层的厚度为0.005~0.008μm。5. The photodetector according to claim 1, characterized in that: the cathode interface layer adopts poly[(9,9-bis(3'-(N,N-dimethylamino)propyl) Fluorenyl-2,7-diyl)-ALT-(9,9-di-n-octylfluorenyl 2,7-diyl)]-bromine; the thickness of the cathode interface layer is 0.005-0.008 μm. 6.根据权利要求1所述的光电探测器,其特征在于:所述阴极的材料采用银,厚度为0.05~0.3μm;所述阳极的材料采用透明导电基底,厚度为0.13~0.14μm。6 . The photodetector according to claim 1 , wherein the cathode is made of silver with a thickness of 0.05-0.3 μm; the anode is made of a transparent conductive substrate with a thickness of 0.13-0.14 μm. 7.权利要求1~6任一项所述宽带和窄带一体化的倍增型钙钛矿光电探测器的制备方法,其特征在于具体如下:7. the preparation method of the multiplying type perovskite photodetector described in any one of claim 1~6 integrated broadband and narrow band, it is characterized in that being specific as follows: 步骤一、在透明电极上制备空穴传输层Ⅰ;Step 1, preparing a hole transport layer I on the transparent electrode; 步骤二、在空穴传输层Ⅰ上生长钙钛矿作为有源层;Step 2, growing perovskite on the hole transport layer I as the active layer; 步骤三、在该有源层上制备空穴传输层Ⅱ;Step 3, preparing a hole transport layer II on the active layer; 步骤四、在空穴传输层Ⅱ上制备阴极界面层;Step 4, preparing a cathode interface layer on the hole transport layer II; 步骤五、在阴极界面层上制备金属电极。Step 5, preparing a metal electrode on the cathode interface layer. 8.根据权利要求7所述的宽带和窄带一体化的倍增型钙钛矿光电探测器的制备方法,其特征在于为如下所示:8. the preparation method of the multiplication type perovskite photodetector of broadband and narrowband integration according to claim 7, is characterized in that being as follows: 步骤一、透明阳极上旋涂聚[双(4-苯基)(2,4,6-三甲基苯基)胺],并用70~90℃退火15-20分钟,以形成致密的聚[双(4-苯基)(2,4,6-三甲基苯基)胺]薄膜,得到空穴传输层I;Step 1. Spin-coat poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] on the transparent anode, and anneal at 70-90°C for 15-20 minutes to form a dense poly[ Two (4-phenyl) (2,4,6-trimethylphenyl) amine] film, obtain hole transport layer I; 步骤二、在空穴传输层I上,滴钙钛矿前驱体溶液,将两片旋涂有聚[双(4-苯基)(2,4,6-三甲基苯基)胺]的透明ITO合在一起,形成一个半密闭的空间,采用逆温结晶的方法由40℃至80℃缓慢升温生长钙钛矿单晶,进而形成钙钛矿不连续单晶薄膜,得到钙钛矿层;Step 2. On the hole transport layer I, drip the perovskite precursor solution, spin-coat the two sheets with poly[bis(4-phenyl)(2,4,6-trimethylphenyl)amine] The transparent ITO is combined to form a semi-closed space, and the perovskite single crystal is grown by slowly increasing the temperature from 40°C to 80°C by the method of inversion crystallization, and then forms a discontinuous perovskite single crystal film to obtain a perovskite layer; 步骤三、采用厚涂聚[(4,7-双(4-(2-乙基己基)噻吩-2-基)-5,6-二氟苯并Step three, using thick coating poly[(4,7-bis(4-(2-ethylhexyl)thiophen-2-yl)-5,6-difluorobenzo [C][1,2,5]噻二唑-5,5-二基)([2,2']联噻吩-5,5'-二基)]的方式在钙钛矿不连续单晶薄膜上滴涂聚[(4,7-双(4-(2-乙基己基)噻吩-2-基)-5,6-二氟苯并[C][1,2,5]噻二唑-5,5-二基)([2,2']联噻吩-5,5'-二基)]并均匀铺开等待滴涂聚合物的溶剂挥发干,然后用70~90℃退火15-20分钟,制备得到空穴传输层Ⅱ;[C][1,2,5]thiadiazole-5,5-diyl)([2,2']bithiophene-5,5'-diyl)] in perovskite discontinuous single crystal Drop-coating poly[(4,7-bis(4-(2-ethylhexyl)thiophen-2-yl)-5,6-difluorobenzo[C][1,2,5]thiadiazole on film -5,5-diyl)([2,2']bithiophene-5,5'-diyl)] and spread evenly to wait for the solvent of the drop-coated polymer to evaporate, and then anneal at 70~90°C for 15- After 20 minutes, the hole transport layer II was prepared; 步骤四、在空穴传输层Ⅱ上旋涂聚[(9,9-二(3'-(N,N-二甲氨基)丙基)芴基-2,7-二基)-ALT-(9,9-二正辛基芴基2,7-二基)]-溴制备阴极界面层,然后蒸镀银作为阴极。Step 4: Spin-coat poly[(9,9-bis(3'-(N,N-dimethylamino)propyl)fluorenyl-2,7-diyl)-ALT-( 9,9-Di-n-octylfluorenyl 2,7-diyl)]-bromine to prepare the cathode interface layer, and then vapor-deposit silver as the cathode. 9.一种获得宽带响应或窄带响应的方法,其特征在于对权利要求1~6任一项所述探测器施加负偏压获得窄带响应或施加正偏压获得宽带响应。9. A method for obtaining a broadband response or a narrowband response, characterized in that a negative bias voltage is applied to the detector according to any one of claims 1 to 6 to obtain a narrowband response or a positive bias voltage is applied to obtain a broadband response. 10.根据权利要求9所述的方法,其特征在于:所述负偏压为-1~-4V,所述正偏压为1~4V。10. The method according to claim 9, wherein the negative bias voltage is -1-4V, and the positive bias voltage is 1-4V.
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