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CN114542961A - 用于气化来自低温液体气化器的清洗液的方法和设备 - Google Patents

用于气化来自低温液体气化器的清洗液的方法和设备 Download PDF

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Publication number
CN114542961A
CN114542961A CN202111386498.6A CN202111386498A CN114542961A CN 114542961 A CN114542961 A CN 114542961A CN 202111386498 A CN202111386498 A CN 202111386498A CN 114542961 A CN114542961 A CN 114542961A
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Prior art keywords
liquid
vaporized
cryogenic
column
gasifier
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CN202111386498.6A
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English (en)
Inventor
B·达维迪安
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Publication of CN114542961A publication Critical patent/CN114542961A/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04769—Operation, control and regulation of the process; Instrumentation within the process
    • F25J3/04854—Safety aspects of operation
    • F25J3/0486—Safety aspects of operation of vaporisers for oxygen enriched liquids, e.g. purging of liquids
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    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44—Sample treatment involving radiation, e.g. heat
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
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    • B01D3/14—Fractional distillation or use of a fractionation or rectification column
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    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
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    • F17C13/00—Details of vessels or of the filling or discharging of vessels
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    • F25J3/04412—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a dual pressure main column system in a classical double column flowsheet, i.e. with thermal coupling by a main reboiler-condenser in the bottom of low pressure respectively top of high pressure column
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    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
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    • F25J3/04769—Operation, control and regulation of the process; Instrumentation within the process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
    • F25J3/04763—Start-up or control of the process; Details of the apparatus used
    • F25J3/04769—Operation, control and regulation of the process; Instrumentation within the process
    • F25J3/04812—Different modes, i.e. "runs" of operation
    • F25J3/04824—Stopping of the process, e.g. defrosting or deriming; Back-up procedures
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    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
    • F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
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    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
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    • F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
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    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
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    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
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Abstract

用于气化来自低温液体气化器(R)的清洗液的方法，该液体含有至少一种杂质，其中清洗液(3)从围绕气化器或由气化器产生的液体浴中取出，所有清洗液在加热器(H)中气化，其特征在于分析至少一部分(5,7)或甚至所有加热气化的液体中的至少一种杂质的含量，并且测量至少一部分或甚至所有加热气化的液体的流量。

Description

用于气化来自低温液体气化器的清洗液的方法和设备
本发明涉及用于气化来自低温液体气化器的清洗液(purge liquid)的 方法和设备。低温液体气化器部分气化含有杂质的液体以形成气体。在低 温下，这些杂质中的一些易于沉积在空气分离单元的组成部件中，特别是 在蒸馏塔的气化器-冷凝器中。因此，无论是在产品质量还是工厂安全方面， 了解杂质含量都是必不可少的。
这种低温液体，通常是氧气、氮气或氩气，具有低于约-170℃的温度。 它们特别是通过使用属于空气分离单元的蒸馏塔来生产的。
已知对这些低温液体采样以用于其随后的分析。这样就可以特别检查 这些液体中低挥发性杂质的含量，例如一氧化二氮N2O、二氧化碳CO2或碳氢化合物CnHm。
在分析低挥发性杂质时，难点在于获得环境温度下的气化样品，该样 品尽可能代表待分析液体。
这是因为常用的分析方法，例如气相色谱法或红外光谱法，涉及将采 集的样品加热到接近环境温度的温度。为此，必须首先将采样的低温液体 气化，然后对其进行加热。
在这些条件下，为了得到代表低温液体浴的分析结果，一方面建议从 中取出代表整个浴的平均组成的液体样品，然后将其迅速而彻底地气化。
在空气分离单元的情况下，尤其已知两种低温液体采样模式。
第一种采样模式，也称为液体提升，基于热虹吸效应。为实现这一点， 对待分析的液体进行了旁通，其中通过该液体的一部分气化来提供旁通流。
该液体提升被转移到空气分离单元的冷箱壁，在绝缘外壳内，例如由 岩棉绝缘，以限制任何热量流入。在这个提升中流动的低温液体的连续样 品然后在与混合器相关的翅片式大气换热器中气化，这通常被称为“闪蒸”。
另一种采样模式，也称为毛细管采样，包括在压力下通过毛细管抽取 液体，即小内径例如约0.5mm的第一管。然后将这种液体在横截面更大的 第二根管中输送到热点，以确保所有待分析的液体瞬间气化。
这些已知的采样系统是普遍的并且保证了通常令人满意的结果。但是， 它们确实存在某些缺点。
因此，它们可能导致所取样品的代表性问题，特别是在毛细管采样方 面。这是因为后者如果连接到液体浴，则不允许所述待分析液体的强制流 动。
此外，这些系统会老化，特别是在液体提升方面。
这是因为，在后者的情况下，水分逐渐渗透到绝缘外壳中，导致冰的 形成和然后积聚。热流入然后变得使得液体流动可能因此受到不利影响。
在这些条件下，本发明建议使用一种能够可靠地对低温液体进行采样 的方法，同时使用仅需要很少维护的装置。
FR-A-2839153描述了根据权利要求1的前序部分的方法，并且通过与 热流体的热交换使低温液体气化。
为此，本专利的一个主题是对至少一种低温液体(特别是氧气或氮气) 进行采样的方法，其中所述低温液体含有杂质，例如一氧化二氮、二氧化 碳或碳氢化合物，其中液体气化形成气体，然后气体首先被送到流量计， 然后送到分析仪。
根据本发明的一个主题，提供了一种用于气化来自低温液体气化器的 清洗液的方法，该液体含有至少一种杂质，其中清洗液从围绕气化器的或 由气化器产生的液体浴中取出，所有的清洗液在加热器中气化，其特征在 于分析至少一部分或甚至所有加热气化的液体中的至少一种杂质的含量并 测量至少一部或甚至所有加热气化的液体的流量。
根据一些任选方面：
·分析所有加热气化的液体中至少一种杂质的含量并测量所有加热气 化的液体的流量，分析采样在流量测量的上游；
·气化器位于蒸馏塔底部；
·将加热的液体分成两部分，分析第一部分中至少一种杂质的含量并测 量第二部分的流量；
·第一部分构成加热的液体的小于5％，优选小于1％，或甚至0.5％；
·第二部分构成加热的液体的大于95％，优选大于99％，或甚至99.5％；
·低温液体气化器气化低温液体以产生气态产物；
·在加热器中气化的第二部分液体被送去与气态产物混合；
·在加热器中气化的一部分液体，优选已经测量过其流量，被送去与气 态产物混合。
·气态产物在换热器中加热到0℃以上的温度，然后与在加热器中气化 的第二部分液体混合。
根据本发明的另一个主题，提供了一种通过低温蒸馏分离空气的方法， 该方法包括塔系统，其中空气在塔系统中被冷却和分离以产生在气化器中 气化的低温液体，如上所述从其中气化的清洗液。
在气化器中气化的低温液体可以是液氧。
在气化器中气化的低温液体可以是含有至少25mol％氧的富氧液体。
根据本发明的另一个主题，提供了一种用于气化来自低温液体气化器 的清洗液的设备，该液体含有至少一种杂质，所述设备包括低温液体气化 器、用于从围绕气化器的或由气化器产生的液体浴中抽取清洗液的管线、 用于气化清洗液的加热器、流量计和用于分析清洗液的至少一种杂质的含 量的分析仪，其特征在于它包括用于将至少一部分气化的清洗液输送到分 析仪以分析至少一种杂质的含量的装置，以及用于将至少一部分气化的清 洗液输送到流量计的管线。
如果将所有清洗液输送到流量计和分析仪，则用于将至少一部分气化 的清洗液输送到分析仪以分析至少一种杂质的含量的装置由用于将至少一 部分气化的清洗液输送到流量计的管线构成。
可能地，该设备包括用于将气化的清洗液的第一部分输送到分析仪的 装置和/或用于将气化的清洗液的第二部分输送到流量计的装置。
在这种情况下，优选地，该设备不包括用于将气化的清洗液的第一部 分输送到流量计的装置和/或不包括将气化的清洗液的第二部分输送到分 析仪的装置。
根据本发明的另一个主题，提供了一种用于通过低温蒸馏分离空气的 设备，该设备包括用于生产低温液体的塔系统和上述用于气化清洗液的设 备，该塔系统连接到低温液体加热器。
塔系统优选包括在第一压力下操作的第一塔和在低于第一压力的第二 压力下操作的第二塔。
该设备可包括：
·用于从与加热器相连的第二塔中取出清洗液的装置；
·用于从与加热器相连的第一塔中取出底部液体的装置。
液体从气化器清洗到双塔低温蒸馏空气分离设备代表小流量，特别是 对于难以测量的小尺寸设备。然而，对这种流量进行精确测量很重要，这 会设定液氧浴中的杂质浓度水平，如果设备直接从低压塔中产生气态氧， 则更是如此。
根据现有技术的解决方案是采样清洗系统，其包括在已知持续时间内 填充然后周期性地清空已知体积以便平均具有正确的清洗流量。这需要一 个罐、几个阀门和仪器(液位测量)。瞬时清洗流大，通常被“扔”到低温 清洗系统中。分子没有被回收。在某些情况下，清洗过的液体可能会被送 到一个储存罐，其在设备发生故障时作为备用。
杂质的分析使用专用的采样系统在气化器的低温液体浴上进行，通常 是闪蒸型。
本发明还涉及一种空气分离设备，其包括低温液体气化器和用于气化 清洗液的设备。
本发明旨在通过将其与次级杂质的分析相结合来升级气体产物形式的 来自气化器的去浓缩清洗流。
本发明包括快速气化整个液体清洗流，以获得环境温度下的气体，容 易地测量其流量并提取气态样品以连续输送到杂质分析仪。剩余的气体不 分析，然后与生产气体混合，从而避免失去分子。
优点是具有可靠、连续的流量测量，并且取消了用于测量杂质的低温 采样系统，该系统昂贵、笨重且难以安装在真空绝热冷箱中。
现在将参考附图更详细地描述根据本发明的方法：
附图说明
[图1]和[图2]示意性地表示根据本发明的方法。
在图1中，通过低温蒸馏分离空气的设备由主换热器E和双塔K1、 K2组成，位于一个或多个绝热室，例如真空绝热冷箱内，能够在低温下 运行。
双塔包括第一塔K1，其上是在比第一塔更低的压力下操作的第二塔 K2。
空气1在交换器E中被冷却并被送到第一塔K1的底部，在那里它通 过蒸馏被分离。富氧流从第一塔K1的底部输送到塔K2的中间点。富氮 流从第一塔K1的顶部输送到第二塔K2。
来自第一塔顶部的氮气在第二塔底部的气化器-冷凝器R中冷凝，在 那里它用于气化围绕气化器R的第二塔的底部液体。构成一种或甚至设备 的产物的气态氧流9从第二塔中取出并在交换器E中加热。来自第二塔顶 部的气态氮11在交换器E中加热。
此处表示的气化器R是常规浴气化器并且其清洗流从浴中取出。相反， 气化器R可以是薄膜气化器，其中液体“浴”在气化器下方，或者是所谓的 浴气化器，但具有内置罐或再循环管，没有传统意义上的真正浴。
因此，可以从围绕气化器或由气化器产生的液体浴中取出清洗液。
来自此处围绕气化器R的液氧浴的清洗流3在浴的底部连续取出。然 后它依靠确保高壁温(使得清洗液和流体之间的ΔT大于100℃)的流体“突 然”气化(闪蒸)，以避免次级杂质(CnHm，CO2，N2O)的高局部浓度，该 高局部浓度对加热器H中的安全是危险的。这也可以确保液体清洗中存在 的所有杂质都存在于由此形成的气体中，这将使得具有对杂质进行可靠的 分析(因此在加热器H中没有沉积会影响分析的杂质)。然后在加热器H 中以气态形式加热至环境温度。
加热器H中的热交换可以在常压气化发夹中与环境空气进行，在壳管 式交换器中与水进行，或者优选地在具有壳管和螺旋管或同轴螺旋管的交 换器中进行。交换器还可以包括用于清洗流和用于水的螺旋管，每一样都 嵌入铝或铜基体中。交换器还可包括电加热。
加热器H可以位于任何隔热室的外部。
旨在与低温液体3或每种低温液体3接触的加热器H的壁保持在高于 清洗液体温度至少15℃，优选至少50℃，或甚至至少100℃的温度，从 而将气化液体加热到至少-50℃，或甚至至少-20℃，优选至少0℃。
为了做到这一点，加热加热器H的流体通常必须比低温液体热至少 100℃。
加热器壁的温度也优选高于低温液体中所含的最不易挥发的杂质的升 华或气化温度。
从清洗3中采样小流7，例如至多清洗流的5％，优选小于清洗流的 1％或0.5％，并且该流通过几米长的管道输送到杂质分析仪在环境温度下 分析它们，即至少0℃。清洗流3的总气化使得以可靠的方式测量其流量 成为可能(因为它是处于环境温度下的气态流)。在流量测量的上游进行 由于采样而进行的分离。小采样流仅轻微地并且以安全的方式(上限值) 干扰清洗流3的测量。或者，分离可以在流量测量的下游进行。
然后很容易在流量测量装置FIC中，例如通过简单的孔板或热线质量 流量计，测量构成清洗流的至少95％，优选大于99％，或甚至99.5％的剩 余气体清洗流5。该测量意味着FIC位于腔室外部，就像加热器H一样， 因为流量测量是在环境温度下进行的。
然后在交换器E的热端将加热的清洗流5与气态氧9的产物再混合， 这使得可以将产量增加几个百分比，通常大约为1％。
在设备的整个操作过程中，清洗流3通过打开的阀V1被送到加热器 H。由于FIC流量测量，阀V1调节清洗流量。
本发明使得用于连续和更可靠地管理清洗流的组件数量最小化成为可 能，并且其紧凑性/简单性使其能够容易地集成到真空绝热冷箱中。
该设备可以包括涡轮机(图1中未示出)以保持设备冷。在真空冷箱 的情况下，涡轮机的本体可以直接焊接到冷箱的壳体上，这样可以实现更 好的紧凑性并保证相对于真空的密封性。涡轮机的内部部件，通常称为筒 体，可以从外部移除，而无需进入真空冷箱，例如在机器损坏的情况下更 换轮。类似地，过滤器可定位在涡轮机的吸入端以保护轮。将其集成到筒 体或涡轮机主体中也是有利的，同时可从外部接近以便能够对其进行更换 或清洁。
此外，为了实现更好的紧凑性，低温阀可以将它们的主体安装在真空 冷箱中，并将它们的延伸通道焊接到冷箱壁上，任选地通过位于延伸通道 和真空冷箱的外壳之间的法兰和/或波纹管。
涡轮机和阀门可以安装在冷箱的一部分中，该部分与冷箱的其余部分 相比具有减小的直径，以便将这些件装置放置在冷箱的“阴影”中，而不会 受到例如关于运输尺寸的这种影响。
此外，在设备长时间停机期间，有必要清除所有低温液体，这些液体 通常被送到外部储罐，在那里液体缓慢气化。这种储罐尺寸大，因此价格 昂贵。可以将这个功能添加到用于气化来自气化器R的连续清洗流的交换 器H，通过加大它的尺寸：这使得有一个不排放任何低温液体的设备成为 可能，因此不必处理相关的安全问题。
[图2]显示了上图设备的改进版本，其中加热器H除了气化清洗液外 还用于气化第一塔K1的底部液体。具体而言，在设备停机期间，液体通 过塔下降并积聚在底部。为了在液位过高时启动塔，或者如果需要通过在 环境温度下输送气体来对设备进行除冰以完全加热设备，必须除去底部液 体，这种底部液体通常被送到一个专用的换热器，在那里它被气化，然后 被送到大气或任何其他清洗系统，例如外部储罐，液体在那里缓慢气化。 在此，在设备的正常操作期间，交换器H用于气化清洗液3，阀门V1打 开而阀门V2关闭。
停机后，重新启动或除冰前，阀门V2打开，使底部液体通过管线13 进入换热器H。
用于在不同时期气化两种液体的热源可以是电或现场存在的流体15， 例如空气或水。
底部液体因此被气化并被送入空气中。
在该图中，底部液体是来自第一塔K1的液体，但它可能来自另一塔， 例如K2或氩气塔。
在该图中，在交换器H中气化和加热的液体被分成两部分，只有部分 7被分析，且只有部分5通过流量计FIC。因此不分析部分5并且不测量 部分7的流量。
也可以不分离加热的液体并分析整个流并测量整个流。在这种情况下， 优选将分析采样点置于流量计的上游，以保证分析仪内的压力足够高。
为了减少到达换热器H的清洗液的空间量(footprint)和增加流体静 压，该换热器放置在第一塔K1下方，优选放置在包含塔K1、K2的室下 方。可以将换热器E放置在塔K1底部和换热器H之间。
对于这两个图，塔K1在1.2和6.5巴之间运行，优选在1.2和4.5巴 之间。

Claims (14)

1.用于气化来自低温液体气化器(R)的清洗液的方法，所述液体含有至少一种杂质，其中清洗液(3)从围绕气化器的或由气化器产生的液体浴中取出，所有清洗液在加热器(H)中气化，其特征在于分析至少一部分(5，7)或甚至所有加热气化的液体中的至少一种杂质的含量，并且测量至少一部分或甚至所有加热气化的液体的流量。
2.根据权利要求1所述的方法，其中分析所有加热气化的液体中至少一种杂质的含量并测量所有加热气化的液体的流量，分析采样在流度测量的上游。
3.根据权利要求1所述的方法，其中将加热到至少-50℃的液体分成两部分(5，7)，分析第一部分中至少一种杂质的含量并且测量第二部分的流量。
4.根据权利要求3所述的方法，其中第一部分(7)构成气化液体的至多5％，优选小于1％，或甚至0.5％。
5.根据前述权利要求之一所述的方法，其中低温液体气化器(R)气化低温液体以产生气态产物(9)，在加热器(H)中气化的液体的至少一部分，优选第二部分(5)，被送去与气态产物混合。
6.根据与权利要求3和4中任一项结合的权利要求5的方法，其中气态产物(9)在换热器(E)中被加热到高于0℃的温度，然后与在加热器(H)中气化的液体的第二部分混合。
7.通过低温蒸馏分离空气的方法，所述低温蒸馏包括塔系统(K1、K2)，其中空气(1)在塔系统中被冷却和分离以产生在气化器(R)中气化的低温液体，根据前述权利要求中的一项从其气化的清洗液(3)。
8.根据前述权利要求之一所述的方法，其中在气化器(R)中气化的低温液体是液氧或含有至少25mol％氧的富氧液体。
9.用于气化来自低温液体气化器(R)的清洗液(3)的设备，其中所述清洗液含有至少一种杂质，所述设备包括低温液体气化器、用于从围绕气化器的或由气化器产生的液体浴中取出清洗液的管线、用于气化清洗液的加热器(H)、流量计(FIC)和用于分析清洗液的至少一种杂质的含量的分析仪(AI)，其特征在于它包括用于将至少一部分气化的清洗液输送到分析仪以分析至少一种杂质的含量的装置，以及用于将至少一部分气化的清洗液输送到流量计的管线。
10.根据权利要求9所述的设备，包括用于将气化的清洗液的第一部分(7)输送到分析仪(AI)的装置和/或用于将气化的清洗液的第二部分(5)输送到流量计(FIC)的装置。
11.根据权利要求9或10所述的装置，不包括用于将气化的清洗液的第一部分输送到流量计(FIC)的装置。
12.根据权利要求9、10或11所述的装置，不包括用于将气化的清洗液的第二部分输送到分析仪的装置。
13.通过低温蒸馏分离空气的设备，包括用于生产低温液体的塔系统(K1、K2)和根据权利要求9、10、11或12所述的用于气化清洗液的设备，所述塔系统被连接到低温液体加热器(H)以将塔底液体(13)从塔系统的塔(K1)输送到低温液体加热器(H)，所述设备包括用于从第二塔取出清洗液(3)和从第一塔取出底部液体的装置。
14.根据权利要求13所述的装置，其中塔系统包括在第一压力下操作的第一塔(K1)和在低于第一压力的第二压力下操作的第二塔(K2)。
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