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CN114518489A - A low-cost measurement system and measurement method for high-resistance resistance - Google Patents

A low-cost measurement system and measurement method for high-resistance resistance Download PDF

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CN114518489A
CN114518489A CN202011317047.2A CN202011317047A CN114518489A CN 114518489 A CN114518489 A CN 114518489A CN 202011317047 A CN202011317047 A CN 202011317047A CN 114518489 A CN114518489 A CN 114518489A
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resistor
resistance
measured
voltage
measuring
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杨宏银
黄宇
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Shenzhen Kaifa Technology Co Ltd
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Shenzhen Kaifa Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/14Measuring resistance by measuring current or voltage obtained from a reference source
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/025Measuring very high resistances, e.g. isolation resistances, i.e. megohm-meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/20Measuring earth resistance; Measuring contact resistance, e.g. of earth connections, e.g. plates

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  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

A low-cost measuring system and a measuring method for a high-resistance resistor are provided. The measuring system comprises an excitation source, an excitation resistor, a resistor to be measured and a voltage detection module; the excitation resistor is connected with the resistor to be detected in series, one end of the excitation resistor is connected with the excitation source, the other end of the excitation resistor is connected with one end of the resistor to be detected, the other end of the resistor to be detected is grounded, and the voltage detection module is connected to two ends of the resistor to be detected; the excitation source is used for outputting stable measuring voltage, and the voltage detection module is used for measuring the voltage at two ends of the resistor to be measured. The measuring system and the measuring method can be used for detecting the grounding condition of the anti-static table mat in real time and measuring the resistance of the anti-static table mat, and the high-resistance value resistance measuring system and the high-resistance value resistance measuring method do not need a heavy hammer type surface resistance tester, so that the measuring cost can be greatly saved.

Description

一种低成本的高阻值电阻的测量系统及测量方法A low-cost measurement system and measurement method for high-resistance resistance

技术领域technical field

发明涉及电子技术领域,具体涉及高阻值电阻的测量系统及测量方法,更具体而言,涉及一种低成本的高阻值电阻的测量系统及测量方法。The invention relates to the field of electronic technology, in particular to a measurement system and a measurement method for a high-resistance resistor, and more particularly, to a low-cost measurement system and a measurement method for a high-resistance resistor.

背景技术Background technique

在电子产品的生产作业中,员工的工作台上会放置很多电子元件,这些电子元件产生的静电很容易对人体及电子产品造成干扰,所以,现如今很多电子产品的生产车间的工作台上都铺设了大量防静电台垫。根据国标要求,铺设在工作台上的防静电台垫的表面层电阻需要达到106Ω至109Ω。目前业内,为了确保防静电台垫的表面层电阻确实达到了所需要求,通常用重锤式表面电阻测试仪定期测试防静电台垫的电阻。此方法的缺点在于,重锤式表面电阻测试仪价格昂贵,导致此法成本居高不下。In the production of electronic products, many electronic components are placed on the workbench of employees. The static electricity generated by these electronic components can easily interfere with the human body and electronic products. A large number of anti-static table mats are laid. According to the requirements of the national standard, the surface layer resistance of the anti-static mat laid on the workbench needs to reach 10 6 Ω to 10 9 Ω. At present, in the industry, in order to ensure that the surface layer resistance of the anti-static table mat really meets the required requirements, the resistance of the anti-static table mat is usually tested regularly with a weight-type surface resistance tester. The disadvantage of this method is that the heavy hammer surface resistance tester is expensive, resulting in the high cost of this method.

发明内容SUMMARY OF THE INVENTION

本发明所要解决的技术问题在于,针对上述现有技术中的问题,提供一种低成本的高阻值电阻的测量系统及测量方法,所述测量系统及测量方法能够用于实时检测防静电台垫的接地情况,并测量防静电台垫的电阻,实施所述高阻值电阻测量系统及方法不需要用到重锤式表面电阻测试仪,可大幅节约测量成本。The technical problem to be solved by the present invention is to provide a low-cost measurement system and measurement method for high-resistance resistors, which can be used for real-time detection of anti-static tables in view of the problems in the prior art The grounding condition of the mat is measured, and the resistance of the anti-static table mat is measured. The implementation of the high-resistance resistance measurement system and method does not require the use of a weight-type surface resistance tester, which can greatly save the measurement cost.

为解决上述技术问题,发明所采用的技术方案是提供一种低成本的高阻值电阻测量系统,所述测量系统包括激励源、激励电阻、待测电阻以及电压检测模块;所述激励电阻与所述待测电阻相串联,所述激励电阻的一端与所述激励源相连、另一端与所述待测电阻的一端相连,所述待测电阻的另一端接地,所述电压检测模块连接于所述待测电阻的两端;其中,所述激励源用于输出稳定的测量电压,所述电压检测模块用于测量所述待测电阻两端的电压。In order to solve the above technical problems, the technical scheme adopted in the invention is to provide a low-cost high-resistance resistance measurement system, the measurement system includes an excitation source, an excitation resistance, a resistance to be measured and a voltage detection module; the excitation resistance and The resistances to be measured are connected in series, one end of the excitation resistance is connected to the excitation source, the other end is connected to one end of the resistance to be measured, the other end of the resistance to be measured is grounded, and the voltage detection module is connected to the Both ends of the resistance to be measured; wherein, the excitation source is used to output a stable measurement voltage, and the voltage detection module is used to measure the voltage across the resistance to be measured.

通过采用上述技术方案的测量系统,通过所述激励源输出稳定的测量电压,由所述电压检测模块测量得到所述待测电阻(可以是防静电台垫)两端的电压,由此可以得知所述激励电阻两端的电压,而在所述激励电阻的阻值已知的情况下即可得出流经所述激励电阻的电流值,由于所述激励电阻与所述电测电阻为串联关系,流经所述激励电阻的电流值与流经所述待测电阻的电流值相同,再根据欧姆定律即可得到所述待测电阻的阻值。如此,可在不使用重锤式表面电阻测试仪的情况下对防静电台垫的接地电阻进行测量,可大幅节约测量成本。By adopting the measurement system of the above technical solution, the excitation source outputs a stable measurement voltage, and the voltage detection module measures the voltage at both ends of the resistance to be measured (which may be an anti-static pad), thus it can be known that The voltage across the excitation resistor, and when the resistance value of the excitation resistor is known, the current value flowing through the excitation resistor can be obtained, because the excitation resistor and the electrical measuring resistor are in a series relationship , the value of the current flowing through the excitation resistor is the same as the value of the current flowing through the resistor to be measured, and then the resistance value of the resistor to be measured can be obtained according to Ohm's law. In this way, the grounding resistance of the anti-static mat can be measured without using a weight-type surface resistance tester, which can greatly save the measurement cost.

本发明提供的高阻值电阻测量系统中,所述电压检测模块包括跟随器、运算放大器和处理器,所述跟随器的一端连接于所述待测电阻的一端、另一端与所述运算放大器的一端连接,所述运算放大器的另一端与所述处理器的一端连接,所述处理器的另一端接地。In the high resistance resistance measurement system provided by the present invention, the voltage detection module includes a follower, an operational amplifier and a processor, one end of the follower is connected to one end of the resistance to be measured, and the other end is connected to the operational amplifier One end of the operational amplifier is connected to one end of the operational amplifier, and the other end of the processor is connected to ground.

本发明提供的高阻值电阻测量系统中,所述跟随器的一端通过第一软件滤波器与所述待测电阻的一端连接。In the high resistance resistance measurement system provided by the present invention, one end of the follower is connected to one end of the resistance to be measured through a first software filter.

本发明提供的高阻值电阻测量系统中,所述跟随器与所述运算放大器之间连接有第二软件滤波器。In the high-resistance resistance measurement system provided by the present invention, a second software filter is connected between the follower and the operational amplifier.

本发明提供的高阻值电阻测量系统中,所述运算放大器与所述处理器之间连接于第三软件滤波器。In the high resistance resistance measurement system provided by the present invention, a third software filter is connected between the operational amplifier and the processor.

本发明提供的高阻值电阻测量系统中,所述第一软件滤波器与所述待测电阻之间连接有保护电路。In the high resistance resistance measurement system provided by the present invention, a protection circuit is connected between the first software filter and the resistance to be measured.

本发明提供的高阻值电阻测量系统中,所述激励源输出测量电压的电压值在2V-5V之间,所述激励电阻的阻值在100MΩ-300MΩ之间。In the high resistance resistance measurement system provided by the present invention, the voltage value of the excitation source output measurement voltage is between 2V-5V, and the resistance value of the excitation resistor is between 100MΩ-300MΩ.

相应的,本发明还提供了一种利用如上所述的测量系统对高阻值电阻进行测量的测量方法,所述测量方法包括测量步骤,所述测量步骤包括如下步骤:Correspondingly, the present invention also provides a measurement method for measuring high-resistance resistance by using the above measurement system, the measurement method includes a measurement step, and the measurement step includes the following steps:

利用所述激励源输出电压值为V的测量电压;Using the excitation source to output a measurement voltage whose value is V;

根据所述电压检测模块获得所述待测电阻两端的电压,记为V’;Obtain the voltage at both ends of the resistance to be measured according to the voltage detection module, denoted as V';

按如下公式计算出流经所述待测电阻的电流I’,I’=(V-V’)/R,其中,R为所述激励电阻的阻值;Calculate the current I' flowing through the resistance to be measured according to the following formula, I'=(V-V')/R, where R is the resistance value of the excitation resistance;

按如下公式计算得出所述待测电阻的测量值Rx’,Rx’=V’R/(V-V’)。The measured value R x ' of the resistance to be measured is calculated according to the following formula, where R x '=V'R/(V-V').

本发明提供的测量方法中,所述电压检测模块包括跟随器、运算放大器和处理器,所述跟随器的一端连接于所述待测电阻的一端、另一端与所述运算放大器的一端连接,所述运算放大器的另一端与所述处理器的一端连接,所述处理器的另一端接地;所述运算放大器的放大倍数为N;所述的“根据所述电压检测模块获得所述待测电阻两端的电压”的步骤包括如下步骤:In the measurement method provided by the present invention, the voltage detection module includes a follower, an operational amplifier and a processor, one end of the follower is connected to one end of the resistance to be measured, and the other end is connected to one end of the operational amplifier, The other end of the operational amplifier is connected to one end of the processor, and the other end of the processor is grounded; the amplification factor of the operational amplifier is N; The voltage across the resistor" step includes the following steps:

读取测量过程中所述处理器的电压值,记为V0Read the voltage value of the processor during the measurement process, denoted as V 0 ;

按如下公式计算得出所述待测电阻两端的电压V’,V’=V0/N。The voltage V' across the resistance to be measured is calculated according to the following formula, where V'=V 0 /N.

本发明提供的测量方法中,所述测量方法还包括校准步骤,所述校准步骤包括:In the measurement method provided by the present invention, the measurement method further includes a calibration step, and the calibration step includes:

将所述待测电阻替换为阻值已知的标准电阻,所述标准电阻的阻值为RThe resistance to be measured is replaced with a standard resistance with a known resistance value, and the resistance value of the standard resistance is the R mark ;

按照所述测量步骤对所述标准电阻的阻值进行测量,得到所述标准电阻的测量值R’;Measure the resistance value of the standard resistance according to the measuring step, and obtain the measured value R mark ' of the standard resistance;

按如下公式计算得出校准值△R,△R=R’-RCalculate the calibration value △R according to the following formula, △R=R mark '-R mark ;

所述测量方法还包括如下步骤:The measurement method also includes the following steps:

按如下公式计算得到所述待测电阻的真实值Rx,Rx=Rx’-△R=V’R/(V-V’)-△R=RV0/(NV-V0)-△R。The real value R x of the resistance to be measured is calculated according to the following formula, R x =R x '-ΔR=V'R/(V-V')-ΔR=RV 0 /(NV-V 0 )- ΔR.

实施本发明具至少可以达到以下有益效果:Implementing the tool of the present invention can at least achieve the following beneficial effects:

1、在本发明的测量系统中,通过所述激励源输出稳定的测量电压,由所述电压检测模块测量得到所述待测电阻(可以是防静电台垫)两端的电压,由此可以得知所述激励电阻两端的电压,而在所述激励电阻的阻值已知的情况下即可得出流经所述激励电阻的电流值,由于所述激励电阻与所述电测电阻为串联关系,流经所述激励电阻的电流值与流经所述待测电阻的电流值相同,再根据欧姆定律即可得到所述待测电阻的阻值。如此,可在不使用重锤式表面电阻测试仪的情况下对防静电台垫的接地电阻进行测量,可大幅节约测量成本。1. In the measurement system of the present invention, the excitation source outputs a stable measurement voltage, and the voltage detection module measures the voltage across the resistance to be measured (which can be an anti-static pad), thereby obtaining The voltage across the excitation resistor is known, and when the resistance value of the excitation resistor is known, the current value flowing through the excitation resistor can be obtained. Since the excitation resistor and the electrical measuring resistor are connected in series relationship, the value of the current flowing through the excitation resistor is the same as the value of the current flowing through the resistor under test, and then the resistance value of the resistor under test can be obtained according to Ohm's law. In this way, the grounding resistance of the anti-static mat can be measured without using a weight-type surface resistance tester, which can greatly save the measurement cost.

2、在本发明的测量方法,利用阻值已知的标准电阻对整个所述测量系统进行测量误差的校准,得到校准值△R,然后将测得的所述待测电阻的测量值Rx’减去所述校准值△R可得到所述待测电阻的真实值Rx,如此,使得利用所述测量方法得到的测量结果更加准确。2. In the measurement method of the present invention, a standard resistor with a known resistance value is used to calibrate the measurement error of the entire measurement system to obtain a calibration value ΔR, and then the measured value of the resistance to be measured R x 'Subtract the calibration value ΔR to obtain the real value R x of the resistance to be measured, so that the measurement result obtained by the measurement method is more accurate.

附图说明Description of drawings

为了更清楚地说明发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是发明的实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据提供的附图获得其他的附图:In order to illustrate the embodiments of the invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that are used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only For the embodiment of the invention, for those of ordinary skill in the art, other drawings can also be obtained according to the provided drawings without creative work:

图1为本实施提供的高阻值电阻测量系统的结构框图。FIG. 1 is a structural block diagram of a high-resistance resistance measurement system provided in this embodiment.

具体实施方式Detailed ways

为了便于理解发明,下面将参照相关附图对发明进行更全面的描述。附图中给出了发明的典型实施例。但是,发明可以以许多不同的形式来实现,并不限于本文所描述的实施例。相反地,提供这些实施例的目的是使对发明的公开内容更加透彻全面。In order to facilitate understanding of the invention, the invention will be described more fully below with reference to the associated drawings. Typical embodiments of the invention are set forth in the accompanying drawings. However, the invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

除非另有定义,本文所使用的所有的技术和科学术语与属于发明的技术领域的技术人员通常理解的含义相同。本文中在发明的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制发明。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terms used herein in the description of the invention are for the purpose of describing particular embodiments only and are not intended to limit the invention.

本实施例提供了一种低成本的高阻值电阻测量系统。图1示出了本实施提供的高阻值电阻测量系统的结构框图,如图1所示,所述测量系统包括激励源、激励电阻、待测电阻以及电压检测模块。在图1中可以看到,所述激励电阻与所述待测电阻相串联。所述激励电阻的一端与所述激励源相连、另一端与所述待测电阻的一端相连,所述待测电阻的另一端接地。在这里,所述待测电阻的另一端连接设备地(即图1中所示出的铜带)。所述电压检测模块连接于所述待测电阻的两端。其中,所述激励源用于输出稳定的测量电压,所述电压检测模块用于测量所述待测电阻两端的电压。在图1中可以看到,所述电压检测模块包括跟随器、运算放大器和处理器,所述跟随器的一端连接于所述待测电阻的一端、另一端与所述运算放大器的一端连接,所述运算放大器的另一端与所述处理器的一端连接,所述处理器的另一端接地。在这里,所述处理器的另一端连接设备地(即图1中所示出的铜带)。优选的,所述跟随器的一端通过第一软件滤波器与所述待测电阻的一端连接,所述第一软件滤波器与所述待测电阻之间连接有保护电路。所述跟随器与所述运算放大器之间连接有第二软件滤波器。所述运算放大器与所述处理器之间连接于第三软件滤波器。由以上描述可知,通过所述激励源输出稳定的测量电压,由所述电压检测模块测量得到所述待测电阻两端的电压,由此可以得知所述激励电阻两端的电压,而在所述激励电阻的阻值已知的情况下即可得出流经所述激励电阻的电流值,由于所述激励电阻与所述电测电阻为串联关系,流经所述激励电阻的电流值与流经所述待测电阻的电流值相同,再根据欧姆定律即可得到所述待测电阻的阻值。而这里的待测电阻可以是防静电台垫,如此一来,通过所述测量系统,可在不使用重锤式表面电阻测试仪的情况下对防静电台垫的接地电阻进行测量,可大幅节约测量成本。This embodiment provides a low-cost high-resistance resistance measurement system. FIG. 1 shows a structural block diagram of a high-resistance measurement system provided by this implementation. As shown in FIG. 1 , the measurement system includes an excitation source, an excitation resistor, a resistance to be measured, and a voltage detection module. It can be seen in FIG. 1 that the excitation resistor is connected in series with the resistor to be measured. One end of the excitation resistor is connected to the excitation source, the other end is connected to one end of the resistance to be measured, and the other end of the resistance to be measured is grounded. Here, the other end of the resistance to be measured is connected to the equipment ground (ie, the copper tape shown in FIG. 1 ). The voltage detection module is connected to both ends of the resistance to be measured. The excitation source is used to output a stable measurement voltage, and the voltage detection module is used to measure the voltage across the resistance to be measured. It can be seen in FIG. 1 that the voltage detection module includes a follower, an operational amplifier and a processor, one end of the follower is connected to one end of the resistance to be measured, and the other end is connected to one end of the operational amplifier, The other end of the operational amplifier is connected to one end of the processor, and the other end of the processor is grounded. Here, the other end of the processor is connected to the device ground (ie, the copper tape shown in FIG. 1 ). Preferably, one end of the follower is connected to one end of the resistance to be measured through a first software filter, and a protection circuit is connected between the first software filter and the resistance to be measured. A second software filter is connected between the follower and the operational amplifier. A third software filter is connected between the operational amplifier and the processor. It can be seen from the above description that the excitation source outputs a stable measurement voltage, and the voltage detection module measures the voltage across the resistance to be measured, so that the voltage across the excitation resistance can be known. When the resistance value of the excitation resistor is known, the current value flowing through the excitation resistor can be obtained. After the current value of the resistance to be measured is the same, the resistance value of the resistance to be measured can be obtained according to Ohm's law. The resistance to be measured here can be an anti-static pad. In this way, through the measurement system, the grounding resistance of the anti-static pad can be measured without using a weight-type surface resistance tester. Save measurement costs.

本实施例中,所述激励源输出测量电压的电压值在2V-5V之间。作为最优选的,所述激励源输出测量电压的电压值为3.3V。在这里,所述激励源选用高精度、温漂小的电源IC。值得一提的是,在现有技术中,测试高阻抗的产品,一般需要100V以上的高压,造成费用高且有一定的用电危险的问题。而在本实施例提供的高阻值电阻测量系统中,只需3.3V作为激励源即可,既能节省成本,有能保证用电安全。In this embodiment, the voltage value of the measurement voltage output by the excitation source is between 2V and 5V. Most preferably, the voltage value of the measurement voltage output by the excitation source is 3.3V. Here, the excitation source is a power IC with high precision and small temperature drift. It is worth mentioning that, in the prior art, testing a high-impedance product generally requires a high voltage of more than 100V, resulting in high costs and a certain danger of electricity consumption. However, in the high-resistance resistance measurement system provided in this embodiment, only 3.3V is needed as the excitation source, which can save costs and ensure the safety of electricity consumption.

本实施例中,为了保证所述测量系统的检测范围能达到106Ω至109Ω,我们需要选择阻值合适的激励电阻。我们通过理论计算和实测验证发现,所述激励电阻需要在100MΩ-300MΩ之间,而作为最优的选择,我们选用的激励电阻的阻值为200MΩ。需要说明的是,此激励电阻的选型至关重要,选型时注意选择精度高、温漂小、知名品牌的电阻。例如,日本finechen超高阻。In this embodiment, in order to ensure that the detection range of the measurement system can reach 106Ω to 109Ω, we need to select an excitation resistor with a suitable resistance value. We found through theoretical calculation and actual measurement verification that the excitation resistor needs to be between 100MΩ-300MΩ, and as the optimal choice, the resistance value of the excitation resistor we selected is 200MΩ. It should be noted that the selection of this excitation resistor is very important. When selecting the type, pay attention to choosing a resistor with high accuracy, small temperature drift, and a well-known brand. For example, Japan's finechen ultra-high resistance.

本实施例中,所述待测电阻即为防静电台垫。应当理解的是,防静电台垫的两端的电压必须经过隔离放大后传输至处理器。在这里,隔离也称为电压跟随,一是将高阻抗转化为低阻抗处理,二是将外界检测电路与处理器隔开,增强产品的抗干扰能力。隔离电路需选择高输入阻抗的跟随器。经过所述跟随器处理后的电压再经过所述运算放大器,放大到合理电压范围后可供处所述理器识别。In this embodiment, the resistance to be measured is an anti-static pad. It should be understood that the voltage across the two ends of the anti-static pad must be isolated and amplified before being transmitted to the processor. Here, isolation is also called voltage follower. One is to convert high impedance into low impedance processing, and the other is to separate the external detection circuit from the processor to enhance the anti-interference ability of the product. The isolation circuit needs to choose a follower with high input impedance. The voltage processed by the follower then passes through the operational amplifier and is amplified to a reasonable voltage range for identification by the processor.

本实施例中,所述处理器需要接收所述运算放大器的输出电压,经过软件滤波处理后,输出防静电台垫的两端的电压。在这里,所述处理器选择高精度的ADC处理器。In this embodiment, the processor needs to receive the output voltage of the operational amplifier, and after software filtering processing, outputs the voltage at both ends of the anti-static pad. Here, the processor selects a high precision ADC processor.

本实施例中,为达到±10%的检测精度,所述测量系统中还加入了所述第一软件滤波器、所述第二软件滤波器、和所述第三软件滤波器,以增强所述测量系统的抗干扰性能。目前,高频干扰通过硬件RC滤波处理,但电子产品的生产产线上运行的产品,最大的干扰来来自工频干扰。而使用硬件电路滤除50HZ干扰,显然成本较高,故在本实施例提供的测量系统中,选择软件滤波的方式来滤除50HZ干扰。In this embodiment, in order to achieve a detection accuracy of ±10%, the first software filter, the second software filter, and the third software filter are also added to the measurement system to enhance all The anti-interference performance of the measurement system. At present, high-frequency interference is handled by hardware RC filtering, but for products running on the production line of electronic products, the biggest interference comes from power frequency interference. However, using a hardware circuit to filter out the 50 Hz interference obviously has a higher cost. Therefore, in the measurement system provided in this embodiment, a software filtering method is selected to filter out the 50 Hz interference.

需要说明的是,在使用所述测量系统对待测电阻(例如,防静电台垫)进行测量时,可以先利用一阻值已知的标准电阻对所述测量系统进行一次校准动作,然后将测得的所述待测电阻的测量值减去所述校准值可得到所述待测电阻的真实值,如此,使得所述测量系统的测量结果更加准确。具体可参见下文中描述的利用如上所述的测量系统对高阻值电阻进行测量的测量方法。It should be noted that, when using the measurement system to measure the resistance to be measured (for example, an anti-static pad), a standard resistance with a known resistance value may be used to perform a calibration operation on the measurement system, and then the measurement system can be calibrated. The actual value of the resistance to be measured can be obtained by subtracting the calibration value from the obtained measured value of the resistance to be measured, thus making the measurement result of the measurement system more accurate. For details, refer to the measurement method for measuring high-resistance resistance using the above-mentioned measurement system described below.

下面介绍利用如上所述的测量系统对高阻值电阻进行测量的测量方法。所述测量方法包括测量步骤,具体的,所述测量步骤包括如下步骤:The following describes a measurement method for measuring high-value resistance using the measurement system as described above. The measurement method includes a measurement step. Specifically, the measurement step includes the following steps:

利用所述激励源输出电压值为V的测量电压;Using the excitation source to output a measurement voltage whose value is V;

根据所述电压检测模块获得所述待测电阻两端的电压,记为V’;Obtain the voltage at both ends of the resistance to be measured according to the voltage detection module, denoted as V';

按如下公式计算出流经所述待测电阻的电流I’,I’=(V-V’)/R,其中,R为所述激励电阻的阻值;Calculate the current I' flowing through the resistance to be measured according to the following formula, I'=(V-V')/R, where R is the resistance value of the excitation resistance;

按如下公式计算得出所述待测电阻的测量值Rx’,Rx’=V’R/(V-V’)。The measured value R x ' of the resistance to be measured is calculated according to the following formula, where R x '=V'R/(V-V').

由前文描述可知,所述电压检测模块包括跟随器、运算放大器和处理器,所述跟随器的一端连接于所述待测电阻的一端、另一端与所述运算放大器的一端连接,所述运算放大器的另一端与所述处理器的一端连接,所述处理器的另一端接地。在这里,所述运算放大器的放大倍数为N,N为大于等于2的正数,其取值可以是5、10、50、100、1000等。那么,上述的“根据所述电压检测模块获得所述待测电阻两端的电压”的步骤可分为如下步骤:It can be seen from the foregoing description that the voltage detection module includes a follower, an operational amplifier and a processor. One end of the follower is connected to one end of the resistance to be measured, and the other end is connected to one end of the operational amplifier. The other end of the amplifier is connected to one end of the processor, and the other end of the processor is grounded. Here, the amplification factor of the operational amplifier is N, where N is a positive number greater than or equal to 2, and its value may be 5, 10, 50, 100, 1000, and so on. Then, the above-mentioned steps of "obtaining the voltage across the resistance to be measured according to the voltage detection module" can be divided into the following steps:

读取测量过程中所述处理器的电压值,记为V0Read the voltage value of the processor during the measurement process, denoted as V 0 ;

按如下公式计算得出所述待测电阻两端的电压V’,V’=V0/N。The voltage V' across the resistance to be measured is calculated according to the following formula, where V'=V 0 /N.

如此一来,所述待测电阻的测量值Rx’=RV0/(NV-V0)。In this way, the measured value of the resistance to be measured R x '=RV 0 /(NV-V 0 ).

承上所述,为了提高测量精度,可在实施所述测量步骤之间,实施校准步骤。具体的,所述校准步骤包括:As mentioned above, in order to improve the measurement accuracy, a calibration step may be performed between the measurement steps. Specifically, the calibration step includes:

将所述待测电阻替换为阻值已知的标准电阻,所述标准电阻的阻值为RThe resistance to be measured is replaced with a standard resistance with a known resistance value, and the resistance value of the standard resistance is the R mark ;

按照所述测量步骤对所述标准电阻的阻值进行测量,得到所述标准电阻的测量值R’;Measure the resistance value of the standard resistance according to the measuring step, and obtain the measured value R mark ' of the standard resistance;

按如下公式计算得出校准值△R,△R=R’-RCalculate the calibration value ΔR according to the following formula, ΔR=R mark' -R mark .

接下来,按如下公式计算即可得到所述待测电阻的真实值Rx,Rx=Rx’-△R=V’R/(V-V’)-△R=RV0/(NV-V0)-△R。Next, the real value R x of the resistance to be measured can be obtained by calculating according to the following formula, R x =R x '-ΔR=V'R/(V-V')-ΔR=RV 0 /(NV -V 0 )-ΔR.

上面结合附图对发明的实施例进行了描述,但是发明并不局限于上述的具体实施方式,上述的具体实施方式仅仅是示意性的,而不是限制性的,本领域的普通技术人员在发明的启示下,在不脱离发明宗旨和权利要求所保护的范围情况下,还可做出很多形式,这些均属于发明的保护之内。The embodiments of the invention have been described above in conjunction with the accompanying drawings, but the invention is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are only illustrative rather than restrictive. Under the inspiration of the invention, many forms can be made without departing from the scope of the invention and the protection scope of the claims, which are all within the protection of the invention.

Claims (10)

1. A low-cost high-resistance measuring system is characterized by comprising an excitation source, an excitation resistor, a resistor to be measured and a voltage detection module; the excitation resistor is connected with the resistor to be detected in series, one end of the excitation resistor is connected with the excitation source, the other end of the excitation resistor is connected with one end of the resistor to be detected, the other end of the resistor to be detected is grounded, and the voltage detection module is connected to two ends of the resistor to be detected; the excitation source is used for outputting stable measuring voltage, and the voltage detection module is used for measuring the voltage at two ends of the resistor to be measured.
2. The system according to claim 1, wherein the voltage detection module comprises a follower, an operational amplifier and a processor, one end of the follower is connected to one end of the resistor to be measured, the other end of the follower is connected to one end of the operational amplifier, the other end of the operational amplifier is connected to one end of the processor, and the other end of the processor is grounded.
3. The high resistance value resistance measurement system according to claim 2, wherein one end of the follower is connected to one end of the resistor to be measured through a first software filter.
4. The high resistance value resistance measurement system according to claim 2, wherein a second software filter is connected between the follower and the operational amplifier.
5. The high resistance value resistance measurement system of claim 2, wherein a third software filter is connected between the operational amplifier and the processor.
6. The high resistance value resistance measurement system according to claim 3, wherein a protection circuit is connected between the first software filter and the resistor to be measured.
7. The system according to claim 1, wherein the voltage value of the measurement voltage output by the excitation source is between 2V and 5V, and the resistance value of the excitation resistor is between 100M Ω and 300M Ω.
8. A measuring method for measuring a high resistance value resistance using the measuring system according to claim 1, characterized in that the measuring method comprises a measuring step comprising the steps of:
outputting a measurement voltage with a voltage value V by using the excitation source;
obtaining the voltage at two ends of the resistor to be detected according to the voltage detection module, and marking the voltage as V';
calculating current I ', I ═ (V-V')/R flowing through the resistor to be tested according to the following formula, wherein R is the resistance value of the exciting resistor;
the measured value R of the resistor to be measured is calculated according to the following formulax’,Rx’=V’R/(V-V’)。
9. The measurement method according to claim 8, wherein the voltage detection module comprises a follower, an operational amplifier and a processor, one end of the follower is connected to one end of the resistor to be measured, the other end of the follower is connected to one end of the operational amplifier, the other end of the operational amplifier is connected to one end of the processor, and the other end of the processor is grounded; the amplification factor of the operational amplifier is N; the step of obtaining the voltage at the two ends of the resistor to be detected according to the voltage detection module comprises the following steps:
reading the voltage value of the processor in the measuring process and recording as V0
Calculating the voltage V', V ═ V at two ends of the resistor to be measured according to the following formula0/N。
10. The measurement method according to claim 9, further comprising a calibration step, the calibration step comprising:
replacing the resistor to be tested with a standard resistor with a known resistance value, wherein the resistance value of the standard resistor is RSign board
Measuring the resistance value of the standard resistor according to the measuring step to obtain a measured value R of the standard resistorSign board’;
The calibration value DeltaR is calculated according to the following formulaSign board’-RSign board
The measuring method further comprises the following steps:
the true value R of the resistor to be measured is calculated according to the following formulax,Rx=Rx’-△R=V’R/(V-V’)-△R=RV0/(NV-V0)-△R。
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