CN114505551A - Method for realizing integrated processing of special-shaped deep small holes with thermal barrier coatings by limiting liquid light transmission through dry ice - Google Patents

Abstract

The invention discloses a method for realizing integrated processing of a special-shaped deep small hole with a thermal barrier coating by restricting liquid light transmission by dry ice, which relates to the field of composite processing in special processing technology and comprises a special-shaped hole processing stage and a deep small hole processing stage; wherein, the laser beam is totally reflected by the inner tube of the hollow tube electrode to obtain a plurality of laser beams, and the electrolyte flows through the hollow tube electrode; the hollow tube electrode is connected with the negative pole of the pulse power supply, and the metal matrix is connected with the positive pole of the pulse power supply; processing a deep small hole on the basis of processing the special-shaped hole; and (3) a special-shaped hole machining stage: removing materials mainly by laser processing and secondarily by water jet; and (3) a deep small hole processing stage: laser, electrolysis and water jet work together to remove material. The method obviously improves the resolution of the laser milling special-shaped hole and cools the processing surface to avoid material layering by compressing the jet flow electrolyte water column diameter through the dry ice fluid, and realizes the integrated processing of the special-shaped hole and the deep small hole at the same station by adopting a processing tool.

Description

Dry ice-constrained liquid light transmission to realize integrated processing of special-shaped deep and small holes with thermal barrier coating

technical field

The invention relates to the field of composite processing in special processing technology, in particular to a method for integrated processing of special-shaped deep and small holes with thermal barrier coatings by constraining liquid light transmission by dry ice.

Background technique

Studies have shown that for every 50°C increase in the gas inlet temperature before the turbine, the engine efficiency can be increased by 10%. In order to obtain high efficiency and high thrust-to-weight ratio, the gas inlet temperature before the turbine has been continuously increased. For example, the gas inlet temperature before the turbine of the American F119 engine reaches 2000K, which is higher than the melting point of most materials [1]. At present, solving the problem of high temperature mainly starts from three aspects. First, the blade body is made of high-temperature-resistant superalloy material; second, a large number of air film cooling holes are opened on the blade surface to promote cooling of the blade surface; third, a thermal barrier coating is prepared on the blade surface to isolate heat. The air film cooling holes of the engine blades are densely arranged, have a high aspect ratio, complex space angles, and the orifice is a special-shaped hole (dustpan hole) structure. Turbine blades used in high-performance engines require film cooling holes without recast layers, micro-cracks, heat-affected zones, and smooth orifices without burrs.

In China, the processing flow of air film holes in blades is to first machine deep small holes on the surface of the blade without thermal barrier coating, and then prepare thermal barrier coating on the surface of the blade. Thermal barrier coating often blocks or reduces the diameter of deep small holes.

In foreign countries, the machining process of the air film hole of the blade is usually to prepare the thermal barrier coating on the surface of the blade, and then use the laser and other processes to process the deep small hole of the coated blade, which can effectively ensure the machining accuracy of the deep small hole and quality. However, this method also has defects. For blades with thermal barrier coating, the thermal barrier coating can be removed by laser processing, but the recast layer and larger hole taper will be generated when processing deep and small metal holes; electrolytic machining can remove the recast layer. layer and achieve taper-free machining, but cannot remove the thermal barrier coating in the machined area.

All in all, the integrated machining of deep and small holes with thermal barrier coating cannot be achieved by one process. Some scholars have proposed a multi-step combined processing method, first removing the thermal barrier coating by laser processing, and then using electrolytic processing to deep small holes. However, this combined processing method requires the machine tool spindle to have extremely high moving accuracy and positioning accuracy, and the electrolytic machining of deep and small holes can only be performed after precise positioning of the laser-processed special-shaped holes, which is a complicated process. In addition, laser scanning processing of special-shaped holes with thermal barrier coating can easily lead to delamination of thermal barrier coating and metal substrate even with the aid of water flow cooling.

How to realize high-efficiency and high-quality integrated processing of special-shaped deep and small holes with thermal barrier coating is a key problem to be solved to achieve high-efficiency manufacturing of high-performance engine blades.

SUMMARY OF THE INVENTION

Aiming at the deficiencies in the prior art, the present invention provides an integrated processing method of dry ice constraining liquid light transmission to realize special-shaped deep and small holes with thermal barrier coating. The present invention compresses the diameter of the jet electrolyte water column by dry ice fluid, which can significantly improve the laser The resolution of milling special-shaped holes, when machining deep and small holes, removes materials through the combined action of laser, electrolysis and water jet, which can achieve efficient and high-quality machining of deep and small holes.

The present invention achieves the above technical purpose through the following technical means.

Dry ice-constrained liquid light transmission to realize the integrated processing method of special-shaped deep small holes with thermal barrier coating, including special-shaped hole processing stage and deep small hole processing stage; wherein, the laser beam is totally reflected by the inner tube of the hollow tube electrode to obtain multiple laser beams , the electrolyte flows through the hollow tube electrode; the hollow tube electrode is connected to the negative electrode of the pulse power supply, and the metal substrate is connected to the positive electrode of the pulse power supply; deep small holes are processed on the basis of the processing of special-shaped holes;

Special-shaped hole processing stage: The diameter of the jet electrolyte water column is compressed by the dry ice fluid to improve the resolution of laser milling to process the special-shaped hole. At the same time, the low temperature of the dry ice fluid is used to rapidly cool the machined surface to avoid delamination between the thermal barrier coating and the metal substrate. , In the processing stage of special-shaped holes, laser processing is mainly used, and water jet is auxiliary to remove materials;

Deep hole processing stage: dry ice fluid no longer compresses the electrolyte water column but constrains the turbid electrolyte flowing out of the deep hole outlet, laser and electrolytic coupling processing, laser removal of the oxide layer that hinders electrolytic processing, electrolytic dissolution of the heavy metal produced by laser processing. Cast layer and reduce the roughness of the machined surface, the high-speed flowing electrolyte takes away the processed products, and the laser, electrolysis and water jet work together to remove the material in the deep small hole processing stage to realize the deep small hole processing.

In the above scheme, the hollow tube electrode is fixed, the clamp wraps the outer side wall of the hollow tube electrode, and the position of the clamp relative to the hollow tube electrode is adjustable in the vertical direction, the clamp is provided with a flow channel, and the dry ice fluid passes through the flow channel along the The outer wall of the hollow tube electrode flows downward, and by adjusting the position of the clamp relative to the hollow tube electrode, the diameter of the water column of the jet electrolyte can be compressed by the dry ice fluid or the turbid electrolyte flowing out of the outlet of the deep orifice can be restricted.

In the above scheme, when the lower end of the hollow tube electrode is wrapped by the clamp, the dry ice fluid compresses the diameter of the water column of the jet electrolyte; when the lower end of the hollow tube electrode protrudes from the clamp, the dry ice fluid constrains the turbid electrolyte flowing out of the outlet of the deep orifice.

In the above solution, in the processing stage of the special-shaped hole, the shape of the electrolyte water column flowing out from the hollow tube electrode to the processing surface is an inverted conical shape.

In the above scheme, the cross section of the flow channel is in a Y-shaped structure.

In the above solution, the hollow tube electrode comprises an inner fluoropolymer tube and an outer metal tube, wherein the metal tube is closely attached to the fluoropolymer tube and is highly coaxial, and the outer surface of the metal tube is prepared with insulating coating.

In the above scheme, the clamp is made of metal material, and the clamp is connected with a temperature control device, and the clamp is heated or cooled by the temperature control device, thereby heating or cooling the dry ice fluid in the flow channel, and finally controlling the shape of the dry ice fluid, wherein, the dry ice fluid is formed. The form is solid particle form, solid-gas mixture or pure gas.

In the above solution, the special-shaped hole is opened on the thermal barrier coating; the shape and structure of the special-shaped hole can be obtained according to the scanning processing track.

In the above scheme, in the special-shaped hole processing stage and the deep small hole processing stage, the metal substrate with thermal barrier coating moves in the three-dimensional space under the control of the numerical control system, the hollow tube electrode remains stationary, and the fixture moves up and down.

In the above scheme, the diameter of the electrolyte water column can be controlled by controlling the flow direction and flow rate parameters of the dry ice fluid, so as to realize the processing of special-shaped holes with different resolutions and different processing efficiencies. It can be compressed to a small size to achieve precise microstructure processing, and the diameter of the electrolyte water column can be relatively increased to achieve high-efficiency large-area processing under conditions that do not require high resolution.

The present invention has the following advantages:

1. In the method of the present invention, the dry ice fluid compresses the diameter of the water column of the jet electrolyte to improve the resolution of the laser milling special-shaped holes, and the low temperature of the dry ice fluid can rapidly cool the machined surface to avoid delamination between the thermal barrier coating and the metal layer.

2. The special-shaped holes opened on the thermal barrier coating and the inner deep small holes are processed in the same station. There is no need to replace the tool electrode during the processing, and there is no need to repeat the positioning, which reduces the processing steps and improves the processing efficiency and quality.

3. Dry ice fluid can improve the stability of electrolyte jet fluid, avoid fluid divergence and instability during jet processing, and improve the stability of laser beam transmission in the electrolyte water column.

Description of drawings

1 is a schematic diagram of the implementation of high-resolution laser milling of special-shaped holes with thermal barrier coatings by the dry ice fluid confinement electrolyte involved in the embodiment of the present invention;

Fig. 2 is a schematic diagram of the process flow of laser milling processing of surface special-shaped holes according to the present invention

3 is a schematic diagram of the process flow of the laser electrochemical coupling processing of the internal deep small holes of the present invention;

FIG. 4 is a schematic diagram of the electrolytic coupling of total reflection laser and jet to process deep small holes according to the present invention.

Reference number:

1- Focusing lens; 2- Hollow tube electrode; 3- Electrolyte water column; 4- Laser beam; 5- Deep hole; 6- Metal substrate; 7- Thermal barrier coating; 8- Special-shaped hole; 9- Inverted cone 10-clamp; 11-dry ice fluid; 12-electrolyte; 13-outflowing cloudy electrolyte; 14-insulating coating; 15-metal tube; 16-fluoropolymer tube.

Detailed ways

The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, and are intended to explain the present invention and should not be construed as limiting the present invention.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "axial", The orientation or positional relationship indicated by "radial", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description , rather than indicating or implying that the indicated device or element must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second" may expressly or implicitly include one or more of that feature. In the description of the present invention, "plurality" means two or more, unless otherwise expressly and specifically defined.

In the present invention, unless otherwise expressly specified and limited, the terms "installed", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrally connected; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

Dry ice constrains liquid light transmission to realize the integrated processing method of special-shaped deep and small holes with thermal barrier coating. When processing special-shaped holes 8 on metal substrate 6 with thermal barrier coating 2 on the surface, the diameter of jet electrolyte water column 3 is compressed by dry ice fluid 11 , to improve the resolution of laser milling processing special-shaped holes 8, and at the same time use the low temperature of the dry ice fluid 11 to rapidly cool the workpiece surface to avoid delamination between the thermal barrier coating 7 and the metal substrate 6. This stage is mainly laser processing, water The jet is used to remove the material; when the inner deep hole 5 is processed on the metal substrate 6, the dry ice fluid 11 no longer compresses the electrolyte water column 3 but constrains the turbid electrolyte 13 flowing out from the outlet of the deep hole, and the laser and electrolysis are coupled to process, The laser removes the oxide layer that hinders the electrolytic machining, the electrolytic dissolves the recast layer produced by the laser machining and reduces the machining surface roughness, and the high-speed flowing electrolyte takes away the processed products. At this stage, the laser, electrolysis and water jet work together to remove the material to achieve deep depth. Efficient and high-quality machining of small holes 5. In the method of the invention, the diameter of the water column of the jet electrolyte is compressed by the dry ice fluid, and the resolution of the laser milling processing special-shaped holes is significantly improved.

When machining the special-shaped hole 8 and the inner deep small hole 5 on the metal base 6 with the thermal barrier coating 7 on the surface of the workpiece, the same set of tools is used for machining, and in the same station, there is no need to replace the tool during the machining, and there is no need to repeat the positioning. The requirements for the positioning accuracy of the machine tool control system simplify the processing steps and improve the processing efficiency and quality. Integrated processing in the same station, using a unified process, without changing the processing tools, compared with the combined multi-station processing, it can significantly improve the processing efficiency and reduce the positioning error during multi-station transfer.

By controlling the flow direction, flow rate and other parameters of the dry ice fluid 11, the diameter of the electrolyte water column 3 can be controlled, thereby realizing the processing of special-shaped holes 8 with different resolutions and different processing efficiencies. The diameter is compressed to a very small size to achieve precise microstructure processing, and the diameter of the electrolyte water column 3 is increased to achieve efficient large-area processing under the condition that high resolution is not required. The effective control of the dry ice fluid can improve the flexibility of the integrated processing method of the method of the present invention, so that it can meet more processing requirements. Through the constraint control of the diameter of the electrolyte water column by the dry ice fluid, high-precision processing or high-efficiency can be respectively realized according to different requirements. processing.

The dry ice fluid 11 itself is a micro-particle, which absorbs a large amount of heat during the sublimation and gasification process at room temperature, thereby rapidly reducing the temperature of the electrolyte, and impacts the processing peripheral area of the special-shaped hole 8, effectively avoiding the laser heat under the dual cooling of the low-temperature electrolyte and low-temperature dry ice. The agglomeration causes delamination between the thermal barrier coating 7 and the metal substrate 6, and can reduce the adverse effects of laser heat on the microstructure properties of the workpiece body. The method of the invention can effectively avoid the accumulation of laser processing heat by double cooling of dry ice fluid and low-temperature electrolyte combined with high-speed scouring of the electrolyte, thereby avoiding the delamination of the thermal barrier coating and the metal substrate caused by the laser heat.

The dry ice fluid 11 and the electrolyte fluid impinge on the processing area together, which can cause a certain impact force to the processing area and quickly take away the processing products and heat. Electrolytically processed products are usually flocs with certain adhesion, and it is difficult to quickly bring the electrolytically processed products out of the processing area when the impact force of the water flow is insufficient. The double flushing method of dry ice fluid and electrolyte fluid proposed in the method of the present invention has Helps in efficient scouring to remove sticky ECM products.

The dry ice fluid 11 works throughout the process, not only constraining the flow of the electrolyte, but also dividing the continuous electrolyte fluid into discrete droplets in the dry ice fluid 11, thereby avoiding the continuous flow of electrolyte to non-continuous droplets. The processing area causes damage to the non-processing area. According to the principle of electrochemical reaction, as long as there is a continuous conductive medium (electrolyte) between the cathode and the anode, electrochemical corrosion will occur on the surface of the anode covered by the electrolyte. In the method of the present invention, the continuous electrolyte corrosion circuit of the surrounding area of the processing area can be cut off by the impact of the dry ice fluid on the surrounding area of the confinement electrolyte.

During the processing of the inner deep hole 5, the relative positional relationship between the fixture 10 and the hollow tube electrode 2 is changed by the movement of the fixture 10, and the flow direction of the dry ice fluid 11 also changes, and the dry ice fluid 11 begins to act on the deep small hole. At the orifice of 5, the turbid electrolyte 13 flowing out from the orifice is restrained, so as to prevent the turbid electrolyte 13 flowing out from impacting the thermal barrier coating 7 from the inside to the outside, thereby realizing the protection of the thermal barrier coating 7. Electrochemical corrosion can easily lead to the cracking and failure of the thermal barrier coating. By restricting the flow of the electrolyte flowing out of the orifice by dry ice fluid, the electrochemical corrosion of the thermal barrier coating at the orifice can be effectively weakened, thereby avoiding its cracking and failure.

During the whole processing process, the dry ice fluid 11, the electrolyte fluid, the laser beam 4 and the electrolysis circuit are all connected, and it is only necessary to scan the processing track according to the shape and structure design of the special-shaped hole 8; the metal tube of the hollow tube electrode is connected to the electrolysis The negative pole of the power supply, the metal substrate of the workpiece is connected to the positive pole of the electrolytic power supply.

During the whole process, the metal tube 15 of the hollow tube electrode 2 is connected to the negative electrode of the electrolytic power supply, and the metal base 6 of the workpiece is connected to the positive electrode of the electrolytic power supply. The hollow tube electrode 2 is composed of two layers of tubes, the inner layer is a fluoropolymer tube 16, the laser beam 4 can be totally reflected from the inflowing electrolyte 12 incident on the surface of the fluoropolymer tube 16 at a certain angle, and the outer layer is a metal tube. The tube 15 and the metal tube 15 are made by precision electroforming. The metal tube 15 has the characteristic of protruding ends. The metal tube 15 is closely attached to the inner fluoropolymer tube 16 and is highly coaxial. The outer surface of the metal tube 15 The insulating coating 14 is prepared by an electrophoretic insulating process. The protruding end of the metal tube 15 made by precision electroforming can enhance the electric field at the end of the hollow tube electrode 2, thereby improving the processing efficiency. Conical hole.

During the whole machining process, the workpiece moves in three-dimensional space under the control of the numerical control system, the hollow tube electrode 2 remains stationary, the fixture 10 moves up and down, and the fixture 10 can move up and down independently to change the relative position of the hollow tube electrode 2 .

The inside of the fixture 10 is provided with a flow channel for the dry ice fluid 11, and the cross section of the flow channel is a Y-shaped structure. Specifically, the entire flow channel is a retractable structure, and a part of the flow channel is fitted with the hollow tube electrode 2, and the flow channel as a whole presents The trend is inclined downward, and the ring surrounds the hollow tube electrode 2 .

The body of the fixture 10 is a metal structure and is connected to a temperature control device. Through the temperature control device, the metal of the body of the fixture 10 can be heated or cooled, thereby realizing the heating and cooling of the dry ice fluid 11 in the flow channel, and finally controlling the shape of the dry ice fluid 11. The fluid 11 is in the form of solid particles, solid-gas mixture or pure gas.

As shown in Figure 1, before the processing starts, first adjust the workpiece position through the numerical control system, adjust the workpiece to a position closer to the processing tool, connect the electrolyte, and the fresh electrolyte to be flown flows stably in the hollow tube electrode. Then, the dry ice fluid supply system is turned on, and the electrolyte is effectively constrained by adjusting the flow rate, angle and other parameters of the dry ice fluid and the position of the clamp body, so that the electrolyte changes from a cylindrical shape to a conical shape. When both the electrolyte and dry ice fluid are in a stable state, turn on the laser, set a low laser power, and introduce the laser beam into the cavity of the hollow tube electrode by adjusting the laser light path. The laser beam reaches the surface of the processing area through multiple total reflections. . After the adjustment of the laser light path is completed, the workpiece movement track is set so as to realize the layer-by-layer scanning processing of the special-shaped hole, and the laser power is adjusted to the appropriate parameters to officially start the processing of the special-shaped hole.

As shown in Figures 2 to 4, when the special-shaped hole on the workpiece surface is processed, as shown in Figure 2, the workpiece starts to rotate at a certain angle, and turns to deep small hole processing. At this time, the clamping body moves up, as shown in Figure 3. The flow channel of the dry ice fluid is constrained by the hollow tube electrode and begins to flow along the outer wall surface of the tube electrode. When encountering the turbid electrolyte flowing out of the deep orifice, the continuous fluid of the electrolyte is converted into a mist of gas-liquid mixing, thereby Cut off the continuous conductive liquid loop of the turbid electrolyte to avoid stray corrosion of the turbid electrolyte to the thermal barrier coating and the non-processing area around the processing area, as shown in Figure 4.

In the description of this specification, description with reference to the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples", etc., mean specific features described in connection with the embodiment or example , structure, material or feature is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although the embodiments of the present invention have been shown and described above, it should be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and those of ordinary skill in the art will not depart from the principles and spirit of the present invention Variations, modifications, substitutions, and alterations to the above-described embodiments are possible within the scope of the present invention without departing from the scope of the present invention.

Claims (10)

1. The method for realizing the integrated processing of the special-shaped deep small hole with the thermal barrier coating by restricting the liquid light transmission by the dry ice is characterized by comprising a special-shaped hole processing stage and a deep small hole processing stage; wherein, the laser beams (4) are totally reflected by the inner tube of the hollow tube electrode (2) to obtain a plurality of laser beams (4), and the electrolyte flows through the hollow tube electrode (2); the hollow tube electrode (2) is connected with the negative pole of the pulse power supply, and the metal matrix (6) is connected with the positive pole of the pulse power supply; processing a small deep hole (5) on the basis of processing the special-shaped hole (8);

and (3) a special-shaped hole machining stage: the diameter of a jet electrolyte water column (3) is compressed through a dry ice fluid (11), the resolution of a laser milling special-shaped hole (8) is improved, meanwhile, the low-temperature quick cooling processing surface of the dry ice fluid (11) is utilized to further avoid the layering between a thermal barrier coating (7) and a metal matrix (6), and materials are removed mainly by laser processing and assisted by water jet in the special-shaped hole processing stage;

and (3) a deep small hole processing stage: the dry ice fluid (11) does not compress the electrolyte water column (3) any more but restrains turbid electrolyte (13) flowing out of the outlet of the deep pore (5), laser and electrolysis coupling processing is carried out, an oxide layer which hinders electrolysis processing is removed by the laser, a recast layer generated by laser processing is dissolved by electrolysis and the processing surface roughness is reduced, a processed product is taken away by the electrolyte flowing at a high speed, and materials are removed under the combined action of the laser, electrolysis and water jet in the deep pore processing stage so as to realize the processing of the deep pore (5).

2. The method for integrally processing the special-shaped deep small hole with the thermal barrier coating by constraining the liquid to transmit light through the dry ice according to claim 1 is characterized in that a hollow tube electrode (2) is fixed, a clamp (10) wraps the outer side wall of the hollow tube electrode (2), the position of the clamp (10) relative to the hollow tube electrode (2) is adjustable in the vertical direction, a flow channel is formed in the clamp (10), the dry ice fluid (11) flows downwards along the outer side wall of the hollow tube electrode (2) through the flow channel, and the dry ice fluid (11) can compress the diameter of a jet electrolyte water column (3) or constrain turbid electrolyte (13) flowing out of an outlet of the deep small hole (5) by adjusting the position of the clamp (10) relative to the hollow tube electrode (2).

3. The method for integrally processing the special-shaped deep small hole with the thermal barrier coating by constraining the liquid to transmit light by the dry ice according to claim 2, wherein when the lower end of the hollow tube electrode (2) is wrapped by the clamp (10), the dry ice fluid (11) compresses the diameter of the jet flow electrolyte water column (3); when the lower end of the hollow tube electrode (2) protrudes out of the clamp (10), the dry ice fluid (11) restricts turbid electrolyte (13) flowing out of the outlet of the deep small hole (5).

4. A dry ice constrained liquid light transmission method for realizing irregular deep and small holes with thermal barrier coatings integrally machining according to any one of claims 2 or 3, characterized in that in the irregular hole machining stage, the shape of an electrolyte water column (3) flowing out from a hollow tube electrode (2) to the machined surface under the constraint of dry ice fluid (11) is an inverted cone.

5. The method for integrally processing the special-shaped deep small hole with the thermal barrier coating by restraining the liquid and transmitting the light according to the claim 2, wherein the cross section of the flow channel is of a Y-shaped structure.

6. The dry ice-constrained liquid light transmission method for realizing the integration of the special-shaped deep small hole with the thermal barrier coating according to the claim 1 is characterized in that the hollow tube electrode (2) comprises an inner fluoropolymer tube (16) and an outer metal tube (15), wherein the metal tube (15) is tightly attached to and highly coaxial with the fluoropolymer tube (16), and the outer surface of the metal tube (15) is provided with the insulating coating (14).

7. The dry ice constraint liquid light transmission implementation thermal barrier coating special-shaped deep small hole integrated processing method according to claim 2, characterized in that the clamp (10) is made of metal material, a temperature control device is connected to the clamp, the clamp (10) is heated or cooled through the temperature control device, so that the dry ice fluid (11) in the flow channel is heated or cooled, and finally the form of the dry ice fluid (11) is controlled, wherein the form of the dry ice fluid (11) is solid particle form, solid-gas mixed form or pure gas form.

8. The dry ice constraint liquid light transmission realization with thermal barrier coating dysmorphism deep hole integrated processing method of claim 1, characterized by that, the hole of dysmorphism (8) is offered on thermal barrier coating (7); the shape structure of the special-shaped hole (8) can be obtained according to a scanning processing track.

9. The method for integrally processing the special-shaped deep small hole with the thermal barrier coating by constraining the liquid and transmitting the light according to the dry ice in the claim 1 is characterized in that in a special-shaped hole processing stage and a deep small hole processing stage, a metal base body (6) with the thermal barrier coating (7) moves in a three-dimensional space under the control of a numerical control system, a hollow tube electrode (2) is kept static, and a clamp (10) moves up and down.

10. The method for integrally processing the special-shaped deep small hole with the thermal barrier coating by constraining the liquid to transmit light through the dry ice according to claim 1, wherein the diameter of the electrolyte water column (3) can be controlled by controlling the flow direction and the flow speed parameters of the dry ice fluid (11), so that the special-shaped holes (8) with different resolutions and different processing efficiencies are processed, the diameter of the electrolyte water column (3) is compressed to a small size under the working condition that high resolution is required to realize precise microstructure processing, and the diameter of the electrolyte water column (3) is relatively increased under the working condition that high resolution is not required to realize efficient large-area processing.

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