CN114487019A - High-sensitivity humidity detection device based on two-dimensional material - Google Patents
High-sensitivity humidity detection device based on two-dimensional material Download PDFInfo
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- CN114487019A CN114487019A CN202210100800.5A CN202210100800A CN114487019A CN 114487019 A CN114487019 A CN 114487019A CN 202210100800 A CN202210100800 A CN 202210100800A CN 114487019 A CN114487019 A CN 114487019A
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- transition metal
- metal chalcogenide
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- chalcogenide layer
- dimensional transition
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- 239000000463 material Substances 0.000 title claims abstract description 86
- 238000001514 detection method Methods 0.000 title claims abstract description 32
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 69
- -1 transition metal chalcogenide Chemical class 0.000 claims abstract description 69
- 238000010521 absorption reaction Methods 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims description 21
- SDDGNMXIOGQCCH-UHFFFAOYSA-N 3-fluoro-n,n-dimethylaniline Chemical compound CN(C)C1=CC=CC(F)=C1 SDDGNMXIOGQCCH-UHFFFAOYSA-N 0.000 claims description 3
- HITXEXPSQXNMAN-UHFFFAOYSA-N bis(tellanylidene)molybdenum Chemical compound [Te]=[Mo]=[Te] HITXEXPSQXNMAN-UHFFFAOYSA-N 0.000 claims description 3
- HPQRSQFZILKRDH-UHFFFAOYSA-M chloro(trimethyl)plumbane Chemical compound C[Pb](C)(C)Cl HPQRSQFZILKRDH-UHFFFAOYSA-M 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 3
- MHWZQNGIEIYAQJ-UHFFFAOYSA-N molybdenum diselenide Chemical compound [Se]=[Mo]=[Se] MHWZQNGIEIYAQJ-UHFFFAOYSA-N 0.000 claims description 3
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 3
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical compound S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 description 12
- 230000002745 absorbent Effects 0.000 description 10
- 239000002250 absorbent Substances 0.000 description 10
- 239000004642 Polyimide Substances 0.000 description 6
- 229920001721 polyimide Polymers 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The invention relates to the field of humidity detection, and particularly provides a high-sensitivity humidity detection device based on a two-dimensional material. When the device is used, the device is placed in a space to be detected, the moisture absorption material absorbs moisture and expands, and the change of the conductive characteristic of the two-dimensional transition metal chalcogenide layer is measured through the first electrode and the second electrode, so that the detection of the humidity to be detected is realized. The invention can realize high-sensitivity humidity detection.
Description
Technical Field
The invention relates to the field of humidity detection, in particular to a high-sensitivity humidity detection device based on a two-dimensional material.
Background
Humidity detection has wide application in the fields of meteorology, agriculture, industry, military and the like. In the prior art, most humidity detection devices are based on capacitive, resistive, piezoresistive or optical principles.
Although moisture detectors based on optical principles have the advantage of high detection sensitivity. For example, utility model CN202869694U discloses a temperature/humidity sensor of fiber Bragg grating, which is composed of an optical fiber, a temperature sensing element and a humidity sensing element, and can realize the simultaneous measurement of temperature and humidity in a complex environment. For measuring humidity, a layer of polyimide with the thickness of 30-50 microns is plated on the surface of the fiber Bragg grating, so that the humidity is detected. The utility model discloses a well Bragg grating, spectral analysis appearance, light source etc. need be used, and is with high costs.
The humidity detection device based on the electrical principle, such as the change of physical quantity like resistance, current, capacitance, etc., has low cost. However, in the conventional resistance-type humidity detection device, the change of humidity to the resistance of the sensitive substance is small, and the sensitivity of humidity detection is low.
Disclosure of Invention
In order to solve the above problems, the present invention provides a high-sensitivity humidity detection device based on a two-dimensional material, which includes a substrate, a two-dimensional transition metal chalcogenide layer, a first electrode, a second electrode, a moisture absorption material, and a support portion, wherein the support portion is disposed in the middle of the substrate, the surface of the support portion is provided with grooves arranged periodically, the two-dimensional transition metal chalcogenide layer is disposed on the surface of the substrate and the surface of the support portion, the two-dimensional transition metal chalcogenide layer is attached to the surface of the substrate and the surface of the support portion, the moisture absorption material coats the two-dimensional transition metal chalcogenide layer on the support portion, and the first electrode and the second electrode are disposed on two sides of the support portion on the two-dimensional transition metal chalcogenide layer respectively.
Furthermore, the material of the supporting part is a moisture absorption material.
Further, the material of the support is a piezoelectric material.
Further, the grooves are wedge-shaped.
Furthermore, the hygroscopic material is provided with a second groove.
Further, the second groove is not in contact with the two-dimensional transition metal chalcogenide layer.
Further, the second groove is located above the groove.
Further, the second groove has a trapezoidal cross-sectional shape.
Further, the material of the two-dimensional transition metal chalcogenide layer is molybdenum sulfide, molybdenum telluride, molybdenum selenide, tungsten sulfide, tungsten telluride, or tungsten selenide.
Further, the material of the substrate is an insulating material.
The invention has the beneficial effects that: the invention provides a high-sensitivity humidity detection device based on a two-dimensional material, which comprises a substrate, a two-dimensional transition metal chalcogenide layer, a first electrode, a second electrode, a moisture absorption material and a supporting part, wherein the supporting part is arranged in the middle of the substrate, the surface of the supporting part is provided with grooves which are periodically arranged, the two-dimensional transition metal chalcogenide layer is arranged on the surfaces of the substrate and the supporting part, the two-dimensional transition metal chalcogenide layer is attached to the surfaces of the substrate and the supporting part, the moisture absorption material coats the two-dimensional transition metal chalcogenide layer on the supporting part, and the first electrode and the second electrode are respectively arranged on two sides of the supporting part on the two-dimensional transition metal chalcogenide layer. When the device is used, the device is placed in a space to be detected, the moisture absorption material absorbs moisture and expands, and the two-dimensional transition metal chalcogenide layer is stretched, so that the stress in the two-dimensional transition metal chalcogenide layer is changed, the conductive characteristic of the two-dimensional transition metal chalcogenide layer is changed, and the change of the conductive characteristic of the two-dimensional transition metal chalcogenide layer is measured through the first electrode and the second electrode, so that the detection of the humidity to be detected is realized. In the invention, the two-dimensional transition metal chalcogenide layer and the moisture absorption material in the groove can generate stronger action, thereby more changing the appearance and the internal stress of the two-dimensional transition metal chalcogenide layer, and more changing the conductive characteristic of the two-dimensional transition metal chalcogenide layer, therefore, the invention can realize high-sensitivity humidity detection.
The present invention will be described in further detail below with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic diagram of a high-sensitivity humidity detection device based on a two-dimensional material.
Fig. 2 is a schematic view of yet another high sensitivity humidity detector based on two-dimensional materials.
Fig. 3 is a schematic view of yet another high sensitivity humidity detector based on two-dimensional materials.
In the figure: 1. a substrate; 2. a two-dimensional transition metal chalcogenide layer; 3. a first electrode; 4. a second electrode; 5. a moisture absorbent material; 6. a support portion; 7. a second groove.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, and the embodiments will be described by way of explanation with reference to the drawings.
Example 1
The invention provides a high-sensitivity humidity detection device based on a two-dimensional material. As shown in fig. 1, the two-dimensional material-based highly sensitive humidity detecting apparatus includes a substrate 1, a two-dimensional transition metal chalcogenide layer 2, a first electrode 3, a second electrode 4, a moisture absorbent material 5, and a support 6. The support portion 6 is disposed at the center of the upper surface of the substrate 1. The material of the substrate 1 is an insulating material. Preferably, the material of the substrate 1 is silicon dioxide. The surface of the support part 6 is provided with grooves which are periodically arranged. The period is a two-dimensional period, and the direction of the period is along the direction of the line connecting the first electrode 3 and the second electrode 4, so that the preparation is easy. In addition, the supporting part 6 can also be formed by triangular strips which are periodically arranged, adjacent triangular strips are contacted, and a groove is formed between the adjacent triangular strips, so that the following advantages are provided: the material is saved; the triangular strips are more easily deformed when a force is applied in the groove. The two-dimensional transition metal chalcogenide layer 2 is arranged on the surfaces of the substrate 1 and the support part 6, and the two-dimensional transition metal chalcogenide layer 2 is attached to the surfaces of the substrate 1 and the support part 6. That is, the two-dimensional transition metal chalcogenide layer 2 and the surface of the support portion 6 have the same shape. Thus, the two-dimensional transition metal chalcogenide layer 2 also has corners at the corners of the groove. The material of the two-dimensional transition metal chalcogenide layer 2 is molybdenum sulfide, molybdenum telluride, molybdenum selenide, tungsten sulfide, tungsten telluride, or tungsten selenide. The number of layers of the two-dimensional transition metal chalcogenide in the two-dimensional transition metal chalcogenide layer 2 is less than 10, so that the sensitivity of the conductive characteristics of the two-dimensional transition metal chalcogenide layer 2 to the stress and the morphology thereof is enhanced. The moisture absorbent material 5 coats the two-dimensional transition metal chalcogenide layer 2 on the support portion 6 so that the morphology and internal stress of the two-dimensional transition metal chalcogenide layer 2 are changed by the moisture absorbent material 5. The hygroscopic material 5 is polyimide. The polyimide is one of organic polymer materials with the best comprehensive performance, is high-temperature resistant, can work within the temperature range of minus 200 ℃ to 300 ℃ for a long time, has low dielectric loss and is non-conductive, the polyimide material does not influence the conductive characteristic of the material between the first electrode 3 and the second electrode 4, but only the expansion of the polyimide material causes the change of the conductive characteristic of the two-dimensional transition metal chalcogenide layer 2, so that the relative value of the change of the conductive characteristic of the material between the first electrode 3 and the second electrode 4 is large, and the humidity detection with high sensitivity is realized. In addition, polyimide absorbs moisture and undergoes a large linear expansion. The first electrode 3 and the second electrode 4 are disposed on both sides of the support portion 6 on the two-dimensional transition metal chalcogenide layer 2, respectively, to measure the conductive characteristics of the two-dimensional transition metal chalcogenide layer 2. The material of the first electrode 3 and the second electrode 4 is gold or silver.
When the device is used, the device is placed in a space to be detected, the moisture absorption material 5 absorbs moisture and expands, and the two-dimensional transition metal chalcogenide layer 2 is stretched, so that the stress and the appearance of the two-dimensional transition metal chalcogenide layer 2, particularly the appearance of a bent part of the two-dimensional transition metal chalcogenide layer 2 are changed, the conductive characteristic of the two-dimensional transition metal chalcogenide layer 2 is changed, the change of the conductive characteristic of the two-dimensional transition metal chalcogenide layer 2 is measured through the first electrode 3 and the second electrode 4, and the detection of the humidity to be detected is realized. In the prior art, the extension direction of the moisture absorption material 5 after moisture absorption is parallel to the plane of the sensitive material film, namely, is vertical to the normal direction of the sensitive material film, so that the acting force of the moisture absorption material and the sensitive material film is small, and the change of the shape or the stress of the sensitive material film is small. In the invention, in the groove, the extension direction of the moisture absorption material 5 after moisture absorption is not parallel to the two-dimensional transition metal chalcogenide layer 2, so that the two-dimensional transition metal chalcogenide layer 2 and the moisture absorption material 5 in the groove can generate stronger action, the appearance and the internal stress of the two-dimensional transition metal chalcogenide layer 2 are changed more, the conductive characteristic of the two-dimensional transition metal chalcogenide layer 2 is changed more, and the invention can realize high-sensitivity humidity detection.
In the present invention, the atomic distribution at the corners of the two-dimensional transition metal chalcogenide layer 2 is different from the atomic distribution at the flat portions, and the carrier concentrations at these portions are also different. When the angle of the corner is changed, the conductive characteristic of the two-dimensional transition metal chalcogenide layer 2 at the corner is changed more. Therefore, the present invention can realize highly sensitive humidity detection.
Example 2
In example 1, the material of the support portion 6 is a moisture absorbent material. In this way, the support portion 6 can absorb moisture and expand, thereby changing the morphology and stress of the two-dimensional transition metal chalcogenide layer 2 more, changing the conductive characteristics of the two-dimensional transition metal chalcogenide layer 2 more, and realizing humidity detection with higher sensitivity. In addition, the preparation method is simple: firstly, a first layer of moisture absorption material is arranged, then a two-dimensional transition metal chalcogenide compound layer 2 is laid on the first layer of moisture absorption material, then a second layer of moisture absorption material is arranged on the two-dimensional transition metal chalcogenide compound layer 2, and finally, a template imprinting method is applied to prepare the invention.
In the present embodiment, when the support portion 6 absorbs moisture and expands, the support portion 6 also expands to the upper side in fig. 1, stretching the two-dimensional transition metal chalcogenide layer 2 in the vertical direction as well, so that the stress in the two-dimensional transition metal chalcogenide layer 2 changes more, thereby achieving a higher sensitivity of humidity detection.
Example 3
In addition to embodiment 1, the material of the support portion 6 is a piezoelectric material. Thus, when the moisture absorbent material 5 absorbs moisture and expands, the piezoelectric material is squeezed in addition to the two-dimensional transition metal chalcogenide layer 2, so that a charge distribution is formed on the surface of the piezoelectric material, which is equivalent to changing the gate voltage of the two-dimensional transition metal chalcogenide layer 2, thereby further changing the conductive characteristics of the two-dimensional transition metal chalcogenide layer 2, and finally realizing humidity detection with higher sensitivity.
Furthermore, as shown in fig. 1, the grooves are wedge-shaped, on one hand, to facilitate the preparation, the preparation of wedge-shaped grooves is simpler than the preparation of vertical grooves; on the other hand, the two-dimensional transition metal chalcogenide layer 2 is more likely to adhere to the surface of the wedge-shaped groove, and conversely, it is difficult to adhere the two-dimensional transition metal chalcogenide layer 2 to the surface of the vertical groove.
Further, a second groove 7 is provided on the moisture absorbent material 5, the second groove 7 not being in contact with the two-dimensional transition metal chalcogenide layer 2. Thus, the contact area between the moisture absorption material 5 and the environment is increased, which is beneficial for the moisture absorption material 5 to absorb more moisture, thereby generating larger expansion and improving the sensitivity of humidity detection. The second groove 7 is not in contact with the two-dimensional transition metal chalcogenide layer 2 so as not to allow moisture to directly change the conductive characteristics of the two-dimensional transition metal chalcogenide layer 2, resulting in a large measurement error.
Further, as shown in fig. 2, the second groove 7 is located above the groove. In this way, the second groove 7 can be set deeper, so as to further increase the contact area between the moisture-absorbing material 5 and the external environment, so that the moisture-absorbing material 5 can absorb more moisture, thereby further improving the sensitivity of humidity detection.
Further, as shown in fig. 3, the second groove 7 has a trapezoidal cross-sectional shape. The trapezoidal cross section allows the second groove 7 to have more surface area, thereby absorbing more moisture and improving the sensitivity of humidity detection.
Furthermore, a cover part is arranged on the moisture absorption material 5, the cover part is made of stainless steel materials, the cover part is a hollow rectangular ring, the cover part exposes the moisture absorption material 5 on the supporting part 6, and the edge part of the moisture absorption material 5 is covered. The covering part exposes the moisture absorption material with a determined area, so that accurate humidity measurement is convenient to realize. In addition, the covering portion applies pressure to the edge of the absorbent material 5, which corresponds to fixing the edge of the absorbent material 5; when the moisture absorbent material 5 absorbs moisture and expands, the stress in the two-dimensional transition metal chalcogenide is more changed, thereby more changing the conductive characteristic of the two-dimensional transition metal chalcogenide layer 2, thereby achieving more sensitive humidity detection.
While several embodiments of the present invention have been shown and described, those skilled in the art will recognize that: changes may be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims.
Claims (10)
1. The high-sensitivity humidity detection device based on the two-dimensional material is characterized by comprising a substrate, a two-dimensional transition metal chalcogenide layer, a first electrode, a second electrode, a moisture absorption material and a supporting part, wherein the supporting part is arranged in the middle of the substrate, grooves which are periodically distributed are arranged on the surface of the supporting part, the two-dimensional transition metal chalcogenide layer is arranged on the surface of the substrate and the surface of the supporting part, the two-dimensional transition metal chalcogenide layer is attached to the surface of the substrate and the surface of the supporting part, the moisture absorption material coats the two-dimensional transition metal chalcogenide layer on the supporting part, and the first electrode and the second electrode are respectively arranged on the two sides of the supporting part on the two-dimensional transition metal chalcogenide layer.
2. The two-dimensional material based highly sensitive humidity detecting device according to claim 1, wherein: the material of the supporting part is a moisture absorption material.
3. The two-dimensional material based highly sensitive humidity detecting device according to claim 1, wherein: the material of the supporting part is piezoelectric material.
4. A two-dimensional material based highly sensitive moisture detecting device as claimed in any of claims 1-3 wherein: the groove is wedge-shaped.
5. The two-dimensional material based highly sensitive humidity detecting device according to claim 4, wherein: the moisture absorption material is provided with a second groove.
6. The two-dimensional material based highly sensitive humidity sensing device of claim 5, wherein: the second groove is not in contact with the two-dimensional transition metal chalcogenide layer.
7. The two-dimensional material based highly sensitive humidity detecting device according to claim 6, wherein: the second groove is located above the groove.
8. The two-dimensional material based highly sensitive humidity detecting device according to claim 7, wherein: the shape of the cross section of the second groove is trapezoidal.
9. The two-dimensional material based highly sensitive humidity detecting device according to claim 8, wherein: the two-dimensional transition metal chalcogenide layer is made of molybdenum sulfide, molybdenum telluride, molybdenum selenide, tungsten sulfide, tungsten telluride and tungsten selenide.
10. The two-dimensional material based highly sensitive humidity detecting device as claimed in any of claims 1 to 9, wherein: the substrate is made of an insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210100800.5A CN114487019A (en) | 2022-01-27 | 2022-01-27 | High-sensitivity humidity detection device based on two-dimensional material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210100800.5A CN114487019A (en) | 2022-01-27 | 2022-01-27 | High-sensitivity humidity detection device based on two-dimensional material |
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| Publication Number | Publication Date |
|---|---|
| CN114487019A true CN114487019A (en) | 2022-05-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210100800.5A Withdrawn CN114487019A (en) | 2022-01-27 | 2022-01-27 | High-sensitivity humidity detection device based on two-dimensional material |
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| CN (1) | CN114487019A (en) |
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2022
- 2022-01-27 CN CN202210100800.5A patent/CN114487019A/en not_active Withdrawn
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Application publication date: 20220513 |
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