CN114477185B - beta-SiC with lamellar structure and preparation method thereof - Google Patents
beta-SiC with lamellar structure and preparation method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及碳化硅陶瓷材料领域,尤其涉及一种具有片层结构β-SiC粉体及其制备方法。The invention relates to the field of silicon carbide ceramic materials, in particular to a β-SiC powder with a lamellar structure and a preparation method thereof.
背景技术Background technique
碳化硅陶瓷具有高硬度、耐高温、耐氧化、化学稳定性好、抗热震性好的特点,能够广泛应用在机械、航空、化工、冶金等领域,尤其适合热性能要求较高的领域。目前β-SiC的典型制备方法包括以下几种:Silicon carbide ceramics have the characteristics of high hardness, high temperature resistance, oxidation resistance, good chemical stability and good thermal shock resistance, and can be widely used in machinery, aviation, chemical industry, metallurgy and other fields, especially suitable for fields with high thermal performance requirements. The current typical preparation methods of β-SiC include the following:
(1)反应烧结法,如CN107602131A中提到,采用碳化硅粗粉i,碳化硅细分粉ii,石墨烯纳米片、木炭黑、硅粉、分散剂、粘合剂,通过反应烧结制备β-SiC,其中石墨烯纳米片为硅碳反应提供了碳源,与硅反应后生成的碳化硅具有典型的层状结构,能够提高β-SiC的力学性能。如CN104926313A中提到,采用碳化硅、石墨烯、碳粉、表面活性剂、分散剂等,通过混合成型高温下反应烧结可以制备得到致密碳化硅。但是反应烧结法原料复杂、耗能高、时间久,通常易含有游离硅,工业化成本高。(1) The reaction sintering method, as mentioned in CN107602131A, adopts silicon carbide coarse powder i, silicon carbide fine powder ii, graphene nanosheets, charcoal black, silicon powder, dispersant, adhesive, and is prepared by reaction sintering β-SiC, in which graphene nanosheets provide a carbon source for the silicon-carbon reaction, and the silicon carbide formed after reacting with silicon has a typical layered structure, which can improve the mechanical properties of β-SiC. As mentioned in CN104926313A, dense silicon carbide can be prepared by using silicon carbide, graphene, carbon powder, surfactant, dispersant, etc., by reaction sintering at high temperature through mixed molding. However, the reaction sintering method has complex raw materials, high energy consumption, and a long time. Usually, free silicon is easily contained, and the industrialization cost is high.
(2)微波反应法,张浩在“微波制备碳化硅及其电磁屏蔽”中提到,采用微波反应法,以不同碳源与硅粉、氧化硅粉反应制备β-SiC产物。以人造石墨粉为碳源制备得到的多为纳米线、纳米棒和微纳米晶粒,纳米线含量较少;以鳞片状石墨为碳源制备的多为卷曲的纳米线、纳米棒;以石墨烯微片为碳源制备的多为微纳米晶粒。虽然能够生成纯相β-SiC,但是并不能得到类似石墨烯的片层结构,从而机械力学性能受到限制。(2) Microwave reaction method, Zhang Hao mentioned in "Microwave Preparation of Silicon Carbide and Its Electromagnetic Shielding", using microwave reaction method to prepare β-SiC products by reacting different carbon sources with silicon powder and silicon oxide powder. Most of the nanowires, nanorods and micro-nano grains prepared by using artificial graphite powder as the carbon source are nanowires, nanorods and micro-nano grains, and the content of nanowires is relatively small; Most of the olefin microsheets prepared as carbon sources are micro-nano crystals. Although pure phase β-SiC can be produced, it cannot obtain a graphene-like sheet structure, so its mechanical properties are limited.
发明内容Contents of the invention
为了克服上述缺点,本发明提供一种高温燃烧合成法制备具有片层结构β-SiC粉体的方法,能够达到节能、高效、低成本的优点,粉体形貌可控,有利于力学性能提升。In order to overcome the above disadvantages, the present invention provides a method for preparing β-SiC powder with a lamellar structure by high-temperature combustion synthesis, which can achieve the advantages of energy saving, high efficiency and low cost, and the shape of the powder can be controlled, which is conducive to the improvement of mechanical properties .
具体提供以下技术方案:Specifically provide the following technical solutions:
一种具有片层结构的β-SiC陶瓷材料,其特征在于,所述片层结构为表面完全开放的薄片状结构,片层直径在4-30μm之间,片层厚度为200~500nm;在片层结构的边缘存在β-SiC纳米晶须,所述β-SiC纳米晶须的长径比为10~30;片层结构内部包括相互交错、细小且短的SiC纳米晶须、以及相互连接的SiC纳米颗粒。A β-SiC ceramic material with a lamellar structure, characterized in that the lamellar structure is a flaky structure with a completely open surface, the diameter of the lamellar layer is between 4-30 μm, and the thickness of the lamellar layer is 200-500 nm; There are β-SiC nanowhiskers on the edge of the sheet structure, and the aspect ratio of the β-SiC nanowhiskers is 10-30; the inside of the sheet structure includes interlaced, small and short SiC nanowhiskers, and interconnected SiC nanoparticles.
优选的,片层结构内部的SiC纳米晶须的长径比为5-12;Preferably, the aspect ratio of the SiC nano whiskers inside the lamellar structure is 5-12;
优选的,片层结构内部的SiC纳米颗粒尺寸为100~300nm;Preferably, the size of SiC nanoparticles inside the lamellar structure is 100-300nm;
本发明还提供一种具有片层结构的β-SiC陶瓷材料的制备方法,其特征在于,采用石墨烯作为碳源,采用硅粉作为硅源,将硅粉与石墨烯混合均匀,干燥过筛,将碳硅混合粉体装入反应舟中,碳硅混合粉体四周以铝热剂作化学炉,并置于燃烧合成反应釜中,通入1-3MPa氮气,通过引燃化学炉使得碳硅混合粉体发生燃烧合成反应,制备具有片层结构的β-SiC粉体。The present invention also provides a method for preparing a β-SiC ceramic material with a lamellar structure, which is characterized in that graphene is used as a carbon source, silicon powder is used as a silicon source, silicon powder and graphene are mixed evenly, and dried and sieved , Put the carbon-silicon mixed powder into the reaction boat, the carbon-silicon mixed powder is surrounded by thermite as a chemical furnace, and placed in the combustion synthesis reaction kettle, and 1-3MPa nitrogen is introduced, and the carbon is made by igniting the chemical furnace. The silicon mixed powder undergoes a combustion synthesis reaction to prepare a β-SiC powder with a lamellar structure.
优选的,所述化学炉采用Ti、C混合粉体与Al、Fe2O3混合粉体作为铝热剂,并在粉体一端放置钨丝线圈。Preferably, the chemical furnace uses Ti, C mixed powder and Al, Fe 2 O 3 mixed powder as the thermite, and a tungsten wire coil is placed at one end of the powder.
所述引燃化学炉通过在钨丝线圈中通入交变电流引燃。The ignition chemical furnace is ignited by passing an alternating current in a tungsten wire coil.
优选的,所述Ti、C混合粉体占所述碳硅混合粉体重量的60%-90%;所述Al、Fe2O3混合粉体占所述碳硅混合粉体重量的10%-40%。Preferably, the Ti, C mixed powder accounts for 60%-90% of the weight of the carbon-silicon mixed powder ; the Al, Fe2O3 mixed powder accounts for 10% of the weight of the carbon-silicon mixed powder -40%.
优选的,所述硅源与碳源配比为摩尔比1:1-1:1.2;Preferably, the ratio of the silicon source to the carbon source is a molar ratio of 1:1-1:1.2;
优选的,硅粉与石墨烯采用湿法混合,加入与碳硅混合粉体重量1:1的无水乙醇搅拌湿混,在超声仪中连续超声3小时,每隔45min加一次乙醇,每次乙醇的加入量为碳硅混合粉体重量的25%。Preferably, the silicon powder and graphene are mixed by a wet method, adding anhydrous ethanol with a weight of 1:1 with the carbon silicon mixed powder, stirring and wet mixing, continuous ultrasonication in the ultrasonic instrument for 3 hours, adding ethanol every 45min, each time The amount of ethanol added is 25% of the weight of the carbon-silicon mixed powder.
优选的,所述干燥过筛通过将湿混粉体放入80℃的烘干箱中干燥,干燥后混合粉体研磨过45目-60目筛。Preferably, the drying and sieving is carried out by putting the wet mixed powder into an oven at 80° C. for drying, and after drying, the mixed powder is ground through a 45-60 mesh sieve.
本发明采用化学炉配合燃烧合成法,制备得到的β-SiC能够有效保留石墨烯的片层结构,反应原理如图1所示,石墨烯具有完全开放的表面和结晶度较高的六角网络晶格结构,其片层边缘由于悬挂C键具有化学活性相对较高的活性C原子(如图1(a)),同时,在产物的制备过程中,超声混料处理和燃烧合成的高温环境也会使石墨烯的网络晶格产生更多的缺陷位点、表面台阶及局部断裂的C-C键,这使石墨烯的片层内部也具有局部活性C原子(如图1(a))。在反应过程中,当气相硅源(Si、SiO)扩散到石墨烯表面,与石墨烯中的活性C原子反应形成SiC晶核(如图1(b)),由于石墨烯具有结晶度较高的晶格结构,反应需要的能量大,因此,随着气相硅源的不断沉积,SiC晶核根据VS机制沿一维方向生长形成SiC纳米晶须,并且在石墨烯片层碳源的局限下,SiC晶须相互缠绕保持了微米级的片层结构(如图1(c))。因为石墨烯片层边缘C原子的活性比片层表面内部C原子的化学活性高,因此SiC晶须首先在边缘形成,并且边缘处SiC晶须的长径比普遍与片层内部的SiC晶须的长径比要大,由于片层内部C原子活性的限制,形成的SiC晶须有些会非常短,可直接将其视为SiC颗粒。一般,SiC晶须的长度和晶须相互缠绕形成的片层结构的厚度与气相硅源和石墨烯活性有关,而两者又与反应温度和反应压力有关,因此燃烧合成过程中反应温度和反应压力在一定程度上决定SiC晶须的长度和所形成的片层结构的厚度。The present invention adopts a chemical furnace combined with a combustion synthesis method, and the prepared β-SiC can effectively retain the sheet structure of graphene. The reaction principle is shown in Figure 1. The edge of the sheet has a relatively high chemically active C atom due to the dangling C bond (as shown in Figure 1(a)). At the same time, in the process of product preparation, the high temperature environment of ultrasonic mixing treatment and combustion synthesis It will cause more defect sites, surface steps and partially broken C-C bonds in the graphene network lattice, which makes the graphene sheets also have local active C atoms (as shown in Figure 1(a)). During the reaction process, when the gaseous silicon source (Si, SiO) diffuses to the surface of graphene, it reacts with the active C atoms in graphene to form SiC crystal nuclei (as shown in Figure 1(b)), because graphene has a high crystallinity Therefore, with the continuous deposition of the gas-phase silicon source, the SiC crystal nucleus grows along the one-dimensional direction according to the VS mechanism to form SiC nano whiskers, and under the limitation of the graphene sheet carbon source , SiC whiskers are intertwined to maintain a micron-scale sheet structure (as shown in Figure 1(c)). Because the activity of C atoms at the edge of the graphene sheet is higher than that of C atoms inside the sheet surface, SiC whiskers are first formed at the edge, and the aspect ratio of SiC whiskers at the edge is generally the same as that of SiC whiskers inside the sheet. Due to the limitation of the activity of C atoms inside the sheet, some SiC whiskers formed will be very short, which can be directly regarded as SiC particles. Generally, the length of SiC whiskers and the thickness of the sheet structure formed by intertwining whiskers are related to gas-phase silicon source and graphene activity, and both are related to reaction temperature and reaction pressure. The pressure determines to a certain extent the length of SiC whiskers and the thickness of the formed lamellar structure.
因为此合成实验中在铝热剂做化学炉和氮气气氛条件下完成,当以氮气压力为变量时,随氮气压力增大(1~3MPa)气相硅源减少,使形成的晶须长度缩短,相应的,片层厚度有一定的减小;铝热剂由Ti、C、Al和Fe2O3组成,其中Ti与C反应温和且放热量高,Al与Fe2O3反应放热剧烈且放热量少,当Ti、C比例高时,化学炉升温慢但可达温度高,保温时间长,当Al、Fe2O3比例高时,化学炉升温快但可达温度低,保温时间短。所以,以更高比例的Ti、C做化学炉得到的SiC晶须更长,相应的,片层厚度更大。Because this synthesis experiment was completed under the condition of a thermite as a chemical furnace and a nitrogen atmosphere, when the nitrogen pressure was used as a variable, as the nitrogen pressure increased (1-3MPa), the gas-phase silicon source decreased, and the length of the formed whiskers was shortened. Correspondingly, the thickness of the sheet decreases to a certain extent; the thermite is composed of Ti, C, Al and Fe 2 O 3 , in which the reaction between Ti and C is mild and the heat release is high, and the reaction between Al and Fe 2 O 3 is violent and the heat release is high. Less heat release, when the ratio of Ti and C is high, the chemical furnace heats up slowly but the attainable temperature is high, and the holding time is long; when the ratio of Al and Fe 2 O 3 is high, the chemical furnace heats up quickly but the reachable temperature is low, and the holding time short. Therefore, the SiC whiskers obtained by using a higher proportion of Ti and C as a chemical furnace are longer, and correspondingly, the thickness of the sheet is larger.
同时,由于Si/C是弱放热反应体系,绝热温度仅有1600~1700K,由元素直接点燃的方式燃烧合成SiC比较困难,同时由于反应物用量又比较少,所以需要借助氮气下Si氮化和化学炉耦合放热辅助Si/C体系进行燃烧合成,所以不需要加入SiC稀释剂。At the same time, since Si/C is a weakly exothermic reaction system, the adiabatic temperature is only 1600-1700K, and it is difficult to synthesize SiC by direct ignition of elements. At the same time, because the amount of reactants is relatively small, it is necessary to use Si nitriding under nitrogen. Coupled with a chemical furnace, the exothermic auxiliary Si/C system is used for combustion synthesis, so there is no need to add SiC diluent.
本发明的有益效果如下:The beneficial effects of the present invention are as follows:
1.本发明通过燃烧合成法制备的β-SiC呈现规则的薄片层状结构,不含有游离硅,相纯度高,大大提高了材料热导率以及陶瓷材料的韧性,能够应用于电子器件封装基板、热交换器等热性能要求高的场合;且制备工艺简单、成本低、反应时间短,有利于工业化生产。1. The β-SiC prepared by the combustion synthesis method of the present invention presents a regular lamellar structure, does not contain free silicon, has high phase purity, greatly improves the thermal conductivity of the material and the toughness of the ceramic material, and can be applied to electronic device packaging substrates , heat exchangers and other occasions with high thermal performance requirements; and the preparation process is simple, the cost is low, and the reaction time is short, which is beneficial to industrial production.
2.本发明采用石墨烯作为碳源,一方面提供碳源,另一方面石墨烯为薄片状β-SiC的形成提供模板,由于陶瓷断裂时裂纹将沿着薄片状结构发展,需要消耗较多的断裂能,陶瓷不容易断裂韧性增加,而且片状边缘存在大量的纳米晶须,同样起到了增强增韧的效果。2. The present invention uses graphene as a carbon source, on the one hand to provide a carbon source, and on the other hand graphene provides a template for the formation of flake-like β-SiC, because cracks will develop along the flake-like structure when the ceramic breaks, requiring more consumption The fracture energy of ceramics is not easy to increase in fracture toughness, and there are a large number of nano whiskers on the edge of the sheet, which also plays the role of strengthening and toughening.
附图说明Description of drawings
在下文中将基于实施例并参考附图来对本发明进行更详细的描述。其中:Hereinafter, the present invention will be described in more detail based on the embodiments with reference to the accompanying drawings. in:
图1.SiC片层结构的形成原理图;Figure 1. Schematic diagram of the formation of SiC sheet structure;
图2.具有片层结构的β-SiC的XRD图谱;Figure 2. XRD pattern of β-SiC with lamellar structure;
图3.反应物石墨烯以及具有片层结构的β-SiC的SEM图谱,(a)碳源石墨烯的SEM图;(b)、(c)Ti、C混合粉体占80%的铝热剂及1MPa氮气压力的条件下合成产物的SEM图;(d)Ti、C混合粉体占90%的铝热剂及1MPa氮气压力的条件下合成产物的SEM图;(e)Ti、C混合粉体占70%的铝热剂及2MPa氮气压力的条件下合成产物的SEM图;(f)Ti、C混合粉体占60%的铝热剂及3MPa氮气压力的条件下合成产物的SEM图。Figure 3. SEM spectra of reactant graphene and β-SiC with sheet structure, (a) SEM images of carbon source graphene; (b), (c) Ti, C mixed powder accounted for 80% thermite (d) SEM image of the product synthesized under the condition of 90% Ti and C mixed powder and thermite and 1MPa nitrogen pressure; (e) Ti and C mixed The SEM image of the product synthesized under the condition of 70% thermite powder and 2MPa nitrogen pressure; (f) the SEM image of the product synthesized under the condition of 60% Ti and C mixed powder thermite and 3MPa nitrogen pressure .
具体实施方式Detailed ways
下面将结合本发明实施例,对本发明实施例中的技术方案进行清楚、完整的描述,显然,所述的实施例只是本发明的部分具有代表性的实施例,而不是全部实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的其他所有实施例都属于本发明的保护范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only some representative embodiments of the present invention, rather than all embodiments. All other embodiments obtained by persons of ordinary skill without making creative efforts belong to the protection scope of the present invention.
实施例1Example 1
选取石墨烯12g,选取硅粉28g,将硅粉与石墨烯配料得到碳硅混合粉体40g,加入与碳硅混合粉体重量比1:1的无水乙醇搅拌湿混,在超声仪中连续超声3小时,由于乙醇会在超声过程中挥发,所以每隔45min加一次乙醇,每次乙醇的加入量为碳硅混合粉体重量的25%。然后将超声好的湿混粉体放入80℃的烘干箱中烘干,将烘干后的混合粉体研磨过45目筛备用。将研磨过筛的碳硅混合粉体装入内衬碳毡的不锈钢反应舟中,将摩尔比1:1的Ti、C混合粉体占重80%,摩尔比1:1的Al、Fe2O3混合粉体占重20%的铝热剂放于Si、C混合粉体四周做化学炉,并在粉体一端放置用于点火的钨丝线圈,然后一并置于密闭的燃烧合成反应釜内。将反应釜抽真空后,充入高纯氮气1MPa。然后在钨丝线圈中通入交变电流,引燃化学炉继而引发Si、C混合粉体的燃烧合成反应,即得具有片层结构的β-SiC粉体。通过XRD表征发现,产物为纯相β-SiC粉体,不含有游离硅,Sf为碳化硅堆垛层次导致;通过SEM表征,大部分产物在外观上整体保持了尺度、形貌与石墨烯类似的片层结构,平均直径为15μm,平均厚度为400nm,但从更小的尺度看,在片层结构的边缘长径比较大的SiC纳米晶须相互缠绕,长径比为20左右,而在片层结构内部则由相互交错、细小且短的SiC纳米晶须及相互连接团聚的SiC纳米颗粒组成,短晶须长径比平均为10左右,纳米颗粒平均直径在150nm。Select 12g of graphene, select 28g of silicon powder, mix silicon powder and graphene to obtain 40g of carbon-silicon mixed powder, add dehydrated alcohol with a weight ratio of 1:1 to carbon-silicon mixed powder, stir and wet mix, and continuously Ultrasound for 3 hours, because ethanol will volatilize during the ultrasonic process, so ethanol is added once every 45 minutes, and the amount of ethanol added each time is 25% of the weight of the carbon-silicon mixed powder. Then put the ultrasonically prepared wet-mixed powder into an oven at 80°C for drying, and grind the dried mixed powder through a 45-mesh sieve for later use. Put the ground and sieved carbon-silicon mixed powder into a stainless steel reaction boat lined with carbon felt. The mixed powder of Ti and C with a molar ratio of 1:1 accounts for 80% of the weight, and the mixed powder of Al and Fe with a molar ratio of 1: 1 O 3 mixed powder accounting for 20% of thermite is placed around the Si and C mixed powder to make a chemical furnace, and a tungsten wire coil for ignition is placed at one end of the powder, and then placed together in a closed combustion synthesis reaction Inside the cauldron. After the reactor was evacuated, it was filled with high-purity nitrogen gas at 1MPa. Then, an alternating current is passed into the tungsten wire coil, the chemical furnace is ignited, and then the combustion synthesis reaction of the Si and C mixed powder is initiated, and the β-SiC powder with a lamellar structure is obtained. Through XRD characterization, it is found that the product is a pure-phase β-SiC powder, does not contain free silicon, and Sf is caused by silicon carbide stacking layers; through SEM characterization, most of the products maintain a scale and shape similar to graphene in appearance The lamellar structure has an average diameter of 15 μm and an average thickness of 400 nm, but on a smaller scale, SiC nanowhiskers with large aspect ratios at the edge of the lamellar structure are intertwined with each other, and the aspect ratio is about 20, while in The interior of the lamellar structure is composed of interlaced, small and short SiC nano whiskers and interconnected and agglomerated SiC nanoparticles. The average aspect ratio of the short whiskers is about 10, and the average diameter of the nanoparticles is 150nm.
实施例2Example 2
采用如实施例1中的实验条件,其中选取石墨烯12g,选取硅粉33.6g,将硅粉与石墨烯配料得到碳硅混合粉体45.6g,铝热剂采用Ti、C混合粉体占90%,Al、Fe2O3混合粉体占10%;将烘干后的混合粉体研磨过60目筛备用。其他条件与实施例1中一致。通过XRD表征发现,产物为纯相β-SiC粉体,不含有游离硅;通过SEM表征,具有片层结构,平均直径为4μm,平均厚度为500nm,在片层结构的边缘长径比较大的SiC纳米晶须相互缠绕,长径比为25左右,而在片层结构内部则由相互交错、细小且短的SiC纳米晶须及相互连接团聚的SiC纳米颗粒组成,短晶须长径比平均为12左右,纳米颗粒平均直径在200nm。Adopt the experimental condition as in embodiment 1, wherein choose graphene 12g, choose silicon powder 33.6g, silicon powder and graphene batching obtain carbon-silicon mixed powder 45.6g, thermite adopts Ti, C mixed powder to account for 90 %, Al, Fe 2 O 3 mixed powder accounted for 10%; the dried mixed powder was ground through a 60-mesh sieve for later use. Other conditions are consistent with Example 1. Through XRD characterization, it is found that the product is a pure-phase β-SiC powder without free silicon; through SEM characterization, it has a lamellar structure with an average diameter of 4 μm and an average thickness of 500 nm. The edge of the lamellar structure has a relatively large length and diameter. SiC nanowhiskers are intertwined with each other, and the aspect ratio is about 25, while inside the sheet structure, it is composed of interlaced, small and short SiC nanowhiskers and interconnected and agglomerated SiC nanoparticles, and the short whiskers have an average aspect ratio. is about 12, and the average diameter of nanoparticles is 200nm.
实施例3Example 3
采用如实施例1中的实验条件,其中铝热剂采用Ti、C混合粉体占70%,Al、Fe2O3混合粉体占30%;将反应釜抽真空后,充入高纯氮气2MPa。其他条件与实施例1中一致。通过XRD表征发现,产物为纯相β-SiC粉体,不含有游离硅;通过SEM表征,具有片层结构,平均直径为20μm,平均厚度为200nm,在片层结构的边缘长径比较大的SiC纳米晶须相互缠绕,,长径比为17左右,而在片层结构内部则由相互交错、细小且短的SiC纳米晶须及相互连接团聚的SiC纳米颗粒组成,短晶须长径比平均为8左右,纳米颗粒平均直径在180nm。Adopt the experimental conditions as in Example 1, wherein the thermite uses Ti, C mixed powder to account for 70% , Al, Fe2O3 mixed powder accounts for 30%; after vacuumizing the reactor, fill it with high-purity nitrogen 2MPa. Other conditions are consistent with Example 1. Through XRD characterization, it is found that the product is a pure-phase β-SiC powder without free silicon; through SEM characterization, it has a lamellar structure with an average diameter of 20 μm and an average thickness of 200 nm. The edge of the lamellar structure has a relatively large length and diameter. SiC nanowhiskers are intertwined with each other, and the aspect ratio is about 17, while inside the lamellar structure, it is composed of interlaced, small and short SiC nanowhiskers and interconnected and agglomerated SiC nanoparticles, and the short whisker aspect ratio The average is about 8, and the average diameter of nanoparticles is 180nm.
实施例4Example 4
采用如实施例1中的实验条件,其中铝热剂采用Ti、C混合粉体占60%,Al、Fe2O3混合粉体占40%;将反应釜抽真空后,充入高纯氮气1MPa。其他条件与实施例1中一致。通过XRD表征发现,产物为纯相β-SiC粉体,不含有游离硅;通过SEM表征,具有片层结构,平均直径为30μm,平均厚度为200nm,在片层结构的边缘长径比较大的SiC纳米晶须相互缠绕,,长径比为15左右,而在片层结构内部则由相互交错、细小且短的SiC纳米晶须及相互连接团聚的SiC纳米颗粒组成,短晶须长径比平均为7左右,纳米颗粒平均直径在280nm。Adopt the experimental conditions as in Example 1, wherein the thermite is made of Ti, C mixed powder accounting for 60%, and Al, Fe2O3 mixed powder accounting for 40%; after the reactor is evacuated, it is filled with high-purity nitrogen 1MPa. Other conditions are consistent with Example 1. Through XRD characterization, it is found that the product is a pure-phase β-SiC powder without free silicon; through SEM characterization, it has a lamellar structure with an average diameter of 30 μm and an average thickness of 200 nm. The edge of the lamellar structure has a relatively large length and diameter. SiC nanowhiskers are intertwined with each other, and the aspect ratio is about 15, while inside the sheet structure, it is composed of interlaced, small and short SiC nanowhiskers and interconnected and agglomerated SiC nanoparticles, and the short whisker aspect ratio The average is about 7, and the average diameter of nanoparticles is 280nm.
实施例5Example 5
采用如实施例1中的实验条件,其中铝热剂采用Ti、C混合粉体占60%,Al、Fe2O3混合粉体占40%;将反应釜抽真空后,充入高纯氮气3MPa。其他条件与实施例1中一致。通过XRD表征发现,产物为纯相β-SiC粉体,不含有游离硅;通过SEM表征,具有片层结构,平均直径为25μm,平均厚度为150nm,在片层结构的边缘长径比较大的SiC纳米晶须相互缠绕,长径比为10左右,而在片层结构内部则由相互交错、细小且短的SiC纳米晶须及相互连接团聚的SiC纳米颗粒组成,短晶须长径比平均为5左右,纳米颗粒平均直径在300nm。Adopt the experimental conditions as in Example 1, wherein the thermite is made of Ti, C mixed powder accounting for 60%, and Al, Fe2O3 mixed powder accounting for 40%; after the reactor is evacuated, it is filled with high-purity nitrogen 3 MPa. Other conditions are consistent with Example 1. Through XRD characterization, it is found that the product is a pure-phase β-SiC powder without free silicon; through SEM characterization, it has a lamellar structure with an average diameter of 25 μm and an average thickness of 150 nm. The edge of the lamellar structure has a relatively large length and diameter. SiC nanowhiskers are intertwined with each other, and the aspect ratio is about 10, while inside the sheet structure, it is composed of interlaced, small and short SiC nanowhiskers and interconnected and agglomerated SiC nanoparticles, and the short whiskers have an average aspect ratio. is about 5, and the average diameter of nanoparticles is 300nm.
以上所述,以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。As mentioned above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still understand the foregoing The technical solutions recorded in each embodiment are modified, or some of the technical features are replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.
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