CN114447151A - A kind of preparation method of cadmium sulfide thin film for solar cell - Google Patents
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- 229910052980 cadmium sulfide Inorganic materials 0.000 title claims abstract description 67
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 title claims abstract description 55
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000010409 thin film Substances 0.000 title claims description 43
- 150000001661 cadmium Chemical class 0.000 claims abstract description 38
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims abstract description 34
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000011593 sulfur Substances 0.000 claims abstract description 28
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 28
- 238000004528 spin coating Methods 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 24
- 239000003607 modifier Substances 0.000 claims abstract description 20
- 238000000137 annealing Methods 0.000 claims abstract description 19
- 239000012362 glacial acetic acid Substances 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 229960000583 acetic acid Drugs 0.000 claims abstract description 16
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 claims abstract description 9
- 238000002156 mixing Methods 0.000 claims abstract description 9
- 239000003960 organic solvent Substances 0.000 claims abstract description 9
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 8
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims abstract description 8
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 claims abstract description 6
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 239000011592 zinc chloride Substances 0.000 claims abstract description 4
- 235000005074 zinc chloride Nutrition 0.000 claims abstract description 3
- 239000000243 solution Substances 0.000 claims description 44
- 239000012266 salt solution Substances 0.000 claims description 28
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 21
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 18
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 claims description 14
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 12
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims description 11
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 claims description 7
- LHQLJMJLROMYRN-UHFFFAOYSA-L cadmium acetate Chemical compound [Cd+2].CC([O-])=O.CC([O-])=O LHQLJMJLROMYRN-UHFFFAOYSA-L 0.000 claims description 7
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims description 5
- PDQAZBWRQCGBEV-UHFFFAOYSA-N Ethylenethiourea Chemical compound S=C1NCCN1 PDQAZBWRQCGBEV-UHFFFAOYSA-N 0.000 claims description 5
- VQNPSCRXHSIJTH-UHFFFAOYSA-N cadmium(2+);carbanide Chemical compound [CH3-].[CH3-].[Cd+2] VQNPSCRXHSIJTH-UHFFFAOYSA-N 0.000 claims description 5
- YUKQRDCYNOVPGJ-UHFFFAOYSA-N thioacetamide Chemical compound CC(N)=S YUKQRDCYNOVPGJ-UHFFFAOYSA-N 0.000 claims description 5
- DLFVBJFMPXGRIB-UHFFFAOYSA-N thioacetamide Natural products CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000003786 synthesis reaction Methods 0.000 abstract description 2
- 239000002699 waste material Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 29
- 230000000052 comparative effect Effects 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 4
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000006136 alcoholysis reaction Methods 0.000 description 2
- 238000000224 chemical solution deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- GRWVQDDAKZFPFI-UHFFFAOYSA-H chromium(III) sulfate Chemical compound [Cr+3].[Cr+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O GRWVQDDAKZFPFI-UHFFFAOYSA-H 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- OQRNKLRIQBVZHK-UHFFFAOYSA-N selanylideneantimony Chemical compound [Sb]=[Se] OQRNKLRIQBVZHK-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
Description
技术领域technical field
本发明涉及薄膜制备技术领域,具体涉及一种用于太阳能电池的硫化镉薄膜的制备方法。The invention relates to the technical field of thin film preparation, in particular to a preparation method of a cadmium sulfide thin film for solar cells.
背景技术Background technique
硫化镉(化学式为CdS)是一种n型半导体材料,是铜铟镓硒、碲化镉、硒化锑等薄膜太阳能电池中常用的缓冲层材料,工业生产中尚无更合适的替代品。如期刊论文:IEEE J.Photovoltaics 2019, 9, 1863和Nat. Energy 2019, 4, 837报道的效率大于20%的薄膜太阳能电池都是基于硫化镉薄膜实现的。然而,无论在实验室还是在工业生产中,高质量的硫化镉薄膜的制备主要依赖化学水浴沉积技术(CBD)。由于制备过程中需要将待镀膜的基板完全浸入溶液,且溶液无法再次利用,因此会产生大量含镉的废水,造成严重环境问题。虽然目前也报导了一些真空制备CdS的技术,如期刊论文Applied Materials Today,2019, 16, 367报导了一种射频磁控溅射制备CdS薄膜的方法,然而该技术设备要求、制造成本比较较高,且真空腔体内容易污染,清理维护过程中容易产生粉尘,可能对人员身体造成重金属伤害。Cadmium sulfide (chemical formula CdS) is an n-type semiconductor material, which is a commonly used buffer layer material in thin film solar cells such as copper indium gallium selenide, cadmium telluride, and antimony selenide. There is no more suitable substitute in industrial production. For example, journal papers: IEEE J.Photovoltaics 2019, 9, 1863 and Nat. Energy 2019, 4, 837 reported thin-film solar cells with efficiencies greater than 20% based on cadmium sulfide thin films. However, the preparation of high-quality cadmium sulfide thin films mainly relies on the chemical bath deposition technique (CBD), both in the laboratory and in industrial production. Since the substrate to be coated needs to be completely immersed in the solution during the preparation process, and the solution cannot be reused, a large amount of wastewater containing cadmium will be generated, causing serious environmental problems. Although some technologies for preparing CdS in vacuum have also been reported, such as the journal paper Applied Materials Today, 2019, 16, 367 reported a method for preparing CdS thin films by radio frequency magnetron sputtering, but the technical equipment requirements and manufacturing costs are relatively high , and the vacuum chamber is easy to be polluted, and dust is easily generated during the cleaning and maintenance process, which may cause heavy metal damage to personnel.
发明内容SUMMARY OF THE INVENTION
基于上述技术问题,本发明目的在于提供一种节能环保的太阳能电池硫化镉薄膜的制备方法。该方法制备的薄膜具有优异的电学性质。Based on the above technical problems, the purpose of the present invention is to provide an energy-saving and environment-friendly preparation method of a cadmium sulfide thin film for solar cells. The films prepared by this method have excellent electrical properties.
本发明目的通过如下技术方案实现:The object of the present invention is achieved through the following technical solutions:
一种用于太阳能电池的硫化镉薄膜的制备方法,其特征在于:将镉盐溶解于有机溶剂中,配制成镉盐溶液,将硫源溶解于有机溶剂中,配制成硫源溶液,将镉盐溶液和硫源溶液混合,加入冰乙酸,再加入氯化镉或氯化锌作为改性剂,配制得到的硫化镉旋涂溶液,在衬底表面进行旋涂,然后进行退火处理,所述镉盐为乙酸镉、乙酰丙酮镉和二甲基镉中一种或多种混合,所述述硫源为硫脲、乙烯硫脲和硫代乙酰胺中一种或多种混合,所述有机溶剂为乙二醇甲醚、乙醇、N,N-二甲基甲酰胺或异丙醇中的一种或混合。A method for preparing a cadmium sulfide thin film for solar cells, characterized in that: dissolving cadmium salt in an organic solvent to prepare a cadmium salt solution; dissolving a sulfur source in the organic solvent to prepare a sulfur source solution; The salt solution and the sulfur source solution are mixed, glacial acetic acid is added, and then cadmium chloride or zinc chloride is added as a modifier to prepare the obtained cadmium sulfide spin coating solution, spin coating on the surface of the substrate, and then annealing. The cadmium salt is a mixture of one or more of cadmium acetate, cadmium acetylacetonate and dimethyl cadmium, the sulfur source is a mixture of one or more of thiourea, ethylene thiourea and thioacetamide, and the organic The solvent is one or a mixture of ethylene glycol methyl ether, ethanol, N,N-dimethylformamide or isopropanol.
优选的,镉盐为乙酸镉,硫源为硫脲,有机溶剂为乙二醇甲醚。Preferably, the cadmium salt is cadmium acetate, the sulfur source is thiourea, and the organic solvent is ethylene glycol methyl ether.
进一步,上述镉盐溶液浓度为0.15~0.75mol/L,硫源溶液的浓度为0.15~0.75mol/L。Further, the concentration of the cadmium salt solution is 0.15-0.75 mol/L, and the concentration of the sulfur source solution is 0.15-0.75 mol/L.
进一步,上述镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为0.7:1~1.3:1的比例进行混合。Further, the above-mentioned cadmium salt solution and sulfur source solution are mixed according to the ratio of Cd 2+ :S 2- molar ratio of 0.7:1 to 1.3:1.
进一步,上述镉盐溶液、冰乙酸和改性剂的用量比例为5~20mL:1.5~6mL:2~8mg。Further, the dosage ratio of the above-mentioned cadmium salt solution, glacial acetic acid and modifier is 5~20mL:1.5~6mL:2~8mg.
在制备过程中发现,采用氯化镉、硫酸铬等镉盐制备的旋涂水溶液中容易生成氧化镉等物质,导致制备的硫化镉纯度降低,而采用有机溶剂配制的旋涂液中镉盐容易发生醇解,产生细小颗粒沉降于薄膜表面,导致薄膜表面粗糙度增大。本发明选用特定的镉盐溶于特定的有机溶剂中,并添加冰乙酸调节旋涂液的pH环境,抑制镉盐醇解,提高旋涂液的稳定性,同时抑制了旋涂液中电离出OH-,从而减少后续生成氧化镉杂质。During the preparation process, it was found that cadmium oxide and other substances were easily generated in the spin coating aqueous solution prepared with cadmium salts such as cadmium chloride and chromium sulfate, which resulted in a decrease in the purity of the prepared cadmium sulfide. Alcoholysis occurs, resulting in the deposition of fine particles on the surface of the film, resulting in an increase in the surface roughness of the film. The invention selects specific cadmium salt to dissolve in specific organic solvent, and adds glacial acetic acid to adjust the pH environment of the spin coating solution, inhibits the alcoholysis of the cadmium salt, improves the stability of the spin coating solution, and simultaneously inhibits ionization in the spin coating solution. OH - , thereby reducing the subsequent generation of cadmium oxide impurities.
进一步,上述旋涂是在衬底上述滴加硫化镉旋涂溶液,滴加量为15~80μL/cm2,然后以500~1600rpm的转速旋转5~30s。Further, in the above spin coating, the cadmium sulfide spin coating solution is added dropwise on the substrate, and the drop amount is 15-80 μL/cm 2 , and then rotated at a rotational speed of 500-1600 rpm for 5-30 s.
优选的,上述旋涂溶液的滴加量为300μL/cm2,以800rpm的转速旋转10s。Preferably, the dropwise amount of the above spin coating solution is 300 μL/cm 2 , and the solution is rotated at a speed of 800 rpm for 10 s.
进一步,上述退火的温度为250~450℃,退火时间为2~45min。Further, the temperature of the above annealing is 250-450° C., and the annealing time is 2-45 min.
最具体的,一种用于太阳能电池的硫化镉薄膜的制备方法,其特征在于,按如下步骤进行:Most specifically, a method for preparing a cadmium sulfide thin film for solar cells, characterized in that the steps are as follows:
A、将乙酸镉、乙酰丙酮镉,二甲基镉中的一种或多种溶解于乙二醇甲醚、乙醇、N,N-二甲基甲酰胺或异丙醇中的一种或多种混合的有机溶液中,配制成浓度为0.15~0.75mol/L的镉盐溶液;A, one or more of cadmium acetate, cadmium acetylacetonate, dimethyl cadmium is dissolved in one or more of ethylene glycol methyl ether, ethanol, N,N-dimethylformamide or isopropanol In a mixed organic solution, a cadmium salt solution with a concentration of 0.15 to 0.75 mol/L is prepared;
B、将硫脲、乙烯硫脲、硫代乙酰胺的一种或多种混合溶解于乙二醇甲醚、乙醇、N,N-二甲基甲酰胺或异丙醇中的一种或多种混合的有机溶液中,配制成浓度为0.15~0.75mol/L的硫源溶液;B. One or more of thiourea, ethylene thiourea and thioacetamide are mixed and dissolved in one or more of ethylene glycol methyl ether, ethanol, N,N-dimethylformamide or isopropanol In a mixed organic solution, a sulfur source solution with a concentration of 0.15 to 0.75 mol/L is prepared;
C、取镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为0.7:1~1.3:1进行控混合,然后依次加入冰乙酸和改性剂,改性剂为CdCl2或ZnCl2,充分溶解后,得到硫化镉旋涂溶液,镉盐溶液、冰乙酸和改性剂的用量比为5~20mL:1.5~6mL:2~8mg;C, get cadmium salt solution and sulfur source solution according to Cd 2+ : S 2- mol ratio is 0.7:1~1.3:1 to carry out controlled mixing, then add glacial acetic acid and modifier successively, and modifier is CdCl or ZnCl 2. After fully dissolving, a cadmium sulfide spin coating solution is obtained, and the dosage ratio of cadmium salt solution, glacial acetic acid and modifier is 5~20mL: 1.5~6mL: 2~8mg;
D、按照15~80μL/cm2的量在衬底基片上滴加硫化镉旋涂液,然后以500~1600rpm的转速旋转5~30s;D. Add dropwise cadmium sulfide spin coating solution on the substrate according to the amount of 15~80μL/cm 2 , and then rotate at 500~1600rpm for 5~30s;
E、在空气中或惰性气体保护下进行退火,退火温度为250~450℃,退火时间为2~45min。E. Annealing in air or under the protection of inert gas, the annealing temperature is 250~450℃, and the annealing time is 2~45min.
上述衬底基片可以选择钼玻璃、ITO玻璃或FTO玻璃。The above-mentioned substrate can be selected from molybdenum glass, ITO glass or FTO glass.
在制备用于太阳能电池的硫化镉薄膜时,要求厚度越薄越好,但是厚度越薄,旋涂的薄膜粗糙度越大,均匀性越差,薄膜容易出现不连续、致密度差,导致最终薄膜的性能大打折扣,此外,采用旋涂法制备硫化镉薄膜时,面临硫化镉薄膜与基底之间的结合力较弱,容易发生剥落的问题。In the preparation of cadmium sulfide thin films for solar cells, the thinner the thickness, the better, but the thinner the thickness, the greater the roughness of the spin-coated thin film, the poorer the uniformity, and the thin film is prone to discontinuity and poor density, resulting in the final The performance of the film is greatly reduced. In addition, when the cadmium sulfide film is prepared by the spin coating method, the bonding force between the cadmium sulfide film and the substrate is weak, and it is easy to peel off.
本发明中在旋涂液中加入CdCl2或ZnCl2作为改性剂,提高了薄膜与吸收层的界面能级匹配,其次,降低了结晶速率,提高晶粒度,减少了晶界表面的缺陷,减少了薄膜表面粗糙度,增强了晶界与晶界之间的连接作用,使得薄膜连续性增强,从而提高了薄膜致密度,达到改善形貌的作用,提高膜层之间的结合力,其中Cl-形成了掺杂元素,提高了载流子浓度,从而提高电荷传输能力,因而即使薄膜厚度较薄,依然可以保持优异的电学性能。In the present invention, CdCl 2 or ZnCl 2 is added to the spin coating liquid as a modifier to improve the interface energy level matching between the film and the absorption layer, and secondly, the crystallization rate is reduced, the grain size is increased, and the defects on the surface of the grain boundary are reduced , reducing the surface roughness of the film, enhancing the connection between the grain boundaries and the grain boundaries, enhancing the continuity of the film, thereby improving the density of the film, achieving the effect of improving the morphology, and improving the bonding force between the film layers. Among them, Cl - forms a doping element, which increases the carrier concentration, thereby improving the charge transport ability, so that even if the film thickness is thin, it can still maintain excellent electrical properties.
本发明具有如下技术效果:The present invention has the following technical effects:
本发明制备的CdS薄膜(1)方法简单,无需真空环境,合成成本低;(2)使用的旋涂液量少,含镉废液少,对环境友好;(3)制备的硫化镉薄膜厚度均匀、可控性强、薄膜厚度可低至20nm依然可以保持优异连续性、高致密度,低粗糙度,可实现大面积制备;(4)在制备过程中实现了O、Cl等元素的掺杂,改善了薄膜的能带结构和电学性质,用于太阳能电池时有效提高电池效率。The CdS film prepared by the invention (1) has a simple method, does not require a vacuum environment, and has low synthesis cost; (2) uses less spin coating liquid, less cadmium-containing waste liquid, and is environmentally friendly; (3) the thickness of the prepared cadmium sulfide film is Uniform, strong controllability, the film thickness can be as low as 20nm, and it can still maintain excellent continuity, high density, low roughness, and can realize large-scale preparation; (4) The doping of elements such as O and Cl is realized during the preparation process. It improves the energy band structure and electrical properties of the thin film, and effectively improves the cell efficiency when used in solar cells.
附图说明Description of drawings
图1:本发明制备的硫化镉薄膜的实物图。Fig. 1: The physical picture of the cadmium sulfide thin film prepared by the present invention.
图2:本发明制备的硫化镉薄膜扫描电镜图。Figure 2: Scanning electron microscope image of the cadmium sulfide thin film prepared by the present invention.
图3:本发明制备的硫化镉薄膜的X射线衍射图。Figure 3: X-ray diffraction pattern of the cadmium sulfide thin film prepared by the present invention.
图4:本发明制备的FTO/CdS/Sb2Se3/Au结构的太阳能电池的J-V曲线图。Fig. 4: JV curve diagram of the solar cell with the FTO/CdS/Sb 2 Se 3 /Au structure prepared by the present invention.
图5:本发明制备的Mo/CaS/Sb2Se3/ITO结构的阳能电池的J-V曲线图。Fig. 5: JV curve diagram of the solar cell with Mo/CaS/Sb 2 Se 3 /ITO structure prepared by the present invention.
具体实施方式Detailed ways
下面通过实施例对本发明进行具体的描述,有必要在此指出的是,以下实施例只用于对本发明进行进一步说明,不能理解为对本发明保护范围的限制,该领域的技术人员可以根据上述本发明内容对本发明作出一些非本质的改进和调整。The present invention will be specifically described by the following examples. It is necessary to point out that the following examples are only used to further illustrate the present invention, and should not be construed as limiting the protection scope of the present invention. Those skilled in the art can SUMMARY OF THE INVENTION Some non-essential improvements and adjustments are made to the present invention.
实施例1Example 1
一种用于太阳能电池的硫化镉薄膜的制备方法,按如下步骤进行:A method for preparing a cadmium sulfide thin film for solar cells, the steps are as follows:
步骤A:将乙酸镉溶解于乙二醇甲醚中,配制成浓度为0.5mol/L的镉盐溶液;Step A: dissolving cadmium acetate in ethylene glycol methyl ether to prepare a cadmium salt solution with a concentration of 0.5mol/L;
步骤B:将硫脲溶解于乙二醇甲醚中,配制成浓度为0.5mol/L的硫源溶液;Step B: dissolve thiourea in ethylene glycol methyl ether, and prepare a sulfur source solution with a concentration of 0.5 mol/L;
步骤C:取镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为1.15:1进行控混合,然后依次加入冰乙酸和改性剂CdCl2,充分溶解后,得到硫化镉旋涂溶液,镉盐溶液、冰乙酸和改性剂的用量比为10mL:4mL:4mg;Step C: take the cadmium salt solution and the sulfur source solution for controlled mixing according to the Cd 2+ : S 2- molar ratio of 1.15:1, then add glacial acetic acid and modifier CdCl 2 in turn, and after fully dissolving, obtain a cadmium sulfide spin coating solution, the dosage ratio of cadmium salt solution, glacial acetic acid and modifier is 10mL:4mL:4mg;
步骤D:以ITO玻璃为衬底基片,按照30μL/cm2的量在衬底基片上滴加硫化镉旋涂液,然后以800rpm的转速旋转10s,制备出厚度为50nm的硫化镉薄膜;Step D: using ITO glass as the substrate substrate, dripping the cadmium sulfide spin coating solution on the substrate substrate according to the amount of 30 μL/cm 2 , and then rotating at a speed of 800 rpm for 10 s to prepare a cadmium sulfide film with a thickness of 50 nm;
步骤E:将旋涂后的衬底基片在空气中进行退火,退火温度为450℃,退火时间为10min。Step E: the spin-coated substrate is annealed in air, the annealing temperature is 450° C., and the annealing time is 10 minutes.
如图2所示,本实施例制备的硫化镉薄膜致密度高、缺陷少,厚度均匀性好,表面粗糙度低,与基片的结合力优异。硫化镉薄膜的X射线衍射图如图3所示,从图中可以看出,薄膜中并没有检测出其他如氧化镉的杂质成分。As shown in FIG. 2 , the cadmium sulfide thin film prepared in this example has high density, few defects, good thickness uniformity, low surface roughness, and excellent bonding force with the substrate. The X-ray diffraction pattern of the cadmium sulfide film is shown in Figure 3. It can be seen from the figure that other impurities such as cadmium oxide are not detected in the film.
在上述硫化镉薄膜基础上,采用近空间升华法制备一层厚度为700nm的Sb2Se3薄膜,利用直流磁控溅射在薄膜上面沉积一层厚度为150nm的Au薄膜,得到ITO玻璃/CdS/Sb2Se3/Au结构的薄膜太阳能电池。On the basis of the above cadmium sulfide film, a Sb 2 Se 3 film with a thickness of 700 nm was prepared by the near-space sublimation method, and an Au film with a thickness of 150 nm was deposited on the film by DC magnetron sputtering to obtain ITO glass/CdS /Sb 2 Se 3 /Au thin film solar cells.
对比例1Comparative Example 1
以ITO作为沉底剂片,采用化学水浴法在ITO表面制备一层厚度为50nm的硫化镉薄膜,然后采用与实施例1相同的方法依次制备厚度为700nm的Sb2Se3薄膜和厚度为150nm的Au薄膜,得到ITO玻璃/CdS/Sb2Se3/Au结构的薄膜太阳能电池。Using ITO as the bottoming agent, a layer of cadmium sulfide film with a thickness of 50 nm was prepared on the surface of ITO by chemical water bath method, and then a Sb 2 Se 3 film with a thickness of 700 nm and a thickness of 150 nm were sequentially prepared by the same method as in Example 1. The Au thin film was obtained to obtain a thin film solar cell with ITO glass/CdS/Sb 2 Se 3 /Au structure.
对比例1制备的硫化镉薄膜表面厚度均匀性较差,表面粗糙度较高,且硫化镉薄膜中存在较多的有氧化镉杂质。The cadmium sulfide film prepared in Comparative Example 1 has poor surface thickness uniformity and high surface roughness, and there are many cadmium oxide impurities in the cadmium sulfide film.
对实施例1和对比例1制备的ITO玻璃/CdS/Sb2Se3/Au结构的薄膜太阳能电池进行性能检测,其J-V曲线图如图4所示:实施例1制备的太阳能电池的光电转换效率PCE为5.92%,开路电压Voc为0.35V,短路电流密度Jsc达到32.22mA/cm2,填充因子FF达到52.77%,而对比例1制备的太阳能电池的光电转换效率PCE为4.84%,开路电压Voc为0.35V,短路电流密度Jsc为26.22mA/cm2,填充因子FF为52.74%。The performance of the thin-film solar cells of the ITO glass/CdS/Sb 2 Se 3 /Au structure prepared in Example 1 and Comparative Example 1 was tested, and the JV curves of the solar cells were shown in Figure 4: Photoelectric conversion of the solar cells prepared in Example 1 The efficiency PCE is 5.92%, the open-circuit voltage Voc is 0.35V, the short-circuit current density Jsc reaches 32.22mA/cm 2 , and the fill factor FF reaches 52.77%, while the photoelectric conversion efficiency PCE of the solar cell prepared in Comparative Example 1 is 4.84%, and the open-circuit voltage The Voc was 0.35V, the short-circuit current density Jsc was 26.22 mA/cm 2 , and the fill factor FF was 52.74%.
实施例2Example 2
一种用于太阳能电池的硫化镉薄膜的制备方法,按如下步骤进行:A method for preparing a cadmium sulfide thin film for solar cells, the steps are as follows:
步骤A:将乙酸镉溶解于乙二醇甲醚中,配制成浓度为0.5mol/L的镉盐溶液;Step A: dissolving cadmium acetate in ethylene glycol methyl ether to prepare a cadmium salt solution with a concentration of 0.5mol/L;
步骤B:将硫脲溶解于乙二醇甲醚中,配制成浓度为0.5mol/L的硫源溶液;Step B: dissolve thiourea in ethylene glycol methyl ether, and prepare a sulfur source solution with a concentration of 0.5 mol/L;
步骤C:取镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为1.15:1进行控混合,然后依次加入冰乙酸和改性剂CdCl2,充分溶解后,得到硫化镉旋涂溶液,镉盐溶液、冰乙酸和改性剂的用量比为10mL:4mL:4mg;Step C: take the cadmium salt solution and the sulfur source solution for controlled mixing according to the Cd 2+ : S 2- molar ratio of 1.15:1, then add glacial acetic acid and modifier CdCl 2 in turn, and after fully dissolving, obtain a cadmium sulfide spin coating solution, the dosage ratio of cadmium salt solution, glacial acetic acid and modifier is 10mL:4mL:4mg;
步骤D:以钼玻璃作为衬底基片,在钼玻璃表面采用近空间升华法制备一层厚度为700nm的Sb2Se3薄膜,然后以30μL/cm2的量滴加硫化镉旋涂液,旋转速度为800r/min,转动时间为10s,制备出厚度为50nm的硫化镉薄膜;Step D: Using molybdenum glass as the substrate, a layer of Sb 2 Se 3 film with a thickness of 700 nm was prepared on the surface of the molybdenum glass by a near-space sublimation method, and then a cadmium sulfide spin coating solution was added dropwise in an amount of 30 μL/cm 2 , The rotation speed is 800r/min, the rotation time is 10s, and the cadmium sulfide film with the thickness of 50nm is prepared;
步骤E:将旋涂完成后的衬底基片置于氩气氛围中,在300℃下退火5min。Step E: placing the spin-coated substrate in an argon atmosphere, and annealing at 300° C. for 5 min.
本实施例制备的硫化镉薄膜致密度高、缺陷少,厚度均匀性好,表面粗糙度低,与基片的结合力优异。The cadmium sulfide thin film prepared in this example has high density, few defects, good thickness uniformity, low surface roughness, and excellent bonding force with the substrate.
在上述硫化镉薄膜基础上,利用射频磁控溅射在薄膜上面沉积一层厚度为1μm的ITO薄膜,制备出Mo/Sb2Se3/CdS/ITO薄膜太阳能电池。On the basis of the above cadmium sulfide thin film, an ITO thin film with a thickness of 1 μm was deposited on the thin film by radio frequency magnetron sputtering to prepare a Mo/Sb 2 Se 3 /CdS/ITO thin film solar cell.
对比例2Comparative Example 2
步骤A、B与实施例2一致;Steps A, B are consistent with embodiment 2;
步骤C:取镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为1.15:1进行控混合,然后依次加入冰乙酸,充分溶解后,得到硫化镉旋涂溶液,镉盐溶液和冰乙酸的用量比为10mL:4mL;Step C: get the cadmium salt solution and the sulfur source solution according to the Cd 2+ : S 2- molar ratio of 1.15: 1 and control mixing, then add glacial acetic acid successively, after fully dissolving, obtain the cadmium sulfide spin coating solution, the cadmium salt solution and the The dosage ratio of glacial acetic acid is 10mL:4mL;
步骤D:以钼玻璃作为衬底基片,在钼玻璃表面采用近空间升华法制备一层厚度为700nm的Sb2Se3薄膜,然后以30μL/cm2的量滴加硫化镉旋涂液,旋转速度为800r/min,转动时间为10s,制备出厚度为50nm的硫化镉薄膜;Step D: Using molybdenum glass as the substrate, a layer of Sb 2 Se 3 film with a thickness of 700 nm was prepared on the surface of the molybdenum glass by a near-space sublimation method, and then a cadmium sulfide spin coating solution was added dropwise in an amount of 30 μL/cm 2 , The rotation speed is 800r/min, the rotation time is 10s, and the cadmium sulfide film with the thickness of 50nm is prepared;
步骤E:将旋涂完成后的衬底基片置于氩气氛围中,在300℃下退火5min。Step E: placing the spin-coated substrate in an argon atmosphere, and annealing at 300° C. for 5 min.
在上述硫化镉薄膜基础上,利用射频磁控溅射在薄膜上面沉积一层厚度为1μm的ITO薄膜,制备出Mo/Sb2Se3/CdS/ITO薄膜太阳能电池。On the basis of the above cadmium sulfide thin film, an ITO thin film with a thickness of 1 μm was deposited on the thin film by radio frequency magnetron sputtering to prepare a Mo/Sb 2 Se 3 /CdS/ITO thin film solar cell.
对比例2制备的硫化镉薄膜表面粗糙度较大,缺陷明显,薄膜致密度较差。The surface roughness of the cadmium sulfide film prepared in Comparative Example 2 is larger, the defects are obvious, and the film density is poor.
对实施例2和对比例2制备的Mo/Sb2Se3/CdS/ITO薄膜太阳能电池进行性能检测,其J-V曲线图如图5所示:实施例2制备的太阳能电池的光电转换效率PCE为5.60%,开路电压Voc为0.37V,短路电流密度Jsc达到27.31mA/cm2,填充因子FF达到56.43%;而对比例2制备的太阳能电池的光电转换效率PCE为5.1%,开路电压Voc为0.37V,短路电流密度Jsc为24.98mA/cm2,填充因子FF为55.18%。The performance of the Mo/Sb 2 Se 3 /CdS/ITO thin film solar cells prepared in Example 2 and Comparative Example 2 was tested, and the JV curve was shown in Figure 5: The photoelectric conversion efficiency PCE of the solar cell prepared in Example 2 was 5.60%, the open-circuit voltage Voc is 0.37V, the short-circuit current density Jsc reaches 27.31mA/cm 2 , and the fill factor FF reaches 56.43%; while the photoelectric conversion efficiency PCE of the solar cell prepared in Comparative Example 2 is 5.1%, and the open-circuit voltage Voc is 0.37 V, the short-circuit current density Jsc was 24.98 mA/cm 2 , and the fill factor FF was 55.18%.
实施例3Example 3
一种用于太阳能电池的硫化镉薄膜的制备方法,按如下步骤进行:A method for preparing a cadmium sulfide thin film for solar cells, the steps are as follows:
步骤A:将乙酰丙酮镉溶解于乙醇中,配制成浓度为0.15mol/L的镉盐溶液;Step A: dissolving cadmium acetylacetonate in ethanol to prepare a cadmium salt solution with a concentration of 0.15mol/L;
步骤B:将硫代乙酰胺溶解于乙醇有机溶液中,配制成浓度为0.15mol/L的硫源溶液;Step B: dissolving thioacetamide in an ethanol organic solution, and preparing a sulfur source solution with a concentration of 0.15 mol/L;
C、取镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为0.7:1进行控混合,然后依次加入冰乙酸和CdCl2改性剂,充分溶解后,得到硫化镉旋涂溶液,镉盐溶液、冰乙酸和改性剂的用量比为5mL:1.5mL:2mg;C, get cadmium salt solution and sulfur source solution according to Cd 2+ :S 2- mol ratio is 0.7:1 to carry out controlled mixing, then add glacial acetic acid and CdCl successively modifier, after fully dissolving, obtain cadmium sulfide spin coating solution , the dosage ratio of cadmium salt solution, glacial acetic acid and modifier is 5mL: 1.5mL: 2mg;
D、按照15μL/cm2的量在FTO衬底基片上滴加硫化镉旋涂液,然后以500rpm的转速旋转30s;D. Drop the cadmium sulfide spin coating solution on the FTO substrate in an amount of 15 μL/cm 2 , and then rotate at a speed of 500 rpm for 30 s;
E、在空气中或惰性气体保护下进行退火,退火温度为400℃,退火时间为2~45min,制得厚度为22nm的硫化镉薄膜。E. Perform annealing in air or under the protection of inert gas, the annealing temperature is 400°C, and the annealing time is 2~45min, to obtain a cadmium sulfide film with a thickness of 22nm.
本实施例制备的硫化镉薄膜致密度高、缺陷少,厚度均匀性好,表面粗糙度低,与基片的结合力优异。The cadmium sulfide thin film prepared in this example has high density, few defects, good thickness uniformity, low surface roughness, and excellent bonding force with the substrate.
实施例4Example 4
一种用于太阳能电池的硫化镉薄膜的制备方法,按如下步骤进行:A method for preparing a cadmium sulfide thin film for solar cells, the steps are as follows:
A、将二甲基镉溶解于N,N-二甲基甲酰胺中,配制成浓度为0.75mol/L的镉盐溶液;A. Dissolve dimethyl cadmium in N,N-dimethylformamide to prepare a cadmium salt solution with a concentration of 0.75mol/L;
B、将乙烯硫脲溶解于N,N-二甲基甲酰胺中,配制成浓度为0.75mol/L的硫源溶液;B, ethylene thiourea is dissolved in N,N-dimethylformamide, and is formulated into a sulfur source solution with a concentration of 0.75mol/L;
C、取镉盐溶液和硫源溶液按照Cd2+:S2-摩尔比为1:1进行控混合,然后依次加入冰乙酸和改性剂ZnCl2,充分溶解后,得到硫化镉旋涂溶液,镉盐溶液、冰乙酸和改性剂的用量比为20mL:6mL:8mg;C, get cadmium salt solution and sulfur source solution according to Cd 2+ : S 2- mol ratio is 1:1 to control mixing, then add glacial acetic acid and modifier ZnCl 2 successively, after fully dissolving, obtain cadmium sulfide spin coating solution , the dosage ratio of cadmium salt solution, glacial acetic acid and modifier is 20mL:6mL:8mg;
D、按照80μL/cm2的量在ITO衬底基片上滴加硫化镉旋涂液,然后以1600rpm的转速旋转5s;D. Drop the cadmium sulfide spin coating solution on the ITO substrate substrate according to the amount of 80 μL/cm 2 , and then rotate at a speed of 1600 rpm for 5 s;
E、在空气中或惰性气体保护下进行退火,退火温度为250℃,退火时间为2~45min,制得厚度为60nm的硫化镉薄膜。E. Perform annealing in air or under the protection of inert gas, the annealing temperature is 250°C, and the annealing time is 2~45min, to obtain a cadmium sulfide film with a thickness of 60nm.
本实施例制备的硫化镉薄膜致密度高、缺陷少,厚度均匀性好,表面粗糙度低,与基片的结合力优异。The cadmium sulfide thin film prepared in this example has high density, few defects, good thickness uniformity, low surface roughness, and excellent bonding force with the substrate.
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