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CN114441580A - Identification method of non-metal inclusion phase - Google Patents

Identification method of non-metal inclusion phase Download PDF

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CN114441580A
CN114441580A CN202210110253.9A CN202210110253A CN114441580A CN 114441580 A CN114441580 A CN 114441580A CN 202210110253 A CN202210110253 A CN 202210110253A CN 114441580 A CN114441580 A CN 114441580A
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phase
polishing
inclusions
detected
standard
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严春莲
崔桂彬
其其格
孟杨
鞠新华
崔阳
杨瑞
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Shougang Group Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2202Preparing specimens therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement

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Abstract

The application relates to the field of metal material detection, in particular to a method for identifying a non-metal inclusion phase; the method comprises the following steps: obtaining a steel sample to be tested; pre-cleaning and pre-grinding a steel sample to be detected, and then polishing to obtain a treatment sample containing impurities; collecting interested inclusions in the processed sample by an electron microscope image, and then carrying out energy spectrum component analysis and chrysanthemum pool pattern collection to respectively obtain the chemical composition of the inclusions and the chrysanthemum pool pattern to be detected; obtaining a standard chemical phase according to the chemical composition; obtaining the matching degree between the chemical composition phase and the chrysanthemum pool pattern to be detected according to the standard chemical phase and the chrysanthemum pool pattern to be detected; obtaining the phase type of the inclusions according to the matching degree; the method comprises the steps of pre-grinding a steel sample to be detected, polishing, scanning by an electron microscope, analyzing energy spectrum components and collecting chrysanthemum pool patterns, and then determining the matching degree between the chrysanthemum pool patterns to be detected and chemical composition phases, so that the phase types of inclusions can be accurately obtained, and the identification process is simplified.

Description

一种非金属夹杂物相的鉴定方法A kind of identification method of non-metallic inclusion phase

技术领域technical field

本申请涉及金属材料检测领域,尤其涉及一种非金属夹杂物相的鉴定方法。The present application relates to the field of metal material detection, and in particular, to a method for identifying a non-metallic inclusion phase.

背景技术Background technique

钢中非金属夹杂物的类型、形态、尺寸和分布对钢材性能有着重要的影响,夹杂物的检测分析及控制技术一直受到冶金和材料领域研究人员的高度重视。钢中非金属夹杂物表征的常规物理方法主要是利用金相显微镜或扫描电镜观察夹杂物的形貌,并结合能谱仪分析夹杂物的成分。The type, shape, size and distribution of non-metallic inclusions in steel have an important impact on the properties of steel. The detection, analysis and control technology of inclusions has always been highly valued by researchers in the fields of metallurgy and materials. The conventional physical method for the characterization of non-metallic inclusions in steel is mainly to observe the morphology of the inclusions with a metallographic microscope or a scanning electron microscope, and analyze the composition of the inclusions with an energy dispersive spectrometer.

目前关于夹杂物的鉴定方法主要有X射线衍射(XRD)分析和透射电镜选区电子衍射(SAD)分析两种,存在以下两种缺点:At present, the identification methods of inclusions mainly include X-ray diffraction (XRD) analysis and transmission electron microscopy selected area electron diffraction (SAD) analysis, which have the following two shortcomings:

(1)XRD分析需要通过大样电解或小样电解提取足够量的夹杂物颗粒进行分析,制样过程复杂,可以获得试样中夹杂物的物相组成,但不能同时获取相应夹杂物的形态信息。(1) XRD analysis needs to extract a sufficient amount of inclusion particles for analysis by large sample electrolysis or small sample electrolysis. The sample preparation process is complicated, and the phase composition of the inclusions in the sample can be obtained, but the morphological information of the corresponding inclusions cannot be obtained at the same time. .

(2)SAD分析的制样过程非常复杂,有分散晶体法、萃取复型法、金属薄膜法、聚焦离子束(FIB)法等,并且根据制样方法所能检测的夹杂物有粒径要求。(2) The sample preparation process for SAD analysis is very complex, including dispersed crystal method, extraction replica method, metal thin film method, focused ion beam (FIB) method, etc., and the inclusions that can be detected according to the sample preparation method have particle size requirements .

综上所述,目前对于夹杂物的物相鉴定方法不够成熟,夹杂物的相鉴定较为困难,因此如何提供夹杂物相简单鉴定的方法,是亟需解决的技术问题。To sum up, the current phase identification methods for inclusions are not mature enough, and the phase identification of inclusions is difficult. Therefore, how to provide a simple method for the identification of inclusion phases is a technical problem that needs to be solved urgently.

发明内容SUMMARY OF THE INVENTION

本申请提供了一种非金属夹杂物相的鉴定方法,以解决现有技术中的夹杂物相鉴定困难的技术问题。The present application provides a method for identifying a non-metallic inclusion phase, so as to solve the technical problem of difficulty in identifying the inclusion phase in the prior art.

第一方面,本申请提供了一种非金属夹杂物相的鉴定方法,所述方法包括:In a first aspect, the present application provides a method for identifying a non-metallic inclusion phase, the method comprising:

得到待测钢样品;Obtain the steel sample to be tested;

将所述待测钢样品进行预清理和预磨,后进行抛光,得到含夹杂物的处理试样;Pre-cleaning and pre-grinding the steel sample to be tested, and then polishing to obtain a treated sample containing inclusions;

对所述处理试样中的夹杂物进行电镜图像采集,后进行能谱成分分析和菊池花样采集,分别得到夹杂物的化学组成和待测菊池花样;Carrying out electron microscope image collection on the inclusions in the treated sample, and then performing energy spectrum component analysis and collection of the Kikuchi pattern, to obtain the chemical composition of the inclusions and the Kikuchi pattern to be tested, respectively;

根据所述化学组成,得到标准化学物相;According to the chemical composition, a standard chemical phase is obtained;

根据所述标准化学物相和所述待测菊池花样,得到所述化学组成物相和所述待测菊池花样之间的匹配度;According to the standard chemical phase and the kikuchi pattern to be tested, obtain the matching degree between the chemical composition phase and the kikuchi pattern to be tested;

根据所述匹配度,得到夹杂物的物相种类。According to the matching degree, the phase type of the inclusions is obtained.

可选的,所述根据所述标准化学物相和所述待测菊池花样,得到所述化学组成物相和所述待测菊池花样之间的匹配度,具体包括:Optionally, according to the standard chemical phase and the kikuchi pattern to be tested, the matching degree between the chemical composition phase and the kikuchi pattern to be tested is obtained, specifically including:

分别得到所述待测菊池花样的菊池带数目和所述待测菊池带之间的检测角度;Obtain the detection angle between the number of the kikuchi bands of the kikuchi pattern to be tested and the kikuchi band to be tested;

分别得到所述标准化学物相的标准菊池带数目和所述标准菊池带之间的标准角度;Obtain the standard Kikuchi band number of the standard chemical phase and the standard angle between the standard Kikuchi bands;

根据所述待测菊池带数目和所述标准菊池带数目,得到待测菊池花样和标准化学物相之间相同的菊池带数目;According to the number of the Kikuchi bands to be tested and the number of the standard Kikuchi bands, obtain the same number of Kikuchi bands between the Kikuchi pattern to be tested and the standard chemical phase;

根据所述检测角度和标准角度,分别得到每一对所述待测菊池带之间的检测角度与其对应的所述标准菊池带之间的标准角度的偏差,后取平均值,得到待测菊池花样和标准化学物相之间的平均角偏差;According to the detection angle and the standard angle, the deviation of the detection angle between each pair of the Kikuchi belts to be tested and the standard angle between the corresponding standard Kikuchi belts is obtained respectively, and then the average value is taken to obtain the Kikuchi to be measured. Average angular deviation between pattern and standard chemical phase;

根据相同的所述菊池带数目和所述平均角偏差,得到所述化学组成物相和所述待测菊池花样之间的匹配度。According to the same number of the Kikuchi bands and the average angular deviation, the matching degree between the chemical composition phase and the Kikuchi pattern to be tested is obtained.

可选的,所述匹配度的判断原则为:当相同的所述菊池带数目越多,且所述平均角度偏差越小,所述匹配度越高。Optionally, the matching degree is judged as follows: when the number of the same Kikuchi belts is larger and the average angle deviation is smaller, the matching degree is higher.

可选的,所述根据所述匹配度,得到夹杂物的物相种类,具体包括:Optionally, the obtaining the phase type of the inclusions according to the matching degree specifically includes:

根据所述匹配度,判断所述夹杂物是否为单一夹杂物;According to the matching degree, determine whether the inclusion is a single inclusion;

若是,根据所述标准化学物相筛分所述待测菊池花样,得到夹杂物的物相种类;If so, sieve the Kikuchi pattern to be tested according to the standard chemical phase to obtain the phase type of the inclusions;

若否,将所述处理试样进行成分面分布分析,得到成分的面分布信息,后根据成分的所述面分布信息和所述标准化学物相,得到夹杂物的物相种类。If not, the processed sample is subjected to component surface distribution analysis to obtain the surface distribution information of the components, and then the phase types of the inclusions are obtained according to the surface distribution information of the components and the standard chemical phase.

可选的,所述预磨包括粗磨和细磨,所述粗磨和细磨都采用水砂纸进行研磨。Optionally, the pre-grinding includes coarse grinding and fine grinding, both of which are ground with water sandpaper.

可选的,所述粗磨的目数为100#~200#,所述细磨的目数为750#~850#。Optionally, the mesh number of the coarse grinding is 100#~200#, and the mesh number of the fine grinding is 750#~850#.

可选的,所述抛光依次包括第一抛光和第二抛光,所述第一抛光包括:以不同粒径的金刚石为抛光剂和以丝绒为抛光布的方式进行的多次抛光;Optionally, the polishing includes a first polishing and a second polishing in sequence, and the first polishing includes: multiple polishings performed by using diamonds of different particle sizes as polishing agents and velvet as polishing cloths;

所述第二抛光包括:以硅溶胶为抛光剂和以多孔氯丁橡胶为抛光布的方式进行抛光。The second polishing includes: polishing with silica sol as polishing agent and porous neoprene as polishing cloth.

可选的,所述第一抛光的转速为900rpm~1500rpm,所述第一抛光的时间为5min~15min。Optionally, the rotational speed of the first polishing is 900 rpm to 1500 rpm, and the time of the first polishing is 5 min to 15 min.

可选的,所述第二抛光的转速为100rpm~150rpm,所述第二抛光的时间为10min~15min。Optionally, the rotation speed of the second polishing is 100 rpm to 150 rpm, and the time of the second polishing is 10 min to 15 min.

可选的,所述金刚石的粒径为0.5μm~7μm。Optionally, the particle size of the diamond is 0.5 μm˜7 μm.

本申请实施例提供的上述技术方案与现有技术相比具有如下优点:Compared with the prior art, the above-mentioned technical solutions provided in the embodiments of the present application have the following advantages:

本申请实施例提供的一种非金属夹杂物相的鉴定方法,通过对待测钢样品进行预磨和抛光,简化制样过程,再通过电镜扫描,根据夹杂物的电镜图像进行能谱成分分析和菊池花样采集,从而能根据能谱成分分析得到的化学组成,推断出标准的化学组成物相,再通过待测菊池花样和化学组成物相之间的匹配度,从而能准确得到夹杂物的物相种类,简化鉴定过程,进而实现对夹杂物的简单方便的鉴定。A method for identifying a phase of non-metallic inclusions provided by the embodiment of the present application, by pre-grinding and polishing the steel sample to be tested, to simplify the sample preparation process, and then scanning with an electron microscope to perform energy spectrum composition analysis and analysis of the electron microscope image of the inclusions The Kikuchi pattern is collected, so that the standard chemical composition phase can be deduced according to the chemical composition obtained by the energy spectrum composition analysis, and then through the matching degree between the Kikuchi pattern to be tested and the chemical composition phase, the inclusions can be accurately obtained. phase types, simplify the identification process, and then realize the simple and convenient identification of inclusions.

附图说明Description of drawings

此处的附图被并入说明书中并构成本说明书的一部分,示出了符合本发明的实施例,并与说明书一起用于解释本发明的原理。The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description serve to explain the principles of the invention.

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,对于本领域普通技术人员而言,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. In other words, on the premise of no creative labor, other drawings can also be obtained from these drawings.

图1为本申请实施例提供的方法的流程示意图;1 is a schematic flowchart of a method provided by an embodiment of the present application;

图2为本申请实施例提供的方法的详细流程示意图;2 is a detailed schematic flowchart of a method provided by an embodiment of the present application;

图3为本申请实施例1提供的待测钢样品中夹杂物的形态图;3 is a morphological diagram of inclusions in the steel sample to be tested provided in Example 1 of the present application;

图4为本申请实施例1提供的待测钢样品中夹杂物的能谱成分分析图;FIG. 4 is an analysis diagram of the energy spectrum composition of the inclusions in the steel sample to be tested provided in Example 1 of the present application;

图5为本申请实施例1提供的待测钢样品中夹杂物的电子背散射衍射菊池花样图;5 is an electron backscatter diffraction Kikuchi pattern diagram of inclusions in the steel sample to be tested provided in Example 1 of the application;

图6为本申请实施例1提供的Alabandite相与夹杂物的菊池花样的匹配图;6 is a matching diagram of the Kikuchi pattern of the Alabandite phase and inclusions provided in Example 1 of the present application;

图7为本申请实施例1提供的MnS相与夹杂物的菊池花样的匹配图;7 is a matching diagram of the Kikuchi pattern of MnS phase and inclusions provided in Example 1 of the present application;

图8为本申请实施例2提供的待测钢样品中夹杂物的形态图;8 is a morphological diagram of inclusions in the steel sample to be tested provided in Example 2 of the present application;

图9为本申请实施例2提供的待测钢样品中夹杂物位置1的能谱成分分析图;Fig. 9 is the energy spectrum composition analysis diagram of the inclusion position 1 in the steel sample to be tested provided in Example 2 of this application;

图10为本申请实施例2提供的待测钢样品中夹杂物位置1的电子背散射衍射菊池花样图;Fig. 10 is the electron backscatter diffraction Kikuchi pattern diagram of the inclusion position 1 in the steel sample to be tested provided in Example 2 of the application;

图11为本申请实施例2提供的待测钢样品中夹杂物位置2的能谱成分分析图;11 is an analysis diagram of the energy spectrum composition of the inclusion position 2 in the steel sample to be tested provided in Example 2 of the application;

图12为本申请实施例2提供的待测钢样品中夹杂物位置2的电子背散射衍射菊池花样图;Fig. 12 is the electron backscatter diffraction Kikuchi pattern diagram of the inclusion position 2 in the steel sample to be tested provided in Example 2 of the application;

图13为本申请实施例2提供的待测钢样品中夹杂物的成分面分布图。FIG. 13 is a composition plane distribution diagram of inclusions in the steel sample to be tested provided in Example 2 of the application.

具体实施方式Detailed ways

为使本申请实施例的目的、技术方案和优点更加清楚,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本申请的一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本申请保护的范围。In order to make the purposes, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments It is a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

本申请的创造性思路为:由于SAD分析的制样过程非常复杂,有分散晶体法、萃取复型法、金属薄膜法、聚焦离子束(FIB)法等,具体为:The creative idea of the present application is: because the sample preparation process of SAD analysis is very complicated, there are dispersed crystal method, extraction replica method, metal thin film method, focused ion beam (FIB) method, etc., specifically:

(1)分散晶体法是将电解萃取出的夹杂物溶于有机溶液中,经超声震荡后分散于导电支持膜上用于透射电镜观察。(1) The dispersing crystal method is to dissolve the inclusions extracted by electrolysis in an organic solution, and after ultrasonic oscillation, disperse them on a conductive support film for transmission electron microscopy observation.

(2)萃取复型法是将抛光后的金相试样经过一次腐蚀、喷碳、二次腐蚀后脱膜,最后将带有夹杂物和组织特征的碳膜捞在支持铜网上用于透射电镜观察。(2) The extraction replica method is to remove the film after the polished metallographic sample is subjected to primary corrosion, carbon spraying, and secondary corrosion, and finally the carbon film with inclusions and organizational characteristics is fished on the supporting copper mesh for transmission. Electron microscope observation.

由于分散晶体法、萃取复型法本身都不能将夹杂物减薄,因此都只适用于纳米级夹杂物。因此对微米级夹杂物来说,可采用金属薄膜法和聚焦离子束(FIB)法,金属薄膜法通过Ar离子对钢片和夹杂物同时进行轰击,达到减薄夹杂物的目的,但是此方法在钢片减薄至数百纳米甚至几个纳米过程中,夹杂物容易脱落,可观察的夹杂物数量极其有限;聚焦离子束(FIB)法利用聚焦离子束的微加工技术,对夹杂物进行原位的剖面加工,切取夹杂物的截面薄片,然后用于透射电镜观察分析从而确定物相组成,但是此方法一次仅可切取制备一两颗夹杂物,而且FIB设备极其昂贵,难以普及。Since neither the dispersed crystal method nor the extraction replica method can thin the inclusions, they are only suitable for nano-scale inclusions. Therefore, for micron-scale inclusions, the metal thin film method and the focused ion beam (FIB) method can be used. The metal thin film method bombards the steel sheet and the inclusions with Ar ions at the same time to achieve the purpose of thinning the inclusions, but this method In the process of thinning the steel sheet to hundreds of nanometers or even a few nanometers, the inclusions are easy to fall off, and the number of observable inclusions is extremely limited. In-situ cross-section processing, cutting the cross-section slices of inclusions, and then using transmission electron microscopy to observe and analyze to determine the phase composition, but this method can only cut and prepare one or two inclusions at a time, and FIB equipment is extremely expensive and difficult to popularize.

有相关技术采用离子减薄技术制样,然后在扫描电镜下利用电子背散射衍射仪(EBSD)分析夹杂物的物相组成,但是此方法也是只适用于一两颗夹杂物的减薄处理,分析效率低,并且由于在离子减薄的过程中,复合夹杂物内部不同物相本身的价键结构和表面硬度等不同,在Ar离子轰击过程中会造成夹杂物的厚薄不均,影响物相鉴定的准确性。There are related technologies that use ion thinning technology to prepare samples, and then use electron backscatter diffractometer (EBSD) to analyze the phase composition of inclusions under a scanning electron microscope, but this method is also only suitable for thinning of one or two inclusions. The analysis efficiency is low. In the process of ion thinning, the valence bond structure and surface hardness of different phases inside the composite inclusions are different. During the bombardment of Ar ions, the thickness of the inclusions will be uneven, which will affect the phase. Accuracy of identification.

综上上述方法要么制样困难,要么检测阶段的手段较为复杂,影响鉴定的准确性。To sum up, the above methods are either difficult to prepare samples, or the means of the detection stage are more complicated, which affects the accuracy of identification.

在本申请一个实施例中,如图1所示,提供一种非金属夹杂物相的鉴定方法,所述方法包括:In an embodiment of the present application, as shown in FIG. 1 , a method for identifying a non-metallic inclusion phase is provided, and the method includes:

S1.得到待测钢样品;S1. Obtain the steel sample to be tested;

S2.将所述待测钢样品进行预清理和预磨,后进行抛光,得到含夹杂物的处理试样;S2. Pre-cleaning and pre-grinding the steel sample to be tested, and then polishing to obtain a treated sample containing inclusions;

S3.对所述处理试样中的夹杂物进行电镜图像采集,后进行能谱成分分析和菊池花样采集,分别得到夹杂物的化学组成和待测菊池花样,其中,夹杂物可以是相对于检测人员来说感兴趣的夹杂物;S3. Carry out electron microscope image collection on the inclusions in the treated sample, and then perform energy spectrum component analysis and Kikuchi pattern collection to obtain the chemical composition of the inclusions and the Kikuchi pattern to be tested, respectively, wherein the inclusions may be relative to the detection Inclusions of interest to personnel;

S4.根据所述化学组成,得到标准化学物相;S4. According to the chemical composition, a standard chemical phase is obtained;

S5.根据所述标准化学物相和所述待测菊池花样,得到所述化学组成物相和所述待测菊池花样之间的匹配度;S5. according to the standard chemical phase and the kikuchi pattern to be tested, obtain the matching degree between the chemical composition phase and the kikuchi pattern to be tested;

S6.根据所述匹配度,得到夹杂物的物相种类。S6. Obtain the phase type of the inclusions according to the matching degree.

在一些可选的实施方式中,如图2所示,所述根据所述标准化学物相和所述待测菊池花样,得到所述化学组成物相和所述待测菊池花样之间的匹配度,具体包括:In some optional embodiments, as shown in FIG. 2 , according to the standard chemical phase and the kikuchi pattern to be tested, the matching between the chemical composition phase and the kikuchi pattern to be tested is obtained degrees, including:

S51.分别得到所述待测菊池花样的菊池带数目和所述待测菊池带之间的检测角度;S51. respectively obtain the detection angle between the number of the kikuchi bands of the kikuchi pattern to be tested and the kikuchi band to be tested;

S52.分别得到所述标准化学物相的标准菊池带数目和所述标准菊池带之间的标准角度;S52. respectively obtain the standard angle between the standard Kikuchi band number of the standard chemical phase and the standard Kikuchi band;

S53.根据所述待测菊池带数目和所述标准菊池带数目,得到待测菊池花样和标准化学物相之间相同的菊池带数目;S53. according to the number of the kikuchi band to be tested and the number of the standard kikuchi band, obtain the same number of kikuchi band between the pattern of the kikuchi to be tested and the standard chemical phase;

S54.根据所述检测角度和标准角度,分别得到每一对所述待测菊池带之间的检测角度与其对应的所述标准菊池带之间的标准角度的偏差,后取平均值,得到待测菊池花样和标准化学物相之间的平均角偏差;S54. According to the detection angle and the standard angle, obtain respectively the deviation of the standard angle between the detection angle between each pair of the Kikuchi belts to be measured and the corresponding standard Kikuchi belts, and then take the average value to obtain the deviation of the standard angle between the Kikuchi belts to be measured and the corresponding standard Kikuchi belts. Measure the average angular deviation between the Kikuchi pattern and the standard chemical phase;

S55.根据相同的所述菊池带数目和所述平均角偏差,得到所述化学组成物相和所述待测菊池花样之间的匹配度。S55. According to the same number of the Kikuchi bands and the average angular deviation, obtain the matching degree between the chemical composition phase and the Kikuchi pattern to be tested.

本申请中,通过对化学物相的菊池带数目和菊池带之间的角度,与待测菊池花样的菊池带数目和菊池带之间的角度进行对比,从而在制样精准的基础上,能准确分析待测样品的菊池花样和标准的化学物相的差异,从而能对菊池花样进行准确的分析。In this application, by comparing the angle between the number of Kikuchi bands and the angle between the Kikuchi bands in the chemical phase and the angle between the number of Kikuchi bands and the angle between the Kikuchi bands in the Kikuchi pattern to be tested, on the basis of accurate sample preparation, the Accurately analyze the difference between the Kikuchi pattern of the sample to be tested and the standard chemical phase, so that the Kikuchi pattern can be accurately analyzed.

在一些可选的实施方式中,所述匹配度的判断原则为:当相同的所述菊池带数目越多,且所述平均角度偏差越小,所述匹配度越高。In some optional embodiments, the matching degree is judged as follows: when the number of the same Kikuchi belts is larger and the average angle deviation is smaller, the matching degree is higher.

本申请中,菊池带数目能充分体现夹杂物的物相分布,同时平均角度偏差能反映实际的待测试样和标准数据库中的物相的偏离差异,从而能综合分析匹配度,进而能综合分析化学物相和待测菊池花样,准确分析出夹杂物的种类。In this application, the number of Kikuchi bands can fully reflect the phase distribution of the inclusions, and the average angle deviation can reflect the deviation difference between the actual sample to be tested and the phase in the standard database, so that the matching degree can be comprehensively analyzed, and then comprehensive Analyze the chemical phase and the pattern of the Kikuchi to be tested, and accurately analyze the types of inclusions.

在一些可选的实施方式中,所述根据所述匹配度,得到夹杂物的物相种类,具体包括:In some optional embodiments, the obtaining the phase type of the inclusions according to the matching degree specifically includes:

S61.根据所述匹配度,判断所述夹杂物是否为单一夹杂物;S61. According to the matching degree, determine whether the inclusion is a single inclusion;

若是,根据所述标准化学物相筛分所述待测菊池花样,得到夹杂物的物相种类;If so, sieve the Kikuchi pattern to be tested according to the standard chemical phase to obtain the phase type of the inclusions;

若否,将所述处理试样进行成分面分布分析,得到成分的面分布信息,后根据成分的所述面分布信息和所述标准化学物相,得到夹杂物的物相种类;其中,为了进一步准确判断,在匹配度的基础上,还需要增加夹杂物形态,并综合匹配度和夹杂物形态共同判断夹杂物是否为单一夹杂物。If not, the treated sample is subjected to component surface distribution analysis to obtain the surface distribution information of the components, and then the phase types of the inclusions are obtained according to the surface distribution information of the components and the standard chemical phase; wherein, in order to For further accurate judgment, on the basis of the matching degree, it is also necessary to increase the shape of the inclusion, and comprehensively determine whether the inclusion is a single inclusion by combining the matching degree and the shape of the inclusion.

本申请中,通过先对匹配度进行分析,当判定为单一夹杂物,只采用标准化学物相筛分出与其相似的待测菊池花样,从而简便的得出准确的夹杂物的物相种类,当判定为复杂的夹杂物时,通过引入成分的面分布信息,从而结合标准化学物相而对多种匹配度相同的物相进行科学筛选,进而可获得准确的夹杂物相鉴定结果。In this application, by first analyzing the matching degree, when it is determined to be a single inclusion, only the standard chemical phase is used to screen out the similar pattern of the Kikuchi to be tested, so as to easily obtain the accurate type of inclusions. When it is determined to be a complex inclusion, by introducing the surface distribution information of the components, the standard chemical phases are combined to conduct scientific screening of multiple phases with the same matching degree, and then accurate identification results of inclusion phases can be obtained.

在一些可选的实施方式中,所述预磨包括粗磨和细磨,所述粗磨和细磨都采用水砂纸进行研磨。In some optional embodiments, the pre-grinding includes coarse grinding and fine grinding, both of which are ground with water sandpaper.

在一些可选的实施方式中,所述粗磨的目数为100#~200#,所述细磨的目数为750#~850#。In some optional embodiments, the mesh number of the coarse grinding is 100#~200#, and the mesh number of the fine grinding is 750#~850#.

本申请中,通过限定预磨包括粗磨和细磨,从而在前期制样阶段能将试样表面研磨平整,去除表面杂物及加工变形层,并暴露出试样中的夹杂物,进而提高后续检测的准确性。In this application, the pre-grinding is defined to include rough grinding and fine grinding, so that the surface of the sample can be ground flat in the early stage of sample preparation, the surface impurities and the processing deformation layer can be removed, and the inclusions in the sample can be exposed. Accuracy of subsequent detection.

粗磨的目数为100#~200#的积极效果是在该目数范围内,能初步将钢制品的表面研磨平整并清除表面杂物;当目数的取值大于该范围的端点最大值,将导致的不利影响是粗磨过细,难以将试样表面研磨平整,大块杂物难以清除,影响后续的测定;当目数的取值小于该范围的端点最小值,将导致的不利影响是粗磨过粗,影响后续细磨阶段的进行。The positive effect of rough grinding with a mesh number of 100# to 200# is that within this mesh number range, the surface of the steel product can be ground flat and surface debris can be removed; when the mesh number is greater than the maximum value of the endpoint , the adverse effect will be that the rough grinding is too fine, it is difficult to grind the surface of the sample flat, and the large debris is difficult to remove, which will affect the subsequent determination; when the value of the mesh number is less than the minimum value of the endpoint of the range, the adverse effect will be caused It is the coarse grinding that is too coarse, which affects the subsequent fine grinding stage.

细磨的目数为750#~850#的积极效果是在该目数范围内,能去除试样表面较深的粗磨划痕和表面加工变形层,从而方便后续的抛光进行;当目数的取值大于该范围的端点最大值,将导致的不利影响是细磨的目数过细,影响粗大磨痕和变形层的去除,进而影响后续夹杂物的检测分析;当目数的取值小于该范围的端点最小值,将导致的不利影响是细磨的目数过粗,造成较粗的细磨划痕和表面变形层,影响后续的抛光处理以及夹杂物的检测分析。The positive effect of fine grinding with a mesh number of 750# to 850# is that within this mesh number range, the deep rough grinding scratches and surface processing deformation layers on the surface of the sample can be removed, so as to facilitate subsequent polishing; If the value of is larger than the maximum value of the end point of this range, the adverse effect will be that the mesh number of fine grinding is too fine, which will affect the removal of coarse wear scars and deformation layers, and then affect the subsequent detection and analysis of inclusions; when the value of the mesh number is less than The minimum value of the endpoint of this range will lead to the adverse effect that the mesh number of fine grinding is too coarse, resulting in coarse fine grinding scratches and surface deformation layers, which will affect the subsequent polishing treatment and the detection and analysis of inclusions.

在一些可选的实施方式中,所述抛光依次包括第一抛光和第二抛光,所述第一抛光包括:以不同粒径的金刚石为抛光剂和以丝绒为抛光布的方式进行的多次抛光;In some optional embodiments, the polishing includes a first polishing and a second polishing in sequence, and the first polishing includes: using diamonds of different particle sizes as polishing agents and velvet as polishing cloth for multiple times polishing;

所述第二抛光包括:以硅溶胶为抛光剂和以多孔氯丁橡胶为抛光布的方式进行抛光,其中,所述硅溶胶是通过粒径为0.02μmn的SiO2悬浮液和去离子水按照1∶1的质量比混合而成。The second polishing includes: polishing with silica sol as a polishing agent and porous neoprene as a polishing cloth, wherein the silica sol is obtained by passing a SiO 2 suspension with a particle size of 0.02 μmn and deionized water according to the method. 1:1 mass ratio mixed.

本申请中,通过先采用金刚石进行多次抛光,从而去除待测样品检测面及其中夹杂物的预磨划痕和变形层,再通过硅溶胶进行第二抛光,利用硅溶胶慢速抛光,可有效去除常规金相抛光试样基体及内部夹杂物的表面应力,并获得平整的夹杂物分析面,实现了菊池花样的清晰显示。In this application, by first polishing with diamond for many times, the pre-grinding scratches and deformation layers of the detection surface of the sample to be tested and the inclusions therein are removed, and then the second polishing is performed with silica sol, and the slow polishing with silica sol can be used. Effectively remove the surface stress of the conventional metallographically polished sample matrix and internal inclusions, and obtain a flat inclusion analysis surface, realizing the clear display of the Kikuchi pattern.

在一些可选的实施方式中,所述第一抛光的转速为900rpm~1500rpm,所述第一抛光的时间为5min~15min。In some optional embodiments, the rotational speed of the first polishing is 900 rpm to 1500 rpm, and the time of the first polishing is 5 min to 15 min.

本申请中,第一抛光的转速为900rpm~1500rpm的积极效果是在该转速的范围内,金刚石能充分将预磨后的待测钢样品抛光,从而去除试样检测面及其中夹杂物的微细磨痕和变形层,降低夹杂物变形应力,方便后续的第二抛光的进行;当转速的取值大于该范围的端点最大值,将导致的不利影响是过快的转速将导致部分夹杂物的物相出现磨损,并残存较大的变形应力,影响后续测定的准确性,当转速的取值小于该范围的端点最小值,将导致的不利影响是过慢的转速将导致夹杂物暴露面不平整,影响后续的分析检测。In the present application, the positive effect of the rotation speed of the first polishing being 900 rpm to 1500 rpm is that within the range of this rotation speed, the diamond can fully polish the pre-ground steel sample to be tested, thereby removing the detection surface of the sample and the fine particles of the inclusions therein. Wear scars and deformation layers can reduce the deformation stress of inclusions and facilitate the subsequent second polishing; when the value of the rotational speed is greater than the maximum value at the end of the range, the adverse effect will be that the excessively fast rotational speed will lead to partial inclusions. The phase wears out, and a large deformation stress remains, which affects the accuracy of subsequent measurements. When the value of the rotational speed is less than the minimum value of the end point of the range, the adverse effect will be that the too slow rotational speed will cause the exposed surface of the inclusions to not be damaged. leveling, which affects subsequent analysis and detection.

第一抛光的时间为5min~15min的积极效果是在该时间的范围内,金刚石能充分将预磨后的待测钢样品抛光,从而去除试样检测面及其中夹杂物的微细磨痕和变形层,降低夹杂物变形应力,方便后续的第二抛光的进行;当时间的取值大于该范围的端点最大值,将导致的不利影响是将延长工艺耗时,当时间的取值小于该范围的端点最小值,将导致的不利影响是过短的抛光时间将导致试样检测面及其中夹杂物的微细磨痕和变形层去除不尽,夹杂物变形应力较大,影响后续的第二抛光的进行。The positive effect of the first polishing time of 5min to 15min is that within this time range, the diamond can fully polish the pre-grinded steel sample to be tested, thereby removing the fine wear marks and deformation of the sample detection surface and the inclusions therein. layer to reduce the deformation stress of inclusions and facilitate the subsequent second polishing; when the value of time is greater than the maximum value of the endpoint of the range, the adverse effect will be to prolong the process time, and when the value of time is less than this range The minimum value of the endpoint will lead to the adverse effect that the too short polishing time will lead to the inexhaustible removal of the fine wear marks and deformation layer of the test surface of the sample and the inclusions in it, and the deformation stress of the inclusions will be large, which will affect the subsequent second polishing. conduct.

在一些可选的实施方式中,所述第二抛光的转速为100rpm~150rpm,所述第二抛光的时间为10min~15min。In some optional embodiments, the rotational speed of the second polishing is 100 rpm to 150 rpm, and the time of the second polishing is 10 min to 15 min.

本申请中,第二抛光的转速为100rpm~150rpm的积极效果是在该转速的范围内,硅溶胶能充分将预磨后的待测钢样品抛光,可有效去除常规金相抛光试样基体及内部夹杂物的表面应力,并获得平整的夹杂物分析面,使后续夹杂物菊池花样可以清晰显示;当转速的取值大于该范围的端点最大值,将导致的不利影响是过快的转速将导致较大的表面应力残留,影响后续的分析检测,当转速的取值小于该范围的端点最小值,将导致的不利影响是过曼的转速将导致夹杂物暴露面不平整,影响后续夹杂物菊池花样的清晰显示。In this application, the positive effect of the second polishing speed being 100rpm to 150rpm is that within the range of this speed, the silica sol can fully polish the pre-ground steel sample to be tested, and can effectively remove the conventional metallographic polishing sample matrix and Surface stress of internal inclusions, and obtain a flat inclusion analysis surface, so that subsequent inclusions Kikuchi patterns can be clearly displayed; when the value of the rotational speed is greater than the maximum value of the end point of the range, the adverse effect will be that the excessively fast rotational speed will It will lead to a large residual surface stress, which will affect the subsequent analysis and detection. When the value of the rotation speed is less than the minimum value of the end point of the range, the adverse effect will be that the excessive rotation speed will cause the exposed surface of the inclusions to be uneven, which will affect the subsequent inclusions. Clear display of Kikuchi patterns.

第二抛光的时间为10min~15min的积极效果是在该时间的范围内,硅溶胶能充分将预磨后的待测钢样品抛光,可有效去除常规金相抛光试样基体及内部夹杂物的表面应力,并获得平整的夹杂物分析面,使后续夹杂物菊池花样可以清晰显示;当时间的取值大于该范围的端点最大值,将导致的不利影响是将延长工艺耗时,当时间的取值小于该范围的端点最小值,将导致的不利影响是过短的抛光时间将导致夹杂物表面应力去除不尽,影响后续夹杂物菊池花样的清晰显示。The positive effect of the second polishing time of 10min-15min is that within this time range, the silica sol can fully polish the steel sample to be tested after pre-grinding, and can effectively remove the conventional metallographic polishing sample matrix and internal inclusions. surface stress, and obtain a flat inclusion analysis surface, so that the subsequent inclusion Kikuchi pattern can be clearly displayed; when the value of time is greater than the maximum value of the end point of the range, the adverse effect will be to prolong the process time, when the time If the value is less than the minimum value of the endpoint of this range, the adverse effect will be that too short polishing time will lead to the incomplete removal of the surface stress of the inclusions, which will affect the clear display of the subsequent inclusions Kikuchi pattern.

在一些可选的实施方式中,所述金刚石的粒径为0.5μm~7μm。In some optional embodiments, the particle size of the diamond is 0.5 μm˜7 μm.

本申请中,金刚石的粒径为0.5μm~7μm的积极效果是在该粒径的范围内,金刚石能将预磨后的待测样品充分打磨抛光,去除试样检测面及其中夹杂物的微细磨痕和变形层,降低夹杂物变形应力,方便后续的第二抛光的进行;当粒径的取值大于该范围的端点最大值,将导致的不利影响是金刚石粒径过大,导致第一抛光阶段的抛光面较为粗糙,影响第二抛光的进行,当粒径的取值小于该范围的端点最小值,将导致的不利影响是金刚石的粒径过小,较难去除预磨阶段产生的磨痕和变形层,耗时增加,影响后续第二抛光的进行。In this application, the positive effect of diamond with a particle size of 0.5 μm to 7 μm is that within this particle size range, the diamond can fully grind and polish the pre-ground sample to be tested, and remove the detection surface of the sample and the fine particles of the inclusions therein. Wear scars and deformation layers reduce the deformation stress of inclusions and facilitate the subsequent second polishing; when the value of the particle size is greater than the maximum value at the end of the range, the adverse effect will be that the diamond particle size is too large, resulting in the first The polishing surface of the polishing stage is relatively rough, which affects the progress of the second polishing. When the value of the particle size is less than the minimum value of the end point of the range, the adverse effect will be that the particle size of the diamond is too small, and it is difficult to remove the particles generated in the pre-grinding stage. Wear scars and deformed layers increase time-consuming and affect the subsequent second polishing.

实施例1Example 1

如图2所示,一种非金属夹杂物相的鉴定方法,包括:As shown in Figure 2, a method for identifying a non-metallic inclusion phase includes:

S1.切取钢样,尺寸为20mm(长)×7mm(宽)×10mm(高),得到待测钢样品;S1. Cut a steel sample with a size of 20mm (length) × 7mm (width) × 10mm (height) to obtain a steel sample to be tested;

S2.将待测钢样品进行清洗和预磨,后进行抛光,得到含夹杂物的处理试样;S2. Clean and pre-grind the steel sample to be tested, and then polish it to obtain a treated sample containing inclusions;

S3.对所述处理试样中感兴趣的夹杂物进行电镜图像采集,得到如图3所示的夹杂物的图样,后进行能谱成分分析和菊池花样采集,分别得到如图4所示的夹杂物的化学组成和如图5所示的第一夹杂物的待测菊池花样,可知该夹杂物含S、Mn、Fe元素;S3. Carry out electron microscope image collection on the inclusions of interest in the treated sample to obtain the pattern of the inclusions as shown in Figure 3, and then perform energy spectrum component analysis and Kikuchi pattern collection, respectively, as shown in Figure 4. The chemical composition of the inclusions and the tested Kikuchi pattern of the first inclusion as shown in Figure 5 show that the inclusions contain S, Mn, and Fe elements;

S4.根据化学组成,得到标准化学物相Alabandite相和MnS相;S4. According to the chemical composition, standard chemical phases Alabandite phase and MnS phase are obtained;

S51.分别得到待测菊池花样的菊池带数目和待测菊池带之间的检测角度;S51. Respectively obtain the number of kikuchi bands of the kikuchi pattern to be tested and the detection angle between the kikuchi bands to be tested;

S52.分别得到标准化学物相的标准菊池带数目和标准菊池带之间的标准角度;S52. Respectively obtain the number of standard Kikuchi bands of the standard chemical phase and the standard angle between the standard Kikuchi bands;

S53.根据待测菊池带数目和标准菊池带数目,得到待测菊池花样和标准化学物相之间相同的菊池带数目;S53. According to the number of Kikuchi bands to be tested and the number of standard Kikuchi bands, obtain the same number of Kikuchi bands between the Kikuchi pattern to be tested and the standard chemical phase;

S54.根据检测角度和标准角度,分别得到每一对待测菊池带之间的检测角度与其对应的标准菊池带之间的标准角度的偏差,后取平均值,得到待测菊池花样和标准化学物相之间的平均角偏差;S54. According to the detection angle and the standard angle, obtain the deviation of the detection angle between each Kikuchi band to be tested and the standard angle between the corresponding standard Kikuchi band, and then take the average value to obtain the Kikuchi pattern to be tested and the standard chemical substance mean angular deviation between phases;

S55.根据相同的菊池带数目和平均角偏差,得到化学组成物相和待测菊池花样之间的匹配度,其中,如图6所示,标准化学物相Alabandite相的相同的菊池带数目为12条,平均角偏差为0.31,而如图7所示,标准化学物相MnS相的相同菊池带数目为8条,平均角偏差为0.25,虽然MnS相与Alabandite相的元素组成及含量相同,以质量分数计,均为S:50%,Mn:50%,但是二者的晶体结构有所差异,MnS相晶胞

Figure BDA0003494094320000081
Alabandite相
Figure BDA0003494094320000082
因此根据相同的菊池带数计算,Alabandite相与夹杂物的菊池花样的匹配带数较多,匹配度较高;S55. Obtain the matching degree between the chemical composition phase and the Kikuchi pattern to be tested according to the same number of Kikuchi bands and the average angular deviation, wherein, as shown in Figure 6, the same number of Kikuchi bands of the standard chemical phase Alabandite phase is 12, the average angular deviation is 0.31, and as shown in Figure 7, the number of identical Kikuchi bands of the standard chemical phase MnS phase is 8, and the average angular deviation is 0.25, although the element composition and content of the MnS phase and the Alabandite phase are the same, In terms of mass fraction, both are S: 50%, Mn: 50%, but the crystal structures of the two are different, the MnS phase unit cell
Figure BDA0003494094320000081
Alabandite Phase
Figure BDA0003494094320000082
Therefore, according to the calculation of the same number of Kikuchi bands, the number of matching bands between Alabandite phase and the Kikuchi pattern of inclusions is higher, and the matching degree is higher;

S61.根据匹配度和夹杂物形态,判断夹杂物是为单一夹杂物;S61. According to the degree of matching and the shape of the inclusion, determine that the inclusion is a single inclusion;

根据标准化学物相筛分待测菊池花样,得到夹杂物的物相种类为立方晶系Alabandite相。The Kikuchi pattern to be tested was sieved according to the standard chemical phase, and the phase type of the inclusions was obtained as cubic Alabandite phase.

预磨包括粗磨和细磨,粗磨和细磨都采用水砂纸进行研磨。Pre-grinding includes coarse grinding and fine grinding, and both coarse and fine grinding are ground with water sandpaper.

粗磨的目数为150#,细磨的目数为800#。The mesh number of coarse grinding is 150#, and the mesh number of fine grinding is 800#.

抛光依次包括第一抛光和第二抛光,第一抛光包括:以不同粒径的金刚石为抛光剂和以丝绒为抛光布的方式进行的三次抛光,其中第一次抛光的金刚石的粒径为7μm、第二次抛光的金刚石的粒径为3.5μm,第三次抛光的金刚石的粒径为0.5μm;The polishing includes first polishing and second polishing in turn. The first polishing includes: three times of polishing with diamonds of different particle sizes as polishing agents and velvet as polishing cloths, wherein the particle size of the diamonds in the first polishing is 7 μm , The particle size of the diamond polished for the second time is 3.5 μm, and the particle size of the diamond polished for the third time is 0.5 μm;

第二抛光包括:以硅溶胶为抛光剂和以多孔氯丁橡胶为抛光布的方式进行抛光,其中,硅溶胶是通过粒径为0.02μm的SiO2悬浮液和去离子水按照1∶1的质量比混合而成。The second polishing includes: polishing with silica sol as a polishing agent and porous neoprene as a polishing cloth, wherein the silica sol is obtained by mixing a SiO 2 suspension with a particle size of 0.02 μm and deionized water at a ratio of 1:1 The mass ratio is mixed.

第一抛光的转速为1500rpm,第一抛光的时间为10min。The rotational speed of the first polishing was 1500 rpm, and the time of the first polishing was 10 min.

第二抛光的转速为150rpm,第二抛光的时间为10min。The rotation speed of the second polishing was 150 rpm, and the time of the second polishing was 10 min.

实施例2Example 2

将实施例2和实施例1相对比,实施例2和实施例1的区别在于:Comparing Embodiment 2 and Embodiment 1, the difference between Embodiment 2 and Embodiment 1 is:

S3.将含夹杂物的处理试样进行电镜扫描,得到如图8所示的夹杂物的图像,后选取其中的位置1进行能谱成分分析和菊池花样采集,分别得到如图9所示的夹杂物的化学组成和如图10所示的第一夹杂物的待测菊池花样,可知该夹杂物含O、Al、Mg、Fe元素;S3. Scan the treated sample containing inclusions with an electron microscope to obtain an image of inclusions as shown in Figure 8, and then select position 1 for energy spectrum component analysis and Kikuchi pattern collection, respectively, as shown in Figure 9. The chemical composition of the inclusions and the tested Kikuchi pattern of the first inclusion as shown in Figure 10 show that the inclusions contain O, Al, Mg, and Fe elements;

S4.根据化学组成,得到标准化学物相AlAl1.67O4相和MgAl2O4相;S4. According to the chemical composition, standard chemical phases AlAl 1.67 O 4 and MgAl 2 O 4 are obtained;

S51.分别得到待测菊池花样的菊池带数目和待测菊池带之间的检测角度;S51. Respectively obtain the number of kikuchi bands of the kikuchi pattern to be tested and the detection angle between the kikuchi bands to be tested;

S52.分别得到标准化学物相的标准菊池带数目和标准菊池带之间的标准角度;S52. Respectively obtain the number of standard Kikuchi bands of the standard chemical phase and the standard angle between the standard Kikuchi bands;

S53.根据待测菊池带数目和标准菊池带数目,得到待测菊池花样和标准化学物相之间相同的菊池带数目;S53. According to the number of Kikuchi bands to be tested and the number of standard Kikuchi bands, obtain the same number of Kikuchi bands between the Kikuchi pattern to be tested and the standard chemical phase;

S54.根据检测角度和标准角度,分别得到每一对待测菊池带之间的检测角度与其对应的标准菊池带之间的标准角度的偏差,后取平均值,得到待测菊池花样和标准化学物相之间的平均角偏差;S54. According to the detection angle and the standard angle, obtain the deviation of the detection angle between each Kikuchi band to be tested and the standard angle between the corresponding standard Kikuchi band, and then take the average value to obtain the Kikuchi pattern to be tested and the standard chemical substance mean angular deviation between phases;

S55.根据相同的菊池带数目和平均角偏差,得到化学组成物相和待测菊池花样之间的匹配度,其中,标准化学物相AlAl1.67O4相和MgAl2O4相的相同的菊池带数目都为12条,平均角偏差都为0.43,因此两种匹配度一致,结合化学组成信息判断位置1为MgAl2O4相的可能性大;S55. Obtain the matching degree between the chemical composition phase and the Kikuchi pattern to be tested according to the same number of Kikuchi bands and the average angular deviation, wherein the standard chemical phase AlAl 1.67 O 4 phase and MgAl 2 O 4 phase have the same Kikuchi The number of bands is 12, and the average angular deviation is 0.43, so the two matching degrees are consistent, and it is highly likely that position 1 is the MgAl2O4 phase based on the chemical composition information;

重复上述步骤,对选取的夹杂物的位置2进行能谱成分分析和菊池花样采集,分别得到如图11所示的夹杂物的化学组成和如图12所示的夹杂物的待测菊池花样,可知该夹杂物含O、Al、S、Ca、Mn、Fe元素;再根据化学组成得到标准化学物相CaMnS2相、Alabandite相、Oldhamite相、Al21.33S32、(Al2S3)10.66相和(H3O)(Al(SO4)2)相,而上述的标准化学物相的相同的菊池带数目都为12条,平均角偏差都为0.39;Repeat the above steps, perform energy spectrum component analysis and Kikuchi pattern collection for the selected inclusion position 2, and obtain the chemical composition of the inclusion as shown in Figure 11 and the test Kikuchi pattern of the inclusion as shown in Figure 12, respectively, It can be seen that the inclusions contain O, Al, S, Ca, Mn, Fe elements; then according to the chemical composition, standard chemical phases CaMnS 2 phase, Alabandite phase, Oldhamite phase, Al 21.33 S 32 , (Al 2 S 3 ) 10.66 phase are obtained and (H 3 O) (Al(SO 4 ) 2 ) phase, while the number of the same Kikuchi bands of the above standard chemical phase is 12, and the average angular deviation is 0.39;

S61.根据匹配度和图8中夹杂物形态,判断夹杂物不是单一夹杂物,对该夹杂物进行成分面分布分析,如图13所示,得到成分的面分布信息:O、Al和Mg元素分布在夹杂物心部,即位置1处,而S、Mn和Ca元素分布在夹杂物外圈,即位置2处,后根据成分的面分布信息和标准化学物相,确定该夹杂物位置1处的的物相种类为立方晶系的MgAl2O4相,位置2处的物相种类为立方晶系的CaMnS2相,其晶胞

Figure BDA0003494094320000101
S61. According to the matching degree and the shape of the inclusion in Figure 8, it is judged that the inclusion is not a single inclusion, and the surface distribution of the inclusion is analyzed. As shown in Figure 13, the surface distribution information of the components is obtained: O, Al and Mg elements It is distributed in the center of the inclusion, that is, at position 1, while the elements of S, Mn and Ca are distributed in the outer ring of the inclusion, that is, at position 2. Then, according to the surface distribution information of the composition and the standard chemical phase, the position 1 of the inclusion is determined. The phase type is cubic MgAl 2 O 4 phase, the phase type at position 2 is cubic crystal CaMnS 2 phase, and its unit cell
Figure BDA0003494094320000101

本申请实施例中的一个或多个技术方案,至少还具有如下技术效果或优点:One or more technical solutions in the embodiments of the present application also have at least the following technical effects or advantages:

(1)本申请实施例提供的方法,通过对待测钢样品进行预磨和抛光,简化制样过程,再通过电镜扫描,根据电镜图像进行能谱成分分析和菊池花样采集,从而能根据能谱成分分析得到的化学组成,推断出标准的化学组成物相,再通过待测菊池花样和化学组成物相之间的匹配度,从而能准确得到夹杂物的物相种类,简化鉴定过程,进而实现对夹杂物的简单方便的鉴定。(1) The method provided by the embodiment of the present application simplifies the sample preparation process by pre-grinding and polishing the steel sample to be tested, and then scans with an electron microscope, performs energy spectrum component analysis and Kikuchi pattern collection according to the electron microscope image, so that the energy spectrum The chemical composition obtained by the composition analysis can deduce the standard chemical composition phase, and then through the matching degree between the Kikuchi pattern to be tested and the chemical composition phase, the phase type of the inclusions can be accurately obtained, simplifying the identification process, and then realizing Simple and convenient identification of inclusions.

(2)本申请实施例提供的方法,利用硅溶胶慢速抛光制样技术可有效去除常规金相抛光试样基体及内部夹杂物的表面应力,并获得平整的夹杂物分析面,实现了夹杂物菊池带花样的清晰显示。(2) The method provided in the embodiment of the present application can effectively remove the surface stress of the conventional metallographic polishing sample matrix and the internal inclusions by using the silica sol slow polishing sample preparation technology, and obtain a flat inclusion analysis surface, realizing the inclusion of inclusions. A clear display of the pattern of the Kikuchi belt.

(3)本申请实施例提供的方法,首次提出借助化学组成信息及成分面分布信息,对多种匹配度相同的物相进行科学筛选,从而可获得准确的夹杂物相鉴定结果。(3) The method provided in the embodiment of the present application is the first to use the chemical composition information and composition surface distribution information to scientifically screen multiple phases with the same degree of matching, so as to obtain accurate inclusion phase identification results.

(4)本申请实施例提供的方法,相比于X射线衍射(XRD)分析及透射电镜选区电子衍射(SAD)分析的复杂制样过程,其制样简单,更易操作,一次制样即可对试样中所有感兴趣的夹杂物进行物相鉴定,而不是局限于一两颗夹杂物,分析效率高,数据处理简便,结果准确可靠。(4) Compared with the complex sample preparation process of X-ray diffraction (XRD) analysis and transmission electron microscope selected area electron diffraction (SAD) analysis, the method provided in the embodiment of the present application is simple in sample preparation and easier to operate, and only one sample preparation is required. Phase identification of all the inclusions of interest in the sample, rather than limited to one or two inclusions, has high analysis efficiency, simple data processing, and accurate and reliable results.

附图解释:Explanation of drawings:

图3为本申请实施例1提供的待测钢样品中夹杂物的形态图;3 is a morphological diagram of inclusions in the steel sample to be tested provided in Example 1 of the present application;

图4为本申请实施例1提供的待测钢样品中夹杂物的能谱成分分析图;FIG. 4 is an analysis diagram of the energy spectrum composition of the inclusions in the steel sample to be tested provided in Example 1 of the present application;

图5为本申请实施例1提供的待测钢样品中夹杂物的电子背散射衍射菊池花样图;5 is an electron backscatter diffraction Kikuchi pattern diagram of inclusions in the steel sample to be tested provided in Example 1 of the application;

图6为本申请实施例1提供的Alabandite相与夹杂物的菊池花样的匹配图;6 is a matching diagram of the Kikuchi pattern of the Alabandite phase and inclusions provided in Example 1 of the present application;

图7为本申请实施例1提供的MnS相与夹杂物的菊池花样的匹配图;7 is a matching diagram of the Kikuchi pattern of MnS phase and inclusions provided in Example 1 of the present application;

由图1-图7可知,实施例1中的夹杂物确定为立方晶系的Alabandite相It can be seen from Figures 1 to 7 that the inclusions in Example 1 are determined to be the Alabandite phase of the cubic crystal system

图8为本申请实施例2提供的待测钢样品中夹杂物的形态图;8 is a morphological diagram of inclusions in the steel sample to be tested provided in Example 2 of the present application;

图9为本申请实施例2提供的待测钢样品中夹杂物位置1的能谱成分分析图;Fig. 9 is the energy spectrum composition analysis diagram of the inclusion position 1 in the steel sample to be tested provided in Example 2 of the present application;

图10为本申请实施例2提供的待测钢样品中夹杂物位置1的电子背散射衍射菊池花样图;Fig. 10 is the electron backscatter diffraction Kikuchi pattern diagram of inclusion position 1 in the steel sample to be tested provided in Example 2 of the application;

图11为本申请实施例2提供的待测钢样品中夹杂物位置2的能谱成分分析图;11 is an analysis diagram of the energy spectrum composition of the inclusion position 2 in the steel sample to be tested provided in Example 2 of the application;

图12为本申请实施例2提供的待测钢样品中夹杂物位置2的电子背散射衍射菊池花样图;Fig. 12 is the electron backscatter diffraction Kikuchi pattern diagram of the inclusion position 2 in the steel sample to be tested provided in Example 2 of the application;

图13为本申请实施例2提供的待测钢样品中夹杂物的成分面分布图;Figure 13 is a composition plane distribution diagram of inclusions in the steel sample to be tested provided in Example 2 of the application;

由图8-13可知,实施例2中的夹杂物确定为包括立方晶系的MgAl2O4和CaMnS2的两种相。It can be seen from FIGS. 8-13 that the inclusions in Example 2 are determined to include two phases of cubic MgAl 2 O 4 and CaMnS 2 .

需要说明的是,在本文中,诸如“第一”和“第二”等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。It should be noted that, in this document, relational terms such as "first" and "second" etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these Any such actual relationship or sequence exists between entities or operations. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion such that a process, method, article or device comprising a list of elements includes not only those elements, but also includes not explicitly listed or other elements inherent to such a process, method, article or apparatus. Without further limitation, an element qualified by the phrase "comprising a..." does not preclude the presence of additional identical elements in a process, method, article or apparatus that includes the element.

以上所述仅是本发明的具体实施方式,使本领域技术人员能够理解或实现本发明。对这些实施例的多种修改对本领域的技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所申请的原理和新颖特点相一致的最宽的范围。The above descriptions are only specific embodiments of the present invention, so that those skilled in the art can understand or implement the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims (10)

1. A method for identifying a non-metallic inclusion phase, said method comprising:
obtaining a steel sample to be tested;
pre-cleaning and pre-grinding the steel sample to be detected, and then polishing to obtain a treatment sample containing impurities;
collecting the impurities in the treated sample by an electron microscope image, and then carrying out energy spectrum component analysis and chrysanthemum pool pattern collection to respectively obtain the chemical composition of the impurities and the chrysanthemum pool pattern to be detected;
obtaining a standard chemical phase according to the chemical composition;
obtaining the matching degree between the chemical composition phase and the chrysanthemum pool pattern to be detected according to the standard chemical phase and the chrysanthemum pool pattern to be detected;
and obtaining the phase type of the inclusions according to the matching degree.
2. The method according to claim 1, wherein the obtaining of the matching degree between the chemical composition phase and the flower pattern of the chrysanthemum pool to be detected according to the standard chemical phase and the flower pattern of the chrysanthemum pool to be detected specifically comprises:
respectively obtaining the number of the chrysanthemum pool zones of the chrysanthemum pool pattern to be detected and the detection angle between the chrysanthemum pool zones to be detected;
respectively obtaining the number of standard chrysanthemum pool zones of the standard chemical phase and a standard angle between the standard chrysanthemum pool zones;
obtaining the number of the chrysanthemum pool zones with the same chrysanthemum pool pattern to be detected and standard chemical phases according to the number of the chrysanthemum pool zones to be detected and the number of the standard chrysanthemum pool zones;
respectively obtaining the deviation of the detection angle between each pair of chrysanthemum pool zones to be detected and the standard angle between the corresponding standard chrysanthemum pool zones according to the detection angle and the standard angle, and then averaging to obtain the average angle deviation between the chrysanthemum pool patterns to be detected and the standard chemical phase;
and obtaining the matching degree between the chemical composition phase and the chrysanthemum pool patterns to be detected according to the same chrysanthemum pool zone number and the average angle deviation.
3. The method according to claim 2, wherein the determination principle of the matching degree is as follows: when the number of the same chrysanthemum pool strips is larger and the average angle deviation is smaller, the matching degree is higher.
4. The method according to claim 1, wherein the obtaining of the phase type of the inclusion according to the matching degree specifically comprises:
judging whether the inclusion is a single inclusion or not according to the matching degree;
if so, screening the chrysanthemum pool pattern to be detected according to the standard chemical phase to obtain the phase type of the inclusion;
and if not, performing component surface distribution analysis on the processed sample to obtain surface distribution information of the components, and then obtaining the phase type of the inclusions according to the surface distribution information of the components and the standard chemical phase.
5. The method of claim 1, wherein the pre-grinding comprises coarse and fine grinding, both of which are ground with water sandpaper.
6. The method of claim 1, wherein the coarse grinding has a mesh size of 100# to 200# and the fine grinding has a mesh size of 750# to 850 #.
7. The method of claim 1, wherein the polishing comprises a first polishing and a second polishing in sequence, the first polishing comprising: polishing for many times by taking diamonds with different grain diameters as a polishing agent and taking velvet as polishing cloth;
the second polishing includes: polishing is carried out by taking silica sol as a polishing agent and porous chloroprene rubber as polishing cloth.
8. The method according to claim 7, wherein the rotation speed of the first polishing is 900rpm to 1500rpm, and the time of the first polishing is 5min to 15 min.
9. The method of claim 7, wherein the rotation speed of the second polishing is 100rpm to 150rpm, and the time of the second polishing is 10min to 15 min.
10. The method of claim 7, wherein the diamond has a particle size of 0.5 to 7 μm.
CN202210110253.9A 2022-01-28 2022-01-28 Identification method of non-metal inclusion phase Pending CN114441580A (en)

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