CN114415481B - Laser direct writing system engraving method and device based on rotating mirror - Google Patents

Abstract

The invention discloses a writing method and device for a laser direct writing system based on a rotating mirror. The method includes: constructing a fitting relationship between optical power and an input voltage of an acousto-optic modulator; Optical power distribution; according to the predetermined writing optical power and the optical power distribution, determine the field of view for single writing; according to the field of view for single writing, divide the file to be written to obtain at least one sub-file; Perform gray-scale compensation and correction on the sub-file to obtain a writing data file; according to the deflection angle of the writing direction, coordinate transformation is performed on the line initial position coordinates of each writing data file; according to the transformed line initial position coordinates and the fitting relationship , using a mirror-based laser direct writing system for writing. The method can make the engraving effect more uniform and the engraving accuracy rate higher.

Description

A kind of writing method and device of laser direct writing system based on rotating mirror

technical field

The present application relates to the field of two-photon laser direct writing lithography, and in particular, to a writing method and device for a laser direct writing system based on a rotating mirror.

Background technique

Laser direct writing technology is a maskless lithography technology that uses laser direct writing. It has high processing resolution, low thermal impact and a wide range of processable materials. Compared with other lithography technologies, its processing conditions and environmental requirements are relatively low. However, the laser direct writing technology acts on the sample material by focusing the spot, and the focusing spot is limited by the optical diffraction limit, and its minimum size is about half of the light wavelength, so the processing accuracy is limited. Moreover, the processing speed of the single-beam laser direct writing system is slow, which cannot meet the requirements of actual production and application.

Two-photon polymerization processing technology can greatly improve the processing accuracy. Two-photon laser direct writing can realize the processing of mm-cm-level mesoscopic size objects while maintaining nm-um level high precision. However, there are still some problems in the two-photon laser direct writing lithography technology. The difficulty in achieving high-speed writing at the mesoscopic scale is the main factor restricting its further promotion, mainly due to insufficient scanning speed and imperfect writing strategy.

In the process of realizing the present invention, the inventor found that there are at least the following problems in the prior art:

In laser direct writing, galvanometer scanning and movement are generally used to achieve small-scale writing, and at the same time, large-area writing is achieved with the use of piezoelectric platforms and electric platforms. Polyhedral Scanning Mirror (PLS), also known as rotating mirror, is more efficient than galvanometer. The rotating mirror can generate multi-beam synchronous scanning and also has a high scanning speed. Therefore, the edge light suppression technology is combined with the rotating mirror for multi-beam scanning. The parallel laser direct writing method can greatly improve the writing speed and efficiency. The rotating mirror can only scan in the same direction, and the acousto-optic modulator (AOM) controls the light switch to realize the pattern writing, which is completed according to the progressive scanning control. Engraving of the entire pattern, however, it is precisely because the rotating mirror can only scan in the same direction, so when there is an angular error between the scanning direction and the displacement platform, the scanning speed and the displacement speed work together to cause an angular error in the actual writing direction, resulting in moving There is an error between the position coordinates and the actual position to be written, which affects the accuracy of writing, especially in the process of large-scale writing, which greatly affects the success rate of writing.

SUMMARY OF THE INVENTION

The purpose of the embodiments of the present application is to provide a writing method and device for a laser direct writing system based on a rotating mirror, so as to solve the technical problem in the related art that the writing accuracy of the laser direct writing system based on a rotating mirror is not high.

According to a first aspect of the embodiments of the present application, there is provided a writing method for a laser direct writing system based on a rotating mirror, including:

Build a fitting relationship between the optical power and the input voltage of the acousto-optic modulator;

Obtain the optical power distribution in the effective area of mirror scanning;

According to the predetermined writing optical power and the distribution of the optical power, determine the field of view for single writing;

According to the single writing field of view range, the to-be-written file is divided to obtain at least one sub-file;

Performing grayscale compensation and correction on the sub-file to obtain a written data file;

According to the deflection angle of the writing direction, coordinate transformation is performed on the line initial position coordinates of each writing data file;

According to the transformed initial position coordinates of the row and the fitting relationship, writing is performed using a mirror-based laser direct writing system.

Further, build a fitting relationship between the optical power and the input voltage of the acousto-optic modulator, including:

Set the step value according to the input voltage range of the acousto-optic modulator;

According to the step value, the input voltage is gradually increased from the lowest input voltage, and the corresponding optical power value is recorded;

According to the input voltage and the corresponding optical power value, a fitting relationship between the optical power and the input voltage of the acousto-optic modulator is constructed.

Further, obtain the optical power distribution in the effective area of the rotating mirror scanning, including:

dividing the mirror-scanning effective area into several sub-areas;

Taking the optical power corresponding to the middle position of each sub-area as the optical power of the sub-area;

Set the optical power of all sub-areas to the optical power distribution in the effective area of mirror scanning.

Further, according to the predetermined writing optical power and the optical power distribution, determine the single writing field of view range, including:

According to the optical power distribution, delete the sub-regions whose optical power is less than the predetermined writing optical power;

The total length of the remaining sub-regions is set as the single-shot field of view range.

Further, gray-scale compensation correction is performed on the sub-file to obtain a writing data file, including:

respectively calculating the difference between the optical power value of the remaining sub-regions and the maximum optical power value in the remaining sub-regions;

converting the difference into a grayscale difference;

The pixel value of each row in the sub-file is subtracted from the grayscale difference one by one to obtain writing grayscale information;

If the number of the subfiles is greater than or equal to 2, secondary grayscale compensation and correction is performed on the grayscale at the splicing between the written grayscale information to obtain a written data file.

Further, according to the deflection angle of the writing direction, coordinate transformation is performed on the line initial position coordinates of each writing data file, including:

Obtain the first included angle between the horizontal direction of the electric platform and the scanning direction and the second included angle between the scanning direction and the combined speed direction of the moving speed of the electric platform and the scanning speed;

adding the first included angle and the second included angle to obtain the deflection angle of the writing direction;

According to the deflection angle, coordinate transformation is performed on the line initial position coordinates of each writing data file.

According to a second aspect of the embodiments of the present application, there is provided a writing device for a laser direct writing system based on a rotating mirror, including:

Building blocks for constructing a fitted relationship between the optical power and the input voltage of the acousto-optic modulator;

The acquisition module is used to acquire the optical power distribution in the effective area of the mirror scanning;

a determination module, configured to determine the field of view range for single writing according to the predetermined writing optical power and the distribution of the optical power;

a segmentation module, configured to segment the to-be-written file according to the single writing field of view range to obtain at least one sub-file;

A grayscale compensation and correction module for performing grayscale compensation and correction on the sub-file to obtain a written data file;

The coordinate transformation module is used to perform coordinate transformation on the initial position coordinates of the lines of each writing data file according to the deflection angle of the writing direction;

The writing module is used for writing by using a laser direct writing system based on a rotating mirror according to the transformed initial position coordinates of the row and the fitting relationship.

Further, according to the predetermined writing optical power and the optical power distribution, determine the single writing field of view range, including:

According to the optical power distribution, delete the sub-regions whose optical power is less than the predetermined writing optical power;

The total length of the remaining sub-regions is set as the single-shot field of view range.

According to a third aspect of the embodiments of the present application, an electronic device is provided, including:

one or more processors;

memory for storing one or more programs;

The one or more programs, when executed by the one or more processors, cause the one or more processors to implement the method as described in the first aspect.

According to a fourth aspect of the embodiments of the present application, there is provided a computer-readable storage medium storing computer instructions thereon, and when the instructions are executed by a processor, the steps of the method described in the first aspect are implemented.

The technical solutions provided by the embodiments of the present application may include the following beneficial effects:

It can be seen from the above embodiments that the present application obtains the optical power distribution in the effective area of the rotating mirror scanning, and determines the field of view range for single writing according to the predetermined writing optical power and the optical power distribution, and solves the problem caused by unstable light intensity. It can solve the problem of uneven writing; perform gray compensation correction on the sub-files obtained by dividing the field of view of a single writing to make the writing effect more uniform; according to the deflection angle of the writing direction, the initial position of the line of each writing data file is calculated. The coordinates are transformed into coordinates, which improves the actual movement angle deviation caused by the combined influence of the angle deviation between the scanning direction and the horizontal direction of the electric platform and the synchronization between the scanning speed and the stepping speed. Large-area writing can greatly improve the writing accuracy.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not limiting of the present application.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description serve to explain the principles of the application.

FIG. 1 is a flow chart of a writing method of a mirror-based laser direct writing system according to an exemplary embodiment.

FIG. 2 is a flowchart of step S11 according to an exemplary embodiment.

FIG. 3 is a flowchart of step S12 according to an exemplary embodiment.

FIG. 4 is a flowchart of step S13 according to an exemplary embodiment.

FIG. 5 is a flowchart of step S15 according to an exemplary embodiment.

FIG. 6 is a flowchart of step S16 according to an exemplary embodiment.

FIG. 7 is a schematic diagram illustrating large-area inscription with step-by-step movement of an electric platform according to an exemplary embodiment.

FIG. 8 is a schematic diagram illustrating large-area inscription with synchronous movement of an electric platform according to an exemplary embodiment.

FIG. 9 is a block diagram of a writing device of a mirror-based laser direct writing system according to an exemplary embodiment.

Fig. 10 is a schematic diagram of an electronic device according to an exemplary embodiment.

Detailed ways

Exemplary embodiments will be described in detail herein, examples of which are illustrated in the accompanying drawings. Where the following description refers to the drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the illustrative examples below are not intended to represent all implementations consistent with this application. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present application as recited in the appended claims.

The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to limit the application. As used in this application and the appended claims, the singular forms "a," "the," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will also be understood that the term "and/or" as used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

It should be understood that although the terms first, second, third, etc. may be used in this application to describe various information, such information should not be limited by these terms. These terms are only used to distinguish the same type of information from each other. For example, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information without departing from the scope of the present application. Depending on the context, the word "if" as used herein can be interpreted as "at the time of" or "when" or "in response to determining."

FIG. 1 is a flow chart of a writing method of a mirror-based laser direct writing system according to an exemplary embodiment. As shown in FIG. 1 , the method is applied to a mirror-based laser direct writing system, and may include The following steps:

Step S11: constructing a fitting relationship between the optical power and the input voltage of the acousto-optic modulator;

Step S12: obtaining the optical power distribution in the effective area of the mirror scanning;

Step S13: According to the predetermined writing optical power and the distribution of the optical power, determine the field of view range for single writing;

Step S14: According to the single writing field of view range, the file to be written is divided to obtain at least one sub-file;

Step S15: performing grayscale compensation and correction on the sub-file to obtain a writing data file;

Step S16: according to the deflection angle of the writing direction, coordinate transformation is carried out on the initial position coordinates of the lines of each writing data file;

Step S17: According to the transformed initial position coordinates of the row and the fitting relationship, use a mirror-based laser direct writing system to perform writing.

It can be seen from the above embodiments that the present application obtains the optical power distribution in the effective area of the rotating mirror scanning, and determines the field of view range for single writing according to the predetermined writing optical power and the optical power distribution, and solves the problem caused by unstable light intensity. It can solve the problem of uneven writing; perform gray compensation correction on the sub-files obtained by dividing the field of view of a single writing to make the writing effect more uniform; according to the deflection angle of the writing direction, the initial position of the line of each writing data file is calculated. The coordinates are transformed into coordinates, which improves the actual movement angle deviation caused by the combined influence of the angle deviation between the scanning direction and the horizontal direction of the electric platform and the synchronization between the scanning speed and the stepping speed. Large-area writing can greatly improve the writing accuracy.

In the specific implementation of step S11, a fitting relationship between the optical power and the input voltage of the acousto-optic modulator (AOM) is constructed;

Specifically, as shown in Figure 2, this step may include the following sub-steps:

Step S21: setting the step value according to the range of the input voltage of the acousto-optic modulator;

Specifically, the range of the AOM voltage is 0-5V. In the specific implementation, the smaller the step value is set, the more sampling times and the more accurate the result. Therefore, the range of the step value can be set to 0.01-0.1.

Step S22: according to the step value, gradually increase the input voltage from the lowest input voltage, and record the corresponding optical power value;

，依 次测试AOM不同输入电压时激光的光功率情况，并对实验数据进行存储，存储所有采集到的 AOM输入电压与对应的激光的光功率数据对

，由于AOM输入的电压与激光的光功率 并不是简单的线性光系，通过在采样时缩小步进值可以近似认为

和

之 间的输入电压与光功率之间为线性关系，同时因为光刻胶的特性是与光功率直接相关而并 非AOM输入电压，而转镜系统的激光控制往往通过AOM输入电压来完成，因此需要构建出两 者之间的关系来更好的控制转镜系统刻写。 Specifically, according to the range of the AOM voltage, the AOM voltage is incremented by the step value up to the maximum upper limit

, test the optical power of the laser with different input voltages of the AOM in turn, store the experimental data, and store all the collected AOM input voltages and the corresponding laser optical power data pairs

, since the voltage input by the AOM and the optical power of the laser are not a simple linear optical system, it can be approximated by reducing the step value during sampling

and

There is a linear relationship between the input voltage and the optical power. At the same time, because the characteristics of the photoresist are directly related to the optical power rather than the AOM input voltage, the laser control of the rotating mirror system is often completed by the AOM input voltage, so it is necessary to Build the relationship between the two to better control the writing of the mirror system.

Step S23: Construct a fitting relationship between the optical power and the input voltage of the acousto-optic modulator according to the input voltage and the corresponding optical power value.

Specifically, the formula of the fitting relationship is as follows:

为光功率和声光调制器的输入电压之间的拟合函数，

为光功率，

为AOM的输入电压，

为AOM输入电压为

时的光功率值，

，

。 in,

is the fitting function between the optical power and the input voltage of the acousto-optic modulator,

is the optical power,

is the input voltage of the AOM,

The input voltage for the AOM is

when the optical power value,

,

.

In the specific implementation of step S12, the optical power distribution in the effective area of the mirror scanning is obtained;

Specifically, as shown in Figure 3, this step may include the following sub-steps:

Step S31: Divide the mirror scanning effective area into several sub-areas;

，选择间距

d分割整个转镜扫描有效区域为一 个个子区域，以子区域为单位测量有效区域内的光功率分布情况。 Specifically, input the maximum voltage to the AOM

, select the spacing

d. Divide the entire rotating mirror scanning effective area into sub-areas, and measure the optical power distribution in the effective area in units of sub-areas.

Step S32: taking the optical power corresponding to the middle position of each sub-region as the optical power of the sub-region;

Specifically, the optical power in the middle of the effective area is usually the strongest, and the two sides of the middle position gradually weaken. Therefore, the optical power collected in the middle sub-area is often stronger, while the sub-areas on both sides are often weaker. In order to obtain more accurate results , usually the optical power in the middle of the sub-area is sampled multiple times, and then the average value is taken as the optical power value of the sub-area.

Step S33: Set the optical power of all sub-areas to the optical power distribution in the effective area for mirror scanning.

Specifically, the optical power values of all sub-areas are stored to obtain the optical power distribution of the entire effective area for use in subsequent steps.

In the specific implementation of step S13, according to the predetermined writing optical power and the distribution of the optical power, the field of view range for single writing is determined;

Specifically, as shown in Figure 4, this step may include the following sub-steps:

Step S41: according to the optical power distribution, delete sub-regions whose optical power is less than the predetermined writing optical power;

，其中

，

指的是光功率 的最小阈值，即激光能够在光刻胶发生固化的最小光功率，根据得到的光功率分布情况，删 除光功率小于

的子区域，记录剩余的子区域信息。 Specifically, according to the writing requirements, set the writing optical power

,in

,

Refers to the minimum threshold of optical power, that is, the minimum optical power that the laser can cure in the photoresist. According to the obtained optical power distribution, the deletion optical power is less than

sub-area, record the remaining sub-area information.

Step S42: Set the total length of the remaining sub-regions to the field of view range of the single writing.

d的乘积。 Specifically, the total length of the remaining sub-regions is taken as the width of the field of view for single writing. Since the writing in the y-direction is mainly realized by moving the motorized platform, the height of the single field of view is usually the height of the writing structure itself, while the height of the single field of view is usually the height of the writing structure itself. Width Due to the limitation of the effective area of the rotating mirror, it is necessary to find an appropriate width. For large-area writing, it is usually necessary to use multiple monoscopic splicing to achieve splicing. The total length of the remaining sub-regions is the number and spacing of the remaining sub-regions.

product of d.

In the specific implementation of step S14, according to the single writing field of view range, the file to be written is divided to obtain at least one sub-file;

Specifically, the file to be written can be JPG, BMP, PNG, TIFF, GDSII, etc. The file to be written is parsed into a data matrix according to the expected size, pixel size, etc., and the data matrix is divided according to the field of view of a single writing to generate at least a subfile.

In the specific implementation of step S15, gray-scale compensation and correction are performed on the sub-file to obtain a writing data file;

Specifically, as shown in Figure 5, this step may include the following sub-steps:

Step S51: respectively calculating the difference between the optical power value of the remaining sub-regions and the maximum optical power value in the remaining sub-regions;

。 Specifically, the difference between the optical power value of the remaining sub-regions and the maximum optical power in the remaining sub-regions is calculated to obtain

.

Step S52: Convert the difference into a grayscale difference;

转化为灰度差

，并记录信息。 Specifically, the optical power difference

Convert to grayscale difference

, and record the information.

The fitting relationship between the writing optical power and the gray value is:

为刻写系统最大输出功率，

为测试中能刻写出的最小刻写功率，r 为指数，x为灰度像素值。in

In order to write the maximum output power of the system,

is the minimum writing power that can be written in the test, r is the index, and x is the grayscale pixel value.

Step S53: subtracting the pixel value of each row in the sub-file from the grayscale difference one by one to obtain the written grayscale information;

相减，结果为刻写灰度信息。对刻写数据进行灰度补 偿矫正可以使每个点的光功率尽可能的相同，最终的刻写出的效果更加均匀。 Specifically, the pixel values of each row of data in the single writing field of view are respectively

Subtraction, the result is written grayscale information. The grayscale compensation and correction of the written data can make the optical power of each point as the same as possible, and the final written effect is more uniform.

Step S54: if the number of the sub-files is greater than or equal to 2, perform secondary grayscale compensation and correction on the grayscale at the splicing between the written grayscale information to obtain a written data file;

Specifically, if the number of the sub-files is greater than or equal to 2, there is a splicing point between the sub-files, and it is necessary to perform secondary grayscale compensation correction on the gray level of the splicing point, so as to make the splicing point more smooth and complete. In one embodiment , the fitting algorithm is used to perform secondary grayscale correction on the splicing point, and the fitting algorithm of the secondary grayscale correction is in the formula

为灰度像素值，

为 拟合后的像素值，其中

。 where dist is the current splicing position, L is the splicing size, r is the function index,

is the grayscale pixel value,

is the fitted pixel value, where

.

Among them, formula (1) is used for the right and lower edges of the monoscopic field of view involved in splicing, and formula (2) is used for the left and upper edge positions. area, the data in this area needs to be processed, and no data processing is performed on the repeated areas located on the right side of the upper edge of the monoscopic splicing and the left side of the upper side edge.

Specifically, in the case of multiple sub-files, by performing secondary grayscale correction on the edge data at the splicing location, the obvious splicing traces can be resolved to a certain extent, so that the writing effect at the splicing location is smoother and more uniform.

In the specific implementation of step S16, according to the deflection angle of the writing direction, coordinate transformation is performed on the line initial position coordinates of each writing data file;

Specifically, as shown in Figure 6, this step may include the following sub-steps:

Step S61: obtaining the first angle between the horizontal direction of the electric platform and the scanning direction and the second angle between the scanning direction and the combined speed direction of the moving speed and the scanning speed of the electric platform;

。 Specifically, the angle between the horizontal direction of the electric platform and the scanning direction is α, and the angle between the scanning direction and the direction of the combined speed of the moving speed of the electric platform and the scanning speed

.

Step S62: adding the first included angle and the second included angle to obtain the deflection angle of the writing direction;

Specifically, the deflection angle θ=α+β in the writing direction. Since the writing direction is inconsistent with the ideal writing direction, there is a certain angular deviation. Therefore, directly using the position coordinates in the file to write directly will lead to a poor actual writing effect. Although the horizontal coordinates between lines are the same, it is still correct. Therefore, the angle is very important for the subsequent steps, and the coordinate transformation of the coordinate position using this angle can solve the above problems.

Step S63: According to the deflection angle, coordinate transformation is performed on the line initial position coordinates of each writing data file.

Specifically, the formula for coordinate transformation is:

,

为行初始位置的原始坐标，

,

为坐标系转换后的 行初始位置的坐标。 where is

,

is the original coordinate of the initial position of the row,

,

It is the coordinate of the initial position of the row after the coordinate system transformation.

FIG. 7 is a schematic diagram of large-area inscription with step-by-step movement of an electric platform according to an exemplary embodiment, wherein (a) in FIG. 7 is a schematic diagram of inscription under ideal conditions, and (b) in FIG. 7 is a schematic diagram of inscription Schematic diagram of writing without coordinate transformation according to the above formula. Figure (c) in Figure 7 is a schematic diagram of writing using the above formula for coordinate transformation. It is assumed that the angle between the electric platform and the beam is α, because the control is performed after the line is written. The electric platform moves to the writing position of the next line, that is, the speed of the electric platform is 0 when scanning each line, and the declination angle between the actual movement direction and the scanning direction is 0, that is, the deflection angle is α, and the picture (a) in Figure 7 is the ideal condition for writing. The effect of , ideally there is no deflection angle error. Figure (c) in Figure 7 is a schematic diagram of the method designed by the present invention. Compared with Figure 7 (b) in which the formula is not used, the proposed The method can solve the difference in writing effect caused by the angle error between the electric platform and the scanning direction, thereby improving the writing success rate of the laser direct writing system in the large-area writing process of the step-type moving electric platform.

FIG. 8 is a schematic diagram of large-area inscription with synchronous movement of an electric platform according to an exemplary embodiment, wherein (a) in FIG. 8 is a schematic diagram of inscription under ideal conditions, and (b) in FIG. 8 is a schematic diagram of inscription without Schematic diagram of writing the coordinate transformation according to the above formula, (c) in Figure 8 is a schematic diagram of writing the coordinate transformation using the above formula, synchronous movement means that the electric platform is also moving during the scanning process, this method can improve the writing speed , assuming that the declination angle between the electric platform and the scanning direction is α, and the declination angle between the actual motion direction and the scanning direction is β, that is, the actual deflection angle of writing is α+β. Figure (a) in Figure 8 shows the effect of writing under ideal conditions. In this case, there is no deflection angle error. Figure (c) in Figure 8 is a schematic diagram of the method designed by the present invention. When there is an angle error in the scanning direction, the writing effect is different, thereby improving the writing success rate of the laser direct writing system in the large-area writing process of the synchronous mobile electric platform.

In the specific implementation of step S17, according to the transformed row initial position coordinates and the fitting relationship, according to the fitting relationship between the optical power and the AOM input voltage, use a mirror-based laser direct writing system to write;

和

之 间的输入电压与光功率之间为线性关系，同时因为光刻胶的特性是与光功率直接相关而并 非AOM输入电压，而转镜系统的激光控制往往通过AOM输入电压来完成，因此需要使用步骤 S11构建出的两者之间的关系可以更好的控制转镜系统更加精准的刻写，在解析刻写数据 时，将数据中的灰度信息转换为光功率，根据光功率与AOM输入电压拟合关系计算出AOM输 入电压值，从而得到AOM输入电压的序列，进而控制转镜装置完成刻写。 Specifically, the rotating mirror is used as the scanning module, and the writing material is written on the writing material by moving the electric platform, and the writing material is photoresist, and the substrate is glass or silicon. All writing is finely controlled by the optical power. According to the fitting relationship between the optical power and the input voltage of the acousto-optic modulator, since the voltage input by the AOM and the optical power of the laser are not a simple linear optical system, the Shrinking the step value when sampling can be approximated as

and

There is a linear relationship between the input voltage and the optical power. At the same time, because the characteristics of the photoresist are directly related to the optical power rather than the AOM input voltage, the laser control of the rotating mirror system is often completed by the AOM input voltage, so it is necessary to Using the relationship between the two constructed in step S11 can better control the rotating mirror system to write more accurately. When parsing and writing data, the grayscale information in the data is converted into optical power, according to the optical power and AOM input voltage. The fitting relationship calculates the AOM input voltage value, thereby obtaining the sequence of the AOM input voltage, and then controls the rotating mirror device to complete the writing.

Corresponding to the foregoing embodiments of the writing method of the laser direct writing system based on the rotating mirror, the present application also provides an embodiment of the writing device of the laser direct writing system based on the rotating mirror.

FIG. 9 is a block diagram of a writing device of a mirror-based laser direct writing system according to an exemplary embodiment. Referring to Figure 9, the device is applied to a mirror-based laser direct writing system, and may include:

a building block 21 for building a fitting relationship between the optical power and the input voltage of the acousto-optic modulator;

The acquisition module 22 is used to acquire the optical power distribution in the effective area of the mirror scanning;

The determining module 23 is used to determine the field of view range of single writing according to the predetermined writing optical power and the distribution of the optical power;

The segmentation module 24 is used for segmenting the to-be-written file according to the single writing field of view range to obtain at least one sub-file;

The grayscale compensation and correction module 25 is used for performing grayscale compensation and correction on the sub-file to obtain a written data file;

The coordinate transformation module 26 is used to carry out coordinate transformation to the initial position coordinates of the lines of each writing data file according to the deflection angle of the writing direction;

The writing module 27 is used for writing by using a laser direct writing system based on a rotating mirror according to the transformed initial position coordinates of the row and the fitting relationship.

Regarding the apparatus in the above-mentioned embodiment, the specific manner in which each module performs the operation has been described in detail in the embodiment of the method, and will not be described in detail here.

As for the apparatus embodiments, since they basically correspond to the method embodiments, reference may be made to the partial descriptions of the method embodiments for related parts. The device embodiments described above are only illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in One place, or it can be distributed over multiple network elements. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of the present application. Those of ordinary skill in the art can understand and implement it without creative effort.

Correspondingly, the present application also provides an electronic device, comprising: one or more processors; a memory for storing one or more programs; when the one or more programs are executed by the one or more processors , so that the one or more processors implement the above-mentioned writing method of the laser direct writing system based on the rotating mirror. As shown in FIG. 10 , it is a hardware structure diagram of any device with data processing capability where the writing method of a mirror-based laser direct writing system provided by an embodiment of the present invention is located, except for the processor shown in FIG. 10 , In addition to the memory and the network interface, any device with data processing capability where the apparatus in the embodiment is located may generally include other hardware according to the actual function of any device with data processing capability, which will not be repeated here.

Correspondingly, the present application also provides a computer-readable storage medium on which computer instructions are stored, characterized in that, when the instructions are executed by a processor, the above-mentioned writing method of the laser direct writing system based on a rotating mirror is implemented. The computer-readable storage medium may be an internal storage unit of any device with data processing capability described in any of the foregoing embodiments, such as a hard disk or a memory. The computer-readable storage medium may also be an external storage device of the wind turbine, such as a plug-in hard disk, a smart memory card (Smart Media Card, SMC), an SD card, and a flash memory card (Flash Card) equipped on the device. Wait. Further, the computer-readable storage medium may also include both an internal storage unit of any device with data processing capability and an external storage device. The computer-readable storage medium is used to store the computer program and other programs and data required by the device with data processing capability, and can also be used to temporarily store data that has been output or will be output.

Other embodiments of the present application will readily occur to those skilled in the art upon consideration of the specification and practice of what is disclosed herein. This application is intended to cover any variations, uses or adaptations of this application that follow the general principles of this application and include common knowledge or conventional techniques in the technical field not disclosed in this application . The specification and examples are to be regarded as exemplary only, with the true scope and spirit of the application being indicated by the claims.

It is to be understood that the present application is not limited to the precise structures described above and illustrated in the accompanying drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.

Claims (10)

1. a writing method based on the laser direct writing system of rotating mirror, is characterized in that, comprises: Build a fitting relationship between the optical power and the input voltage of the acousto-optic modulator; Obtain the optical power distribution in the effective area of the mirror scanning; According to the predetermined writing optical power and the distribution of the optical power, determine the field of view for single writing; According to the single writing field of view range, the to-be-written file is divided to obtain at least one sub-file; Performing grayscale compensation and correction on the sub-file to obtain a written data file; According to the deflection angle of the writing direction, coordinate transformation is performed on the line initial position coordinates of each writing data file; According to the transformed initial position coordinates of the row and the fitting relationship, writing is performed using a mirror-based laser direct writing system. 2. The method according to claim 1, characterized in that, constructing a fitting relationship between the optical power and the input voltage of the acousto-optic modulator, comprising: Set the step value according to the input voltage range of the acousto-optic modulator; According to the step value, the input voltage is gradually increased from the lowest input voltage, and the corresponding optical power value is recorded; According to the input voltage and the corresponding optical power value, a fitting relationship between the optical power and the input voltage of the acousto-optic modulator is constructed. 3. The method according to claim 1, wherein obtaining the optical power distribution in the mirror scanning effective area, comprising: Dividing the mirror-turned scanning effective area into several sub-areas; Taking the optical power corresponding to the middle position of each sub-area as the optical power of the sub-area; Set the optical power of all sub-areas to the optical power distribution in the effective area of mirror scanning. 4. The method according to claim 1, wherein, according to the predetermined writing optical power and the optical power distribution, determining a single writing field of view range, comprising: According to the optical power distribution, delete the sub-regions whose optical power is less than the predetermined writing optical power; The total length of the remaining sub-regions is set as the single-shot field of view range. 5. The method according to claim 4, characterized in that, performing grayscale compensation and correction on the sub-file to obtain a writing data file, comprising: respectively calculating the difference between the optical power value of the remaining sub-regions and the maximum optical power value in the remaining sub-regions; converting the difference into a grayscale difference; The pixel value of each row in the sub-file is subtracted from the grayscale difference one by one to obtain writing grayscale information; If the number of the sub-files is greater than or equal to 2, secondary grayscale compensation and correction is performed on the grayscale at the splicing between the written grayscale information to obtain a written data file. 6. The method according to claim 1, wherein, according to the deflection angle of the writing direction, coordinate transformation is carried out to the row initial position coordinates of each writing data file, comprising: Obtain the first included angle between the horizontal direction of the electric platform and the scanning direction and the second included angle between the scanning direction and the combined speed direction of the moving speed of the electric platform and the scanning speed; adding the first included angle and the second included angle to obtain the deflection angle of the writing direction; According to the deflection angle, coordinate transformation is performed on the line initial position coordinates of each writing data file. 7. A writing device based on a mirror-based laser direct writing system, characterized in that, comprising: Building blocks for constructing a fitted relationship between the optical power and the input voltage of the acousto-optic modulator; The acquisition module is used to acquire the optical power distribution in the effective area of the mirror scanning; a determination module, configured to determine the field of view range for single writing according to the predetermined writing optical power and the distribution of the optical power; a segmentation module, configured to segment the to-be-written file according to the single writing field of view range to obtain at least one sub-file; A grayscale compensation and correction module for performing grayscale compensation and correction on the sub-file to obtain a written data file; The coordinate transformation module is used to perform coordinate transformation on the initial position coordinates of the lines of each writing data file according to the deflection angle of the writing direction; The writing module is used for writing by using a laser direct writing system based on a rotating mirror according to the transformed initial position coordinates of the row and the fitting relationship. 8. The device according to claim 7, characterized in that, according to the predetermined writing optical power and the optical power distribution, determining a single writing field of view range, comprising: According to the optical power distribution, delete the sub-regions whose optical power is less than the predetermined writing optical power; The total length of the remaining sub-regions is set as the single-shot field of view range. 9. An electronic device, characterized in that, comprising: one or more processors; memory for storing one or more programs; The one or more programs, when executed by the one or more processors, cause the one or more processors to implement the method of any one of claims 1-6. 10. A computer-readable storage medium on which computer instructions are stored, wherein the instructions, when executed by a processor, implement the steps of the method according to any one of claims 1-6.

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