CN114415480B - Light source generating device of photoetching machine - Google Patents
Light source generating device of photoetching machine Download PDFInfo
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- CN114415480B CN114415480B CN202210218521.9A CN202210218521A CN114415480B CN 114415480 B CN114415480 B CN 114415480B CN 202210218521 A CN202210218521 A CN 202210218521A CN 114415480 B CN114415480 B CN 114415480B
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- 238000001259 photo etching Methods 0.000 title claims abstract description 13
- 238000001816 cooling Methods 0.000 claims abstract description 47
- 230000007246 mechanism Effects 0.000 claims abstract description 36
- 230000005494 condensation Effects 0.000 claims description 17
- 238000009833 condensation Methods 0.000 claims description 17
- 238000001459 lithography Methods 0.000 claims description 13
- 230000010354 integration Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004134 energy conservation Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
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- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses a light source generating device of a photoetching machine, which comprises a mounting plate, a lens cone, a light source box and a cooling box, wherein the lens cone is arranged on the mounting plate; the bottom of the base is connected with the mounting plate through the adjusting mechanism, and mounting holes matched with the lens cone are formed in the bottom surface of the mounting plate at equal intervals; a power adjusting part is arranged on the first connecting shaft, a rheostat is arranged on the inner wall of a lamp source box of the power adjusting part, a sleeve is sleeved on the first connecting shaft in a threaded manner, a moving plate is mounted on the sleeve, and the top of the moving plate is connected with a slide sheet of the rheostat through a connecting block; a cooling adjusting part is arranged on the second connecting shaft, an inlet of a cooling box of the cooling adjusting part is connected with a connecting hose, and a flow limiting mechanism is arranged on the connecting hose; the invention realizes the integration of the adjusting mechanism of the lens cone, the power adjusting piece of the laser source and the cooling adjusting piece of the laser source, realizes the mutual matching linkage of the adjustment of the focal length, the power and the cooling, greatly improves the use diversity of the light source generating device and greatly prolongs the service life of the light source generating device.
Description
Technical Field
The invention belongs to the technical field of photoetching machines, and particularly relates to a photoetching machine light source generating device.
Background
Chinese patent CN102289155A discloses a lithography machine based on uv LED light source, which comprises a uv LED light source optical system for realizing uniform irradiation exposure of light beam, a light emitting controller for controlling exposure time and relative irradiation intensity, a light barrier, a lithography mask plate and a lithography substrate, and the lithography machine can adopt contact or proximity exposure;
in the prior art, when chips with different specifications are produced, the condensation focal length of a laser needs to be adjusted, the higher the laser lithography precision of a laser source is, the smaller the diameter of a condensation point of laser is needed to be, and when the condensation point of the laser is smaller, the larger the energy is, the substrate is very easy to burn out; and when the light source of the photoetching machine is cooled, the function is simple, and the energy conservation and the environmental protection are not enough.
Disclosure of Invention
The invention aims to solve the problems of the background art, and provides a light source generating device of a lithography machine, which integrates an adjusting mechanism of a lens barrel, a power adjusting piece of a laser source and a cooling adjusting piece of the laser source, realizes the mutual matching and linkage of adjustment of focal length, power and cooling, greatly improves the use diversity of the light source generating device and greatly prolongs the service life of the light source generating device.
The purpose of the invention can be realized by the following technical scheme:
a light source generating device of a photoetching machine comprises a mounting plate, a lens cone, a light source box and a cooling box;
the bottom of the base is connected with the mounting plate through the adjusting mechanism, mounting holes matched with the lens cone are formed in the bottom surface of the mounting plate at equal intervals, the base is provided with a light source box and a cooling box, and the light source box is provided with a laser source matched with the lens cone;
the fixed cylinder of the adjusting mechanism is arranged at the four corners of the base, a sliding column is arranged in the fixed cylinder, the bottom end of the sliding column is connected with the mounting plate, the sliding column is connected with the output end of the driving mechanism, and the sliding column is driven to move up and down along the fixed cylinder by starting the driving mechanism.
As a further scheme of the invention: the lamp source box is positioned on one side close to the mounting plate, and the cooling box is arranged on the lamp source box.
As a further scheme of the invention: the output end of a driving motor of the driving mechanism is connected with the first connecting shaft, the two sides of the first connecting shaft are connected with the second connecting shaft through the gear boxes respectively, gears are sleeved on the two sides of the second connecting shaft respectively, and racks meshed with the gears are arranged on the side walls of the sliding columns.
As a further scheme of the invention: the fixed cylinder is correspondingly provided with a rectangular groove body matched with the rack.
As a further scheme of the invention: the power adjusting part is arranged on the first connecting shaft, the rheostat is arranged on the inner wall of the lamp source box of the power adjusting part, the sleeve is sleeved on the first connecting shaft in a threaded mode, the moving plate is installed on the sleeve, and the top of the moving plate is connected with the sliding piece of the rheostat through the connecting block.
As a further scheme of the invention: a sliding groove is formed in one side of the lamp source box, and the rheostat is located at the sliding groove.
As a further scheme of the invention: and a cooling adjusting part is arranged on the second connecting shaft, an inlet of a cooling box of the cooling adjusting part is connected with a connecting hose, and a flow limiting mechanism is arranged on the connecting hose.
As a further scheme of the invention: two trapezoidal plates are symmetrically sleeved on a connecting hose of the flow limiting mechanism, a chute is arranged at the top of each trapezoidal plate, rollers are connected in the chute through rollers, the rollers are connected with the bottom end of an elastic telescopic pipe, the top end of the elastic telescopic pipe is connected with a threaded sleeve, and threads matched with the threaded sleeve are arranged on a second connecting shaft.
As a further scheme of the invention: the two threaded sleeves are threadedly connected to the second connecting shaft in opposite ways.
As a further scheme of the invention: the cooling box is internally provided with a square condensation cavity, the inlet of the connecting hose is connected with a condensation inlet pipe, and the other side of the cooling box is provided with a condensation outlet pipe.
Compared with the prior art, the invention has the beneficial effects that:
the adjustment mechanism is matched with the plurality of lens cones on the mounting plate, so that the distance between the plurality of condensing lenses and the laser light source can be adjusted simultaneously, and the size of a condensing point can be adjusted;
the power adjusting piece works along with the operation of the adjusting mechanism of the lens cone, when the lens cone adjusts the light-gathering point of the laser, the energy is larger, the resistance of the rheostat is correspondingly increased, so that the power of the laser source is reduced, and the problem that when the lens cone is used, the photoetching precision of the laser source is adjusted according to actual requirements, the higher the laser photoetching precision of the laser source is, the smaller the diameter of the light-gathering point of the required laser is, and when the light-gathering point of the laser is smaller, the larger the energy is, the substrate is very easy to burn out is effectively solved;
according to the cooling adjusting piece, when the power of the laser source is reduced, the connecting pipe for conveying the condensate is extruded, so that the conveying speed of the condensate is controlled, the flow speed of the condensate is reduced, and when the power of the laser source is increased, the flow speed of the condensate is correspondingly increased, so that the conveying speed of the condensate is effectively controlled according to the power of the laser source, and the cooling speed of the light source generating device is greatly increased; and has the advantages of more energy conservation and environmental protection.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a side view of the present invention.
Fig. 3 is a schematic perspective view of the present invention.
Fig. 4 is a schematic structural view of the driving mechanism of the present invention.
Fig. 5 is a schematic structural diagram of an adjusting mechanism in the present invention.
FIG. 6 is a schematic structural view of the connection between the fixed cylinder and the sliding column according to the present invention.
Fig. 7 is a schematic view of the structure of the cooling adjustment member of the present invention.
In the figure: 1. mounting a plate; 2. a lens barrel; 3. a light source box; 4. a cooling tank; 5. a drive motor; 6. a gear case; 7. a first connecting shaft; 8. a sleeve; 9. moving the plate; 10. a chute; 11. a varistor; 12. a second connecting shaft; 13. a condensation pipe; 14. a fixed cylinder; 15. a sliding post; 16. a base; 17. a thread; 18. a gear; 19. a rack; 20. a threaded bushing; 21. an elastic telescopic pipe; 22. a roller; 23. a trapezoidal plate; 24. a chute; 25. a connecting hose; 26. and condensing into a pipe.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1 and 2, the present invention is a light source generating device for a lithography machine, which includes a mounting plate 1, a lens barrel 2, a light source box 3, and a cooling box 4;
the bottom of a base 16 is connected with a mounting plate 1 through an adjusting mechanism, mounting holes matched with a lens barrel 2 are formed in the bottom surface of the mounting plate 1 at equal intervals, a light source box 3 and a cooling box 4 are mounted on the base 16, the light source box 3 is located on one side close to the mounting plate 1, a laser source matched with the lens barrel 2 is arranged on the light source box 3, the cooling box 4 is mounted on the light source box 3, and the lens barrel 2 moves up and down along the light source box 3;
referring to fig. 4, 5 and 6, the base 16 has a square structure; the adjusting mechanism comprises a driving mechanism, a fixed cylinder 14 and a sliding column 15, the fixed cylinder 14 is arranged at the four corners of the base 16, and a sliding column 15 is arranged in the fixed cylinder 14, the bottom end of the sliding column 15 is connected with the mounting plate 1, the sliding column 15 is connected with the output end of the driving mechanism, the sliding column 15 is driven to move up and down along the fixed cylinder 14 by starting a driving mechanism, the driving mechanism comprises a driving motor 5, a gear box 6, a first connecting shaft 7, a second connecting shaft 12, a gear 18 and a rack 19, the driving motor 5 is arranged on one side of a base 16, the output end of the driving motor 5 is connected with the first connecting shaft 7, two sides of the first connecting shaft 7 are respectively connected with the second connecting shaft 12 through the gear box 6, two sides of the second connecting shaft 12 are respectively sleeved with the gears 18, the side wall of the sliding column 15 is provided with the rack 19 meshed with the gears 18, and the fixed cylinder 14 is correspondingly provided with the rectangular groove body matched with the rack 19;
when the adjusting mechanism works, the driving motor 5 is controlled to work to drive the first connecting shaft 7 to rotate, the first connecting shaft 7 drives the second connecting shaft 12 to rotate through a gear set in the gear box 6, so that the gear 18 on the second connecting shaft 12 rotates, and the sliding column 15 is driven to move up and down along the fixed cylinder 14 through the meshing action of the gear 18 and the rack 19, so that the lens barrels 2 on the mounting plate 1 can also move up and down along with the lifting, and the distance between the lens barrels 2 and the laser source can be adjusted, therefore, the adjusting mechanism and the plurality of lens barrels 2 on the mounting plate 1 are matched, the distance between the plurality of condensing lenses and the laser source can be adjusted at the same time, and the size of a condensing point can be adjusted;
referring to fig. 3, a power adjusting part is arranged on a first connecting shaft 7, the power adjusting part includes a sleeve 8, a moving plate 9, a sliding groove 10 and a rheostat 11, the rheostat 11 is arranged on the inner wall of the lamp source box 3, the sliding groove 10 is arranged on one side of the lamp source box 3, the rheostat 11 is located at the sliding groove 10, the first connecting shaft 7 is a lead screw, the sleeve 8 is sleeved on the first connecting shaft 7 in a threaded manner, the moving plate 9 is mounted on the sleeve 8, and the top of the moving plate 9 is connected with a sliding piece of the rheostat 11 through a connecting block;
the connecting block is a square block, is positioned in the sliding groove 10 of the lamp source box 3 and is in sliding connection with the side wall of the lamp source box 3;
when the driving motor 5 works to drive the first connecting shaft 7 to rotate, the moving plate 9 horizontally moves along the first connecting shaft 7 through the sleeve 8, the moving plate 9 drives the sliding sheet of the rheostat 11 to move through the connecting block, so that the resistance of the rheostat 11 correspondingly changes, therefore, the power adjusting piece can work along with the work of the adjusting mechanism of the lens barrel 2, when the lens barrel 2 adjusts the light-gathering point of laser, the energy of the laser is larger, the resistance of the rheostat 11 is correspondingly larger at the moment, the power of the laser source is reduced, the problem that when the laser source is used, the photoetching precision of the laser source is adjusted according to actual requirements can be effectively avoided, when the laser photoetching precision of the laser source is higher, the diameter of the light-gathering point of the laser is smaller, and when the light-gathering point of the laser is smaller, the energy of the laser is larger, the substrate is easily burned;
referring to fig. 7, a cooling adjustment element is disposed on one of the second connecting shafts 12, the cooling adjustment element includes a condensation outlet pipe 13, a connecting hose 25, and a condensation inlet pipe 26, an inlet of the cooling box 4 is connected to the connecting hose 25, a flow limiting mechanism is disposed on the connecting hose 25, the flow limiting mechanism includes a thread 17, a threaded sleeve 20, an elastic telescopic pipe 21, a roller 22, a trapezoidal plate 23, and a chute 24, two trapezoidal plates 23 are symmetrically sleeved on the connecting hose 25, a chute 24 is disposed at the top of the trapezoidal plate 23, the roller 22 is connected to the chute 24 through a roller shaft, the roller shaft is connected to the bottom end of the elastic telescopic pipe 21, the top end of the elastic telescopic pipe 21 is connected to the threaded sleeve 20, and the second connecting shaft 12 is provided with a thread 17 adapted to the threaded sleeve 20;
a square condensation cavity is arranged in the cooling box 4, an inlet of the connecting hose 25 is connected with a condensation inlet pipe 26, the other side of the cooling box 4 is provided with a condensation outlet pipe 13, and condensed fluid can be circularly conveyed into the cooling box 4 through the arranged condensation inlet pipe 26 and condensation outlet pipe 13 to circularly cool elements in the lamp source box 3; the two threaded sleeves 20 are connected with the threads 17 of the second connecting shaft 12 in an opposite manner;
when the device works, when the driving motor 5 drives the first connecting shaft 7 to rotate, the second connecting shaft 12 is driven to rotate through the gear box 6, the second connecting shaft 12 enables the two threaded sleeves 20 to move close to each other through the arranged threads 17, the threaded sleeves 20 drive the roller shaft to move through the elastic telescopic pipes 21, the roller shaft moves along the inclined groove 24, so that the roller 22 is driven to move obliquely along the trapezoidal plate 23, the roller 22 has different compression degrees on the connecting hose 25 at different positions, so that the flow rate of condensate in the connecting hose 25 is changed, namely when the roller 22 is positioned above the inclined groove 24, the compression on the connecting hose 25 is small, at the moment, the flow rate of the condensate is high, the cooling and heat dissipation efficiency on the lamp source box 3 is high, the device is suitable for the condition that the power of a laser source is increased, and when the roller 22 is positioned below the inclined groove 24, the connecting hose 25 is compressed greatly, at the moment, the flow rate of the condensate is low, the cooling and heat dissipation efficiency of the lamp source box 3 is low, and the method is suitable for the condition that the power of the laser source is reduced;
therefore, when the power of the laser source is reduced, the cooling adjusting part extrudes the connecting pipe 25 for conveying the condensate, so that the conveying speed of the condensate is controlled, the flow speed of the condensate is reduced, and when the power of the laser source is increased, the flow speed of the condensate is correspondingly increased, so that the conveying speed of the condensate is effectively controlled according to the power of the laser source, and the cooling speed of the light source generating device is greatly increased; and has the advantages of more energy saving and environmental protection;
in conclusion, the light source generating device integrates the adjusting mechanism of the lens barrel 2, the power adjusting part of the laser source and the cooling adjusting part of the laser source, realizes the adjustment and mutual cooperation linkage of the focal length, the power and the cooling, greatly improves the use diversity of the light source generating device and greatly prolongs the service life of the light source generating device.
Example 2
A working method of a light source generating device of a photoetching machine comprises the following steps:
step 1: the driving motor 5 is controlled to work to drive the first connecting shaft 7 to rotate, the first connecting shaft 7 drives the second connecting shaft 12 to rotate through a gear set in the gear box 6, so that a gear 18 on the second connecting shaft 12 rotates, and the sliding column 15 is driven to move up and down along the fixed cylinder 14 through the meshing action of the gear 18 and a rack 19, so that the lens cone 2 on the mounting plate 1 can also move up and down along with the lifting, and the distance between the lens cone 2 and the laser source can be adjusted;
step 2: when the first connecting shaft 7 rotates, the moving plate 9 horizontally moves along the first connecting shaft 7 through the sleeve 8, and the moving plate 9 drives the sliding sheet of the rheostat 11 to move through the connecting block, so that the resistance of the rheostat 11 correspondingly changes, and the power of the laser source correspondingly changes;
and step 3: when the first connecting shaft 7 rotates, the second connecting shaft 12 is driven to rotate through the gear box 6, the second connecting shaft 12 is driven to move through the arranged threads 17, the two threaded sleeves 20 are enabled to move close to each other, the threaded sleeves 20 drive the roller shafts to move through the elastic telescopic pipes 21, the roller shafts move along the inclined grooves 24, the rollers 22 are driven to move obliquely along the trapezoidal plates 23, the rollers 22 are arranged at different positions and are different in compression degree of the connecting hoses 25, so that the flow rate of condensate in the connecting hoses 25 is changed, and the laser source device is suitable for laser sources with different powers.
The working principle of the invention is as follows: the driving motor 5 works to drive the adjusting mechanism to work, the distance between the plurality of condensing lenses and the laser light source is adjusted, the size of a condensing point can be adjusted, and when the condensing point is adjusted, the power adjusting piece also works to change the power of the laser light source and meet the requirements of condensing points with different sizes; the cooling adjusting part also works along with the cooling adjusting part to adjust the flow rate of the condensate liquid so as to meet the working requirements of the laser source under the conditions of different powers; therefore, the light source generating device realizes the adjustment mechanism of the lens barrel 2, the power adjustment piece of the laser source and the cooling adjustment piece of the laser source in a whole, realizes the adjustment and mutual matching linkage of the focal length, the power and the cooling, greatly improves the use diversity of the light source generating device and greatly prolongs the service life of the light source generating device.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (8)
1. A light source generating device of a photoetching machine is characterized by comprising a mounting plate (1), a lens cone (2), a light source box (3) and a cooling box (4);
the bottom of the base (16) is connected with the mounting plate (1) through an adjusting mechanism, mounting holes matched with the lens cone (2) are formed in the bottom surface of the mounting plate (1) at equal intervals, the base (16) is provided with a light source box (3) and a cooling box (4), and the light source box (3) is provided with a laser source matched with the lens cone (2);
the fixed cylinder (14) of the adjusting mechanism is arranged at the four corners of the base (16), a sliding column (15) is arranged in the fixed cylinder (14), the bottom end of the sliding column (15) is connected with the mounting plate (1), the sliding column (15) is connected with the output end of the driving mechanism, and the driving mechanism is started to drive the sliding column (15) to move up and down along the fixed cylinder (14);
the output end of a driving motor (5) of the driving mechanism is connected with a first connecting shaft (7), two sides of the first connecting shaft (7) are respectively connected with a second connecting shaft (12) through a gear box (6), two sides of the second connecting shaft (12) are respectively sleeved with a gear (18), and a rack (19) meshed with the gear (18) is arranged on the side wall of a sliding column (15);
the power adjusting part is arranged on the first connecting shaft (7), the rheostat (11) is arranged on the inner wall of the lamp source box (3) of the power adjusting part, a sleeve (8) is sleeved on the first connecting shaft (7) in a threaded mode, the movable plate (9) is installed on the sleeve (8), and the top of the movable plate (9) is connected with the sliding piece of the rheostat (11) through the connecting block.
2. A light source generating device for a lithography machine according to claim 1, characterized in that the lamp source box (3) is located on the side close to the mounting plate (1), and the cooling box (4) is mounted on the lamp source box (3).
3. The light source generating device of the lithography machine according to claim 2, characterized in that the fixed cylinder (14) is correspondingly provided with a rectangular groove body matched with the rack (19).
4. A light source generating device for a lithography machine according to claim 3, wherein the light source box (3) has a slot (10) formed on one side thereof, and the varistor (11) is located at the slot (10).
5. A light source generating device for a lithography machine according to claim 4, characterized in that the second connecting shaft (12) is provided with a cooling adjustment member, the inlet of the cooling tank (4) of the cooling adjustment member is connected with a connecting hose (25), and the connecting hose (25) is provided with a flow restriction mechanism.
6. The light source generating device of the lithography machine according to claim 5, characterized in that two trapezoidal plates (23) are symmetrically sleeved on the connecting hose (25) of the current limiting mechanism, the top of each trapezoidal plate (23) is provided with a chute (24), the inside of each chute (24) is connected with a roller (22) through a roller shaft, the roller shafts are connected with the bottom ends of the elastic telescopic pipes (21), the top ends of the elastic telescopic pipes (21) are connected with the threaded sleeves (20), and the second connecting shaft (12) is provided with threads (17) matched with the threaded sleeves (20).
7. A light source generating device for a lithography machine according to claim 6, characterized in that the two threaded sleeves (20) are connected in opposite ways to the threads (17) of the second connecting shaft (12).
8. A light source generator according to claim 7, wherein the cooling box (4) is provided with a square condensation chamber, the inlet of the connection hose (25) is connected with the condensation inlet pipe (26), and the cooling box (4) is further provided with a condensation outlet pipe (13).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210218521.9A CN114415480B (en) | 2022-03-08 | 2022-03-08 | Light source generating device of photoetching machine |
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| CN202210218521.9A CN114415480B (en) | 2022-03-08 | 2022-03-08 | Light source generating device of photoetching machine |
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| CN114415480B true CN114415480B (en) | 2022-09-09 |
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| CN112130426A (en) * | 2020-10-15 | 2020-12-25 | 深圳优卫乐得科技有限公司 | A UV LED light source for solder mask exposure |
| CN213513754U (en) * | 2020-12-15 | 2021-06-22 | 通用中企照明系统（杭州）有限公司 | LED lighting lamp with focus-adjustable light source structure |
| CN214198498U (en) * | 2020-12-28 | 2021-09-14 | 广州市白云建筑设计院有限公司 | Adjustable lighting structure for building roof |
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