CN114396817B - A liquid metal heat pipe packaging device and method - Google Patents
A liquid metal heat pipe packaging device and method Download PDFInfo
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- CN114396817B CN114396817B CN202210015055.4A CN202210015055A CN114396817B CN 114396817 B CN114396817 B CN 114396817B CN 202210015055 A CN202210015055 A CN 202210015055A CN 114396817 B CN114396817 B CN 114396817B
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- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 67
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 7
- 238000003860 storage Methods 0.000 claims abstract description 34
- 239000001301 oxygen Substances 0.000 claims abstract description 24
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000007789 gas Substances 0.000 claims abstract description 15
- 239000001307 helium Substances 0.000 claims abstract description 15
- 229910052734 helium Inorganic materials 0.000 claims abstract description 15
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000011261 inert gas Substances 0.000 claims abstract description 13
- 238000005555 metalworking Methods 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 claims description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 5
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 4
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 4
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052792 caesium Inorganic materials 0.000 claims description 4
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 4
- 229910052744 lithium Inorganic materials 0.000 claims description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052753 mercury Inorganic materials 0.000 claims description 4
- 229910052700 potassium Inorganic materials 0.000 claims description 4
- 239000011591 potassium Substances 0.000 claims description 4
- 229910052701 rubidium Inorganic materials 0.000 claims description 4
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 4
- 239000011734 sodium Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 3
- 108010083687 Ion Pumps Proteins 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 3
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001819 mass spectrum Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 abstract description 6
- 238000005429 filling process Methods 0.000 abstract description 2
- 238000005538 encapsulation Methods 0.000 description 5
- 102000006391 Ion Pumps Human genes 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000009865 steel metallurgy Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0283—Means for filling or sealing heat pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Vacuum Packaging (AREA)
Abstract
本发明公开了一种液态金属热管封装装置及方法，该装置包括真空操作箱、惰性气体储藏罐、真空泵机组、液态金属储藏罐、电磁流量计、热管、水氧检测仪、氦质谱检漏仪、真空计、阀门及相关管线。真空操作箱为热管灌装提供真空环境；惰性气体储藏罐提供惰性气体；真空泵机组排除真空操作箱内气体和为热管抽真空；液态金属储藏罐储藏液态金属工质；电磁流量计计量灌装液态金属工质的质量；水氧检测仪、氦质谱检漏仪、真空计检测灌装过程中的水氧含量、泄漏率、真空度。本装置结构简单、操作简便、液态金属灌装质量可控、热管灌装真空度高。
The invention discloses a liquid metal heat pipe packaging device and method. The device includes a vacuum operation box, an inert gas storage tank, a vacuum pump unit, a liquid metal storage tank, an electromagnetic flowmeter, a heat pipe, a water and oxygen detector, and a helium mass spectrometer leak detector , vacuum gauges, valves and related pipelines. The vacuum operation box provides a vacuum environment for heat pipe filling; the inert gas storage tank provides inert gas; the vacuum pump unit removes the gas in the vacuum operation box and evacuates the heat pipe; the liquid metal storage tank stores liquid metal working fluid; the electromagnetic flowmeter measures and fills the liquid The quality of metal working fluid; water and oxygen detector, helium mass spectrometer leak detector, vacuum gauge to detect water and oxygen content, leakage rate and vacuum degree during filling process. The device has the advantages of simple structure, convenient operation, controllable liquid metal filling quality, and high vacuum degree of heat pipe filling.
Description
技术领域technical field
本发明涉及相变换热设备技术领域，具体涉及一种高温热管工质灌装装置及方法。The invention relates to the technical field of phase-change heat equipment, in particular to a high-temperature heat pipe working fluid filling device and method.
背景技术Background technique
高温热管通常采用液态金属作为工作介质，由于液态金属熔点和沸点较高，液态金属热管可应用核反应堆系统、航空航天、钢铁冶金等领域。由于液体金属性质较为活泼，极易与空气发生反应，生成的氧化物会堵塞吸液芯孔隙、影响热管工作性能。同时由于液态金属工作蒸气压较低，不凝气体的存在会极大的影响热管的等温性能和热传输能力。本设计针对高温热管灌装过程，提出了一种高温热管工质灌装装置，为高温热管的高质量灌装提供参考。High-temperature heat pipes usually use liquid metal as the working medium. Due to the high melting point and boiling point of liquid metal, liquid metal heat pipes can be used in nuclear reactor systems, aerospace, iron and steel metallurgy and other fields. Due to the relatively active nature of liquid metal, it is very easy to react with air, and the oxides generated will block the pores of the liquid-absorbing core and affect the working performance of the heat pipe. At the same time, due to the low working vapor pressure of liquid metal, the existence of non-condensable gas will greatly affect the isothermal performance and heat transfer capacity of the heat pipe. This design aims at the high-temperature heat pipe filling process, and proposes a high-temperature heat pipe working medium filling device, which provides a reference for high-quality filling of high-temperature heat pipes.
发明内容Contents of the invention
为实现液态金属热管的高质量封装，本发明提供一种液态金属热管封装装置及方法，本发明装置结构简化，可应用于液态金属热管封装。In order to realize high-quality encapsulation of liquid metal heat pipes, the present invention provides a liquid metal heat pipe encapsulation device and method. The device of the present invention has a simplified structure and can be applied to liquid metal heat pipe encapsulation.
为了达到上述目的，本发明采用如下技术方案：In order to achieve the above object, the present invention adopts following technical scheme:
一种高温热管工质灌装装置及方法，包括真空操作箱100、惰性气体储藏罐200、真空泵机组300、液态金属储藏罐400、连接接头500、热管600、气体进口阀201、水氧检测仪301、氦质谱检漏仪302、第一阀门310、第二阀门320、扩颈腔体311、真空计312、密封阀门313、电磁流量计401和封装阀门402；所述惰性气体储藏罐200经气体进口阀201连接至真空操作箱100底部，真空泵机组300出口连接水氧检测仪301和氦质谱检漏仪302，真空泵机组300入口管线穿入真空操作箱100上侧壁后分两路，一路通过第二阀门320连通真空操作箱100内部，另一路依次连接第一阀门310、扩颈腔体311、密封阀门313后穿出真空操作箱100底部连接连接接头500上端口，扩颈腔体311上设置真空计312；液态金属储藏罐400经电磁流量计401、封装阀门402穿出真空操作箱100底部连接连接接头500上端口，连接接头500下端口与热管600相连。A high-temperature heat pipe working medium filling device and method, including a vacuum operation box 100, an inert gas storage tank 200, a vacuum pump unit 300, a liquid metal storage tank 400, a connecting joint 500, a heat pipe 600, a gas inlet valve 201, and a water and oxygen detector 301, helium mass spectrometer leak detector 302, first valve 310, second valve 320, neck expansion cavity 311, vacuum gauge 312, sealing valve 313, electromagnetic flowmeter 401 and packaging valve 402; the inert gas storage tank 200 is The gas inlet valve 201 is connected to the bottom of the vacuum operation box 100. The outlet of the vacuum pump unit 300 is connected to the water oxygen detector 301 and the helium mass spectrometer leak detector 302. The second valve 320 is connected to the inside of the vacuum operation box 100, and the other line is connected to the first valve 310, the neck expansion cavity 311, and the sealing valve 313 in sequence, and then passes through the bottom of the vacuum operation box 100 to connect to the upper port of the connection joint 500, and the neck expansion cavity 311 A vacuum gauge 312 is arranged on the top; the liquid metal storage tank 400 passes through the electromagnetic flowmeter 401 and the packaging valve 402 to pass through the bottom of the vacuum operation box 100 to connect to the upper port of the connecting joint 500, and the lower port of the connecting joint 500 is connected to the heat pipe 600.
所述惰性气体储藏罐200内储藏气体为氮气、氦气、氖气、氩气或氙气。The gas stored in the inert gas storage tank 200 is nitrogen, helium, neon, argon or xenon.
所述真空泵机组300为多级机组，包括离子泵、分子泵、扩散泵、喷射泵、罗茨泵、旋片泵、活塞泵的一种或多种，真空度覆盖105～10-8Pa量级。The vacuum pump unit 300 is a multi-stage unit, including one or more of ion pumps, molecular pumps, diffusion pumps, jet pumps, Roots pumps, rotary vane pumps, and piston pumps, and the vacuum degree covers 10 5 ~ 10 -8 Pa order of magnitude.
所述真空计312为复合式真空计，该复合式真空计为皮拉尼真空计、电阻真空计、热偶真空计、热辐射真空计、热阴极电离真空计、冷阴极电离真空计、粘滞真空计中至少两种，真空度测量覆盖105～10-8Pa量级。The vacuum gauge 312 is a composite vacuum gauge, and the composite vacuum gauge is a Pirani vacuum gauge, a resistance vacuum gauge, a thermocouple vacuum gauge, a thermal radiation vacuum gauge, a hot cathode ionization vacuum gauge, a cold cathode ionization vacuum gauge, a viscometer There are at least two kinds of hysteresis vacuum gauges, and the vacuum degree measurement covers the magnitude of 10 5 ~ 10 -8 Pa.
所述液态金属储藏罐400内液态金属为锂、钠、钾、铷、铯或汞，液态金属储藏罐400内维持的温度使得金属为液态。The liquid metal in the liquid metal storage tank 400 is lithium, sodium, potassium, rubidium, cesium or mercury, and the temperature maintained in the liquid metal storage tank 400 makes the metal in a liquid state.
所述密封阀门313和封装阀门402为液态金属阀门，工作温度为液态金属熔点以上50℃。The sealing valve 313 and the sealing valve 402 are liquid metal valves, and the working temperature is 50° C. above the melting point of liquid metal.
所述连接接头500为真空接头，选用高真空法兰、螺纹接头或活接头，连接接头500所用垫片选用石墨垫片、环氧铜垫片或钢骨架石墨垫片。The connection joint 500 is a vacuum joint, and a high vacuum flange, threaded joint or union joint is selected. The gasket used in the connection joint 500 is a graphite gasket, epoxy copper gasket or steel skeleton graphite gasket.
所述热管600灌装前烘烤温度250℃±50℃，热管600灌装真空度为10-4Pa，水氧含量小于10-10std cc/s，泄漏率低于10-9std cc/s。The baking temperature of the heat pipe 600 before filling is 250°C±50°C, the vacuum degree of the heat pipe 600 is 10 -4 Pa, the water and oxygen content is less than 10 -10 std cc/s, and the leakage rate is less than 10 -9 std cc/s s.
和现有技术相比较，本发明具备如下优点：Compared with the prior art, the present invention has the following advantages:
本发明采用真空泵机组300仅对热管600内腔进行抽真空，避免全局抽真空泄漏点多的问题，热管600内腔体积小，可实现较高真空度；采用定量填充液态金属储藏罐400和电磁流量计401相互校核的方法，确保热管600灌装质量的定量准确；在真空操作箱100内完成工质填充，确保液态金属工质的纯度；采用惰性气体储藏罐200置换空气，避免工质氧化。The present invention adopts the vacuum pump unit 300 to only vacuumize the inner cavity of the heat pipe 600, avoiding the problem of many leakage points in the global vacuum pumping, and the inner cavity of the heat pipe 600 is small in volume and can achieve a higher vacuum degree; quantitative filling of the liquid metal storage tank 400 and electromagnetic The flow meter 401 checks each other to ensure the quantitative accuracy of the filling quality of the heat pipe 600; the working medium is filled in the vacuum operation box 100 to ensure the purity of the liquid metal working medium; the inert gas storage tank 200 is used to replace the air to avoid oxidation.
附图说明Description of drawings
图1为高温热管工质灌装装置的示意图Figure 1 is a schematic diagram of a high-temperature heat pipe working fluid filling device
具体实施方式Detailed ways
现结合实例、附图对本发明作进一步描述：Now in conjunction with example, accompanying drawing, the present invention will be further described:
如图1所示，本发明一种液态金属热管封装装置，包括真空操作箱100、惰性气体储藏罐200、真空泵机组300、液态金属储藏罐400、连接接头500、热管600、气体进口阀201、水氧检测仪301、氦质谱检漏仪302、第一阀门310、第二阀门320、扩颈腔体311、真空计312、密封阀门313、电磁流量计401和灌装阀门402。所述惰性气体储藏罐200经气体进口阀201连接至真空操作箱100底部，真空泵机组300出口连接水氧检测仪301和氦质谱检漏仪302，真空泵机组300入口管线穿入真空操作箱100上侧壁后分两路，一路通过第二阀门320连通真空操作箱100内部，另一路依次连接第一阀门310、扩颈腔体311、密封阀门313后穿出真空操作箱100底部连接连接接头500上端口，扩颈腔体311上设置真空计312；液态金属储藏罐400经电磁流量计401、灌装阀门402穿出真空操作箱100底部连接连接接头500上端口，连接接头500下端口与热管600相连。As shown in Figure 1, a liquid metal heat pipe packaging device of the present invention includes a vacuum operation box 100, an inert gas storage tank 200, a vacuum pump unit 300, a liquid metal storage tank 400, a connecting joint 500, a heat pipe 600, a gas inlet valve 201, Water and oxygen detector 301 , helium mass spectrometer leak detector 302 , first valve 310 , second valve 320 , expansion neck chamber 311 , vacuum gauge 312 , sealing valve 313 , electromagnetic flowmeter 401 and filling valve 402 . The inert gas storage tank 200 is connected to the bottom of the vacuum operation box 100 through the gas inlet valve 201, the outlet of the vacuum pump unit 300 is connected to the water oxygen detector 301 and the helium mass spectrometer leak detector 302, and the inlet pipeline of the vacuum pump unit 300 penetrates into the vacuum operation box 100 There are two roads behind the side wall, one road is connected to the inside of the vacuum operation box 100 through the second valve 320, and the other road is connected to the first valve 310, the expansion neck cavity 311, and the sealing valve 313 in sequence, and then passes through the bottom of the vacuum operation box 100 to connect to the connecting joint 500 On the upper port, a vacuum gauge 312 is set on the expansion neck cavity 311; the liquid metal storage tank 400 passes through the electromagnetic flowmeter 401 and the filling valve 402 to pass through the vacuum operation box 100. 600 connected.
作为本发明的优选实施方式，所述惰性气体储藏罐200内储藏气体为氮气、氦气、氖气、氩气或氙气。As a preferred embodiment of the present invention, the gas stored in the inert gas storage tank 200 is nitrogen, helium, neon, argon or xenon.
作为本发明的优选实施方式，所述真空泵机组300为多级机组，包括离子泵、分子泵、扩散泵、喷射泵、罗茨泵、旋片泵、活塞泵的一种或多种，真空度覆盖105～10-8Pa量级；采用多级机组，可实现大气压到10-8Pa量级真空度，避免单一真空泵抽真空范围受限的问题。As a preferred embodiment of the present invention, the vacuum pump unit 300 is a multi-stage unit, including one or more of ion pumps, molecular pumps, diffusion pumps, jet pumps, Roots pumps, rotary vane pumps, and piston pumps. Covering the level of 10 5 ~ 10 -8 Pa; the multi-stage unit can realize the vacuum degree from the atmospheric pressure to the level of 10 -8 Pa, avoiding the problem of limited vacuum range of a single vacuum pump.
作为本发明的优选实施方式，所述真空计312为复合式真空计，该复合式真空计为皮拉尼真空计、电阻真空计、热偶真空计、热辐射真空计、热阴极电离真空计、冷阴极电离真空计、粘滞真空计中至少两种，真空度测量覆盖105～10-8Pa量级。采用复合式真空计，可以实现由大气压力到10-8Pa量级真空度的测量，避免单一真空计测量范围限制，精度不足的缺点。作为本发明的优选实施方式，所述液态金属储藏罐400内液态金属为锂、钠、钾、铷、铯或汞，液态金属储藏罐400内维持的温度使得金属为液态，如液态金属为锂时，液态金属储藏罐400内维持温度为200～300℃；如液态金属为钠或钾时，液态金属储藏罐400内维持温度为150～250℃；如液态金属为铷或铯时，液态金属储藏罐400内维持温度为50～100℃；如液态金属为汞时，液态金属储藏罐400内维持温度为20～50℃。As a preferred embodiment of the present invention, the vacuum gauge 312 is a composite vacuum gauge, and the composite vacuum gauge is a Pirani vacuum gauge, a resistance vacuum gauge, a thermocouple vacuum gauge, a thermal radiation vacuum gauge, or a hot cathode ionization vacuum gauge. , cold cathode ionization vacuum gauge, and viscous vacuum gauge at least two kinds, and the vacuum degree measurement covers the magnitude of 10 5 ~ 10 -8 Pa. The combination vacuum gauge can realize the measurement of vacuum degree from atmospheric pressure to 10 -8 Pa level, avoiding the shortcomings of single vacuum gauge's measurement range limitation and insufficient accuracy. As a preferred embodiment of the present invention, the liquid metal in the liquid metal storage tank 400 is lithium, sodium, potassium, rubidium, cesium or mercury, and the temperature maintained in the liquid metal storage tank 400 makes the metal in a liquid state, for example, the liquid metal is lithium , the temperature maintained in the liquid metal storage tank 400 is 200-300°C; if the liquid metal is sodium or potassium, the temperature maintained in the liquid metal storage tank 400 is 150-250°C; if the liquid metal is rubidium or cesium, the liquid metal The temperature maintained in the storage tank 400 is 50-100°C; if the liquid metal is mercury, the temperature maintained in the liquid metal storage tank 400 is 20-50°C.
作为本发明的优选实施方式，所述密封阀门313和灌装阀门402为液态金属阀门，工作温度为液态金属熔点以上50℃。采用液态金属阀门，避免传统阀门内橡胶类物质与液态金属发生反应的缺点，提升液态金属的纯度和装置的可靠性。As a preferred embodiment of the present invention, the sealing valve 313 and the filling valve 402 are liquid metal valves, and the working temperature is 50° C. above the melting point of liquid metal. The liquid metal valve is used to avoid the disadvantage of the reaction between the rubber substance in the traditional valve and the liquid metal, and to improve the purity of the liquid metal and the reliability of the device.
作为本发明的优选实施方式，所述连接接头500为真空接头，选用高真空法兰、螺纹接头或活接头，连接接头500所用垫片选用石墨垫片、环氧铜垫片或钢骨架石墨垫片，能够避免橡胶类密封圈与液态金属发生的缺点，实现可靠密封连接。As a preferred embodiment of the present invention, the connection joint 500 is a vacuum joint, and a high vacuum flange, threaded joint or union joint is selected, and the gasket used for the connection joint 500 is a graphite gasket, epoxy copper gasket or steel skeleton graphite gasket. It can avoid the shortcomings of rubber sealing ring and liquid metal, and realize reliable sealing connection.
作为本发明的优选实施方式，所述热管600灌装前烘烤温度250℃±50℃，通过烘烤除去热管600腔体内的水蒸气，减少液态金属工质的氧化。热管600灌装真空度为10-4Pa，水氧含量小于10-10std cc/s，泄漏率低于10-9std cc/s，为热管600腔体提供较高真空度，保证热管600封装质量。As a preferred embodiment of the present invention, the baking temperature of the heat pipe 600 before filling is 250°C±50°C, and the water vapor in the cavity of the heat pipe 600 is removed by baking to reduce the oxidation of the liquid metal working fluid. The heat pipe 600 filling vacuum degree is 10 -4 Pa, the water oxygen content is less than 10 -10 std cc/s, and the leakage rate is less than 10 -9 std cc/s, which provides a higher vacuum degree for the heat pipe 600 cavity and ensures that the heat pipe 600 Package quality.
本发明的工作原理为：打开气体进口阀201和第二阀门320，开启真空泵机组300和水氧检测仪301，对真空操作箱100内部进行除水除氧操作，待水氧检测仪301显示水氧含量小于10-10std cc/s后，关闭气体进口阀201和第二阀门320，通过真空操作箱100，将定量液态金属工质装入液态金属储藏罐400并保温到液态金属工质熔点以上50℃。将热管600连接连接接头500后以250℃±50℃进行烘烤，打开第一阀门310和密封阀门313仅对热管600内腔进行抽真空，开启氦质谱检漏仪302，待水氧检测仪301显示水氧含量小于10-10std cc/s，氦质谱检漏仪302显示泄漏率低于10-9std cc/s后，关闭第一阀门310和密封阀门313。打开封装阀门402，待电磁流量计401示数与装入液态金属工质的质量一致后关闭封装阀门402。等待热管600冷却至室温后，打开第一阀门310和密封阀门313，待真空计示数低于10-4Pa后，关闭密封阀门313，对热管600的充液管进行热夹断，完成热管600的封装。The working principle of the present invention is as follows: open the gas inlet valve 201 and the second valve 320, turn on the vacuum pump unit 300 and the water oxygen detector 301, perform the operation of removing water and oxygen inside the vacuum operation box 100, and wait for the water oxygen detector 301 to display water After the oxygen content is less than 10-10 std cc/s, close the gas inlet valve 201 and the second valve 320, and put the quantitative liquid metal working medium into the liquid metal storage tank 400 through the vacuum operation box 100 and keep it warm to the melting point of the liquid metal working medium Above 50°C. Connect the heat pipe 600 to the connector 500 and bake it at 250°C±50°C, open the first valve 310 and the sealing valve 313 to only vacuum the inner cavity of the heat pipe 600, turn on the helium mass spectrometer leak detector 302, wait for the water and oxygen detector After 301 shows that the water oxygen content is less than 10 -10 std cc/s, and the helium mass spectrometer leak detector 302 shows that the leak rate is less than 10 -9 std cc/s, close the first valve 310 and the sealing valve 313 . Open the encapsulation valve 402, and close the encapsulation valve 402 after the indication of the electromagnetic flowmeter 401 is consistent with the mass of the liquid metal working fluid. After waiting for the heat pipe 600 to cool down to room temperature, open the first valve 310 and the sealing valve 313, and when the vacuum gauge reading is lower than 10 -4 Pa, close the sealing valve 313, and thermally pinch off the liquid-filled pipe of the heat pipe 600 to complete the heat pipe. 600 package.
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