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CN114335953B - A kind of transition structure and its application, double-mode resonant waveguide excitation method - Google Patents

A kind of transition structure and its application, double-mode resonant waveguide excitation method Download PDF

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CN114335953B
CN114335953B CN202210012132.0A CN202210012132A CN114335953B CN 114335953 B CN114335953 B CN 114335953B CN 202210012132 A CN202210012132 A CN 202210012132A CN 114335953 B CN114335953 B CN 114335953B
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coplanar waveguide
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吴鹏
袁斌
喻忠军
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Guangdong Dawan District Aerospace Information Research Institute
Aerospace Information Research Institute of CAS
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Abstract

本公开提供了一种基于接地共面波导‑矩形波导的过渡结构,包括:矩形波导;位于矩形波导上的介质基板,其中,在介质基板的上表面和下表面分别涂敷金属层形成接地共面波导上接地层和接地共面波导下接地层,接地共面波导上接地层、介质基板及接地共面波导下接地层构成接地共面波导;其中,接地共面波导下接地层,包括:耦合窗口和设置在耦合窗口内的U形膜片,该U形膜片用于产生双谐振模式的波导传输信号;接地共面波导上接地层,包括:开路枝节,开路枝节用于准TEM模式与TE10模式间的功率转换。本公开还提供了一种基于接地共面波导‑矩形波导的过渡结构的双模谐振波导激励方法及其应用。

Figure 202210012132

The present disclosure provides a transition structure based on a grounded coplanar waveguide-rectangular waveguide, including: a rectangular waveguide; a dielectric substrate located on the rectangular waveguide, wherein the upper surface and the lower surface of the dielectric substrate are respectively coated with a metal layer to form a grounded coplanar waveguide. The upper ground layer of the planar waveguide and the lower ground layer of the grounded coplanar waveguide, the upper ground layer of the grounded coplanar waveguide, the dielectric substrate and the lower ground layer of the grounded coplanar waveguide constitute the grounded coplanar waveguide; wherein, the lower ground layer of the grounded coplanar waveguide includes: The coupling window and the U-shaped diaphragm set in the coupling window, the U-shaped diaphragm is used to generate the waveguide transmission signal of the double resonance mode; the ground layer on the grounded coplanar waveguide includes: open-circuit stub, the open-circuit stub is used for quasi-TEM mode Power conversion to and from TE 10 mode. The disclosure also provides a dual-mode resonant waveguide excitation method based on a grounded coplanar waveguide-rectangular waveguide transition structure and its application.

Figure 202210012132

Description

一种过渡结构及其应用、双模谐振波导激励方法A kind of transition structure and its application, double-mode resonant waveguide excitation method

技术领域technical field

本公开涉及太赫兹系统技术领域,具体涉及一种过渡结构及其应用、双模谐振波导激励方法。The present disclosure relates to the technical field of terahertz systems, in particular to a transition structure and its application, and a dual-mode resonant waveguide excitation method.

背景技术Background technique

微机械封装是发展太赫兹多像素外差阵列仪器和其他先进太赫兹系统的最佳选择。矩形波导由于其优异的耐久性和低插入损耗的优点,被认为是太赫兹封装最合适的接口。传统的计算机数控金属加工仍然可以用于组件和简单的单像素接收器制造,但当需要高度紧凑和集成系统时就不足了。将电路组件垂直安装是一种可行的解决方案,因为本振和中频路径可以移动到垂直维度,可以为这些基于波导的前端接收器组件(如倍频器和混频器)提供更高的电路密度。Micromechanical packaging is the best choice for the development of terahertz multi-pixel heterodyne array instruments and other advanced terahertz systems. Rectangular waveguides are considered to be the most suitable interface for terahertz packaging due to their excellent durability and low insertion loss. Conventional computer numerically controlled metal machining can still be used for components and simple single-pixel receiver fabrication, but falls short when highly compact and integrated systems are required. Mounting the circuit components vertically is a viable solution because the LO and IF paths can be moved to the vertical dimension, allowing higher circuitry for these waveguide-based front-end receiver components such as frequency multipliers and mixers density.

在这些垂直结构的有源和无源模块中,矩形波导接口与平面有源电路之间的互连对传输性能起着至关重要的作用。接地共面波导在平面微波电路中具有较低的高频辐射损耗,因此得到了广泛的应用。因此,从接地共面波导平面电路到矩形波导立体组件的垂直连接和过渡对于整个太赫兹模块或系统至关重要。传统的接地共面波导-矩形波导垂直过渡主要包括探针/天线馈电、脊波导过渡和缝隙耦合。微带探针激励是目前最常用的过渡结构,利用短谐振腔来提高带宽和过渡效率,增加了太赫兹波段微组装过程的复杂性。脊波导过渡采用了波导中的金属脊,金属脊必须安装在波导内部,导致复杂的制造和微组装过程。缝隙耦合激励方式利用地面上的缝隙将电磁长从接地共面波导耦合到矩形波导,当激励用于宽带应用时,会导致一定的辐射损失。因此在太赫兹频段有必要开发一种降低微组装难度以及损耗低的垂直过渡结构,实现太赫兹接地共面波导平面电路与波导器件的高效率传输。In these vertically structured active and passive modules, the interconnection between the rectangular waveguide interface and the planar active circuits plays a crucial role in the transmission performance. Grounded coplanar waveguides have been widely used for their low high-frequency radiation losses in planar microwave circuits. Therefore, the vertical connection and transition from the grounded coplanar waveguide planar circuit to the rectangular waveguide volume component is crucial for the entire terahertz module or system. The traditional grounded coplanar waveguide-rectangular waveguide vertical transition mainly includes probe/antenna feeding, ridge waveguide transition and slot coupling. Microstrip probe excitation is currently the most commonly used transition structure, and the use of short resonant cavities to improve bandwidth and transition efficiency increases the complexity of the micro-assembly process in the terahertz band. Ridge-waveguide transitions employ metal ridges in the waveguide that must fit inside the waveguide, resulting in complex fabrication and microassembly processes. The slot-coupled excitation method uses the slot on the ground to couple the electromagnetic length from the grounded coplanar waveguide to the rectangular waveguide, which will cause certain radiation loss when the excitation is used for broadband applications. Therefore, in the terahertz frequency band, it is necessary to develop a vertical transition structure that reduces the difficulty of micro-assembly and has low loss, so as to realize the high-efficiency transmission of terahertz grounded coplanar waveguide planar circuits and waveguide devices.

发明内容Contents of the invention

为了解决现有技术中上述问题,本公开提供了一种基于接地共面波导-矩形波导的过渡结构及其应用、双模谐振波导激励方法,该过渡结构采用圆形或扇形开路枝节来转换接地共面波导与矩形波导之间的电磁场。同时,在波导波导口嵌入U形膜片激励起两种谐振模式,提高了传输带宽,该过渡结构具有效率高、制作方便和宽带传输等优势。In order to solve the above problems in the prior art, the present disclosure provides a transition structure based on grounded coplanar waveguide-rectangular waveguide and its application, and a dual-mode resonant waveguide excitation method. The transition structure uses circular or fan-shaped open-circuit stubs to convert grounding Electromagnetic field between a coplanar waveguide and a rectangular waveguide. At the same time, the U-shaped diaphragm is embedded in the waveguide waveguide to excite two resonance modes, which improves the transmission bandwidth. The transition structure has the advantages of high efficiency, convenient manufacture and broadband transmission.

本公开的第一个方面提供了一种基于接地共面波导-矩形波导的过渡结构,包括:矩形波导;位于矩形波导上的介质基板,其中,在介质基板的上下表面分别涂敷金属层形成接地共面波导上接地层和接地共面波导下接地层,接地共面波导上接地层、介质基板及接地共面波导下接地层构成接地共面波导;其中,接地共面波导下接地层,包括:耦合窗口和设置在耦合窗口内的U形膜片,该U形膜片用于产生双谐振模式的波导传输信号;接地共面波导上接地层,包括:开路枝节,开路枝节用于准TEM模式与TE10模式间的功率转换。The first aspect of the present disclosure provides a transitional structure based on grounded coplanar waveguide-rectangular waveguide, including: a rectangular waveguide; a dielectric substrate located on the rectangular waveguide, wherein the upper and lower surfaces of the dielectric substrate are coated with metal layers to form The upper ground layer of the grounded coplanar waveguide and the lower ground layer of the grounded coplanar waveguide, the upper ground layer of the grounded coplanar waveguide, the dielectric substrate and the lower ground layer of the grounded coplanar waveguide constitute the grounded coplanar waveguide; wherein, the lower ground layer of the grounded coplanar waveguide, Including: a coupling window and a U-shaped diaphragm arranged in the coupling window, the U-shaped diaphragm is used to generate a waveguide transmission signal in a double-resonance mode; the ground layer on the grounded coplanar waveguide includes: an open-circuit stub, which is used for quasi- Power conversion between TEM mode and TE 10 mode.

进一步地,开路枝节为圆形开路枝节或扇形开路枝节。Further, the open branch is a circular open branch or a fan-shaped open branch.

进一步地,接地共面波导上接地层还包括:与开路枝节连接的传输线,该传输线的末端用于将电磁波通过缝隙耦合转换为矩形波导的主传输模式。Further, the ground layer on the grounded coplanar waveguide further includes: a transmission line connected to the open stub, and the end of the transmission line is used to convert the electromagnetic wave into the main transmission mode of the rectangular waveguide through slot coupling.

进一步地,耦合窗口与矩形波导的波导口尺寸相同。Further, the size of the coupling window is the same as that of the waveguide port of the rectangular waveguide.

进一步地,介质基板包括:多个第一通孔和第二通孔,多个第一通孔位于介质基板上与矩形波导的波导口对应的外侧,第二通孔位于多个第一通孔的对称位置且U形膜片的中心位置上方。Further, the dielectric substrate includes: a plurality of first through holes and second through holes, the plurality of first through holes are located on the outer side of the dielectric substrate corresponding to the waveguide port of the rectangular waveguide, and the second through holes are located on the outer side of the plurality of first through holes The symmetrical position and above the center position of the U-shaped diaphragm.

进一步地,第二通孔为金属化匹配通孔,该金属化匹配通孔用于调节该过渡结构的工作频率。Further, the second through hole is a metallized matching through hole, and the metallized matching through hole is used to adjust the working frequency of the transition structure.

进一步地,U形膜片产生的双谐振模式的频率与U形膜片的宽度wi及两侧长度li呈负相关。Further, the frequency of the double resonance mode generated by the U-shaped diaphragm is negatively correlated with the width w i and the lengths l i of both sides of the U-shaped diaphragm.

进一步地,金属层为铜层或金层构成。Further, the metal layer is composed of a copper layer or a gold layer.

本公开的第二个方面提供了一种基于本公开第一个方面提供的过渡结构的双模谐振波导激励方法,包括:在矩形波导上输入单模的传输信号;单模的传输信号经过U形膜片转换为双谐振模式的波导传输信号;该双谐振模式的波导传输信号依次经过介质基板及接地共面波导上接地层后输出。The second aspect of the present disclosure provides a dual-mode resonant waveguide excitation method based on the transition structure provided by the first aspect of the present disclosure, including: inputting a single-mode transmission signal on the rectangular waveguide; the single-mode transmission signal passes through U The waveguide transmission signal of the double resonance mode is converted into the waveguide transmission signal of the double resonance mode by the shaped diaphragm; the waveguide transmission signal of the double resonance mode passes through the dielectric substrate and the ground layer on the ground coplanar waveguide in sequence, and then is output.

本公开的第三个方面提供了一种基于本公开第一个方面提供的基于接地共面波导-矩形波导的过渡结构在太赫兹无线系统的射频前端上的应用。A third aspect of the present disclosure provides an application of the grounded coplanar waveguide-rectangular waveguide-based transition structure provided in the first aspect of the present disclosure to a radio frequency front end of a terahertz wireless system.

本公开提供了一种基于接地共面波导-矩形波导的过渡结构及其应用、双模谐振波导激励方法,该过渡结构由接地共面波导馈电,不但具有低损耗传输性能,同时还具备宽带特性,装配工艺要求也低。本公开提供的过渡结构适用于单片微波集成电路、立体波导部件和天线馈电应用中的宽带高效高集成互连。The disclosure provides a grounded coplanar waveguide-rectangular waveguide-based transition structure and its application, and a dual-mode resonant waveguide excitation method. The transition structure is fed by a grounded coplanar waveguide, which not only has low-loss transmission performance, but also has broadband characteristics, assembly process requirements are also low. The transition structure provided by the present disclosure is suitable for broadband high-efficiency and high-integration interconnection in monolithic microwave integrated circuits, three-dimensional waveguide components and antenna feeding applications.

附图说明Description of drawings

为了更完整地理解本公开及其优势,现在将参考结合附图的以下描述,其中:For a more complete understanding of the present disclosure and its advantages, reference should now be made to the following description taken in conjunction with the accompanying drawings, in which:

图1示意性示出了根据本公开一实施例的基于接地共面波导-矩形波导的过渡结构的立体图;Fig. 1 schematically shows a perspective view of a transition structure based on a grounded coplanar waveguide-rectangular waveguide according to an embodiment of the present disclosure;

图2A和2B分别示意性示出了根据本公开一实施例的基于接地共面波导-矩形波导的过渡结构的俯视图;2A and 2B schematically illustrate a top view of a grounded coplanar waveguide-rectangular waveguide-based transition structure according to an embodiment of the present disclosure;

图3示意性示出了根据本公开一实施例的模式转换示意图;Fig. 3 schematically shows a schematic diagram of mode conversion according to an embodiment of the present disclosure;

图4A和4B分别示意性示出了根据本公开一实施例的基于接地共面波导-矩形波导的过渡结构的仿真结果对比图;4A and 4B respectively schematically show a comparison of simulation results of a transition structure based on a grounded coplanar waveguide-rectangular waveguide according to an embodiment of the present disclosure;

图5示意性示出了根据本公开一实施例的双模谐振波导激励方法的流程图。Fig. 5 schematically shows a flowchart of a method for exciting a dual-mode resonant waveguide according to an embodiment of the present disclosure.

具体实施方式detailed description

以下,将参照附图来描述本公开的实施例。但是应该理解,这些描述只是示例性的,而并非要限制本公开的范围。在下面的详细描述中,为便于解释,阐述了许多具体的细节以提供对本公开实施例的全面理解。然而,明显地,一个或多个实施例在没有这些具体细节的情况下也可以被实施。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本公开的概念。Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present disclosure.

在此使用的术语仅仅是为了描述具体实施例,而并非意在限制本公开。在此使用的术语“包括”、“包含”等表明了所述特征、步骤、操作和/或部件的存在,但是并不排除存在或添加一个或多个其他特征、步骤、操作或部件。The terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting of the present disclosure. The terms "comprising", "comprising", etc. used herein indicate the presence of stated features, steps, operations and/or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

在此使用的所有术语(包括技术和科学术语)具有本领域技术人员通常所理解的含义,除非另外定义。应注意,这里使用的术语应解释为具有与本说明书的上下文相一致的含义,而不应以理想化或过于刻板的方式来解释。All terms (including technical and scientific terms) used herein have the meaning commonly understood by one of ordinary skill in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted to have meanings consistent with the context of this specification, and should not be interpreted in an idealized or overly rigid manner.

本公开提供了一种基于接地共面波导-矩形波导的过渡结构,包括:矩形波导;位于矩形波导上的介质基板,其中,在介质基板的上表面和下表面分别涂敷金属层形成接地共面波导上接地层和接地共面波导下接地层,接地共面波导上接地层、介质基板及接地共面波导下接地层构成接地共面波导;其中,接地共面波导下接地层,包括:耦合窗口和设置在耦合窗口内的U形膜片,该U形膜片用于产生双谐振模式的波导传输信号;接地共面波导上接地层,包括:开路枝节,开路枝节用于准TEM模式与TE10模式间的功率转换。The present disclosure provides a transition structure based on grounded coplanar waveguide-rectangular waveguide, including: a rectangular waveguide; The upper ground layer of the planar waveguide and the lower ground layer of the grounded coplanar waveguide, the upper ground layer of the grounded coplanar waveguide, the dielectric substrate and the lower ground layer of the grounded coplanar waveguide constitute the grounded coplanar waveguide; wherein, the lower ground layer of the grounded coplanar waveguide includes: The coupling window and the U-shaped diaphragm set in the coupling window, the U-shaped diaphragm is used to generate the waveguide transmission signal of the double resonance mode; the ground layer on the grounded coplanar waveguide includes: open-circuit stub, the open-circuit stub is used for quasi-TEM mode Power conversion to and from TE 10 mode.

本公开的实施例提供的该过渡结构由接地共面波导馈电,不但具有低损耗传输性能,同时还具备宽带特性,装配工艺要求也低。本公开提供的过渡结构适用于单片微波集成电路、立体波导部件和天线馈电应用中的宽带高效高集成互连。The transition structure provided by the embodiments of the present disclosure is fed by a grounded coplanar waveguide, which not only has low-loss transmission performance, but also has broadband characteristics, and has low assembly process requirements. The transition structure provided by the present disclosure is suitable for broadband high-efficiency and high-integration interconnection in monolithic microwave integrated circuits, three-dimensional waveguide components and antenna feeding applications.

下面将结合本公开具体的实施例中的基于槽线-接地共面波导结构的功率合成器、等效电路及功率放大器的结构示意图,对本公开的技术方案进行详细说明。应当理解,图1~图4中示出的基于接地共面波导-矩形波导的过渡结构、各部件的结构及仿真结果仅是示例性的,以帮助本领域的技术人员理解本公开的技术方案,并非用以限制本公开的保护范围。The technical solutions of the present disclosure will be described in detail below in conjunction with the structural schematic diagrams of a power combiner based on a slot-ground coplanar waveguide structure, an equivalent circuit, and a power amplifier in a specific embodiment of the present disclosure. It should be understood that the transition structure based on grounded coplanar waveguide-rectangular waveguide, the structure of each component and the simulation results shown in FIGS. , not to limit the protection scope of the present disclosure.

图1示意性示出了根据本公开第一实施例的基于接地共面波导-矩形波导的过渡结构的立体图。Fig. 1 schematically shows a perspective view of a grounded coplanar waveguide-rectangular waveguide based transition structure according to a first embodiment of the present disclosure.

如图1所示,该基于接地共面波导-矩形波导的过渡结构,包括:从下而上依次叠置且均呈板状结构的矩形波导1、接地共面波导下接地层2、介质基板3及接地共面波导上接地层4。其中,该过渡结构呈左右对称结构(如图1所示,该过渡结构关于x轴对称)。As shown in Figure 1, the transition structure based on grounded coplanar waveguide-rectangular waveguide includes: rectangular waveguides 1 stacked in sequence from bottom to top and all in a plate-like structure, ground layer 2 under the grounded coplanar waveguide, and a dielectric substrate 3 and the ground layer 4 on the ground coplanar waveguide. Wherein, the transition structure is a left-right symmetrical structure (as shown in FIG. 1 , the transition structure is symmetrical about the x-axis).

本公开的实施例中,矩形波导1可以采用标准WR4波导。介质基板3可以为100μm厚度的石英介质基板,其介电常数为3.82。通过在介质基板3的上、下表面涂敷良导体金属层分别形成接地共面波导上接地层4和接地共面波导下接地层2,其中,接地共面波导下接地层2、介质基板3及接地共面波导上接地层4构成接地共面波导。该良导体金属层为导电性能较好的金属层,优选地,该良导体金属层为金层、铜层、铂层等。In the embodiment of the present disclosure, the rectangular waveguide 1 may adopt a standard WR4 waveguide. The dielectric substrate 3 may be a quartz dielectric substrate with a thickness of 100 μm and a dielectric constant of 3.82. The upper ground layer 4 of the grounded coplanar waveguide and the lower ground layer 2 of the grounded coplanar waveguide are respectively formed by coating the upper and lower surfaces of the dielectric substrate 3 with a good conductor metal layer, wherein the lower ground layer 2 of the grounded coplanar waveguide and the dielectric substrate 3 and the ground layer 4 on the ground coplanar waveguide form the ground coplanar waveguide. The good conductor metal layer is a metal layer with good electrical conductivity. Preferably, the good conductor metal layer is a gold layer, a copper layer, a platinum layer, or the like.

根据本公开的实施例,接地共面波导下接地层2,包括:耦合窗口21和设置在耦合窗口21内的U形膜片22,该U形膜片22用于产生双谐振模式的波导传输信号。其中,该耦合窗口21的尺寸与矩形波导1的波导口11的尺寸相同。According to an embodiment of the present disclosure, the lower ground layer 2 of the grounded coplanar waveguide includes: a coupling window 21 and a U-shaped diaphragm 22 arranged in the coupling window 21, and the U-shaped diaphragm 22 is used to generate waveguide transmission in a dual-resonant mode Signal. Wherein, the size of the coupling window 21 is the same as that of the waveguide opening 11 of the rectangular waveguide 1 .

如图2A所示,设U形膜片22的宽度为wi,左右两侧的长度为li,可以通过调节wi、li参数来调节该过渡结构的双模谐振频率,用于改善过渡带宽和阻抗匹配,且li应小于矩形波导1的波导口11的窄边长度,避免U形膜片22超出波导口11的范围。As shown in Figure 2A, suppose the width of the U-shaped diaphragm 22 is w i , and the length of the left and right sides is l i , the dual-mode resonant frequency of the transition structure can be adjusted by adjusting the parameters of w i and l i to improve the Transition bandwidth and impedance matching, and l i should be smaller than the length of the narrow side of the waveguide opening 11 of the rectangular waveguide 1, so as to prevent the U-shaped diaphragm 22 from exceeding the range of the waveguide opening 11.

具体地,U形膜片22的宽度wi和窄壁膜片的长度li共同决定了双谐振模式的两个谐振模式,wi越大较那个较低频的谐振频率会往低频段移动,而li越大,较大的高频谐振频率会也往低频段移动。因此,U形膜片22产生的双谐振模式的频率与U形膜片22的宽度wi及两侧长度li呈负相关。Specifically, the width w i of the U-shaped diaphragm 22 and the length l i of the narrow-walled diaphragm jointly determine the two resonant modes of the double-resonant mode. The larger the wi is, the lower the resonant frequency of the lower frequency will move to the lower frequency band , and the larger l i is, the larger high-frequency resonance frequency will also move to the low-frequency band. Therefore, the frequency of the double resonance mode generated by the U-shaped diaphragm 22 is negatively correlated with the width w i and the lengths l i of both sides of the U-shaped diaphragm 22 .

接地共面波导上接地层4,包括:开路枝节41、与开路枝节41连接的传输线42及位于开路枝节41和传输线42外侧的缝隙43。其中,如图2B所示,开路枝节41位于矩形波导1的波导口11的正上方,且两者形成的结构为左右对称结构。开路枝节41用于准TEM模式与TE10模式间的功率低损耗转换。传输线42的末端用于将电磁波通过缝隙43耦合转换为矩形波导1的主传输模式。The ground layer 4 on the grounded coplanar waveguide includes: an open stub 41 , a transmission line 42 connected to the open stub 41 , and a gap 43 outside the open stub 41 and the transmission line 42 . Wherein, as shown in FIG. 2B , the open branch 41 is located directly above the waveguide opening 11 of the rectangular waveguide 1 , and the structure formed by the two is left-right symmetrical. The open stub 41 is used for low-loss power conversion between the quasi-TEM mode and the TE 10 mode. The end of the transmission line 42 is used to couple and convert the electromagnetic wave into the main transmission mode of the rectangular waveguide 1 through the slot 43 .

具体地,如图2B所示,开路枝节41可以为圆形开路枝节或扇形开路枝节。设开路枝节41的圆心到矩形波导1的波导口11长边的距离为ds,圆形枝节的半径为rs,则rs+ds的大小应该小于波导口11窄边的长度。优选地,rs+ds大小为波导口11窄边的一半,使得接地共面波导2、4的电磁模式转换为矩形波导1的主传输模式。Specifically, as shown in FIG. 2B , the open branch 41 may be a circular open branch or a fan-shaped open branch. Assuming that the distance from the center of the open branch 41 to the long side of the waveguide port 11 of the rectangular waveguide 1 is d s , and the radius of the circular branch is r s , then the size of r s +d s should be smaller than the length of the narrow side of the waveguide port 11. Preferably, the size of r s +d s is half of the narrow side of the waveguide opening 11, so that the electromagnetic mode of the grounded coplanar waveguides 2, 4 is converted into the main transmission mode of the rectangular waveguide 1.

优选地,U形膜片22较长的一边与波导口11的长边完全重合,且关于上接地共面波导4的传输线42对称设置。Preferably, the longer side of the U-shaped diaphragm 22 completely coincides with the longer side of the waveguide port 11 , and is arranged symmetrically with respect to the transmission line 42 of the upper grounded coplanar waveguide 4 .

本公开的实施例中,介质基板3包括多个第一通孔31和第二通孔32,多个第一通孔31位于介质基板3上与矩形波导1的波导口11及传输线42对应的外侧,第二通孔32位于多个第一通孔31的对称位置且 U形膜片22的中心位置上方。其中,多个第一通孔31和第二通孔32均为金属化通孔,多个第一通孔31为普通金属化通孔,其用于防止电磁波在石英基板3的上下金属表面之间产生平行板模式,造成能量泄露。第二通孔32为金属化匹配通孔,该金属化匹配通孔用于调节该过渡结构的工作频率。In the embodiment of the present disclosure, the dielectric substrate 3 includes a plurality of first through holes 31 and second through holes 32, and the plurality of first through holes 31 are located on the dielectric substrate 3 corresponding to the waveguide port 11 and the transmission line 42 of the rectangular waveguide 1. On the outside, the second through hole 32 is located at the symmetrical position of the plurality of first through holes 31 and above the central position of the U-shaped diaphragm 22 . Wherein, the plurality of first through holes 31 and the second through holes 32 are all metallized through holes, and the plurality of first through holes 31 are ordinary metallized through holes, which are used to prevent electromagnetic waves from passing between the upper and lower metal surfaces of the quartz substrate 3. A parallel plate mode is generated between them, resulting in energy leakage. The second through hole 32 is a metallized matching through hole, and the metallized matching through hole is used to adjust the working frequency of the transition structure.

进一步地,相邻的金属化通孔之间的距离应大于等于各个通孔的直径,以降低加工难度,提高制造加工成品率。Further, the distance between adjacent metallized through holes should be greater than or equal to the diameter of each through hole, so as to reduce processing difficulty and improve manufacturing and processing yield.

如图2B所示,设金属化匹配通孔32的圆心到波导口11宽边的距离为dv,调节dv参数可以改变该过渡结构的工作频率,使该结构适用范围可以扩展到任意的工作频段。As shown in Fig. 2B, suppose the distance from the center of the metallized matching through hole 32 to the wide side of the waveguide port 11 is d v , adjusting the d v parameter can change the working frequency of the transition structure, so that the applicable range of the structure can be extended to any Working frequency.

如图1所示,WR4波导1与石英基板3进行垂直端接,WR4波导1的波导口11对准石英基板1上表面刻蚀形成耦合窗口21。As shown in FIG. 1 , the WR4 waveguide 1 is vertically connected to the quartz substrate 3 , and the waveguide opening 11 of the WR4 waveguide 1 is aligned with the upper surface of the quartz substrate 1 to form a coupling window 21 by etching.

本公开的实施例中,由接地共面波导馈电的开路枝节41插在矩形波导1的波导口11中心上方,传输线42末端的电磁波将通过缝隙耦合转换为成矩形波导1的主要传输模式,如图3所示为接地共面波导的准TEM电磁模式与矩形波导的TE10模式之间的整个功率转换过程。In the embodiment of the present disclosure, the open circuit stub 41 fed by the grounded coplanar waveguide is inserted above the center of the waveguide port 11 of the rectangular waveguide 1, and the electromagnetic wave at the end of the transmission line 42 will be converted into the main transmission mode of the rectangular waveguide 1 through slot coupling, Figure 3 shows the entire power conversion process between the quasi-TEM electromagnetic mode of the grounded coplanar waveguide and the TE 10 mode of the rectangular waveguide.

由图3可以看出,由于开路枝节41的设置,使得该过渡波导结构很好的实现了接地共面波导下接地层2和接地共面波导上接地层4中的准TEM电磁模式与矩形波导的TE10模式之间的功率转换。It can be seen from Fig. 3 that due to the setting of the open-circuit stub 41, the transitional waveguide structure well realizes the quasi-TEM electromagnetic mode in the ground layer 2 of the ground coplanar waveguide and the ground layer 4 of the ground coplanar waveguide and the rectangular waveguide Power conversion between TE 10 modes.

理论上,U形膜片22的宽壁和窄壁上的膜片负载分别等效于波导传输线的并联电容和并联电感。通过产生与U形膜片22相关的两个谐振频率,该激励结构实现了双谐振传输模式,U形膜片22可以分别在低频和高频提供足够的电容和电感补偿。Theoretically, the diaphragm loads on the wide and narrow walls of the U-shaped diaphragm 22 are equivalent to the parallel capacitance and parallel inductance of the waveguide transmission line, respectively. The excitation structure achieves a dual resonant transmission mode by generating two resonant frequencies associated with the U-shaped diaphragm 22, which can provide sufficient capacitive and inductive compensation at low and high frequencies, respectively.

具体地,通过电场仿真结果表明,U形膜片22中具有电容的宽壁膜片在较低频率(187GHz)时起主导作用,而具有电感的窄壁虹膜在较高频率(229GHz)时起主要作用,从而产生双谐振模式。Specifically, the electric field simulation results show that the wide-walled diaphragm with capacitance in the U-shaped diaphragm 22 plays a dominant role at a lower frequency (187GHz), while the narrow-walled iris with inductance plays a leading role at a higher frequency (229GHz). main role, resulting in a double resonant mode.

本公开的实施例中,对该过渡结构使用U形膜片22和不使用U形膜片22两种情况下进行数值放置,具体对散射参数(即S参数)进行仿真计算。图4A和4B分别示意性示出了根据本公开一实施例的基于接地共面波导-矩形波导的过渡结构的仿真结果对比图。In the embodiment of the present disclosure, numerical values are placed in the case of using the U-shaped diaphragm 22 and not using the U-shaped diaphragm 22 for the transition structure, and specifically the simulation calculation of the scattering parameters (ie, S parameters). 4A and 4B schematically illustrate the comparison of simulation results of transition structures based on grounded coplanar waveguide-rectangular waveguide according to an embodiment of the present disclosure.

如图4A所示,不使用U形膜片时,该过渡结构只存在单谐振频率210GHz,绝对工作带宽为24GHz,相对工作带宽为11.5%,在197GHz至221GHz的频率范围内,回波损耗S11和回波损耗S22均优于15dB,插入损耗S21低于0.35dB。As shown in Figure 4A, when the U-shaped diaphragm is not used, the transition structure only has a single resonance frequency of 210 GHz, the absolute operating bandwidth is 24 GHz, and the relative operating bandwidth is 11.5%. In the frequency range from 197 GHz to 221 GHz, the return loss S 11 and return loss S 22 are better than 15dB, insertion loss S 21 is lower than 0.35dB.

图4B所示,使用U形膜片可以产生双谐振模式,频率分别为187GHz和229GHz,且在184GHz至231GHz的频率范围内,回波损耗S11和回波损耗S22均优于15dB,插入损耗S21低于0.35dB,使其绝对工作带宽达到了47GHz,相对工作带宽为22.7%,带宽几乎是不使用U形膜片时的两倍。通过仿真计算结果表明,在该过渡结构中使用U形膜片可以非常有效地提升该过渡结构的宽带传输性能。As shown in Figure 4B, a U-shaped diaphragm can be used to generate dual resonance modes with frequencies of 187GHz and 229GHz respectively, and in the frequency range from 184GHz to 231GHz, the return loss S 11 and return loss S 22 are both better than 15dB, inserting The loss S 21 is lower than 0.35dB, making its absolute operating bandwidth reach 47GHz, the relative operating bandwidth is 22.7%, and the bandwidth is almost twice that of when the U-shaped diaphragm is not used. The simulation calculation results show that using the U-shaped diaphragm in the transition structure can effectively improve the broadband transmission performance of the transition structure.

图5示意性示出了根据本公开一实施例的双模谐振波导激励方法的流程图,该双模谐振波导激励方法基于如图1所示的过渡结构实现。FIG. 5 schematically shows a flow chart of a dual-mode resonant waveguide excitation method according to an embodiment of the present disclosure. The dual-mode resonant waveguide excitation method is implemented based on the transition structure shown in FIG. 1 .

如图5所示,该双模谐振波导激励方法,包括:S501~S503。As shown in FIG. 5 , the dual-mode resonant waveguide excitation method includes: S501˜S503.

S501,在矩形波导1上输入单模的传输信号。S501 , inputting a single-mode transmission signal on the rectangular waveguide 1 .

S502,单模的传输信号经过U形膜片22转换为双谐振模式的波导传输信号。S502, the single-mode transmission signal is converted into a double-resonant mode waveguide transmission signal through the U-shaped diaphragm 22 .

S503,双谐振模式的波导传输信号依次经过介质基板3及接地共面波导上接地层4后输出。S503, the waveguide transmission signal in the double resonance mode passes through the dielectric substrate 3 and the ground layer 4 on the grounded coplanar waveguide in sequence, and then outputs it.

在其他一些实施例中,单模的传输信号也可以向接地共面波导上接地层4中输入,该单模的传输信号经过介质基板3后在U形膜片22中转换为双谐振模式的波导传输信号,然后依次经过接地共面波导下接地层2和矩形波导1后输出。本公开的实施例对该过渡结构输入信号的输入方向不做限定。In some other embodiments, the single-mode transmission signal can also be input into the ground layer 4 on the grounded coplanar waveguide, and the single-mode transmission signal passes through the dielectric substrate 3 and is converted into a dual-resonance mode in the U-shaped diaphragm 22 The waveguide transmits the signal, then passes through the ground layer 2 under the ground coplanar waveguide and the rectangular waveguide 1 in sequence, and then outputs it. The embodiment of the present disclosure does not limit the input direction of the transition structure input signal.

本公开另一实施例提供如上述实施例所示的基于接地共面波导-矩形波导的过渡结构在太赫兹无线系统的射频前端上的应用。其中,射频前端中的波导器件与矩形波导1连接,平面电路与上接地共面波导4连接。Another embodiment of the present disclosure provides an application of the grounded coplanar waveguide-rectangular waveguide-based transition structure shown in the above-mentioned embodiments in a radio frequency front-end of a terahertz wireless system. Wherein, the waveguide device in the radio frequency front-end is connected with the rectangular waveguide 1 , and the planar circuit is connected with the upper ground coplanar waveguide 4 .

在其他一些实施例中,该过渡结构还可以用于单片微波集成电路、立体波导部件和天线馈电应用中的宽带高效高集成互连。In some other embodiments, the transition structure can also be used for broadband high-efficiency and high-integration interconnection in monolithic microwave integrated circuits, three-dimensional waveguide components and antenna feeding applications.

需说明的是,上述实施例对本公开提供的过渡结构进行了详细说明,其并不构成本公开实施例的过渡结构的限定,在其他实际应用过程中,该过渡结构中的部分部件也可以为其他结构的替换,例如开路枝节41包括但不仅限于圆形或扇形开路枝节,其还可以为矩形开路枝节或其他几何形状的开路枝节。It should be noted that the above-mentioned embodiments have described the transition structure provided by the present disclosure in detail, and it does not constitute a limitation of the transition structure of the embodiment of the present disclosure. In other practical applications, some components in the transition structure can also be Alternatives to other structures, for example, the open stub 41 includes, but is not limited to, a circular or fan-shaped open stub, which may also be a rectangular open stud or an open stud with other geometric shapes.

尽管已经在附图和前面的描述中详细地图示和描述了本公开,但是这样的图示和描述应认为是说明性的或示例性的而非限制性的。While the disclosure has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive.

本领域技术人员可以理解,本公开的各个实施例和/或权利要求中记载的特征可以进行多种范围组合和/或结合,即使这样的组合或结合没有明确记载于本公开中。特别地,在不脱离本公开精神和教导的情况下,本公开的各个实施例和/或权利要求中记载的特征可以进行多种组合和/或结合。所有这些组合和/或结合均落入本公开的范围。Those skilled in the art can understand that the features described in various embodiments and/or claims of the present disclosure can be combined and/or combined in various ranges, even if such a combination or combination is not explicitly stated in the present disclosure. In particular, without departing from the spirit and teaching of the present disclosure, the various embodiments of the present disclosure and/or the features described in the claims can be combined and/or combined in various ways. All such combinations and/or combinations fall within the scope of the present disclosure.

尽管已经参照本公开的特定示例性实施例示出并描述了本公开,但是本领域技术人员应该理解,在不背离所附权利要求及其等同物限定的本公开的精神和范围的情况下,可以对本公开进行形式和细节上的多种改变。因此,本公开的范围不应该限于上述实施例,而是应该不仅由所附权利要求来进行确定,还由所附权利要求的等同物来进行限定。While the present disclosure has been shown and described with reference to certain exemplary embodiments thereto, it should be understood by those skilled in the art that other modifications may be made without departing from the spirit and scope of the present disclosure as defined by the appended claims and their equivalents. Various changes in form and details have been made to this disclosure. Therefore, the scope of the present disclosure should not be limited to the above-described embodiments, but should be determined not only by the appended claims, but also by the equivalents of the appended claims.

Claims (7)

1.一种基于接地共面波导-矩形波导的过渡结构,其特征在于,包括:1. A transition structure based on grounded coplanar waveguide-rectangular waveguide, characterized in that it comprises: 矩形波导(1);Rectangular waveguide (1); 位于所述矩形波导(1)上的介质基板(3),其中,在所述介质基板(3)的上表面和下表面分别涂敷金属层形成接地共面波导上接地层(4)和接地共面波导下接地层(2),所述接地共面波导上接地层(4)、所述介质基板(3)及所述接地共面波导下接地层(2)构成接地共面波导;其中,A dielectric substrate (3) located on the rectangular waveguide (1), wherein the upper surface and the lower surface of the dielectric substrate (3) are respectively coated with a metal layer to form a grounding layer (4) and a grounding layer (4) on the grounding coplanar waveguide The lower ground layer (2) of the coplanar waveguide, the upper ground layer (4) of the grounded coplanar waveguide, the dielectric substrate (3) and the lower ground layer (2) of the grounded coplanar waveguide constitute a grounded coplanar waveguide; wherein , 所述接地共面波导下接地层(2)包括:耦合窗口(21)和设置在所述耦合窗口(21)内的U形膜片(22),该U形膜片(22)用于产生双谐振模式的波导传输信号;The lower ground layer (2) of the ground coplanar waveguide includes: a coupling window (21) and a U-shaped diaphragm (22) arranged in the coupling window (21), and the U-shaped diaphragm (22) is used to generate The waveguide transmission signal in double resonance mode; 所述介质基板(3)包括:多个第一通孔(31)和第二通孔(32),所述多个第一通孔(31)位于所述介质基板(3)上与所述矩形波导(1)的波导口(11)对应的外侧,所述第二通孔(32)位于所述多个第一通孔(31)的对称位置且所述U形膜片(22)的中心位置上方;The dielectric substrate (3) includes: a plurality of first through holes (31) and second through holes (32), the plurality of first through holes (31) are located on the dielectric substrate (3) and the On the outside corresponding to the waveguide port (11) of the rectangular waveguide (1), the second through hole (32) is located at the symmetrical position of the plurality of first through holes (31) and the U-shaped diaphragm (22) above the center; 所述接地共面波导上接地层(4)包括:开路枝节(41),所述开路枝节(41)用于准TEM模式与TE10模式间的功率转换;其中,所述开路枝节(41)为圆形开路枝节或扇形开路枝节;The ground layer (4) on the grounded coplanar waveguide includes: an open circuit branch (41), and the open circuit branch (41) is used for power conversion between quasi-TEM mode and TE10 mode; wherein, the open circuit branch (41) is Circular open branches or fan-shaped open branches; 所述接地共面波导上接地层(4)还包括:与所述开路枝节(41)连接的传输线(42),该传输线(42)的末端用于将电磁波通过缝隙(43)耦合转换为所述矩形波导(1)的主传输模式;其中,所述U形膜片(22)较长的一边与所述波导口(11)的长边完全重合,且关于所述上接地共面波导(4)的传输线(42)对称设置。The ground layer (4) on the ground coplanar waveguide also includes: a transmission line (42) connected to the open branch (41), and the end of the transmission line (42) is used to couple the electromagnetic wave through the slot (43) and convert it into the The main transmission mode of the rectangular waveguide (1); wherein, the longer side of the U-shaped diaphragm (22) completely coincides with the longer side of the waveguide port (11), and is about the upper grounded coplanar waveguide ( 4) The transmission lines (42) are arranged symmetrically. 2.根据权利要求1所述的过渡结构,其特征在于,所述耦合窗口(21)与所述矩形波导(1)的波导口(11)尺寸相同。2. The transition structure according to claim 1, characterized in that the coupling window (21) has the same size as the waveguide opening (11) of the rectangular waveguide (1). 3.根据权利要求1所述的过渡结构,其特征在于,所述第二通孔(32)为金属化匹配通孔,该金属化匹配通孔用于调节该过渡结构的工作频率。3. The transition structure according to claim 1, characterized in that, the second through hole (32) is a metallized matching through hole, and the metallized matching through hole is used to adjust the working frequency of the transition structure. 4.根据权利要求1所述的过渡结构,其特征在于,所述U形膜片(22)产生的双谐振模式的频率与所述U形膜片(22)的宽度wi及两侧长度li呈负相关。4. transition structure according to claim 1, is characterized in that, the frequency of the double resonant mode that described U-shaped diaphragm (22) produces and the width w of described U-shaped diaphragm (22) and the length l of both sides i is negatively correlated. 5.根据权利要求1所述的过渡结构,其特征在于,所述金属层为铜层或金层构成。5. The transition structure according to claim 1, wherein the metal layer is composed of a copper layer or a gold layer. 6.一种基于权利要求1~5中任一项所述的过渡结构的双模谐振波导激励方法,其特征在于,包括:6. A dual-mode resonant waveguide excitation method based on the transition structure according to any one of claims 1 to 5, characterized in that it comprises: 在矩形波导(1)上输入单模的传输信号;Inputting a single-mode transmission signal on the rectangular waveguide (1); 所述单模的传输信号经过U形膜片(22)转换为双谐振模式的波导传输信号;The single-mode transmission signal is converted into a waveguide transmission signal of a double-resonance mode through a U-shaped diaphragm (22); 所述双谐振模式的波导传输信号依次经过介质基板(3)及接地共面波导上接地层(4)后输出。The waveguide transmission signal of the double resonance mode passes through the dielectric substrate (3) and the grounding layer (4) on the grounding coplanar waveguide in sequence, and then is output. 7.一种如权利要求1~5中任一项所述的基于接地共面波导-矩形波导的过渡结构在太赫兹无线系统的射频前端上的应用。7. An application of the transition structure based on grounded coplanar waveguide-rectangular waveguide according to any one of claims 1 to 5 in a radio frequency front end of a terahertz wireless system.
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