CN114335022A - Display panel and manufacturing method thereof - Google Patents
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Abstract
Description
技术领域technical field
本申请涉及显示技术领域,具体涉及一种显示面板及其制作方法。The present application relates to the field of display technology, and in particular, to a display panel and a manufacturing method thereof.
背景技术Background technique
随着显示技术的不断发展,柔性显示技术已经成为重要的趋势之一,能够满足使用者对显示装置在轻质、便于携带、能耗低、画质卓越以及可弯折等方面的多种要求。在柔性显示的多种实现方式中,有机发光二极管显示装置具有自发光、驱动电压低、发光效率高、响应时间短、清晰度与对比度高、近180°视角、使用温度范围宽,可实现柔性显示与大面积全色显示等诸多优点,被业界公认为是最有发展潜力的显示装置。With the continuous development of display technology, flexible display technology has become one of the important trends, which can meet the various requirements of users for display devices in terms of light weight, portability, low energy consumption, excellent image quality, and flexibility. . Among the various implementations of flexible display, organic light emitting diode display devices have self-luminescence, low driving voltage, high luminous efficiency, short response time, high definition and contrast, nearly 180° viewing angle, and wide operating temperature range, which can achieve flexible It has many advantages such as display and large-area full-color display, and is recognized by the industry as the display device with the most development potential.
在现有技术中,柔性显示面板的柔性基板容易产生极化现象,柔性基板上的极化电荷产生的电场会使薄膜晶体管的可靠性降低,进而导致柔性显示面板产生图像残留现象,影响柔性显示面板的显示效果。在目前柔性显示面板的电路设计中,薄膜晶体管包括驱动薄膜晶体管和开关薄膜晶体管,其中,开关薄膜晶体管受柔性基板上的极化电荷产生的电场影响可靠性降低更容易导致柔性显示面板产生图像残留现象。因此,如何减弱柔性基板上的极化电荷产生的电场对开关薄膜晶体管的影响成为亟需解决的问题。In the prior art, the flexible substrate of the flexible display panel is prone to polarization, and the electric field generated by the polarized charges on the flexible substrate will reduce the reliability of the thin film transistor, which will lead to image retention in the flexible display panel and affect the flexible display. The display effect of the panel. In the current circuit design of the flexible display panel, the thin film transistor includes a driving thin film transistor and a switching thin film transistor, wherein the switching thin film transistor is affected by the electric field generated by the polarized charges on the flexible substrate, and the reliability is reduced, which is more likely to cause image retention in the flexible display panel. Phenomenon. Therefore, how to reduce the influence of the electric field generated by the polarized charges on the flexible substrate on the switching thin film transistor has become an urgent problem to be solved.
发明内容SUMMARY OF THE INVENTION
本申请实施例提供一种显示面板及其制作方法,以解决由于第一基板产生极化现象使得开关薄膜晶体管的可靠性降低,进而影响显示面板的显示效果的问题。Embodiments of the present application provide a display panel and a manufacturing method thereof, so as to solve the problem that the reliability of the switching thin film transistor is reduced due to the polarization phenomenon of the first substrate, thereby affecting the display effect of the display panel.
一方面,本申请实施例提供一种显示面板,包括:第一基板、驱动薄膜晶体管和开关薄膜晶体管;所述驱动薄膜晶体管设于所述第一基板上,所述驱动薄膜晶体管包括第一有源层;所述开关薄膜晶体管设于所述第一基板上,所述开关薄膜晶体管包括第二有源层;其中,所述第一有源层设于所述第一基板上,所述第二有源层设于所述第一有源层远离所述第一基板的一侧。On the one hand, an embodiment of the present application provides a display panel, including: a first substrate, a driving thin film transistor and a switching thin film transistor; the driving thin film transistor is disposed on the first substrate, and the driving thin film transistor includes a first an active layer; the switch thin film transistor is disposed on the first substrate, and the switch thin film transistor includes a second active layer; wherein the first active layer is disposed on the first substrate, and the first active layer is disposed on the first substrate. Two active layers are disposed on a side of the first active layer away from the first substrate.
可选的,在本申请的一些实施例中,所述驱动薄膜晶体管还包括第一栅极,所述开关薄膜晶体管还包括第二栅极,所述第一栅极与所述第二栅极同层设置。Optionally, in some embodiments of the present application, the driving thin film transistor further includes a first gate, the switching thin film transistor further includes a second gate, the first gate and the second gate Same layer settings.
可选的,在本申请的一些实施例中,所述第二有源层设于所述第二栅极远离所述第一基板的一侧。Optionally, in some embodiments of the present application, the second active layer is provided on a side of the second gate away from the first substrate.
可选的,在本申请的一些实施例中,所述第二有源层设于所述第二栅极与所述第一基板之间。Optionally, in some embodiments of the present application, the second active layer is disposed between the second gate electrode and the first substrate.
可选的,在本申请的一些实施例中,所述开关薄膜晶体管为顶栅晶体管或者底栅晶体管,和/或,所述驱动薄膜晶体管为顶栅晶体管或者底栅晶体管。Optionally, in some embodiments of the present application, the switching thin film transistor is a top-gate transistor or a bottom-gate transistor, and/or the driving thin-film transistor is a top-gate transistor or a bottom-gate transistor.
可选的,在本申请的一些实施例中,所述显示面板还包括与所述第二有源层对应设置的第一辅助电极,所述第一辅助电极设于所述第一基板与所述第二栅极之间。Optionally, in some embodiments of the present application, the display panel further includes a first auxiliary electrode disposed corresponding to the second active layer, and the first auxiliary electrode is disposed between the first substrate and the second active layer. between the second gates.
可选的,在本申请的一些实施例中,所述显示面板还包括与所述第一有源层对应设置的第二辅助电极,所述第二辅助电极设于所述第一基板与所述第一有源层之间。Optionally, in some embodiments of the present application, the display panel further includes a second auxiliary electrode disposed corresponding to the first active layer, and the second auxiliary electrode is disposed between the first substrate and the second auxiliary electrode. between the first active layers.
可选的,在本申请的一些实施例中,所述第一辅助电极、所述第二辅助电极以及所述第二栅极电性连接。Optionally, in some embodiments of the present application, the first auxiliary electrode, the second auxiliary electrode and the second gate are electrically connected.
可选的,在本申请的一些实施例中,所述第一辅助电极在所述第一基板上的正投影覆盖所述第二有源层在所述第一基板上的正投影;所述第二辅助电极在所述第一基板上的正投影覆盖所述第一有源层在所述第一基板上的正投影。Optionally, in some embodiments of the present application, the orthographic projection of the first auxiliary electrode on the first substrate covers the orthographic projection of the second active layer on the first substrate; the The orthographic projection of the second auxiliary electrode on the first substrate covers the orthographic projection of the first active layer on the first substrate.
另一方面,本申请还提供一种显示面板的制作方法,包括以下步骤:在第一基板上形成驱动薄膜晶体管的第一有源层;在所述第一有源层远离所述第一基板的一侧形成开关薄膜晶体管的第二有源层。On the other hand, the present application also provides a method for fabricating a display panel, comprising the following steps: forming a first active layer for driving thin film transistors on a first substrate; and placing the first active layer away from the first substrate The second active layer of the switching thin film transistor is formed on one side.
本申请实施例提供一种显示面板及其制作方法,该显示面板包括:第一基板、驱动薄膜晶体管和开关薄膜晶体管;所述驱动薄膜晶体管设于所述第一基板上,所述驱动薄膜晶体管包括第一有源层;所述开关薄膜晶体管设于所述第一基板上,所述开关薄膜晶体管包括第二有源层;其中,所述第一有源层设于所述第一基板上,所述第二有源层设于所述第一有源层远离所述第一基板的一侧。本申请提供的显示面板通过在将开关薄膜晶体管的第二有源层设置于第二栅极远离第一基板的一侧,也即,增加第二有源层与第一基板之间的距离,解决由于第一基板产生极化现象使得开关薄膜晶体管的可靠性降低,进而影响显示面板的显示效果的问题。Embodiments of the present application provide a display panel and a manufacturing method thereof. The display panel includes: a first substrate, a driving thin film transistor, and a switching thin film transistor; the driving thin film transistor is disposed on the first substrate, and the driving thin film transistor It includes a first active layer; the switching thin film transistor is arranged on the first substrate, and the switching thin film transistor includes a second active layer; wherein, the first active layer is arranged on the first substrate , the second active layer is disposed on the side of the first active layer away from the first substrate. In the display panel provided by the present application, by arranging the second active layer of the switching thin film transistor on the side of the second gate away from the first substrate, that is, increasing the distance between the second active layer and the first substrate, The problem that the reliability of the switching thin film transistor is reduced due to the polarization phenomenon of the first substrate, thereby affecting the display effect of the display panel, is solved.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions in the embodiments of the present application more clearly, the following briefly introduces the drawings that are used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, other drawings can also be obtained from these drawings without creative effort.
图1a是本申请实施例提供的显示面板的第一种结构示意图;1a is a schematic diagram of a first structure of a display panel provided by an embodiment of the present application;
图1b是本申请实施例提供的显示面板的电路结构示意图;FIG. 1b is a schematic diagram of a circuit structure of a display panel provided by an embodiment of the present application;
图2a是本申请实施例提供的显示面板的第二种结构示意图;2a is a schematic diagram of a second structure of a display panel provided by an embodiment of the present application;
图2b是本申请实施例提供的显示面板的第三种结构示意图;FIG. 2b is a schematic diagram of a third structure of a display panel provided by an embodiment of the present application;
图3是本申请实施例提供的显示面板的第四种结构示意图;3 is a schematic diagram of a fourth structure of a display panel provided by an embodiment of the present application;
图4是本申请实施例提供的显示面板的制作流程图。FIG. 4 is a flow chart of the fabrication of the display panel provided by the embodiment of the present application.
001/002/003、显示面板,10、第一基板,20、第一缓冲层,30、第二基板,40、第二缓冲层,50、第一介质层,60、第一栅极绝缘层,70、驱动薄膜晶体管,71、第一栅极,72、第一有源层,73、第一电极,731、第一漏极,732、第一源极,74、第三栅极,80、开关薄膜晶体管,81、第二栅极,82、第二有源层,83、第二电极,831、第二漏极,832、第二源极,90、第二栅极绝缘层,100、第三栅极绝缘层,110、第二介质层,120、第一辅助电极,121、第一过孔,130、第二辅助电极,131、连接走线。001/002/003, display panel, 10, first substrate, 20, first buffer layer, 30, second substrate, 40, second buffer layer, 50, first dielectric layer, 60, first gate insulating layer , 70, drive thin film transistor, 71, first gate, 72, first active layer, 73, first electrode, 731, first drain, 732, first source, 74, third gate, 80 , switching thin film transistor, 81, second gate, 82, second active layer, 83, second electrode, 831, second drain, 832, second source, 90, second gate insulating layer, 100 , a third gate insulating layer, 110, a second dielectric layer, 120, a first auxiliary electrode, 121, a first via hole, 130, a second auxiliary electrode, 131, and a connecting line.
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.
本申请实施例提供一种显示面板及其制作方法,以解决由于第一基板产生极化现象使得开关薄膜晶体管的可靠性降低,进而影响显示面板的显示效果的问题。以下分别进行详细说明。需说明的是,以下实施例的描述顺序不作为对实施例优选顺序的限定。另外,在本申请的描述中,术语“包括”是指“包括但不限于”。术语“第一”、“第二”、“第三”等仅仅作为标示使用,其用于区别不同对象,而不是用于描述特定顺序。Embodiments of the present application provide a display panel and a manufacturing method thereof, so as to solve the problem that the reliability of the switching thin film transistor is reduced due to the polarization phenomenon of the first substrate, thereby affecting the display effect of the display panel. Each of them will be described in detail below. It should be noted that the description order of the following embodiments is not intended to limit the preferred order of the embodiments. In addition, in the description of this application, the term "including" means "including but not limited to". The terms "first," "second," "third," etc. are used merely as labels to distinguish between different objects, rather than to describe a particular order.
基于现有的柔性显示面板的有机发光器件包括用于控制柔性显示面板工作的驱动电路,在柔性显示面板工作时,其驱动电路中的电荷移动形成电流,同时电荷还可以产生电场,该电场能够作用于柔性显示面板的柔性基板,使柔性基板极化并产生极化电荷。柔性基板靠近有机发光器件的一侧和远离有机发光器件的一侧分别被极化出不同电性的电荷。当柔性基板上被极化出较多的极化电荷时,柔性基板上的极化电荷产生的电场会对驱动电路中的电荷分布产生影响,进而导致柔性显示面板产生图像残留现象。本申请提出的显示面板可以解决现有柔性显示面板由于其柔性基板产生极化现象使得有机发光器件的可靠性降低,进而影响显示面板的显示效果的问题。The organic light-emitting device based on the existing flexible display panel includes a drive circuit for controlling the operation of the flexible display panel. When the flexible display panel operates, the electric charge in the drive circuit moves to form a current, and the electric field can also generate an electric field, which can Acting on the flexible substrate of the flexible display panel, the flexible substrate is polarized and polarized charges are generated. The side of the flexible substrate close to the organic light emitting device and the side far from the organic light emitting device are respectively polarized with different electrical charges. When more polarized charges are polarized on the flexible substrate, the electric field generated by the polarized charges on the flexible substrate will affect the charge distribution in the driving circuit, thereby causing image sticking in the flexible display panel. The display panel proposed in the present application can solve the problem that the reliability of the organic light-emitting device is reduced due to the polarization phenomenon of the flexible substrate of the existing flexible display panel, thereby affecting the display effect of the display panel.
参阅图1a,图1a是本申请实施例提供的显示面板的第一种结构示意图;Referring to FIG. 1a, FIG. 1a is a first structural schematic diagram of a display panel provided by an embodiment of the present application;
图1b是本申请实施例提供的显示面板的电路结构示意图;如图1a所示,本申请实施例提供一种显示面板001,包括:第一基板10、驱动薄膜晶体管70和开关薄膜晶体管80;驱动薄膜晶体管70设于第一基板10上,驱动薄膜晶体管70包括第一有源层72;开关薄膜晶体管80设于第一基板10上,开关薄膜晶体管80包括第二有源层82;其中,第一有源层72设于第一基板10上,第二有源层82设于第一有源层72远离第一基板10的一侧。1b is a schematic diagram of a circuit structure of a display panel provided by an embodiment of the present application; as shown in FIG. 1a, an embodiment of the present application provides a
在本申请实施例中,第一基板10可以为可弯曲的柔性基板,例如,各种塑料膜,或采用聚对苯二甲酸乙二醇酯、聚醚砜、聚碳酸酯,聚酰亚胺及其衍生物等制成的基板。In the embodiment of the present application, the
如图1a所示,在本申请实施例中,显示面板001还包括第二基板30和第二缓冲层40,其中,第二基板30设置于第一基板10远离驱动薄膜晶体管70的一侧,第二缓冲层40设置于第一基板10和第二基板30之间。具体地,第二基板30也可以设于第一基板10靠近驱动薄膜晶体管70的一侧(图中未示出),第二缓冲层40设置于第二基板30远离第一基板10的一侧。As shown in FIG. 1a, in the embodiment of the present application, the
在本申请实施例中,显示面板001还包括依次层叠设置的第一缓冲层20、第一介质层50、第一栅极绝缘层60、第二栅极绝缘层90和第三栅极绝缘层100以及第二介质层110。优选地,第一有源层72设置于第一介质层50上。In this embodiment of the present application, the
在本申请实施例中,驱动薄膜晶体管70还包括第一栅极71,开关薄膜晶体管还包括第二栅极81,第一栅极71和第二栅极81同层设置于第一栅极绝缘层60上。第二有源层82设置于第二栅极绝缘层90上。In the embodiment of the present application, the driving
在本申请实施例中,如图1a所示,第二有源层82设于第二栅极81远离第一基板10的一侧。可选地,第二有源层也可以设于第二栅极81与第一基板10之间。In the embodiment of the present application, as shown in FIG. 1 a , the second
在本申请实施例中,开关薄膜晶体管80为顶栅晶体管或者底栅晶体管,驱动薄膜晶体管70可以与开关薄膜晶体管80同为顶栅晶体管或者底栅晶体管,或者,开关薄膜晶体管80为顶栅晶体管,驱动薄膜晶体管为底栅晶体管,优选地,如图1a所示,开关薄膜晶体管80为底栅晶体管,驱动薄膜晶体管为顶栅晶体管。In this embodiment of the present application, the switching
在本申请实施例中,驱动薄膜晶体管70还包括第一电极73,开关薄膜晶体管80还包括第二电极83,第一电极73与第二电极83同层设置且电性连接。具体地,驱动薄膜晶体管70的第一电极73包括第一源极732和第一漏极731,开关薄膜晶体管80的第二电极83包括第二源极832和第二漏极831,其中,第一源极732、第一漏极731、第二源极832和第二漏极831同层设置于第二介质层110上,且第一源极732和第二源极832电性连接。第一源极732和第一漏极731分别通过过孔电性连接于第一有源层72,第二源极832和第二漏极831分别通过过孔电性连接于第二有源层82。In the embodiment of the present application, the driving
在本申请实施例中,如图1b所示,T1为驱动薄膜晶体管,T2为开关薄膜晶体管,其中,本申请中将开关薄膜晶体管T2的第二有源层82上移至第二栅极81远离第一基板的一侧,具体地,将开关薄膜晶体管T2的第二有源层82设置于第二栅极绝缘层90上。图1b中连接开关薄膜晶体管T2源漏极的虚线代表开关薄膜晶体管T2与其它开关薄膜晶体管的沟道不在同一平面。In this embodiment of the present application, as shown in FIG. 1b, T1 is a driving thin film transistor, and T2 is a switching thin film transistor, wherein in the present application, the second
需要说明的是,在本申请实施例中,驱动薄膜晶体管为像素电路中用于控制流经发光二极管的电流的晶体管;开关薄膜晶体管可以为像素电路中除驱动晶体管以外的其他晶体管。It should be noted that, in the embodiments of the present application, the driving thin film transistor is a transistor used to control the current flowing through the light emitting diode in the pixel circuit; the switching thin film transistor may be other transistors except the driving transistor in the pixel circuit.
在本申请实施例中,驱动薄膜晶体管70还包括与第一栅极71对应设置的第三栅极74,第三栅极74设于第一栅极71远离第一基板10的一侧。具体地,第三栅极74设置于第三栅极绝缘层100上。第一栅极71与第三栅极74形成电容。In the embodiment of the present application, the driving
在本申请实施例中,第一有源层72与第二有源层82的材料均包括低温多晶硅。具体地,第一有源层72与第二有源层82的材料包括但不限于硅基材料,如非晶硅,低温多晶硅等;金属氧化物半导体,如非晶氧化铟镓锌,氧化锌,氮氧化锌,氧化铟锌锡等;以及有机物材料,如六噻吩,聚噻吩等。其中,低温多晶硅材料具有电子迁移率快,使用低温多晶硅材料可以使薄膜电路可以做得更小、更薄,电路本身的功耗也较低,进而提高显示面板的分辨率和稳定性。另外,氧化物半导体材料的载流子迁移率较高,有利于提高薄膜晶体管的稳定性,且氧化物半导体材料具有对可见光透明、工艺温度低及可大面积制作等优点,将氧化物薄膜晶体管应用于显示面板的显示区,能够有效提高显示区的像素密度、开口率以及亮度,同时还能够通过提高氧化物薄膜晶体管的稳定性提高显示面板的显示品质,避免出现画面残像或亮度不均匀等问题。In the embodiment of the present application, the materials of the first
需要说明的是,本发明实施例中的驱动薄膜晶体管70可以是NMOS晶体管或PMOS晶体管,开关薄膜晶体管80也可以是NMOS晶体管或PMOS晶体管,本发明实施例对驱动薄膜晶体管70以及开关薄膜晶体管80的沟道类型不做限定。It should be noted that the driving
在本申请实施例中,显示面板001采用顶栅型结构的驱动薄膜晶体管70和底栅型结构的开关薄膜晶体管80。结合两种晶体管结构的优势,使得显示面板既能具有较快的开关速度,又能具有较大的驱动电流,从而提高了显示面板001的显示性能。同时,这样的结构设计,有利于在同一工艺中同时形成该显示面板001的顶栅型结构的第一晶体管和底栅型结构的第二晶体管,工艺易于实现且节约成本。In the embodiment of the present application, the
本申请实施例提供一种显示面板及其制作方法,该显示面板包括:第一基板10、驱动薄膜晶体管70和开关薄膜晶体管80;驱动薄膜晶体管70设于第一基板10上,驱动薄膜晶体管70包括第一栅极71、第一有源层72;开关薄膜晶体管80设于第一基板10上,开关薄膜晶体管80包括第二栅极81、第二有源层82;其中,第一栅极71与第二栅极81同层设置;第一有源层72设于第一栅极71靠近第一基板10的一侧,第二有源层82设于第二栅极81远离第一基板10的一侧。本申请提供的显示面板通过在将开关薄膜晶体管80的第二有源层82设置于第二栅极81远离第一基板10的一侧,也即,增加第二有源层82与第一基板10之间的距离,解决由于第一基板10产生极化现象使得开关薄膜晶体管80的可靠性降低,进而影响显示面板的显示效果的问题。Embodiments of the present application provide a display panel and a manufacturing method thereof. The display panel includes: a
作为本申请的一个具体实施方式,请参阅图2a,图2a是本申请实施例提供的显示面板的第二种结构示意图;图2b是本申请实施例提供的显示面板的第三种结构示意图;如图1a和图2a所示,本申请实施例提供一种显示面板002,显示面板002与显示面板001的区别在于,显示面板002还包括与第二有源层82对应设置的第一辅助电极120,第一辅助电极120设于第一基板10与第二栅极81之间。As a specific implementation manner of the present application, please refer to FIG. 2a, FIG. 2a is a schematic diagram of a second structure of a display panel provided by an embodiment of the present application; FIG. 2b is a schematic diagram of a third structure of a display panel provided by an embodiment of the present application; As shown in FIG. 1 a and FIG. 2 a , an embodiment of the present application provides a
在本申请实施例中,第一辅助电极120设置于第一缓冲层20上。第二有源层82在第一基板10上的正投影覆盖第一辅助电极120在第一基板10上的正投影。具体地,第二有源层82的整个厚度区域在第一基板10上的正投影均位于对应的第一辅助电极120在第一基板10上的正投影之内,相当于在第一基板10和开关薄膜晶体管80之间设置的屏蔽结构,能有效屏蔽第一基板10和开关薄膜晶体管80之间的有机膜层或无机膜层内移动电荷的对第二有源层82的影响,进而提高开关薄膜晶体管80的可靠性,提升显示面板的稳定性和显示效果,解决由于第一基板10产生极化现象使得开关薄膜晶体管80的可靠性降低,进而影响显示面板的显示效果的问题。In the embodiment of the present application, the first
在本申请实施例中,如图2b所示,第一辅助电极120设置也可以设置于第一基板10上。In this embodiment of the present application, as shown in FIG. 2 b , the first
在本申请实施例中,第一辅助电极120通过第一过孔121与第二栅极81电性连接。第一辅助电极120通过第一过孔121与第二栅极81电性连接,可以增强第一辅助电极120对移动电荷的屏蔽效果,同时,可以对开关薄膜晶体管80的阈值电压进行补偿,使开关薄膜晶体管80的电位稳定,进而发光亮度稳定。In the embodiment of the present application, the first
在本申请实施例中,显示面板002采用顶栅型结构的驱动薄膜晶体管70和双栅型结构的开关薄膜晶体管80,其中驱动薄膜晶体管70为驱动晶体管,开关薄膜晶体管80为开关晶体管。结合两种晶体管结构的优势,使得显示面板既能具有较快的开关速度,又能具有较大的驱动电流,从而提高了显示面板002的显示性能。同时,这样的结构设计,有利于在同一工艺中同时形成该显示面板002的顶栅型结构的第一晶体管和双栅型结构的第二晶体管,工艺易于实现且节约成本。In the embodiment of the present application, the
本申请提供的显示面板002,通过在第一基板10和开关薄膜晶体管80之间设置屏蔽结构,能有效屏蔽第一基板10和开关薄膜晶体管80之间的有机膜层或无机膜层内移动电荷的对第二有源层82的影响,进而提高开关薄膜晶体管80的可靠性,提升显示面板的稳定性和显示效果,解决由于第一基板10产生极化现象使得开关薄膜晶体管80的可靠性降低,进而影响显示面板的显示效果的问题。The
作为本申请的一个具体实施方式,请参阅图3,图3是本申请实施例提供的显示面板的第四种结构示意图;如图1a至图3所示,本申请实施例提供一种显示面板003,显示面板003与显示面板002的区别在于,显示面板003还包括与第一有源层72对应设置的第二辅助电极130,第二辅助电极130设于第一基板10与第一有源层72之间。As a specific implementation manner of the present application, please refer to FIG. 3 , which is a schematic diagram of a fourth structure of a display panel provided by an embodiment of the present application; as shown in FIGS. 1 a to 3 , an embodiment of the present application provides a
在本申请实施例中,第一辅助电极120与第二辅助电极130同层设置且通过连接走线131电性连接。具体地,第一辅助电极120与第二辅助电极130同层设置于第一基板10上。需要说明的是,第一辅助电极120与第二辅助电极130也可以同层设置于第一缓冲层20上,只需满足设置于第一有源层72与第一基板10之间的膜层即可。In the embodiment of the present application, the first
需要说明的是,第一辅助电极120和第二辅助电极130可以不同层设置,如第一辅助电极120设置于第一基板10上,第二辅助电极130设置于第一缓冲层20上,或者,第一辅助电极120设置于第一缓冲层20上,第二辅助电极130设置于第一基板10上。本领域技术人员可以根据实际需要调整,本申请在此不作限定。It should be noted that the first
在本申请实施例中,第一辅助电极120在第一基板10上的正投影覆盖第二有源层82在第一基板10上的正投影;第二辅助电极130在第一基板10上的正投影覆盖第一有源层72在第一基板10上的正投影。具体地,第一有源层72和第二有源层82的整个厚度区域在第一基板10上的正投影均位于对应的第一辅助电极120和第二辅助电极130在第一基板10上的正投影之内,从而能屏蔽第一有源层72和第二有源层82下方移动电荷对第一有源层72和第二有源层82的影响。第一辅助电极120和第二辅助电极130同层设置并通过连接走线131电性连接后相当于在第一基板10和驱动薄膜晶体管70、开关薄膜晶体管80之间设置的屏蔽结构,能有效屏蔽第一基板10和驱动薄膜晶体管70、开关薄膜晶体管80之间的有机膜层或无机膜层内移动电荷的对第一有源层72和第二有源层82的影响,进而提高驱动薄膜晶体管70和开关薄膜晶体管80的可靠性,提升显示面板的稳定性和显示效果。In this embodiment of the present application, the orthographic projection of the first
另一方面,本申请还提供一种显示面板的制作方法,请参阅图4,图4是本申请实施例提供的显示面板的制作流程图,包括以下步骤:On the other hand, the present application also provides a manufacturing method of a display panel, please refer to FIG. 4 , FIG. 4 is a manufacturing flowchart of a display panel provided by an embodiment of the present application, including the following steps:
S10、在第一基板10上形成驱动薄膜晶体管70的第一有源层72。S10 , forming the first
在本申请实施例中,第一基板10可以为可弯曲的柔性基板,例如,各种塑料膜,或采用聚对苯二甲酸乙二醇酯、聚醚砜、聚碳酸酯,聚酰亚胺及其衍生物等制成的基板。In the embodiment of the present application, the
在本申请实施例中,在第一基板10上形成驱动薄膜晶体管70的第一有源层72的步骤,具体包括:在第二基板30上形成第二缓冲层40;在第二缓冲层40上形成第一基板10;在第一基板10上形成第一缓冲层20,在第一缓冲层20上形成第一介质层50,在第一介质层50上形成第一有源层72。In the embodiment of the present application, the step of forming the first
在本申请实施例中,在第一基板10上形成驱动薄膜晶体管70的第一有源层72的步骤,在第一基板10上形成第一缓冲层20,在第一缓冲层20上形成与第二有源层82对应的第一辅助电极120,与第一有源层72对应的第二辅助电极130,其中,第一辅助电极120与第二辅助电极130电性连接,在第一辅助电极120和第二辅助电极130上形成第一介质层50,在第一介质层50上形成第一有源层72。In the embodiment of the present application, in the step of forming the first
S20、在第一有源层72远离第一基板10的一侧形成开关薄膜晶体管80的第二有源层82。S20 , forming the second
在本申请实施例中,在第一有源层72远离第一基板10的一侧形成开关薄膜晶体管80的第二有源层82的步骤,具体包括:在第一有源层72上形成第一栅极绝缘层60,在第一栅极绝缘层60上同层形成第一栅极71和第二栅极81。在第一栅极71和第二栅极81上形成第二栅极绝缘层90,在第二绝缘层上形成与第二栅极81对应的第二有源层82;在第二有源层82上形成第三栅极绝缘层100,在第三栅极绝缘层100上形成与第一栅极71对应的第三栅极74,其中,第一栅极71和第三栅极74形成电容;在第三栅极74上形成第二介质层110,在第二介质层110上同层形成第一电极73和第二电极83,且第一电极73和第二电极83电性连接,其中,第一电极73包括第一源极732和第一漏极731,第一源极732和第一漏极731通过过孔与第一有源层72电性连接,形成顶栅结构的驱动薄膜晶体管70;第二电极83包括第二源极832和第二漏极831,第二源极832和第二漏极831通过过孔与第二有源层82电性连接,形成底栅结构的开关薄膜晶体管80。In the embodiment of the present application, the step of forming the second
在本申请实施例中,第一有源层72与第二有源层82的材料均包括低温多晶硅。具体地,第一有源层72与第二有源层82的材料包括但不限于硅基材料,如非晶硅,低温多晶硅等;金属氧化物半导体,如非晶氧化铟镓锌,氧化锌,氮氧化锌,氧化铟锌锡等;以及有机物材料,如六噻吩,聚噻吩等。其中,低温多晶硅材料具有电子迁移率快,使用低温多晶硅材料可以使薄膜电路可以做得更小、更薄,电路本身的功耗也较低,进而提高显示面板的分辨率和稳定性。另外,氧化物半导体材料的载流子迁移率较高,有利于提高薄膜晶体管的稳定性,且氧化物半导体材料具有对可见光透明、工艺温度低及可大面积制作等优点,将氧化物薄膜晶体管应用于显示面板的显示区,能够有效提高显示区的像素密度、开口率以及亮度,同时还能够通过提高氧化物薄膜晶体管的稳定性提高显示面板的显示品质,避免出现画面残像或亮度不均匀等问题。In the embodiment of the present application, the materials of the first
需要说明的是,本发明实施例中的驱动薄膜晶体管70可以是NMOS晶体管或PMOS晶体管,开关薄膜晶体管80也可以是NMOS晶体管或PMOS晶体管,本发明实施例对驱动薄膜晶体管70以及开关薄膜晶体管80的沟道类型不做限定。It should be noted that the driving
本申请实施例提供一种显示面板及其制作方法,该显示面板包括:第一基板10、驱动薄膜晶体管70和开关薄膜晶体管80;驱动薄膜晶体管70设于第一基板10上,驱动薄膜晶体管70包括第一栅极71、第一有源层72;开关薄膜晶体管80设于第一基板10上,开关薄膜晶体管80包括第二栅极81、第二有源层82;其中,第一栅极71与第二栅极81同层设置;第一有源层72设于第一栅极71靠近第一基板10的一侧,第二有源层82设于第二栅极81远离第一基板10的一侧。本申请提供的显示面板通过在将开关薄膜晶体管80的第二有源层82设置于第二栅极81远离第一基板10的一侧,也即,增加第二有源层82与第一基板10之间的距离,解决由于第一基板10产生极化现象使得开关薄膜晶体管80的可靠性降低,进而影响显示面板的显示效果的问题。Embodiments of the present application provide a display panel and a manufacturing method thereof. The display panel includes: a
以上对本申请实施例所提供的一种显示面板及其制备方法进行了详细介绍,本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想;同时,对于本领域的技术人员,依据本申请的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本申请的限制。A display panel and a manufacturing method thereof provided by the embodiments of the present application have been described in detail above, and the principles and implementations of the present application are described with specific examples. The method of the application and its core idea; at the same time, for those skilled in the art, according to the idea of the application, there will be changes in the specific implementation and application scope. In summary, the content of this description should not be construed as LIMITATIONS ON THIS APPLICATION.
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