CN114318244A - Pot-lined structure with indirect heating platform - Google Patents

Abstract

The invention provides a pot lining structure with an indirect heating platform, which comprises: a pot body, which is a bowl-shaped structure and has an accommodating space; and at least one heating platform, which is formed in the accommodating space. Through the implementation of the present invention, the effects of avoiding the sputtering of the coating material, maximizing the evaporation area, making the temperature of the coating material more consistent, and subsequently stabilizing the coating rate after vaporization can be achieved.

Description

Pot-lined structure with indirect heating platform

technical field

The present invention is a pot lining structure with an indirect heating platform, particularly a pot lining structure with an indirect heating platform applied to coating equipment.

Background technique

As shown in FIG. 1 , the conventional pot lining structure P100 utilizes the electron beam P11 generated by the electron gun P10 to directly bombard the target/coating material P20 to melt the target and then evaporate and attach to the substrate to be plated. The thermal resistance heating method was mostly used in the early evaporation, but the target and the crucible were in direct contact with the heating source, the types of P20 coating materials that could be evaporated were limited, the target material wastage was large, and the purity of the obtained film was also insufficient.

The electron beam evaporation method can effectively improve the limitation of thermal evaporation method. Electron beam evaporation method uses the kinetic energy of high-energy electron beams to convert the thermal energy of melting the target material, and uses the saturated vapor pressure of the target material when it is close to the melting point for coating. In addition to good thermal conversion efficiency, this method can accurately control the evaporation rate, and there are fewer restrictions on the selection of target materials. Except for some compounds and alloys, most coating materials P20 can be evaporated.

As shown in FIG. 2A and FIG. 2B , the electron beam P11 generated by the conventional electron gun P10 is deflected by 180 or 270 degrees through the magnetic attraction control element P30 and directly emitted to the surface of the vaporizer. At this time, when an electron gun is used to directly heat the coating material P20 for a relatively active substance, the coating material P20 will be sprayed or sparked. The plating rate is difficult to control and stabilize.

SUMMARY OF THE INVENTION

The present invention is a pot lining structure with an indirect heating platform, which aims to solve the problems of splashing, small evaporation area, incomplete dissolution of coating materials, and problems caused by the conventional direct heating lining pot structure. The temperature of the heating coating material is inconsistent, and the coating rate after vaporization is unstable...etc.

The indirect heating method of the present invention is also applicable to coating materials with high thermal conductivity, such as silver (Ag), copper (Cu), gold (Au), platinum (Pt), to avoid splashing caused by excessive heating power of the electron gun question.

The present invention provides a pot lining structure with an indirect heating platform, which includes: a pot body, which is a bowl-shaped structure and has an accommodating space; and at least one heating platform, which is formed in the accommodating space.

Preferably, the heating platform is formed in the central part of the accommodating space.

Preferably, the at least one heating platform and the pot body are integrally formed.

Preferably, the heating platform is a structure with a bottom area greater than or equal to a top area.

Preferably, the heating platform is in the form of a cone, a cylinder, a polygonal cylinder, or a polygonal cone.

Preferably, the periphery of the heating platform is further formed with at least one extension fin extending outward.

Preferably, the heating platform and/or the pot body are made of molybdenum or tungsten.

By the implementation of the present invention, at least the following progressive effects can be achieved:

1. The indirect heating method of the present invention can be used for the evaporation of low-boiling point coating materials, such as arsenic (As), so as to avoid the direct irradiation of the electron gun and cause the problem of sputtering.

2. The indirect heating method of the present invention can also be applied to coating materials with high thermal conductivity, such as silver (Ag), copper (Cu), gold (Au), and platinum (Pt), so as to avoid excessive heating power of the electron gun. Splash problem.

3. Because the heating is indirectly heating the coating material by the liner, the dissolution of the coating material is more complete, and the control of the coating rate is more stable.

Fourth, the evaporation area can be maximized instead of the traditional single-point high-temperature evaporation source.

5. Using the indirect heating type pot lining structure of the present invention, the coating material can be completely heated, so that the temperature of the heated coating material is more consistent. as well as

6. The more stable the temperature control of the heated coating material, the more stable the coating rate after vaporization.

In order for any person skilled in the related art to understand the technical content of the present invention and implement it accordingly, and according to the content disclosed in this specification, the scope of the patent application and the drawings, any person skilled in the related art can easily understand the related objects and advantages of the present invention Therefore, the detailed features and advantages of the present invention will be described in detail in the embodiments.

Description of drawings

FIG. 1 shows the structure of the lining pot in which the electron beam of the conventional electron gun is directly emitted to the surface of the evaporator.

FIG. 2A is a schematic diagram of the variation of the coating rate of the conventional conventional pot lining structure with the heating time of the coating material.

FIG. 2B is a schematic diagram of the conventional conventional pot-lined structure, wherein the heating temperature is spread out with the dots as the center.

3A is a cross-sectional embodiment view of a three-dimensional embodiment view of a pot lining structure according to the present invention.

FIG. 3B is a three-dimensional embodiment view of a pot lining structure of the present invention.

FIG. 4 is a structural embodiment diagram of a pot lining with multiple heating platforms according to the present invention.

FIG. 5A is an embodiment diagram of a cylindrical heating platform.

FIG. 5B is an embodiment diagram of a polygonal pyramid heating platform.

FIG. 5C is an embodiment diagram of a polygonal cylindrical heating platform.

FIG. 6 is a diagram illustrating an embodiment of the pot lining structure in which the heating platform further has extended fins.

FIG. 7A is a diagram of an embodiment of the pot-lined structure using a heating platform for uniform temperature heating.

FIG. 7B is a characteristic curve of the coating rate of the pot-lined structure whose coating rate is stabilized due to the thermal stability of the coating material.

【Description of main component symbols】

P100: Existing conventional pot lining structure P10: Electron gun

P11: Electron beam P20: Coating material

P30: Magnetic control element 100: Pan-lined structure with indirect heating platform

10: Pot body 110: Accommodating space

20: Heating Platform 211: Cone

212: Cylinder 213: Polygon Cylinder

214: Polygon Cone 220: Extended Fins

Detailed ways

As shown in FIGS. 3A to 3B , the present embodiment is a pot lining structure 100 with an indirect heating platform, which includes: a pot body 10 ; and at least one heating platform 20 . The pot lining structure of this embodiment is to change the traditional electron gun P10 that can only directly heat the coating material P20, and the pot lining structure 100 of this embodiment can also be applied to the 180-degree and 270-degree electron guns P10 in the market.

The pot body 10 has a bowl-shaped structure and has an accommodating space 110 for accommodating the coating material P20 to be heated, such as titanium (Ti), silver (Ag), copper (Cu), and gold (Au) of metal. , platinum (Pt)... etc., or non-metallic fluoride, arsenic (As)... etc.

As shown in FIG. 4 , the heating platform 20 can be a single or multiple heating platforms 20 and is formed in the accommodating space 110 of the pot body 10 . In order to enable the heat to be conducted evenly, when there is only a single heating platform 20, the heating platform 20 can be especially formed in the central part of the accommodating space 110, so that the heat can be more uniformly conducted to the surrounding.

In order to conduct heat through the pot body 10, the heating platform 20 and the pot body 10 can be integrally formed. In addition, the heating platform 20 and/or the pot body 10 may be made of high temperature resistant metal materials, such as molybdenum (Mo) or tungsten (W).

As shown in FIG. 5A to FIG. 5C , in order to adapt to different products, the shape of the heating platform 20 can also have more diverse designs. For example, the heating platform 20 is a structure with a bottom area greater than or equal to a top area. Or the heating platform 20 is a structure of a cone 211 , a cylinder 212 , a polygonal cylinder 213 , or a polygonal cone 214 .

As shown in FIG. 6 , in order to uniformly extend the heat energy from the heating platform 20 to the periphery, at least one extension fin 220 can be formed on the periphery of the above-mentioned various heating platforms 20 by extending outward. The fins 220 can conduct extended conduction of thermal energy.

As shown in FIG. 7A and FIG. 7B , the pot lining structure 100 of the present embodiment can prevent the coating material P20 from being sprayed or sparked when the heating platform 20 is used for uniform temperature heating as indicated by the arrow in the coating material P20 In addition, the plating rate of the pot lining structure 100 is stabilized due to the heating of the coating material P20, so that the plating rate is also stabilized.

The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Technical personnel, within the scope of the technical solution of the present invention, can make some changes or modifications to equivalent examples of equivalent changes by using the technical content disclosed above, but any content that does not depart from the technical solution of the present invention, according to the present invention. Any simple modifications, equivalent changes and modifications made to the above embodiments by the technical essence of the invention still fall within the scope of the technical solutions of the present invention.

Claims (7)

1. a pot lining structure with an indirect heating platform, is characterized in that, it comprises: a pot body, which has a bowl-like structure and has an accommodating space; and At least one heating platform is formed in the accommodating space. 2 . The pot lining structure according to claim 1 , wherein the heating platform is formed at a central portion of the accommodating space. 3 . 3 . The pot lining structure according to claim 1 , wherein the at least one heating platform and the pot body are integrally formed. 4 . 4 . The pot lining structure according to claim 1 , wherein the heating platform is a structure with a bottom area greater than or equal to a top area. 5 . 5 . The pot lining structure according to claim 1 , wherein the heating platform is a structure of a cone, a cylinder, a polygonal cylinder, or a polygonal cone. 6 . 6 . The pot lining structure according to claim 1 , wherein the periphery of the heating platform is further extended to form at least one extending fin. 7 . 7 . The pot lining structure according to claim 1 , wherein the heating platform and/or the pot body are made of molybdenum or tungsten. 8 .

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