[go: up one dir, main page]

CN114300573A - A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells - Google Patents

A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells Download PDF

Info

Publication number
CN114300573A
CN114300573A CN202111413121.5A CN202111413121A CN114300573A CN 114300573 A CN114300573 A CN 114300573A CN 202111413121 A CN202111413121 A CN 202111413121A CN 114300573 A CN114300573 A CN 114300573A
Authority
CN
China
Prior art keywords
laser
offset
pattern
aluminum
aluminum grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111413121.5A
Other languages
Chinese (zh)
Inventor
荆蓉蓉
张树德
钱洪强
周海龙
张俊巍
王展
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Talesun Solar Technologies Co Ltd
Original Assignee
Suzhou Talesun Solar Technologies Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Talesun Solar Technologies Co Ltd filed Critical Suzhou Talesun Solar Technologies Co Ltd
Priority to CN202111413121.5A priority Critical patent/CN114300573A/en
Publication of CN114300573A publication Critical patent/CN114300573A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

本发明公开了一种优化晶硅太阳电池制作时背面套印偏移监控的方法,包括以下步骤:a.电池片的制造,在PERC双面电池的硅片衬底上形成检测图案,即背激光图形和通过丝网印刷方法在前层图案轮廓范围内套印铝栅线;b.丝网印刷套印对准检测,将圆弧处的激光线延长至所述硅片衬底的边缘,所述铝栅线图形套印所述背激光图形,在所述铝栅线图形外有激光线露出;通过直接检查四个圆弧角延长出来的激光线与印刷的铝栅线有无对齐来监控套印有无偏移。本发明提供的方法减少擦拭带来的铝浆损耗,降低生产成本,也避免因擦拭不干净,导致电池片效率、良率损失。

Figure 202111413121

The invention discloses a method for optimizing the monitoring of back overprinting offset during the manufacture of crystalline silicon solar cells, comprising the following steps: a. cell manufacturing, forming a detection pattern on the silicon wafer substrate of a PERC double-sided cell, that is, a back laser Graphics and overprinting of aluminum grid lines within the outline of the front layer pattern by screen printing; b. Screen printing overprint alignment detection, extending the laser line at the arc to the edge of the silicon wafer substrate, the aluminum The grid pattern overprints the back laser pattern, and the laser lines are exposed outside the aluminum grid pattern; by directly checking whether the laser lines extended from the four arc corners are aligned with the printed aluminum grid lines to monitor whether the overprinting is present or not offset. The method provided by the invention reduces the loss of aluminum paste caused by wiping, reduces the production cost, and also avoids the loss of cell efficiency and yield due to unclean wiping.

Figure 202111413121

Description

一种优化晶硅太阳电池制作时背面套印偏移监控的方法A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells

技术领域technical field

本发明涉及太阳能辅助技术领域,本发明涉及一种优化晶硅太阳电池制作时背面套印偏移监控的方法。The invention relates to the technical field of solar energy assistance, and relates to a method for optimizing the monitoring of back overprint offset during the manufacture of crystalline silicon solar cells.

背景技术Background technique

近年来,由于能源危机以及日益严重的环境污染日趋严重,各国对可再生能源的生产和投入逐渐加大力度,整个行业链都取得了突破性的迅猛发展,度电成本也越来越低,部分国家和地区可以实现供给侧平价上网。低成本、高效率是降低度电成本的两大法宝,PERC工艺由于其功率提升快、成本下降显著一直成为整个行业内扩产的标配。In recent years, due to the energy crisis and the increasingly serious environmental pollution, countries have gradually increased the production and investment of renewable energy, the entire industry chain has achieved breakthroughs and rapid development, and the cost of electricity is getting lower and lower. In some countries and regions, supply-side parity can be achieved. Low cost and high efficiency are the two magic weapons for reducing the cost of electricity per kilowatt hour. The PERC process has always become the standard for production expansion in the entire industry due to its rapid power increase and significant cost reduction.

PERC双面电池的概念自2015年被推出,快速地商业化应用。双面电池采用铝栅线结构,代替常规PERC电池的全铝层结构,在保持正面高转换效率的同时,背面也可以发电。背铝栅线需对准激光开槽区,通过激光开槽区与硅片形成欧姆接触,达到收集载流子的作用。因为铝浆的特性决定了其不能烧穿AlOx和SiNx:H膜,若铝栅线未印在激光开槽区域,就不能形成较好质量的局域表面场(LBSF)和电极接触,造成电池EL图形发黑,影响电池效率。The concept of PERC bifacial cells was introduced in 2015 and has been rapidly commercialized. The double-sided cell adopts an aluminum grid line structure instead of the all-aluminum layer structure of conventional PERC cells. While maintaining the high conversion efficiency of the front side, the back side can also generate electricity. The back aluminum gate line needs to be aligned with the laser grooved area, and an ohmic contact is formed with the silicon wafer through the laser grooved area to achieve the effect of collecting carriers. Because the characteristics of the aluminum paste determine that it cannot burn through the AlO x and SiN x :H films, if the aluminum grid lines are not printed in the laser grooved area, a better quality localized surface field (LBSF) and electrode contact cannot be formed. Cause the battery EL graphics to be black, affecting the battery efficiency.

目前监控印刷是否有偏移,需要将已印好的铝栅线擦拭掉部分,再在显微镜下检查铝栅线是否印刷在激光开孔区域,被擦拭后的片子无法直接补印擦掉的部分,需要将整片的铝栅线擦拭干净后再次印刷。该方法需要员工专门抽空来擦拭进行返工,增加了员工的工作量;将铝浆擦拭掉重新印刷,增加了铝浆的损耗;如擦拭不干净,会影响电池片效率及良率。At present, to monitor whether there is any offset in the printing, it is necessary to wipe off the printed aluminum grid lines, and then check under the microscope whether the aluminum grid lines are printed in the laser opening area. , you need to wipe the whole aluminum grid line clean and print again. This method requires employees to take the time to wipe and rework, which increases the workload of employees; wipes off the aluminum paste and reprints it, which increases the loss of aluminum paste; if the wipe is not clean, it will affect the cell efficiency and yield.

因此亟待研发一种更便捷更节约人力成本的晶硅太阳电池制作时背面套印偏移监控的方法。Therefore, there is an urgent need to develop a more convenient and labor-saving method for monitoring the backside overprint offset during the fabrication of crystalline silicon solar cells.

发明内容SUMMARY OF THE INVENTION

为了解决现有技术中的问题,本发明提供了一种优化晶硅太阳电池制作时背面套印偏移监控的方法。本申请通过将四角的激光开孔区域外扩,超出铝栅线,则可以在不用擦拭铝栅线情况下,直接监控铝栅线印刷有无偏移情况;且对激光设备产量基本无影响。In order to solve the problems in the prior art, the present invention provides a method for optimizing the monitoring of the backside overprint offset during the fabrication of crystalline silicon solar cells. In the present application, by expanding the laser opening area at the four corners beyond the aluminum grid line, it is possible to directly monitor the printing of the aluminum grid line for offset without wiping the aluminum grid line; and the output of the laser equipment is basically not affected.

本发明公开了一种优化晶硅太阳电池制作时背面套印偏移监控的方法,所述方法包括以下步骤:The invention discloses a method for optimizing the monitoring of back overprinting offset during the manufacture of crystalline silicon solar cells, the method comprising the following steps:

a.电池片的制造,在PERC双面电池的硅片衬底上使用激光工艺按照背激光图形将氧化铝+SiNx:H介质膜击穿,露出硅片衬底,即背激光开孔,铝栅线套印在背激光开孔的区域,实现与硅片衬底接触,经高温烧结后,制成电池片;a. The manufacture of the cell, using the laser process on the silicon wafer substrate of the PERC double-sided cell to break down the aluminum oxide + SiN x :H dielectric film according to the back laser pattern, exposing the silicon wafer substrate, that is, the back laser opening, The aluminum grid lines are overprinted in the area of the back laser opening to achieve contact with the silicon wafer substrate, and after high temperature sintering, the battery is made;

b.丝网印刷套印对准检测,电池片构造为圆角方形,具有四个对称设置的圆弧角,各角设计相同;将所述圆弧处的激光线延长至所述硅片衬底的边缘,所述铝栅线图形套印背激光图形,在所述铝栅线图形外有激光线露出;b. Screen printing overprint alignment detection, the cell structure is a square with rounded corners, with four symmetrically arranged arc corners, and each corner has the same design; extend the laser line at the arc to the silicon wafer substrate The edge of the aluminum grid line pattern is overprinted with the back laser pattern, and the laser line is exposed outside the aluminum grid line pattern;

通过直接检查四个圆弧角延长出来的激光线与印刷的铝栅线有无对齐来监控套印有无偏移,若所述激光线与所述铝栅线对齐,则判定为无偏移;若所述激光线与所述铝栅线未对齐,则判定为有偏移。By directly checking whether the laser lines extended from the four arc corners are aligned with the printed aluminum grid lines to monitor whether the overprint is offset or not, if the laser lines are aligned with the aluminum grid lines, it is determined that there is no offset; If the laser line and the aluminum grid line are not aligned, it is determined that there is an offset.

作为本发明实施方式的进一步改进,设置多个背激光图形作为检测图案。As a further improvement of the embodiment of the present invention, a plurality of back laser patterns are provided as detection patterns.

作为本发明实施方式的进一步改进,所述多个检测图案分为至少一组,同一组中的多个检测图案以前层图案的一段铝栅线的轮廓线为基准。As a further improvement of the embodiment of the present invention, the plurality of detection patterns are divided into at least one group, and the plurality of detection patterns in the same group are based on the outline of a section of aluminum grid lines of the previous layer pattern.

作为本发明实施方式的进一步改进,丝网印刷套印对准检测时,根据亮度较高的检测图案的数量,判断正面电极的偏移量。As a further improvement of the embodiment of the present invention, during the screen printing overprint alignment detection, the offset of the front electrode is determined according to the number of detection patterns with higher brightness.

本发明具有如下有益效果:The present invention has the following beneficial effects:

1、本发明公开的方法无需员工专门抽时间来擦拭进行返工,减少员工工作量,有更多的时间用于维护产线正常生产;1. The method disclosed in the present invention does not require employees to take time to wipe for rework, reduces the workload of employees, and has more time for maintaining the normal production of the production line;

2、本发明公开的方法减少擦拭带来的铝浆损耗,降低生产成本;2. The method disclosed in the present invention reduces the loss of aluminum paste caused by wiping and reduces production costs;

3、本发明公开的方法可避免因擦拭不干净,导致电池片效率、良率损失。3. The method disclosed in the present invention can avoid the loss of cell efficiency and yield due to unclean wiping.

附图说明Description of drawings

为了更为清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员而言,在不付出创造性劳动的前提下,还可以根据这些附图获得其它附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are just some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.

图1为本发明实施例涉及的一种优化晶硅太阳电池制作时背面套印偏移监控的方法工作原理示意图。FIG. 1 is a schematic diagram of the working principle of a method for optimizing backside overprint offset monitoring in the manufacture of a crystalline silicon solar cell according to an embodiment of the present invention.

具体实施方式Detailed ways

为了便于理解本发明,下文将结合说明书附图和较佳的实施例对本发明作更全面、细致地描述,但本发明的保护范围并不限于以下具体的实施例。需要说明的是,在不冲突的情况下,本发明中的实施例及实施例中的特征可以相互组合。In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively and in detail below with reference to the accompanying drawings and preferred embodiments of the specification, but the protection scope of the present invention is not limited to the following specific embodiments. It should be noted that the embodiments of the present invention and the features of the embodiments may be combined with each other under the condition of no conflict.

本发明公开了一种优化晶硅太阳电池制作时背面套印偏移监控的方法,所述方法包括以下步骤:The invention discloses a method for optimizing the monitoring of back overprinting offset during the manufacture of crystalline silicon solar cells, the method comprising the following steps:

a.电池片的制造,在PERC双面电池的硅片衬底上使用激光工艺按照背激光图形将氧化铝+SiNx:H介质膜击穿,露出硅片衬底,即背激光开孔,铝栅线套印在背激光开孔的区域,实现与硅片衬底接触,经高温烧结后,制成电池片;a. The manufacture of the cell, using the laser process on the silicon wafer substrate of the PERC double-sided cell to break down the aluminum oxide + SiN x :H dielectric film according to the back laser pattern, exposing the silicon wafer substrate, that is, the back laser opening, The aluminum grid lines are overprinted in the area of the back laser opening to achieve contact with the silicon wafer substrate, and after high temperature sintering, the battery is made;

b.丝网印刷套印对准检测,电池片构造为圆角方形,具有四个对称设置的圆弧角,各角设计相同;将圆弧处的激光线延长至硅片衬底的边缘,铝栅线图形套印背激光图形,在铝栅线图形外有激光线露出;b. Screen printing overprint alignment detection, the cell structure is a rounded square, with four symmetrically arranged arc corners, and the design of each corner is the same; the laser line at the arc is extended to the edge of the silicon wafer substrate, aluminum The grid pattern is overprinted with the back laser pattern, and the laser line is exposed outside the aluminum grid pattern;

通过直接检查四个圆弧角延长出来的激光线与印刷的铝栅线有无对齐来监控套印有无偏移,若所述激光线与所述铝栅线对齐,则判定为无偏移;若所述激光线与所述铝栅线未对齐,则判定为有偏移。By directly checking whether the laser lines extended from the four arc corners are aligned with the printed aluminum grid lines to monitor whether the overprint is offset or not, if the laser lines are aligned with the aluminum grid lines, it is determined that there is no offset; If the laser line and the aluminum grid line are not aligned, it is determined that there is an offset.

具体地,如图1所示,电池片为圆角方形,有相同的4个圆弧角,此列举的为其中一个角,各角设计相同。a图为铝栅线图形,b1、c1为现有技术中的背激光图形及套印后图形,b2、c2为本申请涉及的背激光图形及套印后图形。b2对比b1,圆弧处的激光线延长,延长至硅片衬底边缘,延长线对激光设备产量基本没有影响,铝栅线图形套印优化后的背激光图形,在铝栅线图形外有激光线露出;监控套印有无偏移,可以直接检查四个圆弧角延长出来的激光线与印刷的铝栅线有无对齐。Specifically, as shown in FIG. 1 , the battery sheet is a square with rounded corners, and has the same four rounded corners. This example is one of the corners, and the design of each corner is the same. Picture a is an aluminum grid line pattern, b1 and c1 are the back laser pattern and the overprinted pattern in the prior art, and b2 and c2 are the backside laser pattern and the overprinted pattern involved in the application. Compared with b1, the laser line at the arc is extended to the edge of the silicon wafer substrate. The extension line has no effect on the output of the laser equipment. The aluminum grid line pattern is overprinted with the optimized back laser pattern, and there is a laser outside the aluminum grid line pattern. The lines are exposed; monitor whether the overprint is offset or not, you can directly check whether the laser lines extended from the four arc corners are aligned with the printed aluminum grid lines.

进一步地,在其他可选的实施方式中,可以设置多个检测图案,多个检测图案分为至少一组,同一组中的多个检测图案以前层图案的一段铝栅线的轮廓线为基准。Further, in other optional embodiments, a plurality of detection patterns may be set, and the plurality of detection patterns are divided into at least one group, and the plurality of detection patterns in the same group are based on the outline of a section of aluminum grid line of the previous layer pattern. .

优选地,丝网印刷套印对准检测时,根据亮度较高的检测图案的数量,判断正面电极的偏移量。Preferably, the offset of the front electrode is determined according to the number of detection patterns with higher brightness during the screen printing overprint alignment detection.

本发明具有如下有益效果:The present invention has the following beneficial effects:

1、本发明公开的方法无需员工专门抽时间来擦拭进行返工,减少员工工作量,有更多的时间用于维护产线正常生产;1. The method disclosed in the present invention does not require employees to take time to wipe for rework, reduces the workload of employees, and has more time for maintaining the normal production of the production line;

2、本发明公开的方法减少擦拭带来的铝浆损耗,降低生产成本;2. The method disclosed in the present invention reduces the loss of aluminum paste caused by wiping and reduces production costs;

3、本发明公开的方法可避免因擦拭不干净,导致电池片效率、良率损失。3. The method disclosed in the present invention can avoid the loss of cell efficiency and yield due to unclean wiping.

Claims (4)

1.一种优化晶硅太阳电池制作时背面套印偏移监控的方法,其特征在于,所述方法包括以下步骤:1. a method for backside overprint offset monitoring during the manufacture of an optimized crystalline silicon solar cell, is characterized in that, the method comprises the following steps: a.电池片的制造,在PERC双面电池的硅片衬底上使用激光工艺按照背激光图形将氧化铝+SiNx:H介质膜击穿,露出硅片衬底,即背激光开孔,铝栅线套印在背激光开孔的区域,实现与硅片衬底接触,经高温烧结后,制成电池片;a. The manufacture of the cell, using the laser process on the silicon wafer substrate of the PERC double-sided cell to break down the aluminum oxide + SiN x :H dielectric film according to the back laser pattern, exposing the silicon wafer substrate, that is, the back laser opening, The aluminum grid lines are overprinted in the area of the back laser opening to achieve contact with the silicon wafer substrate, and after high temperature sintering, the battery is made; b.丝网印刷套印对准检测,电池片构造为圆角方形,具有四个对称设置的圆弧角,各角设计相同;将所述圆弧处的激光线延长至所述硅片衬底的边缘,所述铝栅线图形套印背激光图形,在所述铝栅线图形外有激光线露出;b. Screen printing overprint alignment detection, the cell structure is a square with rounded corners, with four symmetrically arranged arc corners, and each corner has the same design; extend the laser line at the arc to the silicon wafer substrate The edge of the aluminum grid line pattern is overprinted with the back laser pattern, and the laser line is exposed outside the aluminum grid line pattern; 通过直接检查四个圆弧角延长出来的激光线与印刷的铝栅线有无对齐来监控套印有无偏移,若所述激光线与所述铝栅线对齐,则判定为无偏移;若所述激光线与所述铝栅线未对齐,则判定为有偏移。By directly checking whether the laser lines extended from the four arc corners are aligned with the printed aluminum grid lines to monitor whether the overprint is offset or not, if the laser lines are aligned with the aluminum grid lines, it is determined that there is no offset; If the laser line and the aluminum grid line are not aligned, it is determined that there is an offset. 2.根据权利要求1所述的优化晶硅太阳电池制作时背面套印偏移监控的方法,其特征在于,设置多个背激光图形作为检测图案。2 . The method for optimizing the monitoring of backside overprinting during the manufacture of crystalline silicon solar cells according to claim 1 , wherein a plurality of backside laser patterns are set as detection patterns. 3 . 3.根据权利要求2所述的优化晶硅太阳电池制作时背面套印偏移监控的方法,其特征在于,多个检测图案分为至少一组,同一组中的多个检测图案以前层图案的一段铝栅线的轮廓线为基准。3. The method for backside overprint offset monitoring when optimizing the production of crystalline silicon solar cells according to claim 2, wherein the plurality of detection patterns are divided into at least one group, and the plurality of detection patterns in the same group are the same as those of the previous layer pattern. The outline of a section of aluminum grid line is the benchmark. 4.根据权利要求1所述的优化晶硅太阳电池制作时背面套印偏移监控的方法,其特征在于,丝网印刷套印对准检测时,根据亮度较高的检测图案的数量,判断正面电极的偏移量。4. The method for monitoring the offset of back overprinting during the production of optimized crystalline silicon solar cells according to claim 1, wherein, during the alignment detection of screen printing overprinting, the front electrode is judged according to the number of detection patterns with higher brightness offset.
CN202111413121.5A 2021-11-25 2021-11-25 A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells Pending CN114300573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111413121.5A CN114300573A (en) 2021-11-25 2021-11-25 A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111413121.5A CN114300573A (en) 2021-11-25 2021-11-25 A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells

Publications (1)

Publication Number Publication Date
CN114300573A true CN114300573A (en) 2022-04-08

Family

ID=80965659

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111413121.5A Pending CN114300573A (en) 2021-11-25 2021-11-25 A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells

Country Status (1)

Country Link
CN (1) CN114300573A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102810603A (en) * 2012-09-04 2012-12-05 镇江大全太阳能有限公司 Screen Printing Overprinting Alignment Detection Method for Solar Cell Electrodes
CN109904249A (en) * 2019-01-03 2019-06-18 浙江爱旭太阳能科技有限公司 P-type PERC double-sided solar battery back side figure aligns printing process, preparation method and battery
CN211404512U (en) * 2019-12-12 2020-09-01 浙江爱旭太阳能科技有限公司 Double-sided battery back laser grooving structure capable of rapidly detecting printing offset

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102810603A (en) * 2012-09-04 2012-12-05 镇江大全太阳能有限公司 Screen Printing Overprinting Alignment Detection Method for Solar Cell Electrodes
CN109904249A (en) * 2019-01-03 2019-06-18 浙江爱旭太阳能科技有限公司 P-type PERC double-sided solar battery back side figure aligns printing process, preparation method and battery
CN211404512U (en) * 2019-12-12 2020-09-01 浙江爱旭太阳能科技有限公司 Double-sided battery back laser grooving structure capable of rapidly detecting printing offset

Similar Documents

Publication Publication Date Title
CN100505334C (en) A reworking method on degraded products after the printing of crystal silicon solar battery
EP2355167A2 (en) Method for manufacturing electrode for solar cell, substrate for solar cell manufactured by the same, and solar cell manufactured by the same
WO2005109524A1 (en) Solar cell and manufacturing method thereof
CN113471337B (en) Preparation method of heterojunction solar cells
CN108735829A (en) The p-type PERC double-sided solar batteries and preparation method thereof of back side photoelectric conversion efficiency can be promoted
CN109300998A (en) A double-sided crystalline silicon solar cell
CN111312862A (en) Alignment marking mode of selective emitter battery
CN113140644A (en) Single-sided or double-sided solar cell patterned mask and preparation method of solar cell
WO2015003600A1 (en) Mwt solar battery
CN115440849A (en) Double-sided solar cell and preparation method thereof
EP1870942B1 (en) Solar cell
CN210897298U (en) Solar cell and printing screen for solar cell
CN104868011A (en) Manufacturing method of N type all-aluminum back emitter solar cell and solar cell prepared by the same
CN103066135B (en) Selective emitter solar battery that a kind of front electrode main grid line and silicon substrate are isolated and preparation method thereof
CN101499503A (en) Production method of non-homogeneous aluminum BSF solar cell
CN110379884A (en) A kind of preparation method of battery surface laser positioning point and PERC battery
CN117542919B (en) Patterning method and preparation method of full back electrode contact crystalline silicon photovoltaic cell
CN114300573A (en) A method for optimizing the monitoring of backside overprint offset during the production of crystalline silicon solar cells
CN113284956A (en) Improved crystalline silicon solar cell printing process
CN103904144B (en) Crystal silicon solar energy battery hollow type primary gate electrode
CN107910398B (en) Manufacturing method of P-type PERC double-sided solar cell
CN215163230U (en) Patterned mask of single-sided or double-sided solar cell and solar cell
CN103192619B (en) A kind of printing process of solar battery sheet
CN101894872A (en) Fine electrode crystalline silicon solar battery and preparation method thereof
JP3746410B2 (en) Method for manufacturing thin film solar cell

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20220408

RJ01 Rejection of invention patent application after publication