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CN114295955A - Chip screening method and device and chip screening equipment - Google Patents

Chip screening method and device and chip screening equipment Download PDF

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CN114295955A
CN114295955A CN202111471252.9A CN202111471252A CN114295955A CN 114295955 A CN114295955 A CN 114295955A CN 202111471252 A CN202111471252 A CN 202111471252A CN 114295955 A CN114295955 A CN 114295955A
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CN114295955B (en
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邓冏
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Shandong Dai Microelectronics Co ltd
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Abstract

本申请提供了一种芯片的筛片方法、装置及筛片设备,该方法包括:对多个样品芯片进行板级测试,将在极限温度下正常工作且结温值处于第一预定范围内的样品芯片确定为第一目标芯片,获取多个第一目标芯片的静态电流值和振荡频率值,并确定静态电流阈值和振荡频率阈值;对第一目标芯片进行FT测试,将在预定时间内的结温温升值在第二预定范围内的第一目标芯片确定为第二目标芯片;对第二目标芯片进行板级测试,将在极限温度下正常工作的第二目标芯片确定为第三目标芯片,获取第三目标芯片在FT测试中的结温温升值,得到结温温升阈值;根据静态电流阈值、振荡频率阈值和结温温升阈值对待测试芯片进行筛片,解决了筛片功耗限制低导致芯片良率低的问题。

Figure 202111471252

The present application provides a chip screening method, device, and screening device, the method includes: performing board-level testing on a plurality of sample chips, which will work normally under extreme temperatures and have a junction temperature value within a first predetermined range. The sample chip is determined as the first target chip, the quiescent current value and oscillation frequency value of a plurality of first target chips are obtained, and the quiescent current threshold value and the oscillation frequency threshold value are determined; The first target chip whose junction temperature rise value is within the second predetermined range is determined as the second target chip; the board-level test is performed on the second target chip, and the second target chip that works normally under the extreme temperature is determined as the third target chip , obtain the junction temperature rise value of the third target chip in the FT test, and obtain the junction temperature rise threshold; screen the chip to be tested according to the static current threshold, the oscillation frequency threshold and the junction temperature rise threshold to solve the power consumption of the screen. Low constraints lead to low chip yield issues.

Figure 202111471252

Description

芯片的筛片方法、装置及筛片设备Chip sieving method, device and sieving equipment

技术领域technical field

本申请涉及芯片测试技术领域,具体而言,涉及一种芯片的筛片方法、装置及筛片设备。The present application relates to the technical field of chip testing, and in particular, to a chip screening method, device, and screening equipment.

背景技术Background technique

随着芯片面临的功耗问题越来越严重,芯片功耗过大是芯片量产良率损失的主要原因之一。不同的晶片和不同的批次之间,因为掺杂、刻蚀、温度等外界因素导致MOSFETs参数的变化范围比较大,为减轻设计困难度,需要将器件性能限制在某个范围内,并报废超出这个范围的芯片,一般芯片量产过程中筛片主要从两方面限制功耗,其中一个是常温静态电流的上限,另一个是片上集成的监测process快慢的OSC振荡电路环。仅仅基于这两项测试,会有部分芯片在功耗边界值附近有高温反转现象,即部分在功耗限制范围内的芯片高温功耗异常,具体表现为芯片工作时结温超过预设的值或厂家规定的芯片结温的上限,部分在功耗限制范围外的芯片高温表现反而正常。如果为了不让功耗限制范围内出现高温反转现象的芯片进入市场,势必要继续降低功耗限制,这样对量产芯片的良率的损失是巨大的。As the power consumption problem faced by chips becomes more and more serious, excessive chip power consumption is one of the main reasons for the loss of chip mass production yield. Between different wafers and different batches, the parameters of MOSFETs vary widely due to external factors such as doping, etching, and temperature. In order to reduce the difficulty of design, it is necessary to limit the device performance to a certain range and scrap it. For chips beyond this range, the sieves mainly limit power consumption from two aspects during the mass production of chips, one of which is the upper limit of the quiescent current at room temperature, and the other is the OSC oscillation circuit loop integrated on the chip to monitor the speed of the process. Based on these two tests alone, there will be some chips with high temperature inversion near the power consumption boundary value, that is, some chips within the power consumption limit have abnormal high temperature power consumption. The specific manifestation is that the junction temperature of the chip exceeds the preset value during operation. The value or the upper limit of the chip junction temperature specified by the manufacturer, some chips outside the power consumption limit perform normally at high temperature. In order to prevent chips with high temperature inversion within the power consumption limit from entering the market, it is necessary to continue to reduce the power consumption limit, which will cause a huge loss to the yield of mass-produced chips.

因此,亟需一种新的芯片筛片方法来解决芯片量产筛片过程中功耗限制低导致芯片良率低的问题。Therefore, a new chip screening method is urgently needed to solve the problem of low chip yield due to low power consumption limitation in the process of mass production of chips.

发明内容SUMMARY OF THE INVENTION

本申请的主要目的在于提供一种芯片的筛片方法、装置及筛片设备,以解决现有技术中筛片方法的功耗限制低导致芯片良率低的问题。The main purpose of the present application is to provide a chip screening method, device and screening equipment, so as to solve the problem of low chip yield due to low power consumption limitation of the screening method in the prior art.

根据本发明实施例的一个方面,提供了一种芯片的筛片方法,所述筛片方法包括:对多个样品芯片进行板级测试,所述板级测试的环境温度为极限温度,将满足第一预定条件的所述样品芯片确定为第一目标芯片,获取多个所述第一目标芯片的静态电流值和振荡频率值,并确定静态电流阈值和振荡频率阈值,所述极限温度为所述样品芯片的应用场景的最高环境温度,所述第一预定条件为测试芯片正常工作且结温值在第一预定范围内;对所述第一目标芯片进行FT测试,将满足第二预定条件的所述第一目标芯片确定为第二目标芯片,所述第二预定条件为测试芯片在预定时间内的结温温升值在第二预定范围内;对所述第二目标芯片进行板级测试,所述板级测试的环境温度为极限温度,将满足所述第一预定条件和所述第二预定条件的所述第二目标芯片确定为第三目标芯片,获取所述第三目标芯片在所述FT测试中的结温温升值,确定结温温升阈值;根据所述静态电流阈值、所述振荡频率阈值和所述结温温升阈值对待测试芯片进行筛片,所述待测试芯片与所述样品芯片为相同型号的芯片。According to an aspect of the embodiments of the present invention, a method for screening chips is provided, the screening method includes: performing a board-level test on a plurality of sample chips, and the ambient temperature of the board-level test is a limit temperature, which will satisfy the The sample chip under the first predetermined condition is determined as the first target chip, a plurality of static current values and oscillation frequency values of the first target chips are obtained, and the static current threshold value and the oscillation frequency threshold value are determined, and the limit temperature is set as the limit temperature. The highest ambient temperature of the application scenario of the sample chip, the first predetermined condition is that the test chip works normally and the junction temperature value is within the first predetermined range; FT test on the first target chip will satisfy the second predetermined condition The first target chip is determined as the second target chip, and the second predetermined condition is that the junction temperature rise value of the test chip within a predetermined time is within the second predetermined range; the board-level test is performed on the second target chip , the ambient temperature of the board-level test is the limit temperature, the second target chip that satisfies the first predetermined condition and the second predetermined condition is determined as the third target chip, and the third target chip is obtained at The junction temperature rise value in the FT test determines the junction temperature rise threshold; according to the static current threshold, the oscillation frequency threshold and the junction temperature rise threshold, the chips to be tested are screened, and the chips to be tested are screened. The same type of chip as the sample chip.

可选地,在对所述第一目标芯片进行FT测试,将满足第二预定条件的所述第一目标芯片确定为第二目标芯片之前,所述方法还包括:对多个所述第一目标芯片进行板级测试,所述板级测试的环境温度为极限温度,检测所述第一目标芯片的结温值为所述预定温度的情况下,所述第一目标芯片在所述预定时间内的结温温升值,得到第一结温温升值;根据所述第一结温温升值确定所述第二预定范围。Optionally, before the FT test is performed on the first target chip, and the first target chip that satisfies the second predetermined condition is determined as the second target chip, the method further includes: performing an FT test on a plurality of the first target chips. The target chip is tested at the board level, the ambient temperature of the board level test is the limit temperature, and when the junction temperature value of the first target chip is detected as the predetermined temperature, the first target chip is at the predetermined time. The first junction temperature rise value is obtained; the second predetermined range is determined according to the first junction temperature rise value.

可选地,对所述第一目标芯片进行FT测试,将满足第二预定条件的所述第一目标芯片确定为第二目标芯片,包括:在测试温度为设定温度和测试激励为设定测试激励的情况下,检测所述第一目标芯片在所述预定时间的结温温升值,得到第二结温温升值,所述测试温度为对所述第一目标芯片进行所述FT测试的环境温度,所述测试激励为对所述第一目标芯片进行所述FT测试的激励;调整所述设定温度和所述设定测试激励,直至得到所述第二目标芯片。Optionally, performing an FT test on the first target chip, and determining the first target chip that satisfies the second predetermined condition as the second target chip, including: setting the test temperature to a set temperature and a test excitation to a set temperature In the case of test excitation, the junction temperature rise value of the first target chip at the predetermined time is detected, and the second junction temperature rise value is obtained, and the test temperature is the temperature of the FT test on the first target chip. The ambient temperature, the test excitation is the excitation for performing the FT test on the first target chip; the set temperature and the set test excitation are adjusted until the second target chip is obtained.

可选地,根据所述静态电流阈值、所述振荡频率阈值和所述结温温升阈值对待测试芯片进行筛片,包括:在所述环境温度为生产温度的情况下,获取所述待测试芯片的静态电流值和所述待测试芯片的振荡电路的振荡频率值,得到目标静态电流值和目标振荡频率值,所述生产温度为所述待测试芯片生产作业时所处的环境的温度;在所述待测试芯片的结温值为所述预定温度的情况下,检测所述待测试芯片在所述预定时间内的结温温升值,得到目标结温温升值;在所述目标静态电流值小于或者等于所述静态电流阈值、所述目标振荡频率值小于或者等于所述振荡频率阈值和所述目标结温温升值小于或者等于所述结温温升阈值均成立的情况下,确定所述待测试芯片合格。Optionally, sifting the chip to be tested according to the static current threshold, the oscillation frequency threshold and the junction temperature rise threshold, including: in the case that the ambient temperature is a production temperature, obtaining the to-be-tested chip. The quiescent current value of the chip and the oscillating frequency value of the oscillation circuit of the chip to be tested are obtained to obtain the target quiescent current value and the target oscillating frequency value, and the production temperature is the temperature of the environment where the chip to be tested is produced; In the case that the junction temperature value of the chip to be tested is the predetermined temperature, the junction temperature rise value of the chip to be tested within the predetermined time is detected to obtain a target junction temperature rise value; When the value is less than or equal to the quiescent current threshold, the target oscillation frequency value is less than or equal to the oscillation frequency threshold, and the target junction temperature rise value is less than or equal to the junction temperature rise threshold, it is determined that the The chip to be tested is qualified.

可选地,所述预定温度在110℃~120℃之间。Optionally, the predetermined temperature is between 110°C and 120°C.

可选地,所述预定时间大于或者等于100ms。Optionally, the predetermined time is greater than or equal to 100ms.

可选地,所述第一预定范围为115℃~125℃。Optionally, the first predetermined range is 115°C to 125°C.

可选地,所述第二预定范围的最小值为第一温升值,所述第二预定范围的最大值为第二温升值,所述第一温升值为所述第一结温温升值的70%~90%,所述第二温升值为所述第一结温温升值的110%~130%。Optionally, the minimum value of the second predetermined range is the first temperature rise value, the maximum value of the second predetermined range is the second temperature rise value, and the first temperature rise value is the first junction temperature rise value. 70% to 90%, and the second temperature rise value is 110% to 130% of the first junction temperature rise value.

根据本发明实施例的另一个方面,提供了一种芯片的筛片装置,所述装置包括:第一测试单元,用于对多个样品芯片进行板级测试,所述板级测试的环境温度为极限温度,将满足第一预定条件的所述样品芯片确定为第一目标芯片,获取多个所述第一目标芯片的静态电流值和振荡频率值,并确定静态电流阈值和振荡频率阈值,所述极限温度为所述样品芯片的应用场景的最高环境温度,所述第一预定条件为测试芯片正常工作且结温值在第一预定范围内;第二测试单元,用于对所述第一目标芯片进行FT测试,将满足第二预定条件的所述第一目标芯片确定为第二目标芯片,所述第二预定条件为测试芯片在预定时间内的结温温升值在第二预定范围内;第三测试单元,用于对所述第二目标芯片进行板级测试,所述板级测试的环境温度为极限温度,将满足所述第一预定条件和所述第二预定条件的所述第二目标芯片确定为第三目标芯片,获取所述第三目标芯片在所述FT测试中的结温温升值,确定结温温升阈值;判断单元,用于根据所述静态电流阈值、所述振荡频率阈值和所述结温温升阈值对待测试芯片进行筛片,所述待测试芯片与所述样品芯片为相同型号的芯片。According to another aspect of the embodiments of the present invention, there is provided a chip screening device, the device includes: a first testing unit for performing board-level testing on a plurality of sample chips, and the ambient temperature of the board-level testing is In order to limit the temperature, the sample chip that satisfies the first predetermined condition is determined as the first target chip, the quiescent current value and oscillation frequency value of a plurality of the first target chips are obtained, and the quiescent current threshold value and the oscillation frequency threshold value are determined, The limit temperature is the highest ambient temperature of the application scenario of the sample chip, the first predetermined condition is that the test chip works normally and the junction temperature value is within the first predetermined range; the second test unit is used for A target chip is subjected to an FT test, and the first target chip that satisfies a second predetermined condition is determined as the second target chip, and the second predetermined condition is that the junction temperature rise value of the test chip within a predetermined time is within a second predetermined range inside; a third test unit, used to perform board-level testing on the second target chip, the ambient temperature of the board-level testing is an extreme temperature, and will satisfy all the first predetermined conditions and the second predetermined conditions. The second target chip is determined as the third target chip, the junction temperature rise value of the third target chip in the FT test is obtained, and the junction temperature rise threshold value is determined; the judgment unit is used for according to the static current threshold value, The oscillation frequency threshold and the junction temperature rise threshold are screened for the chip to be tested, and the chip to be tested and the sample chip are chips of the same type.

根据本发明实施例的再一方面,还提供了一种筛片设备,所述筛片设备包括处理器和存储器,所述处理器用于运行程序,其中,所述程序运行时执行上述任意一种所述的筛片方法。According to yet another aspect of the embodiments of the present invention, a screening device is also provided, the screening device includes a processor and a memory, and the processor is used for running a program, wherein, when the program is running, any one of the foregoing is executed The sieve method.

在本发明实施例中,上述芯片的筛片方法对多个样品芯片进行极限温度下的板级测试,选出在极限温度下可正常工作且结温值处于第一预定范围内的芯片,即为第一目标芯片,获取多个第一目标芯片的静态电流值和振荡频率值,得到静态电流阈值和振荡频率阈值;然后对多个第一目标芯片进行FT测试,选出在预定时间内的结温温升值在第二预定范围内的芯片,确定为第二目标芯片;再对第二目标芯片进行极限温度下的板级测试,将在极限温度下能够正常工作,结温值处于第一预定范围内,且在预定时间内的结温温升值在第二预定范围内的第二目标芯片,确定为第三目标芯片,获取第三目标芯片在上述FT测试中的结温温升值,得到结温温升阈值;通过静态电流阈值、振荡频率阈值和结温温升阈值三个筛片条件进行筛片,即可避免满足功耗限制条件的芯片出现高温反转现象,从而不必降低功耗限制,即不用降低静态电流阈值和振荡频率阈值,从而提高了芯片良率,解决了现有技术中筛片方法的功耗限制低导致芯片良率低的问题。In the embodiment of the present invention, the above-mentioned chip sifting method performs board-level testing on a plurality of sample chips under the extreme temperature, and selects the chips that can work normally under the extreme temperature and whose junction temperature value is within the first predetermined range, that is, For the first target chip, obtain the static current value and oscillation frequency value of multiple first target chips, and obtain the static current threshold value and the oscillation frequency threshold value; then perform FT test on the multiple first target chips, and select the The chip whose junction temperature rise value is within the second predetermined range is determined as the second target chip; then the board-level test under the extreme temperature is performed on the second target chip, and it will work normally under the extreme temperature, and the junction temperature value is in the first The second target chip that is within the predetermined range and the junction temperature rise value within the predetermined time is within the second predetermined range is determined as the third target chip, and the junction temperature rise value of the third target chip in the above-mentioned FT test is obtained. Junction temperature temperature rise threshold; sieving through three screen conditions: static current threshold, oscillation frequency threshold and junction temperature temperature rise threshold, can avoid high temperature reversal phenomenon of chips that meet the power consumption limit conditions, so it is not necessary to reduce power consumption Limitation, that is, the quiescent current threshold and the oscillation frequency threshold do not need to be lowered, thereby improving the chip yield and solving the problem of low chip yield caused by low power consumption limitation of the screening method in the prior art.

附图说明Description of drawings

构成本申请的一部分的说明书附图用来提供对本申请的进一步理解,本申请的示意性实施例及其说明用于解释本申请,并不构成对本申请的不当限定。在附图中:The accompanying drawings that form a part of the present application are used to provide further understanding of the present application, and the schematic embodiments and descriptions of the present application are used to explain the present application and do not constitute improper limitations on the present application. In the attached image:

图1示出了根据本申请实施例的芯片的筛片方法的流程图;1 shows a flowchart of a method for sieving a chip according to an embodiment of the present application;

图2示出了根据本申请实施例的芯片的筛片装置的示意图。FIG. 2 shows a schematic diagram of a screen device of a chip according to an embodiment of the present application.

具体实施方式Detailed ways

需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

为了使本技术领域的人员更好地理解本申请方案,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分的实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本申请保护的范围。In order to make those skilled in the art better understand the solutions of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only The embodiments are part of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the scope of protection of the present application.

需要说明的是,本申请的说明书和权利要求书及上述附图中的术语“第一”、“第二”等是用于区别类似的对象,而不必用于描述特定的顺序或先后次序。应该理解这样使用的数据在适当情况下可以互换,以便这里描述的本申请的实施例。此外,术语“包括”和“具有”以及他们的任何变形,意图在于覆盖不排他的包含,例如,包含了一系列步骤或单元的过程、方法、系统、产品或设备不必限于清楚地列出的那些步骤或单元,而是可包括没有清楚地列出的或对于这些过程、方法、产品或设备固有的其它步骤或单元。It should be noted that the terms "first", "second", etc. in the description and claims of the present application and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific sequence or sequence. It is to be understood that the data so used are interchangeable under appropriate circumstances for the embodiments of the application described herein. Furthermore, the terms "comprising" and "having" and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those expressly listed Rather, those steps or units may include other steps or units not expressly listed or inherent to these processes, methods, products or devices.

应该理解的是,当元件(诸如层、膜、区域、或衬底)描述为在另一元件“上”时,该元件可直接在该另一元件上,或者也可存在中间元件。而且,在说明书以及权利要求书中,当描述有元件“连接”至另一元件时,该元件可“直接连接”至该另一元件,或者通过第三元件“连接”至该另一元件。It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. Also, in the specification and claims, when an element is described as being "connected" to another element, the element can be "directly connected" to the other element or "connected" to the other element through a third element.

为了便于描述,以下对本申请实施例涉及的部分名词或术语进行说明:For the convenience of description, some nouns or terms involved in the embodiments of the present application are described below:

板级测试,主要应用于功能测试,使用PCB板+芯片搭建一个“模拟”的芯片工作环境,把芯片的接口都引出,检测芯片的功能,或者在各种严苛环境下看芯片能否正常工作。需要应用的设备主要是仪器仪表,需要制作的主要是EVB评估板。Board-level testing is mainly used in functional testing. It uses PCB board + chip to build a "simulated" chip working environment, pulls out the interface of the chip, detects the function of the chip, or checks whether the chip is normal in various harsh environments. Work. The equipment that needs to be applied is mainly instrumentation, and the main thing that needs to be made is the EVB evaluation board.

CP测试:英文全称为Circuit Probing\Chip Probing,也称为晶圆测试,测试对象是针对整片晶圆中的每一个晶粒,目的是确保整片晶圆中的每一个晶粒都能基本满足器件的特征或者设计规格书,通常包括电压、电流、时序和功能的验证。CP test: English full name is Circuit Probing\Chip Probing, also known as wafer test, the test object is for each die in the whole wafer, the purpose is to ensure that each die in the whole wafer can basically Meeting device characteristics or design specifications, usually including verification of voltage, current, timing, and function.

FT测试:英文全称为Final Test,是芯片出厂前的最后一道拦截。测试对象是针对封装好的芯片,FT测试一般分为两个步骤:1)自动测试设备;2)系统级别测试。FT test: The full name in English is Final Test, which is the last interception before the chip leaves the factory. The test object is for the packaged chip. The FT test is generally divided into two steps: 1) automatic test equipment; 2) system level test.

正如背景技术中所说的,现有技术中的筛片方法中功耗限制范围内出现高温反转现象,导致需要降低功耗限制从而导致芯片良率低,为了解决上述问题,本申请提供了一种芯片的筛片方法、装置及筛片设备。As mentioned in the background art, the high temperature inversion phenomenon occurs within the power consumption limit in the screening method in the prior art, which leads to the need to reduce the power consumption limit, resulting in low chip yield. In order to solve the above problems, the present application provides A chip screening method, device and screening equipment.

根据本申请的实施例,提供了一种芯片的筛片方法。According to an embodiment of the present application, a method for sieving a chip is provided.

图1是本申请实施例的芯片的筛片方法的流程图。如图1所示,该方法包括以下步骤:FIG. 1 is a flowchart of a method for sieving a chip according to an embodiment of the present application. As shown in Figure 1, the method includes the following steps:

步骤S101,对多个样品芯片进行板级测试,上述板级测试的环境温度为极限温度,将满足第一预定条件的上述样品芯片确定为第一目标芯片,获取多个上述第一目标芯片的静态电流值和振荡频率值,并确定静态电流阈值和振荡频率阈值,上述极限温度为上述样品芯片的应用场景的最高环境温度,上述第一预定条件为测试芯片正常工作且结温值在第一预定范围内;In step S101, board-level testing is performed on a plurality of sample chips. The ambient temperature of the board-level testing is an extreme temperature, and the sample chips that meet the first predetermined condition are determined as the first target chips, and the data of the plurality of first target chips are obtained. The quiescent current value and the oscillation frequency value, and determine the quiescent current threshold value and the oscillation frequency threshold value, the above-mentioned limit temperature is the highest ambient temperature of the application scenario of the above-mentioned sample chip, and the above-mentioned first predetermined condition is that the test chip works normally and the junction temperature value is within the first within the predetermined range;

步骤S102,对上述第一目标芯片进行FT测试,将满足第二预定条件的上述第一目标芯片确定为第二目标芯片,上述第二预定条件为测试芯片在预定时间内的结温温升值在第二预定范围内;Step S102, FT test is performed on the above-mentioned first target chip, and the above-mentioned first target chip that satisfies the second predetermined condition is determined as the second target chip, and the above-mentioned second predetermined condition is that the junction temperature rise value of the test chip within a predetermined time is within within the second predetermined range;

步骤S103,对上述第二目标芯片进行板级测试,上述板级测试的环境温度为极限温度,将满足上述第一预定条件和上述第二预定条件的上述第二目标芯片确定为第三目标芯片,获取上述第三目标芯片在上述FT测试中的结温温升值,确定结温温升阈值;Step S103, performing a board-level test on the second target chip, the ambient temperature of the board-level test being the limit temperature, and determining the second target chip that satisfies the first predetermined condition and the second predetermined condition as the third target chip , obtain the junction temperature rise value of the third target chip in the above FT test, and determine the junction temperature rise threshold;

步骤S104,根据上述静态电流阈值、上述振荡频率阈值和上述结温温升阈值对待测试芯片进行筛片,上述待测试芯片与上述样品芯片为相同型号的芯片。In step S104, the chip to be tested is screened according to the static current threshold, the oscillation frequency threshold and the junction temperature rise threshold. The chip to be tested and the sample chip are of the same type.

该筛片方法对多个样品芯片进行极限温度下的板级测试,选出在极限温度下可正常工作且结温值处于第一预定范围内的芯片,即为第一目标芯片,获取多个第一目标芯片的静态电流值和振荡频率值,得到静态电流阈值和振荡频率阈值;然后对多个第一目标芯片进行FT测试,选出在预定时间内的结温温升值在第二预定范围内的芯片,确定为第二目标芯片;再对第二目标芯片进行极限温度下的板级测试,将在极限温度下能够正常工作,结温值处于第一预定范围内,且在预定时间内的结温温升值在第二预定范围内的第二目标芯片,确定为第三目标芯片,获取第三目标芯片在上述FT测试中的结温温升值,得到结温温升阈值;通过静态电流阈值、振荡频率阈值和结温温升阈值三个筛片条件进行筛片,即可避免满足功耗限制条件的芯片出现高温反转现象,从而不必降低功耗限制,即不用降低静态电流阈值和振荡频率阈值,从而提高了芯片良率,解决了现有技术中筛片方法的功耗限制低导致芯片良率低的问题。The screening method performs board-level testing on a plurality of sample chips at an extreme temperature, and selects a chip that can work normally at the extreme temperature and whose junction temperature value is within a first predetermined range, that is, the first target chip, and obtains a plurality of chips. The quiescent current value and oscillation frequency value of the first target chip are obtained to obtain the quiescent current threshold value and the oscillation frequency threshold value; then FT test is performed on a plurality of first target chips, and the junction temperature rise value within a predetermined time is selected within the second predetermined range The chip inside is determined as the second target chip; then the board-level test under the extreme temperature is performed on the second target chip, and it will work normally under the extreme temperature, and the junction temperature value is within the first predetermined range and within the predetermined time. The second target chip whose junction temperature rise value is within the second predetermined range is determined as the third target chip, and the junction temperature rise value of the third target chip in the above-mentioned FT test is obtained to obtain the junction temperature rise threshold; The threshold value, the oscillation frequency threshold value and the junction temperature rise threshold value are screened under three screen conditions, so as to avoid the high temperature inversion phenomenon of the chips that meet the power consumption limit conditions, so that the power consumption limit does not need to be reduced, that is, the quiescent current threshold value and the quiescent current threshold value are not reduced. The oscillation frequency threshold is increased, thereby improving the chip yield, and solving the problem of low chip yield caused by the low power consumption limitation of the screening method in the prior art.

具体地,因为静态电流值和振荡频率值都是CP测试阶段得到的,极限温度下的板级测试得到第一目标芯片后,通过OTP直接读取这些第一目标芯片的静态电流值和振荡频率值,即可根据这些第一目标芯片的静态电流值和振荡频率值确定静态电流阈值和振荡频率阈值。在具体的实施例中,在上述第一目标芯片有多个的情况下,上述静态电流阈值可以为任意一个第一目标芯片的静态电流值,也可以为多个第一目标芯片的静态电流值的平均值或者最大值,上述振荡频率阈值可以为任意一个第一目标芯片的振荡电路的振荡频率值,也可以为多个第一目标芯片的振荡电路的振荡频率值的平均值或者最大值,在上述第三目标芯片有多个的情况下,上述结温温升阈值可以为任意一个第三目标芯片在FT测试中的结温温升值,也可以为多个第三目标芯片在FT测试中的结温温升值的平均值或者最大值。Specifically, because the quiescent current value and the oscillation frequency value are obtained in the CP test stage, after obtaining the first target chip in the board-level test under extreme temperature, the quiescent current value and oscillation frequency of these first target chips can be directly read through OTP. value, the quiescent current threshold value and the oscillating frequency threshold value can be determined according to the quiescent current value and oscillating frequency value of these first target chips. In a specific embodiment, when there are multiple first target chips, the quiescent current threshold may be the quiescent current value of any first target chip, or the quiescent current value of multiple first target chips The above-mentioned oscillation frequency threshold may be the oscillation frequency value of the oscillation circuit of any one first target chip, or may be the average or maximum value of the oscillation frequency values of the oscillation circuits of a plurality of first target chips, In the case where there are multiple third target chips, the junction temperature temperature rise threshold may be the junction temperature rise value of any third target chip in the FT test, or may be the junction temperature rise value of a plurality of third target chips in the FT test The average or maximum value of the junction temperature rise.

优选地,上述静态电流阈值为多个上述第一目标芯片的静态电流值的最大值,上述振荡频率阈值为多个上述第一目标芯片的振荡电路的振荡频率值的最大值,上述结温温升阈值为多个第三目标芯片在FT测试中的结温温升值的最大值。具体地,上述第一目标芯片和第三目标芯片均有多个,上述静态电流阈值和上述振荡频率阈值均取多个上述第一目标芯片的静态电流和振荡频率的最大值,结温温升阈值取多个第三目标芯片在FT测试中的结温温升值的最大值,进一步提高芯片良率。Preferably, the quiescent current threshold value is the maximum value of the quiescent current values of the plurality of first target chips, the oscillation frequency threshold value is the maximum value of the oscillation frequency values of the oscillating circuits of the plurality of the first target chips, and the junction temperature The rise threshold is the maximum value of the junction temperature rise values of the plurality of third target chips in the FT test. Specifically, there are multiple first target chips and third target chips, the quiescent current threshold and the oscillation frequency threshold both take the maximum value of the quiescent current and oscillation frequency of the multiple first target chips, and the junction temperature rises. The threshold value is the maximum value of the junction temperature rise value of the plurality of third target chips in the FT test, so as to further improve the chip yield.

还需要说明的是,在附图的流程图示出的步骤可以在诸如一组计算机可执行指令的计算机系统中执行,并且,虽然在流程图中示出了逻辑顺序,但是在某些情况下,可以以不同于此处的顺序执行所示出或描述的步骤。It should also be noted that the steps shown in the flowcharts of the accompanying drawings may be performed in a computer system, such as a set of computer-executable instructions, and that although a logical sequence is shown in the flowcharts, in some cases , steps shown or described may be performed in an order different from that herein.

本申请的一种实施例中,在对上述第一目标芯片进行FT测试,将满足第二预定条件的上述第一目标芯片确定为第二目标芯片之前,上述方法还包括:对多个上述第一目标芯片进行板级测试,上述板级测试的环境温度为极限温度,检测上述第一目标芯片的结温值为上述预定温度的情况下,上述第一目标芯片在上述预定时间内的结温温升值,得到第一结温温升值;根据上述第一结温温升值确定上述第二预定范围。In an embodiment of the present application, before the FT test is performed on the first target chip, and the first target chip that satisfies the second predetermined condition is determined as the second target chip, the method further includes: performing an FT test on a plurality of the first target chips. A target chip is subjected to a board-level test, the ambient temperature of the board-level test is the limit temperature, and when the junction temperature of the first target chip is detected as the predetermined temperature, the junction temperature of the first target chip within the predetermined time The temperature rise value is obtained to obtain the first junction temperature rise value; the second predetermined range is determined according to the first junction temperature rise value.

具体地,检测上述第一目标芯片在上述预定时间内的结温温升值,得到第一结温温升值,以第一结温温升值为标准,确定合适的第二预定范围。Specifically, the junction temperature rise value of the first target chip within the predetermined time period is detected to obtain a first junction temperature rise value, and an appropriate second predetermined range is determined by taking the first junction temperature rise value as a standard.

本申请的一种实施例中,对上述第一目标芯片进行FT测试,将满足第二预定条件的上述第一目标芯片确定为第二目标芯片,包括:在测试温度为设定温度和测试激励为设定测试激励的情况下,检测上述第一目标芯片在上述预定时间的结温温升值,得到第二结温温升值,上述测试温度为对上述第一目标芯片进行上述FT测试的环境温度,上述测试激励为对上述第一目标芯片进行上述FT测试的激励;调整上述设定温度和上述设定测试激励,直至得到上述第二目标芯片。In an embodiment of the present application, the FT test is performed on the first target chip, and the first target chip that satisfies the second predetermined condition is determined as the second target chip, including: the test temperature is a set temperature and a test excitation In the case of setting the test excitation, the junction temperature rise value of the first target chip at the predetermined time is detected, and the second junction temperature rise value is obtained, and the test temperature is the ambient temperature for performing the FT test on the first target chip. , the above-mentioned test excitation is an excitation for performing the above-mentioned FT test on the above-mentioned first target chip; the above-mentioned set temperature and the above-mentioned set test excitation are adjusted until the above-mentioned second target chip is obtained.

具体地,通过不断调整设定测试温度与设定测试激励这种循环校准的方式,使得第二结温温升值不断逼近第二预定范围,直至筛选出第二结温温升值处于第二预定范围的芯片,即第二目标芯片,测试激励为在FT测试中对待测试芯片输入的测试信息,不同的测试信息可以使芯片运行在不同的工作状态。Specifically, by continuously adjusting the set test temperature and set test excitation, the cyclic calibration method makes the second junction temperature rise value continuously approach the second predetermined range, until the second junction temperature rise value is screened out to be in the second predetermined range The chip, that is, the second target chip, the test excitation is the test information input to the chip to be tested in the FT test, and different test information can make the chip run in different working states.

本申请的一种实施例中,根据上述静态电流阈值、上述振荡频率阈值和上述结温温升阈值对待测试芯片进行筛片,包括:在上述环境温度为生产温度的情况下,获取上述待测试芯片的静态电流值和上述待测试芯片的振荡电路的振荡频率值,得到目标静态电流值和目标振荡频率值,上述生产温度为上述待测试芯片生产作业时所处的环境的温度;在上述待测试芯片的结温值为上述预定温度的情况下,检测上述待测试芯片在上述预定时间内的结温温升值,得到目标结温温升值;在上述目标静态电流值小于或者等于上述静态电流阈值、上述目标振荡频率值小于或者等于上述振荡频率阈值和上述目标结温温升值小于或者等于上述结温温升阈值均成立的情况下,确定上述待测试芯片合格。In an embodiment of the present application, sieving the chip to be tested according to the above-mentioned static current threshold, the above-mentioned oscillation frequency threshold and the above-mentioned junction temperature rise threshold includes: in the case that the above-mentioned ambient temperature is the production temperature, obtaining the above-mentioned to-be-tested temperature The quiescent current value of the chip and the oscillating frequency value of the oscillation circuit of the above-mentioned chip to be tested are obtained to obtain the target quiescent current value and the target oscillating frequency value, and the above-mentioned production temperature is the temperature of the environment in which the above-mentioned chip to be tested is produced; When the junction temperature value of the test chip is the above predetermined temperature, the junction temperature rise value of the chip to be tested within the above predetermined time is detected to obtain the target junction temperature rise value; when the above target static current value is less than or equal to the above static current threshold value . When the above target oscillation frequency value is less than or equal to the above-mentioned oscillation frequency threshold value and the above-mentioned target junction temperature rise value is less than or equal to the above-mentioned junction temperature temperature rise threshold value, it is determined that the above-mentioned chip to be tested is qualified.

具体地,检测待测试芯片的静态电流和上述待测试芯片的振荡电路的振荡频率,以及在预定温度下上述预定时间内的结温温升值,得到目标静态电流、目标振荡频率和目标结温温升值,通过静态电流阈值、振荡频率阈值和结温温升阈值三个筛片条件进行筛片,即在待测试芯片满足上述目标静态电流小于或者等于上述静态电流阈值、上述目标振荡频率小于或者等于上述振荡频率阈值和上述目标结温温升值小于或者等于上述结温温升阈值的条件,待测试芯片合格,即可避免满足功耗限制条件的芯片出现高温反转现象,从而不必降低功耗限制,即不用降低静态电流阈值和振荡频率阈值,从而提高了芯片良率。Specifically, the quiescent current of the chip to be tested, the oscillation frequency of the oscillation circuit of the above-mentioned chip to be tested, and the temperature rise of the junction temperature within the predetermined time at a predetermined temperature are detected to obtain the target quiescent current, target oscillation frequency and target junction temperature The value is increased, and the screen is screened according to the three screen conditions of static current threshold, oscillation frequency threshold and junction temperature rise threshold, that is, when the chip to be tested satisfies that the above target static current is less than or equal to the above static current threshold, the above target oscillation frequency is less than or equal to If the above-mentioned oscillation frequency threshold and the above-mentioned target junction temperature rise value are less than or equal to the above-mentioned junction temperature rise threshold, the chips to be tested are qualified, and the high temperature inversion phenomenon of the chips that meet the power consumption limit conditions can be avoided, so it is not necessary to reduce the power consumption limit , that is, without lowering the quiescent current threshold and the oscillation frequency threshold, thereby improving the chip yield.

本申请的一种实施例中,上述预定温度在110℃~120℃之间。In an embodiment of the present application, the predetermined temperature is between 110°C and 120°C.

具体地,芯片可正常工作的结温上限值为125℃,上述预定温度设置在上述范围内,预留一定的结温温升空间,避免检测结温温升值过程中芯片结温超过上限损坏,并使得芯片结温值达到预定温度后存在出现高温反转现象的可能,优选地,预定温度可设定为110℃。通过芯片结温值达到预定温度检测的预定时间的结温温升值设定第二预定范围,以根据第二预定范围筛选出第二目标芯片,从而通过检测第二目标芯片得到的结温温升阈值可以筛除可能出现高温反转现象的芯片,保证芯片的质量。Specifically, the upper limit of the junction temperature that the chip can work normally is 125°C, and the above predetermined temperature is set within the above range, and a certain junction temperature rise space is reserved to avoid damage to the chip when the junction temperature exceeds the upper limit in the process of detecting the junction temperature rise. , and the high temperature inversion phenomenon may occur after the chip junction temperature value reaches a predetermined temperature, preferably, the predetermined temperature can be set to 110°C. The second predetermined range is set according to the junction temperature rise value when the chip junction temperature value reaches the predetermined time of the predetermined temperature detection, so as to screen out the second target chip according to the second predetermined range, so that the junction temperature rise obtained by detecting the second target chip The threshold value can screen out chips that may have high temperature inversion, and ensure the quality of the chips.

本申请的一种实施例中,上述预定时间大于或者等于100ms。In an embodiment of the present application, the predetermined time is greater than or equal to 100 ms.

具体地,因为FT测试昂贵,为了节省成本,可以将预定时间设定为100ms,当然,预定时间越长获取的结温温升值出现的误差越小,预定时间可以大于100ms,以进一步提升筛片的良率。Specifically, because the FT test is expensive, in order to save costs, the predetermined time can be set to 100ms. Of course, the longer the predetermined time is, the smaller the error of the obtained junction temperature rise value is, and the predetermined time can be greater than 100ms to further improve the screen. yield rate.

本申请的一种实施例中,上述第一预定范围为115℃~125℃。In an embodiment of the present application, the above-mentioned first predetermined range is 115°C to 125°C.

具体地,由于芯片可正常工作的结温上限值为125℃,将第一预定范围设定为115℃~125℃,即可筛选出在极限温度下正常工作且结温值处于上述第一预定范围内的样品芯片作为第一目标芯片,提高结温温升阈值测量的准确度,进一步提高良率。Specifically, since the upper limit of the junction temperature for the normal operation of the chip is 125°C, the first predetermined range is set to 115°C to 125°C, and the junction temperature that can work normally at the extreme temperature can be screened out and the junction temperature is at the above-mentioned first predetermined range. The sample chip within the predetermined range is used as the first target chip, which improves the accuracy of the measurement of the junction temperature temperature rise threshold and further improves the yield.

本申请的一种实施例中,上述第二预定范围的最小值为第一温升值,上述第二预定范围的最大值为第二温升值,上述第一温升值在上述第一结温温升值的70%~90%之间,上述第二温升值在上述第一结温温升值的110%~130%之间。In an embodiment of the present application, the minimum value of the second predetermined range is the first temperature rise value, the maximum value of the second predetermined range is the second temperature rise value, and the first temperature rise value is the first junction temperature rise value. 70%-90% of the above-mentioned second temperature rise value is between 110%-130% of the above-mentioned first junction temperature rise value.

具体地,上述第一温升值和上述第二温升值可以根据实际情况进行选择,优选地,将第一升温值设定为第一结温温升值的80%,第二升温值设定为第一结温温升值的120%,是因为芯片可正常工作的结温上限值为125℃,而预定温度设定为110℃~120℃之间,过高和过低都可能会导致测试不准确,所以将第二预定范围设定为更接近第一结温温升值,提高芯片量产的良率。Specifically, the first temperature rise value and the second temperature rise value can be selected according to actual conditions. Preferably, the first temperature rise value is set to 80% of the first junction temperature rise value, and the second temperature rise value is set to the third A junction temperature rise of 120% is because the upper limit of the junction temperature for the chip to work normally is 125°C, and the predetermined temperature is set between 110°C and 120°C. Too high and too low may cause the test to fail. Therefore, the second predetermined range is set to be closer to the first junction temperature rise value, so as to improve the yield rate of chip mass production.

本申请实施例还提供了一种芯片的筛片装置,需要说明的是,本申请实施例的芯片的筛片装置可以用于执行本申请实施例所提供的芯片的筛片方法。以下对本申请实施例提供的芯片的筛片装置进行介绍。The embodiment of the present application further provides a chip screening device. It should be noted that the chip screening device of the embodiment of the present application can be used to perform the chip screening method provided by the embodiment of the present application. The sieve device for chips provided in the embodiments of the present application will be introduced below.

图2是根据本申请实施例的芯片的筛片装置的示意图。如图2所示,该装置包括:FIG. 2 is a schematic diagram of a screen device of a chip according to an embodiment of the present application. As shown in Figure 2, the device includes:

第一测试单元10,用于对多个样品芯片进行板级测试,上述板级测试的环境温度为极限温度,将满足第一预定条件的上述样品芯片确定为第一目标芯片,获取多个上述第一目标芯片的静态电流值和振荡频率值,并确定静态电流阈值和振荡频率阈值,上述极限温度为上述样品芯片的应用场景的最高环境温度,上述第一预定条件为测试芯片正常工作且结温值在第一预定范围内;The first testing unit 10 is configured to perform board-level testing on a plurality of sample chips. The ambient temperature of the board-level testing is an extreme temperature, and the sample chip that meets the first predetermined condition is determined as the first target chip, and a plurality of the above-mentioned sample chips are obtained. The quiescent current value and oscillation frequency value of the first target chip, and determine the quiescent current threshold value and oscillation frequency threshold value, the above-mentioned limit temperature is the highest ambient temperature of the application scene of the above-mentioned sample chip, and the above-mentioned first predetermined condition is that the test chip is working normally and junction. The temperature value is within the first predetermined range;

第二测试单元20,用于对上述第一目标芯片进行FT测试,将满足第二预定条件的上述第一目标芯片确定为第二目标芯片,上述第二预定条件为测试芯片在预定时间内的结温温升值在第二预定范围内;The second testing unit 20 is configured to perform an FT test on the first target chip, and determine the first target chip that satisfies a second predetermined condition as the second target chip, where the second predetermined condition is the test chip within a predetermined time. The junction temperature rise value is within the second predetermined range;

第三测试单元30,用于对上述第二目标芯片进行板级测试,上述板级测试的环境温度为极限温度,将满足上述第一预定条件和上述第二预定条件的上述第二目标芯片确定为第三目标芯片,获取上述第三目标芯片在上述FT测试中的结温温升值,确定结温温升阈值;The third testing unit 30 is configured to perform a board-level test on the second target chip. The ambient temperature of the board-level test is an extreme temperature, and the second target chip that satisfies the first predetermined condition and the second predetermined condition is determined. For the third target chip, obtain the junction temperature rise value of the third target chip in the above-mentioned FT test, and determine the junction temperature rise threshold;

判断单元40,用于根据上述静态电流阈值、上述振荡频率阈值和上述结温温升阈值对待测试芯片进行筛片,上述待测试芯片与上述样品芯片为相同型号的芯片。The judging unit 40 is configured to screen the chip to be tested according to the static current threshold, the oscillation frequency threshold and the junction temperature rise threshold, and the chip to be tested and the sample chip are of the same type.

该筛片装置对多个样品芯片进行极限温度下的板级测试,选出在极限温度下可正常工作且结温值处于第一预定范围内的芯片,即为第一目标芯片,获取多个第一目标芯片的静态电流值和振荡频率值,得到静态电流阈值和振荡频率阈值;然后对多个第一目标芯片进行FT测试,选出在预定时间内的结温温升值在第二预定范围内的芯片,确定为第二目标芯片;再对第二目标芯片进行极限温度下的板级测试,将在极限温度下能够正常工作,结温值处于第一预定范围内,且在预定时间内的结温温升值在第二预定范围内的第二目标芯片,确定为第三目标芯片,获取第三目标芯片在上述FT测试中的结温温升值,得到结温温升阈值;通过静态电流阈值、振荡频率阈值和结温温升阈值三个筛片条件进行筛片,即可避免满足功耗限制条件的芯片出现高温反转现象,从而不必降低功耗限制,即不用降低静态电流阈值和振荡频率阈值,从而提高了芯片良率,解决了现有技术中筛片方法的功耗限制低导致芯片良率低的问题。The screening device performs board-level testing on multiple sample chips under extreme temperature, selects chips that can work normally under extreme temperature and whose junction temperature value is within a first predetermined range, that is, the first target chip, and obtains a plurality of chips. The quiescent current value and oscillation frequency value of the first target chip are obtained to obtain the quiescent current threshold value and the oscillation frequency threshold value; then FT test is performed on a plurality of first target chips, and the junction temperature rise value within a predetermined time is selected within the second predetermined range The chip inside is determined as the second target chip; then the board-level test under the extreme temperature is performed on the second target chip, and it will work normally under the extreme temperature, and the junction temperature value is within the first predetermined range and within the predetermined time. The second target chip whose junction temperature rise value is within the second predetermined range is determined as the third target chip, and the junction temperature rise value of the third target chip in the above-mentioned FT test is obtained to obtain the junction temperature rise threshold; The threshold value, the oscillation frequency threshold value and the junction temperature rise threshold value are screened under three screen conditions, so as to avoid the high temperature inversion phenomenon of the chips that meet the power consumption limit conditions, so that the power consumption limit does not need to be reduced, that is, the quiescent current threshold value and the quiescent current threshold value are not reduced. The oscillation frequency threshold is increased, thereby improving the chip yield, and solving the problem of low chip yield caused by the low power consumption limitation of the screening method in the prior art.

本申请的一种实施例中,上述装置还包括第四测试单元,上述第四测试单元包括第一检测模块和第一确定模块。In an embodiment of the present application, the above-mentioned apparatus further includes a fourth test unit, and the above-mentioned fourth test unit includes a first detection module and a first determination module.

第一检测模块用于对多个上述第一目标芯片进行板级测试,上述板级测试的环境温度为极限温度,检测上述第一目标芯片的结温值为上述预定温度的情况下,上述第一目标芯片在上述预定时间内的结温温升值,得到第一结温温升值;第一确定模块用于根据上述第一结温温升值确定上述第二预定范围。The first detection module is used to perform board-level testing on a plurality of the first target chips, the ambient temperature of the board-level testing is the limit temperature, and when the junction temperature of the detected first target chips is the predetermined temperature, the first detection module A first junction temperature rise value is obtained from the junction temperature rise value of a target chip within the predetermined time period; the first determination module is configured to determine the second predetermined range according to the first junction temperature rise value.

本申请的一种实施例中,上述第二测试单元还包括第二检测模块与调整模块。In an embodiment of the present application, the above-mentioned second test unit further includes a second detection module and an adjustment module.

第二检测模块用于在测试温度为设定温度和测试激励为设定测试激励的情况下,检测上述第一目标芯片在上述预定时间的结温温升值,得到第二结温温升值,上述测试温度为对上述第一目标芯片进行上述FT测试的环境温度,上述测试激励为对上述第一目标芯片进行上述FT测试的激励;调整模块用于调整上述设定温度和上述设定测试激励,直至得到上述第二目标芯片。The second detection module is configured to detect the junction temperature rise value of the first target chip at the predetermined time when the test temperature is the set temperature and the test excitation is the set test excitation, and obtain the second junction temperature rise value, the above The test temperature is the ambient temperature for performing the above-mentioned FT test on the above-mentioned first target chip, and the above-mentioned test excitation is the excitation for performing the above-mentioned FT test on the above-mentioned first target chip; the adjustment module is used to adjust the above-mentioned set temperature and the above-mentioned set test excitation, until the above-mentioned second target chip is obtained.

本申请的一种实施例中,上述判断单元包括第三检测模块、第四检测模块与第二确定模块。In an embodiment of the present application, the above judgment unit includes a third detection module, a fourth detection module, and a second determination module.

第三检测模块用于在上述环境温度为生产温度的情况下,获取上述待测试芯片的静态电流值和上述待测试芯片的振荡电路的振荡频率值,得到目标静态电流值和目标振荡频率值,上述生产温度为上述待测试芯片生产作业时所处的环境的温度。The third detection module is used to obtain the static current value of the chip to be tested and the oscillation frequency value of the oscillation circuit of the chip to be tested, and obtain the target static current value and the target oscillation frequency value when the ambient temperature is the production temperature, The above-mentioned production temperature is the temperature of the environment in which the above-mentioned chip to be tested is produced.

第四检测模块用于在上述待测试芯片的结温值为上述预定温度的情况下,检测上述待测试芯片在上述预定时间内的结温温升值,得到目标结温温升值。The fourth detection module is configured to detect the junction temperature rise value of the chip to be tested within the predetermined time when the junction temperature value of the chip to be tested is the predetermined temperature to obtain a target junction temperature rise value.

第二确定模块用于在上述目标静态电流值小于或者等于上述静态电流阈值、上述目标振荡频率值小于或者等于上述振荡频率阈值和上述目标结温温升值小于或者等于上述结温温升阈值均成立的情况下,确定上述待测试芯片合格。The second determination module is configured to be established when the target static current value is less than or equal to the static current threshold value, the target oscillation frequency value is less than or equal to the oscillation frequency threshold value, and the target junction temperature rise value is less than or equal to the junction temperature rise threshold value. In the case of , it is determined that the above-mentioned chips to be tested are qualified.

本申请的一种实施例中,上述预定温度在110℃~120℃之间。In an embodiment of the present application, the predetermined temperature is between 110°C and 120°C.

本申请的一种实施例中,上述预定时间大于或者等于100ms。In an embodiment of the present application, the predetermined time is greater than or equal to 100 ms.

本申请的一种实施例中,上述第二预定范围的最小值为第一温升值,上述第二预定范围的最大值为第二温升值,上述第一温升值在上述第一结温温升值的70%~90%之间,上述第二温升值在上述第一结温温升值的110%~130%之间。In an embodiment of the present application, the minimum value of the second predetermined range is the first temperature rise value, the maximum value of the second predetermined range is the second temperature rise value, and the first temperature rise value is the first junction temperature rise value. 70%-90% of the above-mentioned second temperature rise value is between 110%-130% of the above-mentioned first junction temperature rise value.

本申请的一种实施例中,上述第一预定范围为115℃~125℃。In an embodiment of the present application, the above-mentioned first predetermined range is 115°C to 125°C.

上述芯片的筛片装置包括处理器和存储器,上述第一测试单元10、第二测试单元20、第三测试单元30与判断单元40等均作为程序单元存储在存储器中,由处理器执行存储在存储器中的上述程序单元来实现相应的功能。The sieve device of the above-mentioned chip includes a processor and a memory, and the above-mentioned first test unit 10, second test unit 20, third test unit 30 and judgment unit 40 are all stored in the memory as program units, and are executed by the processor and stored in the memory. The above program units in the memory implement the corresponding functions.

处理器中包含内核,由内核去存储器中调取相应的程序单元。内核可以设置一个或以上,通过调整内核参数来解决现有技术中的筛片方法的功耗限制低导致芯片良率低的问题。The processor includes a kernel, and the kernel calls the corresponding program unit from the memory. One or more kernels can be set, and the problem of low chip yield caused by low power consumption limitation of the screening method in the prior art can be solved by adjusting kernel parameters.

存储器可能包括计算机可读介质中的非永久性存储器,随机存取存储器(RAM)和/或非易失性内存等形式,如只读存储器(ROM)或闪存(flash RAM),存储器包括至少一个存储芯片。Memory may include non-persistent memory in computer readable media, random access memory (RAM) and/or non-volatile memory, such as read only memory (ROM) or flash memory (flash RAM), the memory including at least one memory chip.

本发明实施例提供了一种筛片设备,筛片设备包括处理器、存储器及存储在存储器上并可在处理器上运行的程序,处理器执行程序时实现上述任意一种筛片方法:The embodiment of the present invention provides a screening device, which includes a processor, a memory, and a program stored in the memory and running on the processor. When the processor executes the program, any one of the above screening methods is implemented:

本文中的筛片设备可以是服务器、PC、PAD、手机等电子设备。The sieve equipment in this article can be electronic equipment such as servers, PCs, PADs, and mobile phones.

在本发明的上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述的部分,可以参见其他实施例的相关描述。In the above-mentioned embodiments of the present invention, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.

为了使得本领域技术人员能够更加清楚本申请的技术方案以及技术效果,以下将结合具体的实施例来说明。In order to make the technical solutions and technical effects of the present application more clear to those skilled in the art, the following description will be combined with specific embodiments.

实施例1Example 1

待测试芯片要求在50℃以下可正常工作,即极限温度为50℃,本实施例的芯片的筛片方法包括以下步骤:The chip to be tested is required to work normally below 50°C, that is, the limit temperature is 50°C. The sieving method of the chip in this embodiment includes the following steps:

步骤1:在测试温度为50℃的环境温度下对多个样品芯片进行板级测试,将在50℃温度下可正常工作,且结温值处于第一预定范围内的样品芯片记为第一目标芯片,获取多个第一目标芯片的静态电流值和振荡频率值,取多个静态电流值的最大值为静态电流阈值,取多个振荡频率值的最大值为振荡频率阈值;Step 1: Perform board-level testing on multiple sample chips at an ambient temperature of 50°C. The sample chips that can work normally at a temperature of 50°C and whose junction temperature is within the first predetermined range are recorded as the first. For the target chip, obtain static current values and oscillation frequency values of a plurality of first target chips, take the maximum value of the plurality of static current values as the static current threshold value, and take the maximum value of the plurality of oscillation frequency values as the oscillation frequency threshold value;

步骤2:通过CPU监控芯片内部的温度传感器,测试第一目标芯片在预定温度110℃,预定时间100ms内的结温温升值,得到第一结温温升值;Step 2: monitor the temperature sensor inside the chip by the CPU, test the junction temperature rise value of the first target chip at a predetermined temperature of 110°C and a predetermined time of 100ms, and obtain the first junction temperature rise value;

步骤3:对第一目标芯片进行FT测试,通过芯片内部的温度传感器在FT测试中检测第一目标芯片在预定时间100ms内的结温温升值,得到第二结温温升值;Step 3: perform an FT test on the first target chip, and detect the junction temperature rise value of the first target chip within a predetermined time of 100ms through the temperature sensor inside the chip in the FT test to obtain a second junction temperature rise value;

步骤4:改变FT测试的设定温度和设定测试激励,使在上述第二结温温升值逼近上述第一结温温升值;Step 4: change the set temperature of the FT test and set the test excitation, so that the temperature rise value of the second junction temperature is close to the temperature rise value of the first junction temperature;

步骤5:重复步骤4,直至筛选出上述第二结温温升值处于上述第一结温温升值的80%至120%之间的第一目标芯片,得到第二目标芯片;Step 5: Repeat Step 4 until the first target chip whose second junction temperature rise value is between 80% and 120% of the above-mentioned first junction temperature rise value is selected to obtain a second target chip;

步骤6:在测试温度为50℃的环境温度下对多个第二目标芯片进行板级测试,检测在预定时间100ms内的结温值和第三结温温升值,将在50℃温度下可正常工作,结温值处于第一预定范围内,且第三结温温升值在第一结温温升值的80%至120%之间的第二目标芯片记为第三目标芯片,获取多个第三目标芯片的第二结温温升值,取最大值即为结温温升阈值;Step 6: Perform board-level testing on multiple second target chips at an ambient temperature of 50°C, and detect the junction temperature value and the third junction temperature rise value within a predetermined time of 100ms. The second target chip with normal operation, the junction temperature value is within the first predetermined range, and the third junction temperature rise value is between 80% and 120% of the first junction temperature rise value is recorded as the third target chip, and a plurality of The second junction temperature rise value of the third target chip, the maximum value is the junction temperature rise threshold;

步骤7:最终以上述静态电流阈值、上述振荡频率阈值和上述结温温升阈值作为筛片条件的上限,对待测试芯片进行筛片。Step 7: Finally, the above-mentioned static current threshold, the above-mentioned oscillation frequency threshold and the above-mentioned junction temperature rise threshold are used as the upper limit of the screening conditions, and the to-be-tested chip is screened.

在本申请所提供的几个实施例中,应该理解到,所揭露的技术内容,可通过其它的方式实现。其中,以上所描述的装置实施例仅仅是示意性的,例如上述单元的划分,可以为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或者可以集成到另一个系统,或一些特征可以忽略,或不执行。另一点,所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口,单元或模块的间接耦合或通信连接,可以是电性或其它的形式。In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are only illustrative. For example, the division of the above-mentioned units may be a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated. to another system, or some features can be ignored, or not implemented. On the other hand, the shown or discussed mutual coupling or direct coupling or communication connection may be through some interfaces, indirect coupling or communication connection of units or modules, and may be in electrical or other forms.

上述作为分离部件说明的单元可以是或者也可以不是物理上分开的,作为单元显示的部件可以是或者也可以不是物理单元,即可以位于一个地方,或者也可以分布到多个单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。The units described above as separate components may or may not be physically separated, and components shown as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution in this embodiment.

另外,在本发明各个实施例中的各功能单元可以集成在一个处理单元中,也可以是各个单元单独物理存在,也可以两个或两个以上单元集成在一个单元中。上述集成的单元既可以采用硬件的形式实现,也可以采用软件功能单元的形式实现。In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically alone, or two or more units may be integrated into one unit. The above-mentioned integrated units may be implemented in the form of hardware, or may be implemented in the form of software functional units.

上述集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读取计算机可读存储介质中。基于这样的理解,本发明的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的全部或部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个计算机可读存储介质中,包括若干指令用以使得一台计算机设备(可为个人计算机、服务器或者网络设备等)执行本发明各个实施例上述方法的全部或部分步骤。而前述的计算机可读存储介质包括:U盘、只读存储器(ROM,Read-Only Memory)、随机存取存储器(RAM,Random Access Memory)、移动硬盘、磁碟或者光盘等各种可以存储程序代码的介质。If the above-mentioned integrated units are implemented in the form of software functional units and sold or used as independent products, they may be stored in a computer-readable computer-readable storage medium. Based on such understanding, the technical solution of the present invention essentially or the part that contributes to the prior art or the whole or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a computer-readable The storage medium includes several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the above-mentioned methods of the various embodiments of the present invention. The aforementioned computer-readable storage medium includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, magnetic disk or optical disk and other various programs that can store programs medium of code.

从以上的描述中,可以看出,本申请上述的实施例实现了如下技术效果:From the above description, it can be seen that the above-mentioned embodiments of the present application achieve the following technical effects:

本申请的筛片方法,筛片装置,及筛片设备对多个样品芯片进行板级测试,通过极限温度测试选出样品芯片中在应用场景的最大环境温度下可正常工作且结温值处于第一预定范围内的芯片,即第一目标芯片,并检测第一目标芯片的极限温度下的静态电流和对应的振荡频率,得到静态电流阈值和振荡频率阈值,然后对第一目标芯片进行FT测试,选出在上述FT测试过程中在预定时间内的结温温升值在第二预定范围内的第一目标芯片,得到第二目标芯片,对上述第二目标芯片进行板级测试过程中在上述第二目标芯片的结温值为预定温度的情况下,检测上述第二目标芯片在上述预定时间内的结温温升值,即可得到结温温升阈值,通过静态电流阈值、振荡频率阈值和结温温升阈值三个筛片条件进行筛片,即可避免满足功耗限制条件的芯片出现高温反转现象,从而不必降低功耗限制,即不用降低静态电流阈值和振荡频率阈值,从而提高了芯片良率,解决了现有技术中筛片方法中功耗限制范围内出现高温反转现象,导致需要降低功耗限制从而导致芯片良率低的问题。The sieving method, sieving device, and sieving device of the present application perform board-level tests on multiple sample chips, and select sample chips that can work normally under the maximum ambient temperature of the application scene through the extreme temperature test and have a junction temperature value in the The chip within the first predetermined range is the first target chip, and the quiescent current and the corresponding oscillation frequency under the extreme temperature of the first target chip are detected, and the quiescent current threshold and the oscillation frequency threshold are obtained, and then the FT is performed on the first target chip. Test, select the first target chip whose junction temperature rise value is within the second predetermined range within the predetermined time during the above-mentioned FT test process, obtain the second target chip, and perform the board-level test on the above-mentioned second target chip. In the case where the junction temperature value of the second target chip is a predetermined temperature, the junction temperature rise value of the second target chip within the predetermined time period can be detected to obtain the junction temperature rise threshold value. Through the static current threshold value and the oscillation frequency threshold value Screening with the three screening conditions of the junction temperature temperature rise threshold can avoid the high temperature inversion phenomenon of the chips that meet the power consumption constraints, so that the power consumption limit does not need to be reduced, that is, the quiescent current threshold and the oscillation frequency threshold do not need to be reduced. The chip yield is improved, and the phenomenon of high temperature reversal occurring within the power consumption limit range in the screening method in the prior art is solved, resulting in the need to reduce the power consumption limit and the problem of low chip yield.

以上上述仅为本申请的优选实施例而已,并不用于限制本申请,对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的保护范围之内。The above are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims (10)

1. A method of screening a chip, the method comprising:
performing board-level test on a plurality of sample chips, wherein the environmental temperature of the board-level test is a limit temperature, determining the sample chip meeting a first preset condition as a first target chip, acquiring static current values and oscillation frequency values of the plurality of first target chips, and determining a static current threshold value and an oscillation frequency threshold value, wherein the limit temperature is the highest environmental temperature of an application scene of the sample chip, and the first preset condition is that the test chip normally works and a junction temperature value is within a first preset range;
performing an FT test on the first target chip, and determining the first target chip meeting a second preset condition as a second target chip, wherein the second preset condition is that a junction temperature rise value of the test chip in a preset time is in a second preset range;
performing board level test on the second target chip, wherein the environmental temperature of the board level test is the limit temperature, determining the second target chip meeting the first preset condition and the second preset condition as a third target chip, acquiring a junction temperature rise value of the third target chip in the FT test, and determining a junction temperature rise threshold;
screening a chip to be tested according to the quiescent current threshold, the oscillation frequency threshold and the junction temperature rise threshold, wherein the chip to be tested and the sample chip are chips with the same model.
2. The method of claim 1, wherein before performing an FT test on the first target chip to determine the first target chip satisfying a second predetermined condition as a second target chip, the method further comprises:
performing board-level test on the plurality of first target chips, wherein the environment temperature of the board-level test is a limit temperature, and detecting a junction temperature rise value of the first target chip within the preset time under the condition that the junction temperature value of the first target chip is a preset temperature to obtain a first junction temperature rise value;
and determining the second preset range according to the first temperature rise value.
3. The method of claim 1, wherein performing an FT test on the first target chip, and determining the first target chip satisfying a second predetermined condition as a second target chip, comprises:
under the conditions that the test temperature is set temperature and the test excitation is set test excitation, detecting a junction temperature rise value of the first target chip in the preset time to obtain a second junction temperature rise value, wherein the test temperature is the ambient temperature for performing the FT test on the first target chip, and the test excitation is the excitation for performing the FT test on the first target chip;
and adjusting the set temperature and the set test excitation until the second target chip is obtained.
4. The method of claim 1, wherein screening the chips to be tested according to the quiescent current threshold, the oscillation frequency threshold, and the junction temperature rise threshold comprises:
under the condition that the environmental temperature is the production temperature, obtaining a static current value of the chip to be tested and an oscillation frequency value of an oscillation circuit of the chip to be tested to obtain a target static current value and a target oscillation frequency value, wherein the production temperature is the temperature of the environment where the chip to be tested is in production operation;
under the condition that the junction temperature value of the chip to be tested is a preset temperature, detecting the junction temperature rise value of the chip to be tested in the preset time to obtain a target junction temperature rise value;
and determining that the chip to be tested is qualified under the conditions that the target quiescent current value is less than or equal to the quiescent current threshold value, the target oscillation frequency value is less than or equal to the oscillation frequency threshold value and the target junction temperature rise value is less than or equal to the junction temperature rise threshold value.
5. The method according to claim 2, wherein the predetermined temperature is between 110 ℃ and 120 ℃.
6. The method of claim 1, wherein the predetermined time is greater than or equal to 100 ms.
7. The method of claim 1, wherein the first predetermined range is 115 ℃ to 125 ℃.
8. The method according to claim 2, wherein the minimum value of the second predetermined range is a first temperature rise value, the maximum value of the second predetermined range is a second temperature rise value, the first temperature rise value is 70-90% of the first temperature rise value, and the second temperature rise value is 110-130% of the first temperature rise value.
9. A screen apparatus for a chip, the apparatus comprising:
the first testing unit is used for performing board level testing on a plurality of sample chips, the environmental temperature of the board level testing is a limit temperature, the sample chips meeting a first preset condition are determined as first target chips, quiescent current values and oscillation frequency values of the first target chips are obtained, quiescent current threshold values and oscillation frequency threshold values are determined, the limit temperature is the highest environmental temperature of an application scene of the sample chips, and the first preset condition is that the testing chips work normally and the junction temperature value is in a first preset range;
the second testing unit is used for carrying out FT testing on the first target chip and determining the first target chip meeting a second preset condition as a second target chip, wherein the second preset condition is that the junction temperature rise value of the tested chip in a preset time is in a second preset range;
a third testing unit, configured to perform a board level test on the second target chip, where an ambient temperature of the board level test is a limit temperature, determine the second target chip meeting the first predetermined condition and the second predetermined condition as a third target chip, obtain a junction temperature rise value of the third target chip in the FT test, and determine a junction temperature rise threshold;
and the judging unit is used for screening the chip to be tested according to the quiescent current threshold value, the oscillation frequency threshold value and the junction temperature rising threshold value, and the chip to be tested and the sample chip are chips with the same model.
10. A slice apparatus comprising a processor and a memory, wherein the processor is configured to run a program, wherein the program when run performs the method of any one of claims 1 to 8.
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