CN114244079B - High-voltage pulse plasma driving circuit and driving method - Google Patents
High-voltage pulse plasma driving circuit and driving method Download PDFInfo
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- CN114244079B CN114244079B CN202111589859.7A CN202111589859A CN114244079B CN 114244079 B CN114244079 B CN 114244079B CN 202111589859 A CN202111589859 A CN 202111589859A CN 114244079 B CN114244079 B CN 114244079B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/14—Arrangements for reducing ripples from DC input or output
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/42—Circuits or arrangements for compensating for or adjusting power factor in converters or inverters
- H02M1/4208—Arrangements for improving power factor of AC input
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/02—Conversion of AC power input into DC power output without possibility of reversal
- H02M7/04—Conversion of AC power input into DC power output without possibility of reversal by static converters
- H02M7/06—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
- H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
- H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
- H02M7/53871—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a high-voltage pulse plasma driving circuit and a driving method, wherein the high-voltage pulse plasma driving circuit comprises a rectifying circuit, a PFC circuit, a filter circuit, a half-bridge structure series resonance inverter circuit, a step-up transformer and a discharging device which are sequentially connected with a power supply, so that the actions of rectifying, power factor correcting, filtering, inverting and boosting alternating current input by the power supply are realized, the step-up transformer increases the voltage to 3-4kV, the high-voltage gas discharge of the discharging device is realized, and the high-voltage pulse driving gas discharge is realized to generate plasma. The PFC circuit is arranged between the rectifying circuit and the filtering circuit, the power factor of the circuit is increased, the power factor is not smaller than 0.98, 400V direct current voltage is output, the half-bridge structure series resonance inversion circuit adopts the technology of half-bridge inversion and direct inductance and discharge device resonance, direct current is converted into alternating current, the output voltage of the step-up transformer circuit is controlled, and the efficiency of generating plasma by gas discharge is improved.
Description
Technical Field
The invention relates to the technical field of driving circuits, in particular to a high-voltage pulse plasma driving circuit and a driving method.
Background
In the electric field, electrons and ions move in opposite directions to form a current, and the current reaches saturation along with the rise of the voltage. The increase in rise forms a dark discharge, near the point of gas breakdown, a corona discharge. Electrons are accelerated in an externally applied electric field, when the energy exceeds the ionization potential of neutral atoms, electrons are ionized by collision, the newly generated electrons and electrons losing energy due to collision are accelerated by the electric field, and the number of electron-ion pairs is rapidly increased in the subsequent collision, so that gas breakdown is caused, and the gas breakdown is called avalanche effect. The gas breakdown is typically followed by a glow discharge. If the internal resistance of the power supply is low enough, the cathode current density exceeds a normal value, the cathode heats and emits electrons, namely, electrons are transited to arc discharge, which is common in arc welding and plasma generators. Common plasma generation methods are dc, ac, pulsed, high frequency, radio frequency, microwave, etc. The high-voltage alternating current driving is a most common driving technology for solving the problem of generating plasma by gas discharge, and is realized by rectifying and filtering input alternating current, converting the alternating current into high-frequency alternating current by adopting an inversion technology, and then raising the voltage to 3-4kV by adopting a transformer. However, the conventional driving circuit has the following disadvantages: the AC input power factor is very low and is generally between 0.5 and 0.6; the rectifying and filtering efficiency is low; the inversion efficiency is low.
Disclosure of Invention
The invention aims to provide a high-voltage pulse plasma driving circuit and a driving method, which are used for solving the problems of low alternating current input power factor and low rectifying and filtering efficiency of the existing driving circuit and also solving the problem of low inversion efficiency in the existing inversion circuit.
The invention provides a high-voltage pulse plasma driving circuit, which comprises:
the input end of the rectifying circuit is connected with the power supply and is used for rectifying alternating current output by the power supply into direct current;
the input end of the PFC circuit is connected with the output end of the rectifying circuit and is used for improving the power factor of the circuit;
the input end of the filter circuit is connected with the output end of the PFC circuit and is used for filtering the rectified direct current;
the input end of the half-bridge structure series resonance inverter circuit is connected with the output end of the filter circuit, and the output end of the half-bridge structure series resonance inverter circuit is connected with the input end of the step-up transformer and is used for converting direct current into alternating current and controlling the output voltage of the step-up transformer;
the input end of the signal driving circuit is connected with the output end of the filter circuit, and the output end of the signal driving circuit is connected with the half-bridge structure series resonance inverter circuit and is used for providing driving signals for the half-bridge structure series resonance inverter circuit;
and the output end of the step-up transformer is connected with the discharging equipment and is used for boosting the alternating current.
Preferably, the half-bridge structure series resonance inverter circuit comprises a half-bridge inverter circuit, a blocking capacitor C4 and a resonance inductor L1;
the input end of the half-bridge inverter circuit is connected with the output end of the filter circuit, and the output end of the half-bridge inverter circuit is connected with the input end of the step-up transformer and is used for converting direct current into alternating current;
the output end of the half-bridge inverter circuit is also connected with a blocking capacitor C4, and the blocking capacitor C4 is connected with the resonant inductor L1 in series;
the step-up transformer is connected with the self-charging C1 of the discharging equipment in parallel and then connected with the resonant inductor L1 in series;
the resonance inductor L1 and the self capacitor C1 of the discharging equipment generate series resonance in the half-bridge inverter circuit through the equivalent capacitor of the step-up transformer, and after resonance, the primary side voltage of the step-up transformer is equal to the voltage at two ends of the equivalent capacitor, and the step-up transformer realizes step-up.
Preferably, when the frequency of the driving signal of the signal driving circuit satisfies the following relation, the half-bridge structure series resonance inverter circuit generates resonance;
wherein f is the frequency of the driving signal; 1 the inductance value of the resonant inductance L1; c (C) 1 Is the capacitance value of the discharge device; n is the turn ratio of the step-up transformer.
Preferably, the half-bridge series resonant inverter circuit is operated in a resonant state by adjusting the frequency of the driving signal of the signal driving circuit.
Preferably, the frequency of the driving signal of the signal driving circuit is adjusted to adjust the working resonance point of the half-bridge structure series resonance inverter circuit, so that the output voltage of the step-up transformer is changed, and the control of the output voltage is realized.
The invention provides a driving method of a high-voltage pulse plasma driving circuit, which comprises the following steps:
220V alternating current input by a power supply source flows through a rectifying circuit to be rectified to obtain direct current, then the PFC circuit is utilized to improve the power factor of the circuit, and a filtering circuit is used for filtering the direct current to output 400V direct current;
after receiving the direct current signal after the filtering treatment, the half-bridge structure series resonance inverter circuit converts the direct current signal into a high-voltage pulse signal by the signal driving circuit, thereby realizing the control of driving the half-bridge structure series resonance inverter circuit to work;
when a half-bridge inverter circuit in the half-bridge structure series resonance inverter circuit converts direct current into alternating current, alternating voltage appears on the primary side of a step-up transformer, and series resonance is generated in the half-bridge structure series resonance inverter circuit alternating loop through the equivalent capacitance of the step-up transformer by the resonance inductance and the self-charging capacitance of the discharging equipment; after resonance, the primary side voltage of the step-up transformer is equal to the voltage at two ends of the equivalent capacitor, thereby realizing step-up and high-voltage driving of the discharge equipment.
Preferably, the half-bridge series resonant inverter circuit is operated in a resonant state by adjusting the frequency of the driving signal of the signal driving circuit.
Preferably, the frequency of the driving signal of the signal driving circuit is adjusted to adjust the working resonance point of the half-bridge structure series resonance inverter circuit, so that the output voltage of the step-up transformer is changed, and the control of the output voltage is realized.
Compared with the prior art, the invention has the beneficial effects that:
the PFC circuit is arranged between the rectifying circuit and the filtering circuit, so that the power factor of the whole circuit is improved, the power factor is not smaller than 0.98, meanwhile, 400V direct current voltage is provided for the half-bridge structure series resonance inverter circuit, the signal driving circuit converts direct current electric signals into high-voltage pulse signals, the half-bridge structure series resonance inverter circuit is controlled to work, the half-bridge structure series resonance inverter circuit adopts the technology of half-bridge inversion and direct resonance of an inductor and a discharging device, direct current is converted into alternating current, and the boosting effect of the boosting circuit is realized. When the circuit works, the half-bridge structure series resonance inverter circuit works in a resonance state by adjusting the frequency of a driving signal of the signal driving circuit, and the resonance point of the half-bridge structure series resonance inverter circuit can be adjusted by adjusting the frequency of the driving signal of the signal driving circuit, so that the output voltage of the step-up transformer is controlled, the control of the output voltage is realized, and the efficiency of generating plasma by gas discharge is improved.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a system block diagram of a high voltage pulsed plasma drive circuit in accordance with the present invention;
FIG. 2 is a circuit diagram of a high voltage pulse plasma driving circuit according to the present invention;
FIG. 3 is a circuit diagram of a high voltage pulse plasma driving circuit according to the present invention;
FIG. 4 is a circuit diagram of a high voltage pulse plasma driving circuit according to the present invention;
fig. 5 is a block flow diagram of a driving method of a high voltage pulse plasma driving circuit according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.
Examples
As shown in fig. 1-3, a high voltage pulsed plasma drive circuit comprising: the rectification circuit is connected with the power supply and rectifies alternating current output by the power supply into direct current; the output end of the rectifying circuit is connected with the input end of the PFC circuit, and the PFC circuit is used for improving the power factor of the circuit; the output end of the PFC circuit is connected with the input end of the filter circuit, and the filter circuit filters the rectified direct current.
The filtered 400V current enters a half-bridge structure series resonance inverter circuit, a direct current signal is converted into a high-voltage pulse signal under the drive of a signal driving circuit, the half-bridge inverter circuit in the half-bridge structure series resonance inverter circuit is driven to work, the primary side of a step-up transformer generates alternating voltage under the action of the half-bridge inverter circuit, and the step-up transformer supplies power to high voltage of discharge equipment.
The half-bridge structure series resonance inverter circuit comprises a half-bridge inverter circuit, a blocking capacitor and a resonance inductor, wherein the input end of the half-bridge inverter circuit is connected with the output end of a filter circuit, and the output end of the half-bridge inverter circuit is connected with the input end of a step-up transformer and is used for converting direct current into alternating current; the output end of the half-bridge inverter circuit is also connected with a blocking capacitor C4, and the blocking capacitor C4 is connected with the resonant inductor L1 in series; the step-up transformer is connected with the self-charging C1 of the discharging equipment in parallel and then connected with the resonant inductor L1 in series;
the resonance inductor L1 and the self capacitor C1 of the discharging device generate series resonance in the half-bridge inverter circuit through the equivalent capacitor of the step-up transformer, after resonance, the primary side voltage of the step-up transformer is equal to the voltage at two ends of the equivalent capacitor, and the step-up transformer realizes step-up, as shown in fig. 3, in which:
the N-type MOS tube V1, the N-type MOS tube V2, the capacitor C2 and the capacitor C3 form a half-bridge inverter circuit;
c4 is the blocking capacitance of the half bridge;
t1 is a step-up transformer, and the turn ratio is 1: n;
l1 is a resonant inductance;
QDA and QDB are driving signals of the signal driving circuit.
Firstly, 400V direct current voltage is input through PFC, driving signals QDA and QDB drive V1 and V2 to work, alternating voltage U appears on the primary side of a step-up transformer T1, inductance L1 resonance inductance and self-charging C of discharge equipment 1 Through the equivalent capacitance n of the step-up transformer T1 2 C 1 (equivalent circuit is shown in fig. 4) series resonance is generated in this alternating loop. After resonance, the primary voltage of the step-up transformer T1 is equal to the equivalent capacitance n 2 C 1 Voltage UC at two ends; uc=qu;
wherein the method comprises the steps ofIs far greater than 1, thus achieving the purpose of boosting.
In the equivalent circuit diagram of fig. 4, lm is the leakage inductance of the transformer, and when the value of Lm is far smaller than the resonant inductance L1, it can be ignored; n is n 2 C 1 Self-charging C for a discharge device 1 Wherein n is the transformation ratio of the step-up transformer, and the equivalent capacitance is the original capacitance C 1 N of value 2 Doubling; when the frequency of the driving signal of the signal driving circuit meets the following relation, the half-bridge structure series resonance inverter circuit generates resonance;
wherein f is the frequency of the driving signal; l (L) 1 The inductance value of the resonant inductance L1; c (C) 1 Is the capacitance value of the discharge device; n is the turn ratio of the step-up transformer.
In practical application, the capacitance value of the discharging device and the turn ratio of the step-up transformer are kept unchanged, the frequency of the driving signal of the signal driving circuit is set at 15KHz, so that the inductance value of the resonant inductor L1 is designed according to the parameters, after the inductance value is fixed, the frequency of the driving signal is automatically finely adjusted according to the feedback signal when the circuit operates, so that the circuit operates in a resonant state, and the resonant point of the circuit operation can be adjusted through the frequency adjustment of the driving signal, thereby changing the output voltage of the step-up transformer and realizing the control of the output voltage.
As shown in fig. 5, a high-voltage pulse plasma driving method includes the steps of:
220V alternating current input by a power supply source flows through a rectifying circuit to be rectified to obtain direct current, then the PFC circuit is utilized to improve the power factor of the circuit, and a filtering circuit is used for filtering the direct current to output 400V direct current;
after receiving the direct current signal after the filtering treatment, the half-bridge structure series resonance inverter circuit converts the direct current signal into a high-voltage pulse signal by the signal driving circuit, thereby realizing the control of driving the half-bridge structure series resonance inverter circuit to work;
when a half-bridge inverter circuit in the half-bridge structure series resonance inverter circuit converts direct current into alternating current, alternating voltage appears on the primary side of a step-up transformer, and series resonance is generated in the half-bridge structure series resonance inverter circuit alternating loop through the equivalent capacitance of the step-up transformer by the resonance inductance and the self-charging capacitance of the discharging equipment; after resonance, the primary side voltage of the step-up transformer is equal to the voltage at two ends of the equivalent capacitor, thereby realizing step-up and high-voltage driving of the discharge equipment.
When the circuit operates, the half-bridge structure series resonance inverter circuit works in a resonance state by adjusting the frequency of a driving signal of the signal driving circuit; the frequency of the driving signal of the signal driving circuit is adjusted to adjust the working resonance point of the half-bridge structure series resonance inverter circuit, so that the output voltage of the step-up transformer is changed, and the control of the output voltage is realized.
The last explanation is: the above disclosure is only one specific embodiment of the present invention, but the embodiment of the present invention is not limited thereto, and any changes that can be thought by those skilled in the art should fall within the protection scope of the present invention.
Claims (8)
1. A high voltage pulsed plasma drive circuit comprising:
the input end of the rectifying circuit is connected with the power supply and is used for rectifying alternating current output by the power supply into direct current;
the input end of the PFC circuit is connected with the output end of the rectifying circuit and is used for improving the power factor of the circuit;
the input end of the filter circuit is connected with the output end of the PFC circuit and is used for filtering the rectified direct current;
the input end of the half-bridge structure series resonance inverter circuit is connected with the output end of the filter circuit, and the output end of the half-bridge structure series resonance inverter circuit is connected with the input end of the step-up transformer; the half-bridge structure series resonance inverter circuit adopts the technology of half-bridge inversion and direct resonance of an inductor and a discharge device, and is used for converting direct current into alternating current and controlling the output voltage of a step-up transformer;
the input end of the signal driving circuit is connected with the output end of the filter circuit, and the output end of the signal driving circuit is connected with the half-bridge structure series resonance inverter circuit and is used for providing driving signals for the half-bridge structure series resonance inverter circuit;
and the output end of the step-up transformer is connected with the discharging equipment and is used for boosting the alternating current.
2. The high voltage pulse plasma driving circuit according to claim 1, wherein: the half-bridge structure series resonance inverter circuit comprises a half-bridge inverter circuit, a blocking capacitor C4 and a resonance inductor L1;
the input end of the half-bridge inverter circuit is connected with the output end of the filter circuit, and the output end of the half-bridge inverter circuit is connected with the input end of the step-up transformer and is used for converting direct current into alternating current;
the output end of the half-bridge inverter circuit is also connected with a blocking capacitor C4, and the blocking capacitor C4 is connected with the resonant inductor L1 in series;
the step-up transformer is connected with the self-charging C1 of the discharging equipment in parallel and then connected with the resonant inductor L1 in series;
the resonance inductor L1 and the self capacitor C1 of the discharging equipment generate series resonance in the half-bridge inverter circuit through the equivalent capacitor of the step-up transformer, and after resonance, the primary side voltage of the step-up transformer is equal to the voltage at two ends of the equivalent capacitor, and the step-up transformer realizes step-up.
3. A high voltage pulse plasma driving circuit according to claim 2, wherein: when the frequency of the driving signal of the signal driving circuit meets the following relation, the half-bridge structure series resonance inverter circuit generates resonance;
wherein f is the frequency of the driving signal; l (L) 1 The inductance value of the resonant inductance L1; c (C) 1 Is the capacitance value of the discharge device; n is the turn ratio of the step-up transformer.
4. A high voltage pulse plasma driving circuit according to claim 3, wherein: the half-bridge structure series resonance inverter circuit works in a resonance state by adjusting the frequency of a driving signal of the signal driving circuit.
5. A high voltage pulse plasma driving circuit according to claim 3, wherein: the frequency of the driving signal of the signal driving circuit is adjusted to adjust the working resonance point of the half-bridge structure series resonance inverter circuit, so that the output voltage of the step-up transformer is changed, and the control of the output voltage is realized.
6. A driving method of a high-voltage pulse plasma driving circuit according to any one of claims 1 to 3, wherein: the method comprises the following steps:
220V alternating current input by a power supply source flows through a rectifying circuit to be rectified to obtain direct current, then the PFC circuit is utilized to improve the power factor of the circuit, and a filtering circuit is used for filtering the direct current to output 400V direct current;
after receiving the direct current signal after the filtering treatment, the half-bridge structure series resonance inverter circuit converts the direct current signal into a high-voltage pulse signal by the signal driving circuit, thereby realizing the control of driving the half-bridge structure series resonance inverter circuit to work;
when a half-bridge inverter circuit in the half-bridge structure series resonance inverter circuit converts direct current into alternating current, alternating voltage appears on the primary side of a step-up transformer, and series resonance is generated in the half-bridge structure series resonance inverter circuit alternating loop through the equivalent capacitance of the step-up transformer by the resonance inductance and the self-charging capacitance of the discharging equipment; after resonance, the primary side voltage of the step-up transformer is equal to the voltage at two ends of the equivalent capacitor, thereby realizing step-up and high-voltage driving of the discharge equipment.
7. The driving method of a high-voltage pulse plasma driving circuit according to claim 6, wherein: the half-bridge structure series resonance inverter circuit works in a resonance state by adjusting the frequency of a driving signal of the signal driving circuit.
8. The driving method of a high-voltage pulse plasma driving circuit according to claim 6, wherein: the frequency of the driving signal of the signal driving circuit is adjusted to adjust the working resonance point of the half-bridge structure series resonance inverter circuit, so that the output voltage of the step-up transformer is changed, and the control of the output voltage is realized.
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