CN114236662B - Dual-channel optical filter with high cut-off depth and preparation method thereof - Google Patents
Dual-channel optical filter with high cut-off depth and preparation method thereof Download PDFInfo
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- CN114236662B CN114236662B CN202111344287.6A CN202111344287A CN114236662B CN 114236662 B CN114236662 B CN 114236662B CN 202111344287 A CN202111344287 A CN 202111344287A CN 114236662 B CN114236662 B CN 114236662B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/283—Interference filters designed for the ultraviolet
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B2018/00315—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body for treatment of particular body parts
- A61B2018/00452—Skin
- A61B2018/00458—Deeper parts of the skin, e.g. treatment of vascular disorders or port wine stains
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B2018/00315—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body for treatment of particular body parts
- A61B2018/00452—Skin
- A61B2018/00476—Hair follicles
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
- A61B2018/1807—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using light other than laser radiation
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Electromagnetism (AREA)
- Optical Filters (AREA)
Abstract
The invention relates to the technical field of optical filter coating, in particular to a double-channel optical filter with high cut-off depth and a preparation method thereof, the optical filter comprises a substrate, a main laminated film system and an auxiliary laminated film system, wherein the main laminated film system and the auxiliary laminated film system are respectively positioned at two sides of the substrate, the optical filter can transmit light with wavelengths of 540-570nm and 680-700nm through a combined system of the main laminated film system and the auxiliary laminated film system, and the optical filter cuts off light with other wave bands in the wavelength range from ultraviolet rays to near infrared rays. The invention has the advantages that: the light can selectively transmit target light in the wave bands near 560nm and 690nm, cut off other wave bands from ultraviolet to near infrared, and has the characteristics of high pass band transmittance, deep cut-off depth and wide cut-off bandwidth; the terminal product has the dual functions of removing the color spots and unhairing, overcomes the defect that the existing single-channel optical filter can only solve single problem (removing the color spots or unhairing), and meets the requirement that two problems are required to be solved simultaneously in specific occasions.
Description
Technical Field
The invention relates to the technical field of optical filter coating, in particular to a double-channel optical filter with high cut-off depth and a preparation method thereof.
Background
In the field of medical cosmetology, photon skin tendering is an item for beautifying skin by using intense pulsed light, the skin is selectively irradiated by the intense pulsed light with a specific wave band, and the generated energy is acted on target tissues of the skin by using the photothermal effect, so that the skin tendering effects of skin tendering, whitening, freckle removing, hair removal and the like are achieved.
The 560nm wave Duan Maichong light has the functions of tendering skin and treating pigment and vascular diseases, melanin has the highest light absorptivity in the wave band, melanin groups absorb light energy and convert the light energy into heat energy, melanin is broken up by heat and shock waves, pigment particles are phagocytized and metabolized by macrophages, and the color of the skin at the position of the color spots is more converged with the surrounding skin.
The 690nm wave band pulse light can penetrate into the skin for 3.5mm, can destroy hair follicle tissue, and has the functions of dehairing and treating inflammatory acne.
The photon tender muscle light source is a xenon lamp, is full-band white light, can not act on the skin for a long time when the power is high, otherwise skin ultraviolet injury and burn are easily caused, so that a special filter is needed to filter most of band light energy, and then proper pulse time is selected for proper xenon lamp power to act on a specific skin target tissue, so that the skin can be not damaged, and a specific treatment purpose can be achieved.
Disclosure of Invention
According to the defects of the prior art, the invention provides a dual-channel filter with high cut-off depth and a preparation method thereof, wherein a main laminated film system and an auxiliary laminated film system are arranged on two sides of a substrate, light with wavelengths of 560nm and 690nm nearby passes through the main laminated film system and cuts off ultraviolet to near infrared bands, high transmittance of light with wavelengths of 560nm and 690nm nearby is ensured through the auxiliary laminated film system, near infrared cut-off of the main film system is further widened, and the design of the dual-channel narrow-band filter with high cut-off depth is realized.
The invention is realized by the following technical scheme:
The utility model provides a binary channels narrowband optical filter of high depth of cut-off, this optical filter includes base plate, main stromatolite membrane system and vice stromatolite membrane system is located respectively the both sides of base plate, its characterized in that: the combined system of the main laminated film system and the auxiliary laminated film system enables the optical filter to transmit light with wavelengths of 540-570nm and 680-700nm, and the optical filter cuts off light with the rest wave bands in the wavelength range from ultraviolet rays to near infrared rays.
The main laminated film system and the auxiliary laminated film system are formed by alternately superposing high refractive index layers and low refractive index layers.
The high refractive index material is NbOx, and the low refractive index material is SiOx.
The transmittance of the filter at the wave bands of 540-570nm and 680-700nm is more than 95%.
The total thickness of the secondary laminated film system is not more than 110% of the total thickness of the primary laminated film system
The preparation method of the double-channel narrow-band filter with high cut-off depth is characterized by comprising the following steps of: the preparation method comprises the following steps:
Sequentially plating laminated film systems on two side surfaces of a substrate of the optical filter, firstly plating a main laminated film system on one side surface of the substrate, and then plating a secondary laminated film system on the other side surface of the substrate, wherein the number of layers of the main laminated film system is larger than that of the secondary laminated film system.
The substrate is rotated during plating of the laminated film system.
The invention has the advantages that: the light can selectively transmit target light in the wave bands near 560nm and 690nm, cut off other wave bands from ultraviolet to near infrared, and has the characteristics of high pass band transmittance, deep cut-off depth and wide cut-off bandwidth; the terminal product has the dual functions of removing the color spots and unhairing, overcomes the defect that the existing single-channel optical filter can only solve single problem (removing the color spots or unhairing), and meets the requirement of simultaneously solving the two problems in specific occasions; the scattering phenomenon is effectively reduced by reasonably distributing the main laminated film system and the auxiliary laminated film system, and meanwhile, the deformation of the optical filter caused by uneven stress is avoided, and the quality and the service performance of the optical filter are obviously improved.
Drawings
FIG. 1 is a schematic diagram showing the effects of the present invention;
FIG. 2 is a graph of T% and R% of NbOx and SiOx in accordance with the present invention;
FIG. 3 is a graph of optical constants of NbOx and SiOx in accordance with the present invention;
FIG. 4 is a schematic diagram of a dual-channel filter according to the present invention;
FIG. 5 is a design spectrum of a dual-channel filter of the present invention;
FIG. 6 is a graph of signal strength measurements of a sample according to the present invention;
FIG. 7 is a graph showing the results of the photoresist measurements of the samples of the present invention.
Detailed Description
The features of the invention and other related features are described in further detail below by way of example in conjunction with the following figures to facilitate understanding by those skilled in the art:
as shown in fig. 1-7, the labels 1-3 are shown as: a substrate 1, a main laminated film system 2, and a sub laminated film system 3.
Examples: as shown in FIG. 1, the dual-channel narrowband filter with high cut-off depth in the embodiment can selectively transmit target light with wave bands near 560nm and 690nm, cut off other wave bands from ultraviolet to near infrared, and has the characteristics of high pass band transmittance, deep cut-off depth and cut-off bandwidth. The dual-channel narrowband filter in the embodiment can be used for matching with a cosmetic terminal product, such as a xenon lamp for photon skin tendering, so that the terminal product has the dual functions of removing color spots and unhairing, the defect that the existing single-channel filter can only solve a single problem (removing color spots or unhairing) is overcome, and the requirement that two problems are required to be solved simultaneously in a specific occasion is met.
Specifically, as shown in fig. 4, the dual-channel narrowband filter in this embodiment includes a substrate 1, and 148 layers of a main laminated film system 2 and 84 layers of a sub laminated film system 3 are respectively plated on both sides of the substrate 1. The main laminated film system 2 is used for keeping high transmission near the wavelengths of 540-570nm and 680-700nm and simultaneously cutting off the rest wavelengths less than 750 nm; the sub-laminated film system 3 is used for cutting off light with the wavelength of 750-1100 nm and simultaneously keeping high transmission near the light with the wavelength of 540-570nm and 680-700 nm; the actual light passes through the two surfaces of the optical filter, so that the function of high transmission of the optical filter in a specific wave band and cut-off of other wave bands is realized under the combined action of the main laminated film system 2 and the auxiliary laminated film system 3.
Based on this, the dual-channel narrowband filter in this embodiment has the following properties: light in wavelength bands of 540 to 570nm and 680 to 700nm is transmitted, and light in the remaining wavelength band in the ultraviolet to near infrared wavelength range is cut off, which means that the cut off rate of light in the remaining wavelength band in the ultraviolet to near infrared wavelength range is 99.9% or more.
The main laminated film system 2 and the sub laminated film system 3 in this embodiment are each formed by alternately laminating a high refractive index layer and a low refractive index layer. In this embodiment, the high refractive index layer may be made of NbOx, and the low refractive index layer may be made of SiOx.
The preparation method of the dual-channel narrowband filter in the embodiment comprises the following steps:
1) And plating the main laminated film system 2 and the auxiliary laminated film system 3 by using a sputtering coating device. In the sputtering coating equipment, a Si target and a Nb target are arranged, a target power supply is an intermediate frequency power supply, ar, O2, N2 and the like are used as working gases, and an inductive coupling radio frequency source is used, and Ar, O2, N2 and the like are used as working gases. In the sputter coating apparatus, the substrate 1 may be loaded on a workpiece rotating frame whose rotation speed may be selected to be 10-100 rpm to improve coating quality.
2) The substrate 1 is made of D263T glass material with the thickness of 1 mm.
3) The process conditions are set in the process file of the sputtering coating equipment, the revolution of the substrate is rapid, the process of Si+O- & gtSiOx (or Nb+O- & gtNbOx) is completed at the ICP position due to the target atoms deposited on the substrate, the film layer is subjected to auxiliary deposition by oxygen ions to improve the compactness of the film layer, the SiOx single-layer film and the NbOx single-layer film are respectively coated on the surface of the D263T substrate, then 6 DEG T% and 6 DEG R% are measured, as shown in fig. 2, and the optical constants of the film layer are calculated by a photometry method as shown in fig. 3.
4) The special structure design of the dual-passband filter film stack is carried out by taking the optical constants of the SiOx single-layer film and the NbOx single-layer film as material parameters and taking the D263T as a substrate 1, wherein the special structure design comprises a main laminated film system 2 and a secondary laminated film system 3, the main laminated film system 2 is positioned on one surface of the substrate, the secondary laminated film system 3 is positioned on the other surface of the substrate, and the main laminated film system 2 and the secondary laminated film system 3 are of high-low refractive index material alternating structures. As shown in fig. 4, the low emissivity material is SiOx and is denoted as L, the high emissivity material is NbOx and is denoted as H, the primary laminated film system 2 is 148 layers, and the secondary laminated film system 3 is 84 layers; wherein the high refractive index material H is used as a first layer contacting with the substrate 1, the second layer is a low refractive index material L, and the third layer is a high refractive index material H, so as to form a main laminated film system 2 and a sub laminated film system 3 in a reciprocating manner.
The thickness distribution of each layer of the main laminate film system 2 and the sub laminate film system 3 is shown in table 1, and the design spectrum T% is shown in fig. 5.
As shown in the table, the total thickness of the main laminated film system 2 and the total thickness of the auxiliary laminated film system 3 are controlled, so that the total thickness of the auxiliary laminated film system 3 is not more than 110% of the total thickness of the main laminated film system 2, thereby avoiding the occurrence of obvious scattering phenomenon due to the excessive thickness of the single-side laminated film system and further ensuring the service performance of the optical filter. Meanwhile, the number of layers of the main laminated film system 2 and the number of layers of the auxiliary laminated film system 3 are reasonably distributed on two sides of the substrate, so that the film lamination stress of the main laminated film system and the auxiliary laminated film system can be mutually counteracted, and the deformation of the substrate 1 caused by the film lamination stress is avoided.
5) The substrate 1 is plated with a sputter coating apparatus.
The sputtering coating equipment executes the process according to the process conditions set in the process file, sequentially coats a laminated film system on the two side surfaces of the substrate 1, and firstly coats a main laminated film system 2 on one side surface of the substrate 1; turning over the substrate 1 after completion; then, a sub-laminated film system 3 is plated on the other surface of the substrate 1.
The transmittance of the optical filter sample prepared by the preparation method is measured, and the measured result is shown in fig. 6, wherein the transmittance of the optical filter sample in the wavelength bands near 560nm and 690nm of the target wavelength reaches more than 95%, and the optical filter sample has good signal strength.
The optical filter sample prepared by the preparation method is subjected to photoresistance, namely signal-to-noise ratio measurement, and the measurement result is shown in fig. 7, and the signal-to-noise ratio of most of the wave bands exceeds 10000 in the wave band of 350nm-1100nm (the wavelength range of ultraviolet rays to near infrared rays): 1, a partial band reaches 1000000:1, has good signal-to-noise ratio effect.
The actual cut-off rate of the filter sample obtained by the preparation method is more than OD3 (99.9%), the cut-off rate of the wave band below 950nm is more than OD4 (99.99%), the cut-off rate of the wave band between 950nm and 1100nm is more than OD3, and the cut-off effect is excellent.
Although the foregoing embodiments have been described in some detail with reference to the accompanying drawings, it will be appreciated by those skilled in the art that various modifications and changes may be made thereto without departing from the scope of the invention as defined in the appended claims, and thus are not repeated herein.
Claims (3)
1. The utility model provides a binary channels narrowband optical filter of high depth of cut-off, this optical filter includes base plate, main stromatolite membrane system and vice stromatolite membrane system is located respectively the both sides of base plate, its characterized in that: the combined system of the main laminated film system and the auxiliary laminated film system enables the optical filter to transmit light with wavelengths of 540-570nm and 680-700nm, and the optical filter cuts off the light with the rest wave bands in the wavelength range from ultraviolet rays to near infrared rays;
the main laminated film system and the auxiliary laminated film system are formed by alternately superposing high refractive index layers and low refractive index layers;
the high refractive index material is NbOx, and the low refractive index material is SiOx;
the transmittance of the optical filter at the wave bands of 540-570nm and 680-700nm is more than 95%;
the total thickness of the secondary laminate film system is no more than 110% of the total thickness of the primary laminate film system.
2. A method for preparing a dual-channel narrowband filter with high cut-off depth according to claim 1, which is characterized in that: the preparation method comprises the following steps:
Sequentially plating laminated film systems on two side surfaces of a substrate of the optical filter, firstly plating a main laminated film system on one side surface of the substrate, and then plating a secondary laminated film system on the other side surface of the substrate, wherein the number of layers of the main laminated film system is larger than that of the secondary laminated film system.
3. The method for preparing the dual-channel narrowband filter with high cutoff depth according to claim 2, wherein the method comprises the following steps: the substrate is rotated during plating of the laminated film system.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111344287.6A CN114236662B (en) | 2021-11-12 | 2021-11-12 | Dual-channel optical filter with high cut-off depth and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111344287.6A CN114236662B (en) | 2021-11-12 | 2021-11-12 | Dual-channel optical filter with high cut-off depth and preparation method thereof |
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| CN114236662A CN114236662A (en) | 2022-03-25 |
| CN114236662B true CN114236662B (en) | 2024-09-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3910824B2 (en) * | 2001-10-31 | 2007-04-25 | 日立マクセル株式会社 | Optical filter |
| JP2005298833A (en) * | 2002-10-22 | 2005-10-27 | Asahi Glass Co Ltd | Multilayer film-coated substrate and its manufacturing method |
| CN109932774B (en) * | 2017-12-19 | 2021-08-10 | 张家港康得新光电材料有限公司 | Infrared narrow-band filter film and infrared recognition system |
| JP2020008797A (en) * | 2018-07-12 | 2020-01-16 | 株式会社小松プロセス | Retroreflection material, retroreflection object, retroreflective ink or paint, manufacturing method of retroreflective sheet, and manufacturing method of retroreflection object |
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