CN114164406B - Particle pressed diode anode target for pulse power device and preparation method - Google Patents
Particle pressed diode anode target for pulse power device and preparation method Download PDFInfo
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- 239000002245 particle Substances 0.000 title claims abstract description 104
- 238000002360 preparation method Methods 0.000 title abstract description 8
- 238000003825 pressing Methods 0.000 claims abstract description 22
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 22
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 19
- 239000010439 graphite Substances 0.000 claims abstract description 19
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims abstract description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 8
- 238000005096 rolling process Methods 0.000 claims abstract description 8
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910003468 tantalcarbide Inorganic materials 0.000 claims abstract description 7
- 239000013077 target material Substances 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims description 21
- 230000006835 compression Effects 0.000 claims description 14
- 238000007906 compression Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 230000003746 surface roughness Effects 0.000 claims description 6
- 238000000137 annealing Methods 0.000 claims description 5
- 238000001953 recrystallisation Methods 0.000 claims description 5
- XOOUIPVCVHRTMJ-UHFFFAOYSA-L zinc stearate Chemical compound [Zn+2].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O XOOUIPVCVHRTMJ-UHFFFAOYSA-L 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000005303 weighing Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 abstract description 9
- 238000002474 experimental method Methods 0.000 abstract description 8
- 238000010894 electron beam technology Methods 0.000 description 10
- 238000005056 compaction Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 238000002679 ablation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005251 gamma ray Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000000930 thermomechanical effect Effects 0.000 description 2
- 230000005461 Bremsstrahlung Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 206010037844 rash Diseases 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1003—Use of special medium during sintering, e.g. sintering aid
- B22F3/1007—Atmosphere
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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Abstract
Description
技术领域Technical field
本发明属于高功率强流脉冲电子束与物质相互作用领域,具体涉及一种用于强流电子束与物质相互作用产生高剂量x射线或γ射线的颗粒压结式强流二极管阳极靶。The invention belongs to the field of interaction between high-power and strong-current pulsed electron beams and matter, and specifically relates to a particle-pressed high-current diode anode target for generating high-dose x-rays or γ-rays through the interaction between strong-current electron beams and matter.
背景技术Background technique
强流二极管全称强流脉冲电子束二极管,其主要作用是通过阴极发射出的强流电子束与高原子序数(下简称Z)阳极靶相互作用产生高剂量大面积x射线或γ射线。在二极管阳极区域,由于电子束能量高、强度大(0.3~15MeV、10kA~25MA),轰击到阳极靶上的电子束会在靶上产生热沉积,对靶产生极强的热激波和喷发冲量等热-力学破坏效应,使得阳极烧蚀、熔融、变形、层裂,导致每次实验后须拆除真空层,整体更换阳极靶,实验效率和经济效益低下。The full name of high-current diode is high-current pulsed electron beam diode. Its main function is to generate high-dose large-area x-rays or gamma rays through the interaction between the high-current electron beam emitted from the cathode and the high atomic number (hereinafter referred to as Z) anode target. In the diode anode area, due to the high energy and intensity of the electron beam (0.3~15MeV, 10kA~25MA), the electron beam bombarding the anode target will produce heat deposition on the target, causing extremely strong thermal shock waves and eruptions on the target. Thermal-mechanical destructive effects such as impulse cause the anode to ablate, melt, deform, and crack. As a result, the vacuum layer must be removed and the anode target must be replaced as a whole after each experiment, resulting in low experimental efficiency and economic benefits.
现有脉冲功率装置的强流二极管所用阳极靶多为整体加工的单层或多层钽靶,蒯斌等所著的《高功率辐射模拟设备及其应用分析》、《长脉冲高阻抗强流电子束二极管》、胡克松等所著的《闪光-I电子束二极管》等文章中介绍了“晨光号”、“强光一号”、“闪光一号”等加速器基本构造,文中列出的各加速器的二极管均采用整体加工的单一介质钽靶,每次实验后须更换整个阳极。The anode targets used in the high-current diodes of existing pulse power devices are mostly single-layer or multi-layer tantalum targets that are processed as a whole. "Analysis of High Power Radiation Simulation Equipment and Its Application" and "Long Pulse High Impedance High Current" written by Kuai Bin et al. Articles such as "Electron Beam Diode" and "Flash-I Electron Beam Diode" by Hu Kesong et al. introduce the basic structure of accelerators such as "Chenguang", "Qiangguang No. 1" and "Flash No. 1". The various accelerators listed in the article The diodes of the accelerator all use integrally processed single-dielectric tantalum targets, and the entire anode must be replaced after each experiment.
发明内容Contents of the invention
为了克服每次实验须更换整个阳极靶的限制,减小实验成本,提升阳极寿命,本发明提出了一种用于脉冲功率装置的颗粒压结式二极管阳极靶及制备方法。该阳极靶由靶材颗粒经机床压结和轧制成型,在具备长寿命的同时可根据二极管输出指标灵活调整靶物质组分,具有调节输出辐射场辐射品质(剂量、空间分布、光子占比)的能力。In order to overcome the limitation that the entire anode target must be replaced for each experiment, reduce the experimental cost, and extend the life of the anode, the present invention proposes a particle compacted diode anode target for pulse power devices and a preparation method. The anode target is made of target particles pressed and rolled by machine tools. It has a long life and can flexibly adjust the target material composition according to the diode output index. It has the ability to adjust the radiation quality of the output radiation field (dose, spatial distribution, photon proportion )Ability.
为实现上述目的,本发明采用以下技术方案:In order to achieve the above objects, the present invention adopts the following technical solutions:
本发明用于脉冲功率装置的颗粒压结式二极管阳极靶包括由一种或多种靶材颗粒压结而成的成型靶;所述靶材颗粒的材料为钽、碳化钽、石墨、钨、碳化钨或铝,成型靶根据目标射线参数在不同位置选取不同的靶材颗粒进行压结;所述靶材颗粒直径为0.05~1mm,靶材颗粒之间的间隙<100μm;所述成型靶的厚度应至少为靶材颗粒直径的3~4倍。The particle compacted diode anode target used in pulse power devices of the present invention includes a shaped target compacted by one or more target particles; the target particles are made of tantalum, tantalum carbide, graphite, tungsten, Tungsten carbide or aluminum, the forming target selects different target particles at different positions for compaction according to the target ray parameters; the diameter of the target particles is 0.05~1mm, and the gap between the target particles is <100 μm; the forming target The thickness should be at least 3 to 4 times the diameter of the target particles.
进一步地,所述成型靶主要由依次叠加的多层靶材颗粒组成,或者由中间为第一类靶材颗粒,四周为第二类靶材颗粒组成。Further, the shaped target is mainly composed of multiple layers of target particles superimposed in sequence, or is composed of a first type of target particle in the middle and a second type of target particle around it.
进一步地,所述成型靶由四周为钽颗粒,中心为石墨颗粒组成;或者四周为钽,中心为钨或碳化钨组成,或者石墨颗粒、钽颗粒、铝依次叠加组成,或者石墨颗粒、钽颗粒、石墨颗粒依次叠加组成。Further, the shaped target is composed of tantalum particles on all sides and graphite particles in the center; or tantalum is on all sides and tungsten or tungsten carbide is in the center; or graphite particles, tantalum particles, and aluminum are sequentially superimposed, or graphite particles and tantalum particles are formed. , graphite particles are stacked one after another.
进一步地,所述成型靶的表面粗糙度小于等于1.6。Further, the surface roughness of the shaped target is less than or equal to 1.6.
进一步地,所述成型靶的形状为圆形或矩形。Further, the shape of the forming target is circular or rectangular.
同时,本发明还提供一种用于脉冲功率装置的颗粒压结式二极管阳极靶的制备方法,包括以下步骤:At the same time, the invention also provides a method for preparing a particle compacted diode anode target for pulse power devices, which includes the following steps:
步骤一、靶材颗粒制备;Step 1. Preparation of target particles;
根据目标射线参数选取靶材材料,将靶材材料加工为直径为0.05~1mm的靶材颗粒;Select the target material according to the target ray parameters, and process the target material into target particles with a diameter of 0.05~1mm;
步骤二、真空压结;Step 2: Vacuum bonding;
2.1)将步骤一制备的靶材颗粒进行重结晶退火处理;2.1) Perform recrystallization annealing treatment on the target particles prepared in step 1;
2.2)将靶材颗粒与粘合剂混合为混合料,粘合剂为混合料体积的5%~10%;2.2) Mix target particles and binder into a mixture, and the binder should be 5% to 10% of the volume of the mixture;
2.3)根据阳极靶的体积和密度,称量对应质量的混合料放入压结模具,将压结模具放置在10-3Pa量级的真空环境中;2.3) According to the volume and density of the anode target, weigh the corresponding mass of the mixture and put it into the compaction mold, and place the compaction mold in a vacuum environment of the order of 10 -3 Pa;
2.4)根据阳极靶的密度设定压制压力,根据压制压力对混合料进行压结,压结时,先固定侧压模,留出侧凸边,进行竖直方向压缩;再固定上压模,进行侧向压缩,该过程交替进行,直到混合料压结至预成型的阳极靶,压缩温度为35℃~50℃,压缩比为2~3;2.4) Set the pressing pressure according to the density of the anode target, and press the mixture according to the pressing pressure. When pressing, first fix the side pressing mold, leaving the side convex edge, and perform vertical compression; then fix the upper pressing mold, Carry out lateral compression, and this process is carried out alternately until the mixture is compacted to the preformed anode target, the compression temperature is 35°C to 50°C, and the compression ratio is 2 to 3;
2.5)压制完成后,在压制压力下保压3~5分钟,随后将预成型的阳极靶在真空环境静置20~30分钟,消除应力;2.5) After the pressing is completed, hold it under the pressing pressure for 3 to 5 minutes, and then leave the preformed anode target in a vacuum environment for 20 to 30 minutes to eliminate stress;
步骤三、大气环境轧制;Step 3: Rolling in atmospheric environment;
将预成型的阳极靶从真空环境中取出,采用轧制的方法进一步压结,压缩比为>2,使得靶材颗粒间隙进一步缩小,控制靶材颗粒间隙<100μm;The preformed anode target is taken out from the vacuum environment and further pressed by rolling with a compression ratio of >2 to further reduce the target particle gap and control the target particle gap to <100 μm;
步骤四、表面打磨;Step 4. Surface polishing;
对阳极靶表面进行打磨,使表面粗糙度≤1.6。Polish the anode target surface to make the surface roughness ≤1.6.
进一步地,步骤2.4)中,压结前需要在压结模具内表面涂抹硬脂酸锌。Further, in step 2.4), zinc stearate needs to be applied to the inner surface of the bonding mold before bonding.
进一步地,步骤三中,粘合剂为高纯石墨导电胶。Further, in step three, the adhesive is high-purity graphite conductive adhesive.
进一步地,步骤四中,采用包覆纱纸的打磨机对阳极靶表面进行打磨。Further, in step four, a grinder covered with gauze paper is used to grind the surface of the anode target.
与现有技术相比,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
1.本发明颗粒压结式阳极靶由靶材颗粒压结(真空环境)和轧制(大气环境)而成,颗粒之间存在一定间隙,有利于强流脉冲电子在靶上造成的热激波的耗散,增强靶的抗电子束热-力学损伤性能,提升阳极靶的寿命。1. The particle compacted anode target of the present invention is made of target particles compacted (vacuum environment) and rolled (atmospheric environment). There is a certain gap between the particles, which is conducive to the thermal shock caused by strong current pulse electrons on the target. The dissipation of waves enhances the target's resistance to electron beam thermal-mechanical damage and increases the life of the anode target.
2.本发明颗粒压结式阳极靶灵活性较强,可根据不同的应用需求在靶的不同位置选取不同的靶材颗粒进行压结,包括钽、碳化钽、石墨、钨、碳化钨、铝等,以使得压结靶具备耐烧蚀、长寿命、提升辐射场参数(剂量、空间分布均匀性、光子占比)等不同的特点,适用不同的场景。2. The particle compacted anode target of the present invention has strong flexibility. Different target particles can be selected for compaction at different positions of the target according to different application requirements, including tantalum, tantalum carbide, graphite, tungsten, tungsten carbide, and aluminum. etc., so that the compacted target has different characteristics such as ablation resistance, long life, improved radiation field parameters (dose, spatial distribution uniformity, photon proportion), etc., and is suitable for different scenarios.
附图说明Description of the drawings
图1为本发明单一颗粒压结式强流二极管阳极靶示意图;Figure 1 is a schematic diagram of a single-particle compacted high-current diode anode target of the present invention;
图2为本发明两种颗粒压结式强流二极管阳极靶示意图;Figure 2 is a schematic diagram of two particle compacted high-current diode anode targets according to the present invention;
图3为本发明多层颗粒压结式强流二极管阳极靶示意图;Figure 3 is a schematic diagram of the multi-layer particle compacted high-current diode anode target of the present invention;
图4为本发明颗粒压结式强流二极管阳极靶真空压结模具示意图。Figure 4 is a schematic diagram of a vacuum bonding mold for a particle-bonded high-current diode anode target according to the present invention.
附图标记:1-上压模,2-侧压模,3-混合料。Reference signs: 1-upper mold, 2-side mold, 3-mixture.
具体实施方式Detailed ways
下面结合附图和具体实施方式对本发明进行详细说明。本领域技术人员应当理解的是,这些实施方式仅仅用来解释本发明的技术原理,目的并不是用来限制本发明的保护范围。The present invention will be described in detail below with reference to the drawings and specific embodiments. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of the present invention.
现有阳极靶多为单次使用,每次实验完成后需要更换。本发明提供一种用于脉冲功率装置的颗粒压结式二极管阳极靶及制备方法,该阳极靶的寿命较高,可替换现有强流二极管使用的整块单层钽靶。同时,该阳极靶与现有普通低能工业靶材不同,主要应用于高功率脉冲技术领域,该阳极靶在极短时间内(数十ns)可承受数百kA、数百kV到数MV高能电子束的轰击,目的是通过轫致辐射产生瞬时高能x/γ射线。阳极靶瞬时温升可达上千摄氏度,瞬时应力达GPa量级,热-力学损伤效应剧烈。Most of the existing anode targets are single-use and need to be replaced after each experiment. The invention provides a particle compacted diode anode target for pulse power devices and a preparation method. The anode target has a relatively long service life and can replace the monolithic single-layer tantalum target used in existing high-current diodes. At the same time, this anode target is different from existing ordinary low-energy industrial targets. It is mainly used in the field of high-power pulse technology. This anode target can withstand hundreds of kA, hundreds of kV to several MV high energy in a very short time (tens of ns). The bombardment of electron beams aims to produce instantaneous high-energy x/gamma rays through bremsstrahlung radiation. The instantaneous temperature rise of the anode target can reach thousands of degrees Celsius, the instantaneous stress reaches the GPa level, and the thermo-mechanical damage effect is severe.
本发明颗粒压结式强流二极管阳极靶由靶材颗粒压结(真空环境)、轧制(大气环境)而成,颗粒之间存在一定间隙,有利于强流脉冲电子在靶上造成的热激波的耗散,增强靶的抗电子束热-力学损伤性能,提升阳极靶的寿命;同时,可灵活选取阳极靶的组成材料,达到调节输出x/γ射线参数的目的。The particle compacted high-current diode anode target of the present invention is made of target particles compacted (vacuum environment) and rolled (atmospheric environment). There is a certain gap between the particles, which is beneficial to the heat caused by the high-current pulse electrons on the target. The dissipation of the shock wave enhances the target's resistance to electron beam thermal-mechanical damage and extends the life of the anode target; at the same time, the composition of the anode target can be flexibly selected to achieve the purpose of adjusting the output x/γ ray parameters.
如图1至图3所示,本发明用于脉冲功率装置的颗粒压结式二极管阳极靶包括由一种或多种靶材颗粒在真空中压结而成的成型靶,在不同位置选取不同的靶材颗粒进行压结,达到调节输出x/γ射线参数;靶材颗粒的材料具体可为钽、碳化钽、石墨、钨、碳化钨或铝;靶材颗粒之间存在百μm量级以下的间隙;靶材颗粒直径为0.05~1mm,成型靶的厚度应至少为颗粒直径的3~4倍。As shown in Figures 1 to 3, the particle compacted diode anode target used in the pulse power device of the present invention includes a shaped target formed by compacting one or more target particles in a vacuum. Different selections are made at different positions. The target particles are compacted to adjust the output x/γ ray parameters; the material of the target particles can be tantalum, tantalum carbide, graphite, tungsten, tungsten carbide or aluminum; the distance between target particles is less than 100 μm. The gap; the target particle diameter is 0.05~1mm, and the thickness of the formed target should be at least 3~4 times the particle diameter.
本发明提出的颗粒压结式阳极靶灵活性较强,可根据不同的应用需求在不同位置选取不同的靶材颗粒进行压结,例如:①“四周为钽颗粒,中心为石墨颗粒”构型,可用于提升靶输出射线空间分布均匀性,适用于辐照二极管;②“四周为钽,中心为钨或碳化钨”构型,可提升靶中心输出射线剂量,适用于聚焦型二极管;③”纯钽或碳化钽颗粒”构型,适用于软X射线场景;④多层构型,表层为石墨颗粒,中心为钽颗粒,背层为铝或石墨颗粒,使得压结靶具备耐烧蚀、长寿命、提升辐射场光子占比等特性,适用于大面积辐照二极管。The particle compacted anode target proposed by the present invention is highly flexible, and different target particles can be selected and compacted at different locations according to different application requirements, for example: ① "Tantalum particles around the edges, graphite particles in the center" configuration , can be used to improve the uniformity of the spatial distribution of target output rays, and is suitable for irradiation diodes; ② "Tantalum is surrounded by tantalum, and tungsten or tungsten carbide is in the center" configuration, which can increase the radiation dose output at the center of the target and is suitable for focusing diodes; ③" "Pure tantalum or tantalum carbide particles" configuration, suitable for soft X-ray scenarios; ④ Multi-layer configuration, the surface layer is graphite particles, the center is tantalum particles, and the back layer is aluminum or graphite particles, making the compacted target resistant to ablation, Features such as long life and increased photon ratio in the radiation field make it suitable for large-area irradiation diodes.
在制作上述阳极靶时,根据应用场景和成型后的阳极靶尺寸,选取颗粒尺寸、靶材颗粒种类和构型。将直径为0.05~1mm靶材颗粒,在真空条件下,根据应用场景,用机床压结成厚度为0.2~10mm的整块状圆形或矩形阳极靶。When making the above anode target, the particle size, target particle type and configuration are selected according to the application scenario and the size of the formed anode target. Target particles with a diameter of 0.05 to 1mm are pressed into a monolithic circular or rectangular anode target with a thickness of 0.2 to 10mm using a machine tool under vacuum conditions according to the application scenario.
一般而言,成型靶厚度应至少为靶材颗粒直径的3~4倍,比如厚度为0.2mm的靶,选取的靶材颗粒应为0.05mm。根据选取的构型,制作相应的工装模具,在真空环境下,利用机床进行压结,而后在大气环境下进行轧制和打磨,打磨后要求表面粗糙度小于等于1.6,具体制备过程如下:Generally speaking, the thickness of the formed target should be at least 3 to 4 times the diameter of the target particles. For example, for a target with a thickness of 0.2mm, the selected target particles should be 0.05mm. According to the selected configuration, the corresponding tooling mold is made, pressed using a machine tool in a vacuum environment, and then rolled and polished in an atmospheric environment. After polishing, the surface roughness is required to be less than or equal to 1.6. The specific preparation process is as follows:
步骤一、颗粒制备;Step 1. Particle preparation;
根据实验所需的射线参数选取靶材材料,制备对应的靶材颗粒,如钽、碳化钽、石墨、钨、碳化钨、铝等。颗粒直径为0.05~1mm,该尺寸范围内的颗粒直径小于工业上常用的用于冶金的粉末,制备难度降低;Select the target material according to the ray parameters required for the experiment and prepare the corresponding target particles, such as tantalum, tantalum carbide, graphite, tungsten, tungsten carbide, aluminum, etc. The particle diameter is 0.05~1mm. The particle diameter in this size range is smaller than the powder commonly used in industry for metallurgy, and the preparation difficulty is reduced;
步骤二、真空压结;Step 2: Vacuum bonding;
2.1)将步骤一制备的靶材颗粒进行重结晶退火处理,退火温度视材料再结晶温度而有所差异,对钽颗粒来说,重结晶退火温度一般在800℃~1000℃;2.1) Perform recrystallization annealing treatment on the target particles prepared in step 1. The annealing temperature varies depending on the recrystallization temperature of the material. For tantalum particles, the recrystallization annealing temperature is generally between 800°C and 1000°C;
2.2)将靶材颗粒与粘合剂(高纯石墨导电胶)混合,石墨胶总量约为混合料3的5%~10%(体积);2.2) Mix target particles and binder (high-purity graphite conductive glue). The total amount of graphite glue is about 5% to 10% (volume) of Mixture 3;
2.3)根据阳极靶的体积和密度,称量对应质量的混合料3放入压结模具,将压结模具放置在10-3Pa量级的真空环境中;2.3) According to the volume and density of the anode target, weigh the corresponding mass of mixture 3 and put it into the compaction mold, and place the compaction mold in a vacuum environment of the order of 10 -3 Pa;
压结模具结构如图4所示;压结模具进行压结时,根据预成型后阳极靶的体积和密度,称量对应质量的混合料3,一般取压缩比(压结前混合料3高度与成型后压缩高度之比)为2~3,多种颗粒、或者多层的阳极靶需要预先区分位置、或者分层放置颗粒;The structure of the compaction mold is shown in Figure 4; when the compaction mold is compacted, the corresponding mass of mixture 3 is weighed according to the volume and density of the preformed anode target, and the compression ratio (height of mixture 3 before compaction) is generally taken The ratio to the compression height after molding) is 2 to 3. Multiple particles or multi-layer anode targets need to be positioned in advance or the particles should be placed in layers;
2.4)根据阳极靶的密度设定压制压力,根据压制压力对混合后的靶材颗粒与粘合剂进行压结,整个压结过程在10-3Pa量级的真空环境中进行,先固定侧压模2,留出侧凸边,进行竖直方向压缩;再固定上压模1,进行侧向压缩,交替进行,直到混合料3压结至预成型尺寸,颗粒在竖直方向和水平方向上均被压缩;2.4) Set the pressing pressure according to the density of the anode target, and press the mixed target particles and adhesive according to the pressing pressure. The entire bonding process is carried out in a vacuum environment of the order of 10 -3 Pa. The side is fixed first. Press mold 2, leave side convex edges, and perform vertical compression; then fix the upper mold 1, perform lateral compression, and proceed alternately until the mixture 3 is compacted to the preformed size, and the particles are in the vertical and horizontal directions. are compressed;
压结前需要在压结模具内表面涂抹硬脂酸锌,作用是润滑模壁与压结靶脱模。压结时的压缩温度35℃~50℃,此种温度下石墨胶具有较好的粘合能力。上述压制压力与需要的靶密度相关,以纯钽靶为例,一般取100MPa~160MPa时压结靶密度为10g/cm3,取190MPa~270MPa时压结靶密度约为11g/cm3;Before bonding, zinc stearate needs to be applied to the inner surface of the bonding mold to lubricate the mold wall and release the bonding target. The compression temperature during bonding is 35℃~50℃. At this temperature, graphite glue has better bonding ability. The above-mentioned pressing pressure is related to the required target density. Taking pure tantalum target as an example, the compacted target density is generally 10g/cm 3 when 100MPa ~ 160MPa is used, and the compacted target density is about 11g/cm 3 when 190MPa ~ 270MPa is used;
2.5)达到压制压力后保压3~5分钟,目的是使压力充分传递,减小弹性后效影响,而后缓缓撤除压力,真空环境静置20~30分钟,消除应力;2.5) After reaching the pressing pressure, maintain the pressure for 3 to 5 minutes. The purpose is to fully transmit the pressure and reduce the impact of elastic aftereffects. Then slowly remove the pressure and leave it in a vacuum environment for 20 to 30 minutes to eliminate the stress;
步骤三、大气环境轧制;Step 3: Rolling in atmospheric environment;
将预成型的阳极靶从真空环境中取出,采用轧制的方法进一步压结,目的是进一步对颗粒靶进行塑形,提升表面平整度,同时使得颗粒间隙进一步缩小,控制颗粒间隙<100μm,压缩比(预成型靶厚度与轧制后靶厚度)>2。The preformed anode target is taken out from the vacuum environment and further compacted by rolling. The purpose is to further shape the particle target, improve the surface flatness, and further reduce the particle gap, control the particle gap to <100 μm, and compress Ratio (thickness of preformed target and thickness of target after rolling)>2.
步骤四、表面打磨;Step 4. Surface polishing;
采用打磨机(包覆砂纸)对阳极靶表面进行打磨,使表面粗糙度≤1.6。Use a grinder (coated sandpaper) to grind the anode target surface to make the surface roughness ≤ 1.6.
将靶安装至脉冲功率装置上,每次实验结束后,需要及时查看靶的热-力学损伤情况,如靶表面颗粒有脱落,无需更换,用砂纸酌情打磨处理即可。Install the target on the pulse power device. After each experiment, it is necessary to check the thermo-mechanical damage of the target in time. If the particles on the target surface fall off, there is no need to replace it. Just polish it with sandpaper as appropriate.
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