CN114122878B - Laser, optical device and production method - Google Patents
Laser, optical device and production method Download PDFInfo
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- CN114122878B CN114122878B CN202111403560.8A CN202111403560A CN114122878B CN 114122878 B CN114122878 B CN 114122878B CN 202111403560 A CN202111403560 A CN 202111403560A CN 114122878 B CN114122878 B CN 114122878B
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- 229910052732 germanium Inorganic materials 0.000 claims description 3
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06716—Fibre compositions or doping with active elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1601—Solid materials characterised by an active (lasing) ion
- H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
- H01S3/1611—Solid materials characterised by an active (lasing) ion rare earth neodymium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/1601—Solid materials characterised by an active (lasing) ion
- H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
- H01S3/1618—Solid materials characterised by an active (lasing) ion rare earth ytterbium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/30—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects
- H01S3/302—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range using scattering effects, e.g. stimulated Brillouin or Raman effects in an optical fibre
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
The present invention provides a laser comprising: the pump source is used for generating pump light, and the wavelength of the pump light is any single wavelength and/or wave band between 900nm and 960 nm; the resonance module is used for absorbing the pump light, generating oscillation and outputting first signal laser; the resonance module comprises a high light reflecting element, a low light reflecting element and an ytterbium-doped optical fiber positioned on an optical path between the high light reflecting element and the low light reflecting element; the reflectivity of the low reflective element is less than the reflectivity of the high reflective element; the pumping source is used for carrying out fiber core pumping on the ytterbium-doped optical fiber, and the first signal laser wavelength comprises any single wavelength and/or wave band between 970nm and 1000 nm. The laser can improve the laser output efficiency and realize the signal laser output of 970 nm-1000 nm of single-mode tail fiber output.
Description
Technical Field
The invention relates to a laser, optical equipment and a production method, in particular to a short-wavelength ytterbium-doped fiber laser with high-power single-mode tail fiber output.
Background
The technology of generating or amplifying laser by pumping ytterbium-doped and erbium-doped optical fibers is continuously studied, however, the existing single-mode 980nm pump source for pumping ytterbium-doped and erbium-doped optical fibers has the problems of low output power, low laser efficiency, high manufacturing difficulty of optical fibers and difficult output of high-power single-mode tail fibers.
First, the current method for generating single-mode laser near 980nm adopts a single-mode 980nm optical fiber coupled semiconductor laser, however, the output power is below 1.2W, which can not meet the development requirements of precision laser technologies, such as all-fiber single-frequency narrow-linewidth optical fiber lasers, ultrafast optical fiber lasers and the like.
Secondly, pumping the ytterbium-doped optical fiber by adopting a high-power multimode 915nm semiconductor laser to generate 10W-level single-mode 980nm laser is a technical approach. The methods disclosed in the literature report can be summarized into technical schemes based on large core-to-cladding ratio optical fibers (such as 20/125, 35/125, 20/80, 60/130, 14/45 and the like), bandgap photonic crystal fibers and multi-core optical fibers. The proposal is mainly based on improving the structural design of ytterbium-doped optical fiber to improve the laser efficiency, but the proposal also has the defects of difficult matching with passive optical fiber devices, complex optical fiber structure, large manufacturing difficulty, reduced beam quality, residual mass pumps Pu Guang and the like, which affect the practical application.
How to ensure the output of high power and realize the single-mode tail fiber and the flexible output of 970-1000nm laser is a technical problem to be solved urgently by the technicians in the field.
Disclosure of Invention
An object of the present invention is to provide a laser capable of improving laser output efficiency and realizing single-mode tail flexibility to output 970nm to 1000nm laser light, aiming at the problems in the prior art.
For this purpose, the above object of the present invention is achieved by the following technical solutions:
the technical scheme of the invention provides a laser, which is characterized by comprising the following components:
the pump source is used for generating pump light, and the wavelength of the pump light comprises any single wavelength and/or wave band between 900nm and 960 nm;
the resonance module is used for absorbing the pump light, generating oscillation and outputting first signal laser; the resonance module comprises a high light reflecting element, a low light reflecting element and an ytterbium-doped optical fiber positioned on an optical path between the high light reflecting element and the low light reflecting element;
the high reflection element is used for reflecting light in the resonance module back to the ytterbium-doped optical fiber; the ytterbium-doped fiber is used for absorbing at least part of the pump light entering the resonance module to generate the first signal laser; the low reflection element is used for partially reflecting the light passing through the ytterbium-doped optical fiber back to the ytterbium-doped optical fiber and partially outputting the first signal laser from the resonance module; the reflectivity of the low reflective element is less than the reflectivity of the high reflective element;
the pumping source is used for carrying out fiber core pumping on the ytterbium-doped optical fiber, and the first signal laser wavelength comprises any single wavelength and/or wave band between 970nm and 1000 nm.
Optionally, the pump source includes a sub pump source and a first gain module, the first gain module is configured to absorb a sub beam emitted by the sub pump source and generate the pump light, the pump source is a neodymium-doped optical fiber pump source, and the first gain module includes the neodymium-doped optical fiber; the wavelength of the sub-beam emitted by the sub-pump source is any single wavelength and/or wave band between 700nm and 890 nm.
Optionally, the first gain module is a fiber oscillator or an amplifier; the optical fiber oscillator includes: the optical fiber comprises a neodymium-doped optical fiber, a first reflecting element and a second reflecting element, wherein the neodymium-doped optical fiber is positioned on an optical path between the first reflecting element and the second reflecting element, and the reflectivity of the first reflecting element is larger than that of the second reflecting element.
Optionally, the first gain module further comprises a germanium-doped fiber, and the germanium-doped fiber and the neodymium-doped fiber form a neodymium-doped raman mixed gain fiber.
Optionally, the first gain module is an amplifier, and the first gain module further includes a seed source, where the seed source is used to provide seed light for the neodymium-doped optical fiber, and the wavelength of the seed source is any single wavelength and/or wave band between 900 nm and 940 nm.
Optionally, the high-reflection element is an optical fiber element, and the high-reflection element is provided with a first optical fiber connection end; the low-reflection element is an optical fiber element and is provided with a second optical fiber connecting end; the two ends of the ytterbium-doped optical fiber are respectively welded with the first optical fiber connecting end and the second optical fiber connecting end; the resonance module is provided with a pump light input optical fiber and a laser output optical fiber; the pump source is welded with the pump light input optical fiber through the tail fiber, and the laser output optical fiber outputs the first signal laser through the laser output port.
Optionally, the low reflection element is provided with the laser output optical fiber, and the laser output port and the second optical fiber connecting end are respectively positioned at two sides of the low reflection element; the high reflection element is provided with a pumping light input optical fiber;
or,
the low reflection element is provided with a pumping light input optical fiber; the resonance module further comprises a first coupler, wherein the first coupler is used for connecting a tail fiber, a laser output optical fiber and the pump light input optical fiber of the pump source.
Optionally, the first coupler is a wavelength division multiplexer, and is configured to inject the pump light through the pump light input optical fiber, separate the pump light from the first signal laser returned by the high reflection element, and output the first signal laser through the laser output optical fiber.
Optionally, the high-reflection element is a fiber bragg grating or a fiber optic reflector; the low reflection element is a fiber grating or a fiber beam splitter;
wherein, the optic fibre speculum includes: the optical fiber transmission device comprises a reflector and a transmission optical fiber packaged with the reflector into a whole, wherein the transmission optical fiber is used for transmitting light transmitted through the ytterbium-doped optical fiber to the reflector and transmitting light reflected back by the reflector back to the ytterbium-doped optical fiber, and one end of the transmission optical fiber, which is far away from the reflector, is the first optical fiber connection end;
the optical fiber beam splitter comprises a second coupler, a beam splitter input optical fiber, a beam splitter output optical fiber and a retro-reflective optical fiber, and the beam splitter input optical fiber, the beam splitter output optical fiber and the retro-reflective optical fiber are all connected with the second coupler; one end of the beam splitter input optical fiber, which is away from the second coupler, is a second optical fiber connection end; the beam splitter output optical fiber is used for outputting the first signal laser; the two ends of the retroreflective optical fiber and the second coupler are connected with each other.
Optionally, at least one of the high reflective element and the low reflective element comprises a germanium-doped passive optical fiber; the wavelength range of the high reflective element at least partially overlaps the wavelength range of the low reflective element; the difference between the mode field diameter of the ytterbium-doped optical fiber and the mode field diameter of the high reflective element is less than 5 mu m, and the difference between the mode field diameter of the ytterbium-doped optical fiber and the mode field diameter of the low reflective element is less than 5 mu m.
Optionally, the reflectivity of the high reflective element is greater than or equal to 90%; the reflectivity of the low-reflection element is 1% -60%.
Optionally, only ytterbium ions are doped in the ytterbium-doped optical fiber, the length of the ytterbium-doped optical fiber is 5 cm-100 cm, and the concentration of the ytterbium ions is 1000 ppm-15000 ppm; the core-to-cladding ratio of the ytterbium-doped optical fiber is 0.04-0.10; or alternatively, the first and second heat exchangers may be,
the ytterbium-doped optical fiber is doped with ytterbium ions and neodymium ions, wherein the concentration of the neodymium ions is 100 ppm-5000 ppm; the core-to-cladding ratio of the ytterbium-doped optical fiber is 0.04-0.10.
Optionally, the pump light is single-mode light including a fundamental mode or the pump light is near single-mode light, and the mode number of the near single-mode light is less than or equal to 4;
the ytterbium-doped optical fiber is a single-mode optical fiber only supporting the transmission of a fundamental mode; or the ytterbium-doped optical fiber is a few-mode optical fiber supporting single-mode laser oscillation, and the normalized frequency of the few-mode optical fiber is smaller than 3.5.
Optionally, the ytterbium-doped fiber is bent.
Optionally, the method further comprises: the second gain module is used for converting the first signal laser into second signal laser under the pumping of the first signal laser, and the second signal laser is different from the first signal laser in wavelength or power.
Optionally, the wavelength of the second signal laser is 1.3 μm-1.8 μm; the second gain module comprises one or a combination of two of an erbium-doped fiber and an erbium-ytterbium co-doped fiber.
The technical scheme of the invention also provides optical equipment, which is characterized by comprising the following components: the laser is used for emitting signal laser to the workpiece so as to detect or process the workpiece.
Optionally, the optical device further includes: and the detection device is used for collecting detection light formed by the signal laser emitted by the laser after being reflected, scattered, diffracted or transmitted by the workpiece, and acquiring information to be detected of the object to be detected according to the detection light.
The technical scheme of the invention also provides a production method based on the optical equipment, which is characterized by comprising the following steps:
causing the laser to generate a signal laser, causing the laser to generate a signal laser includes: causing the pump source to generate pump light; the pump light is input to the resonance module, the resonance module absorbs the pump light and generates oscillation, and first signal laser is output; the wavelength of the first signal laser is any single wavelength and/or wave band between 970nm and 1000 nm; irradiating the signal laser to a workpiece to process or detect the workpiece
Compared with the prior art, the technical scheme of the invention has the following technical effects:
the invention provides a laser, which utilizes the combination of a pumping source and an ytterbium-doped optical fiber, outputs pumping light through the pumping source, and pumps the ytterbium-doped optical fiber through a fiber core to directly generate 970-1000 nm laser output by single-mode tail flexibility; according to the invention, the ytterbium-doped optical fiber is subjected to core pumping by the pumping source, so that pumping light can be fully absorbed by the ytterbium-doped optical fiber within a length of tens of centimeters, the defect of low cladding pumping laser efficiency is effectively overcome, the invention has the laser efficiency of more than 50 percent, and in addition, the core pumping has a good technical effect of inhibiting parasitic oscillation of the ytterbium-doped optical fiber in long waves; meanwhile, the resonant module formed by the high reflecting element, the low reflecting element and the ytterbium-doped optical fiber can enable light beams to oscillate in the resonant module, directly generate laser working in the range of 970 nm-1000 nm, and can effectively resist return laser by enhancing stimulated radiation effect, so that the invention has the advantages of simple structure and return light impact resistance compared with the structure of the optical fiber amplifier.
Furthermore, the low reflection element and the high reflection element are optical fiber elements, the resonance module is provided with a laser output optical fiber, 970-1000 nm laser output by the laser output optical fiber can directly realize single-mode tail fiber flexible output, the structure is simple and compact, the practicability is strong, the preparation method has obvious technical advantages in the technical field of short wavelength laser working in the 970-1000 nm range, and the market application value is high.
Furthermore, the first gain module combines the neodymium-doped optical fiber and the germanium-doped optical fiber for the neodymium-doped Raman mixed gain optical fiber, the gain wavelength range of the neodymium-doped Raman mixed oscillator is further regulated by utilizing the stimulated Raman scattering effect of the germanium-doped optical fiber, the output wavelength range of a pumping source is effectively expanded, the problem that a resonant cavity independently constructed by the neodymium-doped optical fiber is difficult to generate laser in a wave band above 935nm is solved, and therefore pumping light with the wavelength of 935 nm-960 nm is generated.
Furthermore, the ytterbium-doped optical fiber is doped with neodymium ions, and the phenomenon that the output power of the ytterbium-doped optical fiber gradually decreases along with time in the long-term use process can be effectively slowed down or eliminated by utilizing the enhancement effect of the neodymium ions on the anti-photodarkening performance of the ytterbium-doped optical fiber, so that the service life of the laser is prolonged.
Drawings
FIG. 1 is a schematic diagram of a first embodiment of a laser of the present invention;
FIG. 2 is a schematic diagram showing the power evolution process of pump light and first signal laser light in an optical fiber according to a first embodiment of the present invention;
FIG. 3 is a schematic diagram of a second embodiment of the laser of the present invention;
fig. 4 is a schematic structural view of a third embodiment of the laser of the present invention;
fig. 5 is a schematic diagram of a fourth embodiment of the laser of the present invention;
Fig. 6 is a flow chart of an embodiment of a laser-based production method of the present invention.
Detailed Description
In the prior art, a laser device for generating lasers around 980nm has the problems of low laser efficiency, high optical fiber manufacturing difficulty and incapability of outputting single-mode lasers.
In order to solve the technical problems, the prior art provides a technical approach for pumping ytterbium-doped optical fibers based on fiber cores of neodymium-doped optical fiber lasers. The gain of the first signal laser is realized through the ytterbium-doped fiber amplifier, and the ytterbium-doped fiber is modified into a glass rod with a conical structure so as to increase the laser efficiency.
However, through research of the applicant, the optical fiber amplifier scheme needs to consider the problem of return light isolation in the application of the high-power single-frequency narrow-linewidth ultra-fast optical fiber laser, and needs to introduce optical fiber devices such as an isolator, and the like, so that the output power of 980nm laser is limited, and the improvement of the output power of the laser is limited. At the same time, the sub-pump sources necessary for the isolator, amplifier, also add to the complexity of the system. Ytterbium-doped fibers are modified to glass rods with tapered structures, which lose the flexibility of the fiber in the aforementioned applications, and do not allow for simple single-mode pigtail output.
In order to improve the laser efficiency and output 970 nm-1000 nm single-mode laser through the flexibility of the tail, the invention provides a laser, and the ytterbium-doped optical fiber is subjected to fiber core pumping through a pumping source, so that pumping light can be fully absorbed by the ytterbium-doped optical fiber within a length of tens of centimeters, the defect of low cladding pumping laser efficiency is effectively overcome, and the laser has the laser efficiency of more than 50 percent. In addition, the fiber core pump has good technical effect on inhibiting parasitic oscillation of the ytterbium-doped fiber in long waves; in addition, the resonant module formed by the high reflecting element, the low reflecting element and the ytterbium-doped optical fiber can enable light beams to oscillate in the resonant module, directly generate laser working in the range of 970 nm-1000 nm, and can effectively resist return laser by enhancing stimulated radiation effect, so that the invention has the advantages of simple structure and return light impact resistance compared with the structure of the optical fiber amplifier. Meanwhile, the pumping light carries out core pumping on the ytterbium-doped optical fiber through the resonance module, so that the length of the ytterbium-doped optical fiber can be effectively shortened by enhancing stimulated radiation, the generation of light with the wavelength of more than 1000nm can be restrained, and the laser conversion efficiency is improved.
FIG. 1 is a schematic diagram of a laser according to an embodiment of the present invention; fig. 2 is a schematic diagram of a power evolution process of pump light and first signal laser light in an optical fiber according to a first embodiment of the present invention.
The laser provided by the technical scheme of the invention is described in detail below with reference to the accompanying drawings.
Referring to fig. 1, the laser 101 includes: and the pump source is used for generating pump light, and the wavelength of the pump light comprises any single wavelength or wave band between 900nm and 960 nm.
The resonance module is used for absorbing the pump light, generating oscillation and outputting first signal laser; the resonance module comprises a high reflecting element 103, a low reflecting element 104 and an ytterbium-doped optical fiber 102 positioned on an optical path between the high reflecting element 103 and the low reflecting element 104; the high reflection element 103 is used for reflecting the light in the resonance module back to the ytterbium-doped fiber 102; the ytterbium-doped fiber 102 is configured to absorb at least part of the pump light entering the resonance module to generate the first signal laser; the low reflection element 104 is configured to reflect part of the light passing through the ytterbium-doped fiber 102 back to the ytterbium-doped fiber 102, and form part of the first signal laser light from the resonator module output; the reflectivity of the low reflective elements 104 is less than the reflectivity of the high reflective elements 103; wherein the pump source is used for performing core pumping on the ytterbium-doped fiber 102.
In this embodiment, the pump source is a neodymium-doped fiber pump source 101. In other embodiments, the pump source may be a semiconductor laser or a solid state laser.
In this embodiment, the pump light is single-mode light including a fundamental mode. In other embodiments, the pump light may be near single mode light, and the mode number of the near single mode light is less than or equal to 4.
The pump source 101 comprises a sub-pump source and a first gain module. The first gain module is an optical fiber oscillator or an amplifier, and the first gain module includes the neodymium-doped optical fiber 51, where the neodymium-doped optical fiber 51 is doped with at least neodymium ions.
The sub-pump source is a semiconductor laser, a solid state laser or an optical fiber laser. The wavelength of the sub-beam emitted by the sub-pump source is any single wavelength or wave band between 700nm and 890 nm.
Specifically, the sub-pump source is a 808nm semiconductor laser, 880nm semiconductor laser or 793nm semiconductor laser with tail fiber output.
In other embodiments, the first gain module is an optical fiber amplifier, and the first gain module further includes a seed source, where the seed source is configured to provide seed light for the neodymium-doped optical fiber, and a wavelength of the seed source is 900nm to 940nm. The neodymium-doped fiber pump source 101 is used for generating pump light required by the ytterbium-doped fiber 102, and has the characteristic of fiber core output.
Specifically, the seed source is a solid-state laser, an optical fiber laser or a low coherence light source. The low-correlation light source comprises an ASE light source, and the wavelength of the seed source is any single wavelength or wave band in the range of 900-940 nm.
The sub-pump source also comprises an optical fiber combiner, and the neodymium-doped optical fiber pump source 101 with good robustness, high output power and good beam quality is constructed through optical fiber devices such as the optical fiber combiner. Further, the neodymium-doped fiber pump source 101 may be integrated with the resonance module, such that the laser has a compact robust structure.
The optical fiber oscillator includes: a first reflecting element and a second reflecting element, the neodymium-doped optical fiber 51 being located between the first reflecting element and the second reflecting element. The first reflective element has a reflectivity greater than the reflectivity of the second reflective element. Specifically, the first reflective element has a reflectivity of 80% or more, for example 90%. The reflectivity of the second reflecting element is 20% -70%.
The first reflecting element is an optical fiber grating, an optical fiber reflecting mirror or a reflecting mirror; the second reflecting element is a fiber grating, a fiber beam splitter or a semi-transparent semi-reflective prism.
The fiber optic mirror includes: the optical fiber transmission device comprises a reflector and a transmission optical fiber packaged with the reflector into a whole, wherein the transmission optical fiber is used for transmitting light transmitted through the neodymium-doped optical fiber to the reflector and transmitting light reflected by the reflector back to the neodymium-doped optical fiber.
The optical fiber beam splitter comprises a second coupler, a beam splitter input optical fiber, a beam splitter output optical fiber and a retro-reflective optical fiber, and the beam splitter input optical fiber, the beam splitter output optical fiber and the retro-reflective optical fiber are all connected with the second coupler; the beam splitter output optical fiber is used for outputting the first signal laser; the two ends of the retroreflective optical fiber and the second coupler are connected with each other.
Specifically, the optical fiber beam splitter is a 2×2 beam splitter, one end of the beam splitter is connected with a beam splitter input optical fiber and a beam splitter output optical fiber, and two optical fibers at the other end of the beam splitter are welded to form the retroreflective optical fiber.
Specifically, the first gain module includes a neodymium-doped optical fiber 51, and the neodymium-doped optical fiber 51 is doped with at least neodymium ions. The first reflecting element is a fiber grating, and the second reflecting element is a fiber grating. The working wavelength of the first reflecting element is any single wavelength or wave band between 900nm and 935nm, and the working wavelength of the second reflecting element is any single wavelength or wave band between 900nm and 935 nm.
Specifically, the working wavelength of the first reflecting element is 910nm or 920nm; the working wavelength of the second reflecting element is a single wavelength of 910nm or 920nm or a band with a bandwidth less than or equal to 1nm near 910nm or a band with a bandwidth less than or equal to 1nm near 920 nm.
The first gain module is provided with a gain medium. In one embodiment of the present invention, the gain medium in the first gain module includes only the neodymium-doped optical fiber 51.
In another embodiment of the present invention, the neodymium-doped pump source further comprises a germanium-doped fiber, and the germanium-doped fiber and the neodymium-doped fiber 51 form a neodymium-doped raman mixed gain fiber. Specifically, the gain medium in the first gain module includes a germanium-doped optical fiber and a neodymium-doped optical fiber 51.
In the neodymium-doped optical fiber pump source 101, the neodymium-doped optical fiber 51 and the germanium-doped optical fiber are combined, the gain wavelength range of the first gain module is further regulated by utilizing the stimulated Raman scattering effect of the germanium-doped optical fiber, the output wavelength range of the neodymium-doped optical fiber pump source 101 is effectively expanded, the problem that a resonant cavity independently constructed by the neodymium-doped optical fiber 51 is difficult to generate laser in a wave band above 935nm is solved, and pump light with the wavelength of 935 nm-960 nm is generated.
The neodymium-doped optical fiber pump source 101 generates any single wavelength or wave band between 900nm and 960nm, specifically, the wavelength of the generated pump light comprises: any single wavelength or wave band between 935nm and 960 nm; in this embodiment, the pump light has a broad spectrum with a wavelength of 900nm to 960 nm. In another embodiment, the pump light is a broad spectrum with wavelengths covering 935nm to 960nm, or the pump light is a single wavelength light of 900nm, 935nm, or 960 nm.
In one embodiment, the neodymium-doped optical fiber 51 is doped with only neodymium ions. In another embodiment of the present invention, germanium ions are doped in the neodymium-doped fiber 51.
The pump light power output by the neodymium-doped optical fiber pump source 101 is greater than or equal to 8W, for example, 10W or 15W.
In this embodiment, the high reflection element 103 is an optical fiber element, and the high reflection element 103 has a first optical fiber connection end; the low reflection element 104 is an optical fiber element, and the low reflection element 104 is provided with a second optical fiber connecting end; the two ends of the ytterbium-doped optical fiber 102 are respectively welded with the first optical fiber connecting end and the second optical fiber connecting end; the resonance module is provided with a pump light input optical fiber and a laser output optical fiber; the pump source is welded with the pump light input optical fiber through the tail fiber, and the laser output optical fiber outputs the first signal laser through the laser output port.
The low reflecting element 104 and the high reflecting element 103 are optical fiber elements, the resonant module is provided with a laser output optical fiber, the laser output optical fiber outputs 970 nm-1000 nm laser, single-mode tail fiber flexible output can be directly realized, the structure is simple and compact, the practicability is strong, the technical advantages are obvious in the technical field of preparing short-wavelength laser working in the range of 970 nm-1000 nm, and the market application value is high.
In other embodiments of the present invention, the low reflecting element 104 and the high reflecting element 103 may also be spatial reflecting elements, such as polarization beam splitters or half mirrors.
The low reflecting element 104 and the high reflecting element 103 are optical fiber elements, in this embodiment, the low reflecting element 104 has the laser output optical fiber, and the laser output port and the second optical fiber connection end are respectively located at two sides of the low reflecting element 104; the highly reflective element 103 has a pump light input fiber.
The high reflection element 103 is a fiber bragg grating or a fiber optic reflector; the low reflection element 104 is a fiber grating or a fiber beam splitter. Specifically, in this embodiment, the high reflective element 103 is a fiber grating, and the low reflective element 104 is a fiber grating.
The two ends of the low reflection element 104 are respectively a second optical fiber connection end and a laser output end, the first optical fiber connection end of the high reflection element 103 is welded with the ytterbium-doped optical fiber 102, and the laser output end is a tail fiber output end of a fiber grating and is used for outputting the first signal laser; the two ends of the high reflection element 103 are respectively a first optical fiber connection end and a pump light input end, the first optical fiber connection end of the high reflection element 103 is welded with the ytterbium-doped optical fiber 102, and the pump light input end is welded with the output optical fiber of the optical fiber oscillator.
In this embodiment, the pump light emitted by the neodymium-doped optical fiber pump source 101 enters the high reflective element 103 through the pump light input end and enters the ytterbium-doped optical fiber 102 through the first optical fiber connection end of the high reflective element 103, the ytterbium-doped optical fiber 102 converts at least part of the pump light into first signal laser and reaches the low reflective element 104, and the low reflective element 104 makes at least part of the first signal laser output from the laser output end, so that the rest of the light is reflected back to the ytterbium-doped optical fiber 102 and reaches the high reflective element 103 through the ytterbium-doped optical fiber 102, and then is reflected back to the ytterbium-doped optical fiber 102 by the high reflective element 103, so that the signal light oscillates in the resonance module and outputs the first signal laser.
In this embodiment, the reflectivity of the high reflective element 103 is greater than or equal to 90%; the low reflective element 104 has a reflectivity of 1% to 60%.
Specifically, the ytterbium-doped fiber 102 has a length of 5cm to 100cm, for example, 10cm, 20cm, 50cm, or 80cm; ytterbium ion concentrations of 1000ppm to 15000ppm, for example 1200ppm or 1300ppm; the core-to-cladding ratio of the ytterbium-doped fiber 102 is 0.02-0.2, and specifically, the core-to-cladding ratio of the ytterbium-doped fiber 102 is 0.04-0.1. In other embodiments, the ytterbium doped fiber 102 can have a core-to-cladding ratio greater than 0.2 and less than 0.25.
Specifically, the ytterbium-doped fiber has a fiber core diameter of 5 μm and a cladding diameter of 125; alternatively, the ytterbium-doped fiber has a core diameter of 10 μm and a cladding diameter of 125 μm.
The ytterbium doped fiber 102 may be doped with only ytterbium ions or the ytterbium doped fiber 102 may be doped with other ions, such as neodymium ions.
The ytterbium-doped fiber is also doped with neodymium ions, and the phenomenon that the output power of the ytterbium-doped fiber gradually decreases along with time in the long-term use process can be effectively slowed down or eliminated by utilizing the enhancement effect of the neodymium ions on the anti-photodarkening performance of the ytterbium-doped fiber, so that the service life of the laser is prolonged.
Specifically, the ytterbium-doped fiber 102 is doped with neodymium ions, and the ytterbium-doped fiber 102 is a ytterbium-neodymium-doped fiber. The concentration of neodymium ions in the ytterbium-doped fiber 102 is 100ppm to 5000ppm; the core-to-cladding ratio of the ytterbium-doped fiber 102 is 0.02-0.2, and specifically, the core-to-cladding ratio of the ytterbium-doped fiber 102 is 0.04-0.1. In other embodiments, the ytterbium doped fiber 102 can have a core-to-cladding ratio greater than 0.2 and less than 0.25.
For example, the ytterbium-doped neodymium fiber has a core diameter of 5 μm and a cladding diameter of 125; alternatively, the ytterbium-doped neodymium fiber has a core diameter of 10 μm and a cladding diameter of 125 μm.
The resonance module can reduce the length of the ytterbium-doped optical fiber 102, short-wave light of 970 nm-1000 nm can be generated in a shorter optical fiber through the ytterbium-doped optical fiber 102 with the ytterbium ion concentration of 1000ppm-15000ppm combined with a fiber core pump, and oscillation of long-wave light (more than 1000 nm) can be restrained through the resonance module, so that the laser conversion efficiency of lasers around 970 nm-1000 nm is improved.
The core-to-cladding ratio of the ytterbium-doped fiber 102 reduces the difficulty in manufacturing the fiber, and enables the ytterbium-doped fiber 102 to generate first signal laser with wavelength of 970nm to 1000nm by performing core pumping.
The ytterbium-doped optical fiber 102 is a single-mode optical fiber only supporting the transmission of a fundamental mode; or, the ytterbium-doped fiber 102 is a few-mode fiber supporting single-mode laser oscillation, and the normalized frequency of the few-mode fiber is less than 3.5.
In this embodiment, the ytterbium-doped fiber 102 is bent, and the bent ytterbium-doped fiber 102 can limit the high-order mode oscillation, output the single-mode laser with the near diffraction limit, and improve the stability of the laser. In other embodiments of the invention, the ytterbium doped fiber can also be straight.
At least one of the high reflective element 103 and the low reflective element 104 comprises a germanium-doped passive optical fiber. Specifically, in this embodiment, the high reflective element 103 and the low reflective element 104 each include a germanium-doped passive optical fiber. The germanium-doped passive optical fiber of the high light reflecting element 103 means that one or more optical fibers in the high light reflecting element 103 are germanium-doped passive optical fibers, and specifically, all optical fibers in the high light reflecting element 103 are germanium-doped passive optical fibers; one or more optical fibers in the low reflection element 104 are germanium-doped passive optical fibers, and in particular, all optical fibers in the low reflection element 104 are germanium-doped passive optical fibers.
The germanium-doped passive optical fiber can save cost and enhance practicability. Germanium dioxide has photosensitivity, and when irradiated by ultraviolet laser, the germanium-doped optical fiber can generate permanent refractive index change, so that the fiber bragg grating is easy to manufacture.
To reduce the fusion splice loss of the fibers, the germanium-doped passive fiber and ytterbium-doped fiber 102 of the two-grating fiber configuration have matched mode field diameters. In this embodiment, the low reflection element 104 is configured as a single mode germanium doped passive fiber.
In this embodiment, the germanium-doped passive fiber of the low reflection element 104 is directly fused with the ytterbium-doped fiber 102. In other embodiments, the germanium-doped passive fiber of the low reflection element 104 and the ytterbium-doped fiber 102 have different core sizes, and a mode field adapter is further provided between the germanium-doped passive fiber of the low reflection element 104 and the ytterbium-doped fiber 102.
Specifically, the wavelength range of the high reflective element 103 at least partially overlaps the wavelength range of the low reflective element 104. The wavelength ranges of the high reflective elements 104 and the low reflective elements 104 cover at least 970nm to 1000nm.
The difference between the mode field diameter of the ytterbium doped fiber 102 and the mode field diameter of the high reflective element 103 is less than 5 microns, and the difference between the mode field diameter of the ytterbium doped fiber 102 and the mode field diameter of the low reflective element 104 is less than 5 microns. Specifically, the difference between the mode field diameter of the ytterbium doped fiber 102 and the mode field diameter of the highly reflective element 103 may be zero, 1 micron, or 2.5 microns; the difference between the mode field diameter of the ytterbium doped fiber 102 and the mode field diameter of the low reflection element 104 can be zero, 1 micron, or 2.5 microns.
When the difference between the mode field diameter of the ytterbium-doped optical fiber 102 and the mode field diameter of the high reflection element 103 is greater than or equal to 3 μm, a mode field adapter is arranged between the high reflection element 103 and the ytterbium-doped optical fiber 102, so as to improve the coupling efficiency between the high reflection element 103 and the ytterbium-doped optical fiber 102 and improve the first signal laser conversion efficiency; when the difference between the mode field diameter of the ytterbium doped fiber 102 and the mode field diameter of the low reflection element 104 is greater than or equal to 3 μm, a mode field adapter is disposed between the low reflection element 104 and the ytterbium doped fiber 102, so as to improve the coupling efficiency between the low reflection element 104 and the ytterbium doped fiber 10 and improve the first signal laser conversion efficiency.
In summary, by arranging the resonance module and using the pumping light with the wavelength of 900-960 nm to perform core pumping on the ytterbium-doped optical fiber 102, the embodiment of the invention can generate single-mode first signal laser with the wavelength of 970-1000 nm, and the laser efficiency reaches more than 50%.
Fig. 2 is a schematic diagram of a power evolution process of pump light and first signal laser light in an optical fiber according to a first embodiment of the laser of the present invention.
Referring to fig. 2, there is shown the transmission of 915nm pump light in an ytterbium doped fiber 102 having a length of 25 cm. The power of the pumping light is 10W, after the pumping light is transmitted by the ytterbium-doped optical fiber 102 with the length of 25cm, the residual pumping light is less than 0.5W, at the moment, the generated 976nm laser is close to 9W (reflectivity 10%), the laser efficiency is 90%, and the light-light conversion efficiency is extremely high. It can be seen that by increasing the pump light power, it is apparent that a laser output much greater than 10W can be produced.
Fig. 3 is a schematic structural diagram of a second embodiment of a laser according to the present invention.
Referring to fig. 3, the same points as those of the embodiment are not described herein, and the differences include:
the low reflection element 104 has a pump light input fiber; the resonance module further comprises a first coupler, wherein the first coupler is used for connecting a tail fiber, a laser output optical fiber and the pump light input optical fiber of the pump source.
The first coupler is a wavelength division multiplexer, and is configured to inject the pump light through the pump light input optical fiber, separate the first signal laser returned by the high reflection element 103 from the pump light, and output the first signal laser through the laser output optical fiber.
Specifically, in this embodiment, the pump light reaches the low reflection element 104 through the wavelength division multiplexer and enters the ytterbium-doped optical fiber 102, and after reaching the high reflection element 103 from the ytterbium-doped optical fiber 102, the pump light is reflected back to the ytterbium-doped optical fiber 102 by the high reflection element 103, and forms part of the first signal laser in the ytterbium-doped optical fiber 102, and at least part of the formed first signal laser enters the first coupler through the low reflection element 104 and is output from the laser output optical fiber through the first coupler.
In other embodiments, the low reflection element 104 is a long pass element, and the low reflection element 104 is configured to reflect the pump light and transmit the first signal laser light. The low reflection element includes an entrance for pump light into ytterbium doped fiber 102. In particular, the low reflective element 104 is configured to transmit light between 970nm and 1000nm and reflect light having a wavelength between 900nm and 960 nm.
Fig. 4 is a schematic structural diagram of a third embodiment of a laser according to the present invention.
Referring to fig. 4, the same points as those of the embodiment are not described herein, and the differences include:
in this embodiment, the low reflection element 104 is a fiber optic beam splitter; the high reflection element 103 is a fiber grating.
The optical fiber beam splitter comprises a second coupler, a beam splitter input optical fiber, a beam splitter output optical fiber and a retro-reflective optical fiber, and the beam splitter input optical fiber, the beam splitter output optical fiber and the retro-reflective optical fiber are all connected with the second coupler; one end of the beam splitter input optical fiber, which is away from the second coupler, is a second optical fiber connection end; the beam splitter output optical fiber is used for outputting the first signal laser; the two ends of the retroreflective optical fiber and the second coupler are connected with each other.
Specifically, the optical fiber beam splitter is a 2×2 beam splitter, and two optical fibers at one end of the 2×2 beam splitter are a beam splitter input optical fiber and a beam splitter output optical fiber respectively; the two optical fibers at the other end of the 2 x 2 beam splitter are fused to each other to form the retroreflective optical fiber.
Fig. 5 is a schematic structural diagram of a third embodiment of a laser according to the present invention.
Referring to fig. 5, the same points of the present embodiment as those of the second embodiment will not be described herein, and the differences include:
In this embodiment, the high reflection element 103 is an optical fiber mirror; the low reflection element 104 is a fiber grating.
Wherein, the optic fibre speculum includes: the optical fiber transmission device comprises a reflector and a transmission optical fiber packaged with the reflector into a whole, wherein the transmission optical fiber is used for transmitting light transmitted through the ytterbium-doped optical fiber 102 to the reflector and transmitting light reflected back by the reflector back to the ytterbium-doped optical fiber 102, and one end of the transmission optical fiber far away from the reflector is the first optical fiber connecting end.
It should be noted that, in the above embodiment, the low reflection element 104 and the high reflection element 103 are optical fiber elements, and the optical fiber elements have low cost and can be coupled with the ytterbium-doped optical fiber 102, so that single-mode transmission can be realized, and the first signal laser can be output through tail fiber flexibility.
In other embodiments of the present invention, the low light reflecting element 104 and the high light reflecting element 103 may be spatial optical elements including: a filter or a beam splitting prism.
In the above embodiments, the first signal laser is used as the output of the laser. In an embodiment of the present invention, the laser may further include a second gain module, and the first signal laser is used as pump light of the second gain module, and forms output laser light of the laser after being gained by the second gain module.
Specifically, the laser further includes: the second gain module is used for converting the first signal laser into second signal laser under the pumping of the first signal laser, and the second signal laser is different from the first signal laser in wavelength or power.
Specifically, the second gain module includes one or a combination of two of an erbium-doped fiber and an erbium-ytterbium co-doped fiber. The wavelength of the second signal laser is any number of single wavelengths or wave bands between 1.3 micrometers and 1.8 micrometers. Specifically, the wavelength of the second signal laser may be a single wavelength of 1.5 micrometers.
The laser of the embodiment shown in fig. 1-5 is used to emit a signal laser to a workpiece to inspect or process the workpiece.
The optical device further includes: the detection device is used for collecting detection light formed by the signal laser generated by the laser after being reflected, scattered, diffracted or transmitted by the workpiece, and acquiring information to be detected of the object to be detected according to the detection light.
The information to be detected comprises: one or more of the surface morphology of the workpiece, the defect position, the target position to be measured and the thickness of the film layer on the surface of the workpiece.
The laser is used for emitting signal laser to the workpiece so as to process the workpiece, and is particularly used for emitting the first signal laser or the second signal laser to the workpiece so as to cut the workpiece.
The optical device further includes: and the bearing table is used for bearing the workpiece.
Referring to fig. 6, the present invention further provides a method for producing a laser 101 according to the embodiment shown in fig. 1 to 5, including:
the step of causing the laser to generate a signal laser light includes:
SP1, enabling the neodymium-doped optical fiber pumping source to generate pumping light;
SP2, enabling the pump light to be input into the resonance module, enabling the pump light to generate oscillation by the resonance module, and outputting first signal laser, wherein the wavelength of the first signal laser comprises any single wavelength and/or wave band between 970nm and 1000 nm;
when the laser does not comprise the second gain module, the signal laser is a first signal laser; when the laser includes the second gain module, the signal laser is a second signal laser.
And SP3, enabling the signal laser to irradiate a workpiece, and processing or detecting the workpiece.
In one embodiment, the laser of the present invention may be used to process a workpiece, such as laser cutting a workpiece. The step of processing or detecting the workpiece comprises the following steps: and enabling the first signal laser to irradiate a workpiece, and cutting the workpiece.
In another embodiment, a laser may be used to inspect the workpiece for surface defects or film thickness.
The step of irradiating the first signal laser to the workpiece and processing or detecting the workpiece further comprises the steps of: irradiating a workpiece with signal laser, wherein the signal laser forms a detection beam after being reflected, scattered, diffracted or transmitted by the workpiece; collecting the detection light beam through a detection device, and acquiring information to be detected of the workpiece according to the detection light beam, wherein the information to be detected comprises: one or more of the surface morphology of the workpiece, the defect position, the target position to be measured and the thickness of the film layer on the surface of the workpiece.
The above detailed description is intended to illustrate the present invention by way of example only and not to limit the invention to the particular embodiments disclosed, but to limit the invention to the precise embodiments disclosed, and any modifications, equivalents, improvements, etc. that fall within the spirit and scope of the invention as defined by the appended claims.
Claims (18)
1. A laser, comprising: the pump source is used for generating pump light, and the wavelength of the pump light comprises any single wavelength and/or wave band between 900nm and 960 nm;
the resonance module is used for absorbing the pump light, generating oscillation and outputting first signal laser; the resonance module comprises a high light reflecting element, a low light reflecting element and an ytterbium-doped optical fiber positioned on an optical path between the high light reflecting element and the low light reflecting element;
The high reflection element is used for reflecting light in the resonance module back to the ytterbium-doped optical fiber; the ytterbium-doped fiber is used for absorbing at least part of the pump light entering the resonance module to generate the first signal laser; the low reflection element is used for partially reflecting the light passing through the ytterbium-doped optical fiber back to the ytterbium-doped optical fiber and partially outputting the first signal laser from the resonance module; the reflectivity of the low reflective element is less than the reflectivity of the high reflective element;
the pumping source is used for carrying out core pumping on the ytterbium-doped optical fiber, and the first signal laser wavelength comprises any single wavelength and/or any wave band between 970nm and 1000 nm;
the pump source comprises a sub pump source and a first gain module, the first gain module is used for absorbing sub beams emitted by the sub pump source and generating pump light, the pump source is a neodymium-doped optical fiber pump source, and the first gain module comprises the neodymium-doped optical fiber; the first gain module further comprises a germanium-doped optical fiber, and the germanium-doped optical fiber and the neodymium-doped optical fiber form a neodymium-doped germanium Raman mixed gain optical fiber; the core-to-cladding ratio of the ytterbium-doped optical fiber is 0.04-0.10; the wavelength range of the high reflective element and the low reflective element covers at least 970nm to 1000nm.
2. The laser of claim 1, wherein the sub-pump source emits sub-beams having any number of single wavelengths and/or wavelength bands between 700nm and 890 nm.
3. The laser of claim 2, wherein the first gain module is a fiber oscillator or an amplifier; the optical fiber oscillator includes: the optical fiber comprises a neodymium-doped optical fiber, a first reflecting element and a second reflecting element, wherein the neodymium-doped optical fiber is positioned on an optical path between the first reflecting element and the second reflecting element, and the reflectivity of the first reflecting element is larger than that of the second reflecting element.
4. A laser as claimed in claim 3 wherein the first gain module is an amplifier and further comprises a seed source for providing seed light to the neodymium-doped optical fibre, the seed source having a wavelength of any number of single wavelengths and/or wavelength bands between 900 and 940 nm.
5. The laser of claim 1, wherein the high light reflecting element is a fiber optic element, the high light reflecting element having a first fiber optic connection end; the low-reflection element is an optical fiber element and is provided with a second optical fiber connecting end; the two ends of the ytterbium-doped optical fiber are respectively welded with the first optical fiber connecting end and the second optical fiber connecting end; the resonance module is provided with a pump light input optical fiber and a laser output optical fiber; the pump source is welded with the pump light input optical fiber through the tail fiber, and the laser output optical fiber outputs the first signal laser through the laser output port.
6. The laser of claim 5, wherein the low reflective element has the laser output fiber, the laser output port and the second fiber optic connection end being located on either side of the low reflective element; the high reflection element is provided with a pumping light input optical fiber;
or,
the low reflection element is provided with a pumping light input optical fiber; the resonance module further comprises a first coupler, wherein the first coupler is used for connecting a tail fiber, a laser output optical fiber and the pump light input optical fiber of the pump source.
7. The laser of claim 6, wherein the first coupler is a wavelength division multiplexer for injecting the pump light through the pump light input fiber, separating the first signal laser light returned through the highly reflective element from the pump light, and outputting the first signal laser light through the laser light output fiber.
8. The laser of any one of claims 6 to 7, wherein the highly reflective element is a fiber grating or a fiber mirror; the low reflection element is a fiber grating or a fiber beam splitter;
wherein, the optic fibre speculum includes: the optical fiber transmission device comprises a reflector and a transmission optical fiber packaged with the reflector into a whole, wherein the transmission optical fiber is used for transmitting light transmitted through the ytterbium-doped optical fiber to the reflector and transmitting light reflected back by the reflector back to the ytterbium-doped optical fiber, and one end of the transmission optical fiber, which is far away from the reflector, is the first optical fiber connection end;
The optical fiber beam splitter comprises a second coupler, a beam splitter input optical fiber, a beam splitter output optical fiber and a retro-reflective optical fiber, and the beam splitter input optical fiber, the beam splitter output optical fiber and the retro-reflective optical fiber are all connected with the second coupler; one end of the beam splitter input optical fiber, which is away from the second coupler, is a second optical fiber connection end; the beam splitter output optical fiber is used for outputting the first signal laser; the two ends of the retroreflective optical fiber and the second coupler are connected with each other.
9. The laser of any one of claims 1 to 7, wherein at least one of the high and low reflective elements comprises a germanium-doped passive optical fiber; the wavelength range of the high reflective element at least partially overlaps the wavelength range of the low reflective element; the difference between the mode field diameter of the ytterbium-doped optical fiber and the mode field diameter of the high reflective element is less than 5 mu m, and the difference between the mode field diameter of the ytterbium-doped optical fiber and the mode field diameter of the low reflective element is less than 5 mu m.
10. The laser of claim 1, wherein the high reflectivity element has a reflectivity of greater than or equal to 90%; the reflectivity of the low-reflection element is 1% -60%.
11. The laser of claim 1, wherein only ytterbium ions are doped in the ytterbium-doped fiber, the ytterbium-doped fiber has a length of 5cm to 100cm, and the ytterbium ion concentration is 1000ppm to 15000ppm; or alternatively, the first and second heat exchangers may be,
The ytterbium-doped fiber is doped with ytterbium ions and neodymium ions, wherein the concentration of the neodymium ions is 100 ppm-5000 ppm.
12. The laser of claim 1, wherein the pump light is single-mode light including a fundamental mode or the pump light is near single-mode light, the number of modes of the near single-mode light being less than or equal to 4;
the ytterbium-doped optical fiber is a single-mode optical fiber only supporting the transmission of a fundamental mode; or the ytterbium-doped optical fiber is a few-mode optical fiber supporting single-mode laser oscillation, and the normalized frequency of the few-mode optical fiber is smaller than 3.5.
13. The laser of claim 1, wherein the ytterbium doped fiber is bent.
14. A laser as defined in claim 1, further comprising: the second gain module is used for converting the first signal laser into second signal laser under the pumping of the first signal laser, and the second signal laser is different from the first signal laser in wavelength or power.
15. The laser of claim 14, wherein the wavelength of the second signal laser is 1.3 μm to 1.8 μm; the second gain module comprises one or a combination of two of an erbium-doped fiber and an erbium-ytterbium co-doped fiber.
16. An optical device, comprising: a laser as claimed in any one of claims 1 to 15 for emitting a signal laser to a workpiece for inspection or machining of the workpiece.
17. The optical device of claim 16, further comprising: and the detection device is used for collecting detection light formed by the signal laser emitted by the laser after being reflected, scattered, diffracted or transmitted by the workpiece, and acquiring information to be detected of the object to be detected according to the detection light.
18. A method of producing an optical device according to claim 16 or 17, comprising:
the laser is caused to generate a signal laser,
causing the laser to generate a signal laser includes: causing the pump source to generate pump light; the pump light is input to the resonance module, the resonance module absorbs the pump light and generates oscillation, and first signal laser is output; the wavelength of the first signal laser is any single wavelength and/or wave band between 970nm and 1000nm;
and enabling the signal laser to irradiate a workpiece, and processing or detecting the workpiece.
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| CN106911059A (en) * | 2017-02-24 | 2017-06-30 | 中国人民解放军国防科学技术大学 | All optical fibre structure 980nm wave band high-power fiber oscillators |
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| US5790722A (en) * | 1996-04-16 | 1998-08-04 | Hughes Electronics | High power optical fiber amplifier/laser system |
| CN101355225A (en) * | 2008-09-27 | 2009-01-28 | 北京工业大学 | Watt-level 980nm single-mode Ytterbium-doped fiber laser and its frequency doubling system |
| CN103682965A (en) * | 2013-12-31 | 2014-03-26 | 中国人民解放军国防科学技术大学 | All-fiber-structure 980 nm band composite cavity single mode fiber laser device |
| CN105790049A (en) * | 2014-12-23 | 2016-07-20 | 山东海富光子科技股份有限公司 | Single-mode and all-fiber master oscillator |
| CN106169689A (en) * | 2016-08-25 | 2016-11-30 | 天津大学 | Auxiliary chamber pumping erbium-ytterbium co-doped fiber laser instrument |
| CN106911059A (en) * | 2017-02-24 | 2017-06-30 | 中国人民解放军国防科学技术大学 | All optical fibre structure 980nm wave band high-power fiber oscillators |
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