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CN114122183B - Integrated flexible filter paper-based calcium niobate ultraviolet detector and preparation method and application thereof - Google Patents

Integrated flexible filter paper-based calcium niobate ultraviolet detector and preparation method and application thereof Download PDF

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CN114122183B
CN114122183B CN202111411684.0A CN202111411684A CN114122183B CN 114122183 B CN114122183 B CN 114122183B CN 202111411684 A CN202111411684 A CN 202111411684A CN 114122183 B CN114122183 B CN 114122183B
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filter paper
calcium niobate
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calcium
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CN114122183A (en
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张勇
刘玉申
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Changshu Institute of Technology
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169Thin semiconductor films on metallic or insulating substrates
    • H10F77/1698Thin semiconductor films on metallic or insulating substrates the metallic or insulating substrates being flexible
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention discloses an integrated flexible filter paper-based calcium niobate ultraviolet detector and a preparation method thereof, comprising the following steps: (a) preparing a two-dimensional perovskite type calcium niobate nano sheet. (b) And (3) filtering the calcium niobate nanosheet solution to obtain the filter paper calcium niobate composite membrane. (c) And placing the filter paper calcium niobate composite membrane in a dryer overnight, and then removing a layer of calcium niobate film on the surface to obtain the integrated filter paper calcium niobate. (d) And constructing an integrated flexible filter paper calcium niobate ultraviolet detector, and testing the flexibility and photoelectric property of the device. The invention discloses an integrated flexible filter paper calcium niobate ultraviolet detector and a preparation method thereof for the first time, the experimental method is simple and low in cost, and the filter paper calcium niobate ultraviolet detector has excellent photoelectric performance under multiple bending, so that the application of two-dimensional materials and related nano structures and filter papers in the field of constructing flexible photoelectric devices is greatly expanded.

Description

一体化柔性滤纸基铌酸钙紫外探测器及其制备方法与用途Integrated flexible filter paper-based calcium niobate UV detector and its preparation method and use

技术领域Technical field

本发明属于柔性光电探测器技术领域,更具体的涉及一体化柔性滤纸铌酸钙紫外探测器及其制备方法。The invention belongs to the technical field of flexible photoelectric detectors, and more specifically relates to an integrated flexible filter paper calcium niobate ultraviolet detector and a preparation method thereof.

背景技术Background technique

当前高度智能化和集成化设备的发展取得了巨大进步,科学和技术有望以不同形式的可穿戴设备应用于日常生活中。其中光电探测器将光转换为其他信号,广泛应用于臭氧传感、火焰探测、医学成像、忆阻器、天文探测等领域。将此类设备应用于可穿戴设备上,利用光电探测原理来满足实际要求,也为实现智能监控提供了机会。一般采用两种方法来实现可穿戴/灵活的光电探测器。a选择固有的柔性材料,如聚合物、纸、纤维和超薄半导体层。b对材料进行修改以形成柔性结构或增加材料的柔性,如皱折和螺旋结构。然而目前柔性光电探测器的构筑方法通常都是通过柔性衬底来实现的。我们需要在探索合适的材料、设计新颖的结构、高效的制造方法方面继续探索研究。The current development of highly intelligent and integrated devices has made tremendous progress, and science and technology are expected to be used in daily life in different forms of wearable devices. Among them, photodetectors convert light into other signals and are widely used in ozone sensing, flame detection, medical imaging, memristors, astronomical detection and other fields. Applying such devices to wearable devices, using photoelectric detection principles to meet practical requirements, also provides opportunities for intelligent monitoring. Two approaches are generally adopted to implement wearable/flexible photodetectors. aSelect inherently flexible materials such as polymers, paper, fibers and ultra-thin semiconductor layers. b Modification of materials to form flexible structures or increase the flexibility of materials, such as wrinkles and spiral structures. However, current construction methods for flexible photodetectors are usually implemented through flexible substrates. We need to continue to explore suitable materials, design novel structures, and efficient manufacturing methods.

KCa2Nb3O10是一种n型半导体,具有层状钙钛矿结构,它由带负电荷的NbO6片组成,相邻的两层之间由一层K+离子隔开。特别令人感兴趣的是经过固相反应-质子化-液相剥离的二维钙钛矿型铌酸钙(Ca2Nb3O10)纳米片。这些Ca2Nb3O10纳米片已被证明是一种优良的材料,广泛应用于电介质、铁电体、热催化和水分解等领域。然而目前为止,还没有公开的,简单的,可实际应用的方法来实现柔性Ca2Nb3O10纳米片光电探测技术应用。因此,探索一种基于Ca2Nb3O10纳米片的柔性高效光电探测器技术具有重要意义。KCa 2 Nb 3 O 10 is an n-type semiconductor with a layered perovskite structure, which consists of negatively charged NbO 6 sheets, with two adjacent layers separated by a layer of K+ ions. Of particular interest are two-dimensional perovskite calcium niobate (Ca 2 Nb 3 O 10 ) nanosheets that undergo solid-phase reaction-protonation-liquid phase exfoliation. These Ca 2 Nb 3 O 10 nanosheets have proven to be an excellent material and are widely used in fields such as dielectrics, ferroelectrics, thermocatalysis, and water splitting. However, so far, there is no published, simple, and practically applicable method to realize the application of flexible Ca 2 Nb 3 O 10 nanosheet photodetection technology. Therefore, it is of great significance to explore a flexible and efficient photodetector technology based on Ca 2 Nb 3 O 10 nanosheets.

发明内容Contents of the invention

为了获得一体化柔性可穿戴Ca2Nb3O10纳米片紫外探测器,本发明设计了一种用柔性滤纸为载体,自带弯曲特性的Ca2Nb3O10纳米片与滤纸孔洞完美地结合在一起,实现一体化柔性滤纸Ca2Nb3O10纳米片紫外探测器。本发明制备工艺流程简单、成本低、同时该器件具有良好的柔性光电性能,提供了一体化柔性光电器件构筑的新方法。In order to obtain an integrated flexible wearable Ca 2 Nb 3 O 10 nanosheet UV detector, the present invention designed a Ca 2 Nb 3 O 10 nanosheet with flexible filter paper as a carrier, which has its own bending characteristics and is perfectly combined with the filter paper holes. Together, we realize an integrated flexible filter paper Ca 2 Nb 3 O 10 nanosheet UV detector. The preparation process of the invention is simple, the cost is low, and the device has good flexible optoelectronic properties, and provides a new method for constructing integrated flexible optoelectronic devices.

为达到上述发明创造目的,本发明采用下述技术方案:一种一体化柔性滤纸基铌酸钙紫外探测器,由二维钙钛矿型铌酸钙纳米片填充在滤纸孔洞形成一体化滤纸铌酸钙,最后在一体化滤纸铌酸钙表面蒸镀电极而成。In order to achieve the above-mentioned invention and creation purpose, the present invention adopts the following technical solution: an integrated flexible filter paper-based calcium niobate ultraviolet detector, which is filled with two-dimensional perovskite calcium niobate nanosheets in the filter paper holes to form an integrated filter paper niobium Calcium niobate is formed by evaporating electrodes on the surface of integrated filter paper calcium niobate.

优选地,所述滤纸为常规商用的通用滤纸。Preferably, the filter paper is a conventional commercial general-purpose filter paper.

根据本发明的第二个方面,所述一体化柔性滤纸基铌酸钙紫外探测器制备方法,包括如下步骤:According to the second aspect of the present invention, the preparation method of the integrated flexible filter paper-based calcium niobate ultraviolet detector includes the following steps:

(a)制备二维钙钛矿型铌酸钙纳米片的水溶液;(a) Preparing an aqueous solution of two-dimensional perovskite calcium niobate nanosheets;

(b)以滤纸为滤膜,将铌酸钙纳米片溶液通过抽滤获得滤纸铌酸钙复合膜;(b) Using filter paper as a filter membrane, filter the calcium niobate nanosheet solution through suction filtration to obtain a filter paper calcium niobate composite membrane;

(c)将滤纸铌酸钙复合膜放置在干燥器中过夜,然后揭掉表面一层铌酸钙薄膜,即获得一体化滤纸铌酸钙;(c) Place the filter paper calcium niobate composite membrane in a desiccator overnight, and then peel off a layer of calcium niobate film on the surface to obtain an integrated filter paper calcium niobate;

(d)构筑一体化滤纸铌酸钙紫外探测器,并测试该器件的柔性光电性能。(d) Construct an integrated filter paper calcium niobate UV detector and test the flexible optoelectronic properties of the device.

优选地,步骤(a)所述二维钙钛矿型铌酸钙纳米片通过固相反应-质子化-液相剥离方法制备而成,并将其放置在去离子水中,获得铌酸钙纳米片溶液。获得的二维钙钛矿型铌酸钙纳米片面积大、质量高、呈现单层或少层二维钙钛矿型Ca2Nb3O10纳米片。Preferably, the two-dimensional perovskite calcium niobate nanosheets in step (a) are prepared by a solid-phase reaction-protonation-liquid phase exfoliation method, and are placed in deionized water to obtain calcium niobate nanosheets. tablet solution. The obtained two-dimensional perovskite calcium niobate nanosheets have a large area, high quality, and present single-layer or few-layer two-dimensional perovskite Ca 2 Nb 3 O 10 nanosheets.

优选地,步骤(b)所述通过抽滤获得滤纸铌酸钙复合膜是指在常压或加压的条件下使二维钙钛矿型铌酸钙纳米片的水溶液中水通过滤纸,二维钙钛矿型铌酸钙纳米片填充在滤纸孔洞形成一体化滤纸铌酸钙。Preferably, obtaining the filter paper calcium niobate composite membrane by suction filtration in step (b) means passing the water in the aqueous solution of the two-dimensional perovskite calcium niobate nanosheets through the filter paper under normal pressure or pressurized conditions. Dimensional perovskite calcium niobate nanosheets are filled in the filter paper holes to form integrated filter paper calcium niobate.

优选地,步骤(c)所述将滤纸铌酸钙复合膜放置在干燥器中过夜,然后揭掉表面一层铌酸钙薄膜,获得一体化滤纸铌酸钙。Preferably, in step (c), the filter paper calcium niobate composite membrane is placed in a desiccator overnight, and then a layer of calcium niobate film on the surface is peeled off to obtain an integrated filter paper calcium niobate.

优选地,步骤(d)所述构筑一体化滤纸铌酸钙紫外探测器是指通过硬掩模版在一体化滤纸铌酸钙表面蒸镀电极构筑光电探测器,通过测试该器件具有优异的柔性紫外光电性能。Preferably, constructing the integrated filter paper calcium niobate UV detector in step (d) means constructing a photoelectric detector by evaporating electrodes on the surface of the integrated filter paper calcium niobate through a hard mask. Through testing, the device has excellent flexible UV Optoelectronic properties.

根据本发明的另一个方面,本发明制备出的一体化滤纸铌酸钙紫外探测器用于柔性可穿戴光电器件。According to another aspect of the present invention, the integrated filter paper calcium niobate UV detector prepared by the present invention is used in flexible wearable optoelectronic devices.

本发明首次实现一体化滤纸铌酸钙紫外探测器同时具有良好的柔韧性和出色的光电性能。该制备方法简单、低成本,具有普适性,本发明具有突出优点:This invention realizes for the first time an integrated filter paper calcium niobate UV detector that has both good flexibility and excellent photoelectric properties. The preparation method is simple, low-cost and universal. The present invention has outstanding advantages:

1,本发明制备出的一体化滤纸铌酸钙紫外探测器成本低廉、方法简单、具有普适性。1. The integrated filter paper calcium niobate UV detector prepared by the present invention has low cost, simple method and universal applicability.

2,首次实现柔性衬底和柔性材料融合一体化,将在柔性可穿戴电子器件方面具有重要的推广和应用价值。2. For the first time, the integration of flexible substrates and flexible materials has been achieved, which will have important promotion and application value in flexible wearable electronic devices.

附图说明Description of drawings

图1为实施例1制备的二维铌酸钙纳米片的表征图,其中a为扫描电镜图(SEM图);b为原子力显微镜照片图;Figure 1 is a characterization diagram of the two-dimensional calcium niobate nanosheets prepared in Example 1, where a is a scanning electron microscope image (SEM image); b is an atomic force microscope photo image;

图2为实施例抽滤后滤纸铌酸钙复合膜图,a为滤纸铌酸钙复合膜通过剥离分别获得铌酸钙薄膜和一体化滤纸铌酸钙,b为一体化滤纸铌酸钙的低倍SEM图,c为一体化滤纸铌酸钙的高倍SEM图;Figure 2 is a diagram of the filter paper calcium niobate composite membrane after suction filtration in the embodiment. a is the filter paper calcium niobate composite membrane obtained by peeling off the calcium niobate film and the integrated filter paper calcium niobate. b is the low density of the integrated filter paper calcium niobate. SEM image, c is a high-magnification SEM image of integrated filter paper calcium niobate;

图3为实施例一体化滤纸铌酸钙柔性测试图;Figure 3 is a test chart of the calcium niobate flexibility of the integrated filter paper according to the embodiment;

图4为实施例一体化滤纸铌酸钙紫外探测器的柔性光电性能图,其中a为平铺和弯曲下的I-V图,b为平铺和弯曲下的I-T图,c为不同弯曲次数的I-T图。Figure 4 is a flexible photoelectric performance diagram of the integrated filter paper calcium niobate ultraviolet detector according to the embodiment, where a is the I-V diagram under flat and bent conditions, b is the I-T diagram under flat and bent conditions, and c is the I-T diagram under different bending times. picture.

具体实施方式Detailed ways

实施例1Example 1

(a)通过固相反应-质子化-液相剥离方法获得单层或少层钙钛矿型Ca2Nb3O10纳米片,并将其放置在去离子水中,获得Ca2Nb3O10纳米片溶液,其中图1为二维钙钛矿型铌酸钙纳米片。(a) Obtain single-layer or few-layer perovskite Ca 2 Nb 3 O 10 nanosheets through solid-phase reaction-protonation-liquid phase exfoliation method, and place them in deionized water to obtain Ca 2 Nb 3 O 10 Nanosheet solution, where Figure 1 shows two-dimensional perovskite calcium niobate nanosheets.

图1中a中结果表明获得尺寸较大,相对均匀的Ca2Nb3O10纳米片,b中结果表明获得单层或少层的Ca2Nb3O10纳米片。The results in a in Figure 1 show that larger-sized, relatively uniform Ca 2 Nb 3 O 10 nanosheets are obtained, and the results in b show that single-layer or few-layer Ca 2 Nb 3 O 10 nanosheets are obtained.

(b)将Ca2Nb3O10纳米片溶液通过简单的抽滤即获得滤纸铌酸钙复合膜。(b) The filter paper calcium niobate composite membrane is obtained by simple suction filtration of the Ca 2 Nb 3 O 10 nanosheet solution.

(c)将滤纸铌酸钙复合膜放置在干燥器中过夜,然后揭掉表面一层铌酸钙薄膜,即获得一体化滤纸铌酸钙,图2所示。(c) Place the filter paper calcium niobate composite membrane in a desiccator overnight, and then peel off a layer of calcium niobate film on the surface to obtain an integrated filter paper calcium niobate, as shown in Figure 2.

在揭掉表面一层铌酸钙纳米片薄膜后,就可获得一体化滤纸铌酸钙薄膜,通过SEM图即可看到铌酸钙纳米片和滤纸融为一体。After peeling off the surface layer of calcium niobate nanosheet film, the integrated filter paper calcium niobate film can be obtained. From the SEM image, you can see that the calcium niobate nanosheet and filter paper are integrated into one.

(d)通过硬掩模版在滤纸基表面蒸镀电极构筑一体化滤纸铌酸钙紫外探测器,并测试该器件在柔性状态下的光电性能(图3,光电测试测试为半导体表征系统(Keithley4200),结果表明该器件具有优异的柔性光电性能,图4所示。即该器件具有较高的光电流1.5nA,较大的开光比200,并在弯曲100次后仍然保持其良好的光电性能。(d) Build an integrated filter paper calcium niobate UV detector by evaporating electrodes on the filter paper base surface through a hard mask, and test the photoelectric performance of the device in a flexible state (Figure 3, the photoelectric test test is a semiconductor characterization system (Keithley4200) , the results show that the device has excellent flexible optoelectronic properties, as shown in Figure 4. That is, the device has a high photocurrent of 1.5nA, a large light-on ratio of 200, and still maintains its good optoelectronic properties after being bent 100 times.

图3表明我们首次成功制备一体化滤纸铌酸钙薄膜,图4表明一体化滤纸薄膜具有良好的柔韧性和可弯折性。这将在未来可穿戴柔性电子信息设备中具有巨大的应用前景。Figure 3 shows that we successfully prepared an integrated filter paper calcium niobate film for the first time, and Figure 4 shows that the integrated filter paper film has good flexibility and bendability. This will have great application prospects in future wearable flexible electronic information devices.

实施例2Example 2

(a)通过固相反应-质子化-液相剥离方法获得单层或少层钙钛矿型铌酸锶(Sr2Nb3O10)纳米片,并将其放置在去离子水中,获得Sr2Nb3O10纳米片溶液。(a) Obtain single-layer or few-layer perovskite strontium niobate (Sr 2 Nb 3 O 10 ) nanosheets through solid-state reaction-protonation-liquid phase exfoliation method, and place them in deionized water to obtain Sr 2 Nb 3 O 10 nanosheet solution.

(b)将Sr2Nb3O10纳米片溶液通过抽滤获得滤纸铌酸锶复合膜。(b) The Sr 2 Nb 3 O 10 nanosheet solution is filtered to obtain a filter paper strontium niobate composite membrane.

(c)将滤纸铌酸锶复合膜放置在干燥器中过夜,然后揭掉表面一层铌酸锶薄膜,即获得一体化滤纸铌酸锶。(c) Place the filter paper strontium niobate composite membrane in a desiccator overnight, and then peel off a layer of strontium niobate film on the surface to obtain an integrated filter paper strontium niobate.

(d)通过硬掩模版在一体化滤纸铌酸锶表面蒸镀电极构筑一体化滤纸铌酸锶紫外探测器,并测试该器件在柔性状态下的光电性能,结果表明该器件具有优异的柔性光电性能。(d) An integrated filter paper strontium niobate UV detector was constructed by evaporating electrodes on the surface of the integrated filter paper strontium niobate through a hard mask, and the photoelectric performance of the device in a flexible state was tested. The results showed that the device has excellent flexible photoelectric properties. performance.

Claims (5)

1.一种一体化柔性滤纸基铌酸钙紫外探测器,由二维钙钛矿型铌酸钙纳米片填充在滤纸孔洞形成一体化滤纸铌酸钙,最后在一体化滤纸铌酸钙表面蒸镀电极而成;1. An integrated flexible filter paper-based calcium niobate UV detector, which is filled with two-dimensional perovskite calcium niobate nanosheets in the filter paper holes to form integrated filter paper calcium niobate, and finally evaporates on the surface of the integrated filter paper calcium niobate Made of electrode plating; 所述一种一体化柔性滤纸基铌酸钙紫外探测器的制备方法,包括如下步骤:The preparation method of the integrated flexible filter paper-based calcium niobate ultraviolet detector includes the following steps: (a)制备二维钙钛矿型铌酸钙纳米片的水溶液,二维钙钛矿型铌酸钙纳米片为Ca2Nb3O10纳米片;(a) Prepare an aqueous solution of two-dimensional perovskite calcium niobate nanosheets. The two-dimensional perovskite calcium niobate nanosheets are Ca 2 Nb 3 O 10 nanosheets; (b)以滤纸为滤膜,将二维钙钛矿型铌酸钙纳米片的水溶液通过抽滤获得滤纸铌酸钙复合膜;(b) Using filter paper as a filter membrane, filter the aqueous solution of two-dimensional perovskite calcium niobate nanosheets through suction filtration to obtain a filter paper calcium niobate composite membrane; (c)将滤纸铌酸钙复合膜放置在干燥器中过夜,然后揭掉表面一层铌酸钙薄膜,即获得一体化滤纸铌酸钙;(c) Place the filter paper calcium niobate composite membrane in a desiccator overnight, and then peel off a layer of calcium niobate film on the surface to obtain an integrated filter paper calcium niobate; (d)构筑一体化柔性滤纸基铌酸钙紫外探测器,并测试该一体化柔性滤纸基铌酸钙紫外探测器的柔性光电性能。(d) Construct an integrated flexible filter paper-based calcium niobate UV detector, and test the flexible photoelectric performance of the integrated flexible filter paper-based calcium niobate UV detector. 2.根据权利要求1所述的一体化柔性滤纸基铌酸钙紫外探测器,其特征在于:步骤(a)所述二维钙钛矿型铌酸钙纳米片通过固相反应-质子化-液相剥离方法制备而成。2. The integrated flexible filter paper-based calcium niobate ultraviolet detector according to claim 1, characterized in that: the two-dimensional perovskite calcium niobate nanosheets in step (a) pass through solid-phase reaction-protonation- Prepared by liquid phase exfoliation method. 3.根据权利要求1所述的一体化柔性滤纸基铌酸钙紫外探测器,其特征在于:步骤(b)所述通过抽滤获得滤纸铌酸钙复合膜是指在常压或加压的条件下使二维钙钛矿型铌酸钙纳米片的水溶液中水通过滤纸,二维钙钛矿型铌酸钙纳米片填充在滤纸孔洞形成滤纸铌酸钙复合膜。3. The integrated flexible filter paper-based calcium niobate ultraviolet detector according to claim 1, characterized in that: obtaining the filter paper calcium niobate composite membrane through suction filtration in step (b) means under normal pressure or pressurization. Under the conditions, water in the aqueous solution of two-dimensional perovskite calcium niobate nanosheets is allowed to pass through the filter paper, and the two-dimensional perovskite calcium niobate nanosheets fill the holes of the filter paper to form a filter paper calcium niobate composite membrane. 4.根据权利要求1所述的一体化柔性滤纸基铌酸钙紫外探测器,其特征在于:步骤(d)所述构筑一体化柔性滤纸基铌酸钙紫外探测器是指通过硬掩模版在一体化滤纸铌酸钙表面蒸镀电极构筑一体化柔性滤纸基铌酸钙紫外探测器。4. The integrated flexible filter paper-based calcium niobate ultraviolet detector according to claim 1, characterized in that: in step (d), constructing an integrated flexible filter paper-based calcium niobate ultraviolet detector means to use a hard mask to Integrated filter paper calcium niobate surface evaporated electrodes construct an integrated flexible filter paper-based calcium niobate UV detector. 5.一种权利要求1所述的一体化柔性滤纸基铌酸钙紫外探测器的用途,用于制备可穿戴电子器件。5. Use of the integrated flexible filter paper-based calcium niobate ultraviolet detector as claimed in claim 1 for the preparation of wearable electronic devices.
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